TPCD high-precision ultra-large breadth detection motion platform

Abstract

The invention provides a TPCD high-precision ultra-large breadth detection motion platform, and the platform comprises a steel frame module which is formed by welding a plurality of steel frames in a structure shaped like a Chinese character'tian '; the marble base is arranged at the top of the steel frame module; marble stand columns are arranged at the left and right ends of the top of the marble base, X-direction sliding rails are arranged at the tops of the marble stand columns, and magnetic preloading strips are arranged on the left and right sides of the marble stand columns; the X-direction mover module is arranged on the X-direction sliding rail and moves along the X-direction sliding rail; the X-direction mover module is in air floatation on the marble stand column and is in magnetic suspension on the preloading strip; the cross beam is arranged at the top of the X-direction mover module and moves along with the X-direction mover module; a Y-direction sliding rail is arranged on the rear side of the cross beam; the Y-direction mover module is arranged on the Y-direction sliding rail and moves along the Y-direction sliding rail; the Y-direction mover module is air-floated on the cross beam; and the drag chain module is arranged at the top of the cross beam and is not in contact with the Y-direction mover module. According to the invention, the large breadth and the large span are realized, the submicron motion precision is realized, and the TPCD measurement requirement of the FMM is met.

Description

Technical Field

[0001] The present invention relates to the technical field of measuring devices, and particularly to a TPCD high-precision ultra-large-format detection motion platform. Background Art

[0002] The TPCD measuring device for a fine metal mask (FMM) is mainly used to detect key parameters such as the thickness, aperture diameter, and position accuracy of the FMM to ensure its accuracy and reliability in the manufacture of OLED display panels. In the field of FMM measurement technology, TP usually refers to thickness, and CD usually refers to aperture diameter. Such devices usually combine high-precision optical measurement, electron beam measurement and other technologies to achieve precise detection of the microstructure of the FMM.

[0003] The existing TPCD measuring devices for FMM mainly use small-sized air-floating motion platforms, and there is no stable case for large-format air-floating high-precision motion platforms. For a large-format motion platform, the crossbeam carrying the measuring device above it has a large weight. It is difficult to ensure the rigidity of the crossbeam only by air-floating, which affects the motion accuracy, and thus it is difficult to ensure the TPCD measurement accuracy of the FMM. Summary of the Invention

[0004] The technical problem to be solved by this application is: how to overcome the deficiencies of the prior art and provide a TPCD high-precision ultra-large-format detection motion platform that has both a large format and a large span and achieves sub-micron motion accuracy to meet the TPCD measurement requirements of the FMM.

[0005] To solve the above technical problem, the present invention provides a TPCD high-precision ultra-large-format detection motion platform, including: a steel frame module welded by multiple steel frames in a "field" shape structure; a marble base provided on top of the steel frame module; marble columns are provided at both the left and right ends of the top of the marble base, an X-direction slide rail is provided at the top of the marble column, and magnetically conductive preloading strips are provided on both the left and right sides of the marble column; an X-direction mover module is provided on the X-direction slide rail and moves along the X-direction slide rail; the X-direction mover module is air-floated on the marble column and magnetically levitated on the preloading strip; a crossbeam is provided on top of the X-direction mover module and moves along with the X-direction mover module; a Y-direction slide rail is provided at the rear of the crossbeam; a Y-direction mover module is provided on the Y-direction slide rail and moves along the Y-direction slide rail; the Y-direction mover module is air-floated on the crossbeam; a drag chain module is provided on top of the crossbeam and does not contact the Y-direction mover module.

[0006] Furthermore, multiple vibration isolation mechanisms are provided between the steel frame module and the marble base, and each vibration isolation mechanism is evenly distributed around the perimeter of the steel frame module; a support assembly is provided between adjacent vibration isolation mechanisms, and the support assembly includes: a support base, which is fixed to the steel frame module and connected to the marble base by screws; and a support foot cup, which is fixed to the support base and whose top is set towards the marble base in a suction cup shape.

[0007] Furthermore, the X-axis moving part module includes: a moving part base, the top of which protrudes upward and connects to the crossbeam; inclined wiring plates are provided on both the front and rear sides of the protrusion of the moving part base; multiple X-axis air-bearing blocks are installed at the bottom corner of the moving part base through air-bearing screw sleeves; an X-axis motor module is located at the middle of the bottom of the moving part base and slides with the X-axis slide rail; two side plates are arranged opposite each other at the bottom of the moving part base; multiple X-axis air-bearing blocks are installed on the inner sides of the two side plates through air-bearing screw sleeves; multiple magnets are provided at the bottom of the side plates; the magnets are evenly arranged and form a magnetic circuit with the preload bar; the air outlet of each X-axis air-bearing block is facing the marble column.

[0008] Furthermore, an orthogonal block is provided on the top of the moving base; the orthogonal block is fixed in the gap between the protrusion of the moving base and the wiring board, and is closely attached to the crossbeam.

[0009] Furthermore, the Y-axis moving module includes: a front plate, a rear plate, an upper plate, and a lower plate spliced ​​around the crossbeam; the front plate and the rear plate are arranged opposite each other; the upper plate and the lower plate are arranged opposite each other and are respectively connected to the top and bottom of the front plate and the rear plate; multiple Y-axis air-bearing blocks are installed at the rear corner of the front plate, the front corner of the rear plate, the bottom corner of the upper plate, and the top corner of the lower plate via air-bearing screw sleeves; a Y-axis motor module is located at the middle of the front side of the rear plate and slides in cooperation with the Y-axis slide rail; a vertical plate is located at the top of the upper plate and extends upward into the cable chain module; a Y-axis moving plate is provided at the top of the vertical plate and is located inside the cable chain module; a rectangular opening is provided on the Y-axis moving plate; the air outlet of each Y-axis air-bearing block is oriented towards the crossbeam.

[0010] Furthermore, a pair of X-axis buffer seats are provided on both the left and right sides of the marble column, and the X-axis buffer seats are fixed above the preload bar; the buffer ends of each pair of X-axis buffer seats are arranged opposite each other and are used to contact the front and rear sides of the X-axis moving module respectively; a pair of Y-axis buffer seats are provided on both the upper and lower sides of the Y-axis slide rail; the buffer ends of each pair of Y-axis buffer seats are arranged opposite each other and are used to contact the left and right sides of the Y-axis moving module respectively.

[0011] Furthermore, an X-axis fixed plate is provided on one side of the marble column, and the X-axis fixed plate is fixed below the preload strip; the X-axis moving sub-module has an X-axis moving plate on its side near the X-axis fixed plate, and the X-axis moving plate moves with the X-axis moving sub-module; a dust-free cable chain is provided between the X-axis fixed plate and the X-axis moving plate; the dust-free cable chain is bent in a "U" shape, with one end fixed to the X-axis fixed plate and the other end connected to the X-axis moving plate and moving with the X-axis moving plate.

[0012] Furthermore, the cable chain module is provided with cover plates on both the left and right sides, the cover plates extend downward and are fixed to the crossbeam; the bottom of the cover plate is open and the top is closed, and the interior is connected to the interior of the cable chain module; the X-axis moving plate is provided with a rectangular opening, and the opening is located below the cover plate.

[0013] Furthermore, the marble column is provided with multiple column holes; the column holes are circular, evenly distributed along the X direction, and penetrate through the left and right sides of the marble column; the crossbeam is provided with multiple crossbeam holes; the crossbeam holes are circular, evenly distributed along the Y direction, and penetrate through the front and rear sides of the crossbeam.

[0014] Furthermore, the length and width of the marble base are both 3m-5m.

[0015] The present invention adopts the above technical solution and has the following technical effects compared with the prior art:

[0016] The vibration isolation mechanism isolates external vibrations and improves the stability of the equipment supported by the marble base by releasing its own inertial force; the support components further provide support for the marble base and make the steel frame module firmly connected to the marble base.

[0017] The orthogonal block keeps the crossbeam mounted in the Y direction orthogonal to its direction of movement as the crossbeam moves with the X-phase moving module, and increases the rigidity of the crossbeam's movement.

[0018] The X-axis buffer seat and the Y-axis buffer seat serve as limit buffers for the motion axes of the X-axis moving module and the Y-axis moving module, respectively. They play a limiting and buffering role, preventing the X-axis moving module and the Y-axis moving module from falling off when they move on the X-axis slide rail and the Y-axis slide rail, respectively. They also decelerate when they move to the limit position to avoid collision damage and improve equipment safety.

[0019] One end of the cleanroom cable chain is fixed, and the other end is connected to a moving X-axis plate. Therefore, when the X-axis moving module moves, the cleanroom cable chain extends and retracts synchronously, guiding the cable to move within its fixed bending radius and preventing tangling.

[0020] The cable extends upwards through an opening on the X-axis moving plate into the cover plate, then further into the cable carrier module, and finally through a rectangular opening on the Y-axis moving plate to connect with the Y-axis moving sub-module. This ensures the cable does not interfere with other parts of the equipment, resulting in an orderly layout.

[0021] By evenly opening the holes in the columns and beams, the weight of the marble columns and beams is reduced, the load above the marble base is lowered, and the equipment's balance is improved.

[0022] It should be emphasized that this invention, through a power method combining air buoyancy and magnetic levitation, controls the straightness of a single axis within 0.1μm-0.3μm while ensuring the rigidity of the crossbeam movement, achieving sub-micron level repeatable positioning in XY and meeting the high-precision TPCD measurement requirements of FMM. Attached Figure Description

[0023] The present application will be further described below with reference to the accompanying drawings and embodiments.

[0024] Figure 1 This is a schematic diagram of the structure of the TPCD high-precision ultra-large format detection motion platform provided by the present invention.

[0025] Figure 2 yes Figure 1 A schematic diagram of the rear structure of the TPCD high-precision ultra-large format detection motion platform.

[0026] Figure 3 This is a schematic diagram of the steel frame module in this invention.

[0027] Figure 4 This is a schematic diagram of the vibration isolation mechanism and support components in this invention.

[0028] Figure 5 yes Figure 4 Enlarged view of part A in the middle.

[0029] Figure 6 This is a schematic diagram of the X-direction moving part module in this invention.

[0030] Figure 7 yes Figure 6 A schematic diagram of the bottom of the X-axis moving sub-module.

[0031] Figure 8 This is a schematic diagram of the Y-axis moving part module in this invention.

[0032] Figure 9 yes Figure 8 A schematic diagram of the bottom of the Y-axis moving part module.

[0033] Figure 10 This is a schematic diagram of the cover plate in this invention.

[0034] The annotations in the attached figures are explained as follows:

[0035] 100. Steel frame module; 110. Vibration isolation mechanism; 120. Support assembly; 121. Support base; 122. Support feet;

[0036] 200. Marble base;

[0037] 300. Marble column; 301. Column hole; 310. Preload strip; 320. X-axis buffer seat; 330. X-axis fixed plate; 340. X-axis moving plate; 350. Dust-free cable chain;

[0038] 400, X-axis slide rail;

[0039] 500, X-axis mover module; 510, mover base; 511, wiring board; 520, X-axis air float block; 530, X-axis motor module; 540, side plate; 550, magnet; 560, orthogonal block;

[0040] 600, crossbeam; 601, crossbeam hole;

[0041] 700, Y-axis slide rail; 710, Y-axis buffer seat;

[0042] 800, Y-axis moving part module; 810, front plate; 820, rear plate; 830, upper plate; 840, lower plate; 850, Y-axis air flotation block; 860, Y-axis motor module; 870, vertical plate; 880, Y-axis moving plate;

[0043] 900. Cable chain module; 910. Cover plate. Detailed Implementation

[0044] The present application will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the present application, and therefore only show the components relevant to the present application.

[0045] like Figures 1-2As shown in the figure, the present invention provides a TPCD high-precision extra-large format detection motion platform, which includes a steel frame module 100, a marble base 200, an X-axis mover module 500, a cross beam 600, a Y-axis mover module 800, and a cable carrier module 900. The steel frame module 100 is welded by multiple steel frames in a "field" shape structure. The marble base 200 is arranged on the top of the steel frame module 100. Marble columns 300 are provided at both the left and right ends of the top of the marble base 200. An X-axis slide rail 400 is provided at the top of the marble column 300. Magnetic preloading strips 310 are provided on both the left and right sides of the marble column 300. The X-axis mover module 500 is arranged on the X-axis slide rail 400 and moves along the X-axis slide rail 400. At the same time, the X-axis mover module 500 is aerofloated on the marble column 300 and magnetically levitated on the preloading strip 310. The cross beam 600 is arranged on the top of the X-axis mover module 500 and moves along with the X-axis mover module 500. A Y-axis slide rail 700 is provided at the rear side of the cross beam 600. The Y-axis mover module 800 is arranged on the Y-axis slide rail 700 and moves along the Y-axis slide rail 700. At the same time, the Y-axis mover module 800 is aerofloated on the cross beam 600. The cable carrier module 900 is arranged on the top of the cross beam 600 and does not contact the Y-axis mover module 800.

[0046] The preloading strip 310 is a strip-shaped structure made of a soft magnetic material with good magnetic conductivity (such as electrical steel), which can provide a magnetic circuit loop path with low magnetic resistance for the permanent magnet and does not generate a magnetic field itself.

[0047] Such as Figures 3-5 As shown in the figure, a plurality of vibration isolation mechanisms 110 are provided between the steel frame module 100 and the marble base 200. Each vibration isolation mechanism 110 is evenly arranged along the periphery of the steel frame module 100, and specifically can be arranged at the four corner positions of the steel frame module 100 and the middle positions of each side of the periphery. A support component 120 is provided between adjacent vibration isolation mechanisms 110. The support component 120 includes a support seat 121 and a support foot cup 122. The support seat 121 is fixed to the steel frame module 100 and is connected to the marble base 200 by screws. The support foot cup 122 is fixed to the support seat 121, and its top is suction cup-shaped and faces the marble base 200.

[0048] The vibration isolation mechanism 110 is used to isolate external vibrations. By releasing its own motion inertia force, it can cooperate with the horizontal control system to maintain the stability of the marble base 200. The support component 120 further provides support for the marble base 200 and makes the connection between the steel frame module 100 and the marble base 200 firm. The support foot cup 122 is protected by power-off or air-off and is usually not directly connected to the marble base 200, and is used for the temporary support of the marble base 200.

[0049] Such as Figure 1 、 Figure 5 And Figure 6As shown, the X-axis mover module 500 includes a mover base 510, an X-axis motor module 530, and side plates 540. The top of the mover base 510 protrudes upward and connects to the crossbeam 600. Inclined wiring plates 511 are provided on both the front and rear sides of the protrusion. Multiple X-axis air-bearing blocks 520, specifically four, are installed at the bottom corners of the mover base 510 via air-bearing screw sleeves. The X-axis motor module 530 is located at the center of the bottom of the mover base 510, used to drive the X-axis mover module 500 to move, and slides in cooperation with the X-axis slide rail 400. There are two side plates 540, arranged opposite each other at the bottom of the mover base 510. Multiple X-axis air-bearing blocks 520, specifically two, are installed on the inner sides of each side plate 540 via air-bearing screw sleeves, and multiple magnets 550 are provided at the bottom of the side plates 540. The magnets 550 are evenly arranged and form a magnetic circuit with the preload bar 310.

[0050] The air outlet of each X-axis air flotation block 520 is positioned facing the marble column 300. The X-axis air flotation block 520 is connected to the air circuit controller via a cable. After air is supplied, it exhausts air towards the marble column 300, causing the X-axis moving part module 500 to float on the marble column 300. The air circuit controller can be integrated into the side of the steel frame module 100 via an air circuit board. Both the cable connection and the air circuit control can be achieved using existing known technologies, which will not be explained in detail here.

[0051] Magnet 550 is a high-performance neodymium iron boron permanent magnet used to generate a constant magnetic field. This magnetic field passes through the air gap between magnet 550 and preload bar 310, forming a magnetic circuit with the preload bar 310 below, thus creating a unidirectional attractive force perpendicular to the preload bar 310, i.e., a preload force. The preload force pulls the X-direction mover module 500 toward the preload bar 310, giving the X-direction mover module 500 and the crossbeam 600 above it high motion rigidity in the X direction perpendicular to the preload force.

[0052] The four X-direction air buoys 520 located at the bottom of the mover base 510 act in the opposite direction to the preload force. By balancing the preload force through air buoyancy, the air gap between the magnet 550 and the preload bar 310 is kept stable. As a result, the X-direction mover module 500 is suspended above the air gap, forming a magnetic levitation that balances the air buoyancy and the permanent magnet attraction.

[0053] It should be noted that an orthogonal block 560 is provided on the top of the moving part 510. The orthogonal block 560 is fixed in the gap between the protrusion of the moving part 510 and the wiring plate 511, and is in close contact with the crossbeam 600. The orthogonal block 560 is used to keep the crossbeam 600 mounted in the Y direction orthogonal to its direction of movement when the crossbeam 600 moves with the X-phase moving part module, and to increase the motion rigidity of the crossbeam 600.

[0054] like Figure 1 , Figure 7 and Figure 8As shown, the Y-axis mover module 800 includes: a front plate 810, a rear plate 820, an upper plate 830, a lower plate 840, a Y-axis motor module 860, and a vertical plate 870. The front plate 810, rear plate 820, upper plate 830, and lower plate 840 are assembled around the crossbeam 600, with the front plate 810 and rear plate 820 facing each other, and the upper plate 830 and lower plate 840 facing each other. The upper plate 830 and lower plate 840 are respectively connected to the top and bottom of the front plate 810 and rear plate 820. Multiple Y-axis air-bearing blocks 850 are installed at the rear corner of the front plate 810, the front corner of the rear plate 820, the bottom corner of the upper plate 830, and the top corner of the lower plate 840, specifically four blocks. The Y-axis motor module 860 is located at the center of the front side of the rear plate 820, used to drive the Y-axis moving module 800 to move, and slides in cooperation with the Y-axis slide rail 700. The vertical plate 870 is located at the top of the upper plate 830 and extends upwards into the cable chain module 900. A Y-axis moving plate 880 is located at the top of the vertical plate 870 and is inside the cable chain module 900. The Y-axis moving plate 880 has a rectangular opening.

[0055] The air outlet of each Y-direction air flotation block 850 is directed toward the crossbeam 600. Similar to the X-direction air flotation block 520, the Y-direction air flotation block 850 is also connected to the air circuit controller via a cable. After being vented, it exhausts air toward the crossbeam 600, so that the Y-direction moving module 800 is air-floated on the marble column 300.

[0056] like Figures 1-2 As shown, a pair of X-axis buffer seats 320 are provided on both the left and right sides of the marble column 300, and the X-axis buffer seats 320 are fixed above the preload bar 310. The buffer ends of each pair of X-axis buffer seats 320 are arranged opposite each other and are used to contact the front and rear sides of the X-axis moving module 500 respectively. A pair of Y-axis buffer seats 710 are provided on both the upper and lower sides of the Y-axis slide rail 700. The buffer ends of each pair of Y-axis buffer seats 710 are arranged opposite each other and are used to contact the left and right sides of the Y-axis moving module 800 respectively.

[0057] The X-axis buffer seat 320 and the Y-axis buffer seat 710 serve as limit buffers for the motion axes of the X-axis moving module 500 and the Y-axis moving module 800, respectively. They play a limiting and buffering role, preventing the X-axis moving module 500 and the Y-axis moving module 800 from falling off when they move on the X-axis slide rail 400 and the Y-axis slide rail 700, respectively. They also decelerate when they move to the limit position to avoid collision damage and improve equipment safety.

[0058] like Figure 1As shown, an X-axis fixed plate 330 is provided on one side of the marble column, and the X-axis fixed plate 330 is fixed below the preload strip 310. An X-axis moving module 500 has an X-axis moving plate 340 on its side near the X-axis fixed plate 330, and the X-axis moving plate 340 moves with the X-axis moving module 500. A dust-free cable chain 350 is provided between the X-axis fixed plate 330 and the X-axis moving plate 340. The dust-free cable chain 350 is bent in a "U" shape, with one end fixed to the X-axis fixed plate 330 and the other end connected to the X-axis moving plate 340 and moving with the X-axis moving plate 340.

[0059] The cleanroom cable chain 350 is used to lay cables, confining them within the chain to isolate them, prevent damage, and avoid dust contamination. In this invention, one end of the cleanroom cable chain 350 is fixed, and the other end is connected to a movable X-axis moving plate 340. Therefore, when the X-axis moving sub-module 500 moves, the cleanroom cable chain 350 extends and retracts synchronously, guiding the cables within its fixed bending radius and preventing tangling.

[0060] like Figure 1 and Figure 10 As shown, the cable chain module 900 has cover plates 910 on both the left and right sides. The cover plates 910 extend downward and are fixed to the crossbeam 600. The bottom of the cover plate 910 is open and the top is closed, and the interior is connected to the interior of the cable chain module 900. The X-axis moving plate 340 has a rectangular opening, and the opening is located below the cover plate 910.

[0061] The cable extends upwards through an opening on the X-axis moving plate 340 into the cover plate 910, then further into the cable carrier module 900, and finally through a rectangular opening on the Y-axis moving plate 880 to connect with the Y-axis moving sub-module. In this way, the cable does not interfere with other parts of the equipment, and the layout is orderly. It is understandable that the cable carrier module 900, by arranging the cable via a cable carrier, functions similarly to the cleanroom cable carrier 350, providing sealing and dust protection.

[0062] like Figure 1 As shown, the marble column 300 has multiple column holes 301. The column holes 301 are circular, evenly distributed along the X-axis, and extend through both sides of the marble column 300. The crossbeam 600 has multiple crossbeam holes 601. The crossbeam holes 601 are circular, evenly distributed along the Y-axis, and extend through both the front and rear sides of the crossbeam 600. The even distribution of the column holes 301 and crossbeam holes 601 reduces the weight of the marble column 300 and crossbeam 600, lowers the load above the marble base 200, and improves the equipment's balance.

[0063] It should be noted that the marble base 200 has a length and width of 3m-5m, which is an ultra-large format, and the corresponding equipment weight can reach several tons. This invention uses a power method combining air buoyancy and magnetic levitation to control the single-axis straightness within 0.1μm-0.3μm while ensuring the motion rigidity of the crossbeam 600, achieving XY sub-micron level repeatability positioning and meeting the high-precision measurement requirements of FMM's TPCD.

[0064] The above embodiments are only for illustrating the technical concept and features of this application. Their purpose is to enable those skilled in the art to understand the content of this application and implement it. They should not be used to limit the scope of protection of this application. All equivalent changes or modifications made in accordance with the spirit and essence of this application should be covered within the scope of protection of this application.

Claims

1. A high-precision, ultra-large format TPCD detection motion platform, characterized in that, Comprising: Steel frame module (100), welded by multiple steel frames in a "field" - shaped structure; Marble base (200), arranged on the top of the steel frame module (100); on both left and right ends of the top of the marble base (200), marble columns (300) are provided. An X - direction slide rail (400) is provided on the top of the marble column (300), and pre - load bars (310) with magnetism conduction are provided on both left and right sides of the marble column (300); X - direction mover module (500), arranged on the X - direction slide rail (400) and moving along the X - direction slide rail (400); the X - direction mover module (500) is aerostatic on the marble column (300) and magnetically levitated on the pre - load bar (310); Cross beam (600), arranged on the top of the X - direction mover module (500) and moving along with the X - direction mover module (500); a Y - direction slide rail (700) is provided on the rear side of the cross beam (600); Y - direction mover module (800), arranged on the Y - direction slide rail (700) and moving along the Y - direction slide rail (700); the Y - direction mover module (800) is aerostatic on the cross beam (600); Drag chain module (900), arranged on the top of the cross beam (600) and not contacting the Y - direction mover module (800).

2. The TPCD high-precision ultra-large format detection motion platform according to claim 1, characterized in that, Between the steel frame module (100) and the marble base (200), multiple vibration isolation mechanisms (110) are provided, and each of the vibration isolation mechanisms (110) is evenly arranged around the perimeter of the steel frame module (100); Between adjacent vibration isolation mechanisms (110), support components (120) are provided, and the support components (120) include: Support base (121), fixed to the steel frame module (100) and connected to the marble base (200) by screws; Support foot cup (122), fixed to the support base (121), and its top is in the shape of a suction cup facing the marble base (200).

3. The TPCD high-precision ultra-large format detection motion platform according to claim 1, characterized in that, The X - direction mover module (500) includes: Mover seat (510), its top bulges upward and connects to the cross beam (600); on both front and rear sides of the protruding part of the mover seat (510), inclined wire routing plates (511) are provided; at the corner positions of the bottom of the mover seat (510), multiple X - direction aerostatic blocks (520) are installed through aerostatic bushings; X - direction motor module (530), arranged at the middle position of the bottom of the mover seat (510) and slidingly mated with the X - direction slide rail (400); Side plates (540), two in number, arranged oppositely left and right at the bottom of the mover seat (510); on the inner sides of the two side plates (540), multiple X - direction aerostatic blocks (520) are installed through aerostatic bushings; multiple magnets (550) are provided at the bottom of the side plates (540); each of the magnets (550) is evenly arranged and forms a magnetic circuit with the pre - load bar (310); The air outlet ends of each of the X - direction aerostatic blocks (520) are all facing the marble column (300).

4. The TPCD high-precision ultra-large format detection motion platform according to claim 3, characterized in that, The top of the moving base (510) is provided with an orthogonal block (560); the orthogonal block (560) is fixed in the gap between the protrusion of the moving base (510) and the wiring board (511), and is closely attached to the crossbeam (600).

5. The TPCD high-precision ultra-large format detection motion platform according to claim 1, characterized in that, The Y-axis moving sub-module (800) includes: A front plate (810), a rear plate (820), an upper plate (830), and a lower plate (840) are spliced ​​around the crossbeam (600); the front plate (810) and the rear plate (820) are arranged opposite to each other; the upper plate (830) and the lower plate (840) are arranged opposite to each other and are respectively connected to the top and bottom of the front plate (810) and the rear plate (820); multiple Y-direction air-floating blocks (850) are installed at the rear corner of the front plate (810), the front corner of the rear plate (820), the bottom corner of the upper plate (830), and the top corner of the lower plate (840) through air-floating screw sleeves; The Y-axis motor module (860) is located at the middle of the front side of the rear plate (820) and slides in cooperation with the Y-axis slide rail (700); A vertical plate (870) is disposed on the top of the upper plate (830) and extends upward into the interior of the cable chain module (900); a Y-axis movable plate (880) is provided on the top of the vertical plate (870), and the Y-axis movable plate (880) is disposed inside the cable chain module (900); a rectangular opening is provided on the Y-axis movable plate (880); The air outlet of each of the Y-direction air flotation blocks (850) is oriented toward the crossbeam (600).

6. The TPCD high-precision ultra-large format detection motion platform according to claim 1, characterized in that, The marble column (300) is provided with a pair of X-direction buffer seats (320) on both the left and right sides. The X-direction buffer seats (320) are fixed above the preload strip (310). The buffer ends of each pair of X-direction buffer seats (320) are arranged opposite each other and are used to contact the front and rear sides of the X-direction moving part module (500) respectively. The Y-axis slide rail (700) is provided with a pair of Y-axis buffer seats (710) on both the upper and lower sides; the buffer ends of each pair of Y-axis buffer seats (710) are arranged opposite each other and are used to contact the left and right sides of the Y-axis moving part module (800) respectively.

7. The TPCD high-precision ultra-large format detection motion platform according to claim 1, characterized in that, The marble column is provided with an X-direction fixing plate (330) on one side, and the X-direction fixing plate (330) is fixed below the preload strip (310); The X-direction moving sub-module (500) has an X-direction moving plate (340) on its side near the X-direction fixed plate (330), and the X-direction moving plate (340) moves with the X-direction moving sub-module (500); A dust-free cable chain (350) is provided between the X-direction fixed plate (330) and the X-direction movable plate (340); the dust-free cable chain (350) is bent in a "U" shape, with one end fixed to the X-direction fixed plate (330) and the other end connected to the X-direction movable plate (340) and moving with the X-direction movable plate (340).

8. The TPCD high-precision ultra-large format detection motion platform according to claim 7, characterized in that, The cable chain module (900) is provided with cover plates (910) on both the left and right sides. The cover plates (910) extend downward and are fixed to the crossbeam (600). The bottom of the cover plate (910) is open and the top is closed. The inside of the cover plate (910) is connected to the inside of the cable chain module (900). The X-direction moving plate (340) is provided with a rectangular opening, and the opening is located below the cover plate (910).

9. The TPCD high-precision ultra-large format detection motion platform according to claim 1, characterized in that, The marble column (300) is provided with a plurality of column holes (301); the column holes (301) are circular, evenly arranged along the X direction, and penetrate through the left and right sides of the marble column (300); The crossbeam (600) is provided with a plurality of crossbeam holes (601); the crossbeam holes (601) are circular, evenly arranged along the Y direction, and penetrate the front and rear sides of the crossbeam (600).

10. The TPCD high-precision ultra-large format detection motion platform according to claim 1, characterized in that, The marble base (200) is 3m-5m in length and width.

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