Centering device compatible with rectangular sheets and wafers of multiple sizes
By using a single alignment device to achieve compatible alignment of rectangular and circular wafers, the problems of large equipment space occupation, high cost, complex operation and low accuracy in the prior art are solved, and efficient and accurate multi-size wafer/substrate positioning is achieved.
Patent Information
- Application Number
- CN202511378254.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-25
- Publication Date
- 2026-01-23
AI Technical Summary
Existing wafer/substrate alignment devices require two independent alignment mechanisms, which occupy a large space, are costly, complex to operate, inefficient, and difficult to achieve precise angle adjustment, affecting processing accuracy and equipment stability.
The device employs a centering mechanism compatible with rectangular and circular pieces of various sizes. It achieves compatible centering of rectangular and circular pieces through a single mechanism. By combining the motion of the drive device and the centering components with the rotation of the motor to adjust the angle, the rectangular pieces are angularly aligned. Precise positioning is achieved through resin bearings and miniature pressure sensors.
It saves equipment space and costs, simplifies operation procedures, improves production efficiency, reduces maintenance difficulty, achieves precise angle adjustment and positioning accuracy, and adapts to rectangular sheet materials of different sizes and specifications.
Smart Images
Figure CN121398519A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of semiconductor equipment, in particular to a centering device compatible with multiple sizes of rectangular wafers and circular wafers. BACKGROUND
[0002] The existing wafer / substrate centering device usually adopts a dedicated circular wafer centering mechanism and a rectangular wafer centering mechanism for centering of circular and square wafers / substrates respectively. This design has the following problems: first, two sets of independent centering mechanisms need to be configured, which not only occupies a large equipment space, but also significantly increases the manufacturing cost and maintenance cost of the equipment. Second, in the actual production process, when different shaped wafers or substrates need to be processed, the operator must perform a tedious mechanism switching operation, which not only increases the operation complexity, but also prolongs the equipment preparation time and reduces the production efficiency. Third, the existence of multiple centering mechanisms makes the calibration work of the equipment complicated, and the maintenance workload is multiplied, which affects the long-term stability and reliability of the equipment. In addition, the existing centering device often cannot realize accurate angle adjustment function, and cannot quickly complete the angular alignment when processing rectangular wafers, resulting in an increase in the number of repeated positioning, affecting the processing precision and efficiency. SUMMARY
[0003] The present application discloses a centering device compatible with multiple sizes of rectangular wafers and circular wafers, aiming to solve the above-mentioned problems.
[0004] The present application adopts the following scheme: A centering device compatible with multiple sizes of rectangular wafers and circular wafers, characterized in that it comprises a centering assembly, an adsorption platform suitable for placing materials, and a first motor driving the centering assembly to rotate along the central axis of the adsorption platform; the centering assembly comprises a support frame, a driving device is arranged on the support frame, and two centering structures are symmetrically arranged on both sides of the central axis of the adsorption platform and connected to the driving device; the driving device is suitable for driving the two centering structures to synchronously and equally approach or move away from each other, and can act on the opposite sides of the material during the approaching process to make the central axis of the material move towards the central axis of the adsorption platform; each of the two centering structures is provided with two positioning structures, and the four positioning structures are suitable for acting on the four edges of the rectangular wafer to position the rectangular wafer; further comprising a control system, when the material is a rectangular wafer structure, the control system is suitable for calculating the required rotation angle according to the tangent value of the adjacent two sides of the rectangular wafer, and rotating the first motor by the rotation angle to make the positioning structures align with the diagonal of the rectangular wafer material, so that the four positioning structures act on the four edges of the rectangular wafer material for positioning; the adsorption platform is suitable for generating an adsorption force to adsorb the material after centering.
[0005] Further, the positioning structure adopts resin bearings, and four resin bearings are adapted to act on four edges of the rectangular sheet material to position the material.
[0006] Further, the support frame comprises a horizontal plane and a vertical plane, a linear guide rail is arranged on the vertical plane; the driving device comprises two synchronous wheels arranged on the horizontal plane, a synchronous belt connected between the two synchronous wheels, and a driving motor connected with one of the synchronous wheels; two centering structures are connected on two sides of the synchronous belt and are provided with sliding blocks connected to the linear guide rail, and the driving motor drives the two centering structures to move synchronously and equally.
[0007] Further, a motor mounting seat for mounting the first motor is further included, a suction disc mounting seat is arranged on the motor mounting seat, and the suction platform is arranged on the suction disc mounting seat to fix the suction platform directly above the output shaft of the first motor and make the central axis of the suction platform coincide with the central axis of the output shaft of the first motor.
[0008] Further, a vacuum connector is arranged on the suction disc mounting seat to connect the suction platform and a vacuum device.
[0009] Further, the positioning structure is detachably connected to the centering structure so as to select contact pieces of different hardness or materials according to different process cleanliness requirements.
[0010] Further, a micro pressure sensor is arranged on each positioning structure to monitor the contact pressure between the positioning structure and the edge of the material in real time, and a micro controller connected to the control system is integrated in the driving device, and the micro controller is adapted to adjust the pressure threshold of the centering structure to the material.
[0011] Advantages: The application provides a centering device compatible with multiple sizes of rectangular sheets and circular sheets, which realizes compatible centering and angular alignment of rectangular sheets and circular sheets by driving the symmetric centering structure to move synchronously by the driving device and adjusting the angle by the first motor, adapts to different rectangular sheet materials by rotating the centering assembly, adjusts the spacing of the centering structure to adapt to different rectangular sheet materials, saves equipment space, reduces manufacturing cost, reduces operation complexity, improves production efficiency, and realizes accurate angle adjustment. BRIEF DESCRIPTION OF DRAWINGS
[0012] Figure 1 is a schematic view of the centering device compatible with multiple sizes of rectangular sheets and circular sheets of an embodiment of the application when centering a circular sheet; Figure 2This is a schematic diagram of a centering device compatible with rectangular and circular pieces of multiple sizes in an embodiment of the present invention, when centering a rectangular piece; Reference numerals in the attached drawings: 1. First motor; 2. Motor mounting base; 3. Adsorption plate mounting base; 4. Adsorption platform; 5. Centering structure; 6. Positioning structure; 7. Support frame; 8. Synchronous belt; 9. Synchronous pulley; 10. Synchronous pulley support; 11. Linear guide rail; 12. Drive motor; 13. Vacuum connector; 14. Material. Detailed Implementation
[0013] Combination Figure 1 Of Figure 2 As shown, this embodiment provides a centering device compatible with rectangular and circular pieces of multiple sizes, including: a centering component, an adsorption platform 4, and a first motor 1 that drives the centering component to rotate along the central axis of the adsorption platform 4; the adsorption platform 4 is adapted to generate suction after centering to adsorb material 14 and prevent equipment vibration from causing displacement; the centering component includes a support frame 7, on which a driving device is provided, and two centering structures 5 are symmetrically arranged on both sides of the central axis of the adsorption platform 4 and connected to the driving device; the driving device is adapted to drive the two centering structures 5 to move closer or further away from each other synchronously and equally, and can act on opposite sides of the material 14 during the process of moving closer to each other, so that the central axis of the material 14 moves toward the central axis of the adsorption platform 4; the first motor 1 is adapted to drive the centering component to rotate by a preset angle for angular alignment of the rectangular pieces. The adsorption platform 4 refers to a bearing surface with vacuum adsorption function, which can be made of porous ceramic or a metal plate with a vacuum channel. Its function is to fix the position of the material 14 by negative pressure to prevent displacement after centering. In a preferred embodiment, a certain negative pressure can also be maintained during the centering process to improve stability. The centering component refers to a positioning system composed of a support frame 7, a drive device, and a clamping mechanism. The support frame 7 can be set as an L-shaped or T-shaped structure to support the drive device and the guide mechanism. Its function is to provide stable mechanical support for the clamping action. The drive device refers to the power unit that controls the movement of the clamping mechanism. For example, it can be a combination of a synchronous belt 8 and a synchronous pulley 9. The synchronous belt 8 is driven by a motor to drive the sliders on both sides to move equally, ensuring the symmetrical application of the clamping force. The first motor 1 refers to a rotary drive component with angle control function, such as a stepper motor or a servo motor. Its function is to adapt the centering structure to the corner position of the rectangular piece by precise angle rotation.
[0014] The material 14 is placed on the adsorption platform by the mechanical hand from the wafer placement box, at this time there will be a certain angle error, for example, an error of about 1-10°; when the material 14 is placed on the adsorption platform by the mechanical hand, the driving device is started to make the two sides of the centering structure 5 move synchronously to the center; for the circular wafer material 14, the symmetrical clamping force of the centering structure directly pushes the center of the circle to coincide with the center of the platform; for the rectangular wafer material, the tangent value is calculated according to the length-width ratio of the rectangular wafer, then the rotation angle is obtained according to the tangent value, then the first motor 1 drives the entire centering assembly to rotate the calculated rotation angle, so that the centering structure is aligned with the diagonal of the rectangular wafer, and the centering structure of the centering assembly acts on the opposite sides of the material 14. This process realizes the positioning requirements of the two materials 14 through the composite motion of a single mechanism, calculates the required rotation angle according to the length-width ratio of the rectangular wafer to adapt to the centering requirements of rectangular wafers with different length-width ratios. The scheme integrates the two functions into a single system through the rotatable centering assembly. The pure mechanical centering method reduces the cost of the equipment, eliminates the time loss caused by the switching of the mechanism, realizes the compatible processing of multiple rectangular wafer materials 14, reduces the manufacturing cost and maintenance difficulty of the equipment. At the same time, the integrated design reduces the equipment floor space, simplifies the operation process, avoids the accumulation of multiple mechanism calibration errors, and improves the positioning accuracy and efficiency.
[0015] In this embodiment, two centering structures 5 are provided with two positioning structures 6, and the four positioning structures 6 are adapted to act on the four edges of the rectangular sheet respectively to position the rectangular sheet. The positioning structure 6 refers to the part in contact with the edge of the material 14, which can be realized by a resin bearing, and the surface of the resin bearing has a low friction coefficient, which can reduce the risk of scratches when in contact with the material 14. The four resin bearings respectively contact the edges of the rectangular sheet along the directions of the two adjacent groups of opposite edges of the rectangular sheet. The smooth surface of the resin bearing produces rolling friction during contact, guiding the translation of the rectangular sheet to the central axis of the suction platform 4. Due to the elastic deformation characteristics of the resin material, the contact pressure between the bearing and the edge of the material 14 is evenly dispersed, avoiding local stress concentration that can cause damage to the material 14. After centering, the anti-static performance of the resin bearing can prevent the generation of static electricity during the suction process, which can attract impurities. When the rectangular sheet is placed on the suction platform 4, the centering structure is rotated by a certain angle, so that the diagonal of the rectangular sheet material 14 is directed towards the gap between the two positioning structures on the same side, and then the driving device drives the two centering structures 5 to move towards each other synchronously and equally, so that the four positioning structures 6 respectively contact the four edges of the rectangular sheet. At this time, the diagonal of the rectangular sheet material 14 is inserted into the gap between the two positioning structures 6 on the same side. Through the design of the four positioning structures 6, the centering structure 5 can center the material 14 even when there is a certain deviation, and the gap between the positioning structures 6 can adapt to the offset amount when the rectangular sheet is placed. Through the equal displacement characteristics of the synchronous belt 8 transmission system, the positioning structure 6 applies uniform restraint force to the material 14 from four directions, causing the center of the material 14 to gradually deviate towards the central axis of the suction platform 4. In this embodiment, the mechanical centering scheme is adopted, and the centering accuracy can reach ±1mm. During this process, the resin bearing rolls in contact with the edge of the material 14, providing positioning restraint and avoiding surface damage caused by rigid friction. When the material is a rectangular sheet structure, the four positioning structures 6 can simultaneously realize four-edge positioning of the rectangular sheet in a single mechanism without the need to switch different centering assemblies. The four-point synchronous positioning mechanism can eliminate the risk of angle deviation.
[0016] Through the above technical solution, the rectangular sheet four-edge synchronous positioning function is realized, and the structure also adopts a four-point positioning mode to effectively center the circular sheet. The problem of low positioning efficiency caused by mechanism switching in the traditional scheme is effectively solved, and the positioning accuracy of the rectangular sheet is improved through the four-point restraint mechanism, avoiding rotation deviation of the material 14 during positioning. The structure is also compatible with rectangular sheets of different length-width ratios, and can adapt to various size specifications by adjusting the movement amount of the driving device.
[0017] In this embodiment, a control system is also included, which calculates the required rotation angle according to the tangent value of the two adjacent sides of the rectangular sheet, and controls the first motor 1 to rotate by the rotation angle to make the positioning structure 6 act on the four sides of the rectangular sheet for positioning, so as to reduce the number of repeated positioning. The control system refers to a logic module for performing angle calculation and motor control, which can be implemented by a programmable logic controller or an embedded microcontroller, generates a rotation angle instruction by receiving input data of the side length of the rectangular sheet and performing a trigonometric function operation. The tangent value calculation refers to a mathematical processing process for determining the included angle between the length and width directions of the rectangular sheet by the length ratio of the two adjacent sides, which can be implemented by a preset algorithm or a table lookup method, and is used to convert the geometric characteristics of the rectangular sheet into a control parameter of the rotation angle. The rotation angle refers to the target angle value of the first motor 1 driving the centering assembly to rotate around the center axis of the adsorption platform 4, which can be closed-loop controlled by an encoder or an angle sensor to ensure that the positioning structure 6 forms effective contact with the four sides of the rectangular sheet.
[0018] When the rectangular sheet is placed on the adsorption platform 4, the control system first obtains the actual length data of the two adjacent sides, for example, by sensor measurement or manual input. Then, the rotation angle required for compensation is calculated based on the tangent value of the two side lengths, and the angle instruction is sent to the first motor 1. The first motor 1 drives the centering assembly to rotate to the target angle, so that the four positioning structures 6 simultaneously contact the four sides of the rectangular sheet, completing a positioning action. In this process, by pre-calculating the rotation angle, repeated adjustment due to initial angle deviation can be avoided. By automatically calculating the rotation angle and controlling the motor to rotate accurately, the angular alignment process of the rectangular sheet is simplified to a single positioning operation, eliminating the redundant steps of repeated adjustment, which can significantly reduce the number of repeated positioning due to angle deviation in the centering process of the rectangular sheet, improve the positioning efficiency, and reduce the risk of material 14 wear caused by multiple contacts. And through this way, rectangular sheet materials with different aspect ratios can be adapted, improving the applicability of the equipment.
[0019] In this embodiment, the support frame 7 includes a horizontal plane and a vertical plane, and the vertical plane is provided with a linear guide rail 11; the driving device includes two synchronous pulleys 9 arranged on the horizontal plane, a synchronous belt 8 connecting the two synchronous pulleys 9, and a driving motor 12 connected to one of the synchronous pulleys 9; two centering structures 5 are connected to the two sides of the synchronous belt 8 and are provided with sliding blocks connected to the linear guide rail 11, and the driving motor 12 drives the two centering structures 5 to move synchronously and equally.
[0020] The horizontal plane and the vertical plane refer to the base structure of the support frame 7, which is used to carry the driving device and the installation of the centering structure 5. The linear guide rail 11 refers to the guide mechanism installed on the vertical plane, which can be implemented by a ball linear guide rail 11 module, and is used to constrain the motion trajectory of the centering structure 5. The synchronous wheel 9 refers to a toothed transmission wheel, which is used to transmit the power of the synchronous belt 8 and is installed on the support frame 7 through the synchronous wheel support 10. The synchronous belt 8 refers to a ring-shaped transmission belt with a toothed structure, which is used to convert the rotary motion of the driving motor 12 into linear motion of the centering structure 5. The driving motor 12 refers to a power output device, which can be implemented by a stepper motor or a servo motor, and is used to accurately control the displacement of the synchronous belt 8. The slider refers to a sliding component cooperating with the linear guide rail 11, which is used to ensure smooth movement of the centering structure 5 along the predetermined trajectory. The driving motor 12 drives one of the synchronous wheels 9 to rotate through the output shaft, and the rotary motion is transmitted to the other synchronous wheel 9 through the synchronous belt 8, so that the synchronous belt 8 forms symmetrical linear motion on both sides. Two centering structures 5 are respectively fixed on the working surfaces on both sides of the synchronous belt 8, and when the synchronous belt 8 moves, the centering structures 5 are driven to move towards or away from each other along the linear guide rail 11. The cooperation of the slider and the linear guide rail 11 can eliminate the positional deviation during movement, and ensure that the two centering structures 5 always maintain symmetrical motion trajectories. This structure realizes bidirectional equal displacement through mechanical synchronization, without the need for complex electronic synchronization control system. By using the structure of single motor driving synchronous belt 8, the inherent synchronization characteristics of mechanical transmission ensure the equal displacement of bidirectional motion, and the cooperation of the linear guide rail 11 and the slider effectively controls the motion trajectory deviation. Compared with the hydraulic or pneumatic driving mode, this structure has higher positioning accuracy and simpler maintenance requirements.
[0021] In this embodiment, a motor mounting seat 2 for mounting the first motor 1 is also included, and the motor mounting seat 2 is provided with an adsorption disc mounting seat 3, and the adsorption disc mounting seat 3 is provided with an adsorption platform 4 to fix the adsorption platform 4 directly above the output shaft of the first motor 1, and to make the central axis of the adsorption platform 4 coincide with the central axis of the output shaft of the first motor 1. The motor mounting seat 2 refers to the basic support structure that carries the first motor 1, and is used to ensure the stability of the motor during operation. The adsorption disc mounting seat 3 refers to the transition structure connecting the adsorption platform 4 and the motor mounting seat 2, which can be realized by a metal base with a vacuum channel, and the top plane of which is provided with a vacuum adsorption hole array. The central axis coincidence refers to the alignment of the motor rotation axis and the vertical line of the geometric center of the adsorption platform 4. The motor mounting seat 2 is connected to the equipment body through the bottom flange, and the top is provided with a horizontal adjustment mechanism for adjusting the levelness of the adsorption disc mounting seat 3. The adsorption disc mounting seat 3 is internally integrated with a vacuum pipeline, and is connected to an external vacuum device through a vacuum joint 13 on the side wall. The adsorption platform 4 is coaxially assembled with the adsorption disc mounting seat 3 through a positioning pin, and the surface thereof is distributed with micron-level vacuum adsorption holes. The output shaft of the first motor 1 is connected to the bottom of the adsorption disc mounting seat 3 through a coupling, and drives the entire adsorption assembly to rotate around the central axis under the drive of the motor. Through the integrated mounting seat structure, the motor, the adsorption disc mounting seat 3 and the adsorption platform 4 form a rigid connection body, eliminating the axis deviation caused by multi-component assembly, and solving the problem of decline of material 14 centering accuracy caused by multi-component assembly error.
[0022] In this embodiment, a vacuum joint 13 is provided on the adsorption disc mounting seat 3 to connect the adsorption platform 4 and the vacuum device. The vacuum joint 13 refers to an interface component for establishing the gas connection between the adsorption platform 4 and the external vacuum device, which can be realized by a quick-change joint or a threaded sealing joint. Its function is to transmit the negative pressure generated by the vacuum device to the adsorption platform 4, thereby forming a stable adsorption force. The adsorption disc mounting seat 3 is designed to simultaneously carry the adsorption platform 4 and the vacuum joint 13. One end of the vacuum joint 13 is connected to the vacuum device through a pipeline, and the other end is embedded in the inside of the adsorption disc mounting seat 3 and communicates with the gas channel of the adsorption platform 4. When the vacuum device is started, the negative pressure is transmitted to the adsorption platform 4 through the vacuum joint 13, and the material 14 is adsorbed and fixed on the platform surface.
[0023] In a preferred embodiment, the positioning structure 6 is detachably connected to the centering structure 5 so as to select contact pieces of different hardness or material for different process cleanliness requirements. The detachable connection refers to the separable fixing between the positioning structure 6 and the centering structure 5 through a mechanical interface, which can be achieved by screws, buckles or sliding groove structures for quick disassembly and assembly. The contact pieces of different hardness or material refer to contact components with different physical properties selected according to process requirements, which can be achieved by resin, rubber or metal material, and the material hardness or surface properties are adjusted to adapt to different cleanliness requirements. When the process environment has high cleanliness requirements, a resin material contact piece with smooth surface and less particles can be selected; when it is necessary to avoid scratching the surface of the material 14, a soft rubber contact piece can be replaced. When replacing the contact piece, the original contact piece is removed by loosening the screws or releasing the buckle, and then the new contact piece is installed and fixed. In this way, the same centering structure 5 can adapt to multiple contact pieces, and the processing requirements of different materials 14 can be met without replacing the entire centering mechanism.
[0024] In a preferred embodiment, a micro pressure sensor is installed on each positioning structure 6 for real-time monitoring of the contact pressure between the positioning structure 6 and the edge of the material 14, and a micro controller connected to a control system is integrated in the driving device, and the micro controller is adapted to adjust the pressure threshold of the centering structure 5 to the material 14.
[0025] The micro pressure sensor refers to a miniaturized detection element capable of detecting changes in contact surface pressure, which can be achieved by piezoresistive or capacitive sensors. By embedding the sensor in the contact surface of the positioning structure 6, the contact pressure data of the edge of the material 14 can be collected in real time. The micro controller refers to an embedded control module with data processing capability, which adjusts the output parameters of the driving device by receiving the pressure sensor signal and comparing it with the preset threshold.
[0026] Through the above technical solution, the present application effectively solves the problem of material 14 damage caused by improper clamping force control of the traditional centering device. By real-time pressure monitoring, the positioning accuracy is ensured while significantly reducing the risk of material 14 being crushed. Especially when processing thin and brittle materials or precision components with surface coating, the material can be effectively protected.
[0027] It should be understood that the above is only a preferred embodiment of the present application, and the protection scope of the present application is not limited to the above-mentioned embodiments. Any technical solution falling within the scope of the present application is within the protection scope of the present application.
[0028] The above description of the drawings used in the embodiments only shows some embodiments of the present application and should not be considered as limiting the scope. For those skilled in the art, other related drawings can be obtained from these drawings without creative labor.
Claims
1. A centering device compatible with rectangular and circular pieces of multiple sizes, characterized in that, include: A centering component, an adsorption platform suitable for placing materials, and a first motor that drives the centering component to rotate along the central axis of the adsorption platform; The centering component includes a support frame, on which a driving device is mounted, and two centering structures symmetrically arranged on both sides of the central axis of the adsorption platform and connected to the driving device. The driving device is adapted to drive the two centering structures to move closer or further away from each other synchronously and equally, and can act on the opposite sides of the material during the process of moving closer to each other, so that the central axis of the material moves toward the central axis of the adsorption platform. Both of the centering structures are provided with two positioning structures, and the four positioning structures are adapted to act on the four sides of the rectangular sheet material respectively to position the rectangular sheet. It also includes a control system. When the material is a rectangular sheet structure, the control system is adapted to calculate the required rotation angle based on the tangent of the lengths of two adjacent sides of the rectangular sheet, and to control the first motor to rotate the rotation angle so that the positioning structure is aligned with the diagonal of the rectangular sheet material, so that the four positioning structures act on the four sides of the rectangular sheet material for positioning. The adsorption platform is adapted to generate suction to adsorb materials after centering is completed.
2. The centering device compatible with multiple sizes of rectangular and circular pieces according to claim 1, characterized in that, The positioning structure employs resin bearings, with four resin bearings respectively adapted to act on the four sides of the rectangular sheet material to center and position the material.
3. The centering device compatible with multiple sizes of rectangular and circular pieces according to claim 1, characterized in that, The support frame includes a horizontal plane and a vertical plane, and a linear guide rail is provided on the vertical plane; the driving device includes two synchronous pulleys provided on the horizontal plane, a synchronous belt connecting the two synchronous pulleys, and a drive motor connected to one of the synchronous pulleys; the two centering structures are respectively connected to both sides of the synchronous belt and are provided with sliders to connect to the linear guide rail, and the drive motor drives the two centering structures to move synchronously and equally.
4. The centering device compatible with multiple sizes of rectangular and circular pieces according to claim 1, characterized in that, It also includes a motor mounting base for mounting the first motor, wherein the motor mounting base is provided with an adsorption plate mounting base and the adsorption plate mounting base is provided with an adsorption platform to fix the adsorption platform directly above the output shaft of the first motor, and to make the central axis of the adsorption platform coincide with the central axis of the output shaft of the first motor.
5. The centering device compatible with multiple sizes of rectangular and circular pieces according to claim 4, characterized in that, The adsorption plate mounting base is equipped with a vacuum connector for connecting the adsorption platform and the vacuum device.
6. The centering device compatible with multiple sizes of rectangular and circular pieces according to claim 1, characterized in that, The positioning structure is detachably connected to the centering structure so that contacts of different hardness or materials can be selected for different process cleanliness requirements.
7. The centering device compatible with multiple sizes of rectangular and circular pieces according to claim 1, characterized in that, A miniature pressure sensor is installed on each positioning structure to monitor the contact pressure between the positioning structure and the edge of the material in real time. A microcontroller connected to the control system is integrated in the drive device. The microcontroller is adapted to adjust the pressure threshold of the centering structure on the material.