Single-needle conduction detection device and method for vertical probe card

Abstract

The invention relates to a single-needle conduction detection device and method for a vertical probe card, and the device comprises a pedestal, an XY moving sliding table, a U-shaped support, a linear guide rail, a differential measuring head, an extension spring, a sliding block, a spherical hinge, a needle gauge, and a test pressing needle, the XY moving sliding table is disposed on the pedestal, and the U-shaped support is disposed on the XY moving sliding table; a pair of linear guide rails is symmetrically arranged on the inner side of the U-shaped support, and the two sides of the sliding block are slidably connected with the two linear guide rails correspondingly. The extension spring is connected between the sliding block and the upper top face of the U-shaped support, the upper surface of the sliding block is attached to the bottom of the differential measuring head all the time under the tension effect of the extension spring, and the top of the differential measuring head penetrates through the upper top face of the U-shaped support and is connected with the U-shaped support. The front end of the needle gauge clamps the test pressing needle, and the rear end of the needle gauge is hinged to the sliding block through the spherical hinge. And a lever arm of the pin gauge is electrically connected with the probe of the universal meter. According to the invention, handheld operation is replaced by mechanical clamping, multi-dimensional accurate adjustment is combined, probe damage can be avoided, and the measurement stability and precision are improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor detection equipment, and in particular to a single-needle conduction detection device and method for a vertical probe card. BACKGROUND

[0002] A vertical probe card is a key component in the process of testing a semiconductor chip, and is used to realize electrical signal connection between a testing device and the chip. In the long-term use process, the vertical probe card may have individual channel conduction abnormality due to natural wear of the probe, performance attenuation of the probe, change of temperature and humidity in the testing environment and other factors, resulting in unstable chip detection performance or even detection failure. At this time, the vertical probe card needs to be tested on site, and the single-needle conduction detection is a core link for confirming the fault channel, that is, by measuring the loop resistance between the probe tip of the suspected fault channel and the corresponding PCB board point, it is determined whether the conduction performance is qualified.

[0003] The existing single-needle conduction detection mainly relies on a maintenance engineer to hold a multimeter probe to operate: one hand holds the probe to contact the micron-level probe tip, and the other hand holds the probe to contact the corresponding point on the PCB board, and the loop resistance is read by the multimeter. However, this operation mode has the following defects: 1. High risk of probe damage: the probe tip is micron-level in size, and it is difficult to accurately control the contact force and position when holding the probe, which easily causes deformation or wear of the probe tip, resulting in scrap of the probe card or reduction of testing precision; 2. Poor measurement stability: the hand-held operation cannot maintain stable contact between the probe and the probe tip, and slight shaking will cause poor loop contact, resulting in large fluctuation of the resistance measurement result and inaccurate determination of the conduction performance.

[0004] Therefore, how to provide a vertical probe card single-needle conduction detection device and method that can replace hand-held operation and realize accurate and stable detection is a technical problem to be solved by those skilled in the art. SUMMARY

[0005] The present application provides a vertical probe card single-needle conduction detection device and method to solve the above technical problems.

[0006] To solve the above technical problems, the present application provides a vertical probe card single-needle conduction detection device, which comprises a base, an XY moving slide, a U-shaped support, a linear guide rail, a differential probe, a tension spring, a sliding block, a ball hinge, a needle gauge and a testing needle,

[0007] The XY moving slide is installed on the base, and the U-shaped support is installed on the XY moving slide;

[0008] A pair of linear guide rails are symmetrically arranged on the inner side of the U-shaped support, and the sliding block is slidably connected to the two linear guide rails on both sides thereof;

[0009] The tensile spring is connected between the slider and the upper top surface of the U-shaped support, the upper surface of the slider is always in close contact with the bottom of the differential probe under the tension of the tensile spring, and the top of the differential probe penetrates through the upper top surface of the U-shaped support and is connected with the U-shaped support;

[0010] The slider is provided with the ball hinge, and the front end of the needle gauge clamps the test pressing needle, and the rear end is hinged to the slider through the ball hinge;

[0011] The rod arm of the needle gauge is electrically connected with the multimeter probe.

[0012] Preferably, the base is a magnetic base which is adsorbed on the probe card metal reinforcing plate through magnetic force.

[0013] Preferably, the XY moving slide table is provided with two rotating adjusting knobs respectively, so that the U-shaped support is independently moved along the X-axis and Y-axis directions in the horizontal plane.

[0014] Preferably, the U-shaped support is installed on the XY moving slide table through an adapter plate.

[0015] Preferably, the ball hinge comprises a ball hinge base, a ball head rod and a fastening screw, the ball hinge base is installed on the slider, one end of the ball head rod is rotationally matched with the ball hinge base, the other end is connected with the needle gauge, the fastening screw penetrates through the ball hinge base and is threadedly connected with the ball hinge base, and the ball head rod is locked in the ball hinge base by tightening the fastening screw.

[0016] Preferably, the ball head rod and the needle gauge are threadedly connected.

[0017] Preferably, the rod arm of the needle gauge is provided with a through hole arranged in the radial direction, and the multimeter probe is inserted into the through hole and electrically connected with the needle gauge.

[0018] The application also provides a vertical probe card single-needle conduction detection method based on the above device, comprising the following steps:

[0019] Step 1: placing the detection device on the metal reinforcing plate of the vertical probe card to be detected;

[0020] Step 2: adjusting the angle of the needle gauge so that the test pressing needle approaches the needle tip of the measured probe on the probe head; one probe of the multimeter is connected with the needle gauge, and the other probe is electrically connected with the corresponding PCB test point of the measured probe on the vertical probe card through a wire;

[0021] Step 3: observing the probe head of the vertical probe card to be detected, adjusting the XY moving slide table to drive the test pressing needle to move horizontally until the needle tip of the test pressing needle is aligned with the needle tip of the measured probe under the microscope.

[0022] Step 4: Lock the angle of the needle gauge, adjust the differential probe to move downwards so that the test needle contacts the tip of the probe under test. At this time, read the multimeter reading and determine whether the conductivity performance of the probe under test and the corresponding channel is qualified based on the multimeter reading.

[0023] Preferably, when the base is a magnetic base, the magnetic base is magnetically attached to the metal reinforcement plate of the probe card.

[0024] Preferably, the ball joint includes a ball joint base, a ball head rod, and a fastening screw. The ball joint base is mounted on the slider. One end of the ball head rod is rotatably engaged with the ball joint base, and the other end is connected to the needle gauge. The fastening screw passes through the ball joint base and is threadedly connected to the ball joint base. Tightening the fastening screw can lock the angle of the needle gauge.

[0025] Compared with the prior art, the vertical probe card single-needle continuity detection device and method provided by the present invention have the following advantages:

[0026] 1. This invention replaces the handheld probe with a mechanically clamped test pin to test the conductivity of a specified probe on a vertical probe card, thereby improving measurement stability and avoiding probe damage during measurement.

[0027] 2. The detection device provided by the present invention has three-axis translational freedom of XYZ, which can realize the position adjustment of the test pin in three directions, which is beneficial to align the test pin with the tip position of the probe being tested;

[0028] 3. This invention standardizes the steps, greatly shortens the testing time, and adapts to the rhythm of the production line. Attached Figure Description

[0029] Figure 1 This is a front view of a vertical probe card single-needle continuity detection device according to a specific embodiment of the present invention;

[0030] Figure 2 This is a left view of a vertical probe card single-needle continuity detection device according to a specific embodiment of the present invention;

[0031] Figure 3 This is a top view of a vertical probe card single-needle continuity detection device according to a specific embodiment of the present invention;

[0032] Figure 4 This is an exploded view of a vertical probe card single-needle continuity detection device according to a specific embodiment of the present invention;

[0033] Figure 5 This is a three-dimensional structural diagram of a ball joint according to a specific embodiment of the present invention;

[0034] Figure 6 This is a front view of the application status of the vertical probe card single-needle continuity detection device in a specific embodiment of the present invention;

[0035] Figure 7 This is a top view of the application state of the vertical probe card single-needle continuity detection device in a specific embodiment of the present invention.

[0036] In the diagram: 01-Vertical probe card to be tested, 02-Metal reinforcing plate, 03-Probe head; 10-Base, 20-XY moving slide, 21-Rotation adjustment knob, 30-U-shaped bracket, 31-Adapter plate, 40-Linear guide rail, 50-Differential probe, 60-Tension spring, 70-Slider, 80-Spherical joint, 81-Spherical joint base, 82-Spherical head rod, 83-Fasting screw, 90-Pin gauge, 91-Test pin, 92-Through hole. Detailed Implementation

[0037] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0038] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation and positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0039] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0040] The vertical probe card single-needle continuity detection device provided by this invention, such as... Figures 1 to 4As shown, this device aims to solve the problems of easy damage to micron-sized probes and poor measurement stability during testing with existing handheld multimeter probes. The device includes a base 10, an XY sliding stage 20, a U-shaped bracket 30, a linear guide rail 40, a differential probe 50, a tension spring 60, a slider 70, a ball joint 80, a pin gauge 90, and a test pin 91.

[0041] The XY sliding table 20 is mounted on the base 10, and the U-shaped bracket 30 is mounted on the XY sliding table 20. The base 10 is used to provide stable support. The XY sliding table 20 can achieve precise horizontal adjustment, which solves the problem of unstable alignment during hand operation and lays the foundation for subsequent needle tip alignment.

[0042] A pair of linear guide rails 40 are symmetrically arranged on the inner side of the U-shaped bracket 30. The slider 70 is slidably connected to the two linear guide rails 40 on both sides. The linear guide rails 40 can guide the slider 70 to move vertically and smoothly, avoiding deviation that could cause the test needle 91 to be misaligned.

[0043] Two tension springs 60 are connected between the slider 70 and the upper surface of the U-shaped bracket 30, respectively. Under the tension of the tension springs 60, the upper surface of the slider 70 remains in contact with the bottom of the differential probe 50. The top of the differential probe 50 penetrates the upper surface of the U-shaped bracket 30 and is connected to it. The tension springs 60 ensure a tight fit between the slider 70 and the differential probe 50. Combined with the high-precision adjustment of the differential probe 50, the vertical movement distance and contact pressure of the test needle 91 can be precisely controlled, preventing damage to the probe due to uncontrolled pressure when holding the probe.

[0044] The ball joint 80 is mounted on the slider 70. The front end of the needle gauge 90 clamps the test pressure needle 91, and the rear end is hinged to the slider 70 via the ball joint 80. The ball joint 80 can achieve a three-dimensional angle adjustment of ±15° to accommodate probes with different tilt angles, solving the problem of handheld probes not being able to be adjusted at the correct angle.

[0045] The arm of the needle gauge 90 is electrically connected to the multimeter probe, reducing contact resistance fluctuations and improving the accuracy of resistance measurement.

[0046] This invention replaces the handheld probe with a mechanically clamped and fixed test pin 91 to test the conductivity of a specified probe on a vertical probe card, thereby improving measurement stability and avoiding probe damage during measurement. Furthermore, the detection device has XYZ three-axis movement freedom, which allows the test pin 91 to be adjusted in three directions, which is beneficial for aligning the test pin 91 with the tip of the probe being tested.

[0047] In some embodiments, please refer to the following: Figure 6 and Figure 7The base 10 is a magnetic base, which is magnetically attached to the metal reinforcing plate 02 of the vertical probe card 01 to be tested. The adsorption force can be adjusted to 50-60N. The magnetic base allows for quick fixation without screws, avoiding damage to the metal reinforcing plate 02 of the probe card, and the adsorption is firm and does not shift.

[0048] In some embodiments, please refer to the following: Figure 4 The XY moving slide 20 realizes the independent movement of the U-shaped bracket 30 along the X-axis and Y-axis directions on the horizontal plane through two rotating adjustment knobs 21. This adjustment structure is easy to operate and can achieve fine adjustment without professional skills, which greatly improves the adjustment accuracy compared with hand operation.

[0049] In some embodiments, please refer to Figure 4 The U-shaped bracket 30 is mounted on the XY sliding table 20 via an adapter plate 31. The adapter plate 31 can accommodate U-shaped brackets 30 and XY sliding tables 20 of different sizes, improving the versatility of the device.

[0050] In some embodiments, please refer to the following: Figure 5 The ball joint 80 includes a ball joint base 81, a ball head rod 82, and a fastening screw 83. The ball joint base 81 is mounted on the slider 70. One end of the ball head rod 82 is rotatably engaged with the ball joint base 81, and the other end is connected to the pin gauge 90. The fastening screw 83 passes through the ball joint base 81 and is threadedly connected to it. Tightening the fastening screw 83 locks the ball head rod 82 to the ball joint base 81. During implementation, after adjusting the angle, tightening the fastening screw 83 with a torque wrench achieves angle locking. The ball joint base 81 provides stable support for the ball head rod 82, the spherical fit ensures smooth multi-angle adjustment, and the fastening screw 83 provides reliable locking, avoiding poor contact caused by pin gauge 90 angle deviation during testing and improving testing stability.

[0051] In some embodiments, please refer to Figure 5 The ball joint 82 and the pin gauge 90 are connected by a threaded connection. Specifically, the end of the ball joint 82 has an external thread, and the rear end of the pin gauge 90 has a matching internal thread. After screwing, the connection between the two is completed. The threaded connection method facilitates disassembly and assembly, improving testing efficiency.

[0052] In some embodiments, please refer to the following: Figure 3 The pin gauge 90 has a radially arranged through hole 92 on its rod arm. The multimeter probe passes through the through hole 92 and is electrically connected to the pin gauge 90. For example, the multimeter probe can be interference-fitted with the through hole 92 to prevent the probe from falling off during the test, ensure the smoothness of the test circuit, and improve measurement repeatability.

[0053] The present invention also provides a method for single-needle continuity detection of a vertical probe card based on the above-mentioned device, comprising the following steps:

[0054] Step 1: Place the testing device on the metal reinforcing plate 02 of the vertical probe card 01 to be tested, and perform preliminary calibration to ensure that the levelness meets the test requirements. When the base 10 is a magnetic base, the magnetic base is magnetically attracted to the metal reinforcing plate 02 of the vertical probe card 01 to be tested, without the need for drilling or screwing, and the fixation can be completed within 10 seconds.

[0055] Step 2: Adjust the angle of the pin gauge 90 so that the test pin 91 is close to the tip of the probe under test on the probe head 03; connect one probe of the multimeter to the pin gauge 90, and connect the other probe to the PCB test point corresponding to the probe under test on the vertical probe card 01 under test through a wire.

[0056] Step 3: Observe the probe head 03 of the vertical probe card 01 under the microscope, and adjust the XY moving slide 20 to drive the test needle 91 to move horizontally until the tip of the test needle 91 is observed to be aligned with the tip of the probe under the microscope.

[0057] Step 4: Lock the angle of the pin gauge 90, adjust the differential probe 50 downwards so that the test pin 91 contacts the tip of the probe under test. At this point, read the multimeter reading and determine whether the conductivity between the probe under test and the corresponding PCB test channel is qualified. The angle of the pin gauge 90 can be locked by tightening the fastening screw 83, shortening the adjustment time.

[0058] In summary, the vertical probe card single-needle continuity testing device and method provided by the present invention includes a base 10, an XY sliding slide 20, a U-shaped bracket 30, a linear guide rail 40, a differential probe 50, a tension spring 60, a slider 70, a ball joint 80, a needle gauge 90, and a test pressure needle 91. The XY sliding slide 20 is mounted on the base 10, and the U-shaped bracket 30 is mounted on the XY sliding slide 20. A pair of linear guide rails 40 are symmetrically arranged on the inner side of the U-shaped bracket 30, and the slider 70 is slidably connected to the two linear guide rails 40 on both sides respectively. Two tension springs 60 are connected between the slider 70 and the upper surface of the U-shaped bracket 30, respectively. The upper surface of the slider 70 remains in contact with the bottom of the differential probe 50 under the tension of the tension springs 60. The top of the differential probe 50 penetrates the upper surface of the U-shaped bracket 30 and is connected to it. A ball joint 80 is mounted on the slider 70. The front end of the needle gauge 90 clamps the test needle 91, and the rear end is hinged to the slider 70 via the ball joint 80. The rod arm of the needle gauge 90 is electrically connected to the multimeter probe. This invention replaces the handheld probe with a mechanically clamped test needle 91 to test the conductivity of a specified probe on a vertical probe card, improving measurement stability and avoiding probe damage during measurement. Furthermore, the detection device has XYZ three-axis movement freedom, allowing the test needle 91 to be adjusted in three directions, which is beneficial for aligning the test needle 91 with the tip of the probe being tested.

[0059] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein, and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A vertical probe card single pin go-no-go testing apparatus, characterized by, The base, the XY mobile slide, the U-shaped support, the linear guide rail, the differential probe, the tension spring, the slider, the ball hinge, the needle gauge and the test pressure needle, The XY mobile slide is installed on the base, and the U-shaped support is installed on the XY mobile slide. A pair of linear guide rails are symmetrically arranged on the inner side of the U-shaped support, and the slider is slidably connected with the two linear guide rails on the two sides. The tension spring is connected between the slider and the upper top surface of the U-shaped support, the upper surface of the slider is always attached to the bottom of the differential probe under the tension of the tension spring, the top of the differential probe penetrates the upper top surface of the U-shaped support and is connected with the U-shaped support. The ball hinge is installed on the slider, the front end of the needle gauge clamps the test pressure needle, and the rear end is hinged with the slider through the ball hinge. The rod arm of the needle gauge is electrically connected with the multimeter probe.

2. The vertical probe card single pin go-no-go detection apparatus of claim 1, wherein, The base is a magnetic base, and the magnetic base is adsorbed on the metal reinforcing plate of the probe card by magnetic force.

3. The vertical probe card single pin go-no-go test apparatus of claim 1, wherein The XY mobile slide is independently moved along the X-axis and Y-axis directions on the horizontal plane by two rotating adjusting knobs.

4. The vertical probe card single pin go-no-go test apparatus of claim 1, wherein The U-shaped support is installed on the XY mobile slide through an adapter plate.

5. The vertical probe card single pin go-no-go test apparatus of claim 1, wherein The ball hinge includes a ball hinge base, a ball head rod and a fastening screw, one end of the ball head rod is rotationally matched with the ball hinge base, the other end is connected with the needle gauge, the fastening screw penetrates the ball hinge base and is threadedly connected with the ball hinge base, and the ball head rod is locked in the ball hinge base by tightening the fastening screw.

6. The vertical probe card single pin go-no-go test apparatus of claim 5, wherein The ball head rod and the needle gauge are threadedly connected.

7. The vertical probe card single pin go-no-go test apparatus of claim 1, wherein The rod arm of the needle gauge is provided with a through hole arranged in the radial direction, and the multimeter probe penetrates into the through hole and is electrically connected with the needle gauge.

8. A method for single needle probe test of a vertical probe card based on the apparatus of claim 1, characterized in that, The following steps are included: Step 1: Place the detection device on the metal reinforcing plate of the vertical probe card to be tested; Step 2: Adjust the angle of the needle gauge so that the test pressure needle approaches the needle tip of the probe head on the measured probe; connect one probe of the multimeter with the needle gauge, and electrically connect the other probe with the corresponding PCB test point of the measured probe on the vertical probe card through a wire; Step 3: Observe the probe head of the vertical probe card to be tested, adjust the XY mobile slide to drive the test pressure needle to move horizontally, until the needle tip of the test pressure needle is aligned with the needle tip of the measured probe under the microscope; Step 4: Lock the angle of the needle gauge, adjust the differential probe to move downward, so that the test pressure needle contacts the needle tip of the measured probe, at this time read the multimeter reading, and judge whether the measured probe and the corresponding channel are qualified based on the multimeter reading.

9. The method of claim 8, wherein the step of detecting the continuity of the single needle comprises the steps of: applying a voltage to the single needle; and measuring a current flowing through the single needle. When the base is a magnetic base, the magnetic base is adsorbed on the metal reinforcing plate of the probe card by magnetic force.

10. The single-needle continuity detection method for a vertical probe card as described in claim 8, characterized in that, The ball hinge includes a ball hinge base, a ball head rod and a fastening screw, one end of the ball head rod is rotationally matched with the ball hinge base, the other end is connected with the needle gauge, the fastening screw penetrates the ball hinge base and is threadedly connected with the ball hinge base, and the ball head rod is locked in the ball hinge base by tightening the fastening screw.

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