Flexible hinge actuator assembly

Abstract

The embodiment relates to a flexible hinge actuator. The actuator may include a base and a moving bracket configured to move in one direction (e.g., Z-direction). The flexible hinge assembly may include structures disposed on a plurality of sides (e.g., 2 sides, 4 sides). The flexible hinge assembly structure may limit movement of the mobile carriage in other directions than the Z-direction to limit unfavorable movement of the mobile carriage. The actuators as described herein may include simple structures to constrain pitch and yaw tilt during Z motion of a payload. The actuator can push the side face of the structure to move the bracket up and down (or in the Z-direction).

Description

Cross-references to related applications

[0001] This application claims the benefit and priority of U.S. Provisional Application No. 63 / 530,825, filed August 4, 2023, and U.S. Patent Application No. 18 / 787,919, filed July 29, 2024, the entire contents of which are incorporated herein by reference. Technical Field

[0002] The present invention generally relates to an actuator, and more specifically to an actuator having a flexible hinge assembly that limits unwanted movement of the actuator. Background Technology

[0003] Actuators can be used in a variety of situations. For example, as part of an autofocus system, an actuator can move a lens back and forth to focus it. In many cases, it may be necessary to move the moving part in a desired direction (e.g., the Z direction) to increase the efficiency of implementing this autofocus system.

[0004] However, many actuator designs can cause the moving part to move in directions other than the desired direction (e.g., pitch, yaw, roll). Such undesirable motion can induce stresses in the actuator, such as adding undesirable torque and out-of-plane bending forces. Therefore, it is desirable for actuators to be designed to restrain undesirable movements (e.g., pitch, yaw, tilt) during the Z-motion of the payload. Summary of the Invention

[0005] This embodiment relates to a flexible hinge actuator. The actuator may include a base and a movable bracket configured to move in one direction (e.g., the Z-direction). The flexible hinge assembly may include structures disposed on multiple sides (e.g., two sides, four sides). This flexible hinge assembly structure can restrict movement of the movable bracket in directions other than the Z-direction to limit undesirable movement of the movable bracket. The actuator described herein may include a simple structure to constrain pitch and yaw tilt during the Z-motion of the payload. The actuator can actuate the sides of the structure to move the bracket up and down (or in the Z-direction).

[0006] In a first exemplary embodiment, a flexible hinge actuator is provided. The flexible hinge actuator may include a static base and a movable bracket configured to move relative to the static base in the Z direction. The flexible hinge actuator may further include a flexible hinge assembly configured to allow movement of the movable bracket in the Z direction and restrict movement of the movable bracket in other directions. The flexible hinge assembly may include at least two flexible hinge structures disposed on corresponding sides of the flexible hinge actuator.

[0007] In some cases, the flexible hinge assembly includes a flexible hinge structure disposed on each of the four sides of the flexible hinge actuator.

[0008] In some cases, each flexible hinge structure includes a first link and a second link. The first link may be connected to a static base at a first hinge joint (joint) and to a second link at a second hinge joint. The second link may be connected to a movable bracket at a third hinge joint. In some cases, any one of the first, second, or third hinge joints comprises a flexible metal hinge.

[0009] In some cases, each flexible hinge structure further includes at least one link connecting the movable bracket to the flexible hinge structure and a dual piezoelectric wafer actuator configured to actuate said at least one link. The dual piezoelectric wafer actuator may include a beam comprising a first end fixed to the flexible hinge structure and a second end forming a free end. Movement of the free end can be configured to actuate said at least one link. In some cases, the dual piezoelectric wafer actuator also includes a shape-matrix alloy (SMA) material disposed along the beam between the fixed end and the free end.

[0010] In some cases, the flexible hinge structure includes at least a first flexible hinge structure oriented in a first direction and a second flexible hinge structure oriented in a second direction opposite to the first direction.

[0011] In some cases, the flexible hinge actuator also includes a lens, a housing, and four dual piezoelectric crystal actuators connected to the movable bracket, wherein each of the four dual piezoelectric crystal actuators is disposed on the housing and provides X / Y motion of the movable bracket.

[0012] In some cases, the flexible hinge actuator also includes a cover disposed above a portion of the movable bracket and housing, the cover including end stops to limit movement of the movable bracket beyond a threshold travel range.

[0013] In some cases, the flexible hinge actuator also includes an image sensor assembly disposed below the flexible hinge assembly and a flexible sensor circuit connected to the flexible hinge assembly and the image sensor assembly.

[0014] In another exemplary embodiment, an apparatus is provided. The apparatus may include a static base and a movable bracket configured to move relative to the static base in a Z-direction. The apparatus may also include a flexible hinge assembly configured to allow movement of the movable bracket in the Z-direction and restrict movement of the movable bracket in other directions. The flexible hinge assembly may include at least two flexible hinge structures disposed on corresponding sides of a flexible hinge actuator. Each flexible hinge structure may include a first link and a second link. The first link may be connected to the static base at a first hinge joint and to a second link at a second hinge joint. The second link may be connected to the movable bracket at a third hinge joint.

[0015] In some cases, the device may also include a dual piezoelectric crystal actuator configured to actuate a first link of each flexible hinge structure. The dual piezoelectric crystal actuator may include a beam comprising a first end fixed to a flexible hinge structure and a second end forming a free end, wherein movement of the free end is configured to actuate at least one link. The dual piezoelectric crystal actuator may also include a shape-matrix alloy (SMA) material disposed along the beam between the fixed end and the free end.

[0016] In some cases, the flexible hinge structure includes at least a first flexible hinge structure oriented in a first direction and a second flexible hinge structure oriented in a second direction opposite to the first direction.

[0017] In some cases, the device may also include a lens, a housing, and four dual piezoelectric crystal actuators connected to the movable carriage, wherein each of the four dual piezoelectric crystal actuators is disposed on the housing and provides X / Y motion of the movable carriage.

[0018] In some cases, the device may also include a cover disposed above a portion of the movable bracket and housing, the cover including end stops to limit movement of the movable bracket beyond a threshold travel range.

[0019] In some cases, the device may also include an image sensor assembly disposed below the flexible hinge assembly and a flexible sensor circuit connected to the flexible hinge assembly and the image sensor assembly.

[0020] In another exemplary embodiment, an actuator is provided. The actuator may include a static base, a movable bracket configured to move relative to the static base, and a flexible hinge assembly configured to allow movement of the movable bracket in a first direction and limit movement of the movable bracket in other directions. The flexible hinge assembly may include four flexible hinge structures disposed on each side of the flexible hinge actuator.

[0021] In some cases, each flexible hinge assembly includes a first link and a second link, wherein the first link is connected to a static base at a first hinge joint and to a second link at a second hinge joint, and wherein the second link is connected to a movable bracket at a third hinge joint.

[0022] In some cases, the actuator further includes: a lens, a housing, and four dual piezoelectric wafer actuators connected to the movable bracket, wherein each of the four dual piezoelectric wafer actuators is disposed on the housing and provides X / Y movement of the movable bracket; and a cover disposed above the movable bracket and a portion of the housing, the cover including end stops to limit movement of the movable bracket beyond a threshold travel range.

[0023] In some cases, the actuator further includes: a housing; four dual piezoelectric crystal actuators, each of which is disposed on the housing and provides X / Y motion of the movable bracket; an image sensor assembly disposed below the flexible hinge assembly; and a flexible sensor circuit connected to the flexible hinge assembly and the image sensor assembly.

[0024] Other features and advantages of embodiments of the present invention will become apparent from the accompanying drawings and the following detailed description. Attached Figure Description

[0025] Embodiments of the invention are illustrated by way of example and not limitation in the accompanying drawings, wherein the same reference numerals indicate similar elements, and wherein: Figure 1 An exemplary two-sided flexible hinge assembly actuator according to some embodiments is shown.

[0026] Figure 2 An exemplary four-sided flexible hinge actuator according to some embodiments is shown.

[0027] Figure 3A -C shows various views of an exemplary two-sided flexible hinge actuator with a pivot hinge according to some embodiments.

[0028] Figure 4A -D shows a view of a two-sided flexible hinge actuator assembly according to some embodiments.

[0029] Figures 5A-5D A view of an exemplary four-sided flexible hinge actuator assembly according to some embodiments is shown.

[0030] Figure 6 An exemplary actuator with motion configured to move in the Z direction is shown according to some embodiments.

[0031] Figures 7A-7BAn exemplary view of a flexible hinge according to some embodiments is shown.

[0032] Figures 8A-8B A flexible hinge actuator as part of an autofocus system is shown according to some embodiments.

[0033] Figures 9A-9B A view of a flexible hinged lens shift actuator according to some embodiments is shown.

[0034] Figures 10A-10B An exemplary flexible hinge sensor displacement actuator having both OIS and AF is shown according to some embodiments.

[0035] Figure 11A -B shows a top view and a perspective view of an actuator having X / Y motion following Z motion, according to some embodiments.

[0036] Figure 12 An exemplary actuator with a W force indicator is shown according to some embodiments.

[0037] Figure 13 This is an illustration of an actuator according to some embodiments, showing a representation of the force applied to the actuator.

[0038] Figure 14A -B illustrates an exemplary actuator with simulation results for input and output according to some embodiments.

[0039] Figure 15A -C shows a view of a prior art dual piezoelectric wafer actuator that can be used with some of the embodiments described herein. Detailed Implementation

[0040] This embodiment relates to a flexible hinge actuator. The actuator may include a base and a movable bracket configured to move in one direction (e.g., the Z-direction). The flexible hinge assembly may include structures disposed on multiple sides (e.g., two sides, four sides). The flexible hinge assembly structure can restrict movement of the movable bracket in directions other than the Z-direction to limit undesirable motion of the movable bracket. The actuator described herein may include a simple structure to constrain pitch and yaw tilt during the Z-motion of the payload. The actuator can actuate the sides of the structure to move the bracket up and down (or in the Z-direction).

[0041] In some cases, flexible hinge actuators may include multi-sided (e.g., two-sided or more-sided) hinge-link structures (e.g., three hinges and two links on each side of the actuator). Two-sided flexible hinge assemblies may include a minimum number of parts to control the Z-direction movement of the payload. Two-sided hinge-link structures may be designed to allow Z-motion of the moving bracket while minimizing other degrees of freedom (X, Y, pitch, yaw, roll).

[0042] In some cases, when a force is applied to perform Z-movement, undesirable motion may occur due to unbalanced forces, torsional torque applied to the hinge, and out-of-plane bending forces. Undesirable motion can be unwanted movement of the moving bracket in the X and Y translational directions, as well as tilting about all three axes of motion. The design of the actuator, with its hinge stiffness and actuator push position, can minimize this undesirable motion.

[0043] Figure 1 An exemplary two-sided flexible hinge assembly actuator 100 is shown. Figure 1 As shown, actuator 100 may include a static base 102, a movable bracket 104, and hinge-link structures 106A-B. The movable bracket 104 can be configured to move relative to the static base 102 (as shown in the diagram). Figure 1 (In the direction indicated by the arrow in the image). Furthermore, the movable bracket 104 can be circular and configured to receive the lens.

[0044] The hinge-link structures 106A-B allow for Z-motion of the movable bracket 104 while minimizing movement in any other direction. Each hinge-link structure (e.g., 106A-B) may include a lower link connected to the static base 102 and an upper link connecting the base portion to the movable bracket. As described in more detail below, the hinge-link structures 106A-B may include hinges that allow movement of the link portions to move and stabilize the movable bracket 104.

[0045] Another exemplary design for a flexible hinge actuator may include a four-sided flexible hinge assembly. This design allows the flexible hinge actuator to inherently achieve balance using hinge-link structures on all four sides of the actuator. Furthermore, this actuator design exhibits virtually no adverse motion when a force is applied to move in the Z direction.

[0046] Figure 2 An exemplary four-sided flexible hinge actuator 200 is shown. Figure 2 As shown, actuator 200 may include a static base 202 and a moving member 204, and the moving member 204 may be configured to move relative to the base 202. Hinge-link assembly 206 may include a four-sided flexible hinge assembly (e.g., flexible hinge structures 206A-D) disposed around each of the four sides of actuator 200.

[0047] Another example design could include a flexible hinge actuator design with a pivot hinge on both sides. The concept could involve welding wire (e.g., piano wire) to a stainless steel (SST) portion of the actuator to serve as the pivot. The mating socket of the actuator can then be injection molded. Input forces at various locations can produce the desired Z-stroke motion. The pivot can push the sides of the two links_1 or directly push the moving bracket. This design can structurally constrain undesirable tilting.

[0048] Figure 3A -C illustrates various views of an exemplary two-sided flexible hinge actuator 300A-C with a pivot hinge. (See diagram for reference.) Figure 3A As shown, actuator 300A may include a static base 302, a movable bracket 304, and a hinge-link structure 306. The hinge-link structure 306 may include a pivot hinge as described herein.

[0049] For example, such as Figure 3B As shown, actuator 300B can have a hinge-link structure with connecting rods 308A-B and hinges 310A-C. Connecting rods 308A-B and hinges 310A-C can be in a first position that causes the movable bracket 304 to travel upwards. Furthermore, in Figure 3C In this configuration, actuator 300C, connecting rods 308A-B, and hinges 310A-C can be in a second position that causes the movable bracket 304 to travel downwards. The first position 312A may include a primary input force position for generating the travel, and the second position 312B may include an alternative input force position for generating the travel.

[0050] Furthermore, each hinge can be configured to rotate to move the link between various positions via pivots 314A-C. For example, a first pivot 314A can be located between the movable bracket and link_2 308B. A second pivot 314B can connect link_2 308B to hinge_2 310B. Additionally, a third pivot 314C can be located between the static base and link_1 308A. Rods can be provided in each hinge section to stabilize each hinge and allow each pivot to rotate to move link 308A-B respectively.

[0051] Another example design may include a two-sided flexible hinge actuator assembly. This design may include a thin, flexible metal hinge material. Dual piezoelectric wafer arms can push the sides of the two linkage components. This design allows for hinge tilting or recoil without significant dynamic tilting. A hinge thickness of 20-25 μm with an etched pattern allows for the permissible actuation force of the SMA actuator. In some cases, undesirable X / Y motion and tilting motion may occur when a force is applied for Z-movement due to the unbalanced forces introduced by the two-sided design. In some cases, the flexible hinge may be made of steel, nitinol, a high-strength copper alloy, or another suitable spring material. The thickness of the flexible hinge can range from 20-25 μm or from 15-30 μm.

[0052] Figure 4A -D shows a view of the flexible hinge actuator assembly 400A-D on both sides. For example, as Figure 4A As shown, actuator 400A may include dual piezoelectric crystal actuators 414A-B that push the side of the link_1 element (e.g., 410A). Furthermore, Figure 4B An actuator 400B is shown, comprising a static base 402, a movable bracket 404, and a hinge-link structure 406. (As shown) Figure 4C The hinge-link structure shown may include links 410A-B and flexible hinges 408A-C. Figure 4D This is a side view of the actuator 400D as described herein. Figure 7 describes the actuator in more detail... Figure 4A The flexible hinge 408A-C is described in -D.

[0053] The flexible hinge 408A-C may include a patterned flexible material connecting any movable bracket and the link 410A-B. The flexible hinge 408A-C may have gaps (spaces) between the patterned flexible hinge portions to allow for hinge flexibility. Furthermore, the link portions may be bent to match or correspond to the curvature of the movable bracket. The link portions may also include two contact points where the link portions contact the movable bracket. About Figures 7A-7B The pattern of the flexible hinge is described in more detail. This pattern may include a set of long, narrow grooves, where each row of grooves is staggered relative to the previous row. The purpose of patterning may be to reduce the bending stiffness of the material in only one direction, while attempting to maintain in-plane stiffness and torsional stiffness.

[0054] In some cases, flexible hinges can be full-thickness without grooves. Grooving patterns can be used to optimize performance (reducing bending stiffness while still allowing for higher lateral and torsional stiffness of the hinge). Partially etched patterns or areas can also achieve the performance of grooved patterns as described herein.

[0055] Another example design could include a four-sided flexible hinge actuator assembly. This design could include a structure that inherently achieves balance with virtually no unnecessary movement. The actuators could apply inward forces from all four sides to produce ±Z motion. The design could also include two upward hinge-linkage structures and two downward hinge-linkage structures. The upward and downward structures could be positioned 90° apart. The upward and downward components could be identically designed, only with their orientations reversed.

[0056] Flexible hinges can operate without recoil or tilting, enabling precise positioning control. Thin materials such as SST, nickel and / or copper alloys, and superelastic nickel-titanium can be used. In some cases, the hinge area can be etched to reduce bending stiffness. The linkage can be rigid and can be metal or plastic. A base is used to mount the flexible hinge structure. Furthermore, the bracket can move along one axis and can hold the load.

[0057] Figures 5A-5D A view of an exemplary four-sided flexible hinge actuator assembly 500A-D is shown. Figure 5A As shown, the exploded view of actuator 500A shows static base 502, hinge-link structure 504, lower hinge 506, lower link 508, upper link 510, upper hinge 512 and movable bracket 514. Figure 5B Actuator 500B is shown, in which the hinge-link structure is in the "up" position. (See diagram.) Figure 5B As shown, the hinge-link structure may include hinges 514A-C and links 516A-B, wherein the structure is configured to move in the positive z-direction. Figure 5C An actuator 500C configured to move in the z-direction is shown. Figure 5D Actuator 500D is shown, with the hinge-link structure in the "downward" position. Figure 5D In the middle, hinges 514A-C and connecting rods 516A-B can push the actuator in the -Z direction, wherein the actuator force is applied to connecting rod 516A.

[0058] The upper hinge 512 connects the upper link 510 to the movable bracket 514. The upper hinge may include a flexible hinge or a pivot hinge as described herein. The upper link 510 connects the movable bracket to the hinge link structure. Furthermore, the lower link 508 connects the static base 502 to the upper link 510.

[0059] In some cases, a four-sided flexible hinge assembly can have a coordinating force (resultant force) that generates 1-axis Z-motion. Figure 6 An exemplary actuator 600 is shown, having motion configured to move in the Z direction. Such an actuator can be a structure that inherently achieves equilibrium with minimal undesirable tilting or X / Y motion. For example, a force pushing on all four sides can produce Z motion.

[0060] An exemplary simulation may have a Z-stroke of approximately 6 mm, a maximum tilt angle of approximately 0.0002 degrees, and a maximum thrust of approximately 70 mN.

[0061] In some cases, flexible hinges can have low bending stiffness and high lateral stiffness. Low bending stiffness can mean that less force is required to actuate the actuator. For small camera actuators, the thickness can be between 18 μm and 25 μm. Materials can include any of SST, copper alloys, nickel alloys, and superelastic nitinol. Formed / etched patterns (grooves) can help reduce bending stiffness. High lateral stiffness can resist any unwanted tilting movements. Formed patterns (grooves) can allow for wider hinges, which increases lateral stiffness. For small camera actuators, the hinge length can be between 0.1 and 0.4 mm. For small camera actuators, the hinge width can be approximately 1 mm (adjustable based on stiffness and space requirements).

[0062] Figures 7A-7B An exemplary view of the flexible hinge 702 is shown. Figure 7A As shown, the flexible hinge 702 may include a patterned surface 706 with a gap 708. The gap 708 may be patterned to include rounded edges and may be arranged along the surface according to the pattern. The flexible hinge 702 may have a hinge width of 1 mm and a hinge length of 0.3 mm. Furthermore, in Figure 7B In this context, the flexible hinge may include three flexible hinges 710A-C.

[0063] Figure 7A The groove pattern in the design can reduce the bending stiffness of the flexible hinge while maintaining in-plane and torsional stiffness. The grooves can be longer or shorter, and the distance between them can be wider or narrower to achieve different stiffness values.

[0064] The first application of flexible hinges can include autofocus systems. A single-axis actuator can be configured to move in the Z direction. Two to four dual piezoelectric crystal actuators on the side of the actuator can be pushed inward. Two dual piezoelectric crystals can have fewer parts and can be manufactured with less resource intensity. A four-dual piezoelectric crystal design can have improved dynamic tilt and travel performance. About Figure 15A -C provides a more detailed description of the dual piezoelectric chip actuator.

[0065] Flexible hinge assemblies can have a difference in opposing axial forces (FX-FY) that can generate Z-motion with almost no dynamic tilt. Equal forces on the sides (FX=FY) can maintain the Z-position.

[0066] Figures 8A-8B A flexible hinge actuator is shown as part of the autofocus system 800A-B. (As shown) Figure 8A As shown, the lens can be positioned above the movable bracket and can be configured to move in the Z direction. Figure 8B The autofocus system may include a housing 802, a dual piezoelectric crystal actuator 804, a flexible hinge assembly 806, a cover 808, and a lens 810. The bracket can hold the lens and can move up and down in the Z direction.

[0067] Another exemplary application could include a flexible hinged lens shifting system that combines optical image stabilization and autofocus. This could include a 3-axis actuator that moves in any X / Y / Z direction. The actuator could include an SMA camera actuator with a total of four SMA lines. Four dual piezoelectric crystal actuators on the side could be pushed inward, which could generate X / Y / Z motion of the lens (OIS+AF).

[0068] A flat OIS spring can be used to generate a downward force and X / Y travel. The actuator may include a sliding bearing (support), and a delta opposing force (on the same axis) can generate OIS motion.

[0069] The flexible hinge assembly may include opposing delta axial forces on the sides (FX-FY), which generate Z-motion with minimal dynamic tilt. Equal opposing axial forces on the sides (FX=FY) can maintain the Z-position. The cover may have OIS end stops directly to the moving bracket. This can be used to protect the flexible hinge from damage during vibration and lens insertion. The end stops may also originate from the housing instead of the cover (only from the static component is required).

[0070] Figures 9A-9B Views of flexible hinge lens shifting actuators 900A-B are shown. The actuator may include any one of a housing 902, a dual piezoelectric crystal actuator 904, a sliding bearing 906, a flat OIS spring 908, a flexible hinge assembly 910, a cover 912, a lens 914, and / or a bracket 916. The bracket may be configured to hold the lens and allow it to move in any X / Y / Z direction.

[0071] Another application of the actuator can include a flexible hinged sensor shift actuator with both OIS and AF. This application can include a 3-axis actuator configured to move in any X / Y / Z direction. The actuator can include an SMA camera actuator with a total of four SMA lines. Four dual piezoelectric crystal actuators on the side can be pushed inwards, which can generate X / Y / Z motion (OIS+AF) of the image sensor.

[0072] A flat OIS spring can be used to generate a downward force and X / Y travel. A sliding bearing can be used, and opposing delta forces (on the same axis) can generate OIS motion. Flexible hinge assemblies can be shown suspended inverted from the housing, with OIS springs between them for sensor displacement. The image sensor assembly can be integrated into a movable bracket and move along the X / Y / Z axes for OIS+AF motion. Flexible sensor circuitry allows X / Y / Z motion, and the lens can be static.

[0073] Figures 10A-10B An exemplary flexible hinge sensor displacement actuator with both OIS and AF is shown. For example, such as Figure 10B As shown, actuator 1000B may include cover 1002, flexible sensor circuit 1004, image sensor assembly 1006, flexible hinge assembly 1008, flat OIS spring 1010, sliding bearing 1012, dual piezoelectric crystal actuator 1014, housing 1016, lens 1018, and bracket 1020, which can be coupled to image sensor assembly 1006 and can move in the X / Y / Z directions.

[0074] In some cases, simulations of flexible hinged lens shift actuators can include a variety of boundary conditions. Such conditions can include forces applied to all four sides to produce X / Y / Z motion. The forces can simulate the output from a dual piezoelectric crystal actuator, and the forces on each side can account for the interaction of OIS and AF motions to achieve the correct X / Y / Z position. Figure 11A -B shows a top view and a perspective view of an actuator 1100A-B with X / Y motion following Z motion.

[0075] Various force equations can represent the forces used to produce X / Y / Z motions as described herein. Delta forces can include the difference between opposing forces, which will produce motion in one direction that is inversely proportional to any structural stiffness in that direction. Exemplary force equations are provided below: X_Delta_force = X_motion * X_stiffness =w2-w3 Y_Delta_force = Y_motion * Y_stiffness =w1-w0 Z_Delta_force = Z_motion * Z_stiffness = (w1+w0)-(w2+w3) In some cases, it is assumed that instantaneous forces and friction are negligible. Figure 12 An exemplary actuator 1200 with a W force indicator is shown. (See example...) Figure 12 As shown, each W force indicator W0-W3 indicates whether the force provides positive or negative X / Y / Z motion. Figure 12The "W" in the code can indicate which SMA line (e.g., line 0-3) is applying force.

[0076] The total force can be the sum of the OIS force, the AF force, the interaction force shifting the AF center, and the interaction force shifting the AF amplitude.

[0077] The equations for OIS forces may include: W0 = -Y_Delta_force W1 = + Y_Delta_force W2=+X_Delta_force W3 = -X_Delta_force The equations for the AF force can include: W0 & W1 = + Z_Delta_force / 2 W2 & W3 = -Z_Delta_force / 2 The equations for the interaction force shifting the AF center can include: W0 & W1 = abs(±X_Delta_force) / 2 W2&W3=abs(±Y_Delta_force) / 2 The equations for the amplitude of the interaction force shift AF can include: If Z_motion > 0: W0:W1 = -abs(X_Delta_force / 4) - abs(Y_Delta_force / 4) W2&W3=0 If Z_motion < 0: W0 & W1 = 0 W2&W3=-abs(X_Delta_force / 4)-abs(Y_Delta_force / 4) Figure 13 This is a diagram illustrating an actuator with a force applied to the actuator 1300. (See diagram for example.) Figure 13 As shown, various forces can be applied to the actuator.

[0078] In some cases, the input force can be calculated from the X / Y / Z stroke, and the output can include X / Y / Z motion. Figure 14A -B illustrates an exemplary actuator 1400A-B with simulation results for inputs and outputs. For example, Figure 14A A table showing the stroke and force for each of several directions of motion is provided. Furthermore, Figure 14B It can display a graph showing the travel time versus the solution time.

[0079] As described above, a dual piezoelectric chip actuator can be used as part of a flexible hinge actuator. Figure 15A-C illustrates a view of a prior art dual piezoelectric wafer actuator that can be used with some of the embodiments described herein. According to various embodiments, the dual piezoelectric wafer actuator 1502 includes a beam 1504 and one or more SMA materials 1506, such as an SMA strip 1506b (e.g., as included according to...). Figure 15B A perspective view of the dual piezoelectric chip actuator with an SMA band according to an embodiment is shown) or SMA line 1506a (e.g., as included according to Figure 15A The cross-section of the dual piezoelectric wafer actuator of the SMA line in an embodiment is shown. SMA material 1506 is fixed to beam 1504 using techniques including those described herein. According to some embodiments, SMA material 1506 is fixed to beam 1504 using an adhesive film material 1508. For various embodiments, the ends of SMA material 1506 are electrically and mechanically coupled to contacts 1510, which are configured to supply current to SMA material 1506 using techniques including those known in the art. According to various embodiments, contacts 1510 (e.g., as...) Figure 15A and Figure 15B (As shown) are gold-plated copper pads.

[0080] According to an embodiment, a dual piezoelectric wafer actuator 1502, having a length of approximately 1 mm and configured to generate a large stroke and a thrust of 50 millinewtons (“mN”), is used as part of a lens assembly, such as... Figure 15C As shown. According to some embodiments, using a dual piezoelectric chip actuator 1502 with a length greater than 1 mm will produce a larger stroke but smaller force than a dual piezoelectric chip actuator with a length of 1 mm. In one embodiment, the dual piezoelectric chip actuator 1502 includes a 20-micron-thick SMA material 1506, a 20-micron-thick insulator 1512 (e.g., a polyimide insulator), and a 30-micron-thick stainless steel beam 1504 or base metal. Various embodiments include a second insulator 1514 disposed between the contact layer including the contact 1510 and the SMA material 1506. According to some embodiments, the second insulator 1514 is configured to insulate the SMA material 1506 from the portion of the contact layer not used as the contact 1510. In some embodiments, the second insulator 1514 is a cover coating, such as a polyimide insulator. Those skilled in the art will understand that other dimensions and materials can be used to meet desired design characteristics.

[0081] In a first exemplary embodiment, a flexible hinge actuator is provided. The flexible hinge actuator may include a static base (e.g., 102) and a movable bracket (e.g., 104) configured to move relative to the static base in the Z direction. The flexible hinge actuator may further include a flexible hinge assembly (e.g., 106) configured to allow movement of the movable bracket in the Z direction and restrict movement of the movable bracket in other directions. The flexible hinge assembly may include at least two flexible hinge structures (e.g., ...) disposed on corresponding sides of the flexible hinge actuator. Figure 1 (The structure in the text).

[0082] In some cases, the flexible hinge assembly includes flexible hinge structures disposed on each of the four sides of the flexible hinge actuator (e.g., as shown in the image). Figure 2 (As shown).

[0083] In some cases, each flexible hinge structure includes a first link (e.g., 308A) and a second link (e.g., 308B). The first link may be connected to a static base at a first hinge joint (joint) (e.g., 310A) and to a second link at a second hinge joint (e.g., 310B). The second link may be connected to a movable bracket at a third hinge joint (e.g., 310C). In some cases, any one of the first, second, or third hinge joints includes a flexible metal hinge (e.g., in...). Figure 4C middle).

[0084] In some cases, each flexible hinge structure further includes at least one link connecting the movable bracket to the flexible hinge structure and a dual piezoelectric wafer actuator configured to actuate said at least one link. The dual piezoelectric wafer actuator may include a beam comprising a first end fixed to the flexible hinge structure and a second end forming a free end. Movement of the free end can be configured to actuate said at least one link. In some cases, the dual piezoelectric wafer actuator also includes a shape-matrix alloy (SMA) material disposed along the beam between the fixed end and the free end.

[0085] In some cases, the flexible hinge structure includes at least a first flexible hinge structure oriented in a first direction and a second flexible hinge structure oriented in a second direction opposite to the first direction.

[0086] In some cases, the flexible hinge actuator also includes a lens, a housing, and four dual piezoelectric crystal actuators connected to the movable bracket, wherein each of the four dual piezoelectric crystal actuators is disposed on the housing and provides X / Y motion of the movable bracket.

[0087] In some cases, the flexible hinge actuator also includes a cover disposed above a portion of the movable bracket and housing, the cover including end stops to limit movement of the movable bracket beyond a threshold travel range.

[0088] In some cases, the flexible hinge actuator also includes an image sensor assembly disposed below the flexible hinge assembly and a flexible sensor circuit connected to the flexible hinge assembly and the image sensor assembly.

[0089] In another exemplary embodiment, an apparatus is provided. The apparatus may include a static base and a movable bracket configured to move relative to the static base in a Z-direction. The apparatus may also include a flexible hinge assembly configured to allow movement of the movable bracket in the Z-direction and restrict movement of the movable bracket in other directions. The flexible hinge assembly may include at least two flexible hinge structures disposed on corresponding sides of a flexible hinge actuator. Each flexible hinge structure may include a first link and a second link. The first link may be connected to the static base at a first hinge joint and to a second link at a second hinge joint. The second link may be connected to the movable bracket at a third hinge joint.

[0090] In some cases, the device may also include a dual piezoelectric wafer actuator configured to actuate a first link in each flexible hinge structure. The dual piezoelectric wafer actuator may include a beam comprising a first end fixed to the flexible hinge structure and a second end forming a free end, wherein movement of the free end is configured to actuate at least one link. The dual piezoelectric wafer actuator may also include a shape-matrix alloy (SMA) material disposed along the beam between the fixed end and the free end.

[0091] In some cases, the flexible hinge structure includes at least a first flexible hinge structure oriented in a first direction and a second flexible hinge structure oriented in a second direction opposite to the first direction.

[0092] In some cases, the device may also include a lens, a housing, and four dual piezoelectric crystal actuators connected to the movable carriage, wherein each of the four dual piezoelectric crystal actuators is disposed on the housing and provides X / Y motion of the movable carriage.

[0093] In some cases, the device may also include a cover disposed above a portion of the movable bracket and housing, the cover including end stops to limit movement of the movable bracket beyond a threshold travel range.

[0094] In some cases, the device may also include an image sensor assembly disposed below the flexible hinge assembly and a flexible sensor circuit connected to the flexible hinge assembly and the image sensor assembly.

[0095] In another exemplary embodiment, an actuator is provided. The actuator may include a static base, a movable bracket configured to move relative to the static base, and a flexible hinge assembly configured to allow movement of the movable bracket in a first direction and limit movement of the movable bracket in other directions. The flexible hinge assembly may include four flexible hinge structures disposed on each side of the flexible hinge actuator.

[0096] In some cases, each flexible hinge assembly includes a first link and a second link, wherein the first link is connected to a static base at a first hinge joint and to a second link at a second hinge joint, and wherein the second link is connected to a movable bracket at a third hinge joint.

[0097] In some cases, the actuator further includes: a lens, a housing, and four dual piezoelectric wafer actuators connected to the movable bracket, wherein each of the four dual piezoelectric wafer actuators is disposed on the housing and provides X / Y movement of the movable bracket; and a cover disposed above the movable bracket and a portion of the housing, the cover including end stops to limit movement of the movable bracket beyond a threshold travel range.

[0098] In some cases, the actuator further includes: a housing; four dual piezoelectric crystal actuators, each of which is disposed on the housing and provides X / Y motion of the movable bracket; an image sensor assembly disposed below the flexible hinge assembly; and a flexible sensor circuit connected to the flexible hinge assembly and the image sensor assembly.

[0099] According to some embodiments, the processes described herein are used to form any one or more mechanical and electromechanical structures.

[0100] Although described in conjunction with these embodiments, those skilled in the art will recognize that changes in form and detail may be made without departing from the spirit and scope of the invention.

Claims

1. A flexible hinge actuator, comprising: Static base; A movable bracket, the movable bracket being configured to move relative to the static base in the Z direction; as well as A flexible hinge assembly configured to allow movement of the movable bracket in the Z direction and restrict movement in other directions, wherein the flexible hinge assembly includes at least two flexible hinge structures disposed on corresponding sides of the flexible hinge actuator.

2. The flexible hinge actuator according to claim 1, wherein, The flexible hinge assembly includes a flexible hinge structure disposed on each of the four sides of the flexible hinge actuator.

3. The flexible hinge actuator according to claim 1, wherein, Each flexible hinge structure includes a first link and a second link, wherein the first link is connected to the static base at a first hinge joint and to the second link at a second hinge joint, and wherein the second link is connected to the movable bracket at a third hinge joint.

4. The flexible hinge actuator according to claim 3, wherein, Any one of the first hinge joint, the second hinge joint, or the third hinge joint includes a flexible metal hinge.

5. The flexible hinge actuator according to claim 1, wherein, Each flexible hinge structure also includes: At least one link connecting the movable bracket to the flexible hinge structure; and A dual piezoelectric wafer actuator configured to actuate the at least one linkage, wherein the dual piezoelectric wafer actuator comprises: A beam comprising a first end fixed to the flexible hinge structure and a second end constituting a free end, wherein movement of the free end is configured to push the at least one link.

6. The flexible hinge actuator according to claim 5, wherein, The dual piezoelectric wafer actuator also includes a shape metal alloy (SMA) material disposed along the beam between the fixed end and the free end.

7. The flexible hinge actuator according to claim 1, wherein, The flexible hinge structure includes at least a first flexible hinge structure oriented in a first direction and a second flexible hinge structure oriented in a second direction opposite to the first direction.

8. The flexible hinge actuator according to claim 1, further comprising: A lens, which is connected to the movable bracket; shell; as well as Four dual piezoelectric crystal actuators, each of which is disposed on the housing and provides X / Y motion of the movable bracket.

9. The flexible hinge actuator according to claim 8, further comprising: A cover is disposed above the movable bracket and a portion of the housing, the cover including end stops to limit movement of the movable bracket beyond a threshold travel range.

10. The flexible hinge actuator according to claim 8, further comprising: An image sensor assembly is disposed below the flexible hinge assembly; as well as A flexible sensor circuit, which is connected to the flexible hinge assembly and the image sensor assembly.

11. An apparatus comprising: Static base; A movable bracket, the movable bracket being configured to move relative to the static base in the Z direction; as well as A flexible hinge assembly configured to allow movement of the movable bracket in the Z direction and restrict movement in other directions, wherein the flexible hinge assembly includes at least two flexible hinge structures disposed on corresponding sides of the flexible hinge actuator, wherein each flexible hinge structure includes a first link and a second link, wherein the first link is connected to the static base at a first hinge joint and to the second link at a second hinge joint, and wherein the second link is connected to the movable bracket at a third hinge joint.

12. The apparatus of claim 11, further comprising: A dual piezoelectric crystal actuator, the dual piezoelectric crystal actuator being configured to actuate a first link in each of the flexible hinge structures, wherein the dual piezoelectric crystal actuator comprises: A beam, the beam including a first end fixed to the flexible hinge structure and a second end forming a free end, wherein movement of the free end is configured to push the at least one link; and Shaped metal alloy (SMA) material, which is disposed along the beam between the fixed end and the free end.

13. The apparatus according to claim 11, wherein, The flexible hinge structure includes at least a first flexible hinge structure oriented in a first direction and a second flexible hinge structure oriented in a second direction opposite to the first direction.

14. The apparatus of claim 11, further comprising: A lens, which is connected to the movable bracket; shell; as well as Four dual piezoelectric crystal actuators, each of which is disposed on the housing and provides X / Y motion of the movable bracket.

15. The apparatus of claim 14, further comprising: A cover is disposed above the movable bracket and a portion of the housing, the cover including end stops to limit movement of the movable bracket beyond a threshold travel range.

16. The apparatus of claim 14, further comprising: An image sensor assembly is disposed below the flexible hinge assembly; as well as A flexible sensor circuit, which is connected to the flexible hinge assembly and the image sensor assembly.

17. The apparatus of claim 11, further comprising: A sliding bearing and a spring are connected to the movable bracket and the static base to allow the movable bracket to move in the X / Y direction with the Z-axis.

18. An actuator comprising: Static base; A movable bracket, the movable bracket being configured to move relative to the static base; as well as A flexible hinge assembly configured to allow movement of the movable bracket in a first direction and restrict movement in other directions, wherein the flexible hinge assembly includes four flexible hinge structures disposed on each side of the flexible hinge actuator.

19. The actuator according to claim 18, wherein, Each flexible hinge assembly includes a first link and a second link, wherein the first link is connected to the static base at a first hinge joint and to the second link at a second hinge joint, and wherein the second link is connected to the movable bracket at a third hinge joint.

20. The actuator of claim 18, further comprising: A lens, which is connected to the movable bracket; shell; Four dual piezoelectric crystal actuators, each of which is disposed on the housing and provides X / Y motion of the movable bracket; as well as A cover is disposed above the movable bracket and a portion of the housing, the cover including end stops to limit movement of the movable bracket beyond a threshold travel range.

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