Inductive position measuring device and method for operating inductive position measuring device

Abstract

The invention relates to an inductive position measuring device and a method for operating an inductive position measuring device. The inductive position measuring device comprises a first component having a first interaction surface and a second component having a second interaction surface. The two components are arranged opposite each other in a third measurement direction and can be moved relative to each other. The first assembly includes a plurality of first field interaction elements arranged parallel to the first interaction surface. The second assembly includes a plurality of second field interaction elements arranged in a flat distribution over the second interaction surface. The inductive position measuring device is characterized in that at least one first field interaction element is arranged in a first measuring direction and at least one further first field interaction element is arranged in a second measuring direction, and the first field interaction elements each comprise at least one excitation element and at least one reception element.

Description

Technical Field

[0001] The present invention relates to an inductive position measuring device according to the preamble of the present invention and a method for operating the inductive position measuring device according to the preamble of the present invention. Background Technology

[0002] A motion device with a position determination system is known from patent document WO 2020 088 869A1, which has static and dynamic components. The two components have their own power sources and include multiple coils or capacitor plates designed in a circular shape, which interact electromagnetically with each other.

[0003] The drawback of existing technology is that both moving and stationary components use electrical elements, which must be connected to active electronic devices. This results in each component requiring its own power supply and data connection, leading to a significantly more complex structure, especially in static components. Summary of the Invention

[0004] The purpose of this invention is to provide an inductive position measuring device that enables the determination of the position of a movable component in multiple degrees of freedom, while also being low in manufacturing cost.

[0005] According to the invention, this objective is achieved by the features described herein. Advantageous design options and improvements are given in various embodiments.

[0006] The inductive position measuring device according to the present invention includes a first component with a first interaction surface and a second component with a second interaction surface. The two components are arranged opposite to each other in a third measuring direction and are movable relative to each other. The second interaction surface is designed to be larger than the first interaction surface. The first component includes a plurality of first field interaction elements arranged parallel to the first interaction surface. The second component includes a plurality of second field interaction elements distributed on the second interaction surface. The first and second field interaction elements are capable of electromagnetic interaction. The inductive position measuring device is characterized in that at least one first field interaction element is arranged along the first measuring direction, and at least one second first field interaction element is arranged along the second measuring direction, and each first field interaction element includes at least one excitation element for generating an electromagnetic field and at least one receiving element for receiving the electromagnetic field.

[0007] According to an advantageous embodiment of the invention, the first field interaction element is constructed as an elongated linear sensor, and the first and second measurement directions extend perpendicularly to each other.

[0008] A slender linear sensor should be understood as a sensor designed to generate an electrical signal depending on its relative position in the measurement direction and its distance from the second component. Here, the linear sensor is structurally designed such that its dimension along its parallel measurement direction is larger than the rest of its dimensions.

[0009] In another design, the first field interaction element

[0010] • It includes a first receiving element and a second receiving element, each having a process curve with a period of constant period length, wherein the receiving elements are arranged offset from each other by one-quarter of their period length in a first or second measurement direction, and

[0011] Each includes an excitation element, which in particular surrounds the two receiving elements in a rectangular manner.

[0012] Advantageously, the first component includes four first field interaction elements arranged in the first interaction surface and perpendicular to each other.

[0013] If an implementation with four first-field interaction elements is provided, then the receiving element of the four first-field interaction elements is advantageously designed to have an oscillation width corresponding to at least one period length.

[0014] Alternatively, the first component includes eight first field interaction elements arranged in a first interaction surface and divided into four parallel field interaction pairs, wherein the four parallel field interaction pairs are arranged perpendicular to each other.

[0015] The vertical arrangement of four field interaction elements or four pairs of field interaction elements is implemented such that each field interaction element or pair extends perpendicularly to exactly two adjacent field interaction elements or pairs, that is, the overall arrangement forms a cube through the field interaction elements or pairs.

[0016] If an embodiment with eight field interaction elements or four sets of field interaction pairs is configured, then the first receiving element is advantageously designed identically to and connected in series with at least one set of field interaction pairs. Additionally, the second receiving element is designed identically to and connected in series with at least one set of field interaction pairs. The oscillation width of at least one of the receiving elements is less than half the period length, and the spacing between the two first receiving elements or the two second receiving elements is half the period length.

[0017] Here, the spacing between the field interaction pairs is understood as a virtual zero-crossing point designed between the receiving element of the first field interaction element and the receiving element of the other first field interaction element.

[0018] Preferably, the first receiving element in each of the four sets of field interaction pairs is designed to be identical, and the first receiving elements are connected in series in the field interaction pairs. Also preferably, the second receiving element in each of the four sets of field interaction pairs is designed to be identical, and the second receiving elements are connected in series in the field interaction pairs.

[0019] In another design, the second component is not connected to the active power supply unit and the data processing unit.

[0020] Therefore, only the first component is connected to the active energy supply device and the data processing device.

[0021] Advantageously, the second field interaction element

[0022] • It is the face of a quadrilateral, especially a square, and

[0023] • They are arranged on the second interacting surface in an identical grid pattern and of equal size.

[0024] Advantageously, the second field interaction element is manufactured using planar technology, particularly through thick film technology and / or thin film technology.

[0025] The method for operating an inductive position measuring device according to the invention is characterized in that a predetermined excitation signal is sent to a second component under the condition of applying at least one first interaction element, wherein the received signal arriving at at least one first field interaction element is then measured individually. Linear position information of at least one first field interaction element relative to the second component and, as supplementary or alternative, spacing information are determined through corresponding signal evaluation of the at least one received signal.

[0026] Preferably, the predetermined excitation signal is modulated by at least one second field interaction element before being measured as a received signal by at least one receiving element.

[0027] Preferably, the excitation signal is generated or received by an excitation element and the receiving signal is generated or received by a receiving element that belongs to one and the same field interaction pair, and in particular to one and the same field interaction element.

[0028] Advantageously, modulation depends on the position of at least one second field interaction element on the second interaction surface.

[0029] Preferably, the inductive position measuring device determines the relative positions of the first and second components in at least four degrees of freedom, for example, in six degrees of freedom.

[0030] Preferably, the six degrees of freedom are six spatial degrees of freedom, such as three Cartesian position coordinates and three Euler angles.

[0031] Advantageously, at least one first mass parameter is derived or determined from the position information of the first field interaction element that determines position information or spacing information in the same measurement direction and the spacing information as a supplement or alternative.

[0032] Furthermore, the configuration involves determining at least one rotational information about an axis oriented along one of the measurement directions from the positional information of at least two first field interaction elements or two interaction pairs and, as supplementary or alternative, spacing information.

[0033] Advantageously, at least one second mass parameter can be derived or determined from at least one rotational information.

[0034] In another design scheme, a fault signal is issued based on a first quality parameter and a second quality parameter, which is either a supplement or a replacement, and an optimization method is performed, either as a supplement or a replacement.

[0035] The issuance of a fault signal or the initiation of an optimization method can be performed, for example, when a predefined boundary value is exceeded. Attached Figure Description

[0036] Further features and advantages of the invention will now be described in detail with reference to the illustrative drawings and the embodiments.

[0037] This is shown here:

[0038] Figure 1 A perspective view of an inductive position measuring device including a first component and a second component is shown.

[0039] Figure 2 A top view of the second component is shown;

[0040] Figure 3 A top view showing a first embodiment of the first field interaction element;

[0041] Figure 4 A top view showing a second embodiment of the first field interaction element;

[0042] Figure 5 A view showing the first interacting surface of the first component;

[0043] Figure 6a , Figure 6b A schematic top view of an inductive position measuring device is shown, in which the relative rotation of a first component about a coordinate axis of a third measuring direction is shown;

[0044] Figure 7A cross-sectional view of an inductive position measuring device with schematically shown excitation and reception signals is shown. Detailed Implementation

[0045] according to Figure 1 The inductive position measuring device 1 of the embodiment shown next has a first component 10 and a second component 20, which are arranged opposite to each other in a third measuring direction z and are movable relative to each other. The first component 10 and the second component 20 are arranged spaced apart from each other, thereby forming an air gap between the two components 10, 20.

[0046] The first component 10 includes a first interaction surface 11 with a plurality of first field interaction elements 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2", wherein the first field interaction elements 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2" are parallel to the first interaction surface 11 and arranged planar therein. The first component 10 is powered to generate at least one excitation signal S1 and to receive at least one reception signal S2. This can be achieved, for example, via cable or wirelessly. The power source can be, for example, a battery within the first component 10 or external to the first component 10.

[0047] The second component 20 includes a second interaction surface 21 with a plurality of second field interaction elements 20.1 to 20.n. The second field interaction elements 20.1 to 20.n are arranged flatly on or in the second interaction surface 21 and distributed evenly thereon. The second component 20 is designed to be independent without its own magnetic field and is not actively powered via cables or the like, because the component 20 interacts with the first component 10 purely passively.

[0048] The second interaction surface 21 of the second component 20 is typically configured to be larger than the first interaction surface 11 of the first component 10, such that when positioning the first component 10, there is always sufficient overlap between the two components 10, 20 in the edge region of the second component 20.

[0049] Two interacting surfaces 11 and 21 are arranged opposite to each other and spaced apart, such that position determination can be achieved through the electromagnetic interaction between the first and second field interacting elements 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2" or 20.1 to 20.n. Specifically, this position determination is given when the first and second field interacting elements 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2" or 20.1 to 20.n at least partially overlap when viewed from above in the third measurement direction z.

[0050] During operation of the inductive position measuring device 1, the positions and orientations of components 10 and 20 can be changed relative to each other in three measurement directions x, y, and z. Advantageously, the three measurement directions x, y, and z are perpendicular to each other. The current position and orientation in six degrees of freedom are determined and evaluated by the inductive position measuring device 1 through the electromagnetic interaction between the first field interaction elements 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2" and the second field interaction elements 20.1 to 20.n. For the evaluation of the position and orientation of the first component 10, the evaluation device can be located inside or outside the first component 10. Data transmission can be achieved, for example, wired or alternatively, wirelessly.

[0051] Preferably, one of the components is stationary while the others are free to move. Specifically, the stationary arrangement of the second component 20 is reasonable when the second interaction surface 21 of the second component 20 is four times larger than the first interaction surface 11 of the first component 10. Alternatively, however, the first component 10 can also be arranged to be stationary, and the second component 20 can move relative to the first component 10. This is also reasonable, for example, when it is impossible to power the moving component.

[0052] Figure 2 A preferred design of the second interaction surface 21 of the second component 20 is shown. The second interaction surface 21 can have a largely arbitrary shape or be arbitrarily curved, wherein it is preferably designed to be planar.

[0053] Preferably, the second interaction surface 21 is the surface of a printed circuit board, manufactured using thin-film technology as a supplement or alternative to thick-film technology. The printed circuit board comprises an electrically insulating base material 19, such as fiber-reinforced epoxy resin. A conductive layer, particularly made of copper, is coated onto the base material 19 of the circuit board, structured to form a plurality of second interaction elements 20.1 to 20.n.

[0054] Alternatively, each of the second interacting elements 20.1 to 20.n and the second interacting surface 21 are also formed from a substrate. In particular, a metal substrate can be involved, wherein each of the second interacting elements 20.1 to 20.n is designed in a reinforced form, wherein there is no metal substrate between each of the second interacting elements 20.1 to 20.n. The region between each of the second interacting elements 20.1 to 20.n can be either constructed as a cavity or air gap, or filled, for example, with epoxy resin, thereby forming a flat surface.

[0055] The second interacting elements 20.1 to 20.n are arranged in a quadrilateral grid pattern on the second interacting surface 21, with defined spacing between them. The gaps and patterns formed by the grid of second interacting elements 20.1 to 20.n are arranged along the first and second measuring directions x and y, which extend vertically. All the second interacting elements 20.1 to 20.n are designed to be of the same size, specifically square. However, other shapes, such as circles, rectangles, spirals, etc., are also considered.

[0056] Grid can be like Figure 2 The surface is completely filled with second interacting elements 20.1 to 20.n, such that the second interacting elements 20.1 to 20.n are uniformly distributed in a grid pattern. Alternatively, the second interacting elements 20.1 to 20.n can also be distributed non-uniformly on the second interacting surface 21, such that the grid includes locations or regions where the second interacting elements 20.1 to 20.n are not present.

[0057] Figure 3 A first embodiment of the first field interaction elements 10.X1, 10.X2, 10.Y1, and 10.Y2 is shown. The first field interaction element 10.X1 shown is an elongated linear sensor comprising a planar excitation element 10.1 for generating an electromagnetic field and two planar receiving elements 10.21 and 10.22 for receiving the electromagnetic field.

[0058] The first receiving element 10.21 is constructed as a receiver printed conductor and is composed of multiple printed conductors. The basic extension curve of the first receiving element 10.21 is structurally similar to a sinusoidal extension curve, wherein the magnitude of the amplitude of each printed conductor is not structurally absolutely constant. The amplitudes of two adjacent printed conductors of the basic extension curve (composed of positive and negative printed conductor amplitudes) have a period length T1 and an oscillation width SB1.

[0059] The first receiving element 10.21 can be further divided into import and export segments. The import segment is analogous to the graph of the function f(x) = a·sin(x) in its basic extension curve, where, The derived segment resembles the graph of the function g(x) = -a·sin(x) in its basic extension curve, where, In other words, the outgoing segment of the first receiving element 10.21 is approximately a mirror image of the incoming segment on the line of symmetry.

[0060] The second receiving element 10.22 is constructed as a receiver printed conductor, similar to the first receiving element 10.21, but arranged at a quarter-period offset (offset V1) from the first receiving element 10.21. Specifically, the offset V1 is along either the first measurement direction x or the second measurement direction y. Accordingly, the offset arrangement of the two receiving elements 10.21 and 10.22 enables the generation of a phase-shifted signal. The two receiving elements 10.21 and 10.22 are circuitically connected such that they provide 0° and 90° signals.

[0061] The two receiving elements 10.21 and 10.22 are distinct from each other in length. For example, the first receiving element 10.21 has a length of three cycles, each cycle having a cycle length T1, and the second receiving element 10.22 has a length of two and a half cycles, each cycle having a cycle length T1.

[0062] The swing width SB1 in receiving elements 10.21 and 10.22 is understood as the height of the deviation between the minimum and maximum values ​​within the period length T1. It extends perpendicular to the period length T1 or perpendicular to the first or second measurement direction x, y.

[0063] According to the first embodiment of the first field interaction elements 10.X1, 10.X2, 10.Y1, 10.Y2, the swing width SB1 of the first receiving element 10.21 and the swing width SB1 of the second receiving element 10.22 are designed to be equal on average and at least correspond to the period length T1.

[0064] Figure 3The receiving elements 10.21 and 10.22 shown have a swing width SB1, which corresponds to approximately 1.5 times the period length T1.

[0065] The two receiving elements 10.21 and 10.22 are composed of multiple printed wire segments at different locations on the carrier substrate. Details of such a multilayer structure composed of printed wire segments are described in European patent application EP23200280 dated September 28, 2023, with reference to the description therein.

[0066] To compensate for pitch tilt, receiving elements 10.21 and 10.22 can provide additional loops S and S' at certain locations, which are also composed of printed conductor segments. For this purpose, loops S and S' are placed below the printed conductor amplitude at predetermined positions on the basic extension curve. At the positions with additional loops S and S', the printed conductor amplitudes of receiving elements 10.21 and 10.22 are offset from the basic extension curve and moved outward, i.e., in the direction of excitation element 10.1, by a predetermined value. Loops S and S' are moved inward relative to the printed conductor amplitude of the basic extension curve, i.e., in the direction of the virtual zero-crossing of the printed conductor amplitudes of receiving elements 10.21 and 10.22. However, overall, the structurally offset printed conductor amplitude, when combined with the loops, yields an amplitude signal of the same magnitude, as in the normal printed conductor amplitude without loops.

[0067] The loops S and S' are part of the receiver printed conductors and are preferably arranged on the first field interaction elements 10.X1, 10.X2, 10.Y1, 10.Y2 in a horizontally symmetrical manner with axis A (which divides the inlet and outlet segments into the same portion).

[0068] The circuit S of the first receiving element 10.21 can be designed in the inlet section of the receiver printed wire and, as a supplement or alternative, in the outlet section.

[0069] The circuit S' of the second receiving element 10.22 can also be designed in the inlet section of the receiver printed wire and, as a supplement or alternative, in the outlet section.

[0070] The two receiving elements 10.21 and 10.22 are surrounded by the excitation element 10.1, i.e., surrounded by all its sides. The excitation element 10.1 is configured to excite the printed conductor and is structurally designed as a quadrilateral. In particular, the quadrilateral is at least one rectangle.

[0071] According to the second embodiment of the first field interaction elements 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2", their arrangement can also be realized as field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2.

[0072] Figure 4 The field interaction pair 10.PX1 shown includes a first field interaction element 10.X1' and another first field interaction element 10.X1". The two first field interaction elements 10.X1' and 10.X1" are constructed as elongated linear sensors and together include a planar excitation element 10.2 (in Figure 4 (as shown in the figure) or alternatively, each includes a planar excitation element for generating an electromagnetic field (not shown).

[0073] The first field interaction element 10.X1' includes a planar first receiving element 10.23 and a planar second receiving element 10.24 for receiving electromagnetic fields. Another first field interaction element 10.X1' includes a planar first receiving element 10.25 and a planar second receiving element 10.26 for receiving electromagnetic fields.

[0074] The first field interaction elements 10.X1' and 10.X1" are arranged spaced apart from each other, thereby forming a misalignment V3 between the two first field interaction elements 10.X1' and 10.X1" relative to the receiving elements 10.23, 10.24 and 10.25, 10.26. Specifically, the misalignment V3 is along a first measurement direction x or along a second measurement direction y. Advantageously, the misalignment V3 corresponds to half a cycle length T2.

[0075] According to the second embodiment, a design scheme for the first field interaction elements 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2" and their arrangement as field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 is considered to reduce the lateral sensitivity of the inductive measuring device 1. Specifically, the lateral sensitivity is reduced perpendicular to the measurement direction x or the measurement direction y.

[0076] The first receiving elements 10.23 and 10.25 are constructed as receiver printed conductors and consist of multiple printed conductor segments. The basic extension curves of the first receiving elements 10.23 and 10.25 are respectively similar to sinusoidal extension curves, wherein the magnitude of each printed conductor amplitude is not structurally absolutely constant. The amplitudes of two adjacent printed conductors of the basic extension curve (composed of positive and negative printed conductor amplitudes) have a period length T1 and an oscillation width SB2.

[0077] The first receiving elements 10.23 and 10.25 can be further divided into import and export segments, respectively. The import segment is similar to the graph of the function f(x) = a·sin(x) in its basic extension curve, where, The derived segment resembles the graph of the function g(x) = -a·sin(x) in its basic extension curve, where, In other words, the outgoing segments of the first receiving elements 10.23 and 10.25 are approximately mirror images of the incoming segments on the line of symmetry.

[0078] The second receiving elements 10.24 and 10.26 are constructed as receiver printed wires, similar to the first receiving elements 10.23 and 10.25, but are arranged at a quarter-period offset (offset V2) from their respective first receiving elements 10.23 and 10.25. Specifically, the offset V2 is along either the first measurement direction x or the second measurement direction y. Accordingly, a phase-shifted signal can be generated by the offset arrangement of the two receiving elements 10.23 and 10.25 or the two receiving elements 10.24 and 10.26. The two receiving elements 10.24 and 10.26 are circuitically connected such that they provide 0° and 90° signals.

[0079] The two receiving elements 10.23 and 10.25 are distinct from each other in length. For example, the first receiving element 10.23 has a length of three cycles, each cycle having a cycle length T2, and the second receiving element 10.25 has a length of two and a half cycles, each cycle having a cycle length T2.

[0080] In one design of the first field interaction elements 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2" according to the second embodiment, the first receiving element 10.23 of the first field interaction element 10.X1' is connected in series with the first receiving element 10.25 of the other first field interaction element 10.X1". Furthermore, the second receiving element 10.24 of the first field interaction element 10.X1' is connected in series with the second receiving element 10.26 of the other first field interaction element 10.X1". This series circuit results in 0° and 90° signals with increased signal amplitude, respectively.

[0081] The swing width SB2 in receiving elements 10.23, 10.25, 10.24, and 10.26 is understood as the height of the deviation between the minimum and maximum values ​​within the period length T2. It extends perpendicular to the period length T2 or perpendicular to the first or second measurement direction x, y.

[0082] According to the second embodiment of the first field interaction elements 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2", the swing width SB2 of the first receiving elements 10.23, 10.25 and the swing width SB2 of the corresponding second receiving elements 10.24, 10.26 are designed to be equal on average, and the maximum corresponds to half of the period length T2.

[0083] Figure 3 The receiving elements 10.23, 10.25, 10.24, and 10.26 shown have a swing width SB2, which corresponds to approximately one-third of the period length T2.

[0084] The first and second receiving elements 10.23, 10.25, 10.24, and 10.26 are also composed of multiple printed wire segments in different layers of the substrate, as in the first embodiment.

[0085] To compensate for pitch tilt, receiving elements 10.23, 10.25, 10.24, and 10.26 can also provide additional loops S and S' at certain locations, which are composed of printed conductor segments. For this purpose, loops S and S' are placed below the printed conductor amplitude at predetermined positions on the basic extension curve. At the positions with additional loops S and S', the printed conductor amplitudes of receiving elements 10.23, 10.25, 10.24, and 10.26 are offset from the basic extension curve and shifted outward, i.e., by a predetermined value in the direction of excitation element 10.1. Loops S and S' are shifted inward relative to the printed conductor amplitude of the basic extension curve, i.e., in the direction of the virtual zero-crossing of the printed conductor amplitudes of receiving elements 10.23, 10.25, 10.24, and 10.26. However, overall, the same amplitude signal is obtained in the case of printed conductor amplitude offset in the structure with loops, as in the normal printed conductor amplitude without loops.

[0086] The loops S and S' are part of the receiver printed conductors and are preferably arranged on the first field interaction element 10.X1', 10.X1" such that they are arranged horizontally symmetrically with axis A, which divides the inlet and outlet segments into the same part.

[0087] The circuit S of the first receiving elements 10.23 and 10.25 can be designed in the inlet section of the receiver printed wire and, as a supplement or alternative, in the outlet section.

[0088] The loop S' of the second receiving elements 10.24 and 10.26 can also be designed in the inlet section of the receiver printed wires and, as a supplement or alternative, in the outlet section.

[0089] As previously described, the first receiving elements 10.23, 10.25, 10.24, and 10.26 are surrounded by a common excitation element 10.2 or by multiple individual excitation elements, i.e., surrounded by all the sides. The excitation element 10.2 is configured to excite the printed conductor and is structurally designed as a quadrilateral. In particular, the quadrilateral is at least one rectangle.

[0090] For example, the excitation element 10.2 can form two rectangles, one surrounding the receiving elements 10.23 and 10.24 and the other surrounding the receiving elements 10.25 and 10.26, as shown. Figure 4 As shown. Alternatively, two excitation elements can be provided, wherein one excitation element forms a rectangle surrounding the receiving elements 10.23 and 10.24, and the other excitation element forms a rectangle surrounding the receiving elements 10.25 and 10.26.

[0091] The first field interaction elements 10.X1, 10.X1', 10.X1", 10.X2, 10.X2', 10.X2", 10.Y1, 10.Y1', 10.Y1", 10.Y2, 10.Y2', 10.Y2" are designed within the first interaction surface 11 of the first component 10. The first interaction surface 11 is the surface of a printed circuit board, manufactured using thick-film technology and, as a supplementary or alternative, thin-film technology. To form the structure of the first field interaction elements 10.X1, 10.X1', 10.X1", 10.X2, 10.X2', 10.X2", 10.Y1, 10.Y1', 10.Y1", 10.Y2, 10.Y2', 10.Y2" can be provided with multiple individually overlapping and conductive layers, isolated from each other by insulating layers. Electrical connections between the printed conductors and the various conductive layers exist at predetermined locations, so-called via plating areas.

[0092] like Figure 5 As shown, two first field interaction elements 10.X1, 10.X2 or two sets of field interaction pairs 10.PX1, 10.PX2 extend parallel to the first measurement direction x and are arranged apart from each other by a distance Dx. Two first field interaction elements 10.Y1, 10.Y2 or two sets of field interaction pairs 10.PY1, 10.PY2 extend parallel to the second measurement direction y and are similarly arranged apart from each other by a distance Dy. Advantageously, the first field interaction elements 10.X1, 10.X2, 10.Y1, 10.Y2 or the field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 are arranged in a quadrilateral shape, particularly a square shape (Dx = Dy).

[0093] By using two receiving elements 10.21, 10.22, 10.23, 10.25, 10.24, 10.26 misaligned in the first measurement direction x or the second measurement direction y for each first field interaction element 10.X1, 10.X2, 10.Y1, 10.Y2 or each pair of field interaction elements 10.PX1, 10.PX2, 10.PY1, 10.PY2, ​​each first field interaction element 10.X1, 10.X2, 10.Y1, 10.Y2 or each pair of field interaction elements 10.PX1, 10.PX2, 10.PY1, 10.PY2 to provide two measurement parameters in the form of 0° and 90° signals, eight measurement parameters can be used to determine the position.

[0094] With the first field interaction elements 10.X1, 10.X2, 10.Y1, 10.Y2 or the field interaction pair 10.PX1, 10.PX2, 10.PY1, 10.PY2, ​​the linear position values ​​X1, X2, Y1, Y2 and signal amplitudes in the corresponding measurement directions x and y are first determined from the 0° and 90° signals. The signal amplitudes can be used to form the spacing values ​​Z_X1, Z_X2, Z_Y1, Z_Y2. The spacing values ​​Z_X1, Z_X2, Z_Y1, Z_Y2 of the first field interaction elements 10.X1, 10.X2, 10.Y1, 10.Y2 or the field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 quantify the spacing of the corresponding field interaction elements 10.X1, 10.X2, 10.Y1, 10.Y2 or the field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 to the second interaction surface 21 of the second component 20 in the third measurement direction z.

[0095] like Figure 5 As shown, the first field interaction element 10.X1 or the field interaction pair 10.PX1 provides a position value X1 for the first measurement direction x and a spacing value Z_X1 for the third measurement direction z. Similarly, the first field interaction element 10.X2 or the field interaction pair 10.PX2 provides a position value X2 for the first measurement direction x and a spacing value Z_X2 for the third measurement direction z, the first field interaction element 10.Y1 or the field interaction pair 10.PY1 provides a position value Y1 for the second measurement direction y and a spacing value Z_Y1 for the third measurement direction z, and the first field interaction element 10.Y2 or the field interaction pair 10.PY2 provides a position value Y2 for the second measurement direction y and a spacing value Z_Y2 for the third measurement direction z.

[0096] Therefore, the inductive position measuring device 1 provides two position values ​​X1, X2 for the first measuring direction x, two position values ​​Y1, Y2 for the second measuring direction y, and four spacing values ​​Z_X1, Z_X2, Z_Y1, Z_Y2 for the third measuring direction z during the measurement cycle.

[0097] In this manner, the relative positions of the first component 10 to the second component 20 in up to six degrees of freedom can be determined. Additionally, the reliability of the measured values ​​can be verified by determining the mass parameters, and further measures can be incorporated where possible.

[0098] The position of the midpoint M of the first component 10 can be determined, for example, by measuring the position values ​​X1, X2, Y1, Y2 of two first field interaction elements 10.X1, 10.X2; 10.Y1, 10.Y2 extending in the same measurement directions x, y.

[0099]

[0100] in, The position value of the first measurement direction x for the midpoint M of the first component 10; and

[0101]

[0102] in, The position value of the second measurement direction y for the midpoint M of the first component 10.

[0103] The spacing between the first component 10 and the second component 20 can be determined in a variety of ways, because each of the first field interaction elements 10.X1, 10.X2, 10.Y1, 10.Y2 or the field interaction pair 10.PX1, 10.PX2, 10.PY1, 10.PY2 provides at least one spacing value Z_X1, Z_X2, Z_Y1, Z_Y2:

[0104]

[0105] in, The spacing value used for determination in the third measurement direction z comes from the first field interaction elements 10.X1, 10.X2 or the field interaction pair 10.PX1, 10.PX2 extending in the first measurement direction x.

[0106]

[0107] in, The spacing value used for determination in the third measurement direction z comes from the first field interaction element 10.Y1, 10.Y2 or the field interaction pair 10.PY1, 10.PY2 extending in the second measurement direction y.

[0108] As the transmitted value of the measured distance between the first component 10 and the second component 20 (i.e., the distance between the midpoint M), it is possible to obtain the transmission value of the distance between the two measured distance values. Determine the average value:

[0109]

[0110] in, The average spacing used for the midpoint M of the first component 10 relative to the second component 20.

[0111] Able to use the interval values ​​of two measurements The deviation between them, in order to declare the quality of the measurement result in the third measurement direction z:

[0112]

[0113] Here, D_Z is used as the first mass parameter, which allows us to declare the mass of the measurement result in the third measurement direction z.

[0114] Figure 6a and Figure 6b A schematic top view of the inductive position measuring device 1 is shown, wherein only a plurality of paired first field interaction elements 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2" are shown in the first component 10. The first and second components 10, 20 are placed opposite each other and arranged in two parallel planes, thereby forming an air gap between the first and second components 10, 20. Figure 6a It is in the first position. Figure 6b Show Figure 6a The first component 10 is now deflected and occupies the second position. During the transition from the first to the second position, the first component 10 completes a relative rotation about a coordinate axis along the third measurement direction z. Here, the second component 20 remains stationary and does not move. The inductive position measuring device 1 is capable of determining and evaluating one or more relative rotations of the first component 10 in the three measurement directions x, y, and z.

[0115] When determining the relative positions of the first component 10 and the second component 20, the relative rotation of the coordinate axes in the first measurement direction x can be determined, for example, as follows:

[0116]

[0117] Wherein, rot(X) quantifies the rotation value around the coordinate axis of the first measurement direction x, and Dx quantifies the spacing between the two first field interaction elements 10.X1, 10.X2 or the field interaction pair 10.PX1, 10.PX2, which measures the linear position in the first measurement direction x.

[0118] The relative rotation about the coordinate axis in the second measurement direction can also be determined in a similar way:

[0119]

[0120] Here, rot(Y) quantifies the rotation value around the coordinate axis of the second measurement direction y, and Dy quantifies the spacing between the two first field interaction elements 10.Y1, 10.Y2 or the field interaction pair 10.PY1, 10.PY2, ​​which measures the linear position in the second measurement direction y.

[0121] The rotation about the coordinate axis in the third measurement direction can be calculated via equations.

[0122]

[0123] In this implementation, rot(Z_X) represents the rotation value about the coordinate axis of the third measurement direction z based on the position values ​​X1, X2, and Dx represents the spacing between the two first field interaction elements 10.X1, 10.X2 or the field interaction pair 10.PX1, 10.PX2, which measures the linear position in the first measurement direction x, or alternatively via the equation

[0124]

[0125] Where rot(Z_Y) represents the rotation value around the coordinate axis of the third measurement direction z based on the position values ​​Y1, Y2, and Dy represents the distance between the two first field interaction elements 10.Y1, 10.Y2 or the field interaction pair 10.PY1, 10.PY2, ​​which measures the linear position in the second measurement direction y.

[0126] Because the independent rotation values ​​rot(Z_X) and rot(Z_Y) are redundant, they can be used to determine the average value of the rotation about the coordinate axis in the third measurement direction z.

[0127]

[0128] in, It is the average value of the rotation around the third z-axis.

[0129] The mass parameter D_rot(Z) can be quantified by forming a difference from two independent rotation values ​​rot(Z_X) and rot(Z_Y), which can be introduced as information about the reliability of the measurements in the first and second measurement directions x and y.

[0130] D_rot(Z)=rot(Z_X)-rot(Z_Y),

[0131] D_rot(Z) is used as the second mass parameter, which allows us to declare the reliability of the rotation value in the third measurement direction z.

[0132] Therefore, the inductive position measuring device 1 measures the position values ​​X1, X2, Y1, Y2, and average value during the measurement cycle. In addition to the spacing values ​​Z_X1, Z_X2, Z_Y1, Z_Y2 and the rotation values ​​rot(X), rot(Y), rot(Z_X), rot(Z_Y), two additional mass parameters D_Z and D_rot(Z) are provided. The smaller the values ​​of these mass parameters, the more accurate the measurement results of the inductive position measuring device 1, or the more reliable the position and spacing values.

[0133] For example, mass parameters D_Z and D_rot(Z) can be used to generate a fault signal when D_Z and D_rot(Z) exceed predetermined thresholds. Alternatively or complementaryly, exceeding the thresholds can lead to the introduction of optimization methods to correct the transverse sensitivity of the individual first field interaction elements 10.X1, 10.X2, 10.Y1, 10.Y2 or the field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2.

[0134] like Figure 6a and Figure 6b As schematically shown, the position determination is preferably based on the field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 that form sufficiently strong coupling, i.e., the position determination is based on the field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 and the second field interaction element 20.1 to 20.n that are at least partially overlapping in a top view when viewed in the third measurement direction z. Advantageously, the first field interaction elements 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2" are designed to be larger than the second field interaction elements 20.1 to 20.n, such that the plurality of second field interaction elements 20.1 to 20.n always overlap with at least one first field interaction element 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2". Specifically, the receiving elements 10.23, 10.24, 10.25, 10.26 of the first field interaction elements 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2" are superimposed with a plurality of second field interaction elements 20.1 to 20.n.

[0135] Figure 7 A schematic cross-section of the first and second components 10, 20 of the inductive position measuring device 1 is shown.

[0136] The first component 10 includes an evaluation electronics 10.3, which applies a predetermined excitation signal S1 to each individual field interaction element 10.X1, 10.X2, 10.Y1, 10.Y2 or each individual field interaction pair 10.PX1, 10.PX2, 10.PY1, 10.PY2. Specifically, when applied to the first field interaction elements 10.X1, 10.X2, 10.Y1, 10.Y2 or the field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2, ​​the excitation signal S1 is transmitted in the form of an electromagnetic field or one or more electromagnetic waves via at least one excitation element 10.1. The excitation signal S1 is transmitted by component 10 in the direction of the second component 20 and reaches at least one, and preferably multiple, second field interaction elements 20.1 to 20.n. The excitation signal S1 is modulated on the second field interaction elements 20.1 to 20.n and transmitted back to the first component 10 by the second component 20 in the form of an electromagnetic field or one or more electromagnetic waves in the form of at least one received signal S2.

[0137] Subsequently, the received signal S2 is detected by at least one first field interaction element 10.X1, 10.X2, 10.Y1, 10.Y2 or field interaction pair 10.PX1, 10.PX2, 10.PY1, 10.PY2 and the signal is evaluated by the evaluation electronics 10.3.

[0138] The evaluation electronic device 10.3 may include, for example, a microprocessor, an oscillating circuit, an ASIC, and multiple multiplexers.

[0139] The position values ​​X1, X2, Y1, Y2 and the spacing values ​​Z_X1, Z_X2, Z_Y1, Z_Y2, determined by signal evaluation, are used to determine the previously described average value, rotation value and mass parameters.

[0140] Preferably, the modulation of the excitation signal S1 is performed in the second field interaction elements 20.1 to 20.n by constructing eddy currents.

[0141] Preferably, each of the second field interaction elements 20.1 to 20.n is structurally identical, and all the second field interaction elements 20.1 to 20.n are arranged equidistantly from each other in the grid.

[0142] According to the absolute measurement method, the position is determined within a pre-defined measurement area. The measurement area depends on the lengths of the first field interaction elements 10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2" in the corresponding measurement directions x and y, or on the generated 0° and 90° signals.

[0143] At the start of the measurement, the first and second components 10, 20 are oriented mutually defining each other within the measurement area, for example by centering the first component 10 relative to the second component 20 (see...). Figure 6a If there is a relative deflection of the first component 10 relative to the second component 20, then the absolute position of the first component in the measurement area can be determined.

[0144] Preferably, the area of ​​the second interaction surface 21 is less than or equal to the area of ​​the measurement region.

Claims

1. Inductive position measuring device (1) comprising a first component (10) having a first interaction surface (11) and a second component (20) having a second interaction surface (21), wherein the components (10, 20) are arranged opposite to each other in a third measuring direction (z) and are movable relative to each other, wherein the second interaction surface (21) is larger than the first interaction surface (11), wherein the first component (10) comprises a plurality of first field interaction elements (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2") arranged parallel to the first interaction surface (21), wherein the second component (20) comprises a plurality of second field interaction elements (20.1 to 20.n) arranged in a flat distribution on the second interaction surface (21), wherein the first field interaction elements (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2") and the second field interaction elements (20.1 to 20.n) are capable of generating an electromagnetic interaction, characterized in that at least one of the first field interaction elements (10.X1, 10.X2; 10.X1', 10.X1", 10.X2', 10.X2") is arranged along a first measuring direction (x) and at least one further first field interaction element (10.Y1, 10.Y2; 10.Y1', 10.Y1", 10.Y2', 10.Y2") is arranged along a second measuring direction (y), and the first field interaction elements (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2") each comprise at least one excitation element (10.1; 10.2) for generating an electromagnetic field and at least one receiving element (10.21, 10.22; 10.23, 10.24) for receiving an electromagnetic field.

2. Inductive position measuring device according to claim 1, characterized in that the first field interaction elements (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2") are configured as elongated linear sensors and the first measuring direction (x) and the second measuring direction (y) extend perpendicular to each other. ​ ​ 10.24，10.25，10.26)。 ​ ​ 3. Inductive position measuring device according to at least one of the preceding claims, characterized in that The first field interaction elements (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2") each comprise a first receiving element (10.21; 10.23, 10.25) and a second receiving element (10.22; 10.24, 10.26), which have a periodic course with a constant period length (T1; T2), wherein the receiving elements (10.21, 10.22; 10.23, 10.24, 10.25, 10.26) are arranged in the first or second measurement direction (x, y) offset by a quarter of the period length (T1; T2) of the receiving elements relative to one another, and The first field interaction elements each comprise an excitation element (10.1; 10.2), which surrounds the two receiving elements (10.21, 10.22; 10.23, 10.24, 10.25, 10.26).

4. Inductive position measuring device according to at least one of the preceding claims, characterized in that The first assembly (10) comprises four first field interaction elements (10.X1, 10.X2, 10.Y1, 10.Y2), which are arranged in the first interaction surface (21) and are each arranged perpendicularly relative to one another.

5. Inductive position-measuring device according to Claims 3 and 4, characterized in that The receiving elements (10.21, 10.22) of the four first field interaction elements (10.X1, 10.X2, 10.Y1, 10.Y2) are configured in such a way that the first field interaction elements have a swing width (SB1) corresponding to at least one period length (T1).

6. An inductive position measuring device according to any one of claims 1 to 3, characterized in that The first assembly (10) comprises eight first field interaction elements (10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2"), which are arranged in the first interaction surface (21) and are arranged in four groups as pairs of parallel field interaction pairs (10.PX1, 10.PX2, 10.PY1, 10.PY2), wherein the four groups of field interaction pairs (10.PX1, 10.PX2, 10.PY1, 10.PY2) are each arranged perpendicularly relative to one another.

7. An inductive position measuring device according to claim 3 and 6, characterized in that The first receiving elements (10.23, 10.25) of at least one group of field interaction pairs (10.PX1, 10.PX2, 10.PY1, 10.PY2) are identically configured and are connected in series; The second receiving elements (10.24, 10.26) of at least one group of field interaction pairs (10.PX1, 10.PX2, 10.PY1, 10.PY2) are identically configured and are connected in series; The first receiving elements (10.23, 10.25) of at least one group of field interaction pairs (10.PX1, 10.PX2, 10.PY1, 10.PY2) are identically configured and are connected in series; The second receiving elements (10.24, 10.26) of at least one group of field interaction pairs (10.PX1, 10.PX2, 10.PY1, 10.PY2) are identically configured and are connected in series; The receiving elements (10.23, 10.24, 10.25, 10.26) of the field interaction pairs (10.PX1, 10.PX2, 10.PY1, 10.PY2) are configured in such a way that the receiving elements have a swing width (SB2) which is less than half the period length (T2); The distance (V3) between two receiving elements (10.23, 10.24; 10.25, 10.26) within at least one group of field interaction pairs (10.PX1, 10.PX2, 10.PY1, 10.PY2) is half the period length (T2).

8. Inductive position measuring device according to at least one of the preceding claims, characterized in that The second assembly (20) is not connected to an active energizing device and a data processing device.

9. Inductive position measuring device according to at least one of the preceding claims, characterized in that The second field interaction elements (20.1 to 20.n) are configured as quadrilaterals, in particular as squares, and The second field interaction elements have the same size and are arranged uniformly in a grid on the second interaction surface (21).

10. Inductive position measuring device according to at least one of the preceding claims, characterized in that The second field interaction elements (20.1 to 20.n) are produced using planar technology, in particular by thick-film technology and / or thin-film technology.

11. A method for operating an inductive position measuring device according to at least one of the preceding claims, characterized in that a predetermined excitation signal (S1) is transmitted to the second assembly (20) under the condition that at least one first field interaction element (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2") is applied, the received signal (S2) acting on the at least one first field interaction element (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2") is subsequently measured individually, wherein the linear position information (X1, X2, Y1, Y2) and / or the distance information (Z_X1, Z_X2, Z_Y1, Z_Y2) of the at least one first field interaction element (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2') is determined by means of a corresponding signal evaluation of the at least one received signal (S2).

12. The method according to claim 11, characterized in that the relative position of the first assembly (10) and the second assembly (20) is determined in at least four degrees of freedom by means of the inductive position measuring device (1).

13. The method according to one of claims 11 or 12, characterized in that At least one first quality parameter is derived from the position information (X1, X2, Y1, Y2) and / or spacing information (Z_X1, Z_X2, Z_Y1, Z_Y2) of the first field interaction elements (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2"), which position information and / or spacing information determines the position information (X1, X2; Y1, Y2) and / or spacing information (Z_X1, Z_X2, Z_Y1, Z_Y2) with respect to the same measurement direction (x, y, z).

14. The method according to any one of claims 11 to 13, characterized in that At least one first quality parameter is derived from the position information (X1, X2, Y1, Y2) and / or spacing information (Z_X1, Z_X2, Z_Y1, Z_Y2) of the first field interaction elements (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2"), which position information and / or spacing information determines the position information (X1, X2; Y1, Y2) and / or spacing information (Z_X1, Z_X2, Z_Y1, Z_Y2) with respect to the same measurement direction (x, y, z).

10. The method according to claim 9, characterized in that At least one rotation information (rot(X), rot(Y), rot(Z)) around an axis in a direction along the measurement direction (x, y, z) is determined from the position information (X1, X2, Y1, Y2) and / or spacing information (Z_X1, Z_X2, Z_Y1, Z_Y2) of the first field interaction elements (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2").

15. The method according to claim 14, characterized in that At least one second quality parameter is derived from at least one of the rotation information (rot(X), rot(Y), rot(Z)).

16. The method according to claims 13 and 15, characterized in that A fault signal is issued and / or an optimization method is performed depending on the first quality parameter and / or the second quality parameter.

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