Test method, device, electronic device and storage medium for cryogenic pump

Abstract

This invention discloses a testing method, apparatus, electronic device, and storage medium for cryogenic pumps, relating to the technical fields of vacuum technology and vacuum pump performance testing. The testing method includes: acquiring a first pressure in a first filling chamber and determining a gas distribution mode based on the first pressure; after completing gas distribution based on the gas distribution mode, initiating an impact test to introduce gas into the cryogenic pump; acquiring temperature test data of the cryogenic pump and determining the validity of the current test based on the temperature test data. This invention's cryogenic pump testing method makes the gas distribution process more precise through multiple gas distribution modes, and determines the validity of the test data through the temperature test data from the impact test. This transforms the cryogenic pump's pass-through capacity parameter from an experience-dependent process check into a highly reliable, efficient, and reproducible standardized measurement process.

Description

Technical Field

[0001] This application relates to technical fields such as vacuum technology and vacuum pump performance testing, and in particular to a testing method, apparatus, electronic equipment and storage medium for cryogenic pumps. Background Technology

[0002] Crossing capacity is a key safety parameter for measuring the ultimate performance of cryogenic pumps. It defines the maximum nitrogen flow rate that the pump can handle instantaneously without causing its pumping performance to collapse while maintaining normal refrigeration capacity. Related technologies often focus on measuring the pumping speed, ultimate pressure, or transfer probability of cryogenic pumps. Traditional methods for measuring crossing capacity rely heavily on experience-based process checks, which are insufficient for high-precision, traceable metrological testing requirements. There is a lack of a direct, standardized method for testing the ultimate capacity of "maximum instantaneous gas load." Summary of the Invention

[0003] Therefore, the purpose of this application is to propose a testing method, apparatus, electronic device and storage medium for cryogenic pumps, which makes the gas mixing process more accurate through multiple gas mixing modes, and judges the validity of the test data by the temperature test data of the impact test, transforming the overpass capacity parameter of the cryogenic pump from an experience-dependent process check into a highly reliable, efficient and reproducible standardized measurement process.

[0004] This application provides a testing method for a cryogenic pump, the method comprising: acquiring a first pressure in a first gas chamber and determining a gas distribution mode based on the first pressure; after completing gas distribution based on the gas distribution mode, initiating an impact test to introduce gas into the cryogenic pump; acquiring temperature test data of the cryogenic pump and determining the validity of the current test based on the temperature test data.

[0005] For example, the method is applied to a cryogenic pump testing system, the testing system including a gas distribution module, the gas distribution module including: a gas storage device; a main line connected to the gas storage device, the main line including a pressure reducing valve and a first valve, the pressure reducing valve being used to reduce the output gas pressure of the gas storage device, the first valve being used to open or close the gas output of the gas storage device; a first gas distribution branch and a second gas distribution branch connected to the main line, the first gas distribution branch including a first flow totalizer, a second valve and a first filling chamber connected in series, the second gas distribution branch including a second flow totalizer and a second filling chamber connected in series, a third valve being provided between the first filling chamber and the second filling chamber, the first flow totalizer and the second flow totalizer both being connected to the first valve; the volume of the first filling chamber is larger than the volume of the second filling chamber.

[0006] For example, the gas distribution mode includes a direct pressurization mode and a partial pressure expansion mode; when the gas distribution mode is the direct pressurization mode, the first valve and the second valve are controlled to open, the third valve is closed, the first flow totalizer operates according to a first preset flow rate, and the second flow totalizer does not operate; when the gas distribution mode is the partial pressure expansion mode, the first valve and the third valve are controlled to open, the second valve is closed, the second flow totalizer operates according to a second preset flow rate, and the first flow totalizer does not operate.

[0007] For example, determining the gas distribution mode based on the first pressure includes: determining a first target pressure based on the ratio between the target gas quantity and the volume of the first inflation chamber, wherein the target gas quantity is obtained according to configuration information; determining a pressure difference between the first target pressure and the first pressure; determining the gas distribution mode as a direct pressurization mode when the pressure difference is greater than or equal to a preset pressure threshold, and determining the gas distribution mode as a partial pressure expansion mode when the pressure difference is less than the preset pressure threshold.

[0008] For example, when the gas distribution mode is a direct boost mode, the method further includes: updating the first pressure in real time and returning the step of determining the pressure difference between the first target pressure and the first pressure.

[0009] For example, when the gas distribution mode is the partial pressure expansion mode, the method further includes: closing the third valve and the second flow totalizer when the first pressure and the second pressure of the first filling chamber are equal; determining the current gas volume based on the product of the volume of the first filling chamber and the first pressure; determining the gas volume difference between the current gas volume and the target gas volume; and opening the third valve and the second flow totalizer to fill the second filling chamber with gas when the gas volume difference is greater than a preset gas volume threshold, until the gas volume difference is less than or equal to the preset gas volume threshold.

[0010] For example, the method further includes: when the gas volume difference is less than or equal to the preset gas volume threshold, closing the third valve, allowing it to stand for a preset time, and then recording the final pressure of the first inflation chamber.

[0011] For example, before the third valve is opened, the method further includes: determining a second target pressure of the second inflation chamber based on the volume of the first inflation chamber, the volume of the second inflation chamber, the first pressure of the first inflation chamber, and the gas volume difference, so as to make the pressure of the second inflation chamber reach the second target pressure by opening the second flow totalizer.

[0012] For example, the gas distribution module includes a first gas pump and a fourth valve connected to the first gas pump. The fourth valve is connected to the first inflation chamber, the main line, and the test hood. The gas distribution module is configured to perform a vacuuming operation on the first inflation chamber, the main line, and the test hood before gas distribution begins.

[0013] For example, the testing system further includes a testing module, which includes a fifth valve, a test hood, and a cryogenic pump connected in series. The fifth valve is connected to the output end of the first inflation chamber. The step of initiating the impact test to introduce gas into the cryogenic pump includes: opening the fifth valve so that the gas in the first inflation chamber passes through the test hood to the cryogenic pump.

[0014] For example, the temperature test data includes a maximum temperature, and determining the validity of the current test based on the temperature test data includes: determining the current test to be valid when the maximum temperature is less than or equal to a temperature threshold; and determining the current test to be invalid when the maximum temperature is greater than the temperature threshold.

[0015] For example, the method further includes: if the current test is valid, determining a test value of the crossing capacity based on the product of the final pressure of the first inflation chamber and the volume of the first inflation chamber; and determining a target crossing capacity based on the test values ​​of the crossing capacity corresponding to multiple valid tests.

[0016] Another embodiment of this application provides a testing device for a cryogenic pump. The device includes: an acquisition module for acquiring a first pressure in a first inflation chamber and determining a gas distribution mode based on the first pressure; an activation module for activating an impact test to introduce gas into the cryogenic pump after completing gas distribution based on the gas distribution mode; and a determination module for acquiring temperature test data of the cryogenic pump and determining the validity of the current test based on the temperature test data.

[0017] Another embodiment of this application provides an electronic device, including a memory and a processor. The memory stores a computer program, and the processor executes the computer program to implement the steps of the above-described cryogenic pump testing method.

[0018] Another embodiment of this application provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the steps of the above-described cryogenic pump testing method.

[0019] In the above embodiments, the testing method for the cryogenic pump includes: acquiring a first pressure in the first filling chamber and determining a gas distribution mode based on the first pressure; after completing the gas distribution based on the gas distribution mode, initiating an impact test to introduce gas into the cryogenic pump; acquiring temperature test data of the cryogenic pump and determining the validity of the current test based on the temperature test data. The cryogenic pump testing method of the present invention makes the gas distribution process more accurate through multiple gas distribution modes, and determines the validity of the test data through the temperature test data of the impact test, transforming the cryogenic pump's pass-through capacity parameter from an experience-dependent process check into a highly reliable, efficient, and reproducible standardized measurement process. Attached Figure Description

[0020] Figure 1 A flowchart illustrating the testing method for the cryogenic pump provided in this application embodiment;

[0021] Figure 2 A schematic diagram of a test system for a cryogenic pump provided in an embodiment of this application;

[0022] Figure 3 A flowchart for determining the gas distribution mode provided in the embodiments of this application;

[0023] Figure 4 A flowchart illustrating the pressure-partial expansion mode provided in this application embodiment;

[0024] Figure 5 Gas distribution flowchart provided for embodiments of this application;

[0025] Figure 6 A flowchart of the testing process provided for the embodiments of this application;

[0026] Figure 7 A schematic diagram of a test apparatus for a cryogenic pump provided in an embodiment of this application;

[0027] Figure 8 A block diagram of an electronic device provided in an embodiment of this application.

[0028] Explanation of reference numerals in the attached figures:

[0029] 10-Gas distribution module, 20-High-speed temperature measurement unit, 30-Test module, 40-Controller, 1-Gas storage device, 2-Main circuit, 3-Pressure reducing valve, 4-First gas distribution branch, 5-Second gas distribution branch, 6-First flow totalizer, 7-First filling chamber, 8-Second flow totalizer, 9-Second filling chamber, 11-First vacuum gauge, 12-Second vacuum gauge, 13-First gas pump, 31-Test hood, 32-Cryogenic pump, 21-First valve, 22-Second valve, 23-Third valve, 24-Fourth valve, 25-Fifth valve, 26-Safety valve. Detailed Implementation

[0030] The embodiments of this application are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this application, and should not be construed as limiting this application.

[0031] The pass-through capacity is a key safety parameter for measuring the ultimate performance of a cryogenic pump. It defines the maximum nitrogen flow rate that the pump can handle instantly without causing its pumping performance to collapse, while maintaining normal cooling capacity (secondary cold head temperature ≤20K).

[0032] In some examples, the gas distribution system for measuring the crossing capacity typically employs a single-channel charging mode. However, this mode relies on operator experience for coarse adjustments, resulting in insufficient pressure measurement and control accuracy when configuring small gas volumes. Furthermore, for the critical standard condition of ISO 21360-6, "introducing 98% gas within 3 seconds," there is a lack of quantitative flow conductance matching models and engineering design guidance. The selection of quick-opening valves is often arbitrary, making it difficult to consistently meet this timing requirement in actual testing. The testing process relies on manual operation and subjective judgment, resulting in low automation, poor testing efficiency, and difficulty in guaranteeing result repeatability. These shortcomings mean that traditional solutions can only achieve preliminary verification of standard methods and cannot meet the requirements of high-precision, traceable metrological testing. In summary, traditional cryogenic pump crossing capacity testing suffers from insufficient gas distribution accuracy, reliance on experience for timing control, and low automation.

[0033] Based on this, this application proposes a high-precision, highly repeatable and fully automated crossing capacity testing process.

[0034] As an example, such as Figure 1 As shown, the test methods for cryogenic pumps include:

[0035] S101, obtain the first pressure of the first inflation chamber, and determine the gas distribution mode based on the first pressure.

[0036] S102, after completing the gas distribution based on the gas distribution mode, initiates the impact test to introduce gas into the cryogenic pump.

[0037] S103: Obtain the temperature test data of the cryogenic pump and determine the validity of the current test based on the temperature test data.

[0038] Exemplarily, the gas distribution system of this application does not employ a traditional single-channel gas filling structure, but rather a dual-chamber series structure, comprising at least two filling chambers. One filling chamber serves as the main filling chamber, designated as the first filling chamber, and the other is designated as the second filling chamber. Each filling chamber can be connected to a vacuum gauge for real-time pressure acquisition. This application proposes multiple gas distribution modes based on the dual-chamber series structure, and adaptively selects the gas distribution mode according to the magnitude of the first pressure value of the first filling chamber. The first pressure of the first filling chamber can be obtained through a vacuum gauge connected to the first filling chamber. After gas distribution is completed according to the selected gas distribution mode, an impact test is initiated to introduce gas into the cryogenic pump. This application strictly adheres to the key standard of ISO21360-6, "introducing 98% gas within 3 seconds," for the impact test. A large amount of gas rushes into the cryogenic pump, and the validity of the current test is determined by collecting the temperature test data of the cryogenic pump during the test, for example, determining the validity of the current test's crossing capacity.

[0039] The cryogenic pump testing method in this application mainly targets the "crossover capacity" parameter of the cryogenic pump. It can be understood that the overall testing process for the crossover capacity involves setting a certain capacity value, distributing gas according to that value, performing an impact test after the gas distribution is completed, and further determining the crossover capacity based on the validity of the impact test data.

[0040] The cryogenic pump testing method of this application achieves high-precision gas distribution through multiple gas distribution modes of a dual-gas-chamber series structure, and quantifies the effectiveness of the test by using the temperature test data of the cryogenic pump, thereby improving the degree of automation and overcoming the shortcomings of large errors in manual testing.

[0041] As an example, the testing methods for cryogenic pumps are applied to the testing system for cryogenic pumps, such as... Figure 2 As shown, the test system includes a gas distribution module, which includes:

[0042] Gas storage device 1; main line 2 connected to gas storage device 1, the main line 2 includes pressure reducing valve 3 and first valve 21, the pressure reducing valve 3 is used to reduce the pressure of the output gas of gas storage device 1, and the first valve 21 is used to open or close the gas output of gas storage device 1.

[0043] The first gas distribution branch 4 and the second gas distribution branch 5 are connected to the main line 2. The first gas distribution branch 4 includes a first flow totalizer 6, a second valve 22 and a first filling chamber 7 connected in series. The second gas distribution branch 5 includes a second flow totalizer 8 and a second filling chamber 9 connected in series. A third valve 23 is provided between the first filling chamber 7 and the second filling chamber 9. The first flow totalizer 6 and the second flow totalizer 8 are both connected to the first valve 21. The volume of the first filling chamber is larger than the volume of the second filling chamber.

[0044] For example, such as Figure 2 As shown, the test system mainly consists of a high-precision dual-mode gas distribution module 10, a high-speed temperature measurement unit 20, a test module 30, and a controller 40. The test module 30 includes a test hood 31, a cryogenic pump 32, and a fifth valve 25. A schematic diagram of the gas distribution module 10 is shown below. Figure 2 As shown, the gas storage device 1 is used to store helium. The output end of the gas storage device 1 is connected to the pressure reducing valve 3, which is used to reduce the pressure of the output gas from the gas storage device 1. The gas passing through the pressure reducing valve 3 then passes through the first valve 21. The first valve 21 can be understood as the main gas opening valve of the gas distribution module.

[0045] For example, to address the limited accuracy of a single inflation mode, the gas distribution module of this application integrates two parallel branches, including a first gas distribution branch 4 and a second gas distribution branch 5. The first gas distribution branch 4 includes a first flow totalizer 6, a second valve 22, and a first inflation chamber 7 connected in series. The second gas distribution branch 5 includes a second flow totalizer 8 and a second inflation chamber 9 connected in series. A third valve 23 is provided between the first inflation chamber 7 and the second inflation chamber 9. The volume of the first inflation chamber 7 can be denoted as Va, and the volume of the second inflation chamber 9 as Vb, where Va is greater than Vb. For ease of subsequent calculation, Va can be configured as 10Vb.

[0046] It is understandable that the core function of the small inflation chamber (second inflation chamber 9) is to achieve high-precision configuration of the gas volume, with its volume satisfying Vb=Va / 10. For the same target gas volume, using a small-volume inflation chamber can achieve a more accurate equilibrium pressure. This fundamentally solves the problem of large relative errors that exist when directly configuring low-pressure gas inside a large test chamber.

[0047] It should be noted that the volume of the test chamber 31 is denoted as Vtest. The volume of the test chamber 31 is determined by JB / T 11081-2011. In order to effectively suppress the temperature change caused by gas expansion, the volume Va of the first inflation chamber 7 must be much smaller than the volume Vtest of the test chamber 31. For example, Vtest / Va ≥ 10.

[0048] As an example, valve timing modes include direct boost mode and partial pressure expansion mode;

[0049] When the gas distribution mode is direct boost mode, the first and second valves are opened, the third valve is closed, the first flow totalizer works according to the first preset flow rate, and the second flow totalizer does not work.

[0050] When the gas distribution mode is the partial pressure expansion mode, the first and third valves are opened, the second valve is closed, the second flow totalizer works according to the second preset flow rate, and the first flow totalizer does not work.

[0051] For example, such as Figure 2 As shown, in the direct pressurization mode, the first valve 21 and the second valve 22 are open, and the third valve 23 is closed. The first flow totalizer 6 operates according to the first preset flow rate, which can be, for example, 100 sccm (standard milliliters per minute) for inflation. The first preset flow rate can be determined according to the range of the first flow totalizer 6. The second flow totalizer 8 is not operating. The direct pressurization mode is used to quickly fill most of the gas into the first inflation chamber. In the partial pressure expansion mode, the first valve 21 and the third valve 23 are opened, and the second valve 22 is closed. The second flow totalizer 8 operates according to the second preset flow rate, and the first flow totalizer 6 is not operating. The second preset flow rate can be determined according to requirements and can be within the range of the second flow totalizer 8, which can be 0-10 sccm.

[0052] For example, in the partial pressure expansion mode, the gas in the second inflation chamber 9 will be filled into the first inflation chamber 7. Since the second inflation chamber 9 is a calibrated small inflation chamber, its volume Vb is known. The real-time first pressure Pa of the first inflation chamber can be known according to the first vacuum gauge 11 connected to the first inflation chamber 7, and the real-time second pressure Pb of the second inflation chamber can be known according to the second vacuum gauge 12 connected to the second inflation chamber 9. Then, the conduction time or range of the second flow totalizer 8 can be adaptively adjusted according to the required gas volume to accurately fill a certain amount of gas into the second inflation chamber 9, thereby achieving precise control of trace gas.

[0053] For example, to ensure the safety of the first inflation chamber 7, the first inflation chamber 7 can also be connected to a safety valve 26. When the pressure in the first inflation chamber 7 is too high, the pressure can be adjusted by the safety valve 26.

[0054] This application can quickly fill most of the gas through direct pressurization mode, and can also achieve precise control of trace gas through partial pressure expansion mode, taking into account both gas distribution efficiency and accuracy.

[0055] The following is a detailed description of the specific gas mixing process.

[0056] As an example, such as Figure 3 As shown, the gas distribution mode is determined based on the first pressure, including:

[0057] S301, a first target pressure is determined based on the ratio between the target gas quantity and the volume of the first inflation chamber, wherein the target gas quantity is obtained according to the configuration information.

[0058] S302, determine the pressure difference between the first target pressure and the first pressure.

[0059] S303: When the pressure difference is greater than or equal to the preset pressure threshold, the gas distribution mode is determined to be direct boost mode; when the pressure difference is less than the preset pressure threshold, the gas distribution mode is determined to be partial pressure expansion mode.

[0060] For example, the target gas quantity can be denoted as q. cvtarget It can be understood that the target gas volume is a pre-set transit capacity, which is also the expected amount of gas that the first filling chamber can ultimately fill. The first target pressure is determined based on the ratio between the target gas volume and the volume of the first filling chamber, which is Va, a known quantity. The first target pressure can be understood as the pressure to be reached when the gas distribution in the first filling chamber is complete. The first pressure is the current pressure value of the first filling chamber, which can be obtained from the vacuum gauge connected to the first filling chamber. The pressure difference between the first target pressure and the first pressure is determined. When the pressure difference is greater than or equal to a preset pressure threshold, it indicates that the pressure in the first filling chamber differs significantly from the first target pressure. In this case, the direct pressurization mode is activated, opening the first valve 21 and the second valve 22 to quickly fill the first filling chamber with a large amount of gas. For example, the first flow totalizer can be operated at full scale at this time. If the pressure difference is less than the preset pressure threshold, it indicates that the pressure in the first filling chamber is close to the first target pressure. In this case, the partial pressure expansion mode is activated, using the second filling chamber to achieve precise micro-gas control. The preset pressure threshold can be 100 Pa.

[0061] As an example, when the gas distribution mode is direct boost mode, the test method for the cryogenic pump also includes the steps of updating the first pressure in real time and returning the pressure difference between the first target pressure and the first pressure.

[0062] It is understandable that the gas mixing process is a real-time process. As gas is introduced, the first pressure in the first filling chamber is constantly changing. The first pressure is updated in real time, and the pressure difference between the target pressure and the first pressure is judged. When the first pressure continues to increase and meets the condition that the pressure difference between the first target pressure and the first pressure is less than a preset pressure threshold, the system switches to partial pressure expansion mode. At this time, the second valve 22 and the first flow totalizer 6 are closed. The second flow totalizer 8 and the third valve 23 are opened to fill the second filling chamber (also known as the small filling chamber) with gas.

[0063] It should be noted that in the pressure-partial expansion mode, the second flow totalizer and the third valve 23 do not open simultaneously. A certain amount of gas is first injected into the second inflation chamber before the third valve 23 is opened.

[0064] As an example, such as Figure 4 As shown, the test method for cryogenic pumps also includes:

[0065] S401, when the first inflation chamber and the first pressure and the second pressure of the second inflation chamber are equal, close the third valve and the second flow totalizer.

[0066] S402, determine the current gas quantity based on the product of the volume of the first inflation chamber and the first pressure.

[0067] S403, determine the gas quantity difference between the current gas quantity and the target gas quantity.

[0068] S404, if the gas quantity difference is greater than the preset gas quantity threshold, open the third valve and the second flow totalizer to charge the second gas chamber until the gas quantity difference is less than or equal to the preset gas quantity threshold.

[0069] For example, regardless of whether the initial mode is direct pressurization or partial pressure expansion, the final gas distribution mode will be partial pressure expansion because the first pressure in the first filling chamber will gradually approach the first target pressure. Subsequent adjustments to the gas volume in the first filling chamber are needed. When the third valve 23 is opened, the first and second filling chambers are connected, and eventually the first pressure in the first filling chamber and the second pressure in the second filling chamber are equal, i.e., pressure balance. At this point, the third valve 23 is closed, and the second flow totalizer also stops working. The current gas volume q is determined by the product of the volume Va of the first filling chamber and the current first pressure Pa, where q = PaVa. The current gas volume q is compared with the target gas volume q. cvtarget This involves calculating the gas volume difference between the current gas volume and the target gas volume. If the gas volume difference is greater than a preset gas volume threshold, it indicates that the gas volume in the first inflation chamber has not yet reached the desired level, and inflation needs to be repeated. In this case, the third valve 23 and the second flow totalizer are opened to inflate the second inflation chamber until the gas volume difference is less than or equal to the preset gas volume threshold. The third valve 23 and the second flow totalizer are opened sequentially: the second flow totalizer is opened first to inflate the second inflation chamber, followed by the third valve 23. It can be understood that a gas volume difference less than or equal to the preset gas volume threshold indicates that the first pressure in the first inflation chamber has stabilized at the target pressure. The preset gas volume threshold can be 1 PaL.

[0070] As an example, before the third valve is opened, the test method for the cryogenic pump also includes: determining the second target pressure of the second inflation chamber based on the volume of the first inflation chamber, the volume of the second inflation chamber, the first pressure of the first inflation chamber, and the difference in gas volume, so as to make the pressure of the second inflation chamber reach the second target pressure by opening the second flow totalizer.

[0071] For example, before the third valve is opened, including when switching from direct pressurization mode to partial pressure expansion mode, and also before the third valve is opened when the gas volume difference is greater than the preset gas volume threshold and the third valve needs to be opened again while already in partial pressure expansion mode.

[0072] For example, when switching from direct pressurization mode to partial pressure expansion mode, the amount of gas required for the first filling chamber is relatively small. To achieve precise filling of the first filling chamber with a fixed amount of gas, this application uses the volume Va of the first filling chamber, the volume Vb of the second filling chamber, the first pressure Pa of the first filling chamber (obtained from a vacuum gauge), and the gas quantity difference (based on the current gas quantity q = PaVa and the target gas quantity q) of the first filling chamber. cvtarget The difference between the values ​​is used to calculate the second target pressure of the second inflation chamber, which is the pressure that the second inflation chamber needs to achieve.

[0073] For example, the formulas for the volume Va of the first inflation chamber, the volume Vb of the second inflation chamber, the first pressure Pa of the first inflation chamber, and the gas volume difference (which can be denoted as Δq) are as follows:

[0074]

[0075] in, Pa is the second target pressure of the second inflation chamber, Pa is the first pressure of the first inflation chamber, Va is the volume of the first inflation chamber, and Vb is the volume of the second inflation chamber. Given that Va, Vb, and Pa are all known quantities, the above formula can be used to calculate... At this point, the second flow totalizer is turned on to inflate the second inflation chamber, causing the pressure in the second inflation chamber to reach [the required level]. Specifically, the pressure in the second inflation chamber can be determined by monitoring the vacuum gauge connected to the second inflation chamber to see if it has reached the required level. Then, the second flow totalizer is turned off, and the third valve 23 is opened, allowing the pressure between the first and second inflation chambers to gradually reach equilibrium. Through this inflation method, the precise amount of gas that can be injected into the first inflation chamber can be achieved, precisely injecting Δq of gas into the first inflation chamber.

[0076] For example, when already in partial pressure expansion mode, such as when a small amount of gas has been introduced into the first inflation chamber using the second inflation chamber, but the gas volume difference in the first inflation chamber is still greater than a preset gas volume threshold, the second target pressure of the second inflation chamber can be calculated using the method described above. Then, the pressure in the second inflation chamber is brought to the second target pressure by activating the second flow totalizer. It can be understood that this is a real-time adjustment process; whenever the gas volume difference in the first inflation chamber exceeds the preset gas volume threshold, a small amount of gas adjustment can be performed using the method described above.

[0077] This application utilizes the partial pressure expansion method to achieve fine adjustment of small-scale gas quantities, thereby significantly reducing the uncertainty of gas mixing to a level far below that of the direct pressure measurement method.

[0078] As an example, the measurement method for cryogenic pumps also includes: when the gas volume difference is less than or equal to a preset gas volume threshold, closing the third valve, allowing it to stand for a preset time, and then recording the final pressure of the first inflation chamber.

[0079] For example, when the gas volume difference is less than or equal to a preset gas volume threshold, it indicates that the gas volume in the first inflation chamber is within the threshold range of the target gas volume. At this time, the third valve 23 is closed, and after a preset time (which can be 5 minutes), the final pressure P of the first inflation chamber is recorded. final .

[0080] Figure 5 This is a flow chart of gas mixing according to an embodiment of this application.

[0081] like Figure 5 As shown, at the start of gas mixing, the target gas quantity q is input first. cvtarget The target gas quantity is a pre-set transit capacity, and the first target pressure P is determined based on the ratio between the target gas quantity and the volume of the first inflation chamber. target The current first pressure P is obtained from the vacuum gauge reading. current Based on the pressure difference between the first target pressure and the first pressure, if the difference is greater than or equal to a preset pressure threshold, the direct pressurization mode is activated, opening the first valve 21 and the second valve 22 to quickly fill the first inflation chamber with gas. If the difference is less than the preset pressure threshold, the partial pressure expansion mode is activated, closing the second valve 22 and the first flow totalizer, and opening the second flow totalizer to fill the second inflation chamber with gas up to Pb'. Pb' can be determined by the large inflation chamber volume Va, the small inflation chamber volume Vb, and the gas volume difference. The first pressure Pa is calculated. Open the third valve 23, and when the first and second filling chambers are balanced, close the second flow totalizer and the third valve 23. Calculate the current gas quantity q in the first filling chamber and compare it with the target gas quantity q. cvtarget Comparison is made between the gas quantity q and the target gas quantity q. cvtarget When the difference between the pressure and pressure in the first chamber is less than 1 PaL, the gas mixing is considered complete. After a preset settling time, record the final pressure P of the first chamber. final and the final crossing capacity q cv =P final Multiply by Va.

[0082] As an example, such as Figure 2 As shown, the gas distribution module 10 includes a first gas pump 13 and a fourth valve 24 connected to the first gas pump 13. The fourth valve 24 is connected to the first inflation chamber 7, the main line 2, and the test cover 31 (not shown in the figure). The gas distribution module 10 is configured to perform a vacuuming operation on the first inflation chamber, the main line, the test cover, and other components before the gas distribution begins.

[0083] For example, before gas distribution is initiated, the first gas pump 13 and the fourth valve 24 can be used to evacuate the gas distribution pipeline, gas distribution chamber, test hood, and other components to prepare for gas distribution. Of course, all valves must be closed after evacuation is completed.

[0084] As an example, the test system also includes a test module 30, which includes a fifth valve 25, a test shroud 31 and a cryogenic pump 32 connected in series. The fifth valve 25 is connected to the output end of the first inflation chamber 7. The impact test is initiated to introduce gas into the cryogenic pump 32, including: opening the fifth valve 25 so that the gas in the first inflation chamber 7 passes through the test shroud 31 to the cryogenic pump 32.

[0085] For example, the fifth valve 25 can be a quick-opening valve to meet the standard of "introducing 98% gas within 3 seconds", so that the gas in the first inflation chamber 7 can quickly pass through the test cover 31 to the cryogenic pump 32, and simultaneously open the high-speed temperature measurement unit 20 of the cryogenic pump. The response time of the high-speed temperature measurement unit 20 is <0.1 seconds, which can accurately capture the transient temperature curve T(t) of the secondary cold head caused by the impact bleed gas.

[0086] As an example, the temperature test data includes the highest temperature. The validity of the current test is determined based on the temperature test data, including: if the highest temperature is less than or equal to the temperature threshold, the current test is determined to be valid; if the highest temperature is greater than the temperature threshold, the current test is determined to be invalid.

[0087] For example, the high-speed temperature measurement unit 20 acquires the transient temperature curve T(t) of the second-stage cold head of the cryogenic pump and extracts the highest temperature Tmax. If the highest temperature Tmax is less than or equal to a temperature threshold, the current test is determined to be valid. The temperature threshold can be 20K. If the highest temperature Tmax is greater than the temperature threshold, the current test is considered invalid.

[0088] As an example, the testing method for cryogenic pumps also includes: determining the test value of the crossing capacity based on the product of the final pressure of the first inflation chamber and the volume of the first inflation chamber, provided that the current test is valid; and determining the target crossing capacity based on the test values ​​of the crossing capacity corresponding to multiple valid tests.

[0089] For example, if the current test is valid, then based on the final pressure P of the first inflation chamber... final The test value q of the crossing capacity is determined by multiplying the volume Va of the first inflation chamber by the volume of the first inflation chamber. cv The target crossing capacity is determined based on the test values ​​of the crossing capacity corresponding to multiple valid tests. For example, the average value of the crossing capacity corresponding to three valid tests can be taken as the target crossing capacity.

[0090] As an example, to precisely meet the stringent standard of "introducing 98% gas within 3 seconds," this application abandons empirical selection. By establishing a series flow conduction model of the gas transmission path, the filling chamber, valves, pipelines, and test hood are equivalent to a series of flow conductions, with the flow conductance C of the fifth valve being... V5 The system conductance Ctest is connected in series with the test hood. The model derivation shows that the total system conductance Ctotal must meet the following condition: Ctotal ≥ -(Va / 3) × ln(1-0.98), ensuring that its conductance and opening speed (topen<0.3s) can reliably meet the standard timing requirements, thus solving the problem of relying entirely on experience and having a low success rate in the existing technology.

[0091] For example, when gas is discharged from the inflation chamber, the pressure change over time follows an exponential decay law:

[0092]

[0093] The expression for the total system flow conductance is shown below:

[0094]

[0095] Based on the stringent standard of "introducing 98% of the gas within 3 seconds", the constraints on the total conductance of the system are as follows:

[0096]

[0097] Among them, C total The total flow rate of the system is given by Va, where Va is the volume of the large inflation chamber; τ is the target time, which can be 3 seconds. The target transmission ratio can be 98%. The total conductance of the system can be verified during the impact process to determine whether the previous test met the standard of "introducing 98% gas within 3 seconds".

[0098] Figure 6 This is a flowchart of a testing process according to an embodiment of this application.

[0099] like Figure 6 As shown, after the cryogenic pump has been fully regenerated and cooled, the gas distribution system, including the independent charging chamber, piping, and test hood, is evacuated. After evacuation, all valves are closed to maintain system isolation, and the cryogenic pump is in operating mode. Before gas distribution, the target transit capacity q is first determined. cvtarget The first target pressure P is determined based on the target crossing capacity. target The current first pressure P is obtained based on the reading from the first vacuum gauge. currentBased on the pressure difference between the first target pressure and the first pressure, if the difference is greater than or equal to a preset pressure threshold, the direct pressurization mode is activated to rapidly fill the first inflation chamber with gas. If the difference is less than the preset pressure threshold, the partial pressure expansion mode is activated to inject a precise increment through the metering chamber. When the first pressure in the first inflation chamber stabilizes at the first target pressure, the third valve 23 is closed to confirm the completion of gas distribution. After a preset settling time, the final pressure P of the first inflation chamber is recorded. final The initial temperature is T0. While the impact test is initiated, the quick-opening valve 25 and the high-speed temperature measurement unit are simultaneously triggered to ensure that 98% of the gas is introduced into the cryogenic pump within 3 seconds. The validity is determined based on the transient temperature curve T(t) of the second-stage cold head of the cryogenic pump obtained by the high-speed temperature measurement unit. The highest temperature Tmax of the curve T(t) is extracted. If the highest temperature Tmax is less than or equal to 20K, the current test is considered valid. If the highest temperature Tmax is greater than 20K, the current test is considered invalid. The average value of the transit capacity corresponding to three valid tests can be taken as the target transit capacity.

[0100] The controller in this application acts as the system's brain, executing... Figure 6 The automated process is shown. The control gas distribution system completes closed-loop precision gas distribution, and then simultaneously triggers the opening of the quick-opening valve 25 and the start of the high-speed temperature measurement unit. The response time of the high-speed temperature measurement unit is <0.1 seconds, which can accurately capture the transient temperature curve T(t) of the secondary cold head caused by the impact bleed gas. The software automatically analyzes the curve, extracts the highest temperature Tmax, and automatically determines the validity of a single test by applying the criterion that Tmax≤20K, and records the results. This process is automatically repeated at least three times, and finally the average value and dispersion are calculated to generate a verification report. This completely eliminates the subjective errors of manual operation and interpretation, and realizes the standardization and traceability of testing.

[0101] This application achieves high-precision metrological testing and traceability by introducing the partial pressure expansion method and a dual-chamber structure, overcoming the long-standing problem of inaccurate configuration of minute gas volumes. Secondly, the scientific design based on the conductance-time matching model ensures that the testing process strictly meets and reliably verifies core international standard requirements such as "3 seconds 98%". Furthermore, with the help of a central control unit and a high-speed acquisition system, the entire process from gas mixing and triggering to interpretation is automated and intelligently objectively determined, completely eliminating human error. Finally, the modular design and built-in diagnostic functions significantly improve engineering practicality and equipment maintenance convenience.

[0102] This application also proposes a testing device for cryogenic pumps.

[0103] As an example, such as Figure 7As shown, the cryogenic pump testing device 700 includes: an acquisition module 701, used to acquire the first pressure of the first inflation chamber and determine the gas distribution mode based on the first pressure; an activation module 702, used to activate the impact test to introduce gas into the cryogenic pump after completing the gas distribution based on the gas distribution mode; and a determination module 703, used to acquire the temperature test data of the cryogenic pump and determine the validity of the current test based on the temperature test data.

[0104] This application also proposes a computer-readable storage medium.

[0105] In this embodiment, a computer program is stored on a computer-readable storage medium, and when the computer program is executed by a processor, it implements the steps of the above-described cryogenic pump testing method.

[0106] Figure 8 A block diagram of an electronic device provided in an embodiment of this application.

[0107] This application provides an electronic device, including a memory and a processor. The memory stores a computer program, and the processor executes the computer program to implement the above-described test method for a cryogenic pump.

[0108] like Figure 8 As shown, for ease of understanding, embodiments of this application illustrate a specific electronic device.

[0109] Electronic devices are intended to represent various forms of digital computers, such as laptop computers, desktop computers, workstations, personal digital assistants, servers, blade servers, mainframe computers, and other suitable computers. Electronic devices can also represent various forms of mobile devices, such as personal digital processors, cellular phones, smartphones, wearable devices, and other similar computing devices. The components shown herein, their connections and relationships, and their functions are merely illustrative and are not intended to limit the implementation of the present disclosure described and / or claimed herein.

[0110] like Figure 8 As shown, the device includes a computing unit 801, which can perform various appropriate actions and processes based on a computer program stored in a read-only memory (ROM) 802 or a computer program loaded from a storage unit 808 into a random access memory (RAM) 803. The RAM 803 may also store various programs and data required for the operation of the electronic device. The computing unit 801, ROM 802, and RAM 803 are interconnected via a bus 804. An input / output (I / O) interface 805 is also connected to the bus 804.

[0111] Multiple components in the electronic device are connected to the I / O interface 805. These components include: an input unit 806, such as a keyboard or mouse; an output unit 807, such as various types of displays or speakers; a storage unit 808, such as a disk or optical disk; and a communication unit 809, such as a network interface card (NIC), a modem, or a wireless transceiver. The communication unit 809 allows the electronic device to exchange information / data with other devices through computer networks such as the Internet and / or various telecommunications networks.

[0112] The computing unit 801 can be a variety of general-purpose and / or special-purpose processing components with processing and computing capabilities. Some examples of the computing unit 801 include, but are not limited to, a central processing unit (CPU), a graphics processing unit (GPU), various special-purpose artificial intelligence (AI) computing chips, various computing units running machine learning model algorithms, a digital signal processor (DSP), and any suitable processor, controller, microcontroller, etc. The computing unit 801 performs the various methods described above, such as the cryogenic pump testing method. For example, in some embodiments, the cryogenic pump testing method can be implemented as a computer software program tangibly contained in a machine-readable medium, such as storage unit 808. In some embodiments, part or all of the computer program can be loaded and / or installed on an electronic device via ROM 802 and / or communication unit 809. When the computer program is loaded into RAM 803 and executed by the computing unit 801, the cryogenic pump testing method described above can be executed. Alternatively, in other embodiments, the computing unit 801 can be configured to perform the cryogenic pump testing method by any other suitable means (e.g., by means of firmware).

[0113] It should be noted that the logic and / or steps represented in the flowchart or otherwise described herein, for example, can be considered as a sequenced list of executable instructions for implementing logical functions, and can be specifically implemented in any computer-readable medium for use by, or in conjunction with, an instruction execution system, apparatus, or device (such as a computer-based system, a processor-included system, or other system that can fetch and execute instructions from, an instruction execution system, apparatus, or device). For the purposes of this application, "computer-readable medium" can be any means that can contain, store, communicate, propagate, or transmit programs for use by, or in conjunction with, an instruction execution system, apparatus, or device. More specific examples (a non-exhaustive list) of computer-readable media include: electrical connections (electronic devices) having one or more wires, portable computer disk drives (magnetic devices), random access memory (RAM), read-only memory (ROM), erasable and editable read-only memory (EPROM or flash memory), fiber optic devices, and portable optical disc read-only memory (CDROM). Furthermore, computer-readable media can even be paper or other suitable media on which programs can be printed, because programs can be obtained electronically, for example, by optically scanning the paper or other media, followed by editing, interpreting, or otherwise processing as necessary, and then stored in computer memory.

[0114] It should be understood that various parts of this application can be implemented using hardware, software, firmware, or a combination thereof. In the above embodiments, multiple steps or methods can be implemented using software or firmware stored in memory and executed by a suitable instruction execution system. For example, if implemented in hardware, as in another embodiment, it can be implemented using any combination of the following techniques known in the art: discrete logic circuits having logic gates for implementing logical functions on data signals, application-specific integrated circuits (ASICs) having suitable combinational logic gates, programmable gate arrays (PGAs), field-programmable gate arrays (FPGAs), etc.

[0115] In the description of this application, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this application, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0116] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0117] Furthermore, the terms "first," "second," etc., used in the embodiments of this application are for descriptive purposes only and should not be construed as indicating or implying relative importance, or implicitly specifying the number of technical features indicated in this embodiment. Therefore, features defined with terms such as "first" and "second" in the embodiments of this application can explicitly or implicitly indicate that the embodiment includes at least one of those features. In the description of this application, the word "multiple" means at least two or more, such as two, three, four, etc., unless otherwise explicitly and specifically defined in the embodiments.

[0118] In this application, unless otherwise explicitly specified or limited in the embodiments, the terms "installation," "connection," "joining," and "fixing" appearing in the embodiments should be interpreted broadly. For example, a connection can be a fixed connection, a detachable connection, or an integral part; it can also be a mechanical connection, an electrical connection, etc. Of course, it can also be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication between two components, or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific implementation.

[0119] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0120] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. A test method for a cryogenic pump, characterized in that, The method is applied to a testing system for cryogenic pumps. The testing system includes a gas distribution module, which comprises a gas storage device, a main line connected to the gas storage device, and a first gas distribution branch and a second gas distribution branch connected to the main line. The first gas distribution branch includes a first flow totalizer and a first filling chamber connected in series. The second gas distribution branch includes a second flow totalizer and a second filling chamber connected in series. The volume of the first filling chamber is larger than the volume of the second filling chamber. The method includes: A first pressure is obtained from the first inflation chamber, and a gas distribution mode is determined based on the first pressure. The gas distribution mode includes a direct pressurization mode and a partial pressure expansion mode. A first target pressure is determined based on the ratio between the target gas volume and the volume of the first inflation chamber. The target gas volume is obtained according to configuration information. A pressure difference between the first target pressure and the first pressure is determined. When the pressure difference is greater than or equal to a preset pressure threshold, the gas distribution mode is determined to be the direct pressurization mode. When the pressure difference is less than the preset pressure threshold, the gas distribution mode is determined to be the partial pressure expansion mode. After the gas distribution is completed based on the gas distribution mode, the impact test is started to introduce gas into the cryogenic pump. Acquire the temperature test data of the cryogenic pump, and determine the validity of the current test based on the temperature test data; When the gas distribution mode is the direct boost mode, the first flow totalizer operates according to the first preset flow rate, while the second flow totalizer does not operate. When the gas distribution mode is the partial pressure expansion mode, the second flow totalizer operates according to the second preset flow rate, and the first flow totalizer does not operate.

2. The test method for cryogenic pumps according to claim 1, characterized in that, The main line includes a pressure reducing valve and a first valve. The pressure reducing valve is used to reduce the pressure of the output gas of the gas storage device, and the first valve is used to open or close the gas output of the gas storage device. The first gas distribution branch also includes a second valve disposed between the first flow totalizer and the first filling chamber, a third valve disposed between the first filling chamber and the second filling chamber, and both the first flow totalizer and the second flow totalizer are connected to the first valve.

3. The test method for cryogenic pumps according to claim 2, characterized in that, When the gas distribution mode is the direct boost mode, the first valve and the second valve are opened, and the third valve is closed; When the gas distribution mode is the partial pressure expansion mode, the first valve and the third valve are opened, and the second valve is closed.

4. The test method for cryogenic pumps according to claim 1, characterized in that, When the valve distribution mode is direct boost mode, the method further includes: The first pressure is updated in real time, and the step of determining the pressure difference between the first target pressure and the first pressure is returned.

5. The test method for cryogenic pumps according to claim 3, characterized in that, When the gas distribution mode is the partial pressure expansion mode, the method further includes: When the first inflation chamber and the first pressure are equal to the second pressure of the second inflation chamber, the third valve and the second flow totalizer are closed; The current gas volume is determined based on the product of the volume of the first inflation chamber and the first pressure. Determine the gas quantity difference between the current gas quantity and the target gas quantity; If the gas volume difference is greater than a preset gas volume threshold, the third valve and the second flow totalizer are opened to fill the second inflation chamber with gas until the gas volume difference is less than or equal to the preset gas volume threshold.

6. The test method for cryogenic pumps according to claim 5, characterized in that, The method further includes: When the gas volume difference is less than or equal to the preset gas volume threshold, the third valve is closed, and after a preset time, the final pressure of the first inflation chamber is recorded.

7. The test method for a cryogenic pump according to claim 3 or 5, characterized in that, Before the third valve is opened, the method further includes: Based on the volume of the first inflation chamber, the volume of the second inflation chamber, the difference between the first pressure and the gas volume of the first inflation chamber, a second target pressure of the second inflation chamber is determined, so that the pressure of the second inflation chamber reaches the second target pressure by turning on the second flow totalizer.

8. The test method for cryogenic pumps according to claim 1, characterized in that, The gas distribution module includes a first gas pump and a fourth valve connected to the first gas pump. The fourth valve is connected to the first inflation chamber, the main circuit, and the test hood. The gas distribution module is configured to perform a vacuuming operation on the first inflation chamber, the main circuit, and the test hood before gas distribution begins.

9. The test method for a cryogenic pump according to claim 1, characterized in that, The testing system further includes a testing module, which comprises a fifth valve, a test hood, and a cryogenic pump connected in series. The fifth valve is connected to the output end of the first inflation chamber. The step of initiating the impact test to introduce gas into the cryogenic pump includes: Open the fifth valve to allow gas from the first inflation chamber to pass through the test hood to the cryogenic pump.

10. The test method for a cryogenic pump according to claim 1, characterized in that, The temperature test data includes the highest temperature, and determining the validity of the current test based on the temperature test data includes: The test is deemed valid when the highest temperature is less than or equal to the temperature threshold. If the highest temperature exceeds the temperature threshold, the current test is determined to be invalid.

11. The test method for a cryogenic pump according to claim 6, characterized in that, The method further includes: If the current test is valid, the test value of the crossing capacity is determined based on the product of the final pressure of the first inflation chamber and the volume of the first inflation chamber. The target crossing capacity is determined based on the test values ​​of the crossing capacity corresponding to multiple valid tests.

12. A testing device for a cryogenic pump, characterized in that, The device is applied to a cryogenic pump testing system. The testing system includes a gas distribution module, which comprises a gas storage device, a main line connected to the gas storage device, and a first gas distribution branch and a second gas distribution branch connected to the main line. The first gas distribution branch includes a first flow totalizer and a first filling chamber connected in series. The second gas distribution branch includes a second flow totalizer and a second filling chamber connected in series. The volume of the first filling chamber is larger than the volume of the second filling chamber. The device includes: The acquisition module is configured to acquire a first pressure in the first inflation chamber and determine a gas distribution mode based on the first pressure. The gas distribution mode includes a direct pressurization mode and a partial pressure expansion mode. The acquisition module is also configured to determine a first target pressure based on the ratio between the target gas volume and the volume of the first inflation chamber, wherein the target gas volume is obtained according to configuration information; determine a pressure difference between the first target pressure and the first pressure; when the pressure difference is greater than or equal to a preset pressure threshold, determine the gas distribution mode as the direct pressurization mode; when the pressure difference is less than the preset pressure threshold, determine the gas distribution mode as the partial pressure expansion mode. The activation module is used to activate the impact test to introduce gas into the cryogenic pump after the gas distribution mode is completed. The determination module is used to acquire the temperature test data of the cryogenic pump and determine the validity of the current test based on the temperature test data; When the gas distribution mode is the direct boost mode, the first flow totalizer operates according to the first preset flow rate, while the second flow totalizer does not operate. When the gas distribution mode is the partial pressure expansion mode, the second flow totalizer operates according to the second preset flow rate, and the first flow totalizer does not operate.

13. An electronic device, characterized in that, The device includes a memory and a processor, the memory storing a computer program, characterized in that the processor executes the computer program to implement the steps of the testing method for the cryogenic pump according to any one of claims 1-11.

14. A computer-readable storage medium, characterized in that, It stores a computer program, which, when executed by a processor, implements the steps of the test method for the cryogenic pump according to any one of claims 1-11.

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