Actuating mechanism, optical module and semiconductor device

Abstract

An actuating mechanism, an optical module and a semiconductor device, the actuating mechanism comprises a mover and a stator, the mover and the stator are arranged at an interval, the stator is used for driving the mover to perform two-degree-of-freedom motion relative to the stator, the stator comprises M electrode groups, M is greater than or equal to 1, each electrode group comprises three electrode units, each electrode unit comprises two electromagnets, and the electromagnets are arranged on the mover. The two electromagnets in each electrode unit are used for being connected with one phase of a three-phase full-bridge circuit. Through the isotropy of three-phase driving of the three-phase full-bridge circuit, that is, the output characteristics of the actuating mechanism along different azimuth angles are similar, and the heat consumption generated when the rotor moves towards different azimuth angles is uniform, so that the heat consumption balance of the actuating mechanism is improved, the temperature of the actuating mechanism can be better predicted, and the service life of the actuating mechanism is prolonged. Therefore, the actuating mechanism can finally achieve better control precision and controllable stroke.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to an actuation mechanism, an optical module, and a semiconductor device. Background Technology

[0002] Precision equipment requires precise two-degree-of-freedom (2DOF) oscillation control (i.e., RxRy motion). Unlike piezoelectric actuators based on piezoelectric principles, electromagnetic actuators, such as voice coil motors and electromagnets, utilize the magnetic field's conduction effect to isolate the stator and moving part in different environments. This makes them suitable for special scenarios, such as low-exhaust-gas and high-vacuum environments, and also facilitates maintenance. Electromagnetic actuators mainly consist of an excitation source and a permanent magnet, combined with flexible structural components (such as springs and hinges) to achieve high-precision two-degree-of-freedom motion. However, two-degree-of-freedom electromagnetic actuators often exhibit significant variations in thrust constants at different azimuth angles, leading to uneven heat dissipation and unpredictable actuator temperature, ultimately affecting controllable stroke and control accuracy. Summary of the Invention

[0003] This application provides an actuation mechanism, optical module, and semiconductor device that are beneficial for improving heat dissipation balance.

[0004] In a first aspect, this application provides an actuation mechanism, which includes a mover and a stator, the mover and the stator being spaced apart, the stator being used to drive the mover to perform two degrees of freedom of motion relative to the stator, the stator including M electrode groups, wherein M≥1, each electrode group including three electrode units, each electrode unit including two electromagnets, the two electromagnets of each electrode unit being used to connect to one phase of a three-phase full-bridge circuit.

[0005] By controlling the current of 6M electromagnets, the mover can achieve two degrees of freedom of motion. Through the isotropic three-phase drive of the three-phase full-bridge circuit, the output characteristics of the actuation mechanism are similar along different azimuth angles. The heat dissipation generated when the mover moves in different azimuth angles is uniform, which is conducive to improving the heat dissipation balance of the actuation mechanism. This allows for better prediction of the temperature of the actuation mechanism, enabling the actuation mechanism to ultimately achieve better control accuracy and controllable stroke.

[0006] In conjunction with the first aspect, in one possible implementation, 6M electromagnets are arranged in a circle around the central axis of the stator, with adjacent electromagnets having opposite polarities and the central angle between adjacent electromagnets being (360 / 6M)°.

[0007] In this possible implementation, the 6M electromagnets are arranged uniformly in the circumferential direction along the arrangement direction of the stator and the mover. The entire stator has an axisymmetric structure and the stator forms a compact drive array, which is beneficial to improving the consistency of the thrust constant of the actuation mechanism at different azimuth angles.

[0008] In conjunction with the first aspect, in one possible implementation, the three-phase neutral points of the three-phase full-bridge circuit are connected.

[0009] In this possible implementation, the number of inverter switches and leads in the three-phase full-bridge circuit can be reduced. When the number of actuation mechanisms increases, it is beneficial to reduce the number of external drivers and the density of leads, thereby improving the system's integration and reliability.

[0010] In conjunction with the first aspect, in one possible implementation, each electromagnet includes an iron core and a winding, with the winding wound around the iron core; the central angle between the two electromagnets of each electrode unit is 180°, and the two windings of each electrode unit are connected in reverse series to one phase of a three-phase full-bridge circuit.

[0011] In this possible implementation, the winding of each electromagnet and the winding of the opposing electromagnet are connected in reverse series to form a pair of electromagnets with opposite excitation. The two windings are connected in reverse series to one phase of a three-phase full-bridge circuit. The two windings can transfer energy using the mutual inductance phenomenon, and the application of the mutual inductance phenomenon is more obvious.

[0012] In conjunction with the first aspect, in one possible implementation, the core includes pole shoes and a main body, the pole shoes and the main body are connected, the pole shoes are disposed at the end of the main body facing the mover and located between the main body and the mover, the main body is used to wind the winding, the pole shoes have a polygonal sheet structure, and the main body has a columnar structure.

[0013] In this possible implementation, such a setting is beneficial for reducing the degree of magnetic field saturation and can provide a suitable static magnetic force, which is beneficial for increasing the thrust constant of the electromagnet.

[0014] In conjunction with the first aspect, in one possible implementation, there is a gap between the pole shoe and the mover along the arrangement direction of the mover and the stator.

[0015] In this possible implementation, when the stator drives the mover to achieve two degrees of freedom relative to the stator, the mover can move in a certain space between the mover and the stator.

[0016] In conjunction with the first aspect, in one possible implementation, the distance of the gap extension along the arrangement direction of the mover and stator is greater than or equal to 0.8 mm and less than or equal to 2.5 mm.

[0017] In this possible implementation, on the one hand, the gap is not too large, so that the force generated by the magnetic field generated by the stator on the mover is too small; the gap is not too small, so that the mover has enough space to move; on the other hand, the gap can accommodate a sealing structure, which is beneficial to isolate the moving and stator environment, and / or the gap can accommodate a position sensor for detecting the movement position of the mover.

[0018] In conjunction with the first aspect, in one possible implementation, the actuation mechanism further includes a base made of soft magnetic material, located on the side of the stator away from the mover, and connected to the stator.

[0019] In this possible implementation, the base can fix the stator, and the base made of soft magnetic material is beneficial to increasing the thrust constant.

[0020] In conjunction with the first aspect, in one possible implementation, the mover is a permanent magnet, and the actuation mechanism also includes a shielding cover located outside the mover, the shielding cover being made of a soft magnetic material.

[0021] In this possible implementation, installing a shield around the mover facilitates the formation of a compact drive array. The shield, made of soft magnetic material, helps reduce crosstalk between the mover and stator. Furthermore, when there are multiple actuation mechanisms, crosstalk between adjacent permanent magnets can be reduced.

[0022] In a second aspect, an optical module includes optical elements and an actuation mechanism as described in the first aspect, the actuation mechanism being used to drive the optical elements to move.

[0023] Thirdly, a semiconductor device comprising an optical module as described in the second aspect. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this application or the background art, the accompanying drawings used in the embodiments of this application or the background art will be described below.

[0025] Figure 1 This is a schematic diagram of the structure of a semiconductor device provided in an embodiment of this application;

[0026] Figure 2 A three-dimensional structural schematic diagram of an actuation mechanism provided in an embodiment of this application;

[0027] Figure 3 for Figure 2 The diagram shows the structure of the stator in the actuation mechanism.

[0028] Figure 4 A top view of a stator provided in an embodiment of this application;

[0029] Figure 5 A top view of an actuation mechanism provided in an embodiment of this application;

[0030] Figure 6 Another three-dimensional structural schematic diagram of the actuation mechanism provided in an embodiment of this application;

[0031] Figure 7 This is a schematic diagram of three-phase electricity after passing through the Parker transformer;

[0032] Figure 8 A graph showing the relationship between thrust and tilt angle of an actuator under different current conditions, provided in an embodiment of this application.

[0033] Figure 9 The graph shows the relationship between thrust and azimuth angle for the actuation mechanism of Example 1 and Comparative Example 1.

[0034] Figure 10A This is a schematic diagram of the three-phase drive circuit in Example 1;

[0035] Figure 10B This is a circuit diagram of a dual two-phase drive for Comparative Example 1.

[0036] Figure 11 This is a top view of another stator provided in an embodiment of this application.

[0037] Explanation of reference numerals in the attached figures:

[0038] 10-Motor;

[0039] 20- Flexible swing arm;

[0040] 30-Shielding cover;

[0041] 40 - Base;

[0042] 50-Stator;

[0043] 51-Electrode group; 52-Electrode unit; 53-Electromagnet;

[0044] 531 - Core; 532 - Winding;

[0045] 5311 - Main body; 5312 - Extreme boot;

[0046] 60 - Potting compound;

[0047] 70-gap;

[0048] 100-Actuation mechanism;

[0049] 200-Optical Module;

[0050] 201 - Reflector;

[0051] 1000 - Semiconductor Equipment. Detailed Implementation

[0052] To make the objectives, technical solutions, and advantages of this application clearer, the application will now be described in further detail with reference to the accompanying drawings.

[0053] Please see Figure 1 , Figure 1 This is a schematic diagram of the structure of a semiconductor device 1000 provided in an embodiment of this application. This application provides a semiconductor device 1000, which includes an optical module 200, which can be used to adjust the radiated light in the semiconductor device 1000.

[0054] The optical module 200 includes optical elements and an actuation mechanism 100, which drives the movement of the optical elements. For example, the semiconductor device 1000 is a lidar, and the optical module 200 is a multi-mirror module. The multi-mirror module includes multiple mirrors 201, each mirror 201 is connected to an actuation mechanism 100, and the deflection of each mirror 201 is controlled by an actuation mechanism 100. The semiconductor device 1000 can also be a space telescope or a laser device, etc.

[0055] Please see Figure 2 and Figure 3 , Figure 2 This is a three-dimensional structural diagram of the actuation mechanism 100 provided in an embodiment of this application. Figure 3 for Figure 2 The diagram shows the structure of the stator 50 in the actuation mechanism 100. The actuation mechanism 100 includes a mover 10 and a stator 50. The stator 50 and the mover 10 are spaced apart. When current is applied to the stator 50, a magnetic field is generated to drive the mover 10 to achieve two degrees of freedom of motion relative to the stator 50.

[0056] In one embodiment, the actuation mechanism 100 further includes a flexible swing arm 20, a base 40, potting compound 60, and a shield 30. The end of the stator 50 facing away from the mover 10 is fixed to the base 40. The flexible swing arm 20 is connected to the mover 10 and is located at the end of the mover 10 facing away from the stator 50; the flexible swing arm 20 moves with the mover 10. The potting compound 60 is fixed around the stator 50 and the base 40, serving to shape the stator 50 and the base 40, and providing insulation and heat conduction. The shield 30 is disposed around the mover 10 to form a compact drive array, which helps reduce crosstalk between the mover 10 and other movers 10 (or between the actuation mechanism 100 and other actuation mechanisms 100).

[0057] The mover 10 and the flexible swing arm 20 can be connected via an adapter (such as a screw). The mover 10 is a permanent magnet, which can be made of samarium cobalt (SmCo) or neodymium iron boron (NdFeB) material, giving it good coercivity and remanence. For example, when the actuation mechanism 100 needs to form a compact array, the crosstalk force of the surrounding permanent magnets needs to be considered. Using permanent magnets made of SmCo material can effectively balance the thrust constant of the actuation mechanism 100 with the surrounding crosstalk force. Furthermore, SmCo material also has advantages such as good remanence temperature stability, corrosion resistance, and hydrogen resistance. For example, when driving a single actuation mechanism 100 rather than an array of actuation mechanisms 100, the permanent magnet can be made of NdFeB material, without having to consider the crosstalk problem between modules. Moreover, NdFeB magnetism is generally stronger than SmCo. Therefore, the actuation mechanism 100 can generate a larger thrust constant, thereby increasing the tilt angle (the tilt angle is the angle formed between the central axis of the flexible swing arm 20 and the central axis of the stator 50) or reducing heat dissipation.

[0058] For example, the permanent magnet may have a cylindrical structure, and its magnetization direction is uniformly magnetized along the arrangement direction of the mover 10 and the stator 50. In other embodiments, the permanent magnet may also be an axisymmetric structure with a circular cross-section perpendicular to the axial direction.

[0059] For example, the shield 30 can be made of a soft magnetic material, such as a silicon-iron alloy (silicon steel sheet) or various other soft magnetic materials, without any specific limitation. This is beneficial for reducing crosstalk between the mover 10 and other movers 10 (or between the actuation mechanism 100 and other actuation mechanisms 100).

[0060] When the actuator 100 is stationary, the center of the mover 10 is aligned with the center of the stator 50 as much as possible. For example, the central axis of the mover 10 and the central axis of the stator 50 are set as concentrically as possible to reduce the possibility of inconsistent output characteristics of the actuator 100 at different azimuth angles during the movement. The output characteristics of the actuator 100 refer to the output power or output change law and characteristics exhibited by the actuator 100 under different working conditions.

[0061] The center point of the end of the flexible swing arm 20 away from the stator 50 is aligned with the center point of the stator 50. During the movement of the actuation mechanism 100, the central axis of the mover 10 deviates from the central axis of the stator 50, and there is an angle φ between the central axis of the mover 10 and the central axis of the stator 50.

[0062] Please see Figure 3 and Figure 4 , Figure 4This is a top view of a stator 50 provided in an embodiment of this application. The stator 50 includes M electrode groups 51, where M ≥ 1 and M is an integer. Each electrode group 51 includes three electrode units 52, and each electrode unit 52 includes two electromagnets 53. The two electromagnets 53 in each electrode unit 52 are used to connect to one phase of a three-phase full-bridge circuit. For example, the two electromagnets 53 in each electrode unit 52 are connected in reverse series to one phase of the three-phase full-bridge circuit, thereby forming a pair of reverse-excited electromagnets 53.

[0063] By controlling the current of 6M electromagnets 53, the mover 10 can perform two degrees of freedom motion. Through the isotropic three-phase drive of the three-phase full-bridge circuit, the output characteristics of the actuator 100 are similar along different azimuth angles. The heat dissipation generated when the mover 10 moves in different azimuth angles is uniform, which is conducive to improving the heat dissipation balance of the actuator 100. This allows for better prediction of the temperature of the actuator 100, enabling the actuator 100 to ultimately achieve better control accuracy and controllable stroke.

[0064] It should be noted that the control accuracy of the actuation mechanism 100 can include absolute accuracy and repeatability accuracy. Absolute accuracy mainly focuses on the accuracy of the actuation mechanism 100 in reaching the target position, and is used to measure the error between the actual position reached and the target position required to be reached. Repeatability accuracy mainly focuses on the consistency and stability of the actuation mechanism 100 reaching the same position multiple times, and the consistency of the deviation between the actual position and the target position when the actuation mechanism 100 performs the same displacement multiple times.

[0065] In one embodiment, 6M electromagnets 53 are arranged circumferentially around the central axis of the stator 50. The polarities of adjacent electromagnets 53 are opposite, and the central angle between adjacent electromagnets 53 is (360 / 6M)°. For example, when M=1, the central angle between adjacent electromagnets 53 is 60°. That is, the 6M electromagnets 53 are uniformly arranged circumferentially around the central axis of the stator 50. Viewed along the arrangement direction of the stator 50 and the mover 10, the entire stator 50 has an axisymmetric structure. The stator 50 forms a compact drive array, which is beneficial to improving the consistency of the thrust constant of the braking mechanism at different azimuth angles.

[0066] In one embodiment, each electromagnet 53 includes an iron core 531 and a winding 532, the winding 532 being tightly wound on the iron core 531. The iron core 531 may be made of a soft magnetic material with high permeability, which is beneficial for increasing the thrust constant of the actuation mechanism 100.

[0067] The end of the iron core 531 furthest from the mover 10 is fixed to the base 40. For example, the base 40 has multiple fixing holes corresponding one-to-one with the iron cores 531. The iron cores 531 are fixed to the base 40 by engaging with the fixing holes. The fixing holes can be threaded and fitted with pins for positioning and foolproof design. To facilitate the connection of the winding 532 leads to the three-phase full-bridge circuit, through holes can be designed in the base 40 for easy lead-out of the winding 532 leads. The fit between the iron core 531 and the base 40 can be a transition fit or a small-interval fit, with structural adhesive added between the iron core 531 and the base 40.

[0068] In one embodiment, the iron core 531 includes a main body 5311 and a pole shoe 5312. The pole shoe 5312 is connected to the main body 5311, and the pole shoe 5312 and the main body 5311 can be integrally formed, simplifying the structural form of the iron core 531. In other embodiments, the pole shoe 5312 and the main body 5311 can be connected by an adhesive bonding process, and the specific method is not limited. The pole shoe 5312 is disposed at the end of the main body 5311 facing the mover 10 and is located between the main body 5311 and the mover 10. The main body 5311 is used to wind the winding 532.

[0069] The pole piece 5312 has a polygonal sheet structure, while the main body 5311 has a columnar structure. For example, the pole piece 5312 can be hexagonal in shape, and the main body 5311 can be cylindrical or triangular prism-like. This arrangement helps to reduce the degree of magnetic field saturation and allows for appropriate static magnetic force, which helps to increase the thrust constant of the electromagnet 53. The shape of the pole piece 5312 can be adjusted according to the actual spatial arrangement of the electromagnet 53. For example, the shape of the pole piece 5312 can also be rectangular or triangular.

[0070] Along the arrangement direction of the mover 10 and the stator 50, the mover 10 and the stator 50 maintain a reasonable gap 70. In one embodiment, along the arrangement direction of the mover 10 and the stator 50, there is a gap 70 between the pole shoe 5312 and the mover 10. When the stator 50 drives the mover 10 to achieve two degrees of freedom relative to the stator 50, the mover 10 can move in a certain space between the mover 10 and the stator 50. In one embodiment, along the arrangement direction of the mover 10 and the stator 50, the gap 70 extends by a distance greater than or equal to 0.8 mm and less than or equal to 2.5 mm. For example, the distance of the gap 70 can be 0.8 mm, 1.0 mm, 1.3 mm, 1.5 mm, 1.8 mm, 2.0 mm, 2.2 mm, or 2.5 mm, which are not listed here. On the one hand, to avoid the gap 70 being too large, the force generated by the magnetic field generated by the stator 50 on the mover 10 would be too small; the gap 70 is not too small, so that the mover 10 has enough space to move. The reasonable gap 70 design between the mover 10 and the stator 50 ensures that the mover 10 can generate sufficient force when the magnetic field generated by the stator 50 acts on the mover 10. On the other hand, the gap 70 can accommodate a sealing structure, which is beneficial for isolating the environment of the moving stator 50, and / or, the gap 70 can accommodate a position sensor for detecting the movement position of the mover 10.

[0071] The winding 532 can be made of enameled copper wire. The number of turns and the size of the winding can be selected according to the configuration of the external driver (such as a device that provides voltage and current). For example, adjusting the number of turns of the winding can achieve a higher magnetomotive force, where magnetomotive force = [current] × [number of turns]. The larger the magnetomotive force, the greater the thrust constant (in N / A) generated by the actuator 100, which can increase the tilt angle φ or reduce heat dissipation. After the winding 532 is wound on the iron core 531, a portion of the winding 532 extends out from the base 40 to connect to the external driver.

[0072] In one embodiment, the central angle of the two electromagnets 53 of each electrode unit 52 is 180°. The two windings 532 of each electrode unit 52 are connected in reverse series and then connected to one phase of the three-phase full-bridge circuit. The windings 532 of each electromagnet 53 and the windings 532 of the opposing electromagnet 53 are connected in reverse series to form a pair of electromagnets 53 with opposite excitation. The two windings 532 are connected in reverse series and then connected to one phase of the three-phase full-bridge circuit. The two windings 532 can transfer energy using the mutual inductance phenomenon, and the application of the mutual inductance phenomenon is more obvious.

[0073] In this application, one electrode group 51 corresponds to one three-phase full-bridge circuit; that is, the number of electrode groups 51 is the same as the number of three-phase full-bridge circuits. In one embodiment, the three-phase neutral point connection of the three-phase full-bridge circuit can be selectively brought out or not brought out.

[0074] In this application, the stator 50, the mover 10, and the flexible swing arm 20, when combined, can drive the mover 10 to move in any direction in polar coordinates via three-phase electricity. For example, Figure 5 As shown, Figure 5 This is a top view of an actuation mechanism 100 provided in an embodiment of this application. The pole of the polar coordinate system is the center point "O" of the stator 50, the ray "OX" is the polar axis, and the angle of rotation of the mover 10 relative to the polar axis is angle θ, which is the azimuth angle of the mover 10. The azimuth angle θ in polar coordinates can be used as a control input condition to calculate the composite current into a three-phase current.

[0075] Please combine Figure 6 , Figure 6 This is another three-dimensional structural schematic diagram of the actuation mechanism 100 provided in an embodiment of this application. Since the mover 10 and the flexible swing arm 20 as a whole perform two degrees of freedom of motion relative to the stator 50, the central axis of the flexible swing arm 20 (e.g., Figure 6 The axis oo1 in the middle is relative to the central axis of the stator 50 (e.g., Figure 6 An angle φ is formed between the axes oo2 and the three phase currents. The magnitude of the angle φ can be determined by the resultant current I of the three phase currents. abs Size control.

[0076] Specifically, please combine Figure 7 , Figure 7 This is a schematic diagram of three-phase electricity after the Parker transformer, as shown below. Figure 7 As shown, the three-phase currents (I, I, I) are respectively... u I v I w Using the Park transform, the two-phase equivalent orthogonal current projection I is obtained. α and I β The three-phase current is distributed to different windings 532 via the Parker transformer; then, according to I... α and I β The resultant current I of the three-phase current is calculated. abs The tilt angle φ is controlled by the synthesized current Iabs; according to I α and I β The phase angle I was calculated. arg Through phase angle I arg The azimuth angle θ of the control motion. The thrust constant and heat dissipation of the actuator 100 are only related to I. abs It is related to the azimuth angle θ.

[0077] Please combine Figure 8 , Figure 8 This is a graph showing the relationship between the thrust and tilt angle of the actuator 100 under different current states, as provided in an embodiment of this application. Figure 8As shown, the dashed line represents the relationship between the thrust and tilt angle φ of the actuator 100 when there is no current, and the solid line represents the relationship between the thrust and tilt angle φ after the actuator 100 is energized. When the actuator 100 is not energized, there is a static attraction between the mover 10 of the permanent magnet and the soft magnetic material in the stator 50. In this application, the actuator 100 can combine the static attraction between the mover 10 of the permanent magnet and the soft magnetic material in the stator 50, as well as the electromagnetic attraction generated by the current in the stator 50, thereby helping to reduce the heat dissipation required to drive the mover 10 to yaw.

[0078] By decoupling the control of tilt angle φ and azimuth angle θ, and with the output characteristics of the actuator 100 being almost the same along different azimuth angles relative to two-phase electric drive, the heat dissipation can be predicted better and the temperature of the actuator 100 can be predicted more accurately.

[0079] The solution of this application will be described in detail below with reference to Embodiment 1 and Embodiment 2.

[0080] The actuation mechanism 100 provided in Embodiment 1 includes an electrode group 51, which includes three electrode units 52. Each electrode unit 52 includes two electromagnets 53, i.e., M is set to "1", and the number of electromagnets 53 is "6". The electromagnets 53 are arranged as follows: Figure 4 As shown, the central angle between two adjacent electromagnets 53 is 60°. Starting from "U+", the electromagnets 53 are arranged counter-clockwise as follows: "U+", "V-", "W+", "U-", "V+", "W-". Electromagnets 53 represented by "U+" and "U-" form an electrode unit 52, with its two windings 532 connected in reverse series and linked to one phase of the three-phase full-bridge drive. Electromagnets 53 represented by "V+" and "V-" also form an electrode unit 52, with its two windings 532 connected in reverse series and linked to one phase of the three-phase full-bridge drive. Similarly, electromagnets 53 represented by "W+" and "W-" form an electrode unit 52, with its two windings 532 connected in reverse series and linked to one phase of the three-phase full-bridge drive. When a positive current is applied to each phase, the polarity generated by the pole piece 5312, starting from U+, is N, S, N, S, N, S in a counter-clockwise direction.

[0081] Please combine Figure 9 , Figure 9 The graph shows the relationship between the thrust and azimuth angle of the actuation mechanism 100 in Example 1 and Comparative Example 1. Figure 9 The dashed line in the figure represents the curve relationship between thrust and azimuth angle in Comparative Example 1. Figure 9The solid line in the figure represents the curve relationship between thrust and azimuth angle in Embodiment 1. The stator 50 of Comparative Example 1 includes four electromagnets 53. When the tilt angle φ is 2.6° and the same constant current is input, the thrust fluctuation rate of the actuation mechanism 100 of Comparative Example 1 at different azimuth angles is 5.57%, while that of the actuation mechanism 100 of Embodiment 1 at different azimuth angles is 1.81%. Therefore, the actuation mechanism 100 using 6M electromagnets 53 is beneficial to improving the consistency of the thrust constant at different azimuth angles. The heat dissipation generated when the mover 10 moves towards different azimuth angles is uniform, which is beneficial to improving the heat dissipation balance of the actuation mechanism 100. This allows for better prediction of the temperature of the actuation mechanism 100, and ultimately, the actuation mechanism 100 can achieve better control accuracy and controllable stroke.

[0082] Please combine Figure 10A and Figure 10B , Figure 10A This is a schematic diagram of the three-phase drive circuit in Example 1. Figure 10B This is a circuit diagram of a dual two-phase drive for comparative example one. The actuation mechanism 100 can be driven by a three-phase full-bridge circuit in the inverter, such as... Figure 10A It can be seen that when the design with M=1 is adopted, the actuation mechanism 100 can be driven by one inverter, that is, one inverter includes a three-phase full-bridge circuit, then the inverter only needs six inverter switches to drive it, and only three leads need to be brought out (such as...). Figure 10A Leads 1, 2, and 3 in the diagram. Figure 10B As shown, in the dual two-phase drive of four electromagnets 53, each inverter requires eight inverter switch drives and four lead wires (such as...). Figure 10B (Leads 1, 2, 3, and 4 in the diagram). Compared to the dual two-phase drive of four electromagnets 53, the number of inverter switches and lead wiring can be reduced by 1 / 4. When the number of actuators 100 increases, it is beneficial to reduce the number of external drivers and the density of leads, thereby improving the system's integration and reliability.

[0083] The actuation mechanism 100 provided in Embodiment 2 includes two electrode groups 51, each electrode group 51 includes three electrode units 52, and each electrode unit 52 includes two electromagnets 53, that is, the value of M is "2", and the number of electromagnets 53 is "12". The arrangement of the electromagnets 53 is as follows: Figure 11 As shown, Figure 11This is a top view of another stator 50 provided in an embodiment of this application. The central angle between two adjacent electromagnets 53 is 30°, and each electromagnet 53 is arranged in a counterclockwise direction starting from "U1+" as "U1+", "U2+", "V1-", "V2-", "W1+", "W2+", "U1-", "U2-", "V1+", "V2+", "W1-", "W2-". Among them, the electromagnets 53 represented by "U1+" and "U1-" form an electrode unit 52, the electromagnets 53 represented by "V1+" and "V1-" form an electrode unit 52, and the electromagnets 53 represented by "W1+" and "W1-" form an electrode unit 52; the six electromagnets 53 represented by "U1+", "U1-", "V1+", "V1-", "W1+" and "W1-" form an electrode group 51, which is driven by a three-phase full-bridge circuit. Similarly, the two electromagnets 53 of each electrode unit 52 are respectively connected to one phase of the three-phase full-bridge circuit. Electromagnets 53 represented by “U2+” and “U2-” form an electrode unit 52. Electromagnets 53 represented by “V2+” and “V2-” form an electrode unit 52. Electromagnets 53 represented by “W2+” and “W2-” form an electrode unit 52. Six electromagnets 53 represented by “U2+”, “U2-”, “V2+”, “V2-”, “W2+” and “W2-” form another electrode group 51. This electrode group 51 is driven by another set of three-phase full-bridge circuits. Similarly, the two electromagnets 53 of each electrode unit 52 are respectively connected to one phase of the three-phase full-bridge circuit.

[0084] The number of three-phase full-bridge circuits (denoted as D) is related to M as follows: D = M. When the value of M is greater than "1", the wiring method of the three-phase full-bridge inverters in each electrode group 51 is the same as the wiring method of the three-phase full-bridge inverters in the electrode group 51 when M = 1.

[0085] It is understandable that the phase angle difference between "U1+" and "U2+" can be 60°, and the phase angle difference between "U1+" and "U2+" can also be other values, without any specific limitation.

[0086] Compared to Embodiment 1 with W=1, the thrust constant of the actuation mechanism 100 along the azimuth angle θ in Embodiment 2 is more consistent. Embodiment 2 can be used in actuation mechanisms 100 with larger space. In this way, the iron core 531 will not be too thin, which is beneficial to improving the manufacturability of the iron core 531. Moreover, the iron core 531 is not easy to saturate. Here, iron core 531 saturation means that after the magnetic field strength in the iron core 531 reaches a certain level, even if the magnetic field strength is further increased, the magnetic flux will not increase further.

[0087] The actuation mechanism 100 provided in Embodiment 3 includes three electrode groups 51, each electrode group 51 includes three electrode units 52, and the stator 50 includes nine electrode units 52. Each electrode unit 52 includes two electromagnets 53, that is, the value of M is "3", and the number of electromagnets 53 is "18".

[0088] In summary, based on Table 1, which compares the effects of actuation mechanisms 100 composed of different numbers of electromagnets 53,...

[0089] In Embodiment 1 of this application, the thrust constants at each azimuth angle are relatively consistent, allowing for more precise motion control at different azimuth angles θ. The open-loop motion resolution of the actuator 100 is higher, heat dissipation at different azimuth angles is more uniform, the temperature of the actuator 100 is easier to predict, and a lower phase current can be used, which is beneficial for cost savings. The core 531 is also thinner, making it easier to saturate. As seen in Embodiments 2 and 3, the larger the value of M, the higher the consistency of the thrust constants at each azimuth angle, and it can be applied to large actuators 100. This avoids the core 531 becoming too thin, which could lead to easy saturation.

[0090] Table 1

[0091]

[0092] In this application, unless otherwise expressly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0093] The terms "first," "second," and various numerical designations used herein are merely for descriptive convenience and are not intended to limit the scope of this application.

[0094] It should be understood that in the various embodiments of this application, the order of the above-mentioned processes does not imply the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of this application.

Claims

1. An actuation mechanism characterized in that, The actuating mechanism comprises a mover and a stator, the mover is spaced apart from the stator, the stator is used to drive the mover to move relative to the stator in two degrees of freedom, the stator comprises M electrode groups, wherein M≥1, each electrode group comprises three electrode units, each electrode unit comprises two electromagnets, and the two electromagnets in each electrode unit are used to be connected with one phase in a three-phase full-bridge circuit.

2. The actuation mechanism of claim 1, wherein, 6M electromagnets are circumferentially arranged around the central axis of the stator, the polarities of adjacent two electromagnets are opposite, and the central angle of adjacent two electromagnets is (360 / 6M)°.

3. The actuation mechanism of claim 1, wherein, The three-phase neutral points of the three-phase full-bridge circuit are connected.

4. The actuation mechanism of claim 1, wherein, Each electromagnet comprises a core and a winding, the winding is wound around the core; the central angle of the two electromagnets of each electrode unit is 180°, and the two windings of each electrode unit are reversely connected in series and then connected with one phase in the three-phase full-bridge circuit.

5. The actuation mechanism of claim 4, wherein, The core comprises a pole shoe and a main body part, the pole shoe and the main body part are connected, the pole shoe is arranged at one end of the main body part facing the mover and located between the main body part and the mover, the main body part is used to wind the winding, the pole shoe is in a polygonal sheet structure, and the main body part is in a columnar structure.

6. The actuation mechanism of claim 5, wherein, Between the pole shoe and the mover, there is a gap in the arrangement direction of the mover and the stator.

7. The actuation mechanism of claim 6, wherein, In the arrangement direction of the mover and the stator, the gap extends a distance greater than or equal to 0.8mm and less than or equal to 2.5mm.

8. The actuation mechanism according to any one of claims 1-7, wherein, The actuating mechanism further comprises a base, the base is made of soft magnetic material, the base is arranged on the side of the stator away from the mover, and the base is connected with the stator.

9. The actuation mechanism according to any one of claims 1-7, wherein, The mover is a permanent magnet, the actuating mechanism further comprises a shielding cover, the shielding cover is arranged outside the mover, and the shielding cover is made of soft magnetic material.

10. An optical module characterized by comprising: The actuating mechanism comprises an optical element and an actuating mechanism as claimed in any one of claims 1-9, and the actuating mechanism is used to drive the optical element to move.

11. A semiconductor device, characterized by comprising: The optical module comprises the optical module as claimed in claim 10.

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