Flying probe testing device
By employing a ring-shaped structure and a buffer structure with a clearance groove in the flying probe testing device, the problem of bending deformation of the substrate caused by unilateral force is solved, the motion accuracy and testing precision of the probe are improved, and efficient and high-precision flying probe testing is achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-11-06
- Publication Date
- 2026-03-10
AI Technical Summary
In existing flying probe testing devices, the linear motor is fixedly installed on one side of the support base, causing the base to bend and deform, which affects the probe's movement trajectory and reduces the testing accuracy.
The system adopts a wraparound structure, with the first guide structure and the first linear motor arranged on one side of the substrate and the second guide structure arranged on the other side. The two structures are connected by a movable seat, which disperses the weight and magnetic attraction of the linear motor, reduces the bending deformation of the substrate, and limits the deformation of the slide plate through the clearance groove and buffer structure, thus ensuring the straightness of the substrate.
It improves the accuracy of probe movement and testing precision, enhances the reliability and efficiency of flying probe testing, and achieves both lightweight and high precision in the equipment.
Smart Images
Figure CN121633781A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of circuit board detection, and in particular to a flying probe testing device. BACKGROUND
[0002] In the related art, flying probe testing devices generally use linear motors to drive testing probes to achieve high-throughput testing at high speed and high acceleration. However, since the linear motor is fixedly installed on one side of the bearing base, the weight of the linear motor and the magnetic attraction generated thereby only act on one side of the bearing base, causing the bearing base to bend and deform. The deformation of the base destroys the straightness of the guide rail installed thereon, causing the motion trajectory of the probe to deviate, thereby reducing the testing accuracy of the flying probe testing. SUMMARY
[0003] The present application aims to at least solve one of the technical problems existing in the prior art. To this end, the present application proposes a flying probe testing device capable of reducing the bending and deformation of the substrate caused by one-sided stress, thereby ensuring the straightness of the substrate.
[0004] According to the flying probe testing device of the first aspect of the present application, the flying probe testing device comprises a substrate, a first linear motor, a first guide structure, a second guide structure and a moving seat, the substrate has a first side and a second side facing away from each other; the first linear motor is arranged on the first side, the first linear motor comprises a first stator and a first mover, the first stator is connected to the substrate; the first guide structure is arranged on the first side and is arranged side by side with the first linear motor; the second guide structure is arranged on the second side; one side of the moving seat is connected to the first mover and the first guide structure respectively, and the other side is connected to the second guide structure, the moving seat is used for installing a probe; wherein the first guide structure, the first linear motor and the second guide structure are arranged in sequence around the substrate, the first mover is configured to move the moving seat relative to the first stator, and the first guide structure and the second guide structure are used to limit the movement of the moving seat in a first direction.
[0005] According to the flying probe testing device of the present application, at least the following beneficial effects are achieved: The flying probe testing device of the embodiment of the present application arranges the first guide structure and the first linear motor on the first side of the substrate, arranges the second guide structure on the second side of the substrate, and simultaneously connects the structures on the two sides by using the moving seat, thereby forming a surrounding structure around the substrate; based on this, when the first linear motor works, its self weight and magnetic attraction are dispersed to the first guide structure and the second guide structure on the two sides of the substrate through the moving seat, the bending deformation of the substrate caused by the force on one side is reduced, the straightness of the substrate is ensured, the motion accuracy of the moving seat and the probe installed thereon is improved, and the accuracy and reliability of the flying probe testing are improved.
[0006] According to some embodiments of the present application, the first guide structure and the first linear motor are arranged in a second direction, the second direction being perpendicular to the first direction, and the first guide structure and the second guide structure are arranged in a staggered manner in the second direction. According to some embodiments of the present application, the moving seat comprises a connecting plate and a mounting plate, the connecting plate is arranged on the first side, the connecting plate is connected with the first guide structure and the first linear motor respectively, and the mounting plate is arranged on one side of the substrate along the second direction, one end of the mounting plate is connected with the connecting plate, and the other end is bent towards the substrate to form a bent part connected with the second guide structure.
[0007] According to some embodiments of the present application, the first side and the second side are arranged in a third direction, the third direction being perpendicular to the first direction and the second direction respectively, the mounting plate comprises a main body and the bent part, the main body is arranged on one side of the substrate along the second direction and extends along the third direction, one end of the main body along the third direction is connected with the end of the connecting plate along the second direction, and the other end is integrally formed with the bent part, and the bent part and the connecting plate extend along the second direction respectively.
[0008] According to some embodiments of the present application, the flying probe testing device further comprises a second linear motor, a base and a sliding plate, the second linear motor is installed on the base and is used to drive the sliding plate to move along a third direction, the third direction being perpendicular to the first direction, and the substrate is connected with the sliding plate.
[0009] According to some embodiments of the present application, the second linear motor comprises a second stator and a second rotor, the second stator is connected with the base, the second rotor is connected with the sliding plate, the sliding plate is provided with a clearance groove, the clearance groove is configured to divide the sliding plate into a fixed part and a deformed part, the fixed part is fixedly connected with the substrate, and the deformed part is connected with the substrate through a buffer structure. The buffer structure comprises a connecting piece and a connecting hole, the connecting piece is arranged on the deformation part, the connecting hole is arranged on the base plate, the connecting piece is arranged in the connecting hole, the connecting hole is used to limit the deformation of the connecting piece along the radial direction of the connecting hole, the connecting piece is configured to be deformed along the axial direction of the connecting hole under the magnetic attraction between the second mover and the second stator, the axial direction of the connecting hole is arranged along the second direction, and the third direction, the first direction and the second direction are perpendicular to each other.
[0010] According to some embodiments of the application, the two avoidance grooves are arranged along the first direction and respectively extend along the third direction, the deformation part is formed between the two avoidance grooves, the connecting piece is arranged at the midpoint between the two avoidance grooves, and the base plate is connected to the avoidance grooves away from the other avoidance groove through a fastener.
[0011] According to some embodiments of the application, the flying probe test device further comprises a third guide structure arranged between the base and the sliding plate, the third guide structure comprises a third sliding block and a third guide rail, the third guide rail is arranged on the base and extends along the third direction, the third sliding block is in sliding connection with the third guide rail, a part of the third sliding block is connected to the deformation part, and the other part is connected to the fixed part, and along the first direction, the third sliding block is arranged away from the connecting piece.
[0012] According to some embodiments of the application, the flying probe test device further comprises a mounting seat and a third linear motor, the mounting seat is connected to the moving seat, and the third linear motor is mounted on the mounting seat and used to drive the probe to move towards or away from the workpiece.
[0013] According to some embodiments of the application, the third linear motor comprises a third stator and a third mover, the third stator is connected to the mounting seat, the mounting seat is provided with a fourth guide rail arranged side by side with the third stator, the third mover is connected with the probe and configured to be movable along the third stator, and the third mover is connected with a fourth sliding block in sliding connection with the fourth guide rail. Additional aspects and advantages of the application will be made apparent from the following description. BRIEF DESCRIPTION OF DRAWINGS
[0014] The application will be further described below in conjunction with the drawings and embodiments, wherein: Figure 1 The structure schematic view of the flying probe test device according to an embodiment of the application; Figure 2Another structural schematic view of a flying probe testing device according to an embodiment of the present application; Figure 3 A structural schematic view at a substrate according to an embodiment of the present application; Figure 4 A side view schematic view at a substrate according to an embodiment of the present application; Figure 5 A partial schematic view of a flying probe testing device according to an embodiment of the present application; Figure 6 A partial cross-sectional view of a flying probe testing device according to an embodiment of the present application; Figure 7 A top view schematic view of a slide according to an embodiment of the present application; Figure 8 An assembly schematic view of a slide and a second mover according to an embodiment of the present application; Figure 9 A structural schematic view at a mounting seat according to an embodiment of the present application.
[0015] Reference signs: Flying probe testing device 1000; Substrate 100; first side 110; second side 120; First linear motor 200; first stator 210; first mover 220; First guide structure 300; first guide rail 310; first sliding block 320; Second guide structure 400; second guide rail 410; second sliding block 420; Moving seat 500; connecting plate 510; mounting plate 520; main body 521; bending part 522; Probe 600; fourth sliding block 610; Base 700; second linear motor 710; second stator 711; second mover 712; third guide structure 720; third sliding block 721; third guide rail 722; Slide 800; avoidance slot 810; fixed part 820; deformation part 830; buffer structure 840; connecting piece 841; connecting hole 842; limiting slot 850; abutting face 851; plate body 860; extension part 870; avoidance slot 880; Mounting seat 900; third linear motor 910; third stator 911; third mover 912; fourth guide rail 920. DETAILED DESCRIPTION
[0016] Embodiments of the present application are described below in the detailed description and illustrated in the accompanying drawings by using examples, which are exemplary only and are not to be construed as limiting the present application. It should be noted that for the purposes of this application, like numbers in the figures refer to like or similar elements, features and steps throughout.
[0017] In the description of the present application, it needs to be understood that the orientation description, such as the upper, lower, etc. orientation or position relationship is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present application and simplifying the description, and is not intended to indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.
[0018] In the description of the present application, if there is a description of first, second, etc. for the purpose of distinguishing technical features, it cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or the sequence of technical features indicated.
[0019] In the description of the present application, unless otherwise explicitly limited, the words such as arrangement, installation, connection, etc. should be broadly understood, and the person skilled in the art can reasonably determine the specific meaning of the above words in the present application in combination with the specific content of the technical solution.
[0020] It can be understood that in order to meet the requirement of high efficiency, the motion module of the existing flying probe test equipment must start, stop and change direction at a very high speed and acceleration. When the probe reaches above the target pad, the needle tip will still have a small amplitude vibration, and the probe needs additional waiting time to stabilize, which is contrary to the goal of high efficiency. However, if the waiting time is forcibly shortened to pierce, the risk of misjudgment will be significantly increased.
[0021] At the same time, the mover and stator of the linear motor driving the high-speed motion of the probe will generate a large magnetic attraction force between them. In order to resist the influence of the magnetic attraction force on the straightness of the track, the related technology designs a very large base to obtain sufficient structural rigidity. However, the large and heavy base brings a large inertia, which further amplifies the high-speed jitter problem of the probe, making it difficult to balance the high precision and high efficiency of the flying probe test.
[0022] In order to solve the above problems, some embodiments of the present application propose a flying probe test device 1000 suitable for flying probe test with high precision and high efficiency, which can reduce the bending deformation of the substrate 100 caused by single-sided stress without increasing the thickness and weight of the substrate 100, so that the straightness of the substrate 100 is guaranteed. For details, refer to Figures 1 to 9 The flying probe test device 1000 is described.
[0023] Referring to Figure 1 and Figure 2 In the embodiment of the present application, the flying probe testing device 1000 comprises a base plate 100, a first linear motor 200, a first guide structure 300, a second guide structure 400 and a moving seat 500, wherein the first linear motor 200 is arranged on the first side 110 of the base plate 100, the first guide structure 300 is arranged on the surface of the first side 110 of the base plate 100, the second guide structure 400 is arranged on the surface of the second side 120 of the base plate 100, and the moving seat 500 is connected with the first linear motor 200 and the first guide structure 300 on one side and connected with the second guide structure 400 on the other side. Figure 3 It can be understood that the base plate 100 as the carrying body 521 can be made of aluminum alloy or carbon fiber composite material. In order to reduce the thickness of the base plate 100, the thickness thereof can be controlled in the range of 10-30 mm. In the embodiment, the base plate 100 has a first side 110 and a second side 120 opposite to each other.
[0024] Specifically, referring to Figure 3 and Figure 4 In the embodiment of the present application, the first linear motor 200 is arranged on the first side 110, wherein the first linear motor 200 comprises a first stator 210 and a first mover 220, the first stator 210 is connected to the base plate 100, specifically, the first stator 210 can be fixed to the surface of the first side 110 by bonding or bolt connection. The first guide structure 300 is also arranged on the surface of the first side 110 and arranged side by side with the first linear motor 200, and the second guide structure 400 is arranged on the surface of the second side 120.
[0025] Continuing to refer to Figure 3 and Figure 4 In the embodiment of the present application, the moving seat 500 for mounting the probe 600 is connected with the first mover 220 and the first guide structure 300 on one side and connected with the second guide structure 400 on the other side. It can be understood that, in the projection plane perpendicular to the length direction of the base plate 100, the first guide structure 300, the first linear motor 200 and the second guide structure 400 are arranged around the base plate 100 in sequence to form a ring structure.
[0026] In the embodiment of the present application, the first stator 210 is arranged along the length direction of the base plate 100, and the first mover 220 cooperates with the first stator 210 to drive the moving seat 500 to move along the length direction of the base plate 100 relative to the first stator 210, wherein the first guide structure 300 and the second guide structure 400 are used to limit the movement of the moving seat 500 in the first direction. It should be noted that the length direction of the base plate 100 is arranged along the first direction.
[0027] Specifically, in order to reduce the influence of the self-weight of the first linear motor 200 and the magnetic attraction generated when the first linear motor 200 is running on the substrate 100, the embodiment of the present application disperses the stress by means of the guide structure for guiding, so that the bending moment originally concentrated on one side is converted into balanced shearing force on both sides. By arranging the first guide structure 300 and the first linear motor 200 on the first side 110 of the substrate 100, arranging the second guide structure 400 on the second side 120 of the substrate 100, and connecting the structures on both sides by means of the moving seat 500, a ring-shaped structure around the substrate 100 is formed.
[0028] Based on this, when the first linear motor 200 is working, its self-weight and magnetic attraction are dispersed to the first guide structure 300 and the second guide structure 400 on both sides of the substrate 100 through the moving seat 500, which reduces the bending deformation of the substrate 100 caused by unilateral stress, so that the straightness of the substrate 100 is guaranteed, and the first guide structure 300 and the second guide structure 400 installed thereon always maintain high straightness, thereby improving the motion accuracy of the moving seat 500 and the probe 600 installed thereon, and further improving the accuracy and reliability of the flying probe test.
[0029] It should be emphasized that the embodiment of the present application does not rely on increasing the thickness and weight of the substrate 100 to resist deformation. The embodiment can be designed to be thinner and lighter while meeting the high precision requirement, so as to realize the lightweight of the entire device. The lightweight of the device reduces the inertia of the moving parts, so that the first linear motor 200 can drive the moving seat 500 to achieve higher acceleration and moving speed with smaller energy consumption, thereby improving the test efficiency of the flying probe test.
[0030] Referring to FIGS. 1 to 5, Figure 3 and Figure 4 In the embodiment of the present application, the first guide structure 300 and the first linear motor 200 are arranged along a second direction, and the second direction is perpendicular to the first direction. The first guide structure 300 and the second guide structure 400 are arranged in a staggered manner along the second direction. Specifically, the second direction can be the up-down direction. In other words, in the embodiment, the installation positions of the first linear motor 200 and the second guide structure 400 are higher than the installation position of the first guide structure 300.
[0031] Specifically, the movement of the moving seat 500 is constrained by the first guide structure 300 and the second guide structure 400, the first guide structure 300 and the second guide structure 400 are arranged in the second direction with a distance, so that the constraint points of the first guide structure 300 and the second guide structure 400 are apart in the second direction, and based on this, the first guide structure 300, the second guide structure 400, and the connecting point of the first linear motor 200 and the moving seat 500 form a triangle, thereby improving the resistance of the torsional moment of the ring structure, suppressing the angular vibration and yaw of the moving seat 500 in the dynamic process, and further ensuring that the movement trajectory of the probe 600 is always accurate.
[0032] Referring to Figure 3 and Figure 4 In the embodiment of the present application, the moving seat 500 includes a connecting plate 510 and a mounting plate 520, the connecting plate 510 is arranged on the first side 110, and the connecting plate 510 is connected with the first guide structure 300 and the first linear motor 200 respectively. Specifically, the connecting plate 510 is a rigid plate structure for connecting the first guide structure 300 and the power output end of the first linear motor 200, which can be made of aluminum alloy or carbon fiber composite material. The connecting plate 510 is fixed with the first mover 220 and the first guide structure 300 by bolts or welding, for transmitting the driving force of the first linear motor 200 and bearing the lateral load when the moving seat 500 moves.
[0033] Continuing to refer to Figure 3 and Figure 4 In the embodiment of the present application, the mounting plate 520 is located on one side of the base plate 100 along the second direction, one end of the mounting plate 520 is connected with the connecting plate 510, and the other end is bent towards the base plate 100 to form a bent portion 522 connected with the second guide structure 400. Specifically, the mounting plate 520 is a support structure for mounting the probe 600, which can be made of a stamped steel plate or a cast aluminum alloy part. The main body 521 of the mounting plate 520 extends in the third direction to provide sufficient mounting space, and the bent portion 522 is formed by a bending process and is connected with the guide rail or slider of the second guide structure 400 to constrain the movement of the moving seat 500 on the second side 120.
[0034] Specifically, in the embodiment of the present application, the connecting plate 510 is rigidly connected with the first mover 220 and fixed with the sliding part of the first guide structure 300, so that the linear motion of the first mover 220 can drive the connecting plate 510 to move in the first direction synchronously. The main body 521 of the mounting plate 520 extends to the side of the base plate 100 in the third direction, and the bent part 522 is bent from the end of the main body 521 to the base plate 100 and connected with the second guide structure 400. When the first linear motor 200 drives the moving seat 500, the first guide structure 300 and the second guide structure 400 constrain the moving seat 500 on both sides of the base plate 100 respectively, and the design of the bent part 522 enables the mounting position of the second guide structure 400 to be staggered with the first guide structure 300 in the second direction, thereby reducing the risk of bending deformation of the base plate 100 caused by unilateral stress.
[0035] Referring to Figure 3 and Figure 4 In the embodiment of the present application, the first side 110 and the second side 120 are arranged back to the third direction, which is perpendicular to the first direction and the second direction respectively. In this embodiment, the third direction is the thickness direction of the base plate 100. Specifically, the mounting plate 520 includes the main body 521 and the bent part 522. The main body 521 is located on one side of the base plate 100 in the second direction and extends in the third direction. One end of the main body 521 is connected with the end of the connecting plate 510 in the second direction, and the other end is integrally formed with the bent part 522. The bent part 522 and the connecting plate 510 extend in the second direction respectively. The main body 521 refers to the plate-shaped structure of the mounting plate 520 extending in the third direction, which can be formed by casting with metal material. It is used to carry the probe 600 and transmit the driving force of the moving seat 500.
[0036] Continuing to refer to Figure 3 and Figure 4 In the embodiment of the present application, one end of the main body 521 is connected with the connecting plate 510, and the other end is bent to form the bent part 522, thereby forming a C-shaped structure. This structure can more effectively transmit and balance the force and reaction force from the first linear motor 200 and the first guide structure 300 and the second guide structure 400 on both sides, ensuring that the moving seat 500 itself does not deform under dynamic load. On the premise of ensuring rigidity, the weight is optimized, which helps to reduce the motion inertia, further taking into account high precision and high efficiency.
[0037] Referring to Figure 3 and Figure 4As shown in FIG. 1, in the embodiment of the present application, the flying probe test device 1000 further comprises a second linear motor 710, a base 700 and a sliding plate 800, wherein the base 700 is a rigid structure made of marble, the second linear motor 710 is installed on the base 700 and is used to drive the sliding plate 800 to move in a third direction, the third direction is perpendicular to the first direction, and the substrate 100 is connected to the sliding plate 800. It can be understood that the second linear motor 710 can drive the sliding plate 800 to move, thereby driving the substrate 100 and the probe 600 installed on the sliding plate 800 to move in the third direction.
[0038] Specifically, referring to Figure 1 and Figure 2 As shown in FIG. 1, in the embodiment of the present application, the second linear motor 710 comprises a second stator 711 and a second mover 712, the second stator 711 is connected to the base 700, and the second mover 712 is connected to the sliding plate 800. Wherein the second stator 711 is arranged along the third direction of the substrate 100, and the second mover 712 cooperates with the second stator 711 to drive the sliding plate 800 to move in the third direction relative to the second stator 711. It should be noted that during the operation of the second linear motor 710, the magnetic attraction force generated between the second stator 711 and the second mover 712 will cause the sliding plate 800 to deform in the second direction, and further, the deformation of the sliding plate 800 will be transmitted to the substrate 100, thereby causing the bending deformation of the substrate 100.
[0039] In order to solve the above problems, referring to Figure 1 and Figure 2 As shown in FIG. 1, in the embodiment of the present application, the sliding plate 800 is provided with an empty slot 810, the empty slot 810 is a hollow area opened on the sliding plate 800, and can be formed by milling. Specifically, the empty slot 810 is configured to divide the sliding plate 800 into a fixed part 820 and a deformation part 830. It should be noted that the fixed part 820 is rigid as a whole, and the deformation part 830 can deform in the second direction, so that when the sliding plate 800 bears the magnetic attraction force in the second direction, the deformation of the sliding plate 800 will occur mainly in the deformation part 830. In combination with Figure 5 It can be understood that along the width direction of the empty slot 810, the part of the sliding plate 800 located inside the empty slot 810 is the deformation part 830, and the part located outside the empty slot 810 is the fixed part 820, and the deformation part 830 and the fixed part 820 are integrally formed.
[0040] In combination with Figure 7It can be understood that, in the embodiment of the present application, the fixed part 820 is fixedly connected with the substrate 100 by the fastener, and the deformed part 830 is movably connected with the substrate 100 by the buffer structure 840. Specifically, the buffer structure 840 includes a connecting piece 841 and a connecting hole 842, the connecting piece 841 is arranged on the deformed part 830, the connecting hole 842 is arranged on the substrate 100, the connecting piece 841 is arranged in the connecting hole 842, the connecting hole 842 is used to limit the radial deformation of the connecting piece 841, the connecting piece 841 is configured to be deformed in the axial direction of the connecting hole 842 under the magnetic attraction between the second mover 712 and the second stator 711, and the axial direction of the connecting hole 842 is arranged in the second direction, the third direction, the first direction and the second direction are perpendicular to each other.
[0041] Specifically, after the slide plate 800 is divided into the fixed part 820 and the deformed part 830 by the avoidance slot 810, the fixed part 820 is fixedly connected with the substrate 100 by the rigid connection mode, and the deformed part 830 is elastically connected with the substrate 100 by the buffer structure 840. When the magnetic attraction between the second mover 712 and the second stator 711 of the second linear motor 710 is generated, the deformed part 830 can be slightly deformed in the second direction under the action of the magnetic attraction, at this time, the connecting piece 841 is elastically stretched and contracted in the axial direction in the connecting hole 842, and the hole wall of the connecting hole 842 limits the radial deviation of the connecting piece 841. Since the avoidance slot 810 localizes the deformation area of the slide plate 800, the rigid connection between the fixed part 820 and the substrate 100 can maintain the stability of the overall structure of the substrate 100, so that the influence of the overall deformation of the slide plate 800 on the flatness of the substrate 100 is avoided.
[0042] It can be understood that, in the embodiment of the present application, the deformed part 830 is formed by arranging the avoidance slot 810 on the slide plate 800, so that the deformation caused by the magnetic attraction is limited in the local area of the slide plate 800, and the buffer structure 840 allows the deformed part 830 to produce a controllable elastic displacement, and the axial elastic deformation of the connecting piece 841 itself absorbs and buffers the deformation, so that the deformation of the slide plate 800 is avoided to be transmitted to the substrate 100, thereby ensuring the structural stability of the substrate 100 and further improving the accuracy of the moving track of the probe 600.
[0043] It should be noted that, with reference to Figure 7As shown, in this embodiment of the invention, the clearance groove 810 is a U-shaped groove formed by recessing the surface of the slide plate 800 towards the substrate 100 and inward (i.e., away from the substrate 100). Specifically, the clearance groove 810 is a blind groove structure, and its processing depth is less than the overall thickness of the slide plate 800. Therefore, the clearance groove 810 does not penetrate the slide plate 800. Since it does not completely penetrate the slide plate 800, it maximizes the basic integrity and load-bearing strength of the slide plate 800 as a whole structure, avoiding excessive reduction in structural strength or unnecessary vibration problems that may occur due to the use of through grooves.
[0044] Reference Figure 6 As shown, in this embodiment of the invention, two clearance slots 810 are provided, spaced apart along a first direction and extending respectively along a third direction. A deformable portion 830 is formed between the two clearance slots 810. It should be noted that the extension length of the clearance slot 810 along the third direction is less than the overall length of the slide plate 800. The parallel arrangement of the two clearance slots 810 effectively guides and constrains the deformation caused by magnetic attraction to concentrate in the deformable portion 830, thereby allowing the deformable portion 830 to undergo controllable elastic deformation under the action of magnetic attraction.
[0045] Reference Figure 6 and Figure 7 As shown, in this embodiment of the invention, the connector 841 is installed at the midpoint between the two clearance slots 810, and the substrate 100 is connected to the side of the clearance slot 810 away from the other clearance slot 810 by fasteners. Specifically, the connector 841 is located at the midpoint of the deformable portion 830, so that when the slide plate 800 is subjected to the magnetic attraction force of the second linear motor 710, the elastic deformation of the deformable portion 830 is symmetrically distributed along the third direction. The substrate 100 is fixed to the area of the clearance slot 810 away from the other side by fasteners. This area forms a rigid support structure due to the presence of the clearance slot 810, thereby isolating the substrate 100 from the deformable portion 830 of the slide plate 800. When the second mover 712 and the second stator 711 generate a magnetic attraction force, the deformable portion 830 of the slide plate 800 undergoes axial displacement along the second direction within the connecting hole 842 through the connector 841, while the substrate 100 remains stable because it is fixed to the rigid area, avoiding the tilting of the substrate 100 caused by the local deformation of the slide plate 800.
[0046] Reference Figure 6 and Figure 7As shown, in the embodiment of the present application, the flying probe test device 1000 further comprises a third guide structure 720 arranged between the base 700 and the slide plate 800, wherein the third guide structure 720 refers to a mechanical assembly for constraining the moving track of the slide plate 800 in the third direction, specifically, the third guide structure 720 comprises a third sliding block 721 and a third guide rail 722, and the linear guidance of the moving of the slide plate 800 is realized through the cooperation of the third guide rail 722 and the third sliding block 721. The third guide rail 722 is arranged on the base 700 and extends in the third direction, the third sliding block 721 is slidingly connected with the third guide rail 722, the third sliding block 721 is a moving part which is in sliding cooperation with the third guide rail 722, and a part of the third sliding block 721 is connected with the deformed portion 830 and the other part is connected with the fixed portion 820. In the first direction, the third sliding block 721 is arranged in the first direction and is spaced apart from the connecting piece 841.
[0047] Specifically, when the second linear motor 710 drives the slide plate 800 to move, the third sliding block 721 slides along the third guide rail 722, and since a part of the third sliding block 721 is connected with the elastically deformable deformed portion 830 and the other part is connected with the rigid fixed portion 820, this distributed connection mode can balance the asymmetric load generated during the movement of the slide plate 800. At the same time, the third sliding block 721 is arranged in the first direction and is spaced apart from the connecting piece 841, which avoids the stress superposition between the sliding block and the buffer structure 840, so that when the slide plate 800 bears the magnetic attraction force of the linear motor, the elastic displacement of the deformed portion 830 will not affect the guiding accuracy of the third guide structure 720.
[0048] It can be understood that in the process of high acceleration or deceleration, the driving force in the third direction exerted by the third sliding block 721 on the slide plate 800 can cause the relative displacement or vibration of the deformed portion 830 relative to the fixed portion 820, based on which, the third sliding block 721 of the embodiment of the present application is connected with the deformed portion 830 and the fixed portion 820 respectively, in other words, the third sliding block 721 is designed to span the two sides of the avoidance slot 810, so as to rigidly connect the fixed portion 820 and the deformed portion 830 together in the third direction.
[0049] When the second linear motor 710 outputs the driving force to push the slide plate 800 to accelerate in the third direction, the driving force is transmitted to the entire slide plate 800, and the driving force is synchronously applied to the fixed portion 820 and the deformed portion 830, so that the slide plate 800 moves as a single, complete rigid body. Therefore, the deformed portion 830 will not lag behind the fixed portion 820 in the third direction due to its own inertia, thereby avoiding the relative deformation or vibration between the two.
[0050] It should be noted that the first guide structure 300 and the second guide structure 400 refer to mechanical assemblies for constraining the movement trajectory of the moving seat 500 in the first direction. Specifically, the first guide structure 300 includes a first sliding block 320 and a first guide rail 310, and the second guide structure 400 includes a second sliding block 420 and a second guide rail 410. The linear guidance of the movement of the moving seat 500 is achieved through the cooperation of the first sliding block 320 and the first guide rail 310 and the cooperation of the first sliding block 320 and the first guide rail 310. It should be noted that the substrate 100 is provided with one of the first sliding block 320 and the first guide rail 310, and the moving seat 500 is provided with the other one; the substrate 100 is provided with one of the second sliding block 420 and the second guide rail 410, and the moving seat 500 is provided with the other one.
[0051] Referring to Figure 2 In the embodiment of the application, the flying probe test device 1000 further includes a mounting seat 900 and a third linear motor 910, wherein the mounting seat 900 is connected to the moving seat 500, and the mounting seat 900 is a support structure for carrying the third linear motor 910. Specifically, the mounting seat 900 can be implemented by using a metal plate or a frame structure, and is fixed to the side surface of the moving seat 500 by means of bolts or welding, and is used to transmit the driving force of the third linear motor 910 to the probe 600.
[0052] Continuing to refer to Figure 6 In the embodiment of the application, the third linear motor 910 is installed on the mounting seat 900 and is used to drive the probe 600 to move towards or away from the workpiece. The third linear motor 910 refers to a linear driving device arranged along the movement direction of the probe 600. Specifically, the third linear motor 910 can be implemented by using a moving magnet type or a moving coil type linear motor. The stator of the third linear motor 910 is fixed to the mounting seat 900, and the moving part of the third linear motor 910 is rigidly connected to the probe 600 through a connecting piece 841. The third linear motor 910 directly drives the probe 600 to move along a linear trajectory through electromagnetic action. Specifically, referring to Figure 9 In the embodiment of the application, the third linear motor 910 includes a third stator 911 and a third moving part 912. The third stator 911 is connected to the mounting seat 900, and the mounting seat 900 is provided with a fourth guide rail 920 arranged side by side with the third stator 911. The third moving part 912 is connected to the probe 600 and is configured to be movable along the third stator 911. The third moving part 912 is connected to a fourth sliding block 610 which is in sliding connection with the fourth guide rail 920. In this embodiment, the third stator 911 is arranged in a fourth direction, and the fourth direction is arranged at an angle with respect to the first direction, the second direction and the third direction. The third moving part 912 cooperates with the third stator 911 to drive the probe 600 to move along the fourth length direction with respect to the third stator 911. The fourth sliding block 610 and the fourth guide rail 920 are used to limit the movement of the probe 600 in the fourth direction.
[0053] Specifically, the third stator 911 is fixed to the mounting base 900 and arranged side by side with the fourth guide rail 920, and when the third mover 912 moves along the third stator 911 under the driving of the electromagnetic force, the fourth sliding block 610 synchronously slides along the fourth guide rail 920, so that the movement trajectory of the probe 600 is doubly constrained. The mounting base 900 inherits the positioning reference of the first linear motor 200 and the second guide structure 400 through the connection of the moving base 500, the linear motion of the third mover 912 cooperates with the guiding effect of the fourth guide rail 920, and high-precision linear motion of the probe 600 in the vertical direction is realized, the positioning deviation of the probe 600 caused by lateral deviation of the third mover 912 is avoided, reliable contact of the probe 600 with the test point of the workpiece is ensured, and meanwhile, the compact arrangement of the guide rail and the motor reduces the space occupation of the overall structure.
[0054] Referring to Figure 9 and Figure 9 In the embodiment of the present application, the second stator 711 is provided with a third guide rail 722 on both sides in the first direction, the sliding plate 800 includes a plate body 860 and two extension portions 870, the plate body 860 extends in the first direction, and the two extension portions 870 are respectively arranged at both ends of the plate body 860 in the first direction, each extension portion 870 is provided with a third sliding block 721, and the sliding block is connected with the third guide rail 722 correspondingly. The plate body 860 refers to the main body 521 structure of the sliding plate 800, which can be realized by a rectangular metal plate, and provides basic support for movement by extending in the first direction. The extension portion 870 refers to the extension structure at both ends of the plate body 860, which can be realized by a boss integrally formed with the plate body 860, and is used for mounting the third sliding block 721.
[0055] Continuing to refer to Figure 5 In the embodiment of the present application, a plurality of sliding plates 800 are arranged, and the plurality of sliding plates 800 are arranged at intervals in the third direction, and at least one extension portion 870 of each sliding plate 800 protrudes from the plate body 860 in the third direction to define an avoiding groove 880 with the plate body 860, and the avoiding groove 880 is used for the partial structure of the adjacent sliding plate 800 to extend into. The avoiding groove 880 refers to the space surrounded by the extension portion 870 and the plate body 860, which is used for accommodating the extension portion 870 of the adjacent sliding plate 800 to avoid motion interference.
[0056] Continuing to refer to Figure 7As shown, in the embodiment of the present application, the plurality of sliding plates 800 are arranged at intervals along the third direction, and the extension 870 protrudes to form a clearance 880 that allows the extension 870 of the adjacent sliding plate 800 to be inserted, thereby avoiding the problem of loose structure caused by too large spacing between the sliding plates 800. For example, the extension 870 of a certain sliding plate 800 enters the clearance 880 of the adjacent sliding plate 800, and the two maintain a non-contact state, ensuring the freedom of coordinated movement of the plurality of sliding plates 800, while also being able to improve the compactness between the plurality of sliding plates 800, so that the probes 600 connected to each sliding plate 800 can be more compact and concentrated.
[0057] Referring to Figure 5 As shown, in the embodiment of the present application, the side of the sliding plate 800 facing the base 700 is provided with a limiting groove 850, and the second mover 712 is arranged in the limiting groove 850. The inner wall of the limiting groove 850 includes two abutting surfaces 851 arranged opposite along the first direction, and the two abutting surfaces 851 abut on both sides of the second mover 712 respectively, so as to limit the movement of the second mover 712 along the first direction relative to the sliding plate 800. The limiting groove 850 is a groove structure opened on the side of the sliding plate 800 facing the base 700, which can be formed by milling or precision casting, and is used to accommodate the second mover 712 and constrain the displacement direction thereof.
[0058] Continuing to refer to Figure 5 Figure 8 Figure 8 As shown, in the embodiment of the present application, the abutting surface 851 refers to two plane structures symmetrically distributed along the first direction in the inner wall of the limiting groove 850, which can be ensured to have a flatness by using a grinding process, and is used to form a surface contact constraint with both sides of the second mover 712. Specifically, after the limiting groove 850 is processed on the side of the sliding plate 800 facing the base 700, the second mover 712 is completely embedded in the groove. When the second mover 712 is energized to work, the surfaces on both sides of the second mover 712 are in close contact with the two abutting surfaces 851 of the inner wall of the limiting groove 850. Since the abutting surfaces 851 extend along the first direction and are parallel to each other, the displacement of the second mover 712 along the first direction is mechanically blocked, while the freedom of movement along the third direction is retained. This structure ensures that the second mover 712 will not deviate laterally when driving the sliding plate 800 to move due to electromagnetic attraction or inertial effect, thereby ensuring the straightness of the movement trajectory of the sliding plate 800.
[0059] Of course, the present application is not limited to the above-mentioned embodiments, and those skilled in the art can make equivalent modifications or replacements without departing from the spirit of the present application. These equivalent modifications or replacements are all included in the scope defined by the claims of the present application.
Claims
1. A flying probe test device, characterized in that The flying probe test device comprises: a substrate having a first side and a second side facing away from each other; a first linear motor arranged on the first side, the first linear motor comprising a first stator and a first mover, the first stator being connected to the substrate; a first guide structure arranged on the first side and arranged side by side with the first linear motor; a second guide structure arranged on the second side; a moving seat connected to the first mover and the first guide structure on one side and connected to the second guide structure on the other side, the moving seat being used for mounting a probe; wherein the first guide structure, the first linear motor and the second guide structure are arranged in sequence around the substrate, the first mover is configured to drive the moving seat to move relative to the first stator, and the first guide structure and the second guide structure are used to limit the movement of the moving seat in a first direction.
2. The flying probe testing device of claim 1, wherein, The first guide structure and the first linear motor are arranged in a second direction, the second direction being perpendicular to the first direction, and the first guide structure and the second guide structure are arranged in a staggered manner in the second direction.
3. The flying probe test apparatus of claim 2, wherein, The moving seat comprises a connecting plate and a mounting plate, the connecting plate is arranged on the first side, the connecting plate is connected to the first guide structure and the first linear motor, and the mounting plate is located on one side of the substrate along the second direction, one end of the mounting plate is connected to the connecting plate, and the other end is bent towards the substrate to form a bent portion connected to the second guide structure.
4. The flying probe test apparatus of claim 3, wherein, The first side and the second side are arranged in a third direction, the third direction being perpendicular to the first direction and the second direction, the mounting plate comprises a main body and the bent portion, the main body is located on one side of the substrate along the second direction and extends along the third direction, one end of the main body along the third direction is connected to the end of the connecting plate along the second direction, and the other end is integrally formed with the bent portion, and the bent portion and the connecting plate extend along the second direction respectively.
5. The flying probe testing apparatus of claim 1, wherein The flying probe test device further comprises a second linear motor, a base and a sliding plate, the second linear motor is mounted on the base and used to drive the sliding plate to move in a third direction, the third direction being perpendicular to the first direction, and the substrate is connected to the sliding plate.
6. The flying probe test apparatus of claim 5, wherein, The second linear motor comprises a second stator and a second mover, the second stator is connected to the base, and the second mover is connected to the sliding plate, the sliding plate is provided with an empty slot, the empty slot is configured to divide the sliding plate into a fixed part and a deformed part, the fixed part is fixedly connected to the substrate, and the deformed part is connected to the substrate through a buffer structure; The buffer structure comprises a connecting piece and a connecting hole. The connecting piece is arranged on the deformation part. The connecting hole is arranged on the base plate. The connecting piece is arranged through the connecting hole. The connecting hole is used to limit the deformation of the connecting piece along the radial direction of the connecting hole. The connecting piece is configured to be deformed along the axial direction of the connecting hole under the magnetic attraction between the second mover and the second stator. The axial direction of the connecting hole is arranged along the second direction. The third direction, the first direction and the second direction are perpendicular to each other.
7. The flying probe test apparatus of claim 6, wherein, The two avoidance grooves are arranged along the first direction and extend along the third direction, respectively. The deformation part is formed between the two avoidance grooves. The connecting piece is arranged at the midpoint between the two avoidance grooves. The base plate is connected to the side of the avoidance groove away from the other avoidance groove through a fastener.
8. The flying probe test apparatus of claim 7, wherein, The flying probe test device further comprises a third guide structure arranged between the base and the sliding plate. The third guide structure comprises a third sliding block and a third guide rail. The third guide rail is arranged on the base and extends along the third direction. The third sliding block is in sliding connection with the third guide rail. A part of the third sliding block is connected to the deformation part, and the other part is connected to the fixed part. Along the first direction, the third sliding block is arranged in a spaced manner with the connecting piece.
9. The flying probe testing apparatus of claim 1, wherein, The flying probe test device further comprises a mounting seat and a third linear motor. The mounting seat is connected to the moving seat. The third linear motor is mounted on the mounting seat and is used to drive the probe to move towards or away from the workpiece.
10. The flying probe testing device of claim 9, wherein, The third linear motor comprises a third stator and a third mover. The third stator is connected to the mounting seat. The mounting seat is provided with a fourth guide rail arranged side by side with the third stator. The third mover is connected to the probe and is configured to move along the third stator. The third mover is connected with a fourth sliding block in sliding connection with the fourth guide rail.