Film forming apparatus

Abstract

The present invention addresses the problem of providing a film forming apparatus capable of preventing a tablet from falling off from a crucible mechanism with a simple structure. The supply unit (41) is provided with a fall prevention mechanism (30). When a new tablet (TB) is supplied to the holding part (21), the falling prevention mechanism (30) prevents the existing tablet (TB) in the holding part (21) from falling. Therefore, the supply unit (41) can smoothly and continuously supply new tablets (TB) while preventing the existing tablets (TB) from falling off. Therefore, continuous film forming operation can be realized. The drop prevention mechanism (30) supports the tablet (TB) by mechanical action. Therefore, compared with the use of a control mechanism, the falling prevention mechanism (30) can simplify the structure. As a result, the tablet (TB) can be prevented from falling off from the crucible mechanism (2) by means of a simple configuration.

Description

[0001] This application claims priority based on Japanese Patent Application No. 2024-151666, filed on September 3, 2024. The entire contents of that Japanese application are incorporated herein by reference. Technical Field

[0002] This invention relates to a film-forming apparatus. Background Technology

[0003] As described in Patent Document 1, a film-forming apparatus is known to form a film-forming material on an object by ion plating. This apparatus uses a plasma gun to generate plasma within a chamber, and sublimates the film-forming material within the chamber. The film-forming material adheres to a substrate and continues to accumulate, thereby growing and forming a film on the substrate.

[0004] Patent Document 1: Japanese Patent Application Publication No. 11-43763

[0005] In the aforementioned film-forming apparatus, tablets of film-forming material are supplied by pushing the holding part of the main crucible (Heart) upwards from below using an upper pusher. When adding new tablets to the holding part, the upper pusher needs to be lowered. At this time, the tablets at the bottom of the holding part are left unsupported and fall. Therefore, a tablet-prevention structure is needed to continuously supply tablets and perform continuous film-forming operations. However, using a tablet-prevention structure with a control system would lead to increased structural complexity and larger size. Summary of the Invention

[0006] Therefore, the objective of this invention is to provide a film-forming apparatus that can prevent tablets from falling off the crucible mechanism through a simple structure.

[0007] The film-forming apparatus of the present invention is a film-forming apparatus for forming film-forming material on an object by means of RPD method. It includes: a crucible mechanism for holding tablets of film-forming material and evaporating tablets by guiding plasma; and a supply unit for supplying tablets to the crucible mechanism from below. The crucible mechanism has a holding part for holding multiple tablets in a vertically arranged state. The supply unit has an anti-drop mechanism for preventing existing tablets in the holding part from falling off when a new tablet is supplied to the holding part. The anti-drop mechanism supports the tablets by mechanical action.

[0008] In the film-forming apparatus according to the present invention, the crucible mechanism has a holding section that holds multiple tablets arranged in a vertical direction. If the uppermost tablet in the holding section disappears due to film formation, the supply section supplies a new tablet to the holding section. The supply section is equipped with an anti-drop mechanism. When a new tablet is supplied to the holding section, the anti-drop mechanism prevents existing tablets in the holding section from falling out. Therefore, the supply section can smoothly and continuously supply new tablets while preventing existing tablets from falling out. Thus, continuous film-forming operation can be achieved. Furthermore, the anti-drop mechanism supports the tablets through mechanical action. Therefore, compared to mechanisms such as control systems, the anti-drop mechanism simplifies the structure. Thus, a simple structure can prevent tablets from falling from the crucible mechanism.

[0009] The anti-drop mechanism maintains the tablet in constant contact with the inner circumferential surface of the holding part of the crucible mechanism. This suppresses the current path that could cause the tablet to detach from the crucible mechanism. Therefore, it prevents plasma that would otherwise be directed towards the tablet from entering the crucible mechanism, thus avoiding damage to the crucible mechanism.

[0010] The anti-drop mechanism can have an elastic component that applies pressure to the tablet. In this case, mechanical anti-drop can be easily achieved without the need for controls.

[0011] The anti-drop mechanism has a main body and a pressing part for pressing the tablet. The pressing part is rotatably supported on the main body via a rotating shaft. At this time, the pressing part can press the tablet with a stable and simple action of rotating around the rotating shaft.

[0012] The pressing part can be supported by a rotating shaft at its lower end. At this time, when the tablet rises relative to the holding part from below, the pressing part can be pushed by the tablet and rotate around the rotating shaft at its lower end. Thus, the supply part can smoothly supply new tablets to the holding part.

[0013] Invention Effects

[0014] According to the present invention, tablets can be prevented from falling out of the crucible mechanism through a simple structure. Attached Figure Description

[0015] Figure 1 This is a schematic cross-sectional view of a film-forming apparatus according to an embodiment of the present invention.

[0016] Figure 2 This is a schematic diagram illustrating the structure surrounding the main crucible 17 in the film-forming apparatus.

[0017] Figure 3 This is a diagram illustrating the operations of the supply department.

[0018] Figure 4 This is a diagram illustrating the operations of the supply department.

[0019] Figure 5 This is a three-dimensional view of the main crucible viewed from below.

[0020] Figure 6 This is a 3D view of the anti-fall mechanism.

[0021] In the figure: 1-film forming device, 2-crucible mechanism, 21-holding part, 21b-inner circumferential surface, 30-anti-drop mechanism, 33-elastic component, 31-main body, 32-pressing part, 41-supply part, 51-rotating shaft. Detailed Implementation

[0022] Hereinafter, a film-forming method and film-forming apparatus according to one embodiment of the present invention will be described with reference to the accompanying drawings. Furthermore, in the description of the drawings, the same reference numerals are used to denote the same elements, and repeated descriptions are omitted.

[0023] First, refer to Figure 1 The structure of the film-forming apparatus according to the embodiments of the present invention will be described. Figure 1 This is a schematic cross-sectional view showing the structure of the film-forming apparatus 1. (Example) Figure 1 As shown, the film-forming apparatus 1 of this embodiment is an RPD (Reactive Plasma Deposition) film-forming apparatus for a so-called ion plating method. The RPD method is characterized by using a plasma gun 7 to generate high-density plasma, which is then introduced into the film-forming material Ma via a crucible mechanism 2, thereby completing both material sublimation and ionization of the sublimated material particles in the same mechanism. The use of high-density plasma in the RPD method results in a high ionization rate of the material particles, enabling the formation of a denser film with stronger adhesion to the substrate compared to conventional ion plating methods. Furthermore, for ease of explanation, Figure 1 The diagram shows the XYZ coordinate system. The Y-axis is the direction extending from the central axis of the plasma gun 7. The Z-axis is the position of the substrate opposite to the crucible mechanism described later. The X-axis is the direction orthogonal to both the Y-axis and Z-axis.

[0024] The film deposition apparatus 1 can be a so-called horizontal film deposition apparatus, in which the substrate 11 (object) is arranged in the chamber 10 with its thickness direction roughly vertical and is transported. In this case, the X-axis and Y-axis directions are horizontal, and the Z-axis direction is vertical and oriented along the thickness direction. Alternatively, the film deposition apparatus 1 can also be a so-called vertical film deposition apparatus, in which the thickness direction of the substrate 11 is horizontal (…). Figure 1In a manner where the substrate 11 is vertical or tilted from a vertical position, it is placed in the vacuum chamber 10 and transported. In this case, the Z-axis is horizontal and corresponds to the thickness of the substrate 11, the Y-axis is horizontal, and the X-axis is vertical. Hereinafter, a film-forming apparatus according to one embodiment of the present invention will be described using a horizontal film-forming apparatus as an example.

[0025] The film-forming device 1 includes a chamber 10, a conveying mechanism 3, and a film-forming mechanism 14.

[0026] The chamber 10 is a component for housing the substrate 11 and performing film deposition processing. The chamber 10 includes: a transport chamber 10a for transporting the substrate 11 to which a thin film of film-forming material Ma is formed; a film-forming chamber 10b for diffusing the film-forming material Ma; and a plasma port 10c for receiving plasma P irradiated in a beam shape from the plasma gun 7 into the chamber 10. The transport chamber 10a, film-forming chamber 10b, and plasma port 10c are interconnected. The transport chamber 10a is set along a predetermined transport direction (arrow A in the figure) (Y-axis). Furthermore, the chamber 10 is made of a conductive material and is connected to ground potential.

[0027] In the film-forming chamber 10b, as a wall portion 10W, there are: a pair of sidewalls along the conveying direction (arrow A); a pair of sidewalls 10h and 10i along the direction (Z-axis direction) intersecting the conveying direction (arrow A); and a bottom wall 10j arranged in a manner intersecting the X-axis direction.

[0028] The conveying mechanism 3 conveys the substrate holding member 16 along the conveying direction (arrow A), and the substrate holding member 16 holds the substrate 11 in a state opposite to the film-forming material Ma. For example, the substrate holding member 16 is a frame that holds the outer periphery of the substrate 11. The conveying mechanism 3 is composed of a plurality of conveying rollers 15 disposed within the conveying chamber 10a. The conveying rollers 15 are arranged at equal intervals along the conveying direction (arrow A) and convey the substrate 11 along the conveying direction (arrow A) while supporting the substrate holding member 16. In addition, the substrate 11 is, for example, a plate-shaped component such as a glass substrate or a plastic substrate.

[0029] Next, the structure of the film-forming mechanism 14 will be described in detail. The film-forming mechanism 14 uses ion plating to sublimate the film-forming material Ma, thereby generating particles that adhere to the substrate 11. The film-forming mechanism 14 includes a plasma gun 7, a steering coil 5, a crucible mechanism 2, and an annular crucible 6.

[0030] The plasma gun 7 is, for example, a pressure gradient plasma gun, whose main body is connected to the film-forming chamber 10b via a plasma port 10c disposed on the side wall of the film-forming chamber 10b. The plasma gun 7 generates plasma P within the chamber 10. The plasma P generated in the plasma gun 7 is emitted from the plasma port 10c in a beam shape into the film-forming chamber 10b. Thus, plasma P is generated within the film-forming chamber 10b.

[0031] The plasma gun 7 generates plasma by discharging argon gas introduced through the cathode 60. A first intermediate electrode (gate) 61 and a second intermediate electrode (gate) 62 are concentrically arranged between the cathode 60 and the plasma port 10c. A ring-shaped permanent magnet 61a for converging the plasma P is built into the first intermediate electrode 61. An electromagnet coil 62a for converging the plasma P is also built into the second intermediate electrode 62. In this embodiment, the first intermediate electrode 61 is positioned closer to the cathode 60 than the second intermediate electrode 62, but the positional relationship can be reversed.

[0032] A diversion coil 5 is positioned around the plasma port 10c, where the plasma gun 7 is mounted. The diversion coil 5 guides the plasma P into the film formation chamber 10b. The diversion coil 5 is energized by a diversion coil power supply (not shown).

[0033] The crucible mechanism 2 holds the film-forming material Ma. The crucible mechanism 2 is disposed within the film-forming chamber 10b of the chamber 10 and is positioned in the negative direction of the Z-axis when viewed from the transport mechanism 3. The crucible mechanism 2 has a main crucible 17, which serves as either the main anode guiding the plasma P emitted from the plasma gun 7 to the film-forming material Ma or guiding the plasma P emitted from the plasma gun 7 towards itself. The structure of the main crucible will be described later.

[0034] The annular crucible 6 serves as an auxiliary anode with an electromagnet for inducing plasma P. The annular crucible 6 is positioned around the holding portion 21 of the main crucible 17, which holds the film-forming material Ma. The annular crucible 6 includes an annular coil 20, an annular permanent magnet portion 9, and an annular container 12, with the coil 20 and permanent magnet portion 9 housed within the container 12. In this embodiment, the permanent magnet portion 9 and coil 20 are sequentially arranged along the negative direction of the Z-axis when viewed from the conveying mechanism 3; however, the coil 20 and permanent magnet portion 9 may also be sequentially arranged along the negative direction of the Z-axis. The annular crucible 6 controls the orientation of the plasma P incident on the film-forming material Ma, or the orientation of the plasma P incident on the main crucible 17, based on the magnitude of the current flowing through the coil 20.

[0035] The gas supply unit 40 supplies carrier gas and oxygen to the chamber 10. Inert gases such as argon and helium can be used as substances included in the carrier gas. The gas supply unit 40 is disposed outside the chamber 10 and supplies raw material gas to the chamber 10 through a gas supply port provided on the side wall (e.g., side wall 10h) of the film-forming chamber 10b. The gas supply unit 40 supplies carrier gas and oxygen at corresponding flow rates based on control signals from the control unit.

[0036] The power supply 80 supplies current to the plasma gun 7. As a result, the plasma gun 7 discharges with a predetermined discharge current. The power supply 80 is connected to the plasma gun 7, which serves as the cathode, and the main crucible 17, which serves as the anode. The power supply 80 supplies a current of a corresponding value based on a control signal from the control unit 90. The control unit 90 is a device that controls the entire film-forming apparatus 1.

[0037] Next, refer to Figure 2 The structure of the main crucible 17 will be described in detail below. Furthermore, in the following description, the Z-axis direction will be defined as the vertical direction, the positive side of the Z-axis direction as the upper side, and the negative side as the lower side. The main crucible 17 has the function of holding the tablet TB of the film-forming material Ma and sublimating the film-forming material Ma. The main crucible 17 has a cylindrical holding portion 21 extending in the vertical direction. The main crucible 17 is maintained at a positive potential relative to the ground potential of the chamber 10, thus the main crucible 17 becomes the electrode (anode) during discharge and is able to attract plasma P. A through hole 22 for filling the tablet TB of the film-forming material Ma is formed in the holding portion 21 of the main crucible 17 into which the plasma P is incident. Then, the surface SF of the leading edge portion of the film-forming material Ma is exposed to the film-forming chamber 10b (see reference 17b) at one end of the through hole 17b. Figure 1 )middle.

[0038] As the film-forming material Ma, conductive materials such as ITO (tin oxide-doped indium oxide) and IWO (tungsten oxide-doped indium oxide) are used. When the film-forming material Ma is composed of a conductive material, if plasma P irradiates the main crucible 17, the plasma P directly incident on the film-forming material Ma. The surface SF of the leading portion of the film-forming material Ma is heated and sublimated, and the film-forming material particles Mb ionized by plasma P diffuse into the film-forming chamber 10b (reference). Figure 1 The film-forming material particles Mb diffused into the film-forming chamber 10b are ionized by plasma P, move upwards in the film-forming chamber 10b, and adhere to the surface of the substrate 11 in the transport chamber 10a (reference). Figure 1Furthermore, the film-forming material Ma consists of tablets TB formed as cylindrical solids of a predetermined length, and multiple tablets TB are filled into the holding portion 21 at once. The holding portion 21 holds the multiple tablets TB in a vertically aligned manner. Then, in order to maintain a constant film-forming (sublimation) rate, the tablets TB are sequentially ejected from the lower side of the crucible mechanism 2 as the film-forming material Ma sublimates, so that the leading edge of the foremost tablet TB maintains a predetermined positional relationship with the upper end of the holding portion 21.

[0039] The main crucible 17 has a flange 23 extending outward from the holding portion 21. The flange 23 is positioned midway along the vertical direction of the holding portion 21. The flange 23 has a circular plate shape. The holding portion 21 has a cylindrical portion 24 protruding downward from the flange 23 (see also...). Figure 5 The lower end 24a of the cylinder 24 is open to allow insertion of a new tablet TB. An anti-drop mechanism 30 is provided at the lower end 23a of the flange 23 to prevent the tablet TB held by the retaining part 21 from falling out. The anti-drop mechanism 30 prevents the tablet TB from falling out of the opening at the lower end 24a of the cylinder 24. The detailed structure of the anti-drop mechanism 30 will be described later.

[0040] The film-forming material Ma can be, for example, an insulating material such as silicon oxide or tin oxide. When the film-forming material Ma is made of an insulating material, plasma P is incident on the upper end portion 21a of the holding portion 21. As a result, the holding portion 21 is heated, and the film-forming material Ma is heated and sublimated.

[0041] Next, refer to Figure 3 and Figure 4 The structure of the supply section 41 will be described below. The supply section 41 is a mechanism for supplying tablets TB from below to the holding section 21 of the crucible mechanism 2. Figure 3 and Figure 4 As shown, the supply unit 41 includes a replenishment unit 42, a transfer unit 43, an upward push unit 44, and an anti-fall mechanism 30.

[0042] The replenishment section 42 is a mechanism for replenishing and storing tablets TB to be supplied to the crucible mechanism 2. The replenishment section 42 is located below the holding section 21 of the crucible mechanism 2 and separated in the Y-axis direction. The replenishment section 42 includes a storage section 46, an upper push rod 47, and a guide section 48. The storage section 46 is a container for storing tablets TB. The storage section 46 has a circular plate-shaped rotating platform 46a rotatably formed inside. The rotating platform 46a rotates about a rotation axis CL1 extending in the vertical direction. Multiple clamps for holding tablets TB are provided on the outer periphery of the rotating platform 46a. Thus, by holding the rotating platform 46a with these clamps, multiple tablets TB are stored in the storage section 46 (see reference). Figure 3(See Figure (a)). The upper push rod 47 and the guide portion 48 are located near the end of the receiving portion 46 on the negative side in the Y-axis direction. The upper push rod 47 pushes the tablet TB, which is held on the rotating table 46a, upwards (see Figure (a)). Figure 3 (See Figure (b)). The guide section 48 guides the tablet TB, which is pushed upward by the push rod 47, towards the upper part of the storage section 46 (see Figure 4b). Figure 3 Figure (b) in the middle.

[0043] The transfer section 43 is a mechanism for transferring tablets TB from the replenishment section 42 to the holding section 21 of the main crucible 17. The transfer section 43 has a rotating platform 43a. The end of the rotating platform 43a on the positive side in the Y-axis direction is disposed above the guide section 48, and the end of the rotating platform 43a on the negative side in the Y-axis direction is disposed below the holding section 21. The rotating platform 43a rotates about the central axis CL2. A clamp for holding tablets TB is provided on the outer periphery of the rotating platform 43a. Thus, the rotating platform 43a receives tablets TB coming out from the upper end of the guide section 48 at the end on the positive side in the Y-axis direction (see reference). Figure 3 Figure (b) shows the rotating stage 43a. The rotating stage 43a positions the tablet TB below the lower end 24a of the holding portion 21 (see Figure 2b). Figure 4 Figure (b) in the middle.

[0044] The pusher 44 is a component that fills the holding portion 21 by lifting the tablet TB conveyed by the transfer portion 43. The pusher 44 is configured to extend vertically below the lower end 24a of the holding portion 21. The pusher 44 includes: an upper push rod 44a that extends vertically and is movable in an upward and downward direction; and a contact member 44b that contacts the tablet TB. The upper push rod 44a is driven by a drive unit (not shown) to move the contact member 44b in the upward and downward direction. (State before transfer at the transfer portion 43...) Figure 3 In the states shown in Figures (a) and (b), the contact member 44b penetrates the clamp of the tablet TB and supports the bottommost tablet TB of the holding part 21 from below. As the uppermost tablet TB disappears due to evaporation, the pushing part 44 pushes all the tablet TBs upward from below. During the handover at the transfer part 43 ( Figure 4 As shown in Figures (a) and (b), the contact component 44b moves to a separation position that is lower than the rotary table 43a.

[0045] The operation of the supply unit 41, as described above, will be explained. Figure 3 As shown in Figure (a), firstly, in the replenishment section 42, the rotary table 46a rotates, thereby positioning the tablet TB, which is to be supplied, in a position opposite to the upper push rod 47. Next, as... Figure 3As shown in Figure (b), the upper push rod 47 pushes the tablet TB upward, and via the guide 48, the tablet TB is held by the rotating table 43a of the transfer section 43. Then, as... Figure 4 As shown in Figure (a), the contact member 44b of the upward pushing part 44 moves downward and separates from the rotating table 43a downward. At this time, the tablet TB of the lowest layer of the holding part 21 is suspended at the lower end 24a, but is prevented from falling by the anti-drop mechanism 30. Next, as... Figure 4 As shown in Figure (b), the rotary table 43a rotates, thereby placing a new tablet TB on the underside of the lowest tablet TB in the holding section 21. The contact member 44b supports the new tablet TB from below. Furthermore, as the uppermost tablet TB evaporates, the contact member 44b pushes the lowermost tablet TB upward.

[0046] Next, refer to Figure 2 , Figure 5 and Figure 6 The anti-fall mechanism 30 is explained. Figure 5 This is a three-dimensional view of the main crucible 17 viewed from below. Figure 6 This is a perspective view of the anti-drop mechanism 30. The anti-drop mechanism 30 is a mechanism that supports the tablet TB through mechanical action. Mechanical action means that the tablet TB is supported solely by the supporting force exerted by the mechanical structure, without using driving forces such as electric power or hydraulic pressure. Therefore, the anti-drop mechanism 30 does not receive control signals such as switching the support and release of the tablet TB. Figure 5 and Figure 6 As shown, the anti-fall mechanism 30 includes a main body 31, a pressing part 32, an elastic member 33, support members 34A and 34B, and a back part 36.

[0047] The main body 31 is the basic component of the anti-fall mechanism 30. For example... Figure 5 As shown, the main body 31 includes: a cuboid base portion 37 having a length direction along the Y-axis; and a protrusion 38 protruding from the lower surface of the base portion 37 and extending along the Y-axis. The upper surface of the base portion 37 is fixed to the lower end 23a of the flange portion 23 (see reference). Figure 2 The protrusion 38 extends along the Y-axis at the center position of the lower surface of the base portion 37 in the X-axis direction (see also [reference]). Figure 5 The protrusion 38 has a pair of support portions 39 at its negative Y-axis end for supporting the pressing portion 32. The pair of support portions 39 are support pieces extending further towards the negative Y-axis from the end of the main body 31 at its lower end. The pair of support portions 39 are separated from each other along the X-axis and have through holes for supporting the rotating shaft 51. The rotating shaft 51 is a cylindrical component extending along the X-axis.

[0048] The pressing part 32 is a component for pressing tablet TB. The pressing part 32 is rotatably supported on the main body 31 via a rotating shaft 51. The pressing part 32 has a base part 52 and a contact part 53 that contacts the tablet TB. The base part 52 is a component positioned opposite the end of the main body 31 in the negative Y-axis direction, spaced apart from the negative Y-axis direction. The lower end of the base part 52 is positioned near a pair of support parts 39. Furthermore, a rotating shaft 51 supported by the pair of support parts 39 is inserted into a through hole 52a near the lower end of the base part 52. Thus, the pressing part 32 is supported by the rotating shaft 51 at its lower end. The contact part 53 is bent so that when viewed from the X-axis direction (… Figure 2 (As shown) A curved surface 53a protrudes to the negative side in the Y-axis direction. The curved surface 53a can enter the internal space of the cylindrical portion 24 (see reference) through an opening 24b formed on the side of the cylindrical portion 24. Figure 2 and Figure 5 Furthermore, an inclined surface 53b is formed at a lower position than the curved surface 53a of the contact portion 53, which slopes upward toward the negative side in the Y-axis direction. A portion of the inclined surface 53b can also enter the interior space of the cylindrical portion 24 through the opening 24b.

[0049] An elastic member 33 is disposed between the negative end of the main body 31 in the Y-axis direction and the pressing part 32. The elastic member 33 is a spring member that extends and retracts in the Y-axis direction. The elastic member 33 is supported in a state where it is accommodated in the hole 31a of the main body 31 and the hole 32a of the pressing part 32 (see reference). Figure 2 With the above structure, the pressing part 32 rotates towards the negative side of the Y-axis direction, centered on the rotation axis 51 on the lower end side, by the elastic force of the elastic member 33. The elastic member 33 applies pressing force to the tablet TB via the pressing part 32.

[0050] Support member 34A supports the main body 31 at a position adjacent to the negative side of the main body 31 in the X-axis direction. Support member 34B supports the main body 31 at a position adjacent to the positive side of the main body 31 in the X-axis direction. Support members 34A and 34B have: a base portion 34a extending downward from the lower end 23a of the flange portion 23; and a protrusion 34b protruding from the lower end of the base portion 34a toward the main body 31 in the X-axis direction. Support members 34A and 34B extend along the main body 31 in the Y-axis direction. The upper surface of the base portion 34a of the support members 34A and 34B is fixed to the flange portion 23 (see reference). Figure 5 The protrusions 34b of the support members 34A and 34B are located near the two side edges of the lower surface of the base portion 37 of the support body portion 31 in the X-axis direction.

[0051] The back panel 36 is a component that supports the main body 31 from the positive side in the Y-axis direction. The back panel 36 is fixed in such a way that it covers the positive side of the main body 31 and the support components 34A and 34B in the Y-axis direction. The back panel 36 has an adjustment portion 36a on the negative side in the Y-axis direction. The adjustment portion 36a is the part that contacts the main body 31, and by adjusting the thickness of the adjustment portion 36a, the position of the main body 31 in the Y-axis direction can be finely adjusted.

[0052] Next, the operation of the anti-fall mechanism 30 will be explained. For example... Figure 2 As shown, with the tablet TB filled in the cylindrical portion 24 of the holding portion 21, the curved surface 53a of the pressing portion 32 contacts the end near the positive side of the Y-axis direction on the outer peripheral surface of the tablet TB. At this time, the pressing portion 32 applies a pressing force to the negative side of the tablet TB in the Y-axis direction through the elastic force of the elastic member 33. As a result, the pressing portion 32 supports the tablet TB by pressing it tightly against the inner peripheral surface 21b of the holding portion 21. Thus, the anti-drop mechanism 30 maintains the tablet TB in constant contact with the inner peripheral surface 21b of the holding portion 21 of the crucible mechanism 2.

[0053] The curved surface 53a in the case where tablet TB is not present in the tube 24 Figure 2 The middle part is indicated by a dashed line. Thus, the curved surface 53a extends into the inner space of the tablet TB, further inside than the side of the tablet TB. When a new tablet TB is inserted from the lower end 24a of the cylinder 24 in this state, the corner of the upper surface of the tablet TB abuts against the inclined surface 53b of the pressing part 32. Here, the pressing part 32 is supported at its lower end by the rotation axis 51. Therefore, as the tablet TB faces upward, it rotates around the rotation axis 51 with the inclined surface 53b and the curved surface 53a being pushed by the corner of the tablet TB. Then, as the curved surface 53a passes the corner of the tablet TB, the outer peripheral surface of the tablet TB is pressed.

[0054] Next, the effects of the film-forming apparatus 1 according to this embodiment will be explained.

[0055] In the film-forming apparatus 1 according to this embodiment, the crucible mechanism 2 has a holding section 21 that holds multiple tablets TB arranged in a vertical direction. If the uppermost tablet TB in the holding section 21 disappears due to film formation, the supply section 41 supplies new tablet TB to the holding section 21. The supply section 41 is equipped with an anti-drop mechanism 30. When supplying new tablet TB to the holding section 21, the anti-drop mechanism 30 prevents existing tablet TB in the holding section 21 from falling out. Therefore, the supply section 41 can smoothly and continuously supply new tablet TB while preventing existing tablet TB from falling out. Thus, continuous film-forming operation can be achieved. Furthermore, the anti-drop mechanism 30 supports the tablet TB by mechanical action. Therefore, compared to mechanisms such as control mechanisms, the anti-drop mechanism 30 simplifies the structure. Thus, a simple structure can prevent tablet TB from falling from the crucible mechanism 2.

[0056] The anti-drop mechanism 30 maintains the tablet TB in constant contact with the inner circumferential surface 21b of the holding portion 21 of the crucible mechanism 2. This prevents the tablet TB from detaching from the current path of the crucible mechanism 2. Therefore, it prevents damage to the crucible mechanism 2 from plasma that would otherwise be directed to the tablet TB.

[0057] The anti-drop mechanism 30 may have an elastic member 33 that applies pressure to the tablet TB. In this case, mechanical anti-drop can be easily achieved without the need for controls.

[0058] The anti-drop mechanism 30 has a main body 31 and a pressing part 32 for pressing tablet TB. The pressing part 32 can be rotatably supported on the main body 31 via a rotating shaft 51. At this time, the pressing part 32 can press tablet TB with a stable and simple action of rotating around the rotating shaft 51.

[0059] The pressing part 32 can be supported by the rotating shaft 51 at its lower end. At this time, when the tablet TB rises from the lower side relative to the holding part 21, the pressing part 32 can rotate around the rotating shaft 51 at its lower end in a way that is pushed by the tablet TB. As a result, the supply part 41 can smoothly supply new tablets TB into the holding part 21.

[0060] The present invention is not limited to the embodiments of the film-forming apparatus described above.

[0061] The positions, sizes, orientations, and angles of the various components of the aforementioned film-forming apparatus can be appropriately modified without departing from the spirit of the invention. For example, the emission direction of the plasma gun 7 may not be parallel to the Y-axis, or it may be tilted. The magnetic field generating unit may not include all of the annular crucible, the electrodes of the plasma gun, and the steering coil, or some of them may be omitted.

[0062] The structure of the aforementioned anti-fall mechanism 30 is merely one example and can be modified appropriately. For instance, in addition to a spring component, a rubber component or the like can be used as the elastic member. Furthermore, the rotation axis 51 supporting the pressing part 32 does not necessarily need to support the lower end of the pressing part 32; it can also support the central or upper position in the height direction. Moreover, instead of a mechanism that rotates around the rotation axis 51, the pressing part 32 can be replaced by a mechanism that reciprocates along the Y-axis.

Claims

1. A film forming apparatus that forms a film forming material on an object by an RPD method, the film forming apparatus comprising: a crucible mechanism that holds a tablet of a film forming material, and evaporates the tablet by guiding plasma; and a supply portion that supplies the tablet to the crucible mechanism from a lower side, wherein the crucible mechanism has a holding portion that holds a plurality of the tablets in a state of being arranged in a vertical direction, wherein the supply portion has a fall prevention mechanism that prevents the tablet existing in the holding portion from falling when a new tablet is supplied to the holding portion, and wherein the fall prevention mechanism supports the tablet by a mechanical action.

2. The film forming apparatus according to claim 1, wherein the fall prevention mechanism maintains a state in which the tablet is always in contact with an inner peripheral surface of the holding portion of the crucible mechanism.

3. The film forming apparatus according to claim 1, wherein the fall prevention mechanism has an elastic member that applies a pressing force to the tablet.

4. The film forming apparatus according to claim 1, wherein the fall prevention mechanism has a main body portion and a pressing portion that presses the tablet, and wherein the pressing portion is rotatably supported to the main body portion via a rotation shaft.

5. The film forming apparatus according to claim 4, wherein the pressing portion is supported by the rotation shaft at a lower end side. ​ ​ ​ ​ ​ ​ ​ ​ ​ ​

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