Diamond NV color center wide field detection system capable of continuously illuminating and illumination detection method

Abstract

The invention provides a diamond NV color center wide field detection system capable of continuously illuminating and an illumination detection method. The system comprises a diamond containing an NV color center, an excitation light module, a first double-color sheet, an objective lens, a second double-color sheet, a wide field imaging module, an illumination light module, an illumination imaging module and a microwave module, exciting light generated by the exciting light module irradiates to the first double-color piece, is guided to the objective lens and irradiates to the diamond after being transmitted by the objective lens, and illumination light generated by the illumination light module irradiates to a sample to be detected; the wavelength of the illumination light is different from that of the fluorescence; fluorescent light generated by excitation of the diamond and illumination light from a to-be-detected sample are collected by the objective lens, then transmitted to the first double-color piece and guided to the second double-color piece through the first double-color piece, the second double-color piece guides the fluorescent light in the second double-color piece to the wide-field imaging module for imaging, and the illumination light is guided to the illumination imaging module for imaging. Therefore, continuous illumination detection during wide-field imaging work is realized, and the efficiency is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of quantum measurement technology, in particular to a diamond NV color center wide field detection system with sustainable illumination and an illumination detection method. BACKGROUND

[0002] The existing diamond NV color center wide field detection system uses a long-pass filter in front of the lens to filter out red fluorescence, resulting in weak illumination on the object side in the non-working state, and the object side observed on the image side is not clear enough, so that the state of the object to be measured cannot be judged. In the prior art, red light illumination is used to supplement the illumination light on the object side, see patent application No. CN202323228797.4, but in this system, the illumination system can only be used in the non-working state, that is, the illumination light is turned on for illumination detection when the excitation light is turned off. However, for some cases that require illumination observation in the working state, for example, when wide field imaging is performed on multiple regions of the sample to be measured, the sample to be measured needs to be moved to another region after imaging in each region. In the prior art, the excitation light can only be turned off and the illumination light can only be turned on to observe and position the specified detection region of the sample each time the sample needs to be moved. On the one hand, this makes the operation steps complicated, and on the other hand, for some excitation light, a certain period of time needs to be waited after the excitation light is turned on again to restore to a stable state, which obviously reduces the efficiency and affects the performance of the excitation light due to the multiple on-off operations. SUMMARY

[0003] In view of the above-mentioned shortcomings of the prior art, the present application aims to provide a diamond NV color center wide field detection system with sustainable illumination and an illumination detection method, which can solve the problem that the illumination in the wide field detection of the prior art can only be used in the non-working state and cannot meet the demand for illumination observation in the working state.

[0004] To achieve the above-mentioned purposes and other related purposes, the first aspect of the present application provides a diamond NV color center wide field detection system with sustainable illumination, comprising: a diamond containing NV color centers, an excitation light module, a first dichroic mirror, an objective lens, a second dichroic mirror, a wide field imaging module, an illumination light module, an illumination imaging module, and a microwave module. The excitation light generated by the excitation light module is irradiated to the first dichroic mirror and is guided to the objective lens, and is transmitted by the objective lens to irradiate the diamond, so as to excite the diamond NV color center to generate fluorescence; the objective lens is an infinite type; The illumination light generated by the illumination light module is irradiated onto the sample to be measured; the wavelength of the illumination light is different from the wavelength of the fluorescence; The fluorescence generated by the excitation of the diamond and the illumination light from the sample to be detected are collected by the objective lens and transmitted to the first dichroic mirror, guided to the second dichroic mirror by the first dichroic mirror, the fluorescence in the second dichroic mirror is guided to the wide-field imaging module for imaging, and the illumination light in the second dichroic mirror is guided to the illumination imaging module for imaging. The microwave module is used to radiate microwaves to the diamond.

[0005] Further, the wavelength λ1 of the illumination light is 532nm<λ1<600nm, the first dichroic mirror is an interference type long pass dichroic mirror or a short pass dichroic mirror with a cutoff wavelength λ2 of 532nm<λ2<550nm, and λ2<λ1, and the second dichroic mirror is an interference type long pass dichroic mirror or a short pass dichroic mirror with a cutoff wavelength λ3 of 600nm≤λ3<640nm.

[0006] Further, the wavelength λ1 of the illumination light is 600nm≤λ1<630nm, the first dichroic mirror is an interference type long pass dichroic mirror or a short pass dichroic mirror with a cutoff wavelength λ2 of 532nm<λ2<600nm, and the second dichroic mirror is an interference type long pass dichroic mirror or a short pass dichroic mirror with a cutoff wavelength λ3 of 630nm≤λ3≤640nm.

[0007] Further, the excitation light module includes a laser and a first condenser lens, or the excitation light module includes a light-emitting diode and one or more condenser lenses.

[0008] Further, the illumination light module includes an illumination light source, the illumination light source is a ring-shaped illumination lamp with a hollow structure, and is arranged between the objective lens and the first dichroic mirror, and the hollow part is opposite to the objective lens.

[0009] Further, the illumination light module includes an illumination light source and a second condenser lens, the illumination light source is a light-emitting diode or a laser, and further includes a light splitting plate located on the light path between the second dichroic mirror and the illumination imaging module, the illumination light generated by the illumination light module is irradiated to the light splitting plate, a part of the light split by the light splitting plate is irradiated to the second dichroic mirror, and the illumination light guided by the second dichroic mirror to the illumination imaging module is first transmitted to the light splitting plate, and a part of the light split by the light splitting plate is transmitted to the illumination imaging module.

[0010] Further, the wide-field imaging module includes a first filter, a first imaging lens and a first imaging camera arranged in sequence along the light collection direction; and the illumination imaging module includes a second imaging lens and a second imaging camera arranged in sequence along the light collection direction.

[0011] Further, the illumination imaging module further includes a second filter located on the light path between the second imaging lens and the second dichroic mirror.

[0012] Further, a bias magnetic field module is further included for applying a bias magnetic field to the probe.

[0013] To achieve the above object and other related objects, the second aspect of the present application provides a method for illumination detection of synchronous wide-field imaging, which adopts the sustainable illumination diamond NV color center wide-field detection system as described in any one of the first aspect, and the method comprises: Placing the sample to be measured below the diamond, turning on the excitation light irradiation of the excitation light module and the illumination light irradiation of the illumination light module, imaging the fluorescence by the wide-field imaging module, and imaging the illumination light by the illumination imaging module; when measuring the magnetic field of the sample to be measured, performing ODMR measurement, reading the fluorescence imaging data output by the wide-field imaging module, and obtaining the magnetic field intensity distribution according to the data; when it is necessary to observe the sample to be measured, reading the illumination imaging image output by the illumination imaging module, i.e. obtaining the imaging image of the sample surface.

[0014] As described above, the sustainable illumination diamond NV color center wide-field detection system and the illumination detection method of the present application have the following beneficial effects: by setting the excitation light module and the illumination light module, respectively for exciting the diamond NV color center to generate fluorescence and providing illumination light, and making the wavelength of the illumination light different from the wavelength of the fluorescence, and then setting the second dichroic mirror in the light path of the fluorescence and the reflected illumination light to separate the two wavelengths of light to the wide-field imaging module and the illumination imaging module respectively, the sustainable illumination detection can be realized when the wide-field imaging is working, which is convenient for application in obtaining the imaging information of the sample while the wide-field imaging is being performed. Moreover, the illumination detection can be performed in the state that the excitation light module is always turned on, which can improve the efficiency and reduce the loss and noise caused by multiple switching of the system. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 The first structure schematic diagram of the sustainable illumination diamond NV color center wide-field detection system is shown; Figure 2 The second structure schematic diagram of the sustainable illumination diamond NV color center wide-field detection system is shown; Figure 3 The third structure schematic diagram of the sustainable illumination diamond NV color center wide-field detection system is shown.

[0016] Component labeling: 1—Diamond; 2—Excitation light module; 21—Laser; 22—First condenser lens; 23—Light emitting diode; 24—TIR lens; 25—Convex lens; 3—First dichroic filter; 4—Objective lens; 5—Second dichroic filter; 6—Wide-field imaging module; 61—First filter; 62—First imaging lens; 63—First imaging camera; 7—Illumination light module; 71—Illumination source; 8—Illumination imaging module; 81—Second imaging lens; 82—Second imaging camera; 83—Second filter; 9—Microwave module; 91—Microwave generation module; 92—Microwave antenna; 10—Sample under test; 20—Beam splitter; 30—Magnet; 40—Moving device; 50—Data processing module. Detailed Implementation

[0017] The following specific examples illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that, unless otherwise specified, the following embodiments and features described therein can be combined with each other.

[0018] It should be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of the present invention. Therefore, the illustrations only show the components related to the present invention and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0019] Example 1: As Figure 1 As shown, this embodiment provides a wide-field detection system for diamond NV color centers with sustainable illumination, including: a diamond containing NV color centers 1, an excitation light module 2, a first dichroic film 3, an objective lens 4, a second dichroic film 5, a wide-field imaging module 6, an illumination light module 7, an illumination imaging module 8, and a microwave module 9. The excitation light generated by the excitation light module 2 shines on the first dichroic film 3 and is guided to the objective lens 4. After being transmitted through the objective lens 4, it shines on the diamond 1 to excite the diamond NV color center to produce fluorescence; the objective lens is of the infinity type. The illumination light generated by the illumination light module 7 shines on the sample 10 to be tested; the wavelength of the illumination light is different from the wavelength of the fluorescence. The fluorescence generated by the diamond 1 and the illumination light from the sample 10 are collected by the objective lens 4 and transmitted to the first dichroic film 3. The first dichroic film 3 guides the fluorescence to the second dichroic film 5. The second dichroic film 5 guides the fluorescence to the wide-field imaging module 6 for imaging and the illumination light to the illumination imaging module 8 for imaging. The microwave module 9 is used to radiate microwaves to the diamond 1.

[0020] In this embodiment, by setting the excitation light module and the illumination light module, respectively for exciting the diamond NV color center to generate fluorescence and providing illumination light, and making the wavelength of the illumination light different from the wavelength of the fluorescence, and then setting the second dichroic plate in the light path of the fluorescence and the reflected illumination light to separate the two wavelengths of light to the wide-field imaging module and the illumination imaging module, respectively, so as to realize continuous illumination detection when working in wide-field imaging, which is convenient for applying to obtain imaging information of the sample while imaging in wide-field, especially when imaging multiple target regions of the sample, after each imaging region is changed, whether the changed imaging region is the target region can be observed in real time through illumination imaging; at the same time, the existing technology can only implement illumination detection in the non-working state of wide-field imaging, and there is a problem that it occupies a lot of time to wait for system stabilization after restarting due to switching control of the excitation light source to switch the working state and the non-working state, and in this embodiment, the illumination detection can be implemented in the state that the excitation light module is always on, which can obviously improve the efficiency and reduce the loss and noise caused by multiple switching of the system.

[0021] Since the excitation light wavelength of the diamond NV color center is 532 nm, and the wavelength of the fluorescence generated by excitation is 600 nm-800 nm, most of which is 637 nm-800 nm, the wavelength λ1 of the illumination light is set to 532 nm<λ1<600 nm, the first dichroic plate 3 is an interference type long-pass dichroic plate or a short-pass dichroic plate with a cutoff wavelength λ2 of 532 nm<λ2<550 nm, and λ2<λ1, and the second dichroic plate 5 is an interference type long-pass dichroic plate or a short-pass dichroic plate with a cutoff wavelength λ3 of 600 nm≤λ3<640 nm. As shown in the example of Figure 1 , the first dichroic plate 3 is a long-pass type, reflecting the excitation light and transmitting the fluorescence, and the second dichroic plate 5 is a long-pass type, transmitting the fluorescence and reflecting the illumination light, so that the first dichroic plate 3 can reflect the 532 nm laser generated by the excitation light module to the objective lens, and transmit the illumination light and the fluorescence greater than the cutoff wavelength to the second dichroic plate 5, and the second dichroic plate 5 transmits the fluorescence greater than the cutoff wavelength to the wide-field imaging module, and reflects the light smaller than the cutoff wavelength to the illumination imaging module. Of course, the light reflected to the illumination imaging module may also include fluorescence smaller than the cutoff wavelength, which does not hinder the illumination imaging. Of course, as shown in Figure 3 , both dichroic plates are short-pass type. It should be noted that for the first dichroic plate 3, when the cutoff wavelength adopted makes 532 nm in the transition band of the spectral transmittance curve, part of the 532 nm excitation light may be directed to the second dichroic plate 5 and then to the illumination imaging module, so that part of the excitation light is also used for illumination. This case is also feasible. Of course, as shown in Figure 2As shown, a second filter is arranged in the illumination imaging module, located on the light path between the second imaging lens and the second dichroic filter, and the 532 nm excitation light is filtered out. At this time, the second filter can be an absorption type long pass filter with a cutoff wavelength greater than 532 nm and less than λ1, or an absorption type band pass filter that only allows illumination light to pass through, and the possible doped fluorescent light is also filtered out.

[0022] The excitation light generated by the excitation light module 2 can be laser light, for example Figure 1 As shown, the excitation light module 2 includes a laser 21 and a first condenser lens 22. The 532 nm laser generated by the laser 21 is transmitted to the first dichroic filter 3 after being converged by the first condenser lens 22. The first condenser lens 22 shapes the light beam to obtain a light beam size that meets the subsequent objective lens requirements, and cooperates with the objective lens to realize wide-range imaging. The first condenser lens 22 can be a double-convex lens. The excitation light beam output by the laser 21 is a coarse light beam, and the light beam diameter is 10-25 mm to meet the wide field requirement.

[0023] The excitation light generated by the excitation light module can also be incoherent light, for example Figure 2 As shown, the excitation light module includes a light-emitting diode 23 and one or more condenser lenses. The excitation light generated by the light-emitting diode 23 is incoherent light, which can make the generated light spot have better uniformity compared to highly coherent laser light, avoiding the generation of interference fringes in imaging. The condenser lens can be a TIR lens (total internal reflection lens), Figure 2 As shown in the middle, a TIR lens 24 is used to converge and collimate the incoherent light emitted by the first excitation light source 11 to reduce the divergence angle and improve the light intensity. As shown in the lower left Figure 3 As shown, a TIR lens 24 and a convex lens 25 are combined. The convex lens 25 converges the collimated light beam emitted by the TIR lens, and in combination with the subsequent objective lens, the size of the light spot on the object side of the objective lens can be increased to meet the wide field imaging requirement. The convex lens 25 is a plano-convex lens, and can also be a double-convex lens. The TIR lens can also be combined with a hemispherical lens.

[0024] The illumination light module 7 includes an illumination light source 71, which is a ring-shaped illumination lamp with a hollow structure, arranged between the objective lens 4 and the first dichroic filter 3, and the hollow part is opposite to the objective lens. The diameter of the ring-shaped illumination lamp needs to be set so that the illumination light emitted thereby can irradiate the sample 10 to be measured located below the diamond 1. The illumination light is reflected to the diamond 1 after being irradiated by the sample 10, and is transmitted to the objective lens through the diamond 1.

[0025] The wide-field imaging module 6 comprises a first filter 61, a first imaging lens 62 and a first imaging camera 63 arranged in sequence along the light collection direction. The illumination imaging module 8 comprises a second imaging lens 81 and a second imaging camera 82 arranged in sequence along the light collection direction. The first imaging lens 62 and the second imaging lens 81 are both FA lenses or tube lenses, and the first imaging camera 63 and the second imaging camera 82 are both CCD or CMOS cameras. The first filter 61 is used to filter out fluorescence above 637 nm, and an absorption type long-pass filter with a cutoff wavelength of 637 nm-640 nm can be optionally used.

[0026] The microwave module 9 comprises a microwave generating module 91 and a microwave antenna 92. The microwave generating module 91 can exemplarily comprise a microwave source, a microwave switch, a microwave amplifier and a microwave circulator connected in sequence. The microwave generated by the microwave source is radiated to the diamond 1 by the microwave antenna 92 after being transmitted to the microwave antenna 92. The diamond 1 in the embodiment is in a sheet structure, and the size is several tens or hundreds of microns or several millimeters, which can realize wide-field imaging. The diamond is a transparent body, and the light irradiated onto the diamond can be transmitted to the sample by the diamond. The microwave antenna 92 can be a microstrip antenna, for example, a coplanar waveguide. The diamond is located in or below the central hole of the coplanar waveguide, and the light is irradiated to the diamond by the central hole.

[0027] In some cases in the embodiment, for example, when the direction of the magnetic field to be measured is known, the required ODMR spectrum can be obtained by adjusting the included angle between the direction of the magnetic field and the color center axial direction. In some cases, for example, when the direction of the magnetic field to be measured is unknown or weak magnetic field is detected, a bias magnetic field module for applying a bias magnetic field to the diamond can be further added, which is used to adjust the resonance peak generated by the color center, or used to make the color center work in the linear region for weak magnetic detection, or used to adjust the detection frequency band to improve the sensitivity of weak magnetic detection. The bias magnetic field module exemplarily comprises a Helmholtz coil or a magnet 30 as shown in Figure 2

[0028] Embodiment two: on the basis of embodiment one, as shown in Figure 2 ​As shown, the illumination light module 7 of the embodiment includes an illumination light source 71, which is a light emitting diode or a laser, a second condenser lens 72, and a light splitting plate 20 located on the light path between the second dichroic plate 5 and the illumination imaging module 8. The illumination light generated by the illumination light module 7 is irradiated to the light splitting plate 20, and a part of the light split by the light splitting plate 20 is irradiated to the second dichroic plate 5. The illumination light guided by the second dichroic plate 5 to the illumination imaging module 8 is first transmitted to the light splitting plate 20, and a part of the light transmitted by the light splitting plate 20 is transmitted to the illumination imaging module 8. In the embodiment, the light splitting plate 20 splits a part of the illumination light from the illumination light module 7 by reflection and irradiates it to the second dichroic plate 5. The illumination light guided by the second dichroic plate 5 to the illumination imaging module 8 is transmitted by the light splitting plate 20, and a part of the light transmitted by the light splitting plate 20 is transmitted to the illumination imaging module 8. The reflection and transmission modes can also be reversed.

[0029] The light splitting plate 20 is of a high-transmission and low-reflection type to transmit more illumination light for imaging. For example, the light splitting plate with a splitting ratio (T:R) of 9:1 is used. The wavelength λ1 of the illumination light is 600nm≤λ1<630nm, the first dichroic plate is a long-pass dichroic plate or a short-pass dichroic plate with a cutoff wavelength λ2 of 532nm<λ2<600nm, and the second dichroic plate is a long-pass dichroic plate or a short-pass dichroic plate with a cutoff wavelength λ3 of 630nm≤λ3≤640nm. A second filter 83 is arranged in the illumination imaging module 8 and located on the light path between the second imaging lens 81 and the second dichroic plate 5 to filter out the 532nm excitation light that may exist in the reflected illumination light. At this time, the second filter 83 can be an absorption type long-pass filter with a cutoff wavelength greater than 532nm and λ1 or a band-pass filter that allows the illumination light to pass through, so as to transmit as much illumination light as possible to the imaging camera. In the embodiment, the illumination light wavelength is set to the red light range, which is close to the fluorescence wavelength, so that the first imaging camera 63 and the second imaging camera 82 can use the same model, simplifying the selection of camera models.

[0030] In the embodiment, the first imaging lens 62 can be further set as a fixed-focus lens, and the second imaging lens 81 can be set as a zoom lens. The fixed-focus lens is used for wide-field imaging and can ensure the imaging quality. The zoom lens is used for illumination imaging and can adjust the imaging field of view as needed, facilitating observation for different purposes. When a low magnification objective lens, for example, a 5x magnification objective lens, is selected, the detection field of view of the objective lens can be greater than the area of the diamond. At this time, the fixed-focus lens can be used to focus only the field of view on the surface of the diamond, and the zoom lens can be used to change the field of view focusing on the surface of the diamond and the surrounding area of the diamond.

[0031] Embodiment three: the embodiment provides a kind of illumination detection method of synchronous wide field imaging, using the sustainable illumination diamond NV color center wide field detection system in embodiment one or embodiment two, comprising: the sample 10 to be measured is placed below diamond 1, the excitation light irradiation of excitation light module 2 and the illumination light irradiation of illumination light module 7 are opened, fluorescence imaging is formed by wide field imaging module 6, and illumination imaging module 8 is imaged by illumination light;When measuring the magnetic field of the sample 10 to be measured, ODMR measurement is carried out, and the fluorescence imaging data output by wide field imaging module 6 is read, and the magnetic field intensity distribution is obtained according to the data;When needing to observe the sample to be measured, the illumination imaging map output by illumination imaging module 8 is read, that is, the imaging map of the surface of sample is obtained.

[0032] The principle of diamond NV color center measuring magnetic field is that the Zeeman splitting effect of NV color center ground state level caused by external magnetic field is used, then the frequency shift of ODMR spectrum resonance point is detected, and finally the frequency shift is converted into magnetic field intensity using NV color center electron spin gyromagnetic ratio, so that the purpose of detecting external magnetic field is realized.

[0033] Using the wide field detection system of the embodiment to implement ODMR measurement to obtain magnetic field intensity distribution means that when ODMR is implemented by using microwave sweep method, fluorescence imaging is carried out for each frequency point, gray scale map is obtained, imaging data is acquired, ODMR spectrum line of gray scale value of each pixel point with microwave frequency is drawn, and then the resonance frequency on the spectrum line is used to calculate the magnetic field intensity of each pixel point, so that the magnetic field intensity distribution is formed in a graph. The feature information of the surface of the sample to be measured can be reflected in the illumination imaging map, which can be used to observe whether the target region is in the field of view. The image output by the illumination imaging module can be read as needed, for example, in the initial stage of wide field detection, the position of the sample to be measured is observed by using illumination imaging to determine whether the target region is in the detection field of view. Or after ODMR measurement is implemented on a detection region of the sample to be measured, other regions are moved to the detection field of view, and the target region is observed in the detection field of view by illumination imaging. Or after ODMR is implemented, the target region on the sample to be measured needs to be checked according to the obtained magnetic field intensity distribution.

[0034] In the application to multi-region wide field imaging, on the basis of the sustainable illumination diamond NV color center wide field detection system in embodiment one or embodiment two, the wide field detection system further comprises Figure 3The apparatus further comprises a moving device 40, which carries a table for placing the sample 10 to be measured and can control the movement of the sample 10 to be measured; and a data processing module 50, which is connected to the wide-field imaging module 6 and the illumination imaging module 8, is used for reading and processing the fluorescence imaging data and the illumination imaging image, and is connected to the microwave module 9, which is used for controlling the microwave frequency radiated thereby, and the synchronous illumination detection method of the wide-field imaging comprises the following steps: S1, placing the sample 10 to be measured below the diamond 1, adjusting the position of the sample 10 to be measured by the moving device 40, turning on the excitation light irradiation of the excitation light module 2 and the illumination light irradiation of the illumination light module 7, and imaging the fluorescence by the wide-field imaging module 6 and imaging the illumination light by the illumination imaging module 8; S2, collecting the illumination imaging image by the data processing module 50, obtaining the imaging image of the sample surface according to the data, analyzing and judging the imaging image, if it is a target region, performing ODMR measurement on the target region, collecting the fluorescence imaging data by the data processing module 50, obtaining the magnetic field strength distribution according to the data, and then performing step S4; if it is a non-target region, performing step S3; S3, adjusting the position of the sample 10 to be measured by the moving device 40, and performing step S2; S4, if there are still target regions to be detected, performing step S3; if there are no target regions to be detected, ending the measurement.

[0035] The above-mentioned target region is known in advance and can be limited by specific coordinates. The moving device can use a three-dimensional precision adjusting device. When the position of the sample to be measured is adjusted by the moving device 40, the three-dimensional displacement of the movement is also set according to the coordinates of the region, but whether the position adjustment according to the theoretical design can ensure that the required target region is located in the imaging field of view needs to be calibrated before wide-field imaging. The illumination detection of the present embodiment further verifies and calibrates whether the target region of the sample to be measured is located in the imaging field of view after the position adjustment, so as to avoid measurement errors caused by operation errors or inaccurate movement displacement designed in advance, and to ensure the accuracy of the final magnetic field measurement.

[0036] The above-mentioned embodiments only exemplarily illustrate the principles and effects of the present application, and are not used to limit the present application. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present application. Therefore, all equivalent modifications or changes completed by those skilled in the art without departing from the spirit and technical thought disclosed by the present application should be covered by the claims of the present application.

Claims

1. A wide-field detection system for diamond NV color centers under sustainable illumination, characterized in that, The detection system includes: a diamond containing NV color centers, an excitation light module, a first dichroic film, an objective lens, a second dichroic film, a wide-field imaging module, an illumination light module, an illumination imaging module, and a microwave module; The excitation light generated by the excitation light module illuminates the first dichroic film and is guided to the objective lens. After being transmitted through the objective lens, it illuminates the diamond to excite the NV color center of the diamond to produce fluorescence; the objective lens is infinity-type. Illumination light generated by the illumination module shines onto the sample to be tested; the wavelength of the illumination light is different from the wavelength of the fluorescence. The fluorescence generated by the diamond and the illumination light from the sample are collected by the objective lens and transmitted to the first dichroic film. The first dichroic film guides the fluorescence to the second dichroic film, and the second dichroic film guides the fluorescence to the wide-field imaging module for imaging, and guides the illumination light to the illumination imaging module for imaging. The microwave module is used to radiate microwaves onto the diamond.

2. The wide-field detection system for diamond NV color centers with sustainable illumination according to claim 1, characterized in that: The wavelength λ1 of the illumination light is 532nm < λ1 < 600nm. The first dichroic filter is an interference-type long-pass dichroic filter or a short-pass dichroic filter with a cutoff wavelength λ2 of 532nm < λ2 < 550nm, and λ2 < λ1. The second dichroic filter is an interference-type long-pass dichroic filter or a short-pass dichroic filter with a cutoff wavelength λ3 of 600nm ≤ λ3 < 640nm.

3. The wide-field detection system for diamond NV color centers under sustainable illumination according to claim 1, characterized in that: The wavelength λ1 of the illumination light is 600nm≤λ1<630nm. The first dichroic filter is an interference-type long-pass dichroic filter or a short-pass dichroic filter with a cutoff wavelength λ2 of 532nm<λ2<600nm. The second dichroic filter is an interference-type long-pass dichroic filter or a short-pass dichroic filter with a cutoff wavelength λ3 of 630nm≤λ3≤640nm.

4. The wide-field detection system for diamond NV color centers with sustainable illumination according to claim 1, characterized in that: The excitation light module includes a laser and a first focusing lens; or the excitation light module includes a light-emitting diode and one or more focusing lenses.

5. The wide-field detection system for diamond NV color centers under sustainable illumination according to claim 1, characterized in that: The illumination module includes an illumination source, which is a ring-shaped illumination lamp with a hollow structure, positioned between the objective lens and the first dichroic filter, with the hollow portion facing the objective lens.

6. The wide-field detection system for diamond NV color centers under sustainable illumination according to claim 1, characterized in that: The illumination module includes an illumination source and a second focusing lens. The illumination source is a light-emitting diode or a laser. It also includes a beam splitter located in the optical path between the second dichroic film and the illumination imaging module. The illumination light generated by the illumination module illuminates the beam splitter. A portion of the light split by the beam splitter illuminates the second dichroic film. The illumination light guided by the second dichroic film to the illumination imaging module is first transmitted to the beam splitter, and a portion of the light split by the beam splitter is transmitted to the illumination imaging module.

7. The wide-field detection system for diamond NV color centers under sustainable illumination according to claim 1, characterized in that: The wide-field imaging module includes a first filter, a first imaging lens, and a first imaging camera arranged sequentially along the light collection direction; the illumination imaging module includes a second imaging lens and a second imaging camera arranged sequentially along the light collection direction.

8. The wide-field detection system for diamond NV color centers under sustainable illumination according to claim 7, characterized in that: The illumination imaging module also includes a second filter located in the optical path between the second imaging lens and the second dichroic filter.

9. The wide-field detection system for diamond NV color centers under sustainable illumination according to claim 1, characterized in that: It also includes a bias magnetic field module for applying a bias magnetic field to the probe.

10. A method for illumination detection in synchronous wide-field imaging, characterized in that, The diamond NV color center wide-field detection system using sustainable illumination as described in any one of claims 1-9, the method comprising: The sample to be tested is placed under the diamond, and the excitation light of the excitation light module and the illumination light of the illumination light module are turned on. The fluorescence is imaged by the wide-field imaging module, and the illumination light is imaged by the illumination imaging module. When measuring the magnetic field of the sample, ODMR measurement is performed, and the fluorescence imaging data output by the wide-field imaging module is read. The magnetic field intensity distribution is obtained from this data. When it is necessary to observe the sample, the illumination imaging image output by the illumination imaging module is read, that is, the imaging image of the sample surface is obtained.

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