Capacitive sensor

Abstract

A capacitive sensor according to one embodiment of the present invention is provided with: a detection region in which a drive electrode and a detection electrode are formed on a substrate; and a non-detection region, which is located outside the detection region when viewed from the normal direction of the substrate, and in which drive wiring connected to the drive electrode and detection wiring connected to the detection electrode are formed, the non-detection region being provided with: the drive wiring; dummy lead-out wiring disposed separately from the detection wiring; and an anti-corrosion part which is arranged between at least one of the driving wiring and the detection wiring and the dummy lead-out wiring, and is not in contact with the driving wiring, the detection wiring and the dummy lead-out wiring, so that the corrosion resistance of the wiring can be improved.

Description

TECHNICAL FIELD

[0001] The present application relates to an electrostatic capacitance sensor, and particularly relates to an electrostatic capacitance sensor for a touch panel. BACKGROUND

[0002] A touch panel is disclosed in Patent Literature 1, in which wiring-to-wiring capacitance between a row-direction wiring and a column-direction wiring is reduced by providing a floating wiring in a wiring pattern provided in a detectable region. In this touch panel, as shown in FIG. 1 of Patent Literature 1, a dummy extraction line to which a reference potential such as ground is applied is provided between extraction lines of the column-direction wiring and the row-direction wiring in a portion where the extraction lines are parallel to each other outside the detectable region. By providing the dummy extraction line in this way, wiring-to-wiring capacitance (crosstalk capacitance) between the extraction lines on both sides of the dummy extraction line can be reduced. The crosstalk capacitance acts as a noise source to reduce the detection accuracy of the touch panel, and thus it is preferable that the crosstalk capacitance not be generated as much as possible. Figure 2

[0003] PRIOR ART DOCUMENTS PATENT LITERATURE Patent Literature 1: International Publication No. 2014 / 050306 SUMMARY

[0004] PROBLEMS TO BE SOLVED BY THE INVENTION In a case where the dummy extraction line is provided as described above, the IC sometimes controls the potential applied to the dummy extraction line, and thus the crosstalk capacitance can be particularly reduced. In a case where the potential applied to the dummy extraction line is controlled by the IC, particularly in a case where the potential is dynamically controlled, the potential is set with the dielectric constant of an insulator located between the extraction line and the dummy extraction line as a precondition. From the viewpoint of improving the versatility (widerly ensuring the operable range) of the IC, the interval between the dummy extraction line and the adjacent wiring is sometimes set to be wider than the interval between the other two adjacent wirings, in which case the wiring adjacent to the dummy extraction line becomes an isolated site.

[0005] ​In this case, in an electrostatic capacitance sensor, a lead wire is located in a non-detection region, and thus a wire including a metal material having high conductivity is generally used. In order to prevent corrosion of the wire including the metal material, an insulating layer or a protective layer is provided around the wire. However, in a use such as an industrial machine or a vehicle, which requires high reliability, it is required to satisfy environmental test conditions (for example, temperature 85°C, humidity 85%, and 300 hours to 1000 hours of placement) that are more severe than those of other uses, and thus it is sometimes not possible to cope with the environmental test conditions by the conventional corrosion prevention method of the wire. Specifically, in the insulating layer or the protective layer of the wire including the metal material as described above, a solitary portion away from an adjacent pattern is more likely to be affected by corrosion caused by the invasion of moisture from the insulating layer or the protective layer or a component (iodine, acrylic acid, or the like) eluted from a constituent member than a non-solitary portion, and thus a separate countermeasure is required.

[0006] An object of the present application is to provide an electrostatic capacitance sensor capable of improving the corrosion resistance of a wire that becomes a solitary portion.

[0007] Means for solving the problem An electrostatic capacitance sensor according to an embodiment of the present application includes a detection region in which a drive electrode and a detection electrode are formed on a substrate, and a non-detection region located outside the detection region when viewed in a normal direction of the substrate, in which a drive wire connected to the drive electrode and a detection wire connected to the detection electrode are formed, the non-detection region including a dummy lead wire disposed separately from the drive wire and the detection wire, and a corrosion prevention portion disposed between at least one of the drive wire and the detection wire and the dummy lead wire, and not in contact with the drive wire, the detection wire, and the dummy lead wire.

[0008] According to such a configuration, the corrosion prevention portion is disposed in a manner in which the corrosion prevention portion is arranged side by side with the drive wire and the detection wire that become solitary portions, on both sides of the dummy lead wire that has a shielding function by being given a reference potential of a ground, and thus it is possible to suppress the approach of a substance that is a cause of corrosion (a corrosion cause substance) from the periphery of the wire that becomes a solitary portion toward the wire.

[0009] In the electrostatic capacitance sensor described above, the corrosion prevention portion can have a portion disposed in parallel with the drive wire or the detection wire in an in-plane direction of the surface of the substrate. Thus, the corrosion prevention portion is protected over a wide range in a direction in which the drive wire and the detection wire extend.

[0010] In the electrostatic capacitance sensor described above, the corrosion prevention portion can have a portion overlapping the drive wire or the detection wire when viewed in the normal direction of the substrate. Thus, the corrosion prevention effect in the first direction of the drive wire or the detection wire is improved.

[0011] In the electrostatic capacitance sensor described above, the corrosion preventive portion can also include a portion common to a material constituting the drive electrode or the detection electrode. Thus, the formation of the corrosion preventive portion is performed in the same process as the process of forming the drive electrode or the detection electrode.

[0012] In the electrostatic capacitance sensor described above, it is preferable that the corrosion preventive portion be composed of an electrically conductive material and that the potential be floating. Thus, even if the corrosion preventive portion exists in a region between the drive wiring or the detection wiring and the dummy lead wiring, the dielectric constant of the region is difficult to change. Therefore, an IC that controls the potential of the dummy lead wiring to be a reference potential of ground can properly function even if the corrosion preventive portion exists, and the crosstalk capacitance between the drive wiring and the detection wiring is properly suppressed.

[0013] In the electrostatic capacitance sensor described above in which the corrosion preventive portion is composed of an electrically conductive material, the corrosion preventive portion can also have an extension portion that extends along the extension direction of the drive wiring or the detection wiring. Thus, the corrosion preventive effect based on the corrosion preventive portion can be obtained over a wide range in the extension direction of the detection wiring.

[0014] Further, the extension portion can also extend discontinuously in the extension direction of the drive wiring or the detection wiring. Thus, the parasitic capacitance generated at the corrosion preventive portion can be reduced, and the suppression of the crosstalk capacitance between the drive wiring and the detection wiring using the dummy lead wiring to which the reference potential of ground is imparted can be more stably achieved.

[0015] Effects of Invention According to the present application, an electrostatic capacitance sensor that can improve the corrosion resistance of a wiring that becomes an isolated portion can be provided. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 is a schematic plan view illustrating an electrostatic capacitance sensor of a first embodiment.

[0017] Figure 2 is a schematic sectional view illustrating the electrostatic capacitance sensor of the first embodiment.

[0018] Figure 3 is Figure 1 is an enlarged plan view of the A portion shown in FIG. 4.

[0019] Figure 4 is an enlarged plan view illustrating another example (1) of the corrosion preventive portion.

[0020] Figure 5 is an enlarged plan view illustrating another example (2) of the corrosion preventive portion.

[0021] Figure 6 is a schematic plan view illustrating an electrostatic capacitance sensor of a second embodiment.

[0022] Figure 7 This is a schematic cross-sectional view illustrating the electrostatic capacitive sensor of the second embodiment. Detailed Implementation

[0023] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. Furthermore, in the following description, the same reference numerals will be used to denote the same parts, and descriptions of parts that have been described once will be omitted where appropriate.

[0024] (First Implementation) Figure 1 This is a schematic top view illustrating the electrostatic capacitive sensor of the first embodiment. Figure 2 This is a schematic cross-sectional view illustrating the electrostatic capacitive sensor of the first embodiment, showing... Figure 1 The section view shown is along line A1-A1'. Figure 3 yes Figure 1 The enlarged top view of part A is shown. It should be noted that in this specification, "transparent" and "transmittance" refer to a visible light transmittance of 50% or more (preferably 80% or more). Furthermore, a haze value of 6% or less is preferred.

[0025] The electrostatic capacitive sensor 1A of this embodiment is, for example, an input device for a touch panel. The electrostatic capacitive sensor 1A includes: a detection area S1, on which a driving electrode 11 and a detection electrode 12 are formed; and a non-detection area S2, located outside the detection area S1 when viewed from a first direction (Z1-Z2 direction) which is the normal direction of the substrate 10, on which a driving wiring 110 connected to the driving electrode 11 and a detection wiring 120 connected to the detection electrode 12 are formed.

[0026] The substrate 10 is transparent and is formed of a film-like material such as polyethylene terephthalate (PET), polycarbonate (PC), cyclic olefin polymer (COP), polymethyl methacrylate (PMMA), and polyimide (PI).

[0027] The driving electrode 11 is disposed in the direction (Y1-Y2 direction) along the main surface 10a of the substrate 10. The detection electrode 12 is disposed in the X1-X2 direction along the main surface 10a of the substrate 10 and orthogonal to the Y1-Y2 direction. The driving electrode 11 and the detection electrode 12 are insulated from each other. In this embodiment, a plurality of driving electrodes 11 are disposed at a predetermined interval in the X1-X2 direction, and a plurality of detection electrodes 12 are disposed at a predetermined interval in the Y1-Y2 direction.

[0028] The driving electrode 11 has a plurality of first transparent electrodes 111. In this embodiment, the plurality of first transparent electrodes 111 have a near-rhomboid shape and are arranged in the Y1-Y2 direction. That is, the plurality of first transparent electrodes 111 are arranged parallel to the Y1-Y2 direction. Two adjacent first transparent electrodes 111 are electrically connected by a connecting portion 112.

[0029] The detection electrode 12 has a plurality of second transparent electrodes 121. The plurality of second transparent electrodes 121 have a near-rhomboid shape and are arranged in the X1-X2 direction. That is, the plurality of second transparent electrodes 121 are arranged parallel to the X1-X2 direction.

[0030] The first transparent electrode 111 and the second transparent electrode 121 are each made of a transparent conductive material that is transparent to light. Examples of transparent conductive materials include oxide materials such as SnO2, ZnO, ITO (Indium Tin Oxide), IZO (Indium Zinc Oxide), GZO (Gallium-doped Zinc Oxide), AZO (Aluminum-doped Zinc Oxide), and FTO (Fluorine-doped Tin Oxide), metal nanowires such as silver nanowires, gold nanowires, and copper nanowires, thin metals formed into a network, and conductive polymers such as PEDOT / PSS.

[0031] The connecting portion 112, which electrically connects two adjacent first transparent electrodes 111, 111, also has a transparent conductive material as described above. In this case, the connecting portion 112 may also be integrally formed with the two first transparent electrodes 111, 111 electrically connected to the connecting portion 112. When viewed in the normal direction of the main surface 10a, the insulating portion 14 is located between the first transparent electrode 111, the second transparent electrode 121, and the connecting portion 112.

[0032] Two adjacent second transparent electrodes 121, 121 are electrically connected via a bridging wiring portion 31 of the bridging portion 30. The bridging portion 30 has a bridging wiring portion 31 and an insulating layer 32 sequentially from the upper layer side. The bridging wiring portion 31 can be made of a transparent conductive material, similar to the transparent electrodes, or it can be made of a metallic material. The insulating layer 32 is made of a material that has appropriate insulating properties, without any other limitations. Specific examples of the insulating layer 32 include resin materials such as phenolic varnish resin and epoxy resin, and inorganic materials such as silicon dioxide and alumina. A protective layer 20 made of the same insulating material as the insulating layer 32 is provided above the bridging portion 30 (see reference). Figure 2 ).

[0033] like Figure 1 As shown, drive wiring 110 extending to a non-detection region S2 outside the detection region S1 is connected to each of the plurality of drive electrodes 11. Similarly, detection wiring 120 extending to a non-detection region S2 outside the detection region S1 is connected to each of the plurality of detection electrodes 12. A drive voltage is applied to the drive electrodes 11 via the drive wiring 110, and the detection electrodes 12 transmit detection current to an external circuit via the detection wiring 120.

[0034] Each drive wiring 110 extends from the end of each drive electrode 11 in the Y1-Y2 direction on the Y1 side to the non-detection area S2 and is connected to one of the pad electrodes 15 disposed at the end of the substrate 10. Each detection wiring 120 extends from the end of each detection electrode 12 in the X1-X2 direction (the end on the X1 side or the end on the X2 side) to the non-detection area S2 and is connected to one of the pad electrodes 15 disposed at the end of the substrate 10.

[0035] The materials used to construct the drive wiring 110 and the detection wiring 120 are not limited in any way, as long as they have appropriate conductivity. They can be made of the same materials used for transparent electrodes, and since light transmittance is not required, they can also be formed from highly conductive metallic materials. Specific examples of metallic materials include copper, copper alloys, silver, silver alloys, aluminum, and aluminum alloys. By including metallic materials as constituent materials, high conductivity can be achieved even when the width of the wiring becomes thinner. While high conductivity can be obtained when the drive wiring 110 and the detection wiring 120 have portions made of metallic materials, measures to suppress corrosion are sometimes required in harsh environments such as high temperature and high humidity conditions. In this embodiment, an insulating layer 140 made of the same material used for the insulating layer 32 in the detection area S1 is provided as a protective layer for the wiring.

[0036] The driving wiring 110 and the detection wiring 120 can also have a stacked structure. Specific examples of the stacked structure include a stacked structure of metallic materials such as Cu / Ni / Cu, and a stacked structure of metallic materials such as Cu / ITO with a transparent conductive material. In this embodiment, as... Figure 2 As shown, both the driving wiring 110 and the detection wiring 120 are layered structures of transparent conductive materials and metallic materials, which are the constituent materials of the detection electrode 12.

[0037] The method for forming the driving wiring 110 and the detection wiring 120 is not limited, and examples include dry processes such as sputtering or vapor deposition, wet processes such as etching or electroplating, and printing processes such as screen printing. Furthermore, the first transparent electrode 111, the second transparent electrode 121, the driving wiring 110, and the detection wiring 120 can each be formed from a photosensitive conductive sheet (a sheet with a conductive layer on a dry film resist). The linewidth of the driving wiring 110 and the detection wiring 120 is appropriately set depending on the constituent material of the wiring; for example, it is approximately 10 μm.

[0038] A dummy lead-out wiring 130, configured separately from the drive wiring 110 and the detection wiring 120, is provided in the non-detection area S2. The dummy lead-out wiring 130 is set to a lower potential than the drive wiring 110 and the detection wiring 120, functioning as a shielded wiring 131. From the viewpoint of appropriately realizing the function of the shielded wiring 131, a grounded reference potential is assigned to the dummy lead-out wiring 130. This reference potential can also be controlled by an IC (not shown) via a pad electrode 15 connected to one end of the dummy lead-out wiring 130. The dummy lead-out wiring 130, with the pad electrode 15 at one end, is positioned at a predetermined location in the non-detection area S2, facing away from the other end. An example of the linewidth of the dummy lead-out wiring 130 is approximately five times the linewidth of the drive wiring 110 and the detection wiring 120 (e.g., approximately 50 μm).

[0039] The material used to construct the dummy lead-out wiring 130 is only required to have suitable conductivity; there are no other limitations. If the dummy lead-out wiring 130 contains the same material as the drive wiring 110 and the detection wiring 120, then the dummy lead-out wiring 130 can be formed simultaneously in the fabrication processes of these wirings, which is therefore preferable. In this embodiment, as... Figure 2 As shown, the dummy lead-out wiring 130, driving wiring 110, and detection wiring 120 are similarly a stacked structure of transparent conductive material and metallic material, which are the constituent materials of the detection electrode 12.

[0040] Viewed from the Z1-Z2 direction, the dummy lead-out wiring 130 is located between the drive wiring 110 and the detection wiring 120. By placing the dummy lead-out wiring 130 between the drive wiring 110 and the detection wiring 120, the generation of crosstalk capacitance between the drive wiring 110 and the detection wiring 120 is suppressed.

[0041] like Figure 1 and as an enlarged top view of its A section Figure 3As shown, an anti-corrosion portion 150A is provided in the non-detection area S2. This anti-corrosion portion 150A is disposed between at least one of the drive wiring 110 and the detection wiring 120 and the dummy lead-out wiring 130, and does not contact the drive wiring 110, the detection wiring 120, or the dummy lead-out wiring 130. In the electrostatic capacitive sensor 1A of this embodiment, the anti-corrosion portion 150A has a portion that is arranged parallel to the drive wiring 110 or the detection wiring 120 along the in-plane direction (including a component of the X1-X2 direction or the Y1-Y2 direction) of the main surface 10a of the substrate 10. That is, the anti-corrosion portion 150A has a portion that is arranged parallel to the drive wiring 110 or the detection wiring 120 at a predetermined interval.

[0042] In a group of multiple parallel drive wires 110 and detection wires 120, the corrosion-resistant unit 150A can be installed at a predetermined interval from the outermost wire, or it can be installed at a predetermined interval adjacent to individually (isolated) drive wires 110 and detection wires 120. Furthermore, the corrosion-resistant unit 150A can be installed with one or multiple units in the area adjacent to the drive wires 110 and detection wires 120.

[0043] As described above, between the drive wiring 110 and the dummy lead wiring 130, and between the detection wiring 120 and the dummy lead wiring 130, in order to properly drive the IC that applies a potential to the dummy lead wiring 130, there are sometimes wiring non-setting areas of about tens of μm (e.g., about 50 μm). In this case, if the anti-corrosion part 150A is not provided, the wiring (drive wiring 110, detection wiring 120) adjacent to this wiring non-setting area is an isolated part and is therefore susceptible to corrosion.

[0044] Therefore, by providing anti-corrosion portions 150A in areas where wiring is not installed, corrosion of the isolated drive wiring 110 and detection wiring 120 is suppressed. Specifically, the anti-corrosion portions 150A, which act as sacrificial portions, are also subject to corrosion by substances that cause corrosion, such as moisture surrounding the drive wiring 110 and detection wiring 120 and leaching components (iodine, acrylic acid, etc.), thus preventing corrosion concentration in the isolated drive wiring 110 and detection wiring 120. In other words, by dispersing the corrosion sites through the provision of anti-corrosion portions 150A, corrosion of the isolated drive wiring 110 or detection wiring 120 is suppressed.

[0045] In addition, in the electrostatic capacitive sensor 1A, the corrosion-resistant part 150A has a portion arranged in parallel with the drive wiring 110 or the detection wiring 120, and has an extension portion 151 extending along the extension direction of the drive wiring 110 or the detection wiring 120. Therefore, protection based on the corrosion-resistant part 150A is provided over a large range in the extension direction of the drive wiring 110 and the detection wiring 120.

[0046] As described above, the purpose of the corrosion-resistant section 150A is to prevent corrosion concentration by suppressing the isolation of the drive wiring 110 and the detection wiring 120 through its arrangement along these wirings. Therefore, the constituent material of the corrosion-resistant section 150A is not limited and can be made of conductive or non-conductive materials. From the viewpoint of enabling the IC that applies a potential to the dummy lead wiring 130 to function properly, it is sometimes preferable that the corrosion-resistant section 150A is made of a conductive material compared to it being made of a non-conductive material, i.e., a dielectric. In this embodiment, the corrosion-resistant section 150A is made of a conductive material, and as described above, similar to the drive wiring 110 and the detection wiring 120, it is a layered structure of transparent conductive material and metallic material, which are the constituent materials of the detection electrode 12.

[0047] When the corrosion-resistant part 150A is made of a conductive material as described above, it is preferable that the potential of the corrosion-resistant part 150A is floating. As a result, the corrosion resistance of the drive wiring 110 and the detection wiring 120, which are isolated parts, can be improved, and the generation of crosstalk capacitance between the drive wiring 110 and the detection wiring 120 can be suppressed more stably.

[0048] Furthermore, the corrosion-resistant section 150A can be configured not only to be adjacent to the drive wiring 110 and detection wiring 120, which are isolated due to their proximity to the dummy lead-out wiring 130, but also to be adjacent to the drive wiring 110 and detection wiring 120, which are isolated for other reasons. For example... Figure 1 As shown, in this embodiment, anti-corrosion portions 150A are also provided in the following areas: the portion that is isolated because the wiring is not arranged in parallel; the portion that is isolated because it is the outermost wiring in the group of multiple parallel drive wirings 110 and detection wirings 120; and the portion that is isolated because it is adjacent to the border wirings 132 arranged in a manner that surrounds the detection area S1 and the non-detection area S2.

[0049] (Other examples of corrosion protection departments) Figure 4 This is an enlarged top view showing another example (of which) the corrosion-resistant part. Figure 4 In China, regarding and Figure 1 The part corresponding to section A shown illustrates the structure of another example (1) of the corrosion-resistant section.

[0050] Figure 4 The extension portion 151 of the corrosion-resistant section 150A shown extends discontinuously in the extending direction of the drive wiring 110 or the detection wiring 120. That is, the extension portion 151 has discontinuous portions (gap portions D) at predetermined intervals along the extension direction. When the corrosion-resistant section 150A is made of a conductive material and becomes floating, parasitic capacitance is generated in the corrosion-resistant section 150A, and the larger the volume of the corrosion-resistant section 150A, the larger the parasitic capacitance. This parasitic capacitance may affect the capacitance of the wiring (drive wiring 110, detection wiring 120) arranged adjacent to the corrosion-resistant section 150. Therefore, as Figure 4 As shown, by extending the anti-corrosion section 150A discontinuously, the parasitic capacitance generated in each anti-corrosion section 150A is reduced, and the wiring (drive wiring 110, detection wiring 120) of isolated parts arranged adjacent to the anti-corrosion section 150A becomes less affected by the parasitic capacitance of the anti-corrosion section 150A.

[0051] Figure 5 This is an enlarged top view showing another example (the second one) of the corrosion-resistant part. Figure 5 In China, regarding and Figure 1 The part corresponding to section A shown illustrates the structure of another example (2) of the corrosion-resistant part.

[0052] Figure 5 The corrosion-resistant section 150A shown has a plurality of parallel (e.g., two) extensions 151-1, 151-2. Each extension 151-1, 151-2 extends discontinuously in the extension direction of the drive wiring 110 or the detection wiring 120, and the discontinuous portions (gap portions D) are arranged alternately. Specifically, the gap portions D extend along the main surface 10a (refer to...) Figure 1 The adjacent extensions 151-1 and 151-2 are formed along the main surface 10a. The gap portion D of extension 151-1 and the gap portion D of extension 151-2 are in the direction of extension of drive wiring 110 and detection wiring 120 (in the direction of extension of drive wiring 110 and detection wiring 120). Figure 5 The direction orthogonal to the X1-X2 direction (in the middle) Figure 5 The two axes do not overlap in the Y1-Y2 direction. Therefore, they must not overlap in this direction (in the Y1-Y2 direction). Figure 5 The distance along the surface of the drive wiring 110 or detection wiring 120 from the intrusion of moisture or leaching components (iodine, acrylic acid, etc.) in the Y1-Y2 direction becomes longer.

[0053] Therefore, it is possible to more stably suppress the wiring (drive wiring 110, detection wiring 120) from approaching an isolated part by passing through the gap (gap portion D) of the discontinuously extending anti-corrosion portion 150A. That is, with the structure shown in FIG11, it is possible to enjoy the improved corrosion resistance of the wiring due to the provision of the anti-corrosion portion 150A, and the suppression of the reduction in detection accuracy of the electrostatic capacitive sensor caused by the discontinuous extension of the anti-corrosion portion 150A.

[0054] (Second Implementation) Figure 6 This is a schematic top view illustrating the electrostatic capacitive sensor of the second embodiment.

[0055] Figure 7 This is a schematic cross-sectional view illustrating the electrostatic capacitive sensor of the second embodiment, showing... Figure 6 The section view shown is along line A2-A2'.

[0056] The electrostatic capacitive sensor 1B of the second embodiment is the same as the electrostatic capacitive sensor 1A in that it has a detection region S1 on a substrate 10 where a driving electrode 11 and a detection electrode 12 are formed, a non-detection region S2 located outside the detection region S1 where a driving wiring 110 connected to the driving electrode 11 and a detection wiring 120 connected to the detection electrode 12 are formed, and a dummy lead-out wiring 130 provided in the non-detection region S2. However, it is different in that it has an anti-corrosion part 150B instead of an anti-corrosion part 150A.

[0057] The corrosion-resistant portion 150B of the electrostatic capacitive sensor 1B is non-contact with the drive wiring 110, detection wiring 120, and dummy lead-out wiring 130. Its basic structure is the same as that of the corrosion-resistant portion 150A of the electrostatic capacitive sensor 1A. However, the corrosion-resistant portion 150B differs from the corrosion-resistant portion 150A in that it is made of the same material and has the same structure as the first transparent electrode 111 or the second transparent electrode 121 constituting the drive electrode 11 or the detection electrode 12. Because the corrosion-resistant portion 150B has this structure, it can be formed in the same process as the drive electrode 11 and the detection electrode 12.

[0058] By configuring such a corrosion-resistant part 150B, the isolation of the drive wiring 110 and the detection wiring 120 is prevented. In the event that a substance that causes corrosion is about to invade from around the wiring, the corrosion-resistant part 150B functions as a sacrificial part.

[0059] The corrosion-resistant portion 150B, like the corrosion-resistant portion 150A, is made of a conductive material; therefore, it is preferable that the potential of the corrosion-resistant portion 150B is floating. This suppresses the isolation of the drive wiring 110 or the detection wiring 120, improving the corrosion resistance of the drive wiring 110 or the detection wiring 120, and more stably suppresses the generation of crosstalk capacitance between the drive wiring 110 and the detection wiring 120. Furthermore, in the electrostatic capacitive sensor 1B of this embodiment, similarly to the electrostatic capacitive sensor 1A of the first embodiment, the corrosion-resistant portion 150B is also provided on the drive wiring 110 and the detection wiring 120, which are isolated portions due to reasons other than being adjacent to the dummy lead wiring 130.

[0060] Furthermore, while the embodiments described above are specific, the present invention is not limited to these examples. For instance, regarding the materials used in each part, any material other than those described above, as long as it can achieve the same effect as the present invention, is applicable. Additionally, solutions obtained by appropriately adding, deleting, or modifying the constituent elements of the above embodiments by those skilled in the art, or solutions obtained by appropriately combining the features of the constituent examples of each embodiment, are included within the scope of the present invention as long as they possess the spirit of the present invention.

[0061] For example, corrosive substances often approach the wiring (drive wiring 110, detection wiring 120) from the operating surface side (Z2 side in the Z1-Z2 direction). Therefore, the anti-corrosion parts 150A and 150B can also be separated from the substrate 10, i.e., they are provided separately from the substrate in the Z2 side of the Z1-Z2 direction. Alternatively, an anti-corrosion component can be provided on the insulating layer 140, which is provided to cover the wiring (drive wiring 110, detection wiring 120), such that it overlaps with the wiring when viewed from the first direction (Z1-Z2 direction). This component can be continuous with the anti-corrosion parts (anti-corrosion parts 150A and 150B), in which case the anti-corrosion parts (anti-corrosion parts 150A and 150B) have a portion that overlaps with the wiring (drive wiring 110 and detection wiring 120) when viewed from the first direction (Z1-Z2 direction).

[0062] Explanation of reference numerals in the attached figures 1A, 1B... Electrostatic capacitive sensors 10…substrate 10a…Main face 11…Drive Electrode 12…Detection Electrode 14…Insulation section 15…pad electrode 20…protective layer 30…Bridging section 31…Bridging Cabling Department 32…Insulation layer 110…Drive wiring 111…First transparent electrode 112…Connecting Section 120… Wiring inspection 121…Second transparent electrode 130… Dummy lead-out wiring 131…Shielded cabling 132…Border wiring 140… Insulation layer 150A, 150B… Corrosion Protection Section 151, 151-1, 151-2… Extension D…gap section S1…Detection area S2…Non-detection area

Claims

1. An electrostatic capacitive sensor, characterized in that, have: The detection area has a driving electrode and a detection electrode formed on the substrate; and The non-detection area, located outside the detection area when viewed from the normal direction of the substrate, has drive wiring connected to the drive electrode and detection wiring connected to the detection electrode. The non-detection area has the following characteristics: A dummy lead-out wiring is configured separately from the drive wiring and the detection wiring; as well as The anti-corrosion part is disposed between at least one of the drive wiring and the detection wiring and the dummy lead-out wiring, and does not contact the drive wiring, the detection wiring and the dummy lead-out wiring.

2. The electrostatic capacitive sensor according to claim 1, wherein, The corrosion-resistant portion has a portion that is arranged parallel to the drive wiring or the detection wiring along the in-plane direction of the surface of the substrate.

3. The electrostatic capacitive sensor according to claim 1, wherein, The corrosion-resistant portion has a portion that overlaps with the drive wiring or the detection wiring when viewed from the normal direction of the substrate.

4. The electrostatic capacitive sensor according to claim 1, wherein, The corrosion-resistant portion includes a portion that is common to the material constituting the driving electrode or the detection electrode.

5. The electrostatic capacitive sensor according to claim 1, wherein, The corrosion-resistant part is made of a conductive material, and its potential is floating.

6. The electrostatic capacitive sensor according to claim 5, wherein, The corrosion-resistant part has an extension that extends along the extension direction of the drive wiring or the detection wiring.

7. The electrostatic capacitive sensor according to claim 6, wherein, The extension extends discontinuously in the direction of extension of the drive wiring or the detection wiring.

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