Rapid temperature changing sample stage suitable for vacuum environment

Abstract

The invention discloses a rapid temperature changing sample stage suitable for a vacuum environment, and belongs to the technical field of low-temperature experimental equipment. The sample table is fixedly connected with the mounting adapter through the heat insulation supporting piece, the mounting adapter is used for being fixed to a low-temperature cold platform, and the sample table is fixedly connected with the mounting adapter through the two ends of the flexible cold guide chain respectively; the nesting supporting structure is assembled on the outer side of the lower portion of the sample table and used for inhibiting axial position deviation of the sample table, and the cold shield wraps the nesting supporting structure and used for reducing radiation heat leakage; the temperature measuring and heating unit comprises a temperature sensor and a heating part, the temperature sensor is fixedly mounted at the center of the sample table, and the heating part is fixedly mounted at a preset mounting position of the sample table. By the adoption of the rapid temperature changing sample table suitable for the vacuum environment, rapid temperature changing and sample temperature regulation and control of a sample are achieved in the vacuum environment, temperature changing efficiency is improved, position stability is guaranteed, and the rapid temperature changing sample table adapts to experiment scenes needing rapid temperature changing.

Description

Technical Field

[0001] This invention relates to the field of low-temperature experimental equipment technology, and in particular to a rapid temperature-changing sample stage suitable for vacuum environments. Background Technology

[0002] In research fields such as materials science, quantum physics, and cryogenic electronics, cryogenic experimental equipment is a core tool for conducting high-precision testing and analysis. Among these, sample stages suitable for vacuum environments are key components for characterizing sample performance at low temperatures. Currently, the temperature control of such cryogenic sample stages is highly dependent on the cryogenic refrigerator, and its cooling efficiency is significantly affected by the target temperature. As the target temperature decreases, the available cooling capacity of the refrigerator drops rapidly, a characteristic that directly restricts the performance of the cryogenic sample stage.

[0003] Specifically, existing low-temperature sample stages have some problems in practical applications. In dynamic temperature control scenarios such as temperature scanning tests, the cooling process of the sample stage from a higher temperature to the next target low temperature is time-consuming, and it also takes a long time for the temperature to stabilize to the target temperature. This makes it difficult to meet the needs of efficient experiments and has become the main bottleneck restricting the efficiency of low-temperature experimental equipment. The existing structure lacks targeted optimization design and cannot effectively balance the relationship between cooling efficiency, temperature control speed and experimental stability, making it difficult to adapt to the current needs for high efficiency and accuracy in low-temperature experiments. Summary of the Invention

[0004] The purpose of this invention is to provide a rapid temperature-changing sample stage suitable for vacuum environments, thereby solving the aforementioned technical problems.

[0005] To achieve the above objectives, the present invention provides a rapid temperature-changing sample stage suitable for a vacuum environment, comprising a sample stage, a thermally insulating support, a mounting adapter, a temperature measuring and heating unit, a nested support structure, a cold shield, and a flexible cold-conducting chain. The sample stage is fixedly connected to the mounting adapter via an insulating support. The mounting adapter is used to fix the sample stage to the low-temperature cold platform, and the sample stage and the mounting adapter are fixedly connected at both ends by a flexible cold-conducting chain. The nested support structure is assembled on the lower outer side of the sample stage to suppress axial displacement of the sample stage. The cold shield is wrapped around the outside of the nested support structure to reduce radiative heat leakage. The temperature measuring and heating unit includes a temperature sensor and a heating element. The temperature sensor is fixedly installed at the center of the sample stage, and the heating element is fixedly installed at a preset installation position on the sample stage.

[0006] Preferably, the sample stage is made of high-purity copper or high-purity aluminum with a high RRR value, and adopts an integrated molding structure with a thin substrate and reinforcing ribs.

[0007] Preferably, the thermal insulation support is a thin-walled annular structure, made of glass fiber epoxy resin composite material, polyarylisopropyl ketone, glass ceramic, carbon fiber, or poly-N,N’ -p, p ’ Made of one or more low thermal conductivity and high rigidity materials, such as 1-oxydiphenylmethylpyranbromoimide, the thermal insulation support has through holes on the side wall for the power supply connection line to enter and exit, and is fixedly connected to the sample stage and mounting adapter by screwing or gluing. The diameter of the thermal insulation support is adapted to the diameter of the sample stage to ensure that the sample stage is centrally symmetrical after assembly, and the position of the through hole on the side wall is adapted to the connection line layout of the temperature measuring and heating unit.

[0008] Preferably, the mounting adapter is fixed to the low-temperature cold platform by screwing, and its top is provided with a screwed or adhesive structure that is connected to the heat insulation support and the flexible cold conduction chain.

[0009] Preferably, the temperature sensor of the temperature measuring and heating unit is a high-precision thermometer, and the heating component of the temperature measuring and heating unit is a heating column made of nickel-chromium heating wire, a miniature ceramic heating plate, or a low-temperature resistant chip heating plate. The heating component is fixed to the preset mounting position of the sample stage by screwing or gluing.

[0010] Preferably, the nested support structure is composed of inner and outer nested materials, and the inner and outer materials and the thermal insulation support are made of the same low thermal conductivity and high stiffness material. The axial position offset of the sample stage is controlled at the submicron level through synchronous temperature deformation.

[0011] Preferably, the cold screen is a low-temperature cold screen that fits with the nested support structure with a gap. By wrapping the nested support structure, the radiative heat leakage is reduced, so that the lowest temperature of the sample stage is close to the temperature of the low-temperature cold platform.

[0012] Preferably, the flexible cooling chain is made of a high thermal conductivity metal material and has a flexible, bent structure. One end is fixed to the bottom of the sample stage near the sample bearing surface, and the other end is fixed to the top of the mounting adapter. It improves the cooling efficiency by conducting heat from the sample stage. The cross-sectional area and length of the flexible cooling chain are specifically selected and designed, and the cooling capacity is finely adjusted in conjunction with the heating components of the temperature measuring heating unit to maintain a stable cold head temperature.

[0013] Preferably, the height of the thin-walled cylindrical ring structure of the thermal insulation support is adapted to the thickness of the sample stage.

[0014] Preferably, the inner and outer nesting materials of the nested support structure are three different low thermal conductivity, high stiffness materials, with the deformations of the first, second, and third materials being respectively... , , The relationship that its deformable variables satisfy is: .

[0015] Therefore, the present invention employs the above-mentioned rapid temperature-changing sample stage suitable for vacuum environments, which has the following beneficial effects: 1. By using a lightweight sample stage and a flexible cooling chain, rapid temperature changes of samples can be achieved in a vacuum environment, and the temperature of the cold head remains stable at high temperatures, avoiding energy waste and improving temperature change efficiency.

[0016] 2. The nested support structure synchronously offsets temperature deformation, controlling the axial offset of the sample stage to the sub-micron level, thus avoiding the impact of sample position displacement on data accuracy during the experiment.

[0017] 3. The low-temperature cold shield wraps around the nested support structure with gap fit, which greatly reduces radiative heat leakage and makes the lowest temperature of the sample stage close to the low-temperature cold platform, meeting the temperature accuracy requirements of low-temperature experiments.

[0018] 4. The sample stage is adapted to a vacuum environment, with no additional heat dissipation or structural interference, ensuring that low-temperature experiments can be carried out stably under vacuum conditions.

[0019] The technical solution of the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the assembly structure of the rapid temperature-changing sample stage applicable to a vacuum environment according to the present invention; Figure 2 This is a schematic diagram of the deformation gap of the rapid temperature-changing sample stage of the present invention.

[0021] Figure Labels 1. Sample stage; 2. Temperature measuring and heating unit; 3. Thermal insulation support; 4. Cold shield; 5. Mounting adapter; 6. Flexible cold chain; 7. First material; 8. Second material; 9. Third material. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages disclosed in the embodiments of the present invention clearer, the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are only used to explain the embodiments of the present invention and are not intended to limit the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of this application. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout.

[0023] It should be noted that the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion, such as a process, method, system, product, or server that includes a series of steps or units, not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or device.

[0024] The embodiments of the present invention will now be described in detail with reference to the accompanying drawings.

[0025] like Figures 1-2 As shown, this invention provides a rapid temperature-changing sample stage 1 suitable for a vacuum environment, including a sample stage 1 for carrying experimental samples and achieving temperature control, an insulating support 3 for isolating external heat transfer and supporting the sample stage 1, an installation adapter 5 for connecting the sample stage 1 and a low-temperature cooling platform and fixing the overall structure, a temperature-measuring and heating unit 2 for real-time monitoring of the sample stage 1 temperature and achieving temperature adjustment, a nested support structure for suppressing axial positional displacement of the sample stage 1, a cold screen 4 for reducing radiative heat leakage in a vacuum environment, and a flexible cold-conducting chain 6 for efficiently transferring cold energy; the sample stage 1 is insulated... The support component 3 is fixedly connected to the mounting adapter 5, which is used to fix the sample stage 1 to the low-temperature cold platform. The sample stage 1 and the mounting adapter 5 are fixedly connected at both ends by a flexible cold-conducting chain 6. The nested support structure is assembled on the lower outer side of the sample stage 1 to suppress the axial positional displacement of the sample stage 1. The cold screen 4 is wrapped around the outside of the nested support structure to reduce radiative heat leakage. The temperature measuring and heating unit 2 includes a temperature sensor and a heating component. The temperature sensor is fixedly installed in the center of the sample stage 1 to accurately monitor the temperature of the core area of ​​the sample stage 1. The heating component is fixedly installed in the preset installation position of the sample stage 1 to achieve target temperature regulation.

[0026] Specifically, the sample stage 1 is made of high-purity copper or high-purity aluminum with a high RRR (Residual Resistance Ratio) value. The high thermal conductivity material is conducive to uniform temperature transfer. It adopts an integrated molding structure with thin substrate and reinforcing ribs, which takes into account both structural strength and lightweight requirements. The lightweight design can reduce the heat capacity of the sample stage 1. Combined with the cold transfer function of the flexible cold chain 6, it accelerates the temperature response speed of the sample stage 1.

[0027] Thermal insulation support 3 is a thin-walled annular structure made of glass fiber epoxy resin composite material, such as G-10 glass. TM Fibers, polyarylisopropyl ketone (PEEK), glass ceramics, such as Macor TM Carbon fiber (Avia Fiberglass) TM ) or poly-N, N ’ -p, p ’ -O-diphenylmethylpyranobromoimide (Vespel) TMIt is made of one or more low thermal conductivity and high rigidity materials, and the low thermal conductivity material can reduce the external heat input to the sample stage 1. The side wall of the thermal insulation support 3 has through holes for the power supply connection line to enter and exit. It is fixedly connected to the sample stage 1 and the mounting adapter 5 by screwing or gluing. The diameter of the thermal insulation support 3 is adapted to the diameter of the sample stage 1 to ensure that the sample stage 1 is centrally symmetrical after assembly. The position of the through hole on the side wall is adapted to the connection line layout of the temperature measuring and heating unit 2, so that corresponding connection can be achieved. This not only achieves a neat layout of the line, but also avoids additional heat transfer caused by the connection line contacting the sample stage 1 messily.

[0028] The mounting adapter 5 is fixed to the low-temperature cold platform by screws. Its top is provided with screw or adhesive structure that corresponds to the heat insulation support 3 and the flexible cold conduction chain 6. This not only realizes the stable connection between the sample stage 1 and the low-temperature cold platform, but also provides a fixed end point for the flexible cold conduction chain 6, ensuring the stability of the cold energy transfer path.

[0029] The temperature sensor of the temperature measuring and heating unit 2 is a high-precision thermometer. For example, when used in a magnetic field environment, a CERNOX thermometer is used, which has good stability in a magnetic field environment. Specifically, the signal is transmitted through a 4-pin Min-E-Con (Mini-Electronic Connector). The heating component of the temperature measuring and heating unit 2 is a heating column made of nickel-chromium heating wire, a miniature ceramic heating plate, or a low-temperature resistant chip heating plate. The heating component is fixed to the preset mounting position of the sample stage 1 by screwing or gluing, and is connected to the power supply circuit through a 2-pin Fischer connector. The temperature sensor and the heating component work together to realize closed-loop control of the temperature monitoring and adjustment of the sample stage 1.

[0030] The nested support structure is composed of inner and outer nested materials, and the inner and outer materials and the thermal insulation support 3 are made of the same low thermal conductivity and high stiffness material. The axial position offset of the sample stage 1 is controlled at the submicron level through synchronous temperature deformation. The two work together to reduce the heat transfer to the sample stage 1 through the low thermal conductivity material and control the axial position offset of the sample stage 1 at the submicron level through synchronous temperature deformation, so as to avoid the sample stage 1 shifting due to deformation differences.

[0031] The cold screen 4 is a low-temperature cold screen, such as a typical 50K cold screen, which is fitted with the nested support structure with a gap. By wrapping the nested support structure, the radiative heat leakage is reduced. The cold screen 4 and the nested support structure work together to block external radiative heat, while the nested support structure reduces structural heat transfer, thus jointly ensuring the stability of the low-temperature environment of the sample stage 1 and making the minimum temperature of the sample stage 1 close to the temperature of the low-temperature cold platform.

[0032] The flexible cooling chain 6 is made of high thermal conductivity metal to ensure efficient transfer of cold energy. It has a flexible, bent structure to adapt to the assembly space and avoid structural stress. One end is fixed to the bottom of the sample stage 1 near the sample bearing surface, and the other end is fixed to the top of the mounting adapter 5. It improves the cooling efficiency by conducting heat from the sample stage 1. The cross-sectional area and length of the flexible cooling chain 6 are specifically selected and designed. In conjunction with the heating component of the temperature measuring heating unit 2, the cooling capacity is finely adjusted so that the cold head temperature remains basically unchanged when the sample stage 1 is at high temperature. The cold head temperature is kept stable, reducing the energy waste of the cold platform.

[0033] The height of the thin-walled cylindrical ring structure of the thermal insulation support 3 is adapted to the thickness of the sample stage 1, which further enhances the coaxiality of the sample stage 1 after assembly, avoids local heat accumulation due to structural misalignment, and ensures temperature uniformity.

[0034] The inner and outer nested materials of the nested support structure are made of three different low thermal conductivity, high stiffness materials. The deformations produced by the first material 7, the second material 8, and the third material 9 are respectively... , , The relationship that its deformable variables satisfy is: ; When the temperature changes, the deformations produced by the three materials cancel each other out, and the sample stage 1 hardly deforms. The axial position offset of the sample stage 1 is controlled at the submicron level, which further optimizes the deformation consistency of the inner and outer layers and strengthens the guarantee effect on the positional stability of the sample stage 1.

[0035] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit them. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can still be made to the technical solutions of the present invention, and these modifications or equivalent substitutions cannot cause the modified technical solutions to deviate from the spirit and scope of the technical solutions of the present invention.

Claims

1. A rapid temperature-changing sample stage suitable for vacuum environments, characterized in that: Includes sample stage, thermal insulation support components, mounting adapters, temperature measuring and heating unit, nested support structure, cold shield and flexible cold conduction chain; The sample stage is fixedly connected to the mounting adapter via an insulating support component. The mounting adapter is used to fix the sample stage to the low-temperature cold platform, and the sample stage and the mounting adapter are fixedly connected at both ends via a flexible cold-conducting chain. The nested support structure is assembled on the lower outer side of the sample stage to suppress axial displacement of the sample stage. The cold shield is wrapped around the outside of the nested support structure to reduce radiative heat leakage. The temperature measuring and heating unit includes a temperature sensor and a heating component. The temperature sensor is fixedly installed at the center of the sample stage, and the heating component is fixedly installed at a preset mounting position on the sample stage.

2. The rapid temperature-changing sample stage suitable for vacuum environments according to claim 1, characterized in that: The sample stage is made of high-purity copper or high-purity aluminum with a high RRR value, and adopts an integrated molding structure with a thin substrate and reinforcing ribs.

3. The rapid temperature-changing sample stage suitable for vacuum environments according to claim 1, characterized in that: The thermal insulation support is a thin-walled annular structure, made of glass fiber epoxy resin composite material, polyarylisopropyl ketone, glass ceramic, carbon fiber, or poly-N,N ’ -p, p ’ Made of one or more low thermal conductivity, high rigidity materials, such as 1-oxydiphenylmethylpyranbromoimide, the thermal insulation support has through holes on its side wall for the power supply connection line to enter and exit. It is fixedly connected to the sample stage and mounting adapter by screwing or gluing. The diameter of the thermal insulation support is adapted to the diameter of the sample stage to ensure that the sample stage is centrally symmetrical after assembly. The position of the through holes on the side wall is adapted to the layout of the connection lines of the temperature measuring and heating unit.

4. The rapid temperature-changing sample stage suitable for vacuum environments according to claim 1, characterized in that: The mounting adapter is fixed to the low-temperature cold platform by screwing, and its top is provided with screwing or adhesive structure that connects to the heat insulation support and flexible cold conduction chain.

5. A rapid temperature-changing sample stage suitable for vacuum environments according to claim 1, characterized in that: The temperature sensor of the temperature measuring and heating unit is a high-precision thermometer, and the heating component of the temperature measuring and heating unit is a heating column made of nickel-chromium heating wire, a miniature ceramic heating plate, or a low-temperature resistant chip heating plate. The heating component is fixed to the preset mounting position of the sample stage by screwing or gluing.

6. A rapid temperature-changing sample stage suitable for vacuum environments according to claim 1, characterized in that: The nested support structure is composed of inner and outer nested materials, and the inner and outer materials and the thermal insulation support are made of the same low thermal conductivity and high stiffness material. The axial position offset of the sample stage is controlled at the submicron level through synchronous temperature deformation.

7. A rapid temperature-changing sample stage suitable for vacuum environments according to claim 1, characterized in that: The cold screen is a low-temperature cold screen that fits with the nested support structure with a gap. By wrapping the nested support structure, it reduces radiative heat leakage and makes the lowest temperature of the sample stage close to the temperature of the low-temperature cold platform.

8. A rapid temperature-changing sample stage suitable for vacuum environments according to claim 1, characterized in that: The flexible cooling chain is made of high thermal conductivity metal and has a flexible, bent structure. One end is fixed to the bottom of the sample stage near the sample bearing surface, and the other end is fixed to the top of the mounting adapter. It improves cooling efficiency by conducting heat from the sample stage. The cross-sectional area and length of the flexible cooling chain are specifically designed and selected, and the cooling capacity is finely adjusted in conjunction with the heating components of the temperature measuring heating unit to maintain a stable temperature of the cold head.

9. A rapid temperature-changing sample stage suitable for vacuum environments according to claim 3, characterized in that: The height of the thin-walled cylindrical ring structure of the thermal insulation support is adapted to the thickness of the sample stage.

10. A rapid temperature-changing sample stage suitable for vacuum environments according to claim 6, characterized in that: The nested support structure uses three different low thermal conductivity, high stiffness materials for its inner and outer layers. The deformations of the first, second, and third materials are as follows: , , The relationship that its deformable variables satisfy is: 。

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