Substrate clamping and overturning mechanism

Abstract

The invention discloses a substrate clamping and overturning mechanism, which comprises a machine table; the jacking conveying module is arranged on one side of the top of the machine table and used for conveying an external substrate to a preset position and jacking the substrate; the bearing module is arranged on the other side of the top of the machine table and used for bearing the overturned substrate; and the clamping and overturning module is arranged between the jacking and conveying module and the bearing module and used for clamping the base plate jacked by the jacking and conveying module, overturning the base plate by 180 degrees and transferring the base plate to the bearing module. A clamping type page turning mode is adopted, products are directly clamped, the position requirement precision is low when the products are turned over, the products can be grabbed from a conveying rail, positioned and then placed on a platform to be precisely positioned, and the subsequent precision requirement is met. According to the mode, the requirement for the precision of the front section is low, complex action avoiding is not needed, and the manufacturing cost and manufacturing difficulty of the overturning process section are greatly reduced.

Description

Technical Field

[0001] This invention relates to the field of substrate clamping and flipping technology, and particularly to a substrate clamping and flipping mechanism. Background Technology

[0002] In automated process lines for semiconductor IC substrates, it is often necessary to process the front and back sides of the product, requiring the product to be flipped at a certain stage.

[0003] In existing technologies, a higher-precision method involves a robotic arm using vacuum adsorption to place a carrier plate on a vacuum platform, which then adsorbs and flips it. However, this method is only suitable for movement between the robotic arm and the platform. Both the robotic arm and the vacuum system contribute to high equipment costs. A lower-precision method uses a track conveyor, where the product is transported to the flipping station via a belt and then rotated 180° in place for flipping. However, in-situ flipping requires multiple power sources to coordinate and avoid obstacles, making the process complex and compromising subsequent accuracy. Summary of the Invention

[0004] According to an embodiment of the present invention, a substrate clamping and flipping mechanism is provided, comprising: Machine tool; The lifting and conveying module is located on one side of the top of the machine and is used to transport the external substrate to a preset position and lift the substrate. The receiving module is located on the other side of the top of the machine and is used to receive the flipped substrate. The clamping and flipping module is located between the lifting and conveying module and the receiving module. It is used to clamp the substrate lifted by the lifting and conveying module and flip it 180° to transfer it to the receiving module.

[0005] Furthermore, the lifting and conveying module includes: A conveyor frame is installed on one side of the top of the machine base; A belt conveyor mechanism, mounted on a conveyor frame, is used to transport substrates. A lifting device, which is mounted on the conveyor frame; The lifting platform is located at the output end of the lifting device and is used for lifting under the action of the lifting device; Two blocking blocks are located at the rear end of the lifting platform.

[0006] Furthermore, the belt transmission mechanism includes: The drive shaft is rotatably connected to the conveyor frame; The drive motor is mounted on the conveyor and connected to one end of the drive shaft, driving the drive shaft to rotate. A pair of belt drive mechanisms, with the driving wheels of the pair of belt mechanisms respectively sleeved on both ends of the drive shaft, and the driven wheels of the pair of belt mechanisms respectively rotatably arranged on both sides inside the conveyor frame.

[0007] Furthermore, the receiving module includes: The aligning table is located on the other side of the top of the machine. Four support columns are set at the top four corners of the entire column; The detection sensor is set on the alignment table to detect whether there is a substrate on the four support columns.

[0008] Furthermore, the top of the support column is provided with a guide surface and a bearing surface.

[0009] Furthermore, the clamping and flipping module includes: A flipping unit is installed between the lifting and conveying module and the receiving module to provide the driving force for the flipping motion. The clamping unit is connected to the output of the flipping unit and is used to clamp the substrate.

[0010] Furthermore, the flipping unit includes: A pair of fixed frames are mounted on the machine base; A support frame is positioned between a pair of fixed frames. A rotating shaft is rotatably connected to a pair of fixed frames and support frames; The driver's output is connected to the rotating shaft, driving the shaft to rotate. A pair of flipping rods, one end of which is sleeved on a rotating shaft, and the pair of flipping rods are connected to the clamping unit.

[0011] Furthermore, the flip unit also includes: The test piece is mounted on the rotating shaft. A flip detection sensor is mounted on one of the fixed brackets and is used to detect the workpiece under test.

[0012] Furthermore, the flipping unit also includes a limiting member, which is disposed on a pair of fixed brackets and is used to mechanically limit the flipping angle of the clamping unit.

[0013] Furthermore, the clamping unit includes: A clamping platform, which is connected to a pair of flipping rods; A clamping cylinder is located on the top of the clamping table; A pair of transmission plates are slidably connected to the top of the clamping table, and one end of the pair of transmission plates is connected to the output end of the clamping cylinder. Two pairs of connecting rods, one pair of which is located at the other end of one of the transmission plates and passes through the clamping table, and the other pair of connecting rods is located at the other end of the other transmission plate and passes through the clamping table; Two first clamps, one of which is set on one pair of connecting rods, and the other first clamp is set on another pair of connecting rods; Two clamping cylinders are located at both ends of the top of the clamping platform; Two second clamps are connected to the output ends of two clamping cylinders respectively, and the clamping end of one second clamp is opposite to one of the first clamps, and the clamping end of the other second clamp is opposite to the other first clamp.

[0014] According to an embodiment of the present invention, a substrate clamping and flipping mechanism adopts a gripping-style book-flipping method to directly grip the product. This method has low positional accuracy requirements during the flipping process, allowing the substrate to be picked up from a transport track, positioned, and then placed on a platform for precise positioning to meet subsequent accuracy requirements. This approach has low precision requirements in the initial stage and eliminates the need for complex avoidance maneuvers, significantly reducing the manufacturing cost and difficulty of the flipping process.

[0015] It should be understood that both the foregoing general description and the following detailed description are exemplary and intended to provide further illustration of the claimed technology. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of a substrate clamping and flipping mechanism according to an embodiment of the present invention. Figure 1 .

[0017] Figure 2 This is a three-dimensional structural diagram of a substrate clamping and flipping mechanism according to an embodiment of the present invention. Figure 2 .

[0018] Figure 3 This is a front view schematic diagram of a substrate clamping and flipping mechanism according to an embodiment of the present invention.

[0019] Figure 4 for Figure 3 A magnified view of a portion of point a.

[0020] Figure 5 This is a three-dimensional structural diagram of the lifting and conveying module in a substrate clamping and flipping mechanism according to an embodiment of the present invention. Figure 1 .

[0021] Figure 6 This is a three-dimensional structural diagram of the lifting and conveying module in a substrate clamping and flipping mechanism according to an embodiment of the present invention. Figure 2 .

[0022] Figure 7 This is a three-dimensional structural diagram of the receiving module in a substrate clamping and flipping mechanism according to an embodiment of the present invention.

[0023] Figure 8 This is a three-dimensional structural diagram of a clamping and flipping module in a substrate clamping and flipping mechanism according to an embodiment of the present invention.

[0024] Figure 9 This is a three-dimensional structural diagram of a clamping unit in a substrate clamping and flipping mechanism according to an embodiment of the present invention. Figure 1 .

[0025] Figure 10 This is a three-dimensional structural diagram of a clamping unit in a substrate clamping and flipping mechanism according to an embodiment of the present invention. Figure 2 .

[0026] Figure 11 This is a three-dimensional structural diagram of a flipping unit in a substrate clamping and flipping mechanism according to an embodiment of the present invention. Detailed Implementation

[0027] The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings, further illustrating the present invention.

[0028] First, combine Figures 1-11 This invention describes a substrate clamping and flipping mechanism for flipping a substrate 500, which has a wide range of applications.

[0029] like Figures 1-11 As shown, an embodiment of the present invention provides a substrate clamping and flipping mechanism, comprising a machine base 100, a lifting and conveying module 200, a receiving module 300, and a clamping and flipping module 400.

[0030] Specifically, such as Figures 1-6 As shown, the lifting and conveying module 200 is located on one side of the top of the machine base 100, used to transport the external substrate 500 to a preset position and lift the substrate 500. The lifting and conveying module 200 includes: a conveyor frame 201, a belt conveyor mechanism, a lifter 203, a lifting platform 204, and two blocking blocks 205. The conveyor frame 201 is located on one side of the top of the machine base 100; the belt conveyor mechanism is located on the conveyor frame 201 and is used to transport the substrate 500; the lifter 203 is located on the conveyor frame 201, and the lifter 203 can be a cylinder; the lifting platform 204 is located at the output end of the lifter 203 and is lifted under the action of the lifter 203; the two blocking blocks 205 are located at the tail end of the lifting platform 204 and are used to block and limit the substrate 500 transported by the belt conveyor mechanism.

[0031] Furthermore, such as Figures 1-2As shown in Figures 5 and 6, the belt conveyor mechanism includes: a drive shaft 2021, a drive motor 2022, and a pair of belt drive mechanisms 2023. The drive shaft 2021 is rotatably connected to the conveyor frame 201; the drive motor 2022 is mounted on the conveyor and connected to one end of the drive shaft 2021, driving the drive shaft 2021 to rotate; the driving wheels of the pair of belt mechanisms are respectively sleeved on both ends of the drive shaft 2021, and the driven wheels of the pair of belt mechanisms are rotatably mounted on both sides inside the conveyor frame 201. By controlling the operation of the drive motor 2022, the drive shaft 2021 is driven to rotate, which in turn drives the pair of belt mechanisms to rotate, thus realizing the conveying of the substrate 500.

[0032] Specifically, such as Figures 1-2 As shown in Figure 7, the receiving module 300 is disposed on the other side of the top of the machine base 100, and is used to receive the flipped substrate 500. The receiving module 300 includes: an aligning table 301, four support columns 302, and a detection sensor 303. The aligning table 301 is disposed on the other side of the top of the machine base 100; the four support columns 302 are disposed at the four corners of the top of the aligning table 301, and the top of the support columns 302 is provided with a guide surface and a receiving surface; the detection sensor 303 is disposed on the aligning table 301, and is used to detect whether there is a substrate 500 on the four support columns 302.

[0033] Specifically, such as Figures 1-2 As shown in Figures 8-11, the clamping and flipping module 400 is disposed between the lifting and conveying module 200 and the receiving module 300. It is used to clamp the substrate 500 lifted by the lifting and conveying module 200 and flip it 180° to transfer it onto the receiving module 300. The clamping and flipping module 400 includes a flipping unit 401 and a clamping unit 402. The flipping unit 401 is disposed between the lifting and conveying module 200 and the receiving module 300 and is used to provide the driving force for the flipping motion. The clamping unit 402 is connected to the output end of the flipping unit 401 and is used to clamp the substrate 500.

[0034] Furthermore, such as Figures 1-2As shown in Figures 8 and 11, the flipping unit 401 includes: a pair of fixed frames 4011, a support frame 4012, a rotating shaft 4013, a driver 4014, and a pair of flipping rods 4015. The pair of fixed frames 4011 are mounted on the machine base 100; the support frame 4012 is positioned between the pair of fixed frames 4011; the rotating shaft 4013 is rotatably connected to the pair of fixed frames 4011 and the support frame 4012; the output end of the driver 4014 is connected to the rotating shaft 4013, driving the rotating shaft 4013 to rotate; the driver 4014 is a combination of a servo motor and a reducer; one end of each pair of flipping rods 4015 is sleeved on the rotating shaft 4013, and the pair of flipping rods 4015 are connected to the clamping unit 402. By controlling the operation of the driver 4014, the rotating shaft 4013 can be rotated, thereby causing the pair of flipping rods 4015 to flip, thus achieving the flipping of the clamping unit 402.

[0035] Furthermore, such as Figures 1-2 As shown in Figures 8 and 11, the flipping unit 401 further includes: a test piece 4016 and a flipping detection sensor 4017. The test piece 4016 is mounted on the rotating shaft 4013, and the test piece 4016 can be a structure with a semi-circular notch on a disc; the flipping detection sensor 4017 is mounted on one of the fixing brackets 4011 and is used to detect the test piece 4016, thereby indirectly determining whether the clamping unit 402 has been flipped into place.

[0036] Furthermore, such as Figures 1-2 As shown in Figures 8 and 11, the flipping unit 401 also includes a limiting member 4018, which is disposed on a pair of fixed frames 4011 and is used to mechanically limit the flipping angle of the clamping unit 402.

[0037] Furthermore, such as Figures 1-2As shown in Figures 8-10, the clamping unit 402 includes: a clamping platform 4021, a clamping cylinder 4022, a pair of transmission plates 4023, two pairs of connecting rods 4024, two first clamps 4025, two pressing cylinders 4026, and two second clamps 4027. The clamping platform 4021 is connected to a pair of flipping rods 4015, and the clamping platform 4021 flips with the pair of flipping rods 4015; the clamping cylinder 4022 is located on the top of the clamping platform 4021; the pair of transmission plates 4023 are slidably connected to the top of the clamping platform 4021, and one end of the pair of transmission plates 4023 is connected to the output end of the clamping cylinder 4022; one pair of connecting rods 4024 is located at the other end of one of the transmission plates 4023 and passes through the clamping platform 4021, and the other pair of connecting rods 4024 is located at the other end of the other transmission plate 4023. The clamping platform 4021 is oriented through the base plate 4021. One first clamp 4025 is mounted on one pair of connecting rods 4024, and the other first clamp 4025 is mounted on another pair of connecting rods 4024. Two clamping cylinders 4026 are positioned at the top ends of the clamping platform 4021. Two second clamps 4027 are connected to the output ends of the two clamping cylinders 4026, with the clamping end of one second clamp 4027 opposite to one of the first clamps 4025, and the clamping end of the other second clamp 4027 opposite to the other first clamp 4025. When the clamping cylinder 4022 operates, it controls a pair of transmission plates 4023 to move closer or further apart, thereby causing the two pairs of connecting rods 4024 to move closer or further apart, and thus causing the two first clamps 4025 to move closer or further apart. When the two clamping cylinders 4026 operate, they drive the two second clamps 4027 to move towards the two pairs of connecting rods 4024, achieving clamping of the base plate 500.

[0038] Working principle: When the substrate 500 needs to be flipped, the drive motor 2022 is controlled to run, which drives the transmission shaft 2021 to rotate, thereby driving a pair of belt mechanisms to rotate, so as to realize the transport of the substrate 500. The substrate 500 is blocked by two blocking blocks 205 on the lifting platform 204 and reaches the lifting position. At this time, the clamping unit 402 is ready above the lifting and conveying module 200, and the lifter 203 drives the lifting platform 204 to rise, lifting the substrate 500 to the clamping height. The clamping cylinder 4022 is controlled to operate, and a pair of transmission plates 4023 move closer to each other, thereby bringing the two pairs of connecting rods 4024 closer to each other, so that the two first clamps 4025 move closer to each other and approach the base plate 500. The lifting device 203 drives the lifting platform 204 to descend, which in turn causes the substrate 500 to descend. The substrate 500 is then held in place by the two first clamps 4025. When the two clamping cylinders 4026 are running, they drive the two second clamps 4027 to move toward the two first clamps 4025, thereby clamping the substrate 500 and completing the clamping action. By controlling the operation of the driver 4014, the rotating shaft 4013 can be rotated, which in turn drives a pair of flipping rods 4015 to flip, thereby achieving a 180° flip of the clamping unit 402 and the substrate 500, and completing the product flipping. When the two clamping cylinders 4026 are running, they drive the two second clamps 4027 to move in the opposite direction to the two first clamps 4025. The base plate 500 descends with the two second clamps 4027 and falls on the four support columns 302. The control clamping cylinder 4022 operates, and a pair of transmission plates 4023 move away from each other, thereby causing the two pairs of connecting rods 4024 to move away from each other, and causing the two first clamps 4025 to move away from each other and open. The subsequent handling mechanism will remove substrate 500; After the substrate 500 is removed, the clamping and flipping module 400 resets and flips 180°, returning to standby above the lifting and conveying module 200. Repeat the above steps.

[0039] Above, refer to Figures 1-11 This invention describes a substrate clamping and flipping mechanism according to an embodiment of the present invention. It employs a gripping-style flipping method to directly grip the product. The mechanism has low positional accuracy requirements during the flipping process; the substrate can be picked up from a transport track, positioned, and then placed on a platform for precise positioning to meet subsequent accuracy requirements. This method has low precision requirements in the initial stage and eliminates the need for complex obstacle avoidance actions, significantly reducing the manufacturing cost and difficulty of the flipping process.

[0040] It should be noted that, in this specification, the terms "comprising," "including," or any other variations thereof are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0041] Although the present invention has been described in detail through the preferred embodiments above, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above description. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A substrate clamping and flipping mechanism, characterized in that, Include: Machine tool; A lifting and conveying module is disposed on one side of the top of the machine tool and is used to convey an external substrate to a preset position and lift the substrate. A receiving module is disposed on the other side of the top of the machine tool and is used to receive the substrate after it has been flipped. A clamping and flipping module is disposed between the lifting and conveying module and the receiving module. It is used to clamp the substrate lifted by the lifting and conveying module and flip it 180° to transfer it to the receiving module.

2. The substrate clamping and flipping mechanism as described in claim 1, characterized in that, The lifting and conveying module includes: A conveyor frame, which is disposed on one side of the top of the machine base; A belt conveyor mechanism, which is mounted on the conveyor frame, is used to convey the substrate; A lifting device, which is mounted on the conveyor frame; A lifting platform is located at the output end of the lifting device and is lifted under the action of the lifting device. Two blocking blocks are provided at the tail end of the lifting platform.

3. The substrate clamping and flipping mechanism as described in claim 2, characterized in that, The belt conveyor mechanism includes: A drive shaft, which is rotatably connected to the conveyor frame; A drive motor is mounted on the conveyor and connected to one end of the drive shaft to drive the drive shaft to rotate. A pair of belt drive mechanisms, wherein the driving wheels of the pair of belt mechanisms are respectively sleeved on both ends of the drive shaft, and the driven wheels of the pair of belt mechanisms are respectively rotatably arranged on both sides inside the conveyor frame.

4. The substrate clamping and flipping mechanism as described in claim 1, characterized in that, The receiving module includes: A queuing table, which is located on the other side of the top of the machine; Four support columns are provided at the four corners of the top of the aligning platform; A detection sensor is installed on the alignment platform to detect whether there is a substrate on the four support columns.

5. The substrate clamping and flipping mechanism as described in claim 2, characterized in that, The top of the support column is provided with a guide surface and a bearing surface.

6. The substrate clamping and flipping mechanism as described in claim 1, characterized in that, The clamping and flipping module includes: A flipping unit is disposed between the lifting and conveying module and the receiving module, and is used to provide the driving force for the flipping motion; A clamping unit is connected to the output end of the flipping unit and is used to clamp the substrate.

7. The substrate clamping and flipping mechanism as described in claim 1, characterized in that, The flipping unit includes: A pair of mounting brackets, the pair of mounting brackets being mounted on the machine base; A support frame is disposed between the pair of fixed frames; A rotating shaft is rotatably connected to the pair of fixed frames and the support frame; A driver, the output of which is connected to the rotating shaft, drives the rotating shaft to rotate; A pair of flipping rods, one end of which is sleeved on the rotating shaft, and the pair of flipping rods are connected to the clamping unit.

8. The substrate clamping and flipping mechanism as described in claim 7, characterized in that, The flipping unit further includes: The test piece is mounted on the rotating shaft; A flip detection sensor is mounted on one of the fixtures and is used to detect the test piece.

9. The substrate clamping and flipping mechanism as described in claim 7 or 8, characterized in that, The flipping unit further includes a limiting member disposed on the pair of fixing frames for mechanically limiting the flipping angle of the clamping unit.

10. The substrate clamping and flipping mechanism as described in claim 7, characterized in that, The clamping unit includes: A clamping platform, which is connected to the pair of flipping rods; A clamping cylinder is disposed on the top of the clamping table; A pair of transmission plates are slidably connected to the top of the clamping table, and one end of the pair of transmission plates is connected to the output end of the clamping cylinder. Two pairs of connecting rods, one pair of which is disposed at the other end of one of the transmission plates and passes through the clamping table, and the other pair of connecting rods is disposed at the other end of the other transmission plate and passes through the clamping table; Two first clips, one of which is disposed on one pair of the connecting rods, and the other of which is disposed on the other pair of the connecting rods; Two clamping cylinders are disposed at both ends of the top of the clamping platform; Two second clamps are connected to the output ends of the two clamping cylinders respectively, and the clamping end of one of the second clamps is opposite to one of the first clamps, and the clamping end of the other second clamp is opposite to the other first clamp.

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