Single-sided roll-to-roll photoetching equipment

Abstract

The invention relates to single-sided reel-to-reel photoetching equipment which comprises an exposure platform, an unwinding mechanism, a winding mechanism and an exposure mechanism, the unwinding mechanism comprises an unwinding drum with an active unwinding function on an unwinding frame, an unwinding cache device, an unwinding floating device, a deviation rectifying device and a cleaning device, and a diaphragm is driven by the unwinding drum; after sequentially passing through the unwinding cache device, the unwinding floating device, the deviation rectifying device and the cleaning device, the steel wire rope enters the upper part of the exposure platform; the winding mechanism is also arranged on the unwinding frame, the winding mechanism comprises a winding drum with an active winding function, a winding floating device and a winding temporary storage device, and a membrane discharged from the exposure platform firstly passes through a membrane guide roller below the exposure platform, then passes through the winding floating device and the winding temporary storage device and then is wound by the winding drum; the unwinding temporary storage device and the winding temporary storage device are both of active temporary storage structures, the length of the temporarily stored membranes can be actively adjusted, the occupied space is saved, and meanwhile the feeding efficiency of the membranes is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of photoetching equipment, in particular to a single-side roll-to-roll photoetching equipment. BACKGROUND

[0002] The flexible substrate (film) is printed with a pattern on it by photoetching method, and with the development of technology, the photoetching of the film is mostly in a roll-to-roll mode, that is, the film is unwound by an unwinding mechanism, and after passing through an exposure mechanism, the film is wound up by a winding mechanism.

[0003] The existing roll-to-roll photoetching equipment has the unwinding and winding mechanisms arranged at two ends of an exposure platform, and the film is conveyed by rotating the rotating shafts of the unwinding and winding mechanisms, and the structure that the unwinding and winding mechanisms are arranged at two sides occupies a large space. SUMMARY

[0004] The present application aims to provide a single-side roll-to-roll photoetching equipment, which has the unwinding and winding mechanisms arranged on an unwinding frame, and has winding and unwinding buffer devices that can actively buffer, so that the occupied space is saved, the film feeding efficiency is improved, and the overall photoetching efficiency is improved.

[0005] To achieve the above object, the present application adopts the technical scheme of a single-side roll-to-roll photoetching equipment, which comprises a frame, the frame is provided with an exposure platform, the exposure platform is provided with an unwinding mechanism, a winding mechanism and an exposure mechanism, the unwinding mechanism comprises an unwinding drum with an active unwinding function, an unwinding buffer device, an unwinding floating device, a deviation rectifying device and a cleaning device on the unwinding frame, the film passes through the unwinding buffer device, the unwinding floating device, the deviation rectifying device and the cleaning device in sequence from the unwinding drum and enters above the exposure platform; the winding mechanism is also arranged on the unwinding frame, the winding mechanism comprises a winding drum with an active winding function, a winding floating device and a winding buffer device, the film coming out of the exposure platform first passes through a film guide roll below the exposure platform, then passes through the winding floating device and the winding buffer device and is wound up by the winding drum, and the unwinding buffer device and the winding buffer device are both active buffer structures and can actively adjust the length of the buffered film.

[0006] Preferably, the unwinding buffer device and the winding buffer device both comprise a buffer fixed guide roller and a buffer movable seat, the buffer movable seat is provided with a buffer movable guide roller, and the number of the buffer movable guide rollers and the buffer fixed guide rollers is greater than 2.

[0007] Preferably, the buffer movable seat cooperates with a buffer movable sliding rail arranged on the unwinding frame, the buffer driving structure comprises a buffer driving motor and a buffer driving screw arranged on the unwinding frame, and the buffer movable seat is sleeved on the buffer driving screw.

[0008] Preferably, the unwinding floating device is used to adjust the film tension between the unwinding buffer device and the deviation rectifying device, and the winding floating device is used to adjust the film tension between the winding buffer device and the film guide structure at the unwinding frame.

[0009] Preferably, the winding floating device and the unwinding floating device both comprise a floating air cylinder arranged on the unwinding frame, the floating air cylinder is connected with a floating sliding seat, and the floating sliding seat is provided with a floating guide roller.

[0010] Preferably, the unwinding frame is provided with a floating sliding rail matched with the floating sliding seat, and the floating sliding rail and the floating sliding seat are provided with a magnetic scale and a magnetic scale reading head matched with each other.

[0011] Preferably, the exposure platform is provided with a film lifting device at both ends, the film lifting device comprises a film lifting movable structure arranged on the side surface of the exposure platform, the film lifting movable structure is connected with a film lifting lifting structure, and the film lifting lifting structure is connected with a film lifting guide roller.

[0012] Preferably, the exposure mechanism comprises an exposure movable device arranged on the rack, the exposure movable device is provided with an exposure lifting device, and the exposure lifting device is connected with an exposure structure used for exposure.

[0013] The technical effect of the present application is: The unwinding and winding mechanisms are arranged on the unwinding frame, and the winding buffer device and the unwinding buffer device which can actively buffer are arranged, so that the occupied space is saved, the film feeding efficiency is improved, and the overall photolithography efficiency is improved.

[0014] The buffer device adopts the mode of motor cooperating with screw rod to realize the distance adjustment of the buffer fixed guide roller and the buffer movable guide roller, thereby realizing the active adjustment of the buffer amount, the overall operation is convenient, easy to realize, and the adjustment change speed of the buffer amount can be controlled.

[0015] The design of the film lifting device makes the film above the exposure platform in the film conveying process, and does not affect the film being adsorbed by the exposure platform. DETAILED DESCRIPTION

[0016] Figure 1 It is a perspective view of a single-sided roll-to-roll photolithography equipment.

[0017] Figure 2 It is a perspective view of a single-sided roll-to-roll photolithography equipment. Figure 1 It is a perspective view of a single-sided roll-to-roll photolithography equipment.

[0018] Figure 3 It is a perspective view of a single-sided roll-to-roll photolithography equipment.

[0019] Figure 4 It is a perspective view of a single-sided roll-to-roll photolithography equipment.

[0020] Figure 5 is a schematic view of the unwinding mechanism and the winding mechanism.

[0021] Figure 6 is a perspective view of the unwinding mechanism and the winding mechanism from a first perspective.

[0022] Figure 7 is a perspective view of the unwinding mechanism and the winding mechanism from a second perspective.

[0023] Figure 8 is a schematic view of the unwinding buffer device.

[0024] Figure 9 is a perspective view of the unwinding floating device.

[0025] The text annotations shown in the figure represent: 1, frame; 2, exposure platform; 3, exposure mechanism; 4, unwinding mechanism; 5, winding mechanism; 6, exposure movable device; 7, exposure lifting device; 8, exposure structure; 11, camera mounting seat; 12, camera telescopic pull rod; 13, camera; 15, film lifting mounting seat; 16, film lifting movable structure; 17, film lifting lifting structure; 18, film lifting guide roller; 21, unwinding frame; 22, unwinding drum; 23, unwinding buffer device; 24, unwinding floating device; 25, deviation correction device; 26, cleaning device; 27, winding floating device; 28, winding buffer device; 29, winding drum; 31, buffer driving motor; 32, buffer driving screw; 33, buffer movable seat; 34, buffer movable slide rail; 35, buffer fixed guide roller; 36, buffer movable guide roller; 37, floating air cylinder; 38, floating slide; 39, floating guide roller; 40, floating slide rail. DETAILED DESCRIPTION

[0026] In order for those skilled in the art to better understand the technical solutions of the present application, the present application will be described in detail below in conjunction with the drawings. The description in this part is only exemplary and explanatory, and should not have any limiting effect on the protection scope of the present application.

[0027] As Figures 1-2 and Figure 5As shown, the single-sided roll-to-roll photoetching device of the present application comprises a rack 1, an exposure platform 2 arranged on the rack 1, a roll-off mechanism 4, a roll-up mechanism 5 and an exposure mechanism 3 matched with the exposure platform 2, the roll-off mechanism 4 comprises a roll-off drum 22 with a driving roll-off function on a roll-off rack 21, a roll-off buffer device 23, a roll-off floating device 24, a deviation rectifying device 25 and a cleaning device 26, the diaphragm is from the roll-off drum 22, sequentially passes through the roll-off buffer device 23, the roll-off floating device 24, the deviation rectifying device 25 and the cleaning device 26 and then enters the upper side of the exposure platform 2; the roll-up mechanism 5 is also arranged on the roll-off rack 21, the roll-up mechanism 5 comprises a roll-up drum 29 with a driving roll-up function, a roll-up floating device 27 and a roll-up buffer device 28, the diaphragm from the exposure platform 2 first passes through a film guide roll under the exposure platform 2, then passes through the roll-up floating device 27 and the roll-up buffer device 28 and is rolled up by the roll-up drum 29, the roll-off buffer device 23 and the roll-up buffer device 28 are both driving buffer structures, can actively adjust the length of the buffered diaphragm, the roll-off floating device 24 is used for adjusting the diaphragm tension between the roll-off buffer device 23 and the deviation rectifying device 25, and the roll-up floating device 27 is used for adjusting the diaphragm tension between the roll-up buffer device 28 and the film guide structure at the diaphragm entering position of the roll-off rack.

[0028] In the initial state, the roll-off buffer device 23 is in the maximum buffer state, the roll-up buffer device 28 is in the minimum buffer state, when the diaphragm needs to be rolled off, the roll-off buffer device 23 is actively reduced to the minimum position, in this process, the roll-off floating device 24 is retracted to adjust the pressure of the diaphragm, thereby increasing the diaphragm length between the roll-off buffer device 23 and the deviation rectifying device 25, after the roll-off buffer device 23 is actively reduced, the roll-off floating device 24 is restored to the original position, so that all the diaphragms stored in the buffer device are completed, at the same time, the roll-up buffer device 28 is actively increased to the maximum position, in this process, the roll-up floating device 27 is elongated to adjust the pressure of the diaphragm, thereby reducing the diaphragm between the roll-up buffer device 28 and the film guide structure at the diaphragm entering position of the roll-off rack, after the roll-up buffer device is actively increased, the roll-up buffer device 28 is restored to the original position.

[0029] In a specific operation process, the amount of film cached by the unwinding buffer device 23 can be designed to be just the amount of film required for one exposure, and the buffer released by the unwinding active release and the buffer increased by the winding active increase are consistent. Thus, only unwinding through the unwinding buffer device 23 is needed without cooperating with the unwinding drum 22, and after the unwinding buffer device 23 is discharged, unwinding through the unwinding drum 22 is performed, and at the same time, the amount of buffer is actively increased by the unwinding buffer device 23, and the film unwound from the unwinding drum 22 is cached on the unwinding buffer device 23. The speed of actively reducing the amount of buffer of the unwinding buffer device 23 is greater than the speed of actively increasing the amount of buffer, and at the same time, the winding drum 29 also winds, and at the same time of winding, the winding buffer device 28 actively reduces the amount of buffer, and then the cached film is wound by the winding drum 29. The speed of increasing the amount of buffer film of the winding buffer device 28 is greater than the speed of reducing the amount of buffer film, so as to ensure that the discharging speed when cooperating with the exposure equipment is faster than the speed of simply rotating the axis of the unwinding drum 22 and the speed of rotating the axis of the winding drum 29.

[0030] As shown in Figures 6-8 , the unwinding buffer device 23 and the winding buffer device 28 each include a buffer fixed guide roller 35 and a buffer movable seat 33. The buffer movable seat 33 is matched with a buffer driving structure, and the buffer movable seat 33 is provided with a buffer movable guide roller 36. The number of the buffer movable guide roller 36 and the buffer fixed guide roller 35 is greater than 2. The buffer movable seat 33 is matched with a buffer movable slide rail 34 provided on the unwinding frame 21. The buffer driving structure includes a buffer driving motor 31 and a buffer driving screw 32 provided on the unwinding frame 21. The buffer movable seat 33 is sleeved on the buffer driving screw 32.

[0031] The specific work of the unwinding buffer device 23 and the winding buffer device 28 is as follows: when reducing the buffer, the buffer driving motor 31 drives the buffer driving screw 32 to rotate, so as to move the buffer movable seat 33 to the buffer fixed guide roller 35, and then the distance between the buffer movable guide roller 36 and the buffer fixed guide roller 35 is reduced, so as to realize the operation of reducing the buffer. When increasing the buffer, the buffer driving motor 31 drives the buffer driving screw 32 to rotate, so as to move the buffer movable seat 33 away from the buffer fixed guide roller 35, and then the distance between the buffer movable guide roller 36 and the buffer fixed guide roller 35 is increased, so as to complete the caching of the film. The speed of increasing or reducing the buffer can be controlled by controlling the rotating speed of the buffer driving motor 31.

[0032] As shown in Figures 6-7 and Figure 9The winding floating device 27 and the unwinding floating device 24 both include a floating cylinder 37 arranged on the unwinding frame 21, the floating cylinder 37 is connected with a floating sliding seat 38, the floating sliding seat 38 is arranged with a floating guide roller 39, the unwinding frame 21 is arranged with a floating sliding rail 40 matched with the floating sliding seat 38, and the floating sliding rail 40 and the floating sliding seat 38 are arranged with a magnetic scale and a magnetic scale reader matched with each other.

[0033] When the unwinding floating device 24 is in operation, the floating sliding seat 38 is driven by the floating cylinder 37 to move on the floating sliding rail 40, so as to drive the floating guide roller 39 to move, thereby adjusting the length of the diaphragm between the unwinding buffer device 23 and the deviation rectifying device 25 through the floating guide roller 39, and dynamically adjusting the tension of the diaphragm, and in the adjusting process, the moving amplitude of the floating guide roller 39 can be calculated through the magnetic scale and the magnetic scale reader to avoid over-adjustment.

[0034] The operation of the winding floating device 27 is basically the same as that of the unwinding floating device 24.

[0035] As shown in Figure 2 and Figure 4 , the two ends of the exposure platform 2 are provided with a diaphragm lifting device, the diaphragm lifting device includes a diaphragm lifting movable structure 16 arranged on the side of the exposure platform 2, the diaphragm lifting movable structure 16 is connected with a diaphragm lifting lifting structure 17, and the diaphragm lifting lifting structure 17 is connected with a diaphragm lifting guide roller 18.

[0036] When the diaphragm is transported, the height of the diaphragm lifting guide roller 18 exceeds the exposure platform 2, after the transportation is completed, the diaphragm lifting guide roller 18 is lowered, so that the diaphragm falls into the exposure platform 2, and then the diaphragm is adsorbed through the exposure platform 2.

[0037] As shown in Figures 2-3 , the exposure mechanism 3 includes an exposure movable device 6 arranged on the rack 1, the exposure movable device is arranged with an exposure lifting device 7, and the exposure lifting device 7 is connected with an exposure structure 8 for exposure.

[0038] When the diaphragm is adsorbed to the exposure platform and needs to be exposed, the exposure structure 8 is driven by the exposure movable device 6 and the exposure lifting device 7 to move above the diaphragm, thereby completing the exposure of the diaphragm and realizing the photoetching of the pattern.

[0039] The device of the present application can also be applied to the exposure of super-long version, when the super-long version exposure is carried out, a camera mounting seat 11 is arranged on the exposure movable device 6, the camera mounting seat 11 is arranged with a camera telescopic pull rod 12 perpendicular to the moving direction of the exposure movable device 6, the camera telescopic pull rod 12 is connected with a camera 13, and the telescopic length of the camera telescopic pull rod 12 is measured by the magnetic scale and the magnetic scale reader.

[0040] The specific steps of the super-long version exposure are as follows: Step 1: The film on the unwinding drum 22 is manually passed through the unwinding buffer device 23, the unwinding floating device 24, the web guiding device 25, the cleaning device 26, the film lifting devices on both sides of the exposure platform 2, the winding floating device 27, and the winding buffer device 28 before being fixed on the winding drum 29. Then, the film lifting guide roller 18 is lowered by the film lifting lifting structure 17, so that the first section of film to be exposed falls onto the exposure platform 2, and the exposure platform 2 adsorbs the film. Step 2: The exposure structure is driven by the exposure moving device 6 and the exposure lifting device 7 to expose the film on the exposure platform 2. The exposure direction is opposite to the film conveying direction. The exposure structure completes the pattern exposure of the first section of the film. After the exposure is completed, the exposure structure exposes the alignment point in the non-exposed pattern area of ​​the film. Then the exposure moving device 6 and the exposure lifting device 7 return to their original positions. Step 3: The next section of film enters the exposure platform; this is accomplished through a combination of unwinding and rewinding, specifically as follows: Unwinding section: The buffer drive motor 31 drives the buffer drive screw 32 to operate, thereby causing the buffer movable seat 33 to move towards the buffer fixed guide roller 35, thus reducing the distance between the buffer fixed guide roller 35 and the buffer movable guide roller 36. During this process, the floating guide roller 39 will move under the contraction of the floating cylinder 37. Rewinding section: The buffer drive motor 31 drives the buffer drive screw 32 to operate, thereby causing the buffer movable seat 33 to move away from the buffer fixed guide roller 35, thus increasing the distance between the buffer fixed guide roller 35 and the buffer movable guide roller 36. During this process, the floating guide roller 39 will move under the extension of the floating cylinder 37. After the winding and unwinding buffer drive motor 31 stops moving, the winding and unwinding floating cylinder 37 returns to its original position; During this process, the unwinding buffer film is released, while the winding buffer section buffers a film of the same length. This allows the film above the exposure platform 2 to be replaced. Then, the lifting guide roller 18 is lowered, placing the next section of film above the exposure platform 2 for adsorption. Then, the film is unwound through the unwinding drum 22. At the same time as unwinding, the buffer drive motor 31 of the unwinding section drives the buffer movable seat 33 to return to its original position, thus completing the film buffering of the unwinding buffer device again. The winding drum 29 will also wind up the film. At the same time as winding up, the buffer drive motor 31 of the winding section drives the buffer movable seat 33 to return to its original position, so that the winding buffer device no longer buffers the film. The length of the film buffered by the unwinding buffer device is basically the same as the length of the exposure platform.

[0041] Step 4: Use camera 13 to photograph the alignment point position of the exposure. If the position cannot be photographed, camera 13 can be moved by camera telescopic lever 12 to ensure that camera 13 photographs the alignment point. The distance the camera moves is calculated by magnetic ruler and magnetic grating read head, and then the relative coordinate position between exposure structure 8 and alignment point is calculated. The initial position of exposure structure 8 is adjusted by exposure moving device 6 according to the relative coordinate position. Then repeat step 2 to complete the exposure of the second film. Step 5: Repeat steps 3 and 4 until the splicing and exposure of the extra-long layout is completed.

[0042] The ultra-long prints exposed using the aforementioned equipment and methods can be precisely spliced ​​with each exposure, thus ensuring a good overall pattern effect.

[0043] It should be noted that, in this document, the terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0044] This article uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only for the purpose of helping to understand the method and core ideas of the present invention. The above descriptions are only preferred embodiments of the present invention. It should be noted that due to the limitations of textual expression, while there are objectively infinite specific structures, those skilled in the art can make several improvements, modifications, or changes without departing from the principles of the present invention, and can also combine the above technical features in an appropriate manner. These improvements, modifications, changes, or combinations, or the direct application of the inventive concept and technical solution to other situations without modification, should all be considered within the scope of protection of the present invention.

Claims

1. A single-sided roll-to-roll lithography apparatus, comprising a frame, an exposure platform mounted on the frame, and an unwinding mechanism, a rewinding mechanism, and an exposure mechanism cooperating with the exposure platform, characterized in that, The unwinding mechanism includes an unwinding drum with active unwinding function, an unwinding buffer device, an unwinding floating device, a web-correcting device, and a cleaning device on the unwinding frame. The film enters the area above the exposure platform after passing through the unwinding buffer device, the unwinding floating device, the web-correcting device, and the cleaning device in sequence from the unwinding drum. The winding mechanism is also set on the unwinding frame. The winding mechanism includes a winding drum with active winding function, a winding floating device, and a winding buffer device. The film coming out of the exposure platform first passes through the guide roller below the exposure platform, then passes through the winding floating device and the winding buffer device, and is then wound up by the winding drum. Both the unwinding buffer device and the winding buffer device are active buffer structures, which can actively adjust the length of the buffered film.

2. The single-sided roll-to-roll lithography equipment according to claim 1, characterized in that, Both the unwinding buffer device and the winding buffer device include a fixed buffer guide roller and a movable buffer seat. The movable buffer seat is equipped with a buffer drive structure, and a movable buffer guide roller is provided on the movable buffer seat. The number of both the movable buffer guide roller and the fixed buffer guide roller is greater than two.

3. The single-sided roll-to-roll lithography equipment according to claim 2, characterized in that, The buffer movable seat cooperates with the buffer movable slide rail provided on the unwinding frame. The buffer drive structure includes a buffer drive motor and a buffer drive screw provided on the unwinding frame, and the buffer movable seat is sleeved on the buffer drive screw.

4. The single-sided roll-to-roll lithography apparatus according to claim 1, characterized in that, The unwinding floating device is used to adjust the membrane tension between the unwinding buffer device and the correction device, and the winding floating device is used to adjust the membrane tension between the winding buffer device and the membrane guide structure at the point where the membrane enters the unwinding frame.

5. A single-sided roll-to-roll lithography apparatus according to claim 4, characterized in that, Both the winding floating device and the unwinding floating device include a floating cylinder mounted on the unwinding frame. The floating cylinder is connected to a floating slide, and a floating guide roller is mounted on the floating slide.

6. A single-sided roll-to-roll lithography apparatus according to claim 5, characterized in that, The unwinding frame is equipped with a floating slide rail that cooperates with the floating slide block, and the floating slide rail and the floating slide block are equipped with a magnetic scale and a magnetic scale reading head that cooperate with each other.

7. A single-sided roll-to-roll lithography apparatus according to claim 1, characterized in that, The exposure platform is equipped with film lifting devices at both ends. The film lifting devices include film lifting movable structures set on the side of the exposure platform, film lifting movable structures are connected to film lifting lifting structures, and film lifting lifting structures are connected to film lifting guide rollers.

8. A single-sided roll-to-roll lithography apparatus according to claim 1, characterized in that, The exposure mechanism includes an exposure movable device mounted on a frame, an exposure lifting device mounted on the exposure movable device, and an exposure structure for exposure connected to the exposure lifting device.

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