Magnetic amplification control for electron microscopes

Abstract

Systems or techniques for magnetic amplification control of electron microscopes are provided herein. In various embodiments, a system may include an electron microscope that diffracts electrons through an analysis sample and uses one or more magnetic immersion fields to modify the trajectory of the electrons onto an electron detector.

Description

Background Technology

[0001] Electron microscopes utilize fixed-position electronic detectors. This results in a fixed camera length and forces a trade-off between the benefits of longer and shorter camera lengths, thus limiting the versatility of electron microscopes if no optical system can alter this. Summary of the Invention

[0002] The following summary is presented to provide a basic understanding of one or more embodiments. This summary is not intended to identify key or essential elements, or to depict any scope of a particular embodiment or any scope of the claims. Its sole purpose is to present concepts in a simplified form as a prelude to the more detailed description that follows. In one or more embodiments described herein, apparatus, systems, computer-implemented methods, devices, or computer program products are provided that contribute to improving the resolution of electron microscopes and effectively reducing the size of electron microscopes.

[0003] According to one or more embodiments, a system is provided. The system may include an electron microscope that diffracts electrons through an analytical sample and uses one or more magnetic immersion fields to modify the trajectory of electrons onto an electron detector. The scientific instrument may also include a non-transitory computer-readable memory capable of storing computer-executable components. The system may also include a processor operatively coupled to the non-transitory computer-readable memory and capable of executing the computer-executable components stored in the non-transitory computer-readable memory. In various embodiments, the computer-executable components may include image correction components that generate an image of the diffraction pattern of electrons striking the electron detector.

[0004] The advantage of this system and / or the corresponding computer-implemented method and / or computer program product is that it enables the reduction and thus scaling control by using a fixed-position electron detector without additional hardware. This reduction allows for the capture of portions of the diffraction pattern that might otherwise fall outside the region of the electron detector. Attached Figure Description

[0005] The various embodiments will be readily understood from the following detailed description taken in conjunction with the accompanying drawings. For ease of description, the same reference numerals indicate the same structural elements. The various embodiments are illustrated in the accompanying drawings by way of example rather than limitation.

[0006] Figure 1 This is a block diagram of an exemplary scientific instrument module for performing magnetic immersion field reduction according to various embodiments described herein.

[0007] Figure 2 This is a flowchart of an exemplary non-limiting method for performing magnetic immersion field reduction according to various embodiments described herein.

[0008] Figure 3 A block diagram illustrating an exemplary non-limiting scientific instrument that facilitates the reduction of magnetic immersion fields according to one or more embodiments described herein is shown.

[0009] Figure 4 Illustrations of electron microscopes without magnetic reduction according to one or more embodiments described herein are provided.

[0010] Figure 5 Illustrations of an electron microscope using magnetic reduction according to one or more embodiments described herein are shown.

[0011] Figure 6 An illustration is provided of a magnetic immersion field applied to an electron diffraction stream according to one or more embodiments described herein.

[0012] Figure 7 A flowchart illustrating a magnetically reduced diffraction pattern image according to one or more embodiments described herein is provided.

[0013] Figure 8 A graph illustrating the relationship between the ampere-turns value of the magnetic immersion field generated according to one or more embodiments described herein and the effective camera length of the generated diffraction pattern image is shown.

[0014] Figure 9 A graph illustrating the relationship between the ampere-turns value of the magnetic immersion field generated according to one or more embodiments described herein and the magnification of the resulting diffraction pattern image is shown.

[0015] Figure 10 A graph illustrating the relationship between magnetic reduction and electronic detector resolution according to one or more embodiments described herein is provided.

[0016] Figure 11 A flowchart illustrating an exemplary, non-limiting computer-implemented method that can facilitate reduction in electron microscopy according to one or more embodiments described herein is provided.

[0017] Figure 12 A block diagram illustrating an exemplary, non-limiting operating environment that may contribute to one or more embodiments described herein is shown. Detailed Implementation

[0018] The following detailed description is illustrative only and is not intended to limit the embodiments and / or their application or utilization. Furthermore, there is no intention to be bound by any express or implied information presented in the foregoing Summary or Detailed Description sections. One or more embodiments are now described with reference to the accompanying drawings, wherein the same reference numerals are used throughout to refer to the same elements. In the following description, numerous specific details are set forth for purposes of explanation in order to provide a more thorough understanding of one or more embodiments. However, it will be apparent that one or more embodiments may be practiced without these specific details in various circumstances.

[0019] In some branches of electron microscopy, electrons are guided through an electron-transparent sample, causing the electron stream to diffract. This electron stream is then collected on an electron detector to generate an image of the diffraction pattern. Before the experiment, the electron detector is inserted at a fixed length or position (e.g., the camera length) below the sample. This suggests that a choice can be made between a longer camera length (providing better reciprocal space resolution but limiting the reciprocal space range and potentially causing some defect spots to fall outside the detector's surface area) or a shorter camera length (providing better coverage but reducing reciprocal space resolution). Furthermore, as electron microscopy performance has improved to allow analysis of 2D materials at levels as low as 5 keV to 6 keV, the increased electron wavelength and higher Bragg angles have exacerbated the limitations on the reciprocal space range. Additionally, changing the physical position of the electron detector between experiments can be very time-consuming and carries the risk of damaging components of the electron microscope.

[0020] To overcome one or more of the shortcomings of the prior art described herein, one or more embodiments described herein enable electron diffraction through an analytical sample using an electron microscope, and modify the electron trajectory onto the electron detector of the electron microscope using one or more magnetic immersion fields. In this way, electrons and / or diffraction spots that would normally miss the electron detector and are therefore not captured can be guided onto the electron detector, thereby capturing a more accurate representation of the sample and effectively using it as a reduced or minimized display of the diffraction pattern. By changing the ampere-turns value, the electron trajectory can be modified to varying degrees, thus allowing for variable magnification control without physically moving components such as the electron detector within the electron microscope.

[0021] Furthermore, an image of the diffraction pattern can be generated based on the detected diffraction spots. Applying a magnetic immersion field may cause unintended rotation of the diffraction pattern. Therefore, one or more digital image rotation corrections can be applied to correct the image of the diffraction pattern. Thus, the embodiments described herein facilitate amplification control using the magnetic field effects on the diffraction pattern. By calibrating the effects of reduction and rotation on the diffraction pattern, digital image post-processing can correct any deviation from the expected form, such as rotation that may occur due to the magnetic immersion field.

[0022] One or more embodiments will now be described with reference to the accompanying drawings, wherein similar reference numerals are used throughout to refer to similar elements. In the following description, numerous specific details are set forth for purposes of explanation in order to provide a more thorough understanding of one or more embodiments. However, it will be apparent that one or more embodiments may be practiced without these specific details in various circumstances.

[0023] Figure 1 Exemplary non-limiting block diagrams of scientific instrument module 100 according to various embodiments described herein are shown.

[0024] In various embodiments, the scientific instrument module 100 may be implemented by circuitry such as a programmed computing device (e.g., including electrical or optical components). The logic components of the scientific instrument module 100 may be included in a single computing device or, as appropriate, distributed across multiple computing devices communicating with each other. Examples of computing devices that can implement the scientific instrument module 100 individually or in combination are referenced herein. Figure 12 Let's have a discussion.

[0025] Scientific instrument module 100 may include a first logic component 102 and a second logic component 104. As used herein, the term "logic component" may include means for performing a set of operations associated with a logic element. For example, any logic element included in scientific instrument module 100 may be implemented by one or more computing devices programmed with instructions to cause one or more processing devices of the computing device to perform the associated set of operations. In a particular embodiment, a logic element may include one or more non-transitory computer-readable media having instructions on them that, when executed by one or more processing devices of the one or more computing devices, cause the one or more computing devices to perform the associated set of operations. As used herein, the term "module" may refer to a collection of one or more logic elements that together perform the functionality associated with the module. Different logic elements in a module may take the same form or may take different forms. For example, some logic components in a module may be implemented by a programmed general-purpose processing device, while other logic components in the module may be implemented by an application-specific integrated circuit (ASIC). In another example, different logic elements in a module may be associated with different sets of instructions executed by one or more processing devices. A module may not include all the logic elements depicted in the associated figures; for example, when the module is to perform a subset of the operations discussed herein with reference to the module, the module may include a subset of the logic elements depicted in the associated figures.

[0026] In various embodiments, a scientific instrument corresponding to scientific instrument module 100 may be present. In various aspects, the scientific instrument can be any suitable computerized device capable of electronically measuring and analyzing scientifically relevant, clinically relevant, or research-related characteristics, properties, or attributes of a sample (e.g., a known or unknown mixture, compound, or collection of substances). As a non-limiting example, the scientific instrument could be an electron microscope.

[0027] The first logic unit 102 can determine how to excite one or more magnetic immersion fields to modify the trajectory of electrons. For example, modification or bending of the electron flow trajectory can be achieved by using a Lorentz force, which is applied to one or more magnetic immersion lenses or magnetic coils within the electron microscope using a variable excitation measured in ampere-turns. Thus, the amount of desired reduction (e.g., reduction in display) can be determined based on a given ampere-turns value and the electron landing energy. The first logic unit 102 can then cause the constituent hardware of the electron microscope to apply an appropriate magnetic immersion field.

[0028] The second logic unit 104 can perform one or more image corrections on the diffraction pattern generated by modifying the electron trajectory. For example, at a given ampere-turns value, the diffraction pattern will be rotated by a given amount by a magnetic immersion field. Therefore, rotation corrections can be applied to the image of the diffraction pattern based on the applied ampere-turns value and accelerating voltage to produce a rotationally corrected and reduced diffraction pattern.

[0029] Figure 2 This is a flowchart of a computer-implemented method 200 according to one or more embodiments described herein. The operation of the computer-implemented method 200 can be used in any suitable setup to perform any suitable operation (e.g., it can be configured by...). Figure 1 , Figure 7 , Figure 8 , Figure 9 and Figure 10 (This refers to the execution or use in conjunction with any of the various modules, computing devices, or graphical user interfaces described). Figure 2 In this context, operations are each instantiated once in a specific order, but they can be reordered or repeated as needed and as appropriate (e.g., different operations can be executed in parallel under suitable circumstances).

[0030] At point 202, a first operation can be performed. For example, the first logic unit 102 of the scientific instrument module 100 can perform the operation at 202. The first operation may include diffracting electrons through an analytical sample using an electron microscope.

[0031] At 204, a second operation can be performed. For example, the first logic unit 102 of the scientific instrument module 100 can perform the operation at 204. The second operation may include determining the ampere-turns value to be applied to the magnetic immersion field, and subsequently applying the field to the electron flow via the constituent hardware of the electron microscope.

[0032] At point 206, a third operation can be performed. For example, the second logic unit 104 of the scientific instrument module 100 can perform the operation at point 206. The third operation may include applying digital rotation correction to the diffraction pattern based on the applied ampere-turns and accelerating voltage used in the electron microscope.

[0033] Figure 3 Block diagrams illustrating exemplary non-limiting scientific instruments that can facilitate magnification control of an electron microscope according to one or more embodiments described herein are shown. As shown, scientific instrument 302 may include electron microscope 306.

[0034] In various aspects, electron microscope 306 can be any suitable electron microscope. In various cases, electron microscope 306 may include any suitable constituent hardware 324 for generating electron microscope images and magnetic immersion fields. In various cases, electron microscope 306 may include a scanning electron microscope or a dual-beam microscope capable of measuring or determining the surface morphology of an analytical sample. In another non-limiting example, electron microscope 306 may include a transmission electron microscope capable of measuring or determining the internal structural details of an analytical sample. In another non-limiting example, electron microscope 306 may include any suitable type of charged particle microscope (e.g., a microscope type that uses a non-electron ion beam to capture images). Other examples of electron microscope 306 include, but are not limited to, energy-dispersive spectroscopy, electron energy loss spectroscopy, and electron backscattering diffraction spectroscopy.

[0035] In any case, given an analytical sample, the electron microscope 306 can produce an input image of the whole or a part of the analytical sample by diffracting an electron stream through the analytical sample and onto the electron detector.

[0036] In various embodiments, scientific instrument 302 may include a reduction system 308. In various cases, the reduction system 308 may contribute to efficient magnification / reduction control of electron microscope 306.

[0037] In various aspects, the reduction system 308 may include a processor 310 (e.g., a computer processing unit, microprocessor) and a non-transitory computer-readable storage device 312 operatively or communicatively connected to or coupled to the processor 310. The non-transitory computer-readable storage device 312 may store computer-executable instructions that, when executed by the processor 310, cause the processor 310 or other components of the reduction system 308 (e.g., trajectory modification component 316 and / or image correction component 314) to perform one or more actions. In various embodiments, the non-transitory computer-readable storage device 312 may store computer-executable components (e.g., trajectory modification component 316 and / or image correction component 314), and the processor 310 may execute the computer-executable components.

[0038] In various embodiments, the reduction system 308 may include a trajectory modification component 316. In various aspects, the trajectory modification component 316 may determine the ampere-turns value for exciting one or more magnetic immersion fields to produce a desired amount of reduction. For example, the trajectory modification component 316 may receive a command from an entity such as a user operating an electron microscope 306 to reduce (e.g., reduce the display size) the image of the diffraction pattern by a specific amount. Since the response of electrons to a magnetic field is predictable, the ampere-turns value can be determined based on factors such as the electron landing energy, the geometry of the electrode, and the electron beam energy in the electron beam column. In a simple case, the landing electron energy is numerically equal to the accelerating voltage. In cases involving the use of a booster tube system, the variance of the electron beam energy due to the relative positions within the column can be considered.

[0039] Once determined, the trajectory modification component 316 enables the constituent hardware 324 of the electron microscope 306 to apply a magnetic immersion field at a given ampere-turns value. The magnetic immersion field can modify or bend the electron trajectory, causing electrons or diffraction spots that might otherwise miss the electron detector of the electron microscope 306 to become impact detectors, thereby capturing a more complete diffraction pattern. This allows the electron detector to capture additional features that might otherwise be present, not due to camera length, such as higher-order Laue zone (HOLZ) rings. As described in detail below, Figure 9 An example is shown in a graph illustrating the ampere-turns applied to achieve a specific reduction.

[0040] Similarly, the trajectory modification component 316 can receive the effective camera length distance and determine the ampere-turns value used to reduce the diffraction pattern so that it approximates the diffraction pattern captured using that physical camera length. By applying this magnetic immersion field, the effective zoom or camera length of the electron microscope can be controlled without moving the electron detector. As described in detail below, Figure 8 The diagram illustrates the applied ampere-turns values ​​to achieve a specific camera length. Therefore, the electronic detector can be placed at a greater camera length to achieve higher magnification and more precise processing, while the reduction provided by applying a magnetic immersion field offers the benefits of a shorter camera length, more reciprocal space, and capture of a larger portion of the entire diffraction pattern.

[0041] In various embodiments, the reduction system 308 may include an image correction component 314. In various aspects, the image correction component 314 may generate an image of the diffraction pattern captured by the electron detector of the electron microscope 306. For example, a digital image showing the diffraction pattern when the electron detector is struck may be created.

[0042] In various aspects, the image correction component 314 can further correct distortions or deviations in the diffraction pattern image generated using the electron microscope 306. In some cases, applying a magnetic immersion field can cause deviations in the diffraction pattern, such as rotation, thereby resulting in deviations in the image generated by the image correction component 314. For example, applying a magnetic immersion field may cause rotation of the diffraction pattern, which is then represented in the image of the diffraction pattern. This can cause problems during analysis because the diffraction spots in the image will not be in the correct positions relative to the portion of the sample that causes the diffraction spots.

[0043] Therefore, the image correction component 314 can apply one or more digital conversions to correct for rotation. For example, given an ampere-turns value and an electron beam landing energy, the diffraction pattern will be rotated by a given amount. Thus, given an ampere-turns value and an electron landing energy, the image correction component 314 can apply an appropriate amount of inverse rotation to correct the image. In another embodiment, the image correction component 314 can determine the appropriate amount of inverse rotation based on an initial diffraction pattern. For example, an enlarged (e.g., without an applied magnetic immersion field) diffraction pattern image can first be generated. The image correction component 314 can record the relative orientation of the individual diffraction spots in the image. Then, when a reduced diffraction pattern image is provided, the image correction component 314 can apply an amount of inverse rotation such that the relative orientation of the individual diffraction spots is the same in both the enlarged and reduced diffraction pattern images. In this way, the rotation of the diffraction pattern image can be corrected, thereby providing a more accurate representation of the sample.

[0044] Figure 4 Illustrations of electron microscopes without magnetic reduction according to one or more embodiments described herein are provided.

[0045] As shown, the electron microscope 400 includes a final lens 402 that guides electrons toward the sample 404 along direction 410. The electrons are diffracted by the sample 404, producing a diffraction pattern 408. However, as shown, the outer edges of the diffracted electrons 407 extend beyond the edge of the electron detector 406. Therefore, the outer regions of the diffraction pattern 408 will not be captured by the detector 406, resulting in an incomplete diffraction pattern image. While the electron detector 406 could be positioned closer to the sample 404 to capture more of the diffraction pattern, this would reduce the camera length and thus introduce problems related to the short camera length discussed earlier.

[0046] Figure 5 Illustrations of an electron microscope using magnetic reduction according to one or more embodiments described herein are shown.

[0047] As mentioned above Figures 1 to 3 As described, a magnetic immersion field can be applied to diffracted electrons passing through sample 404. For example... Figure 5 As shown, due to the use of the magnetic immersion field, the diffraction pattern 508 is more compact, and therefore all diffracted electrons 407 strike the electron detector 406. Thus, the complete diffraction pattern is captured. As mentioned above, this has a reduction effect, thereby generating a diffraction pattern image that appears to be reduced in size without physically changing the camera length (e.g., the relative position of the electron detector 406). Furthermore, the electron detector 406 is positioned relative to... Figure 4 The same position in the middle. Therefore, Figure 5 Using the same camera length, and therefore the same reciprocal spatial resolution, the entire diffraction pattern is captured.

[0048] Figure 6 An illustration is provided of a magnetic immersion field applied to an electron diffraction stream according to one or more embodiments described herein.

[0049] As shown in the figure, an additional magnetic immersion field 602 is applied to the diffracting electrons to produce a diffraction pattern 508. A magnetic focusing field 601 is used to obtain the smallest possible beam spot at the sample 404. Arrow 604 illustrates the main direction in which the electron beam is traveling. In one or more embodiments, one or more magnetic immersion lenses within the electron microscope can be used to generate the magnetic immersion field 602. In another embodiment, the electron microscope may include one or more magnetic coils specifically positioned to generate the magnetic immersion field. As described above regarding... Figures 1 to 3 As described, a magnetic immersion field 602 can be applied to achieve a specific amount of reduction. For example, the entity operating the electron microscope can specify the amount of reduction to be applied. The trajectory modification component 316 can then determine the value of the applied ampere-turns based on the electron's landing energy and the specified amount of reduction. Similarly, as described above regarding... Figures 1 to 3 As described, a magnetic immersion field 602 can be applied to achieve a specific camera length. For example, an entity operating an electron microscope can specify the camera length to be used. The trajectory modification component 316 can then determine the value of ampere-turns to be applied based on the electron landing energy and the specified camera length.

[0050] Figure 7 A flowchart illustrating a magnetically reduced diffraction pattern image according to one or more embodiments described herein is provided.

[0051] As shown in the figures, image 702 shows the diffraction pattern without applied magnetic shrinkage (e.g., magnification 1). Images 704, 706, and 708 illustrate the effect of increased shrinkage (e.g., magnetic immersion field with increased ampere-turns). As the ampere-turns value increases, the diffraction pattern shrinks or becomes smaller, making the higher-order Laue ring visible at the outer edge of the diffraction pattern in images 706 and 708. This ring is not captured in images 702 and 704 because some electrons miss the electron detector.

[0052] Furthermore, as shown in the figure, the diffraction pattern in this example rotates counterclockwise as the ampere-turn value increases. Therefore, to correct this rotational deviation, the image correction component 314 can apply a clockwise rotation correction in this example so that the relative orientation of images 702 and 708 is the same when output to the entity operating the electron microscope. Additionally, in one or more embodiments, the image correction component 314 can apply one or more digital transformations to correct geometric deviations, as described above regarding... Figure 3 As described.

[0053] Figure 8 A graph 800 illustrates the relationship between the ampere-turns value of the magnetic immersion field generated according to one or more embodiments described herein and the effective camera length of the resulting diffraction pattern image. The y-axis of graph 800 represents the effective camera length of the electron microscope, and the x-axis of graph 800 represents the excitation of the superimposed immersion field utilized. Data points are shown for both 10 keV and 30 keV settings of the electron microscope. As shown in the figure, for... Figure 8 The data collected indicates that the actual camera length (e.g., the physical distance to the electron detector) is 35 mm. As the ampere-turns value increases, the effective camera length decreases due to the shrinkage effect, starting from approximately 1000 ampere-turns. Therefore, when the effective camera length value is given by the entity operating the electron microscope, the trajectory modification component 316 can determine an appropriate value for the ampere-turns using the graph 800 and the magnification setting of the electron microscope.

[0054] Figure 9 A graph 900 is illustrated, showing the relationship between the ampere-turns value of the magnetic immersion field generated according to one or more embodiments described herein and the magnification of the resulting diffraction pattern image. The y-axis of graph 900 illustrates the magnification of the electron microscope, and the x-axis of graph 900 illustrates the ampere-turns value used. Data points are shown for both practical and simulated settings for the electron microscope at 10 keV and 30 keV. As shown, the magnification decreases as the ampere-turns value increases. Therefore, when the magnification is given by the entity operating the electron microscope, the trajectory modification unit 316 can determine an appropriate value for the ampere-turns using graph 900 and the magnification setting of the electron microscope.

[0055] Figure 10Graph 1000 is illustrated, showing the relationship between the lateral resolution and excitation of a superimposed magnetic immersion field according to one or more embodiments described herein. The y-axis of Graph 1000 illustrates the lateral resolution and reciprocal space in nm, and the x-axis illustrates the excitation of the superimposed immersion field utilized. As shown, when operating in 10 keV mode, the lateral resolution can be improved from approximately 1.4 nm to approximately 0.35 nm while using a superimposed immersion field. When operating in 30 keV mode, the lateral resolution can be improved from 0.7 nm to 0.2 nm.

[0056] Figure 11 A flowchart illustrating an exemplary non-limiting computer implementation 1100 that can facilitate reduction in electron microscopy according to one or more embodiments described herein is provided.

[0057] In various embodiments, action 1102 may include diffracting electrons through the analytical sample using an electron microscope (e.g., electron microscope 306). For example, the electron microscope may accelerate an electron beam toward the sample, and then the electron beam passes through the sample and diffracts, thereby producing diffraction spots.

[0058] In various embodiments, action 1104 may include modifying the trajectory of electrons onto the electron detector of the electron microscope via an electron microscope. For example, as described above regarding Figures 1 to 3 As described, the entity operating the electron microscope can specify the effective camera length or magnification to be utilized based on the electron landing energy and a specified camera length and / or magnification. A computer-executable component, such as trajectory modification unit 316, can determine the ampere-turns value utilized in the magnetic immersion magnetic field to achieve the specified camera length or magnification. (As described above regarding...) Figure 8 and Figure 9 As described, effective reduction can be provided using excitation with approximately 1000 to 4000 ampere-turns. The constituent hardware of the electron microscope 306 can then apply a magnetic immersion field to modify the trajectories of electrons diffracting through the sample to produce the desired effective camera length or magnification. Furthermore, due to the physical camera length, some diffraction spots in the diffraction pattern may typically miss the electron detector. Therefore, by modifying the trajectories of one or more electrons, all or most of the diffraction spots can collide with the electron detector, thereby capturing a more complete diffraction pattern.

[0059] In various embodiments, action 1106 may include correcting deviations between the image of the diffraction pattern and the expected form using a device (e.g., image correction component 314). For example, as described above regarding... Figures 1 to 7As described, applying a magnetic immersion field can cause rotation of the diffraction pattern. Therefore, given the electron landing energy and the applied ampere-turns value, the image correction unit 314 can apply digital conversion to the image to correct for the rotation.

[0060] The advantages of the systems and / or corresponding computer-implemented methods and / or computer program products described herein include enabling the reduction and adjustment of the effective camera length without modifying the physical position of the electron detector within the electron microscope. This provides the ability to easily change magnification, thus benefiting from both higher and lower camera lengths, and the flexibility to easily change magnification without adjusting physical components. This allows for faster execution of multiple experiments because no physical modifications to the electron microscope are required to capture diffraction pattern images at different camera lengths. Furthermore, as described above regarding… Figure 10 As described, this can improve resolution, resulting in clearer imaging of smaller objects than before. Furthermore, by applying one or more post-processing image techniques, any anticipated deviations in the diffraction pattern that may occur due to the applied magnetic immersion field can be corrected, thus producing accurate and representative diffraction pattern images.

[0061] In various contexts, machine learning algorithms or models may be implemented in any suitable manner to facilitate any suitable aspect described herein. To facilitate some of the machine learning aspects described above in the various embodiments, consider the following discussion of artificial intelligence (AI). The various embodiments described herein may employ artificial intelligence to help automate one or more features or functionalities. These components may employ various AI-based schemes to perform the various embodiments / examples disclosed herein. To provide or assist in the numerous determinations described herein (e.g., determination, ascertainment, inference, computation, prediction, prognosis, estimation, derivation, forecasting, detection, computation), the components described herein may examine all or a subset of the data to which they have been granted access and may provide reasoning or determination of the state of a system or environment from a set of observations, such as those captured via events or data. For example, determination may be employed to identify a specific context or action, or a probability distribution of states may be generated. These determinations may be probabilistic; that is, the probability distribution of states of interest is computed based on considerations of data and events. Determination may also refer to techniques employed to compose higher-level events from a set of events or data.

[0062] This determination can lead to the construction of new events or actions from a set of observed events or stored event data, regardless of whether the events are closely related in time or whether the events and data come from one or more event and data sources. The components disclosed herein can employ various classification schemes (explicit training (e.g., via training data) and implicit training (e.g., via observed behavior, preferences, historical information, received external information, etc.)) or systems (e.g., support vector machines, neural networks, expert systems, Bayesian belief networks, fuzzy logic, data fusion engines, etc.) related to the execution of automatic or deterministic actions relevant to the claimed subject matter. Therefore, classification schemes or systems can be used to automatically learn and execute multiple functions, actions, or determinations.

[0063] A classifier maps an input attribute vector z = (z1, z2, z3, z4, zn) to a confidence level that the input belongs to a certain class, such as f(z) = confidence level (class). This classification can use probabilistic or statistically based analysis (e.g., considering analytical utility and cost) to determine the actions to be automatically performed. Support Vector Machines (SVMs) are an example of a classifier that can be adopted. SVMs operate by finding a hypersurface in the space of possible inputs, where the hypersurface attempts to separate triggering criteria from non-triggering events. Intuitively, this makes the classification correct for test data that is close to but not identical to the training data. Other directed and non-directed model classification methods include, for example, Naive Bayes, Bayesian networks, decision trees, neural networks, fuzzy logic models, or probabilistic classification models that provide different independent patterns, any of which can be adopted. The classification used in this paper also includes statistical regression for developing priority models.

[0064] To provide additional context for the various embodiments described herein Figure 11 The following discussion is intended to provide a brief, general description of a suitable computing environment 1100 in which various embodiments of the embodiments described herein may be implemented. While the embodiments have been described above in the general context of computer-executable instructions that can run on one or more computers, those skilled in the art will recognize that the embodiments may also be implemented in combination with other program modules or as a combination of hardware and software.

[0065] Typically, program modules include routines, programs, components, data structures, etc., that perform specific tasks or implement specific abstract data types. Furthermore, those skilled in the art will understand that the methods of this invention can be practiced with other computer system configurations, including single-processor or multi-processor computer systems, minicomputers, mainframe computers, Internet of Things (IoT) devices, distributed computing systems, and personal computers, handheld computing devices, microprocessor-based or programmable consumer electronics, each operatively coupled to one or more associated devices.

[0066] The embodiments shown herein can also be practiced in a distributed computing environment, where some tasks are performed by remote processing devices linked via a communication network. In a distributed computing environment, program modules can reside on both local and remote memory storage devices.

[0067] Computing devices typically include a variety of media, which may include computer-readable storage media, machine-readable storage media, or communication media. These two terms are used interchangeably herein, as follows. A computer-readable storage media or a machine-readable storage media can be any available storage medium accessible by a computer, and includes volatile and non-volatile media, removable and non-removable media. By way of example and not limitation, a computer-readable storage media or a machine-readable storage media can be implemented in conjunction with any method or technology used for storing information, such as computer-readable or machine-readable instructions, program modules, structured data, or unstructured data.

[0068] Computer-readable storage media may include, but is not limited to, random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technologies, compressed optical disc read-only memory (CD-ROM), digital versatile optical disc (DVD), Blu-ray disc (BD) or other optical disc storage devices, magnetic tape cassettes, magnetic tape, disk storage devices or other magnetic storage devices, solid-state drives or other solid-state storage devices, or other tangible or non-transitory media that can be used to store desired information. In this regard, the terms “tangible” or “non-transitory” used herein to describe storage devices, memories, or computer-readable media should be understood to exclude only the propagation of transient signals themselves as a modifier, and do not waive the rights of all standard storage devices, memories, or computer-readable media that do not merely propagate transient signals themselves.

[0069] Computer-readable storage media can be accessed by one or more local or remote computing devices, for example via access requests, queries or other data retrieval protocols, for various operations concerning the information stored on the media.

[0070] Communication media typically contain computer-readable instructions, data structures, program modules, or other structured or unstructured data in data signals (such as modulated data signals, such as carrier waves or other transmission mechanisms), and include any information transmission or delivery medium. The term "modulated data signal" or signal refers to a signal whose one or more characteristics are set or altered to encode information in one or more signals. By way of example (but not limited to), communication media include wired media (such as wired networks or direct wired connections) and wireless media (such as acoustic, RF, infrared, and other wireless media).

[0071] Refer again Figure 12 An exemplary environment 1200 for implementing various embodiments of the aspects described herein includes a computer 1202, which includes a processing unit 1204, a system memory 1206, and a system bus 1208. The system bus 1208 couples system components, including but not limited to the system memory 1206, to the processing unit 1204. The processing unit 1204 can be any of a variety of commercially available processors. Dual microprocessors and other multiprocessor architectures may also be used as the processing unit 1204.

[0072] System bus 1208 can be any of several types of bus architectures, and can further interconnect with memory buses (with or without memory controllers), peripheral buses, and local buses using any of a variety of commercially available bus architectures. System memory 1206 includes ROM 1212 and RAM 1212. The Basic Input / Output System (BIOS) can be stored in non-volatile memory (such as ROM, erasable programmable read-only memory (EPROM), EEPROM), where the BIOS contains basic routines such as those that facilitate the transfer of information between components within computer 1202 during startup. RAM 1212 may also include high-speed RAM, such as static RAM for caching data.

[0073] Computer 1202 also includes an internal hard disk drive (HDD) 1214 (e.g., EIDE, SATA) and may include one or more external storage devices 1216 (e.g., floppy disk drive (FDD) 1216, memory stick or flash drive reader, memory card reader, etc.) and drives 1220, such as solid-state drives, optical disc drives, which can read from or write to disks 1222 (e.g., CD-ROM, DVD, BD, etc.). Alternatively, if a solid-state drive is involved, disk 1222 is not included unless provided separately. Although the internal HDD 1214 is illustrated as being located within computer 1202, the internal HDD 1214 may also be configured for external use in a suitable chassis (not shown). Additionally, although not shown in environment 1200, a solid-state drive (SSD) may be used to supplement or replace HDD 1214. HDD 1214, external storage device 1216, and drive 1220 can be connected to system bus 1208 via HDD interface 1224, external storage interface 1226, and drive interface 1228, respectively. Interface 1224 for the specific implementation of the external drive may include at least one or both of Universal Serial Bus (USB) and Institute of Electrical and Electronics Engineers (IEEE) 1294 interface technologies. Other external drive connection technologies are also within the scope of the embodiments described herein.

[0074] The drive and its associated computer-readable storage medium provide non-volatile storage of data, data structures, computer-executable instructions, etc. For computer 1202, the drive and storage medium accommodate storage of any data in a suitable digital format. Although the above description of computer-readable storage media refers to a corresponding type of storage device, those skilled in the art will understand that other types of computer-readable storage media (whether currently existing or developed in the future) can also be used in the exemplary operating environment, and further, any such storage medium may contain computer-executable instructions for performing the methods described herein.

[0075] The driver and RAM 1212 can store multiple program modules, including an operating system 1230, one or more applications 1232, other program modules 1234, and program data 1236. All or part of the operating system, applications, modules, or data can also be cached in RAM 1212. The systems and methods described herein can be implemented using various commercially available operating systems or combinations of operating systems.

[0076] Computer 1202 may optionally include emulation technology. For example, a hypervisor (not shown) or other intermediary may emulate the hardware environment used for operating system 1230, and the emulated hardware may optionally be different from that used for operating system 1230. Figure 12 The hardware shown is illustrated. In such embodiments, the operating system 1230 may include one of a plurality of virtual machines (VMs) hosted at the computer 1202. Furthermore, the operating system 1230 may provide a runtime environment for the application 1232, such as the Java Runtime Environment or the .NET Framework. A runtime environment is a consistent execution environment that allows the application 1232 to run on any operating system that includes a runtime environment. Similarly, the operating system 1230 may support containers, and the application 1232 may be in the form of a container, which is a lightweight, standalone, executable software package that includes, for example, the application's code, runtime environment, system tools, system libraries, and settings.

[0077] Furthermore, computer 1202 may be equipped with a security module, such as a Trusted Processing Module (TPM). For example, using a TPM, the boot unit hashes the next boot unit over time and waits for the result to match a security value before loading the next boot unit. This process can occur at any layer of the computer 1202's code execution stack, for example, at the application execution level or the operating system (OS) kernel level, thereby achieving security at any level of code execution.

[0078] Users can input commands and information into computer 1202 through one or more wired / wireless input devices (e.g., keyboard 1238, touchscreen 1240, and pointing devices such as mouse 1242). Other input devices (not shown) may include microphones, infrared (IR) remote controls, radio frequency (RF) remote controls or other remote controls, joysticks, virtual reality controllers or virtual reality headsets, game controllers, styluses, image input devices (e.g., cameras), gesture sensor input devices, visual motion sensor input devices, emotion or face detection devices, biometric input devices (e.g., fingerprint or iris scanners), etc. These and other input devices are typically connected to processing unit 1204 via input device interface 1244, which is coupled to system bus 1208, but may also be connected via other interfaces such as parallel ports, IEEE 1294 serial ports, game ports, USB ports, IR interfaces, etc. Interfaces, etc.

[0079] Monitor 1246 or other types of display devices can also be connected to system bus 1208 via an interface such as video adapter 1248. In addition to monitor 1246, the computer typically includes other peripheral output devices (not shown), such as speakers, printers, etc.

[0080] Computer 1202 can operate in a networked environment using logical connections to one or more remote computers (such as remote computer 1250) via wired or wireless communication. Remote computer 1250 can be a workstation, server computer, router, personal computer, laptop computer, microprocessor-based entertainment device, peer-to-peer device, or other common network node, and typically includes many or all of the elements described relative to computer 1202, but for brevity only memory / storage device 1252 is shown. The depicted logical connections include wired / wireless connections to a local area network (LAN) 1254 or a larger network (e.g., a wide area network (WAN) 1256). Such LAN and WAN networking environments are common in offices and companies and facilitate the establishment of enterprise-wide computer networks (e.g., intranets), all of which can connect to global communications networks (e.g., the Internet).

[0081] When used in a LAN networking environment, computer 1202 can connect to local network 1254 via a wired or wireless communication network interface or adapter 1258. Adapter 1258 can facilitate wired or wireless communication with LAN 1254, which may also include a wireless access point (AP) configured thereon for wireless communication with adapter 1258.

[0082] When used in a WAN networking environment, computer 1202 may include modem 1260 or a communication server that can be otherwise connected to WAN 1256 to establish communication via WAN 1256, such as via the Internet. Modem 1260 may be built-in or external, wired or wireless, and may be connected to system bus 1208 via input device interface 1244. In a network environment, program modules shown relative to computer 1202 or portions thereof may be stored in remote memory / storage device 1252. It should be understood that the network connections shown are exemplary, and other components for establishing communication links between computers may be used.

[0083] When used in a LAN or WAN networking environment, computer 1202 can access cloud storage systems or other network-based storage systems, such as, but not limited to, network virtual machines that provide one or more aspects of information storage or processing, in addition to or as an alternative to external storage device 1216 as described above. Generally, the connection between computer 1202 and the cloud storage system can be established via LAN 1254 or WAN 1256, for example, via adapter 1258 or modem 1260, respectively. When computer 1202 is connected to an associated cloud storage system, external storage interface 1226 can manage the storage provided by the cloud storage system with the help of adapter 1258 or modem 1260, just as it would manage other types of external storage. For example, external storage interface 1226 can be configured to provide access to cloud storage sources as if those sources were physically connected to computer 1202.

[0084] Computer 1202 is operable to communicate with any wireless device or entity operating wirelessly (e.g., printer, scanner, desktop or portable computer, portable data assistant, communications satellite, any device or location associated with a wirelessly detectable tag (e.g., kiosk, newsstand, store shelf, etc.) and telephone). This may include Wi-Fi and Wireless technology. Therefore, communication can be a predefined structure like a traditional network, or it can be temporary communication between at least two devices.

[0085] Various non-limiting aspects are described in the following embodiments.

[0086] Example 1: A system comprising: an electron microscope that diffracts electrons through an analytical sample and uses one or more magnetic immersion fields to modify the trajectory of the electrons onto an electron detector.

[0087] Example 2: A system according to any of the foregoing examples, further comprising: a memory storing computer-executable components; a processor executing the computer-executable components stored in the memory, wherein the computer-executable components include: an image correction component generating an image of the diffraction pattern of the electrons striking the electron detector.

[0088] Example 3: According to any of the preceding examples, the modification includes exciting the one or more magnetic immersion fields with a given ampere-turns value, and the computer-executable component further includes a trajectory modification component for determining the given ampere-turns value such that, at a given electron landing energy, the trajectory of the electron is guided onto the electron detector.

[0089] Example 4: A system according to any of the preceding examples, wherein the initial trajectory of one or more electrons in the electrons, prior to modification, falls outside the region of the electron detector.

[0090] Example 5: According to any of the preceding examples, the image correction component further performs one or more digital corrections to correct deviations in the image of the diffraction pattern.

[0091] Example 6: The system according to any of the foregoing examples, wherein the electron microscope includes at least one of a scanning electron microscope or a dual-beam microscope.

[0092] Example 7: In a system according to any of the preceding examples, the one or more magnetic immersion fields are generated by one or more magnetic immersion lenses or one or more magnetic coils.

[0093] In all respects, any one or more combinations of Embodiments 1 to 7 can be implemented.

[0094] Example 8: A method comprising: diffracting electrons through an analytical sample using an electron microscope; and modifying the trajectory of the electrons onto an electron detector of the electron microscope by one or more magnetic immersion fields.

[0095] Example 9: The method according to any of the foregoing examples further includes: generating an image of the diffraction pattern of the electrons striking the electron detector via a device operatively coupled to the processor.

[0096] Example 10: The method according to any of the preceding examples, wherein the modification includes exciting the one or more magnetic immersion fields with a given ampere-turn value.

[0097] Example 11: The method according to any of the foregoing examples further includes: determining the given ampere-turn value by the device such that, at a given electron landing energy, the trajectory of the electron is guided onto the electron detector.

[0098] Example 12: The method according to any of the preceding examples, wherein the initial trajectory of one or more electrons in the electrons before modification falls outside the region of the electron detector.

[0099] Example 13: The method according to any of the foregoing examples further includes correcting the deviation of the image of the diffraction pattern by means of the device.

[0100] Example 14: The method according to any of the preceding examples, wherein the one or more magnetic immersion fields are generated by one or more magnetic immersion lenses or one or more magnetic coils.

[0101] In all respects, any one or more combinations of Embodiments 8 to 14 can be implemented.

[0102] Example 15: A computer program product comprising a non-transitory computer-readable storage having program instructions embodied therein, the program instructions being executable by a processor to cause the processor to: use an electron microscope to diffract electrons through an analytical sample; and use one or more magnetic immersion fields to modify the trajectory of the electrons onto an electron detector of the electron microscope.

[0103] Example 16: A computer program product according to any of the foregoing examples, wherein the program instructions are further executable by the processor to cause the processor to: generate an image of the diffraction pattern of the electrons striking the electron detector.

[0104] Example 17: A computer program product according to any of the foregoing examples, wherein the modification includes exciting the one or more magnetic immersion fields with a given ampere-turns value such that, at a given electron landing energy, the trajectory of the electron is guided onto the electron detector.

[0105] Example 18: A computer program product according to any of the foregoing examples, wherein the program instructions are further executable by the processor to cause the processor to: correct the deviation of the image of the diffraction pattern.

[0106] Example 19: A computer program product according to any of the foregoing examples, wherein the electron microscope includes at least one of a scanning electron microscope or a dual-beam microscope.

[0107] Example 20: A computer program product according to any of the foregoing examples, wherein the one or more magnetic immersion fields are generated by one or more magnetic immersion lenses or one or more magnetic coils.

[0108] In all respects, any one or more combinations of embodiments 15-20 can be implemented.

[0109] In all respects, any one or more combinations of Embodiments 1 to 20 can be implemented.

Claims

1. A system comprising: An electron microscope that diffracts electrons through an analytical sample and uses one or more magnetic immersion fields to modify the trajectory of the electrons onto an electron detector.

2. The system according to claim 1, wherein the system further comprises: Memory, which stores computer-executable components; A processor that executes computer-executable components stored in the memory, wherein the computer-executable components include: An image correction component generates an image of the diffraction pattern of the electrons striking the electron detector.

3. The system of claim 2, wherein the modification includes exciting the one or more magnetic immersion fields with a given ampere-turns value, and wherein the computer-executable component further includes a trajectory modification component for determining the given ampere-turns value such that, at a given electron landing energy, the trajectory of the electron is guided onto the electron detector.

4. The system according to claim 1, wherein the initial trajectory of one or more electrons in the electrons prior to modification falls outside the region of the electron detector.

5. The system according to claim 2, wherein the image correction component further performs one or more digital corrections to correct deviations in the image of the diffraction pattern.

6. The system according to claim 1, wherein the electron microscope comprises at least one of a scanning electron microscope or a dual-beam microscope.

7. The system according to claim 1, wherein the one or more magnetic immersion fields are generated by one or more magnetic immersion lenses or one or more magnetic coils.

8. A method, the method comprising: Electron diffraction is achieved by using an electron microscope to pass electrons through the sample being analyzed. as well as The trajectory of the electrons onto the electron detector of the electron microscope is modified by one or more magnetic immersion fields.

9. The method according to claim 8, further comprising: An image of the diffraction pattern of the electrons striking the electron detector is generated by a device operatively coupled to the processor.

10. The method of claim 9, wherein the modification includes exciting the one or more magnetic immersion fields with a given ampere-turn value.

11. The method according to claim 10, further comprising: The device determines the given ampere-turn value so that, at a given electron landing energy, the trajectory of the electron is guided onto the electron detector.

12. The method of claim 8, wherein the initial trajectory of one or more electrons prior to modification falls outside the region of the electron detector.

13. The method of claim 9, further comprising correcting a deviation in the image of the diffraction pattern using the device.

14. The method of claim 8, wherein the one or more magnetic immersion fields are generated by one or more magnetic immersion lenses or one or more magnetic coils.

15. A computer program product comprising a non-transitory computer-readable storage memory having program instructions embodied therein, the program instructions being executable by a processor to cause the processor to: The processor uses an electron microscope to diffract electrons through the analytical sample; and The processor uses one or more magnetic immersion fields to modify the trajectory of the electrons onto the electron detector of the electron microscope.

16. The computer program product of claim 15, wherein the program instructions are further executable by the processor to cause the processor to: An image of the diffraction pattern of the electrons that collide with the electron detector is generated.

17. The computer program product of claim 15, wherein the modification comprises exciting the one or more magnetic immersion fields with a given ampere-turns value such that, at a given electron landing energy, the trajectory of the electron is guided onto the electron detector.

18. The computer program product of claim 16, wherein the program instructions are further executable by the processor to cause the processor to: The processor corrects the deviations in the image of the diffraction pattern.

19. The computer program product of claim 15, wherein the electron microscope comprises at least one of a scanning electron microscope or a dual-beam microscope.

20. The computer program product of claim 15, wherein the one or more magnetic immersion fields are generated by one or more magnetic immersion lenses or one or more magnetic coils.

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