Rotary heater anti-interference slip ring system and vapor deposition equipment

Abstract

The invention relates to the technical field of semiconductor equipment, and discloses a rotary heater anti-interference slip ring system and vapor deposition equipment. The rotary heater anti-interference slip ring system comprises a rotor, a stator and a conductive slip ring. The top end of the rotor is connected with the rotary heater to drive the rotary heater to rotate. The stator comprises a base and a plurality of annular pieces, a first cavity is formed in the base, and the bottom end of the rotor is rotationally inserted into the first cavity. The plurality of annular pieces are arranged on the base and rotationally sleeve the periphery of the rotor, and the plurality of annular pieces are matched with the rotor to form a plurality of second cavities which are isolated from one another. The number of the conductive slip rings is multiple, and at most one conductive slip ring is arranged in each of the first cavity and the multiple second cavities. The conductive slip ring comprises a conductive ring and an electric brush which can rotate relatively, one of the conductive ring and the electric brush is fixed on the stator, and the other is fixed on the rotor.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor equipment, in particular to a rotating heater anti-interference slip ring system and a vapor deposition equipment. BACKGROUND

[0002] Thin film preparation process has a very wide application in ultra large scale integrated circuit technology, and can be divided into two categories according to its film forming method: chemical vapor deposition and physical vapor deposition. In the process of preparing thin films by using the two film forming methods, the wafer needs to be placed on a heater, and the wafer is supported and heated by the heater, and in order to improve the circumferential uniformity of the film layer, the heater carrying the wafer needs to have a rotating function, and the interfaces of the heater power signal cable, the thermocouple signal cable and the radio frequency signal cable are all at the mounting flange. When the heater rotates, how to stably and reliably connect these signals becomes a difficult problem. Moreover, the heater directly contacts the plasma, and the thermocouple signal is in the electromagnetic field and radio frequency field composed of radio frequency signals and heater power signals, and is prone to signal interference.

[0003] Therefore, it is urgent to design a rotating heater anti-interference slip ring system and a vapor deposition equipment to solve the above technical problems. SUMMARY

[0004] An object of the present application is to provide a rotating heater anti-interference slip ring system, which can meet the requirements of rotating heating of the wafer while ensuring stable and reliable connection of multiple signal transmission cables and avoiding mutual interference between multiple signals.

[0005] To achieve this object, the present application adopts the following technical solutions:

[0006] A rotating heater anti-interference slip ring system is provided, comprising:

[0007] A rotor, the top end of the rotor is connected with a rotating heater to drive the rotating heater to rotate;

[0008] A stator, comprising a base and a plurality of annular members; the inside of the base has a first cavity, and the bottom end of the rotor is rotatably inserted into the first cavity; a plurality of annular members are arranged on the base and rotatably sleeved on the outer periphery of the rotor, and the plurality of annular members cooperate with the rotor to form a plurality of second cavities which are isolated from each other;

[0009] A plurality of conductive slip rings are provided, and at least one conductive slip ring is arranged in the first cavity and the plurality of second cavities; the conductive slip ring comprises a conductive ring and a brush which can rotate relative to each other, and one of the conductive ring and the brush is fixed to the stator, and the other is fixed to the rotor.

[0010] Optionally, the base comprises a bottom and a partition plate, the bottom has the first cavity, the partition plate covers the opening of the first cavity, the partition plate is provided with a rotating hole, the rotor is arranged in the rotating hole so that the bottom end of the rotor is rotatably arranged in the first cavity, and a plurality of the annular members are arranged on the partition plate and rotatably arranged on the outer periphery of the rotor.

[0011] Optionally, the annular member comprises a first annular part and a second annular part, the first annular part is coaxially arranged with the rotor and connected with the partition plate, and the second annular part is connected with the first annular part and extends to the outer periphery of the rotor, and the second annular part is rotatably connected with the outer periphery of the rotor.

[0012] Optionally, the first annular parts of a plurality of the annular members are arranged along the radial direction of the rotor and connected with the partition plate, and the second annular parts of the plurality of the annular members are sequentially rotatably connected with the outer periphery of the rotor along the axial direction of the rotor, so as to form a plurality of the second cavities which are sequentially arranged and isolated.

[0013] Optionally, the rotor comprises a body and a top cover plate, the top end of the body is connected with the rotary heater, the body is arranged in the rotating hole so that the bottom end of the body is rotatably arranged in the first cavity, and the top cover plate is arranged on the outer periphery of the body and extends along the radial direction of the body.

[0014] The annular member comprises a first annular part and a second annular part, the first annular part of the first annular member is arranged in the inner periphery of the first annular part of the second annular member, the second annular part of the first annular member is rotatably connected with the outer periphery of the body, and the second annular part of the second annular member is rotatably connected with the outer periphery of the top cover plate, so as to form two second cavities which are sequentially arranged and isolated.

[0015] Optionally, the first annular parts of a plurality of the annular members are sequentially arranged along the axial direction of the rotor and connected with the partition plate, and the second annular parts of the plurality of the annular members are sequentially rotatably connected with the outer periphery of the rotor along the axial direction of the rotor, so as to form a plurality of the second cavities which are sequentially arranged along the axial direction of the rotor.

[0016] Optionally, the second annular part of any one of the annular members is two, the two second annular parts are respectively connected with the top end and the bottom end of the first annular part, and the two second annular parts, the first annular part and the outer periphery of the rotor form a second cavity.

[0017] Optionally, the anti-interference slip ring system of the rotary heater further comprises a temperature transmitter fixed to the rotor; the conductive slip ring comprises a first conductive slip ring for transmitting thermocouple signals, and the thermocouple of the rotary heater is connected to the first conductive slip ring through the temperature transmitter.

[0018] Optionally, the anti-interference slip ring system of the rotary heater further comprises a twisted pair shielded cable and a thermocouple signal connector, the thermocouple signal connector is arranged on the stator, one end of the twisted pair shielded cable is connected to the thermocouple signal connector, and the other end of the twisted pair shielded cable is connected to a temperature controller of the rotary heater; the conductive ring or the conductive brush of the first conductive slip ring fixed to the stator is connected to the thermocouple signal connector through a cable.

[0019] Optionally, the stator is provided with a flange type RF coaxial connector, the conductive slip ring comprises a second conductive slip ring for transmitting heater power supply signals and a third conductive slip ring for transmitting RF signals, and the second conductive slip ring and the third conductive slip ring are connected to the flange type RF coaxial connector through a cable.

[0020] The anti-interference slip ring system of the rotary heater further comprises a filter assembly and a power supply system, and the power supply system is connected to the flange type RF coaxial connector through the filter assembly.

[0021] Optionally, the conductive slip ring comprises at least one multi-channel conductive slip ring, and the multi-channel conductive slip ring is provided with a grounding ring channel, and a grounding node of the rotor is electrically connected to a grounding node of the stator through the grounding ring channel.

[0022] Optionally, the inside of the rotor is provided with a first through hole and a second through hole separated along the axial direction thereof, and a cable is arranged in each of the first through hole and the second through hole.

[0023] The first cable arranged in the first through hole is connected to the rotary heater at one end and connected to the conductive slip ring in the first cavity at the other end; and the second cable arranged in the second through hole is connected to the rotary heater at one end and connected to the conductive slip ring in the second cavity at the other end.

[0024] Another object of the present application is to provide a vapor deposition device which can meet the requirements of rotary heating of a wafer while ensuring stable and reliable connection of multiple signal transmission cables and avoiding mutual interference between multiple signals.

[0025] To achieve the above object, the present application adopts the following technical solutions.

[0026] A vapor deposition apparatus is provided, comprising a deposition chamber, a rotary heater and the rotary heater anti-interference slip ring system as described above, the rotor of the rotary heater anti-interference slip ring system is connected with the rotary heater, and the rotary heater is rotationally arranged in the deposition chamber.

[0027] The present application has at least the following advantages:

[0028] The present application provides a rotary heater anti-interference slip ring system, comprising a rotor, a stator and a plurality of conductive slip rings. The top end of the rotor is connected with the rotary heater to drive the rotary heater to rotate. The stator comprises a base and a plurality of annular members. The base has a first cavity inside, and the bottom end of the rotor is rotationally inserted into the first cavity. The plurality of annular members are arranged on the base and rotationally sleeved on the outer periphery of the rotor, and the plurality of annular members cooperate with the rotor to form a plurality of second cavities that are isolated from each other. The conductive slip rings are provided in the first cavity and the plurality of second cavities. The conductive slip ring comprises a conductive ring and a brush that can rotate relative to each other. One of the conductive ring and the brush is fixed to the stator, and the other is fixed to the rotor. When the rotary heater anti-interference slip ring system is applied to a vapor deposition apparatus, the conductive slip rings are used to transmit at least a thermocouple signal, a heater power signal and a radio frequency signal. The at least three conductive slip rings can be located in the first cavity and the plurality of second cavities that are isolated from each other, so as to realize the isolation of the signals during transmission, thereby avoiding the interference of the electromagnetic field and the radio frequency field formed by the radio frequency signal and the heater power signal on the thermocouple signal. In addition, the thermocouple signal, the heater power signal and the radio frequency signal are transmitted through the conductive slip rings, and the rotor is connected with the rotary heater to rotate synchronously. The cables connected to the external system are connected with the stator, and the signals are transmitted to the stator through the relative rotation of the conductive ring and the brush. The cables connected to the external system are connected with the stator without rotating with the rotary heater. The cables connected to the rotary heater rotate synchronously with the rotary heater and remain relatively stationary. All of these can avoid the problem of cable winding, so as to realize the stable and reliable connection of the cables.

[0029] The present application provides a vapor deposition apparatus, comprising a deposition chamber, a rotary heater and a rotary heater anti-interference slip ring system. The rotor of the rotary heater anti-interference slip ring system is connected with the rotary heater, and the rotary heater is rotationally arranged in the deposition chamber. The vapor deposition apparatus can meet the requirements of rotary heating of the wafer while ensuring the stable and reliable connection of the plurality of signal transmission cables and avoiding the mutual interference between the plurality of signals by using the rotary heater anti-interference slip ring system. BRIEF DESCRIPTION OF DRAWINGS

[0030] Figure 1 is a structural schematic diagram of the rotary heater anti-interference slip ring system provided by the first embodiment of the present application;

[0031] Figure 2 is a structural schematic diagram of the anti-interference slip ring system of the rotary heater provided in Embodiment Two of the present application;

[0032] Figure 3 is a partial structural schematic diagram of the outer periphery of the stator provided in Embodiment Two of the present application.

[0033] Reference numerals

[0034] 1, rotor; 11, body; 111, first threading hole; 112, second threading hole; 12, top cover plate; 13, connecting plate;

[0035] 2, stator; 21, base; 211, bottom; 212, isolation plate; 213, metal pipe; 214, mechanical labyrinth plate; 22, first annular member; 221, first annular portion; 222, second annular portion; 23, second annular member;

[0036] 3, temperature transmitter;

[0037] 4, twisted shielded cable;

[0038] 5, cable interface; 51, thermocouple signal connector; 52, power supply signal connector; 53, radio frequency signal connector;

[0039] 6, first conductive slip ring; 61, conductive ring; 62, electric brush;

[0040] 7, second conductive slip ring;

[0041] 8, third conductive slip ring;

[0042] 101, first cavity; 102, second cavity. DETAILED DESCRIPTION

[0043] In order to make the technical problems solved by the present application, the technical solutions adopted and the technical effects achieved more clear, the technical solutions of the present application will be further described below in conjunction with the accompanying drawings and through specific embodiments. It can be understood that the specific embodiments described herein are only used to explain the present application, but not to limit the present application. In addition, it should be noted that, for the convenience of description, only the parts related to the present application are shown in the drawings, but not all.

[0044] In the description of the present application, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0045] In the present application, unless otherwise explicitly specified and limited, the first feature is "on" or "under" the second feature can include that the first and second features are in direct contact, or can include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the first feature "on", "above" and "over" the second feature includes that the first feature is directly above and obliquely above the second feature, or only means that the first feature is higher in horizontal height than the second feature. The first feature "under", "below" and "underneath" the second feature includes that the first feature is directly below and obliquely below the second feature, or only means that the first feature is lower in horizontal height than the second feature.

[0046] In the description of the present embodiment, the terms "on", "under", "left", "right" and the like orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second" are only used to distinguish in description, and have no special meaning.

[0047] The technical solutions of the present application will be further illustrated below by specific embodiments in conjunction with the drawings.

[0048] The present application provides a kind of vapor deposition equipment, including deposition chamber (not shown in the figure), rotating heater (not shown in the figure) and rotating heater anti-interference slip ring system, the rotor of rotating heater anti-interference slip ring system is connected with rotating heater, rotating heater is rotationally arranged in deposition chamber, wafer can be placed on rotating heater. The vapor deposition equipment utilizes rotating heater anti-interference slip ring system can meet the rotation of wafer while being heated at the same time, ensure the stable and reliable connection of multiple signal transmission cables, avoid mutual interference between multiple signals. It needs to be explained that, this rotating heater can be ordinary heater or heater with electrostatic chuck or vacuum chuck, if wafer does not need to be heated, it can also be electrostatic chuck or vacuum chuck, or just tray for carrying wafer.

[0049] The anti-interference slip ring system of the rotary heater comprises a rotor 1, a stator 2 and conductive slip rings. The top end of the rotor 1 is connected with the rotary heater to drive the rotary heater to rotate. The stator 2 comprises a base 21 and a plurality of annular members. The base 21 has a first cavity 101 in the inside, and the bottom end of the rotor 1 is rotatably inserted into the first cavity 101. The plurality of annular members are arranged on the base 21 and rotatably sleeved on the outer periphery of the rotor 1. The plurality of annular members cooperate with the rotor 1 to form a plurality of second cavities 102 which are isolated from each other. The conductive slip rings are provided in the first cavity 101 and the plurality of second cavities 102. The conductive slip rings comprise a conductive ring 61 and a brush 62 which can rotate relative to each other. One of the conductive ring 61 and the brush 62 is fixed to the stator 2, and the other is fixed to the rotor 1.

[0050] When the anti-interference slip ring system of the rotary heater is applied to a vapor deposition device, the conductive slip rings can be used to transmit thermocouple signals, heater power signals and radio frequency signals. The plurality of conductive slip rings can be arranged in the first cavity 101 and the plurality of second cavities 102 which are isolated from each other to realize signal isolation during transmission, thereby avoiding the interference of the electromagnetic field and the radio frequency field formed by the radio frequency signals and the heater power signals on the thermocouple signals. In addition, the thermocouple signals, the heater power signals and the radio frequency signals are transmitted through the conductive slip rings. The rotor 1 is connected with the rotary heater to rotate synchronously. The cables connected to the external system are connected with the stator 2. The signals are transmitted to the stator 2 through the relative rotation of the conductive ring 61 and the brush 62. The cables connected to the external system are connected with the stator 2 without rotating with the rotary heater. The cables connected to the rotary heater rotate synchronously with the rotary heater and remain relatively static. All of them can avoid the problem of cable winding to realize stable and reliable connection of the cables.

[0051] Optionally, as Figure 1 and Figure 2As shown, the base 21 includes a bottom 211 having the first cavity 101 and a partition plate 212 covering the opening of the first cavity 101, the partition plate 212 is provided with a rotating hole, the rotor 1 is arranged in the rotating hole to make the bottom end of the rotor 1 rotatably arranged in the first cavity 101. For example, the rotating hole is provided with a bearing, the rotor 1 is connected to the inner ring of the bearing, the partition plate 212 is connected to the outer ring of the bearing, and the partition plate 212 is connected to the bottom 211 by a fastener, that is, the bottom 211 and the partition plate 212 are fixed, and the rotor 1 can rotate in the rotating hole. In this embodiment, the base 21 further includes a mechanical labyrinth plate 214 arranged on the outer periphery of the rotor 1 and matched with the partition plate 212 in concave-convex to improve the isolation effect of the first cavity 101 at the bearing position, avoiding the signal transmitted in the first cavity 101 from overflowing from the rotating hole. A plurality of annular members are arranged on the partition plate 212 and rotatably arranged on the outer periphery of the rotor 1 to form a plurality of second cavities 102 in the radial direction of the rotor 1, or a plurality of second cavities 102 in the axial direction of the rotor 1.

[0052] Specifically, the annular member includes a first annular part 221 coaxially arranged with the rotor 1 and connected to the partition plate 212, and a second annular part 222 connected to the first annular part 221 and extending to the outer periphery of the rotor 1, and the second annular part 222 is rotatably connected to the outer periphery of the rotor 1. The annular member is connected to the partition plate 212 through the first annular part 221 to ensure that the annular member is relatively fixed with the stator 2, and the second annular part 222 is connected to the first annular part 221, the first annular part 221 supports the second annular part 222 on the outer periphery of the rotor 1, and the second annular part 222 can extend inwardly in the radial direction of the rotor 1, or the region where the outer periphery of the rotor 1 and the second annular part 222 are in the same plane extends outwardly in the radial direction of the rotor 1, and the two form the top of the second cavity 102.

[0053] Embodiment one

[0054] In this embodiment, the first annular parts 221 of the plurality of annular members are arranged at intervals in the radial direction of the rotor 1 and connected to the partition plate 212, and the second annular parts 222 of the plurality of annular members are rotatably connected to the outer periphery of the rotor 1 in the axial direction of the rotor 1 to form a plurality of second cavities 102 that are mutually isolated and sequentially arranged.

[0055] For example, the number of annular members is the same as the number of second cavities 102, and the plurality of annular members are arranged at intervals in the radial direction of the rotor 1, and in order to ensure that each second cavity 102 contains the outer periphery of the stator 2, the annular member located at the outer ring is higher than the annular member located at the inner ring in the axial direction of the stator 2 to form the arrangement of the plurality of second cavities 102.

[0056] Alternatively, as Figure 1As shown, the rotor 1 comprises a body 11 and a top cover plate 12, the top end of the body 11 is connected with the rotary heater, the body 11 is arranged in the rotating hole so that the bottom end of the body 11 is rotatably arranged in the first cavity 101, and the top cover plate 12 is arranged on the outer periphery of the body 11 and extends along the radial direction of the body 11. That is, in the embodiment, the top cover plate 12 is formed by extending the partial area of the rotor 1 outward in the radial direction of the rotor 1, that is, on the outer periphery of the body 11 of the rotor 1, so that the annular member located on the outer ring is rotatably connected with the rotor 1. In other embodiments, the second annular part 222 of the annular member located on the outer ring can also be extended inward in the radial direction of the rotor 1, so that the annular member located on the outer ring is rotatably connected with the stator 2. Both of the above two structures can make each second cavity 102 formed contain the outer peripheral area of the rotor 1, so as to ensure that one of the conductive ring 61 and the brush 62 can be fixed to the rotor 1.

[0057] In the embodiment, the annular member comprises a first annular member 22 and a second annular member 23, the first annular part 221 of the first annular member 22 is arranged in the inner periphery of the first annular part 221 of the second annular member 23, the second annular part 222 of the first annular member 22 is rotatably connected with the outer periphery of the body 11, and the second annular part 222 of the second annular member 23 is rotatably connected with the outer periphery of the top cover plate 12, so as to form two second cavities 102 which are isolated and sleeved. Specifically, the first annular member 22 comprises the first annular part 221 and the second annular part 222, the first annular part 221 is connected with the isolation plate 212 to be fixed, the second annular part 222 is sleeved on the outer periphery of the rotor 1, and the rotor 1 can rotate relative to the second annular part 222. The outer periphery of the rotor 1 is provided with a bearing, the outer periphery of the rotor 1 is connected with the inner ring of the bearing, and the inner ring of the second annular part 222 is connected with the outer ring of the bearing. The inner ring of the second annular part 222 is provided with a mounting groove, the bearing is located in the mounting groove, and the bottom 211 of the mounting groove can block the gap between the second annular part 222 and the body 11, so as to avoid the signal transmitted in the second cavity 102 of the inner ring from overflowing. The first annular part 221 and the second annular part 222 of the first annular member 22 can be integrally arranged or connected by fasteners. In addition, the second annular member 23 comprises the first annular part 221 and the second annular part 222, the first annular part 221 is connected with the isolation plate 212 to be fixed, the second annular part 222 is located on the outer periphery of the top cover plate 12, and the inner ring of the second annular part 222 is in concave-convex cooperation with the outer periphery of the top cover plate 12, so as to block the gap between the second annular part 222 and the top cover plate 12, so as to avoid the signal transmitted in the second cavity 102 of the outer ring from overflowing.

[0058] Further, the rotary heater anti-interference slip ring system further comprises a temperature transmitter 3 fixed to the rotor 1. As shown in the figure, the temperature transmitter 3 is arranged on the outer periphery of the rotor 1, and the temperature transmitter 3 is connected with the second annular part 222 of the first annular member 22 by a connecting rod 31. Figure 1As shown, in the embodiment, the temperature transmitter 3 is arranged above the top cover plate 12, and the stator 2 further comprises a connecting plate 13 connected with the outer periphery of the body 11 and forming a receiving cavity with the top cover plate 12, and the temperature transmitter 3 is located in the receiving cavity and can rotate synchronously with the rotor 1. The conductive slip ring comprises a first conductive slip ring 6 for transmitting the thermocouple signal, and the thermocouple of the rotary heater is connected with the first conductive slip ring 6 through the temperature transmitter 3. The conductive ring 61 of the first conductive slip ring 6 is connected with the top cover plate 12, and the brush 62 of the first conductive slip ring 6 is connected with the isolation plate 212. The temperature transmitter 3 is connected with the conductive ring 61 of the first conductive slip ring 6 through a cable, and both of them rotate synchronously with the rotor 1. The brush 62 is connected with an external system through a cable, and both of them are relatively fixed with the stator 2. The temperature transmitter 3 can convert the weak thermocouple signal of millivolt level into a standard analog signal of 4mA-20mA with strong anti-interference ability, and then stably and reliably transmit the signal from the rotor 1 to the stator 2 through the conductive slip ring.

[0059] In the embodiment, the temperature transmitter 3 can be an isolated type, which has excellent suppression ability to high and low frequency interference signals. For example, the Omega TX13 can isolate the thermocouple signal (the input signal of the temperature transmitter 3) and the output signal of the temperature transmitter 3 from each other, so that the external interference cannot affect the thermocouple signal.

[0060] Alternatively, the anti-interference slip ring system of the rotary heater further comprises a twisted shielded cable 4 and a thermocouple signal connector 51 arranged on the stator 2, one end of the twisted shielded cable 4 is connected with the thermocouple signal connector 51, the other end is connected with a temperature controller of the rotary heater, and the conductive ring 61 or the conductive brush 62 of the first conductive slip ring 6 fixed on the stator 2 is connected with the thermocouple signal connector 51 through a cable. In the embodiment, the brush 62 of the first conductive slip ring 6 is connected with the thermocouple signal connector 51 through a cable, and then the signal is transmitted to the temperature controller through the twisted shielded cable 4. The transmission of the thermocouple signal through the twisted shielded cable 4 can shield the EMI (Electromagnetic Interference), and a tinned copper wire braid or other metal wire braid can be sleeved on the twisted shielded cable 4 to further shield and protect the signal. Figure 1 As shown, in the embodiment, the thermocouple signal connector 51 is arranged on the isolation plate 212 and communicates with the second cavity 102 located in the outer ring, so that the cable for transmitting the thermocouple signal is directly connected with the thermocouple signal connector 51. In the embodiment, the thermocouple signal connector 51 is a metal cable connector.

[0061] In addition to the thermocouple signal connector 51, the stator 2 is also provided with other cable interfaces 5. In this embodiment, the stator 2 is provided with a flange type RF coaxial connector, and the conductive slip ring includes a second conductive slip ring 7 for transmitting the heater power signal and a third conductive slip ring 8 for transmitting the RF signal, and the second conductive slip ring 7 and the third conductive slip ring 8 are connected to the flange type RF coaxial connector through cables.

[0062] In this embodiment, the flange type RF coaxial connector includes a heater power signal connector 52 and an RF signal connector 53. The brush 62 of the third conductive slip ring 8 is located in the first cavity 101, and the cable connected thereto can be directly connected to the RF signal connector 53 provided at the bottom 211 of the first cavity 101, while the second conductive slip ring 7 is located in the second cavity 102 of the inner ring, and the cable connected thereto can pass through the first cavity 101 to be connected to the heater power signal connector 52 located at the bottom 211 of the first cavity 101. In order to avoid interference between the heater power signal and the RF signal during transmission, a metal pipe 213 is also provided in the first cavity 101, and the cable connected to the second conductive slip ring 7 is arranged in the metal pipe 213 when passing through the first cavity 101, and the metal pipe 213 can be an aluminum pipe or a copper pipe.

[0063] Alternatively, the rotating heater anti-interference slip ring system further includes a filter assembly and a power supply system, and the power supply system is connected to the flange type RF coaxial connector through the filter assembly. In this embodiment, the flange type RF coaxial connector includes a heater power signal connector 52 and an RF signal connector 53, the brush 62 of the second conductive slip ring 7 is connected to the heater power signal connector 52 through a cable, and the heater power signal connector 52 is connected to the filter assembly through a coaxial cable, the brush 62 of the third conductive slip ring 8 is connected to the RF signal connector 53 through a cable, and the RF signal connector 53 is connected to the filter assembly through a coaxial cable. After the heater power signal and the RF signal are transmitted to the filter assembly, they will be isolated from each other by the filter assembly before being transmitted to the power supply system.

[0064] Alternatively, the conductive slip ring includes at least one multi-channel conductive slip ring, and the multi-channel conductive slip ring is provided with a grounding ring channel, and the grounding node of the rotor 1 and the grounding node of the stator 2 are electrically connected through the grounding ring channel. In this embodiment, the second conductive slip ring 7 for transmitting the heater power signal is a multi-channel conductive slip ring, and the second conductive slip ring 7 increases the grounding ring channel to realize the conduction of the rotor 1 and the stator 2 and grounding together while meeting the power signal transmission, and when the conductive slip ring is internally connected by a cable, a twisted shield cable or a coaxial cable can also be selected, and the cable shielding layer thereof is grounded through the grounding ring channel, which can further enhance the anti-interference capability.

[0065] Optionally, the inside of the rotor 1 is provided with a first through hole 111 and a second through hole 112 along the axial direction of the rotor 1, and a cable is respectively arranged in the first through hole 111 and the second through hole 112. The first cable arranged in the first through hole 111 is connected to the rotating heater at one end and connected to the conductive slip ring in the first cavity 101 at the other end; the second cable arranged in the second through hole 112 is connected to the rotating heater at one end and connected to the conductive slip ring in the second cavity 102 at the other end. In this embodiment, the third conductive slip ring 8 is arranged in the first cavity 101, one end of the first cable is connected to the rotating heater, and the other end is connected to the conductive ring 61 of the third conductive slip ring 8 to realize the transmission of the radio frequency signal. The second conductive slip ring 7 is arranged in the second cavity 102, one end of the second cable is connected to the rotating heater, and the other end is connected to the conductive slip ring in the second cavity 102 of the inner ring to realize the transmission of the heater power signal. This embodiment also has a third cable, one end of the third cable is connected to the temperature transmitter 3, and the other end is connected to the first conductive slip ring 6 in the second cavity 102 of the outer ring to realize the transmission of the thermocouple signal. The cable connected to the temperature transmitter 3 extends upward through other through holes on the rotor 1 and is connected to the rotating heater.

[0066] Embodiment two

[0067] The main difference between the rotating heater anti-interference slip ring system provided by this embodiment and the rotating heater anti-interference slip ring system of embodiment one is that:

[0068] As shown in Figure 2 , the first annular part 221 of the plurality of annular members is sequentially arranged along the axial direction of the rotor 1 and connected with the isolation plate 212, and the second annular part 222 of the plurality of annular members is sequentially connected with the outer periphery of the rotor 1 in rotation along the axial direction of the rotor 1 to form a plurality of second cavities 102 sequentially arranged along the axial direction of the rotor 1. The connection of the first annular part 221 of the annular member with the isolation plate 212 ensures that the annular member is relatively fixed with the stator 2, and the second annular part 222 is supported by the first annular part 221 to be located on the outer periphery of the rotor 1, and the second annular part 222 can extend inwardly along the radial direction of the rotor 1, or the region where the outer periphery of the rotor 1 and the second annular part 222 are in the same plane extends outwardly along the radial direction of the rotor 1, and the combination of the two forms the second cavity 102. Since the plurality of annular members are sequentially arranged along the axial direction of the rotor 1, the second annular part 222 separates the space of the outer periphery of the rotor 1 in the axial direction of the rotor 1, and a plurality of second cavities 102 are sequentially arranged along the axial direction of the rotor 1, each second cavity 102 covers the outer periphery region of the rotor 1, so that one of the conductive ring 61 or the brush 62 of the conductive slip ring is connected with the rotor 1, thereby being able to rotate relative to the stator 2, and the other is connected with the first annular part 221, thereby being relatively fixed with the stator 2.

[0069] Optionally, the second annular part 222 of any annular member is two, and the two second annular parts 222 are connected to the top end and the bottom end of the first annular part 221 respectively, and the two second annular parts 222, the first annular part 221 and the outer periphery of the rotor 1 form a second cavity 102. The two second annular parts 222 of the plurality of annular members are sleeved on the outer periphery of the rotor 1 and are rotationally connected with the rotor 1 through a bearing, the outer periphery of the rotor 1 is connected with the inner ring of the bearing, the inner ring of the second annular part 222 is connected with the outer ring of the bearing, the outer ring of the second annular part 222 is fixedly connected with the first annular part 221, and the second annular parts 222 of adjacent two annular members are fixedly connected, so that the plurality of second cavities 102 are relatively fixed. The fixed connection can be achieved by means of fastening screws and the like, so as to facilitate disassembly and assembly. The inner ring of the second annular part 222 is provided with a mounting groove, the bearing is located in the mounting groove, and the second annular part 222 and the outer periphery of the stator 2 form a concave-convex fit, so as to avoid signal transmission in the second cavity 102 from leaking from the rotationally connected area of the second annular part 222 and the stator 2.

[0070] In the embodiment, the flange type radio frequency coaxial connector is arranged on the outer periphery of the stator 2 and corresponds to the first cavity 101 and the plurality of second cavities 102 respectively. Figure 2 and Figure 3 As shown in the drawings, the first conductive slip ring 6 is arranged in the first cavity 101 located at the lower side, and the thermocouple signal connector 51 is arranged on the outer periphery of the stator 2 corresponding to the first cavity 101. The second conductive slip ring 7 is arranged in the first second cavity 102 from the lower side to the upper side, and the heater power signal connector 52 is arranged on the outer periphery of the stator 2 corresponding to the second cavity 102. The third conductive slip ring 8 is arranged in the second second cavity 102 from the lower side to the upper side, and the radio frequency signal connector 53 is arranged on the outer periphery of the stator 2 corresponding to the second cavity 102. The heater power signal connector 52 and the radio frequency signal connector 53 can adopt the flange type radio frequency coaxial connector.

[0071] In the embodiment, the first cable arranged in the first threading hole 111 is connected at one end to the rotary heater and at the other end to the third conductive slip ring 8, so as to realize transmission of the radio frequency signal. The second cable arranged in the second threading hole 112 is connected at one end to the rotary heater and at the other end to the second conductive slip ring 7, so as to realize transmission of the heater power signal. The embodiment also has a third cable, which can be arranged in the second threading hole 112 or other threading hole on the rotor 1, and is connected at one end to the rotary heater and at the other end to the first conductive slip ring 6.

[0072] In addition, the rotary heater anti-interference slip ring system provided by the embodiment is the same as the rotary heater anti-interference slip ring system of the first embodiment, and will not be described here.

[0073] The above embodiments only illustrate the basic principles and characteristics of the present application, and the present application is not limited to the above embodiments. Without departing from the spirit and scope of the present application, various changes and modifications can be made to the present application, and these changes and modifications all fall within the scope of the present application. The scope of protection of the present application is defined by the appended claims and their equivalents.

Claims

1. A rotating heater anti-interference slip ring system, characterized in that, The utility model relates to a rotary heater, comprising: a rotor (1) having a top end connected to a rotary heater to drive the rotary heater to rotate; a stator (2) comprising a base (21) and a plurality of ring-shaped members; the base (21) has a first cavity (101) in the interior, and a bottom end of the rotor (1) is rotatably inserted into the first cavity (101); the plurality of ring-shaped members are each arranged on the base (21) and rotatably sleeved on an outer periphery of the rotor (1), and the plurality of ring-shaped members cooperate with the rotor (1) to form a plurality of second cavities (102) that are mutually isolated; a plurality of electrically conductive slip rings, each of which is arranged in one of the first cavity (101) and the plurality of second cavities (102); each electrically conductive slip ring comprises an electrically conductive ring (61) and an electric brush (62) that are rotatable relative to each other, one of the electrically conductive ring (61) and the electric brush (62) being fixed to the stator (2) and the other being fixed to the rotor (1).

2. The rotating heater tamper evident slip ring system of claim 1, wherein, The base (21) comprises a bottom portion (211) having the first cavity (101) and an isolation plate (212) covering an opening of the first cavity (101); the isolation plate (212) is provided with a rotating hole through which the rotor (1) is arranged to rotatably insert a bottom end of the rotor (1) into the first cavity (101); the plurality of ring-shaped members are arranged on the isolation plate (212) and rotatably sleeved on an outer periphery of the rotor (1).

3. The rotating heater tamper evident slip ring system of claim 2, wherein, The ring-shaped member comprises a first ring-shaped portion (221) coaxially arranged with the rotor (1) and connected to the isolation plate (212) and a second ring-shaped portion (222) connected to the first ring-shaped portion (221) and extending to the outer periphery of the rotor (1), the second ring-shaped portion (222) being rotatably connected to the outer periphery of the rotor (1).

4. The rotating heater tamper evident slip ring system of claim 3, wherein, The first ring-shaped portions (221) of the plurality of ring-shaped members are arranged at intervals along a radial direction of the rotor (1) and connected to the isolation plate (212), and the second ring-shaped portions (222) of the plurality of ring-shaped members are rotatably connected to the outer periphery of the rotor (1) in sequence along an axial direction of the rotor (1) to form a plurality of second cavities (102) that are mutually isolated and sequentially sleeved.

5. The rotating heater tamper evident slip ring system of claim 4, wherein, The rotor (1) comprises a body (11) having a top end connected to the rotary heater and a top cover plate (12) arranged on an outer periphery of the body (11) and extending along a radial direction of the body (11); The ring members include a first ring member (22) and a second ring member (23), a first annular part (221) of the first ring member (22) is arranged in the inner periphery of a first annular part (221) of the second ring member (23), a second annular part (222) of the first ring member (22) is rotationally connected with the outer periphery of the body (11), and a second annular part (222) of the second ring member (23) is rotationally connected with the outer periphery of the top cover plate (12) to form two second cavities (102) which are isolated from each other and sleeved.

6. The rotating heater tamper evident slip ring system of claim 3, wherein, The first annular parts (221) of the plurality of ring members are sequentially arranged along the axial direction of the rotor (1) and connected with the isolation plates (212), and the second annular parts (222) of the plurality of ring members are sequentially rotationally connected with the outer periphery of the rotor (1) along the axial direction of the rotor (1) to form a plurality of second cavities (102) which are sequentially arranged along the axial direction of the rotor (1).

7. The rotating heater tamper evident slip ring system of claim 6, wherein, The second annular part (222) of any one of the ring members is two, and the two second annular parts (222) are respectively connected to the top end and the bottom end of the first annular part (221), and the two second annular parts (222), the first annular part (221) and the outer periphery of the rotor (1) form a second cavity (102).

8. The rotating heater tamper evident slip ring system of claim 1, wherein, The anti-interference slip ring system of the rotary heater further comprises a temperature transmitter (3) fixed to the rotor (1); the conductive slip ring comprises a first conductive slip ring (6) for transmitting a thermocouple signal, and the thermocouple of the rotary heater is connected with the first conductive slip ring (6) through the temperature transmitter (3).

9. The rotating heater tamper evident slip ring system of claim 8, wherein, The anti-interference slip ring system of the rotary heater further comprises a twisted pair shielded cable (4) and a thermocouple signal connector (51), the thermocouple signal connector (51) is arranged on the stator (2), one end of the twisted pair shielded cable (4) is connected with the thermocouple signal connector (51), the other end is connected with a temperature controller of the rotary heater, and a conductive ring (61) or a conductive brush (62) of the first conductive slip ring (6) fixed to the stator (2) is connected with the thermocouple signal connector (51) through a cable.

10. The rotating heater tamper evident slip ring system of claim 1, wherein, The stator (2) is provided with a flange type radio frequency coaxial connector, the conductive slip ring comprises a second conductive slip ring (7) for transmitting a heater power signal and a third conductive slip ring (8) for transmitting a radio frequency signal, and the second conductive slip ring (7) and the third conductive slip ring (8) are connected with the flange type radio frequency coaxial connector through a cable; The anti-interference slip ring system of the rotary heater further comprises a filter assembly and a power supply system, and the power supply system is connected with the flange type radio frequency coaxial connector through the filter assembly.

11. The rotating heater tamper evident slip ring system of claim 1, wherein, The conductive slip ring comprises at least one multi-channel conductive slip ring, the multi-channel conductive slip ring is provided with a grounding ring channel, and a grounding node of the rotor (1) is electrically connected with a grounding node of the stator (2) through the grounding ring channel.

12. The rotating heater tamper evident slip ring system of claim 1, wherein, The inside of the rotor (1) is provided with a first through hole (111) and a second through hole (112) along its axial direction, and a cable is respectively arranged in the first through hole (111) and the second through hole (112); A first cable is arranged in the first through hole (111), one end of which is connected to the rotary heater, and the other end of which is connected to the conductive slip ring in the first cavity (101); a second cable is arranged in the second through hole (112), one end of which is connected to the rotary heater, and the other end of which is connected to the conductive slip ring in the second cavity (102).

13. A vapour deposition apparatus characterised by A deposition chamber, a rotary heater and the rotary heater anti-interference slip ring system of any one of claims 1 to 12 are included, the rotor (1) of the rotary heater anti-interference slip ring system is connected to the rotary heater, and the rotary heater is rotatably arranged in the deposition chamber.

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