Device and method for generating soliton micro-comb

Abstract

The invention relates to the technical field of optical frequency combs, and discloses soliton micro-comb generation equipment and a soliton micro-comb generation method, and the soliton micro-comb generation method comprises the steps: controlling a mode-locked laser source to output a mode-locked optical comb of which the repetition frequency and the carrier envelope offset frequency are locked based on the same standard radio frequency source; injecting the mode-locked optical comb into a micro resonant cavity to obtain a soliton micro comb of which the repetition frequency and the carrier envelope offset frequency are locked; wherein the free spectral range of the micro resonant cavity is an integral multiple of the repetition frequency. Low-noise single soliton output is achieved in a subharmonic pumping mode, the soliton micro-comb and the standard radio frequency source are synchronized, full locking of the repetition frequency and the carrier envelope offset frequency of the soliton micro-comb is achieved, and therefore the full-locking soliton micro-comb running stably for a long time is obtained; and the soliton micro-comb is possibly applied to the fields of precision measurement, spectral analysis, communication and the like.

Description

Technical Field

[0001] This invention relates to the field of optical frequency comb technology, and in particular to a method and apparatus for generating soliton microcombs. Background Technology

[0002] Optical frequency combs, with their evenly spaced teeth, ultra-low phase noise, and high-precision frequency scales, have become core tools in fields such as metrology, optical communication, and spectroscopy. Among them, soliton microcombs generated based on fiber Fabry-Perot cavities have attracted much attention due to their compact structure, high integration, and excellent stability. However, the frequency of conventionally generated soliton microcombs fluctuates within a certain range, which limits their practical applications.

[0003] Therefore, how to solve the frequency fluctuation of soliton microcomb and achieve full locking of soliton microcomb is the key technical bottleneck currently facing the industry. Summary of the Invention

[0004] The purpose of this invention is to provide a soliton microcomb generation method and a soliton microcomb generation device, which solves the problem of frequency fluctuation in soliton microcombs, achieves stable output of fully locked soliton optical combs, and provides possibilities for the application of soliton microcombs in precision measurement, spectral analysis and communication and other fields.

[0005] To solve the above-mentioned technical problems, the present invention provides a method for generating soliton microcombs, comprising:

[0006] The mode-locked laser source output repetition frequency and carrier envelope offset frequency are controlled by a mode-locked optical comb locked to the same standard RF source.

[0007] The mode-locked optical comb is injected into a micro-resonant cavity to obtain a soliton micro-comb with repetition frequency and carrier envelope offset frequency locked; wherein the free spectral range of the micro-resonant cavity is an integer multiple of the repetition frequency.

[0008] Optionally, it also includes:

[0009] Control a narrow linewidth laser to output a narrow linewidth laser, wherein the frequency of the narrow linewidth laser is locked to a single comb in the mode-locked optical comb;

[0010] The narrow-linewidth laser and the soliton microcomb are coupled together, and beat frequency detection is performed.

[0011] The soliton microcomb is determined to be fully locked based on the beat frequency signal obtained from the detection.

[0012] The present invention also provides a soliton microcomb generation device, including a mode-locked laser source and a microresonant cavity;

[0013] The mode-locked laser source is used to output a mode-locked optical comb that simultaneously locks the repetition frequency and the carrier envelope offset frequency.

[0014] The free spectral range of the micro-resonant cavity is an integer multiple of the repetition frequency of the mode-locked optical comb, and is used to modulate the mode-locked optical comb to output a soliton micro-comb with repetition frequency and carrier envelope offset frequency locked.

[0015] Optionally, the integer multiple between the free spectral range of the microresonator and the repetition frequency of the mode-locked optical comb is not less than 10.

[0016] Optionally, the microresonator has a quality factor greater than 1. The resonant cavity.

[0017] Optionally, a bandpass filter may also be provided between the mode-locked laser source and the microresonator.

[0018] Optionally, the filtering range of the bandpass filter is: ;in The center wavelength of the mode-locked optical comb is denoted as .

[0019] Optionally, an optical isolator is also provided between the mode-locked laser source and the bandpass filter.

[0020] Optionally, a first reflecting mirror, a second reflecting mirror, and a focusing lens are sequentially disposed between the bandpass filter and the microresonant cavity; wherein, both the first reflecting mirror and the second reflecting mirror are movable relative to the bandpass filter and the microresonant cavity;

[0021] The input end of the micro-resonant cavity is located at the focal point of the focusing lens.

[0022] Optionally, the output end of the microresonator is further connected to an optical fiber beam splitter, the input end of which is connected to the output end of the microresonator; the first output end of the optical fiber beam splitter is connected to a spectrometer; the second output end of the optical fiber beam splitter is connected to a phase noise analyzer; it also includes an optical fiber coupler whose first input end is connected to the third output end of the optical fiber beam splitter; a narrow linewidth laser whose output end is connected to the second input end of the optical fiber coupler; and a counter connected to the output end of the optical fiber coupler.

[0023] The narrow linewidth laser is used to output a narrow linewidth laser with a frequency locked to a single tooth in the mode-locked optical comb.

[0024] This invention utilizes a mode-locked optical comb that simultaneously locks the repetition frequency and carrier envelope offset frequency of a mode-locked laser source. Furthermore, a micro-resonant cavity is used to modulate the mode-locked optical comb, causing it to generate self-phase modulation and dispersion effects within the micro-resonant cavity. As the competition between these two effects gradually reaches equilibrium, the mode-locked optical comb ultimately forms a fully locked soliton microcomb, providing possibilities for its application in precision measurement, spectral analysis, and communication. Attached Figure Description

[0025] To more clearly illustrate the technical solutions of the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the process for the soliton microcomb generation device provided in an embodiment of the present invention;

[0027] Figure 2 This is a schematic diagram of the optical path structure of the soliton microcomb generation device provided in an embodiment of the present invention;

[0028] Figure 3 This is a schematic diagram of the optical path frame of the mode-locked laser source provided in an embodiment of the present invention;

[0029] Figure 4 A schematic diagram comparing the spectral ranges of a mode-locked optical comb and a soliton microcomb provided in an embodiment of the present invention;

[0030] Figure 5 This is a schematic diagram of the spectrum of a soliton microcomb provided in an embodiment of the present invention;

[0031] Figure 6 This is a schematic diagram showing the phase noise corresponding to the mode-locked optical comb and soliton microcomb provided in an embodiment of the present invention;

[0032] Figure 7 This is a schematic diagram illustrating the Allan variance measurement results of soliton microcomb and narrow linewidth laser beat frequency provided in an embodiment of the present invention. Detailed Implementation

[0033] To enable those skilled in the art to better understand the present invention, the invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. Obviously, the described embodiments are merely some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0034] like Figure 1 As shown, the present invention provides a method for generating soliton microcombs, which may include:

[0035] Step 1: Control the mode-locked laser source output repetition frequency and carrier envelope offset frequency based on the same standard RF source-locked optical comb;

[0036] Step 2: Inject the mode-locked optical comb into the micro-resonant cavity to obtain a soliton micro-comb with repetition frequency and carrier envelope offset frequency locked; wherein, the free spectral range of the micro-resonant cavity is an integer multiple of the repetition frequency.

[0037] In this embodiment, the mode-locked optical comb is also known as a mode-locked optical frequency comb. In the time domain, the mode-locked optical comb represents a series of pulse sequences with equal time intervals, and in the frequency domain, it represents a series of longitudinal mode sequences with equal frequency intervals; wherein, the first... The frequency of each longitudinal mode sequence It can be represented as ,in The carrier envelope offset frequency of the mode-locked optical comb. This refers to the repetition frequency of the mode-locked optical comb. The repetition frequency and carrier envelope offset frequency of the mode-locked optical comb also refer to the strict requirements of the mode-locked optical comb to satisfy... .

[0038] Similarly, the concepts of repetition frequency and carrier envelope offset frequency locking of soliton microcomb, as well as the concept of full locking referred to in subsequent embodiments, are the same as the concepts of repetition frequency and carrier envelope offset frequency locking of mode-locked optical combs mentioned above, and will not be repeated hereafter.

[0039] In this embodiment, the standard radio frequency source can be an atomic clock. The mode-locked laser source uses the reference signal generated by the same atomic clock as a reference to simultaneously lock the repetition frequency and carrier envelope offset frequency of the mode-locked optical comb. Furthermore, the free optical coupling range of the microwave resonant cavity is an integer multiple of the repetition frequency of the mode-locked optical comb. Based on the mode-locked optical comb with the repetition frequency and carrier envelope offset frequency simultaneously locked by the mode-locked laser source, the mode-locked optical comb is injected into the micro resonant cavity. When the nonlinear effect, dispersion effect, gain, and loss in the micro resonant cavity reach a balance, a fully locked soliton microcomb is finally formed.

[0040] Therefore, this application utilizes high-order subharmonic pumping to achieve low-noise single soliton output, synchronizes the soliton microcomb and standard RF source, and achieves full locking of the microcomb repetition frequency and carrier envelope offset frequency; thus providing possibilities for the application of soliton microcombs in fields such as precision measurement, spectral analysis and communication.

[0041] Further, optionally, the method for generating soliton microcombs also includes:

[0042] Control the output of a narrow linewidth laser from a narrow linewidth laser, wherein the frequency of the narrow linewidth laser is locked to a single comb in a mode-locked optical comb;

[0043] Narrow-linewidth lasers and soliton microcombs are coupled together, and beat frequency detection is performed.

[0044] The soliton microcomb is determined based on the beat frequency signal obtained from the detection to determine whether it has achieved full locking.

[0045] In this embodiment, the frequency of the narrow linewidth laser is locked to a single comb in the mode-locking optical comb, meaning that the frequency of the narrow linewidth laser can be the same as the frequency of any comb in the mode-locking optical comb.

[0046] In this embodiment, a narrow-linewidth laser locked to a single tooth of a mode-locked optical comb is coupled with a soliton microcomb, and beat frequency detection is performed. Because the repetition frequency and carrier envelope offset frequency of the mode-locked optical comb are the same as those of the soliton microcomb, the beat frequency signal between the soliton microcomb and the narrow-linewidth laser exhibits extremely high frequency stability when the repetition frequency and carrier envelope offset frequency of the soliton microcomb are locked. The variance is less than 10 to the power of -10 within 1 second. Based on this, this application can determine whether the soliton microcomb has achieved full locking by checking the beat frequency signal between the soliton microcomb and the narrow linewidth laser, thereby further ensuring the reliability of the soliton microcomb output.

[0047] like Figure 2 As shown, Figure 2 This is a schematic diagram of the optical path structure of the soliton microcomb generation device provided in an embodiment of the present invention;

[0048] In an optional embodiment of the present invention, the soliton microcomb generation device includes a mode-locked laser source 1 and a microresonant cavity 7;

[0049] Among them, the mode-locked laser source 1 is used to lock the mode-locked optical comb that simultaneously locks the output repetition frequency and the carrier envelope offset frequency;

[0050] The free spectral range of the micro-resonant cavity 7 is an integer multiple of the repetition frequency of the mode-locked optical comb, which is used to modulate the mode-locked optical comb to output a soliton micro-comb with the repetition frequency and carrier envelope offset frequency locked.

[0051] Reference Figure 3 , Figure 3 This is a schematic diagram of the optical path framework for one implementation of a mode-locked laser source 1. Figure 3 In this process, the adjustable current source 100 inputs an optical wave signal to the fiber optic oscillator 101, and can precisely control the input power of the fiber optic oscillator 101; the repetition frequency of the optical wave signal in the fiber optic oscillator 101 is... An adjustable femtosecond pulse train; the optical signal generated by this femtosecond pulse train is further converted into a radio frequency signal by a photoelectric converter 102, and the repetition frequency can be extracted by filtering the radio frequency signal through a first bandpass filter 103. And suppress bypass; power amplifier 104 further filters out the repetition frequency. The amplified signal is then input to mixer 105; the reference signal generated by signal generator 106 based on the reference frequency provided by atomic clock 107 (specifically, a rubidium clock) is also input to mixer 105. Mixer 105 mixes this signal with the reference signal to obtain... The difference frequency error signal; The difference frequency error signal is input to the first servo controller 109 through the low-pass filter 108. The first servo controller 109... The mixing error signal is processed to generate a feedback control signal to drive the piezoelectric ceramic controller 110. Under the control of the first servo controller 109, the piezoelectric ceramic controller 110 drives the cavity length adjustment within the fiber optic oscillator 101 to achieve fine control of the optical path until... If the difference frequency error signal is close to 0, then the repetition frequency... Locking complete.

[0052] The femtosecond pulse train output from the fiber optic oscillator 101 is amplified by the fiber optic amplifier 111 to increase the optical power and meet the requirements. Interferometer 112 has requirements for broadening and frequency doubling; the femtosecond pulse train with increased optical power passes through Interferometer 112 performs spectral broadening and frequency doubling to generate The signal is filtered out by the second bandpass filter 113. The signal is then bypassed and further amplified by a low-noise amplifier 114. The signal is amplified while maintaining low noise characteristics to ensure the signal-to-noise ratio of subsequent frequency division and discrimination; the frequency divider 115 will amplify the signal... The signal is proportionally divided to match the reference frequency output by the atomic clock 107; then the phase detector 116 converts the divided signal into a frequency. The signal is compared in phase with the reference signal output by atomic clock 107 to obtain the phase difference error signal, i.e. Error signal; the output of the second servo controller 117 to the phase detector 116 The error signal is processed to generate a drive signal for the adjustable current source 100. Based on this drive signal, the adjustable current source 100 is controlled within a specific region until... When the error signal is close to 0, the carrier envelope offset frequency is realized. locking.

[0053] Based on the above discussion, after the mode-locked laser source 1 outputs a mode-locked optical comb, the mode-locked optical comb can be further transmitted and input to the micro-resonant cavity 7. In this embodiment, the free spectral range of the micro-resonant cavity 7 is an integer multiple of the repetition frequency of the mode-locked optical comb. The free spectral range is an inherent parameter of the micro-resonant cavity 7, reflecting the frequency distribution density of the resonant modes within the cavity; the free spectral range satisfies... Where c is the speed of light in a vacuum, n is the refractive index of the medium filling the cavity, and L is the effective length of the resonant cavity.

[0054] The micro-resonant cavity 7 used in this invention is a high-Q resonant cavity, and its free spectral range can be at least 10 times the repetition frequency of the mode-locked optical comb. In practical applications, this micro-resonant cavity 7 can have a quality factor greater than... The resonant cavity.

[0055] Based on this, after the mode-locked optical comb with both repetition frequency and carrier envelope offset frequency locked is transmitted into the micro-resonant cavity 7, only the driving comb teeth whose frequencies are precisely aligned with the resonant modes of the micro-resonant cavity 7 can be efficiently coupled into the cavity and generate resonance. The comb teeth coupled into the micro-resonant cavity 7 form a soliton optical comb under the combined action of the dominant Kerr nonlinearity and dispersion effect. Clearly, this soliton optical comb, through its self-synchronization effect, can follow the fully locked characteristics of the mode-locked optical comb output from the mode-locked laser source 1, achieving a fully optical inheritance of the phase stability and frequency accuracy of the mode-locked optical comb in both repetition frequency and carrier envelope offset frequency, thus achieving the fully locked effect of the soliton micro-comb.

[0056] like Figure 4 As shown, Figure 4 This is a schematic diagram comparing the spectra of a mode-locked optical comb and a soliton microcomb. The soliton microcomb generation device in this invention can generate phase-stable DKS (Dissipative Kerr Soliton Microcomb) microcombs simply and deterministically without external feedback through the soliton self-synchronization effect.

[0057] Based on the above discussion, the soliton microcomb output by the microresonator 7 can achieve full locking of the carrier envelope offset frequency and repetition frequency without complex spectral broadening and additional self-reference probe phase-locked loops. This provides a low-complexity, high-stability and high-performance fully locked soliton optical frequency comb source for applications such as spectroscopy, optical communication, and microwave photonics.

[0058] Furthermore, in this embodiment, the free spectral range of the micro-resonant cavity 7 is more than 10 times the repetition frequency of the mode-locked optical comb. That is to say, the mode-locked laser source 1 and the micro-resonant cavity 7 in this invention are equivalent to forming a high-order subharmonic pump for an output soliton micro-comb, which means that the output soliton micro-comb has a larger repetition frequency.

[0059] Based on any of the above embodiments, in an optional embodiment of the present invention, a bandpass filter 3 may be further provided between the mode-locked laser source 1 and the microresonant cavity 7 for filtering the mode-locked optical comb. In practical applications, the filtering range of the bandpass filter 3 can be... ;in The center wavelength of the mode-locked optical comb is 1550nm. For example, the filtering range of the bandpass filter 3 can be 1546nm~1554nm.

[0060] Optionally, an optical isolator 2 is also provided between the mode-locked laser source 1 and the bandpass filter 3 to effectively block some light from being reflected back to the mode-locked laser source 1 during the transmission of the mode-locked optical comb output from the mode-locked laser source 1 to the micro resonant cavity 7, thereby causing damage to the mode-locked laser source 1.

[0061] Optionally, a first reflecting mirror 4, a second reflecting mirror 5, and a focusing lens 6 are sequentially arranged between the bandpass filter 3 and the micro-resonant cavity 7; wherein the first reflecting mirror 4 and the second reflecting mirror 5 can both move relative to the bandpass filter 3 and the micro-resonant cavity 7; the input end of the micro-resonant cavity 7 is located at the focal point of the focusing lens 6.

[0062] like Figure 1 As shown, in this embodiment, the first reflector 4 is located on the output optical path of the bandpass filter 3, the second reflector 5 is located on the output optical path of the first reflector 4, and the focusing lens 6 is located on the output optical path of the second reflector 5.

[0063] Based on this, both the first reflector 4 and the second reflector 5 are independently movable reflectors. Thus, in practical applications, the positions of the first reflector 4 and the second reflector 5 in space can be adjusted in two different dimensions to ensure that the mode-locked optical comb output from the mode-locked laser source 1 can be aligned with the input end of the micro-resonant cavity 7.

[0064] Furthermore, considering that the mode-locked optical comb may diverge to some extent as it passes through each optical element in sequence, a focusing lens 6 is further set at the input end of the micro-resonant cavity 7 to converge the mode-locked optical comb, reduce the divergence angle, and then incident it into the micro-resonant cavity 7.

[0065] Based on the above discussion, in order to further verify whether the soliton optical comb output by the microresonator 7 meets the requirements, an optical fiber beam splitter 8 can be further connected to the output end of the microresonator 7. The input end of the optical fiber beam splitter 8 is connected to the output end of the microresonator 7. The first output end of the optical fiber beam splitter 8 is connected to a spectrometer 9. The second output end of the optical fiber beam splitter 8 is connected to a phase noise analyzer 10. It also includes an optical fiber coupler 11 whose first input end is connected to the third output end of the optical fiber beam splitter 8; a narrow linewidth laser 12 whose output end is connected to the second input end of the optical fiber coupler 11; and a counter 13 connected to the output end of the optical fiber coupler 11.

[0066] Among them, the narrow linewidth laser 12 is used for output frequency and single-tooth comb locking in the soliton microcomb.

[0067] In this embodiment, the soliton microcomb is inspected from multiple different angles, which helps to ensure the reliability of the final output soliton microcomb.

[0068] The repetition frequency and carrier envelope offset frequency of the mode-locked optical comb output by the mode-locked laser source 1 in the soliton microcomb generation device of this invention are respectively... and Micro-resonant cavity 7 for The quality factor is For example. Figure 5 As shown, Figure 5 The diagram shows the spectrum obtained by spectrometer 9 when examining the soliton microcomb. Clearly, the soliton microcomb generation device in this embodiment can output stable soliton microcombs for extended periods, with the spectral stability duration reaching 6 hours or more. Figure 6 As shown, Figure 6 This is a schematic diagram showing the phase noise of the mode-locked optical comb and soliton microcomb detected by the phase noise analyzer 10. Figure 5 The phase noise of the soliton optical comb reaches 1 kHz. It reaches 10 kHz At 10 MHz It shows a significant improvement over mode-locked optical combs. For example... Figure 7 As shown, Figure 7 This diagram illustrates the soliton microcomb measured by counter 13 and the Allan variance measurement results of the soliton microcomb and the beat frequency of the narrow-linewidth laser. The fractional instability of the soliton optical comb at the repetition frequency of 1 second and 1000 seconds reaches [values ​​missing]. and The soliton microcomb and the 1545 nm narrow linewidth laser generated an external difference frequency signal that exhibited better stability, with measurements at 1 second and 1000 seconds showing [values ​​not specified]. and This demonstrates that the soliton microcomb in this invention exhibits excellent long-term stability.

[0069] This invention utilizes a high-order subharmonic pulse pumping method, employing an optical fiber frequency comb with both repetition frequency and carrier envelope frequency shift locked as the pump source. This enables the soliton microcomb to achieve repetition frequency and carrier envelope frequency shift locking, ensuring frequency stability and long-term stable operation. This lays the foundation for the practical application of high-performance, low-power, and highly integrated soliton optical comb technology, while also promoting the further development of related optoelectronic and precision measurement technologies.

[0070] Based on the above discussion, this invention combines a mode-locked laser source and a micro-resonant cavity. Building upon a mode-locked optical comb whose output repetition frequency and carrier envelope offset frequency are simultaneously locked, the micro-resonant cavity further modulates the mode-locked optical comb. This induces self-phase modulation and dispersion effects within the micro-resonant cavity. As the competition between these two effects gradually reaches equilibrium, a fully locked soliton microcomb is ultimately formed, providing possibilities for the application of soliton microcombs in precision measurement, spectral analysis, and communication. Furthermore, the soliton microcomb generation device of this invention has a compact overall structure and strong robustness, making it applicable to multiple technical fields such as precision spectral measurement, ultra-high precision ranging, and microwave signal generation and processing.

[0071] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A method for generating soliton microcombs, characterized in that, include: The mode-locked laser source output repetition frequency and carrier envelope offset frequency are controlled by a mode-locked optical comb locked to the same standard RF source. The mode-locked optical comb is injected into a micro-resonant cavity to obtain a soliton micro-comb with repetition frequency and carrier envelope offset frequency locked; wherein the free spectral range of the micro-resonant cavity is an integer multiple of the repetition frequency.

2. The soliton microcomb generation method as described in claim 1, characterized in that, Also includes: Control a narrow linewidth laser to output a narrow linewidth laser, wherein the frequency of the narrow linewidth laser is locked to a single comb in the mode-locked optical comb; The narrow-linewidth laser and the soliton microcomb are coupled together, and beat frequency detection is performed. The soliton microcomb is determined to be fully locked based on the beat frequency signal obtained from the detection.

3. A soliton microcomb generation device, characterized in that, Includes mode-locked laser sources and micro-resonant cavities; The mode-locked laser source is used to output a mode-locked optical comb that simultaneously locks the repetition frequency and the carrier envelope offset frequency. The free spectral range of the micro-resonant cavity is an integer multiple of the repetition frequency of the mode-locked optical comb, and is used to modulate the mode-locked optical comb to output a soliton micro-comb with repetition frequency and carrier envelope offset frequency locked.

4. The soliton microcomb generation device as described in claim 3, characterized in that, The integer multiple between the free spectral range of the microresonator and the repetition frequency of the mode-locked optical comb is not less than 10.

5. The soliton microcomb generation device as described in claim 4, characterized in that, The microresonant cavity has a quality factor greater than [missing information]. The resonant cavity.

6. The soliton microcomb generation device as described in claim 3, characterized in that, It also includes a bandpass filter disposed between the mode-locked laser source and the microresonator.

7. The soliton microcomb generation device as described in claim 6, characterized in that, The filtering range of the bandpass filter is ;in The center wavelength of the mode-locked optical comb is denoted as .

8. The soliton microcomb generation device as described in claim 6, characterized in that, An optical isolator is also provided between the mode-locked laser source and the bandpass filter.

9. The soliton microcomb generation device as described in claim 4, characterized in that, A first reflector, a second reflector, and a focusing lens are sequentially disposed between the bandpass filter and the microresonant cavity; wherein, both the first reflector and the second reflector are movable relative to the bandpass filter and the microresonant cavity; The input end of the micro-resonant cavity is located at the focal point of the focusing lens.

10. The soliton microcomb generation apparatus according to any one of claims 3 to 9, characterized in that, The output end of the microresonator is also connected to an optical fiber beam splitter, the input end of which is connected to the output end of the microresonator; the first output end of the optical fiber beam splitter is connected to a spectrometer; the second output end of the optical fiber beam splitter is connected to a phase noise analyzer; it also includes an optical fiber coupler whose first input end is connected to the third output end of the optical fiber beam splitter; a narrow linewidth laser whose output end is connected to the second input end of the optical fiber coupler; and a counter connected to the output end of the optical fiber coupler; The narrow linewidth laser is used to output a narrow linewidth laser with a frequency locked to a single tooth in the mode-locked optical comb.

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