Accelerator equipment

Abstract

The invention provides an accelerator device. The accelerator equipment comprises a mechanical arm, a supporting device and an accelerating device. Wherein the tail end of the mechanical arm can move in at least two directions; the supporting device is arranged at the tail end of the mechanical arm and is provided with a mounting structure; the accelerating device is fixed to the supporting device through a mounting structure and used for generating X-ray beams. According to the accelerator equipment, the use portability of the accelerator equipment can be improved.

Description

Technical Field

[0001] This application relates to irradiation sterilization technology, and more particularly to an accelerator device. Background Technology

[0002] X-ray sterilization and non-destructive testing technologies are developing rapidly. X-ray sterilization has strong penetrating power, is easy to operate, and leaves no toxic residue. X-ray non-destructive testing can detect defects in parts without contact with the workpiece, and the testing method is simple and does not damage the workpiece. However, in related technologies, X-ray devices are bulky and inconvenient to carry. Summary of the Invention

[0003] This application provides an accelerator device that improves the portability of the accelerator device.

[0004] The technical solution of this application is implemented as follows: The accelerator device provided in this application includes: a robotic arm, a support device, and an acceleration device; wherein, the end of the robotic arm is capable of moving in at least two directions; the support device is disposed at the end of the robotic arm and has a mounting structure; the acceleration device is fixed to the support device through the mounting structure and is used to generate an X-ray beam.

[0005] The accelerator device provided in this application has a support device at the end of the robotic arm, and a mounting structure matching the accelerator device is provided on the support device. This facilitates the quick and convenient installation of various components of the accelerator device at the end of the robotic arm, reducing the difficulty of installing the accelerator device at the end of the robotic arm. Furthermore, the robotic arm can drive the accelerator device to move flexibly in space, thereby enabling the accelerator device to move stably and smoothly relative to the items to be sterilized or tested along a preset path, thus improving the portability of the accelerator device.

[0006] In some possible implementations of this application, the accelerating device includes an accelerating tube, the supporting device includes a base, the mounting structure includes a first supporting member, the base is fixedly connected to the end of the robotic arm, the first supporting member is fixedly disposed on the first supporting member, the first supporting member is matched with the accelerating tube, the accelerating tube is fixed to the first supporting member, the accelerating tube is used to accelerate the electron beam, and the electron beam bombards the target material disposed on the accelerating tube to generate an X-ray beam.

[0007] In some possible implementations of this application, the acceleration device further includes an input waveguide assembly, one end of which is connected to the acceleration tube; the mounting structure includes a second support member that matches the input waveguide assembly, the second support member is fixed to the substrate, and the input waveguide assembly is fixed to the second support member.

[0008] In some possible implementations of this application, the input waveguide assembly includes an input curved waveguide, an input straight waveguide, an input sampling waveguide, and an input waveguide window. The inlet and outlet ends of the input curved waveguide face different directions, while the inlet and outlet ends of the input straight waveguide are distributed along the same straight line. The input waveguide window is fixedly connected to the accelerating tube and extends along a second direction. The input sampling waveguide is connected to the input waveguide window via an input curved waveguide and extends along a first direction. The input straight waveguide is connected to the input sampling waveguide and extends along the first direction. The input straight waveguide is connected to the magnetron via another input curved waveguide, and the end of the input curved waveguide connected to the magnetron away from the input straight waveguide extends along the second direction. Each input curved waveguide is fixed to the substrate by a second support member. The second direction is perpendicular to the first direction.

[0009] In some possible implementations of this application, the acceleration device further includes an output waveguide assembly, one end of which is connected to the acceleration tube; the mounting structure further includes a third support member that matches the output waveguide assembly, the third support member is fixed to the base, and the output waveguide assembly is fixed to the third support member; the output waveguide assembly and the input waveguide assembly are located on opposite sides of the acceleration tube.

[0010] In some possible implementations of this application, the output waveguide assembly includes an output curved waveguide, an output waveguide window, and an output sampling waveguide. The inlet and outlet ends of the output curved waveguide face different directions, and the inlet and outlet ends of the output waveguide window are distributed along the same straight line. The inlet end of the output curved waveguide is connected to the accelerating tube, and the inlet end of the output waveguide window is connected to the outlet end of the output curved waveguide. The inlet end of the output curved waveguide extends along a second direction, and the output waveguide window extends along a first direction. The output sampling waveguide is connected to the outlet end of the output waveguide window. The second direction is perpendicular to the first direction. The outlet end of the output curved waveguide is fixedly connected to a third support member, and the output sampling waveguide is fixedly connected to another third support member.

[0011] In some possible implementations of this application, the acceleration device further includes an absorption load connected to the end of the output waveguide assembly away from the acceleration tube, and the absorption load includes multiple heat dissipation structures.

[0012] In some possible implementations of this application, the acceleration device further includes a magnetron connected to the end of the input waveguide assembly away from the acceleration tube; the mounting structure includes a fourth support member that matches the magnetron, the fourth support member being fixed to the base, and the magnetron being fixed to the fourth support member.

[0013] In some possible implementations of this application, the accelerating device further includes a collimator and an electron gun. The collimator is disposed at the jet outlet end of the accelerating tube and is used to limit the range of motion of the X-ray beam. The electron gun is disposed at the jet inlet end of the accelerating tube and is used to generate an electron beam.

[0014] In some possible implementations of this application, the accelerator tube includes a first body and a second body; the first body has a plurality of first accelerating half-cavities arranged sequentially along a first direction; the second body has a plurality of second accelerating half-cavities arranged sequentially along the first direction, and the plurality of second accelerating half-cavities correspond one-to-one with the plurality of first accelerating half-cavities; one of the first body and the second body has a welding structure, and the other of the first body and the second body has a welding surface that matches the welding structure; the first body and the second body are welded and fixed by the welding structure and the welding surface, and the corresponding first accelerating half-cavities and second accelerating half-cavities enclose each other to form a complete accelerator cavity. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the accelerator device provided in this application; Figure 2 This is a schematic diagram of the support device and the acceleration device in the accelerator equipment provided in this application; Figure 3 This is a schematic diagram of the accelerator tube in the accelerator device provided in this application; Figure 4 This is a schematic diagram of the structure of the first body in the accelerator device provided in this application; Figure 5 This is a schematic diagram of the structure of the second body in the accelerator device provided in this application; Figure 6 This is a cross-sectional structural diagram of the acceleration tube in the accelerator device provided in this application.

[0016] Explanation of reference numerals in the attached figures: 1-Robotic arm; 2-Supporting device; 21-Base; 22-First support member; 23-Second support member; 24-Third support member; 25-Fourth support member; 26-Fifth support member; 3-Acceleration device; 31-Acceleration tube; 311-First body; 3111-First acceleration half-cavity; 3112-Welding structure; 3113-First positioning structure; 3114-First sidewall; 3115-Second welding groove; 3116-Second sidewall; 3117-First tuning structure; 3118-First input groove; 3119-First output groove; 312-Second body; 3121-Second acceleration half-cavity; 3122-Welding surface; 3123-Second positioning structure; 3124-Second tuning structure; 3125-Second input groove ; 3126-Second output groove; 3127-Welding hole; 313-Input coupler; 3131-Input coupling cavity; 3132-First welding flash; 314-Output coupler; 3141-Output coupling cavity; 3142-Second welding flash; 315-Adapter; 316-Target; 317-Evacuation connector; 32-Input waveguide assembly; 321-Input bent waveguide; 322-Input straight waveguide; 323-Input sampling waveguide; 324-Input waveguide window; 33-Output waveguide assembly; 331-Output bent waveguide; 332-Output waveguide window; 333-Output sampling waveguide; 34-Absorption load; 35-Magnetron; 36-Collider; 37-Electron gun; X-Snapping direction; Y-Second direction; Z-First direction.

[0017] It should be noted that the terms "first" and "second" mentioned above are only used to distinguish between different options and do not represent the degree of superiority or inferiority of the options or their priority in the implementation process. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of this application clearer, the application will be further described in detail below with reference to the accompanying drawings. The described embodiments should not be regarded as limitations on this application. All other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0019] In the embodiments of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the embodiments of this application, unless otherwise stated, "multiple" means two or more.

[0020] Furthermore, in the embodiments of this application, directional terms such as "upper," "lower," "left," and "right" are defined relative to the positions in which the components are schematically placed in the accompanying drawings. It should be understood that these directional terms are relative concepts, used for relative description and clarification, and can change accordingly depending on the position of the components in the accompanying drawings.

[0021] In the embodiments of this application, unless otherwise explicitly specified and limited, the term "connection" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral part; it can be a direct connection or an indirect connection through an intermediate medium.

[0022] In embodiments of this application, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0023] In the embodiments of this application, the terms "exemplary" or "for example" are used to indicate that something is an example, illustration, or description. Any embodiment or design that is described as "exemplary" or "for example" in the embodiments of this application should not be construed as being more preferred or advantageous than other embodiments or design. Specifically, the use of the terms "exemplary" or "for example" is intended to present the relevant concepts in a specific manner.

[0024] This application provides an accelerator device that is compact, small in size, occupies little space, and is simple and quick to assemble, enabling portable use. (Refer to...) Figure 1 and Figure 2 , Figure 1 This is a schematic diagram of the accelerator device provided in this application. Figure 2 This is a schematic diagram of the support device and acceleration device in the accelerator device provided in this application. The accelerator device provided in the embodiments of this application will be described below with reference to the examples in the accompanying drawings.

[0025] The accelerator device provided in this application includes: a robotic arm 1, a support device 2, and an acceleration device 3; wherein, the end of the robotic arm 1 is capable of moving in at least two directions; the support device 2 is disposed at the end of the robotic arm 1 and has a mounting structure; the acceleration device 3 is fixed to the support device 2 through the mounting structure and is used to generate an X-ray beam.

[0026] In some embodiments, the robotic arm 1 can drive the acceleration device 3 to move, thereby using the X-rays generated by the acceleration device 3 to sterilize or perform non-destructive testing on items. The structure of the robotic arm 1 can be selected according to the sterilization or testing action that the acceleration device 3 needs to perform. For example, the robotic arm 1 can be a three-degree-of-freedom robotic arm 1, a four-degree-of-freedom robotic arm 1, a five-degree-of-freedom robotic arm 1, or a six-degree-of-freedom robotic arm 1. In this way, during the movement of the robotic arm 1, the end effector of the robotic arm 1 can move simultaneously in at least two directions in space, such as the various parts of the robotic arm 1 can rotate simultaneously around at least two axes, so that the end effector of the robotic arm 1 moves simultaneously in at least two directions in space.

[0027] In some embodiments, a support device 2 can be provided that matches both the robotic arm 1 and the acceleration device 3, so that the acceleration device 3 can be fixedly installed at the end of the robotic arm 1 via the support device 2. For example, a connection structure that matches the end of the robotic arm 1 can be provided in the support device 2, and multiple mounting structures that match the various parts of the acceleration device 3 can be provided in the support device 2, thereby fixing the support device 2 to the end of the robotic arm 1 via the connection structure and fixing the acceleration device 3 to the support device 2 via the mounting structures.

[0028] In some embodiments, the accelerating device 3 can generate a high-speed electron beam during operation. After the high-speed electron beam bombards the target 316, it generates an X-ray beam. The X-ray beam is then applied to the object, allowing for sterilization or non-destructive testing. For example, the accelerating device 3 can include an electron gun 37, an accelerating tube 31, and a target 316. The electron gun 37 generates the electron beam, which is then accelerated by the accelerating tube 31 to reach the required speed to bombard the target 316 and generate an X-ray beam. For example, suitable mounting structures can be provided for the accelerating tube 31 and the target 316 to facilitate fixing them to the support device 2.

[0029] The accelerator device provided in this application embodiment has a support device 2 at the end of the robotic arm 1, and a mounting structure matching the accelerator device 3 is provided on the support device 2. This facilitates the quick and convenient installation of various components of the accelerator device 3 at the end of the robotic arm 1 through the mounting structure, reducing the difficulty of installing the accelerator device 3 at the end of the robotic arm 1. Furthermore, the robotic arm 1 can drive the accelerator device 3 to move flexibly in space, thereby enabling the accelerator device 3 to move stably and smoothly relative to the items to be sterilized or tested along a preset path, thus improving the portability of the accelerator device.

[0030] In some possible embodiments of this application, such as Figure 2As shown, the acceleration device 3 includes an acceleration tube 31, the support device 2 includes a base 21, and the mounting structure includes a first support member 22. The base 21 is fixedly connected to the end of the robotic arm 1. The first support member 22 is fixedly disposed on the first support member 22. The first support member 22 matches the acceleration tube 31. The acceleration tube 31 is fixed to the first support member 22. The acceleration tube 31 is used to accelerate the electron beam. The electron beam bombards the target material disposed on the acceleration tube 31 to generate an X-ray beam.

[0031] In some embodiments, the electron beam generated by the electron gun 37 can be accelerated by the accelerating tube 31 so that the target 316 can generate an X-ray beam when the electron beam hits the target material 316. For example, the accelerating structure in the accelerating tube 31 can be configured as a separate structure to facilitate the processing of the accelerating structure.

[0032] For example, the support device 2 can be configured as a structure including a base 21 and multiple support members. For instance, the base 21 can be configured as a flat plate, and multiple through holes can be provided in the middle region of the base 21. Bolts can be used to fix the base 21 to the end of the robotic arm 1 through these multiple through holes.

[0033] In another example, the acceleration structure in the accelerator tube 31 can be configured as an approximately cuboid shape, and a matching first support member 22 can be provided for the acceleration structure. For example, the first support member 22 can be configured as a plate that matches the acceleration structure, and the first support member 22 can be fixed to the middle region of one end of the base 21 along the first direction Z by means of welding, bonding, bolting, or other methods. The acceleration structure can be fixed to the first support member 22 by bolts to fix the acceleration structure to the base 21.

[0034] The accelerator device provided in this application embodiment includes a base 21 and a first support member 22, which facilitates the fixed connection between the base 21 and the end of the robotic arm 1. It also facilitates the fixing of the acceleration tube 31 in the accelerator to the base 21 by the first support member 22, thereby fixing the accelerator to the base 21 and facilitating the assembly of the accelerator.

[0035] In some possible embodiments of this application, such as Figure 2 As shown, the acceleration device 3 also includes an input waveguide assembly 32, one end of which is connected to the acceleration tube 31; the mounting structure includes a second support member 23 that matches the input waveguide assembly 32, the second support member 23 is fixed to the base 21, and the input waveguide assembly 32 is fixed to the second support member 23.

[0036] In some embodiments, an input waveguide assembly 32 can be provided at the front end of the accelerating tube 31 to feed microwaves into the accelerating tube 31. The shape of the input waveguide assembly 32 can be set according to the space on the substrate 21. For example, a part of the input waveguide assembly 32 can be set as a straight line, and another part of the input waveguide assembly 32 can be set as a curved arc, etc. One end of the input waveguide assembly 32 can be fixedly connected to the accelerating tube 31 by welding or other means.

[0037] For example, a second support member 23 can be provided for the input waveguide assembly 32. The structure of the second support member 23 can be designed according to the shape of each part of the input waveguide assembly 32 to facilitate the fixed connection between the input waveguide assembly 32 and the second support member 23. The second support member 23 can be fixed to the base 21 by means of welding, bonding, fasteners (such as bolts, rivets), etc., and the input waveguide assembly 32 is fixed to the second support member 23. The input waveguide assembly 32 is fixed to the base 21 by at least one second support member 23.

[0038] The accelerator device provided in this application embodiment, because it is equipped with an input waveguide assembly 32 for the accelerating tube 31, can accurately and reliably transmit microwaves to the accelerating tube 31 through the input waveguide assembly 32, thereby enabling the accelerating tube 31 to obtain a stable power input. Furthermore, a second support member 23 is provided for the input waveguide assembly 32, which facilitates the stable and reliable fixing of the input waveguide assembly 32 to the substrate 21.

[0039] In some possible embodiments of this application, such as Figure 2 As shown, the input waveguide assembly 32 includes an input bent waveguide 321, an input straight waveguide 322, an input sampling waveguide 323, and an input waveguide window 324. The entrance and exit ends of the input bent waveguide 321 face different directions, while the entrance and exit ends of the input straight waveguide 322 are distributed along the same straight line. The input waveguide window 324 is fixedly connected to the accelerating tube 31 and extends along the second direction Y. The input sampling waveguide 323 is connected to the input waveguide 321 via an input bent waveguide 321. The input sampling waveguide 323 is connected to the window 324 and extends along the first direction Z; the input straight waveguide 322 is connected to the input sampling waveguide 323 and extends along the first direction Z; the input straight waveguide 322 is connected to the magnetron 35 through another input bent waveguide 321, and the end of the input bent waveguide 321 connected to the magnetron 35 away from the input straight waveguide 322 extends along the second direction Y; each input bent waveguide 321 is fixed to the base 21 by a second support member 23; the second direction Y is perpendicular to the first direction Z.

[0040] In some embodiments, an input curved waveguide 321 and an input straight waveguide 322 may be provided in the input waveguide assembly 32. The input curved waveguide 321 may be an arc-shaped structure, such that the entrance end and the exit end of the input curved waveguide 321 face two intersecting directions, for example, the entrance end and the exit end of the input curved waveguide 321 may face two perpendicular directions. The input straight waveguide 322 is generally straight, such that the entrance end and the exit end of the input straight waveguide 322 are on the same straight line.

[0041] In some embodiments, an input sampling waveguide 323 and an input waveguide window 324 may be provided in the input waveguide assembly 32. Microwave energy can be transferred to the accelerating tube 31 through the input sampling waveguide 323 so that the frequency and phase of the microwave energy meet the acceleration requirements. Efficient and transparent microwave transmission can be achieved through the input waveguide window 324.

[0042] For example, one end of the input waveguide window 324 can be welded and fixed to the accelerating tube 31, sealing the input waveguide window 324 and the accelerating tube 31. The input waveguide window 324 extends along the second direction Y and is located on one side of the accelerating tube 31. One end of the first input bend waveguide 321 can be fixedly connected to the input waveguide window 324 via a flange, such as using bolts to fix the flange of the first input bend waveguide 321 to the flange of the input waveguide window 324. The flange at one end of the input sampling waveguide 323 can be fixedly connected to the flange at the other end of the first input bend waveguide 321 via bolts. A second support member 23 can be fixedly connected to the flange of the input bend waveguide 321 via bolts. The flange at one end of the first input straight waveguide 322 can be fixed to the flange at the other end of the input sampling waveguide 323 via bolts, and the flange at one end of the second input straight waveguide 322 can be fixed to the flange at the other end of the first input straight waveguide 322 via bolts. The flange at one end of the second input bend waveguide 321 can be fixed to the flange at the other end of the second input straight waveguide 322 using bolts, and the flange at the other end of the second input bend waveguide 321 can be fixed to the input end of the magnetron 35 using bolts. Another second support member 23 can be fixed to the flange at the end of the second input bend waveguide 321 near the magnetron 35 using bolts, thereby fixing the input waveguide assembly 32 to the base 21 via the two second support members 23. The input sampling waveguide 323 and the two input straight waveguides 322 both extend along the first direction Z, while the end of the second input bend waveguide 321 connected to the magnetron 35 extends along the second direction Y.

[0043] It should be noted that the perpendicularity of the first direction Z and the second direction Y can mean that the angle between the first direction Z and the second direction Y is 90°, or that the angle between the first direction Z and the second direction Y is close to 90°, such as 89.5° or 90.5°, etc. It does not mean that the angle between the first direction Z and the second direction Y is exactly 90°.

[0044] The accelerator device provided in this application embodiment includes an input waveguide assembly 32 comprising an input curved waveguide 321 and an input straight waveguide 322. This allows for changing the extension direction of the input waveguide assembly 32 via the input curved waveguide 321, facilitating the arrangement of multiple components of the accelerator device 3 in different regions of the substrate 21. This reduces the size of the accelerator device 3 along one direction. Furthermore, providing a second support member 23 for each of the two input curved waveguides 321 improves the stability and reliability of the input waveguide assembly 32 mounted on the substrate 21.

[0045] In some possible embodiments of this application, such as Figure 2 As shown, the acceleration device 3 also includes an output waveguide assembly 33, one end of which is connected to the acceleration tube 31; the mounting structure also includes a third support member 24 that matches the output waveguide assembly 33, the third support member 24 is fixed to the base 21, and the output waveguide assembly 33 is fixed to the third support member 24; the output waveguide assembly 33 and the input waveguide assembly 32 are located on opposite sides of the acceleration tube 31.

[0046] In some embodiments, an output waveguide assembly 33 can be provided on the accelerating tube 31 to transmit and control microwave signals in the accelerating tube 31. The output waveguide assembly 33 can be provided at the rear end of the accelerating tube 31. For example, a part of the output waveguide assembly 33 can be set as a straight line, and another part of the output waveguide assembly 33 can be set as a curved arc, etc. One end of the output waveguide assembly 33 can be fixedly connected to the accelerating tube 31 by welding or other means.

[0047] For example, a third support member 24 can be provided for the output waveguide assembly 33. The structure of the third support member 24 can be set according to the shape of each part of the output waveguide assembly 33 to facilitate the fixed connection between the output waveguide assembly 33 and the third support member 24. The third support member 24 can be fixed to the base 21 by means of welding, bonding, fasteners (such as bolts, rivets), etc., and the output waveguide assembly 33 can be fixed to the third support member 24. For example, the output waveguide assembly 33 can be fixed to the base 21 by at least one third support member 24.

[0048] The accelerator device provided in this application embodiment, because it is provided with an output waveguide assembly 33 for the accelerating tube 31, can realize power distribution and protection of the accelerating device 3 through the output waveguide assembly 33. Furthermore, a third support member 24 is provided for the output waveguide assembly 33, which facilitates the stable and reliable fixing of the output waveguide assembly 33 to the base 21 through the third support member 24.

[0049] In some possible embodiments of this application, such as Figure 2 As shown, the output waveguide assembly 33 includes an output curved waveguide 331, an output waveguide window 332, and an output sampling waveguide 333. The inlet and outlet ends of the output curved waveguide 331 face different directions, and the inlet and outlet ends of the output waveguide window 332 are distributed along the same straight line. The inlet end of the output curved waveguide 331 is connected to the accelerating tube 31, and the inlet end of the output waveguide window 332 is connected to the outlet end of the output curved waveguide 331. The inlet end of the output curved waveguide 331 extends along the second direction Y, and the output waveguide window 332 extends along the first direction Z. The output sampling waveguide 333 is connected to the outlet end of the output waveguide window 332. The second direction Y is perpendicular to the first direction Z. The outlet end of the output curved waveguide 331 is fixedly connected to a third support member 24, and the output sampling waveguide 333 is fixedly connected to another third support member 24.

[0050] In some embodiments, an output bend waveguide 331 may be provided in the output waveguide assembly 33. The output bend waveguide 331 may be an arc-shaped structure, such that the inlet end and the outlet end of the output bend waveguide 331 are respectively oriented towards two intersecting directions. For example, the inlet end and the outlet end of the output bend waveguide 331 may be respectively oriented towards two perpendicular directions.

[0051] In some embodiments, an output sampling waveguide 333 and an output waveguide window 332 may be provided in the output waveguide assembly 33. Microwaves can be guided and a portion of the signal can be extracted through the output sampling waveguide 333. High-frequency microwaves can be transmitted through the output waveguide window 332 while preventing electromagnetic leakage.

[0052] For example, one end of the output bend waveguide 331 can be fixedly connected to the accelerator by welding, and the flange at one end of the output waveguide window 332 can be fixedly connected to the flange at the other end of the output bend waveguide 331 by bolts. The flange at the other end of the output waveguide window 332 can be fixedly connected to the flange at one end of the output sampling waveguide 333 by bolts, and the other end of the output sampling waveguide 333 can be connected to other components. The distal end of the output bend waveguide 331 connected to the accelerator extends along the second direction Y, and the output sampling waveguide 333 and the output waveguide window 332 extend uniformly along the first direction Z. A third support member 24 can be fixedly installed on the flange connecting the output bend waveguide 331 and the output waveguide window 332, and another third support member 24 can be fixedly installed on the flange at the end of the output sampling waveguide 333 away from the output waveguide window 332, so that the output waveguide assembly 33 is fixed to the base 21 by the two third support members 24.

[0053] The accelerator device provided in this application embodiment, because the output waveguide assembly 33 includes an output bent waveguide 331, facilitates changing the extension direction of the output waveguide assembly 33 by means of the output bent waveguide 331, thereby facilitating the arrangement of multiple parts of the accelerator device 3 in different regions on the substrate 21, which helps to reduce the size of the accelerator device 3 along the second direction Y. Furthermore, a third support member 24 is provided for both the output bent waveguide 331 and the output sampling waveguide 333, which helps to improve the stability and reliability of the output waveguide assembly 33 mounted on the substrate 21.

[0054] In some possible embodiments of this application, such as Figure 2 As shown, the acceleration device 3 also includes an absorption load 34, which is connected to the end of the output waveguide assembly 33 away from the acceleration tube 31. The absorption load 34 includes multiple heat dissipation structures.

[0055] In some embodiments, an absorbing load 34 can be provided in the acceleration device 3 to absorb microwave power transmitted along the output waveguide assembly 33, thereby reducing or even eliminating reflected wave interference with the operation of the device. For example, the absorbing load 34 can be connected to the end of the output sampling waveguide 333 in the output waveguide assembly 33 that is away from the output waveguide window 332. The output sampling waveguide 333 and the absorbing load 34 can be fixedly connected by a flange on the output sampling waveguide 333 and a waveguide on the absorbing load 34.

[0056] For example, a heat dissipation structure can be provided on the absorption load 34 to achieve heat dissipation and cooling of the output waveguide component 33 through the absorption load 34. For instance, heat dissipation fins can be provided on the absorption load 34, and multiple heat dissipation fins can be arranged at intervals along the first direction Z on the absorption load 34 to increase the contact area between the absorption load 34 and the surrounding air.

[0057] The accelerator device provided in this embodiment of the application, by providing an absorption load 34 to the output waveguide component 33, can absorb the microwave power transmitted along the output waveguide component 33 and eliminate reflected waves, thereby maintaining the stability of the electric field in the accelerating tube 31. Furthermore, a heat dissipation structure is provided in the absorption load 34, which can provide air cooling for the output waveguide component 33, etc. Compared with liquid cooling, this reduces the weight of the entire accelerating device 3, contributing to the lightweight design of the equipment.

[0058] In some possible embodiments of this application, such as Figure 2 As shown, the acceleration device 3 also includes a magnetron 35, which is connected to the end of the input waveguide assembly 32 away from the acceleration tube 31; the mounting structure includes a fourth support member 25 that matches the magnetron 35, the fourth support member 25 is fixed to the base 21, and the magnetron 35 is fixed to the fourth support member 25.

[0059] In some embodiments, a magnetron 35 can be provided in the accelerating device 3 to generate high-power microwaves, thereby providing radio frequency energy to the accelerating tube 31. For example, the magnetron 35 can be fixedly connected to the second input bend waveguide 321 in the input waveguide assembly 32 via a flange. The magnetron 35 and the accelerating tube 31 can be arranged along a first direction Z on the substrate 21, so that the input waveguide assembly 32 and the output waveguide assembly 33 are distributed along a second direction Y on opposite sides of the accelerating tube 31 and the magnetron 35.

[0060] For example, a fourth support member 25 can be provided for the magnetron 35. For example, the fourth support member 25 can be set as a plate-shaped or block-shaped structure that matches the magnetron 35. The fourth support member 25 can be fixedly connected to the base 21 by welding, bonding, bolting or other means. The magnetron 35 can be fixedly connected to the fourth support member 25 by bolting or welding or other means, so that the magnetron 35 is fixed on the base 21 by the fourth support member 25.

[0061] The accelerator device provided in this application embodiment connects the magnetron 35 and the accelerating tube 31 through the input waveguide assembly 32, enabling the stable transmission of radio frequency energy generated by the magnetron 35 to the accelerating tube 31 via the input waveguide. Furthermore, a fourth support member 25 is provided for the magnetron 35, which enhances the stability and reliability of the magnetron 35 mounted on the substrate 21.

[0062] In some possible embodiments of this application, such as Figure 2As shown, the acceleration device 3 also includes a collimator 36 and an electron gun 37. The collimator 36 is disposed at the jet outlet end of the acceleration tube 31 and is used to limit the movement range of the X-ray beam. The electron gun 37 is disposed at the jet inlet end of the acceleration tube 31 and is used to generate an electron beam.

[0063] In some embodiments, a collimator 36 and an electron gun 37 may be provided on the accelerating tube 31 to define the size and shape of the X-ray beam's irradiation field, so that the radiation energy is focused on the target area as precisely as possible. For example, the collimator 36 may be made of tungsten, lead, or depleted uranium. An electron beam may be generated by the electron gun 37, for example, a directly heated cathode electron gun 37 or an indirect heated cathode electron gun 37 may be used.

[0064] For example, the electron gun 37 can be positioned at the end of the accelerating tube 31 along the first direction Z, close to the magnetron 35, with the electron gun 37 facing the jet inlet on the accelerating tube 31. The collimator 36 can be positioned at the end of the accelerating tube 31 along the first direction Z, away from the magnetron 35, with the collimator 36 facing the jet outlet of the accelerating tube 31. For instance, a fifth support member 26 can be provided for the collimator 36. The fifth support member 26 can be configured as an approximately "L-shaped" structure. One end of the fifth support member 26 can be fixed to the base 21 in the area adjacent to the first support member 22 by welding, bolting, or other methods. The other end of the collimator 36 can be fixed to the base 21 by welding, bonding, bolting, or other methods, thereby fixing the collimator 36 to the base 21 via the fifth support member 26.

[0065] The accelerator device provided in this application embodiment has a collimator 36 at the jet outlet end of the accelerating tube 31. The collimator 36 can limit the size and shape of the X-ray beam irradiation field, which helps to focus the radiation energy as accurately as possible on the target area to be irradiated. Furthermore, a fifth support 26 is provided for the collimator 36, which can stably and firmly fix the collimator 36 to the base 21, thereby improving the reliability of the collimator 36 installation.

[0066] In some possible embodiments of this application, reference is made to Figure 3 , Figure 4 , Figure 5 and Figure 6 , Figure 3 This is a schematic diagram of the structure of the acceleration tube 31 in the accelerator device provided in this application. Figure 4 This is a schematic diagram of the structure of the first body 311 in the accelerator device provided in this application. Figure 5 This is a schematic diagram of the structure of the second body 312 in the accelerator device provided in this application. Figure 6This is a cross-sectional view of the accelerating tube 31 in the accelerator device provided in this application. The accelerating tube 31 includes a first body 311 and a second body 312; the first body 311 has a plurality of first accelerating semi-cavities 3111 arranged sequentially along the first direction Z; the second body 312 has a plurality of second accelerating semi-cavities 3121 arranged sequentially along the first direction Z, and the plurality of second accelerating semi-cavities 3121 correspond one-to-one with the plurality of first accelerating semi-cavities 3111; one of the first body 311 and the second body 312 has a welding structure 3112, and the other of the first body 311 and the second body 312 has a welding surface 3122 that matches the welding structure 3112; the first body 311 and the second body 312 are welded and fixed by the welding structure 3112 and the welding surface 3122, and the corresponding first accelerating semi-cavities 3111 and second accelerating semi-cavities 3121 enclose to form a complete accelerating cavity.

[0067] In some embodiments, an acceleration structure can be provided in the accelerating tube 31. The acceleration structure can be configured to include a first body 311 and a second body 312. After the first body 311 and the second body 312 are fixed together, an acceleration structure capable of accelerating an electron beam can be formed. For example, both the first body 311 and the second body 312 can be made of metal materials such as stainless steel. Both the first body 311 and the second body 312 can be configured as cuboid structures, and the required structures can be processed on the first body 311 and the second body 312 respectively.

[0068] For example, a plurality of first acceleration semi-cavities 3111 can be machined on the surface of the first body 311 facing the second body 312. The plurality of first acceleration semi-cavities 3111 can be semi-ellipsoidal grooves. The plurality of first acceleration semi-cavities 3111 are arranged sequentially on the first body 311 along the first direction Z (the length direction of the first body 311). Semi-circular through holes can be provided on the cavity walls of two adjacent first acceleration semi-cavities 3111 so that the two adjacent first acceleration semi-cavities 3111 are connected to each other along the first direction Z through the through holes. For example, sixteen semi-ellipsoidal first acceleration semi-cavities 3111 can be provided on one body, and the minor axis of the first acceleration semi-cavities 3111 is less than half of the major axis. For example, the major axis range of each semi-ellipsoidal first acceleration half-cavity 3111 is set to 15.67mm to 16.47mm, and the minor axis range of each semi-ellipsoidal first acceleration half-cavity 3111 is set to 3mm to 5.6mm, so that the first acceleration half-cavity 3111 becomes a semi-ellipsoidal groove with a flatness greater than 0.6426 and less than 0.8179.

[0069] In another example, multiple second acceleration cavities 3121 can be machined on the surface of the second body 312 facing the first body 311. These multiple second acceleration cavities 3121 can be semi-ellipsoidal grooves identical to the first acceleration cavities 3111. The multiple second acceleration cavities 3121 are arranged sequentially along the first direction Z on the second body 312. Semi-circular through holes can be provided on the cavity walls of two adjacent second acceleration cavities 3121 to allow communication between adjacent second acceleration cavities 3121 along the first direction Z. The second acceleration cavities 3121 on the second body 312 correspond one-to-one with the first acceleration cavities 3111 on the first body 311, and the corresponding second acceleration cavities 3121 have the same structure as the first acceleration cavities 3111. For example, the corresponding second acceleration cavities 3121 and the first acceleration cavities 3111 can be set as mirror-symmetrical structures. For instance, sixteen semi-ellipsoidal second acceleration cavities 3121 can be provided on the two bodies, with the minor axis of the second acceleration cavities 3121 being less than half the major axis. For example, the major axis of each semi-ellipsoidal second acceleration half-cavity 3121 is set to range from 15.67 mm to 16.47 mm, and the minor axis of each semi-ellipsoidal second acceleration half-cavity 3121 is set to range from 3 mm to 5.6 mm, so that the second acceleration half-cavity 3121 becomes a semi-ellipsoidal groove with a flattening greater than 0.6426 and less than 0.8179. In this way, after the first body 311 and the second body 312 are stacked along the fastening direction X, the corresponding second acceleration half-cavities 3121 and first acceleration half-cavities 3111 can be enclosed to form a complete ellipsoidal acceleration cavity.

[0070] In some embodiments, the first body 311 and the second body 312 can be welded together to form the first body 311. For example, matching welding structures 3112 and welding surfaces 3122 can be respectively provided on the opposing surfaces of the first body 311 and the second body 312 to weld and fix the first body 311 and the second body 312 together to form the first body 311.

[0071] For example, a welding structure 3112 can be provided on the surface of the first body 311 facing the second body 312 along the fastening direction X, and correspondingly, a welding surface 3122 can be provided on the surface of the second body 312 facing the first body 311 along the fastening direction X. Alternatively, a welding surface 3122 can be provided on the surface of the first body 311 facing the second body 312 along the fastening direction X, and correspondingly, a welding structure 3112 can be provided on the surface of the second body 312 facing the first body 311 along the fastening direction X. The welding structure 3112 and the welding surface 3122 can respectively surround all the first acceleration half-cavities 3111 and all the second acceleration half-cavities 3121. The two opposing surfaces of the first body 311 and the second body 312 can be welded into the first body 311 by planar welding, so that all the first acceleration half-cavities 3111 and all the second acceleration half-cavities 3121 are located in a closed environment.

[0072] In another example, the welding structure 3112 can be configured to include multiple first welding grooves, and the welding surface 3122 can be configured as a plane corresponding to the first welding grooves. For example, the first welding groove can be configured as a groove with an approximately "U" shaped cross-section. Along the long axis direction (second direction Y) of the first acceleration half-cavity 3111, first welding grooves can be provided on both sides of the first acceleration half-cavity 3111 of the first body 311. For example, one first welding groove can be provided on one side of the first acceleration half-cavity 3111, and two first welding grooves can be provided on the other side; or, two first welding grooves can be provided on each side of the first acceleration half-cavity 3111, and the first welding grooves on both sides of the first acceleration half-cavity 3111 can extend along the first direction Z, and the length of all the first welding grooves extending along the first direction Z is greater than the sum of the lengths of all the first acceleration half-cavities 3111 along the first direction Z. Alternatively, first welding grooves can be provided at both ends of the first acceleration half-cavity 3111 along the first direction Z, that is, at least two first welding grooves extending along the long axis can be provided. In this way, four first welding grooves surrounding all the first acceleration half-cavities 3111 can be connected end to end and surround all the first acceleration half-cavities 3111. Correspondingly, a welding surface 3122 corresponding to each first welding groove can be provided on the surface of the second body 312 facing the first body 311, or the entire surface of the second body 312 facing the first body 311 can be set as a flat welding surface 3122. Then, the edge of the first welding groove and the corresponding welding surface 3122 can be welded and fixed by welding, such as using a low-temperature solder with a low melting point.

[0073] In some embodiments, matching positioning structures can be provided on the first body 311 and the second body 312 respectively, so as to limit the relative position of the first body 311 and the second body 312 by the cooperation of the positioning structures. For example, a first positioning structure 3113 can be provided on the first body 311, and a second positioning structure 3123 matching the first positioning structure 3113 can be provided on the second body 312.

[0074] For example, the first positioning structure 3113 and the second positioning structure 3123 on the first body 311 and the second body 312 can be configured as matching grooves and protrusions to restrict the movement of the first body 311 and the second body 312 in three mutually perpendicular directions through the cooperation of the protrusions and grooves. For example, an approximately rectangular receiving cavity can be provided on the first body 311, which can be a groove formed by recessing from the first body 311 along the fastening direction X. Correspondingly, a cuboid protrusion matching the rectangular receiving cavity can be provided on the second body 312, which can be a cuboid protrusion formed by cutting the second body 312 around the fastening direction X.

[0075] In another example, the first acceleration half-cavity 3111 and the welding structure 3112 can both be disposed on the bottom wall of the receiving cavity on the first body 311. The bottom wall of the receiving cavity is a wall surface on the first body 311 that encloses the receiving cavity and is perpendicular to the fastening direction X. The second acceleration half-cavity 3121 and the welding surface 3122 can both be disposed on the surface of the protrusion on the second body 312 that is perpendicular to the fastening direction X. Along the fastening direction X, the depth of the receiving cavity can be set to be greater than or equal to the height of the protrusion. The depth of the receiving cavity is the distance from the bottom wall of the receiving cavity to the opening of the receiving cavity. For example, the depth of the receiving cavity can be 0.5 mm, 1 mm, or 2 mm greater than the height of the protrusion. The protrusion can then be inserted into the receiving cavity to restrict the relative position of the first body 311 and the second body 312, and the protrusion can be tightly fitted to the bottom wall of the receiving cavity along the fastening direction X.

[0076] In some embodiments, when a receiving cavity is provided on the first body 311, a plurality of sidewalls can be formed around the first body 311, and the receiving cavity is formed by the plurality of sidewalls and a bottom wall. For example, structures for mounting other components can be provided on the first sidewall 3114 and the second sidewall 3116, which are perpendicular to the first direction Z, to facilitate the assembly of other components with the acceleration structure.

[0077] For example, a target 316 can be mounted on the first sidewall 3114. A second welding groove 3115 can then be provided on the surface of the first sidewall 3114 away from the first accelerating half-cavity 3111. That is, a second welding groove 3115 matching the target 316 can be provided on the outer surface of the first sidewall 3114. For instance, if the target 316 is cylindrical, the second welding groove 3115 can be configured as a two-part structure. Specifically, a cylindrical groove matching the target 316 can be provided on the first sidewall 3114, and an annular groove can be provided at the bottom of the cylindrical groove. The circular groove and the annular groove can together serve as the second welding groove 3115. The second welding groove 3115 corresponds to the first accelerating half-cavity 3111. A through hole can be provided at the bottom of the second welding groove 3115, allowing the accelerating cavity to communicate with the inside of the second welding groove 3115 through this through hole. This allows electrons to pass through the accelerating cavity and reach the target 316 welded within the second welding groove 3115.

[0078] In another example, an adapter 315 for mounting the electron gun 37 can be provided on the second sidewall 3116 opposite to the first sidewall 3114. A third welding groove can then be provided on the surface of the second sidewall 3116 away from the first acceleration half-cavity 3111; that is, a third welding groove matching the adapter 315 can be provided on the outer surface of the second sidewall 3116. For example, if the portion connecting the adapter 315 to the second sidewall 3116 is cylindrical, the third welding groove can be set as an annular groove matching the cylindrical portion. Corresponding to the first acceleration half-cavity 3111, a through hole can be provided at the bottom of the third welding groove, allowing electrons generated by the electron gun 37 to reach the acceleration cavity through this through hole. The cylindrical portion of the adapter 315 can be inserted into the third welding groove, and the adapter 315 can be welded and fixed to the second sidewall 3116.

[0079] In some embodiments, a tuning structure can be provided on the acceleration structure to control the distribution of the electromagnetic field in the acceleration cavity, so that electrons can obtain a uniform and stable acceleration force in the acceleration cavity.

[0080] For example, a portion of the tuning structures can be disposed on the first body 311, and another portion on the second body 312. For instance, in the case of an acceleration structure with sixteen acceleration cavities, eight first tuning structures 3117 can be disposed on the first body 311, and eight second tuning structures 3124 can be disposed on the second body 312. Along the first direction Z, from the third welding groove to the second welding groove 3115, the eight first tuning structures 3117 can be spaced apart on the first body 311, with each first tuning structure 3117 corresponding to an acceleration cavity spaced apart. Similarly, the eight second tuning structures 3124 can be spaced apart on the second body 312, with each second tuning structure 3124 corresponding to an acceleration cavity spaced apart, and the acceleration cavities corresponding to the first tuning structures 3117 and the second tuning structures 3124 are adjacent. For example, the eight first tuning structures 3117 can correspond to the first, third, fifth, seventh, ninth, eleventh, thirteenth, fifteenth, and seventeenth accelerating cavities that are spaced apart, respectively, while the eight second tuning structures 3124 can correspond to the second, fourth, sixth, eighth, tenth, twelfth, fourteenth, sixteenth, and eighteenth accelerating cavities that are spaced apart, respectively.

[0081] In another example, the first tuning structure 3117 and the second tuning structure 3124 can be respectively disposed on opposite sides of the first body 311 and the second body 312, so that the first tuning structure 3117 and the second tuning structure 3124 have a greater distance between them.

[0082] Another example is that multiple acceleration cavities can be configured as ellipsoidal cavities of different sizes. For instance, the major axes of multiple acceleration cavities can be made the same or nearly the same, such as setting the major axis of each acceleration cavity to 15.67 mm to 16.47 mm. The minor axes of multiple acceleration cavities can be made to gradually change sequentially along the first direction Z. For example, from the direction from the third welding groove to the second welding groove 3115, the minor axes of the sixteen acceleration cavities can be gradually reduced. The minor axis of the acceleration cavity closest to the third welding groove can be set to 5.6 mm, the minor axis of the acceleration cavity closest to the second welding groove 3115 can be set to 3 mm, and the minor axes of the other acceleration cavities can be set to be greater than 3 mm and less than 5.6 mm. Correspondingly, the first tuning structure 3117 and the second tuning structure 3124 can be configured to match the size of the acceleration cavities.

[0083] In some embodiments, corresponding mounting structures can be provided on the first body 311 and the second body 312 respectively, so as to fix other components of the acceleration tube 31 on the acceleration structure. For example, structures for mounting the input coupler 313 and the output coupler 314 can be provided on the acceleration structure respectively.

[0084] For example, a first input groove 3118 can be provided on the first body 311, that is, the first input groove 3118 can be provided on a side wall of the first body 311 parallel to the first direction Z, and the first input groove 3118 can extend along the long axis to communicate with the first acceleration half cavity 3111 closest to the third welding groove. Correspondingly, a second input groove 3125 matching the first input groove 3118 can be provided on the second body 312, that is, the second input groove 3125 can be provided on the protrusion of the second body 312 along the long axis, and the second input groove 3125 can extend along the long axis to communicate with the second acceleration half cavity 3121 closest to the third welding groove. In this way, after the first body 311 and the second body 312 are fastened and welded together, the first input groove 3118 and the second input groove 3125 can be made to form a fourth welding groove. The shape of the fourth welding groove matches the shape of the input coupler 313, so that the input coupler 313 can be welded and fixed to the acceleration structure through the fourth welding groove. For example, the input coupler 313 can be configured to include an input coupling cavity 3131 and a first welding flash 3132. The input coupling cavity 3131 matches the fourth welding groove, and the input coupling cavity 3131 can be welded and fixed to the fourth welding groove. The first welding flash 3132 is fixed to the end of the input coupling cavity 3131 away from the acceleration structure. The first welding flash 3132 can be configured as an approximately disk-shaped structure, and the first welding flash 3132 can be welded and fixed to the input waveguide window 324.

[0085] In another example, a first output groove 3119 can be provided on the first body 311, that is, the first output groove 3119 can be provided on the other side wall of the first body 311 parallel to the first direction Z, and the first output groove 3119 can extend along the long axis to communicate with the first acceleration half cavity 3111 closest to the second welding groove 3115. Correspondingly, a second output groove 3126 matching the first output groove 3119 can be provided on the second body 312, that is, the second output groove 3126 can be provided on the protrusion of the second body 312 along the long axis, and the second output groove 3126 can extend along the long axis to communicate with the second acceleration half cavity 3121 closest to the second welding groove 3115. In this way, after the first body 311 and the second body 312 are fastened and welded together, the first output groove 3119 and the second output groove 3126 can be made to form a fifth welding groove. The shape of the fifth welding groove matches the shape of the output coupler 314, so that the input coupler 313 can be welded and fixed to the acceleration structure through the fifth welding groove. For example, the output coupler 314 can be configured to include an output coupling cavity 3141 and a second welding flash 3142. The output coupling cavity 3141 matches the fifth welding groove, and the output coupling cavity 3141 can be welded and fixed to the fifth welding groove. The second welding flash 3142 is fixed to the end of the output coupling cavity 3141 away from the acceleration structure. The second welding flash 3142 can be configured as an approximately disc-shaped structure, and the second welding flash 3142 can be welded and fixed to the output bent waveguide 331.

[0086] As another example, a structure for mounting an air extraction connector 317 can be provided on the second body 312. For instance, a welding hole 3127 penetrating the second body 312 can be provided along the engagement direction X. The welding hole 3127 can communicate with the second input groove. The welding hole 3127 can be set as a circular through hole that matches the air extraction connector 317, so that the air extraction connector 317 can be welded and fixed to the acceleration structure through the welding hole 3127.

[0087] The accelerator device provided in this application embodiment includes an acceleration tube 31 comprising a first body 311 and a second body 312. Corresponding first acceleration semi-cavities 3111 and 3121 can be machined on the first body 311 and the second body 312 respectively, facilitating the machining of the first acceleration semi-cavities 3111 and 3121 and reducing machining difficulty. Furthermore, welding structures 3112 and welding surfaces 3122 are respectively provided on the first body 311 and the second body 312, facilitating the welding of the first body 311 and the second body 312 into a single unit through a single welding operation using the welding structures 3112 and the welding surfaces 3122. This allows the corresponding first acceleration semi-cavities 3111 and 3121 to be enclosed to form a complete acceleration cavity. In this way, by setting welding grooves on the first body 311 and the second body 312 respectively to match other components of the accelerating tube 31, the other components of the accelerating tube 31 can be fixedly connected to the accelerating structure by welding. Compared with the disk-loaded waveguide in the related technology, the accelerating tube 31 provided in this application embodiment can reduce the overall size of the accelerating device 3, which is beneficial to the miniaturization and weight reduction of the accelerating device 3.

[0088] The above description is merely an embodiment of this application and is not intended to limit the scope of protection of this application. Any modifications, equivalent substitutions, and improvements made within the spirit and scope of this application are included within the scope of protection of this application.

Claims

1. An accelerator device, characterized by, The accelerator device comprises: a mechanical arm, a terminal end of which is capable of generating movement in at least two directions; a support device, which is arranged at the terminal end of the mechanical arm and has a mounting structure; an acceleration device, which is fixed to the support device through the mounting structure and is used to generate an X-ray beam.

2. The accelerator device according to claim 1, characterized by, The acceleration device comprises an acceleration tube, the support device comprises a base body, and the mounting structure comprises a first support member, the base body being fixedly connected to the terminal end of the mechanical arm, the first support member being fixedly arranged on the first support member, the first support member being matched with the acceleration tube, the acceleration tube being fixed to the first support member, and the acceleration tube being used to accelerate an electron beam, the electron beam being used to bombard a target arranged in the acceleration tube to generate the X-ray beam.

3. The accelerator device of claim 2, wherein, The acceleration device further comprises an input waveguide assembly, one end of the input waveguide assembly being connected to the acceleration tube; the mounting structure comprises a second support member matched with the input waveguide assembly, the second support member being fixed to the base body, and the input waveguide assembly being fixed to the second support member.

4. The accelerator device of claim 3, wherein, The input waveguide assembly comprises an input curved waveguide, an input straight waveguide, an input sampling waveguide and an input waveguide window, an inlet end of the input curved waveguide and an outlet end of the input curved waveguide being respectively directed in different directions, and an inlet end of the input straight waveguide and an outlet end of the input straight waveguide being distributed along the same straight line. The input waveguide window is fixedly connected to the acceleration tube and extends along a second direction; the input sampling waveguide is connected to the input waveguide window through one of the input curved waveguides and extends along a first direction; the input straight waveguide is connected to the input sampling waveguide and extends along the first direction; the input straight waveguide is connected to a magnetron through another of the input curved waveguides, and the input curved waveguide connected to the magnetron extends away from one end of the input straight waveguide along the second direction; each of the input curved waveguides is fixed to the base body through one of the second support members; and the second direction is perpendicular to the first direction.

5. The accelerator device of claim 3, wherein, The acceleration device further comprises an output waveguide assembly, one end of the output waveguide assembly being connected to the acceleration tube; the mounting structure further comprises a third support member matched with the output waveguide assembly, the third support member being fixed to the base body, and the output waveguide assembly being fixed to the third support member; and the output waveguide assembly and the input waveguide assembly are respectively located on two opposite sides of the acceleration tube.

6. The accelerator device of claim 5, wherein, The output waveguide assembly comprises an output curved waveguide, an output waveguide window and an output sampling waveguide, an inlet end of the output curved waveguide and an outlet end of the output curved waveguide being respectively directed in different directions, and an inlet end of the output waveguide window and an outlet end of the output waveguide window being distributed along the same straight line. The input end of the output bent waveguide is connected with the accelerating tube, the input end of the output waveguide window is connected with the output end of the output bent waveguide, the input end of the output bent waveguide extends along a second direction, and the output waveguide window extends along a first direction; the output sampling waveguide is connected with the output end of the output waveguide window; the second direction is perpendicular to the first direction. The output end of the output bent waveguide is fixedly connected with one of the third supports, and the output sampling waveguide is fixedly connected with another one of the third supports.

7. The accelerator device of claim 5, wherein, The accelerating device further comprises an absorbing load, which is connected to one end of the output waveguide assembly away from the accelerating tube, and the absorbing load comprises a plurality of heat dissipation structures.

8. The accelerator device of claim 3, wherein, The accelerating device further comprises a magnetron, which is connected to one end of the input waveguide assembly away from the accelerating tube; the mounting structure comprises a fourth support matched with the magnetron, the fourth support is fixed to the base body, and the magnetron is fixed to the fourth support.

9. The accelerator device of claim 2, wherein, The accelerating device further comprises a collimating member and an electron gun, the collimating member is arranged at the jet exit end of the accelerating tube, and the collimating member is used to limit the movement range of the X-ray beam; the electron gun is arranged at the jet entrance end of the accelerating tube, and the electron gun is used to generate an electron beam.

10. Accelerator device according to any of claims 2 to 9, characterized in that The accelerating tube comprises a first body and a second body; the first body has a plurality of first accelerating half cavities arranged in sequence along a first direction; the second body has a plurality of second accelerating half cavities arranged in sequence along the first direction, and the plurality of second accelerating half cavities correspond to the plurality of first accelerating half cavities one by one; one of the first body and the second body has a welding structure, the other one of the first body and the second body has a welding surface matched with the welding structure, the first body and the second body are fixed by welding through the welding structure and the welding surface, and the corresponding first accelerating half cavities and second accelerating half cavities form a complete accelerating cavity.

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