Pressure control system and method for superconducting ECR ion source
By introducing a superconducting magnet power supply, pressure sensor, and pressure controller into the superconducting ECR ion source, and combining this with a PID algorithm to adjust the heating power of the heating resistor, the problem of inaccurate pressure control in the liquid helium tank was solved, and the stable operation of the superconducting magnet and the long-term stability of the cryogenic system were achieved.
Patent Information
- Application Number
- CN202511661853.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-11-13
- Publication Date
- 2026-03-03
AI Technical Summary
The existing pressure control system of superconducting ECR ion source cannot achieve precise control of liquid helium tank pressure, resulting in liquid helium tank pressure that is too low or too high, affecting the stable operation of superconducting magnets. Furthermore, the current limitation of heating resistors leads to insufficient heating power or thermal disturbance.
Using a superconducting magnet power supply, pressure sensor, power meter, and pressure controller, combined with PID and programmable PID algorithms, the heating power of the heating resistor is adjusted in real time. Based on the combination of pressure, microwave power, and magnetic field current, the output of the pressure controller is dynamically adjusted to achieve precise pressure control of the liquid helium tank.
It achieves precise control of liquid helium tank pressure under different operating conditions, avoiding excessively low or high liquid helium tank pressure, ensuring stable operation of superconducting magnets, reducing thermal disturbances, reducing the operating power of the pressure control system, and ensuring long-term stable operation of the cryogenic system.
Smart Images
Figure CN121596923A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of ion sources, and in particular to a voltage control system and method for a superconducting ECR (electron cyclotron resonance) ion source. Background Technology
[0002] Superconducting ECR ion sources are cathodeless ion sources that generate high-density plasma using the principle of microwave and magnetic field resonance. They are characterized by high flux and high stability. The core of the method is to match the microwave frequency with the cyclotron resonance frequency of electrons in the magnetic field, heat the electrons in the plasma arc cavity and confine the ions, thereby obtaining a high flux and high charge state ion beam.
[0003] The compressor is a cooling device in the superconducting ECR ion source, responsible for outputting cooling capacity. Therefore, heating elements (usually heating resistors) need to be arranged in the liquid helium tank of the superconducting ECR ion source to heat the liquid helium, so that the liquid helium tank can maintain a positive pressure relative to the outside world, preventing outside gas from entering the liquid helium tank, which would eventually cause the compressor cold head to frost over and lose its cooling capacity.
[0004] Currently, the pressure controller 4 in existing superconducting ECR ion sources only has two operating states: on and off. It simply reads the pressure from the pressure sensor. When the pressure is below a certain threshold, the controller starts heating; when it is above the threshold, it shuts off heating. This type of controller cannot accurately and stably control the liquid helium tank pressure. Furthermore, to reduce heat leakage from the liquid helium, the wires connecting the heating resistors inside the liquid helium tank are generally thin, resulting in high resistance and significant heat generation when current flows through them (typically, the heating power of the wires is consistent with the heating power of the heating resistors in the liquid helium). Therefore, the current through the wires cannot be too large, limiting the overall heating power. When the pressure sensor detects a pressure below the threshold before starting heating, a rapid pressure increase cannot be achieved, risking excessively low liquid helium tank pressure. Additionally, immediately reaching maximum power output upon heating can create thermal disturbances in the liquid helium, potentially inducing superconducting magnet quench failure. Summary of the Invention
[0005] To address the aforementioned problems, the purpose of this invention is to provide a pressure control system and method for a superconducting ECR ion source, which can solve the problem of insufficient pressure control in the liquid helium cell of a superconducting ECR ion source.
[0006] To achieve the above objectives, the present invention adopts the following technical solution: On the one hand, it provides a pressure control system for a superconducting ECR ion source, including a superconducting magnet power supply, a pressure sensor, a power meter, and a pressure controller; The superconducting magnet power supply is connected to the current leads of the superconducting magnet in the voltage controller and the superconducting ECR ion source, respectively, to provide current to the superconducting magnet, read back the magnetic field current of the superconducting magnet and send it to the voltage controller in real time; The pressure sensor is installed on the superconducting ECR ion source and is used to collect the pressure in the liquid helium tank of the superconducting ECR ion source in real time. The power meter is connected to the voltage controller and is used to read back the microwave power output from the microwave machine to the superconducting ECR ion source in real time and send it to the voltage controller in real time. The pressure controller is also connected to the heating resistor of the superconducting ECR ion source, which is used to read back the pressure collected by the pressure sensor in real time. It uses PID algorithm and programmable PID algorithm to dynamically adjust the heating power of the heating resistor according to the real-time read pressure, the microwave power sent by the power meter in real time and the magnetic field current sent by the superconducting magnet power supply in real time, so as to ensure the stable operation of the superconducting ECR ion source.
[0007] Furthermore, the pressure controller is equipped with a PID controller and a strategy determination module; The PID controller is used to employ a PID algorithm, based on pre-set PID parameters and control cycle, and according to the pressure collected in real time by the pressure sensor and the determined pressure control function under different combinations of microwave power and magnetic field current, to determine the output power in real time, and then to determine the heating power of the heating resistor in real time, and output it to the heating resistor of the superconducting ECR ion source. The strategy determination module is used to employ a programmable PID algorithm to determine the pressure control function under different combinations of microwave power and magnetic field current based on the microwave power transmitted in real time by the power meter, the magnetic field current transmitted in real time by the superconducting magnet power supply, and the pressure collected in real time by the pressure sensor.
[0008] Furthermore, the output power control process of the voltage controller includes: In operating condition 1, the superconducting magnet in the superconducting ECR ion source is kept at a low temperature. At this time, only the basic heating affects the temperature of the liquid helium tank, and the voltage controller maintains a stable power output. Operating condition 2: The superconducting magnet in the superconducting ECR ion source is loaded with current. The voltage controller calculates the ohmic heat by reading back the magnetic field current sent in real time by the superconducting magnet power supply, thereby stabilizing the output after reducing part of the output power. In operating condition three, the superconducting ECR ion source is operating normally, and the voltage controller dynamically adjusts the output power based on the microwave power transmitted in real time by the power meter and the magnetic field current transmitted in real time by the superconducting magnet power supply.
[0009] Furthermore, the pressure control system also includes an industrial computer and a human-machine interface; Both the industrial control computer and the human-machine interface are connected to the pressure controller via a control network. The industrial control computer is used to remotely monitor and adjust the operating status of the pressure controller, record historical data, and perform fault diagnosis. The human-machine interface is used to enable human-machine interaction between on-site operators and the pressure controller.
[0010] Furthermore, the PID controller is either single-output or dual-output. In single-output mode, the PID controller is set to either heating output or cooling output. In dual-output mode, the PID controller outputs both heating and cooling outputs, with two sets of independent PID parameters.
[0011] On the other hand, a method for controlling the voltage of a superconducting ECR ion source is provided, including: The superconducting magnet power supply provides current to the superconducting magnet of the superconducting ECR ion source based on demand, and reads back the magnetic field current of the superconducting magnet and sends it to the voltage controller in real time. The power meter reads back the microwave power output from the microwave machine to the superconducting ECR ion source in real time and sends it to the voltage controller in real time. The pressure sensor collects the pressure in the liquid helium tank of the superconducting ECR ion source in real time; The pressure controller reads back the pressure collected by the pressure sensor in real time and uses PID algorithm and programmable PID algorithm to dynamically adjust the output power based on the actual working conditions, according to the microwave power sent by the power meter in real time and the magnetic field current sent by the superconducting magnet power supply in real time. In turn, it dynamically adjusts the heating power of the heating resistor to ensure the stable operation of the superconducting ECR ion source.
[0012] Furthermore, the pressure controller reads back the pressure collected by the pressure sensor in real time, and uses PID and programmable PID algorithms to dynamically adjust the output power based on actual operating conditions, according to the microwave power transmitted in real time by the power meter and the magnetic field current transmitted in real time by the superconducting magnet power supply. This dynamically adjusts the heating power of the heating resistor to ensure stable operation of the superconducting ECR ion source, including: The strategy determination module uses a programmable PID algorithm to determine the pressure control function under different combinations of microwave power and magnetic field current based on the microwave power sent in real time by the power meter, the magnetic field current sent in real time by the superconducting magnet power supply, and the pressure collected in real time by the pressure sensor. The PID controller uses the PID algorithm. Based on the pre-set PID parameters, control cycle and actual working conditions, it determines the output power in real time according to the pressure collected in real time by the pressure sensor and the pressure control function under different combinations of microwave power and magnetic field current. Then, it determines the heating power of the heating resistor in real time and outputs it to the heating resistor of the superconducting ECR ion source.
[0013] Furthermore, the strategy determination module employs a programmable PID algorithm to determine the pressure control function under different combinations of microwave power and magnetic field current based on the microwave power transmitted in real time by the power meter, the magnetic field current transmitted in real time by the superconducting magnet power supply, and the pressure collected in real time by the pressure sensor. This function includes: Set the input error adjustment value and gain value; Set the total target pressure and compare it with the pressure collected in real time by the pressure sensor. Divide the pressure control process into multiple stages, each of which includes multiple steps. Within each stage, the target pressure and running time for each step are set to determine the corresponding pressure control function and arrival time. The independent variables of the pressure control function are the microwave power transmitted in real time by the power meter and the magnetic field current transmitted in real time by the superconducting magnet power supply, and the dependent variable of the pressure control function is the heating power of the heating resistor. Set the jump procedure, subroutine loop count, and actual execution steps within a stage to adjust the jump between stages, the number of stages to be repeated, and the maximum number of steps to be executed in each stage; Based on the set input error adjustment value and gain value, as well as the set jump program, subroutine loop count and actual execution steps within the stage, the pressure control function under different combinations of microwave power and magnetic field current is determined.
[0014] Furthermore, the PID controller is either single-output or dual-output. In single-output mode, the PID controller is set to either heating output or cooling output. In dual-output mode, the PID controller outputs both heating and cooling outputs, with two sets of independent PID parameters.
[0015] Furthermore, the operating conditions include: Condition 1: The superconducting magnet in the superconducting ECR ion source is kept at a low temperature. At this time, only the basic heating affects the temperature of the liquid helium tank, and the voltage controller maintains a stable power output. In the second operating condition, the superconducting magnet in the superconducting ECR ion source is loaded with current. The voltage controller calculates the ohmic heat by reading back the magnetic field current sent in real time by the superconducting magnet power supply, thereby stabilizing the output after reducing part of the output power. In operating condition three, the superconducting ECR ion source is operating normally, and the voltage controller dynamically adjusts the output power based on the microwave power sent in real time by the power meter and the magnetic field current sent in real time by the superconducting magnet power supply.
[0016] The present invention has the following advantages due to the adoption of the above technical solutions: 1. This invention can adjust the heating power in real time according to the working status of the superconducting ECR ion source, and can achieve precise control of the helium cell pressure under various working conditions of the ECR ion source.
[0017] 2. This invention can ensure a slight positive pressure in the liquid helium tank and control the heating rate of the heating resistor, avoiding thermal disturbances that could cause the superconducting magnet to lose its quench, thus ensuring the stable operation of the superconducting ECR ion source.
[0018] 3. This invention can effectively avoid the occurrence of negative pressure in the helium tank, ensure that the cryogenic system does not enter the external impurity gas, and guarantee the long-term stable operation of the cryogenic system.
[0019] 4. This invention can effectively utilize the heating effect of other systems on the liquid helium tank when the superconducting ECR ion source is working, thereby reducing the operating power of the pressure control system.
[0020] 5. This invention can also provide the heating power of superconducting magnets and microwave machines for cryogenic systems, providing key parameters for the design of cryogenic holders for superconducting ECR ion sources.
[0021] In summary, this invention can be widely applied in the field of ion sources. Attached Figure Description
[0022] Various other advantages and benefits will become apparent to those skilled in the art upon reading the following detailed description of preferred embodiments. The accompanying drawings are for illustrative purposes only and are not intended to limit the invention. Throughout the drawings, the same reference numerals denote the same parts. In the drawings: Figure 1 This is a side cross-sectional view of a superconducting ECR ion source provided in an embodiment of the present invention; Figure 2 This is a schematic diagram of the structure of a pressure control system provided in an embodiment of the present invention; Figure 3 This is a schematic diagram of the structure of a pressure controller provided in an embodiment of the present invention. Detailed Implementation
[0023] Exemplary embodiments of the invention will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the invention are shown in the drawings, it should be understood that the invention can be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided to enable a more thorough understanding of the invention and to fully convey the scope of the invention to those skilled in the art.
[0024] It should be understood that the terminology used herein is for the purpose of describing particular exemplary embodiments only and is not intended to be limiting. Unless the context clearly indicates otherwise, the singular forms “a,” “an,” and “described” as used herein may also include the plural forms. The terms “comprising,” “including,” “containing,” and “having” are inclusive and therefore indicate the presence of the stated features, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein are not construed as requiring them to be performed in a particular order described or illustrated unless the order of performance is explicitly indicated. It should also be understood that additional or alternative steps may be used.
[0025] Although terms such as first, second, third, etc., may be used in this document to describe multiple elements, components, regions, layers, and / or segments, these elements, components, regions, layers, and / or segments should not be limited by these terms. These terms may be used only to distinguish one element, component, region, layer, or segment from another. Unless the context clearly indicates otherwise, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence. Therefore, the first element, component, region, layer, or segment discussed below may be referred to as the second element, component, region, layer, or segment without departing from the teachings of the exemplary embodiments.
[0026] For ease of description, spatial relative terms may be used in the text to describe the relationship of one element or feature relative to another element or feature as shown in the figure. These relative terms include, for example, "inside," "outside," "middle," "outer," "below," "above," etc. Such spatial relative terms are intended to include different orientations of the device in use or operation, other than those depicted in the figure.
[0027] Because the compressor operates with a constant power output, while the heat load generated by the superconducting ECR ion source changes dynamically in actual operation, the output of the pressure controller also needs to be dynamically adjusted. Furthermore, since the heating resistor is located at the bottom of the liquid helium tank, the power cable path from top to bottom is too long and has a large temperature distribution; moreover, to reduce heat leakage, the wire diameter of the power cable is also small, ultimately resulting in a limited current flow through the power cable. Therefore, it is necessary to anticipate the ion source status and adjust the pressure controller output power in advance. Therefore, this invention provides a pressure control system for a superconducting ECR ion source, including a superconducting magnet power supply, a pressure sensor, a power meter, and a pressure controller. The superconducting magnet power supply is connected to the pressure controller and the current lead of the superconducting magnet in the superconducting ECR ion source, respectively, to provide current to the superconducting magnet, read back the magnetic field current of the superconducting magnet, and send it to the pressure controller in real time. The pressure sensor is installed on the superconducting ECR ion source to collect the pressure in the liquid helium tank of the superconducting ECR ion source in real time. The power meter is connected to the pressure controller to read back the microwave power output from the microwave machine to the superconducting ECR ion source in real time and send it to the pressure controller in real time. The pressure controller is also connected to the heating resistor of the superconducting ECR ion source to read back the pressure collected by the pressure sensor in real time, and uses a PID algorithm and a programmable PID algorithm to dynamically adjust the heating power of the heating resistor according to the real-time read pressure, the real-time microwave power sent by the power meter, and the real-time magnetic field current sent by the superconducting magnet power supply, so as to ensure the stable operation of the superconducting ECR ion source. This invention aims to maintain a positive pressure relative to the external environment in the liquid helium cell of a superconducting ECR ion source, thereby preventing external gases from entering the liquid helium and causing frost to form on the condenser, which would then render the cold head inoperable and ultimately disrupt the 4.2 K low-temperature environment.
[0028] Example 1 like Figure 1 As shown, the superconducting ECR ion source includes an outer Dewar, a plasma arc cavity, a liquid helium tank, a heating resistor, and a superconducting magnet. The outer Dewar and the liquid helium tank are both annular cylindrical structures with a channel in the middle. The channel diameter of the liquid helium tank is larger than that of the outer Dewar, and the two are concentric.
[0029] An outer Dewar contains a liquid helium tank. The outer Dewar and the liquid helium tank are connected by an insulated tie rod, which hangs inside the outer Dewar to reduce thermal contact between them. A plasma arc cavity is located within the channel between the outer Dewar and the liquid helium tank. One end of the plasma arc cavity has a gas inlet and a microwave waveguide port, while the other end has a beam outlet.
[0030] A superconducting magnet is installed inside the liquid helium tank, and a heating resistor is installed at the bottom of the tank. Both the liquid helium tank and the outer Dewar have two through-holes at the top. One through-hole is used to house the cold head, which has a condenser at the bottom. The other through-hole is used to connect the current leads of the superconducting magnet, the power supply lines of the heating resistor, and the signal lines of the thermometer, as well as to accommodate a pressure relief valve. The two through-holes at the top of the liquid helium tank and the outer Dewar are connected by flanges; the through-hole of the liquid helium tank is welded to the inner ring of the flange, and the through-hole of the outer Dewar is welded to the outer ring. When the pressure relief valve is open or the cold head is removed, the liquid helium tank will be open to the outside environment; however, under normal circumstances, it is a closed pressure vessel. The heating resistor heats the liquid helium in the tank, the superconducting magnet generates the magnetic field for the superconducting ECR ion source, and the cold head maintains the temperature inside the liquid helium tank.
[0031] Based on the overall structure of the superconducting ECR ion source described above, such as Figure 1 , Figure 2 As shown, this embodiment provides a pressure control system for a superconducting ECR ion source, including a superconducting magnet power supply 1, a pressure sensor 2, a power meter 3, and a pressure controller 4.
[0032] The superconducting magnet power supply 1 is connected to the current lead of the superconducting magnet of the voltage controller 4 and the superconducting ECR ion source, respectively, to provide current to the superconducting magnet, read back the magnetic field current of the superconducting magnet and send it to the voltage controller 4 in real time.
[0033] Pressure sensor 2 is installed on the superconducting ECR ion source to collect the pressure in the liquid helium tank of the superconducting ECR ion source in real time.
[0034] The power meter 3 is connected to the microwave generator and the voltage controller 4 respectively. It is used to read back the microwave power output from the microwave generator to the superconducting ECR ion source in real time and send it to the voltage controller 4 in real time.
[0035] The pressure controller 4 is also connected to the heating resistor of the superconducting ECR ion source. It is used to read back the pressure collected by the pressure sensor 2 in real time. It adopts PID algorithm and programmable PID algorithm to dynamically adjust the output power according to the real-time read pressure, the microwave power sent by the power meter 3 in real time and the magnetic field current sent by the superconducting magnet power supply 1 in real time, and then dynamically adjust the heating power of the heating resistor to ensure the stable operation of the superconducting ECR ion source.
[0036] In a preferred embodiment, such as Figure 3As shown, the pressure control system also includes an industrial computer 5 and a human-machine interface (HMI) 6, both of which are connected to the pressure controller 4 via a control network. The industrial computer 5 is used to remotely monitor and adjust the operating status of the pressure controller 4, record historical data, and perform fault diagnosis. The HMI 6 enables human-machine interaction between on-site operators and the pressure controller 4, providing a user-friendly interface that allows ion source operators to perform various functions such as graphical, real-time monitoring, fault diagnosis, data recording, and on-site report generation. The control network provides reliable real-time data transmission, equipment coordination, data processing, and analysis, ensuring efficient and flexible communication between the pressure controller 4, the industrial computer 5, and the HMI 6.
[0037] In a preferred embodiment, such as Figure 3 As shown, the pressure controller 4 is equipped with a PID controller 41 and a strategy determination module 42.
[0038] The PID controller 41 is used to employ a PID algorithm, based on pre-set PID parameters and control cycle, and according to the pressure collected in real time by the pressure sensor 2 and the determined pressure curve, to determine the output power in real time, and then to determine the heating power of the heating resistor in real time, and output it to the heating resistor of the superconducting ECR ion source.
[0039] The strategy determination module 42 is used to determine the pressure curve by employing a programmable PID algorithm based on input parameters such as the microwave power transmitted in real time by the power meter 3, the magnetic field current transmitted in real time by the superconducting magnet power supply 1, the pressure collected in real time by the pressure sensor 2, and the ion source load.
[0040] In a preferred embodiment, the present invention can be used in various operating conditions of a superconducting ECR ion source, and the output power control process of the voltage controller 4 includes: Condition 1: The superconducting magnet in the superconducting ECR ion source is kept at a low temperature: At this time, only the basic heating, such as external radiation and heat conduction from the insulating rod, affects the temperature of the liquid helium tank, and the pressure controller 4 can maintain a stable power output.
[0041] Condition 2, superconducting magnet loading current in superconducting ECR ion source: Compared with condition 1, condition 2 adds the ohmic heat of the current lead of the superconducting magnet as a new heat source. The voltage controller 4 calculates the ohmic heat by reading back the magnetic field current sent in real time by the superconducting magnet power supply 1, so that the output can be stabilized after reducing the output power.
[0042] Condition 3: The superconducting ECR ion source operates normally. Compared to Condition 2, Condition 3 adds plasma radiation as a new heat source. The radiation intensity of the plasma is directly related to the microwave power output from the microwave unit to the superconducting ECR ion source. The radiation intensity of the plasma can be determined by reading the microwave power back from the power meter 3. Simultaneously, during actual operation, the microwave power and magnetic field current are continuously adjusted as needed. Therefore, the output power of the voltage controller 4 is dynamically adjusted according to the changes in these two parameters.
[0043] Specifically, the PID controller 41 is either single-output or dual-output. In the single-output case, the PID controller 41 is set to either heating output or cooling output. In the dual-output case, the PID controller 41 outputs both heating and cooling outputs, with two sets of independent PID parameters.
[0044] Example 2 This embodiment provides a pressure control method for a superconducting ECR ion source, including the following steps: 1) The superconducting magnet power supply 1 provides current to the superconducting magnet of the superconducting ECR ion source based on demand, and reads back the magnetic field current of the superconducting magnet and sends it to the voltage controller 4 in real time.
[0045] 2) The power meter 3 reads back the microwave power output from the microwave machine to the superconducting ECR ion source in real time and sends it to the voltage controller 4 in real time.
[0046] 3) Pressure sensor 2 collects the pressure in the liquid helium tank of the superconducting ECR ion source in real time.
[0047] 4) The pressure controller 4 reads back the pressure collected by the pressure sensor 2 in real time, and uses PID algorithm and programmable PID algorithm to dynamically adjust the output power based on the actual working conditions, according to the microwave power sent in real time by the power meter 3 and the magnetic field current sent in real time by the superconducting magnet power supply 1. This dynamically adjusts the heating power of the heating resistor to ensure the stable operation of the superconducting ECR ion source. Specifically: 4.1) The strategy determination module 42 uses a programmable PID algorithm to determine the pressure control function under different combinations of microwave power and magnetic field current based on the microwave power transmitted in real time by the power meter 3 and the magnetic field current transmitted in real time by the superconducting magnet power supply 1: 4.1.1) Set the input error adjustment value and gain value to meet the actual ion source pressure control requirements.
[0048] 4.1.2) Set the total target pressure and compare it with the pressure collected in real time by pressure sensor 2. Divide the pressure control process into multiple stages, each of which includes multiple steps. This embodiment uses seven stages and each stage includes seven steps as an example for explanation.
[0049] 4.1.3) Within each stage, the target pressure and running time corresponding to each step are set respectively to determine the corresponding pressure control function and arrival time. The independent variable of the pressure control function is the microwave power transmitted in real time by the power meter 3 and the magnetic field current transmitted in real time by the superconducting magnet power supply 1. The dependent variable of the pressure control function is the heating power of the heating resistor.
[0050] 4.1.4) Set the jump procedure, subroutine loop count, and actual execution steps within a stage to adjust the jump between stages, the number of stages to be repeated, and the maximum number of steps to be executed in each stage.
[0051] Specifically, the jump procedure refers to the number of the next stage after this stage ends. The subroutine loop count refers to the additional number of loops executed in this stage; for example, if set to 1, this stage will execute 2 times. The actual number of steps executed within the stage refers to the number of valid steps executed in this stage; for example, if set to 5, this stage will stop executing the remaining steps after the fifth step and directly proceed to the next stage.
[0052] 4.1.5) Based on the set input error adjustment value and gain value, as well as the set jump program, subroutine loop count and actual execution steps within the stage, the pressure control function under different combinations of microwave power and magnetic field current is determined.
[0053] 4.2) The PID controller 41 adopts the PID algorithm. Based on the preset PID parameters, control cycle and actual working conditions, it determines the output power in real time according to the pressure collected in real time by the pressure sensor 2 and the pressure control function under different combinations of microwave power and magnetic field current. Then, it determines the heating power of the heating resistor in real time and outputs it to the heating resistor of the superconducting ECR ion source.
[0054] Specifically, step 4.1) above obtains the pressure control function under different combinations of microwave power and magnetic field current. Therefore, after reading back a set of determined microwave power and magnetic field current, the heating power required by the heating resistor can be directly preset.
[0055] Specifically, PID consists of three parts: proportional (P), integral (I), and derivative (D). It maintains or achieves the desired target value by continuously adjusting the system's output.
[0056] Specifically, the P, I, and D parameters are manually adjusted according to the characteristics of the system or automatically generated by self-tuning. The control cycle refers to the cycle of PID calculation. If the system heats up very quickly, i.e. the Dewar pressure rises very quickly, the control cycle cannot be set too long.
[0057] Specifically, the PID controller 41 can be single-output or dual-output. In single-output mode, the PID controller 41 is set to either heating or cooling output. In dual-output mode, the PID controller 41 outputs both heating and cooling outputs, with two independent sets of PID parameters. A dead zone can be set, which is automatically activated during dual-output control to avoid energy waste caused by frequent heating or cooling control actions. When the PID controller 41 is set to single-output or dual-output mode, the program performs PID calculations based on the real-time pressure (PV) collected by the input pressure sensor 2 and the set target value (SV), and outputs the calculation result to control the temperature of the heating resistor.
[0058] The above embodiments are only used to illustrate the present invention. The structure, connection method and manufacturing process of each component can be varied. All equivalent transformations and improvements made on the basis of the technical solution of the present invention should not be excluded from the protection scope of the present invention.
Claims
1. A voltage control system for a superconducting ECR ion source, characterized in that, Includes superconducting magnet power supply, pressure sensor, power meter and voltage controller; The superconducting magnet power supply is connected to the current leads of the superconducting magnet in the voltage controller and the superconducting ECR ion source, respectively, to provide current to the superconducting magnet, read back the magnetic field current of the superconducting magnet and send it to the voltage controller in real time; The pressure sensor is installed on the superconducting ECR ion source and is used to collect the pressure in the liquid helium tank of the superconducting ECR ion source in real time. The power meter is connected to the voltage controller and is used to read back the microwave power output from the microwave machine to the superconducting ECR ion source in real time and send it to the voltage controller in real time. The pressure controller is also connected to the heating resistor of the superconducting ECR ion source, which is used to read back the pressure collected by the pressure sensor in real time. It uses PID algorithm and programmable PID algorithm to dynamically adjust the heating power of the heating resistor according to the real-time read pressure, the microwave power sent by the power meter in real time and the magnetic field current sent by the superconducting magnet power supply in real time, so as to ensure the stable operation of the superconducting ECR ion source.
2. The voltage control system for a superconducting ECR ion source as described in claim 1, characterized in that, The pressure controller is equipped with a PID controller and a strategy determination module. The PID controller is used to employ a PID algorithm, based on pre-set PID parameters and control cycle, and according to the pressure collected in real time by the pressure sensor and the determined pressure control function under different combinations of microwave power and magnetic field current, to determine the output power in real time, and then to determine the heating power of the heating resistor in real time, and output it to the heating resistor of the superconducting ECR ion source. The strategy determination module is used to employ a programmable PID algorithm to determine the pressure control function under different combinations of microwave power and magnetic field current based on the microwave power transmitted in real time by the power meter, the magnetic field current transmitted in real time by the superconducting magnet power supply, and the pressure collected in real time by the pressure sensor.
3. The voltage control system for a superconducting ECR ion source as described in claim 1, characterized in that, The output power control process of the voltage controller includes: In operating condition 1, the superconducting magnet in the superconducting ECR ion source is kept at a low temperature. At this time, only the basic heating affects the temperature of the liquid helium tank, and the voltage controller maintains a stable power output. Operating condition 2: The superconducting magnet in the superconducting ECR ion source is loaded with current. The voltage controller calculates the ohmic heat by reading back the magnetic field current sent in real time by the superconducting magnet power supply, thereby stabilizing the output after reducing part of the output power. In operating condition three, the superconducting ECR ion source is operating normally, and the voltage controller dynamically adjusts the output power based on the microwave power transmitted in real time by the power meter and the magnetic field current transmitted in real time by the superconducting magnet power supply.
4. The voltage control system for a superconducting ECR ion source as described in claim 1, characterized in that, The pressure control system also includes an industrial computer and a human-machine interface; Both the industrial control computer and the human-machine interface are connected to the pressure controller via a control network. The industrial control computer is used to remotely monitor and adjust the operating status of the pressure controller, record historical data, and perform fault diagnosis. The human-machine interface is used to enable human-machine interaction between on-site operators and the pressure controller.
5. A voltage control system for a superconducting ECR ion source as described in claim 2, characterized in that, The PID controller can be single-output or dual-output. In single-output mode, the PID controller is set to either heating output or cooling output. In dual-output mode, the PID controller outputs both heating and cooling outputs, with two sets of independent PID parameters.
6. A method for controlling the voltage of a superconducting ECR ion source, characterized in that, include: The superconducting magnet power supply provides current to the superconducting magnet of the superconducting ECR ion source based on demand, and reads back the magnetic field current of the superconducting magnet and sends it to the voltage controller in real time. The power meter reads back the microwave power output from the microwave machine to the superconducting ECR ion source in real time and sends it to the voltage controller in real time. The pressure sensor collects the pressure in the liquid helium tank of the superconducting ECR ion source in real time; The pressure controller reads back the pressure collected by the pressure sensor in real time and uses PID algorithm and programmable PID algorithm to dynamically adjust the output power based on the actual working conditions, according to the microwave power sent by the power meter in real time and the magnetic field current sent by the superconducting magnet power supply in real time. In turn, it dynamically adjusts the heating power of the heating resistor to ensure the stable operation of the superconducting ECR ion source.
7. The voltage control method for a superconducting ECR ion source as described in claim 6, characterized in that, The pressure controller reads back the pressure collected by the pressure sensor in real time and uses PID and programmable PID algorithms to dynamically adjust the output power based on actual operating conditions, according to the microwave power transmitted in real time by the power meter and the magnetic field current transmitted in real time by the superconducting magnet power supply. This dynamically adjusts the heating power of the heating resistor to ensure stable operation of the superconducting ECR ion source, including: The strategy determination module uses a programmable PID algorithm to determine the pressure control function under different combinations of microwave power and magnetic field current based on the microwave power sent in real time by the power meter, the magnetic field current sent in real time by the superconducting magnet power supply, and the pressure collected in real time by the pressure sensor. The PID controller uses the PID algorithm. Based on the pre-set PID parameters, control cycle and actual working conditions, it determines the output power in real time according to the pressure collected in real time by the pressure sensor and the pressure control function under different combinations of microwave power and magnetic field current. Then, it determines the heating power of the heating resistor in real time and outputs it to the heating resistor of the superconducting ECR ion source.
8. The voltage control method for a superconducting ECR ion source as described in claim 7, characterized in that, The strategy determination module employs a programmable PID algorithm to determine pressure control functions for different combinations of microwave power and magnetic field current based on the real-time microwave power transmitted by the power meter, the real-time magnetic field current transmitted by the superconducting magnet power supply, and the real-time pressure collected by the pressure sensor. These functions include: Set the input error adjustment value and gain value; Set the total target pressure and compare it with the pressure collected in real time by the pressure sensor. Divide the pressure control process into multiple stages, each of which includes multiple steps. Within each stage, the target pressure and running time for each step are set to determine the corresponding pressure control function and arrival time. The independent variables of the pressure control function are the microwave power transmitted in real time by the power meter and the magnetic field current transmitted in real time by the superconducting magnet power supply, and the dependent variable of the pressure control function is the heating power of the heating resistor. Set the jump procedure, subroutine loop count, and actual execution steps within a stage to adjust the jump between stages, the number of stages to be repeated, and the maximum number of steps to be executed in each stage; Based on the set input error adjustment value and gain value, as well as the set jump program, subroutine loop count and actual execution steps within the stage, the pressure control function under different combinations of microwave power and magnetic field current is determined.
9. The voltage control method for a superconducting ECR ion source as described in claim 7, characterized in that, The PID controller can be single-output or dual-output. In single-output mode, the PID controller is set to either heating output or cooling output. In dual-output mode, the PID controller outputs both heating and cooling outputs, with two sets of independent PID parameters.
10. The voltage control method for a superconducting ECR ion source as described in claim 7, characterized in that, The operating conditions include: Condition 1: The superconducting magnet in the superconducting ECR ion source is kept at a low temperature. At this time, only the basic heating affects the temperature of the liquid helium tank, and the voltage controller maintains a stable power output. In the second operating condition, the superconducting magnet in the superconducting ECR ion source is loaded with current. The voltage controller calculates the ohmic heat by reading back the magnetic field current sent in real time by the superconducting magnet power supply, thereby stabilizing the output after reducing part of the output power. In operating condition three, the superconducting ECR ion source is operating normally, and the voltage controller dynamically adjusts the output power based on the microwave power sent in real time by the power meter and the magnetic field current sent in real time by the superconducting magnet power supply.