Flexible micro tactile feedback device driven by electrofluid and driving method
By using a flexible, miniature haptic feedback device driven by an electrofluid and controlling the flow of dielectric liquid with a silicone film and electrode structure, the problem of large size and high noise of traditional haptic feedback devices is solved, providing an immersive haptic experience and high safety.
Patent Information
- Application Number
- CN202512031070.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-30
- Publication Date
- 2026-02-24
AI Technical Summary
Existing haptic feedback devices are bulky and noisy, making it difficult to provide an immersive experience.
A flexible micro tactile feedback device driven by an electrofluid utilizes a silicone film, electrode structure, and flexible silicone shell to control the flow of dielectric liquid by switching on and off the electrode pairs, thereby producing tactile bumps and depressions.
It achieves miniature, silent haptic feedback, simulates the feel of different object surfaces, enhances user experience, and is highly safe and not easily damaged.
Smart Images

Figure CN121560164A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of tactile feedback, and specifically to a flexible micro tactile feedback device and driving method driven by electrohydrodynamics. Background Technology
[0002] Research on haptic feedback devices is currently in a phase of rapid development, its background and significance closely related to the needs of multiple high-tech fields, particularly in human-computer interaction (HCI), virtual reality (VR / AR), remote control, rehabilitation medicine, and assistive technology. Traditional HCI primarily relies on vision and hearing, but in many application scenarios, these two senses alone are insufficient to provide a sense of realism and immersion. Touch, as the third major sensory channel for humans, is receiving increasing attention; with the widespread application of VR / AR, visual immersion alone is no longer enough, making haptic enhancement a key direction for improving user experience. Currently, most haptic feedback devices are pneumatically or electrically driven, resulting in problems such as large equipment requirements and high noise levels. Summary of the Invention
[0003] The technical problem solved by this invention is to provide a flexible micro tactile feedback device driven by an electrofluid, which solves the problems of existing tactile feedback devices requiring large equipment and high noise, and provides a micro-sized and quiet driving technical solution.
[0004] The technical solution for achieving the objective of this invention is as follows: I. Flexible Miniature Tactile Feedback Device Driven by Electrofluid The device includes a silicone film, an electrode structure, a first flexible silicone shell, and a second flexible silicone shell. The first flexible silicone shell is disposed in the middle of the electrode structure, and the silicone film is fixedly connected to the second flexible silicone shell through the electrode structure. Both the electrode structure and the first flexible silicone shell have multiple interconnected through holes arranged in an array. Each through hole is filled with a dielectric liquid. When the electrode structure is connected to an external power source and energized, the dielectric liquid in each through hole flows to the silicone film, causing the silicone film at the corresponding position to bulge towards the end away from the electrode structure, forming a tactile bump. At the same time, the second flexible silicone shell is recessed inward towards the electrode structure at a position on the same straight line.
[0005] The electrode structure mainly includes a first FPC plate, a second FPC plate, and multiple stepped pins. One end of the first FPC plate is fixedly connected to a silicone film, and the other end is fixedly connected to one end of the second FPC plate through a first flexible silicone shell. The other end of the second FPC plate is fixedly connected to a second flexible silicone shell. One end of each stepped pin has a flange, and the other end is a long pin. The flange contacts and is fixedly connected to the second flexible silicone shell, and the long pin is inserted into the second FPC plate, making the flange and the second FPC plate tightly connected.
[0006] Both the first FPC board and the second FPC board include a reinforcing area, an FPC flexible board, and gold fingers that are fixedly connected from top to bottom. The reinforcing areas are all sheet-like or square structures, the FPC flexible boards are all strip-shaped structures, and the gold fingers are used to connect to an external power source.
[0007] The reinforcing area at the upper part of the second FPC board is provided with multiple sets of pinhole through-holes arranged in an array. Each set of pinhole through-holes is interconnected with a corresponding through-hole on the first flexible silicone shell. Each set of pinhole through-holes includes a circular pinhole at the center for a stepped pin to pass through, and two arc-shaped through-holes arranged symmetrically on both sides of the circular pinhole along the circumferential axis. The long pin of each stepped pin passes through and is fixedly connected to a circular pinhole by conductive silver paste and glue. The long pin of each stepped pin extends into the corresponding through-hole of the first flexible silicone shell and forms a center alignment. Each circular pinhole in the first and second FPC boards is connected to a wire. Each wire is led out through the FPC flexible board to the gold finger and connected to an external power source through the gold finger to control the power supply state of the corresponding circular pinhole.
[0008] The reinforcing area at the top of the first FPC board is provided with a plurality of interconnected circular holes corresponding to each through hole on the first flexible silicone shell. The circular holes are used to pass dielectric liquid. The long needles of each stepped needle point to a corresponding circular hole, forming a pin-hole electrode pair. The reinforcement, namely the design of the pin-hole through hole group, is added to the original second FPC board to prevent the pin-hole electrode pair from moving relative to each other when the flexible micro haptic feedback device deforms, thereby preventing the top silicone film from protruding.
[0009] The first FPC board is used to connect to the negative power supply, and the second FPC board is used to connect to the positive power supply. An insulating material is provided between the first FPC board and the second FPC board to isolate the current and prevent short circuit.
[0010] The reinforcing areas on the upper part of the first FPC board, the reinforcing areas on the upper part of the second FPC board, the silicone film, the first flexible silicone shell, and the second flexible silicone shell are all rectangular structures with an outer contour that is wider than the lower half of the flexible micro tactile feedback device.
[0011] The surface of the silicone film near the first FPC board is provided with a film groove that is coaxially connected to each corresponding through hole on the first flexible silicone shell; the surface of the second flexible silicone shell near the second FPC board is provided with a plurality of grooves that are coaxially connected to each corresponding through hole on the first flexible silicone shell, and the grooves are liquid storage tanks for storing dielectric liquid.
[0012] The thickness of the first flexible silicone shell is greater than the length of the long needle of the stepped needle, so that the stepped needle does not contact the first FPC board.
[0013] II. Electrofluid Driving Method for Flexible Micro-Tactile Feedback Devices Driven by Electrofluids By controlling the on / off state of electrode pairs consisting of round holes and stepped needles evenly distributed on the first and second FPC plates, the flow of liquid in different parts can be achieved.
[0014] When a conductor on the gold finger is energized, the current flows through the FPC flexible board to the reinforcement area, energizing the stepped pin at the corresponding position of the conductor. This generates a high potential difference between the stepped pin and the hole electrode formed by the corresponding circular hole in the first FPC board, creating a spatial electric field around the electrode. Under the action of the electric field, the dielectric liquid experiences a net volume force from the stepped pin towards the hole electrode of the circular hole on the first FPC board. When the electrode is connected to a high-voltage power supply, the dielectric liquid in the reservoir corresponding to the second flexible silicone shell flows to the silicone film. The silicone film then produces an outward protrusion at the corresponding position, which presses against the skin surface. Simultaneously, the second flexible silicone shell at the corresponding position, due to the loss of dielectric liquid in the reservoir, indents inward under pressure.
[0015] The beneficial effects of this invention are: (1) The tactile feedback device of the present invention is a tactile feedback device based on an electric current. Compared with the commonly used pneumatic or motor-driven tactile feedback devices, it has the characteristics of small size, convenient control, low noise, high energy conversion efficiency, and almost no heat generation.
[0016] (2) The tactile feedback device of the present invention simulates the situation of touching different object surfaces in real life, and can generate a variety of different tactile sensations according to the situation of virtual reality, bringing users a more realistic experience.
[0017] (3) The tactile feedback device of the present invention adopts a fully flexible design, which makes human-computer interaction safer and makes the flexible micro tactile feedback device less prone to damage. Attached Figure Description
[0018] Figure 1 This is a structural outline diagram of the flexible micro tactile feedback device driven by the current fluid of the present invention. Figure 2 An exploded view of the main body of the electrofluid-driven flexible micro tactile feedback device of the present invention. Figure 3 This is a structural diagram of the FPC board of the electrofluid-driven flexible micro tactile feedback device of the present invention. Figure 4 This is a schematic diagram of the electrofluid-driven flexible micro haptic feedback device of the present invention worn on a finger. Figure 5 This is a schematic diagram illustrating the effect of the current-driven flexible micro tactile feedback device of the present invention generating various different forces.
[0019] In the figure: 1. Silicone film, 2. First FPC board, 3. First flexible silicone shell, 4. Second FPC board, 5. Stepped pin, 6. Second flexible silicone shell, 41. Silicone film, 42. First FPC board, 43. First flexible silicone shell. Detailed Implementation
[0020] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.
[0021] To illustrate the technical solution and objectives of this invention, the invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0022] like Figure 1 , Figure 2 As shown, the fluid-driven flexible micro tactile feedback device includes a silicone film 1, an electrode structure, a first flexible silicone shell 3, and a second flexible silicone shell 6. The first flexible silicone shell 3 is disposed in the middle of the electrode structure, and the silicone film 1 is fixedly connected to the second flexible silicone shell 6 through the electrode structure. Both the electrode structure and the first flexible silicone shell 3 are provided with multiple through holes arranged in an array and interconnected with each other. Each through hole is filled with dielectric liquid. After the electrode structure is connected to an external power source and energized, the dielectric liquid in each through hole flows to the silicone film 1, causing the silicone film 2 at the corresponding position to bulge towards the end away from the electrode structure to form a tactile bump. At the same time, the second flexible silicone shell 6 is concave inward towards the electrode structure at a position on the same straight line.
[0023] The electrode structure mainly includes a first FPC plate 2, a second FPC plate 4, and multiple stepped pins 5. One end of the first FPC plate 2 is fixedly connected to the silicone film 1, and the other end is fixedly connected to one end of the second FPC plate 4 through the first flexible silicone shell 3. The other end of the second FPC plate 4 is fixedly connected to the second flexible silicone shell 6. One end of the stepped pin 5 is provided with a flange, and the other end is a long pin. The flange contacts and is fixedly connected to the second flexible silicone shell 6, and the long pin is inserted into the second FPC plate 4 so that the flange is tightly connected to the second FPC plate 4.
[0024] like Figure 3 As shown, both the first FPC board 2 and the second FPC board 4 include a reinforcing area, an FPC flexible board, and gold fingers that are fixedly connected from top to bottom. The reinforcing areas are all sheet-like or square structures, the FPC flexible boards are all strip-shaped structures, and the gold fingers on the flexible printed circuit board refer to conductive contacts used for connection. The gold fingers are used to connect to external power sources.
[0025] The reinforcing area 41 on the upper part of the second FPC board 4 is provided with multiple sets of pinholes arranged in an array. Each set of pinholes is interconnected with a corresponding through hole on the first flexible silicone shell 3. Each set of pinholes includes a circular pinhole located at the center for the stepped pin 5 to pass through, and two arc-shaped through holes arranged symmetrically on both sides of the outer periphery of the circular pinhole, arranged coaxially along the circumference. The diameter of the arc-shaped through holes is the same as the diameter of the circular hole on the first flexible silicone shell 3. Both the circular pinhole and the arc-shaped through holes are connected to a corresponding through hole on the first flexible silicone shell 3. The holes are interconnected, and the flange diameter of the stepped pin 5 is smaller than the diameter of the arc-shaped through hole. The long pin of each stepped pin 5 passes through and is fixedly connected to a circular pin hole by conductive silver paste and glue. The long pin of each stepped pin 5 extends into the corresponding through hole of the first flexible silicone shell 3. Each circular pin hole in the first FPC board 2 and the second FPC board 4 is connected to a wire. Each wire is led out through the FPC flexible board 42 to the gold finger and connected to the external power supply through the gold finger 43 to control the power supply state of the corresponding circular pin hole.
[0026] The upper reinforcement area of the first FPC board 2 is provided with multiple interconnected circular holes that correspond to each through hole on the first flexible silicone shell 3. The circular holes are used to allow dielectric liquid to pass through. The long needles of each stepped needle 5 point to a corresponding circular hole, forming a needle-hole electrode pair. The reinforcement, namely the design of the needle-hole through hole group, is added to the original second FPC board 4 to prevent the needle-hole electrode pair from moving relative to each other when the flexible micro tactile feedback device is deformed, thereby preventing the top silicone film from protruding.
[0027] The first FPC board 2 is used to connect to the negative power supply, and the second FPC board 4 is used to connect to the positive power supply, so that the liquid flows from the second FPC board 4 to the first FPC board 2. An insulating material is provided between the first FPC board 2 and the second FPC board 4 to isolate the current and prevent short circuit.
[0028] The reinforcing areas on the upper part of the first FPC board 2, the reinforcing areas on the upper part of the second FPC board 4, the silicone film 1, the first flexible silicone shell 3, and the second flexible silicone shell 6 are all square-shaped structures with an outer contour that is wider than the lower half of the flexible micro tactile feedback device.
[0029] The surface of the silicone film 1 near the first FPC board 2 is provided with film grooves that are coaxially connected to each corresponding through hole on the first flexible silicone shell 3; the surface of the second flexible silicone shell 6 near the second FPC board 4 is provided with multiple grooves that are coaxially connected to each corresponding through hole on the first flexible silicone shell 3. The grooves are liquid reservoirs for storing dielectric liquid. At the same time, the thickness of the bottom of the liquid reservoir of the second flexible silicone shell 6 is the same as the thickness of the bottom surface of the film groove of the silicone film 1, which allows the liquid to flow towards the silicone film 1 and create a bulge when energized, while a corresponding depression appears at the bottom of the second flexible silicone shell 6 to avoid negative pressure affecting the pressure of the electrolytic pump.
[0030] The thickness of the first flexible silicone shell 3 is greater than the length of the stepped pin 5, ensuring that the stepped pin 5 does not contact the first FPC board 2 and maintaining the vertical distance between the tip of the stepped pin 5 and the circular electrode of the FPC board 2 within the range of 1~2 mm. The first flexible silicone shell 3 is mainly used to control the distance between the stepped pin 5 and the first FPC board 2, thereby setting a suitable pressure generated by the electro-hydraulic medium pump when energized, so that the silicone film 1 can bulge.
[0031] Electrofluid driving method for flexible micro haptic feedback devices driven by electrofluids: By controlling the on / off state of the electrode pairs consisting of circular holes and stepped needles 5 evenly distributed on the first FPC plate 2 and the second FPC plate 4, the flow of liquid in different parts can be achieved.
[0032] When a conductor on the gold finger is energized, the current flows through the FPC flexible board to the reinforcement area, energizing the stepped pin 5 at the corresponding position of the conductor. This generates a high potential difference between the pin and the corresponding hole electrode in the first FPC board 2, creating a spatial electric field around the electrode. Under the influence of this electric field, the dielectric liquid experiences a net volume force from the stepped pin 5 towards the first FPC board 2. When the electrode is connected to a high-voltage power supply, the dielectric liquid in the reservoir corresponding to the second flexible silicone shell 6 flows to the silicone film 1. The silicone film 1 then protrudes outward at the corresponding position, pressing against the skin surface. Simultaneously, the second flexible silicone shell 6 at the corresponding position, due to the loss of dielectric liquid in the reservoir, indents inward under pressure. By combining virtual reality and other technologies, the on / off state of the electrode pairs at different locations can be controlled, simulating the tactile sensation of the human body touching different objects.
[0033] The flexible micro tactile feedback device is fixed and encapsulated using a first flexible silicone shell 3, a second flexible silicone shell 6, and a silicone film 1. The second flexible silicone shell 6 is provided with nine liquid storage pools corresponding to the stepped needles 5 for storing liquid.
[0034] The flexible micro haptic feedback device uses a syringe to extract the air from the sealed interior and then inject a dielectric liquid, thus preventing breakdown when energized. Simultaneously, due to the excellent elasticity of silicone, when the syringe injects liquid and creates a small hole, the surrounding rubber chains quickly rebound, contracting and closing the hole, almost returning it to its pre-perforation state, thereby preventing gas leakage and ensuring its airtightness.
[0035] Flexible miniature haptic feedback devices are driven by electrofluids. Electrofluid actuation only requires passing a high voltage to the positive and negative electrodes of a dielectric fluid to generate a strong fluid flow. Since the electrofluid actuation mechanism does not involve mechanical moving parts, it does not generate noise. Applying electrofluid actuation to flexible miniature haptic feedback devices offers advantages such as simple structure and zero noise.
[0036] The flexible micro haptic feedback device employs a flexible design. The first flexible silicone shell 3, the second flexible silicone shell 6, and the silicone film 1 are cast from silicones of different hardnesses. The first FPC board 2 and the second FPC board 4 are bendable circuit boards made of flexible PI polyimide, enabling bending, folding, and even twisting. Although the step pins 5 are not a flexible material, their tiny size and connection to the second FPC board 4 via adhesive and conductive silver paste do not affect the overall flexibility of the device. This flexible design makes human-computer interaction safer and also makes the flexible micro haptic feedback device less prone to damage.
[0037] The flexible miniature haptic feedback device, with an overall structure similar in size to a finger, allows it to conform more naturally to the skin and joints without causing pressure or a foreign body sensation. It also reduces discomfort caused by slippage, misalignment, or friction due to size mismatch. Fingers are the most tactilely sensitive part of the human body, with a high density of nerve endings and abundant sensory receptors. Using a flexible miniature haptic feedback device similar in size to a finger can provide more accurate positioning feedback, force feedback, or texture simulation, enhancing immersion and realism.
[0038] Combination Figure 3 The second FPC board can be mainly divided into three parts: the reinforcing area 41, the FPC flexible board 42, and the gold fingers 43. The reinforcing area 41 is used to fix the stepped pins 5; therefore, reinforcement is added to the original FPC flexible board to prevent relative movement of the pin-hole electrode pairs during deformation of the haptic feedback device, which would prevent the top silicone film from protruding. The reinforcing area 41 has arc-shaped through holes around the stepped pins 5, allowing the dielectric liquid to flow inside the device. The gold fingers 43 are used to connect the control firmware, enabling control of the nine electrode pairs.
[0039] Combination Figure 4 , Figure 5The top silicone film of the flexible micro haptic feedback device is fixed to the finger surface with a strap, and the FPC flexible board wraps around the finger and connects to control firmware fixed to the wrist or other places. By combining virtual reality and other technologies, the flow of current in different locations is controlled. The pressure generated by the flow of current acts on the top silicone film, so that the finger feels different forces.
[0040] This invention uses electrostatic drive, has no electromagnetic coil, is lightweight, consumes little power, generates little heat, and is suitable for long-term wear.
[0041] In this invention, static electricity refers to a potential difference of approximately 5 kV between the positive and negative electrodes.
[0042] The electrode pair uses a common negative terminal to control the energization of different positive terminals, thereby achieving the flow and pressure of the current at different locations. In use, the silicone film of the flexible micro haptic feedback device is secured to the surface of human skin using methods such as straps. The pressure generated by the flow of the current acts on the top silicone film 1, allowing the skin to feel the sensation. By combining virtual reality and other technologies, controlling the flow of the current at different locations can simulate the sensation of touching different objects. Compared with existing micro haptic feedback devices, the micro haptic feedback device of this invention, due to its current-driven method, features low noise, low power consumption, and lightweight design; simultaneously, its fully flexible design makes human-computer interaction safer.
[0043] While the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the invention. Those skilled in the art can make various modifications and refinements without departing from the spirit and scope of the invention. Therefore, the scope of protection of the present invention shall be determined by the claims.
Claims
1. A flexible micro tactile feedback device driven by an electrofluid, characterized in that, The device includes a silicone film (1), an electrode structure, a first flexible silicone shell (3), and a second flexible silicone shell (6). The first flexible silicone shell (3) is disposed in the middle of the electrode structure. The silicone film (1) is fixedly connected to the second flexible silicone shell (6) through the electrode structure. Both the electrode structure and the first flexible silicone shell (3) are provided with multiple through holes arranged in an array and interconnected with each other. Each through hole is filled with dielectric liquid. After the electrode structure is connected to an external power source and energized, the dielectric liquid in each through hole flows to the silicone film (1), causing the silicone film (2) at the corresponding position to bulge towards the end away from the electrode structure to form a tactile bump.
2. The flexible micro tactile feedback device driven by an electrofluid according to claim 1, characterized in that, The electrode structure mainly includes a first FPC plate (2), a second FPC plate (4), and a plurality of stepped pins (5). One end of the first FPC plate (2) is fixedly connected to a silicone film (1), and the other end is fixedly connected to one end of the second FPC plate (4) through a first flexible silicone shell (3). The other end of the second FPC plate (4) is fixedly connected to a second flexible silicone shell (6). One end of the stepped pin (5) is provided with a flange, and the other end is a long pin. The flange contacts and is fixedly connected to the second flexible silicone shell (6). The long pin is inserted into the second FPC plate (4) and makes the flange tightly connected to the second FPC plate (4).
3. The flexible micro tactile feedback device driven by an electrofluid according to claim 2, characterized in that, The first FPC board (2) and the second FPC board (4) both include a reinforcing area, an FPC flexible board and gold fingers fixedly connected from top to bottom. The reinforcing area is a sheet-like square structure, the FPC flexible board is a strip-shaped structure, and the gold fingers are used to connect to an external power source.
4. The electrofluid-driven flexible micro tactile feedback device according to claim 3, characterized in that, The upper reinforcement area of the second FPC board (4) is provided with multiple sets of pinhole through-hole groups arranged in an array. Each set of pinhole through-hole groups is interconnected with a corresponding through-hole on the first flexible silicone shell (3). Each set of pinhole through-hole groups includes a circular pinhole located at the center for passing through the stepped pin (5) and two arc-shaped through-holes arranged symmetrically on both sides of the outer periphery of the circular pinhole. The long pin of each stepped pin (5) passes through and is fixedly connected to a circular pinhole. The long pin of each stepped pin (5) extends into the corresponding through-hole of the first flexible silicone shell (3) and forms a center alignment. Each circular pinhole in the first FPC board (2) and the second FPC board (4) is connected to a wire. Each wire is led out through the FPC flexible board to the gold finger and connected to the external power supply through the gold finger to control the power supply state of the corresponding circular pinhole.
5. A flexible micro tactile feedback device driven by an electrofluid according to claim 3, characterized in that, The reinforcing area on the upper part of the first FPC board (2) is provided with a plurality of interconnected circular holes corresponding to each through hole on the first flexible silicone shell (3), and the circular holes are used to allow the dielectric liquid to pass through.
6. A flexible micro tactile feedback device driven by an electrofluid according to claim 2, characterized in that, The first FPC board (2) is used to connect to the negative power supply, and the second FPC board (4) is used to connect to the positive power supply. An insulating material is provided between the first FPC board (2) and the second FPC board (4).
7. A flexible micro tactile feedback device driven by an electrofluid according to claim 2, characterized in that, The reinforcing area on the upper part of the first FPC board (2), the reinforcing area on the upper part of the second FPC board (4), the silicone film (1), the first flexible silicone shell (3), and the second flexible silicone shell (6) are all square-like structures with consistent outer contours.
8. A flexible micro tactile feedback device driven by an electrofluid according to claim 2, characterized in that, The silicone film (1) has a film groove on its surface near the first FPC board (2) that is coaxially connected to each corresponding through hole on the first flexible silicone shell (3); the second flexible silicone shell (6) has a plurality of grooves on its surface near the second FPC board (4) that are coaxially connected to each corresponding through hole on the first flexible silicone shell (3), and the grooves are liquid storage tanks for storing dielectric liquid.
9. A flexible micro tactile feedback device driven by an electrofluid according to claim 2, characterized in that, The thickness of the first flexible silicone shell (3) is greater than the length of the long needle of the stepped needle (5) so that the stepped needle (5) does not contact the first FPC board (2).
10. A current-fluid driving method applied to a current-fluid driven flexible micro haptic feedback device according to any one of claims 1-9, characterized in that, When a wire on the gold finger is energized, the current flows through the FPC flexible board to the reinforcement area, energizing the stepped pin (5) at the position corresponding to the wire and generating a high potential difference between it and the hole electrode formed by the corresponding circular hole in the first FPC board (2). A spatial electric field is formed around the hole electrode. Under the action of the spatial electric field, the dielectric liquid is subjected to a force from the stepped pin (5) to the hole electrode, thereby causing the dielectric liquid in the reservoir corresponding to the second flexible silicone shell (6) to flow to the silicone film (1). The silicone film (1) generates an outward bulge at the corresponding position, while the second flexible silicone shell (6) at the corresponding position is recessed inward.