Processing apparatus and processing system

Abstract

The invention provides a processing apparatus and a processing system. A component transport device for transporting a consumable component includes a component storage portion, a container, a robot arm, and a moving mechanism. The component accommodating part accommodates the consumption component before use and the consumption component after use. The container has an opening connected to the processing device and a shutter for opening and closing the opening, and accommodates the component accommodating portion. The robot arm is provided in the container, has an end effector at the tip thereof, and is capable of transporting the used consumable component from the processing device through the opening and storing the consumable component in the component storage part, and taking out the consumable component before use from the component storage part and transporting the consumable component into the processing device through the opening. The movement mechanism has a power source and moves the component conveyance device.

Description

[0001] This application is a divisional application of application No. 202110187416.9, filed on February 18, 2021, entitled “Component handling device and processing system”. TECHNICAL FIELD

[0002] Various aspects and embodiments of the present application relate to a component handling device and a processing system. BACKGROUND

[0003] Inside a processing device that processes a substrate, there is a consumable component that is consumed as the processing of the substrate proceeds. Such a consumable component is replaced with a pre-use consumable component in a case where the amount of consumption becomes greater than a predetermined amount of consumption. When the consumable component is replaced, the processing of the substrate in the processing device is stopped, and a container of the processing device is opened to the atmosphere. Then, the post-use consumable component is manually taken out, and the pre-use consumable component is installed. Then, the container is closed again, the inside of the container is vacuumed, and the processing of the substrate is started again.

[0004] As such, when the consumable component is replaced, the inside of the processing device is opened to the atmosphere, so the processing device is vacuumed after the consumable component is replaced, and the stop time of the processing is lengthened. In addition, there are large components among the consumable components, so there are cases where the replacement is time-consuming.

[0005] In order to avoid such a situation, a replacement station having a pre-use consumable component and a replacement operator for replacing the consumable component is known (for example, refer to Patent Literature 1 below). In this replacement station, a processing device and the replacement station are connected, and after the replacement station is vacuumed, a shut-off valve between the processing device and the replacement station is opened. Then, the post-use consumable component is taken out from the processing device with the replacement operator in the replacement station, and is replaced with the pre-use consumable component loaded in the replacement station. Thus, the consumable component can be replaced without opening the inside of the processing device to the atmosphere, and the stop time of the processing is shortened. In addition, the replacement of the consumable component is performed by the replacement operator, not manually, so the replacement of the consumable component can be performed in a short time.

[0006] PRIOR ART DOCUMENTS

[0007] PATENT LITERATURE

[0008] Patent Literature 1: Japanese Patent Application Laid-Open No. 2017-85072 SUMMARY

[0009] PROBLEMS TO BE SOLVED BY THE INVENTION

[0010] The present application provides a component handling device and a processing system that can easily perform replacement of a consumable component.

[0011] Technical solution for solving technical problem

[0012] One aspect of the present application is a component handling device that handles a consumable component, including a component storage section, a container, a robot arm, and a moving mechanism. The component storage section stores a pre-use consumable component and a post-use consumable component. The container has an opening section connected to a processing device and a gate that opens and closes the opening section, and stores the component storage section. The robot arm is provided inside the container, and transports the post-use consumable component out of the processing device through the opening section and stores it in the component storage section, and transports the pre-use consumable component out of the component storage section and into the processing device through the opening section. The moving mechanism has a power source that moves the component handling device.

[0013] Effects of the invention

[0014] According to the aspects and embodiments of the present application, it is possible to easily perform replacement of a consumable component. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 FIG. 1 is a system configuration diagram showing one example of a processing system in one embodiment of the present application.

[0016] Figure 2 FIG. 2 is a diagram showing one example of a processing device in the first embodiment.

[0017] Figure 3 FIG. 3 is a diagram showing one example of an upper surface of a lower electrode.

[0018] Figure 4 FIG. 4 is a diagram showing one example of a lower surface of a peripheral ring.

[0019] Figure 5 FIG. 5 is an enlarged view showing one example of the shape of the opening section of the recess.

[0020] Figure 6 FIG. 6 is an enlarged cross-sectional view showing one example of the shape of the recess and the protrusion.

[0021] Figure 7 FIG. 7 is an enlarged cross-sectional view showing another example of the shape of the recess and the protrusion.

[0022] Figure 8 FIG. 8 is an enlarged cross-sectional view showing another example of the shape of the recess and the protrusion.

[0023] Figure 9 FIG. 9 is a diagram showing one example of a component handling device in the first embodiment.

[0024] Figure 10 FIG. 10 is a diagram showing one example of a case where a cartridge is taken out.

[0025] Figure 11is an enlarged sectional view showing one example of a connection portion of the processing device and the component carrying device in the first embodiment.

[0026] Figure 12 is an enlarged sectional view showing one example of a connection portion of the processing device and the component carrying device in the first embodiment.

[0027] Figure 13 is a block diagram showing one example of the control device.

[0028] Figure 14 is a diagram showing one example of the reservation table.

[0029] Figure 15 is a diagram for explaining one example of a timing of replacement of the edge ring.

[0030] Figure 16 is a flowchart showing one example of processing of the control device when causing the component carrying device to move to the position of the processing device that is a replacement target of the consumable component.

[0031] Figure 17 is a flowchart showing one example of processing of the control device when controlling the processing device that is a replacement target of the consumable component and the component carrying device connected to the processing device.

[0032] Figure 18 is a flowchart showing one example of processing of the component carrying device.

[0033] Figure 19 is a diagram showing one example of the processing device in the second embodiment.

[0034] Figure 20 is a diagram showing one example of the component carrying device in the second embodiment.

[0035] Figure 21 is an enlarged sectional view showing one example of a connection portion of the processing device and the component carrying device in the second embodiment.

[0036] Figure 22 is a diagram for explaining one example of a timing of replacement of the consumable component in the third embodiment.

[0037] Figure 23 is a diagram for explaining one example of a replacement method of the edge ring in the fourth embodiment.

[0038] Figure 24 is a diagram showing one example of the component carrying device in the fifth embodiment.

[0039] Explanation of Reference Numerals

[0040] W substrate

[0041] 10 processing system

[0042] 20 control device

[0043] 210 reservation table

[0044] 30 processing group

[0045] 31 vacuum transfer chamber

[0046] 32 load lock chamber

[0047] 33 atmospheric transfer chamber

[0048] 40 processing device

[0049] 41 chamber

[0050] 42 support portion

[0051] 421 lower electrode

[0052] 4214 convex portion

[0053] 422 electrostatic chuck

[0054] 423 edge ring

[0055] 4230 recessed portion

[0056] 43 upper electrode showerhead assembly

[0057] 44 gas supply portion

[0058] 45 RF power supply portion

[0059] 46 exhaust system

[0060] 50 component handling device

[0061] 51 container

[0062] 52 cassette

[0063] 53 robot arm

[0064] 530 end effector

[0065] 54 movement mechanism

[0066] 553 sensor

[0067] 554 exhaust device

[0068] 56 cleaning unit

[0069] 57 positional offset detection sensor DETAILED DESCRIPTION

[0070] Hereinafter, embodiments of the component carrying device and the processing system will be described in detail based on the drawings. In addition, the disclosed component carrying device and processing system are not limited by the following embodiments.

[0071] In the mass production process of products, the processing of substrates is performed by a plurality of processing devices, and thus replacement of consumable components is performed in processing devices provided at different positions. Therefore, a replacement station loaded with consumable components before use needs to be moved to the position of the processing device in which the consumable components need to be replaced.

[0072] In large consumable components, there are components having a weight of several kilograms. In addition, there are cases in which a robot that performs replacement of such large consumable components also has a weight of several tens of kilograms to several hundred kilograms as a whole. Therefore, the replacement station for performing replacement of consumable components also has a weight of several hundred kilograms or more as a whole. It is difficult for an operator to move such a heavy replacement station to the position of the processing device in which the consumable components need to be replaced.

[0073] Thus, the present application provides a technique capable of easily performing replacement of consumable components.

[0074] (First Embodiment)

[0075] [Structure of Processing System 10]

[0076] Figure 1 is a system configuration diagram showing one example of the processing system 10 in one embodiment of the present application. In one embodiment, the processing system 10 includes a control device 20, a plurality of processing groups 30, and a plurality of component carrying devices 50. The control device 20 communicates with each of the processing groups 30 and each of the component carrying devices 50, and controls each of the processing groups 30 and each of the component carrying devices 50.

[0077] Each of the processing groups 30 has a vacuum transfer chamber 31, a plurality of processing devices 40-1 to 40-6, a plurality of load lock chambers 32, and an atmospheric transfer chamber 33. In addition, hereinafter, in the case of making a general reference without distinguishing each of the plurality of processing devices 40-1 to 40-6, it is described as a processing device 40.

[0078] The vacuum transfer chamber 31 is connected to the plurality of processing devices 40 and the plurality of load lock chambers 32. In the present embodiment, the vacuum transfer chamber 31 is connected to six processing devices 40, but the vacuum transfer chamber 31 can be connected to five or fewer processing devices 40, or can be connected to seven or more processing devices 40. In addition, in the present embodiment, the vacuum transfer chamber 31 is connected to two load lock chambers 32, but the vacuum transfer chamber 31 can be connected to one load lock chamber 32, or can be connected to three or more load lock chambers 32.

[0079] Each processing unit 40 performs processes on the substrate, such as etching and film deposition, under a low-pressure environment. Each processing unit 40 is equipped with consumable parts consumed during the substrate processing. Each processing unit 40 and the vacuum transport chamber 31 are separated by a gate valve 400. Furthermore, each processing unit 40 is equipped with a gate 401 for removing used consumable parts and introducing unused consumable parts. Each processing unit 40 can be a unit that performs the same process in the manufacturing process, or it can be a unit that performs different processes.

[0080] Each load locking chamber 32 has gates 320 and 321 that switch the internal pressure from a preset vacuum level to atmospheric pressure, or from atmospheric pressure to a preset vacuum level. The load locking chamber 32 and the vacuum delivery chamber 31 are separated by gate 320. Furthermore, the load locking chamber 32 and the atmospheric delivery chamber 33 are separated by gate 321.

[0081] A robotic arm 310 is disposed within a vacuum transport chamber 31. The vacuum transport chamber 31 is maintained at a preset vacuum level. In this embodiment, the robotic arm 310 removes the substrate before processing from a load locking chamber 32, which has been depressurized to a preset vacuum level, and transports it to any processing device 40. Furthermore, the robotic arm 310 removes the processed substrate from the processing device 40 and transports it to another processing device 40 or the load locking chamber 32.

[0082] A load-locking chamber 32 is connected to an atmospheric transport chamber 33. A robotic arm 330 is installed within the atmospheric transport chamber 33. Furthermore, multiple loading sections 331 are provided within the atmospheric transport chamber 33, each connected to a container (e.g., a FOUP: Front Opening Unified Pod) capable of holding multiple pre-processed or post-processed substrates. The robotic arm 330 removes a pre-processed substrate from the container connected to the loading section 331 and transports it into the load-locking chamber 32. Similarly, the robotic arm 330 removes a post-processed substrate from the load-locking chamber 32 and transports it into the container connected to the loading section 331. Additionally, a calibration unit may be provided within the atmospheric transport chamber 33 to adjust the orientation of the substrate removed from the container connected to the loading section 331.

[0083] Each component handling device 50 contains a consumable part for use and a robotic arm. Following instructions from the control device 20, it moves to the position of the processing device 40 containing the consumable part requiring replacement. Then, the component handling device 50 connects to the processing device 40 containing the consumable part via a gate 401. After the vacuum inside the component handling device 50 is vented, the gate 401 is opened, and the robotic arm replaces the used consumable part with the original consumable part.

[0084] [Structure of processing device 40]

[0085] Figure 2 This is a diagram illustrating an example of the processing apparatus 40 in the first embodiment. In this embodiment, the processing apparatus 40 includes a chamber 41, a gas supply unit 44, an RF (Radio Frequency) power supply unit 45, and an exhaust system 46.

[0086] The chamber 41 has a support portion 42 and an upper electrode spray head assembly 43. The support portion 42 is disposed in the lower region of the processing space 41s within the chamber 41. The upper electrode spray head assembly 43 is disposed above the support portion 42 and functions as part of the top plate of the chamber 41.

[0087] The support portion 42 is configured to support the substrate W in the processing space 41s. In this embodiment, the support portion 42 includes a lower electrode 421 and an electrostatic chuck 422. The lower electrode 421 is an example of a base component. The electrostatic chuck 422 is configured to be disposed on the lower electrode 421 and to support the substrate W on its upper surface. An edge ring 423 is provided on the upper surface of the peripheral portion of the lower electrode 421. The edge ring 423 is disposed on the upper surface of the peripheral portion of the lower electrode 421 in a manner that surrounds the electrostatic chuck 422 and the substrate W. The upper surface of the electrostatic chuck 422 is an example of a mounting surface. The support portion 42 is an example of a mounting stage. The edge ring 423 is an example of a consumable component.

[0088] Through holes for the lifting pin 47 to pass through are formed at the bottom of the chamber 41, the lower electrode 421, and the electrostatic chuck 422. The lifting pin 47 is raised and lowered by the drive unit 470 when the substrate W is transported in and out. Thus, the robotic arm 310 can receive the substrate W transported into the chamber 41 and place it on the electrostatic chuck 422, and the processed substrate W can be delivered to the robotic arm 310 and transported out of the chamber 41.

[0089] Furthermore, through holes are formed at the bottom of chamber 41 and at the lower electrode 421 for the passage of the lifting pin 48. The lifting pin 48 is raised and lowered by the drive unit 480 when the edge ring 423 is replaced. Thus, the used edge ring 423 can be delivered to the robotic arm of the component transport device 50 and transported out of the chamber 41, and the unused edge ring 423 can be received from the robotic arm of the component transport device 50 and placed on the lower electrode 421.

[0090] Figure 3This diagram shows an example of the upper surface of the lower electrode 421. In region 4210 of the upper surface of the lower electrode 421 (the side on which the electrostatic chuck 422 is disposed), a plurality of through holes 4211 for the lifting pin 47 to pass through are provided, and the electrostatic chuck 422 is disposed there. In region 4212 surrounding region 4210, a plurality of through holes 4213 for the lifting pin 48 to pass through and a plurality of protrusions 4214 for positioning the edge ring 423 are provided, enabling the edge ring 423 to be disposed. In this embodiment, the plurality of protrusions 4214 are disposed on a circumference centered on the central axis X of the substrate W placed on the electrostatic chuck 422.

[0091] Figure 4 This diagram shows an example of the lower surface of the edge ring 423. A plurality of recesses 4230 are provided on the lower surface of the edge ring 423 (the side that contacts the lower electrode 421). In this embodiment, the plurality of recesses 4230 are arranged on a circumference centered on the central axis X of the substrate W placed on the electrostatic chuck 422. In this embodiment, three recesses 4230 are formed on the lower surface of the edge ring 423. Furthermore, it is acceptable to have multiple recesses 4230 formed on the lower surface of the edge ring 423; two or more may be formed.

[0092] Figure 5 This is an enlarged view showing an example of the shape of the opening of the recess 4230. In this embodiment, the shape of the opening of the recess 4230 is, for example, as shown below. Figure 5 As shown, the oblong hole has a dimension ΔW1 in the circumferential direction of a circle centered on the central axis X, and a dimension ΔW2 in the radial direction of the circle centered on the central axis X. Dimension ΔW1 is the size of the protrusion 4214 in the circumferential direction of the circle centered on the central axis X, plus a designed clearance. Dimension ΔW2 is larger than dimension ΔW1. In this embodiment, the recess 4230 is arranged on the edge ring 423 such that the major axis of the opening shape is in the radial direction of the circle centered on the central axis X.

[0093] Therefore, by placing the edge ring 423 on the lower electrode 421 with the protrusion 4214 inserted into the recess 4230, the central axis of the edge ring 423 can be made approximately aligned with the central axis X of the substrate W placed on the electrostatic chuck 422. Furthermore, during the processing of the substrate W, even if the edge ring 423 thermally expands, deviation between the central axis of the edge ring 423 and the central axis X of the substrate W placed on the electrostatic chuck 422 can be suppressed.

[0094] Additionally, the opening of the recess 4230 can also be, for example, Figure 6 The inclined section is shown. Figure 6This is an enlarged cross-sectional view showing an example of the shape of the recess 4230 and the protrusion 4214. The recess 4230 includes: a first sidewall portion 4230a extending in the depth direction of the recess 4230; and a first inclined portion 4230b that widens as it extends from the first sidewall portion 4230a toward the opening of the recess 4230. Therefore, when the edge ring 423 is placed on the lower electrode 421, even if the positions of the recess 4230 and the protrusion 4214 are slightly offset, the edge ring 423 can be placed on the lower electrode 421 in such a way that the protrusion 4214 is inserted into the recess 4230. Thus, it is easy to make the central axis of the edge ring 423 approximately coincide with the central axis X of the substrate W placed on the electrostatic chuck 422.

[0095] In addition, the inclined portion can also be, for example, Figure 7 As shown, it is formed on the side of the protrusion 4214. Figure 7 This is an enlarged cross-sectional view showing another example of the shape of the recess 4230 and the protrusion 4214. The protrusion 4214 of the lower electrode 421 is formed with: a second sidewall portion 4214b extending from the root of the protrusion 4214 in the protruding direction of the protrusion 4214; and a second inclined portion 4214a that narrows in width as it extends from the second sidewall portion 4214b toward the front end of the protrusion 4214. Furthermore, the inclined portion may also be, for example, as shown in... Figure 8 As shown, it is formed in both the concave portion 4230 and the convex portion 4214. Figure 8 This is an enlarged cross-sectional view showing another example of the shape of the concave portion 4230 and the convex portion 4214.

[0096] Furthermore, in this embodiment, a protrusion 4214 is provided on the lower electrode 421 and a recess 4230 is provided on the edge ring 423, but the disclosed technology is not limited to this. As long as a recess is provided on one of the lower electrode 421 and the edge ring 423 and a protrusion is provided on the other at the opposite position, it is acceptable to provide a recess on the lower electrode 421 and a protrusion on the edge ring 423.

[0097] Furthermore, in this embodiment, the opening of the recess 4230 provided in the edge ring 423 is elongated, but the disclosed technology is not limited to this. For example, the shape of the opening of the recess 4230 provided in the edge ring 423 may also be a groove extending radially in a circle centered on the central axis X. In this case, the protrusion 4214 of the lower electrode 421 may be a protrusion extending radially in a circle centered on the central axis X, with a shape corresponding to the shape of the opening of the recess 4230.

[0098] return Figure 2Continuing with the explanation, the upper electrode spray head assembly 43 is configured to supply one or more types of gas from the gas supply unit 44 into the processing space 41s. In this embodiment, the upper electrode spray head assembly 43 includes an electrode support 43d and an upper electrode 43e. The electrode support 43d has a gas inlet 43a and a gas diffusion chamber 43b, and supports the upper electrode 43e on its lower surface. The gas supply unit 44 and the gas diffusion chamber 43b are in fluid communication via the gas inlet 43a. A plurality of gas outlets 43c are formed in the electrode support 43d and the upper electrode 43e, and the gas diffusion chamber 43b and the processing space 41s are in fluid communication via the plurality of gas outlets 43c. In this embodiment, the upper electrode spray head assembly 43 is configured to supply one or more types of gas into the processing space 41s from the gas inlet 43a through the gas diffusion chamber 43b and the plurality of gas outlets 43c.

[0099] The gas supply unit 44 includes multiple gas sources 440a-440c, multiple flow controllers 441a-441c, and multiple valves 442a-442c. Gas source 440a is, for example, a supply source for processed gas, gas source 440b is, for example, a supply source for cleaning gas, and gas source 440c is, for example, a supply source for inactive gas. In this embodiment, the inactive gas is, for example, nitrogen. Flow controllers 441a-441c may include, for example, mass flow controllers or pressure-controlled flow controllers. Furthermore, the gas supply unit 44 may also include one or more flow regulating devices for adjusting or pulsedizing the flow rate of one or more processed gases.

[0100] The RF power supply unit 45 is configured to supply RF power to the lower electrode 421, the upper electrode spray head assembly 43, or one or more electrodes, such as one or more types of RF power. In this embodiment, the RF power supply unit 45 includes two RF generation units 450a and 450b and two matching circuits 451a and 451b. The RF power supply unit 45 in this embodiment is configured to supply first RF power to the lower electrode 421 from the RF generation unit 450a via the matching circuit 451a. The RF spectrum includes a portion of the electromagnetic spectrum in the range of 3 Hz to 3000 GHz. For electronic material processes such as semiconductor processes, the frequency used to generate the RF spectrum for plasma generation is preferably in the range of 100 kHz to 3 GHz, more preferably in the range of 200 kHz to 150 MHz. For example, the frequency of the first RF power may also be in the range of 27 MHz to 100 MHz.

[0101] Furthermore, the RF power supply unit 45 in this embodiment is configured to supply second RF power to the lower electrode 421 from the RF generation unit 450b via the matching circuit 451b. For example, the frequency of the second RF power may also be a frequency in the range of 400 [kHz] to 13.56 [MHz]. Alternatively, the RF power supply unit 45 may also have a DC (Direct Current) pulse generation unit instead of the RF generation unit 450b.

[0102] Furthermore, other embodiments are considered here, and illustrations are omitted for brevity. For example, in the RF power supply unit 45 of an alternative embodiment, the RF generation unit may supply a first RF power to the lower electrode 421, and another RF generation unit may supply a second RF power to the lower electrode 421. Alternatively, yet another RF generation unit may supply a third RF power to the upper electrode spray head assembly 43. Furthermore, in another alternative embodiment, a DC voltage may be applied to the upper electrode spray head assembly 43. Moreover, in various embodiments, the amplitude of one or more RF powers (i.e., the first RF power, the second RF power, etc.) may be pulsed or modulated. Amplitude modulation may include pulsed RF power amplitudes between an on-state and an off-state, or between multiple different on-states. Furthermore, the phase matching of the RF power may be controlled, and the phase matching of the amplitude modulation of multiple RF powers may be synchronous or asynchronous.

[0103] The exhaust system 46 is connected, for example, via a pressure control valve 460 to an exhaust port 41e located at the bottom of the chamber 41. The pressure control valve 460 is an example of a second pressure control unit. The exhaust system 46 may include a vacuum pump such as a pressure valve, a turbomolecular pump, a roughing pump, or a combination thereof. A piping 462 is connected between the pressure control valve 460 and the exhaust system 46 via a valve 461a. The piping 462 is connected to the space outside the gate 401. The gas discharged from the exhaust system 46 is discharged from the exhaust port of the exhaust system 46 to an exhaust gas treatment system for processing the discharged gas. In addition, the piping 462 is connected to the exhaust port of the exhaust system 46 via a valve 461b.

[0104] [Component Handling Device 50]

[0105] Figure 9This figure illustrates an example of the component handling device 50 in the first embodiment. The component handling device 50 includes a container 51, a box 52, multiple robotic arms 53a-53b, and a moving mechanism 54. The container 51 has: an opening 511 connected to the processing device 40; a gate 512 for opening and closing the opening 511; and a cover 510. The container 51 houses the box 52 and the multiple robotic arms 53a-53b. The gate 512 is an example of an opening and closing door. Furthermore, in the following text, without distinguishing the individual robotic arms among the multiple robotic arms 53a-53b, it will be referred to as robotic arm 53.

[0106] Box 52 stores multiple edge rings 423 before use. Box 52 is an example of a component storage unit. Furthermore, box 52 also stores used edge rings 423 that have been replaced with the used edge rings 423. Box 52 is placed on a worktable 521, which is raised and lowered by a drive unit 522. Thus, each robotic arm 53 can remove the edge rings 423 stored side-by-side in box 52 from box 52. When all the edge rings 423 in box 52 have become used edge rings 423, for example... Figure 10 As shown, open the lid 510, take out the box 52 from the container 51, and replace it with the box 52 containing the multiple edge rings 423 before use. Figure 10 This is a diagram illustrating an example of the situation where box 52 is removed.

[0107] Robotic arm 53a has an end effector 530a at its front end, which is used to remove the edge ring 423 from the housing 52 before use. Furthermore, robotic arm 53b transports the used edge ring 423 from the processing device 40 through the opening 511 and stores it in the housing 52. Then, robotic arm 53a transports the used edge ring 423 into the processing device 40 through the opening 511. In the following text, without distinguishing between the individual end effectors 530a and 530b, they will be collectively referred to as end effector 530.

[0108] In this embodiment, the end effector 530a for conveying the edge ring 423 before use and the end effector 530b for conveying the edge ring 423 after use are provided separately. This prevents the edge ring 423 before use from being contaminated by reaction byproducts or the like that shed from the edge ring 423 after use.

[0109] In this embodiment, the end effector 530a for conveying the edge ring 423 before use and the end effector 530b for conveying the edge ring 423 after use are moved by different robotic arms. However, the disclosed technology is not limited to this. The end effector for conveying the edge ring 423 before use and the end effector for conveying the edge ring 423 after use can be provided separately, or these two end effectors can be provided at the front end of a single robotic arm.

[0110] Furthermore, in this embodiment, the end effector 530b of the robotic arm 53b supports the lower surface of the edge ring 423 when the used edge ring 423 is removed from the processing device 40. This prevents reaction byproducts and the like from adhering to the edge ring 423 from attaching to the end effector 530a.

[0111] Furthermore, in this embodiment, the robotic arm 53a sequentially removes the unused edge rings 423, which are stored side-by-side in the vertical direction within the box 52, starting from the bottom. In addition, in this embodiment, the robotic arm 53b stores the used edge rings 423 in the storage area of ​​the box 52, which is now empty due to the removal of the unused edge rings 423. Thus, the used edge rings 423 are stored in the box 52 at a position lower than the unused edge rings 423. Therefore, it is possible to prevent reaction byproducts or the like, which detach from the used edge rings 423, from falling and adhering to the unused edge rings 423.

[0112] Furthermore, within the box 52, the space for storing the edge rings 423 can be divided according to each stored edge ring 423. Thus, regardless of where the used edge ring 423 is stored within the box 52, it is possible to prevent reaction byproducts and other substances that have detached from the used edge ring 423 from falling and adhering to the unused edge ring 423.

[0113] The moving mechanism 54 has a main body 540 and wheels 541. A power source, such as a battery, and a steering mechanism are provided within the main body 540. The wheels 541 rotate due to the power source within the main body 540, causing the component transport device 50 to move in a direction controlled by the steering mechanism within the main body 540. Furthermore, the moving mechanism 54 can be configured to move the component transport device 50, or it can be a walking type or similar device that moves the component transport device 50 using methods other than the wheels 541.

[0114] Furthermore, the component handling device 50 includes a communication unit 550, a control unit 551, a storage unit 552, a sensor 553, and an exhaust device 554. The exhaust device 554 is an example of a first pressure control unit. The communication unit 550 is, for example, a wireless communication circuit that communicates wirelessly with the control device 20. The sensor 553 senses the surroundings of the component handling device 50 and outputs the sensing results to the control unit 551. In this embodiment, the sensor 553 is, for example, an image sensor that captures images of the surroundings of the component handling device 50 and outputs them to the control unit 551. The sensor 553 is an example of a first sensor.

[0115] The exhaust device 554 is connected to the space inside the container 51 via valve 556a and pipe 555. The exhaust device 554 draws gas from the space inside the container 51 via valve 556a and pipe 555, and discharges the drawn gas to the outside of the component transport device 50 through exhaust port 557. This reduces the pressure inside the container 51 to a preset vacuum level, reducing moisture and other contaminants adhering to the edge ring 423 before use. Furthermore, the pressure inside the container 51 can be lower than the pressure inside the processing device 40, so when the component transport device 50 is connected to the processing device 40 and the gate 512 is open, an airflow from the processing device 40 to the container 51 can be generated. This prevents particles inside the container 51 from entering the processing device 40.

[0116] In addition, piping 555 is connected to vent 557 via valve 556b. When replacing box 52, etc., valve 556b is opened to restore the space inside container 51 to atmospheric pressure.

[0117] The storage unit 552 is a ROM (Read Only Memory), HDD (Hard Disk Drive), or SSD (Solid State Drive), etc., that stores data and programs used by the control unit 551. The control unit 551 is, for example, a processor such as a CPU (Central Processing Unit) or DSP (Digital Signal Processor), which controls the entire component transport device 50 by reading and executing the programs stored in the storage unit 552.

[0118] The control unit 551 controls the moving mechanism 54 by using the sensing results of the sensor 553, for example, to move the component transport device 50 to the position of the processing device 40 indicated by the control device 20.

[0119] Furthermore, a cleaning unit 56 is provided inside the container 51 for cleaning the end effector 530b of the robotic arm 53b. The cleaning unit 56 cleans the end effector 530b used for conveying the used edge ring 423, for example, by high-pressure gas purging or ice spraying. By cleaning the end effector 530b after conveying the used edge ring 423, it is possible to prevent particles adhering to the end effector 530b from the used edge ring 423 from scattering into the space inside the container 51.

[0120] Additionally, a position offset detection sensor 57 is provided near the opening 511 of the container 51. This sensor detects the position offset of the edge ring 423 as it passes through the opening 511 before use. Alternatively, the position offset detection sensor 57 may also be provided near the gate 401 of the processing device 40. The position offset detection sensor 57 is an example of a second sensor. In this embodiment, the position offset detection sensor 57 is, for example, a light-shielding sensor. The position offset of the edge ring 423 detected by the position offset detection sensor 57 is output to the control unit 551. The control unit 551 controls the robotic arm 53a to correct the offset detected by the position offset detection sensor 57, thereby adjusting the position of the edge ring 423. Furthermore, the control unit 551 controls the robotic arm 53a to place the adjusted edge ring 423 onto the lifting pin 48 protruding from the lower electrode 421. Therefore, when the lifting pin 48 is lowered, the protrusion 4214 of the lower electrode 421 can be inserted into the recess 4230 of the edge ring 423, and the edge ring 423 can be positioned with high precision in the pre-set processing device 40.

[0121] [Connection between processing device 40 and component transport device 50]

[0122] Figure 11 and Figure 12 This is an enlarged cross-sectional view showing an example of the connection between the processing device 40 and the component transport device 50 in the first embodiment. In this embodiment, a protrusion 410 is provided on the side of the chamber 41 of the processing device 40 connected to the component transport device 50. Furthermore, a recess 513 with a shape corresponding to the protrusion 410 is provided on the side of the container 51 of the component transport device 50 connected to the processing device 40. The protrusion 410 and the recess 513, when the processing device 40 and the component transport device 50 are connected, for example... Figure 12 The parts are fitted together as shown, thereby aligning the positions of the auxiliary processing device 40 and the component transport device 50.

[0123] Furthermore, a sealing member 514, such as an O-ring, is provided on the side of the container 51 of the component transport device 50 to surround the opening 511. This improves the airtightness of the space 60 surrounded by the chamber 41, gate 401, container 51, and gate 512. After connecting the processing device 40 and the component transport device 50, the gas in the space 60 is discharged through the piping 462, thereby reducing the pressure in the space 60 to a preset vacuum level. By reducing the pressure in the space 60, the connection between the processing device 40 and the component transport device 50 becomes more secure. Furthermore, when disconnecting the processing device 40 from the component transport device 50, the pressure in the space 60 is restored to atmospheric pressure by opening the valve 461b of the processing device 40.

[0124] Alternatively, it is preferable to provide inclined portions in the protrusions 410 and 513 as in the protrusions 4214 of the lower electrode 421 and the recesses 4230 of the edge ring 423.

[0125] [Structure of control device 20]

[0126] Figure 13 This is a block diagram illustrating an example of a control device 20. The control device 20 includes a storage unit 21, a control unit 22, a wireless communication unit 23, and a wired communication unit 24. The wireless communication unit 23 is, for example, a wireless communication circuit that communicates wirelessly with each component transport device 50 via an antenna 25. The wired communication unit 24 is, for example, a NIC (Network Interface Card) that communicates with each processing group 30. Furthermore, the control device 20 can also communicate wirelessly with each processing group 30.

[0127] Storage unit 21 is a ROM, HDD, or SSD, etc., that stores data and programs used by control unit 22. For example, storage within storage unit 21 may contain... Figure 14 The appointment form 210 shown is an example of this.

[0128] Figure 14 This is a diagram illustrating an example of a reservation table 210. The reservation table 210 stores component IDs, processing device IDs, replacement date and time, RF cumulative time, next replacement date, and component transport device IDs. The component ID identifies each edge ring 423. The processing device ID identifies the processing device 40 that has the edge ring 423 installed using the corresponding component ID. The replacement date and time is the date and time when the edge ring 423 was replaced. The RF cumulative time indicates the cumulative processing time performed in the processing device 40 using RF power. The next replacement date is the date and time of the next replacement of the edge ring 423. The component transport device ID identifies the component transport device 50 that has reserved the operation to replace the edge ring 423 using the corresponding component ID.

[0129] The control unit 22 is, for example, a processor such as a CPU or DSP, which controls the entire control device 20 by reading and executing the program stored in the storage unit 21.

[0130] [Replacement time for consumable parts]

[0131] Figure 15 This is a diagram illustrating an example of the replacement timing of the edge ring 423. The control unit 22 of the control device 20 estimates the replacement period t1 of each edge ring 423 and registers the estimated replacement period t1 in the "Next Replacement Period" column of the reservation table 210. If the substrate W has not been processed after the edge ring 423 has been replaced, the control device 20 will register the standard replacement period t1 estimated based on the "Replacement Date and Time" of the edge ring 423 in the "Next Replacement Period" column.

[0132] On the other hand, after the edge ring 423 has been replaced and the substrate W has been processed, the control device 20 registers the replacement period t1, inferred from the "replacement date and time" and "RF cumulative time" of the edge ring 423, in the "next replacement period" column. The control unit 22, for example, infers the date and time when the "RF cumulative time" will reach a preset value based on the trend of changes in the "RF cumulative time" since the "replacement date and time," and registers the inferred date and time in the "next replacement period" column. The control unit 22 updates the "next replacement period" whenever the "RF cumulative time" is updated. The process of inferring the replacement period of the edge ring 423 is an example of the first inference process.

[0133] In this embodiment, the control unit 22 infers the replacement period t1 of the edge ring 423 based on the "RF cumulative time," but the disclosed technology is not limited to this. For example, the control unit 22 may also infer the replacement period t1 of the edge ring 423 based on at least one of "RF cumulative time," "RF cumulative power," "scheme cumulative time," "weight change of consumable components," and "size change of consumable components." "RF cumulative power" refers to the product of the processing time performed in the processing device 40 using RF power and its power value, and "scheme cumulative time" refers to the cumulative time of a specific processing scheme in which consumable components are consumed in particularly large quantities.

[0134] Furthermore, for each edge ring 423, the control unit 22 determines the final end time t2 of the processing of the substrate W in the processing apparatus 40 during the period before the "next replacement period". In this embodiment, the control unit 22 determines the end of processing on a batch basis for the substrate W. This avoids large changes in the processing environment within a batch. Alternatively, as another example, the control unit 22 may determine the end of processing on a per-substrate basis for the substrate W.

[0135] After processing ends at time t2, the processing unit 40 prepares for replacing the edge ring 423 during a preparation time ΔT1. The preparation time ΔT1 is the time required for gas replacement within the processing unit 40, pressure adjustment within the processing unit 40, and temperature stabilization of the edge ring 423. The control unit 22 determines time t3, after the preparation time ΔT1 has elapsed from time t2, as the replaceable time for the edge ring 423. The process of determining the replaceable time t3 is an example of a determination process.

[0136] In order to replace the edge ring 423 at the replaceable time t3, preparations for replacing the edge ring 423 need to be made after the component handling device 50 is connected to the processing device 40. The preparation time ΔT2 is the time when the space 60 (refer to) between the gate 401 and the gate 512 is cleared. Figure 12 The time required for the internal pressure to decrease to a preset pressure. Control unit 22 estimates the preparation time ΔT2. Preparation time ΔT2 is an example of the first preparation time. The process of estimating preparation time ΔT2 is an example of the third estimation process.

[0137] In order to complete the preparation for replacing the edge ring 423 at the replaceable time t3, the component transport device 50 needs to move to the position of the processing device 40 at time t4, which is obtained by advancing the preparation time ΔT2 from the replaceable time t3. The movement time ΔT3 is the time required for the component transport device 50 to move to the position of the processing device 40 where the edge ring 423 needs to be replaced. The control unit 22 estimates the movement time ΔT3. The movement time ΔT3 is an example of a first movement time. The process of estimating the movement time ΔT3 is an example of a second estimation process. The component transport device 50 can start moving before time t5, which is obtained by advancing the movement time ΔT3 from time t4. The control unit 22 can manage the positions of each processing device 40 and each component transport device 50, and estimate the time required for each component transport device 50 to move to the position of each processing device 40.

[0138] Control unit 22 obtains the time t before time t5 by measuring the total time of preparation time ΔT2 and movement time ΔT3 from the replaceable time t3. p A replacement instruction is sent to the component handling device 50, instructing it to replace the edge ring 423. The process of sending the replacement instruction is an example of a sending process.

[0139] Furthermore, in order to replace the edge ring 423 at the replaceable time t3, the pressure inside the component handling device 50 needs to be reduced to a preset pressure. The pressure adjustment time ΔT4 is the time required for the pressure inside the container 51 to be reduced to the preset pressure. Therefore, the component handling device 50 needs to begin adjusting the pressure inside the component handling device 50 before time t6, which is obtained by advancing the pressure adjustment time ΔT4 from the replaceable time t3.

[0140] Here, if the box 52 has just been replaced or if the edge ring 423 has not been replaced for a period of time, the pressure inside the component transport device 50 becomes higher than the preset pressure, thus the pressure adjustment time ΔT4 becomes longer. On the other hand, if the edge ring 423 has just been replaced, the pressure inside the component transport device 50 becomes close to the preset pressure, thus the pressure adjustment time ΔT4 becomes shorter. Therefore, the relationship between times t5 and t6 varies depending on the state of the component transport device 50.

[0141] Based on the above, it is necessary to instruct the component handling device 50 to replace the edge ring 423 of the processing device 40 before the earlier of time t5 and t6, which is before the replacement period of the edge ring 423. Therefore, the control unit 22 obtains a time t0, which is an earlier time than time t5 and t6, by advancing the time ΔT0 from the replacement period of the edge ring 423. p The component handling device 50 instructs the processing device 40 to replace the edge ring 423. This shortens the downtime of the processing device 40 during edge ring 423 replacement and suppresses the decrease in production efficiency that accompanies the edge ring 423 replacement.

[0142] [Processing of control device 20]

[0143] Figure 16 This is a flowchart illustrating an example of the processing of the control device 20 when the component transport device 50 is moved to the position of the processing device 40, which is a replacement object for a consumable component. Figure 16 The processing shown is achieved by executing a program read from the storage unit 21 through the control unit 22 of the control device 20. The control device 20 controls multiple processing devices 40 and component handling devices 50.

[0144] First, the control unit 22 refers to the reservation table 210 and identifies the edge rings 423 that are not scheduled for replacement (S100). For example, the control unit 22 identifies the edge rings 423 with component IDs that are not associated with component handling device IDs as edge rings 423 that are not scheduled for replacement. Then, the control unit 22 determines whether there are any edge rings 423 among the identified edge rings 423 whose replacement period will arrive within a preset time ΔT0 from the current time (S101). If there are no edge rings 423 whose replacement period will arrive within a time ΔT0 from the current time (S101: No), the control unit 22 executes the process shown in step S100 again.

[0145] On the other hand, if there is an edge ring 423 whose replacement period will arrive within a time ΔT0 from the current time (S101: Yes), the control unit 22 determines the movement start time (S102). The movement start time is the earlier of time t5 and t6.

[0146] Next, the control unit 22 selects a component transport device 50 located closest to the processing device 40 where the edge ring 423 needs to be replaced (S103). In step S103, not only the straight-line distance between the processing device 40 and the component transport device 50 is considered, but also the length of the movement path of the component transport device 50 when it moves to the position of the processing device 40. Then, the control unit 22 refers to the reservation table 210 in the storage unit 21 to determine whether the component transport device ID of the component transport device 50 selected in step S103 has been registered in the reservation table 210 (S104).

[0147] If the component handling device ID is not registered in the reservation table 210 (S104: No), the control unit 22 performs the following process. That is, the control unit 22 registers the component handling device ID of the selected component handling device 50 in the reservation table 210 in association with the component ID of the edge ring 423 whose replacement period is determined to be within time ΔT0 in step S101 (S106). As a result, the selected component handling device 50 is reserved for the replacement of the edge ring 423 whose replacement period is determined to be within time ΔT0 in step S101.

[0148] Next, the control unit 22 sends a replacement instruction (S107) to the selected component handling device 50, indicating that the edge ring 423 needs to be replaced. The replacement instruction includes information such as the location of the processing device 40 where the edge ring 423 needs to be replaced and the component ID of the edge ring 423. Then, the control unit 22 executes the process shown in step S100 again.

[0149] On the other hand, if the component handling device ID is already registered in the reservation table 210 (S104: Yes), that is, if the component handling device 50 selected in step S103 has been reserved, the control unit 22 performs the following processing. That is, the control unit 22 extracts the "next replacement period" associated with the component handling device ID that was determined to be registered in the reservation table 210 in step S104 from the reservation table 210. If the component handling device ID is associated with multiple "next replacement periods", the control unit 22 extracts the latest "next replacement period".

[0150] Then, the control unit 22 determines whether the movement start time determined in step S102 is later than the extracted "next replacement period" (S105). If the movement start time is later than the "next replacement period" (S105: Yes), the component transport device 50 can perform the replacement of the current edge ring 423 after the scheduled replacement of the edge ring 423 has been completed. Therefore, the control unit 22 executes the process shown in step S106.

[0151] On the other hand, if the start time of the movement is earlier than the "next replacement period" (S105: No), the selected component transport device 50 cannot begin moving towards the processing device 40 where the edge ring 423 needs to be replaced before the replacement of another edge ring 423 is completed. Therefore, the control unit 22 instructs the component transport device 50 that is next in line to the processing device 40 where the edge ring 423 needs to be replaced to replace the edge ring 423.

[0152] For example, the control unit 22 determines whether there are any unselected other component handling devices 50 (S108). If there are unselected other component handling devices 50 (S108: Yes), the control unit 22 selects the component handling device 50 that is next to the location of the processing device 40 where the edge ring 423 needs to be replaced (S109). Then, the control unit 22 executes the process shown in step S104 again.

[0153] On the other hand, if all component handling devices 50 have been selected (S108: No), the control unit 22 refers to the reservation table 210 and selects the component handling device 50 whose replacement of the edge ring 423 ends earliest (S110). Then, the control unit 22 performs the process shown in step S106.

[0154] Figure 17 This is a flowchart illustrating an example of the processing of a control device 20 when controlling a processing device 40 that is a replacement object for a consumable component and a component transport device 50 connected to the processing device 40. Figure 17The example illustrates the processing of a control device 20 when controlling a processing device 40 that is a replacement object for consumable parts and a component transport device 50 connected to the processing device 40. Furthermore, the processing of the control device 20 when controlling other processing devices 40 that are replacement objects for consumable parts and other component transport devices 50 connected to the processing device 40 is also illustrated. Figure 17 The illustrated flowchart is executed in the same way. Figure 17 The processing shown is achieved by executing a program read from the storage unit 21 through the control unit 22 of the control device 20. The control device 20 controls multiple processing devices 40 and component handling devices 50.

[0155] First, the control unit 22 determines whether the process of using RF power has been performed in the processing device 40 (S120). If the process of using RF power has not been performed (S120: No), the control unit 22 executes the process shown in step S120 again.

[0156] On the other hand, when RF power usage processing is performed (S120: Yes), the control unit 22 updates the "RF cumulative time" associated with the processing device ID of the processing device 40 that performed RF power usage processing in the reservation table 210 (S121). Then, for the edge ring 423 whose "RF cumulative time" has been updated, the control unit 22 infers the "next replacement period" and updates the "next replacement period" associated with the "part ID" of the edge ring 423 with the inferred "next replacement period" (S122). Thus, the "next replacement period" corresponding to the edge ring 423 is updated based on the actual processing time of RF power usage.

[0157] Next, the control unit 22 determines, based on the updated "next replacement period", whether the processing of the last batch before the replacement period of the consumable parts has been completed (S123). If the processing of the last batch before the replacement period of the consumable parts in the processing device 40 has not been completed (S123: No), the control unit 22 executes the processing shown in step S120 again.

[0158] On the other hand, when the last batch of processing in the processing device 40 has been completed before the replacement period of the consumable parts (S123: Yes), the control unit 22 causes the processing device 40, whose batch processing has been completed, to perform cleaning inside the chamber 41 (S124). As a result, reaction byproducts and the like attached to the edge ring 423 after use can be removed, and the scattering of reaction byproducts and the like when the edge ring 423 is transported out can be suppressed.

[0159] Alternatively, the cleaning in step S124 can be performed after the edge ring 423 is lifted by the lifting pin 48 and moved away from the lower electrode 421 where the edge ring 423 was previously mounted. This removes reaction byproducts not only adhering to the upper surface of the edge ring 423, but also to the sides of the edge ring 423 and the upper surface of the lower electrode 421 where the edge ring 423 was previously mounted.

[0160] Next, the pressure in chamber 41 of the processing device 40, where the batch processing has been completed, is adjusted (S125). In step S125, the gas in chamber 41 is discharged, and an inactive gas is supplied to chamber 41. Then, the pressure in chamber 41 is controlled to a preset pressure P1.

[0161] Next, the control unit 22 determines whether a connection notification has been received from the component handling device 50 (S126). Furthermore, through... Figure 16 In the illustrated process, one component transport device 50 is moved to the position of the processing device 40, which is the replacement object of the consumable component. If no connection notification is received from the component transport device 50 (S126: No), the control unit 22 executes the process shown in step S126 again.

[0162] On the other hand, upon receiving a connection notification from the component transport device 50 (S126: Yes), the control unit 22 controls the exhaust system 46 and valve 461a of the processing device 40 to discharge the gas in the space 60 of the connection portion between the processing device 40 and the component transport device 50 (S127). As a result, the pressure in the space 60 of the connection portion between the processing device 40 and the component transport device 50 is reduced to a preset pressure P2. In this embodiment, pressure P2 is lower than pressure P1. Then, the control unit 22 sends a door opening request to the component transport device 50, the source of the connection notification, requesting the opening of the gate 512 of the component transport device 50 (S128).

[0163] Next, the control unit 22 determines whether it has received a door opening notification from the component handling device 50 indicating that the opening of the gate 512 has been completed (S129). If no door opening notification is received (S129: No), the control unit 22 executes the process shown in step S129 again.

[0164] On the other hand, upon receiving a door opening notification (S129: Yes), the control unit 22 lifts the edge ring 423 by the lifting pin 48 and controls the processing device 40 to open the gate 401 (S130). Then, the control unit 22 sends a replacement start instruction to the component transport device 50, indicating that the replacement of the edge ring 423 should begin (S131).

[0165] Furthermore, after the replacement start instruction is sent in step S131, the component transport device 50 performs the replacement of the edge ring 423. At this time, the control unit 22 can also control the processing device 40 to clean the chamber 41 of the processing device 40 during the period from when the used edge ring 423 is transported out until when the new edge ring 423 is transported in. As a result, reaction byproducts and other substances that fall into the processing device 40 when the used edge ring 423 is transported out can be removed before the new edge ring 423 is transported in.

[0166] Next, the control unit 22 determines whether it has received a replacement completion notification from the component handling device 50 (S132). If no replacement completion notification is received from the component handling device 50 (S132: No), the control unit 22 executes the process shown in step S132 again.

[0167] On the other hand, upon receiving a replacement completion notification from the component transport device 50 (S132: Yes), the control unit 22 controls the processing device 40 to close the gate 401 (S133). Then, the control unit 22 sends a replacement confirmation notification to the component transport device 50 (S134). Then, the control unit 22 stops the exhaust of gas in the space 60 of the connection between the processing device 40 and the component transport device 50 by controlling the exhaust system 46 and valve 461a of the processing device 40 (S135). Then, the control unit 22 restores atmospheric pressure in the space 60 of the connection between the processing device 40 and the component transport device 50 by opening valve 461b of the processing device 40.

[0168] Next, the control unit 22 deletes the record containing the "part ID" of the replaced edge ring 423 from the reservation table 210. Then, the control unit 22 creates a new record in the reservation table 210 containing the "part ID" of the edge ring 423 before it was replaced with the used edge ring 423 (S136). In the newly created record, the identification information of the processing device 40 that replaced the edge ring 423 is registered in the "processing device ID" column, the current date and time are registered in the "replacement date and time" column, and 0 is registered in the "RF cumulative time" column. In addition, the "part handling device ID" column is left empty.

[0169] Then, the control unit 22 infers the replacement period of the previously replaced edge ring 423 and registers the inferred replacement period in the newly created record as "Next RF Cumulative Time" (S137). Then, the control unit 22 executes the process shown in step S120 again.

[0170] [Processing of component handling device 50]

[0171] Figure 18This is a flowchart illustrating an example of the processing of the component handling device 50. Figure 18 The processing shown is implemented by the control unit 551 executing the program read from the storage unit 552. In addition, besides... Figure 18 In addition to the illustrated process, the control unit 551 receives a replacement instruction via the communication unit 550 and stores the received replacement instruction in the storage unit 552.

[0172] First, the control unit 551 refers to the storage unit 552 to determine whether there is an unprocessed replacement instruction (S200). If there is no unprocessed replacement instruction (S200: No), the control unit 551 executes the process shown in step S200 again.

[0173] In the event of an unprocessed replacement instruction (S200: Yes), the control unit 551 initiates movement of the component transport device 50 to the position of the processing device 40 corresponding to the position information contained in the replacement instruction (S201). Step S201 is an example of starting a process. The control unit 551 controls the movement mechanism 54, for example, by using the sensing result of the sensor 553, to move the component transport device 50 to the position of the processing device 40 corresponding to the position information contained in the replacement instruction. Furthermore, the control unit 551 controls the exhaust device 554 and the valve 556 to initiate the discharge of gas from the container 51 of the component transport device 50, thereby initiating the regulation of the pressure within the container 51 (S202).

[0174] Next, the control unit 551 determines, based on the sensing results of the sensor 553, whether the component transport device 50 is connected to the processing device 40 (S203). If the component transport device 50 is not connected to the processing device 40 (S203: No), the control unit 551 executes the process shown in step S203 again.

[0175] On the other hand, when the component handling device 50 is connected to the processing device 40 (S203: Yes), the control unit 551 sends a connection notification to the control device 20 via the communication unit 550 (S204). Then, the control unit 551 controls the robotic arm 53a to remove the edge ring 423 from the box 52 before use (S205).

[0176] Next, the control unit 551 determines whether a door opening request has been received from the control device 20 via the communication unit 550 (S206). If no door opening request has been received (S206: No), the control unit 551 executes the process shown in step S206 again.

[0177] On the other hand, upon receiving a door opening request (S206: Yes), the control unit 551 determines whether the pressure P inside the container 51 of the component transport device 50 has become the preset pressure P2 (S207). Pressure P2 is the space 60 of the connection portion that is adjusted after the processing device 40 and the component transport device 50 are connected (see reference). Figure 12 The pressure P2 is the same as the pressure P2. If the pressure P does not become the pressure P2 (S207: No), the control unit 551 executes the process shown in step S207 again. Step S207 is an example of a preparation process.

[0178] Here, when the edge ring 423 is replaced, the pressure inside the chamber 41 of the processing device 40 is controlled to P1, and the pressure inside the space 60 of the connection between the processing device 40 and the component transport device 50 and the container 51 of the component transport device 50 is controlled to P2, which is lower than the pressure P1. Therefore, when the gate 401 of the processing device 40 and the gate 512 of the component transport device 50 are open, an airflow is generated from the chamber 41 of the processing device 40 to the container 51 of the component transport device 50. Thus, it is possible to suppress the intrusion of particles from the component transport device 50 into the processing device 40.

[0179] Furthermore, when the pressure difference between the pressure P1 within the processing device 40 and the pressure P2 within the connection between the processing device 40 and the component transport device 50 is too small, particles within the component transport device 50 may intrude into the processing device 40. On the other hand, when the pressure difference between P1 and P2 is too large, particles may rotate and rise within the component transport device 50. Therefore, it is preferable that the pressure difference between P1 and P2 is, for example, 10 Pa or more. 4 [Pa] below.

[0180] When pressure P becomes pressure P2 (S207: Yes), control unit 551 opens gate 512 (S208). Then, control unit 551 determines whether a replacement start instruction has been received from control device 20 via communication unit 550 (S209). If no replacement start instruction has been received (S209: No), control unit 551 executes the process shown in step S209 again.

[0181] On the other hand, upon receiving a replacement start instruction (S209: Yes), the control unit 551 controls the robotic arm 53b to insert the end effector 530b into the processing device 40, receiving the used edge ring 423 lifted by the lifting pin 48 (S210). Then, the control unit 551 controls the robotic arm 53b to move the end effector 530b into the part transport device 50, storing the used edge ring 423 in the box 52. Step S210 is an example of the storage process.

[0182] Next, the control unit 551 controls the robotic arm 53a to insert the end effector 530a, which carries the edge ring 423 before use, into the processing device 40, and delivers the edge ring 423 before use to the lifting pin 48 (S211). Then, the control unit 551 controls the robotic arm 53a to move the end effector 530a into the part transport device 50. The edge ring 423 before use is lowered by the lifting pin 48 and placed on the lower electrode 421. Step S211 is an example of the loading process.

[0183] Next, the control unit 551 closes the gate 512 (S212). Step S212 is an example of a closing process. Then, the control unit 551 sends a replacement completion notification to the control device 20 via the communication unit 550 (S213).

[0184] Next, the control unit 551 controls the robotic arm 53b to move the end effector 530b toward the vicinity of the cleaning unit 56, and controls the cleaning unit 56 to clean the end effector 530b (S214).

[0185] Next, the control unit 551 determines whether it has received a replacement confirmation notification from the control device 20 via the communication unit 550 (S215). If no replacement confirmation notification is received (S215: No), the control unit 551 executes the process shown in step S215 again.

[0186] On the other hand, upon receiving a replacement confirmation notification (S215: Yes), the control unit 551 determines whether there are any remaining edge rings 423 before use in the box 52 (S216). The control unit 551 determines whether there are any remaining edge rings 423 before use in the box 52, for example, based on the number of edge rings 423 stored in the box 52 and the number of times they have been replaced.

[0187] If the unused edge ring 423 remains in the box 52 (S216: Yes), the control unit 551 executes the process shown in step S200 again. On the other hand, if the unused edge ring 423 does not remain in the box 52 (S216: No), the control unit 551 controls the moving mechanism 54 to move the component transport device 50 to the replacement position of the box 52. Then, the box 52 in the component transport device 50 and the box 52 containing the unused edge ring 423 are replaced (S217). Then, the control unit 551 executes the process shown in step S200 again.

[0188] Furthermore, in this embodiment, if there are no remaining edge rings 423 before use in the box 52, the component transport device 50 moves to the replacement location of the box 52 to replace the box 52, but the disclosed technology is not limited to this. For example, the box 52 containing the edge rings 423 before use can also be transported to the part transport device 50 for replacement in an AGV (Automated Guided Vehicle).

[0189] Furthermore, when the housing 52 is replaced, the pressure inside the component transport device 50 51 becomes atmospheric pressure, and it takes time to depressurize it to the pressure P2 required for replacing the edge ring 423. Therefore, when the housing 52 is replaced, it is preferable that the control unit 551 controls the exhaust device 554 to expel the gas inside the container 51, depressurizing the pressure inside the container 51 to the pressure P2 required for replacing the edge ring 423. Thus, upon receiving a replacement instruction from the control unit 20, the component transport device 50 can begin replacing the edge ring 423 more quickly.

[0190] The first embodiment has been described above. As described above, the component handling device 50 in this embodiment includes a container 51, a box 52, a robotic arm 53, and a moving mechanism 54. The box 52 stores consumable components before and after use. The container 51 has an opening 511 connected to the processing device 40 and a gate 512 for opening and closing the opening 511, for storing the box 52. The robotic arm 53 is disposed inside the container 51 and has an end effector 530 at its front end, enabling it to transport the used consumable components out of the processing device 40 through the opening 511 and store them in the box 52. Furthermore, the robotic arm 53 removes the consumable components before use from the box 52 and transports them into the processing device 40 through the opening 511. The moving mechanism 54 has a power source to move the component handling device 50. As a result, the edge ring 423 can be easily replaced.

[0191] Furthermore, the component transport device 50 in the above embodiment includes a communication unit 550, a control unit 551, and a sensor 553. The communication unit 550 wirelessly communicates with the control device 20 that controls the component transport device 50. The sensor 553 senses the surroundings of the component transport device 50. The control unit 551 controls the moving mechanism 54 using the sensing results of the sensor 553, thereby moving the component transport device 50 to the position of the processing device 40 indicated by the control device 20. This allows for easy movement of the component transport device 50.

[0192] Furthermore, in the above embodiment, two end effectors 530a and 530b are provided at the front end of the robotic arm 53. One end effector 530a is used for conveying consumable parts before use, and the other end effector 530b is used for conveying consumable parts after use. This prevents consumable parts before use from being contaminated by reaction byproducts shed from consumable parts after use.

[0193] Furthermore, in the above embodiment, the consumable component is the edge ring 423, and the end effector 530b transports the edge ring 423 by supporting its lower surface after use. This prevents reaction byproducts adhering to the edge ring 423 from attaching to the end effector 530a.

[0194] Furthermore, in the above embodiment, a cleaning unit 56 for cleaning the end effector 530b is provided inside the container 51. This prevents reaction byproducts adhering to the end effector 530b from becoming particles and scattering within the component transport device 50.

[0195] Furthermore, in the above embodiment, multiple pre-use consumable parts and post-use consumable parts are arranged side-by-side in the vertical direction within the box 52, with the post-use consumable parts stored below the pre-use consumable parts. This prevents reaction byproducts detached from the post-use consumable parts from falling and adhering to the pre-use consumable parts.

[0196] Furthermore, in the above embodiment, the box 52 can be removed from the container 51 of the component transport device 50 while containing consumable parts. Therefore, it is possible to easily replace the box 52 containing consumable parts before use with the box 52 containing consumable parts after use, one box 52 at a time.

[0197] Furthermore, in the above embodiment, a position offset detection sensor 57 is provided at the opening 511 of the component handling device 50 to detect the position offset of the consumable component before use when it passes through the opening 511. The robotic arm 53a transports the consumable component before use into the processing device 40 in a manner that corrects for the position offset detected by the position offset detection sensor 57. As a result, the robotic arm 53a can accurately position the consumable component before use within the pre-set position in the processing device 40.

[0198] Furthermore, the component handling device 50 in the above embodiment is provided with an exhaust device 554 for discharging gas from the container 51. This allows the pressure inside the container 51 to be reduced to a predetermined vacuum level, thereby reducing moisture and other consumable components adhering to it before use.

[0199] Furthermore, the processing system 10 in the above-described embodiment includes: a processing apparatus 40 for processing the substrate W, which has consumable components; a component transport apparatus 50 for transporting the consumable components; and a control device 20 for controlling the processing apparatus 40 and the component transport apparatus 50. The component transport apparatus 50 includes a container 51, a box 52, a robotic arm 53, and a moving mechanism 54. The box 52 stores consumable components before and after use. The container 51 has an opening 511 connected to the processing apparatus 40 and a gate 512 for opening and closing the opening 511, for storing the box 52. The robotic arm 53 is disposed within the container 51, and transports the used consumable components from the processing apparatus 40 through the opening 511 and stores them in the box 52. Furthermore, the robotic arm 53 removes the unused consumable components from the box 52 and transports them into the processing apparatus 40 through the opening 511. The moving mechanism 54 has a power source to move the component transport apparatus 50. Thus, the consumable components in the processing apparatus 40 can be easily replaced.

[0200] Furthermore, in the above embodiment, the processing device 40 has a support portion 42, which has a mounting surface for mounting the substrate W. The consumable component is an edge ring 423 provided on the upper surface of the support portion 42 in a manner surrounding the mounting surface. A recess 4230 is formed on at least one of the upper surface of the support portion 42 and the lower surface of the edge ring 423, and a protrusion 4214 capable of being inserted into the recess 4230 is formed on at least the other of the upper surface of the support portion 42 and the lower surface of the edge ring 423. Therefore, by mounting the edge ring 423 on the lower electrode 421 in such a manner that the protrusion 4214 of the lower electrode 421 is inserted into the recess 4230 of the edge ring 423, high-precision alignment between the lower electrode 421 and the edge ring 423 can be achieved.

[0201] Furthermore, in the above embodiment, the recess 4230 includes: a first sidewall portion 4230a extending in the depth direction of the recess 4230; and a first inclined portion 4230b that widens as it extends from the first sidewall portion 4230a toward the opening of the recess 4230. Therefore, when the edge ring 423 is placed on the lower electrode 421, even if the position of the recess 4230 of the edge ring 423 is slightly offset from the position of the protrusion 4214 of the lower electrode 421, the protrusion 4214 can be inserted into the recess 4230.

[0202] Furthermore, in the above embodiment, the protrusion 4214 has: a second sidewall portion 4214b extending in the protruding direction from the root of the protrusion 4214; and a second inclined portion 4214a whose width narrows as it extends from the second sidewall portion 4214b toward the front end of the protrusion 4214. Therefore, when the edge ring 423 is placed on the lower electrode 421, even if the position of the recess 4230 of the edge ring 423 is slightly off from the position of the protrusion 4214 of the lower electrode 421, the protrusion 4214 can be inserted into the recess 4230.

[0203] Furthermore, in the above embodiment, the total number of recesses 4230 formed on at least one of the upper surface of the support portion 42 and the lower surface of the edge ring 423 is two or more. Moreover, the opening of the recess 4230 is shaped as an elongated hole with a long axis radially centered on the central axis X of the generally circular substrate W placed on the support portion 42. Thus, when the edge ring 423 is placed on the lower electrode 421, the protrusion 4214 of the lower electrode 421 is inserted into the recess 4230 of the edge ring 423. Therefore, the central axis of the edge ring 423 can be made substantially aligned with the central axis X of the substrate W placed on the electrostatic chuck 422.

[0204] (Second Implementation)

[0205] In the first embodiment, an exhaust device 554 is provided inside the component transport device 50, and the gas inside the component transport device 50 is discharged to the outside of the component transport device 50 through the exhaust device 554, thereby reducing the pressure inside the component transport device 50. In contrast, in this embodiment, when the component transport device 50 is connected to the processing device 40, the gas inside the component transport device 50 is discharged through the exhaust system 46 of the processing device 40. Therefore, the exhaust device 554 is not required inside the component transport device 50, enabling miniaturization of the component transport device 50. Furthermore, the system structure and operation of the processing system 10 in this embodiment... Figure 1 The system structure of the processing system 10 in the first embodiment described herein is the same, so the description is omitted.

[0206] [Structure of processing device 40]

[0207] Figure 19 This is a diagram illustrating an example of the processing apparatus 40 in the second embodiment. Additionally, except as described below, in Figure 19 In the middle, it is marked with Figure 2 The same structure of the attached figures and Figure 2 The structures in these examples are identical or have the same function, therefore the description is omitted.

[0208] The piping 462 connecting the pressure control valve 460 and the exhaust system 46 branches into piping 462a and piping 462b. By opening valve 461a, gas can be discharged from the exhaust system 46 via piping 462a and 462b.

[0209] Furthermore, a piping 443 is provided on the side of the chamber 41 on the side where the gate 401 is located. The piping 443 is connected to valves 442a to 442c via valve 442d. By closing valves 442a and 442b and opening valves 442c and 442d, a flow rate of inactive gas controlled by the flow controller 441c can be supplied to the piping 443.

[0210] [Structure of component handling device 50]

[0211] Figure 20 This is a diagram illustrating an example of the component handling device 50 in the second embodiment. Additionally, except as described below, Figure 20 In the middle, it is marked with Figure 9 The same structure of the attached figures and Figure 9 The structures in these examples are identical or have the same function, therefore the description is omitted.

[0212] Pipe 555 is disposed between the side of container 51 on the side where gate 512 is provided and the space inside container 51, and valve 556 is provided in pipe 555. In this embodiment, no venting device 554 is provided in component handling device 50. Pipe 555 is an example of a vent.

[0213] In addition, a piping 560 is provided on the side of the container 51 on the side where the gate 512 is located. The piping 560 is connected to the cleaning unit 56. A valve 561 is provided on the piping 560.

[0214] [Connection between processing device 40 and component transport device 50]

[0215] Figure 21 This is an enlarged cross-sectional view showing an example of the connection portion between the processing device 40 and the component transport device 50 in the second embodiment. Furthermore, except as described below, Figure 21 In the middle, it is marked with Figure 11 The same structure of the attached figures and Figure 11 The structures in these examples are identical or have the same function, therefore the description is omitted.

[0216] The opening 462c of pipe 462b and the opening 555a of pipe 555 are formed at opposite positions when the processing device 40 is connected to the component transport device 50. Furthermore, an O-ring or similar sealing member 516 is disposed on the side of the container 51 of the component transport device 50 to surround the opening 555a. Thus, when the processing device 40 is connected to the component transport device 50, pipe 462b and pipe 555 are in airtight communication.

[0217] After connecting the processing device 40 to the component transport device 50, the valve 461a of the processing device 40 is opened, and the gas is discharged by the exhaust system 46. This allows the gas in the container 51 of the component transport device 50 to be discharged through pipes 462b and 555. Thus, even without an exhaust device 554 in the component transport device 50, the pressure inside the container 51 can be reduced, thereby enabling the component transport device 50 to be miniaturized.

[0218] Furthermore, the openings 443a and 560a of the piping 443 and 560 are formed in opposite positions when the processing device 40 is connected to the component transport device 50. Additionally, an O-ring or similar sealing member 515 is provided on the side of the container 51 of the component transport device 50 to surround the opening 560a. Thus, when the processing device 40 is connected to the component transport device 50, the piping 443 and 560 are in airtight communication.

[0219] After the edge ring 423 is replaced, with the processing device 40 connected to the component transport device 50, valves 442a and 442b of the processing device 40 are closed, valves 442c and 442d are opened, and valve 561 of the component transport device 50 is opened. This supplies inert gas to the cleaning unit 56 of the component transport device 50. The cleaning unit 56 cleans the end effector 530b by purging with high-pressure inert gas supplied via piping 560. Therefore, an inert gas supply source can be omitted within the component transport device 50, thus enabling miniaturization of the component transport device 50.

[0220] The second embodiment has been described above. As described above, the component handling device 50 in this embodiment includes a piping 560 for introducing purge gas into the cleaning unit 56, which is used to clean the end effector 530a by purging. When the component handling device 50 is connected to the processing device 40, the piping 560 is connected to the gas supply section 44 of the processing device 40. Therefore, it is possible to omit the purge gas supply source within the component handling device 50, thus enabling the component handling device 50 to be miniaturized.

[0221] Furthermore, the component handling device 50 in the above embodiments includes a pipe 555 for discharging gas from the container 51. When the component handling device 50 is connected to the processing device 40, the pipe 555 is connected to the exhaust system 46 of the processing device 40. Thus, even if the exhaust device 554 is not provided in the component handling device 50, the pressure inside the container 51 can be reduced, thereby enabling the component handling device 50 to be miniaturized.

[0222] (Third Implementation)

[0223] The component handling device 50 in the first and second embodiments replaces one type of consumable component, namely the edge ring 423. In contrast, the component handling device 50 in this embodiment replaces multiple consumable components. Examples of multiple consumable components include, for example, the edge ring 423 and the upper electrode 43e.

[0224] Box 52 is used to store consumable parts before and after use. In this embodiment, the space for storing consumable parts within box 52 is divided according to the type of consumable part. Therefore, even when a specific type of consumable part is frequently replaced, reaction byproducts or other substances adhering to the specific type of used consumable part within box 52 can be prevented from falling onto other types of unused consumable parts. Furthermore, consumable parts can also be stored in different boxes 52 for each type, with different boxes 52 for each type stored within the part transport device 50.

[0225] Here, there are situations where different types of consumable parts have different replacement cycles. Therefore, the replacement times for different types of consumable parts are often inconsistent. When replacement times are inconsistent, there are instances where processing is stopped to replace consumable parts, and then stopped again briefly to replace other consumable parts after processing resumes. In this situation, when the replacement times of multiple consumable parts are close, replacing multiple consumable parts during the processing stoppage can shorten the downtime and improve production efficiency.

[0226] Figure 22 This is a diagram illustrating an example of the replacement timing of consumable components in the third embodiment. In this embodiment, a shorter replacement cycle LT is used. short Replacement period of the first consumable component t s With a longer replacement cycle LT long Replacement period of the second consumable component t l Time difference ΔLT compared to replacement cycle LT short In the short term, during the replacement period t s Replace both the first and second consumable parts. Replacement cycle LT shortThis is an example of the first replacement cycle, replacement cycle LT long This is an example of the second replacement cycle.

[0227] For example, control device 20 during the replacement period t of the first consumable component s Replacement period t of the second consumable component l The time difference ΔLT between them is equal to the replacement cycle LT. short In the short case, based on the replacement period t of the first consumable component s The replacement instruction also indicates the replacement of the second consumable part. This reduces downtime and increases production efficiency.

[0228] Furthermore, when replacing different types of consumable parts during a processing stoppage, it is preferable to replace the consumable parts installed at higher positions first, rather than those installed at lower positions. For example, the control device 20 instructs the component handling device 50 to replace the first consumable part and the second consumable part, the one located at the higher position within the processing device 40. This prevents reaction byproducts or the like from falling onto the replaced consumable parts when they are removed after use.

[0229] (Fourth Implementation)

[0230] In the first to third embodiments, the component transport device 50 is connected to the processing device 40 whose consumable components need to be replaced, and the consumable components in the processing device 40 are replaced. In contrast, in this embodiment, when the replacement time of consumable components in multiple processing devices 40 is close, the component transport device 50 remains connected to one processing device 40 and replaces the consumable components in other processing devices 40 via the vacuum transport chamber 31. As a result, the downtime of the processing system 10 that accompanies the replacement of consumable components can be shortened.

[0231] Figure 23 This is a diagram illustrating an example of the method for replacing the edge ring 423 in the fourth embodiment. Figure 23 The image shows an example of replacing the edge ring 423 of processing device 40-1 and processing device 40-2 via processing device 40-1. Processing device 40-1 is an example of a first processing device, and processing device 40-2 is an example of a second processing device.

[0232] In this embodiment, the control device 20 infers the travel time required for the component transport device 50 to move from the position of the processing device 40-1 to the position of the processing device 40-2 based on the position information of the processing device 40-1 and the information of the movable path of the component transport device 50. The travel time required for the component transport device 50 to move from the position of the processing device 40-1 to the position of the processing device 40-2 is an example of a second travel time.

[0233] Furthermore, the control device 20 estimates the preparation time required before the component transport device 50, which has been moved to the position of the processing device 40-2, is in a state where it can replace the edge ring 423 within the processing device 40-2. This preparation time is an example of a second preparation time.

[0234] Furthermore, the control device 20 estimates the replacement time required for the edge ring 423 within the processing device 40-2, which passes through the processing device 40-1 and the vacuum transport chamber 31. Then, if the estimated total time of movement and preparation is longer than the estimated replacement time, the control device 20 instructs the component transport device 50 to replace the edge ring 423 within the processing device 40-2 via the processing device 40-1 and the vacuum transport chamber 31. This shortens the downtime of the processing system 10 associated with the replacement of consumable components.

[0235] In addition, Figure 23 In the example, the edge ring 423 located in the processing device 40-2, which is situated opposite to the processing device 40-1 across the vacuum transport chamber 31, is replaced by the processing device 40-1 and the vacuum transport chamber 31. However, the disclosed technology is not limited to this. For example, the processing device 40 that replaces the edge ring 423 via the processing device 40-1 and the vacuum transport chamber 31 may also be a processing device 40 other than the processing device 40-2, such as the processing device 40-4.

[0236] Furthermore, when replacing the edge ring 423 of another processing device 40 via the processing device 40, it is preferable to start replacing it from the edge ring 423 of the processing device 40 connected to the component transport device 50. For example, if the control device 20 instructs the component transport device 50 to replace the edge ring 423 in processing device 40-2 before replacing it with the edge ring 423 in processing device 40-1, when the estimated total time of movement and preparation is longer than the estimated replacement time. This prevents reaction byproducts and the like from falling onto the unused edge ring 423 installed in the processing device 40 connected to the component transport device 50.

[0237] (Fifth Implementation)

[0238] In the component handling device 50 of the first to fourth embodiments, when replacing consumable components, the gas inside the storage box 52 and the container 51 of the robotic arm 53 is released to reduce pressure. In contrast, in this embodiment, the space for storing the robotic arm 53 and the space for storing the storage box 52 are airtightly separated by a gate within the container 51, and the gas inside the space for storing the robotic arm 53 is released. This reduces the space required for pressure reduction when replacing consumable components and shortens the time required to reduce pressure to a preset level.

[0239] Figure 24 This is a diagram illustrating an example of the component handling device 50 in the fifth embodiment. Furthermore, except as described below, in Figure 24 In the middle, it is marked with Figure 9 The same structure of the attached figures and Figure 9 The structures in these examples are identical or have the same function, therefore the description is omitted.

[0240] Within container 51, the space 51a housing robotic arms 53a and 53b is airtightly separated from the space 51b of storage box 52 by gate 517. When replacing the edge ring 423, gate 517 is opened, and robotic arm 53a removes the unused edge ring 423 from box 52. Then, after robotic arm 53a has moved into space 51a, gate 517 is closed. The gas in space 51a is then vented using venting device 554. By closing gate 517, the space to be vented by venting device 554 is reduced, shortening the time required to depressurize to a preset pressure. Within container 51, space 51a, separated by gates 512 and 517, is an example of a load-locking chamber.

[0241] Then, after the pressure in space 51a is reduced to a preset pressure, gate 512 is opened to replace edge ring 423. After the replacement of edge ring 423 is completed and gate 512 is closed, the pressure in space 51a returns to atmospheric pressure, and gate 517 is opened. Then, robotic arm 53b is used to store the used edge ring 423 into box 52.

[0242] Then, after the robotic arm 53b has moved into space 51a, the gate 517 is closed again. Then, the gas in space 51a is vented based on the venting device 554, and the end effector 530b is cleaned based on the cleaning unit 56. During the cleaning of the end effector 530b, the gate 517 is closed, thereby preventing particles scattered during cleaning from adhering to the pre-use edge ring 423 stored in the box 52.

[0243] [other]

[0244] Furthermore, the technology disclosed in this invention is not limited to the above-described embodiments, and various modifications can be made within its scope.

[0245] For example, in the first and third to fifth embodiments described above, the component handling device 50 begins venting from the container 51 after receiving a replacement instruction from the control device 20, but the disclosed technology is not limited to this. For example, the component handling device 50 may also control the pressure inside the container 51 to a preset pressure P2 before receiving the replacement instruction. Therefore, the component handling device 50 can more quickly begin replacing consumable components upon receiving a replacement instruction from the control device 20.

[0246] Furthermore, in the first and third to fifth embodiments described above, the gas discharged by the exhaust device 554 is discharged to the outside of the component transport device 50 via the exhaust port 557, but the disclosed technology is not limited to this. For example, the exhaust port 557 and the device for treating the discharged gas provided outside the component transport device 50 can also be connected by a flexible hose. This facilitates the reuse of the gas discharged from the component transport device 50.

[0247] Furthermore, in the first and third to fifth embodiments described above, the container 51 of the component transport device 50 may be connected to an exhaust device located outside the component transport device 50 via a flexible hose, and the gas inside the container 51 may be discharged through the exhaust device. Therefore, the exhaust device 554 may not be provided inside the component transport device 50, thus enabling the component transport device 50 to be miniaturized.

[0248] Furthermore, in the second embodiment described above, the gas inside the container 51 of the component transport device 50 is discharged by the exhaust system 46 of the processing device 40, but the disclosed technology is not limited to this. For example, when the processing device 40 is connected to the component transport device 50, the exhaust port 557 of the component transport device 50 may be connected to the exhaust port of the exhaust system 46. In this case, the gas discharged by the exhaust device 554 of the component transport device 50 is discharged to the exhaust port of the exhaust system 46. This facilitates the reuse of the gas discharged from the component transport device 50.

[0249] Furthermore, in the fifth embodiment described above, the gas in the space 51a separated by the gates 512 and 517 can also be discharged by the exhaust system 46 in the processing device 40 after the processing device 40 is connected to the component transport device 50, for example, as in the second embodiment.

[0250] Furthermore, in the embodiments described above, the control device 20 controls each processing device 40 and each component transport device 50 regarding the replacement of consumable parts, but the disclosed technology is not limited to this. For example, the control functions related to the replacement of consumable parts can also be implemented by having any one of the multiple component transport devices 50 serve as a representative component transport device 50. In this case, the representative component transport device 50 controls and manages the status of each processing device 40 related to the replacement of consumable parts via the control device 20. Alternatively, the representative component transport device 50 can also control and manage the status of other component transport devices 50 by directly communicating with them without going through the control device 20.

[0251] Furthermore, in the above-described embodiment, the same component transport device 50 removes the used consumable component from the processing device 40 and transports the unused consumable component into the processing device 40. However, the disclosed technology is not limited to this. For example, separate component transport devices 50 can be prepared to remove the used consumable component from the processing device 40 and to transport the unused consumable component into the processing device 40. Thus, neither the unused nor the used consumable component is stored in the component transport device 50, thereby preventing the unused edge ring 423 from being contaminated by reaction byproducts or the like that detached from the unused edge ring 423.

[0252] Furthermore, in this case, the component handling device 50, which transports consumable parts before use into the processing unit 40, can also be connected to either the vacuum transport chamber 31 or the atmospheric transport chamber 33. The component handling device 50 connected to the vacuum transport chamber 31 delivers the consumable parts before use to the robotic arm 310 within the vacuum transport chamber 31. The robotic arm 310 then transports the received consumable parts before use into the processing unit 40 where the consumable parts need replacement. Alternatively, the component handling device 50 connected to the atmospheric transport chamber 33 delivers the consumable parts before use to the robotic arm 330 within the atmospheric transport chamber 33. The robotic arm 330 then transports the consumable parts before use into the load locking chamber 32. The consumable parts before use transported into the load locking chamber 32 are then transported by the robotic arm 310 within the vacuum transport chamber 31 into the processing unit 40 where the consumable parts need replacement. When the component handling device 50 is connected to the atmospheric transport chamber 33, it is not necessary to install an exhaust device within the component handling device 50 for transporting consumable parts before use, allowing for miniaturization of the component handling device 50.

[0253] Furthermore, in the embodiments described above, when the component handling device 50 is connected to the processing device 40, the battery in the moving mechanism 54 can also be charged by the power supply from the processing device 40.

[0254] Furthermore, in the embodiments described above, the component transport device 50 uses the sensing results of the sensor 553 to control the moving mechanism 54, thereby enabling the component transport device 50 to autonomously move to the position of the processing device 40 indicated by the control device 20. However, the disclosed technology is not limited to this. For example, the component transport device 50 can also be moved by user operation. In this case, the component transport device 50 can notify the user by displaying the position of the processing device 40 indicated by the control device 20 and its movement path on a display device or the like.

[0255] Furthermore, the embodiments disclosed herein should be considered illustrative in all respects, not limiting. In fact, the above-described embodiments can be implemented in a wide variety of ways. Moreover, the above-described embodiments can be omitted, substituted, or modified in various ways without departing from the appended claims and their spirit.

Claims

1. A processing apparatus, characterized in that, have: A chamber having an opening that can be detachably connected to a component handling device; A gate, configured to open and close the opening; and The exhaust system connected to the chamber, The chamber has a first passage that, when the component transport device is connected to the opening of the chamber, communicates with the space formed between the gate and the component transport device. The first passage is fluidly connected to the exhaust system.

2. The processing apparatus as described in claim 1, characterized in that: The processing device has a position alignment portion that engages with the side wall of the component transport device.

3. The processing apparatus as described in claim 2, characterized in that: The positioning alignment portion includes a protrusion.

4. The processing apparatus as described in claim 3, characterized in that: The protrusion of the positioning alignment part engages with the recess of the side wall of the component transport device.

5. The processing apparatus according to any one of claims 1 to 4, characterized in that: When the component transport device is connected to the opening of the chamber, the space is maintained airtight by a sealing component.

6. The processing apparatus according to any one of claims 1 to 5, characterized in that: It also has a pressure control valve disposed between the space within the chamber and the exhaust system.

7. The processing apparatus according to any one of claims 1 to 6, characterized in that: The chamber also has a second passage connected to an opening of the passage of the component transport device that communicates with the space inside the container of the component transport device.

8. The processing apparatus as described in claim 7, characterized in that: The second path is connected to the first path.

9. The processing apparatus as described in claim 7 or 8, characterized in that: When the component transport device is connected to the opening of the chamber, the connection between the second passage and the passage of the component transport device is maintained airtight by a sealing component.

10. The processing apparatus according to any one of claims 1 to 9, characterized in that: The exhaust system includes an exhaust port for discharging exhaust gas to an exhaust gas treatment system. The first passage has two branches, one of which is connected to the exhaust port via a valve.

11. A processing system, characterized in that, have: The processing apparatus according to any one of claims 1 to 10; and The component handling device.

12. A processing system, characterized in that: It has a processing device and a component handling device. The processing device has: A chamber having an opening that can be detachably connected to the component transport device; A gate, configured to open and close the opening; and The exhaust system connected to the chamber, The component handling device has: Containers; and A conveying mechanism disposed within the container, the conveying mechanism being configured to convey components. The container includes: The first internal space; and The first passageway communicating with the first internal space, The chamber includes a second passage that communicates with the first passage when the component transport device is connected to the opening of the chamber. The second passage is fluidly connected to the exhaust system.

13. The processing system as described in claim 12, characterized in that: The processing device has a position alignment portion that engages with the side wall of the component transport device.

14. The processing system as described in claim 13, characterized in that: The positioning alignment portion includes a protrusion.

15. The processing system as described in claim 14, characterized in that: The protrusion of the positioning alignment part engages with the recess of the side wall of the component transport device.

16. The processing system according to any one of claims 12 to 15, characterized in that: When the component transport device is connected to the opening of the chamber, the connection between the first passage and the second passage is maintained airtight by a sealing component.

Images