Multi-dimensional inclined grating adjusting mechanism

Abstract

The invention provides a multi-dimensional inclined grating adjusting mechanism. The multi-dimensional inclined grating adjusting mechanism comprises a mounting base and a grating mounting seat arranged on the mounting base, the grating mounting seat is connected with the mounting base through adjusting assemblies which are arranged in a multi-stage nested manner; the adjusting assemblies at least comprise a first adjusting assembly, a second adjusting assembly and a third adjusting assembly; the first adjusting assembly is used for enabling the grating mounting seat to rotate around a first rotating shaft; the second adjusting assembly is used for enabling the grating mounting seat to translate along the first translation direction; the third adjusting assembly is used for enabling the grating mounting seat to move along the second translation direction; the fourth adjusting assembly is used for enabling the grating mounting seat to translate along a third translation direction; at least three of the first adjusting assembly, the second adjusting assembly, the third adjusting assembly and the fourth adjusting assembly are provided with locking structures. Through the arrangement, the grating mounting seat can realize composite adjustment of rotation and multi-direction translation, and locking structures are arranged on the at least three adjusting assemblies, so that the problems of device volume stacking, adjustment interference, easy drifting after adjustment and the like caused by insufficient maintenance after module stacking and adjustment are solved while multi-degree-of-freedom installation and adjustment are realized; and the requirements of an optical system on grating alignment and stability maintenance are met.

Description

Technical Field

[0001] This application relates to the field of optical equipment technology, and in particular to a multidimensional tilting grating adjustment mechanism. Background Technology

[0002] As a key spectroscopic / diffraction element in spectral analysis, interferometry, and precision optical detection systems, the working state of a grating is closely related to its relative position and orientation with the incident beam. To meet the system assembly and alignment requirements, engineering practices typically employ optical mounts, translation stages, tilt stages, or multi-dimensional combination adjustment mounts to achieve translation, rotation, and tilt adjustments of the grating. Common implementation methods include screw push-and-adjustment with elastic preload, guide pairs with fine-tuning screws, and multi-level stacked two-dimensional / three-dimensional fine-tuning components.

[0003] The aforementioned adjustment mechanisms still have shortcomings when facing high-precision detection scenarios: First, multi-dimensional adjustment is often achieved by stacking multiple independent modules, resulting in a large overall volume and height, which is not conducive to integration in a confined space; Second, when the adjustment is poorly coupled with the load-bearing / constraint structure, crosstalk and hysteresis are easily generated during the adjustment process, affecting repeatability; Third, if a reliable locking and holding mechanism is lacking after adjustment, it is susceptible to drift due to vibration, temperature drift, or external disturbances, making it difficult to guarantee stability; Fourth, when the operation ports are scattered or blocked, the assembly and adjustment efficiency is reduced, and it is not conducive to completing rapid adjustments inside the equipment.

[0004] It should be noted that the above content is not necessarily prior art, nor is it intended to limit the scope of patent protection of this application. Summary of the Invention

[0005] This application provides a multi-dimensional tilting grating adjustment mechanism to solve the problems of existing multi-dimensional adjustment mechanisms having a large overall volume and stacking in the height direction, affecting repeated positioning, and lacking locking and holding mechanisms.

[0006] As one aspect of the embodiments of this application, this application provides a multi-dimensional tilting grating adjustment mechanism, including: Mounting base and grating mounting base disposed on the mounting base; The grating mounting base is connected to the mounting base via a multi-level nested adjustment assembly, the adjustment assembly comprising at least: A first adjustment component for rotating the grating mount about a first rotation axis; A second adjustment component for translating the grating mount along a first translation direction; A third adjustment component for displacing the grating mount along a second translational direction; A fourth adjustment component for translating the grating mount along a third translation direction; Among them, at least three of the first adjustment component, the second adjustment component, the third adjustment component and the fourth adjustment component are provided with locking structures.

[0007] Optionally, the first adjustment component includes a grating Rz rotating seat body and a Y-axis translation base body, wherein the grating Rz rotating seat body is rotatably connected to the Y-axis translation base body; The locking structure includes a plurality of circumferentially distributed first locking bolts, which pass through the grating Rz rotating seat body and are threadedly connected to the Y-axis translation base body.

[0008] Optionally, the first adjustment component further includes a zero-positioning structure, which includes an Rz rotation zero-positioning through hole disposed on one of the grating Rz rotation seat body and the Y-axis translation base body, and an Rz rotation zero-positioning threaded hole disposed on the other. The zero-position positioning structure includes an Rz rotation zero-position positioning bolt, which passes through the Rz rotation seat body of the grating and is threadedly connected to the Rz rotation zero-position positioning threaded hole on the Y-axis translation base body.

[0009] Optionally, the second adjustment component includes a Y-axis translation base body and a guide structure. The guide structure includes a Y-axis translation guide boss and a Y-axis translation guide groove. One of the Y-axis translation guide boss and the Y-axis translation guide groove is disposed on the Y-axis translation base body, and the other is disposed on an X-axis lifting base body that is adjacent to and connected to the Y-axis translation base body. The locking structure includes at least two second locking bolts, which pass through the Y-axis translational base body and are threadedly connected to the X-axis elevation base body.

[0010] Optionally, the second adjustment component further includes an initial position limiting structure, which includes a Y-direction translation initial position locking bolt hole disposed on the Y-direction translation base body, and a Y-direction translation initial position locking bolt that cooperates with the Y-direction translation initial position locking bolt hole, wherein the Y-direction translation initial position locking bolt is threadedly connected to a Y-direction translation initial position locking threaded hole on the X-direction lifting base body.

[0011] Optionally, the third adjustment component includes a raising wedge block body and an X-axis raising base body. The raising wedge block body is provided with a wedge-shaped working inclined surface, and the X-axis raising base body is provided with a contact inclined surface that cooperates with the wedge-shaped working inclined surface. The raised wedge block body is also provided with a wedge block guide boss, and the fourth adjustment component is provided with a wedge block guide groove that cooperates with the wedge block guide boss.

[0012] Optionally, the X-axis lifting base body is provided with a plurality of X-axis lifting guide posts, and the fourth adjustment component is provided with X-axis lifting guide holes that cooperate with the X-axis lifting guide posts; The X-axis lifting base body is provided with an X-axis lifting locking threaded hole, and the third locking bolt can pass through the X-axis lifting locking waist-shaped through hole on the fourth adjustment component and be threadedly connected to the X-axis lifting locking threaded hole.

[0013] Optionally, at least one of the first adjusting component, the second adjusting component, the third adjusting component, and the fourth adjusting component is provided with a thread actuator device; The thread actuator device includes a fine thread actuator and a push-receiving top surface disposed opposite to the push rod of the fine thread actuator; the push-receiving top surface is disposed on one of the grating Rz rotating seat body, the Y-axis translation base body, the rising wedge block body, and the Z'-axis translation and Rx rotating base body. The fine thread actuator is mounted on the adjacent support component corresponding to the pushed top surface.

[0014] Optionally, the tension spring is configured to be connected between the grating Rz rotating base body and the Y-axis translation base body, between the Y-axis translation base body and the X-axis lifting base body, between the lifting wedge block body and the Z'-axis translation and Rx rotating base body, and / or between the X-axis lifting base body and the Z'-axis translation and Rx rotating base body.

[0015] Optionally, the fourth adjustment component includes a Z'-direction translation and Rx-direction rotation base body, a left mounting base and a right mounting base respectively disposed on both sides of the Z'-direction translation and Rx-direction rotation base body; the Z'-direction translation and Rx-direction rotation base body is provided with a Z'-direction translation guide pin hole, and the mounting base is provided with a Z'-direction translation guide pin, the Z'-direction translation guide pin being inserted into the Z'-direction translation guide pin hole to provide linear guidance for the Z'-direction translation and Rx-direction rotation base body; The left mounting base and the right mounting base are respectively provided with a left Z' direction translation fine thread actuator and a right Z' direction translation fine thread actuator. The push rods of the two fine thread actuators abut against the force-receiving push surfaces of the actuators on opposite sides of the Z' direction translation and Rx rotation base body. The Z'-direction translation and Rx-rotation base body is connected to the left mounting seat and the right mounting seat through the Z'-direction translation and Rx-fine-tuning locking bolt, and the Z'-direction translation and Rx-fine-tuning locking bolt and the bolt hole are clearance fit.

[0016] The embodiments of this application employing the above-described technical solution may have the following advantages: This application provides a multi-dimensional tilting grating adjustment mechanism, including a mounting base and a grating mounting seat disposed on the mounting base. The grating mounting seat is connected to the mounting base through a multi-level nested adjustment assembly. The adjustment assembly includes at least: a first adjustment assembly for rotating the grating mounting seat about a first rotation axis; a second adjustment assembly for translating the grating mounting seat along a first translation direction; a third adjustment assembly for displacing the grating mounting seat along a second translation direction; and a fourth adjustment assembly for translating the grating mounting seat along a third translation direction. At least three of the first, second, third, and fourth adjustment assemblies are equipped with locking structures. This configuration allows the grating mounting seat to achieve combined adjustment of rotation and multi-directional translation. Furthermore, the locking structures on at least three adjustment assemblies reduce problems such as device volume stacking, adjustment interference, and easy drift after adjustment caused by module stacking and insufficient post-adjustment retention, while achieving multi-degree-of-freedom assembly and adjustment, thus meeting the optical system's requirements for grating alignment and stable retention. Attached Figure Description

[0017] In the accompanying drawings, unless otherwise specified, the same reference numerals throughout the various drawings denote the same or similar parts or elements. These drawings are not necessarily drawn to scale. It should be understood that these drawings depict only some embodiments disclosed in this application and should not be construed as limiting the scope of this application.

[0018] Figure 1 An axial view of the multi-dimensional tilting grating adjustment mechanism provided in an embodiment of this application; Figure 2 This is a schematic diagram of the grating coordinate system according to an embodiment of this application; Figure 3 An axial view of the grating Rz rotary seat body provided in an embodiment of this application; Figure 4 An axial view of the Y-axis translational base body provided in an embodiment of this application; Figure 5 This is an axial view of the X-axis raised base body provided in an embodiment of this application; Figure 6 An axial view of the raised wedge block body provided in an embodiment of this application; Figure 7 This is an axial view of the base body for Z' translation and Rx rotation provided in an embodiment of this application; Figure 8 A plan view of the Rz rotation adjustment mechanism provided in the embodiments of this application; Figure 9 A plan view of the Y-axis translation adjustment mechanism provided in the embodiments of this application; Figure 10 An axial view of the X-axis lifting adjustment mechanism provided in an embodiment of this application; Figure 11 A plan view of the Z'-direction translation and Rx fine-tuning mechanism provided in the embodiments of this application.

[0019] Explanation of reference numerals in the attached figures: 1-Adjustment mechanism; 101-Grate; 102-Grate Rz rotation assembly; 103-Y-direction translation base; 104-X-direction lifting base; 105-Z'-direction translation and Rx rotation base; 106-Threaded actuator assembly; 107-Lifting wedge block; 3-Rz rotating base body of grating; 301-Threaded hole for mounting cylindrical boss with top rod; 302-Rz rotation zero position positioning through hole; 303-Glue dispensing hole; 304-Rz mounting square hole; 305-Rz rotation control tension spring mounting hole; 306-Rz rotation locking waist-shaped through hole. 4-Y-direction translation base body; 401-Y-direction translation actuator mounting hole; 402-Rz rotation zero position positioning threaded hole; 403-Rz rotation locking threaded hole; 404-Rz rotation shaft; 405-Y-direction translation front tension spring mounting hole; 406-Y-direction translation locking waist-shaped through hole; 407-Y-direction translation guide boss; 408-Y-direction translation rear tension spring mounting hole; 409-Y-direction translation initial position locking bolt hole; 410-Y-direction translation lateral constraint tension spring mounting hole; 411-Optical axis through hole; 5-X-direction lifting base body; 501-X-direction lifting front tension spring mounting hole; 502-X-direction lifting actuator mounting hole; 503-X-direction lifting rear tension spring mounting hole; 504-Y-direction translation locking threaded hole; 505-Y-direction translation guide groove; 506-Y-direction translation initial position locking threaded hole; 507-X-direction lifting lateral tension spring mounting hole; 508-Wedge block mating boss; 509-X-direction lifting locking threaded hole; 510-X-direction lifting guide post; 6-Raising wedge block body; 601-Wedge-shaped working inclined surface; 602-Wedge block tension spring mounting hole; 603-Wedge block guide boss; 7-Z' direction translation and Rx rotation base body; 701-X direction lifting guide hole; 702-Wedge block guide groove; 703-X direction lifting locking waist-shaped through hole; 704-Z' direction translation tension spring mounting hole; 705-Z' direction translation actuator mounting hole; 706-Z' direction translation and Rx fine adjustment locking bolt hole; 707-Z' direction translation initial position positioning pin hole; 708-Z' direction translation guide pin hole; 709-Actuator force-bearing push surface; 8-Rz Rotary Adjustment Mechanism; 801-Rz Rotary Fine Thread Actuator; 802-Top Rod Matching Cylindrical Boss; 803-Rz Rotary Zero Position Positioning Bolt; 804-Rz Rotary Locking Bolt; 805-Rz Rotary Control Tension Spring; 806-Rz Rotary Mechanism Rotary Seat; 807-Rz Rotary Mechanism Translation Support Seat; 9. Y-axis translation adjustment mechanism; 901. Y-axis translation fine thread actuator; 902. Y-axis translation direction tension spring; 903. Y-axis translation locking bolt; 904. Y-axis translation lateral constraint tension spring; 905. Y-axis translation initial position locking bolt; 906. Y-axis translation mechanism lifting support; 907. Y-axis translation mechanism translation base; 10 - X-axis lifting adjustment mechanism; 1001 - X-axis lifting fine thread actuator; 1002 - X-axis lifting locking bolt; 1003 - Wedge block pull-back tension spring; 1004 - X-axis lifting mechanism wedge block; 1005 - X-axis lifting mechanism lifting base; 1006 - Lifting base pull-back tension spring; 1007 - X-axis lifting mechanism translation and rotation support; 1008 - X-axis lifting initial positioning cylindrical surface; 11-Z' translation and Rx fine-tuning mechanism; 1101-Left Z' translation fine thread actuator; 1102-Right Z' translation fine thread actuator; 1103-Left mounting base; 1104-Right mounting base; 1105-Z' translation and Rx fine-tuning mechanism translation rotating base; 1106-Z' translation and Rx fine-tuning locking bolt; 1107-Z' translation initial position positioning pin hole; 1108-Z' translation guide pin. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other. The application will now be described in detail with reference to the accompanying drawings and embodiments.

[0021] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such terms can be used interchangeably where appropriate so that the embodiments of this application described herein can be implemented, for example, in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0022] In this application, the term "numerical interval" (i.e., numerical range) refers to a range of values. Unless otherwise specified, the distribution of selectable values ​​within this numerical interval is considered continuous, and includes the two endpoints (i.e., the minimum and maximum values) of the interval, as well as every value between these endpoints. Unless otherwise specified, when a numerical interval refers only to integers within that interval, it includes the two endpoints of the range and every integer between them, effectively listing every integer. When multiple numerical ranges are provided to describe features or characteristics, these ranges can be merged. In other words, unless otherwise specified, the numerical ranges disclosed in this application should be understood to include any and all subranges included therein. The "numerical value" in this numerical interval can be any quantitative value, such as a number, percentage, or proportion. The term "numerical interval" can broadly include percentage intervals, proportion intervals, ratio intervals, and other quantitative intervals.

[0023] Exemplary embodiments according to this application will now be described in more detail with reference to the accompanying drawings. It should be understood that these exemplary embodiments may be implemented in many different forms and should not be construed as being limited to the embodiments set forth herein.

[0024] Please refer to the following: Figure 1 and Figure 2 This embodiment discloses a multi-dimensional tilting grating adjustment mechanism 1, including a mounting base and a grating mounting seat disposed on the mounting base, wherein the grating mounting seat is used to mount a tilting grating 101. By integrating the grating mounting seat on the mounting base, multi-degree-of-freedom precision adjustment of the grating position and orientation can be completed on the same platform, which is beneficial for achieving high-precision alignment of the grating and the incident beam in complex optical path systems. For ease of explanation, this embodiment establishes a mechanism as follows: Figure 2 The grating coordinate system shown is as follows: the direction of the short side of the grating is defined as the X direction, the direction of the long side is defined as the Y direction, the direction perpendicular to the grating surface is defined as the Z direction, and the direction forming a preset angle with the Z direction is defined as the Z' direction. It should be noted that the definitions of the X, Y, Z, and Z' directions are only used to describe the relative relationships of the adjustment degrees of freedom in this embodiment and do not limit the installation posture of the invention. Therefore, this mechanism can be flexibly installed according to the overall optical path layout.

[0025] Specifically, such as Figure 1As shown, the grating mounting base can be specifically implemented as a grating Rz rotating base body 3, which can be set as a rotating base in the grating Rz rotating assembly 102. The grating Rz rotating base body 3 is connected to the mounting base through a multi-level nested adjustment assembly; the adjustment assembly includes at least a first adjustment assembly, a second adjustment assembly, a third adjustment assembly, and a fourth adjustment assembly, wherein the first adjustment assembly is used to rotate the grating mounting base around a first rotation axis, corresponding to a micro-rotation in the Rz direction; the second adjustment assembly is used to translate the grating mounting base along a first translation direction, corresponding to translation in the Y direction; the third adjustment assembly is used to displace the grating mounting base along a second translation direction, corresponding to lifting and displacement in the X direction; and the fourth adjustment assembly is used to translate the grating mounting base along a third translation direction, corresponding to translation in the Z' direction. At least three of the first, second, third, and fourth adjustment assemblies are provided with locking structures to achieve relative fixation after adjustment. By combining the above-mentioned multi-dimensional adjustment degrees of freedom, comprehensive fine-tuning of the grating position and attitude can be achieved within the same mechanism, avoiding the problems of long assembly and adjustment links, large cumulative errors and structural redundancy caused by using multiple independent adjustment frames in traditional solutions. At the same time, the introduction of a multi-level locking structure can effectively suppress position drift caused by vibration, temperature drift and other factors after adjustment is completed, significantly improving the long-term stability and environmental adaptability of the grating installation.

[0026] Furthermore, in this embodiment, the adjustment components at each level are nested sequentially along the assembly and adjustment link. Specifically, the grating Rz rotating base body 3 is mounted on the Y-axis translation base body 4, the Y-axis translation base body 4 is mounted on the X-axis lifting base body 5, the X-axis lifting base body 5 is mounted on the Z'-axis translation and Rx rotating base body 7, and the Z'-axis translation and Rx rotating base body 7 is mounted on the mounting base. Through the above multi-level nesting, a multi-degree-of-freedom adjustment structure can be integrated within a limited space. Compared with the scheme of splitting each degree of freedom into multiple dispersed components, this embodiment significantly shortens the signal transmission path and mechanical structure height, improves the compactness and integration of the whole machine, and is beneficial for arrangement in space-constrained optical platforms or vacuum cavities. It also reduces assembly stations and adjustment steps, lowers the assembly and adjustment difficulty, and reduces factory calibration time.

[0027] In this embodiment, the adjustment components at each level can also be combined to form different mechanism sub-units. For example, the grating Rz rotating seat body 3, together with the corresponding Rz rotating fine thread actuator 801, Rz rotating locking structure, Rz rotating control tension spring 805, and support seat, constitute the Rz rotating adjustment mechanism 8; the Y-axis translation base body 4, together with its cooperating guide structure, locking structure, Y-axis translation fine thread actuator 901, and related springs, constitute the Y-axis translation adjustment mechanism 9; the X-axis lifting base body 5, the lifting wedge block body 6, and the cooperating guide and locking components form the X-axis lifting adjustment mechanism 10; the Z'-axis translation and Rx rotating base body 7, together with the left mounting seat 1103, the right mounting seat 1104, and the corresponding fine thread actuator and locking components, constitute the Z'-axis translation and Rx fine adjustment mechanism 11. Through the above-mentioned mechanism-level division, modular management and replacement can be easily carried out during the design and assembly stages.

[0028] Please see Figure 3 , Figure 4 and combined Figure 8 The first adjustment component includes a rotating base and a support base. The rotating base is the grating Rz rotating base body 3, and the support base is the Y-axis translation base body 4. The Y-axis translation base body 4 also serves as the translation support 807 for the Rz rotation adjustment mechanism 8. The grating Rz rotating base body 3 is rotatably connected to the Y-axis translation base body 4. Preferably, the grating Rz rotating base body 3 is rotatably connected via an Rz rotation shaft 404 disposed on the Y-axis translation base body 4. The Rz rotation shaft 404 and the grating Rz rotating base body 3 cooperate to form a first rotation axis. By integrating the rotation shaft 404 on the support base and supporting the grating Rz rotating base body 3 around this axis, the grating can achieve controlled micro-rotation around the region near its normal, which is beneficial for precise adjustment of the incident angle of the diffraction grating, thereby optimizing diffraction efficiency and spectral resolution.

[0029] Specifically, the grating Rz rotating base body 3 is provided with a grating mounting square hole 304 for mounting the grating 101, and can be provided with a dispensing hole 303 for dispensing assembly; the grating Rz rotating base body 3 can also be provided with an Rz rotation control tension spring mounting hole 305 for mounting an Rz rotation control tension spring 805. One end of the Rz rotation control tension spring 805 can be connected to the grating Rz rotating base body 3, and the other end can be connected to the Y-axis translation base body 4, thereby providing elastic preload in the Rz direction. The Y-axis translation base body 4 can be provided with an optical axis through hole 411 for the optical path to pass through. The corresponding arrangement of the grating mounting square hole 304 and the optical axis through hole 411 ensures that the optical axis is unobstructed after the grating is installed and is not blocked by the structure, thus avoiding additional shearing or diffuse reflection of the light spot. The setting of the adhesive hole 303 and the spring mounting hole 305 facilitates the pre-tightening and buffering of the grating by adhesive or tension spring, thereby reducing the influence of mechanical stress on the deformation of the grating surface and ensuring the stability of the optical surface shape.

[0030] Furthermore, the first adjustment component is equipped with a locking structure, which includes multiple circumferentially distributed first locking bolts 804. The first locking bolts 804 pass through the grating Rz rotating seat body 3 and are threadedly connected to the Y-axis translation base body 4. Preferably, the grating Rz rotating seat body 3 is provided with circumferentially evenly distributed Rz rotating locking waist-shaped through holes 306. The first locking bolts 804 pass through the Rz rotating locking waist-shaped through holes 306 and are screwed into the Rz rotating locking threaded holes 403 on the Y-axis translation base body 4, thereby achieving locking and fixation after rotation adjustment. By adopting a circumferential multi-point locking form, a symmetrical clamping force field can be formed on the rotating seat during locking, reducing the angular offset and local warping caused by single-point locking. This allows the grating to maintain a stable angular position under high and low temperature cycling or vibration environments, which is beneficial to improving the consistency and repeatability of the system's long-term operation.

[0031] Furthermore, the first adjustment component also includes a zero-positioning structure. Specifically, the zero-positioning structure includes an Rz rotation zero-positioning through hole 302 disposed on one of the grating Rz rotation seat body 3 or the Y-axis translation base body 4, and an Rz rotation zero-positioning threaded hole 402 disposed on the other; the zero-positioning structure also includes an Rz rotation zero-positioning bolt 803, which passes through the grating Rz rotation seat body 3 and is threadedly connected to the Rz rotation zero-positioning threaded hole 402 on the Y-axis translation base body 4 to achieve zero-positioning when needed. Through this zero-positioning structure, a mechanical reference angle can be provided for the assembly, calibration and maintenance of the whole machine, so that the absolute angular position of the grating can quickly return to the preset zero position, which is convenient for uniform calibration after different batches of products or on-site maintenance, and reduces the reliance on manual experience.

[0032] Preferably, the first adjustment assembly further includes a threaded actuator device 106, which includes an Rz-rotating fine threaded actuator 801 and a push-receiving top surface disposed opposite to its push rod. The push-receiving top surface can be disposed on a push rod mating cylindrical boss 802 on the grating Rz rotating seat body 3. The push rod mating cylindrical boss 802 is connected to the grating Rz rotating seat body 3 through a push rod mating cylindrical boss mounting threaded hole 301. The Rz-rotating fine threaded actuator 801 is mounted on the Y-axis translation base body 4, and the corresponding Rz-rotating fine threaded actuator mounting hole can be set as a Y-axis translation actuator mounting hole 401, thereby driving the grating Rz rotating seat body 3 to rotate by applying force to the push-receiving top surface through the push rod of the fine threaded actuator. Because it uses a fine thread drive and elastic element, it can achieve small step size and smooth continuous displacement during adjustment, reducing backlash and creep during adjustment. This allows operators to obtain more delicate angle control when adjusting manually, making it particularly suitable for precision optical testing scenarios where the incident angle of the grating needs to be adjusted at the micro-radian level.

[0033] Please see Figure 4 and combined Figure 9 The second adjustment component includes a translation base and a guide structure. The translation base is a Y-direction translation base body 4; the adjacent raised base is an X-direction raised base body 5. In the Y-direction translation adjustment mechanism 9, the X-direction raised base body 5 can also be understood as the raised support 906 of the Y-direction translation mechanism, while the Y-direction translation base body 4 also constitutes the translation base 907 of the Y-direction translation mechanism. The guide structure includes a Y-direction translation guide boss 407 and a Y-direction translation guide groove 505. One of the Y-direction translation guide boss 407 and the Y-direction translation guide groove 505 is disposed on the Y-direction translation base body 4, and the other is disposed on the X-direction raised base body 5. Preferably, as shown... Figure 4 , Figure 5 As shown, the bottom of the Y-axis translation base body 4 is provided with a Y-axis translation guide boss 407, and the X-axis lifting base body 5 is provided with a Y-axis translation guide groove 505 to limit the linear movement of the Y-axis translation base body 4 relative to the X-axis lifting base body 5 along the first translation direction. The Y-axis translation base body 4 may also be provided with a Y-axis translation front tension spring mounting hole 405, a Y-axis translation rear tension spring mounting hole 408, and a Y-axis translation lateral constraint tension spring mounting hole 410 for mounting a Y-axis translation direction tension spring 902 and a Y-axis translation lateral constraint tension spring 904; the X-axis lifting base body 5 may be provided with corresponding X-axis lifting front tension spring mounting holes 501, X-axis lifting rear tension spring mounting holes 503, and X-axis lifting lateral tension spring mounting holes 507 to install spring elements to ensure pre-tensioning and stability during the translation process.

[0034] Specifically, the second adjustment component is equipped with a locking structure, which includes at least two second locking bolts 903. The second locking bolts 903 pass through the Y-direction translation base body 4 and are threadedly connected to the X-direction elevation base body 5. Preferably, the Y-direction translation base body 4 is provided with a Y-direction translation locking waist-shaped through hole 406. The second locking bolts 903 pass through the Y-direction translation locking waist-shaped through hole 406 and are screwed into the Y-direction translation locking threaded hole 504 on the X-direction elevation base body 5, thereby achieving locking and fixation after Y-direction translation adjustment. By setting two or more points of locking and combining it with the waist-shaped through hole structure, both adjustment stroke and locking stiffness can be taken into account: during the adjustment stage, the waist-shaped through hole provides stroke margin, and during locking, multiple bolts are used for point-to-point locking to ensure positioning accuracy and impact resistance in the translation direction.

[0035] Furthermore, the second adjustment component also includes an initial position limiting structure. Specifically, the initial position limiting structure includes a Y-axis translation initial position locking bolt hole 409 disposed on the Y-axis translation base body 4, and a Y-axis translation initial position locking bolt 905 that mates with the Y-axis translation initial position locking bolt hole 409. The Y-axis translation initial position locking bolt 905 is threadedly connected to a Y-axis translation initial position locking threaded hole 506 on the X-axis lifting base body 5 to limit the initial position of the Y-axis translation base body 4. This limiting structure can provide a highly repeatable translation zero point during production assembly and on-site debugging, facilitating rapid confirmation of the grating's reference position in the Y-axis, shortening debugging time, and reducing the risk of zero-point drift caused by repeated disassembly and assembly.

[0036] Preferably, the second adjustment component can also be equipped with a thread actuator device 106. The Y-direction translational fine thread actuator 901 is installed on the X-direction lifting base body 5. The X-direction lifting base body 5 can be provided with an X-direction lifting actuator mounting hole 502 for installing the X-direction lifting fine thread actuator 1001 or the Y-direction translational fine thread actuator 901, etc. The push rod of the Y-direction translational fine thread actuator 901 abuts against the pushed top surface on the Y-direction translational base body 4, thereby driving the Y-direction translational base body 4 to move along the first translational direction. Further, the two ends of the Y-direction translational tension spring 902 and the Y-direction translational lateral constraint tension spring 904 are respectively connected between the Y-direction translational base body 4 and the X-direction lifting base body 5. By combining the fine-threaded actuator with the tension spring, the translational motion is always in a pre-tightened and controlled state, avoiding the gap and looseness problems common in traditional rigid jacking structures. This improves the adjustment resolution and allows the mechanism to automatically absorb minor impacts through elastic pre-tightening when subjected to external disturbances, thus maintaining the stability of the grating position.

[0037] Please see Figure 5 , Figure 6 and combined Figure 10The third adjustment component includes a lifting wedge block body 6 and an X-axis lifting base body 5. In the X-axis lifting adjustment mechanism 10, the lifting wedge block body 6 can be regarded as the X-axis lifting mechanism wedge block 1004, the X-axis lifting base body 5 can be regarded as the X-axis lifting mechanism lifting base 1005, and the Z'-axis translation and Rx-axis rotation base body 7 corresponds to the X-axis lifting mechanism translation and rotation support 1007. The lifting wedge block body 6 is provided with a wedge-shaped working inclined surface 601, and the X-axis lifting base body 5 is provided with a contact inclined surface that cooperates with the wedge-shaped working inclined surface 601. This contact inclined surface can be formed by a corresponding inclined surface at the bottom of the X-axis lifting base body 5, so that when the lifting wedge block body 6 moves along the wedge block moving direction, the inclined surface cooperation drives the X-axis lifting base body 5 to generate displacement along the second translation direction. To achieve elastic return between the wedge block and the base, the wedge block body 6 can be raised and the wedge block pull-back tension spring 1003 can be installed through the wedge block tension spring mounting hole 602. The X-direction raised base body 5 can be raised and the raised base pull-back tension spring 1006 can be installed through the X-direction raised front tension spring mounting hole 501, the X-direction raised rear tension spring mounting hole 503 and the X-direction raised side tension spring mounting hole 507.

[0038] Furthermore, the lifting wedge block body 6 is also provided with a wedge block guide boss 603, and the Z'-direction translation and Rx-rotation base body 7 is provided with a wedge block guide groove 702 that cooperates with the wedge block guide boss 603 to provide guiding constraints for the movement of the lifting wedge block body 6. This guiding structure can ensure that the wedge block slides smoothly along the designed movement direction, avoid the wedge block from lateral displacement or jamming under load, thereby maintaining the repeatability and linearity of the lifting movement.

[0039] Furthermore, the X-axis lifting base body 5 is provided with multiple X-axis lifting guide posts 510, and the Z'-axis translation and Rx-axis rotation base body 7 is provided with X-axis lifting guide holes 701 that cooperate with the X-axis lifting guide posts 510 to provide linear guidance for the displacement of the X-axis lifting base body 5 in the second translation direction. The X-axis lifting base body 5 may also be provided with a wedge-shaped block mating boss 508 to form an assembly positioning relationship with the lifting wedge block body 6. Through the combination of dual guides, the tilt and sway generated during the lifting process can be effectively reduced, the attitude consistency of the grating after lifting can be improved, and additional aberrations caused by the tilt of the grating surface due to lifting can be avoided.

[0040] Specifically, the third adjustment component is equipped with a locking structure. The X-axis lifting base body 5 has an X-axis lifting locking threaded hole 509. The third locking bolt 1002 can pass through the X-axis lifting locking oblong through hole 703 on the Z'-axis translation and Rx-axis rotation base body 7 and be threadedly connected to the X-axis lifting locking threaded hole 509, thereby achieving locking and fixation after lifting adjustment. Preferably, the X-axis lifting base body 5 can also be provided with an X-axis lifting initial positioning cylindrical surface 1008, which is used as a resting surface for zeroing or assembly reference. Through the above locking and initial positioning design, on the one hand, sufficient load-bearing capacity is ensured after lifting adjustment, and on the other hand, a repeatable height reference is provided, enabling the optical system to quickly return to the predetermined height state after maintenance and reassembly.

[0041] Preferably, the third adjustment component may be equipped with a threaded actuator device 106. An X-axis lifting fine threaded actuator 1001 is mounted on the Z'-axis translational and Rx-axis rotating base body 7. A Z'-axis translational actuator mounting hole 705 may be provided on the Z'-axis translational and Rx-axis rotating base body 7 for mounting either the X-axis lifting fine threaded actuator 1001 or the Z'-axis translational fine threaded actuator. The push rod of the X-axis lifting fine threaded actuator 1001 abuts against the actuator force-bearing push surface 709 of the lifting wedge block body 6, thereby pushing... The wedge block body 6 moves upwards; the wedge block body 6 is connected to the Z'-direction translational and Rx-rotational base body 7 via the wedge block tension spring mounting hole 602 and the wedge block return tension spring 1003. The X-direction lifting base return tension spring 1006 is connected to the X-direction lifting base body 5 and the Z'-direction translational and Rx-rotational base body 7 via the X-direction lifting front tension spring mounting hole 501, the X-direction lifting rear tension spring mounting hole 503, and the X-direction lifting lateral tension spring mounting hole 507. Through the combination of the fine-threaded actuator and the return spring, the wedge block and the lifting base are always in a controlled preload state throughout the entire stroke, which significantly reduces backlash, improves the reversibility and repeatability of the lifting direction adjustment, and meets the requirements of high-precision optical calibration.

[0042] Please see Figure 7 and combined Figure 11The fourth adjustment component includes a Z'-direction translation and Rx-direction rotation base body 7, and a left mounting base 1103 and a right mounting base 1104 respectively disposed on both sides of the Z'-direction translation and Rx-direction rotation base body 7. In the Z'-direction translation and Rx-direction fine-tuning mechanism 11, the Z'-direction translation and Rx-direction rotation base body 7 can also be understood as the translation and rotation base 1105 of the Z'-direction translation and Rx-direction fine-tuning mechanism. The Z'-direction translation and Rx-direction rotation base body 7 is provided with sliding guide holes such as a Z'-direction translation guide pin hole 708, and a Z'-direction translation guide pin 1108 is provided on the mounting base. The Z'-direction translation guide pin 1108 is inserted into the Z'-direction translation guide pin hole 708 to provide linear guidance for the Z'-direction translation and Rx-direction rotation base body 7, so that it can be translated along the third translation direction. To accommodate the installation of tension springs or other elastic elements, the Z'-direction translation and Rx-rotation base body 7 can also be provided with a Z'-direction translation tension spring mounting hole 704, so as to introduce elastic preload during movement in the Z' direction.

[0043] Specifically, the left mounting base 1103 and the right mounting base 1104 are respectively provided with a left Z' direction translation fine thread actuator 1101 and a right Z' direction translation fine thread actuator 1102. Both the left Z' direction translation fine thread actuator 1101 and the right Z' direction translation fine thread actuator 1102 are part of the thread actuator device 106. The push rods of the two thread actuators abut against the actuator force-receiving push surfaces 709 on the opposite sides of the Z' direction translation and Rx rotation base body 7 to drive the Z' direction translation and Rx rotation base body 7. The Z'-direction translation and Rx-direction rotation base body 7 is connected to the left mounting base 1103 and the right mounting base 1104 via the Z'-direction translation and Rx-direction fine-tuning locking bolt 1106. The Z'-direction translation and Rx-direction fine-tuning locking bolt 1106 and its bolt hole are clearance-fitted, thereby allowing the Z'-direction translation and Rx-direction rotation base body 7 to rotate at a small angle relative to the left mounting base 1103 and the right mounting base 1104 while satisfying the translation guidance, corresponding to a small rotation around the X-axis, i.e., fine-tuning in the Rx direction. Furthermore, the Z'-direction translation and Rx-direction rotation base body 7 may be provided with a Z'-direction translation initial position positioning pin hole 1107 or a Z'-direction translation initial position positioning pin hole 707 for installing a positioning pin for initial position positioning. By using a double-sided actuator and a gap-fit ​​connection, it is possible to achieve precise translation in one or two directions in the Z' direction, and to provide a small degree of rotational freedom in the Rx direction by utilizing the connection gap. This allows the mechanism to fine-tune the grating around the X-axis without adding an extra turntable, thus providing an additional one-dimensional adjustment means for optimizing the shape of the light spot and interference fringes in complex optical paths.

[0044] Furthermore, the fourth adjustment component can be equipped with a locking structure. Preferably, the Z'-direction translation and Rx fine-tuning locking bolt 1106 is tightened to lock and fix the Z'-direction translation and Rx rotation base body 7, thereby maintaining its position after the third translation direction adjustment is completed. This locking structure ensures that the Z'-direction position and Rx angle will not drift significantly under external impact or long-term operation conditions, making it suitable for use in precision optical equipment that operates for extended periods.

[0045] Furthermore, please combine Figures 8 to 10 The tension spring can be configured to connect at least one of the following: between the grating Rz rotary seat body 3 and the Y-axis translational base body 4; between the Y-axis translational base body 4 and the X-axis lifting base body 5; between the lifting wedge block body 6 and the Z'-axis translational and Rx rotary seat body 7; and / or between the X-axis lifting base body 5 and the Z'-axis translational and Rx rotary seat body 7. The threaded actuator device 106 can be disposed in at least one of the first adjustment assembly, the second adjustment assembly, the third adjustment assembly, and the fourth adjustment assembly. Its pushed-top surface can be disposed on at least one of the grating Rz rotary seat body 3, the Y-axis translational base body 4, the lifting wedge block body 6, and the Z'-axis translational and Rx rotary seat body 7. The threaded actuator is mounted on an adjacent support member corresponding to the pushed-top surface, thereby forming an adjustable pushing drive structure. By uniformly adopting fine-threaded actuators, spring preload, and multi-point locking basic units in all adjustment degrees of freedom, this embodiment ensures multi-degree-of-freedom and high-precision adjustment capabilities while facilitating standardized design and manufacturing, reducing the types of parts and processing difficulty, and improving the overall reliability and maintainability of the machine.

[0046] In summary, the multi-dimensional tilting grating adjustment mechanism provided by this invention includes a mounting base and a grating mounting seat disposed on the mounting base. The grating mounting seat is connected to the mounting base through a multi-level nested adjustment assembly. The adjustment assembly includes at least: a first adjustment assembly for rotating the grating mounting seat about a first rotation axis; a second adjustment assembly for translating the grating mounting seat along a first translation direction; a third adjustment assembly for displacing the grating mounting seat along a second translation direction; and a fourth adjustment assembly for translating the grating mounting seat along a third translation direction. At least three of the first, second, third, and fourth adjustment assemblies are provided with locking structures. This configuration allows the grating mounting seat to achieve combined adjustment of rotation and multi-directional translation. Furthermore, the locking structures on at least three adjustment assemblies reduce problems such as device volume stacking, adjustment interference, and easy drift after adjustment caused by module stacking and insufficient post-adjustment retention, while achieving multi-degree-of-freedom assembly and adjustment, thus meeting the optical system's requirements for grating alignment and stable retention.

[0047] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0048] For ease of description, directional terms such as "front, back, up, down, left, right," "horizontal, vertical, horizontal," and "top, bottom" generally indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. These terms are used solely for the purpose of facilitating the description of this application and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the referred mechanism or element must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the scope of protection of this application. The directional terms "inner" and "outer" refer to the inner or outer contours relative to the components themselves. For example, if a device in the drawings is inverted, a device described as "above" or "on top of" other devices or structures will subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein are interpreted accordingly.

[0049] Unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0050] Unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0051] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps described in these embodiments do not limit the scope of this application. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0052] It should also be noted that the terms "one embodiment," "another embodiment," and "embodiment" used in this specification refer to specific features, structures, or characteristics described in connection with that embodiment, which are included in at least one embodiment described in the general description of this application. The appearance of the same expression in multiple places in the specification does not necessarily refer to the same embodiment. Furthermore, when a specific feature, structure, or characteristic is described in connection with any embodiment, the intention is to suggest that implementing such a feature, structure, or characteristic in conjunction with other embodiments also falls within the scope of this application.

[0053] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0054] It should also be noted that the above are merely preferred embodiments of this application and do not limit the scope of patent protection of this application. Any equivalent structural or procedural changes made using the content of this application’s specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the scope of patent protection of this application.

Claims

1. A multidimensional tilting grating adjustment mechanism, characterized in that, include: Mounting base and grating mounting base disposed on the mounting base; The grating mounting base is connected to the mounting base via a multi-level nested adjustment assembly, the adjustment assembly comprising at least: A first adjustment component for rotating the grating mount about a first rotation axis; A second adjustment component for translating the grating mount along a first translation direction; A third adjustment component for displacing the grating mount along a second translational direction; A fourth adjustment component for translating the grating mount along a third translation direction; Among them, at least three of the first adjustment component, the second adjustment component, the third adjustment component and the fourth adjustment component are provided with locking structures.

2. The multidimensional tilting grating adjustment mechanism according to claim 1, characterized in that, The first adjustment component includes a grating Rz rotating seat body (3) and a Y-axis translation base body (4), wherein the grating Rz rotating seat body (3) is rotatably connected to the Y-axis translation base body (4); The locking structure includes a plurality of circumferentially distributed first locking bolts (804), which pass through the grating Rz rotating seat body (3) and are threadedly connected to the Y-axis translational base body (4).

3. The multidimensional tilting grating adjustment mechanism according to claim 2, characterized in that, The first adjustment component further includes a zero-positioning structure, which includes an Rz rotation zero-positioning through hole (302) disposed on one of the grating Rz rotation seat body (3) and the Y-axis translation base body (4), and an Rz rotation zero-positioning threaded hole (402) disposed on the other. The zero-position positioning structure includes an Rz rotation zero-position positioning bolt (803), which passes through the Rz rotation seat body (3) of the grating and is threadedly connected to the Rz rotation zero-position positioning threaded hole (402) on the Y-axis translation base body (4).

4. The multidimensional tilting grating adjustment mechanism according to claim 1, characterized in that, The second adjustment component includes a Y-axis translation base body (4) and a guide structure. The guide structure includes a Y-axis translation guide boss (407) and a Y-axis translation guide groove (505). One of the Y-axis translation guide boss (407) and the Y-axis translation guide groove (505) is disposed on the Y-axis translation base body (4), and the other is disposed on an X-axis lifting base body (5) that is adjacent to and connected to the Y-axis translation base body (4). The locking structure includes at least two second locking bolts (903), which pass through the Y-axis translational base body (4) and are threadedly connected to the X-axis lifting base body (5).

5. The multidimensional tilting grating adjustment mechanism according to claim 4, characterized in that, The second adjustment component further includes an initial position limiting structure, which includes a Y-direction translation initial position locking bolt hole (409) disposed on the Y-direction translation base body (4) and a Y-direction translation initial position locking bolt (905) that cooperates with the Y-direction translation initial position locking bolt hole (409). The Y-direction translation initial position locking bolt (905) is threadedly connected to the Y-direction translation initial position locking threaded hole (506) on the X-direction lifting base body (5).

6. The multidimensional tilting grating adjustment mechanism according to claim 1, characterized in that, The third adjustment component includes a raised wedge block body (6) and an X-axis raised base body (5). The raised wedge block body (6) is provided with a wedge-shaped working inclined surface (601), and the X-axis raised base body (5) is provided with a contact inclined surface that cooperates with the wedge-shaped working inclined surface (601). The raised wedge block body (6) is also provided with a wedge block guide boss (603), and the fourth adjustment component is provided with a wedge block guide groove (702) that cooperates with the wedge block guide boss (603).

7. The multidimensional tilting grating adjustment mechanism according to claim 6, characterized in that, The X-direction lifting base body (5) is provided with a plurality of X-direction lifting guide posts (510), and the fourth adjustment component is provided with an X-direction lifting guide hole (701) that cooperates with the X-direction lifting guide posts (510); The X-direction lifting base body (5) is provided with an X-direction lifting locking threaded hole (509), and the third locking bolt (1002) can pass through the X-direction lifting locking waist-shaped through hole (703) on the fourth adjustment component and be threadedly connected to the X-direction lifting locking threaded hole (509).

8. The multidimensional tilting grating adjustment mechanism according to claim 1, characterized in that, At least one of the first adjustment assembly, the second adjustment assembly, the third adjustment assembly, and the fourth adjustment assembly is provided with a thread actuator device (106); The thread actuator device (106) includes a fine thread actuator and a push-receiving top surface disposed opposite to the push rod of the fine thread actuator; the push-receiving top surface is disposed on one of the grating Rz rotating seat body (3), the Y-axis translation base body (4), the rising wedge block body (6), and the Z'-axis translation and Rx rotating base body (7); The fine thread actuator is mounted on the adjacent support component corresponding to the pushed top surface.

9. The multidimensional tilting grating adjustment mechanism according to claim 8, characterized in that, The tension spring is configured to be connected between the grating Rz rotating base body (3) and the Y-direction translation base body (4), between the Y-direction translation base body (4) and the X-direction lifting base body (5), between the lifting wedge block body (6) and the Z'-direction translation and Rx rotating base body (7), and / or between the X-direction lifting base body (5) and the Z'-direction translation and Rx rotating base body (7).

10. The multidimensional tilting grating adjustment mechanism according to claim 1, characterized in that, The fourth adjustment component includes a Z'-direction translation and Rx-direction rotation base body (7), a left mounting base (1103) and a right mounting base (1104) respectively disposed on both sides of the Z'-direction translation and Rx-direction rotation base body (7); the Z'-direction translation and Rx-direction rotation base body (7) is provided with a Z'-direction translation guide pin hole (708), and the mounting base is provided with a Z'-direction translation guide pin (1108), the Z'-direction translation guide pin (1108) is inserted into the Z'-direction translation guide pin hole (708) to provide linear guidance for the Z'-direction translation and Rx-direction rotation base body (7); The left mounting base (1103) and the right mounting base (1104) are respectively provided with a left Z' direction translation fine thread actuator (1101) and a right Z' direction translation fine thread actuator (1102). The push rods of the two fine thread actuators abut against the force-bearing push surfaces (709) of the actuators on opposite sides of the Z' direction translation and Rx rotation base body (7). The Z'-direction translation and Rx-rotation base body (7) is connected to the left mounting base (1103) and the right mounting base (1104) through the Z'-direction translation and Rx-fine adjustment locking bolt (1106), and the Z'-direction translation and Rx-fine adjustment locking bolt (1106) and the bolt hole are in clearance fit.

Images