A calcining device for producing raw materials of isostatic pressing graphite crucibles for long crystal growth of third-generation semiconductors

Abstract

The application relates to the technical field of calcining equipment, in particular to calcining equipment for producing raw materials of isostatic pressing graphite crucibles for long crystal growth of the third generation semiconductor, which comprises a calcining cylinder, the lower end of the calcining cylinder is provided with a heating assembly, the heating assembly comprises a supporting ring movably installed at the bottom end of the calcining cylinder, the inner wall of the supporting ring is provided with a plurality of fan blades for guiding airflow, an inner cylinder is fixedly connected in the middle of the plurality of fan blades, two inner ring plates are fixedly connected in a symmetrical and uniform distribution mode on the outer wall of the inner cylinder, and a heating pipe is fixedly connected between the two inner ring plates. The spiral blade plates on the inner wall of the inner cylinder are driven to rotate to stir and process the raw materials, so that the temperature inside the raw materials can be uniformly distributed; in the rotating process, the fan blades between the inner cylinder and the supporting ring rotate to guide the airflow into the supporting cylinder in the middle of the inner cylinder, so that the central air cooling cooling can be combined with the stirring operation to rapidly cool the graphite crucible raw materials.

Description

Technical Field

[0001] This invention relates to the field of calcination equipment technology, and more specifically, to a calcination device for producing raw materials using isostatic graphite crucibles for third-generation semiconductor crystal growth. Background Technology

[0002] The calcination treatment of raw materials for isostatic pressing graphite crucibles used in third-generation semiconductor crystal growth is mainly to remove volatiles (such as moisture, carbon dioxide, sulfides, and other impurities) and organic residues from the raw materials, thereby improving the purity and stability of the raw materials, reducing the risk of defects such as pores and cracks that may occur during subsequent processing, and improving the crystal structure and density of the raw materials. This provides a high-quality foundation for subsequent graphitization and other processes, ensuring that the final isostatic pressing graphite crucible can meet the stringent requirements of third-generation semiconductor crystal growth processes for material purity, strength, and thermal stability.

[0003] After the graphite crucible raw material is calcined using calcination equipment, a cooling process is required. However, if only the outer wall of the calcination cylinder is cooled directly, the cooling process is slow. Since the graphite crucible raw material in the middle of the calcination cylinder cannot be directly cooled, heat cannot be quickly dissipated from the inside of the raw material, thus hindering the overall cooling efficiency of the raw material and impeding the progress of subsequent production processes.

[0004] A search revealed a calcination device for raw materials used in graphite crucible production, disclosed in publication number CN220708054U. The specification states: This utility model relates to the field of calcination equipment and discloses a calcination device for raw materials used in graphite crucible production, comprising: a calcination equipment box, a power motor fixedly mounted on the top of the calcination equipment box, a stirrer fixedly mounted at the output end of the power motor, a heating plate fixedly mounted inside the calcination equipment box, a graphite crucible raw material adding hopper fixedly mounted on the top of the calcination equipment box, and a cooling chamber formed on the calcination equipment box; a raw material cooling assembly, disposed on the calcination equipment box, the raw material cooling assembly including a heat-conducting partition fixedly installed in the cooling chamber, and water contained between the bottom of the heat-conducting partition and the cooling chamber. This utility model has the following advantages and effects: it can remove heat from the graphite crucible raw material, rapidly cooling the graphite crucible raw material, preventing the discharged graphite crucible raw material from being too hot, and improving safety; however, the above patent still has shortcomings in practical use.

[0005] Based on this, the present invention discloses a calcination device for producing raw materials using isostatic graphite crucibles for third-generation semiconductor crystal growth. Summary of the Invention

[0006] To address the problem mentioned in the background art that the graphite crucible raw material in the middle of the calcining cylinder cannot be directly cooled, and heat is difficult to dissipate rapidly from the inside of the raw material to the outside, this invention provides a calcining device for producing raw materials for isostatic pressing graphite crucibles used in third-generation semiconductor crystal growth. The device includes a calcining cylinder, with a heating assembly at its lower end. The heating assembly includes a support ring movably mounted at the bottom of the calcining cylinder. The inner wall of the support ring has several fan blades for guiding airflow. An inner cylinder is fixedly connected between the fan blades. Two inner ring plates are symmetrically and evenly distributed and fixedly connected to the outer wall of the inner cylinder. A heating tube is fixedly connected between the two inner ring plates. Several spiral blades for stirring the raw material are evenly distributed circumferentially on the inner wall of the inner cylinder, with the tail end of each spiral blade inclined relative to the axis of the inner cylinder. An open ring plate for concentrating airflow is movably connected to the bottom end of the spiral blades. A flow guiding assembly is provided above the open ring plate.

[0007] As a further improvement to this technical solution, a gear ring is fixedly connected to the outer wall of the support ring, an auxiliary gear is meshed with the outer wall of the support ring, and a motor is fixedly connected to the lower end of the auxiliary gear.

[0008] As a further improvement to this technical solution, an auxiliary ring groove is movably connected to the lower end of the support ring, and a base plate is fixedly connected to the bottom end of the auxiliary ring groove. The base plate is fixedly connected to the motor.

[0009] As a further improvement to this technical solution, an inverted conical funnel is fixedly connected to the bottom end of the base plate, and a discharge pipe is fixedly connected to the bottom end of the inverted conical funnel. A control valve is provided in the middle of the outer wall of the discharge pipe.

[0010] As a further improvement to this technical solution, the outer wall of the inverted conical funnel is uniformly distributed with several supports fixedly connected, and the other end of the supports is fixedly installed at the bottom of the base plate.

[0011] As a further improvement to this technical solution, the lower surface of the open ring plate is provided with a limiting inclined ring, and the surface of the limiting inclined ring is provided with a number of through holes evenly distributed around the circumference. The upper surface of the limiting inclined ring is fixedly connected with an inclined baffle evenly distributed around the circumference. The upper surface of the open ring plate is provided with a discharge window evenly distributed around the circumference. The discharge window is movably connected to the lower end of the spiral blade plate through the inclined baffle.

[0012] As a further improvement to this technical solution, the flow guiding assembly includes a support cylinder fixedly installed above the open ring plate, an inner conical ring cylinder fixedly connected above the support cylinder, a positioning ring provided in the concave part of the middle of the inner conical ring cylinder, a number of arc-shaped pipes fixedly connected to the outer wall of the positioning ring in a circumferentially evenly distributed manner, a number of side windows evenly distributed in the middle of the inner conical ring cylinder, a number of inner windows evenly distributed in the circumferentially evenly distributed on the inner wall of the positioning ring, and communicating with the arc-shaped pipes, and a filter assembly provided above the support cylinder.

[0013] As a further improvement to this technical solution, several of the arc-shaped pipes are fixedly connected to a lower grooved ring plate at the end away from the positioning ring. The bottom end of the lower grooved ring plate is fixedly installed at the top of the inner cylinder. The outer wall of the lower grooved ring plate is movably connected to the upper end of the inner wall of the calcining cylinder. Air inlet windows are evenly distributed in a circular pattern on the upper part of the outer wall of the calcining cylinder.

[0014] As a further improvement to this technical solution, the filter assembly includes several fixed ribs that are evenly distributed in a circle and fixedly installed on the upper part of the outer wall of the support cylinder, and filter screens for material screening are fixedly connected between the several fixed ribs.

[0015] As a further improvement to this technical solution, a feed opening ring is fixedly connected to the upper part of the outer wall of the calcining cylinder, and the bottom end of the inner wall of the feed opening ring is movably connected to the outer wall of the lower groove ring plate.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0017] 1. In the calcination equipment for the production of raw materials for isostatic graphite crucibles used in the growth of third-generation semiconductor crystals, the spiral blades on the inner wall of the inner cylinder are rotated to stir the raw materials, so that the internal temperature can be evenly distributed. During the rotation, the fan blades located between the inner cylinder and the support ring rotate to guide the airflow to the support cylinder in the middle of the inner cylinder, so as to improve the efficiency of the cooling process. Thus, the graphite crucible raw materials can be cooled quickly by combining central air cooling with stirring operation, ensuring safe operation while improving the efficiency of graphite crucible raw material processing.

[0018] 2. In the calcination equipment for producing raw materials for isostatic graphite crucibles used in third-generation semiconductor crystal growth, an arc-shaped pipe is erected between the support cylinder and the calcination cylinder. The airflow is then guided downward by the fan blades, passes through the support cylinder and enters the arc-shaped pipe, and is introduced into the inner cylinder and the calcination cylinder. This achieves airflow circulation, thereby enabling temperature regulation of the graphite crucible raw materials by adjusting the temperature between the center and the outer wall, thus improving the efficiency of raw material processing.

[0019] 3. In the calcination equipment for the production of raw materials for isostatic pressing graphite crucibles used in the growth of third-generation semiconductor crystals, the graphite crucible raw material is introduced onto the surface of the filter screen plate, and the inner cylinder, along with the lower groove ring plate, rotates, causing the arc-shaped pipe to scrape the surface of the filter screen plate to filter the graphite crucible raw material. This scraping and filtering before calcination improves the calcination effect of the graphite crucible raw material and prevents the particles from being too large and affecting the processing quality.

[0020] 4. During the raw material processing, the inner cylinder drives the spiral blades to rotate in the forward direction, cooperating with the support cylinder to stir the raw materials in the graphite crucible. During the discharge process, the inner cylinder drives the spiral blades to rotate in the reverse direction, and the lower end of the spiral blades pushes the inclined baffle, causing the limiting inclined ring to rotate on the open ring plate, thus opening the discharge window. This allows for flexible switching between the stirring structure and the pushing structure, improving the efficiency of raw material processing in the graphite crucible.

[0021] 5. During the heating or cooling process, driven by the gear ring, several fan blades generate airflow after rotation. This airflow passes from top to bottom through the gap between the calcining cylinder and the inner cylinder, and is guided into the inverted conical funnel. Due to the closed control valve, the airflow moves upward and is concentrated by the open ring plate, entering the support cylinder. During the heating process, it carries heat to the middle of the inner cylinder for auxiliary heating, thereby improving the efficiency of calcination heating. During the cooling process, it uses air cooling to increase the cooling rate. This allows for air blowing assistance to the graphite crucible raw material during the heating or cooling process, improving its heating or cooling efficiency. Attached Figure Description

[0022] Figure 1 A schematic diagram of the overall structure of the calcination equipment for producing raw materials using isostatic graphite crucibles for third-generation semiconductor crystal growth, provided for the invention. Figure 1 ;

[0023] Figure 2 A schematic diagram of the overall structure of the calcination equipment for producing raw materials using isostatic graphite crucibles for third-generation semiconductor crystal growth, provided for the invention. Figure 2 ;

[0024] Figure 3 A partial structural diagram of the heating and current guiding components in the calcination equipment for the raw materials of the isostatic graphite crucible used for third-generation semiconductor crystal growth, provided for the invention. Figure 1 ;

[0025] Figure 4 A partial structural diagram of the heating and current guiding components in the calcination equipment for the raw materials of the isostatic graphite crucible used for third-generation semiconductor crystal growth, provided for the invention. Figure 2 ;

[0026] Figure 5A partial structural diagram of the calcination equipment for producing raw materials for isostatic pressing graphite crucibles used in third-generation semiconductor crystal growth, provided for the invention. Figure 1 ;

[0027] Figure 6 A partial structural diagram of the calcination equipment for producing raw materials for isostatic pressing graphite crucibles used in third-generation semiconductor crystal growth, provided for the invention. Figure 2 ;

[0028] Figure 7 A partial structural diagram of the heating and current guiding components in the calcination equipment for the raw materials of the isostatic graphite crucible used for third-generation semiconductor crystal growth, provided for the invention. Figure 3 ;

[0029] Figure 8 A partial structural diagram of the heating and current guiding components in the calcination equipment for the raw materials of the isostatic graphite crucible used for third-generation semiconductor crystal growth, provided for the invention. Figure 4 ;

[0030] Figure 9 A partial structural diagram of the heating and current guiding components in the calcination equipment for the raw materials of the isostatic graphite crucible used for third-generation semiconductor crystal growth, provided for the invention. Figure 5 ;

[0031] Figure 10 A partial structural schematic diagram of the heating component in the calcination equipment for the raw materials of the isostatic graphite crucible used for third-generation semiconductor crystal growth, provided for the invention.

[0032] The meanings of the labels in the diagram are as follows:

[0033] 1. Calcination cylinder; 2. Heating assembly; 201. Gear ring; 202. Auxiliary gear; 203. Motor; 204. Support ring; 205. Fan blade; 206. Inner ring plate; 207. Spiral blade; 208. Heating tube; 209. Inner cylinder; 210. Limiting inclined ring; 211. Through hole; 212. Discharge window; 213. Inclined baffle; 214. Support rod; 215. Opening ring plate; 216. Auxiliary ring groove; 2 17. Curved frame plate; 3. Base plate; 4. Support; 5. Flow guide assembly; 501. Positioning ring; 502. Inner conical ring cylinder; 503. Side window; 504. Support cylinder; 505. Arc-shaped pipe; 506. Lower groove ring plate; 507. Inner window; 508. Air inlet window; 6. Filter assembly; 601. Feed opening ring; 602. Filter screen plate; 603. Fixing rib plate; 7. Control valve; 8. Inverted conical funnel; 9. Discharge pipe. Detailed Implementation

[0034] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0035] Existing calcination equipment, if it only adopts the method of directly cooling the outer wall of the calcination cylinder, the cooling process is relatively slow. Since the graphite crucible material in the middle of the calcination cylinder cannot be directly cooled, the heat is difficult to dissipate from the inside of the material to the outside quickly, which in turn drags down the overall cooling efficiency of the material and is not conducive to the progress of subsequent production processes.

[0036] Example 1: Therefore, this invention provides a calcination apparatus for producing raw materials using isostatic pressing graphite crucibles for third-generation semiconductor crystal growth, such as... Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9 and Figure 10As shown, it includes a calcining cylinder 1, with a heating assembly 2 at the lower end of the calcining cylinder 1. The heating assembly 2 includes a support ring 204 movably mounted at the bottom of the calcining cylinder 1. The inner wall of the support ring 204 is provided with several fan blades 205 for guiding airflow. An inner cylinder 209 is fixedly connected between the fan blades 205. Two inner ring plates 206 are symmetrically and evenly distributed and fixedly connected to the outer wall of the inner cylinder 209. A heating tube 208 is fixedly connected between the two inner ring plates 206. Several spiral blades 207 for stirring raw materials are evenly distributed circumferentially on the inner wall of the inner cylinder 209, and the tail end of each spiral blade 207 is inclined relative to the axis of the inner cylinder 209. An open ring plate 215 for concentrating airflow is movably connected to the bottom end of the spiral blades 207. A flow guide assembly 5 is provided above the open ring plate 215, through which the raw material is introduced into the inner cylinder 209, and then the gear ring 20... Driven by the rotation of the calcining cylinder 1, the inner cylinder 209 rotates in conjunction with the fan blades 205, causing the spiral blades 207 on the inner wall of the inner cylinder 209 to stir the material inside, ensuring uniform heating and rapid cooling. During the heating and cooling process, the fan blades 205 between the support ring 204 and the inner cylinder 209, driven by the gear ring 201, generate airflow after rotation. This airflow passes from top to bottom through the gap between the calcining cylinder 1 and the inner cylinder 209, and is guided into the inverted cone funnel 8. Due to the closure of the control valve 7, the airflow moves upward and is concentrated by the open ring plate 215, entering the support cylinder 504. During the heating process, the heat is carried to the middle of the inner cylinder 209 for auxiliary heating, improving the efficiency of calcination heating. During the cooling process, the air is used for cooling, increasing the cooling rate.

[0037] The rotation of the spiral blades 207 on the inner wall of the inner cylinder 209 stirs the raw material, ensuring a uniform temperature distribution inside. During rotation, the fan blades 205 between the inner cylinder 209 and the support ring 204 also rotate, guiding airflow to the support cylinder 504 in the middle of the inner cylinder 209. This enhances efficiency during the cooling process, enabling rapid cooling of the graphite crucible raw material through a combination of central air cooling and stirring. This ensures safe operation while improving the efficiency of processing the graphite crucible raw material.

[0038] Furthermore, such as Figure 2 , Figure 8 and Figure 9 As shown, a gear ring 201 is fixedly connected to the outer wall of the support ring 204, and an auxiliary gear 202 is meshed with the outer wall of the support ring 204. A motor 203 is fixedly connected to the lower end of the auxiliary gear 202. The motor 203 drives the auxiliary gear 202 to rotate, which in turn drives the gear ring 201 meshing with it to rotate, and the inner cylinder 209 to rotate accordingly.

[0039] Furthermore, such as Figure 1 , Figure 2 and Figure 6 As shown, an auxiliary ring groove 216 is movably connected to the lower end of the support ring 204. A base plate 3 is fixedly connected to the bottom end of the auxiliary ring groove 216. The base plate 3 is fixedly connected to the motor 203. Several curved support plates 217 are fixedly connected to the outer wall of the auxiliary ring groove 216 in a circumferentially even distribution. The upper end of the curved support plate 217 is fixedly installed on the lower end of the outer wall of the calcining cylinder 1. The support ring 204 is supported by the auxiliary ring groove 216 to ensure the stability of its rotation process.

[0040] Furthermore, such as Figure 1 and Figure 2 As shown, the outer wall of the inverted cone funnel 8 is uniformly distributed with several supports 4 fixedly connected. The other end of the support 4 is fixedly installed at the bottom of the base plate 3. The overall structure is supported by several supports 4 to ensure the safety of its operation.

[0041] Furthermore, such as Figure 1 and Figure 2 As shown, an inverted conical funnel 8 is fixedly connected to the bottom end of the base plate 3, and a discharge pipe 9 is fixedly connected to the bottom end of the inverted conical funnel 8. A control valve 7 is provided in the middle of the outer wall of the discharge pipe 9. The graphite crucible raw material falling through the inverted conical funnel 8 is collected, and the control valve 7 is used to open and close the discharge pipe 9.

[0042] Furthermore, such as Figure 3 and Figure 4 As shown, a limiting inclined ring 210 is provided on the lower surface of the open ring plate 215. Several through holes 211 are evenly distributed around the surface of the limiting inclined ring 210. An inclined baffle 213 is fixedly connected to the upper surface of the limiting inclined ring 210 in an evenly distributed manner. A discharge window 212 is evenly distributed around the upper surface of the open ring plate 215. The upper part of the inclined baffle 213 passes through the discharge window 212 and is movably connected to the lower end of the spiral blade 207. The spiral blade 207 is driven by the reverse inner cylinder 209, so that the inclined surface of the lower end of the spiral blade 207 is inclined. By moving the inclined baffle 213, the limiting inclined ring 210 located at the lower end of the open ring plate 215 rotates, aligning the through hole 211 in the limiting inclined ring 210 with the discharge window 212 on the surface of the open ring plate 215. At this time, the raw material of the graphite crucible is discharged through the aligned window. When rotating in the forward direction, the inclined baffle 213 rotates in the forward direction, causing the limiting inclined ring 210 to block the discharge window 212. If the rotation continues, the inclined surface at the lower end of the spiral blade 207 and its elasticity will not hinder the forward rotation of the inner cylinder 209.

[0043] Furthermore, such as Figure 3 and Figure 4As shown, several support rods 214 are fixedly connected to the lower surface of the open ring plate 215 in a circumferentially even distribution. The bottom ends of the support rods 214 are fixedly installed on the inner wall of the inverted cone funnel 8. The support rods 214 provide positioning support for the open ring plate 215, ensuring the stability of its inner cylinder 209 when rotating above.

[0044] Example 2 further optimizes the calcination equipment for producing raw materials using isostatic graphite crucibles for third-generation semiconductor crystal growth provided in Example 1. Specifically, as follows: Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 8 and Figure 9 As shown, the flow guiding assembly 5 includes a support cylinder 504 fixedly installed above the open ring plate 215. An inner conical ring cylinder 502 is fixedly connected above the support cylinder 504. A positioning ring 501 is provided in the concave part of the middle of the inner conical ring cylinder 502. Several arc-shaped pipes 505 are fixedly connected to the outer wall of the positioning ring 501 in a circumferentially evenly distributed manner. Several side windows 503 are evenly distributed in a circumferentially evenly distributed manner in the middle of the inner conical ring cylinder 502. Several inner windows 507 are evenly distributed in a circumferentially evenly distributed manner on the inner wall of the positioning ring 501 and are in communication with the arc-shaped pipes 505. A filter is provided above the support cylinder 504. Component 6, whose airflow is guided into the support cylinder 504, moves upward, enters the inner conical annular cylinder 502, passes through the side window 503, and enters the inner window 507 in the positioning ring 501, so that the airflow passes through the inner conical annular cylinder 502 and enters the positioning ring 501, exits into the arc-shaped pipe 505, passes through the lower groove ring plate 506, and enters the space between the calcining cylinder 1 and the inner cylinder 209. With the rotation of the inner cylinder 209, the fan blade 205 rotates in the calcining cylinder 1, causing the airflow to move downward and enter the support cylinder 504, thereby circulating and guiding the airflow.

[0045] By using the arc-shaped pipe 505 installed between the support cylinder 504 and the calcining cylinder 1, the airflow is guided downward by the fan blade 205, passes through the support cylinder 504 and enters the arc-shaped pipe 505, and is introduced into the inner cylinder 209 and the calcining cylinder 1, thereby realizing the circulation of airflow. This allows for the temperature regulation of the graphite crucible raw material by adjusting the temperature between the center and the outer wall, thus improving the efficiency of raw material processing.

[0046] Furthermore, such as Figure 5 and Figure 9As shown, several arc-shaped pipes 505 are fixedly connected to a lower grooved ring plate 506 at one end away from the positioning ring 501. The bottom end of the lower grooved ring plate 506 is fixedly installed at the top of the inner cylinder 209. The outer wall of the lower grooved ring plate 506 is movably connected to the upper end of the inner wall of the calcining cylinder 1. The gas discharged from the several arc-shaped pipes 505 is guided through the lower grooved ring plate 506 and enters the space between the calcining cylinder 1 and the inner cylinder 209. Air inlet windows 508 are evenly distributed in a circular pattern on the upper part of the outer wall of the calcining cylinder 1. The air inlet windows 508 guide the airflow in the space between the inner cylinder 209 and the calcining cylinder 1.

[0047] Example 3 further optimizes the calcination equipment for producing raw materials for isostatic pressing graphite crucibles used in third-generation semiconductor crystal growth provided in Examples 1 and 2. Specifically, as follows: Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 6 As shown, the filter assembly 6 includes several fixed ribs 603 that are evenly distributed and fixedly installed on the outer wall of the support cylinder 504. Filter screens 602 for material screening are fixedly connected between the fixed ribs 603. The graphite crucible raw material is introduced into the feed opening ring 601 and is located above the filter screen 602. During the raw material introduction process, the filter screen 602 filters the raw material. As the inner cylinder 209 rotates, the lower groove ring plate 506 located above rotates accordingly, causing the arc-shaped pipe 505 to scrape the surface of the filter screen 602, thus cooperating with it to perform filtration.

[0048] By introducing the raw material into the graphite crucible onto the surface of the filter screen plate 602, the inner cylinder 209, along with the lower groove ring plate 506, rotates, causing the arc-shaped pipe 505 to scrape the surface of the filter screen plate 602, thereby scraping and filtering the raw material in the graphite crucible. This allows for scraping and filtering before calcination, improving the calcination and processing effect of the raw material in the graphite crucible and preventing excessively large particles from affecting the processing quality.

[0049] Furthermore, such as Figure 5 As shown, a feed opening ring 601 is fixedly connected to the upper part of the outer wall of the calcining cylinder 1. The bottom end of the inner wall of the feed opening ring 601 is movably connected to the outer wall of the lower groove ring plate 506. The graphite crucible raw material is centrally introduced into the calcining cylinder 1 for processing through the feed opening ring 601.

[0050] The usage process of the calcination equipment for producing raw materials for isostatic pressing graphite crucibles used in third-generation semiconductor crystal growth provided by this invention is as follows:

[0051] Feeding: The staff places the entire structure in a safe processing position using the support 4, and then feeds the graphite crucible raw material into the feed opening ring 601, which falls onto the filter screen plate 602.

[0052] Filtration: The starting motor 203 drives the auxiliary gear 202, and the gear ring 201 meshing with it rotates accordingly, causing the inner cylinder 209 to rotate in the calcining cylinder 1, so that the lower groove ring plate 506 above rotates accordingly, and drives the arc-shaped pipe 505 to scrape the surface of the filter screen plate 602, thus performing filtration. After filtration, the graphite crucible raw material falls into the inner cylinder 209.

[0053] Heating treatment: After filtration is completed, the heating tube 208 is activated. The heat generated by the heating tube 208 calcines and heats the inner cylinder 209, heating the graphite crucible raw material. During the heating treatment, the gear ring 201 is driven to rotate. With the cooperation of the fan blades 205, the inner cylinder 209 inside is driven to rotate as well. The spiral blades 207 on the inner wall of the inner cylinder 209 stir the material inside, making it evenly heated. During the heating process, the fan blades 205 between the support ring 204 and the inner cylinder 209 are driven by the gear ring 201. After the fan blades 205 rotate, they generate airflow, which passes from top to bottom through the gap between the calcining cylinder 1 and the inner cylinder 209 and is guided into the inverted cone funnel 8. Since the control valve 7 is closed, it moves upward and is concentrated by the open ring plate 215, entering the support cylinder 504. The heat is then carried to the middle of the inner cylinder 209 for auxiliary heating, which improves the efficiency of calcination heating.

[0054] Circulation: The airflow carrying hot air from the outer wall of the heating tube 208 is introduced into the support cylinder 504, moves upward, enters the inner conical ring cylinder 502, passes through the side window 503, and enters the inner window 507 in the positioning ring 501. This allows the airflow to pass through the inner conical ring cylinder 502 and into the positioning ring 501, exiting through the arc-shaped pipe 505, passing through the lower groove ring plate 506, and entering the space between the calcining cylinder 1 and the inner cylinder 209. With the rotation of the inner cylinder 209, the fan blade 205 rotates in the calcining cylinder 1, causing the airflow to move downward and enter the support cylinder 504. This circulation guides the airflow to heat the center and outer wall of the inner cylinder 209 from the inside and outside, thereby rapidly and uniformly heating the graphite crucible raw material.

[0055] Cooling process: The heating tube 208 is turned off, and the motor 203 continues to rotate forward with the auxiliary gear 202. At this time, the fan blades 205, which are located between the inner ring plate 206 and the inner cylinder 209, will guide the airflow through the air inlet window 508, through the space between the calcining cylinder 1 and the inner cylinder 209, into the bottom of the inner cylinder 209, where it will be concentrated by the open ring plate 215 and move upward into the support cylinder 504. Following the inner conical ring plate and the positioning ring 501, it will enter the arc-shaped pipe 505, pass through the lower groove ring plate 506, and be introduced into the circulation flow of air between the inner cylinder 209 and the calcining cylinder 1, thereby quickly cooling the air.

[0056] Discharge: After the temperature of the raw material in the graphite crucible is cooled to a safe range, the motor 203 is started to drive the auxiliary gear 202 to rotate in the opposite direction. The gear ring 201 meshing with it then rotates accordingly, causing the inner cylinder 209 to rotate in the opposite direction in the calcining cylinder 1. This causes the inclined surface at the lower end of the spiral blade 207 to push the inclined baffle 213, which in turn drives the limiting inclined ring 210 at the lower end of the open ring plate 215 to rotate. This aligns the through hole 211 in the limiting inclined ring 210 with the discharge window 212 on the surface of the open ring plate 215. At this time, the raw material in the graphite crucible is discharged through the aligned window. When rotating in the forward direction, the inclined baffle 213 is pushed to rotate in the forward direction, causing the limiting inclined ring 210 to block the discharge window 212. If the rotation continues, the inclined surface at the lower end of the spiral blade 207 and its elasticity will not obstruct the forward rotation of the inner cylinder 209.

[0057] Export: The raw material from the graphite crucible is exported through the discharge window 212 and falls into the inverted conical funnel 8 for collection. Then, the control valve 7 on the outer wall of the discharge pipe 9 is opened to export the processed raw material from the graphite crucible.

[0058] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0059] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A calcination apparatus for producing raw materials for isostatic pressing graphite crucibles used in the growth of third-generation semiconductor crystals, comprising a calcination cylinder (1), wherein a heating assembly (2) is provided at the lower end of the calcination cylinder (1), characterized in that: The heating assembly (2) includes a support ring (204) movably mounted at the bottom of the calcining cylinder (1). The inner wall of the support ring (204) is provided with several fan blades (205) for guiding airflow. An inner cylinder (209) is fixedly connected between the fan blades (205). Two inner ring plates (206) are fixedly connected to the outer wall of the inner cylinder (209) in a symmetrical and uniform manner. A heating tube (208) is fixedly connected between the two inner ring plates (206). Several spiral blades (207) for stirring raw materials are evenly distributed around the inner wall of the inner cylinder (209). The tail end of each spiral blade (207) is... Inclined relative to the axis of the inner cylinder (209), several spiral blades (207) are movably connected to the bottom end of an open ring plate (215) for concentrating airflow. A flow guiding assembly (5) is provided above the open ring plate (215). The flow guiding assembly (5) includes a support cylinder (504) fixedly installed above the open ring plate (215). An inner conical ring cylinder (502) is fixedly connected above the support cylinder (504). A positioning ring (501) is provided in the concave part of the middle of the inner conical ring cylinder (502). Several arc-shaped pipes (505) are fixedly connected to the outer wall of the positioning ring (501) in a circumferentially even distribution.

2. The calcination equipment for producing raw materials for isostatic pressing graphite crucibles used in third-generation semiconductor crystal growth according to claim 1, characterized in that: A gear ring (201) is fixedly connected to the outer wall of the support ring (204), and an auxiliary gear (202) is meshed with the outer wall of the support ring (204). A motor (203) is fixedly connected to the lower end of the auxiliary gear (202).

3. The calcination equipment for producing raw materials for isostatic pressing graphite crucibles used in third-generation semiconductor crystal growth according to claim 2, characterized in that: The lower end of the support ring (204) is movably connected to an auxiliary ring groove (216), and the bottom end of the auxiliary ring groove (216) is fixedly connected to a base plate (3). The base plate (3) is fixedly connected to the motor (203).

4. The calcination equipment for producing raw materials for isostatic pressing graphite crucibles used in third-generation semiconductor crystal growth according to claim 3, characterized in that: The bottom plate (3) is fixedly connected to an inverted cone funnel (8), and the bottom of the inverted cone funnel (8) is fixedly connected to a discharge pipe (9). A control valve (7) is provided in the middle of the outer wall of the discharge pipe (9).

5. The calcination equipment for producing raw materials for isostatic pressing graphite crucibles used in third-generation semiconductor crystal growth according to claim 4, characterized in that: The outer wall of the inverted cone funnel (8) is uniformly distributed with several supports (4) fixedly connected, and the other end of the support (4) is fixedly installed on the bottom end of the base plate (3).

6. The calcination equipment for producing raw materials for isostatic pressing graphite crucibles used in third-generation semiconductor crystal growth according to claim 1, characterized in that: The lower surface of the open ring plate (215) is provided with a limiting inclined ring (210). The surface of the limiting inclined ring (210) is provided with a number of through holes (211) evenly distributed around the circumference. The upper surface of the limiting inclined ring (210) is fixedly connected with an inclined baffle (213) evenly distributed around the circumference. The upper surface of the open ring plate (215) is provided with a discharge window (212) evenly distributed around the circumference. The upper part of the inclined baffle (213) passes through the discharge window (212) and is movably connected to the lower end of the spiral blade plate (207).

7. The calcination equipment for producing raw materials for isostatic pressing graphite crucibles used in third-generation semiconductor crystal growth according to claim 1, characterized in that: The inner conical ring cylinder (502) has several side windows (503) evenly distributed in the middle of the circumference, and the inner wall of the positioning ring (501) has several inner windows (507) evenly distributed in the circumference, which are connected to the arc-shaped pipe (505). The support cylinder (504) is provided with a filter assembly (6) above it.

8. The calcination equipment for producing raw materials for isostatic pressing graphite crucibles used in third-generation semiconductor crystal growth according to claim 7, characterized in that: Several of the arc-shaped pipes (505) are fixedly connected to a lower groove ring plate (506) at one end away from the positioning ring (501). The bottom end of the lower groove ring plate (506) is fixedly installed at the top of the inner cylinder (209). The outer wall of the lower groove ring plate (506) is movably connected to the upper end of the inner wall of the calcining cylinder (1). Air inlet windows (508) are evenly distributed in a circular pattern on the upper part of the outer wall of the calcining cylinder (1).

9. The calcination equipment for producing raw materials for isostatic pressing graphite crucibles used in third-generation semiconductor crystal growth according to claim 7, characterized in that: The filter assembly (6) includes a plurality of fixed ribs (603) that are uniformly distributed in a circle and fixedly installed on the upper part of the outer wall of the support cylinder (504), and filter screens (602) for material screening are fixedly connected between the plurality of fixed ribs (603).

10. The calcination equipment for producing raw materials for isostatic pressing graphite crucibles used in third-generation semiconductor crystal growth according to claim 8, characterized in that: A feed opening ring (601) is fixedly connected to the upper part of the outer wall of the calcining cylinder (1), and the bottom end of the inner wall of the feed opening ring (601) is movably connected to the outer wall of the lower groove ring plate (506).

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