Gas collecting device suitable for carbon tetrafluoride detection

Abstract

The invention relates to a gas collection device suitable for carbon tetrafluoride detection, comprising: a gas inlet device connected to a fluorine gas source; the reaction channel is fixedly arranged on the supporting frame and connected to the gas inlet device, the reaction channel comprises a channel body and a plurality of reaction vessels, one end of the channel body is provided with a gas dispersion mechanism, the gas dispersion mechanism comprises an upper row of vent holes and a lower row of vent holes, the bottom surface of the channel body is provided with a plurality of mounting ports side by side, and the plurality of reaction vessels are respectively arranged at the mounting ports; the driving devices are arranged on the supporting frame, the driving devices drive the reaction vessels to periodically ascend and descend in a staggered mode, after any reaction vessel descends by the driving device, the corresponding reaction vessel shields the air outlet holes in the lower row, and after any reaction vessel ascends by the driving device, the corresponding reaction vessel opens the air outlet holes in the lower row; the heating device is arranged below the reaction channel and is used for heating the reaction vessel; and the collecting device is connected to the other end of the channel body.

Description

Technical Field

[0001] This invention relates to the field of carbon tetrafluoride gas collection, specifically to a gas collection device suitable for carbon tetrafluoride detection. Background Technology

[0002] Carbon tetrafluoride (CTF) is a colorless and odorless gas widely used in microelectronics and cryogenic refrigeration. In the laboratory, CTF is typically prepared by reacting carbon powder and fluorine gas under heating conditions, where the fluorine gas reacts on the surface of the carbon to form CTF. The contact efficiency between the fluorine gas and the carbon powder directly affects the CTF formation rate during this reaction. During the reaction of fluorine gas and toner, the generated carbon tetrafluoride has a higher density than fluorine gas, resulting in a gas layering effect within the reactor. The higher density of carbon tetrafluoride may cause it to accumulate at the bottom of the reactor, while fluorine gas accumulates at the top. Contact between the fluorine gas and toner is achieved through the flow of fluorine gas and its diffusion characteristics, ultimately affecting the contact efficiency between fluorine gas and toner and reducing the yield of carbon tetrafluoride. Increasing the flow rate of fluorine gas to drive the internal carbon tetrafluoride outflow may lead to an excess of fluorine gas, increasing byproducts such as long-chain perfluorinated carbon. Therefore, it is necessary to modify the contact efficiency between fluorine gas and toner using an experimental setup and collect the generated crude carbon tetrafluoride gas to analyze the yield of carbon tetrafluoride and determine the optimal contact method between fluorine gas and toner.

[0003] The purpose of this invention is to design a gas collection device suitable for carbon tetrafluoride detection, addressing the problems existing in the prior art. Summary of the Invention

[0004] In view of the problems existing in the prior art, the present invention provides a gas collection device suitable for carbon tetrafluoride detection, which can effectively solve at least one of the problems existing in the prior art.

[0005] The technical solution of this invention is: A gas collection device suitable for carbon tetrafluoride detection, comprising: The air intake device is connected to the refrigerant gas source; The reaction channel is fixedly mounted on the support frame and connected to the air inlet device. The reaction channel includes a channel body and several reactor vessels. The reactor vessels are used to hold carbon powder. A gas dispersion mechanism is provided at one end of the channel body. The gas dispersion mechanism includes two rows of air holes at the top and bottom. Multiple mounting ports are arranged side by side on the bottom surface of the channel body. Several reactor vessels are respectively installed at the mounting ports. Several driving devices are installed on the support frame. The driving devices drive the reactor vessels to periodically move up and down in staggered positions. When any reactor vessel is lowered by the driving device, the corresponding reactor vessel blocks the lower air outlet. When any reactor vessel is raised by the driving device, the corresponding reactor vessel opens the lower air outlet. A heating device, located below the reaction channel, is used to heat the reactor vessel; The collection device is connected to the other end of the channel body.

[0006] Furthermore, the reactor vessel has a rectangular parallelepiped structure with an opening at the bottom and a reaction boat on the upper surface.

[0007] Furthermore, a bellows connection is used to seal the port and the reactor vessel before installation.

[0008] Furthermore, a guide groove is longitudinally provided on one side of the reactor vessel, and a guide protrusion is longitudinally provided at the mounting opening. The reactor vessel's movement direction is limited by the cooperation of the guide groove and the guide protrusion.

[0009] Furthermore, the driving device includes several driving cylinders, which are respectively disposed at both ends of the support frame, and the top of the driving cylinders is connected to the reactor vessel.

[0010] Furthermore, after the reactor vessel descends, the height difference between the lower row of vent holes and the corresponding reactor vessel is greater than 5 mm; after the reactor vessel rises, the height difference between the upper row of vent holes and the corresponding reactor vessel is greater than 2 cm.

[0011] Furthermore, the gas dispersion mechanism includes dispersion plates, which are spaced apart at one end of the channel body, so that one end of the channel body forms an air intake chamber.

[0012] Furthermore, the lower air outlet is equipped with a baffle plate, the bottom of which is hinged to the dispersion plate. The distance between the bottom of the baffle plate and the air outlet is greater than 5mm, and the gap between the reactor vessel and the dispersion plate is set. When the top of the reactor vessel descends below the bottom of the baffle plate, the baffle plate flips down to open the corresponding vent; when the top of the reactor vessel rises above the bottom of the baffle plate, the baffle plate flips up to block the corresponding vent.

[0013] Therefore, the present invention provides the following effects and / or advantages: The gas collection device provided in this application can effectively conduct experiments on the generation of carbon tetrafluoride. In particular, multiple experiments on gas flow, reaction process control, gas dispersion, and collection can reveal the effects of different flow rates and staggered rise and fall cycles on the yield of carbon tetrafluoride, thereby obtaining the optimal reaction conditions for carbon tetrafluoride. This application ensures that the gas reacts fully during the collection process through the raising and lowering of the reactor vessel, the gas dispersion mechanism, and the control of the gas channel, while avoiding gas leakage and uneven reaction.

[0014] The location of the vent and the height of the baffle plate in this application can prevent the vent from blowing away the carbon powder on the reactor vessel.

[0015] Other features and advantages of the invention will be set forth in the following description, and will be apparent in part from the description, or may be learned by practicing the invention. The objects and other advantages of the invention are realized and obtained through the structures particularly pointed out in the description and the drawings.

[0016] It should be understood that the above summary and the following detailed description of the invention are exemplary and explanatory, and are intended to provide further explanation of the invention as claimed. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of an embodiment of the present invention.

[0018] Figure 2 This is a cross-sectional view of the reaction channel.

[0019] Figure 3 This is a schematic diagram of the bottom structure of the channel body.

[0020] Figure 4 This is a schematic diagram of the structure when the baffle is folded down.

[0021] Figure 5 This is a schematic diagram of the structure when the shield flips up.

[0022] Explanation of reference numerals in the attached figures: 1. Inlet device; 2. Reaction channel; 21. Channel body; 22. Reactor dish; 221. Reaction boat; 23. Gas dispersion mechanism; 24. Outlet; 241. Baffle plate; 25. Mounting port; 26. Corrugated pipe; 3. Support frame; 4. Collection device; 5. Drive device; 6. Heating device. Detailed Implementation

[0023] To facilitate understanding by those skilled in the art, the structure of the present invention will now be described in further detail with reference to the accompanying drawings: refer to Figure 1-5 A gas collection device suitable for carbon tetrafluoride detection, comprising: Inlet device 1 is connected to a refrigerant source; In this embodiment, a gas collecting bottle can be used as the gas inlet device 1. Since the density of fluorine gas is greater than that of air, the fluorine gas stored in the gas collecting bottle can be output using a downward displacement method. Simultaneously, the gas inlet device 1 can be equipped with a flow meter or similar device to obtain the rate of fluorine gas output.

[0024] The reaction channel 2 is fixedly mounted on the support frame 3 and connected to the air inlet device 1. The reaction channel 2 includes a channel body 21 and several reactor dishes 22. The reactor dishes 22 are used to hold toner. One end of the channel body 21 is provided with a gas dispersion mechanism 23. The gas dispersion mechanism 23 includes two exhaust holes 24 at the top and bottom. The bottom surface of the channel body 21 is provided with multiple mounting ports 25 side by side. Several reactor dishes 22 are respectively installed in the mounting ports 25. In this embodiment, the bottom mounting port 25 directly exposes the reactor dish 22 to the heating device 6 below, achieving efficient and direct heat conduction. The reaction channel 2 serves as the area for the reaction between fluorine gas and carbon powder. Because the density of fluorine gas is less than that of the product carbon tetrafluoride, the carbon tetrafluoride naturally sinks and accumulates on the surface of the carbon powder. The contact efficiency between fluorine gas and carbon powder is reduced because it relies solely on the flow and diffusion of fluorine gas to reach the carbon powder. Therefore, this embodiment provides two rows of vents 24, one above the other, corresponding to the rising and falling positions of the reactor dish 22, respectively. When carbon tetrafluoride sinks and accumulates at the reactor dish 22, raising and lowering the reactor dish 22 allows for the redistribution of the stratified gas within the reaction channel 2.

[0025] Several driving devices 5 are installed on the support frame 3. The driving devices 5 drive the reactor dishes 22 to periodically move up and down in staggered manner. When any reactor dish 22 is lowered by the driving device 5, the corresponding reactor dish 22 blocks the lower row of air outlets 24. When any reactor dish 22 is raised by the driving device 5, the corresponding reactor dish 22 opens the lower row of air outlets 24. In this embodiment, one of the core improvements is that the driving device 5 drives the reactor vessel 22 to periodically stagger its lifting and lowering movements. This staggered lifting and lowering arrangement allows the reactor vessels 22 to be arranged in alternating high and low positions. During this time, the high-density carbon tetrafluoride generated by the reaction settles and accumulates in the lowered reactor vessel 22, while the raised reactor vessel 22 can effectively contact the fluorine gas. After a period of time, such as 30 seconds, the height of the reactor vessels 22 is reversed, causing the raised reactor vessel 22 to descend and the lowered reactor vessel 22 to rise. At this time, the carbon tetrafluoride that had settled around the lowered reactor vessel 22 is lifted and flows out with the incoming airflow, accelerating the contact between the fluorine gas and the carbon powder. Meanwhile, the raised reactor vessel 22, after contacting the upper layer of fluorine gas, allows the fluorine gas to fully diffuse into the carbon powder. However, this can easily lead to an excess of fluorine gas, resulting in the formation of long-chain perfluorinated carbon. Therefore, the raised reactor vessel 22 needs to descend after a period of time to reduce its contact with the fluorine gas. By alternating up and down movements, the reactor vessel 22 can move up and down, thereby making the contact between fluorine gas and carbon powder more even and reducing byproducts.

[0026] A heating device 6 is disposed below the reaction channel 2 and is used to heat the reactor vessel 22; In this embodiment, the heating device 6 can be an alcohol lamp.

[0027] The collecting device 4 is connected to the other end of the channel body 21.

[0028] In this embodiment, the collecting device 4 can be a gas collecting bottle. Since the density of carbon tetrafluoride is greater than that of air, the fluorine gas stored in the gas collecting bottle can be output using a downward displacement method. Simultaneously, the collecting device 4 can be equipped with a flow meter or similar device to obtain the output speed of the carbon tetrafluoride.

[0029] Furthermore, the reactor dish 22 has a cuboid structure, with an opening at the bottom and a reaction boat 221 on the upper surface.

[0030] In this embodiment, the reaction boat 221 can be a square or elliptical concave structure, which can hold carbon powder, and the bottom opening structure allows the reaction boat 221 to directly contact the heat generated by the heating device 6, which facilitates heating of the reactor vessel 22. At the same time, the generated carbon tetrafluoride overflows from the top of the heating boat and flows out with the airflow above.

[0031] Furthermore, the mounting port 25 and the reactor vessel 22 are connected and sealed by a bellows 26.

[0032] In this embodiment, since the reactor vessel 22 needs to be periodically raised and lowered, the bellows 26 has good flexibility and extensibility, enabling it to maintain a tight seal while adapting to the reciprocating motion and preventing leakage of toxic fluorine gas. Furthermore, the bellows 26 can be made of metal, achieving high temperature resistance, corrosion resistance, and a certain degree of elasticity.

[0033] Furthermore, a guide groove is longitudinally provided on one side of the reactor vessel 22, and a guide protrusion is longitudinally provided on the mounting port 25. The reactor vessel 22 is limited in its direction of movement by the cooperation of the guide groove and the guide protrusion.

[0034] In this embodiment, the cooperation between the guide groove and the guide protrusion ensures that the reactor vessel 22 moves strictly in the vertical direction and will not rotate or wobble.

[0035] Furthermore, the driving device 5 includes several driving cylinders, which are respectively disposed at both ends of the support frame 3, and the top of the driving cylinder is connected to the reactor vessel 22.

[0036] In this embodiment, multiple drive cylinders, such as pneumatic cylinders or electric cylinders, are used to achieve independent control of each reactor vessel 22 and to stagger the lifting and lowering sequence of the reactor vessels 22. Furthermore, after the reactor dish 22 is lowered, the height difference between the lower row of air outlets 24 and the corresponding reactor dish 22 is greater than 5 mm; after the reactor dish 22 is raised, the height difference between the upper row of air outlets 24 and the corresponding reactor dish 22 is greater than 2 cm.

[0037] In this embodiment, the height difference between the upper row of vent holes 24 and the corresponding reactor vessel 22 is greater than 2 cm, so that gas flow can be formed above the upper row of vent holes 24 after gas is introduced. On the other hand, the lower row of vent holes 24 can blow away the carbon tetrafluoride deposited on the upper surface of the lower reactor vessel 22. Furthermore, by selecting the height, the height difference between the lower row of vent holes 24 and the corresponding reactor vessel 22 is greater than 5 mm, which can quickly blow away the carbon tetrafluoride deposited on the upper surface of the reactor vessel 22 and prevent the carbon powder from being blown away, thereby increasing the contact efficiency between the carbon powder and the fluorine gas and improving the carbon tetrafluoride yield. The height difference between the upper row of vent holes 24 and the corresponding reactor vessel 22 is greater than 2 cm, which can form an airflow above the reactor vessel 22 without causing the fluorine gas to contact the carbon powder too quickly and generate byproducts.

[0038] The driving device 5 can change the contact efficiency between fluorine gas and carbon powder in different reactor dishes 22. In conjunction with the lower vent 24, the carbon tetrafluoride that settles in the descending reactor dish 22 can be dispersed, thereby improving the contact efficiency between fluorine gas and the corresponding carbon powder. On the other hand, since the distance between the upper vent 24 and the rising reactor dish 22 is greater than the distance between the lower vent 24 and the descending reactor dish 22, the contact efficiency between the rising reactor dish 22 and fluorine gas can be reduced.

[0039] Through multiple experiments, the optimal control cycle for the staggered lifting and lowering of reactor vessel 22 can be obtained. By periodically changing the contact efficiency between fluorine gas and carbon powder, appropriate reaction between carbon powder and fluorine gas can be achieved, reducing by-products and increasing yield.

[0040] Furthermore, the gas dispersion mechanism 23 includes dispersion plates, which are spaced apart at one end of the channel body 21, so that one end of the channel body 21 forms an air inlet chamber.

[0041] Furthermore, the lower row of air outlets 24 is provided with a baffle plate 241, the bottom of the baffle plate 241 is hinged to the dispersion plate, the distance between the bottom of the baffle plate 241 and the air outlet 24 is greater than 5mm, and the reactor vessel 22 is provided with a gap between it and the dispersion plate. When the top of the reactor vessel 22 descends below the bottom of the baffle plate 241, the baffle plate 241 flips down to open the corresponding vent 24; when the top of the reactor vessel 22 rises above the bottom of the baffle plate 241, the baffle plate 241 flips up to block the corresponding vent 24.

[0042] In this embodiment, the upper exhaust vents are not equipped with baffles 241 and remain open, thus continuously generating airflow above the reactor vessel 22. The lower exhaust vents are equipped with baffles 241, ensuring automatic control of the opening and closing of the vent holes 24 as the reactor vessel 22 rises or falls. The upward and downward movement of the baffles 241 achieves precise gas flow control, helping to maintain efficient gas collection and reaction. Simultaneously, by limiting the distance between the bottom of the baffle 241 and the vent hole 24 to greater than 5mm, the baffle 241 remains in a state of blocking the vent hole 24 even when the top of the reactor vessel 22 descends to the bottom of the vent hole 24. The vent hole 24 is only opened to allow air in when the top of the reactor vessel 22 descends to more than 5mm below it, preventing the vent hole 24 from directly venting air from the upper surface of the reactor vessel 22 and thus blowing away the carbon powder inside the reaction boat 221.

[0043] It should be noted that any reference signs placed between parentheses in the claims should not be construed as limiting the claims. The word "comprising" does not exclude the presence of components or steps not listed in the claims. The word "a" or "an" preceding a component does not exclude the presence of a plurality of such components. The invention can be implemented by means of hardware comprising several different components and by means of a suitably programmed computer. In a unit claim enumerating several means, several of these means may be embodied by the same item of hardware. The use of the words first, second, and third, etc., does not indicate any order. These words can be interpreted as names.

[0044] Although preferred embodiments of the invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including both the preferred embodiments and all changes and modifications falling within the scope of the invention.

[0045] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0046] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms should not be construed as necessarily referring to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

Claims

1. A gas collection device suitable for carbon tetrafluoride detection, characterized in that: include: The air intake device (1) is connected to the fluorine gas source; The reaction channel (2) is fixedly mounted on the support frame (3) and connected to the air inlet device (1). The reaction channel (2) includes a channel body (21) and several reactor dishes (22). The reactor dishes (22) are used to hold carbon powder. A gas dispersion mechanism (23) is provided at one end of the channel body (21). The gas dispersion mechanism (23) includes two exhaust holes (24) at the top and bottom. Multiple mounting ports (25) are arranged side by side on the bottom surface of the channel body (21). Several reactor dishes (22) are respectively installed at the mounting ports (25). A number of driving devices (5) are provided on the support frame (3). The driving devices (5) drive the reactor vessels (22) to periodically move up and down. When any reactor vessel (22) is lowered by the driving device (5), the corresponding reactor vessel (22) blocks the lower row of air outlets (24). When any reactor vessel (22) is raised by the driving device (5), the corresponding reactor vessel (22) opens the lower row of air outlets (24). A heating device (6) is provided below the reaction channel (2) for heating the reactor vessel (22); The collecting device (4) is connected to the other end of the channel body (21).

2. The gas collection device for carbon tetrafluoride detection according to claim 1, characterized in that: The reactor vessel (22) has a cuboid structure, with an opening at the bottom and a reaction boat (221) on the upper surface.

3. A gas collection device for detecting carbon tetrafluoride according to claim 1, characterized in that: The mounting port (25) and the reactor vessel (22) are sealed together by a bellows (26).

4. A gas collection device for detecting carbon tetrafluoride according to claim 1, characterized in that: The reactor vessel (22) has a guide groove longitudinally arranged on one side, and the mounting port (25) has a guide protrusion longitudinally arranged. The reactor vessel (22) has its movement direction limited by the cooperation of the guide groove and the guide protrusion.

5. A gas collection device for detecting carbon tetrafluoride according to claim 1, characterized in that: The driving device (5) includes several driving cylinders, which are respectively disposed at both ends of the support frame (3), and the top of the driving cylinder is connected to the reactor vessel (22).

6. A gas collection device for detecting carbon tetrafluoride according to claim 1, characterized in that: After the reactor vessel (22) descends, the height difference between the lower row of air outlets (24) and the corresponding reactor vessel (22) is greater than 5 mm; after the reactor vessel (22) rises, the height difference between the upper row of air outlets (24) and the corresponding reactor vessel (22) is greater than 2 cm.

7. A gas collection device for carbon tetrafluoride detection according to claim 6, characterized in that: The gas dispersion mechanism (23) includes dispersion plates, which are spaced apart at one end of the channel body (21), so that one end of the channel body (21) forms an air inlet chamber.

8. A gas collection device for detecting carbon tetrafluoride according to claim 7, characterized in that: The lower row of air outlets (24) is provided with a baffle plate (241), the bottom of the baffle plate (241) is hinged to the dispersion plate, the distance between the bottom of the baffle plate (241) and the air outlet (24) is greater than 5mm, and the reactor vessel (22) is separated from the dispersion plate. When the top of the reactor vessel (22) descends below the bottom of the baffle plate (241), the baffle plate (241) flips down to open the corresponding vent (24); when the top of the reactor vessel (22) rises above the bottom of the baffle plate (241), the baffle plate (241) flips up to block the corresponding vent (24).

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