Silica powder filling system

Abstract

The invention relates to the technical field of silicon nitride powder production, and discloses a silicon powder filling system which comprises a rack, a powder discharging device, a discharging pipe, a material mover and a material box, the rack is connected with the powder discharging device, the powder discharging device is used for outputting silicon powder, the output end of the powder discharging device is connected with the discharging pipe, and the discharging pipe is connected with the material box. The material conveying vehicle is movably arranged below the powder discharging device, the multiple material boxes are used for being placed on the material conveying vehicle, when the material boxes are filled with the silicon powder, the material boxes are placed on the material conveying vehicle, then the powder discharging device is controlled to output the silicon powder to the discharging pipe, and workers fill the material boxes with the silicon powder through the discharging pipe. After filling of one material box is completed, the powder discharging device is controlled to stop outputting the silicon powder, then the next material box is placed on the material mover, the process is repeated to complete silicon powder filling of the material box, silicon powder filling of the material box is achieved in the mode, and labor intensity is low.

Description

Technical Field

[0001] This invention belongs to the field of silicon nitride powder production equipment, and more specifically, relates to a silicon powder filling system. Background Technology

[0002] In the process of producing silicon nitride powder by direct nitriding, the operation includes: loading silicon powder into multiple cassettes, stacking the cassettes vertically to form multiple sets, feeding the sets of cassettes into a nitriding furnace, where the silicon powder in the cassettes is sintered to form silicon nitride plates, and the silicon nitride plates are crushed to obtain silicon nitride powder. Currently, workers usually use spoons to fill the cassettes with silicon powder one by one, which is labor-intensive. Summary of the Invention

[0003] The main objective of this invention is to provide a silicon powder filling system that reduces labor intensity when filling silicon powder.

[0004] According to a first aspect of the present invention, a silicon powder filling system is provided, comprising a frame, a powder discharge device, a feeding pipe, a conveying trolley, and a material cassette. The powder discharge device is connected to the frame and is used to output silicon powder. The output end of the powder discharge device is connected to the feeding pipe. The conveying trolley is movably disposed below the powder discharge device. The number of material cassettes is plurality of, and the plurality of material cassettes are used to be placed on the conveying trolley.

[0005] In a specific embodiment of the present invention, the material transport vehicle includes a vehicle body and a liner. The vehicle body is movable and has a first direction of horizontal extension. The liner is placed on top of the vehicle body and is slidable along the first direction. The material box is used to be placed on the liner.

[0006] In a specific embodiment of the present invention, the material transport vehicle further includes rollers, which are rotatably connected to the top of the vehicle body. The rotation axis of the rollers extends horizontally and is perpendicular to the first direction. There are multiple rollers, which are spaced apart along the first direction. The liner is placed on the multiple rollers.

[0007] In a specific embodiment of the present invention, the material transport vehicle further includes a locking assembly, the locking assembly connecting the vehicle body and the liner, and the locking assembly is detachable from the liner, the locking assembly being used to fix the liner.

[0008] In a specific embodiment of the present invention, in the first direction, a groove is provided on the end face of one end of the liner, and the groove penetrates the liner vertically.

[0009] The locking assembly includes a connecting seat, a stud, and a nut. The connecting seat is fixedly connected to the end face of one end of the vehicle body in the first direction. The stud is rotatably connected to the connecting seat. The rotation axis of the stud extends horizontally and is perpendicular to the first direction. The stud passes through the slot. The nut is threadedly connected to the stud. The nut is located above the liner and contacts the top surface of the liner.

[0010] In a specific embodiment of the present invention, the top surface of the liner is provided with a limiting groove, and there are multiple limiting grooves, which are spaced apart, and the limiting grooves are used to limit the position of the material box.

[0011] In one specific embodiment of the present invention, the silicon powder filling system further includes a cover plate;

[0012] The top surface of the cassette has spaced material grooves and positioning grooves, the material grooves are used to hold silicon powder, and the bottom surface of the cassette has positioning protrusions.

[0013] When the cassette is placed on the transport vehicle, multiple cassettes are stacked vertically to form a cassette group. There are multiple cassette groups. Each limiting groove defines one cassette group. In the cassette group, the positioning protrusion of the upper cassette of two adjacent cassettes engages with the positioning groove of the lower cassette. The top surface of the highest cassette in each cassette group is covered by the cover plate, which covers the trough.

[0014] In a specific embodiment of the present invention, the silicon powder filling system further includes a pore punch, which includes a connecting plate, a handle, and pore punching posts. The connecting plate is connected to the handle and the pore punching posts on opposite sides along its thickness direction. The length direction of the pore punching posts is parallel to the length direction of the connecting plate. There are multiple pore punching posts, which are spaced apart. The pore punching posts are used to form holes in the silicon powder in the feed trough.

[0015] In a specific embodiment of the present invention, the powder discharging device includes a hopper, a first valve, a first connector, a loss-in-weight scale, a second connector, a silicon powder temporary storage tube, a second valve, and a valve controller. The hopper is fixedly connected to the frame, and the output end of the hopper is connected to the first valve. The first valve is flexibly connected to the input end of the loss-in-weight scale via the first connector. The loss-in-weight scale is fixedly connected to the frame, and the output end of the loss-in-weight scale is flexibly connected to the silicon powder temporary storage tube via the second connector. The silicon powder temporary storage tube is fixedly connected to the frame, and the output end of the silicon powder temporary storage tube is connected to the discharge pipe via the second valve. The valve controller is electrically connected to the second valve and is used to control the opening and closing of the second valve.

[0016] In a specific embodiment of the present invention, the silicon powder filling system further includes a dust collection hood and a dust suction pipe assembly. The dust collection hood is located below the powder discharge device and is situated on one side of the discharge pipe. The dust suction pipe assembly is connected to the dust collection hood and is used to remove residual silicon powder from the transport vehicle.

[0017] One of the above-described technical solutions of the present invention has at least one of the following advantages or beneficial effects:

[0018] The silicon powder filling system of the present invention includes a powder discharge device loaded with silicon powder. When filling the cassette with silicon powder, the cassette is placed on a transport vehicle, and then the powder discharge device is controlled to output silicon powder to the feed pipe. The operator fills the cassette with silicon powder through the feed pipe. After filling one cassette, the powder discharge device is controlled to stop outputting silicon powder, and then the next cassette is placed on the transport vehicle and the above process is repeated to complete the silicon powder filling of that cassette. After completing the silicon powder filling of all cassettes in a single batch, the cassette is transferred to the nitriding furnace by moving the transport vehicle. This method realizes the silicon powder filling of the cassette with low labor intensity. Attached Figure Description

[0019] The present invention will be further described below with reference to the accompanying drawings and embodiments;

[0020] Figure 1 This is a structural diagram of the silicon powder filling system according to an embodiment of the present invention;

[0021] Figure 2 This is a structural diagram of the liner plate according to an embodiment of the present invention;

[0022] Figure 3 This is a structural diagram of the locking assembly according to an embodiment of the present invention;

[0023] Figure 4 This is a top view of the material box in an embodiment of the present invention;

[0024] Figure 5 This is a side view of the material box according to an embodiment of the present invention;

[0025] Figure 6 This is a structural diagram of the cover plate according to an embodiment of the present invention;

[0026] Figure 7 This is a structural diagram of the punching device according to an embodiment of the present invention.

[0027] The figure labels for each figure are as follows:

[0028] 1. Rack;

[0029] 2. Powder discharge device; 21. Hopper; 22. First valve; 23. First connector; 24. Loss-in-weight scale; 25. Second connector; 26. Silicon powder storage pipe; 27. Second valve; 28. Valve controller;

[0030] 3. Feed pipe;

[0031] 4. Material transport vehicle; 41. Vehicle body; 42. Liner plate; 4201. Slot; 4202. Limiting slot; 43. Roller; 44. Locking assembly; 441. Connecting seat; 442. Stud; 443. Nut;

[0032] 5. Material box; 501. Material trough; 502. Positioning groove; 51. Positioning protrusion;

[0033] 6. Cover plate;

[0034] 7. Hole-piercing tool; 71. Connecting plate; 72. Handle; 73. Hole-piercing post;

[0035] 8. Dust collection hood;

[0036] 9. Vacuum suction pipe assembly;

[0037] X, the first direction. Detailed Implementation

[0038] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0039] Reference Figures 1 to 7 As shown, a preferred embodiment of the silicon powder filling system of this application includes a frame 1, a powder discharge device 2, a feeding pipe 3, a conveying cart 4, and a material box 5. The powder discharge device 2 is connected to the frame 1 and is used to output silicon powder. The output end of the powder discharge device 2 is connected to the feeding pipe 3. The conveying cart 4 is movably disposed below the powder discharge device 2. There are multiple material boxes 5, which are used to place on the conveying cart 4.

[0040] The silicon powder filling system of the present invention includes a powder discharge device 2 loaded with silicon powder. When filling silicon powder into a cartridge 5, the cartridge 5 is placed on a transport vehicle 4, and then the powder discharge device 2 is controlled to output silicon powder to the feed pipe 3. The operator fills the cartridge 5 with silicon powder through the feed pipe 3. After filling one cartridge 5, the powder discharge device 2 is controlled to stop outputting silicon powder, and then the next cartridge 5 is placed on the transport vehicle 4 and the above process is repeated to complete the silicon powder filling of that cartridge 5. After completing the silicon powder filling of all cartridges 5 in a single batch, the cartridges 5 are transferred to the nitriding furnace by moving the transport vehicle 4. This method realizes the silicon powder filling of the cartridges 5 with low labor intensity.

[0041] It should be noted that the number of cartridges 5 depends on the actual application, and this application does not impose any restrictions on this; while the feed pipe 3 can be a telescopic pipe so that the operator can fill the cartridges 5 with silicon powder.

[0042] In this embodiment, the material transport vehicle 4 includes a vehicle body 41 and a liner 42. The vehicle body 41 has casters with brakes, allowing it to move. The vehicle body 41 extends horizontally in a first direction X. The liner 42 is placed on top of the vehicle body 41 and can slide along the first direction X. A material box 5 is placed on the liner 42. Specifically, the liner 42 is made of graphite, which has high-temperature resistance. Because the liner 42 can slide along the first direction X, after the material transport vehicle 4 moves the material box 5 filled with silicon powder to the nitriding furnace, the material transport vehicle 4 moves along the first direction X. The direction X is directly opposite the furnace opening of the nitriding furnace. Then, a hydraulic pusher is used to push the liner 42 along the first direction X, so that the liner 42 can be directly pushed into the nitriding furnace through the furnace opening. The operation is convenient and can further reduce the labor intensity of the workers. For example, the hydraulic pusher is set directly opposite the furnace opening of the nitriding furnace and is spaced apart from the nitriding furnace. The hydraulic pusher includes a hydraulic cylinder. When pushing the material box 5 into the nitriding furnace, the material transport vehicle 4 is located at the interval between the nitriding furnace and the hydraulic pusher. The hydraulic pusher uses the hydraulic cylinder as a power source to push the liner 42 into the nitriding furnace.

[0043] In this embodiment, the material transport vehicle 4 also includes rollers 43, which are rotatably connected to the top of the vehicle body 41. The rotation axis of the rollers 43 extends horizontally and is perpendicular to the first direction X. There are multiple rollers 43, which are spaced apart along the first direction X. The liner 42 is placed on the multiple rollers 43. Specifically, the number of rollers 43 is determined according to the actual application, and this application does not limit it. When the liner 42 slides relative to the vehicle body 41 along the first direction X, the rollers 43 can rotate around their own rotation axis, converting the sliding friction between the liner 42 and the vehicle body 41 into rolling friction, thereby reducing the resistance when the liner 42 moves and playing a role in assisting the sliding of the liner 42, which facilitates pushing the material box 5 into the nitriding furnace.

[0044] Furthermore, along the axial direction of the roller shaft 43, both ends of the car body 41 have limiting plates, and a guide groove is formed between the limiting plates. The liner 42 is disposed in the guide groove. At this time, the limiting plates play the role of limiting the position of the liner 42, ensuring that the liner 42 can be stably placed on the car body 41.

[0045] Since the liner 42 can slide along the first direction X, in order to ensure the stable operation of the filling of the material box 5, in this embodiment, the material transport vehicle 4 also includes a locking assembly 44. The locking assembly 44 connects the vehicle body 41 and the liner 42, and the locking assembly 44 is detachable from the liner 42. The locking assembly 44 is used to fix the liner 42. In practical applications, when the material box 5 is sent into the nitriding furnace, the locking assembly 44 is disassembled from the liner 42, and then the liner 42 is pushed to move along the first direction X into the nitriding furnace.

[0046] In this embodiment, in the first direction X, a groove 4201 is provided on the end face of one end of the liner 42, and the groove 4201 penetrates the liner 42 vertically; the locking assembly 44 includes a connecting seat 441, a stud 442, and a nut 443. The connecting seat 441 is fixedly connected to the end face of one end of the vehicle body 41 in the first direction X. The stud 442 is rotatably connected to the connecting seat 441. The rotation axis of the stud 442 extends horizontally and is perpendicular to the first direction X. The stud 442 passes through the groove 4201. The nut 443 is threadedly connected to the stud 442. The nut 443 is located above the liner 42 and is connected to the groove 4201. The top surface of the liner 42 contacts the liner. Specifically, the connecting seat 441 includes a first connecting lug, and a second connecting lug is threaded / welded to one end of the stud 442 along its length. The first connecting lug and the second connecting lug are rotatably connected by a pin. The axis of rotation of the stud 442 is the axis of the pin. In practical applications, the nut 443 can be separated from the liner 42 by rotating the nut 443. At this time, the stud 442 can be flipped downward around its axis of rotation, and the locking assembly 44 is separated from the liner 42, so that the liner 42 can be pushed smoothly. The locking assembly 44 of this structure is simple in structure and easy to operate.

[0047] Furthermore, in order to ensure that the material box 5 can be stably placed on the liner plate 42, the top surface of the liner plate 42 is provided with a limiting groove 4202. There are multiple limiting grooves 4202, which are spaced apart. The limiting grooves 4202 are used to limit the position of the material box 5. Specifically, the number of limiting grooves 4202 is set according to the actual application, and this application does not limit it.

[0048] Furthermore, the silicon powder filling system also includes a cover plate 6; the top surface of the cassette 5 has spaced material troughs 501 and positioning grooves 502, the material troughs 501 are used to hold silicon powder, and the bottom surface of the cassette 5 has positioning protrusions 51; when the cassette 5 is placed on the transport vehicle 4, multiple cassettes 5 are stacked vertically to form a cassette group, and there are multiple cassette groups. Each limiting groove 4202 defines one cassette group, that is, the number of cassette groups matches the number of limiting grooves 4202. In the cassette group, the positioning protrusion 51 of the upper cassette 5 of two adjacent cassettes 5 is in concave-convex fit with the positioning groove 502 of the lower cassette 5, and the two cassettes 5 are in close contact. The top surface of the highest cassette 5 in each cassette group is covered by a cover plate 6, which covers the material troughs 501. Both the cover plate 6 and the cassette 5 have vent holes to ensure that the reaction atmosphere enters the material. Inside the groove 501; the cassettes 5 in the cassette group are connected by positioning protrusions 51 and positioning grooves 502, making the stacking of cassettes 5 more stable; since the bottom of the cassette 5 has positioning protrusions 51, the depth of the limiting groove 4202 is greater than the dimension of the positioning protrusions 51 along the depth direction of the limiting groove 4202, but less than the dimension of the cassette 5 along the depth direction of the limiting groove 4202. The groove wall of the limiting groove 4202 contacts the side of the cassette 5, thereby ensuring the limiting function of the limiting groove 4202. For example, the limiting groove 4202 is a square groove, and the shape of the cassette 5 is adapted to the shape of the limiting groove 4202. The number of positioning grooves 502 is two, and the two positioning grooves 502 are located on opposite sides of the groove 501. The shape of the positioning grooves 502 is rectangular, and the shape and number of the positioning protrusions 51 are adapted to the positioning grooves 502.

[0049] Furthermore, the silicon powder filling system also includes a perforator 7, which includes a connecting plate 71, a handle 72, and perforating posts 73. The connecting plate 71 is connected to the handle 72 and the perforating posts 73 on opposite sides along its thickness direction. The length direction of the perforating posts 73 is parallel to the length direction of the connecting plate 71. There are multiple perforating posts 73, which are spaced apart. The perforating posts 73 are used to create holes in the silicon powder in the feed trough 501. In practical applications, after each feed trough 5 is filled, the operator first uses a tool to scrape the silicon in the feed trough 501. The silicon powder is then perforated by a perforator 7 in the feed trough 501. The purpose of perforation is to ensure that the reaction atmosphere reacts with the silicon powder. The perforation column 73 forms pores in the silicon powder. The length of the perforation column 73 is less than the depth of the feed trough 501. The connecting plate 71 can cover the opening of the feed trough 501. Thus, the perforator 7 can compact the silicon powder in the feed trough 501 while perforating. The handle 72 is used for the operator to grasp the perforator 7. Specifically, the perforator 7 is designed to facilitate the operator to compact the silicon powder and form pores, resulting in low labor intensity.

[0050] In this embodiment, the powder discharge device 2 includes a hopper 21, a first valve 22, a first connector 23, a loss-in-weight scale 24, a second connector 25, a silicon powder temporary storage pipe 26, a second valve 27, and a valve controller 28. The hopper 21 is fixedly connected to the frame 1. The output end of the hopper 21 is connected to the first valve 22, which is flexibly connected to the input end of the loss-in-weight scale 24 via the first connector 23. A screw conveyor for feeding is connected to the upper end of the hopper 21, and a feed hopper is connected to the screw conveyor. Silicon powder is fed into the screw conveyor through the feed hopper, and the screw conveyor feeds the silicon powder into the hopper 21. The hopper 21 is connected to the frame 1 via spring vibration isolators, and a vibration motor is connected to the lower part of the hopper 21. The vibration motor assists in feeding the silicon powder into the loss-in-weight scale 24, while the spring vibration isolators... The vibrator is used to absorb vibration energy. The loss-in-weight scale 24 is fixedly connected to the frame 1. The output end of the loss-in-weight scale 24 is flexibly connected to the silicon powder storage tube 26 through the second connector 25. The silicon powder storage tube 26 is fixedly connected to the frame 1 and is used to temporarily store the silicon powder output quantitatively by the loss-in-weight scale 24. The output end of the silicon powder storage tube 26 is connected to the feeding tube 3 through the second valve 27. The valve controller 28 is electrically connected to the second valve 27 through a wire and is used to control the opening and closing of the second valve 27. In actual application, when the operator fills the material box 5 with silicon powder, the operator controls the silicon powder storage tube 26 to drop the material through the valve controller 28. The silicon powder is output through the feeding tube 3. The operator fills the material box 5 with silicon powder by pointing the output end of the feeding tube 3 towards the material trough 501 of the material box 5.

[0051] It should be noted that the first connector 23 and the second connector 25 are made of rubber, plastic, etc., and both are cylindrical with open ends. Flexible connection is existing technology, and this application will not elaborate on it further. The first valve 22 and the second valve 27 are both butterfly valves. The first valve 22 is opened and closed by the operator operating the control switch or works in conjunction with the loss-in-weight scale 24. This application does not impose any restrictions on this.

[0052] In this embodiment, the silicon powder filling system also includes a dust collection hood 8 and a dust suction pipe assembly 9. The dust collection hood 8 is located below the powder discharge device 2 and is situated on one side of the discharge pipe 3. When the transport vehicle 4 moves to the area below the powder discharge device 2, the dust collection hood 8 is positioned on one side of the transport vehicle 4. The dust collection hood 8 is connected to a negative pressure device via an air pipe. The function of the dust collection hood 8 is to adsorb silicon powder that escapes from the working environment, ensuring the health of the workers. The dust suction pipe assembly 9 is connected to the dust collection hood 8 and is used to remove residual silicon powder from the transport vehicle 4. The dust suction pipe assembly 9 includes a suction pipe and a suction gun. One end of the suction pipe along its length is connected to the dust collection hood 8, and the other end is connected to the suction gun. Operators can clean the residual silicon powder on the surface of the transport vehicle 4 by controlling the switch of the suction gun and the position of the suction port, ensuring a clean environment.

[0053] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A silicon powder filling system, characterized in that, The device includes a frame (1), a powder discharge device (2), a feeding pipe (3), a transport vehicle (4), and a hopper (5). The powder discharge device (2) is connected to the frame (1) and is used to output silicon powder. The output end of the powder discharge device (2) is connected to the feeding pipe (3). The transport vehicle (4) is movably located below the powder discharge device (2). There are multiple hoppers (5), which are placed on the transport vehicle (4).

2. The silicon powder filling system according to claim 1, characterized in that, The material transport vehicle (4) includes a vehicle body (41) and a liner (42). The vehicle body (41) is movable and has a first direction (X) extending horizontally. The liner (42) is placed on top of the vehicle body (41) and can slide along the first direction (X). The material box (5) is used to place on the liner (42).

3. The silicon powder filling system according to claim 2, characterized in that, The material transport vehicle (4) also includes rollers (43), which are rotatably connected to the top of the vehicle body (41). The axis of rotation of the rollers (43) extends horizontally and is perpendicular to the first direction (X). There are multiple rollers (43), which are spaced apart along the first direction (X). The liner (42) is placed on the multiple rollers (43).

4. The silicon powder filling system according to claim 2, characterized in that, The material transport vehicle (4) also includes a locking assembly (44), which connects the vehicle body (41) and the liner (42), and the locking assembly (44) is detachable from the liner (42). The locking assembly (44) is used to fix the liner (42).

5. The silicon powder filling system according to claim 4, characterized in that, In the first direction (X), a slot (4201) is provided on the end face of one end of the liner (42), and the slot (4201) penetrates the liner (42) vertically. The locking assembly (44) includes a connecting seat (441), a stud (442), and a nut (443). The connecting seat (441) is fixedly connected to the end face of one end of the vehicle body (41) in the first direction (X). The stud (442) is rotatably connected to the connecting seat (441). The rotation axis of the stud (442) extends horizontally and is perpendicular to the first direction (X). The stud (442) passes through the slot (4201). The nut (443) is threadedly connected to the stud (442). The nut (443) is located above the liner (42) and contacts the top surface of the liner (42).

6. The silicon powder filling system according to claim 2, characterized in that, The top surface of the liner (42) is provided with a limiting groove (4202). There are multiple limiting grooves (4202), which are spaced apart. The limiting grooves (4202) are used to limit the position of the material box (5).

7. The silicon powder filling system according to claim 6, characterized in that, The silicon powder filling system also includes a cover plate (6). The top surface of the cassette (5) has spaced material grooves (501) and positioning grooves (502), the material grooves (501) are used to hold silicon powder, and the bottom surface of the cassette (5) has positioning protrusions (51). When the cassette (5) is placed on the transport vehicle (4), multiple cassettes (5) are stacked vertically to form a cassette group. There are multiple cassette groups. Each limiting groove (4202) defines one cassette group. In the cassette group, the positioning protrusion (51) of the upper cassette (5) of two adjacent cassettes (5) is in concave-convex cooperation with the positioning groove (502) of the lower cassette (5). The top surface of the cassette (5) at the highest position in each cassette group is covered by the cover plate (6), and the cover plate (6) covers the trough (501).

8. The silicon powder filling system according to claim 7, characterized in that, The silicon powder filling system also includes a hole punch (7), which includes a connecting plate (71), a handle (72), and a hole punch (73). The connecting plate (71) is connected to the handle (72) and the hole punch (73) on opposite sides along its thickness direction. The length direction of the hole punch (73) is parallel to the length direction of the connecting plate (71). There are multiple hole punches (73), which are spaced apart. The hole punches (73) are used to form holes in the silicon powder in the material tank (501).

9. The silicon powder filling system according to claim 1, characterized in that, The powder discharge device (2) includes a hopper (21), a first valve (22), a first connector (23), a loss-in-weight scale (24), a second connector (25), a silicon powder temporary storage tube (26), a second valve (27), and a valve controller (28). The hopper (21) is fixedly connected to the frame (1). The output end of the hopper (21) is connected to the first valve (22). The first valve (22) is flexibly connected to the input end of the loss-in-weight scale (24) through the first connector (23). The scale (24) is fixedly connected to the frame (1). The output end of the loss-in-weight scale (24) is flexibly connected to the silicon powder storage tube (26) through the second connector (25). The silicon powder storage tube (26) is fixedly connected to the frame (1). The output end of the silicon powder storage tube (26) is connected to the feed tube (3) through the second valve (27). The valve controller (28) is electrically connected to the second valve (27). The valve controller (28) is used to control the opening and closing of the second valve (27).

10. The silicon powder filling system according to claim 1, characterized in that, The silicon powder filling system also includes a dust collection hood (8) and a dust suction pipe assembly (9). The dust collection hood (8) is located below the powder discharge device (2) and is located on one side of the discharge pipe (3). The dust suction pipe assembly (9) is connected to the dust collection hood (8) and is used to suck up the residual silicon powder on the transport vehicle (4).

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