Integrated optical integrated device and manufacturing method

Abstract

The invention discloses an integrated optical device and a manufacturing method, and belongs to the technical field of fiber laser, the integrated optical device comprises a forward integrated device, the forward integrated device comprises a first signal fiber, a first pumping fiber and an indication fiber, a first cladding is exposed in the middle of the first signal fiber, and a second cladding is exposed in the middle of the second pumping fiber; a section of high-reflectivity grating is inscribed on the fiber core in the exposed first cladding area, and a laser etching area is etched on the first cladding on the peripheral side of the high-reflectivity grating; a section of second cladding is exposed out of the first pumping optical fiber, a section of third cladding is exposed out of the indicating optical fiber, a section of texturing area is arranged on the third cladding, the second cladding and the third cladding are attached in a tapering mode and fused on the side face of the first cladding, and the first cladding, the second cladding and the third cladding are packaged in the shell through a glass tube. The laser etching area is used for stripping a cladding of a signal light path and residual pump light so as to prevent a passive device on the light path from being damaged due to overheating; the textured area of the indication optical fiber can enhance the return resistance, and a transition optical fiber and a CPS do not need to be additionally arranged.

Description

Technical Field

[0001] This invention relates to the field of fiber laser technology, and in particular to an integrated optical device and its fabrication method. Background Technology

[0002] With the deepening development of intelligent manufacturing, laser processing technology is widely used in cutting, welding, marking, and other fields. Fiber lasers, due to their advantages such as small size, high brightness, and good flexibility, have gradually become the mainstream industrial laser product. Especially in high-power processing, the stability of high brightness output is crucial to processing quality.

[0003] During fiber optic transmission, excessively long passive fibers can easily induce Raman scattering, generating too much Raman light signal and reducing the quality of the effective signal light, thus affecting the processing effect. Currently, most fiber lasers use discrete component fusion splicing, connecting the combiner, fiber grating, and pigtail one by one. The coupling and transition between each component rely on passive fiber. To improve integration, some solutions propose directly fusing the fiber grating and the combiner cone as an integrated output structure, thereby shortening the fiber length and reducing the number of splicing steps.

[0004] However, the existing integrated solution still has obvious shortcomings: First, the end-face pump back light is difficult to remove, which can easily lead to overheating or even damage to the cone; Second, the fiber grating and combiner are usually in two separate housings, resulting in wasted space and excessively long passive fibers; Third, the indicator light has weak anti-back light capability, and a transition fiber and CPS are still required to filter back light, which makes the structure complex; Fourth, there are many fusion splices in the optical path, which can easily cause a decrease in beam quality. Summary of the Invention

[0005] To address the technical problem that existing integrated solutions in the background art have limited integration, typically only integrating two devices, and thus failing to meet the requirements of high-brightness fiber lasers for compactness, low loss, and high reliability, this invention provides an integrated optical device and its fabrication method.

[0006] The technical solution of this invention is as follows: This invention provides an integrated optical device, including a forward integrated device. The forward integrated device includes a first signal fiber, a first pump fiber, and an indicator fiber. The coating layer of the first signal fiber is stripped to expose a first cladding. A high-reflectivity grating is etched on the fiber core at the exposed first cladding area, and a laser-etched area is etched on the first cladding around the high-reflectivity grating. A second cladding is exposed on the first pump fiber, and a third cladding is exposed on the indicator fiber. A roughened area is provided on the third cladding. The second and third claddings are tapered and fused to the side of the first cladding, and the first, second, and third claddings are encapsulated in a housing through a glass tube. The high-reflectivity grating is directly inscribed on the core of the signal fiber, and the pump and indicator fibers are directly tapered and fused to the side of the signal fiber. Encapsulated in the same glass tube and shell, the laser-etched area can efficiently remove the cladding back light and residual pump light from the signal optical path, avoiding overheating damage to passive devices in the optical path. The texturing area of ​​the indicator fiber can enhance the anti-backlight capability, eliminating the need for additional transition fibers and CPS, thus simplifying the structure. At the same time, it significantly reduces the number of fusion splices between devices, reduces the impact of the splice points on the beam quality, and alleviates the Raman scattering effect.

[0007] Preferably, the laser etching region gradually decreases in depth along the pump light delivery direction. The gradually decreasing depth of the laser etching region can achieve gradient stripping of the pump return light, avoid excessive local energy caused by concentrated reflection of the return light, further improve the return light stripping efficiency, and enhance the thermal protection of the device. Compared with a uniform depth etching region, it has a better light field control effect.

[0008] Preferably, the texturing area, high-reflectivity grating, and laser-etched area are all located away from the melting point. This effectively prevents the high temperature during the melting process from damaging the reflectivity of the high-reflectivity grating, the stripping effect of the laser-etched area, and the anti-return function of the texturing area. This ensures that each functional area can maintain its design performance after device assembly, thereby improving the stability and reliability of the integrated device.

[0009] Preferably, the device also includes a reverse integrated device, which comprises a second signal fiber and a second pump fiber. The second signal fiber has its coating stripped to expose a fourth cladding. A low-reflection grating is etched on the fiber core at the exposed fourth cladding area, and a laser-etched area is etched on the fourth cladding around the low-reflection grating. The second pump fiber exposes a fifth cladding, which is tapered and fused to the side of the fourth cladding. The fifth and fourth claddings are encapsulated in a housing through a glass tube. By integrating the low-reflection grating and the laser-etched area, the reverse transmission requirement of the optical path is met, while also solving the problems of excessively long passive fibers, multiple fusion splices, and difficult handling of returned light in traditional discrete devices. It can be paired with forward devices to form a complete optical path system, further improving the integration and performance of the overall fiber laser.

[0010] Preferably, at least one first pump fiber and one second pump fiber are provided, supporting flexible configuration of single or multiple pump fibers. Multiple pump fibers can achieve superposition of pump light power to meet the laser output requirements of different power levels, enhancing the versatility and adaptability of the integrated device, and eliminating the need to redesign the device structure for different power requirements.

[0011] A method of manufacturing includes: Cut a first signal fiber, at least one first pump fiber, and one indicator fiber, and strip a section of coating layer from the first signal fiber, the first pump fiber, and the indicator fiber respectively to expose the corresponding first cladding, second cladding, and third cladding respectively. Near the signal light transmission end of the exposed first cladding, a high-reflectivity grating is etched onto the core of the first signal fiber, and a laser-etched area is etched on the first cladding around the high-reflectivity grating. A texturing process is performed on the exposed third cladding layer at a distance from the indicator light input end to form a texturing region; The first pump fiber and the indicator fiber are tapered, bonded and fused together on the side of the first cladding. A glass tube is then fitted over the exposed first cladding, second cladding and third cladding and fixed with adhesive. The glass tube is encapsulated inside a housing to complete the fabrication of the forward integrated device.

[0012] By integrating processes such as grating writing, etching, and tapering fusion, multiple functional structures are directly integrated onto a single signal fiber, avoiding the cumbersome steps of splicing discrete devices one by one, thus reducing the number of splice points from a process perspective. At the same time, the integrated encapsulation of the glass tube and the shell shortens the length of the passive fiber, alleviating Raman scattering problems from the source. Furthermore, the processing sequence of each functional area is reasonable, ensuring stable device performance.

[0013] Preferably, a tapering machine is used to tape the exposed second and third cladding layers to form a first tapered flat area and a second tapered flat area, respectively; the first tapered flat area and the second tapered flat area are respectively attached to and temporarily fixed to the exposed first cladding layer, and the attachment position avoids the high-reflectivity grating, laser-etched area and roughened area; After the pump fiber and indicator fiber are installed in place, the bonding area is fused.

[0014] The flat area formed by tapering increases the bonding area between optical fibers and ensures a more precise and flat fiber connection, minimizing optical loss at fiber contact points, improving optical signal transmission efficiency and overall system beam quality. Tapered fiber connections also effectively reduce structural instability factors and improve coupling efficiency and connection stability after melting. The bonding position avoids functional areas, protecting high-reflectivity gratings, etched areas, and texturing areas from the melting process.

[0015] Preferably, before installing the glass tube, the discarded ends of the first pump fiber and the indicator fiber are broken off to remove excess discarded fiber segments, simplifying the internal structure of the device, saving packaging space, meeting the compact requirements of integrated design, and improving the miniaturization level of the device.

[0016] Preferably, after the high-reflectivity grating is written, it is heated in stages in a high-temperature chamber and kept at a constant temperature. The staged high-temperature treatment can completely remove the residual hydrogen molecules introduced during the grating writing process, avoid the hydrogen molecules affecting the stability of the grating reflection spectrum, extend the service life of the high-reflectivity grating, improve the long-term working reliability of the integrated device, and reduce the problem of signal light quality degradation caused by grating performance decay.

[0017] Preferably, a second signal fiber and at least one second pump fiber are cut off, and a section of coating is stripped off from the second signal fiber and the second pump fiber respectively to expose the corresponding fourth cladding and fifth cladding respectively. Near the signal light output end of the exposed fourth cladding, a low-reflection grating is etched onto the core of the second signal fiber, and a laser etching area is etched on the fourth cladding around the low-reflection grating. The second pump fiber is tapered, bonded, and fused to the side of the fourth cladding. A glass tube is then fitted over the exposed fifth and fourth cladding layers and fixed with adhesive. The glass tube is encapsulated inside a housing to complete the fabrication of the reverse integrated device.

[0018] Facilitating mass production and quality control, the integration of low-reflection gratings and etched areas also achieves the effects of reducing fusion splices, shortening passive optical fibers, and efficiently processing return light, ensuring the stability and beam quality of the reverse optical path transmission, and providing process support for the construction of a complete optical path system.

[0019] As can be seen from the above technical solutions, the advantages of the present invention are: The beam combiner, grating, CPS, and indicator CPS are integrated into a single housing, reducing the space occupied by the components and the number of fusion points. This simplifies the fusion process of the laser optical path and reduces time costs. The indicator fiber and signal fiber have undergone texturing to filter out backlight. The indicator light source can be directly fused with the indicator fiber without the need for a transition fiber, reducing the overall length of the passive fiber. In high-brightness lasers, this reduces the generation of Raman light and improves beam quality. Furthermore, the signal fiber has no fusion points and no core deformation, resulting in superior beam quality. Both the pump fiber and the indicator fiber use side coupling, which significantly reduces backlight from the pump source and indicator light source, protecting them. Attached Figure Description

[0020] To more clearly illustrate the technical solution of the present invention, the accompanying drawings used in the description will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram (including the discarded end) of the tapered installation of the pump fiber and the indicator fiber according to one or more embodiments of the present invention. Figure 2 This is a schematic diagram of the structure of a forward integrated device according to one or more embodiments of the present invention; Figure 3 This is a schematic diagram of the reverse integrated device according to one or more embodiments of the present invention; Figure 4 This is a partially enlarged structural diagram of laser etching according to one or more embodiments of the present invention; Figure 5 This is a schematic diagram of the signal optical fiber processing structure according to one or more embodiments of the present invention; Figure 6 This is a schematic diagram of the processing structure of the first pump fiber according to one or more embodiments of the present invention; Figure 7 This is a schematic diagram of the processing structure of the indicator optical fiber according to one or more embodiments of the present invention; Figure 8 This is a flowchart illustrating the fabrication process of a forward integrated device according to one or more embodiments of the present invention. Figure 9 This is a schematic diagram of the integrated optical device laser according to one or more embodiments of the present invention; Figure 10 This is a schematic diagram of the structure of a traditional laser; Figure 11 This is a schematic diagram of a traditional grating and beam combiner. Figure 12 This is a schematic diagram of the structure of the grating and beam combiner in the dust-collecting and optical integrated device according to one or more embodiments of the present invention; Figure 13 This is a schematic diagram of the processing structure of the first pump fiber according to one or more embodiments of the present invention; The components represented by the various reference numerals in the diagram are: 1. First signal fiber; 2. First pump fiber; 3. Indicator fiber; 4. High-reflection grating; 5. Laser-etched area; 6. Texturing area; 7. Glass tube; 8. Low-reflection grating; 9. First cladding; 10. First stripping; 11. Second cladding; 12. First tapered straight area; 13. End point of the first tapered area; 14. Second stripping; 15. Third cladding; 16. Second tapered straight area; 17. End point of the second tapered area; 18. Third stripping; 19. Bundle combiner; 20. Fourth cladding; 21. Fourth stripping; 22. Second signal fiber; 23. Second pump fiber; 24. Fifth cladding; 25. Fifth stripping; 26. Third tapered straight area; 27. End point of the third tapered area. Detailed Implementation

[0022] To make the objectives, features, and advantages of this invention more apparent and understandable, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings of the specific embodiments. Obviously, the embodiments described below are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this patent, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this patent.

[0023] Example 1 In a typical embodiment of the present invention, such as Figures 1-13 As shown, an integrated optical device is proposed, comprising: a forward integrated device and a reverse integrated device, such as... Figure 9 As shown, forward integrated devices and reverse integrated devices are used together.

[0024] like Figure 2 As shown, the forward integrated device includes a first signal fiber 1, a first pump fiber 2, and an indicator fiber 3. One first signal fiber 1 and one indicator fiber 3 are provided, and at least one first pump fiber 2 is provided. The coating layer of the first signal fiber 1 is stripped in the middle to form a first cladding 9. The two ends of the first cladding 9 are separated from the coating layer by a first stripping opening 10. A high-reflectivity grating 4 is etched on the fiber core of the first signal fiber 1 in the exposed area of ​​the first cladding 9. A laser-etched region 5 (i.e., CPS) is etched on the first cladding 9 surrounding the high-reflectivity grating 4. The laser-etched region 5 is close to the first stripping opening 10 at the optical input end of the first signal fiber 1. The laser-etched region 5 not only serves to position the high-reflectivity grating 4 but also filters out stray light and reflected light from the first cladding 9, protecting the optical path while improving the beam quality of the laser output.

[0025] Since removing a large amount of cladding light from the same location will cause heat accumulation and lead to CPS heating, in this embodiment, the etching depth of the laser etching region 5 gradually becomes shallower along the signal light transmission direction, that is, it changes from deep to shallow, so as to filter out the cladding light in segments, making the CPS less prone to heating.

[0026] Specifically, in this embodiment, the first signal fiber 1 is a hydrogen-carrying fiber. A section of coating layer approximately 10-14 cm long is stripped from the middle of the first signal fiber 1 to expose the first cladding 9. Using a grating etching device, a grating is etched 1-2 cm from the first stripped section 10 near the light input end, penetrating the first cladding 9 into the fiber core. The first cladding 9 remains undamaged, forming a high-reflectivity grating 4. The length of the high-reflectivity grating region 4 is less than 4 cm. After the high-reflectivity grating region 4 is etched, the entire hydrogen-carrying signal fiber is annealed. Due to the photosensitivity of the hydrogen-carrying fiber, after writing into the high-reflectivity grating region 4, it is necessary to heat the fiber in stages within the range of 120℃-820℃. Maintain a constant temperature to eliminate residual hydrogen molecules; process the first cladding 9 around the high-reflection grating region 4 of the annealed first signal fiber 1 to form a laser-etched region 5. The high-reflection grating region 4 inside the fiber core is invisible to the naked eye and under a conventional microscope. At this time, the laser-etched region 5 helps to locate the high-reflection grating region 4. At the same time, the laser-etched region 5 can filter out stray light and reflected light in the first cladding 9, protecting the optical path and improving the beam quality of the laser output. However, the removal of a large amount of cladding light from the same position will cause heat accumulation, resulting in the laser-etched region 5 heating up. In this embodiment, the cladding light is filtered out in segments from deep to shallow, so the laser-etched region 5 is not prone to heating up.

[0027] The first pump fiber 2 and the indicator fiber 3 are coupled to the side of the first signal fiber 1. Specifically, a section of the coating layer of the first pump fiber 2 is removed to form a second cladding 11. The first pump fiber 2 is used to connect to the pump source and provide energy to the laser. The second cladding 11 of the first pump fiber 2 is tapered, attached, and fused to the side of the first cladding 9 of the first signal fiber 1. The indicator fiber 3 is used to connect to the indicator light source to check whether the optical path is abnormal and the output spot positioning, etc. A section of the coating layer of the indicator fiber 3 is removed to form a third cladding 15. The two ends of the third cladding 15 form a third stripping 18. A roughened region 6 is processed on the third cladding 15. The roughened region 6 is used to strip the reflected light in the indicator fiber 3 to protect the indicator light source. The third cladding 15 is tapered, attached, and fused to the side of the first cladding 9 of the first signal fiber 1.

[0028] Specifically, a section of coating 8-12 cm is stripped from the first pump fiber 2 to form the second cladding 11. Tapering is performed in the stripped area. The second stripping opening 14 at the pump input end is 5-6 cm from the tapering end position, and the tapering diameter is 10-60 μm. The specific tapering diameter is determined by the type of the first pump fiber 2 and the operating wavelength of the pump source. A section of coating 10-12 cm is stripped from the indicator fiber 3 to form the third cladding 15. Hairening is performed at least 1 cm from the third stripping opening 18 at the indicator light input end to form a hairened area 6. The hairening length is 1-2 cm. This hairening is to remove the reflected light in the indicator fiber to protect the indicator light source. Then, tapering begins 5-6 cm from the third stripping opening 18 at the indicator light input end. The tapering diameter is 12-80 μm, and the specific tapering diameter is determined by the type of indicator fiber and the operating wavelength of the indicator light source.

[0029] After the first pump fiber 2 and the indicator fiber 3 are coupled to the side of the first signal fiber 1, a glass tube is placed over the cladding, that is, the first cladding 9, the second cladding 11 and the third cladding 15 are placed in the same glass tube 7, so as to encapsulate the first cladding 9, the second cladding 11 and the third cladding 15 with a glass tube 7, and the glass tube 7 is encapsulated in the housing.

[0030] The tapered ends of the first pump fiber 2 and the indicator fiber 3 are respectively attached to the first cladding 9 of the first signal fiber 1, with the attachment point at least 1 cm away from the high-reflectivity grating 4 and the laser etching area 5. The attachment point is melted using a flame tapering machine, taking care to avoid the high-reflectivity grating 4 in the flame scanning area to prevent deformation and failure of the high-reflectivity grating 4 due to high temperature. The first pump fiber 2, the indicator fiber 3 and the first signal fiber 1 are fused and fixed using high temperature, so that the pump light and the indicator light are coupled into the first signal fiber 1. After annealing, glue is applied 0.2-0.5 cm away from the stripped ends of the first pump fiber 2 and the indicator fiber 3 to fix them to the first signal fiber 1. A glass tube 7 is put on and glue is applied to both ends of the tube to fix it, which is used to protect the integrated component and facilitate packaging.

[0031] like Figure 3 As shown, the reverse integrated device includes a second signal fiber 22 and a second pump fiber 23. There is one second signal fiber 22 and at least one second pump fiber 23. The coating layer of the second signal fiber 22 is stripped in the middle to form a fourth cladding 20. The two ends of the fourth cladding 20 are separated from the coating layer by a fourth stripping opening 21. A low-reflection grating 8 is etched on the core of the second signal fiber 22. A laser etching region 5 is etched on the fourth cladding 20 located around the low-reflection grating 8. The laser etching region 5 is close to the fourth stripping opening 21 at the optical output end of the signal fiber 1. The laser etching region 5 not only serves to position the low-reflection grating 8, but also filters out stray light and backlight in the fourth cladding 20, protecting the optical path while improving the beam quality of the laser output.

[0032] Since the removal of a large amount of cladding light from the same location will cause heat accumulation and lead to heating of the laser etching area 5, in this embodiment, the etching depth of the laser etching area 5 gradually increases along the direction of signal light transmission, that is, it changes from shallow to deep, so as to filter out the cladding light in segments, making the laser etching area 5 less prone to heating.

[0033] like Figure 2 and Figure 3 As shown, the laser etching region 5 on both the forward and reverse integrated devices gradually becomes shallower along the pump light delivery direction.

[0034] The second pump fiber 23 is coupled to the side of the second signal fiber 22. Specifically, a section of the coating layer of the second pump fiber 23 is removed to form the fifth cladding 24. The second pump fiber 23 is used to connect the pump source and provide energy to the laser. The fifth cladding 24 of the second pump fiber 23 is tapered and fused to the side of the fourth cladding 20 of the second signal fiber 22. After the second pump fiber 23 is coupled to the side of the second signal fiber 22, the glass tube 7 is sleeved on the cladding, that is, the fourth cladding 20 and the fifth cladding 24 are placed in the same glass tube 7, so as to encapsulate the fourth cladding 20 and the fifth cladding 24 with a glass tube 7, and the glass tube 7 is encapsulated in the housing.

[0035] This embodiment integrates the beam combiner 19, grating, CPS, and indicator light CPS into a single unit and encapsulates them within the same housing, reducing the space occupied by the device (e.g., Figures 9-12 (As shown in the comparison), the number of fusion points has been reduced, namely the fusion points between the grating and the combiner, between the combiner and the CPS, and between the CPS and the indicator light source. This reduces the difficulty of fusion in the laser optical path and reduces time costs. The indicator fiber 3 and the first signal fiber 1 have undergone texturing to filter out the back light. The indicator light source can be directly fused with the indicator fiber 3 without the need for a transition fiber, which reduces the overall length of the passive fiber. In high-brightness lasers, this can reduce the generation of Raman light and improve beam quality. Moreover, the signal fiber has no fusion points and the fiber core is undeformed, which can output a better beam quality. Both the pump fiber and the indicator fiber 3 adopt side coupling. Compared with the end-face fusion method, the side coupling method can greatly reduce the back light at the pump source and indicator light source ends, protecting the pump source and indicator light source.

[0036] Example 2 In another typical embodiment of the present invention, a method for fabricating an integrated optical device is proposed, comprising: fabrication of a forward integrated device and fabrication of a reverse integrated device.

[0037] Among them, such as Figure 8 As shown, the fabrication process of the forward integrated device is as follows: Select a first signal fiber 1, a first pump fiber 2, and an indicator fiber 3. The first signal fiber 1 is of type 20 / 400 0.22 / 0.46NA, the first pump fiber 2 is of type 200 / 242 0.22NA, and the indicator fiber 3 is of type 9 / 1250.12.

[0038] Cut a 2m first signal fiber 1, and remove a 10-14cm section of the coating layer at the middle position of the first signal fiber 1 to expose the first cladding 9 and clean it. At a distance of about 1 cm from the first stripping 10 near the signal light transmission end of the first cladding 9 exposed section, a nanosecond laser is used to begin writing the high-reflectivity grating 4, which is then written onto the core of the signal fiber 1. After the high-reflectivity grating 4 is written, it is annealed in a high-temperature oven and then put into use. Since the hydrogen-carrying fiber is photosensitive, after writing the high-reflectivity grating 4, it is necessary to raise the temperature in stages within the range of 120℃-820℃ and keep it constant to eliminate residual hydrogen molecules. Then, laser etching is applied to the first cladding 9 on the periphery of the high-reflectivity grating 4 to form the laser-etched area 5 (e.g. Figure 5 (As shown), clean and set aside.

[0039] Cut at least one first pump fiber 2, strip a section of coating layer 8-12cm long from the first pump fiber 2 to expose the second cladding 11 and clean it; The exposed second cladding 11 of the first pump fiber 2 is tapered using a tapering machine to form a first tapered straight region 12 (e.g., ...). Figure 6 As shown), the diameter of the first tapered straight region 12 is 18-31 μm, and the distance between the end point 13 of the first tapered region at one end of the first tapered straight region 12 and the adjacent second peeling opening 14 is 4-6 cm.

[0040] Cut a 10-12cm length of the coating layer off the 3-indicator fiber to expose the third cladding 15 and clean it. A texturing process is performed on the exposed third cladding 15 at least 1 cm away from the third stripping opening 18 at the indicator light input end to form a texturing region 6, the length of which is 1-2 cm. The exposed third cladding 15 of the indicator fiber 3 is tapered using a tapering machine to form a second tapered straight region 16 (e.g., Figure 7 As shown), the diameter of the second tapered straight region 16 is 20-60 μm, and the distance from the end point 17 of the second tapered region at one end of the second tapered straight region 16 to the adjacent third peeling opening 18 is 4-6 cm.

[0041] After the first signal fiber 1, the first pump fiber 2, and the indicator fiber 3 are processed, the processed first signal fiber 1 is straightened and fixed horizontally using a clamp. The first tapered straight area 12 of the first pump fiber 2 is bonded and temporarily fixed to the exposed first cladding 9 of the first signal fiber 1, with the bonding position avoiding the high-reflection grating 4 and the laser-etched area 5. Then, the second tapered straight area 16 of the indicator fiber 3 is bonded and temporarily fixed to the first cladding 9 of the first signal fiber 1, with the bonding position avoiding the high-reflection grating 4, the laser-etched area 5, and the roughened area 6. After the first pump fiber 2 and the indicator fiber 3 are installed in place, the bonding area is melted using an oxyhydrogen flame tapering machine. At this time, the movement speed of the fixture should be adjusted to the lower limit of the equipment movement. High temperature is used to fuse and fix the first pump fiber 2, the indicator fiber 3 and the first signal fiber 1, so that the pump light and the indicator light are coupled into the first signal fiber 1. After annealing, adhesive is applied to the stripped ends of the first pump fiber 2 and the indicator fiber 3 to fix the first pump fiber 2, the indicator fiber 3, and the first signal fiber 1 (e.g., Figure 1 (as shown) Then gently break the discarded ends of the first pump fiber 2 and the indicator fiber 3 (e.g.) Figure 2 As shown), to form a bundler 19, the entire bundler 19 is inserted into the glass tube 7, so that the exposed first cladding layer 9, second cladding layer 11 and third cladding layer 15 are all located inside the glass tube 7, and glue is applied to fix the two ends of the glass tube 7. Finally, the glass tube 7 is encapsulated in the housing to complete the fabrication of the forward integrated device.

[0042] The fabrication process of the reverse integrated device is as follows: A second signal fiber 22 and a second pump fiber 23 are selected, wherein the second signal fiber 22 is of type 20 / 4000.22 / 0.46NA and the second pump fiber 23 is of type 200 / 242 0.22NA.

[0043] Cut a 2m second signal fiber 22, and remove a 10-14cm long section of the coating layer at the middle position of the second signal fiber 22 to expose the fourth cladding layer 20 and clean it. At a distance of about 1 cm from the fourth stripping 21 near the signal light output end, a nanosecond laser is used to begin writing the low-reflection grating 8 on the core of the second signal fiber 22. After the low-reflection grating 8 is written, it is annealed in a high-temperature oven and then put into use. Since the hydrogen-carrying fiber is photosensitive, after writing the low-reflection grating 8, it is necessary to raise the temperature in stages within the range of 120℃-820℃ and keep it constant to eliminate residual hydrogen molecules. Then, laser etching is used on the fourth cladding 20 on the periphery of the low-reflection grating 8 to form the laser-etched area 5 (e.g. Figure 5 (As shown), clean and set aside.

[0044] Cut at least one second pump fiber 23, strip a section of coating layer 8-12cm long from the second pump fiber 23 to expose the fifth cladding 24 and clean it; The exposed fifth cladding 24 of the second pump fiber 23 is tapered using a tapering machine to form a third tapered straight region 226 (e.g., ...). Figure 13 As shown), the diameter of the third tapered straight region 26 is 18-31 μm, and the distance between the end point 27 of the third tapered region at one end of the third tapered straight region 26 and the adjacent fifth peeling opening 25 is 4-6 cm.

[0045] After the second signal fiber 22 and the second pump fiber 23 are processed, the processed second signal fiber 22 is straightened and fixed horizontally using a clamp. The third tapered straight area 26 of the second pump fiber 23 is attached to the fourth cladding 20 of the second signal fiber 22 and temporarily fixed. The attachment position avoids the low-reflection grating 8 and the laser etching area 5. After the second pump fiber 23 is installed in place, the bonding area is melted using an oxyhydrogen flame tapering machine. At this time, the movement speed of the clamp should be adjusted to the lower limit of the equipment movement. High temperature is used to fuse and fix the second pump fiber 23 and the second signal fiber 22, so that the pump light is coupled into the second signal fiber 22. After annealing, glue is applied to the fifth stripping point 25 of the second pump fiber 23 to fix the second pump fiber 23 to the second signal fiber 22. Then gently break the discarded end of the second pump fiber 23 (e.g. Figure 3 As shown), to form a bundler 19, the entire bundler 19 is inserted into the glass tube 7 so that the fourth cladding layer 20 and the fifth cladding layer 24 are both located inside the glass tube 7, and glue is applied to fix the two ends of the glass tube 7. Finally, the glass tube 7 is encapsulated in the housing to complete the fabrication of the reverse integrated device.

[0046] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An integrated optical device, comprising: A forward integrated device, comprising a first signal fiber (1), a first pump fiber (2) and an indicator fiber (3), characterized in that the coating layer in the middle of the first signal fiber (1) is stripped to expose the first cladding (9), a section of high-reflectivity grating (4) is etched on the fiber core at the exposed first cladding (9), and a laser-etched area (5) is etched on the first cladding (9) around the high-reflectivity grating (4). The first pump fiber (2) exposes a section of the second cladding (11), and the indicator fiber (3) exposes a section of the third cladding (15). A roughened area (6) is provided on the third cladding (15). The second cladding (11) and the third cladding (15) are tapered and fused to the side of the first cladding (9). The first cladding (9), the second cladding (11) and the third cladding (15) are encapsulated in the housing through a glass tube (7).

2. The integrated optoelectronic device according to claim 1, characterized in that, The laser-etched area (5) becomes shallower along the pump light delivery direction.

3. The integrated optoelectronic device according to claim 1, characterized in that, The texturing area (6), the high-reflectivity grating (4), and the laser etching area (5) all avoid the melting position.

4. The integrated optoelectronic device according to claim 1, characterized in that, It also includes a reverse integrated device, which includes a second signal fiber (22) and a second pump fiber (23). The second signal fiber (22) has its middle stripped coating layer exposed to expose a fourth cladding (20). A low-reflection grating (8) is etched on the fiber core in the exposed fourth cladding (20) area. A laser-etched area (5) is etched on the fourth cladding (20) around the low-reflection grating (8). The second pump fiber (23) exposes a fifth cladding (24). The fifth cladding (24) is tapered and fused to the side of the fourth cladding (20). The fifth cladding (24) and the fourth cladding (20) are encapsulated in a housing through a glass tube (7).

5. The integrated optoelectronic device according to claim 4, characterized in that, At least one first pump fiber (2) and one second pump fiber (23) are provided.

6. A method for manufacturing an integrated optoelectronic device as described in any one of claims 1-5, characterized in that, include: Cut a first signal fiber (1), at least one first pump fiber (2) and one indicator fiber (3), and strip a section of coating layer from the first signal fiber (1), the first pump fiber (2) and the indicator fiber (3) respectively to expose the corresponding first cladding (9), second cladding (11) and third cladding (15). At the point near the signal light transmission end of the exposed first cladding (9), a high-reflectivity grating (4) is etched on the core of the first signal fiber (1), and a laser etching area (5) is etched on the first cladding (9) around the high-reflectivity grating (4). A texturing process is performed on the exposed third cladding (15) at a distance from the indicator light input end to form a texturing region (6). The first pump fiber (2) and the indicator fiber (3) are tapered and fused together on the side of the first cladding (9). A glass tube (7) is fitted over the exposed first cladding (9), second cladding (11) and third cladding (15) and fixed with adhesive. The glass tube (7) is encapsulated in the housing to complete the fabrication of the forward integrated device.

7. The manufacturing method according to claim 6, characterized in that, The exposed second cladding (11) and third cladding (15) are tapered using a tapering machine to form a first tapered straight area (12) and a second tapered straight area (16), respectively. The first tapered straight area (12) and the second tapered straight area (16) are then attached to the exposed first cladding (9) and temporarily fixed, with the attachment positions avoiding the high-reflectivity grating (4), the laser-etched area (5), and the texturing area (6). After the first pump fiber (2) and the indicator fiber (3) are installed in place, the bonding area is melted.

8. The manufacturing method according to claim 6, characterized in that, Before installing the glass tube (7), break off the discarded ends of the first pump fiber (2) and the indicator fiber (3).

9. The manufacturing method according to claim 6, characterized in that, After the high-reflectivity grating (4) is written, it is heated in stages in a high-temperature chamber and kept at a constant temperature to eliminate residual hydrogen molecules.

10. The manufacturing method according to claim 6, characterized in that, Cut off one second signal fiber (22) and at least one second pump fiber (23), and strip a section of coating layer from the second signal fiber (22) and the second pump fiber (23) respectively to expose the corresponding fourth cladding (20) and fifth cladding (24). Near the signal light output end of the exposed fourth cladding (20), a low-reflection grating (8) is etched on the core of the second signal fiber (22), and a laser etching area (5) is etched on the fourth cladding (20) around the low-reflection grating (8). The second pump fiber (23) is tapered and fused to the side of the fourth cladding (20). A glass tube (7) is fitted over the exposed fifth cladding (24) and the fourth cladding (20) and fixed with adhesive. The glass tube (7) is encapsulated in the housing to complete the fabrication of the reverse integrated device.

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