A fluorinated liquid vacuum cleaning device and method of cleaning thereof

Abstract

The application relates to the technical field of fluorinated liquid cleaning, in particular to a fluorinated liquid vacuum cleaning device and a cleaning method thereof. The device comprises a cleaning bin, a base arranged in the cleaning bin, a placing table arranged in an array on the base, a workpiece to be cleaned placed on the placing table, a vibrator with adjustable vibration frequency, the vibrator being connected to the placing table and used for vibrating the placing table, a levelness adjuster connected to the base and used for changing the inclination angle of the base relative to a horizontal plane, a gravity sensor arranged on the placing table and used for testing the weight of the workpiece to be cleaned, and a controller connected to the vibrator, the levelness adjuster and the gravity sensor. The vibration frequency of the vibrator is related to the weight of the workpiece to be cleaned, and the controller controls the levelness adjuster to change the inclination angle of the base relative to the horizontal plane, so that the workpieces with different fluorinated liquid retention amounts can reach the same cleaning progress in the same time.

Description

Technical Field

[0001] This invention relates to the field of fluorinated liquid cleaning technology, and in particular to a vacuum cleaning device and cleaning method for fluorinated liquids. Background Technology

[0002] In high-tech industries such as semiconductor manufacturing, precision optics, and aerospace, fluorinated liquids are widely used as cleaning agents, coolants, or wetting fluids due to their excellent chemical stability, insulation, and thermal conductivity.

[0003] During production, fluorinated liquid adheres to the surface of workpieces and into complex cavities and micro-crevices. Because fluorinated liquid is expensive, often referred to as "liquid gold," its efficient recovery is crucial for reducing production costs. Simultaneously, residual fluorinated liquid can affect the quality of subsequent process steps, thus requiring thorough removal. Existing equipment typically uses a fixed vibration frequency and a fixed workpiece placement angle to clean all workpieces. However, in actual production, the weight, shape, and size of the workpieces to be cleaned vary significantly, and the amount of fluorinated liquid remaining on the surface of workpieces from the same batch also differs. Cleaning workpieces from the same batch is usually done simultaneously in the cleaning machine, with the cleaning cycle ending at the same time. This cleaning method cannot effectively clean all workpieces, and the varying amounts of fluorinated liquid remaining make it impossible to guarantee consistent cleaning results for workpieces from the same batch. Summary of the Invention

[0004] Therefore, the purpose of this invention is to overcome the problem that the existing technology cannot perform cleaning with different intensities for workpieces with different fluoride liquid retention levels, resulting in uneven cleaning effects, which may affect the average quality of the product and the implementation of subsequent processes. Therefore, a fluoride liquid vacuum cleaning device is provided, which can adjust the cleaning intensity of the fluoride liquid by the weight of the workpiece to be cleaned, so that workpieces with different fluoride liquid retention levels can be cleaned within the same time, preventing the contradiction between over-cleaning and inadequate cleaning.

[0005] To address the aforementioned technical problems, this invention provides a vacuum cleaning device for fluorinated liquid, used to remove fluorinated liquid adhering to the surface of a workpiece; the cleaning device includes a cleaning chamber, and further includes:

[0006] A base, which is disposed within the cleaning chamber;

[0007] A placement table, arranged in an array on the base; the workpiece to be cleaned is placed on the placement table;

[0008] A vibrator with an adjustable vibration frequency; and the vibrator is connected to the placement platform for vibrating the placement platform.

[0009] A leveling adjuster, connected to the base, is used to change the tilt angle of the base relative to the horizontal plane;

[0010] A gravity sensor, which is mounted on the placement platform, is used to test the weight of the workpiece;

[0011] A controller, which is connected to the vibrator, the level adjuster and the gravity sensor;

[0012] The controller controls the vibration frequency of the vibrator to be related to the weight of the workpiece, and the controller controls the leveling adjuster to change the tilt angle of the base relative to the horizontal plane.

[0013] In one embodiment of the present invention, the weight of the workpiece without fluorinated liquid is a first weight, the level adjuster continuously rotates and changes the tilt angle of the base, and when the weight of each workpiece is reduced to the first weight, the base returns to level.

[0014] In one embodiment of the present invention, a resonant cavity is provided inside the placement stage, and the resonant cavity is filled with a resonant liquid, but the resonant liquid does not completely fill the resonant cavity.

[0015] In one embodiment of the present invention, the device further includes a resonant liquid replenishment device disposed on one side of the placement platform; the resonant liquid replenishment device is connected to the controller, the output pipe of the resonant liquid replenishment device is connected to the resonant cavity, the difference between the weight of the workpiece and the first weight is within the normal weight range of the fluorinated liquid on the surface of the workpiece to be cleaned, and the weight of the fluorinated liquid on the workpiece surface exceeds 1.5 times the maximum value of the normal weight range when it is 1.5 times the maximum value of the normal weight range when it is 1.5 times the weight of the workpiece, and when the weight of the workpiece exceeds the second weight, the resonant liquid replenishment device fills the resonant cavity.

[0016] In one embodiment of the present invention, the cleaning device further includes:

[0017] An expansion tank having a top for storing pure gas and a bottom for storing fluorinated liquid;

[0018] An air supply pipeline assembly, which connects the air inlet of the expansion tank and the cleaning chamber;

[0019] A vacuum pump, which is installed on the gas supply pipeline, is used to drive the pure gas in the expansion tank into the cleaning chamber;

[0020] A recovery pipe assembly, which connects the outlet of the expansion tank and the cleaning chamber, is used to recover the fluorinated liquid and the purified gas.

[0021] In one embodiment of the invention, the cleaning device further includes a refrigerant component disposed on the pipeline of the recovery pipe assembly for cooling the fluorinated liquid.

[0022] In one embodiment of the present invention, the cleaning device further includes a gas separator, one end of which is connected to the refrigerant component and the other end of which is connected to the expansion tank, for separating the fluorinated liquid and the pure gas;

[0023] The gas separator includes:

[0024] The top space, which, along with the refrigerant component, is connected to the top of the expansion tank;

[0025] Bottom space, which connects to the bottom of the expansion tank;

[0026] A liquid-blocking orifice plate, which is fixed between the top space and the bottom space;

[0027] A venturi tube is disposed on one side of the gas separator and connected to the top space, and the throat of the venturi tube is connected to the bottom space.

[0028] In one embodiment of the present invention, the cleaning method based on the fluorinated liquid vacuum cleaning device includes:

[0029] S1: Set the net weight of the workpiece without fluorinated liquid as the first weight, and use the first weight as the calibration weight. Place several workpieces to be cleaned in an array on the placement platform. At this time, the base is in a horizontal state, and the gravity sensor tests the weight of each workpiece at this time.

[0030] S2: Taking the center of the base as a reference, sum the weights of the workpieces to be cleaned on both sides of the center, and the controller controls the level adjuster to drive the base to tilt toward the side with the larger sum of weights.

[0031] S3: Turn on the vibrator. The controller adjusts the vibration frequency of the vibrator according to the weight of the workpiece. The greater the weight of the workpiece, the higher the vibration frequency of the vibrator increases.

[0032] S4: The net weight of the workpiece without fluorinated liquid is tested as the first weight. When the weight of the workpiece is reduced to the first weight, the leveling adjuster drives the base to return to level.

[0033] In one embodiment of the present invention, the method further includes:

[0034] S5: The fluorinated liquid on the surface of the workpiece forms a fluorinated liquid gas-liquid mixture and is cooled down. After cooling down, fluorinated liquid droplets and pure gas are formed. The fluorinated liquid droplets and pure gas are separated into gas and liquid, and the fluorinated liquid and pure gas are recovered.

[0035] In one embodiment of the present invention, the cooling temperature for the fluorinated liquid droplets is adjusted according to the properties of the fluorinated liquid. When the evaporation temperature of the fluorinated liquid is greater than 40°C, the temperature is 20°C, and when the evaporation temperature of the fluorinated liquid is less than or equal to 40°C, the temperature is 10°C.

[0036] Compared with the prior art, the above-described technical solution of the present invention has the following advantages:

[0037] The purpose of the fluorinated liquid vacuum cleaning device of the present invention is to differentiate the cleaning intensity based on the different retention levels of fluorinated liquid on the surface of workpieces. In the same batch of workpiece processing, the surface of the workpiece to be cleaned is prone to retaining more fluorinated liquid due to the shape of irregular parts. Moreover, the amount of fluorinated liquid retained will also be different depending on the smoothness of the workpiece material. Therefore, when processing several workpieces to be cleaned in the same batch, there will be different cleaning times. Therefore, the fluorinated liquid vacuum cleaning device of the present invention can detect the weight of the workpiece to be cleaned to determine its fluorinated liquid retention amount, and adjust the cleaning intensity according to the different fluorinated liquid retention amounts, so that workpieces with different fluorinated liquid retention amounts can be cleaned to the effect of 0 fluorinated liquid retention amount simultaneously within the same time range.

[0038] The system incorporates a vibrator and a leveling adjuster. The vibrator transforms the fluorinated liquid adhering to the surface of the workpiece into a flowing state, while the leveling adjuster tilts the workpiece to allow the flowing fluorinated liquid to be discharged under gravity. Combined with vacuum purging, the fluorinated liquid on the surface of the workpiece is removed. A gravity sensor and controller are also included. The gravity sensor is located below each workpiece placement platform to detect its weight in real time. Within the same batch of workpieces, heavier workpieces have more fluorinated liquid on their surface. Therefore, the controller adjusts the vibration frequency of the vibrator corresponding to the heavier gravity sensor. The higher the vibration frequency, the greater the weight, resulting in a higher amount of fluorinated liquid being converted into a flowing state per unit time. This ensures that within the same batch of workpieces, due to the difference in vibration intensity, all the fluorinated liquid adhering to the surface of each workpiece is converted into a flowing state within the same cleaning time, thus detaching from the workpiece surface. This achieves synchronized cleaning progress for the same batch of parts within a unit time. Attached Figure Description

[0039] To make the content of this invention easier to understand, the invention will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0040] Figure 1 This is a schematic diagram of the structure of a vacuum cleaning device for fluorinated liquid in a preferred embodiment of the present invention;

[0041] Figure 2 This is a schematic diagram of the cleaning chamber portion in a preferred embodiment of the present invention;

[0042] Figure 3 This is a cross-sectional schematic diagram of the cleaning chamber portion in a preferred embodiment of the present invention;

[0043] Figure 4 This is a schematic diagram of the base portion in a preferred embodiment of the present invention;

[0044] Figure 5 This is a cross-sectional schematic diagram of the placement platform in a preferred embodiment of the present invention;

[0045] Figure 6 This is a schematic diagram of the gas separator section in a preferred embodiment of the present invention;

[0046] Figure 7 This is a cross-sectional schematic diagram of the gas separator section in a preferred embodiment of the present invention.

[0047] Explanation of reference numerals in the instruction manual:

[0048] 1. Cleaning chamber; 11. Base; 12. Placement platform; 121. Resonance cavity; 122. Resonance fluid replenishment device; 13. Vibrator; 14. Levelness adjuster; 15. Gravity sensor;

[0049] 2. Expansion tank;

[0050] 3. Gas pipeline assembly; 31. Vacuum pump;

[0051] 4. Recovery pipe assembly; 41. Refrigerant components; 42. Gas separator; 421. Top space; 422. Bottom space; 423. Liquid baffle plate; 424. Venturi tube;

[0052] D1, airflow direction. Detailed Implementation

[0053] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention. However, the embodiments described are not intended to limit the present invention.

[0054] The purpose of this invention is to provide a vacuum cleaning device for fluorinated liquid, which can adjust the cleaning intensity of the fluorinated liquid based on the weight of the workpiece to be cleaned. This allows workpieces with different fluorinated liquid retention to be cleaned within the same time frame, and workpieces from the same batch with different fluorinated liquid retention to be at the same cleaning progress after cleaning. This prevents the simultaneous occurrence of product damage and the inability to continue subsequent processes caused by over-cleaning and inadequate cleaning.

[0055] refer to Figure 1 , 3 As shown in Figure 4, a fluorinated liquid vacuum cleaning device is therefore provided, which is used to remove fluorinated liquid adhering to the surface of a workpiece. The cleaning device includes a cleaning chamber 1, and further includes: a base 11 disposed in the cleaning chamber 1; a placement platform 12 arranged in an array on the base 11; a workpiece to be cleaned placed on the placement platform 12; a vibrator 13 whose vibration frequency is adjustable; and the vibrator 13 is connected to the placement platform 12 for vibrating the placement platform 12; a level adjuster 14 connected to the base 11 for changing the tilt angle of the base 11 relative to the horizontal plane; a gravity sensor 15 disposed on the placement platform 12 for testing the weight of the workpiece to be cleaned; and a controller connected to the vibrator 13, the level adjuster 14, and the gravity sensor 15. The controller controls the vibration frequency of the vibrator 13 to be related to the weight of the workpiece to be cleaned, and the controller controls the level adjuster 14 to change the tilt angle of the base 11 relative to the horizontal plane.

[0056] refer to Figure 1 , 3 As shown in Figure 4, in industrial production, irregularly shaped workpieces need to be cleaned with fluorinated liquid, and then the fluorinated liquid adhering to their surface needs to be removed. Otherwise, the residual fluorinated liquid will damage the surface metal layer of the irregularly shaped workpiece. Therefore, a cleaning chamber 1 is provided. The cleaning chamber 1 of this invention is connected to a vacuum pump 31 and an expansion tank 2. The expansion tank 2 is filled with pure gas for blowing away the fluorinated liquid. The pure gas in the expansion tank 2 is pressurized and extracted by the vacuum pump 31, and then introduced into the cleaning chamber 1. Under vacuum pressure, the fluorinated liquid on the surface of the irregularly shaped workpiece to be cleaned is blown away. A base 11 and a placement platform 12 are provided in the cleaning chamber 1. The base 11 is a supporting base, and the placement platform 12 is fixed on the base 11. The shape of the placement platform 12 matches the shape of the irregularly shaped workpiece. When the irregularly shaped workpiece is placed on the placement platform 12, it will match the shape of the placement platform 12 and be snapped and fixed. Blind holes are opened on the placement platform 12, and a vibrator is placed in the blind holes. Vibrator 13 is an electromagnetic vibrator with adjustable vibration frequency. The vibration frequency of vibrator 13 can be significantly increased by adjusting the current intensity. Vibration can liquefy the fluorinated liquid that is stuck or limited by tension on the surface of the workpiece to be cleaned. At this time, the fluorinated liquid is more likely to flow on the surface of the workpiece to be cleaned. Therefore, a level adjuster 14 is set on one side of the base 11. The level adjuster 14 is a rotary cylinder. Its output end is connected to one side of the base 11 and can drive the base 11 to rotate. When its output end drives the base 11 to rotate, the base 11, the placement platform 12 on its surface, and the workpiece to be cleaned on the placement platform 12 are all in an inclined state. At this time, under the premise that the vibrator 13 vibrates the fluorinated liquid on the surface of the workpiece to be cleaned into a flow state, the fluorinated liquid flows out of the gaps or pits on the surface of the workpiece to be cleaned under the action of gravity and is wrapped and carried away by the pure gas in the flow of pure gas.

[0057] refer to Figure 1 , 3 As shown in Figure 4, in the vacuum cleaning process for fluorinated liquid, the amount of fluorinated liquid remaining on the surface of different irregularly shaped workpieces varies. The concentration of fluorinated liquid on the surfaces of irregularly shaped workpieces being cleaned simultaneously in the same batch also varies. When these workpieces are placed together in the cleaning chamber 1 for processing, it is necessary to ensure that the fluorinated liquid on the surface of each irregularly shaped workpiece is completely cleaned within the working time of the cleaning chamber 1. Therefore, a gravity sensor 15 is installed on the placement table 12, and a controller connected to the gravity sensor 15 is integrated into the control terminal of the cleaning chamber 1. Since the amount of fluorinated liquid remaining on the surface of the irregularly shaped workpiece varies, its weight also varies. The gravity sensor 15 detects the weight of the irregularly shaped workpiece placed on the placement table 12, and adjusts the vibration frequency of the vibrator 13 according to its weight via the controller. The greater the weight, the more fluorinated liquid remains on its surface, and the more the vibrator 13 vibrates. The higher the frequency, the better. The vibration frequency is set to be positively correlated with the weight, and all can achieve the same cleaning progress of the fluorinated liquid within a fixed cleaning time. Within the fixed cleaning time, the fluorinated liquid drops to 0. When the vibration frequency increases, more of the stagnant fluorinated liquid can be vibrated into a fluid state, thus flowing out from the surface of the workpiece. The level adjuster 14 is also connected to the controller. When all the workpieces to be cleaned are placed, the vibrator 13 starts to vibrate according to different weights. At this time, the level adjuster 14 drives the base 11 to shift, so that the fluid fluorinated liquid in the gaps or blind holes on the surface of the workpiece to be cleaned flows out to the surface of the workpiece to be cleaned under the action of gravity, and can be carried away by pure gas. Thus, the same batch of workpieces to be cleaned can achieve the same cleaning progress within the same cleaning time by adjusting the vibration intensity.

[0058] refer to Figure 1 , 3 As shown in Figure 4, the weight of the workpiece without fluorinated liquid is the first weight. The level adjuster 14 rotates continuously and changes the tilt angle of the base 11. When the weight of each workpiece to be cleaned is reduced to the first weight, the base 11 returns to level.

[0059] refer to Figure 1 , 3As shown in Figure 4, in another embodiment, before starting the inspection, the weight of the workpiece without fluorinated liquid is measured as the first weight. At this time, the surface of the workpiece is smooth and no process of cleaning its surface with fluorinated liquid has been performed. When the workpiece to be cleaned is placed on the placement table 12, the fluorinated liquid is carried away by the pure airflow under the action of the vibrator 13 and the level adjuster 14. At this time, the level adjuster 14 can continuously change the tilt angle of the base 11 to improve the flow efficiency of the fluorinated liquid. When the weight of each workpiece to be cleaned is reduced to the first weight, it means that the workpiece to be cleaned is a workpiece with no fluorinated liquid on its surface. After the gravity sensor 15 detects the weight of each workpiece, the level adjuster 14 returns to level, and the operator can intuitively see that the fluorinated liquid cleaning is completed.

[0060] refer to Figure 1 , 3 As shown in Figures 4 and 5, a resonant cavity 121 is provided inside the placement platform 12. The resonant cavity 121 is filled with resonant liquid. The resonant liquid does not completely fill the cavity 121. The device also includes a resonant liquid replenishment device 122, which is located on one side of the placement platform 12. The resonant liquid replenishment device 122 is connected to the controller. The output pipe of the resonant liquid replenishment device 122 is connected to the resonant cavity 121. The difference between the weight of the workpiece to be cleaned and the first weight is within the normal weight range of the fluorinated liquid on the surface of the workpiece to be cleaned. When the weight of the fluorinated liquid on the surface of the workpiece to be cleaned exceeds 1.5 times the maximum value of the normal weight range, it is the second weight. When the weight of the workpiece to be cleaned exceeds the second weight, the resonant liquid replenishment device 122 fills the resonant cavity 121.

[0061] refer to Figure 1 , 3As shown in Figures 4 and 5, in another embodiment, to further enhance the vibration effect of the placement platform 12, a resonance cavity 121 is provided, which is filled with a resonance liquid. The resonance liquid adopts the principle of liquid resonance, that is, when the external excitation frequency matches the natural frequency of the system, the system will absorb a large amount of energy, resulting in a sharp amplification of the amplitude. When the vibrator 13 vibrates, the internal resonance liquid will also vibrate, producing a resonance phenomenon, increasing the amplitude and intensity of the vibration. Under the premise that the vibration frequency remains unchanged, the vibration effect is further enhanced. In the initial state, the resonance liquid does not completely fill the resonance cavity 121. At this time, for a relatively low weight, the increased vibration intensity is sufficient to remove the fluorinated liquid from the surface of the workpiece to be cleaned. When the difference between the weight of the workpiece to be cleaned and the first weight exceeds the conventional range of the fluorinated liquid on the surface of the workpiece to be cleaned... When the weight is 1.5 times the normal weight, the weight of the workpiece to be cleaned is the second weight. It should be emphasized that the second weight refers to the situation where there is too much fluorinated liquid remaining on the surface of the workpiece before the process. The surface roughness of such workpieces is generally higher, so there is more fluorinated liquid remaining than in regular parts. When the weight of the workpiece to be cleaned is the second weight, the vibration intensity of conventional resonance enhancement cannot completely shake the remaining fluorinated liquid into a flow state. Therefore, a resonance liquid replenishment device 122 is set next to the placement table 12. It is filled with spare resonance liquid. At this time, the controller drives the resonance liquid replenishment device 122 to inject all the resonance liquid inside into the resonance cavity 121, filling the resonance cavity 121 and further enhancing the resonance intensity. This is used to clean the fluorinated liquid on the surface of the workpiece to be cleaned when it is at the second weight.

[0062] refer to Figure 1 , 2 As shown in Figures 6 and 7, the cleaning device further includes: an expansion tank 2, which has a top for storing pure gas and a bottom for storing fluorinated liquid; a gas supply pipe assembly 3, which connects the expansion tank 2 and the inlet end of the cleaning chamber 1; a vacuum pump 31, which is installed on the pipeline of the gas supply pipe assembly 3, for driving the pure gas in the expansion tank 2 into the cleaning chamber 1; and a recovery pipe assembly 4, which connects the expansion tank 2 and the outlet end of the cleaning chamber 1, for recovering the fluorinated liquid and the pure gas.

[0063] refer to Figure 1 , 2As shown in Figures 6 and 7, the fluorinated liquid has high value. After being extracted from the workpiece surface, it needs to be recovered and the pure gas recycled. Therefore, an expansion tank 2 is installed. The bottom of the expansion tank 2 contains the recovered fluorinated liquid, and the top contains the recycled pure gas. The top of the expansion tank 2 and the air inlet of the cleaning chamber 1 are connected to a gas supply pipe assembly 3 to introduce the pure gas. A vacuum pump 31 is installed on the gas supply pipe assembly 3. By vacuuming, the pure gas forms a continuous vacuum airflow. The direction inside the cleaning chamber 1 is D1. The workpiece to be cleaned is located inside the cleaning chamber 1. The surface of the workpiece is blown away. A recovery pipe assembly 4 is set on one side of the cleaning chamber 1, which connects the expansion tank 2 and the gas outlet of the cleaning chamber 1. The pure gas flow formed by vacuum pumping carries away the fluorinated liquid on the surface of the workpiece to be cleaned and enters the recovery pipe assembly 4 and the expansion tank 2 at the same time. The fluorinated liquid is retained at the bottom of the expansion tank 2 under the action of gravity and is recovered. The pure gas continues to flow under vacuum pressure, forming a pure gas flow circulation path driven by vacuum pump 31. When vacuum pump 31 is turned on, the fluorinated liquid on the surface of the workpiece to be cleaned can be continuously blown away.

[0064] refer to Figure 1 , 2 As shown in Figures 6 and 7, the cleaning device also includes a refrigerant component 41, which is installed on the pipeline of the recovery pipe assembly 4 for cooling the fluorinated liquid; the cleaning device also includes a gas separator 42, one end of which is connected to the refrigerant component 41 and the other end of which is connected to the expansion tank 2 for separating the fluorinated liquid and the pure gas; wherein, the gas separator 42 includes: a top space 421, which is connected to the top of the expansion tank 2 along with the refrigerant component 41; a bottom space 422, which is connected to the bottom of the expansion tank 2; a liquid baffle plate 423, which is fixed between the top space 421 and the bottom space 422; and a venturi tube 424, which is installed on one side of the gas separator 42 and connected to the top space 421, and the throat of the venturi tube 424 is connected to the bottom space 422.

[0065] refer to Figure 1 , 2As shown in Figures 6 and 7, the fluorinated liquid carried away by the vacuum gas flow from the clean chamber 1 may atomize into a gaseous state during flow. Therefore, a refrigerant component 41 is provided, which contains a cooling device to cool the gaseous fluorinated liquid back into a liquid state. To prevent the mixture of pure gas and fluorinated liquid entering the expansion tank 2 from simultaneously blocking the flow direction of the pure gas and reducing the flow velocity of the pure gas, a gas separator 42 is provided to separate the fluorinated liquid and pure gas. The gas separator 42 includes a top space 421 through which the liquid fluorinated liquid enters the expansion tank 2, and a bottom space 42... 2. The pure gas enters the bottom space 422 and then the expansion tank 2. A liquid baffle plate 423 is installed inside the gas separator 42, which allows the pure gas to flow downward into the bottom space 422. The fluorinated liquid condenses into liquid and enters the expansion tank 2 from the top space 421. A venturi tube 424 is installed on one side of the gas separator 42, and its throat is connected to the bottom space 422. When the fluorinated liquid passes through the throat of the venturi tube 424, the pressure in the bottom space 422 decreases. The pure gas flows into the bottom space 422 at an accelerated rate under the negative pressure of the bottom space 422, thereby increasing the gas-liquid separation rate of the pure gas in the gas separator 42.

[0066] refer to Figure 1 , 3 As shown in Figure 4, in order to ensure that the fluorinated liquid on the surface of the workpiece to be cleaned remains clean within a fixed time period after processing, a vacuum cleaning method for fluorinated liquid is proposed. This method includes:

[0067] S1: Set the net weight of the workpiece without fluorinated liquid as the first weight, and use the first weight as the calibration weight. Place several workpieces to be cleaned in an array on the placement platform 12. At this time, the base 11 is in a horizontal state, and the gravity sensor 15 tests the weight of each workpiece to be cleaned at this time.

[0068] S2: Taking the center of the base 11 as a reference, sum the weights of the workpieces to be cleaned on both sides of the center, and control the level adjuster 14 to drive the base 11 to tilt toward the side with the larger sum of weights, which can further improve the cleaning rate of the part with more fluorinated liquid retention.

[0069] S3: Turn on the vibrator 13. The controller adjusts the vibration frequency of the vibrator 13 according to the weight of the workpiece to be cleaned. The greater the weight of the workpiece to be cleaned, the higher the vibration frequency of the vibrator 13 will increase.

[0070] S4: The net weight of the workpiece without fluorinated liquid is the first weight. When the weight of the workpiece to be cleaned is reduced to the first weight, the level adjuster 14 drives the base 11 to return to level.

[0071] S5: The fluorinated liquid on the surface of the workpiece to be cleaned flows with the pure airflow to form a fluorinated liquid-gas mixture and flows in the D1 direction. After cooling, fluorinated liquid droplets and pure gas are formed. The fluorinated liquid droplets and pure gas are separated into liquid and gas and the fluorinated liquid and pure gas are recovered.

[0072] Based on the properties of the fluorinated liquid, the main focus is on reducing its vaporization rate by addressing its boiling point, preventing the fluorinated liquid from mixing into the pure gas, and adjusting the cooling temperature of the fluorinated liquid droplets. When the evaporation temperature of the fluorinated liquid is greater than 40°C, this temperature is 20°C; when the evaporation temperature of the fluorinated liquid is less than or equal to 40°C, this temperature is 10°C.

[0073] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of this invention.

Claims

1. A vacuum cleaning device for fluorinated liquid, used to remove fluorinated liquid adhering to the surface of a workpiece; The cleaning device includes a cleaning chamber, characterized in that: The cleaning device also includes: A base, which is disposed within the cleaning chamber; A placement table, arranged in an array on the base; the workpiece to be cleaned is placed on the placement table; A vibrator with an adjustable vibration frequency; and the vibrator is connected to the placement platform for vibrating the placement platform. A leveling adjuster, connected to the base, is used to change the tilt angle of the base relative to the horizontal plane; A gravity sensor, which is mounted on the placement platform, is used to test the weight of the workpiece; A controller, which is connected to the vibrator, the level adjuster and the gravity sensor; The controller controls the vibration frequency of the vibrator to be related to the weight of the workpiece, and the controller controls the level adjuster to change the tilt angle of the base relative to the horizontal plane. The weight of the workpiece without fluorinated liquid is the first weight. The level adjuster continuously rotates and changes the tilt angle of the base. When the weight of each workpiece is reduced to the first weight, the base returns to level. The placement platform is provided with a resonant cavity, which is filled with a resonant liquid, but the resonant liquid does not completely fill the resonant cavity. The device also includes a resonant liquid replenishment device, which is disposed on one side of the placement platform; the resonant liquid replenishment device is connected to the controller, the output pipe of the resonant liquid replenishment device is connected to the resonant cavity, the difference between the weight of the workpiece and the first weight is within the normal weight range of the fluorinated liquid on the surface of the workpiece to be cleaned, and the weight of the fluorinated liquid on the workpiece surface exceeds 1.5 times the maximum value of the normal weight range when it is 1.5 times the maximum value of the normal weight range when it is 1.5 times the weight of the workpiece. When the weight of the workpiece exceeds the second weight, the resonant liquid replenishment device fills the resonant cavity; The cleaning device also includes: An expansion tank having a top for storing pure gas and a bottom for storing fluorinated liquid; An air supply pipeline assembly, which connects the air inlet of the expansion tank and the cleaning chamber; A vacuum pump, which is installed on the gas supply pipeline, is used to drive the pure gas in the expansion tank into the cleaning chamber; A recovery pipe assembly, which connects the outlet of the expansion tank and the cleaning chamber, is used to recover the fluorinated liquid and the purified gas.

2. The vacuum cleaning device for fluorinated liquid according to claim 1, characterized in that: The cleaning device also includes a refrigerant component, which is installed on the pipeline of the recovery pipe assembly for cooling the fluorinated liquid.

3. The vacuum cleaning device for fluorinated liquid according to claim 2, characterized in that: The cleaning device also includes a gas separator, one end of which is connected to the refrigerant component and the other end of which is connected to the expansion tank, for separating the fluorinated liquid and the pure gas; The gas separator includes: The top space, which, along with the refrigerant component, is connected to the top of the expansion tank; Bottom space, which connects to the bottom of the expansion tank; A liquid-blocking orifice plate, which is fixed between the top space and the bottom space; A venturi tube is disposed on one side of the gas separator and connected to the top space, and the throat of the venturi tube is connected to the bottom space.

4. A vacuum cleaning method for fluorinated liquids, based on the vacuum cleaning device for fluorinated liquids according to any one of claims 1-3, characterized in that: The method includes: S1: Set the net weight of the workpiece without fluorinated liquid as the first weight, and use the first weight as the calibration weight. Place several workpieces to be cleaned in an array on the placement platform. At this time, the base is in a horizontal state, and the gravity sensor measures the weight of each workpiece at this time. S2: Taking the center of the base as a reference, sum the weights of the workpieces to be cleaned on both sides of the center, and the controller controls the level adjuster to drive the base to tilt toward the side with the larger sum of weights. S3: Turn on the vibrator. The controller adjusts the vibration frequency of the vibrator according to the weight of the workpiece. The greater the weight of the workpiece, the higher the vibration frequency of the vibrator increases. S4: The net weight of the workpiece without fluorinated liquid is tested as the first weight. When the weight of the workpiece is reduced to the first weight, the leveling adjuster drives the base to return to level.

5. The vacuum cleaning method for fluorinated liquid according to claim 4, characterized in that: The cleaning method also includes: S5: The fluorinated liquid on the surface of the workpiece forms a fluorinated liquid gas-liquid mixture and is cooled down. After cooling down, fluorinated liquid droplets and pure gas are formed. The fluorinated liquid droplets and pure gas are separated into gas and liquid, and the fluorinated liquid and pure gas are recovered.

6. The vacuum cleaning method for fluorinated liquid according to claim 5, characterized in that: According to the properties of the fluorinated liquid, the cooling temperature for the fluorinated liquid droplets is adjusted. When the evaporation temperature of the fluorinated liquid is greater than 40°C, the temperature is 20°C. When the evaporation temperature of the fluorinated liquid is less than or equal to 40°C, the temperature is 10°C.

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