Quartz glass ingot trough sinking system

Abstract

The invention discloses a quartz glass ingot trough sinking system which comprises an upper end cover, a furnace body is arranged at the bottom of the upper end cover, a lower end cover is arranged at the bottom of the furnace body, a forming bearing device is arranged at the bottom of an inner cavity of the lower end cover, and a supporting assembly is arranged at the bottom of the lower end cover. A memory alloy temperature-sensitive mechanism in the forming device is used for automatically releasing constraint force in a cooling stage, directly reducing internal stress of quartz glass and improving product quality, meanwhile, a double-metal-ring compensation mechanism and a multi-dimensional buffer device in the supporting system are used for ensuring stable operation of the lifting system at high temperature, and secondly, the whole process is automatic and intelligent, so that the production efficiency is improved. And the consistency of product quality and the production efficiency are remarkably improved, and meanwhile, the safety risk and the dependence on the experience of operators are reduced.

Description

Technical Field

[0001] This invention relates to the field of special glass manufacturing technology, and in particular to a quartz glass ingot sinking system. Background Technology

[0002] Quartz glass is an irreplaceable key material in semiconductor, optical communication, and high-end optics fields due to its excellent optical properties, high thermal stability and chemical inertness. At present, the industry generally uses the sinking method to produce large quartz glass ingots. This method puts the quartz glass ingot into a high-temperature resistant mold, places it in a sinking furnace, and melts, sinks, degassing and finally forms the glass ingot under high temperature vacuum or protective atmosphere.

[0003] However, existing slotted furnace systems have revealed several technical shortcomings that urgently need to be addressed in the pursuit of producing larger and higher-quality ingots: the opening and closing of the slotted furnace body and the unloading of materials are achieved through a bottom lifting mechanism. Existing technologies mostly adopt hydraulically driven cross-link lifting platforms and support column structures. However, under long-term high-temperature operating conditions, the bottom of the furnace and its supporting structure will be subjected to uneven heat radiation, resulting in significant thermal deformation. This deformation will generate additional bending stress on the lifting support, which will not only aggravate the wear of key components such as universal ball joints, but also cause asynchronous and unstable lifting processes. In severe cases, it may cause equipment jamming, or even cause hidden damage to the fragile quartz glass ingots being formed, affecting product yield. At the same time, in the existing technology, when quartz glass is cooled after high-temperature forming, its shrinkage is severely constrained by the rigid wall of the forming vessel due to the huge difference in thermal expansion coefficient between it and the forming vessel. This unadjustable rigid constraint will generate extremely high and uneven residual stress inside the quartz glass, leading to problems such as excessive stress birefringence, microcracks, and even macroscopic cracking in the product, which seriously affects the optical uniformity and mechanical reliability of the product. Existing solutions are passive and have limited effectiveness. Secondly, the existing quartz glass sinking system lacks an intelligent control core. Its valves, pumps, heaters, and other equipment are in a discrete manual control state. The execution of the process heavily relies on the operator's human experience and real-time intervention, resulting in unstable product quality, low production efficiency, and safety risks. Summary of the Invention

[0004] The purpose of this invention is to address the aforementioned problems by providing a quartz glass ingot sinking system. According to the molding support device of this invention, the shape memory alloy temperature-sensitive mechanism within the molding device automatically releases the constraint force during the cooling stage, directly reducing the internal stress of the quartz glass and improving product quality. Simultaneously, the bimetallic ring compensation mechanism and multi-dimensional buffer device in the support system ensure stable operation of the lifting system at high temperatures. Furthermore, the fully automated and intelligent process significantly improves product quality consistency and production efficiency, while reducing safety risks and reliance on operator experience.

[0005] To achieve the above-mentioned objectives, the technical solution adopted by this invention is as follows: According to one aspect of the present invention, a quartz glass ingot sinking system is provided, including an upper end cover, a furnace body disposed at the bottom of the upper end cover, a lower end cover disposed at the bottom of the furnace body, a forming bearing device disposed at the bottom of the inner cavity of the lower end cover, the forming bearing device including a main forming body, a plurality of adjustment module mounting cavities being formed on the outer wall of the main forming body, a cylinder being inserted into the inner circumference of the adjustment module mounting cavity, a shape memory alloy spring being welded to the inner circumference of the cylinder, a pressure head being welded to the other end of the shape memory alloy spring, a sealing ring being sleeved on the outer circumference of the pressure head, and a support assembly disposed at the bottom of the lower end cover; The support assembly includes multiple upper pillars. Each upper pillar has a circular groove at its bottom. A bimetallic ring is embedded in the inner wall of the circular groove. A connecting block is placed at the bottom of the bimetallic ring. A ball head is integrally formed and connected to the bottom of the connecting block. A ball socket is hinged to the bottom of the ball head. A disc spring assembly is provided at the bottom of the ball socket. A hydraulic damper is provided at the bottom of the disc spring assembly. A lower pillar is provided at the bottom of the hydraulic damper. A lifting platform is bolted to the bottom of the lower pillar. A lifting device is hinged to the bottom of the lifting platform.

[0006] Preferably, the outer circumference of the upper cover is integrally formed and connected to a vent pipe, the outer circumference of the upper cover is integrally formed and connected to a connecting pipe, and a cooling water jacket is welded to the top of the inner cavity of the upper cover.

[0007] Preferably, the inner circumference of the furnace body is provided with a heat insulation layer, the inner circumference of the heat insulation layer is provided with a mounting base, the side wall of the mounting base is provided with a heating pipe, the outer circumference of the furnace body is integrally formed and connected with a connecting pipe two, and the outer circumference of the furnace body is integrally formed and connected with a connecting pipe three.

[0008] Preferably, a refractory bearing plate is placed at the bottom of the inner cavity of the lower end cover, and an air inflator is integrally formed and connected to the outer circumference of the lower end cover.

[0009] Preferably, a pressure gauge is inserted into the inner circumference of the connecting pipe. The pressure gauge has a cylindrical structure. The top of the cooling water jacket is integrally connected to the upper end cover and a water inlet pipe is integrally connected to the top of the cooling water jacket through the upper end cover.

[0010] Preferably, a thermometer is threaded onto the inner wall of the two circumferences of the connecting pipe, the measuring end of the thermometer penetrates the insulation layer, and an evacuation port is provided on three side walls of the connecting pipe, the side wall of the evacuation port penetrating the insulation layer.

[0011] Preferably, a gas guide plate is embedded in the inner circumference of the inflation tube, and the hydraulic damper, the disc spring assembly, and the outer side wall of the ball socket are all slidably connected with a second circular groove, which is opened at the top of the lower support column.

[0012] Preferably, it includes an intelligent program control module, a device driver and data acquisition module, a human-computer interaction module, and a data storage and analysis module, wherein the device driver and data acquisition module is electrically connected to the thermometer and the manometer; The intelligent program control module includes a recipe management submodule, a sequence execution engine submodule, a closed-loop control submodule, and a safety interlock management submodule; The device drive and data acquisition module includes an actuator drive submodule and a sensor acquisition submodule; The human-computer interaction module includes a main monitoring screen submodule, an alarm management submodule, and a parameter setting submodule; The data storage and analysis module includes a historical database submodule and a historical curve and report submodule; The intelligent program control module is connected to the equipment drive and data acquisition module, the human-machine interaction module, and the data storage and analysis module respectively, and is used to automatically coordinate and control the entire process of the sinking process according to the preset formula and real-time data.

[0013] Preferably, the formula management submodule is used to set, store, call, and version manage process formulas with pressure-temperature curves as the core parameter; The sequence execution engine submodule is used to parse and execute the process sequence defined by the process recipe, and send control commands to the actuator drive submodule in logical order. The closed-loop control submodule is used to receive real-time data from the sensor acquisition submodule, compare it with the target value in the formula using a PID algorithm, and adjust the control signal output to the actuator in real time to maintain process stability. The safety interlock management submodule is used to monitor system status parameters in real time, and when the parameters trigger a preset safety threshold, it exceeds the normal control sequence and executes a predefined safety program.

[0014] Preferably, the working method of the sequence execution engine submodule specifically includes: The process formula is analyzed into multiple consecutive process stages; Set switching conditions for each process stage to enter the next stage. The switching conditions are based on the comparison results of real-time data fed back by the sensor acquisition submodule and preset process state thresholds, wherein the process state thresholds include at least furnace pressure thresholds and temperature thresholds. During operation, real-time data is continuously compared with the process status threshold, and the control command for the next process stage is automatically triggered and executed only when the switching conditions of the current stage are met. The process stages include at least: a rough evacuation stage, a fine evacuation stage, a heating stage, a venting and pressure holding stage, a heat holding and melting stage, and a cooling stage.

[0015] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are: 1. The present invention integrates a pressure self-adjusting module in the molding bearing device. This module combines the temperature-sensitive characteristics of the shape memory alloy spring with the execution function of the graphite indenter, giving the molding process a "tactile" and "responsive" feel. Specifically, in the critical temperature range where the quartz glass cools and shrinks most drastically, the shape memory alloy spring can contract synchronously, driving the indenter to retract, thereby causing the cavity sidewall of the main molding body to "dynamically yield". This process transforms the rigid extrusion that is unavoidable in traditional technology into an adaptive and gentle flexible contact, reducing the internal molecular orientation stress of the quartz glass from a physical source, and providing a guarantee for obtaining products with low stress and high optical uniformity.

[0016] 2. The support components are designed with a unique multi-layer buffer design: thermal deformation compensation: the bimetallic ring at the bottom of the upper support column can automatically adjust its shape according to temperature changes to compensate for the structural deformation caused by uneven heating at the bottom of the furnace body. Multi-dimensional buffer: the universal ball joint structure formed by the connecting block and the ball socket, combined with the axial buffer of the disc spring group (28) and the vibration reduction effect of the hydraulic damper, forms a complete multi-dimensional stress buffer system. Smooth transmission: the connection between the lower support column and the lifting platform, combined with the drive of the lifting device, ensures the smoothness and synchronization of the lifting of the entire furnace body in the high temperature environment. This series of structures work together to effectively solve the problem of jamming and asynchronous operation caused by thermal deformation of the lifting system in the existing technology at high temperature.

[0017] 3. This invention, through intelligent sequence control based on "pressure-temperature" state thresholds, completely eliminates the uncertainty of human operation, ensuring that each batch strictly follows the optimal process path. This fundamentally guarantees the stability and repeatability of the quartz glass ingot melting quality, improving production efficiency and intelligence. Simultaneously, the system automatically completes the coordinated operation of all equipment and real-time closed-loop control of process parameters, significantly reducing single-batch production time and the intensity of manual intervention, significantly improving production efficiency, and enhancing system safety and reliability. The built-in safety interlock management module can monitor the system status in real time and automatically execute predefined safety procedures in case of abnormalities, transforming passive alarms into proactive protection, effectively preventing major equipment and safety accidents. It achieves knowledge accumulation and optimization closed-loop, solidifying excellent processes into standardized digital formulas, reducing reliance on operator experience. Full-process data recording provides a data foundation for process optimization and predictive maintenance, driving continuous production improvement. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural schematic diagram of the present invention; Figure 2 This is a cross-sectional view of the upper end cap of the present invention; Figure 3 This is a schematic diagram of the internal structure of the furnace body of the present invention. Figure 4 This is a schematic diagram of the internal structure of the lower end cap of the present invention. Figure 5 This is a schematic diagram of the molding and bearing device structure of the present invention. Figure 6 This is a schematic diagram of the support component structure of the present invention; Figure 7 This is a schematic diagram of the system functional modules of the present invention; Figure 8 This is a block diagram of the system hardware and signal connections of the present invention; Figure 9 This is the intelligent program control flowchart of the present invention.

[0019] In the attached diagram: 1. Upper end cover; 2. Connecting pipe one; 3. Cooling water jacket; 4. Vent pipe; 5. Furnace body; 6. Connecting pipe two; 7. Thermometer; 8. Insulation layer; 9. Mounting base; 10. Heating pipe; 11. Connecting pipe three; 12. Lower end cover; 13. Molding support device; 14. Refractory support frame; 15. Support assembly; 16. Inflation pipe; 17. Gas guide plate; 18. Main molding body; 19. Adjustment module mounting cavity; 20. Pressure head; 21. Sealing ring; 22. Shape memory alloy spring; 23. Cylinder; 24. Upper support column; 25. Bimetallic ring; 26. Connecting block; 27. Ball socket; 28. Disc spring assembly; 29. ​​Hydraulic damper; 30. Lower support column; 31. Lifting device; 32. Lifting platform. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and preferred embodiments. However, it should be noted that many details listed in the specification are merely to provide the reader with a thorough understanding of one or more aspects of the invention, and these aspects of the invention can be achieved even without these specific details.

[0021] Please see Figures 1 to 9 This invention provides a quartz glass ingot sinking system, the technical solution of which is as follows: This embodiment of a single-sided support template includes an upper end cover 1 for sealing the top of the furnace body, made of high-temperature resistant stainless steel. The bottom of the upper end cover 1 is bolted to the furnace body 5, which serves as the main container, supporting the internal insulation and heating system. The furnace body 5 is also made of high-temperature resistant stainless steel. The bottom of the furnace body 5 is bolted to a lower end cover 12 for sealing the bottom of the furnace body and supporting the mold system. The lower end cover 12 is also made of high-temperature resistant stainless steel. A forming support device 13 is located at the bottom of the inner cavity of the lower end cover 12, serving as a core component for quartz glass forming. The forming support device 13 includes a main forming body 18, which serves as the quartz glass forming cavity and is made of high-purity graphite. Multiple adjustment module mounting cavities 19 are formed on the outer wall of the main forming body 18. For fixing the pressure regulating module, a cylinder 23 is inserted into the inner circumference of the regulating module mounting cavity 19 as the outer shell of the pressure regulating module. Its material is high-temperature resistant stainless steel. A shape memory alloy spring 22 is welded to the inner circumference of the cylinder 23 as a temperature-sensitive driving element to automatically regulate the pressure. Its material is Ni-Ti-Hf / Ni-Ti-Pd high-temperature memory alloy. A pressure head 20 is welded to the other end of the shape memory alloy spring 22 for direct contact with quartz glass to transmit pressure. Its material is high-purity graphite. A sealing ring 21 is sleeved on the outer circumference of the pressure head 20 for sealing and preventing leakage, and ensuring the linear movement of the pressure head. Its material is expanded graphite or ceramic fiber. A support component 15 is provided at the bottom of the lower end cover 12. The support assembly 15 includes multiple upper pillars 24 for connecting the lower end cover and the compensation mechanism. These pillars are made of heat-resistant alloy steel. Each upper pillar 24 has a circular groove at its bottom, with a bimetallic ring 25 embedded in the inner wall of the groove for automatic thermal deformation compensation. This ring is made of stainless steel and Invar alloy composite. A connecting block 26 is placed at the bottom of the bimetallic ring 25 for load transfer and connection to the ball joint. This block is made of heat-resistant alloy steel. A ball head is integrally formed at the bottom of the connecting block 26, and a ball socket 27 is hinged to the bottom of the ball head to form a universal ball joint assembly, adapting to multi-directional displacement. This ball socket 27 is made of wear-resistant alloy steel. The unit is bolted to a disc spring assembly 28, which is used to buffer and absorb impact loads. The disc spring assembly 28 is made of spring steel. The bottom of the disc spring assembly 28 is bolted to a hydraulic damper 29, which is used for vibration reduction and damping control. The bottom of the hydraulic damper is provided with a lower support column 30, which is used to connect the damping system to the lifting platform. The lower support column 30 is bolted to a lifting platform 32, which is used to support the weight of the entire furnace body. The lifting platform 32 is made of structural steel Q235. The bottom of the lifting platform 32 is hinged to a lifting device 31, which is used to provide smooth lifting power. Specifically, it is a dual hydraulic cylinder driven lifting machine in the prior art.

[0022] It is worth noting that, for the sealing and protection of the top of the furnace body 2, specifically, the outer circumference of the upper cover 1 is integrally formed with a vent pipe 4, which is used to connect to an external vent valve to discharge gas inside the furnace and control pressure balance. Its material is high-temperature resistant stainless steel. The outer circumference of the upper cover 1 is integrally formed with a connecting pipe 2, which is used to connect a pressure measuring device to monitor the pressure inside the furnace. Its material is high-temperature resistant stainless steel. The top of the inner cavity of the upper cover 1 is welded with a cooling water jacket 3, which is used to circulate cooling water and protect the structure of the upper cover. Its material is stainless steel / copper alloy.

[0023] Next, to heat the internal materials, specifically, the inner circumference of the furnace body 5 is covered with an insulation layer 8 for heat insulation and to reduce heat loss. The material is ceramic fiber / alumina. The inner circumference of the insulation layer 8 is bolted to a mounting base 9 for fixing and insulating the heating element. The material is high-temperature ceramic. The side wall of the mounting base 9 is bolted to a heating tube 10 for providing a high-temperature heat source, specifically a silicon molybdenum rod or silicon carbide rod. The outer circumference of the furnace body 5 is integrally formed with a connecting pipe 2 6 for installing a temperature measuring device interface. The material is high-temperature resistant stainless steel. Specifically, the connecting pipe 2 6 is used to connect to an external evacuation main valve. The evacuation main valve is connected to Roots pump evacuation valves 1 and 2, which in turn are connected to Roots pumps 1 and 2 and mechanical pumps 1 and 2, respectively. The outer circumference of the furnace body 5 is integrally formed with a connecting pipe 3 11 for connecting to a vacuum pumping system. The material is high-temperature resistant stainless steel.

[0024] Meanwhile, for the sealing and protection of the bottom of the furnace body 2, specifically, a refractory bearing plate is placed at the bottom of the inner cavity of the lower end cover 12, and an air filling pipe 16 is integrally formed on the outer circumference of the lower end cover 12. The air filling pipe 16 is used to connect an external air filling valve for filling with protective gas, and its material is high-temperature resistant stainless steel.

[0025] Furthermore, in order to test the pressure inside the furnace, specifically, a pressure gauge is inserted into the inner circumference of the connecting pipe 2. The pressure gauge has a cylindrical 23-shaped structure. The top of the cooling water jacket 3 is connected to the water inlet pipe through the upper end cover 1, which is integrally formed. The top of the cooling water jacket 3 is connected to the water outlet pipe through the upper end cover 1, which is integrally formed.

[0026] It is worth noting that, in order to test the temperature inside the furnace, specifically, a thermometer 7 is threaded on the inner circumference of the connecting pipe 2 6 to monitor the temperature inside the furnace in real time. Specifically, it is a ceramic protective tube heating coupler. The measuring end of the thermometer 7 penetrates the insulation layer 8. An evacuation port is opened on the side wall of the connecting pipe 3 11, and the side wall of the evacuation port penetrates the insulation layer 8.

[0027] Preferably, in order to facilitate the separation of inflation airflow, specifically, the inner circumferential wall of the inflation tube 16 is embedded with a gas guide plate 17, which is used to evenly distribute the airflow and avoid turbulence. The gas guide plate is made of porous graphite / ceramic. The outer walls of the hydraulic damper 29, the disc spring assembly 28 and the ball socket 27 are all slidably connected with a circular groove 2, which is opened at the top of the lower support column 30.

[0028] Specifically, it includes an intelligent program control module, a device driver and data acquisition module, a human-computer interaction module, and a data storage and analysis module. The device driver and data acquisition module is electrically connected to the thermometer and the pressure gauge. The intelligent program control module includes a recipe management submodule, a sequence execution engine submodule, a closed-loop control submodule, and a safety interlock management submodule; The device drive and data acquisition module includes an actuator drive submodule and a sensor acquisition submodule; The human-computer interaction module includes a main monitoring screen submodule, an alarm management submodule, and a parameter setting submodule; The data storage and analysis module includes a historical database submodule and a historical curve and report submodule; The intelligent program control module is connected to the equipment drive and data acquisition module, the human-machine interaction module, and the data storage and analysis module respectively, and is used to automatically coordinate and control the entire process of the sinking process according to the preset formula and real-time data.

[0029] In one specific implementation of Example 1, the quartz glass ingot sinking system uses an industrial computer (IPC) or a high-performance programmable logic controller (PLC) as the core processing unit.

[0030] The intelligent program control module, as the core decision-making unit of the system, runs on the core processing unit and communicates with the other three modules through industrial Ethernet or fieldbus (such as PROFIBUS-DP, Modbus TCP).

[0031] The device drive and data acquisition module is implemented through a digital / analog input / output (DI / DO, AI / AO) card installed on the core processing unit or a remote I / O station. The actuator drive submodule outputs control signals to the field actuators via the DO / AO channels. For example, it sends a 24V DC switching signal to the solenoid coils of the inflation valve, venting valve, and evacuation valve to control their opening and closing; and sends a 4-20mA analog signal to the heating power regulator to control the heating power. The sensor acquisition submodule acquires signals from field sensors via the AI / DI channels, such as millivolt signals from thermocouples (upper / lower zone temperatures) and 4-20mA signals from pressure transmitters (furnace pressure), and converts them into actual physical quantities through an internal program.

[0032] The human-machine interaction module runs on an independent touch screen or industrial computer, and is connected to the core processing unit via Ethernet. It receives and graphically displays the system status in real time, and sends operator instructions (such as start, stop, parameter setting) to the core processing unit.

[0033] The data storage and analysis module can be deployed locally on the core processing unit or on a separate database server. It receives and stores timestamped process data from the core processing unit through a standard database interface (such as ODBC) and provides data query services to external data analysis clients.

[0034] Secondly, specifically, the formula management submodule is used to set, store, call, and version manage process formulas with pressure-temperature curves as the core parameter; The sequence execution engine submodule is used to parse and execute the process sequence defined by the process recipe, and send control commands to the actuator drive submodule in logical order. The closed-loop control submodule is used to receive real-time data from the sensor acquisition submodule, compare it with the target value in the formula using a PID algorithm, and adjust the control signal output to the actuator in real time to maintain process stability. The safety interlock management submodule is used to monitor system status parameters in real time, and when the parameters trigger a preset safety threshold, it exceeds the normal control sequence and executes a predefined safety program.

[0035] Example 2 The operator selects a recipe named "Standard Quartz Sinking" from the recipe library through the recipe management submodule of the human-machine interface module. This recipe defines the following core parameters: target furnace pressure for rough evacuation P1=100Pa, target furnace pressure for fine evacuation P2=0.1Pa, target temperature for heating T1=1250℃, safety interlock pressure P_safe=50Pa, and the corresponding heating curve.

[0036] After the operator clicks "Start", the sequence execution engine submodule begins execution: Entering the "coarse evacuation stage": a command is sent to the actuator drive submodule to close the gas charging valve and start mechanical pump 1 and mechanical pump 2. Subsequently, the engine continuously monitors furnace pressure data from the sensor acquisition submodule.

[0037] When the real-time furnace pressure is monitored to be ≤100Pa (P1), the sequence execution engine automatically determines that the condition is met and enters the "fine evacuation stage": sends a command to open Roots pump 1 and Roots pump 2 and their upstream valves.

[0038] Once the real-time furnace pressure is monitored to be ≤0.1Pa (P2) and stabilized, the "heating stage" begins: the heating system is started and the temperature is raised according to the heating curve in the formula.

[0039] Throughout the heating process, the closed-loop control submodule operates independently and in parallel. It continuously receives temperature signals from the upper and lower zones and dynamically adjusts the power signal output to the heater using a PID algorithm, ensuring that the actual temperature closely follows the preset heating curve. If a "high temperature deviation" occurs, this module will automatically increase or decrease the output power to compensate, without requiring manual intervention.

[0040] Meanwhile, the safety interlock management submodule is also monitoring the entire process. For example, during the heating process, if the furnace pressure reported by the sensor acquisition submodule suddenly rises to 60Pa (exceeding P_safe=50Pa), the submodule will immediately "overtake" the normal control of the sequence execution engine, forcibly stop the heating system and activate the alarm to prevent the quartz glass from being damaged by oxidation due to excessive pressure.

[0041] Finally, specifically, the working method of the sequence execution engine submodule includes: The process formula is analyzed into multiple consecutive process stages; Set switching conditions for each process stage to enter the next stage. The switching conditions are based on the comparison results of real-time data fed back by the sensor acquisition submodule and preset process state thresholds, wherein the process state thresholds include at least furnace pressure thresholds and temperature thresholds. During operation, real-time data is continuously compared with the process status threshold, and the control command for the next process stage is automatically triggered and executed only when the switching conditions of the current stage are met. The process stages include at least: a rough evacuation stage, a fine evacuation stage, a heating stage, a venting and pressure holding stage, a heat holding and melting stage, and a cooling stage.

[0042] Example 3 In a more specific implementation, the "state criterion-based switching" method of the sequence execution engine submodule is implemented through the following steps: The system breaks down the entire process into five distinct stages: A. Coarse evacuation -> B. Fine evacuation -> C. Heating -> D. Heat preservation and melting -> E. Cooling.

[0043] The switching conditions for each stage depend entirely on the comparison between real-time process data and preset thresholds, rather than on fixed time intervals: The condition for switching from stage A to stage B is: real-time furnace pressure ≤ P1.

[0044] The condition for switching from stage B to stage C is: the real-time furnace pressure ≤ P2 and the pressure change rate tends to stabilize within 30 seconds.

[0045] The condition for switching from stage C to stage D is: real-time temperature ≥ T1 (target temperature).

[0046] The condition for switching from stage D to stage E is: the continuous holding time at the target temperature T1 is ≥ the set value t.

[0047] During system operation, the sequence execution engine submodule creates a phased state machine. For example, when the system is in phase B (fine vacuuming), the engine continuously executes a judgment process: read the current furnace pressure -> compare with P2 -> if the condition is not met, wait for one scan cycle (e.g., 100ms) and then read and compare again; if the condition is met, immediately trigger a state transition, start executing the initialization instructions for phase C (heating), and monitor the switching conditions (temperature) of this phase.

[0048] This method ensures the precision and adaptability of process advancement. For example, even if the initial ambient humidity of a production run is high, causing the evacuation time to be slightly longer than usual, the system will patiently wait until the precise vacuum requirement is reached, rather than forcibly proceeding to the next step at a fixed time, thus ensuring that the process starting point for each batch is strictly consistent.

[0049] In addition, the circuits, electronic components and modules involved in this invention are all existing technologies, which can be fully implemented by those skilled in the art, and need not be elaborated upon. The content protected by this invention does not involve any improvement to the internal structure and method. Combination Figures 1-9 The specific usage process of a single-sided formwork template according to this embodiment is as follows: 1: Quartz Glass Ingot Preparation Process Material preparation: Stablely place the selected quartz glass raw material into the 18-shaped cavity of the main molding body; Furnace body closing: Start the lifting device 31, and drive the support component 15 to rise through the lifting platform 32, so that the lower end cover 12 fits tightly with the furnace body 5, and then close the upper end cover 1. Atmosphere conditioning: Evacuate to 10°C via connecting pipe 311. - ²Pa, and then high-purity argon gas is introduced through the gas filling tube 16 to a slightly positive pressure; Heating and melting: Start the heating tube (10, heat to 1750-1800℃ at a rate of 50-100℃ / h), and hold for 4-8 hours; Intelligent forming: The shape memory alloy spring 22 pushes the pressure head 20 at high temperature to apply balanced pressure and prevent the glass material from expanding excessively; Stress relief cooling: Cooling to 800℃ at a rate of 20-50℃ / h, during which the shape memory alloy spring automatically contracts to release the constraint force; Material handling: Continue cooling to below 200℃, open the furnace, and remove the formed quartz glass ingot; 2: System maintenance and mold replacement methods Mold replacement: Lower the lifting platform 32 to the lowest position and remove the entire molding support device 13 from the refractory support plate; Pressure module inspection: Check the rebound performance of the memory alloy springs 22 inside the cylinder 23 one by one, and replace the failed springs; Thermal compensation mechanism calibration: Check the deformation state of the bimetallic ring 25 to ensure that it returns to flatness at room temperature; Sealing system inspection: Check the fit clearance between the pressure head 20 and the sealing ring 21, and replace the sealing ring if necessary; Reset and install: Place the refractory bearing device back onto the refractory plate after maintenance, and raise the furnace body to start the next cycle; 3: Emergency handling and process adjustment methods Emergency power outage: In the event of a sudden power outage, the backup water source of cooling water jacket 3 will automatically start and slowly release the pressure inside the furnace through the vent pipe 4; Temperature abnormality: When the thermometer 7 detects a temperature abnormality, it automatically adjusts the power of the heating tube 10 and increases the flow of protective gas through the gas charging tube 16. Pressure imbalance: When the pressure gauge detects an abnormal pressure, it will automatically open the vent pipe 4 or the inflation pipe 16 to adjust the pressure; Lifting failure: When the lifting is out of sync, the bimetallic ring 25 and the disc spring assembly 28 work together to compensate for the deformation and prevent the equipment from jamming. Process optimization: Adjust the preload of the shape memory alloy spring and the installation preload of the bimetallic ring according to the different specifications of quartz glass ingots.

[0050] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A quartz glass ingot slotting system, characterized by, Include: The upper end cover (1), the bottom of the upper end cover (1) is provided with a furnace body (5), the bottom of the furnace body (5) is provided with a lower end cover (12), the inner cavity of the lower end cover (12) is provided with a shaped bearing device (13), the shaped bearing device (13) comprises a main shaped body (18), a plurality of adjusting module installation cavities (19) are opened on the outer side wall of the main shaped body (18), a circular cylinder (23) is inserted into the circumferential inner wall of the adjusting module installation cavity (19), a shape memory alloy spring (22) is welded on the circumferential inner wall of the circular cylinder (23), the other end of the shape memory alloy spring (22) is welded with a pressure head (20), the circumferential outer wall of the pressure head (20) is sleeved with a sealing ring (21), and the bottom of the lower end cover (12) is provided with a support assembly (15); The support assembly (15) comprises a plurality of upper support columns (24), a circular groove one is opened at the bottom of the upper support column (24), a bimetal ring (25) is embedded on the inner side wall of the circular groove one, a connecting block (26) is placed at the bottom of the bimetal ring (25), the connecting block (26) is integrally connected with a ball head at the bottom, the ball head is hingedly connected with a ball socket (27) at the bottom, a disc spring group (28) is arranged at the bottom of the ball socket (27), a hydraulic damper (29) is arranged at the bottom of the disc spring group (28), a lower support column (30) is arranged at the bottom of the hydraulic damper (29), and a lifting platform (32) is connected to the lower support column (30) through bolts. The lifting platform (32) is hingedly connected with a lifting device (31) at the bottom.

2. A quartz glass ingot slotting system according to claim 1, characterized in that: The outer circumferential wall of the upper end cover (1) is integrally connected with a gas discharge pipe (4), the outer circumferential wall of the upper end cover (1) is integrally connected with a connecting pipe one (2), and the inner cavity of the upper end cover (1) is welded with a cooling water jacket (3) at the top.

3. A quartz glass ingot slotting system according to claim 2, characterized in that: The circumferential inner wall of the furnace body (5) is provided with a heat preservation layer (8), the circumferential inner wall of the heat preservation layer (8) is provided with a mounting base (9), the side wall of the mounting base (9) is provided with a heating pipe (10), the circumferential outer wall of the furnace body (5) is integrally connected with a connecting pipe two (6), and the circumferential outer wall of the furnace body (5) is integrally connected with a connecting pipe three (11).

4. A quartz glass ingot slotting system according to claim 3, characterized in that: The inner cavity of the lower end cover (12) is placed with a fireproof bearing plate, and the outer circumferential wall of the lower end cover (12) is integrally connected with an air inflation pipe (16).

5. A quartz glass ingot slotting system according to claim 4, characterized in that: The circumferential inner wall of the connecting pipe one (2) is inserted with a pressure gauge, the pressure gauge is a circular cylinder (23) structure, the top of the cooling water jacket (3) is integrally connected with a water inlet pipe through the upper end cover (1), and the top of the cooling water jacket (3) is integrally connected with a water outlet pipe through the upper end cover (1).

6. A quartz glass ingot slotting system according to claim 5, characterized in that: The circumferential inner wall of the connecting pipe two (6) is threadedly connected with a thermometer (7), the temperature measuring end of the thermometer (7) penetrates the heat preservation layer (8), and the side wall of the connecting pipe three (11) is provided with an evacuation port, and the side wall of the evacuation port penetrates the heat preservation layer (8).

7. A quartz glass ingot slotting system according to claim 6, characterized in that: The gas guide plate (17) is embedded in the circumferential inner wall of the inflation tube (16), the outer side wall of the hydraulic damper (29), the disc spring group (28) and the ball socket (27) are slidably connected with a circular groove two, and the circular groove two is arranged on the top of the lower support (30).

8. The quartz glass ingot slotting system of claim 7, wherein: The intelligent program control module, the device driving and data acquisition module, the man-machine interaction module, and the data storage and analysis module are included. The intelligent program control module includes a formula management submodule, a sequence execution engine submodule, a closed-loop control submodule, and a safety interlock management submodule. The device driving and data acquisition module includes an actuator driving submodule and a sensor acquisition submodule. The man-machine interaction module includes a main monitoring picture submodule, an alarm management submodule, and a parameter setting submodule. The data storage and analysis module includes a historical database submodule and a historical curve and report submodule. The intelligent program control module is signal connected with the device driving and data acquisition module, the man-machine interaction module, and the data storage and analysis module, and is used for automatically coordinating and controlling the whole process of the slotting process according to a preset formula and real-time data.

9. A quartz glass ingot slotting system according to claim 8, characterized in that: The formula management submodule is used for setting, storing, calling, and version management of a process formula with a pressure-temperature curve as a core parameter. The sequence execution engine submodule is used for analyzing and executing a process sequence defined by the process formula, and sending a control instruction to the actuator driving submodule in a logical order. The closed-loop control submodule is used for receiving real-time data of the sensor acquisition submodule, comparing the real-time data with a target value in the formula through a PID algorithm, and adjusting a control signal output to an execution mechanism in real time to maintain process stability. The safety interlock management submodule is used for monitoring system state parameters in real time, and when a parameter triggers a preset safety threshold, the safety interlock management submodule overcomes a conventional control sequence and executes a predefined safety program.

10. The quartz glass ingot slotting system of claim 9, wherein: The working method of the sequence execution engine submodule specifically includes: The process formula is analyzed into a plurality of continuous process stages. Switching conditions for each process stage to enter the next stage are set, and the switching conditions are based on a comparison result of real-time data fed back by the sensor acquisition submodule and preset process state thresholds, wherein the process state thresholds at least include a furnace pressure threshold and a temperature threshold. In the running process, real-time data and the process state thresholds are continuously compared, and only when the switching conditions of the current stage are met, the control instruction of the next process stage is automatically triggered and executed. The process stages at least include a rough evacuation stage, a fine evacuation stage, a temperature rising stage, a breaking emptying and pressure maintaining stage, a temperature maintaining and melting stage, and a cooling stage.

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