Optical hole diameter adjusting mechanism of optical system and optical system

By employing a blade disk and fixed ring structure in the optical system, and utilizing independent rotating bearings and high-order polynomial slide design, the problems of small adjustment range and low precision of traditional dimming mechanisms are solved. This enables large-range continuous adjustment and high-precision control of the aperture diameter, reduces friction contamination, and improves imaging quality.

CN121578424APending Publication Date: 2026-02-27BEIJING SEMICON EQUIP INST THE 45TH RES INST OF CETC
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202512057655.3
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-12-31
Publication Date
2026-02-27

AI Technical Summary

Technical Problem

Traditional dimming mechanisms have a small aperture diameter adjustment range and low adjustment accuracy, and may generate powder particles that contaminate the lens.

Method used

The structure employs a blade disk and a fixed ring, with multiple blade assemblies arranged around the axis to form an aperture. Independently rotating bearings reduce friction, enabling periodic changes and continuous adjustment of the aperture diameter. The slide groove is designed as a high-order polynomial to improve adjustment accuracy.

Benefits of technology

It achieves a wide range of continuous and high-precision adjustment of the aperture diameter, reduces debris contamination caused by friction, and improves the resolution and depth of field of the imaging system.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN121578424A_ABST
    Figure CN121578424A_ABST
Patent Text Reader

Abstract

The invention relates to the technical field of optical structures, and provides an optical hole diameter adjusting mechanism of an optical system and the optical system. According to the light hole diameter adjusting mechanism of the optical system, the blade assemblies are arranged on the fixing ring around the axis, and therefore the light hole of the light hole diameter adjusting mechanism is jointly formed through the inner edges of the blade assemblies. The fixed end of each blade assembly is selectively fixed to the fixed ring, so that the blade assemblies can swing around the fixed ends of the blade assemblies, the positions of the blade assemblies are changed, then the positions of the inner edges of the blade assemblies are changed, and the diameter of the unthreaded hole diameter adjusting mechanism is changed. The multiple sliding grooves are connected end to end, after each movable end passes through a complete stroke provided by one sliding groove, a change period of the unthreaded hole is provided, and in the change period, the diameter of the unthreaded hole is firstly increased and then decreased. Therefore, according to the light hole diameter adjusting mechanism of the optical system provided by the invention, the design is beneficial to improving the light hole diameter.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] This application relates to the field of optical structure technology, and in particular to an aperture diameter adjustment mechanism and optical system for an optical system. Background Technology

[0002] The dimming mechanism is an indispensable component of an imaging system, and it is closely related to image quality. In projection lenses, by adjusting the aperture diameter of the objective lens using a variable aperture, the resolution and depth of field of the optical system can be changed under different exposure conditions. A large aperture diameter has a significant impact on the imaging resolution of the optical system, and ensuring continuous adjustment of the aperture with a large numerical aperture can improve the imaging resolution of the optical system.

[0003] Variable aperture dimming is widely used due to its advantages such as simple dimming method, compact structure, light weight, and wide dimming range. Among them, the most representative is the variable aperture dimming mechanism. When the aperture fixed ring is stationary, rotating the movable ring will cause the aperture plate fixing pin to rotate around the fixing pin hole. The sliding groove of the movable ring drives the movable pin, so that the light-passing hole formed by the arc edge of the aperture plate changes from large to small.

[0004] However, traditional dimming mechanisms have a small range of adjustable aperture diameters and low adjustment precision, which cannot meet the requirements of a large field of view. In addition, the traditional movable pin and the slide groove are sliding friction, which may generate powder particles that contaminate the lens. Summary of the Invention

[0005] In view of this, this application provides an aperture diameter adjustment mechanism and an optical system for an optical system, with the aim of solving to some extent the technical problems of the small range of aperture diameter that can be adjusted by the unified light adjustment mechanism and the low adjustment accuracy.

[0006] The first aspect of this application provides an aperture diameter adjustment mechanism for an optical system, the aperture diameter adjustment mechanism of the optical system comprising: The blade disk, the fixing ring, and a plurality of blade assemblies are provided. The fixing ring has an axis, and the plurality of blade assemblies are arranged on the fixing ring around the axis. Each blade assembly has a fixed end, which is rotatably disposed on the fixing ring so as to form an optical aperture by the plurality of blade assemblies. The blade assembly further includes a movable end, and the blade disk has multiple sliding grooves connected end to end. The movable end cooperates with the sliding grooves so that when the blade disk rotates in a predetermined clockwise direction, the diameter of the light aperture changes periodically. Within one cycle of the change of the light aperture, the diameter of the light aperture first gradually increases and then gradually decreases.

[0007] Based on the above technical solutions, optionally, the fixing ring is provided with a plurality of fixing grooves corresponding one-to-one with the plurality of blade groups, and the fixing grooves are provided with corresponding fixing ends; The fixed end is provided with a first bearing and a second bearing that can rotate independently, and the fixed groove corresponding to the fixed end is used to cooperate with the first bearing and the second bearing.

[0008] Based on the above technical solutions, optionally, the movable end is provided with a third bearing and a fourth bearing that can rotate independently, and the groove corresponding to the movable end is used to cooperate with the third bearing and the fourth bearing.

[0009] Based on the above technical solutions, optionally, the plurality of sliding grooves divide the circumference equally, and the central angle corresponding to each sliding groove is 45°.

[0010] Based on the above technical solutions, optionally, the change period of the light aperture corresponds to the stroke of the movable end in the slide groove. Within one change period of the light aperture, the diameter of the light aperture gradually increases in the first 30° and gradually decreases in the last 15°.

[0011] Based on the above technical solutions, optionally, the maximum adjustment range of the diameter of the optical aperture is greater than or equal to 100mm.

[0012] Based on the above technical solutions, optionally, the diameter adjustment range of the optical aperture is 171.3mm-294.8mm.

[0013] Based on the above technical solutions, optionally, the slide is configured such that the adjustment accuracy of the optical aperture is less than or equal to 1.2 mm.

[0014] Based on the above technical solutions, optionally, the extension trajectory of the groove is set as a high-order polynomial.

[0015] A second aspect of this application provides an optical system, the optical system including the aperture diameter adjustment mechanism of the optical system as described above.

[0016] According to the aperture diameter adjustment mechanism of the optical system provided in this application, the aforementioned plurality of blade assemblies are arranged around an axis on a fixed ring, thereby forming the aperture of the aperture diameter adjustment mechanism of the optical system through the inner edges of these blade assemblies. For each blade assembly, its fixed end is fixed to the fixed ring, which allows the blade assembly to swing around its fixed end, thereby changing the position of the blade assembly and, consequently, the position of its inner edge, thereby changing the diameter of the aperture diameter adjustment mechanism of the optical system.

[0017] According to the aperture diameter adjustment mechanism of the optical system provided in this application, the multiple sliding grooves are connected end to end. After each movable end completes a full stroke provided by a sliding groove, it provides one change cycle of the aperture. During this change cycle, the diameter of the aperture first increases and then decreases. Therefore, according to the aperture diameter adjustment mechanism of the optical system provided in this application, the aforementioned design is beneficial to improving the aperture diameter adjustment range and can ensure continuous adjustment between large vertical apertures.

[0018] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 A schematic diagram of a two-dimensional blade assembly provided according to an embodiment of this application is shown.

[0021] Figure 2 This is a schematic diagram of another two-dimensional view of your blade assembly provided according to an embodiment of this application.

[0022] Figure 3 It shows Figure 2 A schematic diagram of the enlarged view at point A in the middle.

[0023] Figure 4 A schematic diagram showing a three-dimensional view of a bladed disk provided according to an embodiment of this application is shown.

[0024] Figure 5 A schematic diagram of a two-dimensional bladed disk provided according to an embodiment of this application is shown.

[0025] Figure 6 A schematic diagram showing a three-dimensional view of a fixed disk provided according to an embodiment of this application is shown.

[0026] Figure 7 A schematic diagram of a two-dimensional fixed disk provided according to an embodiment of this application is shown.

[0027] Figure 8 A schematic diagram of a three-dimensional aperture diameter adjustment mechanism of an optical system provided according to an embodiment of this application is shown.

[0028] Figure 9A schematic diagram of a two-dimensional aperture diameter adjustment mechanism of an optical system provided according to an embodiment of this application is shown.

[0029] Figure label: 100-Blade assembly; 110-Moving end; 111-First bearing; 112-Shim; 113-Second bearing; 120-Fixed end; 130-Blade; 131-Rivet; 200 - Blade disk; 210 - Slide groove; 220 - Rotary groove; 300 - Retaining ring; 310 - Bearing hole; 320 - Mounting countersunk hole. Detailed Implementation

[0030] The technical solutions of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0031] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0032] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0033] Furthermore, the technical solutions of the various embodiments can be combined with each other, but only if they are based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such combination of technical solutions does not exist and is not within the scope of protection claimed in this application.

[0034] According to a first aspect of the embodiments of this application, an aperture diameter adjustment mechanism for an optical system is provided, which will be described below in conjunction with... Figures 1 to 9Describe in detail the structure and working principle of the aperture diameter adjustment mechanism of the optical system.

[0035] According to the embodiment of this application, the aperture diameter adjustment mechanism of the optical system includes a blade disk 200, a fixing ring 300, and a plurality of blade assemblies 100.

[0036] In an embodiment, the fixing ring 300 has an axis, and the plurality of blade assemblies 100 are arranged around the axis on the fixing ring 300. Each blade assembly 100 has a fixing end 120, which is rotatably disposed on the fixing ring 300 so as to form an optical aperture by the plurality of blade assemblies 100.

[0037] In this embodiment, the blade assembly 100 further includes a movable end 110. The blade disk 200 has a plurality of sliding grooves 210 connected end to end. The movable end 110 cooperates with the sliding grooves 210 so that when the blade disk 200 rotates in a predetermined clockwise direction, the diameter of the light aperture changes periodically. Within one cycle of the light aperture change, the diameter of the light aperture first gradually increases and then gradually decreases.

[0038] According to the aperture diameter adjustment mechanism of the optical system provided in the embodiments of this application, the aforementioned plurality of blade assemblies 100 are arranged around an axis on a fixing ring 300, thereby forming the aperture of the aperture diameter adjustment mechanism of the optical system through the inner edges of these blade assemblies 100. In the embodiments, for each blade assembly 100, its fixed end 120 is fixed on the fixing ring 300, which allows the blade assembly 100 to swing around its fixed end 120, thereby changing the position of the blade assembly 100 and thus changing the position of its inner edge, thereby changing the diameter of the aperture diameter adjustment mechanism of the optical system.

[0039] According to the aperture diameter adjustment mechanism of the optical system provided in the embodiments of this application, the plurality of sliding grooves 210 are connected end to end. After each movable end 110 completes the stroke provided by one sliding groove 210, it provides one change cycle of the aperture. During this change cycle, the diameter of the aperture first increases and then decreases. Therefore, according to the aperture diameter adjustment mechanism of the optical system provided in the embodiments of this application, the aforementioned design is beneficial to improving the aperture diameter adjustment range and can ensure continuous adjustment between large vertical apertures.

[0040] In this embodiment, the blade assembly 100 is essentially formed as a riveted body for the blade 130. Specifically, the blade assembly 100 includes the blade 130, the rivet 131, the gasket 112, and the bearing. In the above description, "the inner edge of the blade assembly 100" refers to the inner edge of the blade 130 mentioned here. The arrangement of the rivet 131 and other structures will be explained in detail in the following description.

[0041] According to the aperture diameter adjustment mechanism of the optical system provided in the embodiments of this application, the fixing ring 300 may be provided with a plurality of bearing holes 310 corresponding one-to-one with a plurality of blades 130, and a corresponding fixing end 120 is provided in the bearing hole 310. In the embodiment, the fixing end 120 is provided with a first bearing 111 and a second bearing 113 that can rotate independently, and the bearing hole 310 corresponding to the fixing end 120 is used to cooperate with both the first bearing 111 and the second bearing 113.

[0042] In this embodiment, the first bearing 111 and the second bearing 113 can rotate independently, thereby providing a more reliable means of reducing friction between the first bearing 111 and the second bearing 113 and the bearing hole 310. Even if one of the first bearing 111 and the second bearing 113 gets stuck, it will not interfere with the rotation of the other one, thus still ensuring that the friction between the fixed end 120 and the bearing hole 310 is reduced.

[0043] In addition, in the embodiment, the blade disk 200 also includes a plurality of rotating grooves 220 formed on the outer edge of the blade disk 200. These rotating grooves 220 are used to connect with an external structure, thereby facilitating the rotation of the blade disk 200 by rotating the external structure.

[0044] Furthermore, according to the optical system aperture diameter adjustment mechanism provided in the embodiments of this application, due to the use of the first bearing 111 and the second bearing 113, compared with the prior art setting method of directly inserting a rod-shaped structure into the bearing hole, the optical system aperture diameter adjustment mechanism provided in the embodiments of this application converts sliding friction into rolling friction, thereby reducing debris generated by sliding friction and avoiding these debris from contaminating the lens of the optical system where the optical system aperture diameter adjustment mechanism is located.

[0045] According to the aperture diameter adjustment mechanism of the optical system provided in this application embodiment, a rivet 131 structure protrudes on one side of the blade 130, that is, the side facing the fixing ring 300. The first bearing 111 and the second bearing 113 are both sleeved on the rivet 131. Specifically, from the end of the rivet 131 to the surface of the blade 130, the sequence is: first bearing 111, shim 112, second bearing 113, and shim 112. That is, the rivet 131 is riveted into the shim 112, the second bearing 113, the shim 112, and the first bearing 111 in sequence, so that the inner rings of both the first bearing 111 and the second bearing 113 are fixedly connected to the rivet 131, while the outer rings of both the first bearing 111 and the second bearing 113 can rotate freely. Thus, when they are engaged with the corresponding bearing holes 310, rolling friction can replace the sliding friction between the rivet 131 and the bearing hole 310 in the prior art.

[0046] In addition, multiple mounting countersunk holes can be provided on the fixed plate 300, and the mounting countersunk holes can... In this embodiment, depending on the size of the aperture diameter adjustment mechanism of the optical system, for example, the first bearing 111 and the second bearing 113 may be miniature bearings.

[0047] According to the aperture diameter adjustment mechanism of the optical system provided in the embodiments of this application, the movable end 110 may also be provided with a third bearing and a fourth bearing that can rotate independently, and the groove 210 of the movable end 110 is used to cooperate with the third bearing and the fourth bearing.

[0048] Thus, according to the aperture diameter adjustment mechanism of the optical system provided in the embodiments of this application, the structure of the movable end 110 can be the same as the structure of the fixed end 120 described above, and the beneficial effects that the movable end 110 can produce are also the same as those of the fixed end 120 described above, which will not be repeated here.

[0049] Here, as an example, the third and fourth bearings used in the active end 110 can also be, for example, miniature bearings.

[0050] According to the aperture diameter adjustment mechanism of the optical system provided in the embodiments of this application, the plurality of slides 210 as shown above can equally divide the circumference, and the central angle corresponding to each slide 210 is 45°.

[0051] In this embodiment, in other words, a total of 8 slides 210 can be provided. These 8 slides 210 equally divide the circumference, that is, along the predetermined clockwise direction (e.g., counterclockwise direction) from the starting point of the slide 210 to the ending point of the slide 210, the central angle between the two points and the two radii determined by the center of the blade disk 200 is 45° as mentioned in the above description.

[0052] According to the aperture diameter adjustment mechanism of the optical system provided in this application embodiment, the change cycle of the aperture corresponds to the stroke of the movable end 110 within the slide groove 210. Within one change cycle of the aperture, the diameter of the aperture gradually increases in the first 30° and gradually decreases in the last 15°. That is, the first 30° is the push stroke of the slide groove 210, and the last 15° is the return stroke of the slide groove 210. The push and return stroke design of the slide groove 210 can realize the unidirectional rotation of the blade disk 200, thereby driving the blade to open and close within the adjustment range (generally, the aperture diameter adjustment mechanism of the optical system uses bidirectional rotation to realize the opening and closing of the blade, which will cause impact at the starting and ending points, and the accuracy will be reduced).

[0053] In one embodiment, the eight grooves 210 are connected end-to-end, thus forming a closed structure. In another embodiment, the blade disk 200 can be formed into a ring structure, and the eight grooves 210 can be arranged along the inner edge of the blade disk 200.

[0054] According to the aperture diameter adjustment mechanism of the optical system provided in the embodiments of this application, the maximum adjustment amount of the aperture diameter is greater than or equal to 100mm, thus effectively ensuring that the aperture diameter adjustment mechanism of the optical system has a large aperture diameter adjustment range.

[0055] As an example, according to the optical system aperture diameter adjustment mechanism provided in the embodiments of this application, the aperture diameter adjustment range can be 171.3mm-294.8mm.

[0056] Furthermore, according to the aperture diameter adjustment mechanism of the optical system provided in this application embodiment, the slide 210 is configured such that the adjustment accuracy of the aperture is less than or equal to 0.004NA. Also, according to the aperture diameter adjustment mechanism of the optical system provided in this application embodiment, the extension trajectory of the slide 210 can be set as a high-order polynomial to meet the wide-range, high-precision adjustment requirements of the aperture diameter adjustment mechanism of the optical system. Here, the slide set according to the high-order polynomial ensures good passability of the slide, guaranteeing that the aperture adjustment mechanism operates without impact during aperture diameter adjustment. As an example, the high-order polynomial here can be, for example, a fifth-order polynomial.

[0057] According to the aperture diameter adjustment mechanism of the optical system provided in the embodiments of this application, the blade thickness can be 0.1 mm. Thus, the aperture diameter adjustment mechanism of the optical system has a small size in the thickness direction, which greatly reduces the size occupied in the thickness direction.

[0058] According to a second aspect of the embodiments of this application, an optical system is provided, which includes the aperture diameter adjustment mechanism of the optical system as described above, and also has the above-mentioned beneficial effects, which will not be repeated here.

[0059] The above are merely preferred embodiments of this application and do not limit the scope of protection of this application. Any equivalent structural transformations made based on the innovative concept of this application and the contents of the specification and drawings of this application, or direct / indirect applications in other related technical fields, are included within the scope of protection of this application.

Claims

1. An aperture diameter adjustment mechanism for an optical system, characterized in that, The aperture diameter adjustment mechanism of the optical system includes: The blade disk, the fixing ring, and a plurality of blade assemblies are provided. The fixing ring has an axis, and the plurality of blade assemblies are arranged on the fixing ring around the axis. Each blade assembly has a fixed end, which is rotatably disposed on the fixing ring so as to form an optical aperture by the plurality of blade assemblies. The blade assembly further includes a movable end, and the blade disk has multiple sliding grooves connected end to end. The movable end cooperates with the sliding grooves so that when the blade disk rotates in a predetermined clockwise direction, the diameter of the light aperture changes periodically. Within one cycle of the change of the light aperture, the diameter of the light aperture first gradually increases and then gradually decreases.

2. The aperture diameter adjustment mechanism of the optical system according to claim 1, characterized in that, The fixing ring is provided with a plurality of fixing holes corresponding one-to-one with the plurality of blade groups, and the fixing holes are provided with corresponding fixing ends; The fixed end is provided with a first bearing and a second bearing that can rotate independently, and the fixing hole corresponding to the fixed end is used to cooperate with the first bearing and the second bearing.

3. The aperture diameter adjustment mechanism of the optical system according to claim 1, characterized in that, The movable end is provided with a third bearing and a fourth bearing that can rotate independently, and the groove corresponding to the movable end is used to cooperate with the third bearing and the fourth bearing.

4. The aperture diameter adjustment mechanism of the optical system according to claim 1, characterized in that, The plurality of grooves divide the circumference equally, and the central angle corresponding to each groove is 45°.

5. The aperture diameter adjustment mechanism of the optical system according to claim 4, characterized in that, The change period of the light aperture corresponds to the travel of the movable end in the groove. Within one change period of the light aperture, the diameter of the light aperture gradually increases in the first 30° and gradually decreases in the last 15°.

6. The aperture diameter adjustment mechanism of the optical system according to claim 1, characterized in that, The maximum adjustment range of the aperture diameter is greater than or equal to 100 mm.

7. The aperture diameter adjustment mechanism of the optical system according to claim 6, characterized in that, The diameter of the aperture can be adjusted from 171.3mm to 294.8mm.

8. The aperture diameter adjustment mechanism of the optical system according to claim 1, characterized in that, The groove is configured such that the adjustment accuracy of the aperture is less than or equal to 1.2 mm.

9. The aperture diameter adjustment mechanism of the optical system according to claim 1, characterized in that, The extension trajectory of the groove is set as a high-order polynomial.

10. An optical system, characterized in that, The optical system includes an aperture diameter adjustment mechanism as described in any one of claims 1 to 9.