Cleaning equipment and cleaning method
By using cleanroom equipment to remove static electricity, dust, and dirt, the appearance and performance problems of raw chips caused by impurities during processing are solved, achieving completely clean processing of raw chips and ensuring the quality of the finished product.
Patent Information
- Application Number
- CN202511994439.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-26
- Publication Date
- 2026-02-10
AI Technical Summary
During the processing of raw sheets, such as metal printing and lamination, the raw sheets inevitably come into contact with dust and other impurities due to contact with multiple devices, resulting in uneven metallization appearance or substandard conductivity of the raw sheets.
Design a cleanroom device including a workbench and two cleanroom mechanisms. Each mechanism includes a conveying device, an antistatic device, a limiting device, a dust removal device, a dust-adhesive device, and a sheet-turning device. These devices perform step-by-step cleaning of the raw sheets to ensure that the raw sheets are processed under completely clean conditions.
It effectively removes impurities from the surface of the raw sheet, ensuring the appearance and performance quality of the raw sheet, and ensuring that the finished metallized product has a smooth appearance and qualified electrical conductivity.
Smart Images
Figure CN121491091A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the blank sheet processing technical field, in particular to a cleaning device and a cleaning method. BACKGROUND
[0002] During the batch production process, the green sheet will pass through multiple processes such as manual operation, transportation line body and transportation equipment during the green sheet processing process such as metal printing and lamination. During the contact with these devices, the green sheet will inevitably contact dust and other impurities. Moreover, because the blank sheet itself is sticky, it provides favorable conditions for the attachment of impurities. The blank sheet is easily affected by impurities, resulting in uneven appearance or unqualified conductivity during the metallization process. SUMMARY
[0003] The purpose of the present application is to provide a cleaning device and a cleaning method to alleviate the technical problem of abnormality of uneven appearance or unqualified conductivity of the blank sheet caused by impurities in the prior art.
[0004] In order to solve the above technical problems, the technical solution provided by the present application is as follows: In a first aspect, the cleaning device provided by the present application is arranged upstream of a blank sheet processing device and is used to process the blank sheet before it is transported to the processing device; the cleaning device comprises a workbench and two cleaning mechanisms; Both of the two cleaning mechanisms are installed on the workbench and are arranged in a spaced manner along the conveying direction of the blank sheet; Each of the cleaning mechanisms comprises a conveying device, and an electrostatic removal device, a limiting device, a dust removal device, a dust sticking device and a sheet turning device arranged in sequence along the conveying direction of the blank sheet; the conveying direction of the conveying device is arranged along the conveying direction of the blank sheet and is located below the electrostatic removal device, the limiting device, the dust removal device, the dust sticking device and the sheet turning device.
[0005] Further, the conveying device comprises a conveying support frame, an entrance sensing element, a conveying belt and a sheet loading platform; The conveying support frame is installed on the workbench, and the entrance sensing element is installed on the side wall of the conveying support frame and is located at the entrance of the conveying device; The conveying belt is installed on the conveying support frame, and the conveying belt can be lifted and lowered; The sheet loading platform is located in the conveying support frame and can move between the electrostatic removal device, the dust removal device and the dust sticking device along the conveying direction of the blank sheet; the initial position of the sheet loading platform is located below the electrostatic removal device.
[0006] Further, the sheet loading platform adsorbs the blank sheet.
[0007] Further, the limiting device comprises a limiting block and a limiting induction element. The limiting block is installed on the side wall of the static electricity removing device away from the entrance of the conveying device, for limiting the movement of the dough sheet carried by the conveying belt. The limiting induction element is installed inside the conveying support frame.
[0008] Further, the dust removing device comprises a dust removing head, which is liftable.
[0009] Further, the dust sticking device comprises a dust sticking roller and a dust sticking paper roll, the dust sticking roller is liftable and rotatable. The dust sticking paper roll is located above the dust sticking roller and is attached to the outer wall of the dust sticking roller. The dust sticking roller drags the dust sticking paper roll to rotate by friction.
[0010] Further, the dough sheet turning device comprises a clamping jaw, which is liftable, openable and closeable, and rotatable. The clamping jaw rotates to drive the dough sheet to turn 180°.
[0011] Further, the dough sheet turning device further comprises a position induction element and a stop cylinder, the position induction element is installed on the inner wall of the conveying support frame, and the position induction element is signal connected with a driving assembly for driving the clamping jaw. The stop cylinder is installed inside the conveying support frame and is oppositely arranged with the position induction element, for limiting the movement of the dough sheet carried by the conveying belt. The stop cylinder and the position induction element are both located on the side of the clamping jaw away from the dust sticking device.
[0012] Further, the two cleaning mechanisms are arranged in a straight line.
[0013] In the second aspect, the present application provides a cleaning method using the cleaning equipment as described in any one of the above aspects, comprising the following steps: the dough sheet passes through the two cleaning mechanisms in sequence; in a single cleaning mechanism, the dough sheet passes through the static electricity removing device, the dust removing device, the dust sticking device and the dough sheet turning device in sequence under the driving of the conveying device.
[0014] Further, in a single cleaning mechanism, after the dough sheet enters the entrance of the conveying device through the conveying belt, the entrance induction element senses the incoming dough sheet, and when the limiting induction element of the limiting device senses the arrival of the dough sheet, the conveying belt stops rotating and lowers to drop the dough sheet onto the dough sheet loading table in front of the limiting block, while the dust removing device lowers to wait; After the dough sheet completely enters the dough sheet loading table, the static electricity removing device located directly above the dough sheet and the dough sheet loading table performs the static electricity removing function on the dough sheet, while the dough sheet loading table adsorbs the dough sheet. Once the adsorption sensor detects that the adsorption is firm, the conveyor belt will move the static-eliminating blank and the plate carrier horizontally to the bottom of the dust removal device that has finished descending. The stage moves back and forth under the dust removal head a customized number of times to remove dust from the surface of the raw blank. During the movement, the dust removal head works continuously. After the dust removal is completed, the dust removal head stops working and the dust removal device rises. The conveyor belt moves the dust-removed raw blanks and the substrate to the dust-adhesion device for dust adhesion. After the dusting process is completed, the dusting device rises, the conveyor belt rises, the conveyor belt lifts the blank sheet, and the blank carrier moves horizontally to the feeding position below the static eliminator, waiting for the next feeding; the dust-treated blank sheet is conveyed by the conveyor belt into the gripper of the flipping device, and the rotary cylinder drives the two grippers to rotate the blank sheet clamped by the grippers 180° clockwise to complete the flipping.
[0015] Based on the above technical solutions, the technical effects achievable by this invention can be analyzed as follows: In a first aspect, the cleanroom equipment provided by the present invention is located upstream of the raw sheet processing equipment and is used to process the raw sheets before they are conveyed to the processing equipment; it includes a workbench and two cleanroom mechanisms; both cleanroom mechanisms are installed on the workbench and are spaced apart along the conveying direction of the raw sheets; each cleanroom mechanism includes a conveying device, and an antistatic device, a limiting device, a dust removal device, a dust adhesion device and a sheet turning device arranged sequentially along the conveying direction of the raw sheets, wherein the conveying direction of the conveying device is arranged along the conveying direction of the raw sheets and is located below the antistatic device, the limiting device, the dust removal device, the dust adhesion device and the sheet turning device.
[0016] The cleanroom equipment includes a workbench and two identical cleanroom mechanisms. Each cleanroom mechanism includes a conveying device, an antistatic device, a limiting device, a dust removal device, a dust adhesion device, and a flipping device. These devices are all securely fastened above the workbench, with the conveying device located directly below the other devices for conveying the raw blanks. The other devices are placed in the following order: antistatic device, limiting device, dust removal device, dust adhesion device, and flipping device. The limiting device limits the raw blank, allowing it to be initially cleaned below the antistatic device. The dust removal device removes dust from the raw blank for preliminary cleaning. The dust adhesion device adheres dust to the raw blank for fine cleaning. The flipping device flips the raw blank so that the two cleanroom mechanisms can perform antistatic, dust removal, and dust adhesion on two sides of the raw blank respectively, ensuring that the side of the raw blank entering and exiting the cleanroom is the same. This cleanroom equipment is used in the process before raw slices are processed, so as to ensure that the raw slices are processed under completely clean conditions, thereby ensuring the appearance and performance quality of the finished product.
[0017] Secondly, the cleaning method provided by the present invention, which utilizes the clean equipment described in the first aspect, includes the following steps: the raw sheet passes through two cleaning mechanisms in sequence; in a single cleaning mechanism, the raw sheet passes through an antistatic device, a dust removal device, a dust adhesion device, and a sheet turning device in sequence under the drive of a conveying device.
[0018] This cleaning method is the previous step in the processing of raw sheet. By passing the raw sheet through two cleaning mechanisms in sequence, both surfaces of the raw sheet are cleaned, thus enabling the raw sheet to be processed under completely clean conditions, thereby ensuring the appearance and performance quality of the finished product. Attached Figure Description
[0019] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments of this application will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0020] Figure 1 This is a schematic diagram of the cleanroom equipment provided in the embodiments of this application from a first-view perspective; Figure 2 This is a schematic diagram of the cleanroom equipment provided in the embodiments of this application from a second perspective; Figure 3 A schematic diagram of the cleanroom equipment provided in the embodiments of this application from a second perspective (the static electricity removal device in the upstream cleanroom mechanism is hidden). Figure 4 This is a schematic diagram of the structure of the conveyor support frame in the cleanroom equipment provided in the embodiments of this application; Figure 5 This is a schematic diagram of the structure of the dust-adhesion device in the cleanroom equipment provided in the embodiments of this application; Figure 6 This is a schematic diagram of the structure of the flipping device in the cleanroom equipment provided in the embodiments of this application.
[0021] icon: 1-Workbench; 2-Cleanroom facilities; 21-Conveying device; 211-Conveying support frame; 212-Entry sensor; 213-Conveyor belt; 214-Plate carrier; 215-Conveying lifting unit; 22- Static electricity eliminator; 23-Limit device; 231-Limit block; 232-Limit sensor; 24 - Dust removal device; 25-Dust-adhesive device; 251-Dust-adhesive roller; 252-Dust-adhesive paper roll; 253-Dust-adhesive support component; 254-Dust-adhesive lifting component; 26-Flipping device; 261-Gripper; 262-Position sensor; 263-Stop cylinder; 264-Flipping support; 265-Flipping lifting device; 267-Rotating cylinder. Detailed Implementation
[0022] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0023] In the description of this application, it should be noted that the terms "inner" and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. They are used only for the convenience of describing this application and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0024] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "setup" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.
[0025] Example 1 During mass production, the raw sheets undergo multiple processes, including manual handling, transport lines, and transport equipment, during metal printing and lamination. In these interactions, the raw sheets inevitably come into contact with dust and other impurities. The inherent stickiness of the raw sheets further facilitates impurity adhesion. Therefore, to further reduce the negative impact of impurities on the raw sheets during metal printing and lamination, a cleanroom device is proposed for use in the pre-processing stage. This device ensures that the raw sheets are processed under completely clean conditions, thereby guaranteeing the appearance and performance quality of the finished product and reducing quality issues such as uneven metallization or substandard conductivity caused by impurities.
[0026] The cleanroom equipment provided in this embodiment of the invention is located upstream of the raw sheet processing equipment and is used to process the raw sheets before they are conveyed to the processing equipment. It includes a workbench 1 and two cleanroom mechanisms 2. Both cleanroom mechanisms 2 are installed on the workbench 1 and are spaced apart along the conveying direction of the raw sheets. Each cleanroom mechanism 2 includes a conveying device 21 and an antistatic device 22, a limiting device 23, a dust removal device 24, a dust adhesion device 25, and a sheet turning device 26 arranged sequentially along the conveying direction of the raw sheets. The conveying direction of the conveying device 21 is arranged along the conveying direction of the raw sheets and is located below the antistatic device 22, the limiting device 23, the dust removal device 24, the dust adhesion device 25, and the sheet turning device 26.
[0027] Specifically, the conveying device 21, the static eliminator 22, the limiting device 23, the dust removal device 24, the dust adhesion device 25, and the flipping device 26 are all fastened to the top of the workbench 1 by corresponding support structures.
[0028] See Figures 1 to 3 The cleanroom equipment includes a workbench 1 and two cleanroom mechanisms 2 with the same process. Each cleanroom mechanism 2 includes a conveying device 21, an antistatic device 22, a limiting device 23, a dust removal device 24, a dust adhesion device 25, and a sheet turning device 26. The conveying device 21, the antistatic device 22, the limiting device 23, the dust removal device 24, the dust adhesion device 25, and the sheet turning device 26 are all correspondingly fixed above the workbench 1, and the conveying device 21 is located directly below the other devices for conveying the raw blank sheet. The other devices are arranged in the following order: static eliminator 22, limiting device 23, dust removal device 24, dust adhesion device 25, and flipping device 26. The limiting device 23 is used to limit the raw sheet, allowing it to be positioned below the static eliminator 22 for initial static removal. The dust removal device 24 removes dust from the raw sheet, achieving preliminary cleaning. The dust adhesion device 25 adheres dust to the raw sheet, achieving fine cleaning. The flipping device 26 flips the raw sheet, enabling two cleaning mechanisms 2 to perform static elimination, dust removal, and dust adhesion on two sides of the raw sheet respectively, ensuring that the side of the raw sheet entering and exiting the clean equipment is the same. This clean equipment is used in the pre-processing stage of raw sheet production, ensuring that the raw sheet is processed under completely clean conditions, thereby guaranteeing the appearance and performance quality of the finished product.
[0029] The structure of cleanroom equipment is described in detail below: In the optional solution provided in the embodiments of the present invention, the two cleanroom units 2 are arranged in a straight line.
[0030] Specifically, see Figure 1 The inlet of the conveying device 21 of the downstream clean unit 2 is opposite to the outlet of the conveying device of the upstream clean unit 2, and the conveying directions of the two conveying devices 21 of the clean unit 2 are the same.
[0031] The two cleanroom units 2 are arranged in a straight line, so that the raw blank can directly enter the downstream cleanroom unit 2 after it comes out of the upstream cleanroom unit 2, avoiding the need for the conveyor device 21 to turn, thus improving the efficiency of the cleanroom equipment.
[0032] In the optional embodiment of the present invention, the conveying device 21 includes a conveying support frame 211, an inlet sensor 212, a conveyor belt 213, and a wafer carrier 214; the conveying support frame 211 is installed on the workbench 1, the inlet sensor 212 is installed on the side wall of the conveying support frame 211 and is located at the entrance of the conveying device 21; the conveyor belt 213 is installed on the conveying support frame 211 and can be raised and lowered; the wafer carrier 214 is located inside the conveying support frame 211 and can move between the static eliminator 22, the dust removal device 24, and the dust adhesion device 25 along the conveying direction of the blank, and the initial position of the wafer carrier 214 is located below the static eliminator 22.
[0033] Specifically, the conveyor support frame 211 is mounted on the worktable 1, and conveyor belts 213 are installed on two opposite side walls of the conveyor support frame 211. The two conveyor belts 213 run synchronously to drive the blank sheet to translate. See Figure 4 The conveyor support frame 211 includes a conveyor lifting section 215, on which a conveyor belt 213 is mounted and can be raised and lowered. The lifting and lowering of the conveyor belt 213 can be achieved using a cylinder or other driving device, which will not be elaborated further here. The inlet sensor 212 can be configured as a diffuse reflection photoelectric sensor, a through-beam photoelectric sensor, a laser displacement sensor, or a vision sensor, etc., to detect whether the blank has entered the conveyor device 21. The wafer carrier 214 is fixedly installed inside the conveyor support frame 211, and its height is higher than the height of the conveyor belt 213 at its lowest point but lower than the height of the limiting device 23. This allows the conveyor belt 213 to transport the blank to the wafer carrier 214, and the lowering of the conveyor belt 213 allows the blank to fall onto the wafer carrier 214. Furthermore, the limiting device 23 will not obstruct the wafer carrier 214 during its translation. The translation of the wafer carrier 214 can be achieved using a cylinder or motor, which will not be elaborated further here.
[0034] After the blank enters the entrance of the conveying device 21, the entrance sensor 212 senses the arrival of the blank, and the conveyor belt 213 starts to rotate. When the blank reaches the limiting device 23, the conveyor belt 213 stops rotating and drives the blank to descend. The descended blank lands on the carrying platform 214 located in front of the limiting device 23. Due to the action of the limiting device 23, the blank and the carrying platform 214 are aligned in the center. The carrying platform 214 supports the blank and drives the blank to move between the static elimination device 22, the dust removal device 24 and the dust adhesion device 25, thereby realizing the static elimination, dust removal and dust adhesion of the blank.
[0035] In the optional solution provided in the embodiments of the present invention, the slide stage 214 adsorbs the preform.
[0036] Specifically, the stage 214 is equipped with an adsorption sensor to detect whether the green sheet is firmly adsorbed. The adsorption sensor can be a vacuum pressure sensor, flow sensor, or force sensor, etc. The stage 214 has a vacuum suction cup connected to a vacuum source, which provides negative pressure to the suction cup to adsorb the green sheet; the vacuum suction cup can be a dedicated porous ceramic suction cup, etc., and is not limited here. Of course, a design where the stage 214 has adsorption holes connected to a vacuum source should also be within the scope of protection of this embodiment.
[0037] The plate carrier 214 adsorbs the blank, so that the blank can be stably installed on the plate carrier 214, thereby enabling the plate carrier 214 to drive the blank to move horizontally, and the dust removal device 24 and the dust adhesion device 25 will not cause the blank to detach from or deviate from the plate carrier 214.
[0038] In the optional solution provided by the embodiment of the present invention, the limiting device 23 includes a limiting block 231 and a limiting sensor 232; the limiting block 231 is installed on the side wall of the static elimination device 22 away from the entrance of the conveying device 21, and is used to limit the movement of the blank sheet carried by the conveyor belt 213; the limiting sensor 232 is installed inside the conveying support frame 211.
[0039] Specifically, the limiting block 231 is fastened to the side wall of the static eliminator 22 and protrudes downward from the static eliminator 22 to limit the movement of the green sheet. The limiting sensor 232 can be configured as a diffuse reflection photoelectric sensor, a through-beam photoelectric sensor, a laser displacement sensor, or a vision sensor, etc., to detect the position of the green sheet.
[0040] When the limiting sensor 232 of the limiting device 23 senses the arrival of the blank, the conveyor belt 213 stops rotating and descends. The blank in the descending conveyor belt 213 lands on the waiting plate platform 214 located in front of the limiting block 231. The height of the plate platform 214 is higher than that of the conveyor belt 213, which has descended to the lower limit position. Due to the action of the limiting block 231, the blank and the plate platform 214 are aligned in the front, back, left and right. The plate platform 214 adsorbs the blank. After the adsorption sensor detects that the adsorption is firm, it prepares to move horizontally towards the dust removal device 24.
[0041] In the optional solution provided in the embodiments of the present invention, the dust removal device 24 includes a dust removal head, which is liftable.
[0042] Specifically, as the conveyor belt 213 descends, the dust removal head also descends simultaneously to wait. It is worth noting that the bottom surface of the dust removal head is 2-5mm from the surface of the raw blank. The dust removal head can be raised and lowered using a cylinder or other driving device; no limitation is made here. Furthermore, the wafer carrier 214 can reciprocate within the working range of the dust removal head to perform thorough dust removal.
[0043] The dust removal head removes dust from the surface of the raw blank.
[0044] In an optional embodiment of the present invention, the dust-adhesive device 25 includes a dust-adhesive roller 251 and a dust-adhesive paper roll 252. The dust-adhesive roller 251 can be raised, lowered, and rotated. The dust-adhesive paper roll 252 is located above the dust-adhesive roller 251 and is attached to the outer wall of the dust-adhesive roller 251. The dust-adhesive roller 251 pulls the dust-adhesive paper roll 252 to rotate by friction.
[0045] Specifically, see Figure 5 The dust-adhesion device 25 includes a dust-adhesion support 253, a dust-adhesion lifting component 254, and a lifting drive component. The dust-adhesion support 253 is mounted on the worktable 1, and the dust-adhesion lifting component 254 is mounted above the dust-adhesion support 253. The lifting drive component is connected to the dust-adhesion lifting component 254 to drive the dust-adhesion lifting component to move up and down. The dust-adhesion roller 251 and the dust-adhesion paper roll 252 are both mounted on the dust-adhesion lifting component 254, and the dust-adhesion paper roll 252 slides in fit with the dust-adhesion lifting component 254. The dust-adhesion device 25 descends to a height where the dust-adhesion roller 251 overlaps with the unfinished product area by 0.02-0.03 mm. Furthermore, to prevent the dust-adhesive roller 251 from sticking too tightly to the green sheet, a dust-adhesive roller 251 with a viscosity greater than that of the green sheet is selected. The adsorption force of the sheet carrier 214 on the green sheet assists the green sheet and the dust-adhesive roller 251 in contact dust adhesion and smooth separation after dust adhesion, and the green sheet will not shift due to contact with the dust-adhesive roller 251.
[0046] Directly above the dust-adhesive roller 251 is the dust-adhesive paper roll 252. The dust-adhesive paper roll 252 always falls naturally under its own weight and remains in contact with the dust-adhesive roller 251. During the dust-adhesive process of the blank sheet moving back and forth with the dust-adhesive roller 251, the dust-adhesive roller 251 rotates due to friction. At the same time, the dust-adhesive roller 251 drives the dust-adhesive paper roll 252 to rotate. The dust-adhesive paper roll 252 removes the dust that the dust-adhesive roller 251 picks up when it comes into contact with the blank sheet. After the dust-adhesive process is completed, the dust-adhesive device 25 rises, the conveyor device 21 rises, the conveyor belt 213 lifts the blank sheet, and the sheet carrier 214 moves horizontally to the initial position of the sheet feeding position, waiting for the next sheet feeding.
[0047] In the optional solution provided by the embodiments of the present invention, the flipping device 26 includes a gripper 261, which can be raised, lowered, opened, closed and rotated; the rotation of the gripper 261 causes the green blank to flip 180°.
[0048] Specifically, see Figure 6The flipping device 26 includes two grippers 261, which are spaced apart along the conveying direction of the blank sheet. The flipping device 26 includes a flipping support 264, a flipping lifting member 265, and a drive assembly. The drive assembly includes a lifting cylinder, an opening / closing cylinder, and a rotating cylinder 267. The flipping support 264 is mounted on the worktable 1, the flipping lifting member 265 is located above the flipping support 264, and the lifting cylinder is installed between the flipping support 264 and the flipping lifting member 265 to drive the flipping lifting member 265 to lift and lower. The rotating cylinder 267 is mounted on the flipping lifting member 265 and connected to the two grippers 261, enabling the two grippers 261 to rotate simultaneously around the axis of the rotating cylinder 267. Each gripper 261 is connected to an opening / closing cylinder, which controls the opening and closing of the gripper 261. The gripper 261 is used to hold and flip the blank.
[0049] In an optional embodiment of the present invention, the flipping device 26 further includes a position sensor 262 and a stop cylinder 263. The position sensor 262 is installed on the inner wall of the conveyor support frame 211 and is signal-connected to the drive assembly of the drive gripper 261. The stop cylinder 263 is installed inside the conveyor support frame 211 and is arranged opposite to the position sensor 262 to limit the movement of the blank sheet carried by the conveyor belt 213. Both the stop cylinder 263 and the position sensor 262 are located on the side of the gripper 261 away from the dust-adhesive device 25.
[0050] Specifically, the position sensing element 262 can be configured as a diffuse reflection photoelectric sensor, a through-beam photoelectric sensor, a laser displacement sensor, or a vision sensor, etc., to detect the position of the blank sheet. In this embodiment, the position sensing element 262 and the stop cylinder 263 are arranged opposite to each other. The stop cylinder 263 is used to restrict the movement of the blank sheet, and is pre-raised to a limit position before the blank sheet runs to the flipping device 26; after the gripper 261 flips the blank sheet, the stop cylinder 263 retracts so that the blank sheet can enter the next process.
[0051] The blank sheet is conveyed by conveyor belt 213 into the two open grippers 261 of the flipping device 26. The position sensor 262 detects the position of the blank sheet. Because the stop cylinder 263 is raised to limit the position in advance, after the blank sheet is stopped, the left and right center of the blank sheet coincides with the left and right center of the two grippers 261. The two grippers 261 simultaneously clamp the non-product areas on both sides of the blank sheet and raise it to a certain height (> half the length of the rotating edge of the non-product area). After being raised, the rotary cylinder 267 drives the two grippers 261 and the blank sheet clamped by the grippers 261 to rotate 180° clockwise or counterclockwise to complete the flipping. After flipping, the back of the blank sheet is facing up. The stop cylinder 263 retracts, and the conveyor belt 213 transports the blank sheet into the next process.
[0052] Example 2 The cleaning method provided in this embodiment of the invention is applied to the clean equipment described in Embodiment 1, and includes the following steps: the raw sheet passes through two clean mechanisms 2 in sequence; in a single clean mechanism 2, the raw sheet passes through an antistatic device 22, a dust removal device 24, a dust adhesion device 25 and a sheet turning device 26 in sequence under the drive of a conveying device 21.
[0053] This cleaning method is the previous step in the processing of raw sheet. By passing the raw sheet through two cleaning mechanisms 2 in sequence, both surfaces of the raw sheet are cleaned, thereby enabling the raw sheet to be processed under completely clean conditions, thus ensuring the appearance and performance quality of the finished product.
[0054] The following details the steps of the cleaning method: Step S1: After the blank enters the inlet of the conveyor 21, the inlet sensor 212 senses the arrival of the blank, and the conveyor belt 213 starts to rotate. When the limit sensor 232 of the limit device 23 senses the arrival of the blank, the conveyor belt 213 stops rotating and descends. The dust removal device 24 descends at the same time to wait. The blank in the descending conveyor belt 213 lands on the waiting plate 214 located in front of the limit block 231. The height of the plate 214 is higher than that of the conveyor belt 213, which has descended to the lower limit position. Due to the action of the limit device 23, the blank and the plate 214 are aligned in the front, back, left and right. The plate 214 adsorbs the blank. After the adsorption sensor detects that the adsorption is firm, it prepares to move towards the dust removal device 24.
[0055] Step S2: The static eliminator is located directly above the blank sheet and the carrier stage 214. The static eliminator is 5 to 10 mm away from the surface of the carrier stage 214, and the center of the blank sheet is aligned with the center of the static eliminator 22. The blank sheet and the carrier stage 214 move synchronously and first pass through the static eliminator 22, which is always in operation.
[0056] Step S3: After passing through the static eliminator 22, the wafer stage 214 moves horizontally to below the dust removal device 24, which has been lowered to a certain height, to perform dust removal on the raw wafer. The bottom of the dust removal head is 2-5mm away from the surface of the raw wafer.
[0057] Step S4: The stage 214 reciprocates below the dust removal head a predetermined number of times to remove dust from the surface of the raw blank. During the movement, the dust removal head continues to work. After the dust removal is completed, the dust removal head stops working and the dust removal device 24 is raised.
[0058] Step S5: The tray stage 214 moves horizontally to the front of the dust-adhesion device 25. During the horizontal movement, when the non-product area of the green sheet reaches directly below the dust-adhesion roller 251, the dust-adhesion device 25 descends until the dust-adhesion roller 251 overlaps with the product area of the green sheet by 0.02mm-0.03mm. The device reciprocates a custom number of times, continuously keeping the green sheet in contact with the dust-adhesion roller 251. To prevent the dust-adhesion roller 251 from sticking too tightly to the green sheet, a dust-adhesion roller 251 with a viscosity greater than that of the green sheet is selected. The adsorption force of the tray stage 214 on the green sheet assists in contact-based dust adhesion between the green sheet and the dust-adhesion roller 251, ensuring smooth separation after dust adhesion. Contact with the dust-adhesion roller 251 will not cause any damage. When the blank sheet shifts, the dust-adhesive roller 251 is directly above the dust-adhesive paper roll 252. The dust-adhesive paper roll 252 always falls naturally under its own weight and remains in contact with the dust-adhesive roller 251. During the dust-adhesive process of the blank sheet and the dust-adhesive roller 251 moving back and forth, the dust-adhesive roller 251 rotates due to friction. At the same time, the dust-adhesive roller 251 drives the dust-adhesive paper roll 252 to rotate. The dust-adhesive paper roll 252 removes the dust that the dust-adhesive roller 251 picks up when it comes into contact with the blank sheet. After the dust-adhesive process is completed, the dust-adhesive device 25 rises, the conveyor belt 213 rises, the conveyor belt 213 lifts the blank sheet, and the sheet carrier 214 moves horizontally to the feeding position below the static electricity removal device 22, waiting for the next feeding.
[0059] Step S6: The blank sheet is conveyed by the conveyor belt 213 into the two open grippers 261 of the flipping device 26. The arrival sensor 262 detects whether the blank sheet has arrived. Because the stop cylinder 263 is raised to a limiting position in advance, after the blank sheet is stopped, the left and right center of the blank sheet coincides with the left and right center of the two grippers 261. The two grippers 261 simultaneously clamp the non-product areas on both sides of the blank sheet and raise it to a certain height (> half the length of the rotating edge of the non-product area). After being raised, the rotary cylinder 267 drives the two grippers 261 and the blank sheet clamped by the grippers 261 to rotate 180° clockwise to complete the flipping. After flipping, the back of the blank sheet is facing up, and the original front when it entered the equipment is facing down.
[0060] Step S7: The flipping device 26 descends to its original position, the gripper 261 opens, the stop cylinder 263 at the flipping device 26 falls, and the green blank enters the entrance of the conveying device 21 in the next clean unit 2 to carry out the static electricity removal, dust removal, dust adhesion and flipping process on the back of the green blank.
[0061] Step S8: The green blank sheet with both sides cleaned is placed with its original front side facing up when it enters the equipment, so that it enters and exits the equipment from the same side. The cleaning is then completed, and the blank sheet leaves the equipment.
[0062] It should be noted that, where there is no conflict, the features in the embodiments of this application can be combined with each other.
[0063] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.
Claims
1. A cleanroom device, positioned upstream of a raw sheet processing device, for processing raw sheets transported to the processing device; characterized in that, include: Workbench (1) and two cleanroom units (2); Both of the cleanroom mechanisms (2) are installed on the workbench (1) and are spaced apart along the conveying direction of the blank sheet; Each of the cleanroom units (2) includes a conveying device (21) and an antistatic device (22), a limiting device (23), a dust removal device (24), a dust adhesion device (25), and a flipping device (26) arranged sequentially along the conveying direction of the raw sheet. The conveying device (21) is arranged along the conveying direction of the raw sheet and is located below the antistatic device (22), the limiting device (23), the dust removal device (24), the dust adhesion device (25), and the flipping device (26).
2. The cleanroom equipment according to claim 1, characterized in that, The conveying device (21) includes a conveying support frame (211), an inlet sensor (212), a conveyor belt (213), and a plate stage (214). The conveying support frame (211) is installed on the workbench (1), and the entrance sensor (212) is installed on the side wall of the conveying support frame (211) and located at the entrance of the conveying device (21). The conveyor belt (213) is mounted on the conveyor support frame (211), and the conveyor belt (213) is liftable; The plate carrier (214) is located inside the conveying support frame (211) and can move between the static eliminator (22), the dust removal device (24) and the dust adhesion device (25) along the conveying direction of the blank sheet. The initial position of the plate carrier (214) is below the static eliminator (22).
3. The cleanroom equipment according to claim 2, characterized in that, The stage (214) adsorbs the preform.
4. The cleanroom equipment according to claim 3, characterized in that, The limiting device (23) includes a limiting block (231) and a limiting sensor (232); The limiting block (231) is installed on the side wall of the entrance of the static elimination device (22) away from the conveying device (21) to restrict the movement of the blank sheet carried by the conveyor belt (213); The limiting sensor (232) is installed inside the conveying support frame (211).
5. The cleanroom equipment according to claim 4, characterized in that, The dust removal device (24) includes a dust removal head that is liftable.
6. The cleanroom equipment according to claim 5, characterized in that, The dust-adhesive device (25) includes a dust-adhesive roller (251) and a dust-adhesive paper roll (252), wherein the dust-adhesive roller (251) is liftable and rotatable; The adhesive paper roll (252) is located above the adhesive roller (251) and is in contact with the outer wall of the adhesive roller (251); The sticky roller (251) pulls the sticky paper roll (252) to rotate by friction.
7. The cleanroom equipment according to claim 6, characterized in that, The flipping device (26) includes a gripper (261), which is capable of lifting, opening and closing and rotating; The gripper (261) rotates, causing the blank to flip 180°.
8. The cleanroom equipment according to claim 7, characterized in that, The flipping device (26) further includes a position sensor (262) and a stop cylinder (263). The position sensor (262) is installed on the inner wall of the conveying support frame (211). The position sensor (262) is signal-connected to the drive assembly that drives the gripper (261). The stop cylinder (263) is installed inside the conveyor support frame (211) and is arranged opposite to the positioning sensor (262) to limit the movement of the blank sheet carried by the conveyor belt (213); The stop cylinder (263) and the position sensor (262) are both located on the side of the gripper (261) away from the dust-adhesive device (25).
9. The cleanroom equipment according to any one of claims 1-8, characterized in that, The two cleanroom units (2) are arranged in a straight line.
10. A cleaning method for a cleanroom apparatus according to any one of claims 1-9, characterized in that, include: The raw blanks pass through two cleaning mechanisms in sequence (2); In a single clean unit (2), the blank sheet passes through an antistatic device (22), a dust removal device (24), a dust adhesion device (25), and a sheet turning device (26) in sequence under the drive of a conveying device (21).
11. The cleaning method according to claim 10, characterized in that, include: In a single cleanroom, after the blank sheet enters the inlet of the conveyor device via the conveyor belt, the inlet sensor detects the arrival of the blank sheet, and when the limit sensor of the limit device detects the arrival of the blank sheet, the conveyor belt stops rotating and descends to lower the blank sheet onto the plate carrier located in front of the limit block. At the same time, the dust removal device descends to wait. After the preform is fully inserted into the carrier stage, the static eliminator located directly above the preform and the carrier stage removes static electricity from the preform, while the carrier stage adsorbs the preform. Once the adsorption sensor detects that the adsorption is firm, the conveyor belt will move the static-eliminating blank and the plate carrier horizontally to the bottom of the dust removal device that has finished descending. The stage moves back and forth under the dust removal head a customized number of times to remove dust from the surface of the raw blank. During the movement, the dust removal head works continuously. After the dust removal is completed, the dust removal head stops working and the dust removal device rises. The conveyor belt moves the dust-removed raw blanks and the substrate to the dust-adhesion device for dust adhesion. After the dusting process is completed, the dusting device rises, the conveyor belt rises, the conveyor belt lifts the blank sheet, and the blank carrier moves horizontally to the feeding position below the static eliminator, waiting for the next feeding; the dust-treated blank sheet is conveyed by the conveyor belt into the gripper of the flipping device, and the rotary cylinder drives the two grippers to rotate the blank sheet clamped by the grippers 180° clockwise to complete the flipping.