Semiconductor ultra-clean high-purity electronic-grade hydrochloric acid purification reactor

Abstract

This invention discloses an ultra-clean, high-purity electronic-grade hydrochloric acid purification reactor for semiconductors, relating to the field of hydrochloric acid purification technology. It includes a distillation apparatus, a cooling apparatus, a filtration apparatus, and a reflux pump. The distillation apparatus and the cooling apparatus are connected by pipelines; the inlet of the reflux pump is connected to the cooling apparatus; the outlet of the reflux pump is connected to the distillation apparatus; and the cooling apparatus and the filtration apparatus are connected by pipelines. The distillation apparatus includes a distillation kettle and a range adjustment assembly. The distillation kettle has a purification chamber. Several sets of range adjustment assemblies are placed inside the purification chamber. Each range adjustment assembly includes a support platform and a slide platform. Packing is provided at the opposite ends of the support platform and the slide platform. Several adjusting rods are provided on the support platform, and a casing is provided on the lower side of the slide platform. Several displacement channels are provided on the packing, and the cross-sectional area of ​​each displacement channel is not less than pentagonal.

Description

Technical Field

[0001] This invention relates to the field of hydrochloric acid purification technology, specifically to an ultra-clean, high-purity electronic-grade hydrochloric acid purification reactor for semiconductors. Background Technology

[0002] Ultra-clean, high-purity electronic-grade hydrochloric acid is a general-purpose wet electronic chemical and one of the key materials in the wet process of the electronics industry. It is widely used in photovoltaic, display panel, and semiconductor manufacturing.

[0003] The semiconductor industry, in particular, has even higher requirements for the quality of hydrochloric acid. To ensure the quality of hydrochloric acid, conventional filtration methods are no longer sufficient, necessitating distillation processes. However, distillation columns, typically used for purification, are quite tall, making inspection and maintenance inconvenient. The main process involves the exchange of components between the gaseous and liquid phases, usually carried out in packed columns. However, current distillation methods often use fixed-stroke packed columns, making them unsuitable for fluctuating feed volumes and complex component exchange conditions.

[0004] In addition, the flow direction of the gas-liquid phase medium is relatively fixed during the component exchange process, which affects the efficiency of component exchange. Summary of the Invention

[0005] The purpose of this invention is to provide an ultra-clean, high-purity electronic-grade hydrochloric acid purification reactor for semiconductors, in order to solve the problems raised in the prior art.

[0006] To achieve the above objectives, the present invention provides the following technical solution:

[0007] The hydrochloric acid purification reactor includes a distillation unit, a cooling unit, a filtration unit, and a reflux pump. The distillation unit and the cooling unit are connected by pipelines, the inlet of the reflux pump is connected to the cooling unit, the outlet of the reflux pump is connected to the distillation unit, and the cooling unit and the filtration unit are connected by pipelines.

[0008] The distillation apparatus includes a distillation kettle and a range adjustment assembly. The distillation kettle is provided with a purification chamber. Several range adjustment assemblies are provided and placed inside the purification chamber. The range adjustment assembly includes a support platform and a slide platform. The support platform and the slide platform are respectively provided with packing at opposite ends. Several adjusting rods are provided on the support platform. A sleeve is provided on the lower side of the slide platform. Several displacement channels are provided on the packing. The number of sides of the displacement channel cross-section is not less than pentagonal.

[0009] A distillation unit is used to purify hydrochloric acid in its first stage, generating high-purity gaseous hydrogen chloride. This hydrogen chloride is then introduced into a cooling unit where it is absorbed by ultrapure water, forming electronic-grade hydrochloric acid. A portion of this electronic-grade hydrochloric acid is returned to the distillation unit for further purification via a reflux pump. The remainder is introduced into a filtration unit, where multi-stage filtration removes dissolved impurities and improves product stability. The distillation vessel provides working space through a purification chamber and is equipped with several adjustable flow control components to ensure the reflux liquid's flow rate and prevent excessive flow from affecting purification quality. The platform and slide are each equipped with packing material, featuring an adjustable spacing design. When there is a high concentration of hydrogen chloride in the reflux liquid, raising the slide reduces the volume of the adjusting rod extending into the displacement channel of the upper packing layer. This increases the contact area between the gaseous hydrogen chloride and the reflux liquid, allowing heat exchange between them. The hydrogen chloride in the reflux liquid also heats up and forms gaseous hydrogen chloride, which flows upwards along the displacement channel, ensuring the purification quality of the reflux liquid. Meanwhile, higher-boiling-point impurities liquefy as the temperature decreases and flow downwards with the downstream liquid. Simultaneously, the increased contact area improves the separation efficiency of hydrogen chloride in the reflux liquid. The tiered arrangement of each packing layer reduces the overall height of the distillation vessel, facilitating maintenance and self-inspection.

[0010] Furthermore, the support platform and the purification chamber wall are fastened together. An adjustment cylinder is provided on the support platform. The output end of the adjustment cylinder is fastened together with the slide table. The adjustment rod and the sleeve pass through the upper and lower displacement channels in sequence. The adjustment rod and the upper displacement channel are slidably connected.

[0011] The platform is installed and fixed through the purification chamber. An adjusting cylinder is installed on the platform to drive the vertical movement of the slide, which in turn moves the upper packing and casing, increasing the distance between them and the lower packing. Initially, the adjusting rod is inserted into the two displacement channels, ensuring that the entire cross-section of the displacement channel is not filled. For example, when the displacement channel cross-section is hexagonal, the adjusting rod's cross-sectional area is half of it. When the reflux flows downwards, it flows along three sides of the displacement channel and one side of the adjusting rod. When gaseous hydrochloric acid rises, it contacts the reflux on all four sides, preventing an excessively large cross-section that would cause the reflux to flow too quickly downwards, affecting the displacement effect. When a large amount of hydrogen chloride is detected in the reflux or a large amount of high-boiling-point impurities are found in the rising gaseous hydrogen chloride, the slide moves upwards, and the adjusting rod gradually slides out of the upper displacement channel. The reflux then enters the upper displacement channel and flows along the six sides, increasing the component displacement area between the reflux and gaseous hydrogen chloride, thereby improving the component displacement efficiency.

[0012] Furthermore, the adjusting rod is equipped with a lower liquid inlet groove.

[0013] By setting a lower liquid inlet and tilting it downwards, the return liquid can flow towards the lower liquid inlet when passing through the displacement channel, increasing the lateral flow, extending the flow path, and improving the quality of component displacement.

[0014] Furthermore, the outer casing and the lower displacement channel are slidably connected, and the outer casing is provided with an upper liquid inlet groove.

[0015] By setting a sliding mechanism, the casing slides upward as the slide moves up, and works in conjunction with the adjusting rod to guide the flow. An upper liquid inlet groove is set on it, which increases the tendency of the reflux liquid to flow across the surface and ensures the quality of component replacement.

[0016] Furthermore, the upper and lower liquid inlet tanks are designed with gradually varying depths.

[0017] The depth of the upper and lower liquid inlet tanks gradually decreases from the outside to the inside, thereby improving the smoothness of the flow, preventing dead zones, and avoiding the retention of impurities that would affect the purification cleanliness.

[0018] Furthermore, the distillation vessel has a liquid inlet on one side, a purification port on one side of the bottom, a heater at the lower end of the purification chamber, and a top outlet at the top, with one end of the top outlet connected to a cooling device.

[0019] The incoming hydrochloric acid is heated by a heater, causing the hydrogen chloride within to vaporize and flow upwards along the purification chamber for purification. Residual metal ions and high-boiling-point impurities remain at the bottom of the purification chamber and are intermittently extracted and discharged through a purification port to prevent particulate matter accumulation. The vaporized hydrogen chloride is purified by counter-current contact with the reflux liquid and is discharged from the top outlet. To improve purification efficiency, a negative pressure pump is installed at the top outlet to create negative pressure at the top of the purification chamber, simultaneously guiding the purified hydrogen chloride into a cooling device.

[0020] Furthermore, the cooling device includes a cooling vessel and a pure water pipe. The cooling vessel is provided with a cooling chamber, and the pure water pipe is connected to the cooling chamber. A support plate is provided inside the cooling chamber, and several tubes are provided on the support plate. The outlet of the pure water pipe is located on the upper side of the tubes. An air inlet is provided on one side of the cooling chamber, and the top outlet and the air inlet are connected.

[0021] High-purity gaseous hydrogen chloride exiting from the top outlet enters the cooling chamber through the inlet. High-purity water is supplied to the tubes through a pure water pipe. As the high-purity water flows along the tube wall, it forms a liquid film. The gaseous hydrogen chloride is absorbed during the counter-current process, forming electronic-grade hydrochloric acid. A support plate is installed on the inner wall of the cooling chamber, and it has multiple through holes for installing and fixing the tubes.

[0022] As an optimization, the cooling vessel is equipped with a reflux inlet, and the reflux pump is connected to the reflux inlet pipe. The distillation vessel is equipped with a reflux inlet, and the reflux pump outlet is connected to the reflux inlet pipe. The distillation unit also includes a distributor, and the end of the reflux inlet is connected to the distributor. The hydrochloric acid generated through countercurrent contact collects at the bottom of the cooling chamber under gravity. A portion of it is sent to the reflux inlet through the reflux inlet and the reflux pump, and then through the distributor to flow downwards along the displacement channel, where it replaces the components of the rising gaseous hydrogen chloride, improving purification efficiency.

[0023] As an optimization, the filtration device includes several filters and inlet pipes. Adjacent filters are connected through the inlet pipes. The cooling vessel is equipped with a discharge port, which is connected to the adjacent filter pipe. The purified and cooled electronic-grade hydrochloric acid is pumped through the pipeline to the first filter. The filter adopts multi-stage series filtration as the final fine filtration, using membrane filtration, and the filter particle size is reduced in stages, with the final stage having the smallest particle size to ensure particulate matter interception efficiency.

[0024] Compared with the prior art, the beneficial effects of the present invention are as follows: The support platform and the slide are respectively equipped with packing material, and the spacing is adjustable. When there is a large amount of hydrogen chloride in the reflux liquid, the slide platform is raised, reducing the volume of the adjusting rod extending into the displacement channel of the upper packing. This increases the contact area of ​​the displacement channel for the replacement of gaseous hydrogen chloride and the reflux liquid. Heat exchange between the hydrogen chloride in the reflux liquid and the gaseous hydrogen chloride causes the hydrogen chloride in the reflux liquid to also form gaseous hydrogen chloride upon heating, which flows upward along the displacement channel, ensuring the purification quality of the reflux liquid. Meanwhile, impurities with higher boiling points liquefy as the temperature decreases and flow downward with the downstream liquid. Simultaneously, the increased contact area improves the separation efficiency of hydrogen chloride in the reflux liquid. By setting up upper and lower layers for each packing group, the overall height of the distillation vessel is reduced to a certain extent, making it easier to replace and self-inspect. In the initial state, the upper and lower ends of the regulating rod are inserted into the two layers of displacement channels respectively. When the reflux liquid flows downward, it flows along the three sides of the displacement channel and one side of the regulating rod. When the gaseous hydrochloric acid floats up, it comes into contact with the reflux liquid on all four sides, preventing the cross-section from being too large and causing the reflux liquid to flow downward too fast. When a large amount of hydrogen chloride is detected in the reflux liquid or a large amount of high-boiling-point impurities are detected in the rising gaseous hydrogen chloride, the slide is moved up, and the regulating rod gradually slides out from the upper displacement channel. After the reflux liquid enters the upper displacement channel, it flows along the six sides of the displacement channel, increasing the component displacement area between the reflux liquid and the gaseous hydrogen chloride, thereby improving the component displacement efficiency. By setting up a lower liquid inlet, the reflux liquid can flow towards the lower liquid inlet when it flows through the displacement channel, increasing the tendency of the flow to be lateral, extending the flow stroke, and improving the component displacement quality. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0026] Figure 2 This is a schematic diagram of the distillation vessel structure of the present invention;

[0027] Figure 3 This is a schematic diagram of the regulating component structure of the present invention;

[0028] Figure 4 This is a schematic diagram of the adjusting rod structure of the present invention;

[0029] Figure 5 This is a schematic diagram of the casing structure of the present invention;

[0030] Figure 6 This is a schematic diagram of the cooling device structure of the present invention;

[0031] Figure 7 This is a schematic diagram of the cooling vessel and filter structure of the present invention.

[0032] In the diagram: 1. Distillation apparatus; 11. Distillation kettle; 111. Purification chamber; 112. Liquid inlet; 113. Top outlet; 114. Reflux port; 115. Impurity removal port; 12. Packing; 121. Displacement channel; 13. Adjustment assembly; 131. Support; 132. Slide table; 133. Shell; 1331. Upper liquid inlet tank; 134. Adjusting rod; 1341. Lower liquid inlet tank; 135. Adjustment cylinder; 14. Distributor; 15. Heater; 2. Cooling device; 21. Cooling kettle; 211. Cooling chamber; 212. Discharge port; 213. Drain port; 214. Air inlet; 22. Tubes; 23. Support plate; 24. Pure water pipe; 3. Filtration device; 31. Filter; 32. Drain pipe; 4. Reflux pump. Detailed Implementation

[0033] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0034] Example: Figures 1-7 As shown, the present invention provides a technical solution for a high-purity electronic-grade hydrochloric acid purification reactor for semiconductor applications.

[0035] The hydrochloric acid purification reactor includes a distillation unit 1, a cooling unit 2, a filtration unit 3, and a reflux pump 4. The distillation unit 1 and the cooling unit 2 are connected by pipes. The inlet of the reflux pump 4 is connected to the cooling unit 2, the outlet of the reflux pump 4 is connected to the distillation unit 1, and the cooling unit 2 and the filtration unit 3 are connected by pipes.

[0036] The distillation apparatus 1 includes a distillation kettle 11 and a range adjustment assembly 13. The distillation kettle 11 is provided with a purification chamber 111. The range adjustment assembly 13 is provided with several sets, and the several sets of range adjustment assemblies 13 are placed in the purification chamber 111. The range adjustment assembly 13 includes a support 131 and a slide 132. The support 131 and the slide 132 are respectively provided with packing 12 at opposite ends. The support 131 is provided with several adjusting rods 134. The slide 132 is provided with a casing 133 on its lower side. The packing 12 is provided with several displacement channels 121. The number of sides of the cross-section of the displacement channel 121 is not less than pentagonal.

[0037] A distillation unit 1 is used to purify hydrochloric acid in its first stage, generating high-purity gaseous hydrogen chloride. This hydrogen chloride is then introduced into a cooling unit 2, where it is absorbed by ultrapure water to form electronic-grade hydrochloric acid. A portion of this electronic-grade hydrochloric acid is returned to the distillation unit 1 via a reflux pump 4 for further purification. The remainder is introduced into a filtration unit 3, where multi-stage filtration removes dissolved impurities and gases, improving product stability. A distillation vessel 11 provides working space through a purification chamber 111 and is equipped with several adjustable flow control components 13 to ensure the reflux liquid's flow rate and prevent excessive flow from affecting purification quality. Packing material 12 is installed on the support platform 131 and the slide platform 132 respectively, with an adjustable spacing design. When there is a large amount of hydrogen chloride in the reflux liquid, the slide platform 132 is raised, which reduces the volume of the adjusting rod 134 extending into the displacement channel 121 of the upper packing material 12. This increases the contact area of ​​the displacement channel 121 for the displacement of gaseous hydrogen chloride and reflux liquid. The hydrogen chloride in the reflux liquid exchanges heat with the gaseous hydrogen chloride, causing the hydrogen chloride in the reflux liquid to also form gaseous hydrogen chloride, which flows upward along the displacement channel 121, ensuring the purification quality of the reflux liquid. Meanwhile, impurities with higher boiling points liquefy as the temperature decreases and flow downward with the downstream liquid. At the same time, the increased contact area improves the separation efficiency of hydrogen chloride in the reflux liquid. By setting each group of packing material 12 in upper and lower layers, the overall height of the distillation vessel is reduced to a certain extent, making it easier to replace and inspect.

[0038] Furthermore, the support platform 131 and the purification chamber 111 are fastened together. The support platform 131 is provided with an adjustment cylinder 135. The output end of the adjustment cylinder 135 is fastened together with the slide table 132. The adjustment rod 134 and the sleeve 133 pass through the upper and lower displacement channels 121 in sequence. The adjustment rod 134 and the upper displacement channel 121 are slidably connected.

[0039] The foundation 131 is installed and fixed through the purification chamber 111. An adjustment cylinder 135 is provided on the foundation 131 to drive the slide 132 to move vertically, thereby causing the slide 132 to move the upper packing and the casing 133, increasing the distance between them and the lower packing. Initially, the upper and lower ends of the regulating rod 134 are inserted into the two layers of displacement channels 121, respectively, so that the displacement channels 121 do not flow across the entire cross section. For example, when the cross section of the displacement channel 121 is hexagonal, the cross-sectional area of ​​the regulating rod 134 is half of it. When the reflux liquid flows downward, it flows along the three sides of the displacement channel 121 and one side of the regulating rod 134. When the gaseous hydrochloric acid floats up, it comes into contact with the reflux liquid on all four sides, preventing the cross section from being too large, which would cause the reflux liquid to flow downward too fast and affect the displacement effect. When a large amount of hydrogen chloride is detected in the reflux liquid or a large amount of high-boiling-point impurities are detected in the rising gaseous hydrogen chloride, the slide 132 moves upward, and the regulating rod 134 gradually slides out of the upper displacement channel 121. After the reflux liquid enters the upper displacement channel 121, it flows along the six sides of the displacement channel, which increases the component displacement area between the reflux liquid and the gaseous hydrogen chloride, thereby improving the component displacement efficiency.

[0040] Furthermore, the adjusting rod 134 is provided with a lower liquid inlet groove 1341.

[0041] By setting the lower liquid inlet trough 1341 and tilting it downwards, the return liquid can flow towards the lower liquid inlet trough 1341 when it flows through the replacement channel 121, increasing the lateral flow, extending the flow path, and improving the quality of component replacement.

[0042] Furthermore, the casing 133 and the lower displacement channel 121 are slidably connected, and the casing 133 is provided with an upper liquid inlet groove 1331.

[0043] By setting a sliding mechanism, when the slide table 132 moves upward, the housing 133 slides upward as well, and works with the adjusting rod 134 to guide the flow. An upper liquid inlet trough 1331 is set on it, which increases the crossflow tendency of the reflux liquid and ensures the quality of component replacement.

[0044] Furthermore, the upper liquid inlet tank 1331 and the lower liquid inlet tank 1341 are designed with gradually varying depths.

[0045] The depth of the upper liquid inlet tank 1331 and the lower liquid inlet tank 1341 gradually decreases from the outside to the inside, thereby improving the smoothness of the flow, preventing dead corners, causing impurities to remain, and affecting the purification cleanliness.

[0046] Furthermore, the distillation vessel 11 is provided with a liquid inlet channel 112 on one side, a purification port 115 on one side of the bottom end of the distillation vessel 11, a heater 15 at the lower end of the purification chamber 111, and a top outlet 113 at the top end of the distillation vessel 11, with one end of the top outlet 113 connected to a cooling device 2.

[0047] The incoming hydrochloric acid is heated by heater 15, causing the hydrogen chloride to vaporize and flow upwards along the purification chamber 111 for purification. Residual metal ions and high-boiling-point impurities remain at the bottom of the purification chamber 111 and are intermittently extracted and discharged from the impurity removal port 115 to prevent particulate matter accumulation. The vaporized hydrogen chloride is purified by counter-current contact with the reflux liquid and is discharged from the top outlet 113. To improve purification efficiency, a negative pressure pump is installed at the top outlet 113 to create negative pressure at the top of the purification chamber 111, simultaneously guiding the purified hydrogen chloride into the cooling device 2.

[0048] Furthermore, the cooling device 2 includes a cooling vessel 21 and a pure water pipe 24. The cooling vessel 21 is provided with a cooling chamber 211. The pure water pipe 24 and the cooling chamber 211 are connected by pipes. The cooling chamber 211 is provided with a support plate 23. The support plate 23 is provided with a plurality of tubes 22. The outlet of the pure water pipe 24 is located on the upper side of the tubes 22. The cooling chamber 211 is provided with an air inlet 214 on one side. The top outlet 113 and the air inlet 214 are connected by pipes.

[0049] High-purity gaseous hydrogen chloride discharged from the top outlet 113 enters the cooling chamber 211 through the inlet 214. High-purity water is supplied to the tube set 22 through the pure water pipe 24. As the high-purity water flows along the tube wall of the tube set 22, it forms a liquid film. The gaseous hydrogen chloride is absorbed by contact during the countercurrent process, forming electronic-grade hydrochloric acid. The support plate 23 is installed on the inner wall of the cooling chamber 211 and has multiple through holes for installing and fixing the tube set 22.

[0050] As an optimization, the cooling vessel 21 is provided with a reflux port 213, and the reflux pump 4 is connected to the reflux port 213 via a pipeline. The distillation vessel 11 is provided with a reflux port 114, and the outlet of the reflux pump 4 is connected to the reflux port 114 via a pipeline. The distillation apparatus 1 also includes a distributor 14, and the end of the reflux port 114 is connected to the distributor 14. The hydrochloric acid generated through countercurrent contact is collected at the bottom of the cooling chamber 211 under the action of gravity. A portion of it is sent into the reflux port 114 through the reflux port 213 and the reflux pump 4, and then through the distributor 14 to dissolve the liquid and flow downward along the displacement channel 121, where it replaces the components of the floating gaseous hydrogen chloride, thereby improving the purification efficiency.

[0051] As an optimization, the filtration device 3 includes several filters 31 and a guide pipe 32. Adjacent filters 31 are connected through the guide pipe 32. The cooling vessel 21 is provided with a discharge port 212, which is connected to the adjacent filter 31 via a pipeline. The purified and cooled electronic-grade hydrochloric acid is pumped through a pipeline to the first filter 31. The filter 31 adopts a multi-stage series filtration as the final fine filter, using membrane filtration, and the filter particle size is reduced step by step, with the final stage having the smallest particle size to ensure particulate matter interception efficiency.

[0052] The working principle of this invention is as follows: Packing material 12 is respectively installed on the support 131 and the slide 132, with an adjustable spacing design. When there is a large amount of hydrogen chloride in the reflux liquid, the slide 132 is raised, so that the adjusting rod 134 reduces the volume of the displacement channel 121 in the upper packing material 12. This increases the contact area of ​​the displacement channel 121 for the replacement of gaseous hydrogen chloride and reflux liquid. The hydrogen chloride in the reflux liquid and the gaseous hydrogen chloride exchange heat, so that the hydrogen chloride in the reflux liquid is heated to form gaseous hydrogen chloride, which flows upward along the displacement channel 121, ensuring the purification quality of the reflux liquid. Meanwhile, impurities with higher boiling points liquefy as the temperature decreases and flow downward with the downstream liquid. At the same time, the increased contact area improves the separation efficiency of hydrogen chloride in the reflux liquid. By setting the packing material in upper and lower layers for each group 12, the overall height of the distillation vessel is reduced to a certain extent, making it easier to replace and self-inspect. In the initial state, the upper and lower ends of the regulating rod 134 are respectively inserted into the two layers of displacement channels 121. When the reflux liquid flows downward, it flows along the three sides of the displacement channels 121 and one side of the regulating rod 134. When the gaseous hydrochloric acid floats up, it comes into contact with the reflux liquid on all four sides, preventing the cross-section from being too large and causing the reflux liquid to flow downward too fast. When a large amount of hydrogen chloride or rising gaseous hydrogen chloride is detected in the reflux liquid, When there are many high-boiling-point impurities, the slide 132 moves upward, and the adjusting rod 134 gradually slides out from the upper displacement channel 121. After the reflux liquid enters the upper displacement channel 121, it flows along the six sides of the displacement channel, which increases the component displacement area between the reflux liquid and gaseous hydrogen chloride, thereby improving the component displacement efficiency. By setting the lower liquid inlet trough 1341, the reflux liquid can flow towards the lower liquid inlet trough 1341 when it flows through the displacement channel 121, increasing the lateral flow, extending the flow path, and improving the component displacement quality.

[0053] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A high-purity electronic-grade hydrochloric acid purification reactor for semiconductors, characterized in that: The hydrochloric acid purification reactor includes a distillation unit (1), a cooling unit (2), a filtration unit (3), and a reflux pump (4). The distillation unit (1) and the cooling unit (2) are connected by pipes. The inlet of the reflux pump (4) is connected to the cooling unit (2), and the outlet of the reflux pump (4) is connected to the distillation unit (1). The cooling unit (2) and the filtration unit (3) are connected by pipes. The distillation apparatus (1) includes a distillation kettle (11) and a range adjustment assembly (13). The distillation kettle (11) is provided with a purification chamber (111). The range adjustment assembly (13) is provided with several sets. Several sets of the range adjustment assembly (13) are placed in the purification chamber (111). The range adjustment assembly (13) includes a support (131) and a slide (132). The support (131) and the slide (132) are respectively provided with packing (12) at opposite ends. The support (131) is provided with several adjusting rods (134). The slide (132) is provided with a casing (133) on its lower side. The packing (12) is provided with several displacement channels (121). The displacement channels (121) have a cross-sectional area of ​​not less than pentagonal. The support platform (131) and the purification chamber (111) are fastened together. The support platform (131) is provided with an adjustment cylinder (135). The output end of the adjustment cylinder (135) is fastened together with the slide table (132). The adjustment rod (134) and the sleeve (133) pass through the upper and lower displacement channels (121) in sequence. The adjustment rod (134) and the upper displacement channel (121) are slidably connected.

2. The semiconductor ultra-clean high-purity electronic-grade hydrochloric acid purification reactor according to claim 1, characterized in that: The adjusting rod (134) is provided with a lower liquid inlet groove (1341).

3. The semiconductor ultra-clean high-purity electronic-grade hydrochloric acid purification reactor according to claim 2, characterized in that: The shell (133) and the lower displacement channel (121) are slidably connected, and the shell (133) is provided with an upper liquid inlet groove (1331).

4. The semiconductor ultra-clean high-purity electronic-grade hydrochloric acid purification reactor according to claim 3, characterized in that: The upper liquid inlet tank (1331) and the lower liquid inlet tank (1341) are configured with gradually varying depths.

5. A semiconductor-grade ultra-clean high-purity electronic-grade hydrochloric acid purification reactor according to any one of claims 1 to 4, characterized in that: The distillation vessel (11) has a liquid inlet channel (112) on one side, a purification port (115) on one side of the bottom end of the distillation vessel (11), a heater (15) at the lower end of the purification chamber (111), and a top outlet (113) at the top end of the distillation vessel (11). One end of the top outlet (113) is connected to a cooling device (2).

6. The semiconductor ultra-clean high-purity electronic-grade hydrochloric acid purification reactor according to claim 5, characterized in that: The cooling device (2) includes a cooling tank (21) and a pure water pipe (24). The cooling tank (21) is provided with a cooling chamber (211). The pure water pipe (24) and the cooling chamber (211) are connected by pipes. The cooling chamber (211) is provided with a support plate (23). The support plate (23) is provided with a plurality of tubes (22). The outlet of the pure water pipe (24) is located on the upper side of the tubes (22). The cooling chamber (211) is provided with an air inlet (214) on one side. The top outlet (113) and the air inlet (214) are connected by pipes.

7. The semiconductor ultra-clean high-purity electronic-grade hydrochloric acid purification reactor according to claim 6, characterized in that: The cooling vessel (21) is provided with a flow port (213), the reflux pump (4) is connected to the flow port (213) by a pipe, the distillation vessel (11) is provided with a reflux port (114), the outlet of the reflux pump (4) is connected to the reflux port (114) by a pipe, the distillation device (1) also includes a distributor (14), the end of the reflux port (114) is connected to the distributor (14).

8. The semiconductor ultra-clean high-purity electronic-grade hydrochloric acid purification reactor according to claim 7, characterized in that: The filtration device (3) includes several filters (31) and a drain pipe (32). Two adjacent filters (31) are connected through the drain pipe (32). The cooling vessel (21) is provided with a discharge port (212), which is connected to the adjacent filter (31) through a pipe.

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