Normal-pressure wide-width plasma treatment equipment

Abstract

The invention discloses normal-pressure wide-width plasma treatment equipment which comprises a fixed shell, a wide-width mechanism is arranged on a body of the fixed shell, the wide-width mechanism comprises two semicircular wide-width electrodes, the two wide-width electrodes are attached to each other to be spliced into a cylinder, and the wide-width electrodes are arranged on the fixed shell. The outer arc surfaces of the two wide-width electrodes are fixedly connected with insulating plates, bodies of the two wide-width electrodes are provided with axially-through cooling holes, the two ends of the cylinder are fixedly connected with gas hoods, the interiors of the gas hoods are communicated with the interiors of the cooling holes in the two sides respectively, and the interiors of the gas hoods on the two sides are communicated with fixed pipes in a penetrating mode. Relates to the technical field of plasma cleaning equipment, and solves the problems that when a wide-width electrode of existing normal-pressure plasma equipment is used, gas flow is easily influenced, gas cannot be fully ionized, and meanwhile, heat cannot be timely and effectively dissipated during continuous use, so that normal use of the equipment is influenced.

Description

Technical Field

[0001] This invention relates to the field of plasma cleaning equipment technology, specifically to a wide-range plasma treatment device under normal pressure. Background Technology

[0002] Existing plasma cleaning equipment for cleaning large areas often uses a single nozzle to perform reciprocating motion or multiple nozzles to process side by side. This results in a limited width for each treatment, making it difficult to achieve large-area cleaning. A utility model with publication number CN219834444U discloses an atmospheric pressure plasma device that achieves wide-range glow discharge, including a shell and nozzles. It has a low processing temperature and can be used for thin film and heat-sensitive material processing. It is also static-free and can be used for cleaning precision components.

[0003] Although this device has the advantages mentioned above, it still has the following drawbacks in practical use: 1) Existing wide-width electrodes are mostly rectangular sheets, which on the one hand affect gas flow, and on the other hand cannot make sufficient contact with the gas, which easily leads to insufficient ionization of the gas; 2) When the existing wide-range electrodes are used under high-voltage conditions, the high power will cause the temperature of the wide-range electrodes to rise. The heat dissipation is only achieved through gas flow, which may result in the wide-range electrodes not being able to dissipate heat in time, thus affecting the performance.

[0004] Therefore, it is necessary to address the existing problems with current atmospheric pressure plasma equipment. Summary of the Invention

[0005] To address the shortcomings of existing technologies, this invention provides a wide-range atmospheric pressure plasma treatment device, which solves the problems of existing atmospheric pressure plasma devices where the wide-range electrodes easily affect gas flow and prevent sufficient gas ionization, and where timely and effective heat dissipation is not achieved during continuous use, thus affecting the normal operation of the device.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a normal-pressure wide-area plasma treatment device, comprising a solid shell, on which a wide-area mechanism is provided, the wide-area mechanism including two wide-area electrodes, the two wide-area electrodes being semi-circular and assembled together to form a cylinder, insulating plates being fixedly connected to the outer arc surfaces of the two wide-area electrodes, and axially penetrating cooling holes being provided on the bodies of the two wide-area electrodes, gas shrouds being fixedly connected to both ends of the cylinder, the interiors of the gas shrouds being connected to the interiors of the cooling holes on both sides, and the interiors of the gas shrouds on both sides being penetrating. A solid tube is provided on both sides, with one end of each tube connected to the solid shell body and extending to the outside of the solid shell. A jet pipe is provided above the cylinder, with one end of each jet pipe connected to the solid shell body and extending to the outside of the solid shell. The jet pipe body has a through jet port. A spring tube is connected to one end of the jet pipe and the two solid tubes. A nozzle is provided below the cylinder, and the nozzle is fixed to the outer surface of the solid shell and connected to the inside of the solid shell. An ion generator is electrically connected to the input end of the wide-range electrode, and the outer surface of the ion generator is fixedly connected to the inside of the solid shell.

[0007] A further technical improvement of the present invention is that the cooling hole is opened at half the radius of the cylinder, and the coverage area of ​​the jet nozzle is adapted to the axial length of the cylinder.

[0008] A further technical improvement of the present invention is that a constraint component is provided on the outside of the cylinder, the constraint component including a cylinder, the cylinder being sleeved on the outside of the cylinder, both ends of the cylinder being fixedly connected to the inside of the cylinder, and two rectangular frames communicating through the inside of the cylinder, the outer surface of one rectangular frame being fixedly connected to the outer surface of the jet pipe, the inside of one rectangular frame being connected to the inside of the jet nozzle, the outer surface of the other rectangular frame being fixedly connected to the inside of the solid shell, and the inside of the other rectangular frame being connected to the inside of the nozzle, the main body of the cylinder having two through circular grooves on the left and right, and one end of the gas shield on both sides being respectively sleeved inside the two circular grooves.

[0009] A further technical improvement of the present invention is that two nested solid cylinders are fixedly connected inside the cylinder. The bodies of the two solid cylinders have through openings. The two openings are arranged in a mirror image of each other. One side of the outer surface of the rectangular frame passes through the opening of the outer solid cylinder and communicates with the interior of the inner solid cylinder.

[0010] A further technical improvement of the present invention is that an arc strip is provided inside the opening of the inner solid cylinder, the outer surface of the arc strip is fixedly connected to the inside of the outer solid cylinder, and two cut surfaces are provided on one side of the arc strip for diverting the flow. A solid strip is provided inside the opening of the outer solid cylinder, the outer surface of the solid strip is fixedly connected to the outer surface of a rectangular frame, and a guide groove is provided on the outer surface of the solid strip. The inside of the guide groove is connected to the inside of the cylinder and the inside of the outer solid cylinder respectively.

[0011] A further technical improvement of the present invention is that a linkage component is provided on the outside of the cylinder. The linkage component includes a fixed sleeve. The inside of the fixed sleeve is respectively connected to the inside of the jet pipe and the inside of the fixed pipe on one side. A sliding plate is slidably connected inside the fixed sleeve. The body of the sliding plate has two sets of through holes that are vertically connected. The inside of the two sets of through holes is respectively connected to the inside of the jet pipe and the inside of the fixed pipe on one side.

[0012] A further technical improvement of the present invention is that the body of the fixed sleeve is provided with a through groove, the groove is disposed between two sets of through holes, a slider is slidably connected inside the groove, a lifting rod is fixedly connected to the outer surface of the slider, and one end of the lifting rod is fixedly connected to the outer surface of the jet pipe.

[0013] A further technical improvement of the present invention is that a sliding rheostat is provided on the outside of the fixed sleeve, the output end of the sliding rheostat is electrically connected to the input end of the ion generator, the outer surface of the sliding rheostat is fixedly connected to the outer surface of the fixed shell, an insulating strip is fixedly connected to the sliding end of the sliding rheostat, and one end of the insulating strip is fixedly connected to the outer surface of the slider.

[0014] Beneficial effects This invention provides a wide-range plasma treatment device under normal pressure. Compared with the prior art, it has the following advantages: (1) By setting up a wide-width mechanism, the positive and negative poles of two wide-width electrodes are combined to form a cylinder, and the arc surface is fully in contact with the gas so that the gas can be fully ionized. At the same time, the gas flow is facilitated, avoiding affecting the gas blowing effect. Meanwhile, by opening axial cooling holes on the wide-width electrode, the heat dissipation area can be increased. The flow of low-temperature gas inside the cooling holes can further improve the heat dissipation performance of the wide-width electrode, thus avoiding the problem that the wide-width electrode cannot dissipate heat in time and affect the use effect.

[0015] (2) By setting up a constraint component, the gas flow path can be constrained by the cylindrical sleeve outside the two wide electrodes and the combined effect of the two rectangular frames, so that the gas can fully contact the wide electrodes and thus fully ionize the gas, so as to ensure the cleaning effect on the workpiece. At the same time, by using the nested arrangement of the two solid cylinders, the gas flow path can be further constrained, thereby further improving the efficiency and effect of gas ionization.

[0016] (3) By setting up a linkage component, the output end of the lifting rod extends and retracts, causing the slider to slide up and down inside the slide groove, thereby driving the slide plate to slide synchronously inside the fixed sleeve. The relative position of each set of through holes is adjusted by the sliding of the slide plate to adjust the gas flow rate. Furthermore, by driving the sliding rheostat to perform synchronous sliding resistance, the gas flow and power can be synchronously and adaptively adjusted, thereby ensuring sufficient ionization of the gas and enabling the wide-range electrode to dissipate heat and cool down in a timely and effective manner. Attached Figure Description

[0017] Figure 1 This is a perspective view of the internal structure of the solid shell of the present invention; Figure 2 This is a perspective view of the external structure of the wide-width electrode of the present invention; Figure 3 This is a perspective view of the external structure of the cylinder of the present invention; Figure 4 This is a perspective view of the external structure of the fixed cylinder of the present invention; Figure 5 This is a perspective view of the internal structure of the fixed sleeve of the present invention.

[0018] In the diagram: 1. Solid shell; 2. Wide electrode; 3. Constraint assembly; 31. Cylinder; 32. Rectangular frame; 33. Circular groove; 34. Solid cylinder; 35. Opening; 36. Arc strip; 37. Cross-section; 38. Solid strip; 39. Guide groove; 4. Linkage assembly; 41. Solid sleeve; 42. Slide plate; 43. Through hole; 44. Slide groove; 45. Lifting rod; 46. Sliding rheostat; 47. Insulating strip; 48. Slider; 5. Insulating plate; 6. Cooling hole; 7. Gas hood; 8. Solid pipe; 9. Jet pipe; 10. Jet nozzle; 11. Spring tube; 12. Nozzle; 13. Ion generator. Detailed Implementation

[0019] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0020] Please see Figure 1-5 This invention provides a technical solution: a normal pressure wide-range plasma treatment device. The assembly includes a solid shell 1, which is installed on the workpiece processing production line. The solid shell 1 has a wide-width mechanism on its body, comprising two wide-width electrodes 2. These electrodes 2 are made of tungsten copper or aluminum alloy, and their axial length is between 50mm and 150mm. They are used for online processing of mobile phone screens, encapsulating lead frames, and other products. The two wide-width electrodes 2 are semi-circular, with the arc surface increasing the contact area to ensure sufficient gas ionization and facilitate gas flow. The two wide-width electrodes 2 are fitted together to form a cylinder. Insulating plates 5, made of alumina ceramic insulating material, are fixedly connected to the outer arc surfaces of both wide-width electrodes 2. The main body of the cylinder is provided with axially penetrating cooling holes 6. These cooling holes 6 increase the heat dissipation area and allow the introduction of cryogenic gas to cool the wide-area electrodes 2. The cryogenic gas can be argon or helium. Gas covers 7 are fixedly connected to both ends of the cylinder, serving to cover and facilitate the flow of cryogenic gas into and out of the cooling holes 6. Preferably, the gas covers 7 can be made using existing flow dividers to ensure that the cryogenic gas can enter all cooling holes 6 evenly, guaranteeing consistent and efficient cooling. The interior of the gas covers 7 is connected to the interior of the cooling holes 6 on both sides. Solid pipes 8 penetrate and connect the interiors of both gas covers 7. 8 is made of thermal insulation material and serves both fixing and flow functions. One end of each of the two solid tubes 8 is fixedly connected to the body of the solid shell 1 and extends to the outside of the solid shell 1. A jet pipe 9 is provided above the cylinder. The jet pipe 9 is used to transport the room temperature gas to be ionized. This room temperature gas can be argon or helium. One end of the jet pipe 9 is fixedly connected to the body of the solid shell 1 and extends to the outside of the solid shell 1. The body of the jet pipe 9 has a through jet port 10. Multiple jet ports 10 are evenly arranged, and the spray range covers the wide electrode 2. One end of the jet pipe 9 and one end of each of the two solid tubes 8 are connected to a spring tube 11. The extension and retraction of the spring tube 11 can facilitate the solid shell 1 to drive the jet pipe 9 and the solid tubes 8. During operation, one side of the solid tube 8 is connected to an external cryogenic gas tank via a spring tube 11, while the other side of the solid tube 8 is connected to an external ambient temperature gas tank via a spring tube 11, a vacuum pump, and a three-way pipe. Simultaneously, the jet pipe 9 is connected to an external ambient temperature gas tank via a spring tube 11 and a three-way pipe. A nozzle 12 is provided below the cylinder, and the nozzle 12 is fixed to the outer surface of the solid shell 1 and connected to the interior of the solid shell 1. The input end of the wide-range electrode 2 is electrically connected to an ion generator 13. The ion generator 13 is made using an existing plasma excitation generator, and the frequency is 25KHz, 40KHz, or 60KHz. The outer surface of the ion generator 13 is fixedly connected to the interior of the solid shell 1.

[0021] The cooling hole 6 is located at half the radius of the cylinder, so that the cooling hole 6 is located in the middle of the wide electrode 2, thereby improving the uniformity and efficiency of heat dissipation and cooling. The coverage of the jet nozzle 10 is adapted to the axial length of the cylinder.

[0022] By setting up a wide-range mechanism, the positive and negative poles of two wide-range electrodes 2 are combined to form a cylinder, and the arc surface is fully in contact with the gas to ensure that the gas can be fully ionized. At the same time, it is also convenient for the gas to flow and avoid affecting the gas blowing effect. Meanwhile, by opening axial cooling holes 6 on the wide-range electrodes 2, the heat dissipation area can be increased, and the flow of low-temperature gas inside the cooling holes 6 can further improve the heat dissipation performance of the wide-range electrodes 2, thereby avoiding the problem that the wide-range electrodes 2 cannot dissipate heat in time and affect the use effect.

[0023] A constraint component 3 is provided on the outside of the cylinder. The constraint component 3 includes a cylinder 31, which is sleeved on the outside of the wide electrode 2 to constrain the gas flow path so that the gas can be fully ionized. The cylinder 31 is sleeved on the outside of the cylinder, and both ends of the cylinder are fixedly connected to the inside of the cylinder 31. Two rectangular frames 32 are connected through the inside of the cylinder 31. The rectangular frames 32 serve as a connection and can be used for the inflow and outflow of gas. The outer surface of one rectangular frame 32 is fixedly connected to the outer surface of the jet pipe 9, the inside of one rectangular frame 32 is connected to the inside of the jet port 10, the outer surface of the other rectangular frame 32 is fixedly connected to the inside of the solid shell 1, and the inside of the other rectangular frame 32 is connected to the inside of the nozzle 12. The body of the cylinder 31 has two through circular grooves 33 on the left and right. The inner diameter of the circular grooves 33 is larger than the outer diameter of one end of the gas cover 7 to facilitate the fixation of the gas cover 7 to the wide electrode 2 and the communication with the cooling hole 6. One end of the two gas covers 7 is respectively sleeved inside the two circular grooves 33.

[0024] The cylinder 31 is internally fixedly connected to two nested solid cylinders 34. The two solid cylinders 34 divide the area between the wide electrode 2 and the cylinder 31 into equal parts, which can be used to guide the flow of gas and further constrain the gas path, so that the gas can be fully ionized. The bodies of the two solid cylinders 34 have through openings 35, which allow the equally divided constrained paths to be interconnected, so as to facilitate the outflow of plasma gas. The inner and outer openings 35 are arranged in a vertical mirror image. One side of the outer surface of a rectangular frame 32 passes through the opening 35 of the outer solid cylinder 34 and then communicates with the interior of the inner solid cylinder 34.

[0025] An arc strip 36 is provided inside the opening 35 on the inner solid cylinder 34. The outer surface of the arc strip 36 is fixedly connected to the inside of the outer solid cylinder 34. Two cut surfaces 37 are provided on one side of the arc strip 36 for diversion. The two cut surfaces 37 can be used for diversion and guidance of ionized gas. A solid strip 38 is provided inside the opening 35 on the outer solid cylinder 34. The outer surface of the solid strip 38 is fixedly connected to the outer surface of a rectangular frame 32. A guide groove 39 is provided on the outer surface of the solid strip 38. The guide groove 39 guides the plasma gas through the shape of its inner wall, so that the flow of plasma gas is smoother and the flow rate loss is reduced. The inside of the guide groove 39 is connected to the inside of the cylinder 31 and the outer solid cylinder 34 respectively.

[0026] By setting the constraint component 3, using the cylinder 31 fitted outside the two wide electrodes 2, and in conjunction with the two rectangular frames 32, the gas flow path can be constrained so that the gas can fully contact the wide electrodes 2, thereby enabling the gas to be fully ionized, so as to ensure the cleaning effect on the workpiece. At the same time, the nested arrangement of the two fixed cylinders 34 can further constrain the gas flow path, thereby further improving the efficiency and effect of gas ionization.

[0027] The cylinder is equipped with a linkage component 4, which includes a fixed sleeve 41. The fixed sleeve 41 is made of a material that is pressure-resistant, heat-insulating, wear-resistant and has good sealing performance. The interior of the fixed sleeve 41 is connected to the interior of the jet pipe 9 and the interior of the solid pipe 8 on one side. The interior of the fixed sleeve 41 is slidably connected to a sliding plate 42. The sliding plate 42 is made of the same material as the fixed sleeve 41. The body of the sliding plate 42 has two sets of through holes 43 that are vertically connected. The through holes 43 are used to connect the two sides of the inner wall of the solid pipe 8 and the jet pipe 9 to control the gas flow rate. At the same time, each set of through holes 43 has multiple holes at equal intervals along the longitudinal direction, and the diameter of each set of multiple through holes 43 decreases sequentially along the longitudinal direction. The interiors of the two sets of through holes 43 are connected to the interiors of the jet pipe 9 and the solid pipe 8 on one side, respectively.

[0028] The body of the fixed sleeve 41 has a through groove 44. The groove 44 is located between two sets of through holes 43. The distance between the upper and lower sides of the inner wall of the groove 44 and the jet pipe 9 and the fixed pipe 8 on one side is greater than the maximum inner diameter of the two sets of through holes 43, so as to avoid gas leakage when the position of the through hole 43 is changed, thereby causing cost loss. The inside of the groove 44 is slidably connected to a slider 48. The outer surface of the slider 48 is fixedly connected to a lifting rod 45. The lifting rod 45 is made of electric push rod and is electrically connected to an external control circuit. One end of the lifting rod 45 is fixedly connected to the outer surface of the jet pipe 9.

[0029] A sliding rheostat 46 is provided on the outside of the fixed sleeve 41. The input end of the sliding rheostat 46 is electrically connected to the external control circuit, and the sliding output end is electrically connected to the input end of the ion generator 13. The output end of the sliding rheostat 46 is electrically connected to the input end of the ion generator 13. The outer surface of the sliding rheostat 46 is fixedly connected to the outer surface of the fixed shell 1. An insulating strip 47 is fixedly connected to the sliding end of the sliding rheostat 46. The insulating strip 47 plays the role of insulating linkage connection. One end of the insulating strip 47 is fixedly connected to the outer surface of the slider 48.

[0030] By setting the linkage component 4, the output end of the lifting rod 45 extends and retracts, causing the slider 48 to slide up and down inside the slide groove 44. This drives the slide plate 42 to slide synchronously inside the fixed sleeve 41. The sliding of the slide plate 42 is used to adjust the relative position of each set of through holes 43 to regulate the gas flow. Furthermore, by driving the sliding rheostat 46 to perform synchronous sliding resistance changes, the gas flow and power can be synchronously and adaptively adjusted, thereby ensuring sufficient gas ionization and enabling the wide-range electrode 2 to dissipate heat and cool down in a timely and effective manner.

[0031] Furthermore, any content not described in detail in this specification is existing technology known to those skilled in the art.

[0032] Working Principle: When cleaning a workpiece is required, the solid shell 1 is first fixed on the production line, with the nozzle 12 pointing downwards to face the production line and the conveyed workpiece. Then, one side of the solid tube 8 is connected to an external cryogenic gas tank via a spring tube 11, and the other side of the solid tube 8 and the jet pipe 9 are connected to an external ambient temperature gas tank via a spring tube 11. Next, the workpiece to be cleaned is conveyed through the production line, moving it directly below the nozzle 12. Then, the ambient temperature gas tank outputs ambient temperature argon gas through the spring tube 11 into the jet pipe 9, and then through the jet port 10 and the guide of the rectangular frame 32 on one side into the interior of the inner solid cylinder 34. After being guided and constrained by the inner wall of the inner solid cylinder 34, the ambient temperature argon gas fully contacts the insulating plate 5. At the same time, the external control circuit activates the gas flow through the sliding... The dynamic rheostat 46 and the ion generator 13 provide high-voltage pulse voltage to the two wide-range electrodes 2, causing the insulating plate 5 to be polarized and electrons to accumulate on the surface, so that a large number of charged particles diffuse to form a macroscopic continuous discharge, thereby ionizing the room temperature argon gas. The ionized argon gas flows into the interior of the outer solid cylinder 34 through the opening 35 of the inner solid cylinder 34. During this process, the ionized argon gas is diverted and guided by the two cut surfaces 37 of the arc strip 36. Then, the ionized argon gas flows into the interior of the cylinder 31 through the opening 35 of the outer solid cylinder 34. During this process, the solid strip 38 guides the ionized argon gas through the guide groove 39 and avoids the problem of reduced flow rate. Then, the ionized argon gas enters the interior of the nozzle 12 through the guide of the rectangular frame 32 on the other side, and is then sprayed onto the workpiece for cleaning through the nozzle 12. When the wide-width electrode 2 is used for a long time and its temperature gradually rises, the external low-temperature gas tank releases low-temperature argon gas. Through the guidance of the spring tube 11, solid tube 8 and gas cover 7 on one side, the low-temperature argon gas enters the cooling hole 6. When the low-temperature argon gas flows inside the cooling hole 6, it dissipates heat and cools the wide-width electrode 2 through heat exchange, so as to ensure the stability of the wide-width electrode 2 during continuous use. At the same time, after heat exchange, the low-temperature argon gas becomes room temperature argon gas through the guidance and heat dissipation of the gas cover 7, solid tube 8 and spring tube 11 on the other side. Then, it is pumped by the air pump and filled into the room temperature gas tank to provide raw materials for ion cleaning. When the cleaning efficiency and cleaning difficulty change, the output end of the lifting rod 45 extends and retracts, causing the slider 48 to slide inside the slide groove 44, thereby causing the slide plate 42 to slide inside the fixed sleeve 41. This allows the position of the two sets of through holes 43 to be adjusted. By connecting each set of through holes 43 with different diameters to the jet pipe 9 and the fixed pipe 8 on one side, the gas flow path is adjusted, thereby adjusting the flow rate. This ensures that the amount of room temperature argon used is positively correlated with the amount of low temperature argon used. At the same time, the slider 48 drives the sliding end of the sliding rheostat 46 to slide synchronously through the insulating strip 47, so that the voltage of the ion generator 13 is positively correlated with the amount of room temperature argon used. This allows the amount of low temperature argon used to be adjusted according to the heat generated by the amount of room temperature argon used, thereby ensuring that the wide electrode 2 can be cooled in a timely and effective manner while avoiding the waste of low temperature argon, thus saving processing costs.

[0033] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An atmospheric pressure wide-area plasma treatment device, comprising a solid shell (1), characterized in that: The solid shell (1) is provided with a wide-width mechanism, which includes two wide-width electrodes (2). The two wide-width electrodes (2) are semi-circular and are assembled into a cylinder by fitting together. Insulating plates (5) are fixedly connected to the outer arc surfaces of the two wide-width electrodes (2). The bodies of the two wide-width electrodes (2) are provided with axially penetrating cooling holes (6). Gas shrouds (7) are fixedly connected to both ends of the cylinder. The interior of the gas shrouds (7) is connected to the interior of the cooling holes (6) on both sides. Solid tubes (8) are penetrating and connected to the interior of the gas shrouds (7) on both sides. One end of the solid tubes (8) on both sides is fixedly connected to the body of the solid shell (1) and extends... Extending to the outside of the solid shell (1), a jet pipe (9) is provided above the cylinder. One end of the jet pipe (9) is fixedly connected to the body of the solid shell (1) and extends to the outside of the solid shell (1). The body of the jet pipe (9) has a through jet port (10). One end of the jet pipe (9) and the two solid pipes (8) on both sides are connected to a spring tube (11). A nozzle (12) is provided below the cylinder. The nozzle (12) is fixed on the outer surface of the solid shell (1) and connected to the inside of the solid shell (1). The input end of the wide electrode (2) is electrically connected to an ion generator (13). The outer surface of the ion generator (13) is fixedly connected to the inside of the solid shell (1).

2. The atmospheric pressure wide-range plasma treatment equipment according to claim 1, characterized in that: The cooling hole (6) is located at half the radius of the cylinder, and the coverage area of ​​the jet nozzle (10) is adapted to the axial length of the cylinder.

3. The atmospheric pressure wide-range plasma treatment equipment according to claim 1, characterized in that: The cylinder is provided with a constraint component (3) on its outside. The constraint component (3) includes a cylinder (31). The cylinder (31) is sleeved on the outside of the cylinder. Both ends of the cylinder are fixedly connected to the inside of the cylinder (31). The inside of the cylinder (31) is connected to two rectangular frames (32). The outer surface of one rectangular frame (32) is fixedly connected to the outer surface of the jet pipe (9). The inside of one rectangular frame (32) is connected to the inside of the jet port (10). The outer surface of the other rectangular frame (32) is fixedly connected to the inside of the solid shell (1). The inside of the other rectangular frame (32) is connected to the inside of the nozzle (12). The body of the cylinder (31) is provided with two through circular grooves (33) on the left and right. One end of the air cover (7) on both sides is respectively sleeved inside the two circular grooves (33).

4. The atmospheric pressure wide-range plasma treatment equipment according to claim 3, characterized in that: The inner part of the cylinder (31) is fixedly connected to two inner and outer nested solid cylinders (34). The bodies of the two solid cylinders (34) have through openings (35). The two openings (35) on the inner and outer sides are arranged in a mirror image. One side of the outer surface of the rectangular frame (32) passes through the opening (35) of the outer solid cylinder (34) and then communicates with the interior of the inner solid cylinder (34).

5. The atmospheric pressure wide-area plasma treatment equipment according to claim 4, characterized in that: An arc strip (36) is provided inside the opening (35) on the inner side of the solid cylinder (34). The outer surface of the arc strip (36) is fixedly connected to the inside of the outer solid cylinder (34). Two cut surfaces (37) are opened on one side of the arc strip (36) for diversion. A solid strip (38) is provided inside the opening (35) on the outer side of the solid cylinder (34). The outer surface of the solid strip (38) is fixedly connected to the outer surface of a rectangular frame (32). A guide groove (39) is opened on the outer surface of the solid strip (38). The inside of the guide groove (39) is connected to the inside of the cylinder (31) and the outside solid cylinder (34).

6. The atmospheric pressure wide-range plasma treatment equipment according to claim 1, characterized in that: The cylinder is provided with a linkage component (4) on its exterior. The linkage component (4) includes a fixed sleeve (41). The interior of the fixed sleeve (41) is connected to the interior of the jet pipe (9) and the interior of the side fixed pipe (8). The interior of the fixed sleeve (41) is slidably connected to a sliding plate (42). The body of the sliding plate (42) has two sets of through holes (43) that are vertically connected. The interior of the two sets of through holes (43) is connected to the interior of the jet pipe (9) and the interior of the side fixed pipe (8).

7. The atmospheric pressure wide-range plasma treatment equipment according to claim 6, characterized in that: The body of the fixed sleeve (41) has a through groove (44) which is located between two sets of through holes (43). A slider (48) is slidably connected inside the groove (44). A lifting rod (45) is fixedly connected to the outer surface of the slider (48). One end of the lifting rod (45) is fixedly connected to the outer surface of the jet pipe (9).

8. The atmospheric pressure wide-range plasma treatment equipment according to claim 7, characterized in that: A sliding rheostat (46) is provided on the outside of the fixed sleeve (41). The output end of the sliding rheostat (46) is electrically connected to the input end of the ion generator (13). The outer surface of the sliding rheostat (46) is fixedly connected to the outer surface of the fixed shell (1). An insulating strip (47) is fixedly connected to the sliding end of the sliding rheostat (46). One end of the insulating strip (47) is fixedly connected to the outer surface of the slider (48).

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