Superconducting suspension guide rail structure and system for high-precision three-coordinate equipment

Abstract

The invention relates to the technical field of superconducting equipment, in particular to a superconducting suspension guide rail structure and system for high-precision three-coordinate equipment, which comprises a superconducting magnet track, a magnetic suspension block, a measuring arm, a shielding cover, a measuring platform, a probe system, a magnetizing and demagnetizing operation system and a control system, the plurality of superconducting coil modules are configured to form a magnetic field gradient on the superconducting magnet track through differential current control, and actively restrain the position and posture of the magnetic suspension block in the guide rail direction, so that the magnetic suspension block runs in a non-contact suspension manner; according to the invention, a superconductive magnetic suspension technology is adopted to replace an air floating block, multi-coil differential control is combined, air source dependence and friction are eliminated, the repeated positioning precision is improved, external interference is reduced through a shielding structure, and the stability of equipment is improved through a self-adaptive control system, so that high-precision and high-stability three-coordinate measurement is realized.

Description

Technical Field

[0001] This invention relates to the field of superconducting equipment technology, and in particular to a superconducting levitation guide rail structure and system for high-precision coordinate measuring machines. Background Technology

[0002] Coordinate measuring machines (CMMs) are key equipment used for high-precision dimensional inspection in the industrial field. Currently, the CMM in a CMM system is almost always in the form of air-bearing blocks, which are usually installed in the guide rail system. The air-bearing blocks in the CMM are mainly concentrated near the main support arm of the guide rail system and the contact surface of the guide rail, respectively undertaking the functions of bearing, guiding and clamping, to ensure the high precision and stable operation of the equipment.

[0003] The working principle of the air-float block is that compressed air is blown out from the small hole in the middle of the air-float block, forming an air cushion layer with the assistance of the pressure equalization groove. Generally, the pressure equalization groove is two very small circular grooves. Under the action and reaction forces, a lifting force is generated. The gap between the air-float block and the guide rail is generally between a few micrometers and tens of micrometers. The flatness requirement of the slider for the guide rail is within 3 micrometers. If this tolerance is exceeded, there will be abnormal noise when the slider moves quickly. If the movement speed is too fast, the three-coordinate air-float block will lock up instantly, which has serious consequences and can cause damage to a large area of ​​marble surface.

[0004] In practical applications, the characteristics of air-bearing pads are quite complex and are affected by many factors. Among them, the stability of the air supply to the air-bearing pad directly affects the air film thickness, and air pressure fluctuations will cause changes in suspension height, resulting in a decrease in measurement accuracy. At the same time, the air-bearing blocks need to be cleaned and maintained regularly; otherwise, dust will clog the throttling orifice, causing uneven air film or bearing tilting and reducing rigidity. Moreover, there is micro-friction between the air-bearing blocks and the guide rails, which affects the accuracy of motion repeatability and positioning.

[0005] To address the aforementioned problems, this invention provides a superconducting levitation guide rail structure and system for high-precision coordinate measuring machines. By replacing the air-bearing block with superconducting magnetic levitation technology and combining it with multi-coil differential control, the dependence on air source and friction are eliminated, improving repeatability and positioning accuracy. Furthermore, external interference is reduced through a shielding structure, and the stability of the equipment is improved through an adaptive control system, thereby achieving high-precision and high-stability coordinate measuring machine measurements. Summary of the Invention

[0006] In order to overcome the problems of friction affecting the accuracy of motion repeatability and positioning in the process of using air-floating block structure for motion support and guidance in existing coordinate measuring machines, and the fact that environmental factors can easily affect the measurement accuracy and device stability.

[0007] The technical solution of this invention is: a superconducting levitation guide rail structure for high-precision coordinate measuring machines, comprising: The superconducting magnet track consists of multiple superconducting coil modules arranged along the length of the track. Each superconducting coil module can be independently energized to generate a controllable first magnetic field. A magnetic levitation block is provided with a superconducting coil inside to generate a second magnetic field. The first magnetic field and the second magnetic field repel each other, causing the magnetic levitation block to be suspended on the superconducting magnet track. The magnetic levitation block is configured to move along a predetermined path on the guide rail by being constrained by the interaction of the magnetic fields. The measuring arm is fixedly connected to the magnetic levitation block and is used to support the measuring machine or measuring probe; The shielding cover, made of DT4 electrical pure iron, surrounds the superconducting magnet track and magnetic levitation block to shield the magnetic field inside, so that the external magnetic field strength is less than 10 Gs. The multiple superconducting coil modules are configured to: form a magnetic field gradient on the superconducting magnet track through differential current control, actively constrain the position and attitude of the magnetic levitation block in the guide rail direction, so that it can levitate and run without contact.

[0008] Preferably, the multiple superconducting coil modules of the superconducting magnet track of the present invention are controlled by differential current to form a magnetic field gradient on the track, thereby actively constraining the position and attitude of the magnetic levitation block, that is, constraining the horizontal displacement and pitch angle of the magnetic levitation block, so that the magnetic levitation block can maintain contactless and stable suspension. After being energized, the superconducting coil modules generate a superimposed magnetic field, and the magnetic levitation block is suspended to a set height position under the action of repulsive force, and the position deviation is calibrated by the magnetic field gradient; at the same time, the measuring arm moves with the magnetic levitation block to complete the measurement task, thereby eliminating air film fluctuations and mechanical friction, and the suspension height can be controlled by current to improve repeatability and positioning accuracy, and no air source maintenance is required.

[0009] Preferably, the superconducting coil modules in the superconducting magnet track are arranged in a matrix, with each module including a high-temperature superconducting coil and an independent cooling unit. The cooling unit is used to maintain the low-temperature state of the superconducting coil. The matrix-arranged coil modules are configured to generate a uniform magnetic field, and the magnetic field strength is locally fine-tuned by adjusting the current to compensate for track flatness errors. The control system can adjust the current of specific coil modules according to preset track flatness data to make the magnetic field strength distribution uniform, thereby overcoming the influence of track processing errors on suspension stability and improving the adaptability of the equipment.

[0010] Preferably, the superconducting coil in the magnetic levitation block is made of strip-shaped high-temperature superconducting material and embedded in a non-magnetic metal matrix; the magnetic levitation block also includes a position sensor for real-time detection of the levitation height and offset of the magnetic levitation block relative to the track; wherein, the sensor data is fed back to the control system, and when the detected height deviation is greater than a certain threshold, the system adjusts the coil current for compensation, thereby avoiding the problem of brittleness and fragility of superconducting materials, and improving the levitation control accuracy through real-time feedback.

[0011] Preferably, the shielding cover has a multi-layer structure, including an inner DT4 electrical pure iron layer and an outer aluminum heat dissipation layer, with a vacuum insulation cavity between the two layers for simultaneously shielding the magnetic field and controlling the temperature; the seams of the shielding cover are electromagnetically sealed; during operation, the shielding cover simultaneously shields the magnetic field and conducts heat, and the vacuum layer reduces heat exchange, thereby reducing magnetic field leakage and avoiding the influence of the external measurement environment on the equipment.

[0012] Preferably, the measuring arm is connected to the magnetic levitation block via an active vibration damping mechanism, which includes a piezoelectric ceramic actuator and an accelerometer to counteract vibrations caused by the movement of the measuring machine in real time. The measuring arm is made of carbon fiber composite material. The accelerometer detects vibration signals, and the control system drives the piezoelectric actuator to generate an anti-phase force to counteract the vibration, thereby reducing the impact of external vibrations and ensuring the stability of the equipment.

[0013] A superconducting levitation system for high-precision coordinate measuring machines includes: The aforementioned superconducting levitation rail structure; A measuring platform for placing the workpiece to be measured, the measuring platform being made of marble or ceramic material and equipped with a temperature compensation module; The probe system, mounted on the measuring arm, is used to perform high-precision measurements; The magnetization and demagnetization operating system is electrically connected to the superconducting coil of the superconducting levitation rail structure and is used to realize excitation and demagnetization operations through current control. The control system is communicatively connected to the magnetization and demagnetization operating system, the probe system, and the position sensor, and is used to adjust the suspension parameters and measurement path in real time.

[0014] Preferably, the magnetization and demagnetization operating system includes soft-start and soft-stop circuits, configured to: gradually increase the current to a set value during excitation, and gradually decrease the current to zero during demagnetization, to prevent shock vibrations caused by sudden changes in the magnetic field; The system also includes an overcurrent protection module for automatically cutting off the power supply when the current is abnormal; During excitation, the current increases to the set value in a ramp manner, and decreases symmetrically during demagnetization; it automatically cuts off power in case of overcurrent; thus preventing sudden changes in the magnetic field from causing the magnetic levitation block to impact the track and extending the service life of the equipment.

[0015] Preferably, the control system adopts a closed-loop feedback mechanism, calculates the levitation height and position deviation of the magnetic levitation block in real time based on the data from the position sensor, and adjusts the current of the superconducting coil through a PID algorithm to maintain levitation stability; the control system also integrates an adaptive learning module to optimize levitation parameters based on historical measurement data.

[0016] The PID formula is: ; in, For output current, For positional deviation, , , These are the tuning parameters; The adaptive learning module uses a neural network algorithm to optimize parameters based on historical data; the control system samples sensor data every millisecond, calculates the deviation, and outputs a current correction value.

[0017] Preferably, the temperature compensation module of the measurement platform includes an embedded temperature sensor and a heating / cooling unit to maintain a constant surface temperature of the platform; the temperature sensor monitors the thermal deformation of the platform, and the compensation module adjusts the temperature.

[0018] Preferably, the system further includes a calibration module for automatically performing levitation track flatness calibration and probe zero-position calibration upon startup; the calibration module uses a laser interferometer or grating ruler as a reference standard; upon startup, it performs automatic calibration, compares the measured data with the reference value, and corrects system errors.

[0019] The beneficial effects of this invention are: This invention employs a soft-start excitation system via a magnetization and demagnetization mechanism to levitate the magnetic levitation block. The control system then adjusts the magnetic field based on sensor data to maintain stable levitation. The measuring arm drives the probe to perform measurements, while an active vibration damping mechanism suppresses vibration. Finally, demagnetization stops the process, completing the automated workflow. By replacing the air-bearing block with superconducting magnetic levitation technology and combining it with multi-coil differential control, the invention eliminates air source dependence and friction, improving repeatability and positioning accuracy. Furthermore, a shielding structure reduces external interference, and an adaptive control system enhances equipment stability. This results in high-precision, high-stability coordinate measuring machine (CMM) measurement. Attached Figure Description

[0020] Figure 1 The diagram shown is a three-dimensional structural schematic of the superconducting levitation guide rail structure for high-precision coordinate measuring machines according to the present invention. Figure 2 The diagram shown is a schematic representation of the top surface structure of the superconducting levitation guide rail for a high-precision coordinate measuring machine according to the present invention. Figure 3 The diagram shown is a first cross-sectional view of the superconducting levitation guide rail structure for a high-precision coordinate measuring machine according to the present invention. Figure 4 The diagram shown is a second cross-sectional view of the superconducting levitation guide rail structure for a high-precision coordinate measuring machine according to the present invention. Figure 5 The diagram shown is a schematic representation of the shielding structure of the superconducting levitation guide rail for high-precision coordinate measuring machine according to the present invention. Figure 6 The diagram shown is a schematic flow chart of the superconducting levitation system for high-precision coordinate measuring machines according to the present invention. Explanation of reference numerals in the attached drawings: 1. Superconducting magnet track; 2. Magnetic levitation block; 3. Measuring arm; 4. Shielding cover; 5. Measuring platform; 6. Probe system; 41. Aluminum heat dissipation layer; 42. Electrical pure iron layer; 43. Vacuum insulation cavity. Detailed Implementation

[0021] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0022] Please see Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 This invention provides an embodiment: a superconducting levitation guide rail structure for a high-precision coordinate measuring machine, comprising: The superconducting magnet track 1 consists of multiple superconducting coil modules arranged along the length of the track. Each superconducting coil module can be independently energized to generate a controllable first magnetic field. The magnetic levitation block 2 is equipped with a superconducting coil inside to generate a second magnetic field. The first magnetic field and the second magnetic field repel each other, causing the magnetic levitation block 2 to be suspended on the superconducting magnet track 1. The magnetic levitation block 2 is configured to move along a predetermined path of the track by being constrained by the interaction of the magnetic fields. Measuring arm 3 is fixedly connected to magnetic levitation block 2 and is used to support the measuring machine or measuring probe; The shielding cover 4, made of DT4 electrical pure iron, surrounds the superconducting magnet track 1 and the magnetic levitation block 2, and is used to shield the magnetic field inside, so that the external magnetic field strength is less than 10Gs. Among them, multiple superconducting coil modules are configured to: form a magnetic field gradient on the superconducting magnet track 1 through differential current control, actively constrain the position and attitude of the magnetic levitation block 2 in the guide rail direction, so that it can levitate and run without contact.

[0023] In this invention, multiple superconducting coil modules of the superconducting magnet track 1 are controlled by differential current to form a magnetic field gradient on the track, thereby actively constraining the position and attitude of the magnetic levitation block 2, that is, constraining the horizontal displacement and pitch angle of the magnetic levitation block 2, so that the magnetic levitation block 2 can maintain contactless and stable suspension. After being energized, the superconducting coil modules generate a superimposed magnetic field, and the magnetic levitation block 2 is suspended to a set height position under the action of repulsive force, and the position deviation is calibrated by the magnetic field gradient; at the same time, the measuring arm 3 moves with the magnetic levitation block 2 to complete the measurement task, thereby eliminating air film fluctuations and mechanical friction, and the suspension height can be controlled by current to improve the repeatability of positioning accuracy, and no air source maintenance is required.

[0024] Furthermore, the superconducting coil modules in the superconducting magnet track 1 are arranged in a matrix. Each module includes a high-temperature superconducting coil and an independent cooling unit. The cooling unit is used to maintain the low temperature of the superconducting coil. The matrix-arranged coil modules are configured to generate a uniform magnetic field, and the magnetic field strength is locally fine-tuned by current regulation to compensate for track flatness errors. The control system can adjust the current of specific coil modules according to preset track flatness data to make the magnetic field strength distribution uniform, thereby overcoming the influence of track processing errors on suspension stability and improving the adaptability of the equipment.

[0025] Furthermore, the superconducting coil in the magnetic levitation block 2 is made of strip-shaped high-temperature superconducting material and embedded in a non-magnetic metal matrix; the magnetic levitation block 2 also includes a position sensor for real-time detection of the levitation height and offset of the magnetic levitation block 2 relative to the track; the sensor data is fed back to the control system, and when the detected height deviation is greater than a certain threshold, the system adjusts the coil current for compensation, thereby avoiding the problem of brittleness and easy damage of the superconducting material, and improving the levitation control accuracy through real-time feedback.

[0026] Furthermore, the shielding cover 4 has a multi-layer structure, including an inner DT4 electrical pure iron layer 42 and an outer aluminum heat dissipation layer 41. A vacuum insulation cavity 43 is provided between the two layers to simultaneously shield the magnetic field and control the temperature. The seams of the shielding cover 4 are electromagnetically sealed. During operation, the shielding cover 4 simultaneously shields the magnetic field and conducts heat. The vacuum layer reduces heat exchange, thereby reducing magnetic field leakage and avoiding the influence of the external measurement environment on the equipment.

[0027] Furthermore, the measuring arm 3 is connected to the magnetic levitation block 2 through an active vibration damping mechanism, which includes a piezoelectric ceramic actuator and an accelerometer to counteract the vibration caused by the movement of the measuring machine in real time. The measuring arm 3 is made of carbon fiber composite material. The accelerometer detects the vibration signal, and the control system drives the piezoelectric actuator to generate an anti-phase force to counteract the vibration, thereby reducing the impact of external vibration and ensuring the stability of the equipment.

[0028] Please see Figure 6 A superconducting levitation system for high-precision coordinate measuring machines, comprising: The aforementioned superconducting levitation rail structure; Measurement platform 5 is used to place the workpiece to be measured. Measurement platform 5 is made of marble or ceramic material and is equipped with a temperature compensation module. The probe system 6 is mounted on the measuring arm 3 and is used to perform high-precision measurements; The magnetization and demagnetization operating system is electrically connected to the superconducting coil of the superconducting levitation rail structure and is used to realize excitation and demagnetization operations through current control. The control system communicates with the magnetization and demagnetization operating system, probe system 6, and position sensor to adjust the suspension parameters and measurement path in real time.

[0029] Furthermore, the magnetization and demagnetization operating system includes soft-start and soft-stop circuits, configured to gradually increase the current to a set value during excitation and gradually decrease the current to zero during demagnetization to prevent shock vibrations caused by sudden changes in the magnetic field. The system also includes an overcurrent protection module, which automatically cuts off the power supply when the current is abnormal; During excitation, the current increases to the set value in a ramp manner and decreases symmetrically during demagnetization; it automatically cuts off power during overcurrent; thus preventing sudden changes in the magnetic field from causing the magnetic levitation block 2 to impact the track and extending the service life of the equipment.

[0030] Furthermore, the control system adopts a closed-loop feedback mechanism, which calculates the levitation height and position deviation of the magnetic levitation block 2 in real time based on the data from the position sensor, and adjusts the current of the superconducting coil through a PID algorithm to maintain levitation stability; the control system also integrates an adaptive learning module to optimize levitation parameters based on historical measurement data.

[0031] The PID formula is: ; in, For output current, For positional deviation, , , These are the tuning parameters; The adaptive learning module uses a neural network algorithm to optimize parameters based on historical data; the control system samples sensor data every millisecond, calculates the deviation, and outputs a current correction value.

[0032] Furthermore, the temperature compensation module of the measurement platform 5 includes an embedded temperature sensor and a heating / cooling unit to maintain a constant surface temperature of the platform; the temperature sensor monitors the thermal deformation of the platform, and the compensation module adjusts the temperature.

[0033] Furthermore, the system also includes a calibration module, which automatically performs levitation track flatness calibration and probe zero-position calibration upon startup; the calibration module uses a laser interferometer or grating ruler as a reference standard; it performs automatic calibration upon startup, compares the measured data with the reference value, and corrects system errors.

[0034] During operation, after the system is powered on, the soft-start circuit in the magnetization and demagnetization operating system gradually increases the current of the superconducting coil module to the set value, causing the superconducting magnet track 1 to generate a controllable first magnetic field. At the same time, the superconducting coil inside the magnetic levitation block 2 generates a second magnetic field. The magnetic field repulsion between the two magnetic fields achieves contactless levitation of the magnetic levitation block 2. During this process, the calibration module automatically performs the levitation track flatness calibration and probe zero-position calibration, using a laser interferometer or grating ruler as a reference to ensure the initial position accuracy of the magnetic levitation block 2 on the predetermined path of the guide rail. The multi-layer structure of the shielding cover 4 simultaneously activates the magnetic field shielding and temperature control functions, limiting the external magnetic field strength to below 10 Gs and reducing magnetic field leakage through electromagnetic sealing seams. During the measurement process, the control system, based on the real-time levitation height and offset data of the magnetic levitation block 2 detected by the position sensor, uses a closed-loop feedback mechanism and a PID algorithm to adjust the current of the superconducting coil module, forming a magnetic field gradient to actively constrain the position and attitude of the magnetic levitation block 2, ensuring that the measuring arm 3 carrying the probe system 6 moves smoothly along the predetermined path; the adaptive learning module optimizes the PID tuning parameters based on historical measurement data to improve levitation stability; at the same time, the piezoelectric ceramic actuator in the active vibration damping mechanism works in conjunction with the accelerometer to cancel the vibration caused by the movement of the measuring arm 3 in real time, minimizing the influence of external vibration; the temperature compensation module on the surface of the measuring platform 5 monitors the thermal deformation of the platform through an embedded temperature sensor and drives the heating / cooling unit to maintain a constant surface temperature of the platform, reducing the impact of thermal deformation on measurement accuracy; After completing the measurement task, the magnetization and demagnetization operating system performs a soft stop operation, gradually reducing the current of the superconducting coil module to zero to prevent shock vibrations caused by sudden changes in the magnetic field. The overcurrent protection module automatically cuts off the power supply when the current is abnormal to ensure system safety. At this time, the control system stops adjusting the suspension parameters in real time, and the magnetic levitation block 2 slowly descends to a safe position under the action of gravity. The shielding cover 4 continues to maintain the magnetic field shielding and temperature control functions until the system is completely powered off. Throughout the process, the independent cooling unit of the superconducting magnet track 1 maintains the low temperature state of the high-temperature superconducting coil to ensure the stability of the superconducting performance. Through the above steps, the present invention achieves high-precision and high-stability three-coordinate measurement, eliminates the air source dependence and mechanical friction problems of traditional air-floating blocks, and improves the repeatability and stability of the equipment.

[0035] Through the above steps, the magnetic levitation block 2 is levitated by soft-start excitation through the magnetization and demagnetization system. Then, the control system adjusts the magnetic field according to sensor data to maintain stable levitation. The measuring arm 3 drives the probe to perform measurement. During this process, the active vibration damping mechanism suppresses vibration. Finally, demagnetization stops the process, completing the automated process. By using superconducting magnetic levitation technology to replace the air levitation block, combined with multi-coil differential control, the dependence on air source and friction are eliminated, improving the repeatability of positioning accuracy. The shielding structure reduces external interference, and the adaptive control system improves the stability of the equipment. Thus, high-precision and high-stability coordinate measuring machine measurement is achieved.

[0036] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention.

Claims

1. A superconducting levitation guide rail structure for high-precision coordinate measuring machines, characterized in that: include: The superconducting magnet track (1) is composed of multiple superconducting coil modules arranged along the length of the track. Each superconducting coil module can be energized independently to generate a controllable first magnetic field. The magnetic levitation block (2) is equipped with a superconducting coil inside to generate a second magnetic field. The first magnetic field and the second magnetic field repel each other, causing the magnetic levitation block (2) to be suspended on the superconducting magnet track (1). The magnetic levitation block (2) is configured to move along a predetermined path of the guide rail by the interaction of magnetic fields. The measuring arm (3) is fixedly connected to the magnetic levitation block (2) and is used to carry the measuring machine or measuring probe; The shield (4), made of DT4 electrical pure iron, surrounds the superconducting magnet track (1) and the magnetic levitation block (2) to shield the magnetic field inside, so that the external magnetic field strength is less than 10Gs; The multiple superconducting coil modules are configured to: form a magnetic field gradient on the superconducting magnet track (1) by differential current control, actively constrain the position and attitude of the magnetic levitation block (2) in the guide rail direction, so that it can levitate without contact.

2. The superconducting levitation guide rail structure for high-precision coordinate measuring machines according to claim 1, characterized in that: The superconducting coil modules in the superconducting magnet track (1) are arranged in a matrix. Each module includes a high-temperature superconducting coil and an independent cooling unit. The cooling unit is used to maintain the low temperature state of the superconducting coil. The matrix-arranged coil modules are configured to generate a uniform magnetic field and to achieve local fine-tuning of the magnetic field strength through current adjustment, which is used to compensate for track flatness error.

3. The superconducting levitation guide rail structure for high-precision coordinate measuring machines according to claim 1, characterized in that: The superconducting coil in the magnetic levitation block (2) is made of strip-shaped high-temperature superconducting material and embedded in a non-magnetic metal matrix; the magnetic levitation block (2) also includes a position sensor for real-time detection of the levitation height and offset of the magnetic levitation block (2) relative to the track.

4. The superconducting levitation guide rail structure for high-precision coordinate measuring machines according to claim 1, characterized in that: The shield (4) has a multi-layer structure, including an inner DT4 electrical pure iron layer (42) and an outer aluminum heat dissipation layer (41). A vacuum heat insulation cavity (43) is provided between the two layers to shield the magnetic field and control the temperature at the same time. The seams of the shield (4) are electromagnetically sealed.

5. A superconducting levitation guide rail structure for a high-precision coordinate measuring machine according to claim 1, characterized in that: The measuring arm (3) is connected to the magnetic levitation block (2) through an active vibration damping mechanism, which includes a piezoelectric ceramic actuator and an acceleration sensor to counteract the vibration caused by the movement of the measuring machine in real time; the measuring arm (3) is made of carbon fiber composite material.

6. A superconducting levitation system for high-precision coordinate measuring machines, characterized in that, include: The superconducting levitation rail structure as described in any one of claims 1-5; The measuring platform (5) is used to place the workpiece to be measured. The measuring platform (5) is made of marble or ceramic material and is equipped with a temperature compensation module. The probe system (6) is mounted on the measuring arm (3) and is used to perform high-precision measurements; The magnetization and demagnetization operating system is electrically connected to the superconducting coil of the superconducting levitation rail structure and is used to realize excitation and demagnetization operations through current control. The control system is connected in communication with the magnetization and demagnetization operating system, the probe system (6) and the position sensor, and is used to adjust the suspension parameters and measurement path in real time.

7. A superconducting levitation system for a high-precision coordinate measuring machine according to claim 6, characterized in that: The magnetization and demagnetization operating system includes soft-start and soft-stop circuits, configured to: gradually increase the current to a set value during excitation, and gradually decrease the current to zero during demagnetization, to prevent shock vibrations caused by sudden changes in the magnetic field; The system also includes an overcurrent protection module for automatically cutting off the power supply when the current is abnormal.

8. A superconducting levitation system for a high-precision coordinate measuring machine according to claim 6, characterized in that: The control system adopts a closed-loop feedback mechanism, calculates the levitation height and position deviation of the magnetic levitation block (2) in real time based on the data of the position sensor, and adjusts the current of the superconducting coil through the PID algorithm to maintain levitation stability; the control system also integrates an adaptive learning module to optimize levitation parameters based on historical measurement data.

9. A superconducting levitation system for a high-precision coordinate measuring machine according to claim 6, characterized in that: The temperature compensation module of the measurement platform (5) includes an embedded temperature sensor and a heating / cooling unit to maintain a constant surface temperature of the platform.

10. A superconducting levitation system for a high-precision coordinate measuring machine according to claim 6, characterized in that: The system also includes a calibration module for automatically performing levitation track flatness calibration and probe zero-position calibration upon startup; the calibration module uses a laser interferometer or grating ruler as a reference.

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