Vibration cutting machining method and device of magnetic control spiral micro-nano robot

Abstract

The invention discloses a vibration cutting machining method and device of a magnetic control spiral micro-nano robot, and the machining method comprises the following steps: carrying out elliptical vibration cutting machining on the surface of a base material, and forming a spiral base body by continuous cuttings generated by machining; and the surface of the spiral base body is coated with a magnetic material, and the magnetic control spiral micro-nano robot is formed. According to the vibration cutting machining method and device for the magnetic control spiral micro-nano robot, the cutting feeding motion is combined with elliptical vibration, so that the machining precision can be improved, and the prepared magnetic control spiral micro-nano robot is more uniform in appearance; the minimum achievable size of the magnetic control spiral micro-nano robot can be reduced, and the limitation of the minimum machining size is broken through; the occurrence rate of fracture and non-uniform deformation can be reduced; the cutting mechanism can be actively regulated and controlled through the synergistic effect of elliptical vibration and feeding movement of the cutter, so that the shape of cuttings is flexibly controlled.

Description

Technical Field

[0001] This application relates to the field of processing technology for magnetically controlled helical micro-nano robots, and in particular to a vibration cutting processing method and processing device for magnetically controlled helical micro-nano robots. Background Technology

[0002] Magnetically controlled helical micro- and nanorobots can achieve efficient navigation and complex operations in confined spaces while minimizing interference with the surrounding environment and human body. They are gradually becoming an important technological tool in the biomedical field, showing great potential in targeted drug delivery and minimally invasive medicine. The structure of magnetically controlled helical micro- and nanorobots significantly affects their motion and performance, and their manufacturing technology has become a key bottleneck restricting their application. The manufacturing of magnetically controlled helical micro- and nanorobots mainly involves two steps: the preparation of the helical substrate and the magnetic coating process. The former determines the robot's geometry, while the latter affects its response performance in an applied magnetic field.

[0003] In related technologies, common methods for preparing helical substrates include physical manufacturing methods that utilize biocompatible photoresists to construct helical structures, and bio-template manufacturing methods that utilize the natural helical structures of microorganisms such as spirulina. However, physical manufacturing methods such as photolithography and 3D printing suffer from problems such as complex processes, long cycles, high costs, and high technical barriers; while bio-template manufacturing methods have advantages in terms of cost and feasibility, they have significant shortcomings in terms of flexible morphological control and consistency maintenance. Summary of the Invention

[0004] This application aims to address at least one of the technical problems existing in the prior art. Therefore, one objective of this application is to propose a vibration cutting machining method and apparatus for magnetically controlled helical micro / nano robots, aiming to solve the shortcomings of existing magnetically controlled helical micro / nano robot machining technologies in terms of efficiency, accuracy, and flexibility.

[0005] This application proposes a vibration cutting method for a magnetically controlled helical micro / nano robot, comprising the following steps: Elliptical vibration cutting is performed on the surface of the base material, and the continuous chips generated during the process form a spiral matrix. Magnetic materials are coated onto the surface of a helical substrate to form a magnetically controlled helical micro / nano robot.

[0006] According to the vibration cutting method of the magnetically controlled helical micro / nano robot of this application, the cutting feed motion is combined with elliptical vibration, which can reduce cutting force and cutting heat, promote chip deformation, improve machining accuracy, and make the prepared magnetically controlled helical micro / nano robot more uniform in morphology; it reduces the minimum achievable size of the magnetically controlled helical micro / nano robot, breaking through the minimum machining size limitation of single cutting; it can effectively improve material machinability, optimize the chip forming process, and reduce the incidence of fracture and uneven deformation. Moreover, the chip deformation varies greatly under different vibration parameters, and applying elliptical vibration to the tool improves the machining flexibility of the magnetically controlled helical micro / nano robot; the synergistic effect of the elliptical vibration of the machining tool and the feed motion can realize the active control of the cutting mechanism, thereby flexibly controlling the chip shape. Compared with the traditional magnetic helical robot machining method, this invention has significant advantages of low machining cost and high process flexibility; vibration cutting has low cutting force and low cutting temperature during the cutting process, while reducing tool wear, which helps to reduce machining costs.

[0007] According to some embodiments of this application, before coating the surface of the helical substrate with magnetic material, the following steps are further included: performing a morphology test on the helical substrate to determine whether the morphology of the helical substrate meets the preset requirements; when the morphology of the helical substrate meets the preset requirements, performing the step of coating the surface of the helical substrate with magnetic material; when the morphology of the helical substrate does not meet the preset requirements, adjusting the process parameters of the elliptical vibration cutting process and reprocessing the helical substrate.

[0008] According to some embodiments of this application, the step of performing elliptical vibration cutting on the surface of a substrate material specifically includes: determining the process parameters for elliptical vibration cutting based on the target shape parameters of the magnetically controlled helical micro / nano robot, and generating a tool movement path.

[0009] According to some embodiments of this application, the process parameters for elliptical vibration cutting are fixed parameters or dynamic parameters.

[0010] According to some embodiments of this application, in the step of performing elliptical vibration cutting on the surface of a substrate material, the cutting tool and the substrate material periodically come into contact and separate.

[0011] According to some embodiments of this application, the step of coating a magnetic material on the surface of a helical substrate to form a magnetically controlled helical micro / nano robot specifically includes: preparing a magnetic fluid solution containing magnetic particles; coating the magnetic fluid solution onto the surface of the helical substrate; and depositing and solidifying the magnetic particles to attach them to the surface of the helical substrate.

[0012] According to some embodiments of this application, after coating the surface of the helical substrate with magnetic material, the method further includes the following step: adjusting the polarization direction of the magnetic particles deposited on the surface of the helical substrate.

[0013] According to some embodiments of this application, the step of adjusting the polarization direction of magnetic particles deposited on the surface of a helical substrate specifically includes: applying an external magnetic field to the magnetically controlled helical micro-nano robot according to the preset motion pattern of the magnetically controlled helical micro-nano robot, and adjusting the polarization direction of the magnetic particles relative to the axis of the helical substrate.

[0014] According to some embodiments of this application, the step of adjusting the polarization direction of the magnetic particles deposited on the surface of the spiral substrate is performed once or multiple times.

[0015] This application also proposes a processing device for a magnetically controlled helical micro / nano robot, used to realize the above-mentioned vibration cutting processing method for the magnetically controlled helical micro / nano robot. The processing device for the magnetically controlled helical micro / nano robot includes a cutting tool, a first driving unit and a second driving unit. The cutting tool is suitable for cutting the substrate material; the first driving unit is suitable for driving the cutting tool to move along the feed direction; and the second driving unit is suitable for driving the cutting tool to vibrate periodically along an elliptical path.

[0016] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0017] The above and / or additional aspects and advantages of this application will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 This is a schematic diagram of the fabrication process of a magnetically controlled spiral micro / nano robot according to some embodiments of this application; Figure 2 This is a schematic diagram illustrating the fabrication principle of a magnetically controlled spiral micro / nano robot according to some embodiments of this application; Figure 3 This is a schematic diagram of the tool movement path of a machining apparatus for a magnetically controlled helical micro / nano robot according to some embodiments of this application; Figure 4 This is a schematic diagram of the morphology of the helical substrate of a magnetically controlled helical micro / nano robot according to some embodiments of this application; Figure 5 This is a schematic diagram of the magnetization process of a magnetically controlled helical micro / nano robot according to some embodiments of this application.

[0018] Figure label: 1. Matrix material; 2. Tool; 3. Magnetically controlled spiral micro / nano robot; 31. Spiral matrix; 4. Magnetorheological fluid solution; 41. Magnetic particles. Detailed Implementation

[0019] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0020] The following is for reference. Figures 1-5 This application describes a vibration cutting process for a magnetically controlled helical micro / nano robot according to an embodiment of the present application.

[0021] This application proposes a vibration cutting method for a magnetically controlled helical micro / nano robot, comprising the following steps: Elliptical vibration cutting is performed on the surface of the base material 1, and the continuous chips generated during the machining form a spiral base 31. A magnetic material is coated on the surface of the helical substrate 31 to form a magnetically controlled helical micro-nano robot 3.

[0022] According to the vibration cutting machining method of the magnetically controlled helical micro / nano robot of this application, such as Figure 2 As shown, elliptical vibration cutting is performed on the surface of the substrate material 1. Based on the cutting process of the tool 2 (the substrate material 1 is fed relative to the tool 2 along direction A), elliptical vibration is applied to the tool 2, causing it to move along a preset machining path S. During the cutting process, the tool 2 continuously scoops up the material and curls it into a helical structure to obtain helical-shaped machining chips, which serve as the helical substrate 31 of the magnetically controlled helical micro / nano robot 3. During elliptical vibration cutting, the movement of the tool 2 relative to the substrate material 1 is a composite motion of periodic elliptical vibration and feed motion. Figure 4 As shown, by coating the processed spiral substrate 31 with magnetic material, a magnetically controlled spiral micro-nano robot 3 can be obtained, which can be controlled to move in specific application scenarios by a magnetic field.

[0023] According to the vibration cutting method of the magnetically controlled helical micro / nano robot of this application, the cutting feed motion is combined with elliptical vibration, which can reduce cutting force and cutting heat, promote chip deformation, improve machining accuracy, and make the prepared magnetically controlled helical micro / nano robot 3 more uniform in morphology; it reduces the minimum achievable size of the magnetically controlled helical micro / nano robot 3, which can break through the minimum machining size limitation of single cutting; it can effectively improve material machinability, optimize the chip forming process, and reduce the incidence of fracture and uneven deformation. Moreover, the chip deformation varies greatly under different vibration parameters, and applying elliptical vibration to the tool 2 improves the machining flexibility of the magnetically controlled helical micro / nano robot 3; the synergistic effect of the elliptical vibration of the machining tool 2 and the feed motion can realize the active control of the cutting mechanism, thereby flexibly controlling the chip shape. Compared with the traditional magnetic helical robot machining method, this invention has significant advantages of low machining cost and high process flexibility; vibration cutting results in low cutting force and low cutting temperature during the cutting process, while reducing tool 2 wear, which helps to reduce machining costs.

[0024] The magnetically controlled spiral micro-nano robot 3 of this application is mainly used for targeted drug delivery, cell capture, environmental remediation, etc.; depending on the application scenario, the matrix material 1 can be selected from metal materials such as aluminum and copper or non-metal materials such as PMMA and PET.

[0025] According to the vibration cutting method of the magnetically controlled helical micro-nano robot of this application, the tool 2 performs elliptical vibration cutting along the feed direction to obtain a single helical substrate 31. After the machining is completed, the relative position of the tool 2 and the substrate material 1 is adjusted, and the machining of another helical substrate 31 can be restarted along the feed direction to realize the batch production of the magnetically controlled helical micro-nano robot 3.

[0026] According to some embodiments of this application, before coating the surface of the helical substrate 31 with magnetic material, the following steps are included: performing a morphology test on the helical substrate 31 to determine whether the morphology of the helical substrate 31 meets the preset requirements; if the morphology of the helical substrate 31 meets the preset requirements, performing the step of coating the surface of the helical substrate 31 with magnetic material; if the morphology of the helical substrate 31 does not meet the preset requirements, adjusting the process parameters of the elliptical vibration cutting machining and re-machining the helical substrate 31. In this embodiment, testing the morphology of the helical substrate 31 after it has been machined can accurately determine the morphological characteristics of the helical substrate 31, verify whether its structure meets the design requirements, and adjust the machining of the helical substrate 31 to meet the machining requirements of the magnetically controlled helical micro-nano robot 3. The morphology test step in this embodiment is the basis for ensuring that the machined magnetically controlled helical micro-nano robot 3 can move in the expected manner, and is also a prerequisite for further optimization of the magnetically controlled helical micro-nano robot 3. It can ensure the machining stability and consistency of the magnetically controlled helical micro-nano robot 3 and guarantee its motion performance.

[0027] In some embodiments, the morphology of the helical matrix 31 is tested using characterization methods such as electron microscopy in the above steps. If the expected requirements are not met, the processing experiment can be carried out again by adjusting the process parameters.

[0028] According to some embodiments of this application, the step of performing elliptical vibration cutting on the surface of the substrate material 1 specifically includes: determining the process parameters for elliptical vibration cutting based on the target shape parameters of the magnetically controlled helical micro-nano robot 3, and generating the tool 2 movement path. In this embodiment, the target shape parameters of the magnetically controlled helical micro-nano robot 3 are determined according to application requirements. Based on the target shape parameters of the magnetically controlled helical micro-nano robot 3, the processing parameters are determined, and the tool 2 movement path is generated. Based on this, elliptical vibration cutting is performed to obtain the ideal contour shape of the magnetically controlled helical micro-nano robot 3. The process parameters include the elliptical vibration trajectory, vibration frequency, vibration amplitude, cutting speed, and cutting depth of the tool 2. This embodiment, by precisely controlling the elliptical vibration trajectory, cutting speed, and cutting depth of the tool 2 according to target requirements, can flexibly adjust the geometric features of the magnetically controlled helical micro-nano robot 3, such as the helix angle and diameter; it can achieve high-precision shape control of the magnetically controlled helical micro-nano robot 3, improve adaptability to specific application scenarios, and enhance the stability and consistency of processing.

[0029] In some embodiments, when the vibration frequency is increased to the ultrasonic range (above 20 kHz), the cutting speed can be significantly increased, thereby improving the fabrication efficiency of the magnetically controlled helical micro-nano robot 3 and laying the foundation for its large-scale industrial application.

[0030] According to some embodiments of this application, the process parameters for elliptical vibration cutting are fixed or dynamic parameters. In this embodiment, since the extrusion deformation of the material varies under different process parameters, the morphology of the helical matrix 31 can be flexibly controlled by adjusting process parameters such as cutting speed and vibration trajectory. This enables the flexible manufacturing of novel magnetically controlled helical micro / nano robots 3 with variable pitch and diameter to meet the needs of different application scenarios. In some embodiments, such as Figure 4 As shown in (a), the helical base 31 of the magnetically controlled helical micro / nano robot 3 has a constant diameter and constant pitch structure (diameter is D, pitch is L, and helix angle is α). When machining this type of magnetically controlled helical micro / nano robot 3, the tool 2 processes the helical base 31 with fixed process parameters such as fixed amplitude and fixed cutting speed. In other embodiments, such as Figure 4 As shown in (b), the helical base 31 of the magnetically controlled helical micro / nano robot 3 has a variable pitch structure (pitch L1 > L2); or as shown in (b) Figure 4As shown in (c), the helical base 31 of the magnetically controlled helical micro-nano robot 3 has a variable diameter structure (diameter D1 > D2). When machining these two types of magnetically controlled helical micro-nano robots 3, the tool 2 uses process parameters that dynamically change with the feed process of the tool 2, such as varying amplitude or varying cutting speed, to machine the helical base 31 of a specific shape.

[0031] According to some embodiments of this application, in the step of elliptical vibration cutting on the surface of the substrate material 1, the cutting tool 2 periodically contacts and separates from the substrate material 1. In this embodiment, the elliptical vibration of the cutting tool 2 is a periodic motion; within each elliptical vibration cycle during the machining process, such as Figure 3 As shown, the periodic contact and separation between the cutting tool 2 and the base material 1 can reduce cutting force and cutting heat, optimize the machining surface, and improve machining stability, resulting in a more uniform morphology of the helical base 31. On the other hand, it can reduce the wear of the cutting tool 2, which helps to reduce machining costs. Furthermore, it makes the curling of the chip a gradual process. In each vibration cycle, the chip will undergo a process from formation and curling to stress release, making the stress distribution inside the chip more uniform, avoiding fracture caused by stress concentration, and preventing the chip from easily breaking due to the continuous contact and compression between the cutting tool 2 and the workpiece.

[0032] According to some embodiments of this application, the step of coating a magnetic material onto the surface of a helical substrate 31 to form a magnetically controlled helical micro / nano robot 3 specifically includes: preparing a magnetic fluid solution 4 containing magnetic particles 41; coating the magnetic fluid solution 4 onto the surface of the helical substrate 31; and depositing and curing the magnetic particles 41 to adhere to the surface of the helical substrate 31. In this embodiment, the magnetic particles 41, after adhering to the surface of the helical substrate 31, make the overall structure magnetic, thus forming a magnetically controlled helical micro / nano robot 3, which can move in a desired manner under the influence of a magnetic field to achieve its application function. This embodiment achieves the attachment of magnetic particles 41 through magnetic solution coating and deposition curing, resulting in high magnetization efficiency and uniform distribution of magnetic particles 41.

[0033] According to some embodiments of this application, after coating the surface of the helical substrate 31 with magnetic material, the following step is further included: adjusting the polarization direction of the magnetic particles 41 deposited on the surface of the helical substrate 31. The morphological characteristics of the magnetic particles 41 and the parameters of the applied magnetic field have a significant impact on the operating performance of the magnetically controlled helical micro / nano robot 3 in the magnetic field. In the above embodiments, the polarization direction of the magnetic particles 41 attached to the surface of the helical substrate 31 after initial deposition is not uniform, which will significantly reduce the motion control accuracy of the magnetically controlled helical micro / nano robot 3. In this embodiment, after coating the surface of the helical substrate 31 with magnetic particles 41, the polarization direction of the magnetic particles 41 is reoriented, which can improve the consistency of the polarization direction of the magnetic particles 41, so that the magnetically controlled helical micro / nano robot 3 can respond more accurately to changes in the magnetic field, achieve more precise motion control, and further improve motion efficiency and motion stability.

[0034] According to some embodiments of this application, the step of adjusting the polarization direction of the magnetic particles 41 deposited on the surface of the helical substrate 31 specifically includes: applying an external magnetic field B to the magnetically controlled helical micro-nano robot 3 according to a preset motion pattern, and adjusting the polarization direction of the magnetic particles 41 relative to the axial direction of the helical substrate 31. In this embodiment, as... Figure 5 As shown, using the axial direction of the helical matrix 31 as a reference helps to determine the process parameters of the orientation process, including the direction of the external magnetic field B, so as to clearly orient the polarization direction of the magnetic particles 41 under the action of the external magnetic field, thereby improving the accuracy of motion control of the magnetically controlled helical micro-nano robot 3.

[0035] According to some embodiments of this application, the step of adjusting the polarization direction of the magnetic particles 41 deposited on the surface of the helical substrate 31 is performed once or multiple times. In this embodiment, when the step of adjusting the polarization direction of the magnetic particles 41 deposited on the surface of the helical substrate 31 is performed multiple times, the uniformity of the magnetization parameters of the magnetically controlled helical micro / nano robot 3 can be ensured through multiple adjustments and iterations. Furthermore, the relative relationship between the polarization direction of the magnetic particles 41 and the axis of the magnetically controlled helical micro / nano robot 3 can be adjusted multiple times according to different motion forms to meet the requirements of different motion performances. This embodiment performs one or more polarization direction adjustments as needed to obtain a magnetically controlled helical micro / nano robot 3 that meets the design goals.

[0036] This application also proposes a processing device for a magnetically controlled helical micro / nano robot, used to realize the above-mentioned vibration cutting processing method for the magnetically controlled helical micro / nano robot. The processing device for the magnetically controlled helical micro / nano robot includes a cutting tool 2, a first driving unit and a second driving unit. The cutting tool 2 is adapted to cut the substrate material 1. The first driving unit is adapted to drive the cutting tool 2 to move along the feed direction. The second driving unit is adapted to drive the cutting tool 2 to move periodically along an elliptical path.

[0037] According to the processing apparatus for the magnetically controlled helical micro / nano robot of this application, the first drive unit controls the feed motion of the tool 2, and the second drive unit controls the periodic motion of the tool 2 along an elliptical path. Under the combined action of the two, the tool 2 undergoes compound motion, and helical-shaped chips are obtained through elliptical vibration cutting, namely the aforementioned helical substrate 31. The helical substrate 31 can then be used to form the aforementioned magnetically controlled helical micro / nano robot 3 through methods such as magnetic particle deposition 41.

[0038] In some embodiments, the tool 2 is typically a single-crystal diamond tool 2 with a triangular rake face, the size of which depends on the target morphology of the magnetically controlled spiral micro / nano robot 3 to be fabricated.

[0039] When processing the magnetically controlled spiral micro-nano robot 3 using the processing apparatus and processing method of this application, firstly, a suitable vibration processing unit (i.e., the first driving unit and the second driving unit) and a diamond tool 2 are selected; the vibration processing unit needs to have a sufficiently large amplitude modulation range to meet the processing requirements of the magnetically controlled spiral micro-nano robot 3, and the front angle and back angle of the tool 2 are selected and optimized according to the target morphology.

[0040] In a specific embodiment, such as Figure 1 As shown, the fabrication process of the magnetically controlled helical micro / nano robot includes the following steps: S1. Select the substrate material based on the application scope or scenario of the magnetically controlled spiral micro / nano robot; select the vibration processing unit and diamond cutting tool based on the processing requirements of the magnetically controlled spiral micro / nano robot. S2. Determine machining parameters such as cutting depth, cutting speed, and elliptical vibration trajectory based on the target shape of the magnetically controlled spiral micro / nano robot; S3. The matrix material is processed by elliptical vibration to obtain a spiral matrix; S4. Determine whether the profile of the magnetically controlled helical micro / nano robot (the profile of the fabricated helical substrate) meets the requirements: If the requirements are not met, restart steps S2-S4; If the requirements are met, proceed to step S5; S5. Select the magnetic particle size and magnetic field parameters; prepare the ferromagnetic fluid solution; coat the magnetic particles onto the helical substrate: S6. Configure the polarization direction of the magnetic particles to obtain the target magnetically controlled helical micro / nano robot.

[0041] In the description of this application, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0042] In the description of this application, "first feature" and "second feature" may include one or more of the features.

[0043] In the description of this application, "multiple" means two or more.

[0044] In the description of this application, the first feature being "above" or "below" the second feature may include the first and second features being in direct contact, or the first and second features being in contact through another feature between them.

[0045] In the description of this application, the terms "above," "over," and "on top" for the first feature and the second feature include the first feature being directly above or diagonally above the second feature, or simply indicate that the first feature is at a higher horizontal level than the second feature.

[0046] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0047] Although embodiments of this application have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the claims and their equivalents.

Claims

1. A vibration cutting method of a magnetic control helical micro-nano robot, characterized by, The method comprises the following steps: performing elliptical vibration cutting on the surface of the base material, and forming a spiral base by continuous chips generated by the cutting; coating a magnetic material on the surface of the spiral base to form the magnetic spiral micro-nano robot.

2. The vibration cutting machining method of the magnetic control spiral micro-nano robot according to claim 1, characterized in that, Before the step of coating the magnetic material on the surface of the spiral base, the method further comprises the following steps: performing topography testing on the spiral base to determine whether the topography of the spiral base meets preset requirements; when the topography of the spiral base meets the preset requirements, performing the step of coating the magnetic material on the surface of the spiral base; when the topography of the spiral base does not meet the preset requirements, adjusting the process parameters of the elliptical vibration cutting to re-process the spiral base.

3. The vibration cutting machining method of the magnetically controlled helical micro-nano robot according to claim 1, characterized in that, The step of performing elliptical vibration cutting on the surface of the base material specifically comprises: determining the process parameters of the elliptical vibration cutting according to target shape parameters of the magnetic spiral micro-nano robot to generate a tool movement path.

4. The vibration cutting machining method of the magnetically controlled spiral micro-nano robot according to claim 3, characterized in that, The process parameters of the elliptical vibration cutting are fixed parameters or dynamic parameters.

5. The vibration cutting machining method of the magnetically controlled helical micro-nano robot according to claim 1, characterized in that, In the step of performing elliptical vibration cutting on the surface of the base material, the cutting tool is periodically in contact with and separated from the base material.

6. The vibration cutting machining method of the magnetically controlled helical micro-nano robot according to claim 1, characterized in that, The step of coating the magnetic material on the surface of the spiral base to form the magnetic spiral micro-nano robot specifically comprises: configuring a magnetic fluid solution containing magnetic particles; coating the magnetic fluid solution on the surface of the spiral base, and making the magnetic particles adhere to the surface of the spiral base through deposition solidification.

7. The vibration cutting machining method of the magnetic control spiral micro-nano robot according to claim 6, characterized in that, After the step of coating the magnetic material on the surface of the spiral base, the method further comprises the following steps: adjusting the polarization direction of the magnetic particles deposited on the surface of the spiral base.

8. The vibration cutting machining method of the magnetic control spiral micro-nano robot according to claim 7, characterized in that, The step of adjusting the polarization direction of the magnetic particles deposited on the surface of the spiral base specifically comprises: applying an external magnetic field to the magnetic spiral micro-nano robot according to a preset motion form of the magnetic spiral micro-nano robot, and adjusting the polarization direction of the magnetic particles relative to the axial direction of the spiral base.

9. The vibration cutting machining method of the magnetically controlled spiral micro-nano robot according to claim 8, characterized in that, The step of adjusting the polarization direction of the magnetic particles deposited on the surface of the spiral base is performed once or multiple times.

10. A machining device of a magnetic screw micro-nano robot, used for realizing the vibration cutting machining method of the magnetic screw micro-nano robot according to any one of claims 1-9, characterized in that, The method comprises: a tool adapted to cut a base material; a first driving unit adapted to drive the tool to move in a feed direction; a second driving unit adapted to drive the tool to periodically vibrate along an elliptical path.

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