Process treatment equipment and method

Abstract

The invention discloses process treatment equipment and a process treatment method. The process treatment equipment is used for carrying out process treatment on the photovoltaic module, and the photovoltaic module is provided with a photoactive layer. The process treatment equipment comprises a process chamber used for accommodating the photovoltaic module; the execution unit is used for executing process treatment on the photovoltaic module in the process chamber; and the illumination unit comprises at least one light source, the at least one light source is partially or completely arranged inside and / or outside the process chamber, and the illumination unit is configured to be used for providing illumination for the photoactive layer in the process chamber in the process treatment process.

Description

Technical Field

[0001] This disclosure relates to the field of photovoltaic device manufacturing technology, and in particular to a process equipment and method. Background Technology

[0002] Solar photovoltaic technology is one of the key pathways to achieving carbon neutrality. Next-generation photovoltaic technologies, represented by perovskite solar cells, have attracted considerable attention due to their high luminous efficiency, tunable bandgap, ease of fabrication (making them thin and lightweight), and flexible manufacturing capabilities. However, the commercialization of these cells still faces challenges in terms of stability and large-scale fabrication processes. Summary of the Invention

[0003] In order to solve at least one technical problem in the related art, embodiments of this application provide a process equipment and method.

[0004] To solve the above-mentioned technical problems, this application is implemented as follows:

[0005] In a first aspect, embodiments of this disclosure provide a process processing apparatus for processing photovoltaic modules, the photovoltaic modules having a photoactive layer; the process processing apparatus includes:

[0006] A process chamber for housing the photovoltaic module;

[0007] An execution unit is configured to perform process processing on the photovoltaic module within the process chamber; and

[0008] An illumination unit includes at least one light source, at least one portion or all of which is located inside and / or outside the process chamber, and the illumination unit is configured to provide illumination to the photoactive layer inside the process chamber during the process.

[0009] For example, the execution unit includes: a first stage and a second stage arranged opposite to each other, the first stage and the second stage together forming the process chamber.

[0010] For example, the photovoltaic module includes a substrate, the photoactive layer and an encapsulation cover plate stacked sequentially, wherein at least one of the substrate and the encapsulation cover plate is a light-transmitting substrate to form the light-incident side of the photoactive layer; wherein the illumination unit is configured to apply light to the photoactive layer through the light-transmitting substrate.

[0011] For example, when the light source is located outside the process chamber, a light-transmitting area is provided on the wall of the process chamber, and at least part of the light emitted by the light source can pass through the light-transmitting area and enter the process chamber.

[0012] For example, when the light source is located inside the process chamber,

[0013] The side wall of the process chamber is provided with a receiving portion, and at least part of the light source is embedded in the receiving portion; or,

[0014] At least a portion of the light source is fixed to the inner surface of the sidewall; or,

[0015] At least some of the light sources are arranged adjacent to the photovoltaic modules.

[0016] For example, the receiving portion includes a recess or a transparent window provided in the wall of the process chamber.

[0017] For example, at least a portion of the light source's main optical axis has its light emission direction parallel to the surface of the first stage, and the light emission direction points towards the light-transmitting substrate.

[0018] For example, the illumination unit further includes a reflective structure disposed within the process chamber and located on the side of the light-transmitting substrate facing away from the photoactive layer, with the reflective surface of the reflective structure facing the light-incident side of the photoactive layer and the light source, so as to reflect light from the light source to the photoactive layer.

[0019] For example, the reflective structure includes at least one of the following:

[0020] A reflective coating is applied to the inner wall surface of the process chamber;

[0021] A reflective film layer formed on the surface of the light-transmitting substrate facing away from the photoactive layer; and / or,

[0022] A reflector independently installed within the process chamber.

[0023] For example, the process equipment further includes an isolation member disposed between the platform of the first stage and the photovoltaic module, the isolation member having a reflective layer on its surface facing the photovoltaic module, so that the isolation member is formed as the reflector.

[0024] For example, when at least a portion of the light source is arranged adjacent to the photovoltaic module, the light source is located at least outside the light-transmitting substrate in a first direction parallel to the surface of the first platform, and in a second direction perpendicular to the surface of the first platform, the illumination width of the light source is greater than or equal to the thickness of the light-transmitting substrate.

[0025] For example, at least a portion of the light source's main optical axis has its light emission direction perpendicular to the surface of the first stage and toward the light-transmitting substrate of the photovoltaic module.

[0026] For example, at least a portion of the bearing area of ​​the first stage and / or the second stage is a light-transmitting area, and at least a portion of the light source is correspondingly disposed on the side of the light-transmitting area opposite to the process chamber.

[0027] For example, the illumination unit further includes a light guide structure, which is disposed in the process chamber and located between the light-incident side of the photovoltaic module and the light source. The light guide structure is used to uniformly illuminate the photoactive layer with light provided by the light source.

[0028] For example, the light guide structure includes a plate-shaped light guide that is independently disposed relative to the photovoltaic module. The plate-shaped light guide has an incident light surface and an exit light surface disposed adjacent to each other. The incident light surface faces the light source, and the exit light surface faces the photoactive layer.

[0029] For example, the light provided by the illumination unit is visible light with a wavelength in the range of 400nm to 780nm.

[0030] For example, the visible light includes one monochromatic light selected from yellow light, white light, green light, and red light, or a mixture of at least two types of light.

[0031] For example, the process equipment includes at least one of a thermoforming packaging device, a cooling device, a deposition device, a coating device, a vapor deposition device, a baking device, and a drying device.

[0032] For example, when the process equipment is a thermoforming packaging equipment, at least one of the first stage and the second stage has a heating structure; when the process equipment is a cooling equipment, at least one of the first stage and the second stage has a cooling structure.

[0033] Secondly, embodiments of this disclosure provide a process method, the method comprising the following steps:

[0034] The photovoltaic module to be processed is placed in the process chamber of the first process processing equipment, wherein the photovoltaic module has a photoactive layer, and the first process processing equipment adopts the process processing equipment described above.

[0035] The first process is performed by the first process processing equipment, wherein during the first process processing, the working state of the illumination unit is controlled to provide illumination to the photoactive layer.

[0036] For example, when the first process equipment is a hot-press packaging equipment, the first process includes a heating and pressurizing step; wherein, in the heating and pressurizing step, the ambient temperature of the photovoltaic module is greater than or equal to 100°C, and the irradiation unit continuously irradiates the photovoltaic module from the beginning of the heating and pressurizing step until the end of the heating and pressurizing step.

[0037] For example, the method further includes, after completing the first process, the following steps:

[0038] The photovoltaic module is removed and transferred to a second processing device for a second processing step. The second processing device includes a cooling device, and the second processing step includes a cooling step. In the cooling step, at least in the initial stage of cooling, the light-absorbing layer of the photovoltaic module continues to be exposed to the light environment for cooling.

[0039] For example, the cooling device employs the process equipment as described in any one of claims 1 to 21, and the illumination environment is provided by an illumination unit in the cooling device; or, the illumination environment is provided by natural light. Attached Figure Description

[0040] Figure 1 This is one of the structural schematic diagrams of the process equipment provided in the embodiments of this application;

[0041] Figure 2 This is a second schematic diagram of the structure of the process equipment provided in the embodiments of this application;

[0042] Figure 3 This is the third schematic diagram of the process equipment provided in the embodiments of this application;

[0043] Figure 4 Fourth schematic diagram of the process equipment provided in the embodiments of this application;

[0044] Figure 5 Fifth schematic diagram of the process equipment provided in the embodiments of this application;

[0045] Figure 6 Sixth schematic diagram of the structure of the process equipment provided in the embodiments of this application;

[0046] Figure 7 Seventh schematic diagram of the structure of the process equipment provided in the embodiments of this application;

[0047] Figure 8 Eighth schematic diagram of the structure of the process equipment provided in the embodiments of this application;

[0048] Figure 9 Schematic diagram nine of the process equipment provided in the embodiments of this application;

[0049] Figure 10 Schematic diagram ten of the process equipment provided in the embodiments of this application;

[0050] Figure 1111. A schematic diagram of the structure of the process equipment provided in the embodiments of this application;

[0051] Figure 12 12. A schematic diagram of the structure of the process equipment provided in the embodiments of this application;

[0052] Figure 13 Schematic diagram thirteen of the process equipment provided in the embodiments of this application;

[0053] Figure 14 Fourteenth schematic diagram of the structure of the process equipment provided in the embodiments of this application;

[0054] Figure 15 Schematic diagram of the process equipment provided in the embodiments of this application, number fifteen;

[0055] Figure 16 Sixteenth schematic diagram of the structure of the process equipment provided in the embodiments of this application;

[0056] Figure 17 Schematic diagram seventeen of the process equipment provided in the embodiments of this application;

[0057] Figure 18 A schematic flowchart illustrating the processing method provided in the embodiments of this application;

[0058] Figure 19 A comparison chart of the test results of the electrical performance of photovoltaic modules obtained by the process processing method provided in the embodiments of this application and the process processing method in related technologies is shown, where a represents the test result of the process processing method in related technologies and b represents the test result of the process processing method provided in this disclosure. Detailed Implementation

[0059] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0060] Unless otherwise defined, the technical or scientific terms used in this application shall have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. The terms "first," "second," and similar terms used in this application do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, the terms "a" or "one," and similar terms do not indicate a quantity limitation, but rather indicate the presence of at least one. The terms "connected" or "linked," and similar terms, are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right," etc., are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship also changes accordingly.

[0061] Before providing a detailed description of the process apparatus and method according to the embodiments of this disclosure, the following description of the related technologies will be given:

[0062] Among related technologies, perovskite solar cells, representing the next generation of photovoltaic technology, have attracted much attention due to their advantages such as high luminous efficiency, tunable bandgap, ease of thinning and lightweight fabrication, and flexible manufacturing. However, the commercialization of this type of cell still faces challenges in terms of stability and large-scale fabrication processes.

[0063] The manufacturing of photovoltaic cells involves a series of process steps, such as thin-film deposition, heat treatment, and final encapsulation. Encapsulation is a crucial process step that protects perovskite cells from water and oxygen corrosion and ensures their long service life. It typically employs lamination or plate-on-plate technology to seal the photoactive layer between the substrate and the encapsulation cover under high temperature and pressure. The purpose of encapsulation is to isolate water and oxygen and provide mechanical protection, which is essential for ensuring the long-term lifespan of the cells.

[0064] The applicant has discovered, through research, a common but overlooked problem in traditional packaging processes and many other high-temperature, vacuum processes: the processes are typically carried out in a dark environment. For example, this approach may have adverse effects on photosensitive photoactive materials such as perovskites.

[0065] Standard encapsulation processes for perovskite solar cell modules typically employ a multilayer material composed primarily of polyisobutylene (PIB) and polyolefin elastomer (POE), which is then hot-pressed in a laminator or sheet press under high temperature (typically around 120°C) and vacuum conditions. The purpose of this encapsulation process is to achieve complete cross-linking and tight adhesion of the encapsulation materials to form a highly efficient water and oxygen barrier layer.

[0066] However, the encapsulation process itself can cause significant and immediate damage to the performance of perovskite solar cells. The fundamental reason is that perovskite, as an organic-inorganic hybrid ionic crystal, is extremely sensitive to its structural stability in relation to the external environment. Especially under high-temperature conditions, the vibration of ionic bonds intensifies, highlighting intrinsic thermal instability. More critically, when a high-temperature environment is combined with light-shielding conditions (i.e., the vacuum dark chamber of a traditional laminator), a series of negative effects can be induced.

[0067] For example, in the absence of light energy input, high temperatures more easily lead to the breakage of ionic bonds in the perovskite lattice, forming a large number of ion vacancies and deep energy level defects, exacerbating nonradiative recombination losses and reducing device efficiency. Under illumination, the charge carriers generated by the absorption of photons in the perovskite film can dynamically fill defect states. At the same time, the built-in electric field of the perovskite film material causes ions to migrate within the film to fill the ion vacancies generated by the breakage of ionic bonds, improving energy level defects and increasing device efficiency. However, in related technologies, processes such as packaging are carried out in a dark environment, causing this self-repair mechanism to be completely unable to activate.

[0068] To address the aforementioned technical problems, this disclosure provides a process equipment and method that enables photovoltaic cell processing in a light-illuminated environment, avoiding efficiency reduction caused by the absence of light in high-temperature environments, thereby improving the power generation efficiency and stability of photovoltaic cells.

[0069] The process equipment provided in this disclosure is used to perform various key process treatments on photovoltaic modules. These process treatments mainly refer to several critical manufacturing steps in the photovoltaic module manufacturing process that require exposure to high-temperature environments or high temperatures within the photovoltaic module itself. These include, but are not limited to, encapsulation processes, thin-film deposition processes, heat treatment processes, and cooling processes.

[0070] Encapsulation processes include, for example, lamination and plate-to-plate thermocompression, which are typically performed at high temperatures and pressures of 100-150°C to fuse the encapsulation material and form a sealed protective layer. Thin film deposition processes include, for example, vacuum evaporation, magnetron sputtering, and atomic layer deposition, which are generally performed in a vacuum or high-temperature chamber with a specific atmosphere to deposit electrode layers, buffer layers, or encapsulation barrier layers on the battery. Heat treatment processes include annealing, drying, and sintering, used to optimize the crystallinity of the thin film, remove solvents, or activate material properties. Cooling processes reduce the temperature of the heated workpiece or material to ambient temperature or the temperature required for the next stage of the process. Their main objectives are to terminate the heat treatment reaction, fix the microstructure after heat treatment, prevent excessive thermal stress, or prepare for the next process step.

[0071] Photovoltaic modules have a photoactive layer. A photovoltaic module refers to a basic unit or module that has been completed or is under manufacturing and has the function of photoelectric conversion, and it contains at least one photoactive layer. The photoactive layer is the key film layer in a photovoltaic module that undertakes the core photoelectric conversion function. The main function of the photoactive layer is to absorb photons, generate charge carriers, and transport charge carriers. The material of the photoactive layer can be a photovoltaic material that is significantly affected by illumination conditions, such as perovskite materials, crystalline silicon, or other thin-film photovoltaic materials. Other thin-film photovoltaic materials include cadmium telluride and copper indium gallium selenide.

[0072] like Figures 1 to 17 As shown, the process equipment provided in this embodiment includes:

[0073] Process chamber A for housing photovoltaic module 10;

[0074] Execution unit 100 is used to perform process processing on photovoltaic modules 10 within process chamber A; and

[0075] The illumination unit 200 includes at least one light source 210, which is partially or entirely located inside and / or outside the process chamber A. The illumination unit 200 is configured to provide illumination to the photoactive layer 11 inside the process chamber A during the process.

[0076] It should be noted that process chamber A can refer to a relatively enclosed physical space within the equipment, primarily used to house the photovoltaic modules 10 to be processed, isolating the area where the process takes place and providing an operating environment isolated from the external environment. Process chamber A can be a fixed cavity, formed by an openable upper and lower platform, or a vacuum chamber. For example, process chamber A may be equipped with an air inlet A1 and an air outlet A2 to provide a vacuum environment and / or a specific atmosphere.

[0077] The execution unit 100 can refer to the collective function of the physical components in the equipment responsible for applying and controlling the core conventional process parameters. It is the active execution mechanism for achieving the process processing objectives. The specific configuration of the execution unit 100 depends on the type of process that the equipment needs to complete.

[0078] For example, such as Figures 1 to 12 As shown, when the process equipment is a thermopressing packaging equipment, the execution unit 100 may include a first stage 110 and a second stage 120 arranged opposite to each other. At least one of the first stage 110 and the second stage 120 has a heating structure 130 to form a stage with heating function. The first stage 110 and the second stage 120 can surround to form a process chamber A, while providing the heat energy and pressure required for heating and pressurization.

[0079] For example, such as Figures 13 to 17As shown, when the process equipment is a cooling equipment, the execution unit 100 may include a first stage 110 and a second stage 120 arranged opposite to each other. At least one of the first stage 110 and the second stage 120 has a cooling structure 140, and a process chamber A is formed between the first stage 110 and the second stage 120.

[0080] The illumination unit 200 can be an independent functional module integrated into the process equipment. Its function is to actively and controllably apply a specific light environment to the photoactive layer 11 of the photovoltaic module 10 in the process chamber A during the process.

[0081] The illumination unit 200 may include one or more light sources 210, such as LED lamps, halogen lamps, or lasers. The illumination unit 200 can provide and control its light parameters, such as spectrum, intensity, uniformity, and irradiation timing, to meet the needs of specific control of the photoactive layer 11 during the process.

[0082] The light source 210 can be entirely located inside the process chamber A, including on the side wall or platform surface of the process chamber A, or entirely located outside the process chamber A, or partially located inside and partially located outside the process chamber A, to adapt to the structure of various process equipment.

[0083] In addition, the illumination unit can be executed synchronously with the process of the execution unit 100, and can run through or cover key process stages. For example, in the packaging process, it can cover the entire heating and pressurizing stage.

[0084] In the above scheme, by setting up a light irradiation unit 200 in the process equipment, the process equipment can apply light of a specific wavelength to the photoactive layer 11 of the photovoltaic module 10 while the process equipment is performing high temperature, vacuum and other process treatments (such as encapsulation, deposition, heat treatment and cooling), so that the light can act on the key stage of the material's structural defects in real time, thereby effectively suppressing the performance degradation induced in the process treatment.

[0085] For example, for photovoltaic materials such as perovskites that are sensitive to light or heat, traditional light-free processing environments, especially at high temperatures, can lead to increased ion migration and a rise in defect states. However, the processing equipment in this disclosure provides illumination to the photoactive layer 11 simultaneously during the processing, which allows the perovskite film to absorb photons and generate charge carriers that dynamically fill defect states. At the same time, the built-in electric field of the perovskite film material causes ions to migrate within the film to fill ion vacancies generated by ion bond breakage, thereby improving energy level defects and enhancing device efficiency.

[0086] In addition, the light source 210 can be flexibly set inside or outside the process chamber A, and can be adapted to a variety of existing or new process equipment, such as hot pressing packaging equipment, coating equipment or annealing equipment, without the need for major changes to the core process parameters of the equipment (such as temperature, pressure and vacuum), thus reducing the cost of equipment modification.

[0087] In some exemplary embodiments, such as Figures 1 to 17 As shown, the photovoltaic module 10 also includes a light-transmitting substrate 12 stacked with the photoactive layer 11 to form the light-incident side of the photoactive layer 11; wherein, the irradiation unit 200 is configured to apply light to the photoactive layer 11 through the light-transmitting substrate 12.

[0088] In the above scheme, the original light-transmitting channel in the structure of the photovoltaic module 10, which is used to receive sunlight, is used directly as the input channel for light in the process, thus avoiding the need to modify the structure of the photovoltaic module 10 to introduce light.

[0089] For example, a photovoltaic module 10 may include a substrate 13, a photoactive layer 11, and an encapsulation cover 14 stacked sequentially. The substrate 13 may be a rigid or flexible light-transmitting substrate 12, such as glass, polyethylene terephthalate (PET) substrate, etc., on which the photoactive layer 11 can be fabricated. The photoactive layer 11 may include an anode, a hole transport layer, a light-absorbing layer, an electron transport layer, and a cathode, etc., and the anode and cathode currents can be led out using conductive tape or busbars. Furthermore, a large area of ​​the photoactive layer 11 can be divided and connected in series into multiple sub-cells using a laser scribing process to increase the output voltage and reduce transmission losses.

[0090] An encapsulating film 15 may be coated onto the photoactive layer 11. The encapsulating film 15 may include, for example, a polyisobutylene adhesive layer (PIB adhesive) 15as or a polyolefin elastomer film (POE film) 15b. The encapsulation cover 14 may be glass or a high-barrier composite backsheet, and together with the substrate 13, it can seal the photoactive layer 11. The encapsulation cover 14 may be light-transmitting or opaque. In the encapsulation process, the process chamber A can be evacuated by the execution unit 100, and a preset temperature and pressure can be applied to the laminated structure of the photovoltaic module 10, causing the encapsulating film 15 to melt, flow, and cross-link and solidify, thereby completely sealing the photovoltaic module 10. At least one of the substrate 13 and the encapsulation cover 14 is a light-transmitting substrate 12. For example… Figure 1 As shown, substrate 13 is a light-transmitting substrate 12.

[0091] In some exemplary embodiments, such as Figure 6 , Figure 11 and Figure 12 , Figure 16As shown, when the light source 210 is located outside the process chamber A, a light-transmitting area S is provided on the wall of the process chamber A, and at least part of the light emitted by the light source 210 can pass through the light-transmitting area S and enter the process chamber A.

[0092] In the above solution, when the light source 210 is located outside the process chamber A, light can be irradiated into the chamber through the light-transmitting area S on the wall of the process chamber A. This completely isolates the light source 210 from the harsh environment inside the process chamber A, such as high temperature and pressure, vacuum, or potentially reactive chemical atmospheres. This solves the reliability, lifespan, and safety issues of the light source 210 under extreme process conditions. The light source 210 can operate in a mild external environment with stable performance and convenient maintenance. Furthermore, this solution eliminates the need for complex internal modifications to the core chamber structure of existing process equipment. Only the light-transmitting area S needs to be created or added to the chamber wall to install the independent illumination unit 200 on the equipment. This allows for rapid adaptation to various models and brands of existing production line equipment with extremely low modification costs and risks.

[0093] Furthermore, the external light source 210 offers greater design flexibility, facilitating heat dissipation management, optical calibration, and electrical control. Operators can check the status, replace, or adjust the power of the light source 210 without opening process chamber A. This also enables the use of more complex and powerful external optical systems without being limited by the internal space of the chamber. Moreover, avoiding the installation of the light source 210 and its cables inside process chamber A prevents dust accumulation, gas turbulence, or cleaning dead zones caused by internal wiring, ensuring that the core process environment is not negatively affected by the introduction of the illumination unit 200.

[0094] The above solution provides an exemplary arrangement of external light source 210. It should be understood that in practical applications, the way the light source 210 is external is not limited to this.

[0095] For example, in some other exemplary embodiments, such as Figure 3 , Figure 5 , Figures 7 to 10 , Figures 14 to 15 and Figure 17 As shown, when the light source 210 is disposed inside the process chamber A, the side wall of the process chamber A is provided with a receiving part A3, and at least part of the light source 210 is embedded in the receiving part A3.

[0096] For example, in some embodiments, such as Figure 3 As shown, the receiving portion A3 includes a recess A31 provided in the wall of the process chamber A. In other embodiments, such as Figure 5 As shown, the receiving part A3 includes a transparent window A32 provided on the wall of the process chamber A.

[0097] In the above scheme, a receiving part A3 can be pre-processed or set on the side wall of the process chamber A. The light source 210 can be embedded and fixed in the receiving part A3, so that its light-emitting surface is roughly flush with or slightly recessed with the inner surface of the side wall. This method realizes the structural integration and flattening integration of the light source 210 and the process chamber.

[0098] In other exemplary embodiments, such as Figure 4 As shown, at least part of the light source 210 is fixed to the inner surface of the side wall. For example, the light source 210 can be directly fixed to the inner surface of the side wall of the process chamber A facing the interior of the chamber by means of brackets, clips, or adhesives. In this way, the light source 210 itself may protrude from the inner surface of the process chamber A, but the placement of the light source 210 is clear, which facilitates installation and wiring.

[0099] In other exemplary embodiments, such as Figure 1 As shown, at least a portion of the light source 210 is arranged adjacent to the photovoltaic module 10. This method places the light source 210 directly near the object being processed, and the light source 210 can be placed near the edge of the photovoltaic module 10 or in a specific location. For example, the light source 210 can be mounted on the edge of the platform or on a bracket specifically designed around the photovoltaic module 10, thus achieving directional illumination with the shortest distance and highest efficiency, which is particularly suitable for situations requiring supplemental lighting from a specific angle (such as the side).

[0100] The above-mentioned arrangement schemes of the light source 210 integrate the light source 210 into the interior of the process chamber A, especially by embedding it in the wall of the process chamber A or fixing it to the inner surface of the process chamber A. This can save the effective process space inside the chamber to the maximum extent, avoid unnecessary interference to the placement, removal or loading of photovoltaic modules 10 or the process gas flow field, and make the overall structure of the equipment more compact. It is especially suitable for precision process equipment with limited internal space.

[0101] In addition, the light source 210 is built into the cavity, which shortens the transmission distance of light from the light source 210 to the photovoltaic module 10 compared to the external light source 210. In particular, the way of arranging the light source 210 directly adjacent to the photovoltaic module 10 can effectively reduce the attenuation and scattering of light in the propagation medium, so that the light energy can reach the target photoactive layer 11 more concentratedly and efficiently.

[0102] The above solutions provide several arrangement options for the built-in light source 210. These various built-in methods can address different process requirements, such as the required illumination angle, intensity, and uniformity, offering flexible choices for different chamber structures. It should be understood that in practical applications, the built-in method of the light source 210 is not limited to these specific arrangements.

[0103] Furthermore, in some exemplary embodiments, such as Figures 1 to 6As shown, at least a portion of the light source 210 has its main optical axis emitting light direction parallel to the surface of the first stage 110, and its light emission direction points towards the light-transmitting substrate 12.

[0104] The light emanating direction of the principal optical axis of the light source 210 is parallel to the surface of the first stage 110. That is, the principal optical axis of the light source 210 is set to be parallel to the surface of the first stage 110, and the main propagation path of the light is horizontal, propagating along a direction parallel to the surface on which the photovoltaic module 10 is placed. With this arrangement, the light from the light source 210 is directly incident from the side onto the side edge of the photovoltaic module 10, which is perpendicular to the surface of the stage, and can penetrate the side or edge area of ​​the light-transmitting substrate 12. For ease of explanation, this incident method will be referred to as side incidence.

[0105] For photovoltaic cells, especially thin-film cells, the edge regions and interfaces between thin film layers are often areas with high defect density, prone to degradation or ion migration. Vertical incident light, that is, light incident along a direction perpendicular to the solar panel, mainly affects the large central area of ​​the cell. Side incident light, on the other hand, can directly incident from the side of the photovoltaic module 10 onto the edge regions and interlayer interfaces, providing enhanced optical treatment to these areas, effectively suppressing edge effects, and improving the overall uniformity and stability of the device.

[0106] Furthermore, when horizontal light enters from the side of the light-transmitting substrate 12, it will propagate and scatter in the in-plane direction (lateral direction) within the light-transmitting substrate 12, allowing the light to penetrate and cover the lateral cross-section of the photoactive layer 11 more fully. Moreover, it eliminates the need to install the light source 210 on the stage at the top or bottom of the chamber, without affecting the stage's heating and pressurizing functions. It also offers better compatibility with the internal spatial structure and functional modules of existing laminators, sheet metal presses, and other equipment, and is easier to modify.

[0107] In some embodiments, when the light source 210 is arranged in a side-incidence manner, the light source 210 can be arranged circumferentially around the photovoltaic module 10. For example, as Figure 1 As shown, when the light source 210 is positioned near the photovoltaic module 10, the light source 210 can be directly and closely positioned around the perimeter of the photovoltaic module 10; similarly, as Figures 2 to 5 As shown, when the light source 210 is set on the side wall of the process chamber A, the light source 210 can be set on multiple side walls of the process chamber A to surround the photovoltaic module 10 in a circumferential direction.

[0108] In this way, by arranging light sources 210 with parallel light emission directions around the photovoltaic module 10, a uniform annular horizontal lighting field can be formed around the photovoltaic module 10, thereby uniformly illuminating the edge of the module from all directions, effectively eliminating shadows or uneven illumination that may be caused by unidirectional lighting, and ensuring the consistency of process treatment.

[0109] Furthermore, in some embodiments, when the light source 210 is incident laterally and at least a portion of the light source 210 is arranged adjacent to the photovoltaic module 10, the light source 210 is located at least outside the light-transmitting substrate 12 in a first direction X parallel to the surface of the first stage 110, and in a second direction Y perpendicular to the surface of the first stage 110, the illumination width of the light source 210 is greater than or equal to the thickness of the light-transmitting substrate 12.

[0110] In the above scheme, with Figure 1 Taking the orientation shown as an example, the fact that the light source 210 is at least located outside the light-transmitting substrate 12 means that, viewed from a horizontal plane, the horizontal projection of the light-emitting part or the starting point of the light path of the light source 210 must be outside the edge contour line of the light-transmitting substrate 12, and cannot be blocked by the light-transmitting substrate 12 itself in the horizontal direction. This ensures that the horizontal or near-horizontal light emitted by the light source 210 can directly strike the side edge of the light-transmitting substrate 12 without obstruction.

[0111] Furthermore, the fact that the illumination width of the light source 210 is greater than or equal to the thickness of the light-transmitting substrate 12 means that, taking the orientation shown in the figure as an example, in a vertical cross-section, the height of the effective light-emitting area of ​​the light source 210 in the vertical direction, or the height of the light spot formed after optical design in the vertical direction (second direction Y), must cover and preferably be slightly greater than the thickness of the light-transmitting substrate 12. This design ensures that the light beam incident from the side can completely cover the entire thickness range of the light-transmitting substrate 12 in the second direction Y, avoiding insufficient illumination of shadow areas on the upper or lower part of the light-transmitting substrate 12. Of course, it is understood that the above is only an example and is not a limitation.

[0112] For example, such as Figures 1 to 6 As shown, the illumination unit 200 further includes a reflective structure 220, which is disposed in the process chamber A and located on the side of the light-transmitting substrate 12 away from the photoactive layer 11. The reflective surface of the reflective structure 220 faces the light-incident side of the photoactive layer 11 and the light source 210, so as to reflect the light from the light source 210 to the photoactive layer 11.

[0113] In the above scheme, a reflective structure 220 is also provided inside the process chamber A. The reflective structure 220 is located on the side of the light-transmitting substrate 12 that is away from the photoactive layer 11, and is positioned in the light path between the light source 210 and the light-transmitting substrate 12. In this way, the reflective structure 220 can capture and redirect the light.

[0114] Specifically, the reflective structure 220 guides light that might otherwise pass directly through the light-transmitting substrate 12 without being absorbed, or that would be scattered due to poor illumination angles, back to the photoactive layer 11 via the reflective surface. In this way, without increasing the power of the light source 210, the effective luminous flux reaching the photoactive layer 11 can be enhanced, reducing energy consumption.

[0115] Furthermore, the side-incident light source 210 layout may create a light intensity gradient between the central and edge regions of the photovoltaic module. The reflective structure 220, through its curved or angled reflective surface design, can redistribute the light. For example, it can reflect excess light illuminating the central region to the edge, or reflect side-incident light so that it enters the photovoltaic module at a more perpendicular angle, thereby effectively homogenizing the light intensity distribution across the entire photoactive layer 11 surface, eliminating localized weak light areas, and ensuring uniform and consistent material performance.

[0116] Furthermore, the reflective structure 220 reduces the stringent requirements on the position and angle of the light source 210. Even if the initial light emission direction of the light source 210 is not optimal, or the installation position of the light source 210 is limited, the reflective structure 220 can act as an optical corrector to adjust and converge light from different directions onto the target area, thereby improving the tolerance of the installation of the light source 210 and reducing the difficulty and cost of manufacturing and assembly.

[0117] In addition, the direct light from the point light source 210 or the line light source 210 can be transformed into a more diffuse surface light source 210 through the diffuse reflection of the reflective structure 220 or a specific design. This helps to avoid the formation of strong local light intensity peaks on the photoactive layer 11, thereby avoiding damage to the material caused by local overheating or uneven reaction that may occur under high-temperature processing conditions due to local light intensity peaks.

[0118] In addition, for photovoltaic modules 10 with large areas or complex internal structures, the reflective structure 220 can guide light to areas in the photovoltaic module 10 that may be blocked or corners that are difficult to be directly illuminated, ensuring that every part of the photoactive layer 11 can receive sufficient light, thereby ensuring the overall improvement of the performance of the entire module.

[0119] In some embodiments, the reflective structure 220 includes at least one of the following:

[0120] Reflective coating 221 is applied to the inner wall surface of process chamber A;

[0121] A reflective film layer 222 is formed on the surface of the light-transmitting substrate 12 facing away from the photoactive layer 11; and / or,

[0122] A reflector 223 is independently installed in process chamber A.

[0123] In some embodiments, such as Figure 3 As shown, the reflective structure 220 includes a reflective coating 221 disposed on the inner wall surface of the process chamber A.

[0124] In this way, the inner wall surface of process chamber A is transformed into a reflective structure 220. By coating or plating a layer of high-reflectivity material, such as a mirror aluminum coating, a ceramic reflective coating, or a Teflon white coating, onto the plate forming the inner wall of the chamber, the entire or part of the inner wall becomes a diffuse or specular reflective surface. This eliminates the need for additional internal space of the chamber and the requirement for additional independent reflective components.

[0125] In other embodiments, such as Figure 1 As shown, the reflective structure 220 includes a reflective film layer 222 formed on the surface of the light-transmitting substrate 12 facing away from the light-active layer 11.

[0126] In this way, the reflection function can be directly integrated into a component of the photovoltaic module 10. For example, a partially transmissive and partially reflective film, or a reflective film at a specific angle, can be deposited or attached to the side of the light-transmitting substrate 12 that is away from the photoactive layer 11. This changes the optical properties of the light-transmitting substrate 12 of the photovoltaic module 10 itself, giving it both light transmission and reflection functions.

[0127] In other embodiments, such as Figure 2 As shown, the reflective structure 220 may further include a reflective plate 223 independently disposed within the process chamber A.

[0128] Thus, the reflective structure 220 can be an independent physical component additionally installed within the process chamber A. It can be a flat metal plate or a metal plate with a specific curvature, a glass plate with a reflective film, or a polymer plate, etc. The position, angle, shape, and curvature of the reflective plate 223 can be independently designed and flexibly adjusted according to process requirements, and it can also be designed to be movable or replaceable.

[0129] For example, such as Figure 2 As shown, the process equipment also includes an isolation member 223' disposed between the table surface of the first platform 110 and the photovoltaic module 10. The surface of the isolation member 223' facing the photovoltaic module 10 has a reflective layer, so that the isolation member 223' is formed as a reflector 223.

[0130] The isolation component 223' is a common auxiliary component in photovoltaic manufacturing processes. It can refer to a pad or membrane laid between the platform and the photovoltaic module 10 to be processed, such as a silicone pad, Teflon cloth, fiberglass cloth, or high-temperature resistant rubber sheet. The function of the isolation component 223' is to isolate, protect, and buffer, preventing damage between the platform and the photovoltaic module 10, evenly distributing lamination pressure, and facilitating the separation and removal of the photovoltaic module 10 after processing.

[0131] In the above solution, the isolation member 223' was modified by processing or bonding a layer of reflective material, such as vapor-deposited aluminum film, coated with white high-reflectivity ceramic coating or laminated with mirror reflective film, on its surface facing the photovoltaic module 10. This makes the isolation member 223' not only play an isolation role, but also, since it is located below the photovoltaic module 10, its reflective surface can face the light-transmitting substrate 12 and the photoactive layer 11, thus being reused as a reflector 223.

[0132] This design avoids introducing additional independent components into process chamber A, and instead achieves the reflection function by reusing existing necessary consumables, thus avoiding the structural complexity, space occupation, and additional costs associated with specially designing and installing an independent reflector 223.

[0133] In addition, as an isolation component 223' laid on the platform, the isolation component 223' can achieve a large-area, seamless, and tight fit with the photovoltaic module 10. This fit ensures that the light reflected from its surface can return to the photovoltaic module 10 relatively evenly.

[0134] It should be noted that the above describes several ways of setting the reflective structure 220. These ways of setting are referred to as reflective coating 221, reflective film layer 222 and reflective plate 223, respectively. In different embodiments of this disclosure, any combination of one, two or all three ways can be used.

[0135] Different photovoltaic processes have varying requirements regarding the intensity, uniformity, and angular distribution of light. The arrangement of the aforementioned reflective structures 220 allows for the configuration of a reflective optical system according to specific needs. Furthermore, the presence of multiple reflective structures 220 can mitigate the risk of process failure due to the failure of a single reflective surface.

[0136] Furthermore, in some exemplary embodiments, such as Figure 2 As shown, the illumination unit 200 may further include a light guide structure 230, which is disposed in the process chamber A and located between the light-incident side of the photovoltaic module 10 and the light source 210. The light guide structure 230 is used to uniformly irradiate the photoactive layer 11 with the light provided by the light source 210.

[0137] Light sources 210, especially LEDs and lasers, have strong directionality and uneven light spots. Direct irradiation can lead to large differences in light intensity received by different areas on the surface of the photovoltaic module 10, causing uneven processing of the photoactive material. In the above solution, a light guide structure 230 is set inside the process chamber A. The light guide structure 230 is located between the light-incident side of the photovoltaic module 10 and the light source 210. It can receive the original light from the light source 210. Through its internal optical design, such as microstructures and scattering particles, the light guide structure 230 disrupts the original light, causing it to remix and be emitted evenly on the light-emitting surface. This ensures that all areas of the entire effective area of ​​the photoactive layer 11 receive light of consistent intensity.

[0138] Furthermore, without the light guide structure 230, a more complex and precise array design would be required for the position, number, and arrangement of the light sources 210. By incorporating the light guide structure 230, the arrangement of the light sources 210 becomes more flexible; light simply needs to be coupled into the light guide structure 230, and the final illumination effect is primarily determined by the optical design of the light guide structure 230. Moreover, the light guide structure 230 can effectively extend light emitted from a smaller area of ​​the light source 210 to a larger target area, reducing the number or power of the light sources 210 needed to cover a large area. Additionally, the light guide structure 230 can precisely control the angular distribution of the emitted light by designing the microstructure of its light-emitting surface, thus adapting to the needs of different photovoltaic materials and processes.

[0139] For example, such as Figure 2 As shown, the light guide structure 230 includes a plate-shaped light guide 231 that is independently disposed relative to the photovoltaic module 10. The plate-shaped light guide 231 has an incident light surface and an exit light surface that are disposed adjacent to each other. The incident light surface faces the light source 210, and the exit light surface faces the photoactive layer 11.

[0140] In the above scheme, the light guide structure 230 is a physical component independent of the photovoltaic module 10. It can be made of transparent optical materials, such as quartz glass, optical acrylic (PMMA), or polycarbonate (PC). The plate-shaped light guide 231 can effectively achieve uniform illumination of the large-area surface light source 210. It utilizes the principle of total internal reflection to guide light, and through processed microprism arrays, diffusion dots, or light scattering materials on the light-emitting surface, it ensures that the light escapes at a specific angle or uniformly. This ensures that the light emitted from its light-emitting surface has high uniformity throughout the entire surface. Furthermore, the plate-shaped light guide 231 is easy to install, fix, and align precisely in the equipment, does not depend on the surface characteristics of the photovoltaic module 10, and can maintain its flatness, ensuring stable parallelism with the photovoltaic module 10.

[0141] It should be understood that the specific construction of the light guide structure 230 is not limited to this. For example, the light guide structure 230 can also adopt a light guide column array, an optical lens array, etc.

[0142] In addition, the above scheme provides a side-incident method for the light source 210, but the illumination direction of the light source 210 is not limited to this.

[0143] For example, in some other exemplary embodiments, such as Figures 7 to 17 As shown, at least a portion of the light source 210 has its main optical axis emitting light direction perpendicular to the surface of the first stage 110 and toward the light-transmitting substrate 12 of the photovoltaic module 10.

[0144] The light-emitting direction of the principal optical axis of the light source 210 is perpendicular to the surface of the first stage 110; that is, the light-emitting direction of the principal optical axis of the light source 210 is set to be perpendicular to the surface of the first stage 110. The main propagation path of the light is vertical, along a direction perpendicular to the surface on which the photovoltaic cell module is placed, i.e., as shown... Figures 6 to 16 The light rays, as shown, propagate from top to bottom (or bottom to top). In this arrangement, the light source 210 is positioned in the area of ​​the second stage 120 at the top or the first stage 110 at the bottom of the process chamber A, and the emitted vertical light rays directly hit a large area of ​​the front or back of the photovoltaic module 10. For ease of explanation, this incident method will be referred to as vertical incident.

[0145] In final applications, the photoelectric conversion performance of photovoltaic cells is calibrated for sunlight incident vertically or nearly vertically. The vertical incidence method in this embodiment simulates the actual working light environment of the device to the greatest extent possible during the manufacturing process, resulting in the most direct and efficient photomodulation of the photoactive layer 11. Furthermore, when light is incident vertically onto the flat surface of the transparent substrate 12, light loss is minimized, and most of the light energy can enter the interior of the photovoltaic module 10, avoiding the initial coupling losses that may occur due to total internal reflection or high reflectivity at the side of the substrate in side incidence. Therefore, under the same power of the light source 210, the effective luminous flux reaching the photoactive layer 11 is higher compared to side incidence.

[0146] Furthermore, in the vertical incidence mode, the light source 210 can be arrayed directly above or below the photovoltaic module 10. With a relatively simple light guide structure 230, uniform vertical illumination of the entire photovoltaic module 10 area can be achieved. Moreover, since the light source 210 can be arrayed and distributed across the entire effective surface of the photovoltaic module 10 during vertical incidence, the array of light sources 210 can be controlled by zones to selectively enhance illumination of specific areas of the photovoltaic module 10.

[0147] When using a vertical incidence method, the light source 210 can be either built-in or external.

[0148] For example, in some embodiments, such as Figures 7 to 10 As shown, the light source 210 can be embedded in the receiving portion A3 of the first stage 110 and / or the second stage 120. Thus, a cavity A31 can be machined into the surface of the first stage 110 and / or the side facing away from the surface, directly embedding and fixing the light source 210 within it, so that the emitting surface of the light source 210 is flush with or slightly lower than the surface of the stage. In this way, the light source 210 occupies almost no additional internal space within the cavity, maintaining the simplicity and integrity of the cavity. There is almost no air gap between the light source 210 and the photovoltaic module 10, allowing light to directly illuminate the photovoltaic module 10 with the shortest path and minimal loss, resulting in high light energy utilization. Furthermore, it facilitates the array arrangement of the light source 210, enabling high power density lighting.

[0149] For example, in other embodiments, such as Figures 8 to 12 As shown, at least a portion of the bearing area of ​​the first stage 110 and / or the second stage 120 is a light-transmitting area S, and at least a portion of the light source 210 is correspondingly disposed on the side of the light-transmitting area S facing away from the process chamber A.

[0150] In the above scheme, a portion of the first stage 110 and / or the second stage 120 can be modified into a light-transmitting area S made of a light-transmitting material. The array of light sources 210 is then arranged entirely on the back side of this light-transmitting area S, i.e., on the side facing away from the process chamber A, completely isolated from the process chamber A. The light source 210 can be built into the stage or externally mounted. Since the light source 210 and its electrical components are completely outside the process chamber A, problems such as gas release, contamination, and temperature resistance of the light source 210 are completely eliminated, making it particularly suitable for process environments with ultra-high vacuum, high cleanliness, or corrosive atmospheres.

[0151] Furthermore, the heat dissipation system of the light source 210 can be designed independently of the stage's heating system, ensuring that the two do not interfere with each other and guaranteeing precise control of the process temperature. In addition, replacing or repairing the light source 210 module does not require opening or affecting process chamber A and the stage body, reducing maintenance costs and downtime.

[0152] It should be noted that in the processing equipment, the second stage 120 is usually located above the photovoltaic module 10, that is, as an upper stage. In the encapsulation or hot pressing process, it is used as a movable pressure plate or movable shelf to directly apply pressure to the photovoltaic module 10. When the light source 210 is integrated into the second stage 120 to provide vertical illumination, its structural design must meet the requirements of mechanical pressure resistance as well as optical light transmission.

[0153] Therefore, in some embodiments, such as Figure 10 and Figure 11As shown, a light-transmitting structure 123 can be provided on the pressure plate 121 or shelf 122 of the second stage 120 in the area corresponding to the illumination path of the light source 210 to ensure that light can pass through effectively while pressure is applied. For example, one or more through holes 123' can be processed on the body of the pressure plate 121 or shelf 122 in the area where the photovoltaic module 10 needs to be illuminated.

[0154] For example, a light-transmitting window block 124 made of a high-strength, high-transmittance material can be embedded in the through-hole 123'. The light-transmitting window block 124 needs to have high light transmittance, high temperature resistance, and high mechanical strength and hardness. For example, the light-transmitting window block 124 can be made of optical-grade quartz glass, sapphire, or high-strength transparent ceramic. Of course, it is understood that the formation method of the light-transmitting structure 123 on the pressure plate 121 or the shelf 122 is not limited to this.

[0155] In addition, such as Figure 8 and Figure 9 As shown, when the light source 210 is placed on the first stage 110, the photovoltaic module 10 is positioned in the second direction Y, and the light-transmitting substrate 12 is located on the side of the photoactive layer 11 near the first stage 110. Figure 10 and Figure 11 As shown, when the light source 210 is placed on the second stage 120, the photovoltaic module 10 is placed in the second direction Y, and the light-transmitting substrate 12 is located on the side of the photoactive layer 11 away from the first stage 110.

[0156] Furthermore, when incident perpendicularly, such as Figure 10 and Figure 11 As shown, the illumination unit 200 further includes a reflective structure 220, which is disposed in the process chamber A and located on the side of the light-transmitting substrate 12 away from the photoactive layer 11. The reflective surface of the reflective structure 220 faces the light-incident side of the photoactive layer 11 and the light source 210, so as to reflect the light from the light source 210 to the photoactive layer 11.

[0157] In the above-described scheme, a reflective structure 220 is also provided inside the process chamber A. This reflective structure 220 is located on the side of the light-transmitting substrate 12 facing away from the photoactive layer 11, and is positioned within the optical path between the light source 210 and the light-transmitting substrate 12. Thus, the reflective structure 220 can capture and redirect light. Specifically, the reflective structure 220 guides light that might otherwise pass directly through the light-transmitting substrate 12 without absorption, or that would be scattered due to poor illumination angles, back to the photoactive layer 11 via the reflective surface. This enhances the effective luminous flux reaching the photoactive layer 11 without increasing the power of the light source 210, reducing energy consumption. Furthermore, for the side-incident light source 210 layout, a gradient in illumination intensity may occur between the center and edge regions of the battery. The reflective structure 220, through its curved or angled reflective surface design, can redistribute the light. For example, excess light illuminating the central area can be reflected to the edge, or side-incident light can be reflected and enter the battery at a more perpendicular angle, thereby effectively homogenizing the light intensity distribution on the entire surface of the photoactive layer 11, eliminating local weak light areas, and ensuring uniform and consistent material performance.

[0158] Furthermore, the reflective structure 220 reduces the stringent requirements on the position and angle of the light source 210. Even if the initial light emission direction of the light source 210 is not optimal, or the installation position of the light source 210 is limited, the reflective structure 220 can act as an optical corrector to adjust and converge light from different directions to the target area, thereby improving the fault tolerance of the installation of the light source 210 and reducing the difficulty and cost of manufacturing and assembly.

[0159] In addition, the direct light from the point light source 210 or the line light source 210 can be transformed into a more diffuse surface light source 210 through the diffuse reflection of the reflective structure 220 or a specific design. This helps to avoid the formation of strong local light intensity peaks on the photoactive layer 11, thereby avoiding damage to the material caused by local overheating or uneven reaction that may occur under high-temperature processing conditions due to local light intensity peaks.

[0160] In addition, for photovoltaic modules 10 with large areas or complex internal structures, the reflective structure 220 can guide light to areas that may be blocked or corners that are difficult to be directly illuminated, ensuring that every sub-cell and every photoactive layer 11 on the module can receive sufficient light, thereby ensuring the overall improvement of the performance of the entire module.

[0161] In some embodiments, the reflective structure 220 includes at least one of the following:

[0162] Reflective coating 221 is applied to the inner wall surface of process chamber A;

[0163] A reflective film layer 222 is formed on the surface of the light-transmitting substrate 12 facing away from the photoactive layer 11; and / or,

[0164] A reflector 223 is independently installed in process chamber A.

[0165] In some embodiments, the reflective structure 220 includes a reflective coating 221 disposed on the inner wall surface of the process chamber A. In this way, the inner wall surface of the process chamber A is itself transformed into a reflective structure 220 by coating or depositing a high-reflectivity material, such as a mirror aluminum coating, a ceramic reflective coating, or a Teflon white coating, onto the plate constituting the inner wall of the chamber, making the entire or part of the inner wall of the chamber a diffuse or specular reflective surface. This eliminates the need for additional internal space within the chamber and the requirement for separate reflective components.

[0166] In other embodiments, the reflective structure 220 includes a reflective film layer 222 formed on the surface of the light-transmitting substrate 12 facing away from the photoactive layer 11. This allows the reflective function to be directly integrated into a component of the photovoltaic module 10. For example, a partially transmissive, partially reflective film layer, or a reflective film at a specific angle, can be deposited or attached to the side of the light-transmitting substrate 12 facing away from the photoactive layer 11. This alters the optical properties of the light-transmitting substrate 12 itself, giving it both light-transmitting and reflective functions.

[0167] In other embodiments, the reflective structure 220 may further include a reflective plate 223 independently disposed within the process chamber A. Thus, the reflective structure 220 can be an independent physical component additionally disposed within the process chamber A, and can be a flat metal plate or a metal plate with a specific curvature, a glass plate with a reflective film, or a polymer plate, etc. The position, angle, shape, and curvature of the reflective plate 223 can be independently designed and flexibly adjusted according to process requirements, and can also be designed to be movable or replaceable.

[0168] For example, the process equipment also includes an isolation member 223' disposed between the table surface of the first platform 110 and the photovoltaic module 10, wherein the surface of the isolation member 223' facing the photovoltaic module 10 has a reflective layer, so that the isolation member 223' is formed as a reflector 223.

[0169] The isolation component 223' is a common auxiliary component in photovoltaic manufacturing processes. It can refer to a pad or membrane laid between the platform and the photovoltaic module 10 to be processed, such as a silicone pad, Teflon cloth, fiberglass cloth, or high-temperature resistant rubber sheet. The function of the isolation component 223' is to isolate, protect, and buffer, preventing damage between the platform and the photovoltaic module 10, evenly distributing lamination pressure, and facilitating the separation and removal of the photovoltaic module 10 after processing.

[0170] In the above solution, the isolation member 223' was modified by processing or laminating a layer of reflective material, such as evaporated aluminum film, coated with white high-reflectivity ceramic coating, or laminated with a mirror reflective film, on its surface facing the photovoltaic module 10. This allows the isolation member 223' to not only serve an isolation function, but also, since it is located below the photovoltaic module 10, its reflective surface can face the light-transmitting substrate 12 and the photoactive layer 11, thus being reused as a reflector 223. This design avoids introducing additional independent components into the process chamber A, and instead achieves the reflection function by reusing existing necessary consumables, thus avoiding the structural complexity, space occupation, and additional costs associated with designing and installing a separate reflector 223. Furthermore, as an isolation member 223' laid on the platform, it can achieve a large-area, seamless, and tight fit with the photovoltaic module 10. This fit ensures that the light reflected from its surface can return to the photovoltaic module 10 relatively evenly.

[0171] It should be noted that the above describes several ways of setting the reflective structure 220. These ways of setting are referred to as reflective coating 221, reflective film layer 222 and reflective plate 223, respectively. In different embodiments of this disclosure, any combination of one, two or all three ways can be used.

[0172] For example, when multiple reflection methods are combined, a multi-angle composite reflection optical path system can be formed. For instance, when a combination of reflective film 222 and reflective coating 221 is used, reflective film 222 is responsible for efficiently recovering the Y-direction scattered light, while reflective coating 221 on the inner wall of the cavity is responsible for collecting and redistributing scattered light from all other directions. This improves the capture and reuse of light energy within the process cavity. When a combination of reflector 223 and reflective coating 221 is used, reflector 223 ensures that the downward light is effectively returned, while the reflective coating 221 on the side and top walls of process cavity A forms a surrounding reflective cavity, greatly enhancing the multiple reflection effect of light.

[0173] Different photovoltaic processes (such as encapsulation, coating, and annealing) have different requirements regarding the intensity, uniformity, and angular distribution of light. The arrangement of the aforementioned reflective structures 220 allows for the configuration of a reflective optical system according to specific needs. Furthermore, the presence of multiple reflective structures 220 can mitigate the risk of process failure due to the failure of a single reflective surface.

[0174] In addition, in some exemplary embodiments, the illumination unit 200 may further include a light guide structure 230, which is disposed in the process chamber A and located between the light-incident side of the photovoltaic module 10 and the light source 210. The light guide structure 230 is used to uniformly irradiate the photoactive layer 11 with the light provided by the light source 210.

[0175] Light sources 210 (especially LEDs, lasers, etc.) have strong directionality and uneven light spots. Direct irradiation will cause large differences in the light intensity received by different areas on the surface of the photovoltaic module 10, which will lead to uneven treatment of photoactive materials.

[0176] In the above scheme, a light guide structure 230 is set inside the process chamber A. The light guide structure 230 is located between the light-incident side of the photovoltaic module 10 and the light source 210. It can receive the original light from the light source 210. The light guide structure 230, through its internal optical design, such as microstructures and scattering particles, disrupts the original light, so that it is remixed on the light-emitting surface and emitted uniformly, thereby ensuring that all areas of the entire effective area of ​​the photoactive layer 11 receive light of consistent intensity.

[0177] Furthermore, without the light guide structure 230, a more complex and precise array design would be required for the position, number, and arrangement of the light sources 210. By setting up the light guide structure 230, the arrangement of the light sources 210 can be made more flexible; light only needs to be coupled into the light guide structure 230, and the final illumination effect is mainly determined by the optical design of the light guide structure 230.

[0178] Furthermore, the light guide structure 230 can effectively extend the light emitted from the smaller area light source 210 to a larger target area, reducing the number or power of the light source 210 used to cover a large area. In addition, the light guide structure 230 can also precisely control the angular distribution of the emitted light by designing the microstructure of its light-emitting surface, thus adapting to the needs of different photovoltaic materials and processes.

[0179] For example, as shown in the figure, the light guide structure 230 includes a plate-shaped light guide 231 that is independently disposed relative to the photovoltaic module 10. The plate-shaped light guide 231 has an incident light surface and an exit light surface disposed adjacent to each other. The incident light surface faces the light source 210, and the exit light surface faces the photoactive layer 11.

[0180] In the above scheme, the light guide structure 230 is a physical component independent of the photovoltaic module 10. It can be made of transparent optical materials, such as quartz glass, optical acrylic (PMMA), or polycarbonate (PC). The plate-shaped light guide 231 can effectively achieve uniform illumination of the large-area surface light source 210. It utilizes the principle of total internal reflection to guide light, and through processed microprism arrays, diffusion dots, or light scattering materials on the light-emitting surface, it ensures that the light escapes at a specific angle or uniformly. This ensures that the light emitted from its light-emitting surface has high uniformity throughout the entire surface. Furthermore, the plate-shaped light guide 231 is easy to install, fix, and align precisely in the equipment, does not depend on the surface characteristics of the photovoltaic module 10, and can maintain its flatness, ensuring stable parallelism with the photovoltaic module 10.

[0181] It should be understood that the specific construction of the light guide structure 230 is not limited to this. For example, the light guide structure 230 can also adopt a light guide column array, an optical lens array, etc.

[0182] Furthermore, it should be noted that, in practical applications, either the side-incident or vertical-incident optical layouts provided in this disclosure can be combined with any one of the two optical layouts, depending on the specific process objectives, equipment structure, and characteristics of the photovoltaic module 10.

[0183] For example, using only side incidence is suitable for scenarios where priority is given to enhancing the edges of the battery or where space is limited at the top or bottom of the device. Using only vertical incidence is suitable for scenarios that require maximum light coupling efficiency, simulate standard lighting conditions, or perform large-area uniform processing.

[0184] Combining lateral and vertical incident light enables omnidirectional illumination. For example, vertical incident light can be used to provide uniform main illumination to the main area of ​​the photovoltaic module 10. Simultaneously, lateral incident light can be used to provide enhanced auxiliary illumination to the edges of the photovoltaic module 10 or areas with structural shading. This combination can solve the problem of shadowed or weak areas that may exist in unidirectional illumination, ensuring that the photoactive layer 11 receives effective light modulation in every part of the three-dimensional space, thereby achieving a uniform improvement in the overall performance of the device.

[0185] Furthermore, for example, the light provided by the illumination unit 200 is visible light with a wavelength in the range of 400 nm to 780 nm. For example, visible light includes one monochromatic light selected from yellow light, white light, green light, and red light, or a mixture of at least two types of light.

[0186] In this way, the emission wavelength of the light source 210 is limited to the visible light band, which can provide photon energy that matches the absorption characteristics of the photoactive layer 11 in the photovoltaic module 10, while avoiding the use of ultraviolet light, which may cause photochemical damage to the material or encapsulated polymer, or infrared light with significant thermal effects.

[0187] In practical applications, the spectral composition of visible light provided by the illumination unit 200 can be precisely designed and flexibly selected according to process requirements. For example, monochromatic lithography provides the purest photon energy input, facilitating the study of the effect mechanism of specific wavelengths on certain types of defects in photoactive materials. Mixed light, similar to sunlight, can provide comprehensive and balanced photon injection to the photoactive layer 11, helping to simultaneously address multiple types of defects in the material.

[0188] In some embodiments, the light source 210 can be configured to have dynamic spectral adjustment capabilities. For example, by controlling the electrical signals of different monochromatic light sources 210, or by using tunable filters in the optical path, the illumination spectrum can be changed over time according to a preset program during the same process. Since different photovoltaic materials have different absorption spectra and defect energy levels, the tunable spectrum can be adapted to the most effective illumination parameters for each material.

[0189] The processing equipment can be thermoforming equipment or cooling equipment.

[0190] For example, the hot-press packaging equipment includes a laminator or a plate press, and at least one of the first stage 110 and the second stage 120 has a heating structure 130 for providing the high-temperature environment required for packaging while applying pressure. This allows for simultaneous illumination during the high-temperature pressurization stage of the packaging process, effectively suppressing efficiency loss of photoactive materials such as perovskite, and preserving or even improving battery performance while achieving reliable packaging. Cooling equipment refers to equipment that controls the cooling of the photovoltaic module 10 after thermal processes (such as packaging and annealing). The cooling equipment may integrate an illumination unit 200, allowing the module to remain under illumination during the initial or continuous cooling process, thus ensuring the stable solidification of the material structure during cooling.

[0191] However, the process equipment provided in this embodiment is not limited to this, and may also be at least one of deposition equipment, coating equipment, vapor deposition equipment, baking equipment, and drying equipment.

[0192] For example, in deposition equipment such as atomic layer deposition (ALD) and chemical vapor deposition (CVD), illumination can be applied simultaneously during the deposition of functional layers, such as electron transport layers, hole transport layers, buffer layers, or encapsulation barrier layers, thereby improving the properties of the thin film. Similarly, in coating equipment such as magnetron sputtering, illumination can be used to improve the properties of thin films when depositing conductive or functional layers. In evaporation equipment such as vacuum thermal evaporation, illumination can be used to control molecular arrangement or the film formation process when evaporating organic materials or metals. In baking equipment such as annealing furnaces, illumination can be applied simultaneously during heat treatment of thin films to guide crystal growth and defect passivation. Finally, in drying equipment such as vacuum drying ovens, illumination can be used to stabilize the material structure when removing solvents or moisture.

[0193] In addition, such as Figure 18 As shown in the embodiments of this disclosure, a process method is provided, the method including the following steps:

[0194] Step S01: Place the photovoltaic module 10 to be processed in the process chamber A of the first process processing equipment, wherein the photovoltaic module 10 has a photoactive layer 11, and the first process processing equipment is the process processing equipment provided in the embodiments of this disclosure.

[0195] Step S02: Perform a first process processing using a first process processing device, wherein during the first process processing, control the working state of the illumination unit 200 to provide illumination to the photoactive layer 11.

[0196] Obviously, the process method provided in this embodiment also has the beneficial effects of the process apparatus provided in this embodiment, and will not be described in detail here.

[0197] For example, when the first process equipment is a hot-press packaging equipment, the first process includes a heating and pressurizing step; wherein, in the heating and pressurizing step, the ambient temperature of the photovoltaic module 10 is greater than or equal to 100°C, and the irradiation unit 200 continuously irradiates from the beginning of the heating and pressurizing step until the end of the heating and pressurizing step.

[0198] In the above scheme, when the first process equipment is a thermo-pressing encapsulation device (such as a laminator or plate press), the core of the first process is the heating and pressurizing step. The purpose of this step is to melt, flow, and cross-link the encapsulating film 15 to achieve a reliable seal for the photovoltaic module 10. In the heating and pressurizing step, the ambient temperature of the photovoltaic module is set and maintained at or above 100°C, for example, between 120°C and 150°C, to ensure sufficient cross-linking of the encapsulating film. Simultaneously, the equipment applies specific pressure to the photovoltaic module 10 to ensure tight adhesion of the layers. For example, the pressure can be 0.1 to 1 atmosphere.

[0199] The operating timing of the illumination unit 200 must be synchronized with the aforementioned heating and pressurizing steps. Specifically, the illumination unit 200 is controlled to be activated or synchronously activated at least from the start of the heating and pressurizing step, and to continuously irradiate until the heating and pressurizing step ends. This ensures that the material is always in an irradiated environment throughout the entire high-risk temperature range, achieving effective suppression of the defect generation process throughout.

[0200] It should be noted that the illumination unit 200 can be turned on slightly earlier than the heating and pressurizing step, and continue to irradiate for a period of time after the heating and pressurizing step is completed.

[0201] For example, the method further includes, after completing the first process, the following:

[0202] Step S03: Remove the photovoltaic module 10 and transfer it to the second process processing equipment for the second process processing. The second process processing equipment includes a cooling device, and the second process processing includes a cooling step. In the cooling step, at least in the initial stage of cooling, the light-absorbing layer of the photovoltaic module 10 continues to be exposed to the light environment for cooling.

[0203] In the above scheme, the photovoltaic module 10, which has undergone high-temperature treatment but is still in a high-temperature state, is removed from the process chamber of the first process equipment (such as a laminator or plate press) and transferred to a cooling device. The cooling method of this cooling device can be natural cooling, forced air cooling, water cooling, or other active cooling methods. During the cooling step, at least in the initial stage of cooling, the light-absorbing layer of the photovoltaic module 10 continues to be exposed to sunlight for cooling. The initial cooling stage refers to the period during which the photovoltaic module 10 cools from a high process temperature (e.g., 150°C) to a relatively stable intermediate temperature (e.g., below 80°C or 100°C). Thus, if the sunlight is suddenly removed during subsequent cooling, the photoactive layer 11 is prone to reverting to a dark state. During the cooling relaxation process, the material system may be unable to maintain or consolidate this optimized state due to the lack of continuous light energy, and may even regress to a structure with more energy level defects, resulting in partial or complete loss of the high-temperature light treatment effect. Therefore, during the cooling process, at least in the initial stage of cooling, the photoactive layer 11 of the component is kept illuminated to lock in the effect of high-temperature illumination, guide the material structure to solidify in an orderly manner, and thus improve the final performance and stability of the device.

[0204] For example, the cooling device employs the process equipment of this disclosure embodiment, and the lighting environment is provided by the lighting unit 200 in the cooling device; or, the lighting environment is provided by natural light.

[0205] In some embodiments of the above solutions, during the cooling step, the initial lighting environment can be achieved by constructing the cooling device itself using the process equipment of this disclosure. That is, the cooling device integrates a lighting unit 200, allowing the required lighting environment to be actively provided by its built-in or external light source 210 while its execution unit 100 performs the cooling process. In other embodiments, the lighting environment is directly provided by natural light. For example, in a natural cooling method, the lighting environment can be directly provided by natural light. This solution is extremely low-cost and simple to implement, making it particularly suitable for applications where light intensity control requirements are not high.

[0206] In the various method embodiments of this disclosure, the sequence number of each step is not intended to limit the order of the steps. For those skilled in the art, any changes in the order of the steps are within the scope of protection of this disclosure without any creative effort.

[0207] The process equipment and methods provided in this disclosure are used as examples, and a traditional encapsulation method under no-light conditions is used as a control example. The electrical performance of the encapsulated components is tested under standard test conditions. The heating and pressurization conditions in the examples and control examples are completely identical; the only difference is that the examples are encapsulated under light, while the control examples are encapsulated under no-light conditions. The standard test conditions are: after lamination and cooling to room temperature (25°C), the current-voltage characteristics and photoelectric conversion efficiency are tested under standard sunlight (cell temperature 25°C, spectrum 380~800nm, irradiance 1000 W / m²). The test results are as follows: Figure 19 As shown.

[0208] from Figure 19 As can be seen from the comparative experiments of the control examples and the embodiments, it is fully demonstrated that compared with the traditional encapsulation technology in the absence of light, the process equipment and process method disclosed herein can significantly improve the final output efficiency of the encapsulated solar cell module (an absolute increase of 0.47%).

[0209] It should be noted that the various embodiments in this specification are described in a progressive manner, and the same or similar parts between the various embodiments can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments. In particular, since the embodiments are basically similar to the product embodiments, the descriptions are relatively simple, and the relevant parts can be referred to the descriptions of the product embodiments.

[0210] In the description of the above embodiments, specific features, structures, materials, or characteristics may be combined in any suitable manner in one or more embodiments or examples.

[0211] The above description is merely a specific embodiment of this disclosure, but the scope of protection of this disclosure is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this disclosure should be included within the scope of protection of this disclosure. Therefore, the scope of protection of this disclosure should be determined by the scope of the claims.

[0212] The embodiments of this application have been described above with reference to the accompanying drawings. However, this application is not limited to the specific embodiments described above. The specific embodiments described above are merely illustrative and not restrictive. Those skilled in the art can make many other forms under the guidance of this application without departing from the spirit and scope of the claims, and all of these forms are within the protection scope of this application.

Claims

1. A process equipment, characterized in that, A process for processing photovoltaic modules, wherein the photovoltaic modules have a photoactive layer; the processing equipment includes: Process chambers for housing the photovoltaic modules; An execution unit is configured to perform process processing on the photovoltaic module within the process chamber; and An illumination unit includes at least one light source, at least one portion or all of which is located inside and / or outside the process chamber, and the illumination unit is configured to provide illumination to the photoactive layer inside the process chamber during the process.

2. The processing equipment according to claim 1, characterized in that, The execution unit includes: a first platform and a second platform arranged opposite to each other, the first platform and the second platform together forming the process chamber.

3. The processing equipment according to claim 2, characterized in that, The photovoltaic module includes a light-transmitting substrate stacked with the photoactive layer to form the light-incident side of the photoactive layer; wherein the irradiation unit is configured to apply light to the photoactive layer through the light-transmitting substrate.

4. The processing equipment according to claim 1, characterized in that, When the light source is located outside the process chamber, a light-transmitting area is provided on the wall of the process chamber, and at least part of the light emitted by the light source can pass through the light-transmitting area and enter the process chamber.

5. The processing equipment according to claim 1, characterized in that, When the light source is located inside the process chamber The side wall of the process chamber is provided with a receiving portion, and at least part of the light source is embedded in the receiving portion; or, At least a portion of the light source is fixed to the inner surface of the sidewall; or, At least some of the light sources are arranged adjacent to the photovoltaic modules.

6. The processing equipment according to claim 5, characterized in that, The receiving portion includes a recess or a transparent window provided in the wall of the process chamber.

7. The processing equipment according to claim 3, characterized in that, At least a portion of the light source's main optical axis has its light emission direction parallel to the surface of the first stage, and the light emission direction points towards the light-transmitting substrate.

8. The processing equipment according to claim 7, characterized in that, When at least a portion of the light source is arranged adjacent to the photovoltaic module, the light source is located at least outside the light-transmitting substrate in a first direction parallel to the surface of the first platform, and in a second direction perpendicular to the surface of the first platform, the illumination width of the light source is greater than or equal to the thickness of the light-transmitting substrate.

9. The processing equipment according to claim 2, characterized in that, At least a portion of the light source's main optical axis has its light emission direction perpendicular to the surface of the first stage and toward the light-transmitting substrate of the photovoltaic module.

10. The processing equipment according to claim 9, characterized in that, At least a portion of the light source is embedded in the receiving portion of the first stage and / or the second stage; or, At least a portion of the bearing area of ​​the first stage and / or the second stage is a light-transmitting area, and at least a portion of the light source is correspondingly disposed on the side of the light-transmitting area opposite to the process chamber.

11. The processing equipment according to claim 1, characterized in that, The illumination unit further includes a light guide structure, which is disposed in the process chamber and located between the light-incident side of the photovoltaic module and the light source. The light guide structure is used to uniformly irradiate the photoactive layer with light provided by the light source.

12. The processing equipment according to claim 11, characterized in that, The light guide structure includes a plate-shaped light guide that is independently disposed relative to the photovoltaic module. The plate-shaped light guide has an incident light surface and an exit light surface that are disposed adjacent to each other. The incident light surface faces the light source, and the exit light surface faces the photoactive layer.

13. The processing equipment according to claim 3, characterized in that, The illumination unit further includes a reflective structure, which is disposed in the process chamber and located on the side of the light-transmitting substrate facing away from the photoactive layer. The reflective surface of the reflective structure faces the light-incident side of the photoactive layer and the light source, so as to reflect light from the light source to the photoactive layer.

14. The processing equipment according to claim 13, characterized in that, The reflective structure includes at least one of the following: A reflective coating is applied to the inner wall surface of the process chamber; A reflective film layer formed on the surface of the light-transmitting substrate facing away from the photoactive layer; and / or, A reflector independently installed within the process chamber.

15. The processing equipment according to claim 14, characterized in that, The processing equipment further includes an isolation member disposed between the platform of the first stage and the photovoltaic module. The surface of the isolation member facing the photovoltaic module has a reflective layer, so that the isolation member is formed as the reflector.

16. The processing equipment according to claim 1, characterized in that, The light provided by the illumination unit is visible light with a wavelength in the range of 400nm to 780nm.

17. The processing equipment according to claim 16, characterized in that, The visible light includes one monochromatic light or a mixture of at least two of the following: yellow light, white light, green light, and red light.

18. The processing equipment according to claim 1, characterized in that, The process equipment includes at least one of the following: hot pressing packaging equipment, cooling equipment, deposition equipment, coating equipment, vapor deposition equipment, baking equipment, and drying equipment.

19. The processing equipment according to claim 18, characterized in that, When the process equipment is a thermoforming packaging equipment, the execution unit includes a first stage and a second stage arranged opposite to each other, and at least one of the first stage and the second stage has a heating structure; when the process equipment is a cooling equipment, the execution unit includes a first stage and a second stage arranged opposite to each other, and at least one of the first stage and the second stage has a cooling structure.

20. A process method, characterized in that, The method includes the following steps: The photovoltaic module to be processed is placed in the process chamber of the first process processing equipment, wherein the photovoltaic module has a photoactive layer, and the first process processing equipment is the process processing equipment as described in any one of claims 1 to 19. The first process is performed by the first process processing equipment, wherein during the first process processing, the working state of the illumination unit is controlled to provide illumination to the photoactive layer.

21. The processing method according to claim 20, characterized in that, When the first process equipment is a hot-press packaging equipment, the first process includes a heating and pressurizing step; wherein, in the heating and pressurizing step, the ambient temperature of the photovoltaic module is greater than or equal to 100°C, and the irradiation unit continuously irradiates from the beginning of the heating and pressurizing step until the end of the heating and pressurizing step.

22. The processing method according to claim 20, characterized in that, The method further includes, after completing the first process, the following: The photovoltaic module is removed and transferred to a second processing device for a second processing step. The second processing device is a cooling device, and the second processing step includes a cooling step. In the cooling step, at least in the initial stage of cooling, the light-absorbing layer of the photovoltaic module is kept exposed to the light environment for cooling.

23. The processing method according to claim 22, characterized in that, The cooling device employs the process equipment as described in any one of claims 1 to 20, and the lighting environment is provided by the lighting unit in the cooling device; or, the lighting environment is provided by natural light.

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