Manufacturing method of integrated bionic multi-mode wearable sweat sensor

Abstract

The invention discloses a manufacturing method of an integrated bionic multi-mode wearable sweat sensor, belongs to the technical field of flexible electronic and biological sensing manufacturing, and aims to solve the problems of poor module integration compatibility, poor stability and low sensitivity in the prior art. According to the method, a mold with bionic spindle-shaped bulges is prepared through photocuring 3D printing, and a polyimide flexible substrate with through micro-channels is formed by utilizing spin coating and stepped thermal imidization processes. Preparing a piezoelectric film on the back surface of the substrate through electrostatic spinning; and a graphene electrochemical sensor and a piezoelectric film electrode are formed on the front surface of the substrate by adopting a laser engraving technology. Finally, micro-channel packaging is achieved through polyamide acid spin coating and thermal imidization. Through the integrated manufacturing process, the effects of good integration compatibility of the motion sensing module and the sweat sensing module, firm interface combination and no signal crosstalk are achieved, and unification of high sensitivity, high stability and good wearing comfort of the sensor is achieved.

Description

Technical Field

[0001] This invention belongs to the field of flexible electronics and biosensor manufacturing technology, specifically relating to a method for manufacturing an integrated biomimetic multimode wearable sweat sensor. Background Technology

[0002] With the rapid development of wearable and biosensing technologies, flexible wearable sensors capable of real-time monitoring of human physiological signals have become a research hotspot in health management, sports science, and medical diagnostics. Among them, multimode sensors that simultaneously detect motion signals and body fluid composition have attracted widespread attention because they can provide more comprehensive information on human physiological status.

[0003] In motion signal detection, existing flexible sensors are mainly based on piezoelectric, capacitive, or resistive strain principles. For example, piezoelectric sensors generate charges through material deformation to detect pulse and limb movements, but they suffer from susceptibility to environmental interference and sensitivity greatly affected by contact pressure. Capacitive strain sensors, while having fast response speeds, are easily affected by temperature and humidity changes and lack long-term stability. Furthermore, most motion sensors can only detect a single motion parameter, making it difficult to meet the needs of multi-dimensional motion state assessment.

[0004] In the detection of sweat components, graphene is an ideal material for electrochemical sensing electrodes due to its excellent electrical properties, large specific surface area, and good biocompatibility. Existing graphene-based sweat sensors are mostly prepared using drop-coating, spin-coating, or chemical vapor deposition methods, but these methods have the following drawbacks: First, graphene has poor dispersibility and is prone to aggregation, leading to low sensing sensitivity and high detection limits; second, the bonding force between the sensing unit and the flexible substrate is weak, making it easy to detach under deformation caused by human movement, affecting its lifespan; third, most sweat sensors only detect a single component (such as glucose or lactic acid) and have low integration with motion signal detection modules, making it difficult to achieve simultaneous monitoring of multiple parameters.

[0005] Furthermore, the manufacturing process of existing multi-mode wearable sensors suffers from poor module integration compatibility. The fabrication processes of motion sensing modules and sweat sensing modules are often independent, which can easily lead to signal crosstalk during integration. Moreover, the overall packaging process is complex, making it difficult to balance the flexibility, breathability, and waterproofness of the sensors, resulting in poor wearing comfort and failing to meet the needs of long-term continuous monitoring.

[0006] Therefore, developing a method for manufacturing a multi-mode flexible wearable sweat sensor that can efficiently integrate graphene electrochemical sensing units and motion sensing modules, while possessing high sensitivity, high stability, and good wearability, has become a key technical problem that urgently needs to be solved in this field. Summary of the Invention

[0007] The purpose of this invention is to propose an integrated biomimetic multi-mode wearable sweat sensor manufacturing method to solve the problems of poor module integration compatibility, poor stability and low sensitivity in the existing technology.

[0008] To achieve the above objectives, the present invention provides an integrated biomimetic multimode wearable sweat sensor manufacturing method comprising the following steps; Step 1: Manufacturing the substrate. The specific steps for manufacturing the substrate are as follows: Step 1: Create a casting mold to form a sweat collection microchannel with spindle-shaped protrusions on the surface; Step 2: Mix polyamic acid (PAA) and N,N-dimethylformamide (DMF) in a certain proportion, stir thoroughly, and then defoam. After defoaming, spin coat the mixture onto the sweat collection microchannel casting mold. Step 3: The spin-coated sweat collection microchannel casting mold is defoamed again. After defoaming, the polyamic acid is dehydrated and cyclized using a stepped heating method to form a polyimide (PI) film. The polyimide film is peeled off from the mold to form a substrate. Sweat collection microchannels that run through the front and back are formed on the substrate. The sweat collection microchannels are spindle-shaped, corresponding to the protrusions on the sweat collection microchannel casting mold. Step 2: Fabricating the sensing unit on the substrate. The specific steps for fabricating the sensing unit on the substrate are as follows: Step 1: Pour carbon nanotubes into the DMF solution and stir using a magnetic stirrer to prepare a carbon nanotube solution with a concentration of 0.1%-0.5%. Step 2: Mix polyvinylidene fluoride (PVDF) powder and ball-milled lead zirconate titanate (PZT) particles with carbon nanotube solution in a certain proportion, and stir with a magnetic stirrer to prepare electrospinning solution; Step 3: Use 2500-grit sandpaper to sand the back of the substrate, creating scratches on the back of the sweat collection microchannels; then treat the scratched surface of the substrate with oxygen plasma. Step 4: Electrospinning solution is deposited onto the scratched substrate surface using an electrospinning machine to form an electrospinned film; the formed electrospinned film is subjected to plasma polarization and low-temperature annealing treatment to form a piezoelectric film; Step 5: Laser engrave the front side of the substrate containing sweat collection microchannels to fabricate the electrochemical sensor and piezoelectric thin film electrode respectively; Step 3: The sensing unit and sweat collection microchannel on the front side of the substrate are encapsulated by spin-coating polyamic acid and thermal imidization to form the final multimode flexible wearable sweat sensor.

[0009] The manufacturing of the sweat collection microchannel casting mold with spindle-shaped protrusions on the surface in step 1 of the substrate manufacturing process is specifically as follows: the sweat collection microchannel casting mold with spindle-shaped protrusions on the surface is manufactured by photopolymerization 3D printing, and the printed sweat collection microchannel casting mold is ultrasonically cleaned with ethanol, then rinsed with deionized water and dried to form the sweat collection microchannel casting mold.

[0010] In step 1 of substrate manufacturing, the photopolymerization 3D printing uses HT3 photosensitive resin. The photopolymerization process parameters are: exposure intensity 600-650, exposure time 3.5-4.5 seconds, waiting time 2-2.5 seconds, and layer thickness 25 micrometers. The ethanol ultrasonic cleaning process parameters are: ultrasonic temperature 40-50 degrees Celsius, ultrasonic power 45-55 watts, and ultrasonic time 30-40 minutes. The drying process parameters are: drying temperature 50-60 degrees Celsius and drying time 20-30 minutes.

[0011] In step 2 of substrate manufacturing, polyamic acid and N,N-dimethylformamide are prepared in a weight ratio of 1:2; defoaming treatment is carried out in a vacuum oven with the following process parameters: vacuum degree 300-350 Pa, vacuuming time 15-20 minutes; spin coating process parameters are: spin coating speed 3000-3500 rpm, spin coating time 15-20 seconds.

[0012] In step 3 of substrate manufacturing, the defoaming process parameters are as follows: vacuum degree 80-100 Pa, vacuuming time 45-50 minutes; the stepped heating process parameters are as follows: heating from low to high, heating time is 20 minutes for heating temperatures of 60℃, 80℃ and 100℃, and heating time is 30 minutes for heating temperatures of 140℃ and 160℃.

[0013] In step 1 of fabricating the sensing unit on the substrate, the purity of the DMF solution is 97%-100%; the stirring parameters of the magnetic stirrer are: rotation speed 15-20 rpm, stirring for 1-1.5 hours; the carbon nanotubes are hydroxylated single-walled carbon nanotubes with an outer diameter of 1-5 nanometers.

[0014] In step 2, which involves fabricating the sensing unit on the substrate, the ball milling process parameters for the lead zirconate titanate particles are as follows: ball milling speed 100-150 rpm, ball milling time 2-2.5 days; polyvinylidene fluoride, lead zirconate titanate and carbon nanotube solution are prepared at a weight ratio of 50:1:40; the stirring parameters for the magnetic stirrer are as follows: speed 15-20 rpm, stirring for 40-50 minutes.

[0015] In step 3, which involves fabricating the sensing unit on the substrate, the oxygen plasma processing parameters are: power 15-20 watts, vacuum degree 70-100 Pa, and processing time 2-2.5 minutes.

[0016] In step 4, which involves fabricating the sensing unit on the substrate, the electrospinning process parameters are: excitation voltage -11-12 kV, nozzle-to-substrate distance 20-25 cm, and electrospinning time 20-30 minutes; the plasma polarization process parameters are: power 50-60 W, vacuum degree 200-250 Pa, and processing time 5-8 minutes; and the low-temperature annealing process parameters are: annealing temperature 180-200 degrees Celsius, and annealing time 15-20 minutes.

[0017] In step 5, which involves fabricating the sensing unit on the substrate, the laser engraving process parameters for the electrochemical sensor are: laser power 3-4 watts, scanning speed 30-35 mm / s, and 1 scan. The laser engraving process parameters for the piezoelectric thin film electrode are: laser power 4-5 watts, scanning speed 25-30 mm / s, and 3 scans.

[0018] The specific steps for encapsulating the sensing unit and sweat collection microchannel on the front side of the substrate by spin-coating polyamic acid and thermal imidization as described in step three are as follows: Step 1: Mix polyamic acid (PAA) and N,N-dimethylformamide (DMF) in the specified ratio, stir thoroughly, and then defoam. After defoaming, spin coat the mixture onto the cleaned glass. Step 2: Attach the front side of the substrate to the spin-coating position on the glass; heat to dehydrate and cyclize the polyamic acid on the glass to form a polyimide film; encapsulate the sweat collection microchannels on the front side of the substrate; peel the entire assembly off the glass to form an encapsulated multimode flexible wearable sweat sensor. Step 3: After removing the polyimide membranes corresponding to the inlet and outlet of the sweat collection microchannel, the final multimode flexible wearable sweat sensor is formed.

[0019] In step 1, which encapsulates the sensing unit and the sweat collection microchannel, polyamic acid and N,N-dimethylformamide are prepared in a weight ratio of 1:1. The defoaming treatment is carried out in a vacuum oven with the following process parameters: vacuum degree 300-350 Pa, vacuuming time 15-20 minutes. The spin coating process parameters are: spin coating speed 3500-4000 rpm, spin coating time 20-25 seconds.

[0020] In step 2, which involves encapsulating the sensing unit and the sweat collection microchannel, the heating process parameters are: heating temperature 300-320 degrees Celsius, heating time 30-40 minutes.

[0021] The beneficial effects of this invention are as follows: The integrated biomimetic multimode wearable sweat sensor manufacturing method of this invention, through innovative process design, simultaneously manufactures a biomimetic sweat collection microchannel, a piezoelectric motion sensing module, and a graphene-based electrochemical sensing module on the same flexible substrate. This integrated manufacturing method solves the problems of poor process compatibility, weak interface bonding, and signal crosstalk caused by the independent preparation and subsequent integration of traditional multimode sensors. It achieves efficient and synchronous monitoring of motion signals and sweat components, realizing high integration and compatibility.

[0022] By optimizing electrospinning process parameters and combining plasma polarization and low-temperature annealing, the prepared piezoelectric thin film exhibits high crystallinity and excellent piezoelectric properties, significantly improving the sensitivity and long-term stability of motion signal detection. Laser engraving technology was used to precisely construct graphene electrochemical sensing electrodes, effectively avoiding the graphene agglomeration problem encountered in traditional drop-coating and spin-coating methods. This ensured the electrode's high specific surface area and excellent electrochemical activity, thereby achieving high sensitivity and low detection limits for detecting multiple biomarkers in sweat, and improving the sensor's sensitivity and stability.

[0023] Using polyimide (PI) as the substrate and encapsulation material endows the sensor with excellent flexibility, mechanical strength, and biocompatibility. The spindle-shaped sweat collection microchannel not only improves the efficiency of directional sweat delivery, but its structure also helps to disperse stress and enhance the structural integrity of the sensor under human motion deformation.

[0024] The unique packaging process ensures that the sensor is waterproof while maintaining breathability in key areas, balancing comfort and functionality for long-term wear and enhancing the mechanical durability of the device.

[0025] This invention not only effectively solves the core problems of low module integration, poor stability and insufficient sensitivity in the prior art, but also manufactures a multimode flexible sensor with high performance, high reliability and good wearability through biomimetic structural design and whole-process process optimization, which has important technical value and broad application prospects. Attached Figure Description

[0026] Figure 1 An exploded view of the hidden encapsulation layer of the biomimetic multimode wearable sweat sensor manufactured in this invention; Figure 2 Top view of the biomimetic multimodal wearable sweat sensor manufactured according to the present invention; Figure 3 This is a schematic diagram of the casting mold structure for the sweat collection microchannel in the biomimetic multimode wearable sweat sensor manufactured in this invention. Figure 4 The piezoelectric thin film prepared by electrospinning according to the present invention; Figure 5 The electrochemical sensor and piezoelectric thin film electrode formed by laser engraving in this invention; The components are: 1. substrate, 2. sweat collection microchannel, 3. piezoelectric film, 4. electrochemical sensor, 5. piezoelectric film electrode, 6. sweat collection microchannel inlet, and 7. sweat collection microchannel outlet. Detailed Implementation

[0027] The embodiments of the present invention will be further described below with reference to the accompanying drawings.

[0028] See Figures 1-5 The present invention provides a method for manufacturing an integrated biomimetic multimodal wearable sweat sensor, comprising the following steps: Step 1: Manufacturing substrate 1, the specific steps for manufacturing substrate 1 are as follows: Step 1: A casting mold for sweat collection microchannel 2 with spindle-shaped protrusions is manufactured using photopolymer 3D printing. The spindle-shaped microchannels can create a Laplace pressure difference, enabling spontaneous unidirectional transport of sweat and preventing backflow even when the channels deform. The photopolymerization process parameters are: exposure intensity 600-650, exposure time 3.5-4.5 seconds, waiting time 2-2.5 seconds, and layer thickness 25 micrometers. The printed sweat collection microchannel 2 casting mold is then ultrasonically cleaned with ethanol. The ethanol ultrasonic cleaning process parameters are: ultrasonic temperature 40-50 degrees Celsius, ultrasonic power 45-55 watts, and ultrasonic time 30-40 minutes. Subsequently, it is rinsed with deionized water and dried to form the sweat collection microchannel 2 casting mold. The drying process parameters are: drying temperature 50-60 degrees Celsius and drying time 20-30 minutes. Step 2: Mix polyamic acid (PAA) and N,N-dimethylformamide (DMF) at a weight ratio of 1:2; after thorough mixing, perform defoaming treatment using a vacuum oven with the following parameters: vacuum degree 300-350 Pa, vacuuming time 15-20 minutes; after defoaming, spin coat the mixture onto the sweat collection microchannel 2 casting mold with the following spin coating parameters: spin coating speed 3000-3500 rpm, spin coating time 15-20 seconds. Step 3: The sweat collection microchannel 2 casting mold after spin coating is subjected to defoaming treatment again. The defoaming treatment process parameters are: vacuum degree 80-100 Pa, vacuuming time 45-50 minutes; after defoaming, the polyamic acid is dehydrated and cyclized by a stepped heating method to form a polyimide (PI) film. The heating process parameters are: heating from low to high, the heating temperature is 60℃, 80℃ and 100℃, the corresponding heating time is 20 minutes, the heating temperature is 140℃ and 160℃, the corresponding heating time is 30 minutes; after peeling the polyimide film from the mold, the substrate 1 is formed; sweat collection microchannel 2 is formed on the substrate 1, penetrating the front and back, and the sweat collection microchannel 2 is spindle-shaped, corresponding to the protrusions on the sweat collection microchannel 2 casting mold; Step 2: Fabricate the sensing unit on substrate 1. The specific steps for fabricating the sensing unit on substrate 1 are as follows: Step 1: Pour carbon nanotubes (CNTs) into a DMF solution with a purity of 97%-100%; stir using a magnetic stirrer to prepare a carbon nanotube solution with a concentration of 0.1%-0.5%; the stirring parameters of the magnetic stirrer are: speed 15-20 rpm, stirring for 1-1.5 hours; the carbon nanotubes used are hydroxylated single-walled carbon nanotubes with an outer diameter of 1-5 nanometers. The hydrophilicity of hydroxylated single-walled carbon nanotubes helps to uniformly disperse the carbon nanotubes; Step 2: Ball mill the lead zirconate titanate (PZT) particles. The ball milling process parameters are: ball milling speed 100-150 rpm, ball milling time 2-2.5 days; mix polyvinylidene fluoride (PVDF) powder, ball milled lead zirconate titanate (PZT) particles and carbon nanotube solution at a weight ratio of 50:1:40, and stir using a magnetic stirrer to prepare an electrospinning solution. The stirring parameters of the magnetic stirrer are: speed 15-20 rpm, stirring for 40-50 minutes; Step 3: Use 2500-grit sandpaper to polish the back of substrate 1, creating scratches on the back of the sweat collection microchannel 2. The scratched substrate 1 has a higher surface-to-body ratio, which can significantly enhance the bonding strength between polyimide and piezoelectric film 3. Then, perform oxygen plasma treatment on the scratched surface of substrate 1. Oxygen plasma treatment can further improve the bonding strength between polyimide and piezoelectric film 3. The oxygen plasma treatment process parameters are: power 15-20 watts, vacuum degree 70-100 Pa, and treatment time 2-2.5 minutes. Step 4: Electrospinning solution is deposited onto the scratched substrate 1 using an electrospinning machine to form an electrospinned film. The electrospinning process parameters are: excitation voltage -11-12 kV, nozzle-to-substrate distance 20-25 cm, electrospinning time 20-30 minutes. The negative high voltage causes the spun yarn to have a negative charge, allowing it to adhere firmly to the positively charged substrate 1 surface after plasma treatment. The formed electrospinned film is then subjected to plasma polarization and low-temperature annealing to form a piezoelectric film 3. The plasma polarization process parameters are: power 50-60 W, vacuum degree 200-250 Pa, processing time 5-8 minutes. The low-temperature annealing process parameters are: annealing temperature 180-200 degrees Celsius, annealing time 15-20 minutes. Step 5: Laser engraving is performed on the front side of the sweat collection microchannel 2 on substrate 1 to fabricate the electrochemical sensor 4 and the piezoelectric thin film electrode 5. The purpose of laser engraving is to form graphene. Specifically, the substrate material is polyimide (PI). Under high-energy laser irradiation, PI decomposes and carbonizes to form graphene. The laser engraving process parameters for electrochemical sensor 4 are: laser power 3-4 watts, scanning speed 30-35 mm / s, and 1 scan. The laser engraving process parameters for piezoelectric thin film electrode 5 are: laser power 4-5 watts, scanning speed 25-30 mm / s, and 3 scans. Step 3: Encapsulating the sensing unit. The specific steps for encapsulating the sensing unit are as follows: Step 1: Mix polyamic acid (PAA) and N,N-dimethylformamide (DMF) at a weight ratio of 1:1, stir thoroughly, and then defoam. The defoaming process is carried out in a vacuum oven with the following parameters: vacuum degree 300-350 Pa, vacuuming time 15-20 minutes. After defoaming, spin coat the mixture onto clean glass. The spin coating process parameters are: spin coating speed 3500-4000 rpm, spin coating time 20-25 seconds. Step 2: Attach the front side of substrate 1, i.e., the side with the laser-engraved electrochemical sensor 4 and piezoelectric thin film electrode 5, to the spin-coating position on the glass; heat to dehydrate and cyclize the polyamic acid on the glass to form a polyimide film; encapsulate the sweat collection microchannel 2 on the front side of substrate 1; the heating process parameters are: heating temperature 300-320 degrees Celsius, heating time 30-40 minutes; peel the entire assembly off the glass to form an encapsulated multimode flexible wearable sweat sensor. Step 3: After removing the polyimide membranes corresponding to the sweat collection microchannel inlet 6 and sweat collection microchannel outlet 7 with a utility knife, the final multimode flexible wearable sweat sensor is formed.

[0029] The photosensitive resin used in this invention is a commercially available finished product. In this embodiment, the HT3 photosensitive resin is a finished product manufactured by Shenzhen Daye Laser Molding Technology Co., Ltd.

Claims

1. A method for manufacturing an integrated biomimetic multimodal wearable sweat sensor, characterized in that, The manufacturing method includes the following steps; Step 1: Manufacturing the substrate (1), the specific steps of manufacturing the substrate (1) are as follows: Step 1: Manufacturing a sweat collection microchannel with spindle-shaped protrusions on the surface (2) Casting mold; Step 2: Mix polyamic acid and N,N-dimethylformamide in proportion, stir thoroughly and then defoam. After defoaming, spin coat onto the sweat collection microchannel (2) casting mold. Step 3: The sweat collection microchannel (2) casting mold after spin coating is defoamed again. After defoaming, the polyamic acid is dehydrated and cyclized by step heating to form a polyimide film. The polyimide film is peeled off from the mold to form a substrate (1). A sweat collection microchannel (2) is formed on the substrate (1) that runs through the front and back. The sweat collection microchannel (2) is spindle-shaped and corresponds to the protrusion on the sweat collection microchannel (2) casting mold. Step 2: Fabricate a sensing unit on the substrate (1). The specific steps for fabricating the sensing unit on the substrate (1) are as follows: Step 1: Pour carbon nanotubes into the DMF solution and stir using a magnetic stirrer to prepare a carbon nanotube solution with a concentration of 0.1%-0.5%. Step 2: Mix polyvinylidene fluoride powder and ball-milled lead zirconate titanate particles with carbon nanotube solution in a certain proportion, and stir with a magnetic stirrer to prepare electrospinning solution; Step 3: Use 2500 grit sandpaper to polish the back of the substrate (1) to form scratches on the back of the sweat collection microchannel (2); perform oxygen plasma treatment on the scratched surface of the substrate (1); Step 4: Electrospinning solution is deposited onto the surface of a scratched substrate (1) using an electrospinning machine to form an electrospinning film; the formed electrospinning film is subjected to plasma polarization and low-temperature annealing to form a piezoelectric film (3). Step 5: Laser engrave the front side of the sweat collection microchannel (2) on the substrate (1) to manufacture the electrochemical sensor (4) and the piezoelectric thin film electrode (5). Step 3: The sensing unit on the front of the substrate (1) and the sweat collection microchannel (2) are encapsulated by spin coating polyamic acid and thermal imidization to form the final multimode flexible wearable sweat sensor.

2. The method for manufacturing an integrated biomimetic multimode wearable sweat sensor according to claim 1, characterized in that, The manufacturing of the sweat collection microchannel (2) casting mold with spindle-shaped protrusions on the surface in step 1 of manufacturing substrate (1) is specifically as follows: the sweat collection microchannel (2) casting mold with spindle-shaped protrusions on the surface is manufactured by photopolymerization 3D printing, and the printed sweat collection microchannel (2) casting mold is ultrasonically cleaned with ethanol, then rinsed with deionized water and dried to form the sweat collection microchannel (2) casting mold; In step 1 of manufacturing the substrate (1), the photopolymerization 3D printing uses HT3 photosensitive resin. The photopolymerization process parameters are: exposure intensity 600-650, exposure time 3.5-4.5 seconds, waiting time 2-2.5 seconds, and layer thickness 25 micrometers. The ethanol ultrasonic cleaning process parameters are: ultrasonic temperature 40-50 degrees Celsius, ultrasonic power 45-55 watts, and ultrasonic time 30-40 minutes. The drying process parameters are: drying temperature 50-60 degrees Celsius and drying time 20-30 minutes.

3. The method for manufacturing an integrated biomimetic multimode wearable sweat sensor according to claim 1, characterized in that, In step 2 of manufacturing substrate (1), polyamic acid and N,N-dimethylformamide are prepared in a weight ratio of 1:2; the defoaming treatment is carried out in a vacuum oven with the following process parameters: vacuum degree 300-350 Pa, vacuuming time 15-20 minutes; the spin coating process parameters are: spin coating speed 3000-3500 rpm, spin coating time 15-20 seconds.

4. The method for manufacturing an integrated biomimetic multimodal wearable sweat sensor according to claim 1, characterized in that, In step 3 of manufacturing substrate (1), the defoaming process parameters are: vacuum degree 80-100 Pa, vacuuming time 45-50 minutes; the stepped heating process parameters are: heating from low to high, heating time is 20 minutes for heating temperatures of 60℃, 80℃ and 100℃, and heating time is 30 minutes for heating temperatures of 140℃ and 160℃.

5. The method for manufacturing an integrated biomimetic multimode wearable sweat sensor according to claim 1, characterized in that, In step 1 of fabricating the sensing unit on the substrate (1), the purity of the DMF solution is 97%-100%; the stirring parameters of the magnetic stirrer are: rotation speed 15-20 rpm, stirring for 1-1.5 hours; the carbon nanotubes are hydroxylated single-walled carbon nanotubes with an outer diameter of 1-5 nanometers.

6. The method for manufacturing an integrated biomimetic multimode wearable sweat sensor according to claim 1, characterized in that, In step 2 of fabricating the sensing unit on the substrate (1), the ball milling process parameters for lead zirconate titanate particles are: ball milling speed 100-150 rpm, ball milling time 2-2.5 days; polyvinylidene fluoride, lead zirconate titanate and carbon nanotube solution are prepared in a weight ratio of 50:1:40; the stirring parameters of the magnetic stirrer are: speed 15-20 rpm, stirring for 40-50 minutes.

7. The method for manufacturing an integrated biomimetic multimode wearable sweat sensor according to claim 1, characterized in that, In step 3 of fabricating the sensing unit on the substrate (1), the oxygen plasma processing parameters are: power 15-20 watts, vacuum degree 70-100 Pa, and processing time 2-2.5 minutes.

8. The method for manufacturing an integrated biomimetic multimode wearable sweat sensor according to claim 1, characterized in that, In step 4 of manufacturing the sensing unit on the substrate (1), the electrospinning process parameters are: excitation voltage -11-12 kV, distance from nozzle to substrate (1) 20-25 cm, electrospinning time 20-30 minutes; the plasma polarization process parameters are: power 50-60 W, vacuum degree 200-250 Pa, processing time 5-8 minutes; the low-temperature annealing process parameters are: annealing temperature 180-200 degrees Celsius, annealing time 15-20 minutes. In step 5 of fabricating the sensing unit on the substrate (1), the laser engraving process parameters of the electrochemical sensor (4) are: laser power 3-4 watts, scanning speed 30-35 mm / s, and 1 scan; the laser engraving process parameters of the piezoelectric thin film electrode (5) are: laser power 4-5 watts, scanning speed 25-30 mm / s, and 3 scans.

9. A method for manufacturing an integrated biomimetic multimodal wearable sweat sensor according to any one of claims 1-8, characterized in that, The specific steps for encapsulating the sensing unit and sweat collection microchannel (2) on the front side of the substrate (1) by spin-coating polyamic acid and thermal imidization as described in step three are as follows: Step 1: Mix polyamic acid and N,N-dimethylformamide in a certain proportion, stir thoroughly, and then defoam. After defoaming, spin coat the mixture onto the cleaned glass. Step 2: Place the front side of the substrate (1) onto the spin-coating position on the glass; heat to dehydrate and cyclize the polyamic acid on the glass to form a polyimide film; encapsulate the sweat collection microchannel (2) on the front side of the substrate (1); peel the whole off the glass to form an encapsulated multimode flexible wearable sweat sensor. Step 3: After removing the polyimide membranes corresponding to the sweat collection microchannel inlet (6) and sweat collection microchannel outlet (7), the final multimode flexible wearable sweat sensor is formed.

10. The method for manufacturing an integrated biomimetic multimodal wearable sweat sensor according to claim 9, characterized in that, In step 1 of the encapsulation of the sensing unit and the sweat collection microchannel (2), polyamic acid and N,N-dimethylformamide are prepared in a weight ratio of 1:1; the defoaming treatment is carried out in a vacuum oven with the following process parameters: vacuum degree 300-350 Pa, vacuuming time 15-20 minutes; the spin coating process parameters are: spin coating speed 3500-4000 rpm, spin coating time 20-25 seconds. In step 2 of encapsulating the sensing unit and the sweat collection microchannel (2), the heating process parameters are: heating temperature 300-320 degrees Celsius, heating time 30-40 minutes.

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