Tearable multi-layer protective film structure for manual glue uniformizing table and use method of tearable multi-layer protective film structure

Abstract

The invention discloses a tearable multi-layer protective film structure for a manual spin coater and a use method of the tearable multi-layer protective film structure. The tearable multi-layer protective film structure comprises an annular base frame, a multi-layer U-shaped composite film unit, a weakly-viscous isolation layer and a tearing fin, the annular base frame is attached to a cavity of the spin coating table in shape, the base frame is made of polytetrafluoroethylene, the multiple layers of U-shaped composite film units are stacked on the base frame, each layer of film is provided with a film body resistant to photoresist corrosion, and the film body is made of polytetrafluoroethylene or polyimide-based composite materials; the lower surface of the film body is coated with the weak-viscosity isolating layer, and the peel strength is 0.1-0.5 N / cm; the tearing fin is arranged on the film body and extends outwards for 2-5cm from the outer edge of the film body; the section of each film unit is U-shaped, the height of the outer side wall is 8-12cm, the height of the inner side wall is 5-8cm, and the curvature radius of the cambered surface is consistent with that of the cavity wall of the glue uniformizing table. Pollution protection and cleaning of the manual glue uniformizing table can be achieved, and the cleaning cost is reduced.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor packaging equipment technology, and particularly relates to a tearable multilayer protective film structure for a manual coating station. Background Technology

[0002] In the SIP packaging process, existing photolithography processes use manual coating stations such as... Figure 1 As shown, the system includes a wafer tray, tray support pillars, and the internal chamber of the spin coater. During the spin coater process, the wafer is first placed on the wafer tray and fixed by vacuum adsorption. Photoresist is then applied to the wafer surface. After selecting the appropriate process parameters, the tray begins high-speed rotation for the spin coater process. During spin coater operation, the high-speed rotating photoresist splashes onto the spin coater chamber walls (the rotation speed typically reaches 3000-6000 rpm), forming an adhesive contaminant layer. Each cleaning requires disassembling the wafer tray and cleaning the chamber walls and tray support pillars. Traditional cleaning relies on manual wiping with acetone and a lint-free cloth, taking ≥20 minutes per cycle. Furthermore, due to the small size and depth of the spin coater chamber, manual wiping with a lint-free cloth is time-consuming and labor-intensive, and may not completely clean the area. Additionally, the volatile toxicity of acetone poses safety and health risks. Moreover, the hardened residual colloid requires mechanical scraping, damaging the surface finish of the equipment. While automated spray cleaning systems have been proposed, they are structurally complex, costly (>20,000 USD / unit), and pose a risk of contaminating the piping. Summary of the Invention

[0003] The purpose of this invention is to address the problems of photoresist splatter contamination of the cavity wall, difficult cleaning, and harm to human health during manual spin coating. It provides a tearable multi-layer protective film structure for manual spin coating stages and its usage method, which can achieve contamination protection and cleaning of manual spin coating stages, and reduce cleaning costs.

[0004] To achieve the above objectives, one aspect of the present invention provides a tearable multilayer protective film structure for a manual plating table, comprising an annular base frame, a multilayer U-shaped composite film unit, a weakly adhesive isolation layer, and tear-off flaps. The annular base frame fits the shape of the homogenizing stage chamber. The base frame is made of polytetrafluoroethylene. Multilayer U-shaped composite film units are stacked on the base frame. Each film has a film body that is resistant to photoresist corrosion and is made of polytetrafluoroethylene or polyimide-based composite material. A weakly tacky isolation layer is coated on the lower surface of the membrane, with a peel strength of 0.1-0.5 N / cm; tear-off flaps are set on the membrane, extending 2-5 cm outward from the outer edge of the membrane; the cross-section of the membrane unit is U-shaped, with an outer wall height of 8-12 cm and an inner wall height of 5-8 cm, and the radius of curvature of the arc surface is consistent with the curvature of the homogenizing stage cavity wall.

[0005] Another aspect of the present invention provides a method of using the above-described structure, comprising: Install the base frame at the bottom of the U-shaped chamber of the gelling stage; A photoresist coating process is performed, in which photoresist is splashed onto the film layer of the structure. Lift the tear-off flap to remove the contaminated membrane layer; When fewer than 3 membrane layers remain, replace with a new structure.

[0006] According to the above-described aspects of the present invention, the tearable multilayer protective film structure for a manual plating table and its method of use can achieve contamination protection and cleaning of the manual plating table, and reduce cleaning costs. Attached Figure Description

[0007] To more clearly illustrate the technical solutions of the present invention, the accompanying drawings used in the description of the embodiments of the present invention will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort: Figure 1 This is a schematic diagram of an existing manual coating station; Figure 2 This is a schematic diagram of a tearable multilayer protective film structure for a manual plating table according to an embodiment of the present invention. Detailed Implementation

[0008] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0009] One embodiment of the present invention provides a tearable multilayer protective film structure for a manual plating table, such as... Figure 2 As shown, the tearable multilayer protective membrane structure of this invention includes an annular base frame, multilayer U-shaped composite membrane units, a weakly adhesive isolation layer, and tear-off wings.

[0010] The annular base frame is made of polytetrafluoroethylene (PTFE) with a thickness of 1 cm. Multilayer U-shaped composite film units are stacked on the base frame. Each film layer has a photoresist-resistant coating and is made of PTFE or polyimide (PI)-based composite material. A weakly adhesive release layer is coated on the lower surface of the film, with a peel strength of 0.1-0.5 N / cm. Tear-off flaps are disposed on the film, extending 2-5 cm outward from the outer edge. The cross-section of each film unit is U-shaped, with an outer wall height of 8-12 cm and an inner wall height of 5-8 cm. The radius of curvature of the arc surface matches the curvature of the homogenizing stage wall.

[0011] The base frame fits snugly against the shape of the spin coater chamber and can be fixed inside. The U-shaped cross-section of the film forms an asymmetrical structure with a higher outer side and a lower inner side, completely protecting the internal chamber of the spin coater. This ensures that any splattered photoresist remains on the peelable film layer, maintaining the cleanliness of the spin coater's internal chamber. When the protective film structure needs to be replaced, first disassemble the wafer tray, remove the base frame, and replace it with a new film unit and base.

[0012] In one embodiment, the technical parameters of the multilayer U-shaped composite membrane unit of the present invention are shown in Table 1 below: Table 1 Technical parameters of multilayer U-shaped composite membrane unit

[0013] The manufacturing process of the tearable multilayer protective film structure according to an embodiment of the present invention is as follows: Base forming: PTFE is processed into a base through hot pressing or machining; Membrane forming: A 0.1mm thick PTFE sheet is hot-pressed onto the membrane substrate, with a holding temperature of 180℃. ×5min; Apply a weak adhesive layer: Spray on a silicone-based adhesive (model Dow Corning 734), with a peel strength of 0.25 N / cm after curing.

[0014] The usage process of the tearable multilayer protective film structure in this embodiment of the invention is as follows: Turn off the spin coater power, clean the cavity wall base surface, and remove the wafer tray; Install the base frame at the bottom of the U-shaped chamber of the gelling station; During the spin coating process, photoresist is splashed onto the walls and bottom of the U-shaped cavity. Lift the tear-off flap to remove the contaminated membrane layer; When there are fewer than 3 remaining membrane layers, replace the protective membrane structure.

[0015] The tearable multilayer protective film structure of this invention can be used for contamination protection and cleaning in wafer coating processes. Compared with traditional cleaning methods, as shown in Table 2 below, the benefits are significantly improved: Table 2. Comparison of the benefits of this invention and traditional cleaning methods.

[0016] In summary, utilizing the tearable multilayer protective film structure of this invention, when the photoresist contaminates the surface, the layer can be quickly peeled off to expose a clean new film layer, achieving "zero-contact cleaning." The film interface has a U-shaped structure with a higher outer side and a lower inner side, perfectly matching the curvature of the spin coater chamber. This reduces the single cleaning time from 20 minutes to 30 seconds, significantly improving production safety and equipment uptime. It also eliminates the risk of acetone volatilization toxicity, reducing the VOC detection value in the workshop air to a safe range. The cost is less than 50 yuan per set, saving 12,000 yuan per unit of cleaning consumables annually.

[0017] The foregoing has only described certain exemplary embodiments of the present invention by way of illustration. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the foregoing drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A tearable multi-layer protective film structure for a manual plating table, characterized in that, It includes a ring-shaped base frame, multi-layer U-shaped composite membrane units, a weakly adhesive isolation layer, and tear-off wings; The annular base frame fits the shape of the homogenizing stage chamber. The base frame is made of polytetrafluoroethylene. Multilayer U-shaped composite film units are stacked on the base frame. Each film has a film body that is resistant to photoresist corrosion and is made of polytetrafluoroethylene or polyimide-based composite material. A weakly tacky isolation layer is coated on the lower surface of the membrane, with a peel strength of 0.1-0.5 N / cm; tear-off flaps are set on the membrane, extending 2-5 cm outward from the outer edge of the membrane; the cross-section of the membrane unit is U-shaped, with an outer wall height of 8-12 cm and an inner wall height of 5-8 cm, and the radius of curvature of the arc surface is consistent with the curvature of the homogenizing stage cavity wall.

2. The structure according to claim 1, characterized in that, The multilayer U-shaped composite membrane unit has 30-50 membrane layers and a membrane thickness of 0.

1. 0.02mm, temperature range: -20℃ to 150℃.

3. The structure according to claim 1 or 2, characterized in that, The thickness of the polytetrafluoroethylene material in the annular base frame is 1 cm.

4. A method of using the structure according to any one of claims 1-3, characterized in that, include: Install the base frame at the bottom of the U-shaped chamber of the gelling station; A photoresist coating process is performed, in which photoresist is splashed onto the film layer of the structure. Lift the tear-off flap to remove the contaminated membrane layer; When fewer than 3 membrane layers remain, replace with a new structure.

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