An inspection system for graphite boat material processing

Abstract

The application discloses a kind of for graphite boat material processing inspection system, belong to graphite boat detection technical field, including the test cabinet for detecting graphite boat piece, two groups of symmetric setting lifting guide rails are connected to test cabinet inboard wall, limiting component for limiting graphite boat piece is connected to lifting guide rail inboard wall by guide sliding block, test cabinet bottom is provided with hot air module.The present application can use the pressure regulating plate to adjust the pressure change in the test vertical plate as a control signal by the setting of pressure regulating component, automatically and sequentially trigger the electromagnetic repulsion to realize the hardness test of hardness test cone, and realize the bending test by using the inert gas pressurization in the mounting frame, ensure the whole process to be smooth, and the setting of hardness test component can use the strong repulsion generated by electromagnetic instant, realize the high speed, high consistency driving of hardness test cone, ensure the uniformity of impact energy, make the comparison of multi-point hardness data more reliable.

Description

Technical Field

[0001] This invention relates to the field of graphite boat testing technology, and in particular to an inspection system for graphite boat material processing. Background Technology

[0002] In photovoltaic cell manufacturing processes, the graphite boat serves as the core support tool for critical equipment such as PECVD (plasma-enhanced chemical vapor deposition), and its performance directly determines the uniformity and consistency of silicon wafer coating and the final cell conversion efficiency. To ensure its reliability, the manufacturing of graphite boats follows extremely stringent standards: high-purity isostatic graphite materials must be used to ensure that all physical properties meet the required standards.

[0003] In traditional graphite boat quality inspection, to ensure that key physical properties such as material hardness, flexural strength, and thermal shock resistance meet the requirements, tests are usually performed separately on different specialized equipment or at different workstations. This discrete inspection process has inherent defects.

[0004] First, the testing efficiency is low; the multiple clamping and transfer operations and preparation time significantly slow down the pace of batch sampling inspection. Second, the test data is isolated; performance data measured under different equipment and conditions (such as hardness at room temperature and strength under high temperature conditions) are difficult to effectively correlate and analyze, failing to truly reflect the synergistic and restrictive relationships between performance characteristics. More importantly, the testing conditions are distorted; conventional static and room temperature tests cannot simulate the high temperatures (up to 400℃ or higher) and complex coupled environments of periodic thermal stress impacts that graphite boats endure in actual PECVD processes. This leads to some potential defects, such as microcracks or material inhomogeneities that only appear under alternating stress, not being effectively detected before leaving the factory, ultimately bringing risks into the production line. This could result in batch-specific coating inhomogeneity, increased fragmentation rates, or even serious consequences such as boat breakage. Therefore, an inspection system for graphite boat material processing is proposed. Summary of the Invention

[0005] The purpose of this invention is to solve the problems in the prior art by proposing an inspection system for the processing of graphite boat materials.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] An inspection system for processing graphite boat materials includes a test cabinet for inspecting graphite boat components. The inner wall of the test cabinet is connected to two sets of symmetrically arranged lifting guide rails. The inner wall of the lifting guide rails is connected to a limiting component for limiting the position of the graphite boat components via a guide slider. A hot air module is provided at the bottom of the test cabinet. A strip partition is provided above the hot air module. The top of the strip partition is rotatably connected to multiple pins via multiple sets of mounting plates. A dynamic component for simulating the state of the graphite boat components under the condition of carrying silicon wafers for coating is connected to the outer wall of the pins.

[0008] The test cabinet contains two test platforms connected to its top by two hydraulic lifting rods. Multiple test vertical plates are connected to the bottom of each test platform by several vertical rods. Each test vertical plate has a negative pressure groove at its top, and a pressure regulating component is connected within the negative pressure groove to adjust the pressure within it. Two symmetrically arranged hydraulic holes are located at the bottom of each negative pressure groove. A piston plate is connected to the inner wall of each hydraulic hole via a mounting frame. Both the mounting frame and the piston plate have mounting holes, in which a hardness testing component is installed. Multiple sealing covers are fixed to the inner wall of the piston plate within the test vertical plate. A power supply cover is fixed to the outer wall of each sealing cover, and a disconnection component is connected to the outside of the power supply cover. A pressure-applying magnetic column is located inside the sealing cover to move the hardness testing component.

[0009] Preferably, the limiting component includes a limiting telescopic rod fixed to the guide slider, the limiting telescopic rod is fixed with a supporting limiting frame, and the inner sidewalls at both ends of the supporting limiting frame are fixedly connected with elastic folding frames.

[0010] Preferably, the dynamic component includes multiple impeller components fixed to the outer wall of the pin shaft, multiple conical disks fixedly connected to the outer wall of the pin shaft, and multiple protrusions arranged in a circular array fixedly connected to the edge of the conical disks, the conical disks being disposed in the gaps of the graphite boat components.

[0011] Preferably, the test plumb plates located below the test platform are in pairs, with the two test plumb plates in each pair located on the same vertical plane and fixedly connected by two fixing rods.

[0012] Preferably, the pressure regulating component includes a hydraulic push rod fixed to the bottom of the test platform, the output end of the hydraulic push rod is fixedly connected to a pressure regulating plate, the pressure regulating plate is slidably connected to a negative pressure groove on the test plumb plate, and the test plumb plate is filled with hydraulic oil.

[0013] Preferably, the mounting frame is internally connected to the test plumb plate, the inner wall of the mounting frame is slidably connected to the piston plate, and the mounting frame is filled with inert gas.

[0014] Preferably, the disconnection assembly includes a disconnection frame fixed to the power supply casing, a hydraulic bucket slidably connected to the inner side wall of the disconnection frame via a sliding plate, the bottom end of the sliding plate being fixedly connected to the inner end face of the disconnection frame via a reset telescopic rod, a conductive connecting plate for conducting the circuit inside the power supply casing being fixedly connected to the bottom of the sliding plate, and an electromagnetic column electrically connected to the power supply inside the power supply casing being fixedly connected inside the sealing cover.

[0015] Preferably, the hardness testing assembly includes multiple hardness testing cones, the pressure-applying magnetic column is fixedly connected to the multiple hardness testing cones via a fixed platform, and a pressure platform for testing the flexural strength of the graphite boat is fixedly connected to the outer wall of the fixed platform. The pressure platform is slidably connected to the mounting frame, the pressure-applying magnetic column is slidably connected to the piston plate, and the pressure platform is fixedly connected to the piston plate.

[0016] Preferably, the pressure application platform has multiple storage holes, and an elastic corrugated sleeve is fixedly connected to the inner side wall of one end of the fixed platform located on one side of the storage hole. The inner side wall of the front end of the elastic corrugated sleeve is fixedly connected to the hardness testing cone. Multiple polarization lasers are fixed on the outer side wall of the hardness testing cone located in the middle, and laser sensing plates are fixed on the outer side walls of multiple hardness testing cones located at the edges.

[0017] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0018] 1. This solution, through the setting of dynamic components, can break through the conventional static and room temperature testing methods. By combining hot air circulation, mechanical excitation and height adjustment, it actively simulates the high temperature, stress change and sudden vibration environment under stress change in the silicon wafer coating process. It simulates the fatigue, stress concentration and performance degradation that graphite boats may encounter in actual use, realizes pre-operational condition inspection, and greatly improves the predictive accuracy of the test.

[0019] 2. This solution, through the setting of the pressure regulating component, can use the pressure adjustment change of the pressure plate in the test plumb plate as a control signal to automatically and sequentially trigger the electromagnetic repulsion to realize the hardness test of the hardness test cone, and use the inert gas in the mounting frame to pressurize and realize the bending test, ensuring that the whole process is smooth and there is no need for manual intervention to switch steps.

[0020] 3. This solution, through the setup of hardness testing components and pressure table, can utilize the strong repulsive force generated instantaneously by electromagnetic induction to achieve high-speed and high-consistency driving of the hardness testing cone, ensuring uniform impact energy and making the comparison of multi-point hardness data more reliable. Furthermore, by pressurizing the inert gas within the mounting frame, a stable, controllable, and accurately measurable bending load is provided, which is superior to simple mechanical pressure, making the overall test data more accurate and reliable. Attached Figure Description

[0021] Figure 1This is a three-dimensional structural schematic diagram of an inspection system for processing graphite boat materials proposed in this invention.

[0022] Figure 2 This is an overall assembly drawing of an inspection system for graphite boat material processing proposed in this invention;

[0023] Figure 3 for Figure 2 Enlarged view of point A in the middle;

[0024] Figure 4 This is an assembly diagram of the graphite boat component in an inspection system for graphite boat material processing proposed in this invention.

[0025] Figure 5 This is a schematic diagram of a defined component in an inspection system for handling graphite boat materials, as proposed in this invention.

[0026] Figure 6 This is a schematic diagram of the structure of a dynamic component in an inspection system for graphite boat material processing proposed in this invention;

[0027] Figure 7 This is a schematic diagram of the structure below the test platform in an inspection system for graphite boat material processing proposed in this invention;

[0028] Figure 8 This is a schematic diagram of the arrangement of test vertical plates in an inspection system for graphite boat material processing proposed in this invention;

[0029] Figure 9 This is a partial cross-sectional view of a test vertical plate in an inspection system for graphite boat material processing proposed in this invention;

[0030] Figure 10 for Figure 9 Enlarged view of point B in the middle;

[0031] Figure 11 This is an assembly diagram of the mounting frame in an inspection system for graphite boat material processing proposed in this invention;

[0032] Figure 12 This is a schematic diagram of the hardness testing component in an inspection system for graphite boat material processing proposed in this invention.

[0033] Figure 13 This is a schematic diagram of the structure of an interruption connection component of an inspection system for processing graphite boat materials, as proposed in this invention.

[0034] In the diagram: 1. Test cabinet; 2. Strip partition; 3. Graphite boat component; 4. Lifting guide rail; 5. Guide slider; 6. Supporting and limiting frame; 7. Elastic folding frame; 8. Impeller component; 9. Conical disc; 10. Hydraulic lifting rod; 11. Test platform; 12. Test plumb plate; 13. Hydraulic push rod; 14. Pressure regulating plate; 15. Mounting frame; 16. Piston plate; 17. Sealing cover; 18. Power supply cover; 19. Disconnection frame; 20. Hydraulic bucket; 21. Conductive connecting plate; 22. Electromagnetic column; 23. Pressure applying magnetic column; 24. Fixing platform; 25. Hardness testing cone; 26. Elastic corrugated sleeve; 27. Polarization laser; 28. Laser sensing plate; 29. ​​Pressure applying platform. Detailed Implementation

[0035] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0036] In the description of this invention, it should be noted that the terms "upper," "lower," "inner," "outer," "top / bottom," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0037] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installed," "equipped with," "sleeved / connected," "connected," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0038] Example, refer to Figures 1 to 13An inspection system for processing graphite boat materials includes a test cabinet 1 for testing graphite boat 3. The inner wall of the test cabinet 1 is connected to two sets of symmetrically arranged lifting guide rails 4. The inner wall of the lifting guide rails 4 is connected to a limiting component for limiting the position of the graphite boat 3 via a guide slider 5. A hot air module is provided at the bottom of the test cabinet 1. A strip partition 2 is provided above the hot air module. Multiple pins are rotatably connected to the top of the strip partition 2 via multiple sets of mounting plates. A dynamic component for simulating the state of the graphite boat 3 under the condition of carrying silicon wafers for coating is connected to the outer wall of the pins.

[0039] Furthermore, the limiting component includes a limiting telescopic rod fixed to the guide slider 5, the limiting telescopic rod is fixed with a supporting limiting frame 6, and elastic folding frames 7 are fixedly connected to the inner sidewalls at both ends of the supporting limiting frame 6. The dynamic component includes multiple impeller parts 8 fixed to the outer sidewall of the pin shaft, multiple conical disks 9 are fixedly connected to the outer sidewall of the pin shaft, and multiple protrusions arranged in a circular array are fixedly connected to the edge of the conical disks 9. The conical disks 9 are disposed in the gaps of the graphite boat parts 3.

[0040] It should be noted that: the frame of the graphite boat 3 to be tested is placed inside the support and limiting frames 6 on both sides, and the two elastic folding frames 7 inside the support and limiting frames 6 clamp and limit the graphite boat 3 to achieve the initial limiting of the graphite boat 3. Then, the guide slider 5 is controlled to slide in the lifting guide rail 4 to adjust the contact state between the graphite boat 3 and the conical disk 9. At the same time, the hot air module at the bottom of the test cabinet 1 is activated, and hot air will flow upward through the strip partition 2. The flowing air will drive the impeller 8 to rotate. The rotation of the impeller 8 will drive the conical disk 9 to rotate together through the pin shaft. The rotating conical disk 9 will excite the entire graphite boat 3 with a small amplitude. During this process, the height of the graphite boat 3 is continuously adjusted to simulate the state of the graphite boat 3 being affected by external forces intermittently, and to reproduce the stress change state of the graphite boat 3 when loading silicon wafers for coating at high temperature.

[0041] The advantages mentioned above are: this can simulate the state of the graphite boat 3 under the high temperature coating condition of silicon wafer, which makes it easier to test whether its various physical properties are qualified under the extreme conditions of the use of the graphite boat 3.

[0042] The top of the test cabinet 1 is connected to two test platforms 11 by two hydraulic lifting rods 10. The bottom of the test platform 11 is connected to multiple test plumb plates 12 by multiple vertical rods. The top of the test plumb plate 12 is provided with a negative pressure groove. The negative pressure groove of the test plumb plate 12 is connected to a pressure regulating component for adjusting the pressure state in the negative pressure groove. The bottom of the negative pressure groove of the test plumb plate 12 is provided with two symmetrically arranged hydraulic holes. The inner side wall of the hydraulic holes is connected to a piston plate 16 by a mounting frame 15. Both the mounting frame 15 and the piston plate 16 are provided with mounting holes. The hardness test component is installed in the mounting holes. Multiple sealing covers 17 are fixed on the side wall of the piston plate 16 located inside the test plumb plate 12. A power supply cover 18 is fixed on the outer side wall of the sealing cover 17. A disconnection component is connected to the outside of the power supply cover 18. The inner side of the sealing cover 17 is provided with a pressure magnetic column 23 for pushing the hardness test component to move.

[0043] Furthermore, the test plumb plates 12 located below the test platform 11 are arranged in pairs, with the two test plumb plates 12 in each pair located on the same vertical plane and fixedly connected by two fixing rods. The pressure regulating assembly includes a hydraulic push rod 13 fixed to the bottom of the test platform 11, and a pressure regulating plate 14 fixedly connected to the output end of the hydraulic push rod 13. The pressure regulating plate 14 is slidably connected to the negative pressure groove on the test plumb plate 12. The test plumb plate 12 is filled with hydraulic oil. The mounting frame 15 is connected to the interior of the test plumb plate 12, and the inner wall of the mounting frame 15 is slidably connected to the piston plate 16. The mounting frame 15 is filled with inert gas. The disconnection assembly includes a disconnection frame 19 fixed to the power supply casing 18. The inner wall of the disconnection frame 19 is connected by a sliding... The slide plate is slidably connected to a hydraulic bucket 20. The bottom end of the slide plate is fixedly connected to the inner end face of the disconnect frame 19 via a reset telescopic rod. A conductive connecting plate 21 for conducting the circuit inside the power supply cover 18 is fixedly connected to the bottom of the slide plate. An electromagnetic column 22 that is electrically connected to the power supply inside the power supply cover 18 is fixedly connected inside the sealing cover 17. The hardness testing assembly includes multiple hardness testing cones 25. A pressure magnetic column 23 is fixedly connected to multiple hardness testing cones 25 via a fixed platform 24. A pressure platform 29 for testing the flexural strength of the graphite boat 3 is fixedly connected to the outer wall of the fixed platform 24. The pressure platform 29 is slidably connected to the mounting frame 15. The pressure magnetic column 23 is slidably connected to the piston plate 16. The pressure platform 29 is fixedly connected to the piston plate 16.

[0044] Multiple storage holes are provided on the pressure table 29. An elastic corrugated sleeve 26 is fixedly connected to the inner wall of one end of the fixed table 24 located on one side of the storage hole. The inner wall of the front end of the elastic corrugated sleeve 26 is fixedly connected to the hardness test cone 25. Multiple polarization lasers 27 are fixed on the outer wall of the hardness test cone 25 located in the middle. Laser sensing plates 28 are fixed on the outer walls of the multiple hardness test cones 25 located on the edge.

[0045] It should be noted that when testing the physical properties of the graphite boat 3, the two hydraulic lifting rods 10 are controlled to move the two test platforms 11 downwards sequentially, allowing the test plumb plate 12 to enter the gap of the graphite boat 3. Then, the hydraulic push rod 13 is controlled to push the pressure regulating plate 14 downwards to a certain distance and stop. Under the pressure of the pressure regulating plate 14, the hydraulic pressure inside the test plumb plate 12 will increase to a certain extent, causing the hydraulic bucket 20 to be pressurized and the sliding plate to move downwards. The downward movement of the sliding plate will cause the conductive connecting plate 21 to move downwards, thereby connecting the circuit inside the power supply casing 18 and supplying a strong current to the electromagnetic column 22 inside the sealing casing 17. This causes the electromagnetic column 22 to become instantly strongly magnetic, generating a strong magnetic repulsion force on the pressure-applying magnetic column 23, thus increasing the pressure... The magnetic column 23 drives multiple hardness testing cones 25 to impact and pierce the surface of the graphite boat 3 via the fixed platform 24. When the surface hardness of the graphite boat 3 is inconsistent, the penetration depth of the hardness testing cones 25 will also be different. By measuring the displacement change of the polarization laser 27 on the outer wall of the hardness testing cone 25 and the peripheral laser sensing plate 28 located in the cavity of the pressure platform 29, the hardness testing cones 25 are compared with each other to determine whether the hardness of the test area of ​​the graphite boat 3 is consistent. Subsequently, the indentation on the side wall of the graphite boat 3 is photographed and recorded as a record for batch sampling inspection. This can quickly complete the hardness test of the graphite boat 3 under actual working conditions and ensure that the hardness of the graphite boat 3 is qualified during actual use.

[0046] After the hardness test is completed, the pressure regulating plate 14 is pressed down by the hydraulic push rod 13, which increases the hydraulic pressure in the test vertical plate 12. The hydraulic bucket 20 is pressed down and moves down, which in turn drives the conductive connecting plate 21 to move down and disconnect from the circuit connection in the power supply cover 18. This disconnects the electromagnetic column 22 from the power supply, and the magnetic repulsion force on the pressure magnetic column 23 disappears. The hardness test cone 25 is elastically reset under the action of the elastic corrugated sleeve 26 and is re-stored in the cavity of the pressure table 29. At the same time, as the hydraulic pressure in the test vertical plate 12 continues to increase, the piston plate 16 in the mounting frame 15 is pressed, which pressurizes the inert gas in the mounting frame 15. This allows the piston plate 16 to slowly push the pressure table 29 outward, so that the pressure table 29 can be pressed tightly against the side wall of the graphite boat 3.

[0047] The advantages mentioned above are: allowing the graphite boat 3 to be locally subjected to pressure and bending, conducting continuous bending tests on multiple parts of the graphite boat 3, and then using a level measuring instrument to detect whether the plate on the graphite boat 3 has deformed and bent, which is used as a reference to see whether the flexural strength of the graphite boat 3 under stress during the silicon wafer coating process meets the standard.

[0048] In use, this invention performs destructive sampling tests on batches of graphite boat parts 3. First, the test cabinet 1 is opened. Then, the frame of the graphite boat part 3 to be tested is placed within the supporting and limiting frames 6 on both sides. The two elastic folding frames 7 within the supporting and limiting frames 6 clamp and limit the graphite boat part 3, achieving initial positioning. Then, the guide slider 5 is controlled to slide within the lifting guide rail 4, adjusting the contact state between the graphite boat part 3 and the conical disc 9. Simultaneously, the hot air module at the bottom of the test cabinet 1 is activated, causing hot air to continuously flow upwards through the strip partition 2. The airflow will drive the impeller 8 to rotate, and the rotation of the impeller 8 will drive the conical disk 9 to rotate together through the pin. The rotating conical disk 9 will cause small-amplitude excitation to the entire graphite boat 3, and continuously adjust the height of the graphite boat 3 during this process, simulating the state of the graphite boat 3 being affected by external forces intermittently, and reproducing the stress change state of the graphite boat 3 when loading silicon wafers for coating at high temperature. This can simulate the state of the graphite boat 3 under the high temperature coating condition of silicon wafers, which is convenient for subsequent testing of its various physical properties under the extreme working conditions of the graphite boat 3.

[0049] During the testing of the physical properties of the graphite boat 3, two hydraulic lifting rods 10 are controlled to move the two test platforms 11 downwards sequentially, allowing the test plumb plate 12 to enter the gap of the graphite boat 3. Then, the hydraulic push rod 13 is controlled to push the pressure regulating plate 14 downwards to a certain distance and stop. Under the pressure of the pressure regulating plate 14, the hydraulic pressure inside the test plumb plate 12 increases to a certain extent, causing the hydraulic bucket 20 to be pressurized and the sliding plate to move downwards. The downward movement of the sliding plate causes the conductive connecting plate 21 to move downwards, thereby activating the circuit inside the power supply enclosure 18. This allows a strong current to flow through the electromagnetic column 22 inside the sealing cover 17, causing the electromagnetic column 22 to momentarily become strongly magnetic, generating a strong magnetic repulsion force on the pressure magnetic column 23. Multiple hardness testing cones 25 driven by the fixed stage 24 impact and puncture the surface of the graphite boat 3. When the surface hardness of the graphite boat 3 is inconsistent, the penetration depth of the hardness testing cones 25 will also be different. By measuring the displacement change of the polarization laser 27 on the outer wall of the hardness testing cone 25 and the peripheral laser sensing plate 28 located in the cavity of the pressure stage 29, the hardness testing cones 25 are compared with each other to determine whether the hardness of the test area of ​​the graphite boat 3 is consistent. Subsequently, the indentation on the side wall of the graphite boat 3 is photographed and recorded as a record of batch sampling inspection. In this way, the hardness test of the graphite boat 3 under actual working conditions can be completed quickly, ensuring that the hardness of the graphite boat 3 is qualified in actual use.

[0050] After the hardness test is completed, the hydraulic push rod 13 continues to press the pressure regulating plate 14 downward, increasing the hydraulic pressure in the test plumb plate 12. This causes the hydraulic bucket 20 to continue moving downward under pressure, which in turn moves the conductive connecting plate 21 downward, disengaging it from the circuit connection inside the power supply enclosure 18. This disconnects the electromagnetic column 22 from power, causing the magnetic repulsion force on the pressure magnetic column 23 to disappear. The hardness testing cone 25 elastically resets under the action of the elastic corrugated sleeve 26 and is repositioned in the cavity of the pressure table 29. Simultaneously, as the hydraulic pressure in the test plumb plate 12 continues to increase... When the piston plate 16 inside the mounting frame 15 is pressurized, it pressurizes the inert gas inside the mounting frame 15, allowing the piston plate 16 to slowly push the pressure table 29 outward, so that the pressure table 29 can press against the side wall of the graphite boat 3, causing the graphite boat 3 to bend under local pressure. This is a continuous bending resistance test of multiple parts of the graphite boat 3. Subsequently, a level measuring instrument is used to detect whether the plate on the graphite boat 3 has deformed and bent, which is used as a reference to see whether the flexural strength of the graphite boat 3 under stress during the silicon wafer coating process meets the standard.

[0051] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. An inspection system for processing graphite boat materials, comprising a test cabinet (1) for inspecting graphite boat parts (3), characterized in that, The inner wall of the test cabinet (1) is connected to two sets of symmetrically arranged lifting guide rails (4). The inner wall of the lifting guide rails (4) is connected to a limiting component for limiting the graphite boat (3) through a guide slider (5). A hot air module is provided at the bottom of the test cabinet (1). A strip partition (2) is provided above the hot air module. Multiple pins are rotatably connected to the top of the strip partition (2) through multiple sets of mounting plates. A dynamic component for simulating the state of the graphite boat (3) under the condition of carrying silicon wafer coating is connected to the outer wall of the pins. The test cabinet (1) has two test platforms (11) connected to its top by two hydraulic lifting rods (10). Multiple test vertical plates (12) are connected to the bottom of each test platform (11) by multiple vertical rods. A negative pressure groove is provided at the top of each test vertical plate (12). A pressure regulating component for adjusting the pressure within the negative pressure groove is connected to the negative pressure groove of each test vertical plate (12). Two symmetrically arranged hydraulic holes are respectively opened at the bottom of the negative pressure groove of each test vertical plate (12). The inner sidewalls of the hydraulic holes are connected by an installation frame (1). 5) A piston plate (16) is connected. Mounting holes are provided on both the mounting frame (15) and the piston plate (16). A hardness testing component is installed in the mounting holes. Multiple sealing covers (17) are fixed on the side wall of the piston plate (16) inside the test vertical plate (12). A power supply cover (18) is fixed on the outer side wall of the sealing cover (17). A disconnection component is connected to the outside of the power supply cover (18). A pressure magnetic column (23) for pushing the hardness testing component to move is provided inside the sealing cover (17). The dynamic component includes multiple impeller parts (8) fixed on the outer wall of the pin shaft, multiple conical disks (9) fixedly connected to the outer wall of the pin shaft, multiple protrusions arranged in a circular array fixedly connected to the edge of the conical disks (9), and the conical disks (9) are disposed in the gaps of the graphite boat parts (3).

2. The inspection system for graphite boat material processing according to claim 1, characterized in that, The limiting component includes a limiting telescopic rod fixed on the guide slider (5), the limiting telescopic rod is fixed with a supporting limiting frame (6), and the inner sidewalls at both ends of the supporting limiting frame (6) are fixedly connected with elastic folding frames (7).

3. The inspection system for graphite boat material processing according to claim 1, characterized in that, The test plumb plates (12) located below the test platform (11) are in pairs, with the two test plumb plates (12) in each pair located on the same vertical plane and fixedly connected by two fixing rods.

4. The inspection system for graphite boat material processing according to claim 1, characterized in that, The pressure regulating component includes a hydraulic push rod (13) fixed to the bottom of the test platform (11). The output end of the hydraulic push rod (13) is fixedly connected to a pressure regulating plate (14). The pressure regulating plate (14) is slidably connected to the negative pressure groove on the test vertical plate (12). The test vertical plate (12) is filled with hydraulic oil.

5. The inspection system for graphite boat material processing according to claim 1, characterized in that, The mounting frame (15) is connected to the interior of the test vertical plate (12), the inner wall of the mounting frame (15) is slidably connected to the piston plate (16), and the mounting frame (15) is filled with inert gas.

6. The inspection system for graphite boat material processing according to claim 1, characterized in that, The disconnection assembly includes a disconnection frame (19) fixed on the power supply housing (18). The inner side wall of the disconnection frame (19) is slidably connected to a hydraulic bucket (20) via a sliding plate. The bottom end of the sliding plate is fixedly connected to the inner end face of the disconnection frame (19) via a reset telescopic rod. A conductive connecting plate (21) for conducting the circuit inside the power supply housing (18) is fixedly connected to the bottom of the sliding plate. An electromagnetic column (22) that is electrically connected to the power supply inside the power supply housing (18) is fixedly connected inside the sealing cover (17).

7. The inspection system for graphite boat material processing according to claim 1, characterized in that, The hardness testing assembly includes multiple hardness testing cones (25). The pressure-applying magnetic column (23) is fixedly connected to the multiple hardness testing cones (25) via a fixed platform (24). The outer wall of the fixed platform (24) is fixedly connected to a pressure platform (29) for flexural strength testing of the graphite boat (3). The pressure platform (29) is slidably connected to the mounting frame (15). The pressure-applying magnetic column (23) is slidably connected to the piston plate (16). The pressure platform (29) is fixedly connected to the piston plate (16).

8. The inspection system for graphite boat material processing according to claim 7, characterized in that, The pressure table (29) has multiple storage holes. An elastic corrugated sleeve (26) is fixedly connected to the inner wall of one end of the fixed table (24) located on one side of the storage hole. The inner wall of the front end of the elastic corrugated sleeve (26) is fixedly connected to the hardness test cone (25). Multiple polarization lasers (27) are fixed on the outer wall of the middle hardness test cone (25), and laser sensing plates (28) are fixed on the outer walls of the multiple hardness test cones (25) located on the edge.

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