Coating device and coating production line

Abstract

The invention provides a coating device and a coating production line. The coating device comprises a coating chamber and a first target door. A to-be-machined part can be contained in the film coating cavity, and a first mounting opening is formed in the film coating cavity. The first target door is used for selectively sealing the first mounting opening, a first target material is arranged on the inner side wall of the first target door, and when the first target door is sealed in the first mounting opening, the first target material is right opposite to the workpiece to be machined. According to the coating device provided by the invention, when the first target material needs to be replaced, the detachable connection between the first target door and the coating chamber is removed, and the first target door is integrally detached from the first mounting opening, so that the first target material on the first target door can be directly replaced or maintained outside the coating chamber; operators do not need to enter a narrow coating chamber for disassembly and assembly, the operation difficulty is greatly reduced, the time for replacing the first target material is shortened, and the production effect of coating is improved.

Description

Technical Field

[0001] This invention belongs to the technical field of coating equipment, and more specifically, relates to a coating device and a coating production line. Background Technology

[0002] Against the backdrop of increasingly demanding requirements for material surface performance in the high-end manufacturing sector, vacuum coating technology, as a key surface treatment method, is constantly expanding its application scope, with multi-target vacuum sputtering or ion plating machines being among the mainstream PVD equipment.

[0003] In existing vacuum coating machines, the targets are mostly fixedly installed inside the vacuum chamber, forming a fixed connection between the target and the chamber. With this installation method, operators need to enter the chamber to remove the old target and install the new one. This process not only interrupts the current coating process but also requires cleaning the chamber to remove any residual gases. Furthermore, the limited space within the chamber makes the removal and installation operations highly constrained, resulting in a cumbersome and time-consuming target replacement process, thus reducing coating production efficiency. Summary of the Invention

[0004] The purpose of this invention is to provide a coating apparatus and a coating production line to solve the technical problems of cumbersome target material replacement process, long time consumption, and reduced coating production efficiency in the prior art.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is: to provide a coating apparatus, comprising:

[0006] A coating chamber, wherein the coating chamber is capable of accommodating a workpiece to be processed, and the coating chamber has a first mounting port; and

[0007] A first target door is used to selectively seal the first mounting port. The inner sidewall of the first target door is provided with a first target material. When the first target door is sealed at the first mounting port, the first target material is facing the workpiece to be processed.

[0008] Furthermore, a movable component is provided on the outside of the first mounting port, and the first target door is mounted on the movable component. The movable component is used to move the first target door closer to or away from the first mounting port.

[0009] Furthermore, the moving component includes a track and a first moving frame, on which the coating chamber is disposed. The first moving frame and the first target door are located on one side of the coating chamber. The first moving frame is detachably connected to the outer side wall of the first target door. The first moving frame is slidably disposed on the track. The first moving frame drives the first target door to move toward or away from the first mounting port.

[0010] Furthermore, the coating chamber is provided with a second mounting port, which is arranged opposite to the first mounting port in the radial direction of the coating chamber;

[0011] The coating apparatus includes a second target door for selectively sealing the second mounting port. The inner sidewall of the second target door is provided with a second target material. When the second target door is sealed at the second mounting port, the second target material is facing the workpiece to be processed.

[0012] Furthermore, the coating apparatus also includes a second movable frame, which is detachably connected to the outer wall of the second target door. The second movable frame and the second target door are located on the other side of the coating chamber. The second movable frame is slidably disposed on the track, and the second movable frame drives the second target door to move toward or away from the second mounting port.

[0013] Furthermore, both the first mounting port and the first target door are square structures, and the coating device also includes a square frame. The square frame is sealed on the side wall of the first mounting port, and the first target door is sealed to the square frame.

[0014] Furthermore, the coating chamber is a horizontal cylindrical tank, and the central axis of the coating chamber extends in the horizontal direction.

[0015] Furthermore, the bottom of the coating chamber is detachably provided with a mounting part, which is used to mount a third target material, and the third target material is used to coat the workpiece.

[0016] Another object of the present invention is to provide a coating production line, including a plurality of vacuum valves and a plurality of the above-mentioned coating devices, wherein the vacuum valves are disposed between two adjacent coating chambers of the coating devices, the track of the coating devices extends along a first direction, and the coating chambers of the plurality of coating devices are arranged along a second direction, wherein the first direction is the radial direction of the coating chambers and the second direction is the axial direction of the coating chambers.

[0017] Furthermore, the coating production line includes an inlet chamber and an outlet chamber, the inlet chamber and the outlet chamber being arranged opposite each other along the second direction, and a plurality of coating chambers being arranged between the inlet chamber and the outlet chamber.

[0018] Compared with the prior art, the coating apparatus provided by the present invention has the following advantages: The coating apparatus of the present invention includes a coating chamber and a first target door. The coating chamber can accommodate the workpiece to be processed, and a first mounting port is provided on the coating chamber. The first target door is used to selectively seal the first mounting port, and a first target material is provided on the inner sidewall of the first target door. When the first target door is sealed at the first mounting port, the first target material faces the workpiece to be processed.

[0019] During the coating process, the first target door seals the first mounting port. The first target material on the inner wall of the first target door is used to coat the workpiece. When it is necessary to replace the first target material, the detachable connection between the first target door and the coating chamber is released, and the first target door is removed entirely from the first mounting port. The first target material on the first target door can then be replaced or maintained directly from outside the coating chamber, eliminating the need for operators to enter the confined coating chamber for disassembly and installation. This significantly reduces operational difficulty, shortens the time required to replace the first target material, and improves the coating production efficiency. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the coating apparatus provided in a preferred embodiment of the present invention.

[0022] Figure 2 This is an exploded view of the coating apparatus provided in a preferred embodiment of the present invention.

[0023] Figure 3 This is a partial structural diagram of the coating apparatus provided in a preferred embodiment of the present invention.

[0024] Figure 4 This is a schematic diagram of the main drum provided in a preferred embodiment of the present invention.

[0025] Figure 5 This is a schematic diagram of the coating production line provided in a preferred embodiment of the present invention.

[0026] Figure 6 This is a partial structural diagram of a coating production line provided in a preferred embodiment of the present invention.

[0027] The main markings in the attached figures are as follows:

[0028] 10. Coating equipment;

[0029] 100. Coating chamber; 110. First mounting port; 120. Second mounting port;

[0030] 200. First target gate; 210. First target material; 220. Second target gate;

[0031] 300. Vacuum pump;

[0032] 400. First driving component;

[0033] 500. Moving component; 510. Track; 520. First moving frame; 530. Second moving frame;

[0034] 600, square frame;

[0035] 700. Main drum; 710. Main drum support; 720. Main drum transfer frame; 730. Gear mechanism;

[0036] 800, Vacuum valve; 810, Inlet to oral cavity; 820, Outlet to oral cavity. Detailed Implementation

[0037] To make the technical problems to be solved, the technical solutions, and the beneficial effects of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and are not intended to limit the present invention.

[0038] like Figures 1 to 3 As shown, in some embodiments, a coating apparatus 10 includes a coating chamber 100 and a first target door 200. The coating chamber 100 can accommodate a workpiece to be processed, and a first mounting port 110 is provided on the coating chamber 100. The first target door 200 is used to selectively seal the first mounting port 110, and a first target material 210 is provided on the inner sidewall of the first target door 200. When the first target door 200 is sealed at the first mounting port 110, the first target material 210 is facing the workpiece to be processed. Specifically, the coating apparatus 10 can be an ion plating machine.

[0039] During the coating process, the first target door 200 seals the first mounting port 110. The first target material 210 on the inner side wall of the first target door 200 is used to coat the workpiece. When it is necessary to replace the first target material 210, the detachable connection between the first target door 200 and the coating chamber 100 is released, and the first target door 200 is removed from the first mounting port 110. The first target material 210 on the first target door 200 can then be replaced or maintained directly from outside the coating chamber 100, without requiring operators to enter the confined coating chamber 100 for disassembly and installation. This significantly reduces the difficulty of operation, shortens the time for replacing the first target material 210, and improves the coating production effect.

[0040] Specifically, the workpiece to be processed is a workpiece that needs to undergo surface coating treatment. The material can be metal, ceramic, etc., depending on the process requirements. It is placed on the support structure inside the coating chamber 100 to ensure stable position during the coating process.

[0041] Specifically, the coating chamber 100 is a cavity structure for achieving vacuum coating. The coating chamber 100 is a sealed design. The coating chamber 100 has good airtightness and pressure resistance. The interior of the coating chamber 100 has sufficient space to provide the vacuum environment required for coating the workpiece.

[0042] Specifically, the coating chamber 100 is a horizontal cylindrical tank. The central axis of the coating chamber 100 extends horizontally. Existing vertical equipment suffers from limited height and target placement constraints, resulting in a limited number of targets and low production efficiency. The horizontal cylindrical coating chamber 100 of this application can significantly increase the number of targets installed through a multi-target layout in the circumferential direction, thereby exciting more coating ions per unit time and directly improving production efficiency. At the same time, the horizontal coating chamber 100 is not limited by the height of the plant, solving the capacity bottleneck of vertical equipment.

[0043] Specifically, the coating apparatus 10 includes a vacuum pump 300. The vacuum pump 300 is disposed on the coating chamber 100. The vacuum pump 300 is used to evacuate the interior of the coating chamber 100. The vacuum pump 300 extracts gas molecules from the coating chamber 100, reduces the internal gas pressure of the coating chamber 100, and brings the coating chamber 100 to the vacuum state required for the coating process, thus preventing the workpiece from being contaminated by other gases.

[0044] Specifically, multiple vacuum pumps 300 can be provided. These multiple vacuum pumps 300 are spaced apart along the axial direction of the coating chamber 100, forming a multi-point pumping layout. Each vacuum pump 300 independently acts on a specific axial region of the coating chamber 100. By starting and stopping synchronously or on demand, gas molecules within the coating chamber 100 are rapidly expelled from multiple extraction points, avoiding the pressure gradient difference that occurs when a single vacuum pump 300 is used for pumping. This achieves a uniform decrease in gas pressure across all axial regions of the coating chamber 100, rapidly constructing a uniform high vacuum environment throughout the entire area.

[0045] Specifically, the vacuum pump 300 is located at the top of the coating chamber 100.

[0046] like Figure 2 As shown, in some embodiments, a first mounting port 110 is provided on the coating chamber 100. The first mounting port 110 is a square opening formed in the side wall of the coating chamber 100. The diameter of the first mounting port 110 is adapted to the sealing end of the first target door 200.

[0047] Specifically, the first mounting port 110 is located on the side wall of the coating chamber 100 and is a square opening. After the first target door 200 moves horizontally, it can be precisely inserted into the square first mounting port 110 to achieve a sealed closure. Alternatively, the first target door 200 can be moved away from the first mounting port 110 to allow for target material replacement and maintenance on the first target door 200.

[0048] Specifically, the first target door 200 can be made of wear-resistant and high-temperature-resistant material. A target mounting base is provided on the inner wall of the first target door 200. The first target 210 can be fixed to the mounting base on the inner wall of the first target door 200 by bolts or clips. The coated surface of the first target 210 faces the interior of the coating chamber 100.

[0049] like Figure 3 As shown, in some embodiments, the coating apparatus 10 further includes a first driving member 400. The first driving member 400 is disposed on the inner sidewall of the first target gate 200. The first driving member 400 is connected to the first target material 210. The first driving member 400 is used to drive the first target material 210 to rotate. The first driving member 400 can be a rotating cathode.

[0050] It should be noted that the first driving component 400 is powered by an external power source and works in conjunction with the transmission structure to output stable rotational power. The first driving component 400 is fixedly connected to the first target 210. When powered on, the first driving component 400 drives the first target 210 to rotate at a constant speed around its own axis, so that all areas on the surface of the first target 210 can participate in the sputtering process evenly, thereby improving the coating efficiency.

[0051] like Figure 1 As shown, in some embodiments, a movable component 500 is provided on the outer side of the first mounting port 110. The first target door 200 is mounted on the movable component 500. The movable component 500 is used to move the first target door 200 closer to or further away from the first mounting port 110. Specifically, the movable component 500 moves in the horizontal direction.

[0052] Specifically, the moving assembly 500 includes a track 510 and a first moving frame 520. A coating chamber 100 is disposed on the track 510. The first moving frame 520 and the first target door 200 are located on one side of the coating chamber 100, and the first moving frame 520 is detachably connected to the outer side wall of the first target door 200. The first moving frame 520 is slidably disposed on the track 510. The first moving frame 520 drives the first target door 200 to move towards or away from the first mounting opening 110.

[0053] It should be noted that the track 510 provides a stable sliding guide base for the first movable frame 520. The first movable frame 520 has a frame structure. The bottom of the first movable frame 520 is equipped with rollers or sliders that are compatible with the track 510, ensuring that the first movable frame 520 can move smoothly along the track 510 and maintain a horizontal posture without deviation during the movement.

[0054] Specifically, the first movable frame 520 and the first target door 200 are both located on the same side of the coating chamber 100, and the first target door 200 is tightly fitted to the first movable frame 520 through a detachable connection structure. After the first movable frame 520 is slidably set on the track 510, the sealing end of the first target door 200 and the first mounting port 110 are at the same horizontal height, ensuring that the movable frame can accurately align with the mounting port when it moves the target door.

[0055] It should be noted that before the coating operation, the first target door 200 should be fixed to the first movable frame 520 via a detachable connection structure to ensure a secure connection. Push the first movable frame 520 along the track 510 towards the coating chamber 100 until the sealing end of the first target door 200 is completely fitted with the first mounting port 110, completing the sealing installation of the target door, and the coating process can then be started. When it is necessary to replace the target material or clean the target door, stop the coating operation and push the first movable frame 520 in the opposite direction along the track 510, moving the first target door 200 away from the first mounting port 110 until the target door is completely detached from the mounting port and reaches a safe operating position. Then, disassemble the connection structure between the first target door 200 and the first movable frame 520, remove the first target door 200 separately for target material replacement or cleaning, and then reconnect the target door to the movable frame. Push the movable frame to reset the target door and seal the first mounting port 110, and the coating operation can be resumed.

[0056] like Figure 2 As shown, in some embodiments, the coating apparatus 10 further includes a square frame 600. The square frame 600 is sealed to the side wall of the first mounting port 110. The first target door 200 is sealed to the square frame 600.

[0057] The square frame 600 adopts a rectangular structure that precisely fits the sidewall of the first mounting port 110. The outer periphery of the square frame 600 can be fixed and sealed to the sidewall of the first mounting port 110 by welding, sealant, or bolt tightening. After the square frame 600 is fixed to the sidewall of the first mounting port 110, its inner end face forms a standardized sealing reference surface, and the inner contour dimensions of the square frame 600 precisely match the sealing end dimensions of the first target door 200, guiding the movement of the first target door 200. When the first target door 200 approaches the first mounting port 110 via the moving component 500, the square frame 600 guides the target door to precise alignment, preventing target door misalignment that could lead to sealing failure, and ensuring that after the target door is sealed, the inner target material is precisely aligned with the workpiece to be processed.

[0058] like Figure 2 As shown, in some embodiments, the coating chamber 100 has a second mounting port 120. The second mounting port 120 and the first mounting port 110 are arranged opposite to each other in the radial direction of the coating chamber 100. The coating apparatus 10 includes a second target door 220 for selectively sealing the second mounting port 120. A second target material is provided on the inner sidewall of the second target door 220, and when the second target door 220 is sealed at the second mounting port 120, the second target material is facing the workpiece to be processed.

[0059] Both the first mounting port 110 and the second mounting port 120 are square openings formed on the side wall of the coating chamber 100. The diameter of the first mounting port 110 is equal to the diameter of the second mounting port 120. The first mounting port 110 and the second mounting port 120 cover the workpiece to be processed inside the coating chamber 100 from both sides. The working principle of the second target door 220 is the same as that of the first target door 200, and will not be described again here.

[0060] In some embodiments, the coating apparatus 10 further includes a second driving member. The second driving member is disposed on the inner sidewall of the second target gate 220. The second driving member is connected to the second target material. The second driving member is used to drive the second target material to rotate. Specifically, the second driving member can be a rotating cathode.

[0061] The second drive unit, powered by an external power source and working in conjunction with the transmission structure, can output stable rotational power. The second drive unit is fixedly connected to the second target material. When powered on, the second drive unit drives the second target material to rotate at a constant speed around its own axis, ensuring that all areas of the second target material surface participate uniformly in the sputtering process, thereby improving coating efficiency.

[0062] like Figure 1 and Figure 2As shown, in some embodiments, the coating apparatus 10 further includes a second movable frame 530. The second movable frame 530 is detachably connected to the outer wall of the second target door 220. The second movable frame 530 and the second target door 220 are located on the other side of the coating chamber 100. The second movable frame 530 is slidably disposed on the track 510, and the second movable frame 530 drives the second target door 220 to move toward or away from the second mounting port 120.

[0063] Before the coating operation, connect the second target door 220 to the second movable frame 530 via a detachable structure. Push the second movable frame 530 along the track 510 towards the coating chamber 100 until the sealing end of the second target door 220 is completely sealed to the second mounting port 120. Simultaneously, ensure that the first target door 200 seals the first mounting port 110. The dual-target position is now ready for operation, and the coating process can be started. When maintenance of the second target material is required, stop the coating operation, pull the second movable frame 530 in the opposite direction along the track 510, moving the second target door 220 away from the second mounting port 120 to a safe operating position. Disassemble the connection structure between the second target door 220 and the second movable frame 530, and remove the second target door 220 separately for target replacement or cleaning. After maintenance, reassemble the second target door 220 with the second movable frame 530, push the movable frame to reset the target door along the track 510, and seal the second mounting port 120 with the second target door 220. The dual-target collaborative coating operation can then be resumed.

[0064] In some embodiments, a mounting portion is detachably provided at the bottom of the coating chamber 100. The mounting portion is used to mount a third target. The third target is used to coat the workpiece. Target positions are arranged on both sides of the coating chamber 100. Mounting the third target at the bottom of the coating chamber 100 enables a three-dimensional multi-target layout on both sides and the bottom of the coating chamber 100, thereby adding a sputtering dimension to the third target. The third target works in conjunction with the first target 210 and the second target on both sides to form omnidirectional ion bombardment, compensating for the deficiency of insufficient bottom coverage of the workpiece by a single side target.

[0065] like Figure 1 , Figure 2 and Figure 4 As shown, in some embodiments, the coating apparatus 10 further includes a main drum 700, a main drum support 710, and a main drum transfer frame 720. The main drum 700 is disposed on the main drum support 710. The main drum support 710 is connected to the main drum transfer frame 720. The workpiece to be processed is transported to the coating chamber 100 through the main drum 700. The swing arm gear mechanism inside the coating chamber 100 meshes with the gear mechanism 730 on the main drum 700, causing the main drum 700 to rotate within the coating chamber 100.

[0066] like Figure 5 and Figure 6As shown, in another embodiment, a coating production line includes a plurality of vacuum valves 800 and a plurality of the aforementioned coating devices 10. The vacuum valves 800 are disposed between the coating chambers 100 of two adjacent coating devices 10. The tracks 510 of the coating devices 10 extend along a first direction, and the coating chambers 100 of the plurality of coating devices 10 are arranged along a second direction. The first direction is the radial direction of the coating chambers 100, and the second direction is the axial direction of the coating chambers 100.

[0067] The coating production line is an integrated system for continuous coating, consisting of multiple coating units 10 and vacuum valves 800 arranged in a preset layout. It is the core carrier for large-scale coating operations. Each coating unit 10 is a unit with independent coating functions, and its core working space is the coating chamber 100, ensuring multi-target layout and vacuum environment construction. The vacuum valves 800 are sealing and isolating components, employing a vacuum-resistant and high-sealing structural design to achieve selective communication and isolation between adjacent coating units 10. The coating chambers 100 of the multiple coating units 10 are arranged along a second direction, forming a series layout.

[0068] Each coating device 10 has a track 510 extending radially outward along its own coating chamber 100, and the extension directions of the tracks 510 of each coating device 10 remain parallel. The end openings of two adjacent coating chambers 100 are aligned with each other, and the vacuum valve 800 is fixedly installed at the joint of the adjacent coating chambers 100 to achieve a sealed connection between them.

[0069] Multiple coating chambers 100 are connected in series along the second direction through vacuum valves 800 to form the main body of the production line. The track 510 of each coating device 10 is connected to the side wall of the corresponding coating chamber 100 along the first direction. The integrated structure formed together ensures the continuity of continuous production and does not interfere with the target gate operation of a single coating device 10.

[0070] Multiple coating chambers 100 are connected in series along the axial direction. Combined with the isolation and connectivity functions of vacuum valves 800, continuous multi-layer coating or parallel multi-chamber coating can be achieved, significantly shortening process time. Vacuum valves 800 ensure that the vacuum environment of adjacent chambers does not interfere with each other, eliminating the need to rupture the entire chamber during maintenance and ensuring continuous production line operation. The track 510 extends radially, without increasing the axial or vertical space occupied by the production line, adapting to factory space constraints. Each coating unit 10 is independently equipped with a track 510, ensuring that target door movement and operation do not interfere with each other, improving maintenance flexibility. The overall layout is compact, with high space utilization, and the number of coating units 10 can be increased or decreased according to film layer requirements, enhancing the production line's flexible production capacity while ensuring vacuum stability and consistent coating quality in each chamber.

[0071] Before production, the number of coating devices 10 is determined according to the coating requirements. Each coating chamber 100 is connected and fixed along the second direction via vacuum valves 800, ensuring that each track 510 extends normally along the first direction. All vacuum valves 800 are closed, and each coating chamber 100 is individually evacuated to the target vacuum level, completing the preparation work. The production line is started, and the workpiece to be processed is fed into the first coating chamber 100 for coating operation. After completion, the vacuum valve 800 between this chamber and the next coating chamber 100 is opened, and the workpiece to be processed is transferred axially to the next chamber for further processing, thus completing multi-chamber continuous coating. If a coating device 10 requires maintenance, the vacuum valves 800 on both sides of it are closed, and the chamber is evacuated separately for target replacement or repair. Other coating devices 10 can operate normally. After maintenance, the vacuum is re-evacuated and the vacuum valves 800 on both sides are opened to restore continuous operation of the production line. The entire process is efficient and flexible, ensuring production efficiency and quality.

[0072] like Figure 5 As shown, in some embodiments, the coating production line includes an inlet chamber 810 and an outlet chamber 820, which are arranged opposite to each other along a second direction, and a plurality of coating chambers 100 are provided between the inlet chamber 810 and the outlet chamber 820. Specifically, the coating chambers 100 can be process chambers.

[0073] Specifically, the inlet chamber 810 is a cylindrical sealed cavity, serving as the initial stage for the workpiece to enter the production line. The outlet chamber 820 is also a cylindrical sealed cavity, serving as the output stage for the workpiece after coating. The inlet chamber 810 and outlet chamber 820 are arranged opposite each other along the second direction, located at opposite ends of the production line, forming a linear layout of "feeding, processing, and discharging". Multiple process chambers are arranged sequentially between the inlet chamber 810 and outlet chamber 820 along the second direction, with the end openings of adjacent chambers precisely aligned.

[0074] Specifically, the output end of the inlet chamber 810 is connected to the input end of the first process chamber, and adjacent process chambers are connected by a sealing structure. The output end of the last process chamber is connected to the input end of the outlet chamber 820. The entire series structure forms a continuous cavity channel along the second direction, ensuring that the workpiece to be processed can be smoothly transported along the axial direction, while ensuring the structural independence and sealing reliability of each chamber.

[0075] It should be noted that the terminology used above is for describing specific embodiments only and is not intended to limit the exemplary embodiments of the present invention. When the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof. The order of execution of actions, steps, etc., in the apparatus and methods shown in the specification and drawings can be implemented in any order unless a specific order is expressly specified, and as long as the output of a previous process is not used in a subsequent process. Similar sequential terms used for ease of description do not imply that such an order must be followed.

[0076] Techniques, methods, and apparatus known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and apparatus should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following figures denote similar items; therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0077] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A coating apparatus, characterized in that, include: A coating chamber, wherein the coating chamber is capable of accommodating a workpiece to be processed, and the coating chamber has a first mounting port; and A first target door is used to selectively seal the first mounting port. The inner sidewall of the first target door is provided with a first target material. When the first target door is sealed at the first mounting port, the first target material is facing the workpiece to be processed.

2. The coating apparatus as described in claim 1, characterized in that, A movable component is provided on the outside of the first mounting port, and the first target door is mounted on the movable component. The movable component is used to move the first target door closer to or away from the first mounting port.

3. The coating apparatus as described in claim 2, characterized in that, The moving component includes a track and a first moving frame. The coating chamber is disposed on the track. The first moving frame and the first target door are located on one side of the coating chamber. The first moving frame is detachably connected to the outer side wall of the first target door. The first moving frame is slidably disposed on the track. The first moving frame drives the first target door to move towards or away from the first mounting port.

4. The coating apparatus as described in claim 3, characterized in that, The coating chamber is provided with a second mounting port, which is arranged opposite to the first mounting port in the radial direction of the coating chamber; The coating apparatus includes a second target door for selectively sealing the second mounting port. The inner sidewall of the second target door is provided with a second target material. When the second target door is sealed at the second mounting port, the second target material is facing the workpiece to be processed.

5. The coating apparatus as described in claim 4, characterized in that, The coating apparatus further includes a second movable frame, which is detachably connected to the outer wall of the second target door. The second movable frame and the second target door are located on the other side of the coating chamber. The second movable frame is slidably mounted on the track and drives the second target door to move towards or away from the second mounting port.

6. The coating apparatus as described in claim 1, characterized in that, Both the first mounting port and the first target door are square structures. The coating device also includes a square frame, which is sealed to the side wall of the first mounting port. The first target door is sealed to the square frame.

7. The coating apparatus as described in claim 1, characterized in that, The coating chamber is a horizontal cylindrical tank, and the central axis of the coating chamber extends in the horizontal direction.

8. The coating apparatus as described in claim 1, characterized in that, The bottom of the coating chamber is detachably provided with a mounting part, which is used to mount a third target material, and the third target material is used to coat the workpiece.

9. A coating production line, characterized in that, The device includes multiple vacuum valves and multiple coating devices according to any one of claims 1 to 8, wherein the vacuum valves are disposed between two adjacent coating chambers of the coating devices, the track of the coating devices extends along a first direction, and the coating chambers of the multiple coating devices are arranged along a second direction, wherein the first direction is the radial direction of the coating chambers, and the second direction is the axial direction of the coating chambers.

10. The coating production line as described in claim 9, characterized in that, The coating production line includes an inlet chamber and an outlet chamber, which are arranged opposite to each other along the second direction, and multiple coating chambers are arranged between the inlet chamber and the outlet chamber.

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