Optical detection device of display equipment and method thereof

Abstract

The invention discloses an optical detection device and method for display equipment. The device comprises an integrated optical detection mechanism, a moving mechanism and a control mechanism. The integrated mechanism comprises an alignment illumination unit, an excitation light source unit and a common imaging optical unit, and is configured to guide light beams to the same field of view. The control mechanism controls the light source to work in a time-sharing mode so as to capture alignment and excitation images respectively, and controls the moving mechanism to adjust the position based on the alignment images, so that the view field covers the to-be-excited element. Detection is carried out under a single coordinate system through the common imaging unit, cross-system coordinate conversion errors are fundamentally eliminated, and high-precision alignment is ensured; meanwhile, the hardware architecture is simplified through function integration, the size and the cost are reduced, large mechanical switching is not needed, and the detection efficiency is remarkably improved.

Description

Technical Field

[0001] This application relates to the field of display device defect detection technology, and in particular to an optical inspection device and method for display devices. Background Technology

[0002] In the manufacturing process of display devices, automated optical inspection is a crucial step in ensuring product yield. Photoluminescence inspection of display devices typically involves two key steps: first, "alignment," which uses visible light to illuminate and identify reference marks (mark points) on the screen to determine the product's position; and second, "excitation detection," which uses a specific excitation light source to illuminate specific pixel areas, causing them to emit light and capturing the image.

[0003] The aforementioned "alignment" and "excitation detection" are typically achieved by two independent optical systems that need to be transferred between different detection stations. For example, the alignment camera first takes a picture of the mark point at one station, calculates the coordinates, and then moves the product to another station where the excitation detection head performs the operation; or multiple cameras arranged side by side are used at the same station to handle alignment and detection respectively.

[0004] The inventors discovered that commonly used techniques have the following drawbacks: When using multiple independent optical imaging systems (such as a positioning camera and a detection camera), complex cross-system coordinate calibration is required. Due to inconsistencies in mechanical installation errors and lens distortion, it is difficult for the two coordinate systems to be completely aligned. This results in deviations in the target position calculated based on the positioning image after switching to the detection camera, making it difficult to meet the detection requirements of high-precision micro-pixels.

[0005] Furthermore, multiple separate optical systems increase the size and hardware cost of the equipment, making production line integration more difficult. On the other hand, the movement between different devices, or the switching of alignment and inspection heads through large-scale mechanical movements, consumes a lot of movement time and reduces the overall inspection efficiency of the production line. Summary of the Invention

[0006] The purpose of this application is to provide an optical inspection device and method for display devices that eliminates coordinate system errors, significantly improves alignment accuracy, and has a compact structure and improved detection efficiency.

[0007] To achieve the above-mentioned objectives, one embodiment of this application provides an optical detection device for a display device, comprising: An integrated optical inspection mechanism includes a positioning illumination unit, an excitation light source unit, and a shared imaging optical unit, wherein the positioning illumination unit and the excitation light source unit are configured to guide a light beam into the same field of view of the shared imaging optical unit; A moving mechanism configured to move the integrated optical inspection mechanism relative to the display device; The control mechanism is configured to control the alignment illumination unit and the excitation light source unit to operate in a time-division manner, so that the common imaging optical unit captures the alignment image corresponding to the alignment illumination unit and the excitation image corresponding to the excitation light source unit, respectively. The control mechanism is also configured to control the moving mechanism to adjust the position of the integrated optical detection mechanism based on the alignment image, so that the field of view covers the element to be excited in the display device.

[0008] As a further improvement of this application, the integrated optical inspection mechanism further includes an optical path merging component, which is arranged along the optical axis direction of the common imaging optical unit; The illumination light emitted by the alignment illumination unit and the excitation light emitted by the excitation light source unit are both reflected or refracted by the optical path merging component and then projected onto the display device along the same optical path.

[0009] As a further improvement of this application, the optical path merging component includes a first beam splitter configured to reflect illumination light from the alignment illumination unit to the field of view, while allowing imaging light from the field of view to pass through to enter the shared imaging optical unit.

[0010] As a further improvement of this application, the optical path merging component includes a second beam splitter, which reflects the excitation light of the excitation band emitted by the excitation light source unit to the field of view, while allowing imaging light from the field of view to pass through and enter the shared imaging optical unit.

[0011] As a further improvement of this application, the first beam splitter and the second beam splitter are arranged sequentially at intervals along the optical axis of the common imaging optical unit; wherein, the first beam splitter is a beam splitter and the second beam splitter is a dichroic mirror.

[0012] As a further improvement of this application, the moving mechanism is configured to drive the integrated optical inspection mechanism to move relative to the display device in the X-axis, Y-axis and Z-axis directions.

[0013] As a further improvement of this application, the Z-axis movement of the moving mechanism is configured to perform coarse adjustment in the height direction to place the integrated optical detection mechanism at a preset height; The integrated optical inspection mechanism further includes an autofocus unit controlled by the control mechanism. The autofocus unit is configured to perform fine-tuning of the focal length based on the image sharpness captured by the shared imaging optical unit during the operation of the alignment illumination unit or the excitation light source unit.

[0014] As a further improvement of this application, the integrated optical detection mechanism includes an emission filter, which is configured to be placed in the imaging optical path of the common imaging optical unit, and its cutoff band covers the emission band of the excitation light source unit to filter out residual excitation light reflected from the surface of the display device and entering the optical path, and allow imaging light of the fluorescence band generated by the excited element to pass through.

[0015] As a further improvement of this application, the alignment illumination unit is a visible light source, and the excitation light source unit is an ultraviolet light source; The optical detection device is configured as a whole and operates within a vacuum chamber.

[0016] To achieve one of the above-mentioned objectives, one embodiment of this application provides an optical detection method for a display device, comprising the following steps: The alignment illumination unit of the integrated optical inspection mechanism is activated to illuminate the display device, wherein the integrated optical inspection mechanism further includes an excitation light source unit and a common imaging optical unit, and the alignment illumination unit and the excitation light source unit are configured to guide the light beam into the same field of view of the common imaging optical unit; The shared imaging optical unit is controlled to capture alignment images; Based on the alignment image, the control mechanism adjusts the position of the integrated optical detection mechanism so that the field of view covers the element to be excited in the display device; The alignment illumination unit is turned off, and the excitation light source unit is turned on to excite the element to be excited; The shared imaging optical unit is controlled to capture the excitation image.

[0017] As a further improvement to this application, the step of controlling the moving mechanism to adjust the position of the integrated optical detection mechanism based on the alignment image includes: The control movement mechanism adjusts the position of the integrated optical detection mechanism so that the shared imaging optical unit captures an alignment image containing reference markers; Identify the position of the reference marker in the alignment image and calculate its positional deviation from the center of the field of view; By combining the preset relative position of the reference marker center and the element to be excited in the alignment image, and the positional deviation, the target movement of the integrated optical detection mechanism is calculated. The moving mechanism is controlled to perform displacement compensation in the X and Y axis directions so that the field of view covers the element to be excited.

[0018] Compared with commonly used technologies, this application has the following advantages: The alignment illumination unit and excitation light source unit of the optical inspection device of this display device share the same imaging optical unit, and are inspected under the same optical physical reference and a single coordinate system. This fundamentally eliminates the coordinate system transformation errors and mechanical installation errors caused by cross-camera and cross-station operations in the prior art, ensuring that the excitation light source can be aligned with the element to be excited with extremely high precision. Furthermore, by sharing the imaging optical unit, multiple functions are integrated, simplifying the hardware architecture of the optical system, reducing the size of the device, lowering equipment costs and maintenance difficulty, and eliminating the need for large-scale mechanical switching or station transfers, significantly reducing the auxiliary action time during the inspection process and improving the inspection efficiency of the display device. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of an optical detection device according to an embodiment of this application; Figure 2 This is a cross-sectional view of an integrated optical inspection mechanism according to an embodiment of this application; Figure 3 This is a schematic diagram of an optical detection device according to an embodiment of this application; Figure 4 This is a schematic diagram showing the positional relationship between a reference mark and a component to be excited on a display device according to an embodiment of this application; Figure 5 This is a flowchart of an optical detection method for a display device according to an embodiment of this application; Among them, 1000 is an optical inspection device; 100 is an integrated optical inspection mechanism; 10 is an alignment illumination unit; 20 is an excitation light source unit; 30 is a shared imaging optical unit; 40 is a lens; 41 is a field of view; 50 is an optical path merging assembly; 51 is a first beam splitter; 52 is a second beam splitter; 60 is an emission filter; 70 is an autofocus unit; 200 is a moving mechanism; 300 is a display device; 310 is a reference mark; 320 is an element to be excited; L1 is an illumination ray; L2 is an excitation ray; and L3 is an imaging ray. Detailed Implementation

[0020] The present application will now be described in detail with reference to the specific embodiments shown in the accompanying drawings. However, these embodiments do not limit the present application, and any structural, methodological, or functional modifications made by those skilled in the art based on these embodiments are included within the scope of protection of this application.

[0021] It should be understood that terms such as “above,” “over,” “below,” and “under” used herein to indicate spatial relative position are for illustrative purposes to describe the relationship of one unit or feature relative to another unit or feature as shown in the accompanying drawings. The terms “spatial relative position” may be intended to include different orientations of the equipment in use or operation other than those shown in the figures.

[0022] This embodiment provides an optical inspection device for high-precision defect detection of display devices, solving the problems of coordinate transformation errors and low efficiency caused by the use of separate devices for "alignment" and "detection" in the prior art.

[0023] The display device can be an LED, OLED display panel, MiniLED panel, etc.

[0024] Optical inspection device 1000 Figure 1-3 As shown, it includes an integrated optical inspection mechanism 100, a moving mechanism 200, and a control mechanism.

[0025] Unlike traditional equipment, this embodiment highly integrates the alignment function and the excitation detection function into the same physical unit, namely the integrated optical detection mechanism 100. Various optical elements are precisely arranged along the optical path inside this mechanism to achieve a coaxial optical path.

[0026] The integrated optical inspection mechanism 100 includes a positioning illumination unit 10, an excitation light source unit 20, and a shared imaging optical unit 30. The positioning illumination unit 10 and the excitation light source unit 20 are configured to guide the light beam into the same field of view 41 of the shared imaging optical unit 30.

[0027] The alignment illumination unit 10 is used to provide an illumination beam, such as visible light, to assist in positioning. Its function is to illuminate the reference mark 310 or feature area on the display device 300 to facilitate position identification.

[0028] Display device 300, such as Figure 4 As shown, the display device 300 is provided with a reference mark 310 and a test area, wherein the reference mark 310 can be a Mark point, and the test area can be an element to be excited 320, such as an RGB pixel unit.

[0029] The excitation light source unit 20 is used to provide a specific excitation beam, such as ultraviolet light or laser light of a specific wavelength, which is used to irradiate the area to be tested of the display device 300 to cause photoluminescence, thereby detecting material properties or defects.

[0030] The shared imaging optical unit 30 is a common vision acquisition channel, which typically includes an imaging lens group and an image sensor, such as an area array camera.

[0031] The integrated optical inspection mechanism 100 includes a lens 40, the area of ​​the object side that can be clearly imaged is the field of view 41.

[0032] The optical paths of the alignment illumination unit 10 and the excitation light source unit 20 are specially configured so that their beams can ultimately be guided to the same physical area, namely, the same field of view 41 of the shared imaging optical unit 30. In this way, whether the light emitted by the alignment illumination unit 10 or the light emitted by the excitation light source unit 20 reaches the surface of the display device 300, the area covered by it overlaps or corresponds spatially with the area captured by the shared imaging optical unit 30. The optical detection device 1000 does not need to make large-scale mechanical switching or change the lens 40 between "alignment" and "detection".

[0033] Furthermore, since the alignment imaging and excitation imaging use the same camera and the same imaging optical path, the coordinate system calibration problem caused by mechanical installation errors and lens distortion differences in traditional dual-camera systems is eliminated. The entire detection is based on a single, unified optical coordinate system, which ensures the consistency of the position reference from a physical perspective.

[0034] Mobile organization 200 Figure 1 As shown, the configuration is such that the integrated optical inspection mechanism 100 can move relative to the display device 300.

[0035] The moving mechanism 200 can be a gantry structure, a cantilever structure, or a precision linear module platform. It can drive the detection head to move horizontally above the display device 300, thereby covering the detection area at different positions on the display device 300.

[0036] The control mechanism is the "brain" of the optical detection device 1000. It is electrically connected to the above-mentioned units and is equipped with a specific control program to control each mechanism. The control mechanism can be an industrial computer, PLC or motion controller, etc.

[0037] The control mechanism is configured to control the alignment illumination unit 10 and the excitation light source unit 20 in a time-division manner, so that the common imaging optical unit 30 captures the alignment image corresponding to the alignment illumination unit 10 and the excitation image corresponding to the excitation light source unit 20, respectively. The time-division control separates the two actions of "alignment" and "detection" on the time axis.

[0038] During the "alignment" phase, the control mechanism activates only the alignment illumination unit 10 and deactivates the excitation light source unit 20. At this time, the shared imaging optical unit 30 captures a clear, interference-free alignment image. During the "detection" phase, the control mechanism deactivates the alignment illumination unit 10 and activates the excitation light source unit 20. At this time, the shared imaging optical unit 30 captures the excitation image. This effectively avoids interference from strong excitation light on the alignment image and prevents visible illumination light from overwhelming weak fluorescence signals, ensuring a high signal-to-noise ratio for both images. Furthermore, mode switching can be achieved without mechanical action, greatly improving the detection cycle time.

[0039] Furthermore, the control mechanism is configured to adjust the position of the integrated optical detection mechanism 100 based on the alignment image, so that the field of view 41 covers the element 320 to be excited in the display device 300, thus establishing a feedback closed loop from "image" to "motion".

[0040] In this way, the optical inspection device 1000 can tolerate the initial placement error when the product is loaded or the long-distance movement error of the moving mechanism 200. It can make real-time corrections based on the actual captured images, achieving extremely high-precision "what you see is what you get" alignment and inspection.

[0041] This embodiment integrates alignment and excitation functions within the same field of view 41, and combines time-division imaging with visual position feedback control to achieve a compact optical detection scheme that requires no cross-system calibration and has high positioning accuracy.

[0042] In one embodiment, the integrated optical inspection mechanism 100 further includes an optical path merging component 50, such as... Figure 1-3 As shown, the optical path merging component 50 is arranged along the optical axis of the common imaging optical unit 30 to achieve coupling between the dual light sources and the imaging optical path. The illumination light L1 emitted by the alignment illumination unit 10 and the excitation light L2 emitted by the excitation light source unit 20 are both guided by the optical path merging component 50 and then projected vertically onto the display device 300 along the same optical path.

[0043] At the same time, the optical path merging component 50 transmits the light reflected or emitted by the display device 300 to the shared imaging optical unit 30.

[0044] The optical path merging component 50 refracts or reflects light beams from light sources with different physical locations and different spectral characteristics, causing their optical axes to deflect to coincide with the imaging optical axis of the shared imaging optical unit 30.

[0045] In one embodiment, the optical path merging assembly 50 includes a first beam splitter 51 configured to reflect illumination light L1 from the alignment illumination unit 10 to the field of view 41, while allowing imaging light L3 from the field of view 41 to pass through to enter the shared imaging optical unit 30.

[0046] In this embodiment, the first beam splitting element 51 is preferably a beam splitter, such as a flat beam splitter or a cubic beam splitter.

[0047] The first beam-splitting element 51 is located at the intersection of the optical path of the alignment illumination unit 10 and the imaging principal optical axis. The first beam-splitting element 51 has partial reflectivity for visible light, for example, a beam splitting ratio of 1:1 or 3:7. Figure 2 and 3 As shown, when the illumination light L1 emitted by the alignment illumination unit 10 is incident horizontally, the first beam splitting element 51 reflects it downwards by 90°, so that it is projected along the main optical axis into the lower field of view 41.

[0048] Meanwhile, the first beam splitter 51 has partial transmission characteristics for visible light. When the imaging light L3 is reflected by the field of view 41 area on the surface of the display device 300, the imaging light L3 can pass through the first beam splitter 51 and continue to propagate upward into the shared imaging optical unit 30.

[0049] In one embodiment, the optical path merging component 50 includes a second beam splitter 52, which reflects the excitation light L2 of the excitation band emitted by the excitation light source unit 20 to the field of view 41, while allowing the imaging light L3 from the field of view 41 to pass through and enter the shared imaging optical unit 30.

[0050] In this embodiment, the second beam splitter 52 is preferably a dichroic mirror, which is an optical element that has selective reflection / transmission characteristics for wavelength.

[0051] The second beam splitter 52 is disposed at the intersection of the optical path of the excitation light source unit 20 and the imaging principal optical axis. The second beam splitter 52 is configured to have high reflectivity for a specific wavelength band emitted by the excitation light source unit 20 (e.g., the ultraviolet band of 365nm, 385nm, or 405nm), for example, a reflectivity >95%. When the excitation light source emits excitation light L2, the second beam splitter 52 reflects it downwards, so that it is efficiently projected onto the element 320 to be excited in the display device 300 along the principal optical axis.

[0052] Meanwhile, the second beam splitter 52 is configured to have high transmission characteristics, such as transmittance >90%, for the fluorescence band generated by the excitation element 320 (such as the visible light band of 450nm-700nm) and the visible light band required for alignment imaging. This ensures that weak fluorescence signals can penetrate the element and enter the shared imaging optical unit 30 without damage.

[0053] In one embodiment, such as Figure 2 and 3 As shown, the first beam splitter 51 and the second beam splitter 52 are arranged sequentially at intervals along the optical axis of the common imaging optical unit 30.

[0054] This includes two implementation methods: Implementation Method 1: The first beam splitter 51 (beam splitter) is located on the side closer to the common imaging optical unit 30, and the second beam splitter 52 (dichroic mirror) is located on the side closer to the display device 300. At this time, the alignment illumination light L1 passes through the dichroic mirror to illuminate the product, and the returned fluorescence passes through the dichroic mirror and the beam splitter in sequence to enter the camera.

[0055] Implementation method 2: The second beam splitter 52 (dichroic mirror) is located on the side closer to the common imaging optical unit 30, and the first beam splitter 51 (beam splitter) is located on the side closer to the display device 300.

[0056] Because the fluorescence signal is relatively weak, this embodiment employs a layout where the beam splitter is positioned above the dichroic mirror (i.e., on the side furthest from the display device 300) to minimize light energy loss. Alternatively, the arrangement can be optimized according to specific spectral designs to ensure minimal attenuation of the fluorescence signal's optical path.

[0057] In the embodiments of this application, in order to achieve full-area coverage detection of the display device 300 and precise control of the focal plane, the moving mechanism 200 is configured to have multi-degree-of-freedom motion capability. The moving mechanism 200 is configured to drive the integrated optical detection mechanism 100 to move relative to the display device 300 in the X-axis, Y-axis, and Z-axis directions, as shown in the figure. Figure 2 As shown. The mechanisms driving the movement of the X, Y, and Z axes can be precision linear modules or air-bearing platforms.

[0058] The X-axis and Y-axis motion components are used to drive the integrated optical inspection mechanism 100 to move in the horizontal plane to traverse different inspection areas on the display device 300, or to perform minor planar position compensation based on feedback from the alignment image.

[0059] The Z-axis motion component in the moving mechanism 200 is primarily configured to perform "coarse adjustment" in the height direction.

[0060] At the start of the inspection process or when switching between inspection objects at different heights, the Z-axis motor drives the entire integrated optical inspection mechanism 100 to move vertically and quickly to the preset nominal working height, i.e., the preset height. This brings the display device 300 into the vicinity of the imaging optics' depth of field and ensures that the inspection head maintains a safe distance from the product surface. Because the Z-axis module carries the entire inspection head, its travel distance is large, but its response speed and micro-motion accuracy are relatively limited.

[0061] To overcome the limitations of Z-axis coarse adjustment accuracy and the microscopic flatness differences on the surface of the display device 300, the integrated optical inspection mechanism 100 also integrates an autofocus unit 70, which can be a liquid lens, a lens group driven by a voice coil motor, or a piezoelectric ceramic actuator.

[0062] The autofocus unit 70 is controlled by a control mechanism and is configured to perform fine-tuning of the focus based on the image sharpness captured by the shared imaging optical unit 30 during the operation of the alignment illumination unit 10 or the excitation light source unit 20.

[0063] When the alignment illumination unit 10 is activated for Mark point recognition, or when the excitation light source unit 20 is activated for defect detection, the control mechanism analyzes the sharpness of the image captured by the shared imaging optical unit 30 in real time, for example, using a contrast evaluation function. Based on the sharpness feedback, the autofocus unit 70 makes minute adjustments to the focal length of the imaging optical path, for example, at the millimeter or micrometer level.

[0064] This combination of "coarse adjustment + fine adjustment" strategy not only ensures a wide range of height adaptability but also achieves extremely high precision and extremely fast autofocus, ensuring that the image remains clear in micron-level defect detection.

[0065] In order to obtain images with high signal-to-noise ratio in photoluminescence detection mode, the integrated optical detection mechanism 100 sets a specific spectral filtering element, namely emission filter 60, in the imaging optical path of the common imaging optical unit 30.

[0066] The emission filter 60 is disposed in the imaging optical path of the shared imaging optical unit 30. In a specific structure, it is preferably located between the second beam splitter 52 and the shared imaging optical unit 30, for example, integrated inside the imaging lens 40 or mounted on the front end of the lens 40.

[0067] The cutoff band of the emission filter 60 covers the emission band of the excitation light source unit 20 to filter out residual excitation light reflected from the surface of the display device 300 and entering the optical path, while allowing the imaging light L3 of the fluorescence band generated by the excited element 320 to pass through.

[0068] Since the intensity of the ultraviolet excitation light emitted by the excitation source unit 20 is much higher than the fluorescence intensity generated by the device under test, if the reflected excitation light were allowed to enter the camera, it would completely drown out the fluorescence signal. Therefore, the cutoff band of the emission filter 60 is designed to cover and deeply block the emission band of the excitation source unit 20, for example, with extremely low transmittance for light in the 365nm-405nm band. At the same time, the emission filter 60 has high transmittance for the fluorescence band (usually the visible light band, such as 450nm-700nm).

[0069] The emission filter 60 effectively "purifies" the imaging light L3, filtering out residual excitation light (noise) reflected from the surface of the display device 300 and attempting to enter the optical path, allowing only the fluorescence (signal) generated by the excited element 320 to pass through. This results in a dark background in the final image, while defects or pixels are bright, greatly improving image contrast and detection sensitivity.

[0070] In one embodiment, the alignment illumination unit 10 is a visible light source, such as a white LED or a monochromatic visible light LED of a specific wavelength. Visible light has a good reflective imaging effect on the metal or ITO material of the Mark point, facilitating high-precision positioning.

[0071] The excitation light source unit 20 is an ultraviolet light source, such as an ultraviolet LED or laser with a center wavelength of 365nm, 385nm, or 405nm. This wavelength has high photon energy, which can effectively excite organic light-emitting materials to produce photoluminescence.

[0072] The optical inspection unit 1000 operates entirely within a vacuum chamber, making it particularly suitable for inspecting water- and oxygen-sensitive organic light-emitting materials (OLEDs). Because OLED organic materials and pixel electrodes are extremely sensitive to moisture and oxygen, they are highly susceptible to oxidation and deterioration when exposed to air, leading to defects such as black spots or dark patches. The vacuum not only effectively prevents oxidation of the product under test during inspection, ensuring the accuracy of the results and the product yield, but also allows for the immediate detection of defects after evaporation or encapsulation, significantly improving the effectiveness of process yield monitoring.

[0073] In one embodiment, this application provides an optical detection method for a display device, such as... Figure 5 As shown, it includes the following steps: Step S10: Activate the alignment illumination unit 10 of the integrated optical inspection mechanism 100 to illuminate the display device 300. The integrated optical inspection mechanism 100 further includes an excitation light source unit 20 and a shared imaging optical unit 30. The alignment illumination unit 10 and the excitation light source unit 20 are configured to guide the light beam into the same field of view 41 of the shared imaging optical unit 30.

[0074] Step S20: Control the shared imaging optical unit 30 to capture the alignment image.

[0075] Step S30: Based on the alignment image, control the moving mechanism 200 to adjust the position of the integrated optical detection mechanism 100 so that the field of view 41 covers the element 320 to be excited in the display device 300.

[0076] Step S40: Turn off the alignment illumination unit 10 and turn on the excitation light source unit 20 to excite the element to be excited 320.

[0077] Step S50: Control the shared imaging optical unit 30 to capture the excitation image.

[0078] In step S10, the alignment illumination unit 10 emits a visible light beam, which is reflected or refracted by the optical path merging component 50 and then projected onto the surface of the display device 300.

[0079] Step S20 controls the shared imaging optical unit 30 (such as an area array camera) to perform exposure and capture the current alignment image. Due to the use of visible light illumination, the characteristic structures on the surface of the display device 300, especially the reference marks 310 used for positioning, are clearly visible in the image.

[0080] Step S30 specifically includes the following steps: Step S31: Control the moving mechanism 200 to adjust the position of the integrated optical detection mechanism 100 so that the common imaging optical unit 30 captures the alignment image containing the reference mark 310.

[0081] Step S32: Identify the position of reference mark 310 in the alignment image and calculate its positional deviation from the center of the field of view 41.

[0082] Step S33: Combine the preset relative position of the center of the reference mark 310 and the element to be excited 320 in the alignment image with the positional deviation to calculate the target movement of the integrated optical detection mechanism 100.

[0083] Step S34: Control the moving mechanism 200 to perform displacement compensation in the X and Y axis directions so that the field of view 41 covers the element 320 to be excited.

[0084] Step S31 searches for and identifies reference marker 310, the Mark point, in the alignment image. If reference marker 310 is not in the center of the field of view 41, the algorithm extracts its current pixel coordinates.

[0085] Step S32 calculates the pixel difference between the Mark point and the center of the field of view 41 in the X and Y axis directions.

[0086] Steps S33 and S34 calculate the target movement amount that the integrated optical detection mechanism 100 needs to move through coordinate transformation, and send motion commands to the moving mechanism 200. The moving mechanism 200 performs precise displacement compensation in the X-axis and Y-axis directions.

[0087] By fine-tuning the movement in step S30, the device eliminates the initial error of mechanical positioning, so that the field of view 41 of the shared imaging optical unit 30 can accurately cover (or center-align the field of view 41) the element 320 to be excited on the display device 300, thus preparing the excitation light source unit 20 to excite the element 320 to be excited.

[0088] In step S40, the alignment illumination unit 10 is turned off to eliminate visible light background interference, and then the excitation light source unit 20 is turned on. Since the integrated optical detection mechanism 100 adopts a coaxial optical path and has completed displacement compensation, the ultraviolet excitation light emitted by the excitation light source unit 20 will accurately illuminate the element 320 to be excited within the field of view 41, causing it to produce photoluminescence (fluorescence).

[0089] In step S50, the shared imaging optical unit 30 is controlled to take another picture to capture a high signal-to-noise ratio excitation image. This image records the fluorescence state of the element to be excited 320, which is used for subsequent defect determination.

[0090] During the shooting process, the focus can be adjusted using the autofocus unit 70 to make the image clearer.

[0091] The optical inspection method for display devices in this embodiment completes the entire process from coarse positioning and fine alignment to final inspection in a single coordinate system, avoiding coordinate system transformation errors caused by cross-device transfer, and significantly improving the accuracy and efficiency of display device 300 inspection.

[0092] Compared with commonly used technologies, this embodiment has the following advantages: The alignment illumination unit 10 and excitation light source unit 20 of the optical inspection device 1000 of this display device share the same imaging optical unit, performing inspection under the same optical physical reference and a single coordinate system. This fundamentally eliminates the coordinate system transformation errors and mechanical installation errors caused by cross-camera and cross-station operations in existing technologies, ensuring that the excitation light source can be aligned with the element to be excited 320 with extremely high precision. Furthermore, by sharing the imaging optical unit 30, multiple functions are integrated, simplifying the hardware architecture of the optical system, reducing the size of the device, lowering equipment costs and maintenance difficulty, and eliminating the need for significant mechanical switching or station transfers. This significantly reduces the auxiliary action time during the inspection process and improves the inspection efficiency of the display device 300.

[0093] It should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This way of describing the specification is only for clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

[0094] The detailed descriptions listed above are merely specific descriptions of feasible implementation methods of this application, and are not intended to limit the scope of protection of this application. All equivalent implementation methods or modifications made without departing from the specific spirit of this application should be included within the scope of protection of this application.

Claims

1. An optical inspection device for a display device, characterized in that, include: An integrated optical inspection mechanism includes a positioning illumination unit, an excitation light source unit, and a shared imaging optical unit, wherein the positioning illumination unit and the excitation light source unit are configured to guide a light beam into the same field of view of the shared imaging optical unit; A moving mechanism configured to move the integrated optical inspection mechanism relative to the display device; The control mechanism is configured to control the alignment illumination unit and the excitation light source unit to operate in a time-division manner, so that the common imaging optical unit captures the alignment image corresponding to the alignment illumination unit and the excitation image corresponding to the excitation light source unit, respectively. The control mechanism is also configured to control the moving mechanism to adjust the position of the integrated optical detection mechanism based on the alignment image, so that the field of view covers the element to be excited in the display device.

2. The optical inspection device for a display device according to claim 1, characterized in that, The integrated optical inspection mechanism further includes an optical path merging component, which is arranged along the optical axis of the common imaging optical unit; The illumination light emitted by the alignment illumination unit and the excitation light emitted by the excitation light source unit are both reflected or refracted by the optical path merging component and then projected onto the display device along the same optical path.

3. The optical inspection device for a display device according to claim 2, characterized in that, The optical path merging assembly includes a first beam splitter configured to reflect illumination light from the aligning illumination unit to the field of view, while allowing imaging light from the field of view to pass through to the shared imaging optical unit.

4. The optical inspection device for a display device according to claim 3, characterized in that, The optical path merging component includes a second beam splitter, which reflects the excitation light of the excitation band emitted by the excitation light source unit to the field of view, while allowing the imaging light from the field of view to pass through and enter the shared imaging optical unit.

5. The optical inspection device for a display device according to claim 4, characterized in that, The first beam splitter and the second beam splitter are arranged sequentially at intervals along the optical axis of the common imaging optical unit; wherein, the first beam splitter is a beam splitter and the second beam splitter is a dichroic mirror.

6. The optical inspection device for a display device according to claim 1, characterized in that, The moving mechanism is configured to drive the integrated optical inspection mechanism to move relative to the display device in the X, Y, and Z axis directions.

7. The optical inspection device for a display device according to claim 6, characterized in that, The Z-axis movement of the moving mechanism is configured to perform coarse adjustment in the height direction to place the integrated optical inspection mechanism at a preset height; The integrated optical inspection mechanism further includes an autofocus unit controlled by the control mechanism. The autofocus unit is configured to perform fine-tuning of the focal length based on the image sharpness captured by the shared imaging optical unit during the operation of the alignment illumination unit or the excitation light source unit.

8. The optical inspection device for a display device according to claim 1, characterized in that, The integrated optical detection mechanism includes an emission filter, which is configured to be placed in the imaging optical path of the common imaging optical unit. Its cutoff band covers the emission band of the excitation light source unit to filter out residual excitation light reflected from the surface of the display device and entering the optical path, while allowing imaging light of the fluorescence band generated by the excited element to pass through.

9. The optical inspection device for a display device according to claim 1, characterized in that, The alignment illumination unit is a visible light source, and the excitation light source unit is an ultraviolet light source; The optical detection device is configured as a whole and operates within a vacuum chamber.

10. An optical inspection method for a display device, characterized in that, Includes the following steps: The alignment illumination unit of the integrated optical inspection mechanism is activated to illuminate the display device, wherein the integrated optical inspection mechanism further includes an excitation light source unit and a common imaging optical unit, and the alignment illumination unit and the excitation light source unit are configured to guide the light beam into the same field of view of the common imaging optical unit; The shared imaging optical unit is controlled to capture alignment images; Based on the alignment image, the control mechanism adjusts the position of the integrated optical detection mechanism so that the field of view covers the element to be excited in the display device; The alignment illumination unit is turned off, and the excitation light source unit is turned on to excite the element to be excited; The shared imaging optical unit is controlled to capture the excitation image.

11. The optical inspection method for a display device according to claim 10, characterized in that, The step of controlling the moving mechanism to adjust the position of the integrated optical detection mechanism based on the alignment image includes: The control movement mechanism adjusts the position of the integrated optical detection mechanism so that the shared imaging optical unit captures an alignment image containing reference markers; Identify the position of the reference marker in the alignment image and calculate its positional deviation from the center of the field of view; By combining the preset relative position of the reference marker center and the element to be excited in the alignment image, and the positional deviation, the target movement of the integrated optical detection mechanism is calculated. The moving mechanism is controlled to perform displacement compensation in the X and Y axis directions so that the field of view covers the element to be excited.

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