Gas delivery module and memory unit test system

Abstract

The application discloses a gas feeding module and a memory unit test system, and relates to the technical field of memory unit test, wherein the gas feeding module comprises a flow passing structure and a gas supply cover. The flow passing structure is provided with an air inlet channel, an air inlet and an air inlet passing hole which are respectively connected with the air inlet channel. The gas supply cover is provided with a cover opening, a gas supply channel and a gas supply opening. The edge of the cover opening is arranged on a test area. The gas supply opening is connected with the air inlet passing hole through the gas supply channel. The gas blown by the gas supply opening flows to the memory unit through the cover opening. Each memory unit is subjected to the blowing action of at least one gas supply opening. The technical scheme provided by the application can improve the temperature test precision of the memory unit test equipment and reduce the operation energy consumption of the memory unit test equipment.

Description

Technical Field

[0001] This invention relates to the field of memory cell testing technology, and in particular to an air supply module and a memory cell testing system. Background Technology

[0002] In related technologies, a memory cell testing system includes a test bench, a tester, an air supply module, and a heater. The tester has a test area for mounting multiple memory cells, which is exposed on the test bench surface. The air supply module includes an air intake duct, an air inlet connected to the air intake duct, and a heating chamber. The wall of the heating chamber covers the upper side of the test area. After being heated to a preset temperature by the heater, high-temperature gas is blown into the heating chamber through the air intake duct, causing the entire space inside the heating chamber to heat up, thereby raising the temperature of the memory cells located inside the heating chamber to the test temperature, thus achieving high-temperature testing of multiple memory cells.

[0003] However, this heating method is prone to uneven temperature distribution within the heating chamber, leading to significant differences in the amount of heat received by different memory cells, which in turn results in low accuracy in high-temperature testing. Secondly, the memory cell testing system also suffers from high energy consumption. Summary of the Invention

[0004] The main objective of this invention is to provide an air supply module and a memory unit testing system, which aims to solve at least one of the above-mentioned problems.

[0005] To achieve the above objectives, the present invention proposes an air supply module applied to a memory cell testing system. The memory cell testing system includes a test bench and a tester. The tester has a test area for mounting multiple memory cells, the test area being exposed on the test bench surface. The air supply module includes:

[0006] The flow structure includes an air intake duct and an air intake port and an air intake outlet respectively connected to the air intake duct; and

[0007] An air supply hood is provided with a hood opening, an air supply channel, and an air supply port. The edge of the hood opening covers the test area. The air supply port is connected to the air inlet through the air supply channel. The gas blown out by the air supply port flows through the hood opening to the memory unit. Each memory unit is subjected to the blowing action of at least one of the air supply ports.

[0008] In one embodiment, the air supply hood includes a hood body and an air supply component. The air supply channel and the air supply port are both located in the air supply component. The hood opening is located in the hood body. The air supply component is located inside the hood body and is spaced apart from the edge of the hood opening. The end face of the air supply component near the hood opening and the inner wall surface of the hood body together enclose an energy storage space.

[0009] In one embodiment, the memory unit is configured as a memory module, the test area is provided with a memory slot for mounting the memory module, and the air supply component has an air supply port that is configured as a slit, and the long axis of the air supply port extends along the length direction of the memory slot.

[0010] In one embodiment, the memory unit is configured as a memory chip, the test area is provided with a mounting position for installing the memory chip, the air supply component is provided with a plurality of air nozzles, the air supply port is located at the air nozzle, and one air nozzle corresponds to one memory chip.

[0011] In one embodiment, the long axis of the air supply port extends along a first direction, and a plurality of air supply ports are spaced apart along a second direction and are respectively disposed on opposite sides of the air inlet. The second direction intersects with the first direction. The air supply channel includes an air inlet section and two air supply sections. The air inlet section extends along the second direction and connects between the two air supply sections. The air inlet is connected to the air inlet section, and the air supply port is connected to the air supply section.

[0012] In one embodiment, the air supply component has two rows of air nozzles distributed along a first direction on both sides of the air supply port, and multiple air nozzles in the same row are distributed at intervals along a second direction, the second direction being intersected by the first direction. The air supply channel includes an air inlet section and two air supply sections. The air inlet section extends along the first direction and connects between the two air supply sections. The air inlet port is connected to the air inlet section, and the air supply port is connected to the air supply section.

[0013] In one embodiment, the edge of the cover opening is provided with a first rib and a first elastic element, the test platform includes a sealing fixture and a second elastic element, the outer periphery of the sealing fixture is provided with a second rib, the second rib is arranged around the outer periphery of the second elastic element, the first rib abuts against the second elastic element, and the second rib abuts against the second elastic element.

[0014] In one embodiment, the air delivery module further includes a temperature sensor and a transmission wire. The temperature sensor is exposed within the energy storage space, the lower end of the transmission wire is connected to the temperature sensor, and the upper end of the transmission wire extends out of the cover body and is exposed to the outside.

[0015] In one embodiment, the air supply hood further includes a return air component, which is provided with a return air channel and at least two return air ports respectively connected to the return air channel. The return air ports are connected to the energy storage space. The flow structure is also provided with an air outlet duct, an air outlet passage, and an air outlet. The air outlet duct is connected between the air outlet passage and the air outlet. The air outlet passage is connected to the return air port. The air outlet duct and the air inlet duct are arranged in the same installation space.

[0016] In one embodiment, the gas supply component includes a first substrate and a first cover. The first substrate is connected to the inner wall surface of the cover body, and the first cover is disposed on the lower plate surface of the first substrate. The gas supply channel is formed between the first cover and the first substrate. The gas return component includes a second substrate and a second cover. The second cover is disposed on the upper plate surface of the second substrate, and the gas return channel is formed between the second cover and the second substrate. The first substrate and the second substrate are configured with the same structure and have the gas return port. The outer wall surface of the second cover and the inner wall surface of the cover body are spaced apart to form a heat insulation space, and the heat insulation space is filled with gas.

[0017] In one embodiment, the first cover and the inner wall surface of the cover body are spaced apart, and the air supply cover further includes an inner heat insulation component disposed on the inner wall surface of the energy storage space, and part of the inner heat insulation component fills the gap between the first cover and the cover body.

[0018] In one embodiment, the air supply hood further includes a hood housing and an external heat insulation member, the hood housing covering the outside of the hood body, and the external heat insulation member filling the gap between the hood housing housing and the hood body.

[0019] In one embodiment, the gas delivery module further includes a heating structure disposed in the air inlet duct and / or the air outlet duct to heat the gas in the air inlet duct and / or the air outlet duct.

[0020] This invention also proposes a memory cell testing system, comprising:

[0021] A test bench, wherein a first moving module and a second moving module are provided on the test bench surface;

[0022] The tester has a test area for mounting multiple memory cells, the test area being exposed on the test platform of the test bench.

[0023] The gas source unit is equipped with a refrigeration structure, a drying structure, and a gas delivery pipe, and is used to provide dried cold air or room temperature gas.

[0024] The aforementioned gas delivery module is mounted on the mobile module so that it can move relative to the test area. The gas delivery module's air inlet is connected to the air guide pipe, and the gas output by the gas source machine flows into the air inlet through the air guide pipe. The gas delivery module also includes a heating structure disposed in the air intake duct, which can heat the gas in the air intake duct.

[0025] In one embodiment, the gas source unit further includes a main gas source pipe, a first gas source branch pipe, a second gas source branch pipe, and a control valve. The control valve is used to control the main gas source pipe to selectively connect to the first gas source branch pipe and the second gas source branch pipe. The first gas source branch pipe connects the outlet end of the main gas source pipe and the inlet end of the drying structure. The second gas source branch pipe connects the outlet end of the main gas source pipe and the inlet end of the refrigeration structure. The outlet end of the refrigeration structure connects to the inlet end of the drying structure, and the outlet end of the drying structure connects to the inlet end of the gas guide pipe.

[0026] In one embodiment, the control valve includes a first reversing valve and a second reversing valve, wherein the first reversing valve is disposed on the first gas source branch pipe and the second reversing valve is disposed on the second gas source branch pipe.

[0027] In one embodiment, the air source unit further includes a main recovery pipe, a first recovery branch pipe, a second recovery branch pipe, and a circulating fan. The circulating fan is connected between the air inlet of the main recovery pipe and the air outlet of the air delivery module, and is used to promote airflow from the air outlet to the main recovery pipe. The air outlet of the main recovery pipe is connected to the air inlet of the first recovery branch pipe and the air inlet of the second recovery branch pipe. The control valve is also used to control the main recovery pipe to selectively connect the first recovery branch pipe and the second recovery branch pipe. The air outlet of the first recovery branch pipe is connected to the air inlet of the drying structure, and the air outlet of the second recovery branch pipe is connected to the air inlet of the refrigeration structure.

[0028] In one embodiment, the control valve includes a third directional valve and a fourth directional valve, the third directional valve being located in the first recovery branch pipe and the fourth directional valve being located in the second recovery branch pipe.

[0029] In one embodiment, the air supply module further includes an exhaust valve, a first one-way valve, and an exhaust reversing valve. The exhaust valve is located on the wall of the air supply hood and connects the inner and outer sides of the air supply hood. It is configured to open in the venting state and close in the internal circulation state. The first one-way valve is located in the air intake duct and is used to restrict airflow from the air intake port to the air inlet. The exhaust reversing valve is located in the exhaust duct of the air supply module and is configured to close in the hood-opening state and the venting state, and open in the internal circulation state.

[0030] In one embodiment, the gas source unit further includes a manifold branch pipe, a manifold main pipe, a filter structure, a second one-way valve, a third one-way valve, and a fourth one-way valve. The inlet end of the manifold branch pipe is connected to the outlet end of the refrigeration structure. The outlet ends of the manifold branch pipe, the first recovery branch pipe, and the first gas source branch pipe are all connected to the manifold main pipe and connected to the inlet end of the filter structure through the manifold main pipe. The outlet end of the filter structure is connected to the inlet end of the drying structure. The second one-way valve is located on the first recovery branch pipe and is used to restrict airflow from the manifold main pipe to the first recovery branch pipe. The third one-way valve is located on the manifold branch pipe and is used to restrict airflow from the manifold main pipe to the refrigeration structure. The fourth one-way valve is located on the first gas source branch pipe and is used to restrict airflow from the manifold main pipe to the first gas source branch pipe.

[0031] In one embodiment, the air supply hood is provided with an energy storage space and a heat insulation space. The heat insulation space surrounds and is disposed on the outer periphery and above the energy storage space. The heat insulation space has a first side and a second side opposite to each other. The energy storage space is connected to the first side of the heat insulation space, the air supply channel and the air outlet channel respectively. The exhaust valve is connected to the second side of the heat insulation space.

[0032] In one embodiment, the recovery main pipe includes a recovery branch pipe, a heat dissipation branch pipe, a bypass branch pipe, and a recovery manifold. The air inlet end of the recovery branch pipe is connected to the circulating fan. The air outlet end of the recovery branch pipe can be selectively connected to the air inlet end of the heat dissipation branch pipe and the air inlet end of the bypass branch pipe under the adjustment of the control valve. The air outlet ends of the heat dissipation branch pipe and the bypass branch pipe are both connected to the air inlet end of the recovery manifold. The air outlet end of the recovery manifold is connected to the air inlet end of the first recovery branch pipe and the air inlet end of the second recovery branch pipe. The heat dissipation branch pipe is equipped with a heat sink.

[0033] In one embodiment, the control valve includes a heat dissipation reversing valve and a bypass reversing valve, wherein the heat dissipation reversing valve is located on the heat dissipation branch pipe and the bypass reversing valve is located on the bypass branch pipe.

[0034] In one embodiment, the air source unit further includes a seventh check valve and an eighth check valve. The seventh check valve is located at the outlet end of the heat dissipation branch pipe and is used to restrict airflow from the recovery manifold to the heat dissipation branch pipe. The eighth check valve is located at the outlet end of the bypass branch pipe and is used to restrict airflow from the recovery manifold to the bypass branch pipe.

[0035] The technical solution of this invention employs an air supply channel and multiple air supply ports, with each memory cell corresponding to at least one air supply port. This allows test gas (e.g., high-temperature gas) from the air intake duct to be distributed to different air supply ports via the air supply channel, providing a blowing effect on each memory cell. This reduces the difference in heat received by different memory cells, even to the point of near-zero difference. Thus, the temperature testing accuracy of the memory cell testing equipment can be improved. Attached Figure Description

[0036] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0037] Figure 1 This is a schematic diagram of the structure of an embodiment of the air delivery module provided by the present invention;

[0038] Figure 2 This is a schematic diagram of the structure of an embodiment of the testing system provided by the present invention in one state;

[0039] Figure 3 for Figure 2 The illustrated embodiment is shown in a structural diagram of another state;

[0040] Figure 4 for Figure 3 A partial cross-sectional view of the structure shown;

[0041] Figure 5 for Figure 4 A magnified view of a section at point A in the middle;

[0042] Figure 6 for Figure 3 Another partial sectional view of the structure shown;

[0043] Figure 7 for Figure 3 Another partial sectional view of the structure shown;

[0044] Figure 8 for Figure 1 Exploded view of the embodiment shown;

[0045] Figure 9 for Figure 8 Schematic diagram of the structure of the central cover body, air supply component and air return component;

[0046] Figure 10 for Figure 9 Exploded view of the structure shown;

[0047] Figure 11 for Figure 10 A schematic diagram of the structure of the first cover body;

[0048] Figure 12 This is a partial structural schematic diagram of another embodiment of the testing system provided by the present invention;

[0049] Figure 13 This is a schematic diagram of another embodiment of the air delivery module provided by the present invention;

[0050] Figure 14 for Figure 13 Exploded view of the partial structure shown;

[0051] Figure 15 for Figure 14 A schematic diagram of the structure of the first cover body;

[0052] Figure 16 for Figure 13 A partial cross-sectional view of the structure shown;

[0053] Figure 17 for Figure 13 Another partial sectional view of the structure shown;

[0054] Figure 18 This is a schematic diagram of another embodiment of the testing system provided by the present invention;

[0055] Figure 19 for Figure 18 The diagram shown illustrates the airflow in the open state of the embodiment.

[0056] Figure 20 for Figure 18 The illustrated embodiment is a schematic diagram of airflow in both the closed and emptied states.

[0057] Figure 21 for Figure 18 The illustrated embodiment is a schematic diagram of airflow circulation in the closed state and low-temperature test mode;

[0058] Figure 22 for Figure 18 The illustrated embodiment is a schematic diagram of airflow circulation in the closed state and high-temperature test mode;

[0059] Figure 23 This is a schematic diagram of another embodiment of the testing system provided by the present invention;

[0060] Figure 24 for Figure 23 The illustrated embodiment is a schematic diagram of airflow in both the closed and emptied states.

[0061] Figure 25for Figure 23 The illustrated embodiment is a schematic diagram of airflow circulation in the closed state and high-temperature test mode;

[0062] Figure 26 for Figure 23 The illustrated embodiment is a schematic diagram of airflow circulation in the closed state and under normal temperature test mode.

[0063] Explanation of icon numbers:

[0064] 100. Air supply module; 200. Flow structure; 201. Air inlet duct; 202. Air inlet; 203. Air inlet port; 204. Air outlet duct; 205. Air outlet; 206. Air outlet port; 210. Protective shell; 211. Enclosure plate; 212. Top cover; 213. Bottom cover; 214. First top through hole; 215. Second top through hole; 216. First bottom through hole; 217. Second bottom through hole; 220. Main air inlet pipe; 230. Secondary air inlet pipe; 240. Main air outlet pipe; 250. Secondary air outlet pipe; 260. Heating structure;

[0065] 300. Air supply hood; 301. Hood opening; 302. Air supply channel; 303. Air supply port; 304. Energy storage space; 305. Air inlet section; 306. Air supply section; 307. Heat insulation space; 310. Hood body; 311. First rib; 312. First hood through hole; 313. Second hood through hole; 320. Air supply component; 321. First base plate; 322. First cover; 323. Air inlet Mounting hole; 324, air nozzle; 330, air return component; 331, air return channel; 332, air return port; 333, second cover; 334, air outlet mounting hole; 340, temperature sensor; 341, transmission wire; 350, first elastic element; 361, inner heat insulation element; 362, outer heat insulation element; 363, outer cover; 371, exhaust valve; 372, first one-way valve; 373, air outlet reversing valve;

[0066] 400. Test stand; 401. Test stand surface; 410. Sealing fixture; 411. Second rib; 420. Second elastic element; 430. Moving module; 431. Lateral movement module; 432. Guide rail; 433. Gantry frame; 434. Lifting module; 440. Mounting fixture;

[0067] 500. Tester; 501. Test area; 502. Memory slot; 503. Mounting position; 504. Memory unit;

[0068] 600. Gas source unit; 611. Gas source main pipe; 612. First gas source branch pipe; 613. Second gas source branch pipe; 614. Recovery main pipe; 615. First recovery branch pipe; 616. Second recovery branch pipe; 617. Manifold branch pipe; 618. Manifold main pipe; 619. Air guide pipe; 621. First reversing valve; 622. Second reversing valve; 623. Third reversing valve; 624. Fourth reversing valve; 625. Second check valve; 626. Third check valve Valves; 627, Fourth Check Valve; 628, Fifth Check Valve; 629, Sixth Check Valve; 631, Refrigeration Structure; 632, Drying Structure; 633, Filter Structure; 634, Circulating Fan; 641, Recovery Diverter Pipe; 642, Heat Dissipation Branch Pipe; 643, Bypass Branch Pipe; 644, Recovery Manifold; 645, Heat Dissipation Reversing Valve; 646, Bypass Reversing Valve; 647, Seventh Check Valve; 648, Eighth Check Valve; 649, Radiator.

[0069] The realization of the objective, functional features and advantages of the present invention will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0070] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0071] It should be noted that if the embodiments of the present invention involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly.

[0072] Furthermore, if the embodiments of this invention involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the use of "and / or" or "and / or" throughout the text includes three parallel solutions. For example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this invention.

[0073] In related technologies, a memory cell testing system includes a test bench, a tester, an air supply module, and a heater. The tester has a test area for mounting multiple memory cells, which is exposed on the test bench surface. The air supply module includes an air intake duct, an air inlet connected to the air intake duct, and a heating chamber. The wall of the heating chamber covers the upper side of the test area. After being heated to a preset temperature by the heater, high-temperature gas is blown into the heating chamber through the air intake duct, causing the entire space inside the heating chamber to heat up, thereby raising the temperature of the memory cells located inside the heating chamber to the test temperature, thus achieving high-temperature testing of multiple memory cells.

[0074] However, this heating method is prone to uneven temperature distribution within the heating chamber, resulting in significant differences in the amount of heat received by different memory cells, which in turn leads to low accuracy in high-temperature testing.

[0075] In view of this, the present invention proposes an air supply module 100, which is applied to a memory cell testing system and can improve the temperature testing accuracy of the memory cell testing equipment.

[0076] Please see Figure 1 , Figure 4 and Figure 5 In one embodiment of the present invention, the air supply module 100 includes a flow structure 200 and an air supply hood 300. The flow structure 200 is provided with an air inlet duct 201, an air inlet 202 and an air inlet 203 respectively connected to the air inlet duct 201. The air supply hood 300 is provided with a hood opening 301, an air supply channel 302 and an air supply port 303. The edge of the hood opening 301 covers the test area 501. The air supply port 303 is connected to the air inlet 203 through the air supply channel 302. The gas blown out of the air supply port 303 flows to the memory unit through the hood opening 301. Each memory unit is subjected to the blowing action of at least one air supply port 303.

[0077] The technical solution of this invention employs an air supply channel 302 and multiple air supply ports 303, with each memory cell corresponding to at least one air supply port 303. This allows test gas (e.g., high-temperature gas) from the air intake duct 201 to be distributed to different air supply ports 303 via the air supply channel 302, providing a blowing effect on each memory cell. This reduces the difference in heat received by different memory cells, even to the point of near-zero difference. Consequently, the temperature testing accuracy of the memory cell testing equipment can be improved.

[0078] It should be noted that the air delivery module 100 of this invention includes, but is not limited to, applications in high-temperature testing scenarios, low-temperature testing scenarios, and normal-temperature testing scenarios. In high-temperature testing scenarios, the high-temperature gas blown from the air supply port 303 to the memory cells can simulate the state of the memory cells in actual high-temperature operating environments. Through this precise high-temperature gas delivery method, the performance of the memory cells under high-temperature conditions can be more realistically tested, including its stability, data storage and retrieval accuracy, and other indicators. Simultaneously, because the air supply port 303 blows air onto each memory cell, the consistency of the high-temperature environment for each memory cell is ensured, further improving the reliability and accuracy of the test results and providing strong data support for the application of memory cells in high-temperature environments.

[0079] Similarly, in low-temperature testing scenarios, the gas blown into the memory cells by the air supply port 303 is a low-temperature gas. This low-temperature gas can simulate a low-temperature environment, accurately testing the performance of the memory cells under low-temperature conditions and ensuring stable operation even in such conditions. In normal-temperature testing scenarios, the gas blown into the memory cells by the air supply port 303 is a normal-temperature gas, thus testing the performance of the memory cells under normal temperature conditions, meeting the needs of memory cell performance evaluation in daily use.

[0080] Secondly, each memory cell can be subjected to airflow from a single air supply port 303, or each memory cell can be subjected to airflow from two or more air supply ports 303. Alternatively, some memory cells can be subjected to airflow from a single air supply port 303, while other memory cells can be subjected to airflow from two or more air supply ports 303.

[0081] In addition, the types of memory units include, but are not limited to, memory chips and memory modules. When the type of memory unit is a memory module, the test area 501 is provided with memory slots 502 for installing memory modules, such as... Figure 2 As shown. When the memory unit type is memory chip, test area 501 has an installation slot 503 for installing memory chips, as shown. Figure 11 As shown.

[0082] Please see Figure 2 and Figure 3Specifically, in some embodiments, the memory cell testing system includes a test bench 400 and a tester 500. The tester 500 has a test area 501 for mounting multiple memory cells, which is exposed on the test bench 400 surface. The test bench 400 includes a mounting fixture 440 and a sealing fixture 410. The mounting fixture 440 is mounted on the test bench 400 surface, and the sealing fixture 410 is mounted on the upper surface of the mounting fixture 440. Both the mounting fixture 440 and the sealing fixture 410 have clearance holes, and the test area 501 is exposed within the clearance holes so that the memory cells can be exposed on the outside of the clearance holes.

[0083] Optionally, in some embodiments, the memory unit testing system further includes a gas source unit, which has a cooling structure, a drying structure, and a gas guide pipe, and is used to provide dried cold air or room temperature gas. The air inlet 202 of the gas delivery module 100 is connected to the gas guide pipe, and the gas output from the gas source unit flows into the air inlet 202 through the gas guide pipe. The gas delivery module 100 also includes a heating structure disposed in the air intake duct 201, which can heat the gas in the air intake duct 201.

[0084] For example, in one embodiment, the memory cell testing system supports high-temperature testing, room-temperature testing, and low-temperature testing. The refrigeration structure can be a common refrigerator composed of components such as a compressor, evaporator, and condenser. The drying structure can be a common dryer composed of components such as a molecular sieve, a desiccant filling layer, and an airflow distribution device. The molecular sieve effectively adsorbs moisture from the gas, the desiccant filling layer further enhances the drying effect, and the airflow distribution device ensures that the gas passes evenly through the drying structure, thereby achieving the purpose of efficiently drying the gas. For ease of explanation, the following description will use the refrigeration structure as a refrigerator and the drying structure as a dryer as an example.

[0085] In one embodiment, the air source unit further includes an air source interface, a first branch, a second branch, a solenoid directional valve, and an air filter. The air source interface is used to connect to a compressed air source (which may be a centralized compressed air source supplied to the production workshop) to receive air from the compressed air source. The inlet end of the solenoid directional valve is connected to the air source interface, and the two outlet ends of the solenoid directional valve are respectively connected to the inlet ends of the first branch and the second branch, and can selectively connect either the first branch or the second branch. The outlet ends of both the first and second branches are connected to the inlet end of the air filter, and the outlet end of the air filter is connected to the air duct through a dryer. A cooler is connected to the second branch.

[0086] The memory unit testing system automatically switches the air path according to the test mode (high temperature / low temperature / normal temperature), which can be understood by referring to the three specific scenarios below.

[0087] In high-temperature testing mode: The electromagnetic reversing valve opens the first branch, and compressed air enters the air filter through the electromagnetic reversing valve and the first branch, then flows into the dryer for dehumidification. The dried gas is then input into the air intake duct 201 of the air supply module 100 through the air guide pipe, and is heated by the heating structure of the air intake duct 201 until it reaches the preset temperature. Finally, the high-temperature dried gas is evenly blown onto the surface of the memory cell through the air supply port 303 to achieve targeted heating of the memory cell.

[0088] In low-temperature test mode: The electromagnetic reversing valve opens the second branch, and compressed air enters the refrigerator through the electromagnetic reversing valve and the second branch, where it is cooled by the refrigerator's cooling effect. It then passes through the air filter and dryer in sequence. The processed dry cold air is input into the air intake duct 201 of the air supply module 100 through the air duct pipe, and is heated by the heating structure of the air intake duct 201 (or not heated, i.e., the heating structure is not working), to regulate the temperature of the dry cold air and bring it to the preset temperature. Finally, the low-temperature dry gas is evenly blown onto the surface of the memory unit through the air supply port 303.

[0089] In normal temperature test mode: the electromagnetic reversing valve opens the second branch, and compressed air enters the refrigerator through the electromagnetic reversing valve and the second branch, but is not cooled by the refrigerator (the refrigerator is not working). It then passes through the air filter and dryer in sequence. The processed normal temperature dry gas is input into the air intake duct 201 of the air supply module 100 through the air guide pipe, but is not heated by the heating structure (i.e., the heating structure is not working). Finally, the normal temperature dry gas is evenly blown onto the surface of the memory unit through the air supply port 303.

[0090] Of course, the working mode and application scenarios of the memory unit testing system of this application are not limited to the above content, and this application does not make specific limitations on them.

[0091] Optionally, in some embodiments, the gas delivery module 100 further includes a heating structure disposed in the air inlet duct 201 and / or the air outlet duct 204 to heat the gas in the air inlet duct 201 and / or the air outlet duct 204.

[0092] The specific structural form and arrangement of the heating structure can be varied, and this application does not impose any specific limitations on it. For example, in some embodiments, the heating structure can be a heating coil that fits snugly around the outer wall of the air intake duct 201. In this way, by using an external heating coil, it is possible to avoid the heating coil interfering with the airflow within the air intake duct 201, and to improve heating efficiency.

[0093] It should be noted that the heating coils can be arranged around the outer walls of both the intake duct 201 and the exhaust duct 204, or they can be arranged only around the outer walls of either the intake duct 201 or the exhaust duct 204. In high-temperature testing mode, only the heating coil on the intake duct 201 may be operational, while the heating coil on the exhaust duct 204 may be inactive. In low-temperature testing mode, regardless of whether the heating coil on the intake duct 201 is operational, the heating coil on the exhaust duct 204 may be operational to reduce the risk of condensation on the inner wall or edge of the exhaust port 205. This prevents condensation from flowing into the air supply module 100 along the exhaust duct 204, which could corrode internal components or lead to inaccurate test results.

[0094] Please see Figure 4 and Figure 5 Optionally, in some embodiments, the air supply hood 300 includes a hood body 310 and an air supply component 320. An air supply channel 302 and an air supply port 303 are both located on the air supply component 320. A hood opening 301 is located on the hood body 310. The air supply component 320 is located inside the hood body 310 and is spaced apart from the edge of the hood opening 301. The end face of the air supply component 320 near the hood opening 301 and the inner wall surface of the hood body 310 together enclose an energy storage space 304. In high-temperature or low-temperature testing modes, the energy storage space 304 can achieve a certain degree of heat or cold storage effect. Optionally, please refer to... Figure 5 and Figure 10 The cover body 310 is composed of four side plates and a top plate. In this way, by setting up the energy storage space 304, it is beneficial to maintain the temperature stability around the memory unit and reduce the energy consumption of the device.

[0095] Please see Figure 1 and Figure 2 Optionally, in some embodiments, the memory unit is configured as a memory module, and the test area 501 is provided with a memory slot 502 for mounting the memory module. The air supply component 320 has an air supply port 303 in the form of a slit, and the long axis of the air supply port 303 extends along the length direction of the memory slot 502. In this way, the slit-shaped air supply port 303 can blow air simultaneously onto different areas of the memory module along its length, so that the heat received by different areas of the memory module is as uniform as possible, thereby improving the test accuracy. Further, there may be two air supply ports 303 corresponding to one memory slot 502, and these two air supply ports 303 are distributed at intervals along the length direction of the memory slot 502.

[0096] Please refer to the following: Figure 5In one embodiment, the tester 500 has four memory slots 502 distributed along the left and right directions, and a total of eight air supply ports 303. Each pair of air supply ports 303 forms a group responsible for blowing air into one memory slot 502. The four groups of air supply ports 303 are distributed along the left and right directions, and the two air supply ports 303 in the same group are distributed along the front and back directions.

[0097] Please see Figure 9 and Figure 11 Optionally, in some embodiments, the long axis of the air supply port 303 extends along a first direction (i.e., the front-to-back direction in the figure), and multiple air supply ports 303 are distributed at intervals along a second direction (i.e., the left-to-right direction in the figure) and are respectively located on opposite sides of the air inlet 203. The second direction intersects the first direction. The air supply channel 302 includes an air inlet section 305 and two air supply sections 306. The air inlet section 305 extends along the second direction and connects between the two air supply sections 306. The air inlet 203 is connected to the air inlet section 305, and the air supply port 303 is connected to the air supply section 306. That is, the air inlet section 305 and the two air supply sections 306 together form a general I-shaped configuration. In this way, by using the air inlet section 305 to distribute airflow to the air supply sections 306 on both sides, and then using the air supply sections 306 to distribute airflow to different air supply ports 303 on them, the airflow that can be distributed to each air supply port 303 can be made as consistent as possible.

[0098] Optionally, in other embodiments, the memory unit type is configured as a memory chip, the test area 501 is provided with a mounting position 503 for installing the memory chip, and the air supply component 320 is provided with multiple air nozzles 324, with air inlets 303 located at the air nozzles 324, and one air nozzle 324 corresponding to one memory chip. In this way, each memory chip can be subjected to the blowing action of one air nozzle 324, so that the heat received by different memory chips is as uniform as possible.

[0099] Please see Figure 12 and Figure 13 In another embodiment, the tester 500 has a total of sixteen mounting positions 503, wherein four mounting positions 503 form a group, and the four groups of mounting positions 503 are arranged in a rectangular array; the four mounting positions 503 in the same group are distributed along the left and right direction. There are a total of sixteen air nozzles 324, which are set to correspond to the distribution positions of the mounting positions 503, so that each air nozzle 324 is responsible for blowing air onto the memory chip on one mounting position 503.

[0100] Please see Figures 13 to 16Optionally, in other embodiments, the air supply component 320 is provided with two rows of nozzles 324 distributed on both sides of the air supply port 303 along a first direction (i.e., the front-to-back direction in the figure). Multiple nozzles 324 in the same row are spaced apart along a second direction (i.e., the left-to-right direction in the figure), with the second direction intersecting the first direction. The air supply channel 302 includes an air inlet section 305 and two air supply sections 306. The air inlet section 305 extends along the first direction and connects between the two air supply sections 306. The air inlet port 203 connects to the air inlet section 305, and the air supply port 303 connects to the air supply section 306. Thus, by distributing airflow from the air inlet section 305 to the air supply sections 306 on both sides, and then distributing airflow from the air supply sections 306 to different air supply ports 303, the airflow allocated to each air supply port 303 can be made as consistent as possible.

[0101] Please see Figure 5 Optionally, in some embodiments, the edge of the cover opening 301 is provided with a first rib 311 and a first elastic member 350. The test platform 400 includes a sealing fixture 410 and a second elastic member 420. The outer periphery of the sealing fixture 410 is provided with a second rib 411, which surrounds the outer periphery of the second elastic member 420. The first rib 311 abuts against the second elastic member 420 (first seal), and the second rib 411 abuts against the second elastic member 420 (second seal). In the figure, the first rib 311 and the second elastic member 420 have overlapping parts, and the second rib 411 also has overlapping parts. This is to indicate that there is a certain amount of interference between the two components (e.g., the first rib 311 and the second elastic member 420) for sealing, so as to improve the sealing effect. Thus, by setting two seals between the edge of the opening 301 of the gas supply hood 300 and the sealing fixture 410, the uncontrolled leakage of test gas and heat can be effectively prevented, thereby reducing the operating energy consumption of the equipment.

[0102] Optionally, the first elastic element 350 and the second elastic element 420 may be made of silicone, rubber or other materials with elastic deformation capabilities, and this application does not specifically limit this.

[0103] Please see Figure 5Optionally, in some embodiments, the gas delivery module 100 further includes a temperature sensor 340 and a transmission wire 341. The temperature sensor 340 is exposed within the energy storage space 304, and the lower end of the transmission wire 341 is connected to the temperature sensor 340, while the upper end of the transmission wire 341 extends out of the cover body 310 and is exposed externally. The transmission wire 341 is used for communication with the gas source unit to adjust the operating parameters of the gas source unit using the signal collected by the temperature sensor 340. Thus, by using the temperature sensor 340 to monitor the actual temperature within the energy storage space 304 in real time and using this as the basis for adjusting the operation of the gas source unit, the test results can be made more accurate and reliable.

[0104] Please see Figures 6 to 8 , Figure 17 Optionally, in some embodiments, the air supply hood 300 further includes an air return component 330, which is provided with an air return channel 331 and at least two air return ports 332 respectively connected to the air return channel 331. The air return ports 332 are connected to the energy storage space 304. The flow structure 200 is also provided with an air outlet duct 204, an air outlet 206 and an air outlet 205. The air outlet duct 204 is connected between the air outlet 206 and the air outlet 205. The air outlet 206 is connected to the air return port 332. The air outlet duct 204 and the air inlet duct 201 are arranged in the same installation space.

[0105] Specifically, taking the high-temperature test mode as an example, the airflow has a high temperature when it flows through the intake duct 201. Then, when it flows through the energy storage space 304, the heat is absorbed by components such as the memory unit. After the temperature drops, the airflow is then orderly discharged to the outside of the air supply module 100 through the return air component 330 and the return air channel 331. Since the airflow flowing through the return air channel 331 still has a certain amount of heat (the airflow temperature is higher than the room temperature), the discharged airflow can use its residual heat to heat the air in the installation space, thereby making the temperature of the surrounding environment of the intake duct 201 (i.e., the installation space) higher than the room temperature, so as to reduce the degree of heat exchange between the intake duct 201 and the air in the installation space, so that the airflow can retain more heat and flow from the intake duct 201 into the air supply component 320.

[0106] In this way, by using the return air component 330 and the outlet air duct 204 to controllably export the air in the energy storage space 304 to the outside of the air supply module 100, the residual heat of the exported airflow can be reused while maintaining the effective and stable temperature field of the energy storage space 304, thereby reducing the operating energy consumption of the equipment and achieving the purpose of energy saving and environmental protection.

[0107] Please see Figure 8 and Figure 10Optionally, there is one air intake duct 201 and two air outlet ducts 204, which are distributed on the left and right sides of the air intake duct 201 and adjacent to it. The diameter of the air outlet ducts 204 is smaller than that of the air intake duct 201. The cover body 310 has one first cover through hole 312 and two second cover through holes 313. The first cover through hole 312 is for the air intake duct 201 to pass through, and the second cover through holes 313 are for the air outlet ducts 204 to pass through. In this way, the two air outlet ducts 204 can simultaneously exchange heat with the air in the installation space, which can improve the utilization of the heat of the exhaust airflow. Of course, in other embodiments, the number of air intake ducts 201 and air outlet ducts 204 can also be other values.

[0108] Please see Figure 5 and Figure 10 Optionally, in some embodiments, the air supply component 320 includes a first substrate 321 and a first cover 322. The first substrate 321 is connected to the inner wall surface of the cover body 310, and the first cover 322 covers the lower surface of the first substrate 321. An air supply channel 302 is formed between the first cover 322 and the first substrate 321. The air return component 330 includes a second substrate and a second cover 333. The second cover 333 covers the upper surface of the second substrate, and an air return channel 331 is formed between the second cover 333 and the second substrate. The first substrate 321 and the second substrate are configured with the same structure and have an air return port 332. That is, the air supply component 320 and the air return component 330 share the same substrate (i.e., the first substrate 321), which simplifies the structure and reduces manufacturing costs.

[0109] Please see Figure 10 In this embodiment, there are eight return air ports 332, of which four return air ports 332 are distributed along the left and right direction on the front side of the first substrate 321, and the other four return air ports 332 are distributed along the left and right direction on the rear side of the first substrate 321.

[0110] Please see Figure 5 and Figure 7 Optionally, in some embodiments, a heat-insulating space 307 is formed between the outer wall of the second cover 333 and the inner wall of the cover body 310, and the heat-insulating space 307 is filled with gas. Thus, by arranging heat-insulating spaces 307 above and around the return air component 330, the air within these spaces provides a certain degree of heat insulation, reducing the amount of heat conducted from the air supply component 320 and the return air component 330 to the cover body 310 and lost, thereby reducing the equipment's operating energy consumption. Furthermore, there is no need to install additional heat-insulating material within the heat-insulating space 307, which helps reduce the equipment's manufacturing cost. Of course, in other embodiments, the heat-insulating space 307 may be filled with heat-insulating material, such as heat-insulating cotton.

[0111] To further reduce heat leakage from the gas supply unit 320 and the energy storage space 304, please refer to Figure 5 and Figure 7 Optionally, in some embodiments, the first cover 322 and the inner wall surface of the cover body 310 are spaced apart. The air supply cover 300 also includes an inner heat insulation member 361 disposed on the inner wall surface of the energy storage space 304, with a portion of the inner heat insulation member 361 filling the gap between the first cover 322 and the cover body 310. In this way, the inner heat insulation member 361 can reduce the degree of heat conduction from the air supply member 320 to the cover body 310 and from the energy storage space 304 to the cover body 310 and loss, thereby reducing the operating energy consumption of the equipment.

[0112] Please see Figure 5 and Figure 7 Optionally, in some embodiments, the air supply shroud 300 further includes a shroud housing 363 and an outer heat insulation member 362. The shroud housing 363 covers the outside of the shroud body 310, and the outer heat insulation member 362 fills the gap between the shroud housing 363 and the shroud body 310. Thus, the inner heat insulation member 361 provides a first layer of heat insulation, and the outer heat insulation member 362 provides a second layer of heat insulation, thereby further reducing the degree of heat leakage from the air supply component 320 and the energy storage space 304, and reducing the operating energy consumption of the equipment. Furthermore, the shroud housing 363 also provides protection.

[0113] Please see Figure 5 , Figure 6 , Figure 8 and Figure 10 Specifically, the flow structure 200 may include a protective shell 210, an intake main pipe 220, an intake secondary pipe 230, two exhaust main pipes 240 and two exhaust secondary pipes 250. The protective shell 210 includes a surrounding plate 211, a top cover 212 and a bottom cover 213. The top cover 212 is installed at the upper port of the surrounding plate 211, and the bottom cover 213 is installed at the lower port of the surrounding plate 211. The top cover 212 has a first top through hole 214 and two second top through holes 215, and the bottom cover 213 has a first bottom through hole 216 and two second bottom through holes 217.

[0114] Please see Figure 5 , Figure 6 , Figure 8 and Figure 10An intake main pipe 220 and two exhaust main pipes 240 are installed through the enclosure 211, with the two exhaust main pipes 240 located on the left and right sides of the intake main pipe 220. It can be understood that the internal space of the protective shell 210 is the installation space mentioned earlier. The upper opening of the intake main pipe 220 connects to the first top through hole 214, and the upper end of the intake secondary pipe 230 extends into the first bottom through hole 216, with the upper opening of the intake secondary pipe 230 connecting to the lower opening of the intake main pipe 220. The first base plate 321 is provided with an intake mounting hole 323. The lower end of the intake secondary pipe 230 passes through the first cover through hole 312 and the second cover 333 of the cover body 310 and is inserted into the intake mounting hole 323 of the first base plate 321, so that the lower opening of the intake secondary pipe 230 can connect to the air supply channel 302. The air intake duct 201 is formed on the first top through hole 214, the main air intake pipe 220 and the secondary air intake pipe 230, and the top through hole is configured as an air intake port 202, and the lower pipe port of the secondary air intake pipe 230 is configured as an air intake outlet 203.

[0115] Please see Figure 5 , Figure 6 , Figure 8 and Figure 10 The upper end of the main exhaust pipe 240 passes through the second top through hole 215, and the upper opening of the main exhaust pipe 240 is exposed above the protective shell 210. The lower opening of the main exhaust pipe 240 is connected to the upper opening of the auxiliary exhaust pipe 250 through the second bottom through hole 217 and the second cover through hole 313. The upper end of the auxiliary exhaust pipe 250 is inserted into the second cover through hole 313. The second cover 333 is provided with an exhaust mounting hole 334. The lower end of the auxiliary exhaust pipe 250 passes through the second cover through hole 313 of the cover body 310 and is inserted into the exhaust mounting hole 334 so that the lower opening of the auxiliary exhaust pipe 250 can be connected to the return air channel 331. The exhaust duct 204 is formed on the main exhaust pipe 240, the second bottom through hole 217 and the exhaust secondary pipe 250, and the upper pipe opening of the main exhaust pipe 240 is configured as the exhaust port 205, and the lower pipe opening of the exhaust secondary pipe 250 is configured as the return air port.

[0116] Of course, in other embodiments, the overcurrent structure 200 may also adopt other structural forms, as long as they can achieve the functional effects of this application, and this application does not make specific limitations on them.

[0117] It is worth mentioning that, in embodiments with heating coils, heating coils may be installed on the outer peripheral surfaces of both the intake manifold 220 and the exhaust manifold 240.

[0118] Please see Figure 2 and Figure 3The present invention also proposes a memory unit testing system, which includes a test bench 400, a tester 500, an air source machine, and a memory unit testing system. The specific structure of the memory unit testing system is as described in the above embodiments. Since the memory unit testing system adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought about by the technical solutions of the above embodiments, which will not be described in detail here.

[0119] Please see Figure 2 and Figure 3 The test bench 400 has a movable module 430 on its test surface 401. The tester 500 has a test area 501 for installing multiple memory units, which is exposed on the test surface 401 of the test bench 400. The air source unit has a cooling structure, a drying structure, and an air guide pipe, and is used to provide dried cold air or room temperature gas. The air delivery module 100 is mounted on the movable module 430 so that it can move relative to the test area 501. The air inlet 202 of the air delivery module 100 is connected to the air guide pipe, and the gas output from the air source unit flows into the air inlet 202 through the air guide pipe. The air delivery module 100 also includes a heating structure located in the air intake duct 201, which can heat the gas in the air intake duct 201.

[0120] Please see Figure 2 , Figure 3 and Figure 5 Optionally, in some embodiments, the test bench 400 further includes a mounting fixture 440 disposed on the surface of the test bench 400, and a sealing fixture 410 is mounted on the upper surface of the mounting fixture 440. The moving module 430 includes a transverse module 431 and a lifting module 434. The transverse module 431 includes two guide rails 432 extending along a first direction, a gantry frame 433 straddling the two guide rails 432, and a first driving member for moving the gantry frame 433. The two guide rails 432 are respectively disposed on the left and right sides of the mounting fixture 440, and the gantry frame 433 can move along the first direction. The lifting module 434 is mounted on the gantry frame 433 and includes a second driving member and a mounting base. The protective shell 210 of the air supply module 100 is mounted on the mounting base and is driven by the second driving member to perform lifting movements.

[0121] Please see Figure 2 and Figure 3 , Figure 2 The air supply module 100 shown is located above the front side of the sealing fixture 410 so that the entire sealing fixture 410 is exposed, making it easy to disassemble and replace the memory unit. Figure 3 The air delivery module 100 shown covers the upper side of the sealing fixture 410 and is sealed to the sealing fixture 410.

[0122] Please see Figure 18Based on the structure of the foregoing embodiments, optionally, in some other embodiments, the gas source unit 600 further includes a gas source main pipe 611, a first gas source branch pipe 612, a second gas source branch pipe 613, and a control valve. The control valve is used to control the gas source main pipe 611 to selectively connect to the first gas source branch pipe 612 and the second gas source branch pipe 613. The first gas source branch pipe 612 is connected between the gas outlet end of the gas source main pipe 611 and the gas inlet end of the drying structure 632. The second gas source branch pipe 613 is connected between the gas outlet end of the gas source main pipe 611 and the gas inlet end of the refrigeration structure 631. The gas outlet end of the refrigeration structure 631 is connected to the gas inlet end of the drying structure 632. The gas outlet end of the drying structure 632 is connected to the gas inlet end of the air guide pipe 619.

[0123] Specifically, in high-temperature and normal-temperature testing modes, the gas in the main gas supply pipe 611 can flow directly to the drying structure 632 and the gas guide pipe 619 via the first gas supply branch pipe 612. In low-temperature testing mode, the gas in the main gas supply pipe 611 can first flow into the cooling structure 631 via the second gas supply branch pipe 613, and after being cooled by the cooling effect of the cooling structure 631, it then flows to the drying structure 632 and the gas guide pipe 619. In this way, by cooperating with the control valve and the two gas supply branch pipes, multiple testing modes of the memory cell testing system can be realized, with a simple structure and easy implementation.

[0124] It should be noted that, Figure 18 The internal structure of the air supply module 100 shown is simplified. In actual application, the internal structure of the air supply module 100 can refer to the specific structure of the aforementioned embodiment, including but not limited to the air supply component 320 and the air return component 330.

[0125] Please see Figure 18 Optionally, in some embodiments, the control valve includes a first reversing valve 621 and a second reversing valve 622. The first reversing valve 621 is located on the first air source branch pipe 612, and the second reversing valve 622 is located on the second air source branch pipe 613. That is, each air source branch pipe is provided with an independently operating reversing valve. Opening the reversing valve enables the corresponding air source branch pipe to be open, and closing the reversing valve enables the corresponding air source branch pipe to be shut off. Thus, the structure is simple and easy to implement. Of course, in other embodiments, the control valve can also be a two-position three-way solenoid valve.

[0126] It should be noted that the gas used in the memory cell testing system of this application can be selected from various sources, such as air or an inert gas. The inert gas includes, but is not limited to, helium and nitrogen, and can be either one of these or a mixture of both.

[0127] For example, in some other embodiments, the gas source unit 600 further includes a gas supply structure (not shown in the figures), which is connected to the inlet end of the gas source main pipe 611 and is capable of supplying inert gas, including helium and / or nitrogen, to the gas delivery module 100. The gas supply structure can be either a device capable of directly producing inert gas or a storage tank filled with high-pressure inert gas.

[0128] Taking a mixture of helium and nitrogen as an example, on the one hand, using helium can improve the accuracy and efficiency of testing. Due to its inertness and rapid thermal conductivity, helium accelerates thermal equilibrium and heat transfer, allowing the 504 memory unit to quickly reach a stable operating temperature during testing, reducing testing errors caused by temperature fluctuations. On the other hand, using nitrogen can reduce the probability of fire during testing, improving the safety of the equipment.

[0129] It is understood that in embodiments using air, since air is readily available, the air delivery module 100 can adopt a single-inlet, single-outlet gas flow pattern. That is, after the air flows through the air source 600 and the air delivery module 100, and flows out from the air outlet 205 of the air delivery module 100, it does not need to be recycled.

[0130] In embodiments using inert gas, since the cost of obtaining inert gas is high, the gas delivery module 100 can adopt a recirculating gas flow method. That is, after the inert gas flows through the gas source 600 and the gas delivery module 100, and exits from the gas outlet 205 of the gas delivery module 100, it can be recycled and reused, achieving a reciprocating flow between the gas source 600 and the gas delivery module 100. This achieves the recycling of the inert gas and also fully utilizes the heat carried by the inert gas, thereby reducing the operating energy consumption of the memory cell testing system and contributing to energy conservation and environmental protection.

[0131] As for how to achieve the reciprocating flow of gas between the gas source 600 and the gas delivery module 100, it can be achieved by adding components such as a recovery pipeline and a circulation fan 634 on the basis of the structure of the previous embodiment.

[0132] For example, please see Figure 18In some other embodiments, the air source unit 600 further includes a recovery main pipe 614, a first recovery branch pipe 615, a second recovery branch pipe 616, and a circulating fan 634. The circulating fan 634 is connected between the air inlet end and the air outlet 205 of the recovery main pipe 614 and is used to promote airflow from the air outlet 205 to the recovery main pipe 614. The air outlet end of the recovery main pipe 614 is connected to the air inlet end of the first recovery branch pipe 615 and the air inlet end of the second recovery branch pipe 616. The control valve is also used to control the recovery main pipe 614 to selectively connect the first recovery branch pipe 615 and the second recovery branch pipe 616. The air outlet end of the first recovery branch pipe 615 is connected to the air inlet end of the drying structure 632, and the air outlet end of the second recovery branch pipe 616 is connected to the air inlet end of the refrigeration structure 631.

[0133] Thus, by working together, the main recovery pipe 614, the first recovery branch pipe 615, the second recovery branch pipe 616 and the circulating fan 634 can form a gas circulation loop between the gas delivery module 100 and the gas source machine 600. The structure is simple and easy to implement.

[0134] Please see Figure 18 Optionally, in some embodiments, the control valve includes a third directional valve 623 and a fourth directional valve 624. The third directional valve 623 is located in the first recovery branch pipe 615, and the fourth directional valve 624 is located in the second recovery branch pipe 616. That is, each recovery branch pipe is provided with an independently operating directional valve. Opening the directional valve enables the corresponding recovery branch pipe to be open, and closing the directional valve enables the corresponding recovery branch pipe to be shut off. Thus, the structure is simple and easy to implement.

[0135] It is understandable that when the air supply module 100 is in the closed state (i.e., its sealed cover is on the test bench 400), because the gas in the circulation loop has a certain positive pressure, it is difficult for external air to enter the circulation loop. However, when the air supply module 100 is in the open state (e.g., ... Figure 2 When (as shown), if no intervention is taken, external air will enter the air supply module 100 and the air source machine 600 through the opening 301 of the air supply hood 300, resulting in a large amount of air mixed in the circulation loop after the next circulation loop is reconstructed, which is not conducive to the advantages of inert gas.

[0136] Therefore, in order to reduce the impact of the air supply module 100 being in an open state (such as...) Figure 2As shown, the extent to which external air intrudes into the air supply module 100 and the air source unit 600 can be selectively, in some embodiments, the air supply module 100 further includes an exhaust valve 371, a first one-way valve 372, and an exhaust reversing valve 373. The exhaust valve 371 is located on the wall of the air supply hood 300 and connects the inner and outer sides of the air supply hood 300. It is configured to open in the venting state and close in the internal circulation state. The first one-way valve 372 is located in the air intake duct 201 and is used to restrict the airflow from the air intake port 203 to the air intake port 202. The exhaust reversing valve 373 is located in the exhaust duct 204 and is configured to close in the hood-opening state and the venting state, and open in the internal circulation state.

[0137] Please see Figures 19 to 22 The dashed lines with arrows in the diagram indicate the direction of gas flow.

[0138] in, Figure 19 The air supply module 100 is in the open state. Because the exhaust reversing valve 373 is closed, the exhaust duct 204 is cut off, and a first one-way valve 372 is provided at the intake duct 201, even if external air enters the interior of the air supply cover 300, it cannot continue to enter the intake duct 201, the exhaust duct 204, and the air source unit 600. At this time, the exhaust valve 371 can be opened or closed.

[0139] Figure 20 The gas delivery module 100 is in the closed state, and the memory unit test system is in the emptied state. That is, after the gas delivery module 100 is reopened, the first stage of the gas source 600 supplying inert gas to the gas delivery module 100 is to continuously expel the air inside the gas delivery module 100 by continuously supplying inert gas. Figure 20 In the scenario shown, because the exhaust valve 371 is open and the exhaust reversing valve 373 is closed, the inert gas flowing in from the intake duct 201 will carry the residual air inside the air supply hood 300 and flow together towards the exhaust valve 371, eventually flowing out through the exhaust valve 371 to the outside of the air supply hood 300. At this time, the first air source branch can be used to directly supply inert gas to the air delivery module 100, bypassing the refrigeration structure 631, so that the inert gas can have a higher positive pressure and more kinetic energy when it flows to the air supply hood 300, thereby improving its effect on displacing air.

[0140] Figure 21The gas supply module 100 is in the closed state, and the memory cell testing system is in low-temperature testing mode. At this time, the exhaust valve 371 is closed, the exhaust reversing valve 373 is open, the third reversing valve 623 is closed, the fourth reversing valve 624 is open, and the circulating fan 634 is working to create a circulation loop between the gas source unit 600 and the gas supply module. Specifically, the inert gas can start from the cooling structure 631, flow sequentially through the manifold branch pipe 617, the manifold main pipe 618, the filter structure 633, the drying structure 632, the air guide pipe 619, the air inlet duct 201, the inside of the gas supply cover 300, the air outlet duct 204, the recovery main pipe 614, the second recovery branch pipe 616, and finally flow back to the cooling structure 631 for the next circulation. In this circulation, the inert gas will continuously flow through the memory cell 504 located inside the gas supply cover 300 and cool the memory cell 504.

[0141] Figure 22 The air supply module 100 is in the closed state, and the memory cell testing system is in high-temperature testing mode. At this time, the exhaust valve 371 is closed, the exhaust reversing valve 373 is open, the third reversing valve 623 is open, the fourth reversing valve 624 is closed, and the heating structure 260 and the circulating fan 634 are both working to create a circulation loop between the air source unit 600 and the air supply module. Specifically, the inert gas can start from the main manifold 618, flow sequentially through the filter structure 633, the drying structure 632, the air guide pipe 619, the air inlet duct 201, the inside of the air supply hood 300, the exhaust duct 204, the recovery main pipe 614, the first recovery branch pipe 615, and finally flow back to the main manifold 618 for the next circulation. In this circulation, the inert gas will continuously flow through the memory cell 504 located inside the air supply hood 300 and heat the memory cell 504.

[0142] Optionally, in some other embodiments, the gas source unit 600 further includes a manifold branch pipe 617, a manifold main pipe 618, a filter structure 633, a second one-way valve 625, a third one-way valve 626, and a fourth one-way valve 627. The inlet end of the manifold branch pipe 617 is connected to the outlet end of the refrigeration structure 631. The outlet ends of the manifold branch pipe 617, the first recovery branch pipe 615, and the first gas source branch pipe 612 are all connected to the manifold main pipe 618, and are connected to the filter structure 633 through the manifold main pipe 618. The air inlet of the filter structure 633 is connected to the air inlet of the drying structure 632. A second one-way valve 625 is located on the first recovery branch pipe 615 and is used to restrict airflow from the main manifold 618 to the first recovery branch pipe 615. A third one-way valve 626 is located on the main manifold 617 and is used to restrict airflow from the main manifold 618 to the cooling structure 631. A fourth one-way valve 627 is located on the first air source branch pipe 612 and is used to restrict airflow from the main manifold 618 to the first air source branch pipe 612. Thus, by setting the second one-way valve 625, the third one-way valve 626, and the fourth one-way valve 627, the airflow can circulate along a better path when the memory cell testing system switches between different temperature testing modes, avoiding backflow and accumulation of airflow in certain areas of the pipeline.

[0143] To enable better airflow circulation, the air source unit 600 further includes a fifth one-way valve 628 and a sixth one-way valve 629. The fifth one-way valve 628 is located in the second recovery branch pipe 616 and is used to restrict the airflow from the cooling structure 631 to the second recovery branch pipe 616. The sixth one-way valve 629 is located in the second air source branch pipe 613 and is used to restrict the airflow from the cooling structure 631 to the second air source branch pipe 613.

[0144] Please see Figures 23 to 25 In some other embodiments, the air supply hood 300 is provided with an energy storage space 304 and a heat insulation space 307. The heat insulation space 307 is arranged around the outer periphery and above the energy storage space 304. The heat insulation space 307 has a first side and a second side opposite to each other. The energy storage space 304 is connected to the first side of the heat insulation space 307, the air supply channel 302 and the air outlet channel 204 respectively. The exhaust valve 371 is connected to the second side of the heat insulation space 307.

[0145] The structure of the heat insulation space 307 and the energy storage space 304 can refer to the scheme of the previous embodiment, or other schemes can be adopted, as long as the heat insulation space 307 can be wrapped around the outside of the energy storage space 304 to achieve the effect of heat insulation and heat preservation of the energy storage space 304 and make the temperature field distribution of the energy storage space 304 more uniform.

[0146] It is understandable that the structural design of the thermal insulation space 307 and the energy storage space 304 is not limited to applications in... Figure 23The embodiment shown can also be applied to Figure 18 The illustrated embodiment.

[0147] Specifically, Figure 24 The gas delivery module 100 is in the closed state, and the memory unit 504 test system is in the emptied state. That is, after the gas delivery module 100 is reopened, the first stage of the gas source 600 supplying inert gas to the gas delivery module 100 is to continuously expel the air inside the gas delivery module 100 by continuously supplying inert gas. Figure 24 In the scenario shown, since the exhaust valve 371 is open and both the heat dissipation reversing valve 645 and the bypass reversing valve 646 are closed, the inert gas flowing in from the intake duct 201 will carry the residual air in the energy storage space 304 and flow together to the first side of the heat insulation space 307. Then it flows into the heat insulation space 307, then through the heat insulation space 307 to the exhaust valve 371, and finally flows out through the exhaust valve 371 to the outside of the air supply hood 300.

[0148] Figure 25 The air supply module 100 is in the closed state, and the memory unit 504 test system is in high-temperature test mode. At this time, the exhaust valve 371 is closed, the exhaust reversing valve 373 is open, the third reversing valve 623 is open, the fourth reversing valve 624 is closed, and the heating structure 260 and the circulating fan 634 are both working to create a circulation loop between the air source unit 600 and the air supply module. Specifically, the inert gas can start from the manifold 618, flow sequentially through the filter structure 633, the drying structure 632, the air guide pipe 619, the air inlet duct 201, the energy storage space 304, the exhaust duct 204, the recovery manifold 614, the first recovery branch pipe 615, and finally flow back to the manifold 618 for the next circulation. In this circulation, the inert gas will continuously flow through the memory unit 504 located inside the air supply cover 300 and heat the memory unit 504.

[0149] In the test system self Figure 24 The status shown has switched to Figure 25 During the process shown, the exhaust valve 371 switches from the open state to the closed state. At this time, since the heat insulation space 307 is filled with gas (which can be unheated room temperature gas), the air in the heat insulation space 307 can form an effective heat insulation structure, thereby achieving heat insulation of the energy storage space 304 and making the temperature field distribution of the energy storage space 304 more uniform.

[0150] It is understandable that the test system itself... Figure 24 The status shown has switched to Figure 25During the process shown, before the exhaust valve 371 switches to the closed state, it is also possible to continuously input high-temperature gas into the energy storage space 304 for a period of time to allow the high-temperature gas to fill the heat insulation space 307, and then close the exhaust valve 371. This will then be applied to subsequent test system inputs. Figure 25 In the state shown, the high-temperature gas filling the insulation space 307 can achieve a better insulation effect.

[0151] Please see Figure 25 and Figure 26 Optionally, in some other embodiments, the recovery main pipe 614 includes a recovery branch pipe 641, a heat dissipation branch pipe 642, a bypass branch pipe 643, and a recovery manifold 644. The air inlet end of the recovery branch pipe 641 is connected to the circulating fan 634. The air outlet end of the recovery branch pipe 641 can be selectively connected to the air inlet end of the heat dissipation branch pipe 642 or the air inlet end of the bypass branch pipe 643 under the adjustment of the control valve. The air outlet ends of the heat dissipation branch pipe 642 and the bypass branch pipe 643 are both connected to the air inlet end of the recovery manifold 644. The air outlet end of the recovery manifold 644 is connected to the air inlet end of the first recovery branch pipe 615 and the air inlet end of the second recovery branch pipe 616. The heat dissipation branch pipe 642 is provided with a radiator 649.

[0152] Understandable, with Figure 18 Compared with the embodiments shown, Figure 25 and Figure 26 The main difference in the loop of the embodiment shown is that it adds a heat dissipation branch pipe 642 and a heat sink 649 thereon.

[0153] Please see Figure 25 and Figure 26 Optionally, in some other embodiments, the control valve includes a heat dissipation reversing valve 645 and a bypass reversing valve 646, with the heat dissipation reversing valve 645 located on the heat dissipation branch pipe 642 and the bypass reversing valve 646 located on the bypass branch pipe 643.

[0154] Figure 25The air supply module 100 is in the closed state, and the memory unit 504 test system is in high-temperature test mode. At this time, the exhaust valve 371 is closed, the heat dissipation reversing valve 645 is closed and the bypass reversing valve 646 is open, the third reversing valve 623 is open, the fourth reversing valve 624 is closed, and the heating structure 260 and the circulating fan 634 are both working to build a circulation loop between the air source machine 600 and the air supply module. Specifically, the inert gas can start from the manifold 618, flow sequentially through the filter structure 633, the drying structure 632, the air guide pipe 619, the air inlet duct 201, the energy storage space 304, the air outlet duct 204, the recovery branch pipe 641, the bypass branch pipe 643, the recovery manifold 644, the first recovery branch pipe 615, and finally flow back to the manifold 618 for the next circulation. In this circulation flow, inert gas continuously flows through the memory unit 504 located inside the gas supply shroud 300 and heats the memory unit 504.

[0155] Figure 26 The air supply module 100 is in the closed state, and the memory unit 504 test system is in the normal temperature test mode. At this time, the exhaust valve 371 is closed, the heat dissipation reversing valve 645 is open and the bypass reversing valve 646 is closed, the third reversing valve 623 is open, the fourth reversing valve 624 is closed, and the heating structure 260 and the circulating fan 634 are both working to build a circulation loop between the air source machine 600 and the air supply module. Specifically, the inert gas can start from the manifold 618, flow sequentially through the filter structure 633, the drying structure 632, the air guide pipe 619, the air inlet duct 201, the energy storage space 304, the air outlet duct 204, the recovery branch pipe 641, the heat dissipation branch pipe 642, the radiator 649, the recovery manifold 644, the first recovery branch pipe 615, and finally flow back to the manifold 618 for the next circulation. In this circulating flow, the inert gas can dissipate the heat it carries when it flows through the radiator 649, so that it is still at room temperature when it flows back into the energy storage space 304.

[0156] Please see Figure 23 In order to enable better airflow circulation, the air source unit 600 further includes a seventh one-way valve 647 and an eighth one-way valve 648. The seventh one-way valve 647 is located at the outlet end of the heat dissipation branch pipe 642 and is used to restrict the airflow from the recovery manifold 644 to the heat dissipation branch pipe 642. The eighth one-way valve 648 is located at the outlet end of the bypass branch pipe 643 and is used to restrict the airflow from the recovery manifold 644 to the bypass branch pipe 643.

[0157] The above description is merely an exemplary embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structural transformations made using the contents of the present invention specification and drawings under the technical concept of the present invention, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present invention.

Claims

1. An air supply module, applied in a memory cell testing system, characterized in that, The memory cell testing system includes a test bench and a tester. The tester has a test area for mounting multiple memory cells, the test area being exposed on the test bench surface. The air supply module includes: The flow structure includes an air intake duct and an air intake port and an air intake outlet respectively connected to the air intake duct; and An air supply hood is provided with a hood opening, an air supply channel, and an air supply port. The edge of the hood opening covers the test area. The air supply port is connected to the air inlet through the air supply channel. The gas blown out of the air supply port flows through the hood opening to the memory unit. Each memory unit is subjected to the blowing action of at least one of the air supply ports. The air supply hood includes a hood body and an air supply component. The air supply channel and the air supply port are both located in the air supply component. The hood opening is located in the hood body. The air supply component is located inside the hood body and is spaced apart from the edge of the hood opening. The end face of the air supply component near the hood opening and the inner wall surface of the hood body together enclose an energy storage space. The air supply hood also includes a return air component, which is provided with a return air channel and at least two return air ports respectively connected to the return air channel. The return air ports are connected to the energy storage space. The flow structure is also provided with an air outlet duct, an air outlet passage, and an air outlet. The air outlet duct is connected between the air outlet passage and the air outlet. The air outlet passage is connected to the return air port. The air outlet duct and the air inlet duct are arranged in the same installation space to utilize the waste heat of the gas in the air outlet duct to heat the ambient air around the air inlet duct. The gas supply component includes a first substrate and a first cover. The first substrate is connected to the inner wall surface of the cover body, and the first cover is disposed on the lower plate surface of the first substrate. The gas supply channel is formed between the first cover and the first substrate. The gas return component includes a second substrate and a second cover. The second cover is disposed on the upper plate surface of the second substrate, and the gas return channel is formed between the second cover and the second substrate. The first substrate and the second substrate are configured with the same structure and have the gas return port. The outer wall surface of the second cover and the inner wall surface of the cover body are spaced apart to form a heat insulation space, and the heat insulation space is filled with gas.

2. The air delivery module as described in claim 1, characterized in that, The memory unit is configured as a memory module, the test area is provided with a memory slot for installing the memory module, and the air supply component has an air supply port that is configured as a slit, and the long axis of the air supply port extends along the length direction of the memory slot. Alternatively, the memory unit may be configured as a memory chip, the test area may have an installation position for installing the memory chip, the air supply unit may have multiple air nozzles, the air supply port may be located at the air nozzle, and one air nozzle may correspond to one memory chip.

3. The air delivery module as described in claim 2, characterized in that, The long axis of the air supply port extends along a first direction, and multiple air supply ports are distributed at intervals along a second direction and are respectively located on opposite sides of the air inlet. The second direction intersects with the first direction. The air supply channel includes an air inlet section and two air supply sections. The air inlet section extends along the second direction and connects between the two air supply sections. The air inlet is connected to the air inlet section, and the air supply port is connected to the air supply section. Alternatively, the air supply component may have two rows of air nozzles distributed along a first direction on both sides of the air supply port, and multiple air nozzles in the same row may be distributed at intervals along a second direction, the second direction being intersected by the first direction. The air supply channel may include an air inlet section and two air supply sections, the air inlet section extending along the first direction and connecting between the two air supply sections, the air inlet port connecting to the air inlet section, and the air supply port connecting to the air supply section.

4. The air delivery module as described in claim 1, characterized in that, The edge of the cover opening is provided with a first rib and a first elastic element. The test bench includes a sealing fixture and a second elastic element. The outer periphery of the sealing fixture is provided with a second rib. The second rib is arranged around the outer periphery of the second elastic element. The first rib abuts against the second elastic element. The second rib abuts against the second elastic element. And / or, the air delivery module further includes a temperature sensor and a transmission wire, the temperature sensor being exposed within the energy storage space, the lower end of the transmission wire being connected to the temperature sensor, and the upper end of the transmission wire extending out of the cover body and exposed to the outside.

5. The air delivery module as described in claim 1, characterized in that, The first cover and the inner wall of the cover body are spaced apart. The air supply cover also includes an inner heat insulation component disposed on the inner wall of the energy storage space. Part of the inner heat insulation component fills the gap between the first cover and the cover body. And / or, the gas supply hood further includes a hood housing and an external heat insulation element, the hood housing covering the outside of the hood body, and the external heat insulation element filling the gap between the hood housing and the hood body.

6. The air delivery module as described in claim 1, characterized in that, The gas delivery module further includes a heating structure, which is disposed in the air inlet duct and / or the air outlet duct to heat the gas in the air inlet duct and / or the air outlet duct.

7. A memory unit testing system, characterized in that, include: A test bench, wherein a moving module is provided on the test bench surface; The tester has a test area for mounting multiple memory cells, the test area being exposed on the test platform of the test bench. The gas source unit is equipped with a refrigeration structure, a drying structure, and a gas delivery pipe, and is used to provide dried cold air or room temperature gas. The gas delivery module as described in any one of claims 1 to 6 is mounted on the mobile module so as to be movable relative to the test area. The gas inlet of the gas delivery module is connected to the gas guide pipe. The gas output by the gas source machine flows into the gas inlet through the gas guide pipe. The gas delivery module further includes a heating structure disposed in the air intake duct, which is capable of heating the gas in the air intake duct. The gas source unit further includes a gas supply structure, a main gas supply pipe, a first gas supply branch pipe, a second gas supply branch pipe, and a control valve. The gas supply structure is connected to the inlet end of the main gas supply pipe and is capable of supplying inert gas to the gas delivery module. The inert gas includes helium and / or nitrogen. The control valve is used to control the main gas supply pipe to selectively connect the first gas supply branch pipe and the second gas supply branch pipe. The first gas supply branch pipe is connected between the outlet end of the main gas supply pipe and the inlet end of the drying structure. The second gas supply branch pipe is connected between the outlet end of the main gas supply pipe and the inlet end of the refrigeration structure. The outlet end of the refrigeration structure is connected to the inlet end of the drying structure, and the outlet end of the drying structure is connected to the inlet end of the gas guide pipe. The air source unit also includes a main recovery pipe, a first recovery branch pipe, a second recovery branch pipe, and a circulating fan. The circulating fan is connected between the air inlet of the main recovery pipe and the air outlet of the air delivery module, and is used to promote airflow from the air outlet to the main recovery pipe. The air outlet of the main recovery pipe is connected to the air inlet of the first recovery branch pipe and the air inlet of the second recovery branch pipe. The control valve is also used to control the main recovery pipe to selectively connect the first recovery branch pipe and the second recovery branch pipe. The air outlet of the first recovery branch pipe is connected to the air inlet of the drying structure, and the air outlet of the second recovery branch pipe is connected to the air inlet of the refrigeration structure. The air supply module further includes an exhaust valve, a first one-way valve, and an exhaust reversing valve. The exhaust valve is located on the wall of the air supply hood and connects the inner and outer sides of the air supply hood. It is configured to open in the venting state and close in the internal circulation state. The first one-way valve is located in the air intake duct and is used to restrict airflow from the air intake port to the air inlet. The exhaust reversing valve is located in the exhaust duct of the air supply module and is configured to close in the hood-opening state and the venting state, and open in the internal circulation state.

8. The memory cell testing system as described in claim 7, characterized in that, The control valve includes a first reversing valve and a second reversing valve. The first reversing valve is located on the first gas source branch pipe, and the second reversing valve is located on the second gas source branch pipe.

9. The memory cell testing system as described in claim 7, characterized in that, The control valve includes a third reversing valve and a fourth reversing valve. The third reversing valve is located in the first recovery branch pipe, and the fourth reversing valve is located in the second recovery branch pipe.

10. The memory cell testing system as described in claim 7, characterized in that, The gas source unit further includes a manifold branch pipe, a manifold main pipe, a filter structure, a second one-way valve, a third one-way valve, and a fourth one-way valve. The inlet end of the manifold branch pipe is connected to the outlet end of the refrigeration structure. The outlet ends of the manifold branch pipe, the first recovery branch pipe, and the first gas source branch pipe are all connected to the manifold main pipe and connected to the inlet end of the filter structure through the manifold main pipe. The outlet end of the filter structure is connected to the inlet end of the drying structure. The second one-way valve is located on the first recovery branch pipe and is used to restrict airflow from the manifold main pipe to the first recovery branch pipe. The third one-way valve is located on the manifold branch pipe and is used to restrict airflow from the manifold main pipe to the refrigeration structure. The fourth one-way valve is located on the first gas source branch pipe and is used to restrict airflow from the manifold main pipe to the first gas source branch pipe. And / or, the gas supply hood is provided with an energy storage space and a heat insulation space, the heat insulation space is arranged around and above the outer periphery of the energy storage space, the heat insulation space has a first side and a second side opposite to each other, the energy storage space is connected to the first side of the heat insulation space, the gas supply channel and the gas outlet duct respectively, and the exhaust valve is connected to the second side of the heat insulation space.

11. The memory cell testing system as described in claim 7, characterized in that, The recovery main pipe includes a recovery branch pipe, a heat dissipation branch pipe, a bypass branch pipe, and a recovery manifold. The air inlet of the recovery branch pipe is connected to the circulating fan. The air outlet of the recovery branch pipe can be selectively connected to the air inlet of the heat dissipation branch pipe or the air inlet of the bypass branch pipe under the adjustment of the control valve. The air outlets of the heat dissipation branch pipe and the bypass branch pipe are both connected to the air inlet of the recovery manifold. The air outlet of the recovery manifold is connected to the air inlet of the first recovery branch pipe and the air inlet of the second recovery branch pipe. The heat dissipation branch pipe is equipped with a radiator.

12. The memory cell testing system as described in claim 11, characterized in that, The control valve includes a heat dissipation reversing valve and a bypass reversing valve. The heat dissipation reversing valve is located in the heat dissipation branch pipe, and the bypass reversing valve is located in the bypass branch pipe. And / or, the air source unit further includes a seventh check valve and an eighth check valve. The seventh check valve is located at the outlet end of the heat dissipation branch pipe and is used to restrict airflow from the recovery manifold to the heat dissipation branch pipe. The eighth check valve is located at the outlet end of the bypass branch pipe and is used to restrict airflow from the recovery manifold to the bypass branch pipe.

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