Transfer equipment operation control method and device and transfer equipment

Abstract

The invention discloses a transfer equipment operation control method, a control device and transfer equipment. The control method comprises the following steps: when an upper driver of an upper moving part or a lower driver of a lower moving part which moves by a roller driven by a motor operates in a position mode; according to the periodically obtained first current position of the lower moving part and the second current position of the upper moving part, the position deviation of the upper moving part and the lower moving part is determined, and according to the position deviation determined every time, the upper moving part or the lower moving part which moves through a roller driven by a motor is controlled to move. The position of the upper moving part and the position of the lower moving part can be effectively matched so that the stand column can be kept in the vertical state in the moving process, the carrying stability and safety are improved, meanwhile, vibration generated when moving is stopped can be effectively avoided, and the carrying safety is improved. The operation efficiency can be improved, and the transfer equipment can be set to be higher so as to meet the use requirements of higher memories.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a method, system, control device, and transfer device for operating a transfer device in a storage device for semiconductor wafer cassette storage. Background Technology

[0002] In semiconductor processing, a stocker is used to store wafers, and the stocker is equipped with transfer equipment to move the wafers.

[0003] The existing transfer equipment's walking mechanism usually uses a lower gear and rack to cooperate, with an upper driven wheel following to achieve movement, as shown in the patent document with authorization announcement number CN116417389B.

[0004] Because the column moves by dragging its upper side along its lower side during operation, the upper and lower sides of the column may become asynchronous. This causes the column to tilt during operation. When the transfer equipment reaches its destination and stops, the upper side of the column will experience repeated shaking and oscillations due to inertia, affecting the stability and safety of the handling. This also significantly limits the application height of the transfer equipment (usually not exceeding 5 meters), hindering the improvement of the STOCKER's storage capacity. Summary of the Invention

[0005] The purpose of this invention is to solve the above-mentioned problems existing in the prior art and to provide a method, control device and transfer equipment for operation control of transfer equipment.

[0006] The objective of this invention is achieved through the following technical solution: A method for controlling the operation of a transfer device, wherein the transfer device includes an upper moving part and a lower moving part, one of which moves by means of a gear and rack driven by a motor, and the other moves by means of a roller driven by a motor; The control method includes the following steps: When the upper driver of the upper moving part or the lower driver of the lower moving part, which moves by a motor-driven roller, is running in position mode, the position deviation between the upper and lower moving parts is determined based on the first current position of the lower moving part and the second current position of the upper moving part obtained periodically, and the movement of the upper or lower moving part, which moves by a motor-driven roller, is controlled based on the determined position deviation each time.

[0007] Preferably, the positional deviation is calculated according to the following formula: △X = (B) x - B y ) / (A X - Ay )×A 实 -B 实 ; Where △X is the positional deviation, A X The upper limit of the orbital calibration range where the current position of the lower moving part is located; A y B is the lower limit of the orbital calibration range where the current position of the lower moving part is located; x B is the upper limit of the celestial orbit calibration range in which the current position of the upper moving part is located; y The lower limit of the calibration range of the current position of the upper moving part on the celestial track; A 实 B is the current position of the lower moving part on the ground track. 实 This indicates the current position of the upper moving part on the sky track.

[0008] Preferably, during the period from the start of movement of the lower moving part or the upper moving part to deceleration to a set speed, the lower driver of the lower moving part is operated in position mode, the upper driver of the upper moving part is operated in torque mode, and the output torque of the upper drive motor of the upper moving part changes synchronously with the output torque of the lower drive motor of the lower moving part.

[0009] Preferably, when decelerating to a set speed, the upper drive is switched from torque mode to position mode.

[0010] Preferably, when the upper driver is operating in position mode, the target speed of the upper moving part in the next control cycle is calculated according to the following formula: V 上 =V 下 ×GR; Among them, V 上 V represents the target speed of the moving part in the next control cycle. 下 ρ is the instantaneous velocity of the lower moving part; GR is the electronic gear ratio.

[0011] Preferably, when the upper driver is operating in position mode, the target position of the upper moving part in the next control cycle is calculated according to the following formula: S 上 =(S 下 ×GR)+D 初 ; Among them, S 上 S represents the target position of the upper moving part in the next control cycle. 下 The current position of the lower moving part; GR is the electronic gear ratio; D 初 This is the starting offset.

[0012] Preferably, the electronic gear ratio is calculated according to the following formula: GR = (V0 + ΔX / T0) / V0; Where V0 is the current moving speed of the upper moving part, △X is the position deviation, and T0 is the control cycle of the control device.

[0013] The method for controlling the operation of transfer equipment includes the following steps: During the process of controlling the lower moving part and the upper moving part of the transfer device to move along the ground rail and the ceiling rail, the first moving position information of the lower moving part and the second moving position information of the upper moving part are periodically obtained; one of the lower moving part and the upper moving part moves by a gear and rack driven by a motor, and the other moves by a roller driven by a motor. The positional deviations of the upper and lower moving parts are determined based on the first and second moving position information obtained each time. The upper and lower moving parts are controlled to move according to the determined position deviation each time in order to compensate for the position deviation.

[0014] The transfer equipment operation control system includes: The location information acquisition unit is used to periodically obtain the first current position of the lower moving part and the second current position of the upper moving part of the mobile device when the upper driver of the upper moving part or the lower driver of the lower moving part, which is moved by a roller driven by a motor, is running in the location mode; one of the lower moving part and the upper moving part moves by a gear and rack driven by a motor, and the other moves by a roller driven by a motor. The deviation determination unit is used to determine the position deviation of the upper moving part and the lower moving part based on the first current position and the second current position obtained each time. A synchronization unit is used to control the movement of the upper moving part and the lower moving part according to the determined position deviation each time in order to compensate for the position deviation.

[0015] A control device includes a memory and a processor, the memory storing a program executable by the processor, which, when executed, implements any of the control methods described above.

[0016] A transfer device includes a column and a lower moving part and an upper moving part connected to the bottom and top of the column, respectively. The upper moving part is equipped with a barcode reader. The barcode reader, the upper moving part, and the lower moving part are all connected to a control device. During the process of controlling the lower moving part and the upper moving part of the transfer device to move along the ground track and the ceiling track, the control device periodically obtains the first current position of the lower moving part and the second current position of the upper moving part. Based on the first current position and the second current position obtained each time, the control device determines the position deviation of the upper moving part and the lower moving part. Based on the determined position deviation each time, the control device moves the upper moving part and the lower moving part to compensate for the position deviation.

[0017] The advantages of the technical solution of this invention are mainly reflected in: In the present invention, by providing power sources for the upper and lower moving parts respectively, and by obtaining their position information during the control of their movement, calculating their position deviations, and compensating for the position deviations, the positions of the upper and lower moving parts can be effectively matched so that the column remains vertical during movement, thereby improving the stability and safety of the transport. At the same time, it can effectively avoid oscillations when the movement stops, which is beneficial to improving operational efficiency and allowing the transfer equipment to be set higher to meet the needs of higher storage devices.

[0018] The position deviation calculation method of the present invention is based on calibration parameters, which can effectively avoid the influence of machining errors and installation errors, thereby improving the calculation accuracy of position deviation and providing a reliable data basis for accurate control.

[0019] This invention enables the upper driver of the upper moving part to operate in torque mode before the transfer device decelerates to a predetermined speed. This effectively avoids the problem of the upper moving part accelerating too much in position mode, causing the rollers to slip relative to the ceiling track and fail to keep up with the upper and lower moving parts synchronously. Subsequently, at low speed, the upper driver switches to position mode, which can effectively prevent the rollers from slipping and achieve accurate positioning, ensuring the synchronization of the upper and lower moving parts. Attached Figure Description

[0020] Figure 1 This is a partial perspective view of the transfer device of the present invention; Figure 2 yes Figure 1 A magnified view of a portion of the image; Figure 3 This is a schematic diagram showing the connection between the control device of the present invention and the upper driver, lower driver and code reader; Figure 4 This is a flowchart of one embodiment of the method of the present invention; Figure 5 This is a graph showing the switching from torque mode to position mode in this invention; Figure 6 This is a flowchart of another embodiment of the method of the present invention. Detailed Implementation

[0021] The objectives, advantages, and features of this invention will be illustrated and explained through the following non-limiting description of preferred embodiments. These embodiments are merely typical examples of applying the technical solutions of this invention, and all technical solutions formed by equivalent substitutions or equivalent transformations fall within the scope of protection claimed by this invention.

[0022] In the description of the solution, it should be noted that the terms "center," "upper," "lower," "left," "right," "front," "rear," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience and simplification of description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0023] Example 1 The following description, in conjunction with the accompanying drawings, illustrates the operation control method for a transfer device disclosed in this invention. This operation control method is based on a transfer device 100, as shown in the attached drawings. Figure 1 As shown, it includes a column 110 and a lower moving part 130 and an upper moving part 150 connected to the bottom and top of the column 110. The lower moving part 130 is movably mounted on a horizontally mounted ground track 300, and the upper moving part 150 is movably mounted on a horizontally mounted ceiling track 500.

[0024] One of the lower moving part 130 and the upper moving part 150 moves via a gear and rack driven by a motor, while the other moves via a roller driven by a motor. For ease of explanation, this embodiment will use the example of the lower moving part 130 moving along the ground track 300 via a gear and rack driven by a motor, and the upper moving part 150 moving along the ceiling track 500 via a roller driven by a motor.

[0025] For details, see attached. Figure 1 -Appendix Figure 3 As shown, the lower moving part 130 includes a base frame 133, which is movably mounted on a ground rail via a slider. At this time, the ground rail can be two parallel tracks.

[0026] The base frame 133 is equipped with a gear 134, which meshes with a rack 135. The rack 135 is parallel to the ground rail and is mounted on the base where the ground rail is located. The gear 134 is driven to rotate by a lower servo system, which includes a lower drive motor 132 and a lower driver 131, both mounted on the base frame 133. When the lower drive motor 132 drives the gear 134 to rotate, the gear 134 moves along the rack 135, thereby moving the base frame 133 and the column. The lower drive motor 132 is equipped with an encoder, which is connected and communicates with the lower driver 131. The lower driver 131 can determine the real-time displacement of the lower moving part 130 based on the real-time feedback signal from the encoder and feed it back to the control device 900. The control device 900 can then obtain the real-time position of the lower moving part 130 on the ground rail based on the initial position and real-time displacement of the lower moving part 130. Of course, in other embodiments, the lower driver 131 may also send the real-time encoder feedback signal to the control device, and the control device determines the real-time displacement of the lower moving part 130 and the real-time position of the lower moving part on the ground track based on the data fed back by the lower driver. The specific method for determining the real-time displacement and position of the lower moving part based on the encoder feedback signal is known technology and is not an innovation of this invention, and will not be described in detail here.

[0027] Of course, in other embodiments, the lower moving part may also include traveling wheels mounted on the base frame 133 and moving along the ground rail 300. The traveling wheels are rolled on the top surface of the ground rail 300, and their number can be designed as needed, for example, one, two, or more, which is not limited here. At the same time, limit wheels are also provided on the base frame 133. The limit wheels are, for example, clamping wheels rolled on the left and right sides of the ground rail 300. Of course, in other embodiments, the limit wheels can also cooperate with the gear 134 to achieve limiting, that is, the limit wheels and the gear 134 are distributed on the left and right sides of the ground rail 300.

[0028] The upper moving part 150 includes an upper frame 153 and rollers 154 disposed on the upper frame and tactilely connected to the ceiling track 500. The rollers can be disposed on the left and right sides of the ceiling track 500, and at least two rollers are disposed on each side of the ceiling track 500. At least one of the rollers is connected to an upper servo system that drives its rotation. The upper servo system includes an upper drive motor (not shown in the figure) and an upper driver 151 disposed on the upper frame. The upper drive motor drives the roller to rotate, thereby enabling the roller to move along the ceiling track 500. Of course, in other embodiments, the rollers can also be known electric rollers.

[0029] Furthermore, a barcode strip 700 is provided next to the ceiling track 500. The barcode strip 700 extends along the extension direction of the ceiling track 500, and its specific length can be set as needed to cover the movement range of the transfer device; no limitation is made here. The barcode strip 700 can be installed on the guide rail 710 on the side of the ceiling track. Simultaneously, a barcode reader 152 corresponding to the barcode strip 700 is provided on the upper frame. The barcode reader 152 determines the real-time position information of the upper moving part 150 on the ceiling track by reading the barcodes at different positions on the barcode strip 700. The specific method of determining the position information by reading the barcodes on the barcode strip 700 by the barcode reader 152 is known technology and not an innovation of this invention; therefore, it will not be elaborated here.

[0030] The upper driver 151, the code reader 152, and the lower driver 131 all communicate with the control device 900 via known wired or wireless methods, which are not limited here. The control device 900 can be various feasible control devices, such as a PLC, a motion control device, etc., which are not limited here. When controlling the lower moving part 130 and the upper moving part 150 to move along the ground track 300 and the ceiling track 500, the control device 900 can periodically obtain the position information of the upper moving part and the lower moving part and control the movement of the upper moving part 150 and the lower moving part 130 according to the obtained position information of the upper moving part 150 and the lower moving part 130.

[0031] Correspondingly, in one embodiment, as shown in the appendix Figure 4 As shown, in the control method, each time the transfer device moves, the moving position of the lower moving part is used as a reference, so that the upper moving part follows the moving position of the lower moving part in real time. Correspondingly, during the entire process of controlling the transfer device to perform one movement, the control device can make both the upper driver and the lower driver run in position mode, and periodically obtain the first current position of the lower moving part 130 and the second current position of the upper moving part 150. The positional deviations of the upper and lower moving parts are determined based on the first and second current positions obtained each time. And the position deviation is compensated by controlling the movement of the upper moving part according to the position deviation each time.

[0032] After each positional deviation is determined, the control device 900 can control the upper moving part 150 to accelerate and catch up in the next control cycle, thereby compensating for the positional deviation. This ensures that the column remains as vertical as possible throughout the movement. Specifically, for example, after determining the positional deviation in one control cycle, the target position and / or target speed of the upper moving part are determined according to the method described below for determining the target position and target speed of the upper moving part when the upper driver is in position mode, and then sent to the upper driver for execution to achieve compensation. This will not be elaborated here. Of course, known speed feedforward compensation, position loop PID compensation, etc., can also be used to achieve compensation. These are known technologies and not innovations of this invention, and will not be elaborated here. Similarly, the corresponding technology for the control device to control the upper driver and lower driver to simultaneously start the upper and lower moving parts for movement is known technology and not an innovation of this invention, and will not be elaborated here.

[0033] Due to installation and processing errors, it is difficult to guarantee the absolute parallelism of the ceiling track 500 and the ground track 300, as well as the absolute parallelism between the ceiling track 500 and the barcode tape 700. Therefore, there will be a certain unpredictable deviation between the first and second current positions obtained in real time, which will affect the accuracy of the position deviation determination.

[0034] To overcome this problem, this invention employs a vertical calibration method to obtain a set of calibration data pairs, providing a basis for accurately determining the positional deviation in the future.

[0035] Specifically, during calibration, the transfer device 100 is moved from one end of the ground rail 300 and the ceiling rail 500 to the other end. During the movement, according to a set distance interval, the reference position of the lower moving part 130 on the ground rail 300 is obtained, and the movement position of the upper moving part 150 on the ceiling rail 500 is obtained by the reader 152 at each of the reference positions, while keeping the column vertical. The distance interval is, for example, 1mm, 5mm, 10mm, etc., and is determined according to the specific needs, and is not limited here.

[0036] The lower moving part 130 has a set of reference positions A0, A1, A2...A on the ground rail. n The corresponding moving parts 150 on the ceiling track are a set of moving positions B0, B1, B2...B n This yields a set of positional relation pairs. For example, A0 and B0 are one positional relation pair, A1 and B1 are another, A2 and B2 are yet another, and A... n With B n For each positional relationship pair, the column remains vertical when the lower moving part 130 and the upper moving part 150 are in each positional relationship pair.

[0037] Furthermore, the lower moving part 130 is defined as having a ground track calibration range between two adjacent reference positions on the ground track 300, for example, the range between A0 and A1 is a ground track calibration range (A0, A1). Similarly, the upper moving part 150 is defined as having a ceiling track calibration range between two adjacent moving positions on the ceiling track 500, for example, the range between B0 and B1 is a ceiling track calibration range (B0, B1).

[0038] Correspondingly, the positional deviation is determined based on the vertical calibration range of the sky track and the ground track, and the specific calculation formula is as follows: △X = (B) x - B y ) / (A X - A y )×A 实 -B 实 ; Where △X is the positional deviation, A X The upper limit of the orbital calibration range where the current position (first current position) of the lower moving part 130 is located; A y The lower limit of the orbit calibration range where the current position of the lower moving part 130 is located; B x B is the upper limit of the celestial orbit calibration range where the current position (second current position) of the upper moving part 150 is located; y The lower limit of the calibration range of the current position of the upper moving part 150 is the value of the celestial orbit; A 实 B is the current position of the lower moving part on the ground track. 实 This indicates the current position of the upper moving part 150 on the overhead track 500.

[0039] For example, A 实 It is 100mm, which is within the ground rail calibration range (99mm, 101mm), B 实 If the value is 99.8 mm, which falls within the calibration range of the ceiling track (99.1 mm, 100.8 mm), then at this point, A... X For 101, A y It is 99, B x B is 100.8. y It is 99.1.

[0040] However, due to the structure of the upper moving part 150, the lateral friction between the roller of the upper moving part 150 and the ceiling track 500 is limited, so the applicable acceleration is also limited. If the upper drive is always running in position mode, the roller is prone to slipping under high acceleration, causing the upper moving part 150 to be unable to keep up with the upper and lower moving parts 130 synchronously. At the same time, it increases the wear of the pulley, generates particles, and affects the cleanliness of the environment.

[0041] Therefore, to avoid the above situation, during the period from the start of movement of the lower moving part 130 to deceleration to a set speed, the lower driver operates in position mode while the upper driver operates in torque mode. When the lower moving part decelerates to the set speed, the lower driver remains in position mode, while the upper driver switches to position mode and operates in position mode until both the lower moving part 130 and the upper moving part stop moving. The set speed can be set as needed and is not limited here.

[0042] That is, when the control device initiates the movement of the transfer equipment, it sends a command to the lower drive to operate in position mode and a command to the upper drive to operate in torque mode. Furthermore, the control device can obtain the operating modes of the upper and lower drives through periodic communication with them.

[0043] For the motion control of the lower moving part, the control device can package parameters such as the desired endpoint position, speed, acceleration, and deceleration into data blocks and send them to the lower driver. After receiving the data blocks, the lower driver's position control device generates a smooth position command curve. The current loop and speed loop inside the lower driver work closely together to drive the lower drive motor to rotate strictly according to the position curve. The encoder provides real-time feedback on the actual position of the lower drive motor, forming a closed-loop control to ensure rapid, smooth, and accurate arrival at the target. The specific implementation process is known technology and is not an innovation of this invention; therefore, it is not limited here.

[0044] Of course, in other embodiments, the control device may plan the motion trajectory of the lower moving part according to the endpoint position, moving speed, acceleration, deceleration, etc., and send it to the lower driver for execution all at once. Alternatively, the control device may generate the motion trajectory in real time and send it to the lower driver for execution periodically. The specific implementation process is also known technology and is not an innovation of this invention, so it is not limited here.

[0045] For the motion control of the upper moving part, when controlling the movement of the upper moving part according to the torque mode, the control device can send a pre-calculated starting torque value when sending the instruction to the upper driver to operate in torque mode. The starting torque value can be predetermined and stored in the system for later retrieval. The upper driver controls the upper drive motor to output the corresponding torque according to the starting torque value.

[0046] Subsequently, the output torque of the upper drive motor is made to change synchronously with the output torque of the lower drive motor of the lower moving part. For example, the control device can obtain the output torque of the lower drive motor from the lower driver in real time, and calculate the target output torque of the upper drive motor based on the output torque of the lower drive motor and a certain torque proportional coefficient, and then send it to the upper driver for execution. The torque proportional coefficient can be a preset fixed value, or it can be dynamically adjusted according to a known method, which is not limited here.

[0047] When the transfer device moves, the control device 900 acquires the moving speed of the transfer device in real time, specifically the moving speed of the lower moving part. When it is determined that the moving speed of the lower moving part has reached the set speed, the control device sends a switching command from torque mode to position mode to the upper driver. The switching command includes the target position of the upper moving part. To ensure a smooth transition of the upper driver during mode switching, as shown in the attached... Figure 5 As shown, when the upper driver executes a switching command (executes a position control command), it no longer operates according to the conventional position loop mode. Instead, it sets the initial command speed of the speed loop to the current speed of the upper moving part when the position control command is executed. Simultaneously, for a short period after the initial switch to position mode, the command torque during the execution of the position control command is used as the input to the current loop, instead of being immediately recalculated by the speed loop of the position loop. Subsequently, it operates according to the conventional position loop mode, thus achieving a continuous and smooth transition of speed and torque without any abrupt changes or shocks.

[0048] As attached Figure 6 As shown, the operation control method for the transfer equipment includes the following steps: After the control device determines that the upper driver has switched to the position mode, it determines the position deviation between the upper moving part 150 and the lower moving part 130 based on the first current position of the lower moving part of the mobile device and the second current position of the upper moving part of the mobile device obtained periodically. The specific calculation method for the position deviation is the same as above and will not be repeated here.

[0049] The upper moving part 150 is moved according to the position deviation determined in each cycle.

[0050] Specifically, the control device determines the target speed and target position of the upper moving part 150 in the next control cycle based on the position deviation determined in each cycle.

[0051] The target speed of the upper moving part 150 in the next control cycle can be used for speed feedforward, which is calculated according to the following formula: V 上 =V 下 ×GR; Among them, V 上The target speed of the upper moving part 150 in the next control cycle; V 下 130 represents the instantaneous speed of the lower moving part; GR represents the electronic gear ratio.

[0052] The target position of the upper moving part 150 in the next control cycle is calculated according to the following formula: S 上 =(S 下 ×GR)+D 初 ; Among them, S 上 The target position of the upper moving part 150 in the next control cycle; S 下 The current position of the lower moving part 130; GR is the electronic gear ratio; D 初 The initial offset is a constant that can be determined and stored in the control device for later retrieval.

[0053] The electronic gear ratio is calculated according to the following formula: GR = (V0 + ΔX / T0) / V0; Where V0 is the current moving speed of the upper moving part 150, △X is the position deviation, and T0 is the control cycle of the control device 900.

[0054] The upper driver controls the upper drive motor to work according to the target position and target speed. The specific control technology is known and will not be described in detail here.

[0055] Of course, in other embodiments, the control device may also feed back the position deviation to the upper driver after determining the position deviation, and the upper driver may calculate the target speed and target position based on the position deviation and the instantaneous speed and current position of the lower moving part, and control the upper drive motor.

[0056] In addition, when the upper drive is in torque mode, the control device can also periodically obtain the first current position of the lower moving part 130 and the second current position of the upper moving part 150, and determine the position deviation of the upper moving part and the lower moving part based on the first current position and the second current position obtained each time.

[0057] During this period, operational status monitoring and protection parameters can be implemented based on periodically determined position deviations. For example, it can be determined whether the absolute value of each position deviation exceeds a safety threshold. If so, it indicates that slippage may occur in the upper moving part, triggering an alarm or adjusting the torque coefficient. Alternatively, the output torque of the upper drive motor can be fine-tuned based on each determined position deviation. For instance, the torque coefficient can be adjusted based on the difference between two adjacent determined position deviations, thereby achieving fine-tuning of the upper drive motor's output torque. The corresponding technology is known and not an innovation of this invention, and will not be elaborated upon here.

[0058] Example 2 This embodiment discloses a transfer equipment operation control system, including: The location information acquisition unit is used to periodically obtain the first current position of the lower moving part and the second current position of the upper moving part during the process of controlling the lower moving part and the upper moving part of the transfer device to move along the ground track and the ceiling track; one of the lower moving part and the upper moving part moves by a gear and rack driven by a motor, and the other moves by a roller driven by a motor. The deviation determination unit is used to determine the position deviation of the upper moving part and the lower moving part based on the first current position and the second current position obtained each time. A synchronization unit is used to control the movement of the upper moving part and the lower moving part according to the determined position deviation each time in order to compensate for the position deviation.

[0059] Example 3 This embodiment discloses a control device, including a memory and a processor. The memory stores a program that can be executed by the processor. When the program is executed, it implements any of the control methods described above.

[0060] This invention has many other embodiments, and all technical solutions formed by equivalent transformation or equivalent transformation fall within the protection scope of this invention.

Claims

1. A method for controlling the operation of a transfer device, wherein the transfer device comprises an upper moving part and a lower moving part, characterized in that: One of the lower moving part and the upper moving part moves by means of a gear and rack driven by a motor, and the other moves by means of a roller driven by a motor. The control method includes the following steps: When the upper driver of the upper moving part or the lower driver of the lower moving part, which moves by a motor-driven roller, is running in position mode, the position deviation between the upper and lower moving parts is determined based on the first current position of the lower moving part and the second current position of the upper moving part obtained periodically, and the movement of the upper or lower moving part, which moves by a motor-driven roller, is controlled based on the determined position deviation each time.

2. The transfer equipment operation control method according to claim 1, characterized in that: The positional deviation is calculated according to the following formula: △X=(B x - B y ) / (A X - A y )×A 实 -B 实 ; Where △X is the positional deviation, A X The upper limit of the orbital calibration range where the current position of the lower moving part is located; A y B is the lower limit of the orbital calibration range where the current position of the lower moving part is located; x B is the upper limit of the celestial orbit calibration range in which the current position of the upper moving part is located; y The lower limit of the calibration range of the current position of the upper moving part on the celestial track; A 实 B is the current position of the lower moving part on the ground track. 实 This indicates the current position of the upper moving part on the sky track.

3. The transfer equipment operation control method according to claim 1, characterized in that: During the period from the start of movement of the lower moving part to deceleration to a set speed, the lower driver of the lower moving part is operated in position mode, the upper driver of the upper moving part is operated in torque mode, and the output torque of the upper drive motor of the upper moving part changes synchronously with the output torque of the lower drive motor of the lower moving part.

4. The transfer equipment operation control method according to claim 3, characterized in that: When the speed is reduced to the set speed, the upper drive switches from torque mode to position mode.

5. The transfer equipment operation control method according to claim 4, characterized in that: When the upper driver is operating in position mode, the target speed of the upper moving part in the next control cycle is calculated according to the following formula: V 上 =V 下 ×GR; Among them, V 上 V represents the target speed of the moving part in the next control cycle. 下 ρ is the instantaneous velocity of the lower moving part; GR is the electronic gear ratio.

6. The transfer equipment operation control method according to claim 5, characterized in that: When the upper driver is running in position mode, the target position of the upper moving part in the next control cycle is calculated according to the following formula: S 上 =(S 下 ×GR)+D 初 ; Among them, S 上 S represents the target position of the upper moving part in the next control cycle. 下 The current position of the lower moving part; GR is the electronic gear ratio; D 初 This is the starting offset.

7. The transfer equipment operation control method according to claim 6, characterized in that: The electronic gear ratio is calculated according to the following formula: GR = (V0 + ΔX / T0) / V0; Where V0 is the current moving speed of the upper moving part, △X is the position deviation, and T0 is the control cycle of the control device.

8. A method for controlling the operation of transfer equipment, characterized in that, Includes the following steps: During the process of controlling the lower moving part and the upper moving part of the transfer device to move along the ground rail and the ceiling rail, the first moving position information of the lower moving part and the second moving position information of the upper moving part are periodically obtained; one of the lower moving part and the upper moving part moves by a gear and rack driven by a motor, and the other moves by a roller driven by a motor. The positional deviations of the upper and lower moving parts are determined based on the first and second moving position information obtained each time. The upper or lower moving part, which moves by controlling the roller driven by the motor, moves according to the determined position deviation each time.

9. A control device, comprising a memory and a processor, the memory storing a program executable by the processor, characterized in that: When the program is executed, it implements the control method as described in any one of claims 1-8.

10. A transfer device, comprising a column and a lower moving part and an upper moving part connected to the bottom and top of the column, characterized in that: One of the lower moving part and the upper moving part moves via a gear and rack driven by a motor, while the other moves via a roller driven by a motor and is equipped with a barcode reader. The barcode reader, the upper moving part, and the lower moving part are all connected to a control device. When the upper driver of the upper moving part or the lower driver of the lower moving part moves via the roller driven by the motor is running in position mode, the control device determines the positional deviation between the upper moving part and the lower moving part based on the first current position of the lower moving part and the second current position of the upper moving part obtained periodically, and controls the movement of the upper moving part or the lower moving part moved by the roller driven by the motor based on the determined positional deviation each time.

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