Multi-degree-of-freedom optical element adjusting device
By integrating angle and translation functions through a three-layer flat multi-degree-of-freedom optical element adjustment device, the problems of large space occupation and low stability in the existing technology are solved, and high-precision multi-degree-of-freedom adjustment and simplified system configuration are achieved.
Patent Information
- Application Number
- CN202511762093.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-11-27
- Publication Date
- 2026-02-24
AI Technical Summary
Existing optical element adjustment devices increase structural height and occupy a large space when adjusting in multiple degrees of freedom, resulting in a higher system center of gravity, reduced clamping stability and measurement accuracy, and are not suitable for testing equipment with limited space.
The multi-degree-of-freedom optical element adjustment device adopts a three-layer flat structure, including a lower layer, a middle layer and an upper layer. It integrates angle switching, translation adjustment and horizontal leveling functions. Angle adjustment is achieved through wedge blocks, set screws and elastic elements, translation is achieved through X and Y direction adjustment mechanisms, and horizontal adjustment is achieved through leveling screws.
It effectively reduces the height of the device, improves stability and measurement accuracy, simplifies the system structure, reduces the complexity and cost of use, and is suitable for testing equipment with limited space.
Smart Images
Figure CN121559697A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of optical measurement and control technology, and in particular to a multi-degree-of-freedom optical element adjustment device. Background Technology
[0002] With the rapid development of optical inspection technology and the semiconductor industry, increasingly higher requirements are being placed on the performance testing and comprehensive evaluation of optical components. Modern testing not only requires measuring multiple optical parameters, but also often requires multiple tests of the same parameter at different angular positions to comprehensively evaluate key performance characteristics such as uniformity and angle dependence of components. For example, during the assembly and adjustment of semiconductor process equipment or optical systems, it is often necessary to accurately measure the optical characteristics of components such as lenses and prisms at different tilt or rotation angles.
[0003] Currently, the most common angle adjustment solution on the market is to use a turntable structure to achieve the rotational positioning of optical components. However, when multiple degrees of freedom need to be adjusted simultaneously (such as tilting or translating in multiple directions), it is usually necessary to stack the turntable with other types of displacement stages. Although this multi-layer stacking method can achieve multi-degree-of-freedom adjustment, it also brings significant problems: First, it occupies a lot of space in the height direction, resulting in a significant increase in the overall structural height. This not only raises the system's center of gravity and reduces clamping stability, but also makes it more susceptible to external vibrations, thus affecting measurement accuracy and repeatability. Second, in some testing equipment, the space height of the stage is limited, and an excessively tall stacked structure may prevent normal installation or testing. In this case, it is necessary to change the testing solution or redesign the clamping fixture, increasing testing costs and time.
[0004] Therefore, developing an optical element clamping device that is compact in structure, occupies little space in the height direction, and can achieve precise adjustment of multiple angles and multiple degrees of freedom is a technical problem that urgently needs to be solved by those skilled in the art.
[0005] In view of this, the present invention is proposed. Summary of the Invention
[0006] The purpose of this invention is to provide a multi-degree-of-freedom optical element adjustment device that integrates three major functions: angle switching, translation adjustment, and horizontal leveling, thereby simplifying the system structure and reducing the complexity and overall cost of use.
[0007] This invention provides a multi-degree-of-freedom optical element adjustment device, comprising a lower layer structure, a middle layer structure, and an upper layer structure stacked sequentially from bottom to top; The lower layer structure is used to drive the middle layer structure to switch angles relative to the lower layer structure; The middle layer structure is used to drive the upper layer structure to translate relative to the middle layer structure; The upper structure is used to mount optical components and adjust the levelness; The lower, middle, and upper structures are all flat.
[0008] As a preferred embodiment of this technical solution, the lower structure includes a chassis and an angle adjustment mechanism. The angle adjustment mechanism is disposed between the chassis and the middle layer structure, and the angle adjustment mechanism is used to drive the middle layer structure to switch angles relative to the lower layer structure.
[0009] In a preferred embodiment of this technical solution, the angle adjustment mechanism includes a wedge block, a set screw, and an elastic element. A guide groove for guiding the wedge block to slide is provided on the chassis. At least eight limiting grooves that cooperate with the wedge block are uniformly provided along the circumference of the middle layer structure near the chassis. The set screw is rotated radially along the chassis, and its end abuts against the side of the wedge block. The elastic element is disposed between the wedge block and the chassis.
[0010] As a preferred embodiment of this technical solution, the elastic element includes a helical spring, a disc spring, and a spring sheet.
[0011] As a preferred embodiment of this technical solution, the middle layer structure includes a middle layer disk, an X-axis adjustment mechanism, a Y-axis adjustment mechanism, and a middle layer fixing screw. The middle layer disk is detachably connected to the lower layer structure via the middle layer fixing screw. The X-axis adjustment mechanism and the Y-axis adjustment mechanism are respectively arranged on the middle layer disk along the X and Y directions and are located on the outside of the upper layer structure.
[0012] In a preferred embodiment of this technical solution, the X-axis adjustment mechanism includes a first X-axis adjustment block, a second X-axis adjustment block, a first X-axis adjustment screw, and a second X-axis adjustment screw. Along the X direction, the first X-direction adjusting block and the second X-direction adjusting block are provided with threaded through holes, and the first X-direction adjusting screw and the second X-direction adjusting screw respectively pass through the corresponding threaded through holes and abut against the side wall of the upper structure; The Y-axis adjustment mechanism includes a first Y-axis adjustment block, a second Y-axis adjustment block, a first Y-axis adjustment screw, and a second Y-axis adjustment screw. Along the Y direction, the first Y-direction adjusting block and the second Y-direction adjusting block are provided with threaded through holes, and the first Y-direction adjusting screw and the second Y-direction adjusting screw respectively pass through the corresponding threaded through holes and abut against the side wall of the upper structure.
[0013] As a preferred embodiment of this technical solution, the upper structure includes an upper frame, a cover plate, cover plate fixing screws, and upper fixing screws. The upper frame and the cover plate are used to clamp optical components. The cover plate is detachably connected to the upper frame by cover plate fixing screws. The upper structure is detachably connected to the middle structure by upper fixing screws.
[0014] As a preferred embodiment of this technical solution, the upper structure further includes at least three leveling screws. The upper frame is provided with threaded through holes that match the leveling screws. The cover plate is provided with through holes with a diameter larger than the outer diameter of the leveling screws. The leveling screws pass through the cover plate and the upper frame in sequence and abut against the middle structure.
[0015] As a preferred embodiment of this technical solution, the multi-degree-of-freedom optical element adjustment device has an adjustment range of -2 mm to 2 mm in the X direction, -2 mm to 2 mm in the Y direction, and 0 mm to 2 mm in the Z direction.
[0016] In a preferred embodiment of this technical solution, the multi-degree-of-freedom optical element adjustment device has a rotation angle range θx around the X-axis of 0 to +0.8. o The rotation angle θy around the Y-axis ranges from 0 to +0.8. o The rotation angle θz around the Z-axis ranges from 0 to +360 degrees. o .
[0017] The multi-degree-of-freedom optical element adjustment device of the present invention has at least the following beneficial effects: 1. The multi-degree-of-freedom optical element adjustment device of the present invention has a flat and tightly stacked three-layer structure, which effectively compresses the overall height of the device and solves the problem of excessive space occupation in the height direction of traditional solutions. This allows the device to be easily adapted to detection instruments with limited height space (such as interferometers and microscopes), avoiding the dilemma of having to change the detection solution due to the inability to install it. 2. The multi-degree-of-freedom optical element adjustment device of the present invention has a flattened structure that significantly lowers the overall center of gravity of the device, making it more stable when carrying optical elements. Its high stability can effectively suppress external vibration interference and reduce measurement errors caused by structural shaking, thereby directly ensuring and improving the accuracy and repeatability of optical measurements. 3. The multi-degree-of-freedom optical element adjustment device of the present invention integrates three major functions: angle switching, translation adjustment and horizontal leveling. Users no longer need to purchase and assemble multiple independent displacement stages and turntables to achieve multi-degree-of-freedom position adjustment, which simplifies the system structure and reduces the complexity and total cost of use. Attached Figure Description
[0018] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0019] Figure 1 This is a schematic diagram of the overall assembly of the multi-degree-of-freedom optical element adjustment device of the present invention; Figure 2 This is an exploded view of the multi-degree-of-freedom optical element adjustment device of the present invention; Figure 3 This is an exploded view of the lower structure of the multi-degree-of-freedom optical element adjustment device of the present invention; Figure 4 This is an exploded view of the middle layer structure in the multi-degree-of-freedom optical element adjustment device of the present invention; Figure 5 This is an exploded view of the upper structure of the multi-degree-of-freedom optical element adjustment device of the present invention.
[0020] Explanation of reference numerals in the attached figures: 1: Lower-level structure; 101: Chassis; 102: Elastic element; 103: Wedge block; 104: Set screw; 2: Middle layer structure; 201: Middle layer disc; 202: First X-axis adjusting block; 203: First Y-axis adjusting block; 204: Second X-axis adjusting block; 205: Second Y-axis adjusting block; 206: First X-axis adjusting screw; 207: First Y-axis adjusting screw; 208: Second X-axis adjusting screw; 209: Second Y-axis adjusting screw; 210~217: Middle layer fixing screws; 3: Upper structure; 301: Upper frame; 302~304: Leveling screws; 305: Optical element; 306: Cover plate; 307~318: Cover plate fixing screws; 319~322: Upper fixing screws. Detailed Implementation
[0021] The technical solution of the present invention will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0022] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting this invention.
[0023] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the stated features. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified. Furthermore, the terms "installed," "connected," and "linked" should be interpreted broadly; for example, they may refer to a fixed connection, a detachable connection, or an integral connection; they may refer to a mechanical connection or an electrical connection; they may refer to a direct connection or an indirect connection through an intermediate medium; and they may refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.
[0024] Example like Figure 1-5 As shown, this embodiment provides a multi-degree-of-freedom optical element adjustment device, including a lower structure 1, a middle structure 2, and an upper structure 3 stacked sequentially from bottom to top. The lower structure 1 is used to drive the middle structure 2 to switch angles relative to the lower structure 1; the middle structure 2 is used to drive the upper structure 3 to translate relative to the middle structure 2; the upper structure 3 is used to clamp the optical element 305 and adjust its level. This device integrates three major functions: angle switching, translation adjustment, and leveling. Users no longer need to purchase and assemble multiple independent displacement stages and turntables to achieve multi-degree-of-freedom position adjustment, simplifying the system configuration and reducing the complexity and overall cost of use. In addition, the lower structure 1, middle structure 2, and upper structure 3 of this device are all flat, thus effectively compressing the overall height of the entire device. This not only solves the problem of excessive space occupation in the height direction in traditional solutions but also significantly lowers the overall center of gravity of the device, making it more stable when carrying the optical element 305.
[0025] Based on the above technical solution, and more preferably, the lower structure 1 includes a chassis 2 and an angle adjustment mechanism. The angle adjustment mechanism is disposed between the chassis 2 and the middle structure 2. The angle adjustment mechanism is used to drive the middle structure 2 to switch angles relative to the lower structure 1.
[0026] In this embodiment, the angle adjustment mechanism specifically includes a wedge block 103, a set screw 104, and an elastic element 102. The chassis 2 is provided with a guide groove for guiding the wedge block 103 to slide. The middle layer structure 2 is provided with at least 8 limiting grooves that cooperate with the wedge block 103 evenly along the circumference of the middle layer structure 2 on the side near the chassis 2. The set screw 104 is rotated along the radial direction of the chassis 2, and its end abuts against the side of the wedge block 103. The elastic element 102 is disposed between the wedge block 103 and the chassis 2.
[0027] When angle adjustment is required, loosen the middle layer fixing screws 210-217 between the middle layer structure 2 and the chassis 2, and turn the set screw 104 inward. The end of the set screw 104 abuts against the side of the wedge block 103. That is, the rotation of the set screw 104 will drive the wedge block 103 to slide downward in the guide groove, thereby lowering the height of the wedge block 103 and unlocking the middle layer structure 2 and the chassis 2. After the middle layer structure 2 is unlocked, rotate the middle layer structure 2 to switch the angle. After the angle is switched, turn the set screw 104 outward. Under the action of the elastic element 102 at the bottom of the wedge block 103, the wedge block 103 slides upward into the limiting groove on the middle layer structure 2. Then, fix the middle layer fixing screws 210-217 between the middle layer structure 2 and the chassis 2 to achieve angle positioning.
[0028] It should be noted that in this embodiment, eight limiting grooves are evenly distributed along the circumference of the middle layer structure 2, thus enabling switching between eight angles. In practical applications, the number of limiting grooves can be adjusted as needed; this invention does not impose a strict limitation on this.
[0029] In this embodiment, the elastic element 102 used below the wedge block 103 includes, but is not limited to, a helical spring, a disc spring, and a spring sheet, which can be fixed to the bottom of the wedge block 103 by means of adhesive or threaded connection.
[0030] Based on the above technical solution, and further preferably, the middle layer structure 2 includes a middle layer disk 201, an X-axis adjustment mechanism, a Y-axis adjustment mechanism, and middle layer fixing screws 210-217. The middle layer disk 201 is detachably connected to the lower layer structure 1 through the middle layer fixing screws 210-217. The X-axis adjustment mechanism and the Y-axis adjustment mechanism are respectively arranged on the middle layer disk 201 along the X and Y directions and are located on the outside of the upper layer structure 3.
[0031] When an adjustment in the X direction is required, the upper structure 3 is adjusted using the X-direction adjustment mechanism; when an adjustment in the Y direction is required, the upper structure 3 is adjusted using the Y-direction adjustment mechanism.
[0032] In this embodiment, the X-axis adjustment mechanism specifically includes a first X-axis adjustment block 202, a second X-axis adjustment block 204, a first X-axis adjustment screw 206, and a second X-axis adjustment screw 208. Along the X direction, the first X-axis adjustment block 202 and the second X-axis adjustment block 204 are provided with threaded through holes. The first X-axis adjustment screw 206 and the second X-axis adjustment screw 208 pass through the corresponding threaded through holes and abut against the side wall of the upper structure 3. The first X-axis adjustment block 202 and the second X-axis adjustment block 204 can be fixed on the middle disk 201 by means of threaded connection.
[0033] Specifically, when an adjustment in the negative X direction is required, loosen the second X-direction adjusting screw 208 and turn the first X-direction adjusting screw 206 inward; When an adjustment in the positive X direction is required, loosen the first X-direction adjusting screw 206 and turn the second X-direction adjusting screw 208 inward.
[0034] The Y-axis adjustment mechanism specifically includes a first Y-axis adjustment block 203, a second Y-axis adjustment block 205, a first Y-axis adjustment screw 207, and a second Y-axis adjustment screw 209. Along the Y direction, the first Y-axis adjustment block 203 and the second Y-axis adjustment block 205 are provided with threaded through holes. The first Y-axis adjustment screw 207 and the second Y-axis adjustment screw 209 pass through the corresponding threaded through holes and abut against the side wall of the upper structure 3. The first Y-axis adjustment block 203 and the second Y-axis adjustment block 205 can be fixed to the middle disk 201 by means of threaded connection.
[0035] Specifically, when an adjustment in the negative Y direction is required, loosen the first Y-direction adjusting screw 207 and turn the second Y-direction adjusting screw 209 inward; When adjustment in the positive Y direction is required, loosen the second Y-direction adjusting screw 209 and turn the first Y-direction adjusting screw 207 inward.
[0036] Based on the above technical solution, and further preferably, the upper structure 3 specifically includes an upper frame 301, a cover plate 306, cover plate fixing screws 307-318, and upper fixing screws 319-322. The upper frame 301 and the cover plate 306 are used to clamp the optical element 305, and the cover plate 306 is detachably connected to the upper frame 301 via the cover plate fixing screws 307-318. That is, when it is necessary to clamp the optical element 305, the cover plate fixing screws can be removed. Using screws 307-318, the optical element 305 is placed between the upper frame 301 and the cover plate 306, and then the cover plate fixing screws 307-318 are tightened to fix the optical element 305. The upper structure 3 is detachably connected to the middle structure 2 through upper fixing screws 319-322. When it is necessary to adjust the X and Y directions of the upper frame 301 through the X-axis adjustment mechanism and the Y-axis adjustment mechanism, the upper fixing screws 319-322 need to be loosened first.
[0037] Based on the above technical solution, more preferably, the upper structure 3 also includes at least 3 leveling screws 302-304. The leveling screws 302-304 can be used to adjust the angles θx and θy, as well as the Z direction. The present invention does not have strict limitations on the position and number of leveling screws 302-304. When 3 leveling screws 302-304 are set, it is sufficient to ensure that the positions are roughly evenly distributed.
[0038] Specifically, the upper frame 301 is provided with threaded through holes that match the leveling screws 302-304, and the cover plate 306 is provided with through holes with a diameter larger than the outer diameter of the leveling screws 302-304. The leveling screws 302-304 pass through the cover plate 306 and the upper frame 301 in sequence and abut against the middle structure 2.
[0039] When it is necessary to adjust the angles θx and θy, first loosen the upper fixing screws 319~322, and then turn the leveling screws 302~304 by turning the internal hex nuts on the leveling screws 302~304 to adjust the angles θx and θy. When adjustment in the negative Z direction is required, loosen the upper fixing screws 319~322 and turn the leveling screws 302~304 outwards with the same feed amount. When adjustment in the positive Z direction is required, loosen the upper fixing screws 319~322 and turn the leveling screws 302~304 inward by the same feed amount.
[0040] In this embodiment, the adjustment device for the multi-degree-of-freedom optical element has an adjustment range of -2 mm to 2 mm in the X direction, -2 mm to 2 mm in the Y direction, and 0 mm to 2 mm in the Z direction. The adjustment ranges in the X and Y directions are controlled by the gaps between the upper frame 301 and the first X-direction adjustment block 202, the second X-direction adjustment block 204, the first Y-direction adjustment block 203, and the second Y-direction adjustment block 205. The adjustment range in the Z direction is controlled by the adjustment height reserved by the leveling screws 302-304. The pitch of the first X-direction adjustment screw 206, the second X-direction adjustment screw 208, the first Y-direction adjustment screw 207, the second Y-direction adjustment screw 209, and the leveling screws 302-304 is 0.25 mm. Manual rotation of 10-15 mm... o These are relatively easy-to-distinguish operations. Therefore, the adjustment accuracy of this invention in the X, Y and Z directions is approximately 0.25 / (360 / 15)≈0.01 mm.
[0041] Based on the above technical solution, and further preferably, in this embodiment, the multi-degree-of-freedom optical element adjustment device has a rotation angle range θx around the X-axis of 0 to +0.8. o The rotation angle θy around the Y-axis ranges from 0 to +0.8. o The rotation angle θz around the Z-axis ranges from 0 to +360 degrees. o The distance between the first X-axis adjusting screw 206 and the second X-axis adjusting screw 208 is 145 mm, and the distance between the first Y-axis adjusting screw 207 and the second Y-axis adjusting screw 209 is 145 mm. Arctan(2 mm / 145 mm) ≈ 0.013972 ≈ 0.8 o Therefore, the range of the angle θx of rotation around the X-axis is 0 to +0.8. o The rotation angle θy around the Y-axis ranges from 0 to +0.8. o The accuracy is arctan(0.01 mm / 145 mm) ≈ 0.0039515 o ≈0.004 o Regarding the range of angles for rotation around the Z-axis, this embodiment has eight evenly spaced limiting grooves, meaning each groove is 45 degrees wide. o A limiting groove, when the distance from the limiting groove to the center of the middle layer disk 201 is 108 mm, has a positioning accuracy of arctan(0.01 mm / 108 mm) ≈ 0.0053. o 0.01 mm is the standard machining precision; with further precision machining, this value can reach 0.005 mm, and the positioning accuracy can be further improved to 0.00265 mm. oOf course, a secondary adjustment structure could be added to improve accuracy, but this level of accuracy is sufficient for routine measurement and adjustment, so no further structures will be added to avoid excessive redundancy.
[0042] In summary, the multi-degree-of-freedom optical element adjustment device of the present invention has a flat circular outer contour, which meets the requirements of the circular clamping tool of the optical instrument and is easy to clamp. It can not only realize the switching of different angles and spatial position adjustment of the element, but also has a low overall height and a large width-to-height ratio, making it suitable for detection occasions with limited height space.
[0043] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.
Claims
1. A multi-degree-of-freedom optical element adjustment device, characterized in that, It includes a lower layer structure, a middle layer structure, and an upper layer structure that are stacked sequentially from bottom to top; The lower layer structure is used to drive the middle layer structure to switch angles relative to the lower layer structure; The middle layer structure is used to drive the upper layer structure to translate relative to the middle layer structure; The upper structure is used to mount optical components and adjust the levelness; The lower, middle, and upper structures are all flat.
2. The multi-degree-of-freedom optical element adjustment device according to claim 1, characterized in that, The lower structure includes a chassis and an angle adjustment mechanism. The angle adjustment mechanism is disposed between the chassis and the middle layer structure, and the angle adjustment mechanism is used to drive the middle layer structure to switch angles relative to the lower layer structure.
3. The multi-degree-of-freedom optical element adjustment device according to claim 2, characterized in that, The angle adjustment mechanism includes a wedge block, a set screw, and an elastic element. The chassis has a guide groove for guiding the wedge block to slide. The middle layer structure has at least 8 limiting grooves that cooperate with the wedge block evenly distributed along the circumference of the middle layer structure near the chassis. The set screw is rotated radially along the chassis and its end abuts against the side of the wedge block. The elastic element is disposed between the wedge block and the chassis.
4. The multi-degree-of-freedom optical element adjustment device according to claim 3, characterized in that, The elastic element includes a helical spring, a disc spring, and a spring sheet.
5. The multi-degree-of-freedom optical element adjustment device according to claim 1, characterized in that, The middle layer structure includes a middle layer disk, an X-axis adjustment mechanism, a Y-axis adjustment mechanism, and middle layer fixing screws. The middle layer disk is detachably connected to the lower layer structure via the middle layer fixing screw. The X-axis adjustment mechanism and the Y-axis adjustment mechanism are respectively arranged on the middle layer disk along the X and Y directions and are located on the outside of the upper layer structure.
6. The multi-degree-of-freedom optical element adjustment device according to claim 5, characterized in that, The X-axis adjustment mechanism includes a first X-axis adjustment block, a second X-axis adjustment block, a first X-axis adjustment screw, and a second X-axis adjustment screw. Along the X direction, the first X-direction adjusting block and the second X-direction adjusting block are provided with threaded through holes, and the first X-direction adjusting screw and the second X-direction adjusting screw respectively pass through the corresponding threaded through holes and abut against the side wall of the upper structure; The Y-axis adjustment mechanism includes a first Y-axis adjustment block, a second Y-axis adjustment block, a first Y-axis adjustment screw, and a second Y-axis adjustment screw. Along the Y direction, the first Y-direction adjusting block and the second Y-direction adjusting block are provided with threaded through holes, and the first Y-direction adjusting screw and the second Y-direction adjusting screw respectively pass through the corresponding threaded through holes and abut against the side wall of the upper structure.
7. The multi-degree-of-freedom optical element adjustment device according to claim 1, characterized in that, The upper structure includes an upper frame, a cover plate, cover plate fixing screws, and upper fixing screws. The upper frame and the cover plate are used to clamp optical components. The cover plate is detachably connected to the upper frame by cover plate fixing screws. The upper structure is detachably connected to the middle structure by upper fixing screws.
8. The multi-degree-of-freedom optical element adjustment device according to claim 7, characterized in that, The upper structure also includes at least three leveling screws. The upper frame has corresponding threaded through holes that match the leveling screws. The cover plate has through holes with a diameter larger than the outer diameter of the leveling screws. The leveling screws pass through the cover plate and the upper frame in sequence and abut against the middle structure.
9. The multi-degree-of-freedom optical element adjustment device according to claim 1, characterized in that, The multi-degree-of-freedom optical element adjustment device has an adjustment range of -2 mm to 2 mm in the X direction, -2 mm to 2 mm in the Y direction, and 0 mm to 2 mm in the Z direction.
10. The multi-degree-of-freedom optical element adjustment device according to claim 1, characterized in that, The multi-degree-of-freedom optical element adjustment device has a rotation angle range θx around the X-axis of 0 to +0.
8. o The rotation angle θy around the Y-axis ranges from 0 to +0.
8. o The rotation angle θz around the Z-axis ranges from 0 to +360 degrees. o .