Mask product clamping mechanism

Abstract

The invention relates to mask production equipment, in particular to a mask product clamping mechanism which comprises a clamping base, a clamping mechanism and a clamping mechanism. The at least two first clamping jaws are arranged on the clamping base; one end of the telescopic rod is movably inserted into the two ends of the clamping base; the side pressing plate is arranged at the other end of the telescopic rod and is opposite to the clamping base; the second clamping jaw is arranged at the other end of the telescopic rod or on the side pressing plate, and the second clamping jaw and the first clamping jaw jointly support the mask plate; the at least two positioning columns are arranged on the clamping base and are opposite to the mask plates positioned on the first clamping jaw and the second clamping jaw; the driving device is arranged on the clamping base, connected with the telescopic rod and used for driving the telescopic rod to move in a reciprocating mode. According to the mask product clamping mechanism, reliable clamping of the mask plate can be guaranteed, meanwhile, the precision of the clamping position is high, the mask plate is not prone to being damaged, and the mask product clamping mechanism can be suitable for mask plates of various specifications.

Description

Technical Field

[0001] This invention relates to a mask production equipment, and more particularly to a mask product clamping mechanism. Background Technology

[0002] Baking is a crucial step in the photomask manufacturing process. Baking refers to the process of baking the photoresist on the substrate surface after exposure. The main purpose of this process is to further promote the chemical reaction in the photoresist through heating, thereby achieving photoresist curing and pattern clarity. Specifically, baking helps eliminate solvents in the photoresist, improves the adhesion between the photoresist and the substrate, and ensures the stability and clarity of the pattern in subsequent processes.

[0003] Currently, the main process of mainstream mask baking equipment involves a robotic arm driving grippers to pick up mask products and then transferring them between different units. Therefore, the smoothness and accuracy of the gripper operation are crucial to the yield of mask products, but existing gripping mechanisms cannot meet these requirements. Summary of the Invention

[0004] To address the above problems, this invention provides a mask product gripping mechanism, the specific technical solution of which is as follows: A mask product clamping mechanism includes: a clamping base; at least two first grippers disposed on the clamping base; a telescopic rod, one end of which is movably inserted into both ends of the clamping base; a side pressure plate disposed at the other end of the telescopic rod and opposite to the clamping base; a second gripper disposed at the other end of the telescopic rod or on the side pressure plate and supporting the mask template together with the first grippers; at least two positioning pins disposed on the clamping base and opposite to the mask template located on the first grippers and the second grippers; and a driving device disposed on the clamping base and connected to the telescopic rod for driving the telescopic rod to reciprocate.

[0005] Preferably, the positioning posts are spaced at equal intervals.

[0006] Preferably, the positioning post is made of an antistatic material.

[0007] Preferably, the top of the positioning post is provided with a ball head, and the top of the ball head is located in the same plane parallel to the base.

[0008] Preferably, the positioning pin is threaded onto the clamping base.

[0009] Preferably, the length of the first gripper is not less than 50mm.

[0010] Preferably, the first gripper, the second gripper, the telescopic rod, the side pressure plate, and the clamping base are all made of antistatic material.

[0011] Preferably, the surfaces of the first gripper, the second gripper, the telescopic rod, the side pressure plate, and the clamping base are all provided with an antistatic layer.

[0012] Preferably, the driving device includes: a drive motor mounted on the clamping base; a linkage device connected to the drive motor; a ball screw rotatably mounted on the clamping base and connected to the linkage device; and a screw nut mounted on the ball screw and connected to the telescopic rod.

[0013] Compared with the prior art, the present invention has the following beneficial effects: The mask product clamping mechanism provided by this invention can ensure reliable clamping of the mask template, while maintaining high clamping position accuracy, minimizing mask damage, and is applicable to various mask template specifications. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of the present invention. Detailed Implementation

[0015] The present invention will now be further described with reference to the accompanying drawings.

[0016] like Figure 1 As shown, a mask product clamping mechanism includes a clamping base 1, first grippers 2, telescopic rods 3, side pressure plates 5, second grippers 6, positioning posts 4, and a driving device 7. The clamping base 1 is mounted on a robotic arm. Two first grippers 2 are evenly spaced and fixed to the side of the clamping base 1, located below the mask template 9. Two telescopic tubes are symmetrically arranged, with one end of the telescopic rod 3 movably inserted into the telescopic holes at both ends of the clamping base 1. The side pressure plates 5 are fixed to the other end of the telescopic rod 3 and are arranged opposite to the clamping base 1. The top of the pressure plate 5 is higher than the top of the telescopic rod 3 and is positioned opposite to the side of the mask template 9; the second gripper 6 is fixed on the side pressure plate 5 and supports the mask template 9 together with the first gripper 2; three positioning posts 4 are provided at equal intervals, the positioning posts 4 are fixed on the clamping base 1 and are located on the same side of the clamping base 1 as the first gripper 2, and the positioning posts 4 are positioned opposite to the mask template 9 located on the first gripper 2 and the second gripper 6; the driving device 7 is installed on the clamping base 1 and connected to the telescopic rod 3 for driving the telescopic rod 3 to move back and forth.

[0017] When the first gripper 2 and the second gripper 6 are against the bottom of the mask template 9, the mask template 9 is located above the telescopic rod 3 and the mask template 9 does not contact the telescopic rod 3.

[0018] During operation, the drive device 7 moves the telescopic rod 3, causing the side pressure plate 5 to move away from the clamping base 1, increasing the distance between the side pressure plate 5 and the clamping base 1. This allows the mask template 9 to be inserted into the clamping mechanism. Then, the robotic arm drives the clamping mechanism to enter from below the product. When the grippers are lifted, the mask template 9 rests against the first gripper 2 and the second gripper 6, preventing the mask template 9 from directly contacting the telescopic rod 3 and causing scratches. Then, the drive device 7 moves the telescopic rod 3, causing the side pressure plate 5 to move towards the clamping base 1. The side pressure plate 5 moves the mask template 9 towards the clamping base 1 until both sides of the mask template 9 are pressed against the side pressure plate 5 and the positioning post 4, respectively. Since the positioning post 4 is set at equal intervals, the contact area with the mask template 9 is increased, the pressure is reduced, and the mask template 9 is effectively protected. At the same time, the mask template 9 is not easily tilted and maintains a constant position.

[0019] The evenly spaced positioning columns 4 ensure that the pressure against the side of the mask template 9 is balanced, effectively protecting the mask template 9 and preventing damage due to uneven force.

[0020] The positioning post 4 is made of anti-static material. The first gripper 2, the second gripper 6, the telescopic rod 3, the side pressure plate 5, and the clamping base 1 are all made of anti-static material. Furthermore, the surfaces of the positioning post 4, the first gripper 2, the second gripper 6, the telescopic rod 3, the side pressure plate 5, and the clamping base 1 are all provided with an anti-static layer.

[0021] The top of the positioning post 4 is equipped with a ball head, and the top of the ball head is located in the same plane parallel to the base. The ball head allows the three positioning posts 4 to simultaneously abut against the side of the mask template 9, improving the accuracy of contact.

[0022] The positioning pin 4 is threaded onto the clamping base 1. The threaded connection allows for free adjustment of the screw-in depth of the positioning pin 4 to accommodate mask products of different sizes. It also allows for adjustment of the position of the end face of the positioning pin 4 so that the ends of the three positioning pins 4 are in the same plane.

[0023] The length of the first gripper 2 is not less than 50mm to prevent the product from being directly contacted by the telescopic rod 3 due to excessive distance between the clamping base 1 and the side pressure plate 5 when the gripper is clamping the product, causing static damage or scratches.

[0024] After the first gripper 2 and the second gripper 6 are lifted to a designated position below the mask template 9, the mask template 9 falls completely onto the first gripper 2 and the second gripper 6.

[0025] The drive unit 7 includes a drive motor, a linkage device, a ball screw, and a screw nut. The drive motor is fixed on the clamping base 1; the linkage device is connected to the drive motor; the ball screw is rotatably mounted on the clamping base 1 via a bearing seat and is connected to the linkage device; the screw nut is mounted on the ball screw and is connected to the telescopic rod 3. The linkage device can be a synchronous belt mechanism or a gear transmission mechanism. The linkage device causes the two ball screws to rotate synchronously, thereby causing the two telescopic rods 3 to extend and retract synchronously. The drive unit is an existing mature product and will not be described in detail here.

[0026] The clamping mechanism can simultaneously clamp mask products of different sizes.

[0027] The technical principles of the present invention have been described above with reference to specific embodiments. These descriptions are merely for explaining the principles of the invention and should not be construed as limiting the scope of protection of the invention in any way. Based on this explanation, those skilled in the art can readily conceive of other specific embodiments of the invention without inventive effort, and these embodiments will all fall within the scope of protection of the claims of the present invention.

Claims

1. A mask product gripping mechanism characterized by comprising: The utility model relates to a mask plate clamping device, comprising: a clamping base (1); at least two first clamping jaws (2) arranged on the clamping base (1); a telescopic rod (3) movably inserted into both ends of the clamping base (1); a side pressing plate (5) arranged at the other end of the telescopic rod (3) and opposite to the clamping base (1); a second clamping jaw (6) arranged at the other end of the telescopic rod (3) or the side pressing plate (5) and supporting a mask plate (9) together with the first clamping jaw (2); at least two positioning columns (4) arranged on the clamping base (1) and opposite to the mask plate (9) on the first clamping jaw (2) and the second clamping jaw (6); and a driving device (7) arranged on the clamping base (1) and connected with the telescopic rod (3) for driving the telescopic rod (3) to move back and forth. The positioning columns (4) are arranged at equal intervals.

2. A mask product gripping mechanism according to claim 1, wherein The positioning columns (4) are made of anti-static material.

3. A mask product gripping mechanism according to claim 1, wherein The top of the positioning column (4) is provided with a ball head, and the top of the ball head is located in the same plane parallel to the base.

4. The mask product handling mechanism of claim 1, wherein The positioning column (4) is installed on the clamping base (1) through screw threads.

5. A mask product handling mechanism according to any one of claims 1 to 4, wherein The length of the first clamping jaw (2) is not less than 50 mm.

6. A mask product gripping mechanism according to claim 1, wherein The first clamping jaw (2), the second clamping jaw (6), the telescopic rod (3), the side pressing plate (5) and the clamping base (1) are all made of anti-static material.

7. The mask product handling mechanism of claim 1, wherein The surfaces of the first clamping jaw (2), the second clamping jaw (6), the telescopic rod (3), the side pressing plate (5) and the clamping base (1) are all provided with an anti-static layer.

8. A mask product gripping mechanism according to claim 7, wherein The driving device (7) comprises:

9. The mask product handling mechanism of claim 1, wherein, a driving motor arranged on the clamping base (1); a linkage device connected with the driving motor; a ball screw rotatably arranged on the clamping base (1) and connected with the linkage device; a screw nut arranged on the ball screw and connected with the telescopic rod (3). ​

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