Installation tool and installation method

Abstract

The embodiment of the invention relates to the technical field of semiconductors, and provides an installation tool and an installation method. The mounting tool is used for mounting at least one heater and at least one group of first electrodes in a process chamber. The heater comprises two connecting ends, the first electrode comprises an electrode body, a first connector and a second connector, the first connector and the second connector are located at the two opposite ends of the electrode body respectively, and the process cavity comprises at least one set of second electrodes. The mounting tool comprises a first carrier and a second carrier. The first carrier is configured to position the heater and the at least one group of first electrodes and enable the connecting end of the heater to be connected with the first connector of the first electrode to form an assembly to be installed. And the second carrier is configured to extract the to-be-mounted component from the first carrier, so that the to-be-mounted component is separated from the first carrier, and the to-be-mounted component is conveyed to the process chamber, so that the second connector of the first electrode is connected with the second electrode. The mounting tool is favorable for improving the dismounting efficiency of the heater and the first electrode.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and more specifically, to an mounting fixture and mounting method. Background Technology

[0002] Currently, when using epitaxial growth methods to form SiC films, the epitaxial equipment used needs to heat the semiconductor substrate to a high temperature of 1500℃~1700℃. Process gas enters the process chamber from the top, is preheated by a thermal field generated by heaters located on the sidewalls of the process chamber, flows downwards, and comes into contact with the surface of the semiconductor substrate on the stage within the process chamber. This heats the stage to the reaction temperature, thereby achieving the epitaxial growth of the thin film.

[0003] However, because the heaters and the first electrode connected to the heaters in the process chamber operate at high temperatures for extended periods, their lifespan gradually shortens, and heating efficiency decreases accordingly. To ensure consistent film quality for each batch of semiconductor substrates, the heaters and first electrodes in the epitaxial equipment must be replaced periodically.

[0004] Currently, the assembly process of the heater and the first electrode typically requires multiple people to work together to lift the heater and the first electrode, manually install them, and visually align them to the preset work positions. This process is inconvenient and requires multiple adjustments to complete the installation, resulting in long downtime of the epitaxial equipment and reduced production efficiency. In addition, if the positioning is inaccurate during the adjustment process, the brittle materials of the heater and the first electrode are prone to collision with other components within the epitaxial equipment, causing damage to the heater and further increasing maintenance costs.

[0005] Therefore, it is necessary to develop an installation fixture and installation method to improve the efficiency of disassembly and assembly of the heater and the first electrode. Summary of the Invention

[0006] Therefore, it is necessary to provide an installation fixture and installation method to improve the efficiency of disassembly and assembly of the heater and the first electrode.

[0007] A first aspect of this application provides an installation fixture. This installation fixture is used to install at least one heater and at least one set of first electrodes into a process chamber. The heater includes two connecting ends, and the first electrode includes an electrode body and first and second connecting heads located at opposite ends of the electrode body. The process chamber includes at least one set of second electrodes. The installation fixture includes a first carrier and a second carrier. The first carrier is configured to position at least one heater and at least one set of first electrodes, and to connect one connecting end of the heater to the first connecting head of one first electrode, and the other connecting end to the first connecting head of another first electrode, forming an assembly to be installed. The second carrier is configured to remove the assembly to be installed from the first carrier, detach the assembly from the first carrier, and transport the assembly to the process chamber to connect the second connecting heads of the first electrodes to the set of second electrodes.

[0008] The aforementioned installation fixture, through the positioning function of the first carrier, enables the pre-assembly process of the heater and the first electrode to be completed on the first carrier. This helps ensure that the heater and the first electrode are correctly aligned in the early stages of assembly. In turn, it helps ensure the accuracy of the connection between the second connector and the second electrode after the second carrier transports the components to be installed to the process chamber. Ultimately, this helps reduce the number of debugging attempts and the risk of collisions during subsequent installation, thereby reducing maintenance costs and additional downtime caused by damage, and improving the continuity and efficiency of the production line.

[0009] In some embodiments, the first carrier includes a base, a positioning element, and a plurality of support columns. The positioning element is disposed on the base and configured to position the heater. The plurality of support columns are disposed on the base, surrounding the positioning element, and configured to support and position the second connector of the first electrode.

[0010] In some embodiments, the second connector of the first electrode includes a protrusion, and the support post is provided with a positioning groove adapted to the protrusion. When the protrusion is fitted into the positioning groove, the groove wall of the positioning groove restricts the movement of the protrusion.

[0011] In some embodiments, the positioning element includes a support portion and a positioning portion. The support portion protrudes above the base and is configured to support the heater. The positioning portion extends from the base or from the support portion in a direction away from the base, and the outer periphery of the positioning portion engages with the inner ring of the heater to limit the heater from deviating from its center of rotation when it rotates.

[0012] In some embodiments, mounting fixtures are used to mount at least two heaters and at least two sets of first electrodes into the process chamber. The second connectors of the different sets of first electrodes have different heights. The heights of multiple support columns are configured to correspond one-to-one with the heights of the second connectors of the different sets of first electrodes, so as to support and position the second connectors of different heights respectively.

[0013] In some embodiments, the second carrier includes a support rod, two connecting rods, and two fixing members. The two connecting rods are respectively connected to both ends of the support rod. The two fixing members are respectively connected to the ends of the two connecting rods furthest from the support rod. Each fixing member includes a hook configured to engage a second connector of the corresponding first electrode.

[0014] In some embodiments, the second carrier further includes two stops connected to the two connecting rods respectively and spaced apart from the hook. The stops are configured to abut against the side of the corresponding electrode body opposite to the hook, so as to restrict the movement of the first electrode together with the hook.

[0015] In some embodiments, the second carrier further includes a first fastener. One of the support rod and the connecting rod has a first oblong hole, through which the first fastener passes to connect to the other of the support rod and the connecting rod. The position of the connecting rod can be adjusted by adjusting the relative position of the first oblong hole and the first fastener.

[0016] In some embodiments, the second carrier further includes a second fastener. One of the stop and the connecting rod has a second oblong hole, through which the second fastener passes and connects to the other of the stop and the connecting rod. The position of the stop can be adjusted by adjusting the relative position of the second oblong hole and the second fastener.

[0017] In some embodiments, the fastener is configured to abut against the electrode body of the corresponding first electrode while hooking the second connector of the corresponding first electrode, thereby restricting the movement of the first electrode.

[0018] In some embodiments, the second carrier further includes a third fastener. One of the fastener and the connecting rod is provided with a third oblong hole, through which the third fastener is connected to the other of the fastener and the connecting rod. The position of the fastener can be adjusted by adjusting the relative position of the third oblong hole and the third fastener.

[0019] A second aspect of this application also provides an installation method, in which at least one heater and at least one set of first electrodes are installed in a process chamber using the installation fixture of the first aspect of this application. The heater includes two connecting ends, the first electrode includes an electrode body and a first connector and a second connector located at opposite ends of the electrode body, and the process chamber includes a second electrode.

[0020] The installation method includes: positioning a heater and a set of first electrodes on a first carrier, and connecting one end of the heater to a first connector of a first electrode and the other end of the heater to a first connector of another first electrode to form an assembly to be installed; removing the assembly to be installed from the first carrier using a second carrier, thereby detaching the assembly from the first carrier; and transporting the assembly to be installed to a process chamber using the second carrier, connecting a second connector of a set of first electrodes to a set of second electrodes, and then removing the second carrier.

[0021] The installation method of the second aspect of this application has at least the same advantages as the installation tooling of the first aspect of this application, and will not be described in detail here.

[0022] In some embodiments, S10 specifically includes: positioning the heater on the positioning member of the first carrier, aligning the connecting end of the heater with the support column of the first carrier, and fitting the second connector of the first electrode into the positioning groove of the corresponding support column, and then connecting the connecting end of the heater to the first connector of the first electrode. S20 specifically includes: using the fixing member of the second carrier to hook the second connector of the corresponding first electrode, then lifting the second carrier to disengage the second connector of the first electrode from the positioning groove of the support column, thereby detaching the component to be installed from the first carrier.

[0023] In some embodiments, S20 specifically includes: using the hook portion of the fixing member of the second carrier to hook the second connector of the corresponding first electrode while causing the stop member of the second carrier to abut against and stop the electrode body of the corresponding first electrode; or, using the hook portion of the fixing member of the second carrier to hook the second connector of the corresponding first electrode while causing the fixing portion of the fixing member of the second carrier to abut against and stop the electrode body of the corresponding first electrode.

[0024] In some embodiments, at least one heater includes a first heater and a second heater, at least one set of first electrodes includes a first set of first electrodes and a second set of first electrodes, and at least one set of second electrodes includes a first set of second electrodes and a second set of second electrodes; the installation method includes: performing S10 to S30, installing the first heater and the first set of first electrodes as a first assembly to be installed onto the first set of second electrodes in the process chamber; performing S10 to S30 again, installing the second heater and the second set of first electrodes as a second assembly to be installed onto the second set of second electrodes in the process chamber, wherein the second heater is located above the first heater.

[0025] In some embodiments, the first carrier includes a first set of support pillars and a second set of support pillars. The first set of support pillars is used in the step of forming the first assembly to be installed. The second set of support pillars is used in the step of forming the second assembly to be installed. The first set of support pillars and the second set of support pillars have different heights. The second connectors of the first set of first electrodes and the second connectors of the second set of first electrodes have different heights. The first set of second electrodes and the second set of second electrodes are located at the same height within the process chamber.

[0026] In some embodiments, the first carrier includes a first set of support pillars and a second set of support pillars. The first set of support pillars is used in the step of forming the first assembly to be installed. The second set of support pillars is used in the step of forming the second assembly to be installed. The first set of support pillars and the second set of support pillars have the same height, or the first set of support pillars and the second set of support pillars are the same set of support pillars. The second connector of the first set of first electrodes has the same height as the second connector of the second set of first electrodes. The height of the first set of second electrodes within the process chamber is lower than the height of the second set of first electrodes within the process chamber. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the structure of a mounting fixture for mounting a heater, a set of first electrodes, and a corresponding process chamber, according to an embodiment of this application.

[0028] Figure 2 for Figure 1 A schematic diagram of the structure after the two heaters and two sets of first electrodes are installed into the process chamber.

[0029] Figure 3 This is a schematic diagram of the installation fixture according to an embodiment of this application.

[0030] Figure 4 for Figure 1 A heater and a set of first electrodes are positioned in Figure 3 A schematic diagram of the structure after the installation tooling is installed.

[0031] Figure 5 for Figure 4 A schematic diagram of the structure of the second vehicle in the middle.

[0032] Figure 6 for Figure 5 An exploded view of the second vehicle in the middle.

[0033] Figure 7 This is a schematic diagram of the structure of a second vehicle according to another embodiment of this application.

[0034] Figure 8 for Figure 7 A schematic diagram of the structure of the second vehicle in a state of use.

[0035] Figure 9A flowchart illustrating a method for mounting at least one heater and at least one set of first electrodes in a process chamber using a mounting fixture according to an embodiment of this application.

[0036] Figures 10 to 17 This is a schematic diagram of the steps involved in installing the first heater and the first set of first electrodes into the process chamber according to an embodiment of this application.

[0037] Figures 18 to 24 This is a schematic diagram illustrating the steps of installing the second heater and the second set of first electrodes into the process chamber according to an embodiment of this application.

[0038] Explanation of key component symbols: Heater-10; First heater-10a; Second heater-10b; Connecting end-11; First electrode-20, 20a, 20b; First connector-21; Second connector-22; First part-221; Second part-222; Protrusion-222p; Electrode body-23; Process chamber-30; Housing-31; Second electrode-32, 32a, 32b; Bushing-33; Assembly to be installed-200; Mounting fixture-100; First carrier-40; Base-41; Positioning element-42; Positioning part-421; Bearing part-422; Support column-43; Position groove - 43g; First support column - 431; Second support column - 432; Roller - 44; Second carrier - 50, 50a; Support rod - 51; Connecting rod - 52; First connecting part - 521; Second connecting part - 522; Fixing part - 53; Fixing part - 531; Hook part - 532; Sub-connecting part - 5321; Stop part - 54; Angle - α; First waist-shaped hole - H1; Second waist-shaped hole - H2; Third waist-shaped hole - H3; First threaded hole - O1; Second threaded hole - O2; First fastener - J1; Second fastener - J2; Third fastener - J3; First direction - D1.

[0039] The following detailed description, in conjunction with the accompanying drawings, will further illustrate this application. Detailed Implementation

[0040] The embodiments of this application are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout.

[0041] It should be noted that the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. The terms "exemplarily" or "for example," etc., are used to indicate examples, illustrations, or explanations, and should not be interpreted as indicating a preference or advantage over other embodiments or designs. Specifically, the use of words such as "exemplarily" or "for example" is intended to present the relevant concepts in a concrete manner.

[0042] Unless otherwise defined, the term "connection" should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral body; it can be directly connected or indirectly connected through an intermediate medium.

[0043] The first aspect of the present application provides an installation tooling. This installation tooling is used to install at least one heater and at least one set of first electrodes in a process chamber. The following will be combined with Figure 1 illustrate the structures of the heater and the first electrodes to be installed and the structure of the process chamber.

[0044] Refer Figure 1 , the heater 10 includes connection ends 11. The number of the connection ends 11 of the heater 10 is two, and the two connection ends 11 are respectively located on opposite sides of the outer periphery of the heater 10. Each connection end 11 is used to connect to a first electrode 20.

[0045] Each first electrode 20 includes a first connection head 21, a second connection head 22 and an electrode body 23. The first connection head 21 and the second connection head 22 are respectively located at opposite ends of the electrode body 23. The first connection head 21 is used to connect to a corresponding connection end 11 of the heater 10. The second connection head 22 is used to connect to the process chamber 30.

[0046] The process chamber 30 includes a housing 31, a second electrode 32 and a bushing 33. The housing 31 is generally in a hollow cylindrical shape.

[0047] The number of pairs of the second electrodes 32 is multiple. Each pair of the second electrodes 32 is used to be correspondingly electrically connected to a pair of the first electrodes 20. Hereinafter, a pair of the second electrodes 32 is also referred to as a set of the second electrodes 32, and a pair of the first electrodes 20 is also referred to as a set of the first electrodes 20.

[0048] In some embodiments, each second electrode 32 has one end extending into the housing 31 and the other end extending outside the housing 31. The end of the second electrode 32 extending into the housing 31 is used to be electrically connected to the second connection head 22 of a corresponding first electrode 20, and the end extending outside the housing 31 is used to be electrically connected to an external power supply (not shown in the figure).

[0049] The bushing 33 is located in the inner middle area of the housing 31. A placement table (not shown in the figure) is provided below the inside of the bushing 33, and the placement table is used to carry a substrate (not shown in the figure).

[0050] The heater 10 is generally in a circular ring shape. The heater 10 can be sleeved around the periphery of the bushing 33.

[0051] Figure 2 For Figure 1A schematic diagram showing the structure after the two heaters 10 and two sets of first electrodes 20 are installed into the process chamber 30. (See reference...) Figure 2 The heater 10 is located inside the housing 31 of the process chamber 30 and is fitted around the bushing 33. The first connector 21 of each first electrode 20 is connected to the heater 10, and the second connector 22 is electrically connected to the second electrode 32 of the process chamber 30. The electrode body 23 of the first electrode 20 is located between the heater 10 and the housing 31 of the process chamber 30.

[0052] It should be noted that in the relevant technology, the assembly process of the heater 10 and the first electrode 20 requires manual installation and visual alignment, necessitating multiple adjustments, which is inefficient and easily damages components such as the heater 10 and the first electrode 20. Therefore, it is necessary to improve the assembly and disassembly efficiency of the heater 10 and the first electrode 20 and avoid damage to them.

[0053] The following description, in conjunction with the accompanying drawings, illustrates the mounting fixture of this application and the mounting method for mounting the heater and the first electrode using the mounting fixture.

[0054] Figure 3 This is a schematic diagram of the installation fixture 100 according to an embodiment of this application. Figure 4 for Figure 1 A heater 10 and a set of first electrodes 20 are positioned in Figure 3 The structural diagram of the installation fixture 100.

[0055] Combined with parameters Figure 3 and Figure 4 The installation fixture 100 includes a first vehicle 40 and a second vehicle 50.

[0056] The first carrier 40 is configured to position the heater 10 and at least one set of first electrodes 20, and the connection end 11 of the heater 10 is connected to the first connector 21 of the first electrode 20 to form the assembly to be installed 200.

[0057] The second carrier 50 is configured to extract the component 200 to be installed from the first carrier 40, detach the component 200 from the first carrier 40, and transport the component 200 to the process chamber 30 so that the second connector 22 of the first electrode 20 is connected to the second electrode 32.

[0058] The installation fixture 100 uses a first carrier 40 to position and assemble the heater 10 and the first electrode 20, and a second carrier 50 to extract the assembled heater 10 and the first electrode 20 and transport them to the process chamber 30. This avoids the assembly process of the heater and the first electrode in related technologies, allowing multiple people to work together to manually lift and visually align the heater and the first electrode to the preset position, thereby shortening the installation time, reducing the risk of damage to the heater and the first electrode, improving overall maintenance efficiency and consistent production of epitaxial equipment.

[0059] The structure of the first vehicle 40 is described in detail below.

[0060] The first vehicle 40 includes a base 41, a positioning element 42, and multiple support columns 43.

[0061] A positioning element 42 is disposed on a base 41 and configured to position the heater 10. In some embodiments, the positioning element 42 includes a support portion 421 and a positioning portion 422. The support portion 421 is configured to support the heater 10. The positioning portion 422 extends from the base 41 or extends from the support portion 421 in a direction away from the base 41. The outer periphery of the positioning portion 422 engages with the inner ring of the heater 10 to limit the heater 10 from deviating from its rotation center when rotated, so that by rotating the heater 10, the connecting end 11 of the heater 10 can be aligned with the corresponding support column 43, thereby achieving the positioning of the heater 10 on the first carrier 40.

[0062] In some embodiments, the support portion 421 is a first annular member protruding from the base 41, and the positioning portion 422 is a second annular member protruding from the inner edge of the first annular member. When the heater 10 is supported on the support portion 421, the positioning portion 422 is located within the inner ring of the heater 10.

[0063] In some embodiments, the dimensions of the first annular member, the heater, and the second annular member are related as follows: the diameter of the outer ring of the first annular member is greater than the diameter of the outer ring of the heater, the diameter of the outer ring of the heater is greater than the diameter of the inner ring of the first annular member, and the diameter of the inner ring of the first annular member is greater than or equal to the diameter of the inner ring of the second annular member.

[0064] In some embodiments, the base 41 is made of metal, and the heater 10 is made of graphite. Because graphite is brittle, direct contact between the graphite and the base 41 may easily damage it. The positioning member 42 is made of plastic to support and limit the graphite heater, and to provide a cushioning effect.

[0065] Multiple support posts 43 are disposed on the base 41 and surround the positioning member 42. The support posts 43 are configured to support and position the second connector 22 of the first electrode 20.

[0066] In some embodiments, the number of support posts 43 is at least one pair. Each pair of support posts 43 is used to position a pair of first electrodes 20.

[0067] In some embodiments, there are multiple pairs of support posts 43, and the multiple pairs of support posts 43 include at least two pairs of support posts 43 with different heights. The heights of the multiple pairs of support posts 43 are configured to correspond one-to-one with the heights of different groups of first electrodes 20, so as to support and position the second connectors 22 at different heights.

[0068] Figure 3 and Figure 4 The diagram illustrates two pairs of support columns 43 at different heights. These two pairs of support columns 43 are spaced apart around the positioning element 42. For ease of description, the taller pair of support columns 43 is defined as the first support column 431, and the shorter pair as the second support column 432. The two first support columns 431 are positioned opposite each other. The two second support columns 432 are positioned opposite each other.

[0069] In other embodiments, the number of support posts 43 may be three pairs or more, with each pair of support posts 43 used to adapt to a first electrode 20 of a certain specification. That is, the mounting fixture 100 can be used to mount one heater 10 and two first electrodes 20, or two heaters 10 and four first electrodes 20, or three heaters 10 and six first electrodes 20, with no limit on the number.

[0070] The number of support columns 43 on the first carrier 40 can be designed according to the actual number of heaters 10 and first electrodes 20 required by the process chamber 30.

[0071] In some embodiments, the support column 43 and the base 41 are detachably mounted. The adaptability of the first vehicle 40 can be enhanced by replacing the support column 43 with one of different heights.

[0072] In some embodiments, the first carrier 40 further includes casters 44 mounted on the bottom of the base 41. The casters 44 can be, but are not limited to, casters. The casters 44 allow the first carrier 40 to move flexibly.

[0073] Please refer again. Figure 1 The second connector 22 of the first electrode 20 includes a first portion 221 and a second portion 222. The first portion 221 is connected to the electrode body 23, and the second portion 222 is further away from the electrode body 23 than the first portion 221. The second portion 222 includes a downward protrusion 222p.

[0074] Please refer to the references. Figure 1 , Figure 3 and Figure 4, the support column 43 is provided with a positioning groove 43g adapted to the protrusion 222p. When the protrusion 222p is fitted into the positioning groove 43g, the groove wall of the positioning groove 43g restricts the movement of the protrusion 222p, thereby realizing the positioning of the support column 43 to the first electrode 20 and preventing the first electrode 20 from slipping out of the positioning groove 43g.

[0075] The following describes the usage method of the first carrier 40.

[0076] In some embodiments, the protrusion 222p of the second connector 22 of the first electrode 20 can be first positioned in the corresponding positioning groove 43g of the support column 43, and then the heater 10 is positioned on the positioning member 42 of the first carrier 40, and the heater 10 is rotated so that the connection end 11 of the heater 10 is aligned with and connected to the first connector 21 of the corresponding first electrode 20.

[0077] In other embodiments, the heater 10 can be first installed on the positioning member 42 so that the two connection ends 11 of the heater 10 are respectively aligned with the corresponding support columns 43, and then the two first electrodes 20 are placed on the support columns 43. Then the connection end 11 of the heater 10 is connected to the first connector 21 of the first electrode 20.

[0078] The first carrier 40 of the embodiment of the present application provides convenience for installing the heater 10 and the first electrode 20. Among them, the method of first positioning the heater 10 and then positioning the first electrode 20 can prevent the heater 10 from bumping against the first electrode 20, allowing the heater 10 to have more sufficient space to enter the positioning member 42 for installation. The first electrode 20 then enters the first carrier 40 from above the heater 10 and is installed in the positioning groove 43g of the support column 43, and will not bump against the heater 10, ensuring each other.

[0079] The following specifically describes the structure of the second carrier 50.

[0080] Refer Figure 4 , the second carrier 50 includes a support rod 51, two connecting rods 52 and two fixing members 53. The two connecting rods 52 are respectively connected to both ends of the support rod 51. The two fixing members 53 are respectively connected to one ends of the two connecting rods 52 far away from the support rod 51.

[0081] Figure 5 For Figure 4 is the schematic structural diagram of the second carrier 50 in Figure 6 For Figure 5 is the exploded schematic diagram of the second carrier 50 in

[0082] Combined with refer Figure 4 , Figure 5 and Figure 6 , the connecting rod 52 includes opposite first connecting portions 521 and second connecting portions 522.

[0083] The first connecting portions 521 of the two connecting rods 52 are respectively connected to the opposite ends of the support rod 51. The length direction of the support rod 51 is defined as the first direction D1 below.

[0084] The second connecting parts 522 of the two connecting rods 52 are respectively connected to the two fixing parts 53.

[0085] Each fastener 53 includes a fixing portion 531 and a hook portion 532. The fixing portion 531 is connected to the second connecting portion 522 of the connecting rod 52 and to the hook portion 532. The hook portion 532 is configured to hook the second connecting head 22 of the corresponding first electrode 20.

[0086] In some embodiments, the hook 532 is V-shaped or L-shaped to hook and limit the second connector 22 of the first electrode 20.

[0087] In some embodiments, the hook portion 532 includes two sub-connecting portions 5321 connected to each other. One of the two sub-connecting portions 5321 is connected to the fixing portion 531, and the other is bent and extended such that the included angle α of the two sub-connecting portions 5321 is set at an acute angle or a right angle. The included angle α is used to hook and support the second connector 22 of the first electrode 20 to prevent the first electrode 20 from moving.

[0088] The second carrier 50 also includes two stops 54. The two stops 54 are respectively connected to the two connecting rods 52 and are spaced apart from the hooks 532 of the corresponding fixing members 53. In other words, the stops 54 are connected to the portions of the corresponding connecting rods 52 located between the first connecting portion 521 and the second connecting portion 522.

[0089] When the hook portion 532 of the fixing member 53 hooks the second connector 22 of the first electrode 20, a portion of the electrode body 23 of the first electrode 20 is located in the gap between the stop member 54 and the hook portion 532 of the fixing member 53. The stop member 54 is configured to abut against the side of the electrode body 23 of the first electrode 20 away from the hook portion 532, so as to restrict the movement of the first electrode 20 along the first direction D1 together with the hook portion 532.

[0090] The second carrier 50 also includes a first fastener J1. One of the first connecting portions 521 of the support rod 51 and the connecting rod 52 is provided with a first oblong hole H1. The first fastener J1 passes through the first oblong hole H1 and is connected to the other. The position of the connecting rod 52 can be adjusted by adjusting the relative position of the first oblong hole H1 and the first fastener J1.

[0091] In some embodiments, the first fastener J1 is a bolt. One of the first connecting parts 521 of the support rod 51 and the connecting rod 52 is provided with a first waist-shaped hole H1, and the other is provided with a first threaded hole O1. The first fastener J1 passes through the first waist-shaped hole H1 and is connected to the first threaded hole O1. By adjusting the position of the first waist-shaped hole H1 aligned with the first threaded hole O1, or rather, adjusting the position of the first fastener J1 in the first waist-shaped hole H1, the position of the connecting rod 52 is adjusted.

[0092] Figure 6 In some cases, the two first waist-shaped holes H1 are provided in the first connecting part 521 of the connecting rod 52, and the two first threaded holes O1 are provided on the support rod 51, but it is not limited to this.

[0093] The second carrier 50 further includes a second fastener J2. One of the stopper 54 and the connecting rod 52 is provided with a second waist-shaped hole H2, and the second fastener J2 passes through the second waist-shaped hole H2 and is connected to the other of the stopper 54 and the connecting rod 52. The position of the stopper 54 can be adjusted by adjusting the relative position of the second waist-shaped hole H2 and the second fastener J2.

[0094] In some embodiments, the second fastener J2 is a bolt. One of the second connecting parts 522 of the stopper 54 and the connecting rod 52 is provided with a second waist-shaped hole H2, and the other is provided with a second threaded hole O2. The second fastener J2 passes through the second waist-shaped hole H2 and is connected to the second threaded hole O2. By adjusting the position of the second waist-shaped hole H2 aligned with the second threaded hole O2, or rather, adjusting the position of the second fastener J2 in the second waist-shaped hole H2, the position of the stopper 54 is adjusted.

[0095] Figure 6 In some cases, the two second waist-shaped holes H2 are provided on the stopper 54, and the two second threaded holes O2 are provided on the second connecting part 522 of the connecting rod 52, but it is not limited to this.

[0096] The following describes the usage method of the second carrier 50.

[0097] Refer Figure 4 , after the first connecting head 21 of the first electrode 20 is connected to the heater 10, hook the hook part 532 of the second carrier 50 on the second connecting head 22 of the first electrode 20. At the same time, block the electrode bodies 23 of the two first electrodes 20 by the two stoppers 54 of the second carrier 50, and then tighten and fix the two stoppers 54.

[0098] The operator's hand or other mechanical structures lift the second carrier 50, and then the first electrode 20 and the heater 10 can be stably lifted and separated from the first carrier 40. Then, the second carrier 50 transports the first electrode 20 and the heater 10 to Figure 1The process chamber 30 shown, and the two first electrodes 20 are installed at one end of the two second electrodes 32 extending into the housing 31 of the process chamber 30, and then the second carrier 50 is removed.

[0099] Since the heater 10 and the first electrode 20 have been pre-assembled, and the positions of the first electrode 20 and the second electrode 32 correspond to each other, the debugging frequency and labor cost are reduced, the time-consuming is short, the installation efficiency is high, and the heater 10 is not easily damaged.

[0100] The structure of the second carrier 50a according to another embodiment of the present application is described below. Figure 7 It is a schematic structural diagram of the second carrier 50a according to another embodiment of the present application. Figure 8 For Figure 7 the second carrier 50a in a use state.

[0101] Refer Figure 7 and Figure 8 , different from the second carrier 50, the second carrier 50a is not provided with an independent stopper 54. The fixing member 53 in the second carrier 50a is configured to abut against the electrode body 23 of the first electrode 20 while hooking the first part 221 of the second connection head 22 of the corresponding first electrode 20 to limit the movement of the first electrode 20.

[0102] Refer Figure 8 As shown, when the second carrier 50a is lifted, the first electrode 20 is disengaged from the support column 43 of the first carrier 40, and the heater 10 is disengaged from the base 41, so that the to-be-installed component 200 is integrally disengaged from the first carrier 40. Along the first direction D1 parallel to the length direction of the support rod 51, the two first electrodes 20 are restricted between the two fixing members 53, which is beneficial to avoid the shaking of the to-be-installed component 200 along the first direction D1 when the second carrier 50a transports the to-be-installed component 200.

[0103] In the second carrier 50a, the two functions of hooking and abutting are integrated onto the fixing member 53, reducing the number of components, simplifying the structure of the second carrier 50a, and reducing the manufacturing cost and maintenance complexity. In addition, due to the function integration, the operator can achieve double limit by operating the fixing member 53, further improving the operation efficiency.

[0104] The second carrier 50a further includes a third fastener J3. One of the fixing member 53 and the connecting rod 52 is provided with a third waist-shaped hole H3, and the third fastener J3 passes through the third waist-shaped hole H3 and is connected to the other of the fixing member 53 and the connecting rod 52. The position of the fixing member 53 can be adjusted by adjusting the relative position of the third waist-shaped hole H3 and the third fastener J3.

[0105] In some embodiments, the third fastener J3 is a bolt. One of the fixing member 53 and the second connecting portion 522 of the connecting rod 52 is provided with a third waist-shaped hole H3, and the other is provided with a third threaded hole (not shown in the figure). The third fastener J3 passes through the third waist-shaped hole H3 and is connected to the third threaded hole. By adjusting the position of the third waist-shaped hole H3 aligned with the third threaded hole, or rather, adjusting the position of the third fastener J3 in the third waist-shaped hole H3, the position of the fixing member 53 is adjusted.

[0106] Figure 7 and Figure 8 In the two third waist-shaped holes H3 are provided in the second connecting portion 522 of the connecting rod 52, and the two third threaded holes are provided on the support rod 51, but not limited thereto.

[0107] The following describes the usage method of the second carrier 50a.

[0108] Refer Figure 8 , after the first connection head 21 of the first electrode 20 is connected to the heater 10, the hook portion 532 of the fixing member 53 hooks the first part 221 of the second connection head 22 of the first electrode 20. At the same time, the hook portion 532 of the fixing member 53 continues to act as a stop function to stop the electrode bodies 23 of the two first electrodes 20.

[0109] After that, the operator's hand or other mechanical structure lifts the second carrier 50a, so that the two first electrodes 20 and the heater 10 can be stably lifted and separated from the first carrier 40. Then, the second carrier 50a is used to carry the first electrodes 20 and the heater 10 to Figure 1 the process chamber 30 shown in the figure, and the two first electrodes 20 are installed at one end of the two second electrodes 32 extending into the housing 31 of the process chamber 30. After that, the second carrier 50a is removed.

[0110] Since the heater 10 and the first electrode 20 have been pre-assembled, and the positions of the first electrode 20 and the second electrode 32 correspond to each other, the debugging frequency and labor cost are reduced, the time-consuming is short, the installation efficiency is high, and the heater 10 is not easily damaged. Moreover, due to the functional integration, the operator can achieve double limit by operating the fixing member 53, further improving the operation efficiency.

[0111] The second aspect of the present application further provides a method for installing at least one heater 10 and at least one set of first electrodes 20 in the process chamber 30 by using the installation tooling 100 of any of the above embodiments.

[0112] Refer Figure 9 , the method includes the following steps S10 to step S30. According to different requirements, the order of some steps or sub-steps of the method can be changed, and some steps or sub-steps can be omitted or combined.

[0113] S10: Position a heater and a set of first electrodes on a first carrier, and connect one end of the heater to the first connector of one first electrode and the other end of the heater to the first connector of another first electrode to form the assembly to be installed.

[0114] S20: Use the second vehicle to extract the component to be installed from the first vehicle, so that the component to be installed is detached from the first vehicle.

[0115] S30: Use the second carrier to transport the component to be installed to the process chamber, connect the second connector of a set of first electrodes to a set of second electrodes, and then remove the second carrier.

[0116] In the above-described method of this application embodiment, by assigning assembly, extraction and installation tasks to dedicated vehicles and clearly defined steps, it is beneficial to shorten installation time and reduce equipment downtime.

[0117] In some embodiments, when installing first electrodes 20 with electrode bodies 23 of different lengths, in step S10, support columns 43 of different heights on the first carrier 40 that are adapted to the height of the second connector 22 of the first electrode 20 are selected for positioning. Thus, selecting support columns 43 of appropriate height for positioning ensures compatible installation of first electrodes 20 with electrode bodies 23 of different lengths, improves the versatility of the method, reduces dedicated adjustment time, and ensures consistent maintenance.

[0118] In some embodiments, at least one heater includes a first heater and a second heater, at least one set of first electrodes includes a first set of first electrodes and a second set of first electrodes, and at least one set of second electrodes includes a first set of second electrodes and a second set of second electrodes; the installation method includes: performing S10 to S30, installing the first heater and the first set of first electrodes as a first assembly to be installed onto the first set of second electrodes in the process chamber; performing S10 to S30 again, installing the second heater and the second set of first electrodes as a second assembly to be installed onto the second set of second electrodes in the process chamber, wherein the second heater is located above the first heater.

[0119] In some embodiments, the first carrier includes a first set of support pillars and a second set of support pillars. The first set of support pillars is used in the step of forming the first assembly to be installed. The second set of support pillars is used in the step of forming the second assembly to be installed. The first set of support pillars and the second set of support pillars have different heights. The second connectors of the first set of first electrodes and the second connectors of the second set of first electrodes have different heights. The first set of second electrodes and the second set of second electrodes are located at the same height within the process chamber.

[0120] In some embodiments, the first carrier includes a first group of support columns and a second group of support columns. In the step of forming the first to-be-mounted component, the first group of support columns is used. In the step of forming the second to-be-mounted component, the second group of support columns is used. The first group of support columns and the second group of support columns have the same height, or the first group of support columns and the second group of support columns are the same group of support columns. The second connectors of the first electrodes in the first group and the second connectors of the first electrodes in the second group have the same height. The height of the first group of second electrodes in the process chamber is lower than the height of the first electrodes in the second group in the process chamber.

[0121] In some embodiments, in steps S20 and S30, it is possible to select Figure 5 the second carrier 50 shown, or it is also possible to select Figure 7 the second carrier 50a shown.

[0122] Hereinafter, an example will be given to illustrate the assembly of two heaters 10 and two corresponding groups of first electrodes 20 by the installation tooling 100.

[0123] For ease of description, the two heaters 10 are respectively referred to as the first heater 10a and the second heater 10b (shown in Figure 18 ), the first electrodes 20 and the second electrodes 32 connected to the first heater 10a are respectively referred to as the first electrode 20a and the second electrode 32a (shown in Figure 17 ), the first electrodes 20 and the second electrodes 32 connected to the second heater 10b are respectively referred to as the first electrode 20b (shown in Figure 18 ), and the second electrode 32b (shown in Figures 22 to 24 ).

[0124] In addition, in this text, a group of first electrodes 20a connected to the first heater 10a is also referred to as the first group of first electrodes; a group of first electrodes 20a connected to the second heater 10b is referred to as the second group of first electrodes; a group of second electrodes 32a connected to the first heater 10a is referred to as the first group of second electrodes; a group of second electrodes 32b connected to the second heater 10b is referred to as the second group of second electrodes. Refer to Figure 10 , install the first heater 10a on the positioning member 42 of the first carrier 40, align the two connection ends 11 of the first heater 10a with the corresponding first support columns 431 on the first carrier 40 respectively, and prepare two first electrodes 20a.

[0125] Refer to Figure 11 , place the two first electrodes 20a on the two first support columns 431 respectively, make the second connectors 22 of the first electrodes 20a fit into the first support columns 431, and connect the two connection ends 11 of the first heater 10a to the first connectors 21 of the two first electrodes 20a respectively, and prepare the second carrier.

[0126] There are two types of the second carrier. One is the second carrier 50 in which the fixing member 53 and the stopper 54 are separately provided, and the other is the second carrier 50a in which the fixing member 53 has both the stopper and hooking functions.

[0127] When the selected second carrier is the second carrier 50, refer Figure 12 , the hook portions 532 of the two fixing members 53 of the second carrier 50 respectively hook the first portions 221 of the corresponding second connectors 22 of the first electrodes 20a, and the two stoppers 54 abut against and stop the electrode bodies 23 of the corresponding first electrodes 20a to limit the movement of the first electrodes 20a along the first direction D1.

[0128] When the selected second carrier is the second carrier 50a, refer Figure 13 , the hook portions 532 of the two fixing members 53 of the second carrier 50a respectively hook the first portions 221 of the corresponding second connectors 22 of the first electrodes 20a, and the fixing portions 531 of the two fixing members 53 also abut against the electrode bodies 23 of the corresponding first electrodes 20a to limit the movement of the corresponding first electrodes 20a along the first direction D1.

[0129] Refer Figure 14 , lift the second carrier 50, and the protrusion 222p of the first electrode 20a disengages from the positioning groove 43g of the first support column 431, so that the whole of the to-be-installed component 200 composed of the first heater 10a and the two first electrodes 20a is disengaged from the first carrier 40 along with the second carrier 50. The steps for the second carrier 50a to extract the to-be-installed component 200 are similar and will not be elaborated here.

[0130] Refer Figure 15 , the second carrier 50 transports the to-be-installed component 200 composed of the first heater 10a and the two first electrodes 20a to the process chamber 30.

[0131] Refer Figure 16 , the second carrier 50 places the first heater 10a and the two first electrodes 20a in the process chamber 30. The first heater 10a is sleeved on the periphery of the bushing 33, and one ends of the two first electrodes 20a extending into the housing 31 are connected to the corresponding second electrodes 32a on the housing 31.

[0132] Refer Figure 17 , the second carrier 50 is removed. The first heater 10a and the two first electrodes 10a are installed in the process chamber 30.

[0133] The following describes the installation process of the second heater 10b and the first electrode 20b.

[0134] Refer Figure 18, install the second heater 10b on the positioning member 42 of the first carrier 40, align the two connection ends 11 of the second heater 10b with the two second support columns 432 of the first carrier 40 respectively, and prepare two first electrodes 20b.

[0135] Refer Figure 19 , the height of the first electrode 20b is smaller than that of the first electrode 20a. Therefore, the second support columns 432 on the first carrier 40 are used to position the first electrode 20b. Place two first electrodes 20b on the two second support columns 432 of the first carrier 40 respectively, connect the two connection ends 11 of the second heater 10b to the first connection heads 21 of the two first electrodes 20b respectively, and prepare the second carrier. The second carrier can be the second carrier 50 or the second carrier 50a. The following takes the second carrier as the second carrier 50 as an example for illustration.

[0136] Refer Figure 20 , use the hook parts 532 of the two fixing members 53 of the second carrier 50 to hook the first parts 221 of the corresponding second connection heads 22 of the two first electrodes 20b respectively. The two stoppers 54 stop the electrode bodies 23 of the two first electrodes 20b respectively to limit the movement of the first electrodes 20b along the first direction D1.

[0137] Refer Figure 21 , lift the second carrier 50, and the second heater 10b and the two first electrodes 20b are separated from the first carrier 40 along with the second carrier 50.

[0138] Refer Figure 22 , the second carrier 50 transports the second heater 10b and the two first electrodes 20b to the process chamber 30.

[0139] Refer Figure 23 , place the second carrier 50 with the second heater 10b and the two first electrodes 20b inside the housing 31 of the process chamber 30. The second heater 10b is sleeved around the outer periphery of the bushing 33. The first electrode 20b is connected to one end of the second electrode 32b on the housing 31 of the process chamber 30 that extends into the housing 31.

[0140] Refer Figure 24 , the second carrier 50 is removed. The second heater 10b and the two first electrodes 20b are installed in the process chamber 30. Connect to an external power supply through a pair of second electrodes 32a to energize the first heater 10a, so that the first heater 10a can heat the substrate placed on the stage of the bushing 33. Connect to an external power supply through a pair of second electrodes 32b to energize the second heater 10b, so that the second heater 10b can heat the substrate placed on the stage of the bushing 33.

[0141] Understandably, the mounting fixture 100 can also be equipped with three heaters 10 and six first electrodes 20. The specific number of support columns 43 on the first carrier 40 can be designed according to the actual number of heaters 10 and first electrodes 20 required by the process chamber 30.

[0142] In addition, the process chamber 30 can be a reaction chamber in an epitaxial device for preparing SiC films, and the epitaxial device also includes gas inlet components to introduce process gases into the process chamber 30, which will not be described in detail here.

[0143] The above embodiments are only used to illustrate the technical solutions of this application and are not intended to limit it. Although this application has been described in detail with reference to the above preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions to the technical solutions of this application should not depart from the spirit and scope of the technical solutions of this application.

Claims

1. A mounting tool for mounting at least one heater and at least one set of first electrodes to a process chamber, the heater comprising two connection ends, the first electrodes comprising an electrode body and a first connector and a second connector respectively located at opposite ends of the electrode body, the process chamber comprising at least one set of second electrodes, characterized in that, The mounting tool comprises: a first carrier configured to position the at least one heater and the at least one set of the first electrodes, and to connect one of the connection ends of the heater with the first connecting head of one of the first electrodes and the other of the connection ends of the heater with the first connecting head of the other of the first electrodes to form a to-be-mounted assembly; and a second carrier configured to extract the to-be-mounted assembly from the first carrier, to detach the to-be-mounted assembly from the first carrier, and to transport the to-be-mounted assembly to the process chamber to enable the second connecting head of one set of the first electrodes to be connected with one set of the second electrodes.

2. The mounting tool of claim 1, wherein The first carrier comprises: a base; a positioning member disposed on the base and configured to position the heater; and a plurality of support columns disposed on the base, surrounding the positioning member, and configured to support and position the second connecting head of the first electrode.

3. The mounting tool of claim 2, wherein The second connecting head of the first electrode comprises a protrusion, and the support column is provided with a positioning groove matched with the protrusion, and when the protrusion is fitted into the positioning groove, the groove wall of the positioning groove limits the movement of the protrusion.

4. The mounting tool of claim 2, wherein The positioning member comprises: a bearing portion protruding above the base and configured to bear the heater; and a positioning portion extending out from the base or extending out from the bearing portion in a direction away from the base, and the outer periphery of the positioning portion cooperates with the inner ring of the heater to limit the deviation of the heater from its rotation center when the heater rotates.

5. The mounting tool according to any one of claims 2 to 4, wherein: the mounting tool is used to mount at least two heaters and at least two sets of the first electrodes to the process chamber; the second connecting heads of different sets of the first electrodes have different heights; the heights of the plurality of support columns are configured to correspond to the heights of the second connecting heads of different sets of the first electrodes to support and position the second connecting heads of different heights, respectively.

6. The mounting tool of claim 1, wherein The second carrier comprises: a support rod; two connecting rods respectively connected to two ends of the support rod; and two fixing members respectively connected to ends of the two connecting rods away from the support rod, and the fixing member comprises a hook portion configured to hook the second connecting head of the corresponding first electrode.

7. The mounting tool of claim 6, wherein The second carrier further comprises two stop members respectively connected to the two connecting rods and spaced apart from the hook portion, and the stop member is configured to abut against a side of the electrode body away from the hook portion to jointly limit the movement of the first electrode with the hook portion.

8. The mounting tool according to claim 7, wherein: the second carrier further comprises a first fastener, one of the support rod and the connecting rod is provided with a first waist-shaped hole, and the first fastener is connected to the other of the support rod and the connecting rod through the first waist-shaped hole; and the position of the connecting rod can be adjusted by adjusting the relative position of the first waist-shaped hole and the first fastener. The second carrier further comprises a second fastener; one of the stopper and the connecting rod is provided with a second waist-shaped hole, and the second fastener is connected with the other of the stopper and the connecting rod through the second waist-shaped hole; the position of the stopper can be adjusted by adjusting the relative position of the second waist-shaped hole and the second fastener.

9. The mounting tool of claim 6, wherein, The fixing member is configured to abut against the electrode body of the corresponding first electrode while hooking the second connecting head of the corresponding first electrode, so as to limit the movement of the first electrode.

10. The mounting tool according to claim 9, wherein, The second carrier further comprises a third fastener; one of the fixing member and the connecting rod is provided with a third waist-shaped hole, and the third fastener is connected with the other of the fixing member and the connecting rod through the third waist-shaped hole; the position of the fixing member can be adjusted by adjusting the relative position of the third waist-shaped hole and the third fastener.

11. A method of installing at least one heater and at least one set of first electrodes in a process chamber using the installation tooling of any one of claims 1-10, the heater comprising two connection ends, the first electrode comprising an electrode body and a first connection head and a second connection head respectively at opposite ends of the electrode body, the process chamber comprising at least one set of second electrodes, wherein, The mounting method comprises: S10: positioning one of the heaters and a group of the first electrodes on the first carrier, and connecting one of the connecting ends of the heater with the first connecting head of one of the first electrodes and the other connecting end with the first connecting head of the other first electrode to form a to-be-mounted assembly; S20: extracting the to-be-mounted assembly from the first carrier by using the second carrier, so that the to-be-mounted assembly is separated from the first carrier; and S30: transporting the to-be-mounted assembly to a process chamber by using the second carrier, connecting the second connecting head of a group of the first electrodes with a group of the second electrodes, and then removing the second carrier.

12. The method of installing of claim 11, wherein, The S10 specifically comprises: positioning the heater on the positioning member of the first carrier, aligning the connecting end of the heater with the support column of the first carrier, and embedding the second connecting head of the first electrode in the positioning groove of the corresponding support column, and then connecting the connecting end of the heater with the first connecting head of the first electrode; The S20 specifically comprises: hooking the second connecting head of the corresponding first electrode by using the hooking part of the fixing member of the second carrier, and then lifting the second carrier to separate the second connecting head of the first electrode from the positioning groove of the support column, so that the to-be-mounted assembly is separated from the first carrier.

13. The mounting method according to claim 11 or 12, characterized in that, The S20 specifically comprises: hooking the second connecting head of the corresponding first electrode by using the hooking part of the fixing member of the second carrier, and at the same time, abutting and stopping the electrode body of the corresponding first electrode by using the stopper of the second carrier; or hooking the second connecting head of the corresponding first electrode by using the hooking part of the fixing member of the second carrier, and at the same time, abutting and stopping the electrode body of the corresponding first electrode by using the fixing part of the fixing member of the second carrier.

14. The method of installing of claim 11, wherein, The at least one heater comprises a first heater and a second heater, the at least one group of first electrodes comprises a first group of first electrodes and a second group of first electrodes, and the at least one group of second electrodes comprises a first group of second electrodes and a second group of second electrodes; the mounting method comprises: performing the S10 to the S30, taking the first heater and the first group of first electrodes as a first to-be-mounted assembly, and mounting the first to-be-mounted assembly on the first group of second electrodes of the process chamber; performing the S10 to the S30 again, taking the second heater and the second group of first electrodes as a second to-be-mounted assembly, and mounting the second to-be-mounted assembly on the second group of second electrodes of the process chamber, wherein the second heater is located above the first heater.

15. The mounting method of claim 14, wherein: the first carrier comprises a first group of support columns and a second group of support columns; in the step of forming the first to-be-mounted assembly, the first group of support columns is used; in the step of forming the second to-be-mounted assembly, the second group of support columns is used; the first group of support columns and the second group of support columns are different in height; the second connecting heads of the first group of first electrodes and the second group of first electrodes are different in height; the first group of second electrodes and the second group of second electrodes are located at the same height in the process chamber.

16. The mounting method of claim 14, wherein: the first carrier comprises a first group of support columns and a second group of support columns; in the step of forming the first to-be-mounted assembly, the first group of support columns is used; in the step of forming the second to-be-mounted assembly, the second group of support columns is used; the first group of support columns and the second group of support columns are different in height, or the first group of support columns and the second group of support columns are the same group of support columns; the second connecting heads of the first group of first electrodes and the second group of first electrodes are different in height; the first group of second electrodes is lower than the second group of first electrodes in the process chamber.

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