Data transmission processing method and system for semiconductor production equipment

Abstract

The invention discloses a data transmission processing method and system for semiconductor production equipment, and relates to the technical field of semiconductor data transmission, and the method comprises the steps: building alias mapping of accessory equipment and main equipment, setting a mutual signal gating rule, mapping a process stage window into a network time slot to generate a time slot scheduling table, and building a publishing theme. Finishing time sequence synchronization, and outputting a synchronization ready identifier; and according to the traceability key set and the gap list, when the serial numbers are continuous, sealing and storing window traceability records in the current process stage and refilling a token to trigger a next window to roll, and when a gap exists, calling guide frame switching and executing gap retransmission, time slot scheduling table updating, alias mapping table updating and corresponding publishing theme in the time slot of the next window. According to the method, the window serial number and the receipt handle are compared to form the traceability key set and the gap list, and the minimum fallback retransmission and the dynamic time slot self-healing update are executed when the gap is detected, so that the data transmission process has the self-recovery characteristic.

Description

Technical Field

[0001] This invention relates to the field of semiconductor data transmission technology, and in particular to a data transmission processing method and system for semiconductor manufacturing equipment. Background Technology

[0002] With the deepening automation and informatization of semiconductor production lines, data interaction and process collaboration between equipment have become crucial for improving production accuracy and yield. Traditional equipment communication is mostly based on fixed-period sampling and bus broadcasting mechanisms. In wafer handling, placement, and inspection, a centralized controller periodically distributes instructions and status data to achieve overall coordination of the process cycle. In recent years, with the development of Time-Sensitive Networking (TSN) and Deterministic Ethernet technologies, the real-time performance and synchronization of data transmission have been significantly improved. Some high-end production lines have begun to adopt distributed time scheduling and frame synchronization transmission to reduce latency accumulation and improve resource utilization efficiency.

[0003] However, existing data transmission processing methods still have several shortcomings. First, data publishing mechanisms generally rely on fixed-period broadcasting, lacking precise time slot scheduling that matches the process stage window, which easily leads to bandwidth waste and repeated backhauls. Second, existing methods rely heavily on full retransmission to handle transmission anomalies or data gaps, failing to achieve fine-grained gap filling and seamless time slot recovery, thus affecting the continuity of production cycle and the integrity of wafer traceability. Summary of the Invention

[0004] In view of the aforementioned existing problems, the present invention is proposed.

[0005] Therefore, the present invention provides a data transmission processing method for semiconductor manufacturing equipment to solve the problems of repeated back-transmission and low efficiency of gap retransmission in data transmission during multi-process stage windows of semiconductor manufacturing equipment.

[0006] To solve the above-mentioned technical problems, the present invention provides the following technical solution:

[0007] In a first aspect, the present invention provides a data transmission processing method for a semiconductor manufacturing equipment, comprising,

[0008] Establish alias mapping between auxiliary equipment and main equipment and set mutual signal gating rules. Map the process stage window to network time slots to generate time slot scheduling table. Establish a publishing topic that only transmits point changes and cursor information, complete timing synchronization, and output synchronization ready flag.

[0009] Based on the synchronization ready flag, the trigger conditions of the mutual signal gating rules are detected. When the process stage window arrives, alias replacement is performed, and the change load is published as the main publication frame according to the time slot scheduling table. At the same time, the next window guide frame is published in advance, and the window sequence number and receipt handle are output.

[0010] Based on the window sequence number and receipt handle, downstream devices consume change loads one by one in the natural order of reconstructing wafers to generate traceability records. When the window ends, the continuity check of the release sequence number and receipt sequence number is completed, and the traceability key set and gap list are output.

[0011] Based on the traceability key set and the gap list, when the sequence numbers are consecutive, the traceability record of the current process stage window is sealed and the token is fed back to trigger the next window scrolling. When a gap exists, the guide frame is called to switch and the gap retransmission is executed in the time slot of the next window, and the time slot scheduling table, alias mapping table and corresponding publishing topic are updated.

[0012] In a preferred embodiment of the data transmission processing method for the semiconductor manufacturing equipment described in this invention, the specific steps for establishing the alias mapping between auxiliary equipment and main equipment are as follows:

[0013] Read the communication identifier and port parameters of the auxiliary device and the master device, write the identifier of the auxiliary device and the identifier of the master device into the alias mapping table and set the mapping valid bit;

[0014] After the writing is completed, the mapping relationship is verified through a communication handshake command. When the handshake is successful, the mapping state is written to the status register of the automation control device.

[0015] As a preferred embodiment of the data transmission processing method for the semiconductor manufacturing equipment described in this invention, the setting of mutual signal gating rules refers to continuously collecting the level status of the conveying signal and the loading / unloading signal, defining in the automatic control device that when the conveying signal and the loading / unloading signal are simultaneously active, a gating enable signal is generated, and the gating enable signal is written into the gating trigger register.

[0016] In a preferred embodiment of the data transmission processing method for the semiconductor manufacturing equipment described in this invention, the specific steps for mapping the process stage window to a network time slot and generating a time slot scheduling table are as follows:

[0017] The duration of each process stage window is determined based on the production line cycle time.

[0018] The duration is divided into multiple fixed time slot segments, each assigned a unique time slot number. A mapping relationship between the process stage window and the time slot number is established, and a time slot scheduling table is generated.

[0019] In a preferred embodiment of the data transmission processing method for the semiconductor manufacturing equipment described in this invention, the steps for establishing a publishing topic that only transmits position changes and cursor information are as follows:

[0020] Create a primary release topic and a hot standby release topic within the automated control unit;

[0021] Define the field structure in the main publishing topic, including location coordinates, change identifier, cursor number, and timestamp;

[0022] Define the guide number and cursor boundary field for the next process stage window in the hot standby release topic;

[0023] After the theme is created, perform timing synchronization on all devices and output a synchronization ready flag.

[0024] As a preferred embodiment of the data transmission processing method for the semiconductor manufacturing equipment described in this invention, the triggering condition for the detection mutual signal gating rule is as follows: when the synchronization ready flag is displayed, the gating trigger register is polled to read the status of the gating enable signal in real time. When the gating enable signal is active and the current process stage window starts, the alias mapping table is called to replace the auxiliary device flag with the main device flag and bind the time slot number of the current process stage window.

[0025] In a preferred embodiment of the data transmission processing method for the semiconductor manufacturing equipment described in this invention, the steps of publishing a change load as the primary publishing frame according to the time slot scheduling table, simultaneously publishing the next window guide frame in advance, and outputting the window sequence number and receipt handle are as follows.

[0026] At the start of the process phase window, the current time slot number is read from the time slot scheduling table, the changed load is encapsulated in the field order into a main release frame and written into the send buffer, and sent to the downstream device when the time slot arrives;

[0027] After the main release frame is sent, the window number and release number corresponding to the main release frame are recorded. At the same time, the guide frame of the next process stage window is written into the hot standby release topic, and the corresponding receipt handle is registered after the downstream device receives and confirms the receipt.

[0028] In a preferred embodiment of the data transmission processing method for the semiconductor manufacturing equipment described in this invention, the specific steps for outputting the traceability key set and the gap list are as follows:

[0029] After receiving the main release frame, the downstream device parses the position change information according to the window sequence number and drives the machinery to perform actions. After the actions are completed, it returns a receipt handle to the automation control device.

[0030] The automated control device performs sequence comparison based on the window number, release number, and receipt handle, forms a traceability key set with consecutive corresponding numbers, and records the missing numbers as a gap list.

[0031] In a preferred embodiment of the data transmission processing method for the semiconductor manufacturing equipment described in this invention, the step of calling a guide frame switch and performing gap retransmission in the next window time slot when a gap exists includes the following specific steps:

[0032] When the automated control device detects that the gap list is not empty, it reads the guide frame of the corresponding process stage window from the hot standby release topic, and activates the guide frame when the window sequence number is consecutive.

[0033] After the pilot frame is activated, the change payload corresponding to the non-responding sequence number recorded in the gap list is re-encapsulated into a retransmission frame and sent within the reserved time slot of the next process stage window;

[0034] After the retransmission frame is completed, the automated control device updates the time slot scheduling table, alias mapping table, and corresponding publishing topic.

[0035] In a second aspect, the present invention provides a data transmission processing system for semiconductor manufacturing equipment, including a synchronization module, which establishes an alias mapping between auxiliary equipment and main equipment and sets mutual signal gating rules, maps process stage windows to network time slots to generate a time slot scheduling table, establishes a publishing topic that only transmits position changes and cursor information, completes timing synchronization, and outputs a synchronization ready flag.

[0036] The gating release module, based on the synchronization ready flag, detects the trigger conditions of the mutual signal gating rules, performs alias replacement when the process stage window arrives, releases the change load as the main release frame according to the time slot scheduling table, and releases the next window guide frame in advance, outputting the window sequence number and receipt handle;

[0037] The traceability verification module generates traceability records for each consumption change load in the downstream device according to the natural order of reconstructing the wafer, based on the window sequence number and receipt handle. When the window ends, it completes the continuity verification of the release sequence number and receipt sequence number and outputs the traceability key set and gap list.

[0038] The rolling retransmission module, based on the traceability key set and the gap list, seals the traceability record of the current process stage window and re-feeds the token to trigger the next window rolling when the sequence number is consecutive. When a gap exists, it calls the guide frame switch and performs gap retransmission in the time slot of the next window, updates the time slot scheduling table, and forms a new alias-topic correspondence.

[0039] The beneficial effects of this invention are as follows: By establishing alias mapping between auxiliary equipment and main equipment and configuring mutual signal gating rules, dynamic communication pairing and synchronous triggering between multiple devices can be realized within the production line, avoiding communication failures caused by network topology changes; by mapping process stage windows to network time slots and generating time slot scheduling tables, it can be ensured that data release is strictly completed within the window boundaries, achieving deterministic transmission that is released as soon as the window is reached and stopped as soon as the window is closed; based on the hierarchical setting of the main release topic and the hot standby release topic, the collaborative release of the main frame and the guiding frame is realized, ensuring the temporal continuity of the data flow; by comparing the window sequence number and the receipt handle to form a traceability key set and a gap list, and performing minimum backoff retransmission and dynamic time slot self-healing update when a gap is detected, the data transmission process has self-recovery characteristics. Attached Figure Description

[0040] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the following description of the embodiments will be briefly introduced. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0041] Figure 1 This is a flowchart of a data transmission processing method for semiconductor manufacturing equipment.

[0042] Figure 2 Flowchart of the gated release module.

[0043] Figure 3 Flowchart for the traceability and verification module.

[0044] Figure 4 This is the flowchart for the rolling resend module. Detailed Implementation

[0045] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0046] Many specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the spirit of the invention. Therefore, the invention is not limited to the specific embodiments disclosed below.

[0047] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that is mutually exclusive with other embodiments.

[0048] Reference Figures 1-4 This is one embodiment of the present invention, which provides a data transmission processing method for a semiconductor manufacturing equipment, comprising the following steps:

[0049] S1. Establish alias mapping between auxiliary equipment and main equipment and set mutual signal gating rules. Map the process stage window to network time slots to generate a time slot scheduling table. Establish a publishing topic that only transmits position changes and cursor information. Complete timing synchronization and output a synchronization ready flag.

[0050] S1.1. Read the communication identification number and port parameters of the auxiliary equipment and the main equipment in the automation control device. The communication identification number consists of the unique equipment identification code fixed at the factory and the current network access port number of each equipment. The port parameters are obtained in real time by the bus interface of the automation control device.

[0051] Write the identifiers of the auxiliary equipment and the identifiers of the main equipment into the alias mapping table according to a one-to-one correspondence and set the mapping validity bit; after writing, verify the established mapping through the communication handshake command. After the handshake is successful, register the mapping availability status in the status register of the automation control device.

[0052] Based on the alias mapping table and the mapping availability status, the level status of the conveying signal and the loading / unloading signal is continuously collected in the automated control device. A gate enable signal is generated when both the conveying signal and the loading / unloading signal are active at the same time, and a gate disable signal is generated when either signal is inactive. The gate enable signal is written to the gate trigger register. The readable reference identifiers of the gate trigger register and the readable reference identifiers of the alias mapping table are archived and summarized to generate alias / gate handles.

[0053] It should be noted that the alias mapping table is generated through the memory management of the automated control device and includes the master device identifier, slave device identifier, port number, connection status identifier, and mapping validity bit.

[0054] The valid bit of the mapping is a Boolean logic identifier used to indicate whether the mapping relationship is in an available state. When the auxiliary device and the master device complete the communication handshake and the verification is correct, the automatic control device automatically sets the valid bit of the corresponding mapping entry to "1", indicating that the mapping relationship can be used for real-time data interaction. If the handshake fails or the signal is abnormal, the valid bit of the mapping remains "0".

[0055] The verification process of the communication handshake command is as follows: the automated control device sends a handshake request signal to the auxiliary device. After the auxiliary device responds, it returns an acknowledgment frame to the master device. The master device then sends the acknowledgment information back to the automated control device through a reverse response signal. When all three nodes have completed their responses and the response time difference does not exceed the time difference threshold (50 milliseconds), the automated control device considers the handshake successful and sets the valid mapping position to "1".

[0056] The time difference threshold is set based on the communication bus characteristics and signal transmission delay analysis of the production line equipment. The value is 50 milliseconds, which can cover all uncertainties in bus signal propagation, equipment response processing and buffer scheduling. This ensures the real-time accuracy of handshake while avoiding overly stringent synchronization requirements that could lead to repeated handshakes or communication interruptions.

[0057] S1.2. Under the control of the alias / gating handle, determine the duration of each process stage window according to the production line cycle time, divide the duration of each process stage window into multiple fixed network time slots, and assign a unique time slot number to each network time slot.

[0058] Establish a one-to-one mapping relationship between the process stage window and the corresponding network time slot number, and generate a time slot scheduling table in the automatic control device and mark the effective time and version number, which is defined as the time slot scheduling handle;

[0059] Based on the time slot scheduling handle, a main release topic and a hot standby release topic are created within the automated control device; the main release topic defines a field structure of location coordinates, change identifier, cursor number and timestamp, which are used to carry location change and cursor information;

[0060] In the hot standby release topic, the field structure is defined as the guide sequence number and cursor boundary of the next process stage window, which is only used to indicate the sending boundary of the next process stage window in advance.

[0061] Bind the sending cache of the primary publishing topic and the hot standby publishing topic to the time slot scheduling table to form a publishing topic handle.

[0062] It should be noted that the fixed network time slots are determined by the time-sensitive networking mechanism. Each process stage window is divided into 10 fixed network time slots, and the length of each time slot is equal to one-tenth of the duration of the process window. This is used to meet the timing requirements of data transmission, confirmation, retransmission and synchronization signal intervals. The choice of 10 fixed network time slots is based on a trade-off between communication bandwidth and clock accuracy, which can ensure sufficient scheduling granularity while avoiding the amplification of clock synchronization errors.

[0063] S1.3. Using the send buffer bound to the publish topic handle as the time constraint object, initiate a unified timing synchronization process within the production line, collect the current time reference of each device and perform alignment verification until the alignment deviation is less than the deviation threshold; after alignment is completed, register the synchronization completion status in the automated control device and generate a synchronization ready identifier, and bind the synchronization ready identifier to "alias / gated handle, time slot scheduling handle, and publish topic handle" in a consistent manner.

[0064] It should be noted that the deviation threshold is determined based on the combined characteristics of data transmission delay, clock jitter, and equipment response rate in the production line. Because there are differences in signal transmission paths and internal processing delays between different process units, in order to prevent excessively frequent synchronization calibration from increasing the system load, the deviation threshold is set to ±200 microseconds. This ensures that data transmission is triggered under the same time reference in each process stage window, and also maintains stable operation under conditions of communication jitter, equipment sampling error, and network latency accumulation.

[0065] S2. Based on the synchronization ready flag, detect the triggering conditions of the mutual signal gating rules, perform alias replacement when the process stage window arrives, publish the change load as the main publishing frame according to the time slot scheduling table, and publish the next window guide frame in advance, and output the window sequence number and receipt handle.

[0066] S2.1. After the synchronization ready flag is bound to the alias / gating handle, time slot scheduling handle, and publishing topic handle, the automation control device enters the mutual signal gating detection stage. With the synchronization ready flag as the start condition, it periodically polls the gating trigger register and reads the level status of the gating enable signal in real time. When the gating enable signal is active and the current process stage window starts, the automation control device confirms that the data transmission enable condition is met. The automation control device calls the alias mapping table and replaces the auxiliary device identifier in the data payload to be transmitted with the main device identifier.

[0067] After the alias replacement is completed, the automated control device determines the time slot allocation range of the current process stage window based on the time slot number of the process stage window registered in the time slot scheduling handle, reads the corresponding time slot number and binds it with the gating enable signal, and sets the corresponding time slot number as the valid transmission time slot for this release operation.

[0068] The automated control device calls the publish topic handle, extracts the change payload field from the send buffer, and the change payload consists of location coordinates, change identifier, cursor number and timestamp fields. The change payload is encapsulated in frame structure according to the field order to form the main publish frame, and a unique window sequence number and publish sequence number are assigned to the main publish frame.

[0069] S2.2. After the main release frame is encapsulated, the automated control device detects the current network load status and reads three fields from the time slot scheduling table: bandwidth utilization, time slot remaining ratio, and network transmission delay within the most recent process stage window. It then makes a judgment based on the pre-set release threshold, which consists of three indicators: utilization threshold, transmission delay threshold, and remaining ratio threshold, used to comprehensively evaluate whether the current network meets the deterministic transmission conditions.

[0070] When the bandwidth utilization rate is not greater than the utilization rate threshold, the network transmission delay is not greater than the transmission delay threshold, and the time slot remaining ratio is not less than the remaining ratio threshold, the automatic control device determines that the network bandwidth is sufficient and allows the main publication frame to be sent directly through the main publication topic.

[0071] When any one of the thresholds is not met, the automated control device activates the hot standby release topic as an auxiliary channel to share the transmission pressure of the main release topic, and distributes the transmission of the main release frame and the guide frame between the two release topics in time slot order;

[0072] After determining the transmission channel, the automated control device writes the main release frame into the transmission buffer according to the time sequence defined in the time slot scheduling table, and sends it to the downstream device when the current time slot is open. The transmission action is strictly limited to the network time slot corresponding to the current process stage window, realizing the timing synchronization characteristic of "sending when the window is reached and stopping when the window is closed". After the transmission is completed, the automated control device immediately records the window number and release number corresponding to the main release frame and generates a time stamp.

[0073] It should be noted that the occupancy threshold is determined based on the available bandwidth allocation strategy of the communication network, and is set to 80%. When the bandwidth utilization exceeds 80%, the network buffer queue latency increases significantly, which can easily lead to frame transmission delays.

[0074] The transmission delay threshold is determined based on the forwarding delay of the internal switch and the signal processing cycle of the equipment in the production line. It is set to 10 milliseconds, which can effectively cover the bus propagation delay and the equipment response delay, and avoid incorrect hot standby switching caused by instantaneous congestion.

[0075] The time slot remaining ratio threshold is set based on the time slot allocation balance and is set to 20%. This means that the remaining ratio of allocable time slots in the current process stage window is not less than 20%. It will be adjusted dynamically within a range of 10% to 30% based on the statistical results of the actual reserved time slot utilization rate to ensure the reserved space for subsequent guiding frames and retransmission frames.

[0076] The reservation ratio has a dynamic range of 10% to 30%. This is to match the discrete granularity of 10 time slots / windows (corresponding to 1 to 3 reserved time slots), and to ensure that the main release can stably maintain at least 70% of continuous time slot resources regardless of expansion or contraction, while always reserving at least one safety valve for re-issuance / bootstrapping. If it is expanded to the upper limit of 40%, it will crowd out the main release. If it is narrowed to 15% to 25%, it will lack elasticity in high gap scenarios.

[0077] S2.3. The automated control device generates a guide frame for the next process stage window based on the field structure of the hot standby release topic. The guide frame contains the guide sequence number and cursor boundary of the next process stage window, which is used to indicate the start position of the next data window. After the current main release frame is sent, the automated control device writes the guide frame into the sending buffer of the hot standby release topic and registers the window sequence number and time identifier of the guide frame to ensure that the hot standby path and the main path are synchronized in time.

[0078] When the downstream device receives the main release frame, it returns a reception confirmation signal. The automated control device receives the confirmation signal and generates a receipt handle. The receipt handle is used to identify that the downstream device has correctly received the data content of the main release frame. The receipt handle is then bound to the window sequence number and release sequence number of the main release frame to form a window tracking record.

[0079] S3. Based on the window sequence number and receipt handle, generate traceability records for each consumption change load in the downstream device according to the natural order of reconstructing the wafer. When the window ends, complete the continuity check of the release sequence number and receipt sequence number, and output the traceability key set and gap list.

[0080] S3.1. After the automated control device outputs the window sequence number, release sequence number, time stamp, and receipt handle, the placement equipment, as the receiving device, begins to execute the sequential consumption of the change load. After receiving the main release frame from the main release topic, the placement equipment parses the fields in the frame in the order of the window sequence number, reads the position coordinates, change identifier, cursor number, and timestamp, and consumes the change load one by one in the natural order of reconstructing the wafer. When the placement equipment executes consumption, it uses the cursor number as the action driving reference to ensure that the mechanical gripping and placement order strictly corresponds to the arrangement order of the change load.

[0081] After the placement equipment completes each mechanical action corresponding to a change in load, it immediately returns a receipt handle to the automation control device. Upon receiving the receipt handle, the automation control device performs a sequence comparison operation based on the window number, release number, and receipt handle. It retrieves the corresponding window number and release number from the traceability comparison table, marks the entries for which receipt handles have been returned as "confirmed," and retains the entries for which receipt handles have not yet been returned as "unconfirmed."

[0082] It should be noted that the consumer change load refers to the placement equipment mapping the data content to specific mechanical operation processes according to the site coordinates, change identifiers, cursor numbers and timestamp information contained in the received master release frame. That is, the wafer placement or sorting actions are completed sequentially according to the gripping position, placement position and execution order defined in the data. In essence, the change load is transformed from a logical state into a physical action execution process until the action is completed.

[0083] It should be noted that the traceability comparison table is automatically established by the automated control device when generating the main release frame. It is a mapping table used to record the status of each release frame in the window and the corresponding receipt handle. It includes the window sequence number field, release sequence number field, receipt status field and timestamp field. In the initial state, all entries are marked as "unconfirmed". When the corresponding receipt handle is received, the automated control device updates the entry mark to "confirmed" and stores it in the cache area of ​​the automated control device.

[0084] S3.2. The automated control device forms a traceability key set by continuously corresponding and confirmed window sequence numbers and release sequence numbers, indicating that the corresponding data has been executed sequentially in the production line and there is no risk of loss; for entries that fail to return a receipt handle within the set time window, the automated control device records the corresponding sequence number in the traceability comparison table and forms a gap list.

[0085] At the end of the window, the automated control device performs a continuity check on all release serial numbers and receipt serial numbers in the traceability comparison table. When all release serial numbers and receipt serial numbers correspond continuously without interruption, the automated control device generates a complete window record identifier. When there are discontinuous serial numbers, the automated control device outputs a traceability key set and a gap list containing the gap position and corresponding serial number.

[0086] It should be noted that the set time window refers to the maximum response period allowed for downstream equipment to complete the change load execution and return the receipt handle. The value is set based on the production line process cycle and single frame transmission delay characteristics. The time window length is equal to 1.2 times the duration of the current process stage window. That is, if the duration of the process stage window is 500 milliseconds, then the set time window is 600 milliseconds. The value takes into account the action delay of the placement equipment, communication buffer lag, and network congestion factors, so as to ensure the real-time data feedback and cover the range of abnormal delays, avoiding misjudgment as data loss.

[0087] S4. Based on the traceability key set and the gap list, when the sequence numbers are consecutive, seal the traceability record of the current process stage window and recharge the token to trigger the next window scrolling. When there is a gap, call the guide frame switch and execute the gap retransmission in the time slot of the next window, and update the time slot scheduling table, alias mapping table and the corresponding publishing topic.

[0088] S4.1. When the gap list is empty and the continuity check is in continuous state, the automatic control device will seal the traceability key set and time identifier together as the traceability record of the current process stage window, and locate the starting time slot number and corresponding guide number of the next process stage window based on the time slot scheduling handle, and register the combination of the starting time slot number and guide number as a window token.

[0089] The automated control device writes the window token into the current window indicator bit of the time slot scheduling handle to trigger the next process stage window scrolling. At the same time, it synchronously updates the current window indicator in the publishing topic handle to the next process stage window, so that the sending buffers of the main publishing topic and the hot standby publishing topic point to the time slot range of the next process stage window, thus completing the preparation for seamless window transition.

[0090] It should be noted that the window token consists of two parts: the first is the starting timeslot number of the next process stage window in the timeslot scheduling table, and the second is the guiding sequence number of the next process stage window in the hot standby release topic; the window token is used to keep the window indication of the timeslot scheduling handle and the release topic handle consistent, thereby ensuring the alignment of the process stage window, network timeslot, and release topic.

[0091] S4.2. When the gap list is not empty, the automated control device reads the previously registered guide frame from the hot standby release topic, checks whether the window number on the guide frame is consecutive to the last confirmed window number recorded by the automated control device, and checks whether the next release number is adjacent to the release number at the end of the trace key set.

[0092] When both checks are continuous, the automated control device activates the guide frame, making the hot standby release topic the auxiliary transmission path after the current window. The automated control device searches for the corresponding changed loads in the gap list from smallest to largest, repackages each one into a retransmission frame, and schedules the retransmission frames according to the time slot order reserved for the next process stage window in the time slot scheduling handle, limiting the retransmission frames to be sent within the reserved time slots until the gap list is cleared.

[0093] After each retransmission frame is sent and an acknowledgment handle is received, the automated control device synchronously updates the acknowledgment status in the traceability comparison table and updates the continuous intervals of the traceability key set in sequence to ensure that the retransmission process does not change the natural order of the confirmed data. During the retransmission, the automated control device continues to maintain the main release topic sending a new window of main release frames within the normal time slot, and the hot standby release topic completes the gap retransmission within the reserved time slot range, realizing the staggered operation of the two release topics at the time slot level.

[0094] It should be noted that the reserved time slot range is generated by the time slot scheduling table during window initialization. It is used for abnormal retransmission and guide frame transmission. The number is calculated as 20% of the total number of time slots in the current window and is determined based on the set time slot remaining ratio threshold. This is to ensure that there are still independent and controllable retransmission time slots when the main publishing channel is saturated. If the total number of time slots in the window is 10, then 2 time slots are reserved by default as the reserved time slot range.

[0095] S4.3. After the window is sealed or the gap is cleared, the automated control device updates the time slot scheduling table, alias mapping table, and corresponding publishing topic according to the closing status of this window:

[0096] The automated control device calculates the bandwidth occupancy rate, network transmission delay, and reserved time slot utilization rate of the current window. When the reserved time slot utilization rate is continuously greater than the time slot remaining ratio threshold but less than or equal to 1.1 times (22%) of the time slot remaining ratio threshold, the automated control device reserves 10% of the time slots in the next process stage window, but the total proportion does not exceed 30% of the total number of time slots in the window, in order to ensure the scheduling space for abnormal retransmission and guidance frames.

[0097] When the reserved time slot utilization rate is less than 0.5 times (10%) of the time slot remaining ratio threshold and the network transmission delay is stable, the automatic control device determines that the reserved space is excessive and reduces the number of reserved time slots by 10% in the next process stage window, but the total proportion is not less than 10% of the total number of time slots in the window, in order to improve the continuous sending density of the main publishing topic.

[0098] When the bandwidth utilization rate is greater than or equal to 95% of the utilization rate threshold and less than or equal to the utilization rate threshold (bandwidth utilization rate between 76% and 80%), the automatic control device maintains the current reserved time slot configuration unchanged and updates the delay field and window version number in the time slot scheduling table.

[0099] The automated control device checks the connection status identifiers in the alias mapping table. If a change in the handshake status between the auxiliary device and the master device is detected in the current window, the mapping validity bit is refreshed accordingly and the handshake timestamp is registered.

[0100] The automated control device updates the guide number and cursor boundary of the next process stage window in the main release topic and hot standby release topic, and clears the sent cache that has been sent and completed, so as to keep the main release topic and hot standby release topic consistent with the latest version of the time slot scheduling table.

[0101] It should be noted that the reserved time slot utilization rate refers to the ratio of reserved time slots actually used by the guiding frame and the retransmission frame in the current window during the final stage after transmission. It is used to determine whether the reserved space is too much or too little. The time slot remaining ratio refers to the ratio of the available idle time slots in the current process stage window to the total time slots during the detection stage before transmission. It is used to determine whether the release threshold is met.

[0102] The reserved time slot utilization rate is consistently greater than the time slot remaining ratio threshold and less than or equal to 1.1 times in order to provide a small buffer for measurement jitter, statistical window differences, and short-term sudden bandwidth fluctuations. If the ratio is too small (e.g., 1.02 times), it will lead to frequent triggering of adjustments and cause parameter jitter; if the ratio is too large (e.g., 1.25 times), it will delay the judgment to the stage of obvious congestion and reduce the timeliness of resend guarantee. Choosing 1.1 times can achieve a balance between not being overly sensitive and not being overly slow, and it matches the granularity of a fixed 10 time slots.

[0103] The number of reserved time slots is increased by 10%, but not exceeding 30%, because the window is fixed at 10 time slots. 10% is mapped to the minimum operable unit of adding 1 reserved time slot. This avoids invalid adjustments of less than 1 time slot and prevents the main release channel from being compressed due to an excessive increase at one time. The upper limit of the reservation is set at 30% to ensure that at least 70% of the time slots are reserved for the main release frame. This prevents the main release bandwidth from being squeezed out by the main release in the case of continuous resending. If a higher upper limit is set (such as above 40%), it will significantly reduce the continuity of the main release. If a lower upper limit is set (such as 20%), it may not be enough to accommodate resending and bootstrapping in abnormally concentrated situations.

[0104] Setting the reserved time slot utilization rate to less than 0.5 times (10%) of the remaining time slot ratio threshold and ensuring stable latency is to ensure that the reserved ratio is only reduced when resending and guidance hardly occupy the reserved space, thereby avoiding excessive reduction due to occasional low load. If the ratio is set higher (e.g., 0.8 times), repeated contraction and expansion due to short-term fluctuations may cause policy oscillation. If it is set lower (e.g., 0.3 times), the reserved space will remain at a relatively high level for a long time, wasting the continuous bandwidth of the main release. The condition of stable network transmission latency is to avoid immediately reducing the reservation when the link has just experienced congestion recovery, and to prevent back-and-forth jitter of tightening after relief and then congestion again.

[0105] Reducing the number of reserved time slots by 10%, but not less than 10%, is because a 10% reduction in a single contraction corresponds to a minimum executable step size of reducing one reserved time slot, which is neither drastic nor ineffective. Setting the lower limit of the reservation ratio to 10% is to ensure that at least one time slot is always reserved for guidance or minimum amount resending. If the lower limit is lower (e.g., 5%), in a 10 time slot / window structure, it is equivalent to possibly having no available reserved time slots, losing the ability to resend with minimum rollback. If the lower limit is higher (e.g., 15%), it will cause unnecessary pressure on the continuity of the main release under long-term light load.

[0106] Minimum rollback retransmission refers to using only the reserved time slot of the next process stage window, without using the normal transmission time slot of the current window, thus avoiding affecting the main release cycle of the next process stage window; when the reserved time slot is insufficient to accommodate all gaps, the automated control device will automatically extend the remaining gaps to the reserved time slot of the next process stage window to continue retransmission until the gap list is empty.

[0107] Maintaining the current reserved time slot configuration when bandwidth utilization is in the 76%–80% range is to avoid making haphazard adjustments as the deployment approaches. Increasing or decreasing the reservation at this point could push the main release or re-release beyond the critical point, causing parameter oscillations. Choosing 95% as the lower boundary is a common dead zone / hysteresis approach in control strategies, which can significantly reduce the frequency of adjustments near the upper limit. If the range is narrower (e.g., 98%–100%), the constant band is too small and it is still easy to trigger frequently. If the range is wider (e.g., 90%–100%), the opportunity to optimize when there is still margin will be missed.

[0108] This embodiment also provides a data transmission processing system for semiconductor manufacturing equipment, including:

[0109] The synchronization module establishes alias mapping between auxiliary equipment and main equipment and sets mutual signal gating rules. It maps the process stage window to network time slots to generate a time slot scheduling table, establishes a publishing topic that only transmits point changes and cursor information, completes timing synchronization, and outputs a synchronization ready flag.

[0110] The gating release module, based on the synchronization ready flag, detects the trigger conditions of the mutual signal gating rules, performs alias replacement when the process stage window arrives, releases the change load as the main release frame according to the time slot scheduling table, and releases the next window guide frame in advance, outputting the window sequence number and receipt handle;

[0111] The traceability verification module generates traceability records for each consumption change load in the downstream device according to the natural order of reconstructing the wafer, based on the window sequence number and receipt handle. When the window ends, it completes the continuity verification of the release sequence number and receipt sequence number and outputs the traceability key set and gap list.

[0112] The rolling retransmission module, based on the traceability key set and the gap list, seals the traceability record of the current process stage window and re-feeds the token to trigger the next window rolling when the sequence number is consecutive. When a gap exists, it calls the guide frame switch and performs gap retransmission in the time slot of the next window, updates the time slot scheduling table, and forms a new alias-topic correspondence.

[0113] This embodiment also provides a computer device applicable to the data transmission processing method of semiconductor manufacturing equipment, including: a memory and a processor; the memory is used to store computer-executable instructions, and the processor is used to execute the computer-executable instructions to implement the data transmission processing method of semiconductor manufacturing equipment as proposed in the above embodiment.

[0114] The computer device can be a terminal, comprising a processor, memory, communication interface, display screen, and input devices connected via a system bus. The processor provides computing and control capabilities. The memory includes non-volatile storage media and internal memory. The non-volatile storage media stores the operating system and computer programs. The internal memory provides an environment for the operation of the operating system and computer programs stored in the non-volatile storage media. The communication interface is used for wired or wireless communication with external terminals; wireless communication can be achieved through Wi-Fi, carrier networks, NFC (Near Field Communication), or other technologies. The display screen can be an LCD screen or an e-ink screen. The input devices can be a touch layer covering the display screen, buttons, a trackball, or a touchpad on the computer device's casing, or an external keyboard, touchpad, or mouse.

[0115] This embodiment also provides a storage medium storing a computer program, which, when executed by a processor, implements the data transmission processing method for semiconductor manufacturing equipment as proposed in the above embodiments. The storage medium can be implemented by any type of volatile or non-volatile storage device or a combination thereof, such as Static Random Access Memory (SRAM), Electrically Erasable Programmable Read-Only Memory (EEPROM), Erasable Programmable Read Only Memory (EPROM), Programmable Red-Only Memory (PROM), Read-Only Memory (ROM), magnetic storage, flash memory, magnetic disk, or optical disk.

[0116] In summary, this invention, by establishing alias mapping between auxiliary and main equipment and configuring mutual signal gating rules, enables dynamic communication pairing and synchronous triggering among multiple devices within a production line, avoiding communication failures caused by network topology changes. By mapping process stage windows to network time slots and generating a time slot scheduling table, it ensures that data publishing is strictly completed within the window boundaries, achieving deterministic transmission that is published as soon as the window is reached and stopped when the window is closed. Based on the hierarchical setting of the main publishing topic and the hot standby publishing topic, it realizes the collaborative publishing of the main frame and the guiding frame, ensuring the temporal continuity of the data flow. By comparing the window sequence number and the receipt handle to form a traceability key set and a gap list, and performing minimum backoff retransmission and dynamic time slot self-healing update when a gap is detected, the data transmission process has self-recovery characteristics.

[0117] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all such modifications or substitutions should be covered within the scope of the claims of the present invention.

Claims

1. A data transmission processing method for semiconductor manufacturing equipment, characterized in that: include, Establish alias mapping between auxiliary equipment and main equipment and set mutual signal gating rules. Map the process stage window to network time slots to generate time slot scheduling table. Establish a publishing topic that only transmits point changes and cursor information, complete timing synchronization, and output synchronization ready flag. Based on the synchronization ready flag, the trigger conditions of the mutual signal gating rules are detected. When the process stage window arrives, alias replacement is performed, and the change load is published as the main publication frame according to the time slot scheduling table. At the same time, the next window guide frame is published in advance, and the window sequence number and receipt handle are output. Based on the window sequence number and receipt handle, downstream devices consume change loads one by one in the natural order of reconstructing wafers to generate traceability records. When the window ends, the continuity check of the release sequence number and receipt sequence number is completed, and the traceability key set and gap list are output. Based on the traceability key set and the gap list, when the sequence numbers are consecutive, the traceability record of the current process stage window is sealed and the token is fed back to trigger the next window scrolling. When a gap exists, the guide frame is called to switch and the gap retransmission is executed in the time slot of the next window, and the time slot scheduling table, alias mapping table and corresponding publishing topic are updated.

2. The data transmission processing method for semiconductor manufacturing equipment as described in claim 1, characterized in that: The specific steps for establishing alias mappings between auxiliary devices and main devices are as follows. Read the communication identifier and port parameters of the auxiliary device and the master device, write the identifier of the auxiliary device and the identifier of the master device into the alias mapping table and set the mapping valid bit; After the writing is completed, the mapping relationship is verified through a communication handshake command. When the handshake is successful, the mapping state is written to the status register of the automation control device.

3. The data transmission processing method for semiconductor manufacturing equipment as described in claim 1, characterized in that: The setting of mutual signal gating rules refers to continuously collecting the level status of conveying signals and loading / unloading signals, defining in the automatic control device that when the conveying signal and loading / unloading signal are both active, a gating enable signal is generated and written into the gating trigger register.

4. The data transmission processing method for semiconductor manufacturing equipment as described in claim 1, characterized in that: The specific steps for mapping the process stage window to network time slots to generate a time slot scheduling table are as follows: The duration of each process stage window is determined based on the production line cycle time. The duration is divided into multiple fixed time slot segments, each assigned a unique time slot number. A mapping relationship between the process stage window and the time slot number is established, and a time slot scheduling table is generated.

5. The data transmission processing method for semiconductor manufacturing equipment as described in claim 1, characterized in that: The specific steps for establishing a publishing topic that only transmits location changes and cursor information are as follows. Create a primary release topic and a hot standby release topic within the automated control unit; Define the field structure in the main publishing topic, including location coordinates, change identifier, cursor number, and timestamp; Define the guide number and cursor boundary field for the next process stage window in the hot standby release topic; After the theme is created, perform timing synchronization on all devices and output a synchronization ready flag.

6. The data transmission processing method for semiconductor manufacturing equipment as described in claim 1, characterized in that: The triggering condition for the detection mutual signal gating rule is as follows: when the synchronization ready flag is displayed, the gating trigger register is polled to read the status of the gating allow signal in real time. When the gating allow signal is active and the current process stage window starts, the alias mapping table is called to replace the auxiliary device identifier with the main device identifier and bind the time slot number of the current process stage window.

7. The data transmission processing method for semiconductor manufacturing equipment as described in claim 1, characterized in that: The process of publishing a change load as the primary publishing frame according to the time slot scheduling table, while simultaneously publishing the next window guide frame in advance, and outputting the window sequence number and receipt handle, is detailed below. At the start of the process phase window, the current time slot number is read from the time slot scheduling table, the changed load is encapsulated in the field order into a main release frame and written into the send buffer, and sent to the downstream device when the time slot arrives; After the main release frame is sent, the window number and release number corresponding to the main release frame are recorded. At the same time, the guide frame of the next process stage window is written into the hot standby release topic, and the corresponding receipt handle is registered after the downstream device receives and confirms the receipt.

8. The data transmission processing method for semiconductor manufacturing equipment as described in claim 1, characterized in that: The specific steps for outputting the traceability key set and gap list are as follows. After receiving the main release frame, the downstream device parses the position change information according to the window sequence number and drives the machinery to perform actions. After the actions are completed, it returns a receipt handle to the automation control device. The automated control device performs sequence comparison based on the window number, release number, and receipt handle, forms a traceability key set with consecutive corresponding numbers, and records the missing numbers as a gap list.

9. The data transmission processing method for semiconductor manufacturing equipment as described in claim 1, characterized in that: When a gap exists, the process involves invoking a guide frame switch and performing gap retransmission in the next window's time slot. The specific steps are as follows. When the automated control device detects that the gap list is not empty, it reads the guide frame of the corresponding process stage window from the hot standby release topic, and activates the guide frame when the window sequence number is consecutive. After the pilot frame is activated, the change payload corresponding to the non-responding sequence number recorded in the gap list is re-encapsulated into a retransmission frame and sent within the reserved time slot of the next process stage window; After the retransmission frame is completed, the automated control device updates the time slot scheduling table, alias mapping table, and corresponding publishing topic.

10. A data transmission processing system for semiconductor manufacturing equipment, based on the data transmission processing method for semiconductor manufacturing equipment according to any one of claims 1 to 9, characterized in that: include, The synchronization module establishes alias mapping between auxiliary equipment and main equipment and sets mutual signal gating rules. It maps the process stage window to network time slots to generate a time slot scheduling table, establishes a publishing topic that only transmits point changes and cursor information, completes timing synchronization, and outputs a synchronization ready flag. The gating release module, based on the synchronization ready flag, detects the trigger conditions of the mutual signal gating rules, performs alias replacement when the process stage window arrives, releases the change load as the main release frame according to the time slot scheduling table, and releases the next window guide frame in advance, outputting the window sequence number and receipt handle; The traceability verification module generates traceability records for each consumption change load in the downstream device according to the natural order of reconstructing the wafer, based on the window sequence number and receipt handle. When the window ends, it completes the continuity verification of the release sequence number and receipt sequence number and outputs the traceability key set and gap list. The rolling retransmission module, based on the traceability key set and the gap list, seals the traceability record of the current process stage window and re-feeds the token to trigger the next window rolling when the sequence number is consecutive. When a gap exists, it calls the guide frame switch and performs gap retransmission in the time slot of the next window, updates the time slot scheduling table, and forms a new alias-topic correspondence.

Images