Novel pipeline sensing pressure gauge for preventing pipeline blockage

Abstract

The novel pipeline sensing pressure gauge comprises a main cavity, an air inlet pipe, a flow guide table, an air distribution net, a sensor element, an air outlet pipe, a dust collection cover and a dust collection pipe, a drainage ring cover and a check valve are arranged in the main cavity, a dust filtering hole is formed in the connecting position of the flow guide table and the air distribution net, and the dust collection pipe comprises two bent pipes bent along the inner wall of the dust collection cover. And a positive pressure air source and a negative pressure air source are respectively communicated. After dust-containing tail gas enters through the gas inlet pipe, the dust-containing tail gas is guided by the drainage ring cover to climb towards the gas distribution net, solid impurities are guided into the dust collection cover through the dust filtering holes, the bent pipe cleans particles in the dust collection cover through cooperation of positive pressure blowing and negative pressure suction, the elastic supporting column absorbs vibration, and the check valve prevents the tail gas from flowing back. Particles are prevented from depositing and blocking from the source, the pressure measurement precision and continuous operation of equipment are guaranteed, and the problems that a traditional pressure gauge is prone to blocking and frequent in maintenance are solved.

Description

Technical Field

[0001] This invention relates to the field of pressure sensor technology, specifically a novel pipeline pressure sensor for preventing pipeline blockage. Background Technology

[0002] In high-end electronics industries such as semiconductor manufacturing and photovoltaic devices, PECVD (plasma-enhanced chemical vapor deposition) thin film equipment is one of the core process equipment. The pressure parameters of its exhaust gas pipeline directly determine the uniformity, density, and process stability of thin film deposition. Therefore, it is necessary to monitor the pressure changes in the exhaust gas pipeline in real time through pipeline pressure sensors to provide accurate data support for process parameter control.

[0003] However, the working environment of PECVD exhaust gas pipelines is extremely complex, leading to severe pipeline blockage problems in traditional pipeline pressure gauges, which has become a key bottleneck restricting process stability and equipment reliability. Specifically, the causes of blockage problems mainly include the following three aspects: First, the reactive gases such as silane and ammonia used in the PECVD process undergo decomposition and polymerization reactions in a plasma environment, generating solid impurities such as nano-sized silicon-based dust and polymer particles. These impurities are prone to deposit at pipeline bends and sensor mounting holes of the pressure gauge as they flow with the exhaust gas. Second, there are temperature gradients within the exhaust gas pipeline, and some reaction byproducts crystallize or solidify in low-temperature regions, forming solid deposits that gradually accumulate, especially around the sensor sensing end, where a dense adhesion layer is easily formed. Third, corrosive gases in the exhaust gas react chemically with the inner wall of the pipeline and the surface of the sensor, generating oxides and salts that further exacerbate deposit accumulation, ultimately leading to pressure gauge pipeline blockage and sensor failure.

[0004] Existing technical solutions for preventing pressure gauge clogging mainly fall into two categories: one is to add a filter element at the front end of the pressure gauge to block solid impurities through physical interception. However, the filter element itself is prone to clogging and needs to be frequently disassembled and replaced, which not only affects the continuity of production but also increases maintenance costs. The other is to use a purging device to introduce clean gas into the pipeline to flush away the deposits on the sensor surface. However, this solution requires additional gas source and control pipeline configuration, which is complex in structure and easily interferes with the pressure balance of the exhaust gas pipeline, resulting in a decrease in pressure measurement accuracy.

[0005] Therefore, it is necessary to provide a new type of pipeline sensing pressure gauge to prevent pipeline blockage and solve the above-mentioned technical problems. Summary of the Invention

[0006] The purpose of this invention is to provide a novel pipeline sensing pressure gauge to prevent pipeline blockage, thereby solving the technical problems of blockage caused by the deposition of silicon-based dust and polymer sticky particles, as well as frequent maintenance, interference with measurement accuracy, and easy sensor failure.

[0007] To achieve the above objectives, the present invention provides the following technical solution: a novel pipeline sensing pressure gauge for preventing pipeline blockage, comprising: a main cavity, which is a cylindrical cavity structure with openings at both ends; an air inlet pipe connected to one end opening of the main cavity; a flow guide platform coaxially disposed inside the main cavity, the flow guide platform having a conical structure, with its small-diameter end partially inserted towards the air inlet pipe; an air distribution net connected to the large-diameter end of the flow guide platform, the air distribution net having a hollow hemispherical structure; a sensor element disposed on the outer wall of the main cavity, the sensor element being connected to the inner cavity of the main cavity; and an air outlet pipe connected to the other end opening of the main cavity; wherein, the cross-section of the large-diameter end of the flow guide platform is tangent to the dome surface of the air distribution net, a dust filter hole is provided at the connection between the flow guide platform and the air distribution net, a dust collection hood is provided on the concave side of the air distribution net, the dust collection hood completely surrounds the periphery of the dust filter hole to form a chamber, a dust collection pipe is inserted inside the dust collection hood, the dust collection pipe allowing the inner cavity of the dust collection hood to be open to the outside.

[0008] Preferably, the dust collection pipe includes two bends, one end of which is bent along the inner wall of the dust collection hood, and the other end of which passes through the dust collection hood and the air distribution net.

[0009] Preferably, one bend is connected to a positive pressure air source to blow away the side wall of the dust collection hood, and the other bend is connected to a negative pressure air source to draw out the internal cavity of the dust collection hood.

[0010] Preferably, the main cavity is provided with a flow guide ring cover, which is coaxially connected to the air intake pipe and is coaxially sleeved outside the flow guide platform. The middle part of the flow guide ring cover is in the shape of a constriction to guide the airflow to rise along the convex side of the air distribution net.

[0011] Preferably, the guide platform has a first support column arranged in a circumferential array on its small-diameter end, the end of the first support column extending and fixed to the inner wall of the air intake pipe, and a second support column arranged in a circumferential array on the outer edge of the air distribution net, the end of the second support column extending and fixed to the inner wall of the main cavity.

[0012] Preferably, four first support columns and four second support columns are provided at equal intervals along the circumference, and two first support columns arranged in any opposite direction are elastic elements, and two second support columns arranged in any opposite direction are elastic elements.

[0013] Preferably, the air distribution net includes a perforated plate or a mesh plate structure.

[0014] Preferably, the outer wall of the intake pipe is provided with an external thread, which extends along the axial direction of the intake pipe and is used to achieve a threaded connection with an external pipe.

[0015] Preferably, there are two sensor elements, which are symmetrically staggered along the central axis of the main cavity; a check valve is provided inside the main cavity, which is located between the two sensor elements, and the airflow direction allowed by the check valve is consistent with the airflow direction from the inlet pipe to the outlet pipe.

[0016] Preferably, a housing is provided outside the main cavity, and the housing encloses the main cavity and sensor elements therein.

[0017] Compared with the prior art, the beneficial effects of the present invention are: 1. This invention combines the conical structure of the flow guide platform with the directional separation structure formed by the dust filter holes and the dust collection hood. By taking advantage of the difference in inertia between the gas and solid phases, it accurately guides solid impurities in the dust-laden exhaust gas into the dust collection hood, forming a physical isolation between the sensor element and the dust-laden airflow from the source, thus avoiding sensor failure. Moreover, the constricted structure of the flow guide ring optimizes the flow field distribution, guides the airflow to rise directionally, reduces the disordered deposition of particles on the inner wall of the main cavity, reduces the risk of dust filter hole blockage, and adapts to the complex working conditions of temperature changes in the exhaust gas pipeline.

[0018] 2. This invention achieves thorough removal of sticky particles from the inner wall of the dust collection hood by using a double-bend dust collection pipe and a positive and negative pressure air source, eliminating the need for frequent disassembly of consumables and effectively ensuring production continuity; the check valve enables unidirectional flow control of exhaust gas, preventing secondary dust generation caused by backflow and avoiding recurrence of blockage.

[0019] 3. The elastic support column in this invention has both stable support and vibration buffering functions. It can absorb the vibration generated by the exhaust gas flow, prevent particles from being compacted and stuck on the structural surface, and improve the data acquisition stability of the sensor element. The two staggered sensor elements can accurately collect pressure data at different positions, further ensuring measurement accuracy and reliability. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of a novel pipeline sensing pressure gauge for preventing pipeline blockage in an embodiment of the present invention.

[0021] Figure 2 for Figure 1 Disassembly diagram.

[0022] Figure 3 for Figure 1 A three-dimensional sectional view.

[0023] Figure 4 for Figure 3 A partial view of section I.

[0024] Figure 5 for Figure 1 A cross-sectional view from another angle.

[0025] Figure 6 for Figure 5 A partial view of section II.

[0026] Figure 7 This is a perspective cross-sectional view of the flow guide platform, air distribution net, and dust collection hood in another embodiment of the present invention.

[0027] Figure 8 This is a perspective cross-sectional view of the flow guide platform, air distribution net, and dust collection hood in another embodiment of the present invention.

[0028] In the diagram: 1. Main cavity; 11. Drainage ring cover; 2. Air inlet pipe; 3. Guide platform; 31. Dust filter hole; 32. Dust collection hood; 33. Dust collection pipe; 331. Bend; 34. First support column; 4. Air distribution net; 41. Second support column; 5. Sensor element; 6. Air outlet pipe; 7. Check valve; 8. External pipe; 9. Housing. Detailed Implementation

[0029] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0030] Please see Figure 1-4 As shown, one embodiment of the present invention provides a novel pipeline sensing pressure gauge for preventing pipeline blockage, comprising: a main cavity 1, which is a cylindrical cavity structure with openings at both ends; an air inlet pipe 2, which is connected to one end opening of the main cavity 1; a flow guide 3, which is coaxially disposed inside the main cavity 1, the flow guide 3 having a conical structure, with its small-diameter end partially inserted towards the air inlet pipe 2; an air distribution mesh 4, which is connected to the large-diameter end of the flow guide 3, the air distribution mesh 4 having a hollow hemispherical structure; and a sensor element 5 disposed in the main cavity. On the outer wall of body 1, sensor element 5 is connected to the inner cavity of main cavity 1; air outlet pipe 6 is connected to the opening at the other end of main cavity 1; wherein, the large diameter end section of guide platform 3 is tangent to the dome surface of air distribution net 4, dust filter hole 31 is provided at the connection between guide platform 3 and air distribution net 4, dust collection hood 32 is provided on the concave side of air distribution net 4, dust collection hood 32 completely surrounds the periphery of dust filter hole 31 to form a chamber, dust collection pipe 33 is inserted inside dust collection hood 32, and dust collection pipe 33 makes the inner cavity of dust collection hood 32 open to the outside.

[0031] In this embodiment, the conical structure of the flow guide platform 3 guides the dust-laden exhaust gas to flow smoothly, avoiding particle deposition caused by dead airflow. The dust filter hole 31 and the dust collection hood 32 cooperate to form a closed dust collection space. When the dust-laden exhaust gas passes through the dust filter hole 31, due to the different motion inertia of the gas and solid impurities, the gas easily changes direction, which can guide the solid impurities into the chamber in a directional manner, isolating the sensor element 5 from the dust-laden exhaust gas from the source. This solves the problem of easy dust accumulation and sensing failure around the sensor in traditional pressure gauges. The cooperation of the main cavity 1, the air inlet pipe 2 and the air outlet pipe 6 ensures a smooth exhaust gas flow path and avoids dust accumulation and blockage at pipe bends.

[0032] Please see Figure 7-8 As shown, the dust collection pipe 33 includes two bends 331. One end of the bend 331 is bent along the inner wall of the dust collection hood 32, and the other end of the bend 331 passes through the dust collection hood 32 and the air distribution net 4.

[0033] More specifically, one bend 331 is connected to a positive pressure air source to blow away the side wall of the dust collection hood 32, and the other bend 331 is connected to a negative pressure air source to draw out the internal cavity of the dust collection hood 32.

[0034] In this embodiment, the bent pipe 331 is arranged along the inner wall of the dust collection hood 32. The airflow generated by the bent pipe 331 can flow along the inner wall of the dust collection hood 32, avoiding cleaning dead corners. The dust collection pipe 33 is adapted to the depth of the dust collection hood 32 through the bent pipe 331, solving the problem of local dust accumulation that cannot be removed in traditional dust collection structures. Specifically, the positive pressure air source blows the side wall of the dust collection hood 32 through the bent pipe 331, which can quickly blow away the attached sticky particles. The negative pressure suction effect of the other bent pipe 331 simultaneously discharges the dust. The positive and negative pressure work together to avoid the dust collection pipe 33 or the dust collection hood 32 from clogging due to particle adhesion and accumulation. This solves the problem of easy clogging of traditional filter elements and the need for frequent disassembly and replacement. Moreover, it does not require interruption of the flow of exhaust gas in the main cavity 1, ensuring production continuity. Moreover, during this process, airflow continuously flows into the dust filter hole 31, forming a stable air curtain. Since the blowing pressure of the bent pipe 331 is less than the airflow pressure flowing into the dust filter hole 31, the particles that are lifted will not flow back through the dust filter hole 31 to the main airflow channel, ensuring that the cleaning process does not interfere with the normal flow of exhaust gas and the pressure monitoring of the sensor element 5.

[0035] Please see Figure 3-6 As shown, the main cavity 1 is provided with a flow guide ring cover 11. The flow guide ring cover 11 is connected to the air inlet pipe 2 and is coaxially arranged. The flow guide ring cover 11 is coaxially sleeved outside the flow guide platform 3. The middle part of the flow guide ring cover 11 is in the shape of a constriction to guide the airflow to rise along the convex side of the air distribution net 4.

[0036] In this embodiment, the constricted flow guide ring 11 enhances the directional flow of airflow, preventing disordered airflow from causing particles to deposit randomly on the inner wall of the main cavity 1. At the same time, it accelerates the airflow through the air distribution net 4, reducing the retention of particles around the dust filter holes 31, further reducing the risk of dust filter holes 31 clogging, solving the problem of particle crystallization and deposition caused by temperature changes in the exhaust pipeline. Furthermore, the coaxial layout of the flow guide ring 11 and the flow guide platform 3 does not interfere with the airflow field.

[0037] Please see Figure 3-4 As shown, the small-diameter end of the flow guide platform 3 is provided with a first support column 34 in a circumferential array. The end of the first support column 34 extends and is fixed to the inner wall of the air intake pipe 2. The outer wall edge of the air distribution net 4 is provided with a second support column 41 in a circumferential array. The end of the second support column 41 extends and is fixed to the inner wall of the main cavity 1.

[0038] In this embodiment, the first support column 34 enables the stable installation of the guide platform 3 in the air inlet pipe 2, and the second support column 41 ensures the reliability of the connection between the air distribution net 4 and the main cavity 1, avoids the displacement of the guide platform 3 or the air distribution net 4 caused by airflow impact, ensures the alignment accuracy and flow field stability of the dust filter hole 31 and the dust collection hood 32, and solves the problem of reduced anti-clogging efficiency caused by loose components in traditional structures.

[0039] Please see Figure 3-4 As shown, four first support columns 34 and four second support columns 41 are provided at equal intervals along the circumference. Two first support columns 34 arranged in any opposite direction are elastic elements, and two second support columns 41 arranged in any opposite direction are elastic elements.

[0040] In this embodiment, the first support column 34 and the second support column 41, made of elastic material, can absorb the vibration generated by the exhaust gas flow, preventing the particles from being compacted and bonded on the inner wall of the main cavity 1 and the dust collection hood 32 due to vibration. At the same time, it reduces the interference of vibration on the data acquisition of the sensor element 5, ensures the accuracy of pressure measurement, solves the problem of vibration aggravating particle deposition and reducing measurement accuracy, and the symmetrical layout ensures balanced support force.

[0041] Please see Figure 5-7 As shown, the air distribution net 4 includes a perforated plate and a mesh plate structure.

[0042] In this embodiment, the porous plate or mesh plate structure of the air distribution net 4 achieves uniform flow of exhaust gas without affecting the airflow efficiency, thus ensuring stable pressure within the main cavity 1.

[0043] Please see Figure 2-3 As shown, the outer wall of the intake pipe 2 is provided with an external thread, which extends along the axial direction of the intake pipe 2. The external thread is used to achieve a threaded connection with the external pipe 8.

[0044] In this embodiment, the external thread of the intake pipe 2 ensures a firm seal with the external pipe 8, preventing pressure fluctuations in the main cavity 1 and the infiltration of external impurities caused by gas leakage, thus ensuring the accuracy of the sensor element 5 measurement. At the same time, the threaded connection facilitates installation and disassembly.

[0045] Please see Figure 1-3 As shown, there are two sensor elements 5, which are symmetrically staggered along the central axis of the main cavity 1. A check valve 7 is provided inside the main cavity 1. The check valve 7 is located between the two sensor elements 5, and the airflow direction allowed by the check valve 7 is consistent with the airflow direction from the inlet pipe 2 to the outlet pipe 6.

[0046] In this embodiment, the two staggered sensor elements 5 can accurately collect pressure data at different positions in the main cavity 1, improving measurement reliability. At the same time, the airflow status can be determined by comparing the data. The check valve 7 effectively prevents the exhaust gas from flowing back, avoiding the backflow impacting the separated particles in the dust collection hood 32 and causing secondary dust. This solves the problem of recurrence of blockage in the dust filter hole 31 caused by backflow and the distortion of measurement data of the sensor element 5.

[0047] Please see Figure 1-3 As shown, a housing 9 is fitted outside the main cavity 1, and the housing 9 encloses the main cavity 1 and the sensor element 5 inside.

[0048] Working principle: Dust-laden exhaust gas in the PECVD exhaust gas pipeline first enters the main chamber 1 through the inlet pipe 2. Guided by the guide ring shroud 11, the dust-laden exhaust gas flows through the dust filter holes 31 at the connection between the guide platform 3 and the dust distribution net 4 before passing through the air distribution net 4. Due to the difference in inertia between solid impurities and gas in the dust-laden exhaust gas, the solid impurities are guided into the closed chamber formed by the dust collection hood 32. After impurity removal, the exhaust gas accelerates along the constricted structure of the guide ring shroud 11 and rises towards the convex side of the air distribution net 4. When the dust-laden exhaust gas flows through the air distribution net 4, the air distribution net 4 performs preliminary flow equalization of the exhaust gas, avoiding direct impact on the inner wall of the main chamber 1 and causing particle deposition. This achieves isolation between the dust-laden exhaust gas and the installation area of ​​the sensor element 5, preventing particles from adhering to the surface of the sensor element 5 from the source.

[0049] The two curved pipes 331 inside the dust collection hood 32 work together with positive and negative pressure air sources to achieve periodic cleaning: at fixed intervals, such as 1 hour, the positive pressure air source blows air into the inner wall of the dust collection hood 32 through the corresponding curved pipe 331, blowing up the attached sticky particles to form dust, while the negative pressure air source draws in the dust through another curved pipe 331 to quickly discharge the dust from the dust collection hood 32. Alternatively, the two curved pipes 331 can be used to blow air together and then inhale together, or to alternate between blowing and inhaling, to ensure that particles in the chamber are thoroughly removed. During this process, airflow continuously flows into the dust filter holes 31, forming a stable air curtain. Because the blowing pressure of the curved pipes 331 is lower than the airflow pressure flowing into the dust filter holes 31, the particles that are lifted will not flow back through the dust filter holes 31 into the main airflow channel, ensuring that the cleaning process does not interfere with the normal flow of exhaust gas and the pressure monitoring of the sensor element 5.

[0050] The first support column 34 and the second support column 41, made of elastic material, can effectively absorb the vibration caused by the exhaust gas flow, preventing particles from sticking to the inner wall of the main cavity 1 and the dust collection hood 32 due to vibration, while also improving the stability of the data collected by the sensor element 5. The one-way flow design of the check valve 7 prevents the exhaust gas from flowing back and impacting the separated particles in the dust collection hood 32, avoiding the risk of secondary dust re-entrainment and clogging of the filter holes 31 or the dust collection pipe 33.

[0051] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A novel pipeline sensing pressure gauge for preventing pipeline blockage, characterized in that, include: The main cavity (1) is a cylindrical cavity structure with openings at both ends; An air intake pipe (2) is connected to the opening at one end of the main cavity (1); The guide platform (3) is coaxially disposed inside the main cavity (1). The guide platform (3) has a conical structure, and its small diameter end is partially inserted towards the air inlet pipe (2). The air distribution net (4) is connected to the large-diameter end of the guide platform (3), and the air distribution net (4) is a hollow hemispherical structure. A sensor element (5) is disposed on the outer wall of the main cavity (1), and the sensor element (5) is connected to the inner cavity of the main cavity (1); An exhaust pipe (6) is connected to the opening at the other end of the main cavity (1); The large-diameter end section of the guide platform (3) is tangent to the dome surface of the air distribution net (4). A dust filter hole (31) is provided at the connection between the guide platform (3) and the air distribution net (4). A dust collection hood (32) is provided on the concave side of the air distribution net (4). The dust collection hood (32) completely surrounds the periphery of the dust filter hole (31) to form a cavity. A dust collection tube (33) is inserted inside the dust collection hood (32). The dust collection tube (33) allows the inner cavity of the dust collection hood (32) to be open to the outside.

2. The novel pipeline sensing pressure gauge for preventing pipeline blockage as described in claim 1, characterized in that, The dust collection pipe (33) includes two bends (331). One end of the bend (331) is bent along the inner wall of the dust collection hood (32), and the other end of the bend (331) passes through the dust collection hood (32) and the air distribution net (4).

3. The novel pipeline sensing pressure gauge for preventing pipeline blockage as described in claim 2, characterized in that, One of the bends (331) is connected to a positive pressure air source to blow the side wall of the dust collection hood (32), and the other bend (331) is connected to a negative pressure air source to draw in the internal cavity of the dust collection hood (32).

4. The novel pipeline sensing pressure gauge for preventing pipeline blockage as described in claim 3, characterized in that, The main cavity (1) is provided with a flow guide ring cover (11). The flow guide ring cover (11) is coaxially connected to the air inlet pipe (2) and is coaxially sleeved outside the flow guide platform (3). The middle part of the flow guide ring cover (11) is in the shape of a constriction to guide the airflow to rise along the convex side of the air distribution net (4).

5. The novel pipeline sensing pressure gauge for preventing pipeline blockage as described in claim 4, characterized in that, The guide platform (3) is provided with a first support column (34) in a circumferential array at its small diameter end. The end of the first support column (34) extends and is fixed to the inner wall of the air inlet pipe (2). The outer wall edge of the air distribution net (4) is provided with a second support column (41) in a circumferential array. The end of the second support column (41) extends and is fixed to the inner wall of the main cavity (1).

6. The novel pipeline sensing pressure gauge for preventing pipeline blockage as described in claim 5, characterized in that, The first support column (34) and the second support column (41) are provided with four columns at equal intervals along the circumference. The two first support columns (34) arranged in any opposite direction are elastic elements, and the two second support columns (41) arranged in any opposite direction are elastic elements.

7. The novel pipeline sensing pressure gauge for preventing pipeline blockage as described in any one of claims 1-6, characterized in that, The air distribution net (4) includes a perforated plate and a mesh plate structure.

8. The novel pipeline sensing pressure gauge for preventing pipeline blockage as described in claim 7, characterized in that, The outer wall of the air intake pipe (2) is provided with an external thread, which extends along the axial direction of the air intake pipe (2) and is used to achieve a threaded connection with the external pipe (8).

9. The novel pipeline sensing pressure gauge for preventing pipeline blockage as described in claim 8, characterized in that, Two sensor elements (5) are provided, and the two sensor elements (5) are symmetrically staggered along the central axis of the main cavity (1); a check valve (7) is provided inside the main cavity (1), and the check valve (7) is located between the two sensor elements (5), and the airflow direction allowed by the check valve (7) is consistent with the airflow direction from the inlet pipe (2) to the outlet pipe (6).

10. The novel pipeline sensing pressure gauge for preventing pipeline blockage as described in claim 9, characterized in that, The main cavity (1) is covered by a shell (9), which encloses the main cavity (1) and the sensor element (5).

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