Shelf type decoupling XY motion platform

Abstract

The invention discloses a shelf-type decoupling XY motion platform, which comprises a base, an X-axis driving unit, a Y-axis driving unit, a first motion platform and a second motion platform, and is characterized in that the first motion platform is arranged on the second motion platform in a single-degree-of-freedom reciprocating sliding manner along the Y-axis direction; the X-axis driving unit is provided with a second power output end used for driving the second motion platform to slide in a reciprocating mode in the X-axis direction, the Y-axis driving unit is provided with a first power output end used for driving the first motion platform to slide in a reciprocating mode in the Y-axis direction, and the sliding freedom degree in the X-axis direction exists between the first power output end and the first motion platform. The problems that a traditional structure is not thorough in decoupling and low in positioning precision can be solved, the overall rigidity and motion independence of the motion platform are enhanced, the space layout can be optimized, the structure compactness and the working condition adaptability are improved, meanwhile, the assembly process is simplified, the manufacturing cost is reduced, and the practicability and economical efficiency of the motion platform are improved.

Description

Technical Field

[0001] This invention relates to the field of high-speed machining motion equipment in microelectronics manufacturing, and particularly to a shelf-type decoupled XY motion platform. Background Technology

[0002] XY motion platforms, with their advantages of high-precision positioning, strong motion independence, and wide adaptability, are widely used in precision manufacturing, semiconductor processing, and automation equipment. However, in practical applications, due to limitations in structural design and transmission mechanism characteristics, the decoupling mechanism of traditional XY motion platforms is often located at the motor's mover, relying on complex, customized mover structures. This not only results in a large overall size and high assembly difficulty but also significantly increases motor manufacturing costs and maintenance complexity. Furthermore, some motion platforms using lead screw drives suffer from backlash issues, making it difficult to meet the precise positioning requirements of high-speed reciprocating motion scenarios. Additionally, the high coupling degree in the X and Y directions leads to significant parasitic motion interference, hindering further improvements in positioning accuracy and failing to meet the demands of high-speed, high-precision motion control in high-end precision machining scenarios. Therefore, the development of XY motion platform decoupling mechanism technology has been driven.

[0003] Existing XY motion platform decoupling mechanisms mainly rely on the geometric constraints of rigid structures to achieve decoupling, or on a single guide rail structure to ensure motion stability. However, these mechanisms have many shortcomings. For example, rigid decoupling structures are complex to design, require extremely high machining precision, and are easily affected by assembly errors, making it difficult to completely eliminate mutual interference between two-way motions. The load-bearing capacity and anti-interference performance of a single guide rail structure are limited, and vibrations are easily generated during high-speed motion, affecting motion stability. Most platform components are fixedly connected, lacking standardized disassembly and assembly designs, resulting in high maintenance costs. Furthermore, the selection of drive power sources lacks flexibility, making it impossible to accurately match power output according to actual working conditions. This makes it difficult to balance motion response speed and positioning accuracy, and fails to meet the high-speed, high-precision motion control requirements of high-end precision machining scenarios.

[0004] Therefore, it is necessary to improve the existing decoupling mechanism of the XY motion platform. This can not only solve the problems of incomplete decoupling and low positioning accuracy of traditional structures, eliminate parasitic motion and vibration interference, and enhance the overall rigidity and motion independence of the motion platform, but also optimize the spatial layout, improve the structural compactness and adaptability to working conditions, simplify the assembly process, reduce manufacturing costs, and improve the practicality and economy of the motion platform. Summary of the Invention

[0005] In view of the shortcomings of current XY motion platform decoupling mechanisms, the purpose of this invention is to provide a layered decoupling XY motion platform, which can not only solve the problems of incomplete decoupling and low positioning accuracy of traditional structures, eliminate parasitic motion and vibration interference, enhance the overall rigidity and motion independence of the motion platform, but also optimize the spatial layout, improve the structural compactness and adaptability to working conditions, simplify the assembly process, reduce manufacturing costs, and improve the practicality and economy of the motion platform.

[0006] The present invention discloses a shelf-type decoupled XY motion platform, comprising a base, an X-axis drive unit, a Y-axis drive unit, a first motion platform, and a second motion platform. The first motion platform is disposed on the second motion platform and is slidably mounted on the second motion platform with a single degree of freedom along the Y-axis. The X-axis drive unit has a second power output end for driving the second motion platform to slide reciprocally along the X-axis. The Y-axis drive unit has a first power output end for driving the first motion platform to slide reciprocally along the Y-axis. The first power output end and the first motion platform have a sliding degree of freedom in the X-axis direction.

[0007] Furthermore, it also includes several guide rail assemblies, including a first guide rail assembly and a second guide rail assembly. The first guide rail assembly is disposed between the first motion platform and the second motion platform and drives the first motion platform to slide back and forth along the Y-axis direction through the first power output end. The second guide rail assembly is disposed between the second motion platform and the base and drives the second motion platform to slide back and forth along the X-axis direction through the second power output end.

[0008] Furthermore, several of the first guide rail assemblies can be arranged side by side along the Y-axis to restrict the sliding degree of freedom of the first motion platform in the X-axis direction when the first motion platform reciprocates along the Y-axis direction.

[0009] Furthermore, the second guide rail assembly includes a slider and a sliding guide rail arranged along the X-axis direction. The slider is fixedly connected to the lower surface of the second motion platform, and the sliding guide rail is installed in the mounting groove of the base. The second motion platform can reciprocate along the X-axis direction via the slider to limit the sliding degree of freedom of the second motion platform in the Y-axis direction.

[0010] Furthermore, it also includes a third guide rail assembly, through which the first motion platform is slidably connected to the Y-axis drive unit and can be driven to reciprocate along the X-axis direction, used to restrict the sliding degree of freedom of the first motion platform in the Y-axis direction when the first motion platform and the second motion platform reciprocate together along the X-axis direction.

[0011] Furthermore, the third guide rail assembly includes a moving guide rail located on the first motion platform and a supporting guide rail located on the Y-axis drive unit. When the first motion platform and the second motion platform reciprocate along the X-axis direction, the moving guide rail slides along the supporting guide rail to limit the sliding degree of freedom of the first motion platform in the Y-axis direction.

[0012] Furthermore, the X-axis drive unit includes an X-axis connecting arm and an X-axis drive power source that is driven by the X-axis connecting arm. The X-axis drive power source is the second power output end. The X-axis connecting arm is fixedly connected to the second motion platform and drives the second motion platform to slide back and forth along the X-axis direction through the X-axis drive power source.

[0013] Furthermore, the Y-axis drive unit includes a Y-axis connecting arm and a Y-axis drive power source that is drively connected to the Y-axis connecting arm. The Y-axis drive power source is the first power output end. The support guide rail is mounted on the Y-axis connecting arm. The Y-axis connecting arm is slidably connected to the first motion platform through the support guide rail and the moving guide rail, and drives the first motion platform to reciprocate along the Y-axis direction through the Y-axis drive power source. When the first motion platform and the second motion platform reciprocate along the X-axis direction together, the first motion platform restricts the sliding degree of freedom of the first motion platform in the Y-axis direction by sliding along the support guide rail through the moving guide rail.

[0014] Furthermore, both the X-axis drive power source and the Y-axis drive power source are voice coil motors;

[0015] The first guide rail assembly is a cross roller guide rail.

[0016] The beneficial effects of the present invention are as follows: The XY motion platform of the present invention is a layered decoupled structure with connecting arms and multiple sets of guide rails set on the first and second motion platforms. This not only solves the problems of incomplete decoupling and low positioning accuracy of traditional structures, eliminates parasitic motion and vibration interference, and enhances the overall rigidity and motion independence of the motion platform, but also optimizes the spatial layout, improves the structural compactness and adaptability to working conditions, simplifies the assembly process, reduces manufacturing costs, and improves the practicality and economy of the motion platform. Attached Figure Description

[0017] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0018] Figure 1 This is a schematic diagram of the structure of the shelf-type decoupled XY motion platform of the present invention;

[0019] Figure 2 A front view of a shelf-type decoupled XY motion platform;

[0020] Figure 3 This is a schematic diagram of the connecting arm in the Y-axis direction;

[0021] Figure 4 This is a schematic diagram of the connecting arm in the X-axis direction.

[0022] Reference numerals: 1. Base; 2. First motion platform; 3. Second motion platform; 4. First guide rail assembly; 5. Second guide rail assembly; 501. Slider; 502. Sliding guide rail; 6. Third guide rail assembly; 601. Moving guide rail; 602. Support guide rail; 7. X-axis connecting arm; 8. X-axis drive power source; 9. Y-axis connecting arm; 10. Y-axis drive power source. Detailed Implementation

[0023] The following is in conjunction with the appendix Figures 1-4 The present invention will be described in further detail below.

[0024] This invention discloses a layered, decoupled XY motion platform, including a base 1, an X-axis drive unit, a Y-axis drive unit, a first motion platform 2, and a second motion platform 3. The first motion platform 2 is mounted on the second motion platform 3 and is slidably mounted along the Y-axis with a single degree of freedom. The X-axis drive unit has a second power output end for driving the second motion platform 3 to slide back and forth along the X-axis, and the Y-axis drive unit has a first power output end for driving the first motion platform 2 to slide back and forth along the Y-axis. The first power output end and the first motion platform 2 have a sliding degree of freedom in the X-axis direction. The layered structure, in which the second power output end drives the second motion platform 3 to slide back and forth along the X-axis, and the first power output end drives the first motion platform 2 to slide back and forth along the Y-axis, makes the motion drives in the X-axis and Y-axis directions independent of each other, thus solving the linkage error caused by motion coupling in traditional XY motion platforms. The X-axis drive unit drives the second motion platform 3 to slide back and forth along the X-axis, and the Y-axis drive unit drives the first motion platform 2 to slide back and forth along the Y-axis. Their motion trajectories do not interfere with each other, effectively avoiding positioning deviations caused by inter-axis linkage and significantly improving the overall motion accuracy and positioning precision of the motion platform. The layered layout allows the drive components and load-bearing components of the X and Y axes to be carried in layers, resulting in clear and defined force paths. The second motion platform 3 bears the drive load of the X-axis drive unit, and the first motion platform 2 bears the sliding load of the Y-axis drive unit. This avoids the force concentration problem caused by a single platform simultaneously bearing bidirectional drive loads in traditional motion platforms, effectively dispersing the overall force on the motion platform, reducing deformation and swaying during motion, and significantly improving the stability and rigidity of the motion platform under high-speed motion and heavy-load conditions. The base 1 can be fixedly connected to the external structure supporting the motion platform via bolts, which will not be elaborated further here.

[0025] In this embodiment, several guide rail assemblies are also included. The several guide rail assemblies include a first guide rail assembly 4 and a second guide rail assembly 5. The first guide rail assembly 4 is disposed between the first motion platform 2 and the second motion platform 3 and drives the first motion platform 2 to slide back and forth along the Y-axis direction through the first power output end. The second guide rail assembly 5 is disposed between the second motion platform 3 and the base 1 and drives the second motion platform 3 to slide back and forth along the X-axis direction through the second power output end. The first guide rail assembly 4 provides precise guidance for the movement of the first motion platform 2 along the Y-axis direction, and the second guide rail assembly 5 provides dedicated guidance for the movement of the second motion platform 3 along the X-axis direction. The two have clear division of labor and do not interfere with each other. The guide rail assembly's constraint function strictly limits the movement trajectory of the motion platform, preventing deviations or swaying during movement, eliminating positioning errors caused by deviations in the movement direction, and improving the overall motion accuracy and repeatability of the motion platform, meeting the requirements of high-precision operations such as precision machining or testing. The rigid support function of the guide rail assembly effectively resists lateral impact forces and torques during movement, improving the structural stability and deformation resistance of the motion platform, ensuring that the motion platform maintains good motion performance during long-term use. The guide rail assembly is a standardized component that can be directly connected to the corresponding motion platform or base 1 during installation, eliminating the need for complex on-site processing and debugging, and greatly simplifying the assembly process of the motion platform.

[0026] In this embodiment, several first guide rail assemblies 4 can be arranged side-by-side along the Y-axis to restrict the sliding degree of freedom of the first motion platform 2 in the X-axis direction when the first motion platform 2 reciprocates along the Y-axis. The first guide rail assemblies 4 directly constrain the sliding degree of freedom of the first motion platform 2 in the X-axis direction, preventing it from shifting, swaying, or lurching in the X-axis direction during reciprocating sliding in the Y-axis direction. This design ensures the straightness of the motion trajectory of the first motion platform 2 in the Y-axis direction from a mechanical structural perspective, avoids positioning deviations caused by redundancy in the X-axis degree of freedom, improves the accuracy of single-axis motion in the Y-axis, and complements the constraint effect of the third guide rail assembly 6, further enhancing the overall motion accuracy of the first motion platform 2. Several first guide rail assemblies 4 can be arranged side-by-side along the Y-axis. This multi-rail layout can evenly distribute the load of the first motion platform 2 onto each guide rail assembly, avoiding the problem of concentrated force on a single guide rail assembly. Meanwhile, the coordinated constraint of multiple guide rail components can enhance the connection rigidity between the first motion platform 2 and the second motion platform 3, effectively resisting the lateral torque and impact force generated during the motion process; preferably, two sets of first guide rail components 4 are selected in this embodiment, which will not be described in detail here.

[0027] In this embodiment, the second guide rail assembly 5 includes a slider 501 and a sliding guide rail 502 arranged along the X-axis. The slider 501 is fixedly connected to the lower surface of the second motion platform 3, and the sliding guide rail 502 is installed in the mounting groove of the base 1. The second motion platform 3 can reciprocate along the X-axis via the slider 501 to limit the sliding degree of freedom of the second motion platform 3 in the Y-axis direction. The sliding guide rail 502 is arranged along the X-axis direction. Together with the fixed connection between the slider 501 and the second motion platform 3, it can strictly limit the offset or movement of the second motion platform 3 in the Y-axis direction from a mechanical structure perspective, so that the second motion platform... When platform 3 slides back and forth along the X-axis, its trajectory is straight and without deviation, avoiding positioning errors caused by redundant degrees of freedom in the Y-axis direction. The sliding guide rail 502 is installed in the mounting groove of the base 1. Compared with surface-mounted guide rails, the groove structure can provide stronger lateral support and effectively resist the lateral torque and impact force generated by the second motion platform 3 under high-speed movement or heavy-load conditions. At the same time, the structure of the slider 501 fixedly connected to the lower surface of the second motion platform 3 and the sliding guide rail 502 embedded in the mounting groove of the base 1 has a clear installation positioning benchmark. No complicated calibration process is required during assembly, and the component docking can be completed quickly. This will not be elaborated further here.

[0028] In this embodiment, a third guide rail assembly 6 is also included. The first motion platform 2 is slidably connected to the Y-axis drive unit via the third guide rail assembly 6 and can be driven to reciprocate along the X-axis direction. This assembly restricts the sliding degree of freedom of the first motion platform 2 in the Y-axis direction when the first motion platform 2 and the second motion platform 3 reciprocate together along the X-axis direction. When the X-axis drive unit drives the second motion platform 3 to reciprocate along the X-axis direction, the first motion platform 2 reciprocates synchronously along the X-axis direction with the second motion platform 3. The third guide rail assembly 6 limits the first motion platform 2 to sliding only along the X-axis direction and prevents offset or swaying in the Y-axis direction due to inertia or vibration, thus solving the problem of transmission... The hierarchical motion platform addresses the inter-axis movement issue during synchronous motion, ensuring precise and consistent coordinated motion trajectories in the X-axis direction, eliminating linkage errors, and improving the positioning accuracy and repeatability of the motion platform in composite motion. The third guide rail assembly 6 directly restricts the degree of freedom in the Y-axis direction, eliminating the need for complex electronic control programs to synchronously control the X-axis movement of the first motion platform 2 and the second motion platform 3. This simplifies the control logic of the drive system, and operators do not need to set additional linkage compensation parameters. The synchronous reciprocating sliding of the two motion platforms along the X-axis can be achieved simply through the X-axis drive unit, significantly reducing the debugging difficulty and programming complexity of the control system. Further details are omitted here.

[0029] In this embodiment, the third guide rail assembly 6 includes a moving guide rail 601 located on the first motion platform 2 and a support guide rail 602 located on the Y-axis drive unit. When the first motion platform 2 and the second motion platform 3 reciprocate along the X-axis, the moving guide rail 601 slides along the support guide rail 602 to limit the sliding degree of freedom of the first motion platform 2 in the Y-axis direction. When the X-axis drive unit drives the second motion platform 3 to reciprocate along the X-axis, causing the first motion platform 2 to slide synchronously, the cooperation of the moving guide rail 601 and the support guide rail 602 can limit the displacement of the first motion platform 2 in the Y-axis direction, avoiding [further issues]. The Y-axis sway or offset caused by inertial impact or uneven load ensures that the synchronous motion trajectories of the two motion platforms in the X-axis direction are completely consistent, improving the positioning accuracy and repeatability of the motion platforms during compound motion. The split design of the moving guide rail 601 located on the first motion platform 2 and the support guide rail 602 located on the Y-axis drive unit does not require excessive additional installation space and does not interfere with the independent drive logic of the X and Y axes. At the same time, the split layout of the third guide rail assembly 6 allows the force to be applied directly to the corresponding load-bearing components, avoiding stress transmission interference between layers, and further optimizing the structural rationality of the motion platform. The sliding cooperation between the moving guide rail 601 and the support guide rail 602 provides an additional rigid support point for the first motion platform 2, improving the connection strength between the first motion platform 2 and the Y-axis drive unit. It can resist lateral torque and external vibration interference, prevent the first motion platform 2 from tilting and swaying, and ensure the stability and reliability of the first motion platform 2 during motion. It also simplifies the control logic of synchronous motion in the X-axis direction and reduces the difficulty of programming and debugging, which will not be elaborated further here.

[0030] In this embodiment, the X-axis drive unit includes an X-axis connecting arm 7 and an X-axis drive power source 8 that is drively connected to the X-axis connecting arm 7. The X-axis drive power source 8 is the second power output end. The X-axis connecting arm 7 is fixedly connected to the second motion platform 3 and drives the second motion platform 3 to slide back and forth along the X-axis direction through the X-axis drive power source 8. The X-axis connecting arm 7 serves as an intermediate carrier for power transmission, directly transmitting the output power of the X-axis drive power source 8 to the second motion platform 3. This rigid connection reduces losses and lag during power transmission, making the start-stop and speed adjustment response of the second motion platform 3 in the X-axis direction more rapid. At the same time, the X-axis connecting arm 7 can distribute the drive load, preventing the X-axis drive power source 8 from directly acting on the second motion platform 3. The localized force concentration caused by the moving platform 3 ensures smooth and vibration-free movement along the X-axis. The structural design of the connecting arm allows for flexible adjustment of the installation position of the drive power source, eliminating the need to directly fix the drive power source to the second moving platform 3. This reduces the load weight and space occupied by the second moving platform 3, avoids interference from the drive power source on the movement of the second moving platform 3, and provides ample installation space for other components such as the Y-axis drive unit and guide rail assembly, thus optimizing the overall structural compactness of the moving platform. The fixed connection between the X-axis connecting arm 7 and the second moving platform 3 enhances the overall rigidity and effectively resists the reverse impact force and torque generated during movement. The X-axis connecting arm 7 and the X-axis drive power source 8 can be connected by bolts, which is a conventional technique in existing technology and will not be elaborated further here.

[0031] In this embodiment, the Y-axis drive unit includes a Y-axis connecting arm 9 and a Y-axis drive power source 10 that is drively connected to the Y-axis connecting arm 9. The Y-axis drive power source 10 is the first power output end. The support rail 602 is mounted on the Y-axis connecting arm 9. The Y-axis connecting arm 9 is slidably connected to the first motion platform 2 through the support rail 602 and the moving rail 601, and drives the first motion platform 2 to reciprocate along the Y-axis direction through the Y-axis drive power source 10. When the first motion platform 2 and the second motion platform 3 reciprocate along the X-axis direction together, the first motion platform 2 restricts its sliding freedom in the Y-axis direction by sliding along the support rail 602 through the moving rail 601. The Y-axis connecting arm 9 not only serves as a power transmission carrier, bearing the output power of the Y-axis drive power source 10 to drive the first motion platform 2 to move along the Y-axis direction, but also directly integrates and mounts the support rail 602, and drives the first motion platform 2 to move along the Y-axis direction. The guide rail 601, when sliding back and forth in the X-axis direction, restricts the degree of freedom of the first motion platform 2 in the Y-axis direction, eliminating the need for additional independent constraint components and improving the response speed and accuracy consistency during compound motion. The Y-axis connecting arm 9, through the support guide rail 602 and the moving guide rail 601, is slidably connected to the first motion platform 2 to form a rigid support node. Under conditions of high-speed start-stop, heavy-load operation, or external vibration interference, this connection method can effectively resist lateral torque and impact force, preventing the first motion platform 2 from tilting or swaying, enhancing the overall structural stability and anti-interference capability of the motion platform, and ensuring motion reliability under complex working conditions. Since the Y-axis connecting arm 9 integrates the dual functions of driving and constraint, it is not necessary to control the Y-axis drive and the degree of freedom constraint in the Y-axis direction separately through the electronic control program, simplifying the programming logic of the control system. The Y-axis connecting arm 9 and the Y-axis driving power source 10 can be connected by bolts, which is a conventional technical means in the prior art and will not be described in detail here.

[0032] In this embodiment, both the X-axis drive power source 8 and the Y-axis drive power source 10 are voice coil motors. Voice coil motors are direct-drive motors, eliminating the need for intermediate transmission components such as gears or lead screws. Power can be directly transmitted to the connecting arm and the motion platform, exhibiting millisecond-level dynamic response characteristics. They can quickly complete command actions without transmission lag, improving the motion response efficiency of the motion platform. The direct-drive structure of the voice coil motor eliminates transmission backlash, and in conjunction with the guide rail assembly of the motion platform, it can achieve micron-level or even nanometer-level positioning accuracy and repeatability. Voice coil motors are small and lightweight, reducing installation space compared to servo motors of the same power and the transmission components that work with them. This lightweight characteristic reduces the load burden of the drive unit on the motion platform, while also fitting the platform's compact, shelf-like layout, eliminating the need to reserve excessive installation space for drive components and further improving the overall structural integration of the platform.

[0033] The first guide rail assembly 4 is a crossed roller guide rail, in which the rollers are arranged at 90° intervals, capable of simultaneously bearing loads from the X, Y, and Z axes. Its structural characteristics enable micron-level positioning accuracy and repeatability. When the first motion platform 2 slides back and forth along the Y-axis, the crossed roller guide rail restricts the degree of freedom in the X-axis direction, avoiding the X-axis slippage and offset problems caused by the gaps in traditional sliding guide rails, improving the straightness of the Y-axis single-axis motion trajectory, and ensuring the high-precision operation requirements of the platform. The crossed roller guide rail has a large contact area, with the rollers making line contact with the guide rail surface. Compared to ball bearing guide rails, it has stronger rigidity and can withstand greater radial and axial loads. Typically, the rolling friction coefficient of the crossed roller guide rail is extremely low, much lower than that of ordinary sliding guide rails, which can significantly reduce the resistance when the first motion platform 2 moves along the Y-axis direction. This not only makes the movement of the first motion platform 2 along the Y-axis direction smoother but also reduces the power loss of the drive power source 10 in the Y-axis direction, improving the response speed of the drive system. Further details are omitted here.

[0034] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all such modifications or substitutions should be covered within the scope of the claims of the present invention.

Claims

1. A layered, decoupled XY motion platform, characterized in that: The device includes a base, an X-axis drive unit, a Y-axis drive unit, a first motion platform, and a second motion platform. The first motion platform is mounted on the second motion platform and is slidably mounted on the second motion platform with a single degree of freedom along the Y-axis. The X-axis drive unit has a second power output end for driving the second motion platform to slide back and forth along the X-axis. The Y-axis drive unit has a first power output end for driving the first motion platform to slide back and forth along the Y-axis. The first power output end and the first motion platform have a sliding degree of freedom in the X-axis direction.

2. The shelf-type decoupled XY motion platform according to claim 1, characterized in that: It also includes several guide rail assemblies, including a first guide rail assembly and a second guide rail assembly. The first guide rail assembly is disposed between the first motion platform and the second motion platform and drives the first motion platform to slide back and forth along the Y-axis direction through the first power output end. The second guide rail assembly is disposed between the second motion platform and the base and drives the second motion platform to slide back and forth along the X-axis direction through the second power output end.

3. The shelf-type decoupled XY motion platform according to claim 2, characterized in that: Several of the first guide rail assemblies can be arranged side by side along the Y-axis to restrict the sliding degree of freedom of the first motion platform in the X-axis direction when the first motion platform slides back and forth along the Y-axis.

4. The shelf-type decoupled XY motion platform according to claim 2, characterized in that: The second guide rail assembly includes a slider and a sliding guide rail arranged along the X-axis. The slider is fixedly connected to the lower surface of the second motion platform, and the sliding guide rail is installed in the mounting groove of the base. The second motion platform can reciprocate along the X-axis by means of the slider to limit the sliding degree of freedom of the second motion platform in the Y-axis direction.

5. The shelf-type decoupled XY motion platform according to claim 2, characterized in that: It also includes a third guide rail assembly, through which the first motion platform is slidably connected to the Y-axis drive unit and can be driven to reciprocate along the X-axis direction, used to restrict the sliding degree of freedom of the first motion platform in the Y-axis direction when the first motion platform and the second motion platform reciprocate along the X-axis direction together.

6. The shelf-type decoupled XY motion platform according to claim 5, characterized in that: The third guide rail assembly includes a moving guide rail located on the first motion platform and a support guide rail located on the Y-axis drive unit. When the first motion platform and the second motion platform slide together along the X-axis direction, the moving guide rail slides along the support guide rail to limit the sliding degree of freedom of the first motion platform in the Y-axis direction.

7. The shelf-type decoupled XY motion platform according to claim 1, characterized in that: The X-axis drive unit includes an X-axis connecting arm and an X-axis drive power source that is driven by the X-axis connecting arm. The X-axis drive power source is the second power output end. The X-axis connecting arm is fixedly connected to the second motion platform and drives the second motion platform to slide back and forth along the X-axis direction through the X-axis drive power source.

8. The shelf-type decoupled XY motion platform according to claim 1, characterized in that: The Y-axis drive unit includes a Y-axis connecting arm and a Y-axis drive power source that is drively connected to the Y-axis connecting arm. The Y-axis drive power source is the first power output end. The support guide rail is mounted on the Y-axis connecting arm. The Y-axis connecting arm is slidably connected to the first motion platform through the support guide rail and the moving guide rail. The Y-axis drive power source drives the first motion platform to reciprocate along the Y-axis direction. When the first motion platform and the second motion platform reciprocate along the X-axis direction together, the first motion platform slides along the support guide rail through the moving guide rail, which restricts the sliding degree of freedom of the first motion platform in the Y-axis direction.

9. The shelf-type decoupled XY motion platform according to claim 7 or 8, characterized in that: Both the X-axis drive power source and the Y-axis drive power source are voice coil motors. The first guide rail assembly is a cross roller guide rail.

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