Fluid-driven adsorption device based on active elastic expansion membrane and working method of fluid-driven adsorption device

Abstract

The invention discloses a fluid-driven adsorption device based on an active elastic expansion membrane and a working method of the fluid-driven adsorption device, and belongs to the technical field of flexible machinery and bionic adsorption. The device comprises a buffer gas chamber supporting part, a gas chamber communicating part, an integrated gas path main body part, an edge sealing and pressing part, an active elastic expansion film, an auxiliary adhesion part, a center pressing part and a center locking ring. The active elastic expansion film is controlled to expand and bulge under the limitation of the edge sealing and pressing part and the central pressing part and forms a closed cavity with the adsorbed surface, the volume of the closed cavity changes along with deformation, and negative pressure is established in the cavity to generate adsorption; and after positive pressure input is relieved, the film body retracts to relieve adsorption. According to the device, an external vacuum source and external preloading are not needed, and the device has the capacity of cross-medium adaptation, rapid and reversible switching and sealing matching of a curved surface and certain roughness; the mechanical arm end effector is suitable for grabbing and carrying in the environments of air, water, oil and the like of the mechanical arm end effector.

Description

Technical Field

[0001] This invention belongs to the field of flexible mechanics and biomimetic adsorption technology, and particularly relates to a fluid-driven adsorption device based on an active elastic expansion membrane and its working method. Background Technology

[0002] Surface bonding technology is widely used in various engineering applications, mainly combining the surfaces of two materials according to certain requirements. Surface bonding technology features high strength, compact structure, simple process, and low cost. However, it also has drawbacks such as poor repeatability and difficulty in detachment. Furthermore, existing bonding structures struggle to guarantee the precision of the device surface, potentially leaving indentations or chemical residues, which can affect subsequent processes. Detachment from bonded devices also presents challenges; direct peeling or using rigid objects to separate the adhesive surface can damage the workpiece surface during transport. For example, patent CN117260585A discloses a biomimetic adhesive pad suitable for high-temperature vacuum environments, which maintains adhesion even under high-temperature vacuum conditions. This biomimetic adhesive pad is precision-manufactured from a high-temperature resistant polymer substrate, featuring a micropillar structure that allows for good contact with smooth surfaces. Van der Waals forces are used to achieve adhesion, fixation, and transport of the biomimetic adhesive pad to the smooth surface. However, this adhesive pad is difficult to detach from the bonded workpiece. For handling precision workpieces, the complex detachment process increases the likelihood of damage and reduces transport efficiency. CN116895596A discloses a suction cup-based gripper for wafer handling robots, which features non-destructive wafer handling and efficient desorption. This suction cup gripper includes a robotic body, a fixed end, a suction end, and air channels. Atmospheric pressure presses the suction cup firmly against the wafer surface, providing tension for wafer handling and facilitating wafer pickup and drop. However, this device cannot generate suction force in a vacuum environment, thus failing to meet the requirements for handling precision workpieces such as wafers and screens in a vacuum environment. Summary of the Invention

[0003] This invention provides a fluid-driven adsorption device based on an active elastic expansion membrane and its working method. The device can grasp and transport in multiple media environments such as air, water, oil, and vacuum. It can form a stable negative pressure adsorption force through positive pressure drive without the need for an external negative pressure source, while also taking into account annular deadhesion. It can also achieve highly reliable adaptive adsorption and rapid switching on curved and rough surfaces.

[0004] To achieve the above objectives, the present invention adopts the following technical solution: A fluid-driven adsorption device based on an active elastic expansion membrane includes a buffer chamber support component, a chamber communication component, an integrated gas path main component, an edge sealing and pressing component, an active elastic expansion membrane, an auxiliary adhesion component, a central pressing component, and a central locking ring. The chamber communication component is connected to the air vents of the buffer chamber support component. The integrated gas path main component is installed below the buffer chamber support component. The active elastic expansion membrane is installed below the integrated gas path main component. The edge sealing and pressing component cooperates with the outer ring of the integrated gas path component to achieve an outer edge seal of the active elastic expansion membrane. The upper end face of the central pressing component and the inner edge of the integrated gas path main component cooperate with the central locking ring to achieve an inner edge seal of the active elastic expansion membrane. The auxiliary adhesion component is adhered to the lower end face of the central pressing component.

[0005] The buffer chamber support component has a hollow cylindrical structure, forming a buffer chamber inside to stabilize airflow and reduce pressure fluctuations. An air hole is provided on the cylindrical wall, communicating with the air chamber to achieve uniform fluid distribution. A connecting bolt is provided at the upper end of the buffer chamber support component for fixed connection to the end of the robotic arm or the device mounting base. The cylindrical wall bears the overall structural load and maintains coaxiality.

[0006] The air chamber connecting component is a high-pressure excitation passage. One end of it is connected to an external high-pressure air source, and the other end is connected to the air hole of the buffer air chamber support component. The driving intensity and response speed inside the control device are controlled by adjusting the input pressure.

[0007] The integrated gas path main component is the core of gas distribution and structural support. It has several air holes at the bottom, a stepped sealing structure at the top edge, and a fixed through hole at the center for connection with the central pressing component. The outer edge of the integrated gas path main component has an outer sealing groove, and the inner edge has an inner sealing groove. The gas path groove passes through the air holes to uniformly guide the high-pressure gas from the buffer gas chamber to each air hole and act on the back of the active elastic expansion membrane. This ensures that the fluid excitation is uniformly applied to the membrane, achieving stable deformation and high airtight connection.

[0008] The edge sealing and pressing component has a ring-shaped structure, and its upper surface contacts the outer edge of the active elastic expansion membrane to achieve a pressing seal. Eight connecting screw holes are provided around the component for connection and fixation to the buffer chamber support component and the integrated air circuit main body component via fastening bolts. The outer edge of this component has a sealing protrusion, which cooperates with the stepped sealing structure on the outer edge of the integrated air circuit main body component to form a clamping structure, achieving a seal on the outer side of the active elastic expansion membrane.

[0009] The active elastic expansion membrane is generally annular in shape. The main body of the ring is provided with an elastic stamping membrane, which is the thinnest part and is used to generate the dominant deformation. The inner edge is provided with an inner edge sealing and pressing part, which forms a clamping structure with the central pressing part. The outer edge is provided with an outer edge sealing and pressing part, which forms a clamping structure with the edge sealing and pressing part.

[0010] The central clamping component has a disc-shaped structure. Its central upper surface is provided with a connecting boss with a threaded surface for engaging with the central locking ring. The front of the disc forms a working plane that contacts the inner edge of the active elastic expansion membrane to form an airtight seal. The central lower surface is provided with a positioning post for engaging with the positioning hole of the auxiliary adhesive component, thereby ensuring coaxial assembly and repeatability.

[0011] The central locking ring is circular with a central threaded through hole for engaging with the connecting boss of the central pressing component. Four semi-circular grooves are evenly distributed on the outer edge of the ring to facilitate locking and torque transmission. The central locking ring engages with the central pressing component via threads to apply axial pressure during assembly, ensuring tight contact between the central pressing component and the inner edge of the active elastic expansion membrane, creating a double-layer clamping structure that effectively prevents leakage during the negative pressure adsorption stage. Under the axial force of the central locking ring, the central pressing component applies a stable pre-tightening force to the central region of the membrane, ensuring reliable sealing.

[0012] The auxiliary adhesive component is made of adhesive silicone rubber and is disc-shaped. Its lower end face is the workpiece contact surface and is provided with an array of adhesive micropillars to enhance local sealing and adhesion. The center is provided with a positioning hole for positioning with the positioning column of the central pressing component. The upper end face is the device fixing surface and is fixedly connected to the central pressing component by adhesive.

[0013] The above-mentioned working method of the fluid-driven adsorption device based on an active elastic expansion membrane includes the following steps: After the external high-pressure gas is input through the gas chamber connecting component, the gas first passes through the buffer gas chamber support component to balance the pressure, and then is evenly distributed to the back of the active elastic expansion membrane through the integrated gas circuit main component. The active elastic expansion membrane undergoes controlled bulging deformation under the constraint of the inner and outer edge clamping structure, the cavity volume increases rapidly, the internal pressure decreases, and a negative pressure cavity is formed to adsorb the workpiece. After the high-pressure input is removed, the active elastic expansion membrane quickly retracts due to its own elasticity, the cavity volume decreases, the pressure rises, and the workpiece is released.

[0014] The auxiliary adhesion components play a role in interface sealing and buffering support during adsorption and desorption, ensuring a stable and reliable process.

[0015] Beneficial effects: This invention provides a fluid-driven adsorption device and its working method based on an active elastic expansion membrane, which has the following advantages compared with the prior art: 1. The clamping structure of the present invention constitutes a double-layer sealing system, which significantly improves the airtightness of the device, enabling it to work stably for a long time in multi-media environments such as vacuum, air and liquid; it has cross-media adaptability, rapid reversible switching and sealing matching capability for curved surfaces and certain roughness. 2. The active elastic expansion membrane of the present invention can form a controllable negative pressure cavity by positive pressure driving, without the need for an external vacuum source, and has a simple structure and low energy consumption. 3. The buffer chamber and guide wall structure of the present invention can effectively reduce pressure pulsation and improve the pressure uniformity and response stability of the membrane. 4. The micropillar array structure of the auxiliary adhesion component of the present invention enhances the initial sealing performance, prevents the medium from seeping into the negative pressure cavity, and improves the adhesion stability in a multi-media environment.

[0016] 5. The adsorption device of this invention adopts a modular design, which facilitates maintenance, replacement and adaptation to working conditions, and has good reliability and repeatable service life. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of the fluid-driven adsorption device based on an active elastic expansion membrane in an embodiment of the present invention. Figure 2 This is a schematic diagram illustrating the morphological changes of the active elastic expansion membrane under fluid drive in an embodiment of the present invention. Figure 3 This is a schematic diagram of the integrated gas path main component in an embodiment of the present invention; Figure 4 This is a schematic diagram of the edge sealing and pressing component in an embodiment of the present invention; Figure 5 This is a schematic diagram of the structure of the active elastic expansion membrane in an embodiment of the present invention; Figure 6 This is a schematic diagram of the structure of the auxiliary adhesion component in an embodiment of the present invention; Figure 7 This is a schematic diagram of the structure of the central clamping component in an embodiment of the present invention; Figure 8 This is a schematic diagram of the structure of the central locking ring in an embodiment of the present invention; Figure 9 This is a schematic diagram illustrating the process of adsorption of workpieces by the adsorption device in media such as air, water, and oil in an embodiment of the present invention. Figure 10 This is a graph showing the adhesion data of the adsorption device under different media in the embodiments of the present invention; Figure 11 This is a graph showing the adhesion force generated by the adsorption device on substrates with different curvatures in an embodiment of the present invention. Figure 12 The graph shows the adsorption force test results of the adsorption device in a vacuum environment in an embodiment of the present invention. In the figure: 1-Buffer chamber support component, 2-Cavity connecting component, 3-Integrated air circuit main body component, 4-Edge sealing and pressing component, 5-Active elastic expansion membrane, 6-Auxiliary adhesion component, 7-Fasting bolt; 8-Central pressing component; 9-Central locking ring, 1(1)-Air hole, 1(2)-Connecting bolt; 1(3)-Buffer chamber, 1(4)-Support wall, 3(1)-Air hole; 3(2)-Stepped sealing structure; 3(3)-Outer edge sealing groove; 3(4)-Air circuit groove; 3(5)- )-Inner edge sealing groove; 3(6)-Fixing through hole; 4(1)-Annular plane; 4(2)-Connecting screw hole; 4(3)-Sealing protrusion; 5(1)-Elastic stamping membrane; 5(2)-Inner edge sealing pressing part; 5(3)-Outer edge sealing pressing part; 6(1)-Working contact surface; 6(2)-Positioning hole; 6(3)-Device fixing surface; 8(1)-Connecting boss; 8(2)-Working plane; 8(3)-Positioning post; 9(1)-Central threaded through hole; 9(2)-Semi-circular groove. Detailed Implementation

[0018] The present invention will now be described in detail with reference to the accompanying drawings and specific embodiments: like Figures 1-8 As shown, a fluid-driven adsorption device based on an active elastic expansion membrane is described. The boundary dimension of the active elastic expansion membrane 5 is smaller than the dimension of the stepped sealing structure 3 (2) of the integrated gas path main component 3. The outer edge pressing part 5 (3) of the active elastic expansion membrane is fitted onto the integrated gas path main component 3 to form an interference fit. The connecting boss 8 (1) of the central pressing part 8 passes through the fixed through hole 3 (6) and is screwed with the central locking ring 9, so that it forms a reliable pressing and airtightness between the working plane 8 (2) and the inner edge sealing pressing part 5 (2) of the active elastic expansion membrane 5.

[0019] The edge sealing clamping component 4 is aligned with the integrated air circuit main component 3 and fixed by the fastening bolt 7. The sealing protrusion 4 (3) and the stepped sealing structure 3 (2) together squeeze the outer edge sealing clamping part 5 (3) of the active elastic expansion membrane, thereby forming an outer layer clamping seal. Rubber sealing rings are embedded in the outer edge sealing groove 3 (3) and the inner edge sealing groove 3 (5) to enhance the overall air tightness.

[0020] The assembled membrane structure is bolted to the buffer air chamber support component 1, and the air chamber connecting component 2 is mechanically engaged with the air hole 1 (1) of the buffer air chamber support component 1. To ensure airtightness at the connection, sealant can be applied to the interface. The positioning hole 6 (2) of the auxiliary adhesive component 6 is matched with the positioning post 8 (3) of the central pressing component 8, and its device fixing surface 6 (3) is fixed to the working plane 8 (2) of the central pressing component 8 by adhesive. The overall length of the adhesive micro-pillar structure of the auxiliary adhesive component 6 is 1 mm, the radius of the adhesive column is 1 mm, the columns are arranged in a hexagonal shape, each column is spaced 1.5 mm apart, and the overall thickness of the adhesive pad is 1.5 mm.

[0021] The external high-pressure device is connected to the gas chamber communication component 2, and the whole machine is fixed to the end of the mechanical arm by the connecting bolt 1 (2), thus forming a complete fluid-driven adsorption system.

[0022] like Figure 9 As shown, in environments with media such as air, water, and oil, the active elastic expansion membrane 5 serves as the main adsorption actuator. When the device approaches the workpiece, the gap between the membrane and the workpiece surface does not exceed 2 mm. High-pressure fluid is introduced through the air chamber connecting component 2, causing the elastic stamping membrane 5 (1) at the center of the active elastic membrane to bulge outward. After contacting the workpiece surface, it forms a sealed cavity. As the fluid continues to be input, the cavity volume increases, and the internal pressure is lower than the external pressure, thereby generating a negative pressure adsorption force to achieve adhesion. After the high-pressure source is removed, the membrane quickly retracts under the action of elastic restoring force, the negative pressure cavity disappears, and the workpiece is detached. In environments without media, the auxiliary adhesion component 6 serves as the main adhesion actuator. When the device approaches the workpiece, a pre-pressure of about 10 N is applied to make its working contact surface 6 (1) fit tightly against the workpiece, relying on van der Waals forces to achieve adhesion. Subsequently, high-pressure fluid is introduced into the device, causing the elastic stamping membrane 5 (1) of the active elastic membrane 5 to bulge out and deform, generating a force and peeling torque on the workpiece opposite to the adhesion direction, thereby achieving workpiece detachment.

[0023] like Figure 10 As shown, the device can generate controllable and stable adhesion to planar objects. Within an excitation pressure range of 25 kPa to 150 kPa, the device achieves controllable adhesion of approximately 53.26 N to 91.72 N at atmospheric pressure, approximately 77.36 N to 102.18 N underwater, and 79.32 N to 126.37 N in oil. This example demonstrates the controllable and stable adhesion performance of the device to planar objects in different media. Figure 10 This indicates that the Shore hardness of the active elastic modulus 5 is 50A.

[0024] like Figure 11As shown, the device generates stable and controllable adhesion to curved objects with different curvatures under normal pressure. The device can stably achieve stable and controllable adhesion on objects with a curvature radius greater than 30 mm within the excitation pressure difference range of 0-150 kPa. In this process, while the device's active elastic expansion membrane 5 generates a negative pressure cavity for adsorption in the curved area, the workpiece contact surface 6 (1) of the auxiliary adhesion component 6 partially adheres to the top of the curved surface, achieving secondary adhesion through van der Waals forces, thereby improving the overall adsorption stability. This example demonstrates the controllable and stable adhesion performance of the device to curved objects under normal pressure, wherein the initial contact force between the device and the workpiece is 20 N.

[0025] like Figure 12 As shown, the auxiliary adhesion component can generate an adjustable adhesive force of 0-37.26N in a vacuum environment with a pre-compression range of 0-50N, where the saturation pre-compression is approximately 36.26N. Under normal pressure, the auxiliary adhesion component generates an adjustable adhesive force of approximately 0-16.12N under a pre-compression of 0-50N. The results indicate that the auxiliary adhesion component exhibits better adhesion performance in a vacuum environment, compensating for the failure of negative pressure adsorption in vacuum or low-pressure environments. This example demonstrates the controllable and stable adhesion performance of the device to planar objects in a vacuum environment.

[0026] The above description is only a preferred embodiment of the present invention. Equivalent substitutions or improvements made by those skilled in the art without departing from the spirit and principles of the present invention should be considered as falling within the protection scope of the present invention.

Claims

1. A fluid-driven adsorption device based on an actively elastic expanding membrane, characterized in that, The device includes a buffer chamber support component, a chamber communication component, an integrated air circuit main body component, an edge sealing and pressing component, an active elastic expansion membrane, an auxiliary adhesive component, a central pressing component, and a central locking ring. One end of the chamber communication component is connected to an external air source, and the other end is connected to an air vent in the buffer chamber support component. The integrated air circuit main body component is installed below the buffer chamber support component. The active elastic expansion membrane is installed below the integrated air circuit main body component, and the edge sealing and pressing component cooperates with the outer ring of the integrated air circuit component to achieve an outer edge seal of the active elastic expansion membrane. The upper end face of the central pressing component, the inner edge of the integrated air circuit main body component, and the central locking ring cooperate to achieve an inner edge seal of the active elastic expansion membrane. The auxiliary adhesive component is bonded to the lower end face of the central pressing component.

2. The fluid-driven adsorption device based on an active elastic expansion membrane according to claim 1, characterized in that, The buffer chamber support component has a hollow cylindrical structure, which forms a buffer chamber inside to stabilize airflow and reduce pressure fluctuations. An air hole is provided on the cylindrical wall and is connected to the air chamber communication component to achieve uniform fluid distribution. The upper end of the buffer chamber support component is provided with a connecting bolt for fixed connection with the end of the robotic arm or the device mounting base. The cylindrical wall is used to bear the overall structural load and maintain coaxiality.

3. The fluid-driven adsorption device based on an active elastic expansion membrane according to claim 1, characterized in that, The integrated air circuit main body component has a fixed through hole at its center for connection with the central pressing component; the top outer edge is provided with a stepped sealing structure, the bottom outer edge is provided with an outer sealing groove, and the bottom inner edge is provided with an inner sealing groove.

4. The fluid-driven adsorption device based on an actively elastic expanding membrane according to claim 1 or 3, characterized in that, The integrated air circuit main component is provided with several air holes and air passages. The air passage grooves pass through the air holes and are used to uniformly guide high-pressure gas from the buffer air chamber to each air hole and act on the back of the active elastic expansion membrane.

5. The fluid-driven adsorption device based on an actively elastic expanding membrane according to claim 1 or 3, characterized in that, The edge sealing and pressing component has a ring structure with eight connecting screw holes around its perimeter for connection and fixation with the buffer air chamber support component and the integrated air circuit main component by fastening bolts; the outer edge has a sealing protrusion, which cooperates with the stepped sealing structure on the outer edge of the integrated air circuit main component to form a clamping structure, thereby achieving sealing on the outside of the active elastic expansion membrane.

6. The fluid-driven adsorption device based on an actively elastic expanding membrane according to claim 1, characterized in that, The active elastic expansion membrane is generally annular in shape. The main body of the ring is provided with an elastic stamping membrane, which is the thinnest part and is used to generate the dominant deformation. The inner edge is provided with an inner edge sealing and pressing part, which forms a clamping structure with the central pressing part. The outer edge is provided with an outer edge sealing and pressing part, which forms a clamping structure with the edge sealing and pressing part.

7. The fluid-driven adsorption device based on an active elastic expansion membrane according to claim 1, characterized in that, The central clamping component has a disc-shaped structure. Its central upper surface is provided with a connecting boss with a threaded surface for engaging with the central locking ring. The front of the disc forms a working plane that contacts the inner edge of the active elastic expansion membrane to form an airtight seal. The central lower surface is provided with a positioning post for engaging with the positioning hole of the auxiliary adhesive component, thereby ensuring coaxial assembly and repeatability.

8. The fluid-driven adsorption device based on an active elastic expansion membrane according to claim 1, characterized in that, The central locking ring is circular and has a central threaded through hole for engaging with the connecting boss of the central pressing component. Four semi-circular grooves are evenly distributed on the outer edge of the ring to facilitate force application for locking and torque transmission. The central locking ring engages with the central pressing component through threads to apply axial clamping force during assembly, so that the central pressing component presses the inner edge of the active elastic expansion membrane to form a tight contact, thus constructing a double-layer clamping structure.

9. The fluid-driven adsorption device based on an active elastic expansion membrane according to claim 1, characterized in that, The adsorption device includes an auxiliary adhesive component; the auxiliary adhesive component is made of adhesive silicone rubber, and is disc-shaped. Its lower end face is the workpiece contact surface, and it is provided with an array of adhesive micropillars to enhance local sealing and adhesion. It has a positioning hole in the center for positioning with the positioning column of the central pressing component, and its upper end face is the device fixing surface, which is fixedly connected to the central pressing component by an adhesive.

10. The method of operating the fluid-driven adsorption device based on an active elastic expansion membrane according to any one of claims 1-9, characterized in that, Includes the following steps: After the external high-pressure gas is input through the gas chamber connecting component, the gas first passes through the buffer gas chamber support component to balance the pressure, and then is evenly distributed to the back of the active elastic expansion membrane through the integrated gas circuit main component. The active elastic expansion membrane undergoes controlled bulging deformation under the constraint of the inner and outer edge clamping structure, the cavity volume increases rapidly, the internal pressure decreases, and a negative pressure cavity is formed to adsorb the workpiece. After the high-pressure input is removed, the active elastic expansion membrane quickly retracts due to its own elasticity, the cavity volume decreases, the pressure rises, and the workpiece is released. The auxiliary adhesion components play a role in interface sealing and buffering support during adsorption and desorption, ensuring a stable and reliable process.

Images