A large-size substrate lifting device, its control method, and its handling device

Abstract

This application belongs to the technical field of display panel manufacturing equipment, and discloses a large-size substrate lifting device and its control method and handling device. The lifting device includes: a substrate stage, a lifting mechanism, a flexible support array, a pneumatic pressure regulation system, and a motion controller. The flexible support array includes multiple pneumatic support units disposed on the lifting mechanism. The pneumatic support units pass through the substrate stage. The lifting mechanism can drive the flexible support array to move upward so that the upper end of the pneumatic support unit extends out of the top surface of the substrate stage to support the substrate to be transported, and to move downward so that the upper end of the pneumatic support unit does not extend out of the top surface of the substrate stage to place the substrate to be transported on the substrate stage. The motion controller is used to control the lifting mechanism to move up and down and to control the pneumatic pressure regulation system to adjust the air pressure of each pneumatic support unit to ensure the uniformity of the support force of the flexible support array on the substrate to be transported. This improves the stability and safety of the lifting process and reduces the risk of substrate breakage.

Description

Technical Field

[0001] This application relates to the field of display panel manufacturing equipment technology, and more specifically, to a large-size substrate lifting device, its control method, and a handling device. Background Technology

[0002] With the rapid development of display technologies (such as LCD and OLED) and the semiconductor industry, the size of glass substrates is increasing daily. For example, the size of glass substrates in the G8.6 generation line has reached 2290×2620mm. During manufacturing, these large-size substrates require frequent, stable, and precise lifting and lowering operations between different process chambers or transport platforms. OLED inkjet printing technology directly prints luminescent material into the luminescent pixel slots, achieving ultra-high material utilization, low equipment cost, and easy fabrication of large-size display devices. Therefore, OLED inkjet printing technology has become one of the most promising technologies in OLED device fabrication. The handling of the wet film after inkjet printing of the OLED substrate is a critical and fragile step in the entire manufacturing process. Before the wet film has cured, any improper contact or environmental fluctuations can lead to defects and product scrap. Any tilting will cause the liquid film to flow under gravity, resulting in uneven film thickness and uneven display.

[0003] In existing technologies, there are two main solutions commonly used for lifting large-size substrates:

[0004] Single-point or multi-point lead screw / cylinder lifting solutions: This solution uses lifting mechanisms set at several points below the substrate (usually the four corners or edge centers), employing servo motors or cylinders to drive the lead screws, thereby lifting the substrate. This solution suffers from significant rigid impact and stress concentration issues. For single-point lifting solutions, due to the limited number of support points, uneven stress distribution at each lifting point under the weight of a large, thin substrate can easily lead to sagging in the center or warping at the edges, generating internal stress and even causing substrate cracking or microcracks. While multi-point lead screw solutions increase the number of support points, mechanical synchronization is difficult to guarantee; even slight asynchrony can create torque on the substrate. At the moment of contact or separation from the substrate, a hard impact is easily generated, and the solution cannot accommodate the substrate's slight warping, leading to localized stress concentration and the risk of cracking or microcracks, which is particularly fatal for brittle OLED glass substrates.

[0005] Synchronous belt / chain lifting solution: This solution sets multiple lifting points on both sides or around the base plate, connecting multiple lifters through a long shaft, and is driven by a single motor to achieve mechanical synchronous lifting. This solution suffers from poor synchronization, leading to macroscopic deformation. Whether using long-shaft mechanical synchronization or simple electrical synchronization control, after long-term operation, mechanical wear and transmission backlash will cause the positions of the various lifting points to become asynchronous. This asynchrony is directly transmitted to the base plate, causing it to slide, shift, or even jam during lifting. Furthermore, existing technologies suffer from insufficient control precision and flexibility. Sudden acceleration changes during start-up and shutdown can easily cause vibration of the base plate. Simultaneously, the device is difficult to adapt to base plates of different sizes and weights, lacking flexibility. Reliability is also an issue; the mechanical long-shaft structure is complex, occupies a large space, and jamming at one point can paralyze the entire system, resulting in high maintenance costs.

[0006] To address the aforementioned issues, existing technologies urgently need improvement. Summary of the Invention

[0007] The purpose of this application is to provide a large-size substrate lifting device, its control method, and a handling device, which can achieve uniform support for the substrate, avoid hard impacts and stress concentration, thereby improving the stability and safety of the lifting process and reducing the risk of substrate breakage.

[0008] In a first aspect, this application provides a large-size substrate lifting device, comprising:

[0009] A substrate stage is used to support substrates to be transported.

[0010] The lifting mechanism and flexible support array include multiple pneumatic support units arranged in an array on the lifting mechanism. The pneumatic support units pass through the substrate platform. The lifting mechanism can move the flexible support array upward so that the upper end of the pneumatic support unit extends out of the top surface of the substrate platform to support the substrate to be transported. It can also move the flexible support array downward so that the upper end of the pneumatic support unit does not extend out of the top surface of the substrate platform to place the substrate to be transported on the substrate platform.

[0011] A pneumatic pressure regulation system is used to regulate and detect the pneumatic pressure of each of the aforementioned pneumatic support units;

[0012] A motion controller is used to control the lifting mechanism to move up and down, and to control the air pressure regulation system to adjust the air pressure of each pneumatic support unit according to the air pressure detection result, so as to ensure the uniformity of the support force of the flexible support array on the substrate to be transported.

[0013] Secondly, this application provides a control method for the large-size substrate lifting device described above, including the following steps:

[0014] A1. Control the lifting mechanism to rise to the preset docking position and adjust the air pressure of all pneumatic support units to the preset soft contact pressure value;

[0015] A2. After the substrate to be transported is placed on the flexible support array, the nominal support pressure value of each pneumatic support unit is obtained, and the air pressure of each pneumatic support unit is adjusted to the corresponding nominal support pressure value.

[0016] A3. Control the lifting mechanism to move down to the preset release position, and adjust the air pressure of all pneumatic support units to the preset release pressure value, so as to place the substrate to be transported on the substrate carrier.

[0017] A4. Control the lifting mechanism to move down and reset so that the pneumatic support unit is completely separated from the substrate to be transported.

[0018] Thirdly, this application provides a handling device, including the large-size substrate lifting device described above.

[0019] Beneficial effects: The large-size substrate lifting device, its control method and handling device provided in this application achieve uniform support for the substrate through a flexible support array and a pneumatic adjustment system, avoiding hard impact and stress concentration, and have the advantages of improving the stability and safety of the lifting process and reducing the risk of substrate damage. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of a large-size substrate lifting device provided in this application.

[0021] Figure 2 This is a schematic diagram of the lifting mechanism and the flexible support array.

[0022] Figure 3 This is a schematic diagram of the pneumatic support unit.

[0023] Figure 4 This is a schematic diagram showing the connection between the air pressure regulation system and the flexible support array.

[0024] Figure 5 A flowchart of the control method provided in this application.

[0025] Labeling Explanation: 1. Substrate platform; 2. Lifting mechanism; 201. Lifting frame; 202. Linear lifting module; 3. Flexible support array; 301. Pneumatic support unit; 302. Top rod; 303. Pneumatic actuator; 304. Flexible top cap; 4. Air pressure regulation system; 401. Air source; 402. Main pressure regulating valve; 403. Electro-proportional valve; 404. Branch air path; 405. Regional main air path; 406. Global main air path; 90. Substrate to be transported. Detailed Implementation

[0026] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0027] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, in the description of this application, terms such as "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0028] Please refer to Figures 1-4 A large-size substrate lifting device in some embodiments of this application includes:

[0029] Substrate stage 1, used to support substrate 90 to be transported;

[0030] The lifting mechanism 2 and the flexible support array 3 include multiple pneumatic support units 301 arranged in an array on the lifting mechanism 2. The pneumatic support units 301 pass through the substrate platform 1. The lifting mechanism 2 can drive the flexible support array 3 to move upward so that the upper end of the pneumatic support unit 301 extends out of the top surface of the substrate platform 1 to support the substrate 90 to be transported. It can also drive the flexible support array 3 to move downward so that the upper end of the pneumatic support unit 301 does not extend out of the top surface of the substrate platform 1 to place the substrate 90 to be transported on the substrate platform 1.

[0031] The air pressure regulation system 4 is used to regulate and detect the air pressure of each pneumatic support unit 301;

[0032] A motion controller is used to control the lifting mechanism 2 to lift and lower, and to control the air pressure regulation system 4 to adjust the air pressure of each pneumatic support unit 301 according to the air pressure detection results, so as to ensure the uniformity of the support force of the flexible support array 3 on the substrate 90 to be transported.

[0033] The device proposed in this application achieves smooth lifting and lowering of large-size substrates by integrating flexible support and intelligent control mechanisms, effectively avoiding deformation and breakage. The substrate platform 1 serves as the support base, providing a stable platform for placing the substrate and ensuring safe initial positioning during handling. The lifting mechanism 2 drives the flexible support array 3 to move up and down. The flexible support array 3 consists of multiple pneumatic support units 301 arranged in an array. These pneumatic support units 301 pass through the substrate platform 1 and, during lifting and lowering, extend or retract to achieve multi-point flexible contact, thereby dispersing the support force and reducing rigid impact and stress concentration. The air pressure regulation system 4 regulates and detects the air pressure of each pneumatic support unit 301. By monitoring and adjusting the air pressure value in real time, it ensures that the support force of each unit can dynamically adapt to the weight distribution of the substrate. The motion controller controls the lifting and lowering actions of the lifting mechanism 2 and adjusts the air pressure regulation system 4 based on the air pressure detection results. Through this closed-loop feedback mechanism, it ensures a uniform distribution of support force throughout the flexible support array 3, solving the problems of poor synchronization and uneven support, and improving the smoothness and reliability of the lifting process.

[0034] Compared to traditional single-point or multi-point lead screw / cylinder lifting solutions and synchronous belt / chain lifting solutions, the device proposed in this application has significant technological contributions. Traditional solutions are prone to hard impacts upon contact or disengagement from the substrate and cannot accommodate the substrate's slight warping, leading to localized stress concentration and the risk of cracking or micro-cracks. This application, through a flexible support array 3 and a pneumatic pressure regulation system 4, achieves multi-point flexible contact and dynamic support force adjustment, effectively avoiding rigid impacts and stress concentration. Furthermore, traditional solutions suffer from poor synchronization; mechanical wear and transmission gaps can cause asynchrony in the positions of various lifting points, leading to substrate slippage, displacement, or even jamming during lifting. The motion controller in this application uses closed-loop synchronous control to calculate the positional deviation of each lifting unit in real time and dynamically adjust the drive signal, ensuring synchronized movement of all units and significantly improving synchronization accuracy. Therefore, the device proposed in this application outperforms existing technologies in terms of stability, synchronization accuracy, and reliability, providing a safer and more efficient solution for handling large-size substrates.

[0035] The substrate stage 1 can be implemented in various ways. For example, it can be a simple flat plate on which the substrate is placed by gravity; it can also be a platform with positioning pins to assist in the precise alignment of the substrate; or the substrate stage 1 can be designed as an adsorption platform to stably fix the substrate on its surface by means of vacuum adsorption, etc., to prevent sliding or displacement during transportation.

[0036] In some implementations, see Figure 3The pneumatic support unit 301 includes a push rod 302 and a pneumatic actuator 303; the lower end of the push rod 302 is connected to the pneumatic actuator 303, and the upper end is used to support the substrate 90 to be transported; the pneumatic actuator 303 is used to adjust the supporting force of the push rod 302 on the substrate 90 to be transported by adjusting the internal air pressure.

[0037] The push rod 302 is the component in the pneumatic support unit 301 that directly contacts the substrate 90 to be transported. Its upper end supports the substrate, and its lower end connects to the pneumatic actuator 303. The push rod 302 is designed to smoothly and evenly transmit the supporting force generated by the pneumatic actuator 303 to the substrate, while avoiding damage to the substrate. The push rod 302 can be made of various materials and structures. For example, it can be made of engineering plastics with good wear resistance and low coefficient of friction (such as polyetheretherketone PEEK, polyoxymethylene POM), or precision-machined and surface-treated metal materials (such as stainless steel) to ensure smoothness and stability when in contact with the substrate. The pneumatic actuator 303 is the core component for adjusting the supporting force of the push rod 302. It generates a controllable thrust by adjusting the internal air pressure, thereby adjusting the supporting force of the push rod 302 on the substrate 90 to be transported. The pneumatic actuator 303 is preferably a cylinder (such as a low-friction cylinder, for example...). Figure 3 (As shown) or pneumatic muscles. When it is a cylinder, its piston rod is connected to the lower part of the push rod 302. By controlling the air pressure in the cylinder chamber, the extension and retraction of the piston rod can be precisely controlled, thereby adjusting the support height and force of the push rod 302. When it is a pneumatic muscle, such as a bellows-type pneumatic muscle or a braided tube-type pneumatic muscle, it achieves contraction or expansion through changes in internal air pressure, thereby driving the push rod 302 to provide flexible support.

[0038] The solution in this application refines the internal structure of the pneumatic support unit 301, enabling it to work in conjunction with the air pressure regulation system 4 and motion controller in the large-size substrate lifting device, thereby achieving precise and flexible support for large-size substrates. Specifically, each pneumatic support unit 301 in the flexible support array 3 includes a top rod 302 and a pneumatic actuator 303. When the motion controller issues a command based on the substrate's weight distribution model or real-time air pressure detection results, the air pressure regulation system 4 precisely adjusts the internal air pressure of each pneumatic actuator 303. The change in internal air pressure of the pneumatic actuator 303 directly acts on the top rod 302, causing it to generate a corresponding vertical support force. Since the support force of each pneumatic support unit 301 can be adjusted independently or regionally, the entire flexible support array 3 can dynamically respond according to the actual stress on the substrate, ensuring that the substrate is always under uniform stress during lifting. This precise support force adjustment mechanism effectively avoids local stress concentration and impact that may be caused by traditional rigid support, significantly improving the stability and safety of substrate handling.

[0039] Preferably, see Figure 3 A flexible cap 304 can be installed at the upper end of the top rod 302.

[0040] The flexible top cap 304 is a component with a certain degree of elasticity and cushioning capability. Its main function is to absorb and disperse impact force when the push rod 302 contacts the substrate 90 to be transported, preventing damage to the substrate from hard contact. The flexible top cap 304 can be made of various materials; for example, in addition to antistatic PEEK, it can also be made of high-molecular materials with good elasticity and wear resistance, such as silicone rubber, polyurethane, and fluororubber. The flexible top cap 304 is positioned at the upper end of the push rod 302, i.e., the part where the push rod 302 directly contacts the substrate 90 to be transported. This arrangement ensures that throughout the entire process of the push rod 302 supporting or releasing the substrate, the flexible top cap 304 always serves as the first contact interface, providing cushioning protection for the substrate. It can be fixed to the upper end of the push rod 302 using various methods such as adhesive bonding, snap-fit, and threaded connection to ensure that it will not fall off or shift during operation. For example... Figure 3 In the middle, the flexible top cap 304 is fixed to the upper end of the top rod 302 by a threaded connection, so that the flexible top cap 304 can be replaced separately when it is aged or worn, reducing maintenance costs. In addition, the flexible top cap 304 of different shapes and materials can be replaced according to actual needs.

[0041] In some implementations, see Figure 2 The lifting mechanism 2 includes a lifting frame 201 and a lifting drive device; the lifting frame 201 is disposed below the substrate platform 1; the lifting drive device is connected between the lifting frame 201 and the substrate platform 1 and is used to drive the lifting frame 201 to lift vertically; the flexible support array 3 is disposed on the lifting frame 201.

[0042] The lifting mechanism 2 is the core component for realizing the vertical movement of the substrate. Its main function is to provide stable and precise lifting power and guidance. The lifting mechanism 2 can take various forms; for example, it can be a hydraulically or pneumatically driven lifting system, or a mechanical lifting system driven by an electric lead screw or rack and pinion. In this application, the lifting mechanism 2 is designed to include a rigid synchronous lifting frame (i.e., lifting frame 201) and a corresponding lifting drive device to ensure the synchronicity of movement and the stability of the structure. The lifting frame 201 is a key load-bearing structure in the lifting mechanism 2, its main function being to serve as an installation platform for the flexible support array 3 and to move vertically with the lifting drive device. The lifting frame 201 can be designed as a plate structure, frame structure, or box structure. Its material and structural strength must meet the requirements for supporting the flexible support array 3 and the substrate 90 to be transported, and resist any deformation that may occur during the lifting process. The lifting frame 201 is located below the substrate platform 1. This layout ensures that the lifting mechanism 2 provides support and drive below the substrate platform 1, allowing the flexible support array 3 to pass under the top surface of the substrate platform 1 to support and place the substrate. This positional relationship helps optimize the overall structural compactness of the device and provides a stable support surface for the substrate stage 1.

[0043] The lifting drive device is a component that provides vertical motion power for the lifting frame 201. Its implementation can be varied; for example, it can employ a ball screw module driven by a servo motor, a planetary roller screw module, or hydraulic cylinders and pneumatic cylinders. This device needs sufficient driving force, precise positioning capability, and good synchronization performance to ensure smooth and precise vertical movement of the lifting frame 201. In this application, the lifting drive device can include at least two parallel linear lifting modules 202. The connection method between the lifting drive device, the lifting frame 201, and the substrate platform 1 is crucial, directly affecting the stability and accuracy of the lifting motion. This connection can be a rigid fixed connection, such as connecting the fixed end of the drive device to the support structure of the substrate platform 1 via bolts or welding, while its moving end is connected to the lifting frame 201. Alternatively, a relative motion connection between the drive device and the lifting frame 201 can be achieved through structures such as guide rails or sliders, while ensuring the straightness of the movement. The core function of the lifting drive device is to precisely drive the lifting frame 201 to move vertically. This is typically achieved by controlling the actuators of the drive unit (such as the rotation of the lead screw and the extension and retraction of the piston rod), thereby driving the lifting frame 201 and the flexible support array 3 it carries to perform a preset vertical displacement.

[0044] The flexible support array 3 is mounted on the lifting frame 201, which means that the entire flexible support array 3, as a whole, will rise and fall synchronously with the vertical movement of the lifting frame 201. This installation method ensures that the relative positions of all pneumatic support units 301 in the vertical direction of the flexible support array 3 remain unchanged, thereby ensuring overall and uniform support for the substrate and avoiding local stress concentration caused by asynchronous installation.

[0045] Furthermore, the lifting drive device may include two linear lifting modules 202 extending in the vertical direction, and the two linear lifting modules 202 are symmetrically connected between the lifting frame 201 and the base plate stage 1.

[0046] The linear lifting module 202 is a modular mechanical device that converts rotary motion into linear motion, providing precise and smooth vertical displacement. Besides ball screw modules and planetary roller screw modules, the linear lifting module 202 can also be a linear guide module driven by rack and pinion, synchronous belt, or hydraulic / pneumatic cylinders to adapt to different load, precision, and speed requirements. The "symmetrical connection" of the two linear lifting modules 202 means that they are evenly distributed vertically between the lifting frame 201 and the base plate platform 1. For example, they can be located on both sides or diagonally opposite sides of the lifting frame 201 to ensure uniform force transmission and balance during lifting. This symmetrical layout is crucial for maintaining the horizontal orientation of the lifting frame 201. The linear lifting module 202 can be driven by a servo motor, which provides precise speed, position, and torque control, ensuring the smoothness and controllability of the lifting motion. Meanwhile, the linear lifting module 202 can be equipped with an encoder, which is a sensor used to measure mechanical displacement. It can convert linear or rotary motion into electrical signals, providing real-time position and speed feedback to the motion controller, thereby realizing closed-loop control and further improving lifting accuracy and synchronization.

[0047] In some embodiments, the air pressure regulation system 4 includes an air source 401, a control valve group, and an air pressure sensor group. The air source 401 is used to provide driving gas to the pneumatic support unit 301, the control valve group is used to control the delivery of driving gas to regulate the air pressure of each pneumatic support unit 301, and the air pressure sensor group is used to detect the air pressure of each pneumatic support unit 301.

[0048] Specifically, the air source 401 is a device that provides stable and clean driving gas for the entire air pressure regulation system 4. Its function is to ensure a sufficient and constant-pressure gas supply to the pneumatic support unit 301 during operation, preventing instability in the support force due to fluctuations in the air source 401. As a specific implementation, the air source 401 can be an industrial-grade air compressor equipped with an air tank, dryer, and precision filter to provide dry, oil-free, and stable-pressure compressed air. Alternatively, the air source 401 can be a high-pressure gas cylinder, providing constant pressure through a pressure reducing valve.

[0049] The control valve assembly is the core component for precisely regulating the air pressure of each pneumatic support unit 301. Its function is to precisely control the flow rate and pressure of the driving gas entering or exiting the pneumatic support unit 301 according to control commands, thereby regulating the supporting force of the pneumatic support unit 301 on the substrate. In one specific implementation, the control valve assembly can consist of multiple independent electro-proportional valves 403, each controlling the air pressure of one or a group of pneumatic support units 301. Alternatively, the control valve assembly can also be composed of a series of solenoid valves and pressure regulating valves, achieving air pressure regulation through switching and pressure setting.

[0050] The air pressure sensor array is used to monitor the air pressure inside each pneumatic support unit 301 in real time. Its function is to provide accurate air pressure feedback signals to the motion controller, enabling the motion controller to perform closed-loop control based on the actual air pressure value, and to adjust the control valve group in a timely manner to ensure the uniformity of the support force. In one specific implementation, the air pressure sensor array can consist of multiple high-precision digital air pressure sensors, each installed in the air path of the corresponding pneumatic support unit 301, collecting air pressure data in real time and converting it into an electrical signal for transmission to the motion controller. Alternatively, the air pressure sensor array can also use analog air pressure sensors, converting analog signals into digital signals via an analog-to-digital converter.

[0051] The proposed solution refines the air pressure regulation system 4 into an air source 401, a control valve assembly, and an air pressure sensor assembly, forming a complete closed-loop control circuit. The air source 401 provides a stable driving gas, the control valve assembly precisely adjusts the air pressure of each pneumatic support unit 301 according to the instructions of the motion controller, and the air pressure sensor assembly detects these air pressures in real time and transmits feedback signals to the motion controller. Based on these feedback signals and a preset support force distribution model, the motion controller dynamically adjusts the output of the control valve assembly, thereby ensuring that the support force of the flexible support array 3 on the large-size substrate remains uniform. This refined air pressure regulation and real-time detection mechanism effectively solves the problems of inaccurate air pressure regulation and untimely detection in traditional solutions. Given that the motion controller in the large-size substrate lifting device can control the air pressure regulation system 4 to adjust the air pressure of each pneumatic support unit 301 according to the air pressure detection results, so as to ensure the uniformity of the support force of the flexible support array 3 on the substrate 90 to be transported, the introduction of this solution enables the motion controller to obtain accurate real-time air pressure data, thereby achieving more precise and dynamic support force control, and significantly improving the overall lifting device's ability to stably support large-size substrates.

[0052] In some implementations, see Figure 4 The pneumatic support unit 301 in the flexible support array 3 is divided into multiple regional unit groups. The pneumatic support unit 301 of each regional unit group is connected to a regional main air passage 405 through a set of branch air passages 404. All regional main air passages 405 are connected to a global main air passage 406. The global main air passage 406 is connected to the air source 401.

[0053] The control valve assembly includes a main pressure regulating valve 402 and multiple electro-proportional valves 403, and the pressure sensor assembly includes multiple pressure sensors. The main pressure regulating valve 402 is installed on the overall main air passage 406, and each area main air passage 405 is equipped with an electro-proportional valve 403 and a pressure sensor.

[0054] The pneumatic support units 301 in the flexible support array 3 are divided into several logical or physical groups. These groups can be defined according to the size, shape, weight distribution characteristics, or process requirements of the substrate 90 to be transported. For example, they can be divided according to the geometric center and edge regions of the substrate (e.g., divided into nine regional unit groups in a nine-square grid), or according to the local stress concentration areas that may occur in the substrate during a specific process. Each regional unit group's pneumatic support unit 301 is connected to a regional main air passage 405 through a set of branch air passages 404, ensuring that the pneumatic support units 301 in the same region can receive a unified air pressure control signal and realize air pressure regulation in that region. The branch air passages 404 can be connected in parallel, so that the gas from the regional main air passage 405 can be supplied to all pneumatic support units 301 in that region simultaneously. All regional main air passages 405 are connected to a global main air passage 406, providing a unified air source 401 inlet, distributing the gas from the air source 401 to each regional main air passage 405. The overall air supply circuit 406 is ultimately connected to the air source 401, which can be a compressed air generator or a high-pressure air cylinder, providing driving gas for all pneumatic support units 301. The control valve group includes a main pressure regulating valve 402 and multiple electro-proportional valves 403. The main pressure regulating valve 402 is used to coarsely adjust and stabilize the base air pressure of the entire system, ensuring that the air pressure of the overall air supply circuit 406 is within a preset range. This valve can be manual or electric. The multiple electro-proportional valves 403 are used to precisely adjust their output air pressure according to electrical signals, thereby achieving fine control of the air pressure of each area unit group. These valves can be two-way, three-way, or four-way electro-proportional valves. The air pressure sensor group includes multiple air pressure sensors used to monitor the air pressure of each pneumatic support unit 301 or area in real time, providing feedback signals to the motion controller to achieve closed-loop control. These sensors can be piezoresistive, capacitive, or piezoelectric air pressure sensors. The main pressure regulating valve 402 is installed on the overall main gas line 406, typically between the outlet of the gas source 401 and the overall main gas line 406. Each area's main gas line 405 is equipped with an electro-proportional valve 403 and a pressure sensor to achieve independent and precise pressure control and real-time monitoring of each area unit group. Typically, the electro-proportional valve 403 is located before the pressure sensor.

[0055] This application's solution effectively solves the problem of uneven support force caused by uneven weight distribution during the support of large-size substrates by constructing a layered and refined air pressure regulation network. First, the air source 401 provides stable driving gas, which enters the entire system through the overall air passage 406. A main pressure regulating valve 402, located on the overall air passage 406, performs initial pressure coarse adjustment on the gas from the air source 401, ensuring a stable base air pressure throughout the entire air passage system. Subsequently, the overall air passage 406 distributes the gas to the main air passages 405 of each region. An independently installed electro-proportional valve 403 on each region's main air passage 405, under the command of the motion controller, can precisely proportionally adjust the gas pressure entering the unit group of that region according to the actual support requirements of that region. This means that even if the weight distribution of the substrate 90 to be transported is uneven, for example, if a certain region is heavier, the motion controller can increase the air pressure in that region through the corresponding electro-proportional valve 403, thereby increasing the support force of the pneumatic support unit 301. Simultaneously, the air pressure sensor configured on the main air passage 405 of each region monitors the actual air pressure of that region in real time and transmits the feedback signal to the motion controller. After receiving this feedback data, the motion controller can compare it with the preset support pressure model or the real-time calculated support requirements to form a closed-loop control. If there is a deviation between the detected air pressure and the target air pressure, the motion controller will immediately adjust the opening of the corresponding electro-proportional valve 403 to correct the air pressure and ensure that the support force of that region is always in an ideal state. In this way, the pneumatic support unit 301 of each region unit group can independently and accurately adjust its support force, thereby making the support force distribution of the entire flexible support array 3 on the large-size substrate more uniform. Compared with the scheme of only adjusting the overall air pressure, the zone control strategy of this application, combined with the above-mentioned large-size substrate lifting device, can more accurately adapt to the local characteristics of the substrate. For example, when the substrate stage 1 supports the substrate 90 to be transported, the motion controller not only controls the lifting mechanism 2, but also ensures the uniformity of the support force of the flexible support array 3 on the substrate by adjusting the air pressure in each pneumatic support unit 301 according to the air pressure detection results. This refined and regional air pressure adjustment mechanism enables flexible and uniform support to be provided even when there is slight warping or local weight difference in the substrate.

[0056] refer to Figure 5 This application also provides a control method for the large-size substrate lifting device described above, including the following steps:

[0057] A1. Control the lifting mechanism 2 to rise to the preset docking position, and adjust the air pressure of all pneumatic support units 301 to the preset soft contact pressure value;

[0058] A2. After the substrate 90 to be transported is placed on the flexible support array 3, the nominal support pressure value of each pneumatic support unit 301 is obtained, and the air pressure of each pneumatic support unit 301 is adjusted to the corresponding nominal support pressure value.

[0059] A3. Control the lifting mechanism 2 to move down to the preset release position, and adjust the air pressure of all pneumatic support units 301 to the preset release pressure value, so as to place the substrate 90 to be transported on the substrate stage 1.

[0060] A4. Control the lifting mechanism 2 to move down and reset so that the pneumatic support unit 301 is completely separated from the substrate 90 to be transported.

[0061] Specifically, in step A1, the preset contact position refers to the lifting mechanism 2 raising the flexible support array 3 to a specific height, allowing the upper end of the pneumatic support unit 301 to extend beyond the top surface of the substrate platform 1 and make initial contact with the substrate 90 to be placed. This position can be precisely calculated based on the thickness of the substrate 90, the height of the substrate platform 1, and the extension / retraction stroke of the pneumatic support unit 301, or detected and adjusted in real time using sensors (e.g., laser rangefinders, proximity sensors). The preset soft contact pressure value refers to a low air pressure value designed to ensure that the pneumatic support unit 301 provides a gentle, cushioned support force upon initial contact with the substrate 90, avoiding a hard impact on the substrate. This pressure value can be predetermined through experiments or simulation based on the material, thickness, weight of the substrate 90, and the characteristics of the pneumatic support unit 301, and stored in the motion controller. The adjustment method is usually achieved by precisely controlling the intake and exhaust volume of each pneumatic support unit 301 through the control valve group (e.g., electro-proportional valve 403) in the pneumatic pressure regulation system 4.

[0062] In step A2, the nominal support pressure value refers to the air pressure value corresponding to the ideal support force that each pneumatic support unit 301 should apply after the substrate is stably supported by the flexible support array 3. This value can be obtained by calculation based on a preset theoretical weight distribution model of the substrate to ensure uniform stress on the substrate as a whole; or, after the substrate is placed, the initial air pressure of each pneumatic support unit 301 is detected in real time by an air pressure sensor group, and the nominal support pressure value of each unit is dynamically determined by an algorithm (e.g., mean calculation, weighted average, or optimization algorithm based on finite element analysis) based on these initial air pressure values ​​to achieve uniform support of the substrate. The air pressure is adjusted by the motion controller sending a command to the air pressure adjustment system 4 according to the obtained nominal support pressure value, and the control valve group (e.g., electro-proportional valve 403) adjusts the air pressure of each pneumatic support unit 301 or its area independently or in groups until the target nominal support pressure value is reached.

[0063] In step A3, the preset release position refers to the lifting mechanism 2 lowering the flexible support array 3 to a specific height, allowing the substrate 90 to be transported to smoothly detach from the pneumatic support unit 301 and finally be placed on the substrate stage 1. At this position, the upper end of the pneumatic support unit 301 is typically slightly higher than the top surface of the substrate stage 1, allowing the substrate to slowly and without impact contact with the substrate stage 1 after the air pressure decreases. The preset release pressure value refers to a low air pressure value, typically lower than the soft contact pressure value, and even close to zero pressure. This is designed to gradually reduce the supporting force on the substrate by the pneumatic support unit 301 as the substrate is about to contact the substrate stage 1, allowing the substrate to slowly descend onto the substrate stage 1. The adjustment method is also precisely controlled by the control valve group in the air pressure regulation system 4.

[0064] In step A4, "downward reset" means that after the substrate 90 to be transported has been completely placed on the substrate stage 1, the lifting mechanism 2 continues to move downward, completely retracting the flexible support array 3 and the pneumatic support unit 301 below the substrate stage 1, ensuring that the upper end of the pneumatic support unit 301 no longer protrudes from the top surface of the substrate stage 1, thereby completely detaching from the substrate.

[0065] The control method of this application solves the problems of uneven force, impact, and deformation during substrate handling through refined staged timing control and dynamic air pressure adjustment. First, in step A1, the motion controller precisely controls the lifting mechanism 2 to rise to a preset contact position, allowing the pneumatic support units 301 in the flexible support array 3 to extend from the top surface of the substrate platform 1, ready to receive the substrate. Simultaneously, the air pressure adjustment system 4 adjusts the air pressure of all pneumatic support units 301 to a preset soft contact pressure value. This initial soft contact strategy utilizes the flexible support characteristics of the pneumatic support units 301 to ensure a "soft landing" of the substrate 90 when placed on the flexible support array 3, effectively avoiding the hard impact and localized stress concentration that may result from traditional rigid support, laying the foundation for subsequent precise support. In step A2, once the substrate 90 is placed on the flexible support array 3, the motion controller immediately acquires the nominal support pressure value of each pneumatic support unit 301. This acquisition process can be based on a preset theoretical weight distribution model of the substrate, or by using a group of air pressure sensors to detect the initial air pressure of each pneumatic support unit 301 in real time, and dynamically calculate the pressure distribution that makes the substrate more uniform. Subsequently, the motion controller instructs the air pressure regulation system 4 to precisely adjust the air pressure of each pneumatic support unit 301 to the corresponding nominal support pressure value. This step fully utilizes the ability of the pneumatic support units 301 to adjust the air pressure independently or in groups, achieving adaptive and uniform support for large-size substrates. Through real-time or near-real-time pressure feedback and adjustment, this method can effectively compensate for the substrate's own slight warping, uneven weight distribution, and external interference, ensuring that the substrate is always in an ideal state of low stress and no deformation during the support process, which is crucial for the flatness of the OLED wet film substrate. Next, in step A3, when the substrate needs to be placed on the substrate stage 1, the motion controller controls the lifting mechanism 2 to move down to the preset release position. At the instant the substrate is about to contact the substrate stage 1, the air pressure regulation system 4 adjusts the air pressure of all pneumatic support units 301 to the preset release pressure value. This phased lowering and air pressure release strategy allows the substrate to smoothly and without impact transition from the flexible support array 3 to the substrate stage 1, avoiding substrate vibration, displacement, or secondary damage caused by sudden air pressure removal or rigid mechanical contact. Finally, in step A4, after the substrate is fully placed on the substrate stage 1, the motion controller further controls the lifting mechanism 2 to move down and reset, so that the pneumatic support unit 301 is completely retracted below the substrate stage 1, completely separating it from the substrate 90 to be transported. This not only eliminates any residual contact risk but also provides clear space for subsequent process operations and protects the pneumatic support unit 301.

[0066] By employing the aforementioned control methods, combined with the distributed pneumatic support capability of the flexible support array 3 in the large-size substrate lifting device, the precise control of the air pressure regulation system 4, and the coordinated scheduling of the motion controller, the solution of this application can achieve high stability, high synchronization accuracy, and high reliability in lifting and transporting large-size substrates, especially fragile OLED wet film substrates. This method, through a complete process of soft contact, adaptive uniform support, and soft release, effectively solves key technical problems in existing technologies such as rigid impact, stress concentration, poor synchronization, and insufficient control flexibility, significantly improving the quality and efficiency of substrate handling.

[0067] Preferably, step A2, which involves obtaining the nominal support pressure value of each pneumatic support unit 301, may include:

[0068] Based on the theoretical weight distribution model of the substrate 90 to be transported, the nominal support pressure value of each pneumatic support unit 301 that makes the force on the substrate 90 to be transported tend to be uniform is obtained.

[0069] Alternatively, based on the initial air pressure of each pneumatic support unit 301 after the substrate 90 to be transported is placed on the flexible support array 3, the nominal support pressure value of each pneumatic support unit 301 that makes the force on the substrate 90 to be transported tend to be uniform is determined.

[0070] The step of obtaining the nominal support pressure value of each pneumatic support unit 301 aims to accurately determine the support force required for each pneumatic support unit 301, ensuring a uniform force distribution on the substrate 90 to be transported across the entire flexible support array 3. This is crucial for preventing substrate deformation, cracking, or the formation of microcracks. This step can be achieved through pre-calculation or real-time feedback.

[0071] Obtaining the nominal support pressure value based on the theoretical weight distribution model of the substrate 90 to be transported refers to calculating the required support pressure for each pneumatic support unit 301 using a pre-established mathematical or physical model that describes how the weight of the substrate is distributed. This theoretical weight distribution model can be a finite element analysis model based on the substrate's CAD data, or an empirical model obtained by fitting experimental data. Using this model, the nominal support pressure that each pneumatic support unit 301 should provide under ideal conditions to ensure uniform stress on the substrate can be calculated in advance. This method is efficient and predictive, and is applicable to substrates of known types and sizes.

[0072] On the other hand, determining the nominal support pressure value based on the initial air pressure of each pneumatic support unit 301 after the substrate 90 to be transported is placed on the flexible support array 3 refers to dynamically adjusting the support force of each pneumatic support unit 301 by measuring the initial air pressure after the substrate is actually placed on the flexible support array 3. The initial air pressure is the air pressure value obtained after supporting the substrate 90 and changing from a preset soft contact pressure value. It reflects the actual weight distribution of the substrate and its contact state with the flexible support array 3. By reading these initial air pressure values, the system can identify possible local heavy or light load areas on the substrate and calculate a new nominal support pressure value accordingly to achieve more accurate force uniformity. This method is adaptive and can cope with uncertainties such as substrate manufacturing tolerances, minor warpage, or actual placement deviations.

[0073] This application's solution effectively addresses the problem of accurately controlling the uniformity of support force during the handling of large-size substrates by providing two complementary methods for obtaining nominal support pressure values. First, the nominal support pressure value of each pneumatic support unit 301 can be pre-calculated based on the theoretical weight distribution model of the substrate 90 to be handled. This method utilizes the known physical characteristics of the substrate, efficiently providing precise pressure settings for standardized handling tasks, thereby establishing an optimized support force distribution before the substrate is placed. Second, to address potential issues such as uneven substrate weight distribution, minor warping, or placement deviations during actual operation, this application also provides an adaptive adjustment mechanism based on the actual initial air pressure. After the substrate 90 is placed on the flexible support array 3, the initial air pressure of each pneumatic support unit 301 is precisely measured. These initial air pressure values ​​reflect the actual stress condition of the substrate, and the motion controller can calculate new nominal support pressure values ​​based on this real-time data using an algorithm to ensure that the substrate experiences uniform stress. This combination of dual mechanisms enables the system to efficiently handle routine situations while flexibly responding to complex and changing actual working conditions, thereby ensuring stable and uniform support for large-size substrates. Within the overall framework of the aforementioned large-size substrate lifting device, by precisely controlling the supporting force of each pneumatic support unit 301, problems such as stress concentration and substrate deformation existing in traditional rigid support schemes can be effectively avoided, significantly improving the stability and safety of handling.

[0074] In one specific implementation, in step A2 of the control method, obtaining the nominal support pressure value of each pneumatic support unit 301 can be achieved as follows: For a G8.6 OLED glass substrate of known size and material, its theoretical weight distribution model can be established through a pre-performed finite element analysis (FEA). This model details how the weight of the substrate is distributed on each pneumatic support unit 301 of the flexible support array 3 under its own weight. The motion controller can calculate the nominal support pressure value that each pneumatic support unit 301 should apply under ideal conditions based on this preset theoretical model and store these values. When actually handling this type of substrate, the system can directly call these preset nominal support pressure values ​​and control the air pressure regulation system 4 to adjust the air pressure of each pneumatic support unit 301 to the corresponding value.

[0075] Alternatively, when the substrate 90 to be transported is placed on the flexible support array 3, the air pressure of all pneumatic support units 301 is first adjusted to a preset soft contact pressure value. At this time, the weight of the substrate 90 to be transported will cause changes in the internal air pressure of each pneumatic support unit 301. The air pressure sensor group will detect the initial air pressure of each pneumatic support unit 301 in real time. After receiving these initial air pressure data, the motion controller will enter a brief pressure self-learning phase. In this phase, the controller can calculate the average value of the initial air pressure of all pneumatic support units 301, or analyze the initial air pressure distribution according to a preset algorithm, and determine an optimized set of nominal support pressure values ​​to make the overall force on the substrate tend to be uniform. Subsequently, the motion controller will instruct the air pressure regulation system 4 to precisely adjust the air pressure of each pneumatic support unit 301 to these newly determined nominal support pressure values.

[0076] In addition, this application also provides a handling device, including the large-size substrate lifting device described above.

[0077] This handling device refers to a system of equipment used in production, processing, and storage processes to move, transport, and unload the substrate 90 to be handled. Its main function is to automate or semi-automatically transfer the substrate 90 between different workstations, areas, or equipment. This handling device can be an automated production line system integrating multiple modules such as conveyor belts, robotic arms, and positioning mechanisms. A large-size substrate lifting device is a key functional module responsible for the precise vertical lifting and positioning of the substrate. By integrating the large-size substrate lifting device into the handling device, the device can not only achieve horizontal movement of the substrate but also perform high-precision, low-stress vertical lifting operations during handling. This avoids the interface problems, synchronization difficulties, and resulting efficiency losses and substrate damage risks that may exist between traditional handling equipment and independent lifting equipment.

[0078] The above description is merely an embodiment of this application and is not intended to limit the scope of protection of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of protection of this application.

Claims

1. A large-size substrate lifting device, characterized in that, include: A substrate stage (1) is used to support the substrate (90) to be transported. The lifting mechanism (2) and the flexible support array (3) include a plurality of pneumatic support units (301) arranged in an array on the lifting mechanism (2). The pneumatic support units (301) pass through the substrate platform (1). The lifting mechanism (2) can drive the flexible support array (3) to move upward so that the upper end of the pneumatic support unit (301) extends out of the top surface of the substrate platform (1) to support the substrate (90) to be transported. It can also drive the flexible support array (3) to move downward so that the upper end of the pneumatic support unit (301) does not extend out of the top surface of the substrate platform (1) to place the substrate (90) to be transported on the substrate platform (1). A pneumatic pressure regulating system (4) is used to regulate and detect the pneumatic pressure of each of the pneumatic support units (301); A motion controller is used to control the lifting mechanism (2) to lift and lower, and to control the air pressure regulation system (4) to adjust the air pressure of each of the pneumatic support units (301) according to the air pressure detection results, so as to ensure the uniformity of the support force of the flexible support array (3) on the substrate (90) to be transported.

2. The large-size substrate lifting device according to claim 1, characterized in that, The pneumatic support unit (301) includes a push rod (302) and a pneumatic actuator (303); the lower end of the push rod (302) is connected to the pneumatic actuator (303), and the upper end is used to support the substrate (90) to be transported; the pneumatic actuator (303) is used to adjust the supporting force of the push rod (302) on the substrate (90) to be transported by adjusting the internal air pressure.

3. The large-size substrate lifting device according to claim 2, characterized in that, The upper end of the top rod (302) is provided with a flexible top cap (304).

4. The large-size substrate lifting device according to claim 1, characterized in that, The lifting mechanism (2) includes a lifting frame (201) and a lifting drive device; the lifting frame (201) is disposed below the substrate platform (1); the lifting drive device is connected between the lifting frame (201) and the substrate platform (1) and is used to drive the lifting frame (201) to lift vertically; the flexible support array (3) is disposed on the lifting frame (201).

5. The large-size substrate lifting device according to claim 4, characterized in that, The lifting drive device includes two linear lifting modules (202) extending in the vertical direction, and the two linear lifting modules (202) are symmetrically connected between the lifting frame (201) and the base plate platform (1).

6. The large-size substrate lifting device according to claim 1, characterized in that, The air pressure regulation system (4) includes an air source (401), a control valve group and an air pressure sensor group. The air source (401) is used to provide driving gas to the pneumatic support unit (301). The control valve group is used to control the delivery of driving gas to regulate the air pressure of each pneumatic support unit (301). The air pressure sensor group is used to detect the air pressure of each pneumatic support unit (301).

7. The large-size substrate lifting device according to claim 6, characterized in that, The pneumatic support unit (301) in the flexible support array (3) is divided into multiple regional unit groups. The pneumatic support unit (301) of each regional unit group is connected to a regional main air passage (405) through a set of branch air passages (404). All regional main air passages (405) are connected to a global main air passage (406). The global main air passage (406) is connected to the air source (401). The control valve group includes a main pressure regulating valve (402) and multiple electro-proportional valves (403), and the air pressure sensor group includes multiple air pressure sensors; the main pressure regulating valve (402) is installed on the overall main air path (406), and each regional main air path (405) is equipped with an electro-proportional valve (403) and an air pressure sensor.

8. A control method for a large-size substrate lifting device according to any one of claims 1-7, characterized in that, Including the following steps: A1. Control the lifting mechanism (2) to rise to the preset docking position, and adjust the air pressure of all pneumatic support units (301) to the preset soft contact pressure value; A2. After the substrate (90) to be transported is placed on the flexible support array (3), the nominal support pressure value of each pneumatic support unit (301) is obtained, and the air pressure of each pneumatic support unit (301) is adjusted to the corresponding nominal support pressure value; the nominal support pressure value refers to the air pressure value corresponding to the ideal support force that each pneumatic support unit (301) should apply after the substrate (90) is stably supported by the flexible support array (3); A3. Control the lifting mechanism (2) to move down to the preset release position, and adjust the air pressure of all pneumatic support units (301) to the preset release pressure value, so as to place the substrate (90) to be transported on the substrate platform (1); A4. Control the lifting mechanism (2) to move down and reset so that the pneumatic support unit (301) is completely separated from the substrate to be transported (90).

9. The control method according to claim 8, characterized in that, In step A2, the step of obtaining the nominal support pressure value of each pneumatic support unit (301) includes: Based on the theoretical weight distribution model of the substrate (90) to be transported, the nominal support pressure value of each pneumatic support unit (301) that makes the force on the substrate (90) to be transported tend to be uniform is obtained. Alternatively, based on the initial air pressure of each pneumatic support unit (301) after the substrate (90) to be transported is placed on the flexible support array (3), the nominal support pressure value of each pneumatic support unit (301) that makes the force on the substrate (90) to be transported tend to be uniform is determined.

10. A conveying device, characterized in that, Includes the large-size substrate lifting device as described in any one of claims 1-7.

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